CAT.E-155 A. Base Mounted Type. Series VQ Port Metal Seal/Rubber Seal Solenoid Valve

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1 CT.E- ase Mounted Type Series VQ Port Metal Seal/Rubber Seal Solenoid Valve

2 dvanced manifold va the new age of factory au ase Mounted Type Space saving profile Clean space saving design with all pilot valves concentrated to one side with no protrusions in any direction Installation space... % less Installation volume... % less (compared to previous series) Series VQ Compact with large flow capacity (Ideal for driving cylinders up to ø8) ody width: mm Cv factor:. (rubber seal, single unit) High speed response and long life (Metal seal type with light/surge voltage suppressor) VQ ms (single) million cycles VQ 7mS (double) ased on SMC life test conditions ccuracy ±ms For applications which demand high speed, high frequency, long life and accurate response time Optional IP enclosure is dust tight and splash proof Cylinder speed chart Valve width mm Cv factor Rubber seal (Metal seal). (.) Cylinder speed mm/s 7 Cylinder bore size mm 8 8 Pressure:.MPa, Load factor: % Note) Use as a guide for selection, as cylinder speeds will vary depending on the piping equipment. Characteristic values given in this catalog are typical values and not guarantees of performance. Features

3 lve for omation! Table of Contents Features Features, Plug-in/Plug Lead: Single Unit variety of centralized wiring options <Plug-in type> F T Kit (D sub connector) Kit (With individual terminal blocks) L S Kit (Lead wires) IP enclosure available Kit (Serial transmission) Models/Standard Specifications How to Order Valves Dimensions (Plug-in Type) Dimensions (Plug Lead Type) Plug-in Unit How to Order Manifolds Manifold Specifications/Options F Kit (D Sub Connector Kit) T Kit (Terminal lock ox Kit) T Kit (Individual Terminal lock Kit) L Kit (Lead Wire Kit) S Kit (Serial Transmission Kit) P. P. P. P. P. P. P.7 to P. to P. to 8 P.9 to P. to Plug Lead Unit/C Kit T Kit (Terminal block box) IP enclosure available How to Order Manifolds Manifold Specifications/Options Dimensions (C Kit) P.7 P.8 P.9, Individual wiring type <Plug lead type> C Kit (Connector) IP enclosure available wiring types have been standardized to facilitate easy wiring work and maintenance. In addition, of the wiring types are available with IP enclosures. Optional Manifold Parts Option Specifications Construction Manifold Exploded View Manifold Specification Sheets Safety Instructions Port Solenoid Valve Precautions Specific Product Precautions P. to P. P., 7 P.9, P. to P. P.7 to 9 P., Grommet type IP enclosure available Features

4 Plug-in Plug Lead Series VQ ase Mounted Type Plug-in, Plug Lead/Single Unit Models Symbols position single () () (R) (P) (R) position double (metal) () () (R) (P) (R) position double (rubber) () () (R) (P) (R) position closed center () () (R) (P) (R) position exhaust center () () (R) (P) (R) position pressure center () () (R) (P) (R) position double check () () (R) (P) (R) Plug-in unit Plug lead unit Series VQ Number of solenoids Single Double Closed center Exhaust center Pressure center Perfect Model Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Standard Specifications Valve specifications Solenoid specifications position position Valve construction Fluid Max. operating pressure Note ) Single Minimum operating pressure Double position Proof pressure mbient and fluid temperature Lubrication Manual override Impact/Vibration resistance Enclosure Rated coil voltage llowable voltage fluctuation Coil insulation type Power consumption (current value) VDC VDC VC VC VC VC VQ VQ VQ VQ VQ VQ VQ VQ VQ VQ VQ VQ Note ) Effective area mm² (Cv factor) 7. (.) 79. (.) 7. (.) 79. (.). (.). (.) 7. (.) 79. (.). (.). (.). (.). (.) Response time ms Note ) Weight Standard: W or less or less or less or less or less or less or less or less or less or less or less 7 or less Energy saving and C 8 or less or less or less 8 or less or less or less or less or less or less or less or less 78 or less Metal seal Rubber seal ir, Inert gas ir, Inert gas.mpa (.7MPa).MPa.MPa.MPa.MPa.MPa.MPa Note ) kg.9 (.7).8 (.). (.7). (.8). (.7).8 (.). (.7).8 (.). (.7).8 (.).7 (.). (.8) Note ) Cylinder port size Rc/: Value for valve on sub plate Note ) s per JIS87-98 (Value for supply pressure of.mpa, with light and surge voltage suppressor, using clean air. This will change depending on pressure and air quality.) The value when ON for the double type. Note ) Values inside ( ) indicate the weight of plug lead units. The table weights are without sub plate. With sub plate, add.kg for plug-in type and.kg for plug lead type..mpa to C Note ) to C Note ) Not required Non-locking push type/slotted locking type (tool required) optional / m/s² Note) Dust proof (IP type available) VDC, VDC, VC, VC, VC, VC (/Hz) ±% of rated voltage Class equivalent DCW (m), Note ) DC.W (m) DCW (8m), Note ) DC.W (m) Inrush.V (m), Holding.V (m) Inrush.V (.7m), Holding.V (.7m) Inrush.V (m), Holding.V (m) Inrush.V (.7m), Holding.V (.7m) Note ) t low temperatures, use dry air with no condensation. Note ) Impact resistance... No malfunction when tested with a drop tester in the axial direction and at a right angle to the main valve and armature, one time each in both energized and deenergized states. (initial value) Vibration resistance... No malfunction when tested with one sweep of 8. to Hz in the axial direction and at a right angle to the main valve and armature, one time each in both energized and deenergized states. (initial value) Note ) Values inside ( ) are for energy saving (.W) specifications.

5 LOCK ase Mounted Type Single Unit Series VQ ody type : Plug-in sub plate How to Order Valves Piping specifications Side ported ottom ported Port size Without sub plate (for manifold) Rc/ Note ) See page for thread standards. Plug-in VQ Plug lead VQ G Type of actuation position single position closed center () () ()() Enclosure Dust proof Dust tight, Splash proof W (IP) Metal Rubber (R) ( P) (R) position double position exhaust center () () (R)(P)(R) position double position pressure center () () () () (R)(P)(R) Note) See page for details on the double check type. (R) (P)(R) () () (R)(P)(R) (R)(P) (R) position double check ()() (R) (P)(R) Manual override : Non-locking push : Slotted locking type type (tool required) (tool required) Light/Surge voltage suppressor E ore ø. ore ø. With Without light/with surge voltage suppressor PUSH TURN ody type : Plug lead sub plate Coil voltage VC (/Hz) VC (/Hz) VC (/Hz) VC (/Hz) VDC VDC Grommet Electrical entry G Lead wire length.m H Lead wire length.m How to Order Sub Plates VQ P Seal type Metal seal Rubber seal Function Standard type (W) Y Note ) Energy saving type (.W) R Note ) External pilot Note ) pplicable to DC specifications. Note ) See page for details on external pilot specifications. Note ) When specifying more than one option, enter the symbols in alphabetical order. P S Electrical entry Plug-in conduit terminal Plug lead W Enclosure Dust proof Dust tight, Splash proof Piping specifications Side ported ottom ported Port size Rc/ Note ) ottom ports are Rc/. Note ) See page for thread standards. Replacement of pilot valve assembly (Voltage) See pages and 7 for pilot valve assembly part numbers. See page for the replacement method.

6 Series VQ Plug-in Type Conduit terminal position single: VQ Indicator light (Port ) 7.. (Port ) SMC 9 -Rc/8 (ports R, R) VQ Manual override -ø. Mounting hole 7.. ottom ports -Rc/ (ports P,, ) G/ Electrical entry 8. R PE P X R SMC. (Ports, ) M ground screw Rc/8 Port PE Rc/8 External pilot port -Rc/ Ports P,,, R, R position double: VQ position closed center: VQ position exhaust center: VQ position pressure center: VQ position double check: VQ Indicator light 9 (.) 7 (78.) 9. (Port ) 7.. (Port ) Indicator light (Port ) 7.. (Port ) SMC SMC Manual override -ø. Mounting hole Manual override -ø. Mounting hole G/ Electrical entry 8. R PE P X R G/ Electrical entry Rc/8 Port PE Rc/8 External pilot port -Rc/ Ports P,,, R, R Numbers inside ( ) are for metal seal position type 8. Rc/8 Port PE R PE Rc/ Ports P,,, R, R P X R 8. 7 Rc/8 External pilot port

7 ase Mounted Type Single Unit Series VQ Plug Lead Type Grommet position single: VQ - Indicator light G H (Port ) 7.. (Port ) SMC -Rc/8 Ports R, R T VQ Manual override -ø. Mounting hole 7.. ottom ports -Rc/ Ports P,, R PE P X R SMC M ground screw. (Ports, ) Rc/8 Port PE Rc/8 External pilot port -Rc/ Ports P,,, R, R position double: VQ - H G position closed center: VQ - H GH position exhaust center: VQ - position pressure center: VQ - G G H position double check: VQ G - H Indicator light 9. (). (Port ) (78.7) 9.. (Port ) SMC Indicator light (Port )7.. (Port ) SMC -ø. Mounting hole Manual override -ø. Mounting hole Manual override 98 PE X Rc/8 Port PE R P R 8. 7 Rc/8 External pilot port -Rc/ Ports P,,, R, R Rc/8 Port PE R PE P X R 8. 7 Rc/8 External pilot port -Rc/ Ports P,,, R, R Numbers inside ( ) are for metal seal position type

8 Ç Plug-in Series VQ ase Mounted Type Plug-in Unit How to Order Manifolds VVQ Series VQ Manifold Type Plug-in unit Number of stations CM stations Maximum and minimum number of stations depends on the kit. (Refer to the table below) Cylinder port size Rc/8 Rc/ ottom ported Rc/ Mixed sizes Note) Note) Indicate on a manifold specification sheet in case of mixed sizes. 8 F U K Kit designation Option Symbol Kit designation/electrical entry/cable length F Kit (D sub connector kit) Option CD Note ) CD Note ) CU Note ) CU Note ) None Exhaust cleaner for Rc: D side exhaust Exhaust cleaner for Rc /: D side exhaust Exhaust cleaner for Rc: U side exhaust Exhaust cleaner for Rc /: U side exhaust K N Note ) Special wiring specifications (other than double wiring) Name plate (T kit only) S Note ) Direct exhaust with silencer box: oth D and U side exhausts SD Note ) SU Note ) W Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust IP enclosure (except F and T kits) Note ) When specifying more than one option, enter symbols in alphabetical order. Example) -CDK Note ) Combination of [C U U D and [S D ] is not possible. Note ) vailable only with F, L and T kits. Note ) Indicate wiring specifications on a manifold specification sheet. (except L kit) L Kit (Lead wire kit) Indicator light External pilot supply port Type of connection Ç Port R Port P Ports, Port R Note) The drawing shows a VVQ-FDO. Connector entry direction D side U side Electrical entry D U Without cable D side U side Kit D Kit U Cable length.m to D U F D F U Cable length m Kit Kit D U D U Cable length m stations L L D U T Kit (Individual terminal block kit) Kit T With terminal blocks to stations T Kit (Terminal block box kit) ox mounting position D side U side IP available TD TU Terminal block box to stations S Unit mounting position D side U side SD SU Cable length.m Cable length.m Cable length m Kit (Serial transmission kit) O C D F J J K Q R R U V IP available to stations The valve voltage is VDC and it is equipped with light/surge voltage suppressor. IP available Without SI unit With general purpose type SI unit Mitsubishi: MELSECNET/MINI-S data link system Mitsubishi: MELSECNET/MINI-S data link system ( power supply systems) OMRON: SYSUS wire system Sharp: Satellite I/O link system NKE: Simplified wiring ( point output) Sanks: S-LINK system ( point output) Sanks: S-LINK system (8 point output) Fuji Electric: T-LINK mini system DeviceNet and OMRON Compo us/d OMRON: Compo us/s ( points) OMRON: Compo us/s (8 points) JEMNET Mitsubishi: CC link system to 9 stations

9 ase Mounted Type Plug-in Unit Series VQ Manifold Specifications Series ase model Connection type, port location Piping specifications Port size Note) P, R, Max. applicable number of stations pplicable solenoid valve station weight kg VQ VVQ- F kit-d sub connector T kit-terminal block box T kit-individual terminal block kit L kit-lead wire S kit-serial transmission Side ottom Rc/ Option Direct exhaust with silencer box Rc/8 Rc/ Rc/ F, L, T kits stations T kit stations S kit 9 stations VQ VQ. L kit Not including solenoid valve weight Note ) See options on page for details on international standard threads other than Rc threads. Manifold Stations and Effective area mm² (Cv factor) for Individual Operation Type Passage/Stations station stations stations position metal seal VQ P or R, R.7 (.7) 7.7 (.). (.) 7.7 (.) 9. (.) 7.7 (.) position rubber seal VQ Note) For port size Rc/ P or R, R 7.7 (.7) 8. (.) 7. (.7) 8. (.). (.7) 8. (.) Manifold Options lank plate ssembly VVQ-- Individual SUP spacer VVQ-P-- Individual EXH spacer VVQ-R-- EXH blocking plate VVQ-- Throttle valve spacer VVQ-- SUP stop valve spacer VVQ-7- SUP blocking plate VVQ-- Double check spacer with residual pressure release valve VVQ-- PUSH LOCK Release valve spacer VVQ--D Direct exhaust with silencer box D [-S ] U For exhaust cleaner mounting D [-C ] U See pages through for detailed dimensions of each option. See page regarding part numbers for spare parts.

10 Series VQ F Kit (D Sub Connector Kit) Ç Use of the D sub connector permits rationalization and labor savings in making electrical connections. The D sub connector ( pin) conforms with MIL standards, permitting use of commercially available connectors with wide interchangeability. Connector entry can be selected on either the U side or the D side according to the mounting orientation. stations maximum Manifold specifications Piping specifications Series, port Port size location P, R, VQ Side ottom Rc/ Rc/8 Rc/ Rc/ pplicable stations stations max. D Sub Connector Kit (P) L XT-DS- D sub connector cable assemblies can be ordered by inclusion with manifold part numbers. Refer to the section "How to Order Manifolds". 8 SMC 7. Multicore vinyl cable.mm² x C pprox. ø -M. x. Socket side Terminal Nos. D sub connector cable assembly (option) Electrical characteristics Cable Item Characteristics ssembly No. Note length (L) Conductor resistance or less.m XT-DS- Ω/km, C Cable: cores m XT-DS- x WG Withstand voltage m XT-DS- min, VC If a commercially available connector is purchased use a MIL-C-8 standard pin type female connector. Connector manufacturers Fujitsu Ltd. Japan viation Electronics Industry, Ltd. J. S. T. Manufacturing Co., Ltd. Hirose Electric Company Insulation resistance MΩkm, C or more Note) The minimum bending radius of the D sub connector cable is mm. Cable ssembly D sub connector cable assembly wire colors by terminal number Terminal No Lead wire color lack rown Red Orange Yellow Pink lue Purple Gray White White Yellow Orange Yellow Pink lue Purple Gray Orange Red rown Pink Gray lack White Dot marking None None None None None None None White lack lack Red Red Red lack lack White None None lack White White Red Red White None How to Order Manifolds VVQ Manifold type Plug-in unit stations Stations Series VQ stations CM 8 Cylinder port size Rc/8 Rc/ ottom ported Rc/ Mixed sizes F U K Connector entry D U Cable length Without cable Cable length.m Cable length m Cable length m D side entry U side entry Option Symbol CD CD CU CU K Note) S SD SU Option None Exhaust cleaner for Rc: D side exhaust Exhaust cleaner for Rc /: D side exhaust Exhaust cleaner for Rc: U side exhaust Exhaust cleaner for Rc /: U side exhaust Special wiring specifications (other than double wiring) Direct exhaust with silencer box: For D and U side mounting Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust Note ) When specifying more than one option, enter symbols in alphabetical order. Example) -CDK Note ) Combination of [C U ] and [S U] is not possible. D D Note ) Indicate wiring specifications on a manifold specification sheet. 7

11 ase Mounted Type Plug-in Unit Series VQ D side U side Ç... Stations Stations are counted starting from the first station on the D side. Electrical wiring specifications D sub connector Connector terminal No. station stations stations stations stations stations 7 stations 8 stations 9 stations The internal wiring is double stations (connected to SOL. and SOL. ) for all stations regardless of the type of valve or options. stations Optional specifications permit single and double wiring to be stations mixed. See below for details. Note) There is no polarity. It can also be used as a negative common. Standard wiring D sub connector assembly (XT-DS- ) wire colors Terminal No. Polarity Lead wire color Dot marking SOL. ( ) ( + ) lack None SOL. ( ) ( + ) Yellow lack SOL. ( ) ( + ) rown None SOL. ( ) ( + ) Pink lack SOL. ( ) ( + ) Red None SOL. ( ) ( + ) lue White SOL. ( ) ( + ) Orange None SOL. 7 ( ) ( + ) Purple None SOL. ( ) ( + ) Yellow None SOL. 8 ( ) ( + ) Gray None SOL. ( ) ( + ) Pink None SOL. 9 ( ) ( + ) Orange lack SOL. 7 ( ) ( + ) lue None SOL. ( ) ( + ) Red White SOL. 8 ( ) ( + ) Purple White SOL. ( ) ( + ) rown White SOL. 9 ( ) ( + ) Gray lack SOL. ( ) ( + ) Pink Red SOL. ( ) ( + ) White lack SOL. ( ) ( + ) Gray Red SOL. ( ) ( + ) White Red SOL. ( ) ( + ) lack White SOL. ( ) ( + ) Yellow Red SOL. ( ) ( + ) White None COM. ( + ) Note) ( ) Orange Red Positive common Negative common Special Wiring Specifications The internal wiring is double (connected to SOL. and SOL. ) for all stations regardless of the type of valve or options. Optional specifications permit single and double wiring to be mixed.. How to Order dd the option symbol "-K" to the manifold part number, and be sure to indicate the station positions for single and double wiring on a manifold specification sheet. How to Order Valves VQ Series VQ Type of action position single position double position closed center position exhaust center position pressure center position double check Seal type Metal seal Rubber seal E Manual override Function Standard type (W) Y Note ) Energy saving type (.W) R Note ) External pilot Note) pplicable to DC specifications. Note) See page for details on external pilot specifications. Note) When specifying more than one option, enter symbols in alphabetical order. Non-locking push type (tool required) Slotted locking type (tool required) Light/Surge voltage suppressor. Wiring specifications Connections begin with the side solenoid of the first station being connected to terminal No., and continue in the order indicated by the arrows in the drawing without skipping any terminals. However, the maximum number of stations is. With Without light, with surge voltage suppressor Coil voltage VC (/Hz) VC (/Hz) VC (/Hz) VC (/Hz) VDC VDC D sub connector How to Order Manifold ssemblies (Example) Enter part numbers for valves and options to be mounted below the manifold base part number. < Example> D sub connector kit with cable (m) VVQ-FD set Manifold base part number VQ-... sets Valve part number (Stations and ) VQ-... sets Valve part number (Stations and ) VQ-.... set Valve part number (Station ) dd the " " symbol at the beginning of part numbers for solenoid valves, etc., to be mounted. m D side U side Stations COM Enter in order starting from the first station on the D side. When entry of part numbers becomes complicated, indicate on a manifold specification sheet. 8

12 Series VQ F Kit (D Sub Connector Kit) pplicable connector: D sub connector ( pin) (conforms to MIL-C-8) Rc/8 (pilot EXH. port) 7. P PE SMC R R -Rc/ Ports P(SUP), R(EXH) With connector on U side (FU) U side M ground screw Indicator light Manual override L L 8. P= 9 n Stations SMC SMC SMC SMC SMC X X. n-rc/8, / (ports, ) P= D side With connector on D side (FD) R (single, double, position, rubber type) 8. ( position, metal type) -Rc/8 (external pilot port)

13 ase Mounted Type Plug-in Unit Series VQ ottom port diagram With connector on U side (FU) U side 8.. M ground screw X. n-rc/ (ports, ) n SMC SMC SMC SMC SMC X. 8. P = Stations L L P= 8. -Rc/8 (external pilot port). D side With connector on D side (FD) Dimensions L n L L Formulas: L = n + 7, L = n n: Stations ( stations max.)

14 Series VQ T Kit (Terminal lock ox Kit) IP available Enclosure: IP available This type has a small terminal block inside a junction box. The provision of a G/ electrical entry allows connection of conduit fittings. stations maximum (optional stations) station is used for terminal block box mounting. Manifold specifications Series VQ Piping specifications Port, Port size location P, R, Side ottom Rc/ Rc/8 Rc/ Rc/ pplicable stations stations maximum Terminal lock Connection Step. How to remove terminal block cover Loosen the mounting screws (M) and open the terminal block cover. Mounting screw (M) Terminal block cover Step. The diagram on the right shows the terminal block wiring. ll stations are provided with double wiring regardless of the valves which are mounted. Connect each wire to the power supply side, according to the markings provided inside the terminal block. M Screw Gasket mm Step. How to attach the terminal block cover Securely tighten the screws with the torque shown in the table below, after confirming that the gasket is installed correctly. Electrical entry -G/ Proper tightening torque N m.7 to. How to Order Manifolds VVQ Series VQ Manifold type Plug-in unit Stations stations 8 stations Note ) dd station for terminal block box mounting. Note ) The maximum number of stations can be expanded with optional special wiring specifications. See page for details. T K Cylinder port size CM ox mounting position D U D side mounting U side mounting Rc/8 Rc/ ottom ported Rc/ Mixed sizes Option Symbol CD Note ) CD Note ) CU Note ) CU Note ) K Note ) N SD Note ) SU Note ) W Option None Exhaust cleaner for Rc: D side exhaust Exhaust cleaner for Rc /: D side exhaust Exhaust cleaner for Rc: U side exhaust Exhaust cleaner for Rc /: U side exhaust Special wiring specifications (other than double wiring) Name plate Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust IP enclosure Note ) When specifying more than one option, enter in alphabetical order. Example) -CDK D D Note ) Combination of [C U ] and [S U ] is not possible. Note ) Indicate wiring specifications on a manifold specification sheet.

15 ase Mounted Type Plug-in Unit Series VQ -G/ Electrical entry Stations are counted starting from the first station on the D side. Electrical wiring specifications (IP available) COM COM The internal wiring is double (connected to SOL. and SOL. ) for all stations regardless of the type of valve or options. Optional specifications permit single and double wiring to be mixed. Note) There is no polarity. It can also be used as a negative common station stations stations stations stations stations 7 stations 8 stations 9 stations stations Standard wiring Terminal Nos. Polarity SOL. ( ) ( + ) SOL. ( ) ( + ) SOL. ( ) ( + ) SOL. ( ) ( + ) SOL. ( ) ( + ) SOL. ( ) ( + ) SOL. ( ) ( + ) SOL. ( ) ( + ) SOL. ( ) ( + ) SOL. ( ) ( + ) SOL. ( ) ( + ) SOL. ( ) ( + ) SOL. 7 ( ) ( + ) SOL. 7 ( ) ( + ) SOL. 8 ( ) ( + ) SOL. 8 ( ) ( + ) SOL. 9 ( ) ( + ) SOL. 9 ( ) ( + ) SOL. ( ) ( + ) SOL. ( ) ( + ) COM ( + ) ( ) Positive Negative Common Common Special Wiring Specifications The internal wiring is double (connected to SOL. and SOL. ) for all stations regardless of the type of valve or options. Optional specifications permit single and double wiring to be mixed. However, the maximum number of stations is.. How to order dd the option symbol "-K" to the manifold part number, and be sure to indicate the station positions for single and double wiring on a manifold specification sheet.. Wiring specifications Connections begin with the side solenoid of the first station being connected to terminal No., and continue in the order indicated by the arrows in the drawing without skipping any terminals COM COM How to Order Valves VQ Series VQ Type of actuation position single position double position closed center position exhaust center position pressure center position double check Seal type Metal seal Rubber seal Function Y Note ) R Note ) E Manual override Non-locking push type (tool required) Slotted locking type (tool required) Light/Surge voltage suppressor Standard type (W) Energy saving type (.W) External pilot Note ) pplicable to DC specifications. Note ) See page for details on external pilot specifications. Note ) When specifying more than one option, enter symbols in alphabetical order. Enclosure Dust proof Dust tight, Splash proof W (IP) With Without light, with surge voltage suppressor Coil voltage VC (/Hz) VC (/Hz) VC (/Hz) VC (/Hz) VDC VDC How to Order Manifold ssemblies (Example) Enter part numbers for valves and options to be mounted below the manifold base part number. <Example> Terminal block box kit VVQ-TU... set Manifold base part number VQ sets Valve part number (Stations and ) VQ sets Valve part number (Stations and ) VQ-.... set Valve part number (Station ) dd the " " symbol at the beginning of part numbers for solenoid valves, etc., to be mounted. Enter in order starting from the first station on the D side. When entry of part numbers becomes complicated, indicate on a manifold specification sheet. D side U side Stations

16 Series VQ T Kit (Terminal lock ox Kit) Rc/8 (pilot EXH. port) 7. R SMC P PE R -Rc/ Ports P (SUP), R (EXH) -G/ Conduit port U side M ground screw Indicator light Manual override L L 8. P= 9 n Stations SMC SMC SMC SMC X X. n-rc/8, / (ports, ) P= D side R (single, double, position, rubber type) 8. ( position, metal type) -Rc/8 (external pilot port)

17 ase Mounted Type Plug-in Unit Series VQ ottom port diagram -G/ Conduit port M ground screw n-rc/ (ports, ) U side X. n D side SMC SMC SMC SMC X P= Stations L L 8. P= Rc/8 (external pilot port) Dimensions Formulas: L = n + 7, L = n + 9 L n L L n: Stations ( stations max.) Including station for terminal box mounting.

18 Series VQ T Kit (Individual Terminal lock Kit) When the manifold junction cover is opened, terminal blocks are found mounted on the manifold block. Lead wires from the solenoids are connected to the terminals on the bottom side of the terminal blocks. (On a terminal block, lead wires are connected to both the solenoid and solenoid sides, and correspond to the terminal block markings,, and. Refer to the terminal block connection instructions.) stations maximum Terminal lock Connections Manifold specifications Series VQ Piping specifications, port Port size location P, R, Side ottom Rc/ Rc/8,/ Rc/ pplicable stations stations max. Terminal block marking Model VQ side + side VQ side + side side + side VQ side + side side + side Compatible crimp-style terminals:.-s,.y-,.y-n,.y-. There is no polarity (+, ). Junction cover + + Terminal block side side Marking mm Connection M Screw How to Order Manifolds VVQ 8 Series VQ Manifold type Plug-in unit Stations station stations T SD Cylinder port size CM Rc/8 Rc/ ottom ported Rc/ Mixed sizes Option Symbol CD Note ) CD Note ) CU Note ) CU Note ) S SD Note ) SU Note ) Option None Exhaust cleaner for Rc: D side exhaust Exhaust cleaner for Rc /: D side exhaust Exhaust cleaner for Rc: U side exhaust Exhaust cleaner for Rc /: U side exhaust Direct exhaust with silencer box: U and D side exhausts Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust Note ) Combination of [C D ] and [S D U ] is not possible. U

19 ase Mounted Type Plug-in Unit Series VQ U side D side Stations. How to Order Valves VQ Series VQ Type of actuation position single position double position closed center position exhaust center position pressure center position double check Seal type Metal seal Rubber seal E Function Standard type (W) Y Note ) Energy saving type (.W) R Note ) External pilot Note ) pplicable to DC specifications. Note ) See page for details on external pilot specifications. Note ) When specifying more than one option, enter symbols in alphabetical order. Manual override Non-locking push type (tool required) Slotted locking type (tool required) Light/Surge voltage suppressor With Without light, with surge voltage suppressor Coil voltage VC (/Hz) VC (/Hz) VC (/Hz) VC (/Hz) VDC VDC How to Order Manifold ssemblies (Example) Enter part numbers for valves and options to be mounted below the manifold base part number. <Example> Individual terminal block kit VVQ-T.. set Manifold base part number VQ-. sets Valve part number (Stations and ) VQ- sets Valve part number (Stations and ) VQ-... set Valve part number (Station ) dd the " " symbol at the beginning of part numbers for solenoid valves, etc., to be mounted. Enter in order starting from the first station on the D side. When entry of part numbers becomes complicated, indicate on a manifold specification sheet. D side U side Stations

20 Series VQ T Kit (Individual Terminal lock Kit) Rc/8 (pilot EXH. port) 7. P R PE R -G (electrical entry) SMC -Rc/ Ports P (SUP), R (EXH) U side M ground screw Indicator light Manual override L L 8. P= 9 n Stations SMC SMC SMC SMC SMC X X. n-rc/8, / (ports, ) P= D side R (single, double, position, rubber type) 8. ( position, metal type) Rc/8 (external pilot port) 7

21 ase Mounted Type Plug-in Unit Series VQ ottom port diagram 8.. M ground screw n-rc/ (ports, ) U side X. n SMC SMC SMC SMC SMC P= L L P= D side X Stations Rc/8 (external pilot port) Dimensions Formulas: L = n + 7, L = n + 9 L n L L n: Stations ( stations max.) 8

22 Series VQ L Kit (Lead Wire Kit) IP available IP enclosure available. Direct electrical entry type available with two or more stations. Electrical entry can be selected on either the U side or the D side according to the mounting orientation. stations maximum Wiring specifications Manifold specifications Piping specifications Series, port Port size location P, R, VQ Side ottom Rc/ Rc/8 Rc/ Rc/ pplicable stations stations max. Three lead wires are attached to each station regardless of the type of valve which is mounted. The red wire is for COM connection. SOL. COM SOL. ( ) ( + ) ( ) Positive common Single solenoid type Lead wire color ( + ) ( ) lack Red ( + ) White Negative common SOL. COM SOL. ( ) ( + ) ( ) Positive common Double solenoid type Lead wire color ( + ) ( ) lack Red ( + ) White Negative common Lead wire assembly with connector Lead wire length Part No..m VVQ--8-.m VVQ--- m VVQ--- : Number of stations to lack: side solenoid ( ) Station No. Red: COM ( + ) Cable: core x WG White: side solenoid ( ) (not used for single solenoid) For different lead wire lengths, order a lead wire assembly with connector shown in the table on the right. Note) There is no polarity. It can also be used as a negative common. How to Order Manifolds VVQ 8 Series VQ Manifold type Plug-in unit Stations stations stations L U W Cylinder port size CM Electrical entry D U D side entry U side entry Rc/8 Rc/ ottom ported Rc/ Mixed sizes Cable length Cable length.m Cable length.m Cable length m Option Symbol Option None CD Note ) Exhaust cleaner for Rc: D side exhaust CD Note ) Exhaust cleaner for Rc /: D side exhaust CU Note ) Exhaust cleaner for Rc: U side exhaust CU Note ) Exhaust cleaner for Rc /: U side exhaust S Direct exhaust with silencer box: U and D side exhausts SD Note ) Direct exhaust with silencer box: D side exhaust SU Note ) Direct exhaust with silencer box: U side exhaust W IP enclosure D D Note ) Combination of [C U ] and [S U] is not possible. 9

23 ase Mounted Type Plug-in Unit Series VQ D side U side Stations Cable length The drawing shows electrical entry on the D side. Cable length is measured from the solenoid valve body. How to Order Valves VQ Series VQ Type of actuation position single position double position closed center position exhaust center position pressure center position double check Seal type Metal seal Rubber seal E Manual override Function Standard type (W) Y Note ) Energy saving type (.W) R Note ) External pilot Note ) pplicable to DC specifications. Note ) See page for details on external pilot specifications. Note ) When specifying more than one option, enter symbols in alphabetical order. Enclosure W Non-locking push type (tool required) Slotted locking type (tool required) Light/Surge voltage suppressor With Without light, with surge voltage suppressor Coil voltage Dust proof Dust tight, Splash proof (IP) VC (/Hz) VC (/Hz) VC (/Hz) VC (/Hz) VDC VDC How to Order Manifold ssemblies (Example) Enter part numbers for valves and options to be mounted below the manifold base part number. <Example> Lead wire kit with cable (m) VVQ-LD... set Manifold base part number VQ-.. sets Valve part number (Stations and ) VQ-... sets Valve part number (Stations and ) VQ-... set Valve part number (Station ) dd the " " symbol at the beginning of part numbers for solenoid valves, etc., to be mounted. Enter in order starting from the first station on the D side. When entry of part numbers becomes complicated, indicate on a manifold specification sheet. D side U side Stations

24 Series VQ L Kit (Lead Wire Kit) Rc/8 (pilot EXH. port) 7. P PE R R -G (electrical entry) SMC -Rc/ Ports P(SUP), R(EXH) U side Station No. Electrical entry on U side (LU) Cable length U L D : mm U L D : mm U L D : mm 8.. M ground screw Indicator light Manual override L L 8. P= 9 n Stations SMC SMC SMC SMC SMC X X. n-rc/8, / (ports, ) P= Cable length D side Electrical entry on D side (LD) R (single, double, position, rubber type) 8. ( position, metal type) Rc/8 (external pilot port)

25 ase Mounted Type Plug-in Unit Series VQ ottom port diagram 8.. M ground screw Lead wire length U L D : mm U L D : mm U L D : mm n-rc/ (ports, ) Station No. Electrical entry on U side (LU) U side X. n SMC SMC SMC SMC SMC P= L L P= Cable length D side X Stations 8. -Rc/8 (external pilot port) Electrical entry on D side (LD) Dimensions Formulas: L = n + 7, L = n + 9 L n L L n: Stations ( stations max.)

26 Series VQ S Kit (Serial Transmission Kit) The serial transmission system minimizes wiring and saves space, while also reducing labor for wiring connections. The system is available in types such as the S type for equipment with a maximum of input/output points (a general purpose type for small scale systems), the S type capable of controlling up to points of input/output (Mitsubishi Electric compatible), the SC type (OMRON compatible), the SD type (Sharp compatible, points max.), the SF type (NKE compatible, 8 points max.), the SJ type (Sanks compatible), the SK type (Fuji Electric compatible), the SQ type (OMRON Compo us/d compatible), and the SR type (OMRON Compo us/s compatible). 9 stations max. (optional stations, indicate to stations on a manifold specification sheet) One station is used for mounting the serial unit. D side U side...stations Stations are counted from station on the D side. The internal wiring is double (connected to SOL. and SOL. ) for all stations regardless of the type of valve or options. Optional specifications permit single and double wiring to be mixed. Item External power supply Current consumption (inside unit) Specifications VDC + %, % S, S, S, SD, SF, SJ, SK, SQ, SR, SV:. SC:. Manifold specifications Terminal block (LED) nomenclature Note Series VQ LED name TRD RUN/ERR, port location Side ottom S type Series EX compatible RUN ERR TRD DDRESS NO. V V S S SG R R FG Piping specifications Port size P, R, Rc/ Contents Lights during data reception links during normal data reception, lights when abnormal T unit Connection to PLC manufacturer's I/O card enables serial transmission. EX-TM For Mitsubishi Electric EX-TT. For OMRON EX-TFU. For Fuji Electric EX-T.. General purpose T units have control points per unit output points Rc/8 Rc/ Rc/ IP available pplicable stations 9 stations max. S type Mitsubishi Electric MELSECNET/MINI-S data link compatible LED name POWER RUN RD SD ERR Contents Lights when power is turned ON Lights when data traffic with the master station is normal Lights when sending data Lights when receiving data Lights for error in received data, off when normal Refer to the separate technical instruction manual for details on specifications and handling. V POWER RUN SD RD ERR V STTION NO. SD SD SG RD RD FG Master station Sequencer made by Mitsubishi Electric MELSEC- series J7PT-S, J7T-S SJ7PT-S stations max., connected to remote I/O station ( points max.) output points, stations occupied ù ù How to Order Manifolds VVQ Series VQ Manifold type Plug-in unit Stations stations 9 9 stations 8 Note) dd one station for mounting of the serial unit. O C D F J J K Q R R U V Type S Without SI unit With general purpose SI unit Mitsubishi Electric MELSECNET/MINI-S data link system Mitsubishi Electric MELSECNET/MINI-S data link system ( power supply systems) OMRON SYSUS wire system Sharp Satellite I/O link system NKE simplified wiring system ( point output) Sanks S-LINK system ( point output) Sanks S-LINK system (8 point output) Fuji Electric T link mini system DeviceNet, OMRON Compo us/d OMRON Compo us/s ( points) OMRON Compo us/s (8 points) JEMNET Mitsubishi Electric CC link system Option Symbol Option None CD Note ) Exhaust cleaner for Rc: D side exhaust CD Note ) Exhaust cleaner for Rc/: D side exhaust CU Note ) Exhaust cleaner for Rc: U side exhaust CU Note ) Exhaust cleaner for Rc/: U side exhaust K Note ) Special wiring specifications (other than double wiring) SD Note ) Direct exhaust with silencer box: D side exhaust SU Note ) Direct exhaust with silencer box: U side exhaust W IP enclosure Note ) When specifying more than one option, enter symbols in alphabetical order. Example) -CDK D D Note ) Combination of [C U ] and [S U ] is not possible. Note ) Indicate wiring specifications on a manifold specification sheet. CM Cylinder port size Rc/8 Rc/ ottom ported Rc/ Mixed sizes SI unit mounting position D U D side mounting U side mounting

27 ase Mounted Type Plug-in Unit Series VQ Correspondence of SI unit output numbers and solenoid valve coils Since mixed wiring is optional, use a manifold specifiction sheet. <Wiring example > Double wiring (standard) <Wiring example > Single/Double mixed wiring (optional) D side U side D side U side SI unit output no. Double Double Single Single Single Double Single Single void void void void void Stations SI unit 7 8 SI unit output no. Double Double Single Single Double Double Double 9 Single Single Single Single Stations SI unit SC type OMRON SYSUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature LED name RUN T/R ERR RUN ERR TRD DDRESS NO. V V + + FG Contents Lights when transmission is normal and PLC is in operation mode links when transmission is normal Lights when transmission is abnormal LED name POWER RUN V ERROR R.SET HOLD POWER RUN SD RD ERR V ù STTION NO. L L SG L L SG Contents Lights when power is turned ON Lights when power is ON and slave stations are operating normally Lights when slave station switch setting is abnormal, communication is abnormal, master station's PLC is stopped or slave station unit malfunctions Lights with control input to the master station ù Note Master station unit OMRON PLC SYSMCC (CV) series Types C-RM and CH-RM units max., transmission terminal connection ( points max.) output points Master station unit Sharp PLC New Satellite W Series ZW-LM New Satellite JW Series JW-LM, JW-LM units max., connected to I/O slave station ( points max.) output points How to Order Valves VQ Series VQ Type of actuation position single position double position closed center position exhaust center position pressure center position double check Seal type Metal seal Rubber seal Function Standard type (W) Y Note ) Energy saving type (.W) R Note ) External pilot Note ) pplicable to DC specifications. Note ) See page for details on external pilot specifications. Note ) When specifying more than one option, enter symbols in alphabetical order. Enclosure Dust proof Dust tight/jet proof W (IP) Manual override Non-locking push type (tool required) Slotted locking type (tool required) Coil voltage VDC How to Order Manifold ssemblies (Example) Enter part numbers for valves and options to be mounted below the manifold base part number. <Example> Serial transmission unit VVQ-SU... set Manifold base part number VQ-... sets Valve part number (Stations and ) VQ-... sets Valve part number (Stations and ) VQ-... set Valve part number (Station ) dd the " " symbol at the beginning of part numbers for solenoid valves, etc., to be mounted. Enter in order starting from the first station on the D side. When entry of part numbers becomes complicated, indicate on a manifold specification sheet. D side U side... Stations

28 TM Series VQ S Kit (Serial Transmission Kit) Rc/8 (pilot EXH. port) 7. P PE R SMC R -Rc/ Ports P (SUP), R (EXH) U side G/ Note) Conduit port 8.. M ground screw D side Indicator light Manual override L L P= 8. R (single, double, position, rubber type) 8. ( position, metal type) 9 n Stations SMC SMC SMC SMC 7 X X 7 9. n-rc/8,/ (ports, ) P=. -Rc/8 (external pilot port) Note) In case of two power supply systems (separate SI unit and solenoid drive power supplies), there are conduit ports (G/) in four locations. Other models have conduit ports in two locations.

29 ase Mounted Type Plug-in Unit Series VQ ottom port diagram U side -G/ Note) Conduit port 8.. M ground screw n-rc/ (ports, ) X. n D side SMC SMC SMC SMC X P= Stations L L P= Rc/8 (external pilot port) Dimensions Formulas: L = n + 7, L = n + 9 L n L L n: Stations (9 stations max.) Including station for SI unit box mounting

30 Plug Lead Series VQ ase Mounted Type Plug Lead Unit: C Kit (Connector kit) VVQ CM Series VQ Manifold type Plug lead unit Stations stations stations Cylinder port size Rc/8 Rc/ ottom ported Rc/ Mixed sizes 8 C How to Order Manifolds W Kit designation C Kit (connector) Option Symbol Option None CD Note ) Exhaust cleaner for Rc: D side exhaust CD Note ) Exhaust cleaner for Rc /: D side exhaust CU Note ) Exhaust cleaner for Rc: U side exhaust CU Note ) Exhaust cleaner for Rc /: U side exhaust S Direct exhaust with silencer box: D and U side exhausts SD Note ) Direct exhaust with silencer box: D side exhaust SU Note ) Direct exhaust with silencer box: U side exhaust W P enclosure Note) Combination of [C U ] and [S U] is not possible. D D See page (grommet type) for wiring specifications. C Connector kit stations max. How to Order Valves VQ Series VQ 7 Type of actuation position single position double position closed center position exhaust center position pressure center position double check G Seal type Metal seal Rubber seal Function Standard type (W) Y Note ) Energy saving type (.W) R Note ) External pilot Note ) pplicable to DC specifications. Note ) See page for details on external pilot specifications. Note ) When specifying more than one option, enter symbols in alphabetical order. Coil voltage VC (/Hz) VC (/Hz) VC (/Hz) VC (/Hz) VDC VDC Grommet Manual override - Non-locking push type (tool required) Electrical entry G Lead wire length.m Enclosure Dust proof W Dust tight, Splash proof (IP) - Slotted locking type (tool required) Light/Surge voltage suppressor E H Lead wire length.m With Without light, with surge voltage suppressor How to Order Manifold ssemblies (Example) Enter part numbers for valves and options to be mounted below the manifold base part number. <Example> Connector kit WQ-C. set Manifold base part number VQ-G.. sets Valve part number (Stations and ) VQ-G.. sets VQ-G... set Valve part number (Stations and ) Valve part number (Station ) dd the " " symbol at the beginning of part numbers for solenoid valves, etc., to be mounted. Enter in order starting from the first station on the D side. When entry of part numbers becomes complicated, indicate on a manifold specification sheet. D side U side Stations

31 ase Mounted Type Plug Lead Unit Series VQ Manifold Specifications Piping specifications Series ase model Type of connection Ports, location Port size Note) P, R, Max. applicable stations pplicable solenoid valve station weight kg VQ VVQ C kit-grommet Side ottom Rc/ Optional Direct exhaust with silencer box Rc/ 8 Rc/ Rc/ to stations VQ VQ.7 Not including solenoid valve weight Note) See options on page for details on international thread standards other than Rc threads. Manifold Stations and Effective area mm² (Cv factor) for Individual Operation Model Passage/Stations Station Station Station position metal seal VQ P or R, R.7 (.7) 7.7 (.). (.) 7.7 (.) 9. (.) 7.7 (.) position rubber seal VQ P or R, R 7.7 (.7) 8. (.) 7. (.7) 8. (.). (.7) 8. (.) Note) For port size Rc/ Manifold Options lank plate assembly VVQ-- Individual EXH spacer VVQ-R-- Individual SUP spacer VVQ-P-- EXH blocking plate VVQ-- Throttle valve spacer VVQ-- SUP stop valve spacer VVQ-7- SUP blocking plate VVQ-- Double check spacer with residual pressure release valve VVQ-- PUSH LOCK Release valve spacer VVQ--D Direct exhaust with silencer box D [-S ] U For exhaust cleaner mounting D [-C ] U See pages through for detailed dimensions of each option. See page regarding part numbers for spare parts. 8

32 Series VQ C Kit (Connector Kit) Rc/8 (pilot EXH. port) 7. SMC P R R PE -Rc/ Ports P (SUP), R (EXH) Uside M ground screw 9 L L 8. P=. Manual override Indicator light n Stations SMC SMC SMC SMC SMC X X n-rc/8, / (ports, ) P= 8.. D side Cable length ( or mm) R. 9. (single, double, position, rubber type) ( position, metal type) -Rc/8 (external pilot port)

33 ase Mounted Type Plug Lead Unit Series VQ ottom port diagram U side 8.. M ground screw. n-rc/ (ports, ) SMC SMC SMC SMC SMC X X. 8 P= 8. n Stations L L P= 8. Cable length ( or mm) D side -Rc/8 (external pilot port) Dimensions Formulas: L = n + 7, L = n + 9 L n L L n: Stations ( stations max.)

34 Series VQ Optional Manifold Parts lank plate assembly VVQ-- (Plug-in type) VVQ-- (Plug lead type) 7 (plug-in type). (plug lead type) This is mounted on a manifold block when a valve is removed for maintenance or when installation of an additional valve is planned for the future, etc. () () (R)(P)(R) Circuit diagram 9.8 Plug-in type Plug lead type Individual SUP spacer VVQ-P-- VVQ-P-- (Plug-in type) (Plug lead type) y mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. (P) () 79 (plug-in type) (plug lead type). P (P') () : Rc/8 : Rc/ (R) (R) Circuit diagram Plug-in type Plug lead type Individual EXH spacer VVQ-R-- VVQ-R-- (Plug-in type) (Plug lead type) y mounting individual EXH spacers on a manifold block, it is possible to provide individual exhaust ports for each valve. (common EXH type) (P) () 79 (plug-in type) (plug lead type). R (R') () : Rc/8 : Rc/ (R) (R) Circuit diagram Plug-in type Plug lead type

35 Throttle valve spacer VVQ-- (plug-in type) VVQ-- (plug lead type) (P) () () 79 (plug-in type) (plug lead type). P US H ase Mounted Type Series VQ throttle valve spacer is mounted on a manifold block to control cylinder speed by throttling exhaust air flow. SLOW (R) (R) Circuit diagram Plug-in type Plug lead type SUP stop valve spacer VVQ-7- (plug-in type) VVQ-7- (plug lead type) SUP stop valve spacer is mounted on a manifold block, making it possible to individually shut off supply air to each valve. (P) () () 79 (plug-in type) (plug lead type). LOCK FREE (R) (R) Circuit diagram Plug-in type Plug lead type Release valve spacer: For D side mounting VVQ--D (plug-in type) VVQ--D (plug lead type) VQ (single) valve can be used as an air release valve by combining it with a release valve spacer. Note ) position double and position cannot be mounted. (R) (R) P 79 (plug-in type) (plug lead type). Po (P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ-- EXH blocking plate VVQ When or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures R P R SUP passage blocked R P R EXH passages blocked R P R SUP/EXH passages blocked < SUP blocking plate > < EXH blocking plate >

36 Series VQ Optional Manifold Parts Double check spacer with residual pressure release valve VVQ-- (plug-in type) VVQ-- (plug lead type) Can hold an intermediate cylinder position for an extended time When combined with a double check spacer with built-in double check valve, it is unaffected by air leakage between the spool valves, making it possible to hold a cylinder intermediate stopping position for an extended time. Further, a combination of a position type (VQ ) and a double check spacer can be used for drop prevention. Plug-in type Specifications Double check spacer part no. pplicable solenoid valve One solenoid P energized Leakage N cm³/min P oth solenoids unenergized Supply pressure:.mpa VVQ-- Intermediate stop Drop prevention VQ E E E E E E VQ or less or less Handling Precautions In the case of a position double check valve (VQ ), check to be sure there are no leaks in the piping and fittings, etc., between the valve and cylinder using a solution such as a neutral detergent. lso check for leakage from the cylinder and piston seal areas. If there is leakage, the cylinder may move immediately without stopping at the intermediate position when the valve is deenergized. Use caution, as excessive throttling of the perfect check spacer exhaust can cause a loss of intermediate stopping accuracy and malfunction. Combination with a position VQ is not possible. Operate in a range such that the cylinder pressure is less than two times the supply pressure. Plug lead type LOCK PUSH PUSH LOCK Direct exhaust with silencer box VVQ - -SD (D side exhaust) VVQ - -SU (U side exhaust) VVQ - -S (double side exhaust) VQ Exhaust ports are located on the top side of the manifold end plate.the built-in silencer is highly effective for noise reduction. (Noise reduction of d or more) Note ) If a large amount of drainage is generated at the air supply, note that drainage will be discharged together with the exhaust air SMC SMC R P R 9 X PE SD type Note) The drawing shows a VVQ- -SD SU type

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