5 Port Pilot Solenoid Valve Metal Seal. Configuration Voltage Electrical entry Option. Standard. 100V AC50/60Hz 200V AC50/60Hz 24V DC.

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1 5 Port Pilot Solenoid Valve Metal Seal SeriesVFS Models and Variations Body ported Base mounted Series VFS000 VFS2000 VFS3000 VFS2000 VFS3000 VFS4000 VFS5000 Port Size Effective area (mm 2 ) (Nl/min) 8: 9.0 (49) : 6.2 (883) : 8 (98) Configuration Voltage Electrical entry Option (Indicator light and surge suppressor) 2 position single 2 position double 3 position closed centre 3 position exhaust centre : 32.4 (777) 3 position pressure centre : 36.0 (963) : 2.6 (687) : 5 (85) 2 position single 2 position double 3 position closed centre 3 position double check Standard 00V AC50/60Hz 200V AC50/60Hz 24V DC Option 0 to 20V AC50/60Hz 220V AC50/60Hz 240V AC50/60Hz 2V DC 00V DC Standard 00V AC50/60Hz 3 position exhaust centre 200V AC50/60Hz : 32.4 (777) 24V DC : 36.0 (963) Option 3 position pressure centre : 59.4 (3239) : 64.8 (3533) 3 8 : 78.7 (439) 2 : 97.2 (5300) 3 4 : 02.6 (5595) 0 to 20V AC50/60Hz 220V AC50/60Hz 240V AC50/60Hz 2V DC 00V DC DIN connector (D)(Y) Conduit terminal (F) DIN connector (D)(Y) Conduit terminal (F) DIN connector (D)(Y) With indicator light and surge voltage suppressor Din connector (DZ)(YZ) Manual override *Locking style (Lever) is not available for direct mount series VFS2000, With indicator light and surge voltage suppressor Din connector (DZ)(YZ) With indicator light and surge voltage suppressor Conduit terminal (FZ) Din connector (DZ)(YZ) Non-locking push style (Flush) Non-locking push style (Extended) Locking style (Slotted) Locking style * (Lever) Non-locking push style (Flush) Non-locking push style (Extended) Locking style (Slotted) Locking style (Lever) SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 VFS : 62 (8833) : 80 (985) 2 position single 2 position double Non-locking push style (Flush).7-

2 Series VFS Manifold Variations Manifold Type Bar base Stacking base Insert plug with lead wire With terminal block With multiconnector With D-sub connector Body Ported Base Mounted Base Mounted Non VFS000 VFS2000 VFS3000 VFS2000 VFS3000 VFS4000 VFS5000 VFS2000 VFS3000 VFS4000 VFS5000 With terminal block Bar base (Series VFS000, 2000) Individual pilot exhaust Insert plug with lead wire Common pilot exhaust With multi-connector With D-sub connector DIN connector.7-2 Bottom porting is optional.

3 Series VFS Manifold Options Manifold Optional Parts With exhaust cleaner With control unit Serial interface unit Individual SUP spacer Individual EXH spacer SUP block disk EXH block disk Interface speed control Interface regulator Air shutoff valve spacer Air release valve spacer Double check spacer Blank plate SV SY SYJ SX () VK () VZ () VF () VFR VP7 VQC SQ VQ With exhaust cleaner Individual SUP spacer Interface regulator VQ4 VQ5 VQZ Individual EXH spacer Air shutoff valve spacer VQD VFS With control unit VS Air release valve spacer VS7 SUP/EXH block disk VQ7 Serial interface unit Interface speed control Double check spacer Note ) Available..7-3

4 Series VFS Precautions Be sure to read before handling. Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. Caution Light/Surge Voltage Suppressor/Electrical Entry Body Ported Series VFS000, 2000, 3000 Light/Surge Voltage Suppressor AC and 00V DC Single Base Mounted Light/Surge Voltage Suppressor In the case with surge voltage suppressor, surge voltage absorption device ZNR is attached to AC power. AC and 00V DC Series VFS2000 Single Unit Pilot valve When changing rated voltage and electrical entry etc., pilot valve assembly can be exchanged since this is a plug-in style. Double Single 24V DC or less Single Double Wiring In the case of DIN connector and Terminal block (with indicator light/surge voltage suppressor), the interior wiring is shown below. With DIN connector board With terminal block board Applicable terminal:.25-3,.25-3s,.25y-3n,.25y- 3S. But, in the case of DIN connector board, it is not a terminal structure. Double 24V DC or less Single Double Wiring Valve/Sub-plate porting plug-in : T Conduit with terminal (with terminal block) Remove junction cover q of subplate, and you can see plug-in terminal block board w (Part No. NVF A-) attached to the inside of the subplate. The following markings are on the terminal block board. Connect with corresponding power side. Designation Terminal block board marking Solenoid A-side Solenoid B-side A B No polarity When ground wiring and COM wiring are required, please specify separately. Applicable terminal.25-3,.25-3s,.25y-3n,.25y-3s No polarity To Change Direction of DIN Connector To change direction of DIN connector retaining screw, pull off outer cover, rotate connector board through 80. Replace cover and tighten screw. Changing Direction of Electrical Entry and Manual Override (Series VFS000 only) Loosen the set screw (M3-2pcs.), take out pilot operator, turn solenoid valve80 o degrees to change the direction of lead wire and manual override. (Possible on Series VFS000 only.).7-4 Manual Position How to Exchange Non Solenoid valve Loosen 3 set screws (hexagonal socket head cap screw M3 X 3) and pull solenoid valve out vertically, otherwise it may cause damage to the solenoid valve. Never remove a valve at an angle. When mounting solenoid valve onto the base, plug pin ass'y (base-side) into receptacle ass'y (body-side) vertically. Valve/Sub-plate porting non plug-in: D G type: Use lead wire from solenoid to connect with power side. E, T, D-type: In the case of a DIN connector and terminal block (with light/surge voltage suppressor), the interior wiring is shown below. Please connect with corresponding power side. With DIN connector board No polarity With terminal block board Applicable terminal:.25-3,.25-3s,.25y-3n,.25y- 3S. But in the case of with DIN connector board, is not a terminal structure. Changing Direction of DIN Connector/Cable Entry Unscrew retaining screw, pull off outer cover, rotate connector board through 80. Replace cover and tighten screw. Applicable cable: O. D. ø6 to ø8.

5 Series VFS Caution Light/Surge Voltage Suppressor/Electrical Entry Base Mounted Light/Surge Voltage Suppressor In the case of voltage suppressor, surge voltage absorption element is attached to terminal block on body area. How to Exchange Solenoid valve Loosen set screw and take solenoid valve out vertically, otherwise it may cause damage to the solenoid valve. Never remove a valve at an angle. When mounting solenoid valve onto the base, plug pin ass'y (base-side) into receptacle ass'y (body-side) vertically. Pilot valve When changing the rated voltage, electrical entry, etc., pilot valve ass'y can be exchanged easily since this is plug-in style. Then, when changing the rated voltage with light/surge voltage suppressor, change of light/surge voltage suppressor substrate is also needed. So, order together with pilot valve assembly. Light and surge voltage suppressor substrate part No. VFS3000 VFS4000 VFS5000 VFS6000 AC and 00V DC or more SOL 24V DC or less SOL No polarity VFS3000-0A- VF4000-9A- AXT627-7A- VF4000-9A- - : Voltage Series VFS3000, 4000, 5000, 6000 Wiring DIN connector Male pin terminal of DIN connector block board of solenoid valve and wires as shown below. Please connect each valve to corresponding terminal block on connector. DIN connector (Wiring) No polarity applies. AC and 00V DC or more. Single Double 24V DC or less Single Double 2 3 A side B side COM Ground Cabtire cable Applicable cable O. D.: ø6.8 to ø.5 Applicable terminal Applicable terminal on block board: 3 (kinds).25y-3l, s,.25-4m Connector/Clamping torque Set screw 6kgf-cm Terminal screw 9kgf-cm Incorrect common (DIN connector No.3) causes damage on power side circut. Single Unit (with terminal) If removing the junction cover q on the sub-plate, there appears the plug-in style terminal block w attached to the inside of sub-plate. The following marking are on the terminal block. Connect with corresponding power side. Terminal block Marking Solenoid A side Solenoid B side A B Applicable terminal VFS3000:.25-3,.25-3S,.25Y-3N,.25Y-3S VFS4000: M,.25Y-3L,.25Y-3M VFS5000:.25-4,.25-4M VFS6000: M,.25Y-3L,.25-3M No polarity applies..7-5 SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

6 Series VFS Caution Maintenance qa lot of carbon powder and oil waste from air sources (mostly from compressor) entering into the valve sometimes can lead to increased sliding resistance at the switching spool and cause valve malfunction. In the worst case, spool can adhere to the valve. Therefore supply air should be kept clean. Also please note that if pressurized states on SUP is left for a long time with inferior air quality, carbon powder and oil waste in the compressed air accumulate in the clearance of spool and the sleeve, and can cause the spool to adhere to the valve. The remedy for this case is to check the compressor lubrication oil and find out the least oxidizing compressor lubrication oil. Meanwhile, a high filtration Mist Separator (Series AM) installed on the back of regular filter (Series AF) can prevent foreign particles from entering into the valve. win case foreign matter from the air source adheres to spool and sleeve, disassemble the adapter plate section and end plate section (return spring insert section). Then, take out spool and sleeve from valve and clean them with trichlene or freon solutions, when cleaning, prevent O rings from touching cleaning solutions. ewhen disassembling and re-assembling, please ensure that all components are in proper positions. Prevent gaskets from slipping, and clamp bolts down equally. Use torques listed below when mounting pilot valves and solenoid valve bodies. Interface Regulator Specifications Model() Applicable solenoid valve series Regulation Proof pressure Max. operating pressure Set pressure range Ambient and fluid temperature Gauge connecting port Weight (kg) Effective area of the supply side (mm 2 ) (3) S at P=0.7MPa, P2=0.5MPa Effective area of the exhaust side (mm 2 ) (3) S at P2=0.5MPa P P A B A B EA EB Flow Characteristics (P A) ARBF2000 ARBF3050 ARBF4050 ARBF5050 VFS2000 VFS3000 VFS4000 VFS5000 P A B P A B P A B P.5MPa.0MPa 0. to 0.83MPa(2) 5 to 60 o C M5 X 0.8 / Note ) Set within the operating pressure range of solenoid valve. Note 2) Synthesized effective area with solenoid valve 2 position single style. Note 3) To supply air to Interface Regulator P port is the only supply port except for when used with a reverse pressure valve. To combine a pressure center valve and the A and B port pressure reduction of a spacer style regulator, use the ARBF3000, 4000, or 5000 model. To combine a reverse pressure valve and a spacer style regulator, use the ARBF3000, 4000, or 5000 model. The P port pressure reduction cannot be used. To combine a double check valve and interface regulator, use the manifold or the sub-plate as a reference, and stack them in the order of the double check spacer, the interface regulator and the valve. A closed centre valve cannot be used combined with an interface regulator for applications of cylinder intermediate stops as there is leakage from the relief port of the interface regulator. JIS s P port regulation A port regulation B port regulation (Conditions: Supply pressure 0.7MPa. When 2 position solenoid valve is mounted.) ARBF P Pilot valve assembly Set screw M3 Correct clamping torque (Nm) 4.5 to 6 ARBF P ARBF A Solenoid valve body Set screw Correct clamping torque (Nm) M3 8 to 2 M4 4 to 25 M5 28 to 50 How to Calculate Flow Rate See p.0-36 for calculating flow rate. ARBF P ARBF A ARBF P ARBF A.7-6

7 Series VFS Caution Wiring Manifold/ 0 Type Insert Plug with Lead Wire 0T Type with Terminal Block Series VFS2000 (Only VFS2000) (Insert plug with lead wire is not available for VF3000, 4000, and 5000.) How To Remove Junction Cover (0 Type) Turn the knob w of junction cover q on the manifold block side by hand or slotted screwdriver to the C O direction (counterclockwise) 90. While holding the knob and upper part of junction cover, pull outward to remove junction cover. When reassembling, do the opposite. Wiring The insert plug q is attached to the manifold block and lead wire is plugged in with valve side as shown in the following list. Single solenoid: AXT624-52A-S- Double solenoid: AXT624-52A-D- Please connect with corresponding power side. Power AC DC Valve Single solenoid Double solenoid No polarity applies. Lead wire length is m. Solenoid A Solenoid B Red, Black Red, Black Brown, White How To Use Insert Plug When removing insert plug q from manifold base, push the lever area w of insert plug downward with thumb and pull it together with the lead wire e outward. When placing the insert plug q into the manifold base, push the lever area of insert plug with thumb and plug it in its place in the receptacle housing r horizontally. After plugging, pull lead wire out a little bit to ensure that insert plug is secure. Series VFS2000 Remove junction cover of manifold, exposing terminal block attached to the manifold block. Lead wires from solenoid valve are connected with the terminals on upper side of terminal block. (On the terminal block, lead wire is connected with both A and B sides of solenoid valve in accordance with the corresponding markings A and B on the block.) Connect each lead wire of power side corresponding to respective solenoid valve on the lower terminal block. Model Marking A COM B VFS200 VFS VFS A side A side A side COM COM COM B side B side Applicable terminal:.25-3,.25-3s,.25y-3n,.25y-3s Plugging COM bridge (Part No. AXT625-73: 5 stations) in between each + COM on the block board will make the specifications of all the stations + COM and enables you to understand the wiring process. No polarity. Series VFS3000 Model Marking A COM B VFS300 VFS VFS A side A side A side COM COM COM B side B side Applicable terminal: m,.25y-3l,.25-3m No polarlity. VFS 3000 has the marking + COM on the block board, but COM specification is also available. SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Series VFS4000, 5000 Marking Model 4 VFS VFS A A side A side A A side A side VFS A side A side B side VFS Applicable terminal: m,.25y-3l,.25y-3m No polarity B B side B B side B side.7-7

8 Series VFS Caution Lead Wire Wiring 0C Type with Multi-connector Manifold/ 0F Type with D-sub Connector Series VFS2000, 3000, 4000, 5000 Wiring Manifold interior wiring is in accordance with + COM specifications and is connected with both the A side and B side of the solenoid valve by a receptacle terminal as shown below. Diagram U side Station Series VFS2000, 3000, 4000, 5000 Wiring Manifold interior wiring is in accordance with + COM specifications and is connected with both the A side and B side of the solenoid valve by the receptacle terminal as shown below. Diagram 2 U side Station D side D side Manifold Interior Wiring Manifold Interior Wiring Standard wiring Connector terminal No. Wiring with control unit Connector terminal No. Standard wiring Connector terminal No. Wiring with control unit Connector terminal No. Multi-connector D-sub connector Note ) Maximum stations: 8 Note 2) No polarity Note 3) Indications of stations are one station from D side regardless of the connector mounting side, D or U. Applicable Plug Assembly (Option) Assembly part No. VVFS A- VVFS A-2 VVFS A-3 VVFS A-4 VVFS A-5 VVFS A-6 VVFS A-7 Wire Color Table.7-8 Cable length.5m 3m 5m 7m 0m 5m 20m Components AMP Japan Plug: ( pc.) Cable clamp: ( pc.) Socket: (24 pcs.) Cable: VCTF24-wire, 0.75mm 2 Option Terminal No Lead wire colour!! " " # # $ $ % % & & ' '!0!0!!!2!2 Dot marking # % " $ ' #!3!0 & $ Orange, Black,!Green, "Red, #Blue, $Yellow, %Brown, &White, 'Pink,!0Grey,!Sky blue,!2bright green,!3purple Note ) Maximum stations: 8 Note 2) No polarity Note 3) Indications of stations are one station from D side regardless of the connector mounting side, D or U. Applicable Plug Assembly (Option) Assembly part No. GVVZS3000-2A-S GVVZS3000-2A-2S GVVZS3000-2A-3S GVVZS3000-2A-4S GVVZS3000-2A-5S Wire Color Table Cable length m 3m 5m 8m 20m Components Plug: MIL standard D type connector 25 terminals Cable: 25-wire, 0.3mm 2 Terminal No Lead wire colour Dot marking )Orange, 2)Black, 3)Green, 4)Red, 5)Blue, 6)Yellow, 7)Brown, 8)White, 9)Pink, 0)Grey, )Sky blue, 2)Bright green, 3)Purple

9 5 Port Pilot/Metal Seal Body Ported SeriesVFS000 Compact and Large Flow Capacity: 49Nl/min Small Power Consumption/.8W DC VFS320- D-0 VFS220- E-0 JIS VFS20- G-0-F VFS20- G-0 2 position 3 position Single Closed centre Model Configuration Model Effective area Port size (mm 2 ) (Nl/min) 2 position Single VFS20 VFS (49) Double VFS220 VFS (49) Closed centre VFS320 VFS (393) 3 position Exhaust centre VFS420 VFS (49) Pressure centre VFS520 VFS (48) Standard Specifications Option Specifications Max. operating cycle (CPM) () Response Weight time (ms) (2) (kgf) (3) 5 or less 3 or less 20 or less 20 or less 20 or less Note ) According to JISB8375 (Once per 30 days) for the minumum operating frequency. Note 2) According to JISB (The valve at supply pressure 0.5MPa.) Note 3) In case of a grommet. Note 4) The factors of "Note )" and "Note 2)" are achieved in controlled clean air. Fuild Max. operating pressure 2 position Min. operating pressure 3 position Valve Proof pressure Ambient and fluid temperature Lubrication Pilot valve manual override Shock/vibration resistance Protection structure Rated voltage Allowance voltage Solenoid Coil insulation Apparent power AC (Power consumption) Power consumption DC Electrical entry Inrush Holding Air and inert gas.0mpa 0.MPa 0.5MPa.5MPa 0 to 60 o C () Not required (2) Non-locking push style (Flush) 50/50m/s 2 (3) Dust proof (protection level 0) (4) 00V, 200V AC (50/60Hz), 24V DC 5% to +0% rated voltage Class B or equivalent (5) 5.6VA (50Hz), 5.0VA (60Hz) 3.4VA (2.W)/50Hz, 2.3VA (.5W)/60Hz.8W DIN connector Note ) Use dry air at low temperatures. Note 2) Use turbine oil No. (ISO VG 32), if lubricated. Note 3) Shock resistance: No malfunction on test using drop impact tester, to axis and right angle directions of and armature main valve, each one time when energized and deenergized. (Valve in the initial stage.) Vibration resistance: No malfunction on test with 8.3 to 2000Hz, sweep, to axis and right angle directions of and armature main valve, each one time when energized and de-energized. (Valve in the initial stage.) Note 4) Based on JIS C0902. Note 5) Based on JIS C4003. Manual override Voltage Option Foot bracket (with screw) Non-locking push style (Extended), Locking style (Slotted), Locking style (Lever) 0 to 20V, 220V, 240V AC (50/60Hz) 2V, 00V DC With indicator light and surge voltage suppressor () Part No. AXT626-0A, VFS20 (single) only Note ) No light for grommet but surge voltage suppressor (direct connecting lead wire) is installed. SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Double Exhaust centre Pressure centre Manifold Valve model VFS 20 VFS 30 Applicable manifold base (Pilot EXH) Bar manifold (Individual EXH) Bar manifold (Common EXH. base side) Note) VFS 30: Manifold only. Cannot be used as a single unit..7-9

10 VFS000 How to Order VFS 20 D 0 Q Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Configuration 2 position single Port size 0 8 Manual override : Non-locking push style (Flush) Thread Rc (PT) N NPT T NPTF F G (PF) Optional accessory F: Foot bracket Only for VFS20. A: Non-locking push style B: Locking style (Slotted) C: Locking style (Lever) (Extended) 2 position double position closed centre 3 position exhaust centre 3 position pressure centre Option Indicator light/surge voltage suppressor Z Electrical entry D: DIN connector DO: Without connector None With indicator light and surge voltage suppressor Y: DIN connector (DIN 43650) YO: Without DIN connector Body (Pilot exhaust) 20: Individual EXH 30: Common EXH Voltage 00V AC (50/60Hz) 2 200V AC (50/60Hz) 3 0V to 20V AC (50/60Hz) 4 220V AC (50/60Hz) 5 24V DC 6 2V DC 7 240V AC (50/60Hz) 9 Other (250 or less) Order Made Contact SMC for other voltages (9) Manifold only. Protective class class I (Mark: ) How to Order Pilot Valve Assembly SF4 DZ 2 Q 00V AC 50/60Hz 2 200V AC 50/60Hz 3 0 to 20V AC (50/60Hz) 4 220V AC 50/60Hz 5 24V DC 6 2V DC 7 240V AC 50/60Hz 9 Other(250 or less) Order Made.7-0 Voltage Contact SMC for other voltages (9) Protective class class I (Mark: ) Electrical entry/indicator light and surge voltage suppressor D DZ DO DOZ Y YO DIN connector DIN connector with indicator light and surge suppressor DIN connector DIN connector with indicator light and surge suppressor DIN Connector (DIN 43650B) Without connector Without DIN connector. Manual override Non-locking push style (Flush) A Non-locking push style (Extended) B Locking style (Slotted) C Locking style (Lever) Option Applicable model 2 22 For VFS 20 For VFS 30 Individual pilot exhaust Common pilot exhaust

11 VFS000 Maximum Cylinder Speed Conditions: Supply pressure 0.5MPa, Load factor 50% System diagram Flow control Air cylinder SV Construction Solenoid valve Port size Nylon tube Speed Fitting (Tube O.D. X Port size) System Silencer O.D./I.D. controller! AS000-0 ) VFS ø4/3 AN0 or ø4 X 8 ø4 X 8 ø4 X 8 to 4-0 AS * VFS ø6/4.5 AS ø6 X 8 ø6 X 8 ø6 X 8 to 2 2 position single 2 position double SY SYJ SX VK VZ VF VFR VP7 Closed centre Exhaust centre Pressure centre Component Parts No. q w e r Replacement Parts No. Description Body Spool/Sleeve End plate Piston Description Material Aluminium die-cast Stainless steel Resin Resin t Return spring Stainless steel y Pilot valve assembly u Detent assembly 3 position closed centre/exhaust centre/pressure centre Material Note Platinum silver Part No. VFS20 VFS220 VFS320, 420, 520 AXT626-6 AXT626-9 Refer to "How to order Pilot valve assembly" on p AXT624-A VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-

12 VFS000 2 Position Single Grommet: VFS20- G Note: This valve series is now only available with DIN connector. DIN Connector With bracket (F): AXT626-0A Grommet terminal: VFS20- E, EZ DIN connector: VFS20- D, DZ Conduit terminal: VFS20- T, TZ.7-2

13 VFS000 2 Position Double, 3 Position DIN Connector Grommet: VFS220- G, VFS320- G, VFS420- G, VFS520- G Note: This valve series is now only available with DIN connector. SV SY SYJ SX VK VZ VF VFR VP7 VQC Grommet terminal: VFS220- E, EZ VFS320- E, EZ VFS420- E, EZ VFS520- E, EZ DIN connector: VFS220- D, DZ VFS320- D, DZ VFS420- D, DZ VFS520- D, DZ SQ VQ VQ4 VQ5 VQZ VQD VFS VS Conduit terminal: VFS220- T, TZ VFS320- T, TZ VFS420- T, TZ VFS520- T, TZ VS7 VQ7.7-3

14 Series VFS000 Manifold/Bar Style Compact and lightweight Compact due to manifolding on a single base for mounting in small spaces. Protection of the environment from pilot exhaust Use of the VV5FS-30 manifold can exhaust intensively the pilot exhaust gas to the base side, and can prevent environmental aggravation due to noise and oil mist. Specifications Port Specifications Manifold base Bar manifold, Body ported Stations Max. 5 P Common Port specification EA, EB Common Porting specification (Connecting port size) Base P Side/ 8 Valve A, B Top/ 8 Base EA, EB Side/ 8 Option Blank plate assembly VVFS000-0A- With gasket, screws VV5FS-20 How to Order Manifold Base VV5FS Series VFS000 Manifold Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Stations 02 2 stations 5 5 stations Q P, EA, EB Port size 0 8 Port specifications P EA, EB Common Common 8 8 Thread Rc (PT) N NPT T NPTF F G (PF) Porting specifications Top porting 8 VV5FS-30 Base Model Type Pilot exhaust Individual EXH Applicable valve 20 VFS Common EXH 30 VFS VFS mountable How to Order Manifold Base Assembly Please indicate manifold base style, valve model, and blank plate. <<Example>> (Manifold base style) (2 position single) (2 position double) (Blank plate) VV5FS Q VFS20-D-0-Q VFS220-D-0-Q VVFS000-0A

15 VFS Type Manifold Pilot Individual Exhaust: VV5FS-20- Station -0 Grommet: G Note: This valve series is now only available with DIN connector. SV U side D side SY SYJ SX VK VZ VF VFR VP7 VQC SQ General formula of weight/manifold M=0.049n (kg) Grommet terminal: E, EZ Conduit terminal: T, TZ DIN connector: D, DZ n: Station VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 L L L2 n n: Station Equation L=24 X n+ L2=24 X n

16 VFS Type Manifold Pilot Individual Exhaust: VV5FS-30- Station -0 Grommet: G Note: This valve series is now only available with DIN connector. D side U side General formula of weight/manifold M=0.079n (kg) n: Station Grommet terminal: E, EZ Conduit terminal: T, TZ DIN connector: D, DZ L L L2 n n: Station Equation L=24 X n+ L2=24 X n

17 5 Port Pilot/Metal Seal Body Ported SeriesVFS2000 Compact and Large Flow Capacity /4: Cv.0 Small Power Consumption/.8 W DC VFS2320- T-02 VFS2220- E-02 JIS VFS220- E-02-F VFS220- G-02 2 position 3 position Single Closed centre Double Exhaust centre Pressure centre Model Configuration Single 2 position Double 3 position Standard Specifications Manifold Closed centre Exhaust centre Pressure centre VFS220 VFS2220 VFS2320 VFS2420 VFS2520 Model VFS230 VFS2230 VFS2330 VFS2430 VFS2530 Port size Effective area Max. operating (mm 2 ) (Nl/min) cycle (CPM) () 6.2 (883) 8 (98) 6.2 (883) 8 (98) 6.2 (883) 8 (98) 6.2 (883) 8 (98) 6.2 (883) 8 (98) Response Weight time (ms) (2) (kgf) (3) 22 or less 3 or less 40 or less 40 or less 40 or less Note ) According to JISB8375 (Once per 30 days) for the minumum operating frequency. Note 2) According to JISB (The value at supply pressure 0.5MPa.) Note 3) In case of a grommet. Note 4) Factors of Note ) and Note 2) are achieved in controlled clean air. Fluid Max. operating pressure Min. operating pressure Proof pressure Valve Ambient and fluid temperature Lubrication Pilot valve manual override Shock/vibration resistance Protection structure Rated voltage Allowable voltage Solenoid Coil insulation Apparent power AC (Power consumption) Power consumption DC Electrical entry Inrush Holding Air and inert gas.0mpa 0.MPa.5MPa 0 to 60 o C () Not required (2) Non-locking push style (Flush) 50/50m/s 2 (3) Dust proof (4) 00V, 200V AC (50/60Hz), 24V DC 5 to +0% rated voltage Class B or equivalent (30 o C) (5) 5.6VA (50Hz), 5.0VA (60Hz) 3.4VA (2.W)/50Hz, 2.3VA (.5W)/60Hz.8W DIN connector Note ) Use dryair at low temperatures. Note 2) Use turbine oil No. (ISO VG 32), if lubricated. Note 3) Shock resistance: No malfunction from test using drop impact tester to axis and right angle directions of main valve and armature, each one time when energized and de-energized. (Value in the initial stage.) Vibration resistance: No malfunction from test with 8.3 to 2000Hz sweep, to axis and right angle directions of main valve and armature, each one when energized and de-energized. (Value in the initial stage.) Note 4) According to JIS C0920. Note 5) According to JIS C4003. Option Specifications Pilot style Outside pilot () Manual override Non-locking push style (Extended), Locking style (Slotted) 0 to 20V, 220V, 240V AC (50/60Hz) Voltage 2V, 00V DC Option With indicator light and surge voltage suppressor (2) Foot bracket (with screw) Part No. VFN200-7A, VFS220 (single) only Note ) Operating pressure: 0 to.0mpa. Pilot operating pressure: 0. to.0mpa. Note 2) No light grommet but surge voltage suppressor (direct connecting lead wire) is installed. Valve model VFS2 20 VFS2 30 Applicable manifold base (Pilot EXH) Bar manifold (Individual EXH) Bar manifold (Common EXH. base side) Note) VFS2 30: Manifold only, and cannot be used as a single unit SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-7

18 VFS2000 How to Order VFS2 Ordering source area code Code Japan, Asia - Australia E Europe N North America Configuration : 2 position single 20 D 0 Port size Manual override : Non-locking push style (Flush) Q Thread N T F A: Non-locking push style (Extended) Rc (PT) NPT NPTF G (PF) F: Foot bracket B: Locking style (Slotted) Optional accessory Only for VFS220. 2: 2 position double 3: 3 position closed centre 4: 3 position exhaust centre 5: 3 position pressure centre Option Indicator light/surge voltage suppressor Z Electrical entry D: DIN connector DO: Without connector None With indicator light and surge voltage suppressor Y: DIN connector (DIN 43650) YO: Without DIN connector Reverse pressure: Can be used by external pilot specification. Body (Pilot exhaust) 20: Individual EXH 30: Common EXH Manifold only. Pilot R Internal External Option Individual external pilot (External pilot port: Body side) Voltage 00V AC (50/60Hz) 2 200V AC (50/60Hz) 3 0V to 20V AC (50/60Hz) 4 220V AC (50/60Hz) 5 24V DC 6 2V DC 7 240V AC (50/60Hz) 9 Other,(250V or less) Order Made Contact SMC for other voltages (9) How to Order Pilot Valve Assembly 00V AC 50/60Hz 2 200V AC 50/60Hz 3 0 to 20V AC (50/60Hz) 4 220V AC 50/60Hz 5 24V DC 6 2V DC 7 240V AC 50/60Hz 9 Other Option SF4 Voltage DZ 2 Q Electrical entry/indicator light and surge voltage suppressor D DIN connector DIN connector with indicator DZ light and surge suppressor DO DIN connector DIN connector with indicator DOZ light and surge suppressor DIN connector Y (DIN 43650B) YO DIN connector (DIN 43650B) Without DIN connector Manual override Non-locking push style (Flush) A Non-locking push style (Extended) B Non-locking push style (Extended) Option Applicable model 2 3 For VFS2 20 For VFS2 30 Individual pilot exhaust Common pilot exhaust.7-8

19 VFS2000 Maximum Cylinder Speed Conditions: Supply pressure 0.5MPa Load factor 50%, Stroke 00mm System diagram controller Max. cylinder speed (mm/sec) Construction Bore size (mm) System Solenoid valve Port size Nylon tube O.D./I.D. ) VFS ø4/3 2 position single 2 position double Air cylinder Silencer AN0-0 Speed Controller AS * VFS ø6/4.5 AN0-0 AS VFS ø8/6 AN0-0 AS , VFS ø0/7.5 AN0-0 AS VFS ø2/9 AN0-0 AS SV SY SYJ SX VK VZ VF VFR VP7 Closed centre Exhaust centre Pressure centre 3 position closed centre/exhaust centre/pressure centre VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Component Parts No. q w e r Replacement Parts No. Description Body Spool/Sleeve End plate Piston Description Material Aluminium die-cast Stainless steel Resin Resin Material t Return spring Stainless steel y Pilot valve assembly u Detent assembly Note Platinum silver Part No. VFS220 VFS2220 VFS2320, 2420, 2520 VFS VFS Refer to "How to order/pilot valve assembly" on p VFN2000-8A.7-9

20 VFS Position Single Grommet: VFS220- G Note: This valve series is now only available with DIN connector. DIN Connector Foot bracket (F): VFN200-7A Grommet terminal: VFS220- E, EZ DIN connector: VFS220- D, DZ Conduit terminal: VFS220- T, TZ.7-20

21 VFS Position Double, 3 Position DIN Connector Grommet: VFS2220- G, VFS2320- G, VFS2420- G, VFS2520- G Note: This valve series is now only available with DIN connector. SV SY SYJ SX VK VZ VF VFR VP7 Grommet terminal: VFS2220- E, EZ VFS2320- E, EZ VFS2420- E, EZ VFS2520- E, EZ Conduit terminal: VFS2220- T. TZ VFS2320- T. TZ VFS2420- T. TZ VFS2520- T. TZ DIN connector: VFS2220- D, DZ VFS2320- D, DZ VFS2420- D, DZ VFS2520- D, DZ VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-2

22 Series VFS2000 Manifold/Bar Style Protection of the environment from pilot exhaust Use of the VV5FS2-30 manifold can exhaust intensively the pilot exhaust gas to the base side, and can prevent environmental aggravation due to noise and oil mist. Specifications Port Specifications Manifold base Bar manifold, Body ported Stations Max. 5 P Common Port specification EA, EB Common Porting specification: Base P Side: 3 8 Valve A, B Top: 8, 4 Base EA, EB Side: 3 8 Options Blank plate assembly VVFS2000-0A- With gasket, screws VV5FS2-20 VV5FS2-30 How to Order Manifold Base VV5FS2 Series VFS2000 Manifold Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Stations 02 2 stations 5 5 stations Q Thread Rc (PT) N NPT T NPTF F G (PF) P, EA, EB Port size Port specification P EA, EB Common Common Porting spec. A, B Top porting 8 4 Base Model Type Pilot exhaust Individual EXH Applicable valve 20 Common EXH How to Order Manifold Base Assembly Please indicate manifold base style, valve model, and blank plate. 30 VFS VFS VFS2 20- can be 02 attached. <<Example>> (Manifold base) (2 position single) (2 position double) (Blank plate) VV5FS Q VFS220-D-02-Q VFS2220-D-02-Q VVFS2000-0A

23 VFS Type Manifold Grommet: G Note: This valve series is now only available with DIN connector. Pilot Individual Exhaust: VV5FS2-20- Station -03 U side D side SV SY SYJ SX VK VZ VF VFR VP7 General formula of weight/manifold M=0.08n (kg) n: Station Grommet terminal: E, EZ Conduit terminal: T, TZ DIN connector: D, DZ VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 L L L2 n n: Station Equation L=25 X n+8 L2=25 X n

24 VFS Type Manifold Grommet: G Pilot Common Exhaust: VV5FS2-30- Station -03 Note: This valve series is now only available with DIN connector. U side D side General formula of weight/manifold M=0.2n+0.2 (kg) n: Station Grommet terminal: E, EZ Conduit terminal: T, TZ DIN connector: D, DZ L L L2 n n: Station Equation L=25 X n+2 L2=25 X n

25 5 Port Pilot/Metal Seal Body Ported SeriesVFS3000 Compact and Large Flow Capacity 3/8: Nl/min 963 Small Power Consumption/.8 W DC JIS 2 position 3 position Single Closed centre Double Exhaust centre Pressure centre Model Configuration Single 2 position Double 3 position Standard Specifications Option Specifications Manifold Closed centre Exhaust centre Pressure centre VFS320 VFS3220 VFS3320 VFS3420 VFS3520 Model VFS330 VFS3230 VFS3330 VFS3430 VFS3530 Effective area Port size (mm 2 ) (Nl/min) (865) (963) (865) (963) (767) (963) (767) (963) (767) 36.0 (963) 3 8 Max. operating cycle (CPM) () Response time (ms) (2) 20 or less 5 or less 40 or less 40 or less 40 or less Weight (kgf) (3) Note ) According to JISB8375 (Once per 30 days) for the minumum operating frequency. Note 2) According to JISB (The value at supply pressure 0.5MPa.) Note 3) In case of a grommet. Note 4) Factors of Note ) and Note 2) are achieved in controlled clean air. Fluid Max. operating pressure Min. operating pressure Proof pressure Valve Ambient and fluid temperature Lubrication Pilot valve manual override Shock/vibration resistance Protection structure Rated voltage Allowable voltage Solenoid Coil insulation Apparent power (Power consumption) Power consumption Electrical entry AC Inrush Holding Air and inert gas.0mpa 0.MPa.5MPa 0 to 60 o C () Not required (2) Non-locking push style (Flush) 50/50ms 2 (3) Dust proof (4) 00V, 200V AC(50/60Hz), 24V DC 5 to +0% rated voltage Class B or equivalent (30 o C) (4) 5.6VA/50Hz, 5.0VA/60Hz 3.4VA (2.W)/50Hz, 2.3VA (.5W)/60Hz.8W DIN connector Note ) Use dry-air at low temperatures. Note 2) Use turbine oil class (ISO VG 32), if lubricated. Note 3) Shock resistance: No malfunction from test using drop impact tester to axis and right angle directions of main valve and armature, each one time when energized and de-energized. (Valve in the initial stage.) Vibration resistance: No malfunction from test with 8.3 to 2000Hz sweep, to axis and right angle directions of main valve and armature, each one when energized and de-energized. (Value in the initial stage.) Note 4) According to JIS C0920. Note 5) According to JIS C4003. Pilot Outside pilot () Manual override Non-locking push style (Extended), Locking style (Slotted) 0 to 20V, 220V, 240V AC (50/60Hz) Voltage 2V,00V DC Option With indicator light and surge voltage supressor (2) Foot bracket (with screw) Part No. VFS A, VFS320 (single) only Note ) Operating pressure: 0 to.0mpa Pilot operating pressure: 0. to.0mpa Valve model VFS3 20 VFS3 30 Applicable manifold base Stacking manifold Pilot EXH Individual EXH (Valve side) Common EXH (Manifold base side) Note 2) No light for grommet but surge voltage suppressor (direct connecting lead wire) is installed. SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-25

26 VFS3000 How to Order VFS3 20 D 02 Ordering source area code Code areas Japan, Asia - Australia, England E Europe N North America Configuration : 2 position single Port size Manual override : Non-locking push style (Flush) Thread N T F Q A: Non-locking push style (Extended) Rc (PT) NPT NPTF G (PF) Optional accessory F: Foot bracket Only for VFS320. B: Locking style (Slotted) 2: 2 position double 3: 3 position closed centre 4: 3 position exhaust centre Option Indicator light/surge voltage suppressor Z Electrical entry None With indicator light and surge voltage suppressor 5: 3 position pressure centre D: DIN connector DO: Without connector Y: DIN connector (DIN 43650) YO: Without DIN connector Reverse pressure: Can be used by external pilot specification. Body (Pilot exhaust) 20: Individual EXH 30: Common EXH Manifold only. Pilot R Internal External Option Voltage 00V AC (50/60Hz) 2 200V AC (50/60Hz) 3 0V to 20V AC (50/60Hz) 4 220V AC (50/60Hz) 5 24V DC 6 2V DC 7 240V AC (50/60Hz) 9 Other,(250V or less) Order Made Contact SMC for other voltages (9) External pilot port: Body side. For 30 type, common external pilot (on manifold side). Protective class class I (Mark: ) How to Order Pilot Valve Assembly SF4 DZ 4 Q Voltage 00V AC 50/60Hz 2 200V AC 50/60Hz 3 0 to 20V AC (50/60Hz) 4 220V AC 50/60Hz 5 24V DC 6 2V DC 7 240V AC 50/60Hz 9 Other Electrical entry/indicator light and surge voltage suppressor D DIN connector DZ DIN connector with indicator light and surge suppressor DO DIN terminal DOZ DIN connector with indicator light and surge suppressor Manual override Non-locking push style (Flush) A Non-locking push style B (Extended) Locking style (Lever) Option Y DIN connector (DIN 43650B) YO DIN connector (DIN 43650B) Applicable model 2 4 A side pilot operator for VFS B side operator for VFS B side operator for VFS A side operator for VFS B side operator for VFS B side operator for VFS Individual pilot exhaust Common pilot exhaust.7-26 Without DIN connector.

27 VFS3000 Maximum Cylinder Speed Rubber hose piping system Steel tube piping system Conditions: Supply pressure 0.5MPa, Load factor 50% Conditions: Supply pressure 0.5MPa, Load factor 50% SV Max. cylinder actuating speed (mm/s) Max. cylinder actuating speed (mm/s) SY SYJ SX VK VZ VF VFR VP7 Bore size (mm) Bore size (mm) Rubber hose piping system VQC Steel tube piping system System Solenoid valve Speed controller Silencer Fitting (Hose I. D. X Fitting I. D. X port size) ) VFS ø6.3 X ø4.8 AS X 4 AN VFS ø9.5 X ø8 * 3 AS X 3 8 Air Cylinder System, Solenoid valve VFS VFS Speed controller AS AS Silencer AN Fitting 90 o Elbow 5pcs. 90 o Elbow 5pcs. SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-27

28 VFS3000 Construction 2 position single 2 position double Closed centre 3 position closed centre/exhaust centre/pressure centre Exhaust centre Pressure centre Component Parts No. q w e r Replacement Parts No. Description Body Spool/Sleeve End plate Piston Description Material Aluminium die-cast Stainless steel Resin Resin Material t Return spring Stainless steel y Pilot valve assembly u Detent assembly Note Platinum silver Black Part No. VFS320 VFS3220 VFS3320, 3420, 3520 VFS VFS Refer to "How to order/pilot valve assembly" on p VFS3000-9A.7-28

29 VFS Position Single Grommet: VFS320- G Note: This valve series is now only available with DIN connector. DIN Connector Foot bracket (F): VFS SV SY SYJ SX VK VZ VF VFR VP7 Grommet terminal: VFS320- E, EZ Conduit terminal: VFS320- T, TZ DIN connector: VFS320- D, DZ VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-29

30 VFS Position Double, 3 Position DIN Connector Grommet: VFS3220- G, VFS3320- G, VFS3420- G, VFS3520- G Note: This valve series is now only available with DIN connector. Grommet terminal: VFS3220- E, EZ VFS3320- E, EZ VFS3420- E, EZ VFS3520- E, EZ DIN connector: VFS3220- D, DZ VFS3320- D, DZ VFS3420- D, DZ VFS3520- D, DZ Conduit terminal: VFS3220- T, TZ VFS3320- T, TZ VFS3420- T, TZ VFS3520- T, TZ.7-30

31 Series VFS3000 Manifold/Stacking Style Keeps environmental air clean from pilot exhaust Use of the VV5FS3-3 manifold can exhaust intensively the pilot exhaust gas to the base side, and can prevent environmental aggravation due to noise and oil mist. VV5FS3-3 Manifold construction Specifications Port Specifications Options Manifold base style Stacking Stations Max. 5 P Common Port specification EA, EB Common How to Order Manifold Base Series VFS3000 Manifold Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Manifold block assembly VVFS3000-A-30 Porting specification Base P Side: 3 8 Valve A, B Top: 4, 3 8 Base EA, EB Side: 3 8 Blank plate assembly VVFS3000-0A- With gasket, screw SUP block plate AXT636-0A EXH block plate AXT636-A Note) Individual SUP or EXH is possible with bottom porting of SUP or EXH. For your order, please indicate it in the manifold specification. VV5FS Stations Port specification 02 2 stations P EA, EB Common Common stations 8 8 Base Model Type Pilot exhaust Pilot common EXH 3 Q Thread Rc (PT) N NPT T NPTF F G (PF) P, EA,EB port size Applicable valve VFS VFS Note) Also VFS3 20 is possible to manifold. In this case, it uses an individual pilot exhaust. How to Order Manifold Base Assembly Please indicate manifold base style, valve model, and blank plate. Porting spec. A, B Top porting 4, 3 8 SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 For increasing the manifold bases, please prepare the manifold block assembly No. <<Example>> (Manifold base) (2 position single) (2 position double) (Blank plate) VV5FS Q VFS330-D-02-Q VFS3230-D-02-Q VVFS3000-0A

32 VFS Type Manifold Grommet: G Pilot Common Exhaust: VV5FS3-3- Station -03 Note: This valve series is now only available with DIN connector. U side D side General formula of weight/manifold M=0.84n+0.6 (kg) n: Station Grommet terminal: E, EZ Conduit terminal: T, TZ DIN connector: D, DZ L L L2 n n: Station Equation L=3 X n+5 L2=3 X n

33 5 Port Pilot/Metal Seal /Non SeriesVFS2000 Compact despite large flow capacity /4: Nl/min 85 Small Power Consumption/.8W DC Easy to maintain 2 styles of sub-plates: plug-in and non plug-in. JIS Small and Light weight sub-plate Smaller size and lighter weight than standard. Note) Cv factor and piping port locations for compact sub plate are different from those in the standard style. Refer to p for details. Sub plate Standard Compact Thickness (mm) position single 4 Weight (kg) position 3 position Single Closed centre Double Exhaust centre Pressure centre Eff. area (mm 2 ) (Nl/min) 5 (85) 0.8 (589) Model Configuration Single 2 position Double 3 position Closed centre Exhaust centre Pressure centre Double check Standard Specifications Option Specifications Model VFS200 VFS2200 VFS2300 VFS2400 VFS2500 VFS2600 VFS20 VFS220 VFS230 VFS240 VFS250 VFS260 Effective area Port size (mm 2 ) (Nl/min) 8 2.6(687) 4 5 (85) (687) 4 5 (85) 8.7 (638) 4 2. (658) 8.7 (638) 4 2. (658) 8.7 (638) 2. (658) (393) 7.2 (393) Max. operating freq. (CPM) () Response Weight time (ms) (2) (kg) (3) 5 or less 3 or less 20 or less 20 or less 20 or less Note ) According to JIS B8375 (Once per 30 days) for the minimum operating frequency. Note 2) According to JIS B (The valve at supply pressure 0.5MPa.) Note 3) In case of VFS2 00- FZ-0. Note 4) Factors of "Note )" and "Note 2)" are ones achieved in controlled clean air or less 0.6 Fluid Air and inert gas Max. operating pressure Min. operating pressure.0mpa 2 position 0.MPa 3 position 0.5MPa Valve Proof pressure.5mpa Ambient and fluid temperature 0 to + 60 o C () Lubrication Pilot valve manual override Shock/vibration resistance Protection structure Rated voltage Allowable voltage Not required (2) Non-locking push (Flush) 50/50m/s 2 (3) D type: Splash proof (4) 00V, 200V AC (50/60Hz), 24V DC 5 to + 0% rated voltage Coil insulation Class B or equivalent (30 o C) (5) Solenoid Apparent power Inrush 5.6VA/50Hz, 5.0VA/60Hz AC (Power consumption) Holding 3.4VA (2.W)/50Hz, 2.3VA (.5W)/60Hz Power consumption DC.8W Electrical entry Non DIN connector Note ) Use dry air if low temperatures. Note 2) Use turbine oil class (ISO VG32), if lubricated. Note 3) Shock resistance: No malfunction from test using drop impact tester to axis and right angle directions of main valve and armature, each one time when energized and de-energized. (Value in the initial stage.) Vibration resistance: No malfunction from test with 8.3 to 2000Hz, sweep, to axis and right angle directions of main valve and armature, each one when energized and de-energized. (Value in the initial stage.) Note 4) According to JIS C0920. Note 5) According to JIS C4003. Pilot style External pilot () Manual override Non-locking push style (Extended), Locking style (Slotted), Locking style (Lever) 0 to 20V, 220V/240V AC 50/60Hz Voltage 2V, 00V DC Porting Bottom porting Option With indicator light and surge voltage suppressor Note ) Operating pressure: 0 to.0mpa Pilot pressure 2 position: 0. to.0mpa 3 position: 0.5 to.0mpa SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Double check.7-33

34 VFS2000 How to Order With insert plug with lead wire With terminal block Ordering source area code Code areas Japan, Asia - Australia E Europe N North America O: sub-plate Z Body Option None With indicator light and surge voltage suppressor Electrical entry F: Porting VFS F 0 B Option Side Bottom Port size P0 (2) 8 P02 (2) 4 Without sub-plate conduit terminal (with terminal block), Standard grommet (Insert plug with lead wire), Compact Nl/min 687 () Nl/min 85 () Nl/min 589 () Note ) 2 position single Note 2) Please note Cv factor and piping port location of compact sub-plate are different from ones of standard. Thread N T F Rc (PT) NPT NPTF G (PF) Q VFS D 02 Q Pilot valve manual override : Non-locking push B : Locking style style (Flush) (Slotted) Port size 0 8 Without sub-plate Standard Nl/min 687 () Configuration 2 position single Body : sub-plate A : Non-locking push style (Extended) C : Locking style (Lever) 02 (2) P0 (2) P Compact Nl/min 85 () Nl/min 589 () 2 position double 2 3 position closed centre 3 3 position exhaust centre 4 3 position pressure centre 5 3 position double check Pilot Internal R External Option. External pilot is possible only to the one with sub-plate. Voltage 00V AC (50/60Hz) 2 200V AC (50/60Hz) 3 0V to 20V AC (50/60Hz) 4 220V AC (50/60Hz) 5 24V DC 6 2V DC 7 240V AC (50/60Hz) 9 Other,(250V or less) Order Made Contact SMC for other voltages (9) Protective class class I (Mark: ) Voltage 00V AC 50/60Hz 2 200V AC 50/60Hz 3 0 to 20V AC (50/60Hz) 4 220V AC 50/60Hz 5 24V DC 6 2V DC 7 240V AC 50/60Hz 9 Other, 250 or less Order Made Contact SMC for other voltages (9) How to Order Pilot Valve Assembly SF4 Electrical entry DZ 20 Electrical entry/indicator light and surge voltage suppressor. D DZ DO DOZ Y YO Option Indicator light/surge voltage suppressor Z None With indicator light and surge voltage suppressor D: DIN connector DO: Without connector Y: DIN connector (DIN 43650) YO: Without DIN connector DIN connector DIN connector with indicator light and surge voltage suppressor DIN connector DIN connector with indicator light and surge voltage suppressor DIN connector (DIN 43650B) DIN connector (DIN 43650B) Without DIN connector. Q Note ) 2 position single Note 2) Please note Cv factor and piping port location of compact subplate are different Non plug-in from ones of standard. Manual override Non-locking push style (Flush) A Non-locking push style (Extended) B Locking style (Slotted) C Locking style (Lever) Option

35 VFS2000 Maximum Cylinder Speed Condition: Supply pressure 0.5MPa, Load factor 50% System diagram SV Max. cylinder actuating speed (mm/s) Bore size (mm) Double Check Spacer Specifications Holding cylinder mid-position Specifications for a long periods. The concurrent use of double check spacer Double check spacer with built-in double check valve can stop Applicable cylinder or mid-position and hold it without solenoid valve being affected by air leakage spool seals. Double Check Spacer Leakage (cm 3 /min) (ANR) VVFS A- VFS2400- F Solenoid one side energized Solenoid both sides de-energized Supply pressure 0.5MPa System components System Solenoid valve VFS (S=2.6mm 2 ) Precaution In the case of 3 position double check valve (VFS26 0), check the leakage from piping and fittings in between valve and cylinder by means of synthetic detergent solutions, and ensure that there is no such leakage found there. Also check the leakage from cylinder seal and piston seal. If there is any leakage, sometimes the cylinder, when valve is de-energized, can move without stopping at mid-position. Be aware that if the exhaust side is restricted excessively, the intermediate stopping accuracy will decrease and will lead to improper intermediate stops. P P A B ) * +, - VFS (S=5mm 2 ) Speed controller AS (S=5mm 2 ) AS (S=2mm 2 ) AS (S=2mm 2 ) AS (S=24mm 2 ) AS (S=24mm 2 ) Silencer AN0-0 (S=35mm 2 ) AN0-0 (S=35mm 2 ) AN0-0 (S=35mm 2 ) AN0-0 (S=35mm 2 ) AN0-0 (S=35mm 2 ) Fitting (Tube O.D. X connecting thread)! ø4 X ø4 X ø4 X to 4 ø6 X ø6 X ø6 X to 2 ø8 X ø8 X ø8 X to 2 ø0 X ø0 X ø0 X to 2 ø2 X ø2 X ø2 X to 2 Note) The piping with a compact sub-plate of pipe connecting bore /8 and/4 is equivalent to the system ), *, +. VVFS A-2 G VFS240- ET D EA EB EA EB EA EB 20 or less 20 or less 0 Check Valve Operation The combination of VFS2 0 0, VFS and a double check spacer can be used as prevention of falling at the stroke end but cannot hold the intermediate position of the cylinder SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

36 VFS2000 Construction 2 position single 2 position double 3 position closed centre/exhaust centre/pressure centre Closed centre Exhaust centre Pressure centre Component Parts No. q w e r t y u i Description Material Note Body Sub-plate Spool/Sleeve Aluminium die-cast Aluminium die-cast Stainless steel Platinum silver Platinum silver Adaptor plate Aluminium die-cast Platinum silver End plate Resin Black Piston Resin Junction cover Resin Light cover Resin Replacement Parts.7-36 Subplate Assembly (Standard) 0 VFS2000-LP VFS2000-LS- 02 Without mounting screw and gasket. Refer to p for compact style. No. Description Material Part No. VFS2 VFS22 VFS23, 24, 25 o Return spring Stainless steel NVF AXT624-9-!0 Gasket NBR AXT AXT AXT ! Hexagonal soket head cap screw Steel AXT AXT AXT624-26!2 Detent assembly AXT624-A!3 Pilot valve assemby Refer to "How to order/pilot valve assembly" on p

37 VFS Position Single/Double, 3 Position Closed Centre/Exhaust Centre/Pressure Centre/Double Check 2 position single: VFS200- F Note: This valve series is now only available with DIN connector. SV SY SYJ SX VK VZ VF VFR VP7 Bottom Ported 2 position double: VFS2200- F position closed centre: VFS2300- F- 3 position exhaust centre: VFS2400- F- 3 position pressure centre: VFS2500- F position double check: VFS2600- F VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-37

38 VFS2000 Non Grommet: VFS20- G Note: This valve series is now only available with DIN connector. 2 Position Single Bottom Ported ( ):/8 Grommet terminal: VFS20- E DIN connector: VFS20- D Conduit terminal: VFS20- T

39 Non Grommet: 2 position double VFS220- G- 0 3 position closed centre VFS230- G position exhaust centre VFS240- G-0 3 position pressure centre VFS250- G- Note: This valve series is now only available with DIN connector VFS Position Double, 3 Position Closed Centre/Exhaust Centre/Pressure centre SV SY SYJ SX VK VZ VF VFR VP7 Bottom Ported Grommet terminal: Double VFS220- E Closed centre VFS230- E- Exhaust centre VFS240- E- Pressure centre VFS250- E- Conduit terminal: Double VFS220- T Closed centre VFS230- T- Exhaust centre VFS240- T- Pressure centre VFS250- T DIN connector: Double VFS220- D-02 0 Closed centre VFS230- D- Exhaust centre VFS240- D- Pressure centre VFS250- D- 0 ( ):/ VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-39

40 VFS2000 Non 3 Position Double Check Grommet: VFS260- G Bottom ported ( ):/8 Grommet terminal: VFS260- E DIN connector: VFS260- D Conduit Terminal: VFS260- T

41 : Insert Plug with Lead Wire The insert plug is attached to the manifold block and lead wire is plugged into the valve side. Please connect with corresponding power side. : With Terminal Block Since lead wires of solenoid valve are connected with the terminals on upper surface of terminal block, corresponding lead wires from power source can be wired at the bottom of terminal block. : With Multi-connector Master connection of power and solenoid valves. Quick wiring permits ease of installation. VV5FS2 0C D Series VFS2000 With multi-connector Manifold Mounting direction of connector D D side mounting U U side mounting Junction cover Stations Unit 02 2 stations junction cover Ordering source area code 08 8 stations Code areas Max: 8 stations. - E N : With D-sub Connector Wide range of interchangeability (MIL Spec DIN connector terminal-25 pcs attached.) Quick wiring permits easier installation. Non : DIN Connector Wiring for every valve Japan, Asia Australia Europe North America VV5FS2 (Wiring specifications: Please refer to p..7-8) Port specifications Porting P EA, EB A, B 2 Side Com. Com. Bottom 3 4 Side Com. Indi. Bottom 5 Indi. 6 Side Com. Bottom 7 8 Side Indi. Indi. Bottom Option Note) The individual specification of the P port at the composition symbol 3 to 8 or the EA, EB, ports should be taken as individual port using a block plate. Therefore, if an individual port is using a single SUP spacer of option or a singel EXH spacer, the composition symbol mark is "". 0 Series VFS2000 Manifold Insert plug with lead wire Ordering source Stations area code 02 2 stations Code areas - Japan, Asia 5 5 stations Australia E Europe N North America VV5FS2 0T Series VFS2000 with Manifold terminal block Junction cover Separate Stations junction cover 02 2 stations One-piece junction cover 5 5 stations Ordering source area code Code areas Japan, Asia - Australia E Europe N North America VV5FS Port specifications Porting P EA, EB A, B 2 Side Com. Com. Bottom 3 4 Side Com. Indi. Bottom 5 6 Side Indi. Com. Bottom 7 8 Side Indi. Indi. Bottom Option Port specifications Porting P EA, EB A, B 2 Side Com. Com. Bottom 3 4 Side Com. Indi. Bottom 5 Indi. 6 Side Com. Bottom 7 8 Side Indi. Indi. Bottom Option (Wiring specifications: Please refer to p..7-8) 0F U Series with VFS2000 D-sub connector Manifold Mounting direction of connector D D side mounting U U side mounting Junction cover Stations One-piece 02 2 stations junction cover Ordering source 08 8 stations area code Code areas Max: 8 stations. - Japan, Asia Australia E Europe N North America VV5FS2 0 Series VFS2000 Manifold Ordering source area code Code Stations areas Japan, Asia 02 2 stations - Australia 5 8 stations E Europe N North America Option 06 0 Port specifications Porting P EA, EB A, B 2 Side Com. Com. Bottom 3 4 Side Com. Indi. Bottom 5 Indi. 6 Side Com. Bottom 7 8 Side Indi. Indi. Bottom Option Port specifications Porting P EA, EB A, B 2 Side Com. Com. Bottom 3 4 Side Com. Indi. Bottom 5 6 Side Indi. Com. Bottom 7 8 Side Indi. Indi. Bottom Q Q Q Port size P, EA, EB 0 02 M Q Port size P, EA, EB A, B M Mix Bottom porting: 8 only. Thread N T F Thread Rc (PT) N NPT T NPTF F G (PF) Thread N T F Rc (PT) NPT NPTF G (PF) Port size P, EA, EB A, B M Mix Bottom porting: 8 only. Q Rc (PT) NPT NPTF G (PF) A, B Mix Bottom porting: 8 only. Port size P, EA, EB 0 02 M Port size P, EA, EB 0 02 M Thread N T F Thread N T F Rc (PT) NPT NPTF G (PF) A, B Mix Bottom porting: 8 only. Rc (PT) NPT NPTF G (PF) A, B Mix Bottom porting: 8 only..7-4 SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

42 VFS2000 Manifold Specifications Base Style VV5FS2-0 VV5FS2-0 Wiring Insert plug with lead wire With terminal block With multi connector With D-sub connector Grommet Grommet terminal Conduit terminal DIN connector Manifold Stations and Effective Area (mm 2 ) (Cv factor) Manifold/Option Parts Assembly Individual SUP spacer An individual SUP spacer set on manifold block can form SUP port for every valve. Porting A, B port Side Bottom Port size P, EA, EB A, B With multi connector, or with D-sub connector: 8 stations max. No. of Stations 4 8, 4 2 to 5 Porting/No. of stations First station Fifth station Tenth station P A or B 2.4 (677) 2.4 (677) 2.3 (667) A EA, B EB 4.6 (795) 4.6 (795) 4.6 (795) 2 position single. Port size: 4. Part No. Body 8 VVFS2000-P-0- VVFS2000-P VVFS2000-P-02- VVFS2000-P-02-2 Applicable solenoid valve VFS2 00- F VFS2 0- G VFS2 0- E VFS2 0- T VFS2 0- D Fifteenth station 2.2 (667) 4.5 (795) Interface regulator Interface regulator set on manifold block can regulate the pressure to each valve. Refer to p..7-6 for flow charactristic. Body P port regulation ARBF P- ARBF P-2 How to Order Manifold Please indicate manifold base style, corresponding valve, and option parts. <<Example>> with terminal block - 6 stations (Manifold base) VV5FS2-0T (2 position single) VFS200-5FZ.. 3 (2 position double) VFS2200-5FZ 2 (Blank plate) VVFS2000-0A stations (Manifold base mounted style) VV5FS (2 position single) VFS (3 position exhaust center) VFS240-5D. (Individual EXH spacer) VVFS2000-R-0-2. Blank plate When disassembling valve for maintenance purposes or when spare manifold stations are requied, install a blank plate on the manifold block. Body Part No. VVFS2000-0A Individual EXH spacer An individual EXH spacer set on manifold block can form EXH port for every valve. Part No. Body 8 VVFS2000-R-0- VVFS2000-R VVFS2000-R-02- VVFS2000-R-02-2 Air shuttoff valve spacer When stopping supply air and releasing residual pressure after completion of work, actuators may move from original position. Air shuttoff valve spacer makes it possible to stop actuators in original position for extended periods. Body Part No. VVFS2000-2A- VVFS2000-2A-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly. Manifold Options With control unit / Filter, regulation valve, pressure switch and air release valve are all combined to form one unit. Piping work eliminated. SUP block disk When supplying manifold with more than two different pressures, high and low, insert a block plate in between stations subjected to different pressures. Body Part No. AXT625-2A EXH block disk When valve exhaust affects the other stations on the circuit or when the reverse pressure valve is used to standard manifold valve, insert EXH block plate in between stations to separate valve exhaust. Body Part No. AXT625-2A Interface speed control Needle valve set on the manifold block can control cylinder speed by throttling exhaust. Body Part No. VVFS A- VVFS A-2 Incompatible to subplate standard. Air release valve spacer The concurrent use of air release valve spacer with VFS2 0 can release air. Body Part No. L VVFS A- R L VVFS A-2 R Note) L: U side mount R: D side mount Double check spacer The concurrent use of double check spacer with built-in double check valve can stop the cylinder at mid-position and hold for a long time without being affected by the air leakage across spool seals. Body Part No. VVFS A- VVFS A-2 For more information, please refer to p With serial interface unit Solenoid valve wiring process reduced considerably. Disperse installation possible. Manifold solenoid valve: 8 stations max, 32 positions (52 solenoids). Maintenance and inspection are easy..7-42

43 VFS2000 Manifold /Non (Insert plug with lead wire): VV5FS2-0- Station - Port size SV Bottom ported: VV5FS2-0- Station 2- Port size SY SYJ SX VK VZ VF VFR VP7 General formula of Weight/Manifold M=0.20n (kg) n: Station : VV5FS2-0- Station - Port size Bottom ported: VV5FS2-0- Station 2- Port size VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Note: This valve series is now only available with DIN connector. General formula of Weight/Manifold M=0.74n+0.28 (kg) L n L L n: Station Equation L=28 X n+47 L2=28 X n

44 VFS2000 Manifold : Individual/One-piece Junction Cover with terminal block (Individual junction covers): VV5FS2-0T- Station - Port size Bottom ported: VV5FS2-0T- Station 2- Port size General formula of Weight/Manifold M=0.25n+0.35 (kg) n: Station with terminal block (One-piece junction covers): VV5FS2-0T- Station - Port size Bottom ported: VV5FS2-0T- Station 2- Port size L General formula of Weight/Manifold M=0.236n (kg) n: Station L L2 n Equation L=28 X n+47 L2=28 X n+56

45 VFS2000 Manifold with Multi-connector/With D-Sub Connector with multi-connector: VV5FS2-0CD- Station - Port size, VV5FS2-0CU- Station - Port size SV Bottom ported: VV5FS2-0 - Station 2- Port size CD CU SY SYJ SX VK VZ VF VFR VP7 General formula of Weight/Manifold M=0.2n (kg) n: Station Wiring specification: Please refer to p.7-8. with D-sub connector: VV5FS2-0FD- Station - Port size, VV5FS2-0FU- Station - Port size VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Bottom ported: VV5FS2-0 - Station 2- Port size FD FU General formula of Weight/Manifold M=0.2n (kg) Wiring specification: Please refer to p L n L L n: Station Equation L=28 X n+47 L2=28 X n

46 VFS2000 Manifold/Option Parts /Non Individual SUP spacer: 0 VVFS2000-P- - () VVFS2000-P- -2 () Interface regulator: ARBF P- () ARBF P-2 () Individual EXH spacer: 0 VVFS2000-R- - () VVFS2000-R- -2 () Air shutoff valve spacer: VVFS2000-2A- () VVFS2000-2A-2 () SUP/EXH block disk: AXT625-2A Air release valve spacer: VVFS A- R L () VVFS A-2 R L () Interface speed control: VVFS A- () VVFS A-2 () Double check spacer: VVFS A- () VVFS A-2 () Note) VVFS A-/2R. D-side mounting..7-46

47 Manifold with Control Unit VFS2000 Control units (Filter, Regulator, Pressure switch, Air release valve) are all standardized to the one unit, and can be mounted on the manifold base without any attachments. Piping processes are eliminated Precautions When using an air filter with auto drain or manual drain, mount the filter vertically. How to Order VV5FS AP Series VFS2000 Manifold Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Base style/wiring 0 insert plug with lead wire 0T with terminal block 0C 0F 0 with multi-connector with D-sub connector Connector mounting direction Connector mounting Applicable base None 0, 0T, 0 D D side 0C, 0F U U side Junction cover Individual style Unit style Individual: Base style 0, 0T Unit: Base style 0T, 0C, 0F Stations 02 Wiring 2 stations 5 5 stations Base style 0, 0T, 0: 2 to 5 stations 0C, 0F: 2 to 8 stations Port specifications Porting P EA, EB (A, B) Side 2 Common Common Bottom 3 Side 4 Common Individual Bottom 5 Side 6 Individual Common Bottom 7 Side 8 Individual Individual Bottom Option The individual specification of the P port in the composition symbol marks 3 to 8 or EA, EB ports should be taken as individual port using a block plate. Therefore, if an individual port is taken using a single SUP spacer of option or a single EXH spacer, the composition symbol mark is "". Protective class class I (Mark: ) Manifold specifications Manifold style Applicable valve Porting specifications No. of stations Port size P, EA, EB 0 02 M Thread N T F : VV5FS2-0 Insert plug with lead wire With terminal block With multi-connector With D-sub connector A, B port P, EA, EB port Control unit Control equipment Air filter with auto drain Air filter with manual drain Regulator Air release valve Pressure switch Blank plate (Air release valve) Blank plate (Filter Regulator) Mounting manifold block Rc (PT) NPT NPTF G (PF) A, B Mix VFS2 00- F *With multi-connector, or D-sub connector: 8 stations max. Control Unit/Specifications Air filter (with auto drain/with manual drain) Filtration 5µm Regulator Set Press 0.05 to 0.85MPa (Secondary) Pressure switch () Set press. range: OFF 0. to 0.6MPa Differential 0.08MPa or less Contact a Light LED (Red) Max. switch capacity 2V AC, 2W DC Max. operating current 24V AC, DC. or less: 50mA Air release valve (Single only) Operating press. range 0. to.0mpa Common SUP, Common EXH Side: 8, 4 Bottom: 8 (Option) Side: 4 Bottom: 8 (Option) 2 to 5 * Q Voltage of air release valve None (F, G type only) 00V AC (50/60Hz) 2 200V AC (50/60Hz) 3 0V to 20V AC (50/60Hz) 4 220V AC (50/60Hz) 5 24V DC 6 2V DC 7 240V AC (50/60Hz) 9 Other,(250V or less) Order Made : VV5FS2-0 Grommet Grommet terminal Conduit terminal DIN connector VFS2 0- G, VFS2 0- E VFS2 0- T, VFS2 0- D Control unit/options Air release valve adaptor plate (2) Pressure switch (3) Blank plate Filter element <> VVFS A-R (D side mounting) VVFS A-L (U side mounting) <> VVFS A-2R (D side mounting) VVFS A-2L (U side mounting) Contact SMC for other voltages (9) IS000P-2- With control unit/filter regulator Pressure switch Air release valve 5-5B MP2-2 MP3-2 AXT625-8A Note ) Voltage: 24V DC to 00V AC Inner voltage drop: 4V Note 2) Refer to manifold option parts on p Note 3) style cannot be mounted afterwards. Note) The manifold with plug-in attachment plug lead is applied to only individual style. has no junction cover. A AP M MP F G C E 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations station Plase indicate manifold base mounting style, corresponding valve, and option parts. <<Example>> with terminal block (Manifold base) VV5FS2-0T MP-Q (2 position single) VFS200-5FZ-Q (2 position double) VFS2200-5FZ-Q 2 stations are needed to mount control unit. (Manifold base) VV5FS M-Q (2 position single) VFS20-5D-Q 2 stations are needed to mount control unit SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

48 VFS2000 Manifold with Control Unit /Non : VV5FS2-0T- Station - Port size - Control unit Example for manifold U side D side Non : VV5FS2-0- Station - Port size - Control unit Example for manifold Note: This valve series is now only available with DIN connector. U side D side L L n n: Station Equation L=28 X n+47 L2=28 X n+56 L2 L3 (MP) L3=28 X n+94 L3 (AP) L3=28 X n

49 VFS2000 Splash Proof Manifold (Equivalent to IP65) Manifold Specifications Model Wiring Applicable solenoid valve Porting Stations How to Order Manifold VV5FS2 A, B port P, EA, EB port drip proof manifold (Equivalent to IP65) 0WTBU Common terminal box (U side mounting) 0WTBD Common terminal box (D side mounting) 0W Insert plug lead wire Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Valve Protective class class I (Mark: ) VFS2 R Option U VV5FS2-0WTB D VV5FS2-0W Common terminal box Insert plug with lead wire VFS2 00- F-X54 Common SUP, Common EXH Side: 8 4 Bottom: 8 (Option) Side: 4 2 to 0 2 to 5 0WTBU Configuration 2 position single 2 2 position double 3 3 position closed centre 4 3 position exhaust centre 5 3 position pressure centre 6 3 position double check Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Protective class class I (Mark: ) Pilot Internal pilot External pilot 5 Stations 02 2 stations 5 F Voltage 5 stations A B C Option Optional Q Thread Rc (PT) F G (PF) N NPT T NPTF Connecting port size P, EA, EB A, B M Mix Bottom porting: 8 only Port specifications Porting P, EA, EB A, B Side Common 2 Bottom Option X54 00V AC 50/60Hz 2 200V AC 50/60Hz 3 0 to 20V AC 50/60Hz 4 220V AC 50/60Hz 5 24V DC 6 2V DC 7 240V AC 50/60Hz 9 Other, (250V or less) Order Made Q Splash proof Pilot valve manual override Non-locking push style (Flush) Non-locking push style (Extended) Locking style (Slotted) Locking style (Lever) None With indicator light and Z surge voltage suppressor Contact SMC for other voltages (9) SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-49

50 VFS2000 Splash Proof Manifold With common terminal box: VV5FS2-0WTB U D- Station - Port size Bottom ported: VV5FS2-0WTBD- Station 2-0 Terminal mounting stations are not included. Indicates Solenoid valve mounting stations. L L L2 n n: Station Equation L=25 X n+95 L2=25 X n+06 With insert plug lead wire: VV5FS2-0W- Station - Port size Bottom ported: VV5FS2-0W- Station n L L L n: Station Equation L=25n+45 L2=25n+56

51 VFS2000 Manifold Base Construction /Non SV SY SYJ SX VK VZ VF VFR VP7 Replacement Parts No. q w e r t y u Description Metal joint A Metal joint B Gasket A Gasket B O ring O ring O ring Adapter plate Material Steel plate Steel plate NBR NBR NBR NBR NBR Resin i Adapter plate assembly Adapter plate Replacement Parts sub assembly Note ) A, B ports: 8, 4. Resin 0 0T 0T 0C 0F 0SU Part No. AXT AXT625-5 AXT625-7 AXT X 5 X X 7.5 X.5 8 X 5 X.5 AXT625-6 AXT A (Terminal section with adapter plate) AXT VVF AXT625-6 No. Description Ass'y part No. Components parts Applicable manifold base () Manifold block!0, Metal joint q, w. O ring t, y, u Junction Insert plug AXT625-0A- 2 cover, Adapter plate, Pin housing, Guide, Insert plug lead wire with lead wire!0 Manifold block assembly () Manifold block!0, Metal joint q, w. O ring t, y, u Terminal i. with AXT625-20A- 2 Junction cover o, Adaptor plate, Pin housing, Guide terminal block AXT625-0A- () 2 Manifold block!, Metal joint q, w, O ring t, y, u AXT625-2A End plate (U)!, Metal joint q, w, Gasket A e, Guard!3 Insert plug with lead wire! End plate (U side) assembly with AXT625-2A-20 End plate (U)!, Metal joint q, w, Gasket A e, Guard!3 terminal block AXT625-2A-0 AXT625-3A End plate (U)!, Metal joint q, w, Gasket A e, Guard!3 End plate (U)!2, Metal joint q, w, Gasket B r, Guard!3 Steel ball Insert plug with lead wire!2 End plate (D side) assembly with AXT625-3A-20 End plate (U)!2, Metal joint q, w, Gasket B r, Guard!3 Steel ball terminal block AXT625-3A-0 End plate (U)!2, Metal joint q, w, Gasket B r, Guard!3 Steel ball No. Description Material Part No. o 0 0T Junction cover 0T assembly 0C 0F 0SU AXT625-7A AXT A AXT A- stations VVF A- stations AZ738-0A- stations 0 AXT333-2 Rubber plug NBR 0T! 0SU AXT Plug 0W EXP22S For increasing the manifold bases, please order the manifold block assembly number of the principal part assembly!0. For plug-in: The manifold base with terminal stand (integrated with a junction cover) is required with the o junction cover assembly. Note) Manifold Base/Construction: with temminal block..7-5 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

52 VFS2000 Light Compact Style Sub-plate/Nl/min: 589 Nl/min 589 Nl/min 85 Compact Standard Sub-plate Style Compact Standard L (mm) Weight (kg) Note ) 2 position single. 4 Nl/min Effective area () 0.8 (589) 5 (85) Sub-plate VFS2 00- F-P0, P02 Compact: /Grommet (Insert plug with lead wire) 0 Sub-plate assembly part No.: VFS2000-CP- 02 (0: /8, 02: /4) Port size Size P0 P02 Port P, A, B 8 4 EA, EB 8 8 Bottom ported Bottom ported size Size P0 P02 Port P, A, B 8 8, 4 EA, EB M5 8 ( ): Port size P02 Sub-plate Compact: Non 0 VFS2 0- -S0, S02 Sub-plate assembly part No.: VFS2000-CS- 02 (0: /8, 02: /4) Port size Size S0 S02 Port P, A, B 8 4 EA, EB 8 8 Bottom ported size Size S0 S02 Port P, A, B 8 8, 4 EA, EB M5 8 ( ): Port size S02 Bottom ported Precaution VFS2 0- -P0, 02 -S0, 02 Please pay attention to piping port location of sub-plate. : Compact 0 VFS : Standard Wiring Compact: /Grommet (Insert plug with lead wire) The insert plug is attached to the manifold block and lead wire is plugged in with valve side as shown in the following list. Please connect with corresponding power side. Sol. A side B side Lead wire colour Red Black Brown White No polarity..7-52

53 5 Port Pilot/Metal Seal /Non SeriesVFS3000 Compact despite large flow capacity 3/8: Nl/min 963 Small Power Consumption/.8W DC Easy to maintain 2 styles of sub-plates: plug-in and non plug-in. Non JIS 2 position Single Double 3 position Closed centre Exhaust centre Pressure centre Model Configuration Single 2 position Double 3 position Closed centre Exhaust centre Pressure centre Double check Standard Specifications Valve Solenoid Option Specifications Model Effective area Port size (mm 2 ) (Nl/min) VFS300 VFS (767) (963) VFS3200 VFS (767) (963) VFS3300 VFS (767) (963) VFS3400 VFS (767) (963) VFS3500 VFS (767) (963) VFS3600 VFS (080) (78) Max. operating cycle (CPM) () Response time (ms) (2) 20 or less 5 or less 40 or less 40 or less 40 or less Note ) According to JIS B8375 (Once per 30 days) for the minimum operating frequency. Note 2) According to JIS B (The value at supply pressure 0.5MPa.) Note 3) The figures in the above list are for without sub-plate. In the case of with plug-in sub-plate and with non plug-in sub-plate, therefore, add 0.30 kgf and 0.27 kgf sespectively. Fluid Max. operating pressure Min. operating pressure Proof pressure Ambient and fluid temperature Lubrication Pilot valve manual override Shock/vibration resistance Protection structure Rated voltage Allowable voltage Coil insulation Apparent power (Power consumption) AC Power consumption DC Electrical entry Inrush Holding Weight (kg) (3) or less 0.9 Air and inert gas.0mpa 0.MPa.5MPa 0 to +60 o C () Not required (2) Non-locking push (Flush) 50/50m/s 2 (3) E type: Dust proof (level 0), F type: drip proof (level 2), D type: splash proof (level 4) (4) 00V, 200V AC 50/60Hz, 24V DC 5 to +0% rated voltage Class B or equivalent (30 o C) (5) 5.6VA/50Hz, 5.0VA/60Hz 3.4VA (2.W)/50Hz, 2.3VA (.5W)/60Hz.8W Conduit terminal DIN connector Note ) Use dry-air at low temperatures. Note 2) Use turbine oil No. (ISO VG32), if lubricated. Note 3) Shock resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve and armature, each one time when energized and de-energized. (Value in the initial stage.) Vibration resistance: No malfunction from test with 8.3 to 2000Hz sweep, to axis and right angle directions of main valve and armature, each one time when energized and de-energized. (Value in the initial stage.) Note 4) According to JIS C0920. Note 5) According to JIS C4003. Pilot External pilot style () Manual override Main valve Pilot valve Direct manual override style Non-locking push style (Extended), Locking style (Slotted), Locking style (Lever) Voltage Porting Option 0V to 20V, 220V, 240V AC (50/60Hz) 2V, 00V DC Bottom porting With indicator light and surge voltage suppressor Note) Operating pressure: 0 to.0mpa Pilot pressure 0. to.0mpa SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Double check.7-53

54 VFS3000 How to Order Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Body O: sub-plate Electrical entry F: conduit with terminal Port size Without sub-plate Bottom ported: Only 4. Porting B Side Bottom Option Thread N T F Rc (PT) NPT NPTF G (PF) VFS3 0 0 F 02 Q VFS3 2 2 D 02 Q Option Z Electrical entry None With indicator light and surge voltage suppressor Pilot valve manual override : Non-locking push style (Flush) 2 position single Configuration 3 position pressure centre D: DIN connector DO: Without connector Y: DIN connector (DIN 43650) YO: Without DIN connector 5 A : Non-locking push style (Extended) 2 position double 3 position double check position closed centre 3 position exhaust centre External pilot style can be used when using with reverse pressure. Protective class class I (Mark: ) : sub-plate Body option 0 Standard Direct manual override Option Body Pilot R Option Voltage 00V AC (50/60Hz) 2 200V AC (50/60Hz) 3 0V to 20V AC (50/60Hz) 4 220V AC (50/60Hz) 5 24V DC 6 2V DC 7 240V AC (50/60Hz) 9 Other,(250V or less) Order Made Contact SMC for other voltages (9) Internal External How to Order Pilot Valve Assembly Voltage SF4 00V AC (50/60Hz) 2 200V AC (50/60Hz) 3 0V to 20V AC (50/60Hz) 4 220V AC (50/60Hz) 5 24V DC 6 2V DC 7 240V AC (50/60Hz) 9 Other,(250V or less) Order Made Contact SMC for other voltages (9) B : Locking style (Slotted) C : Locking style (Lever) Option F 30-Q Manual override Classification Non-locking push style (Flush) A Non-locking push style (Extended) B Locking style (slotted) C Locking style (lever) Option.7-54 Refer to p..7-5 for voltage conversion.

55 VFS3000 Maximum Cylinder Speed System diagram Solenoid valve VFS3000 S. G. P. piping system Conditions: Supply pressure 0.5MPa, Load factor 50% Rubber hose piping system Conditions: Supply pressure 0.5MPa, Load factor 50% SV SY SYJ SX VK VZ VF VFR VP7 System ) * Solenoid valve VFS (S=32.4mm 2 ) VFS (S=36mm 2 ) AS (S=24mm 2 ) AS (S=73mm 2 ) Double Check Spacer/Specification Holding cylinder mid-position Specifications Double for long periods. check spacer The concurrent use of double check spacer with built-in double check valve can stop cylinder or Applicable mid-position and hold it without being affected solenoid valve by air leakage spool seals. Speed controller Double check spacer Silencer Fitting (Hose I. D. X Fitting I. D. X Port Size) AN (S=35mm 2 ) ø6.3 X ø4.8 X 4 AN (S=60mm 2 ) ø9.5 X ø8 X 3 8 Leakage (cm 3 /min) System VFS (S=36mm 2 ) Precaution In the case of 3 position double check valve (VFS36 0), check the leakage from piping and fittings in between valve and cylinder by means of synthetic detergent solutions, and ensure that there is no such leakage found there. Also check the leakage from cylinder seal and piston seal. If there is any leakage, sometimes the cylinder, when valve is de-energized, can move without stopping at mid-position. Be aware that if the exhaust side is restricted excessively, the intermediate stopping accuracy will decrease and will lead to improper intermediate stops. +, VVFS A- VFS3400- F Solenoid one side energized Solenoid both side de-energized Supply pressure: 0.5MPa P P A B Solenoid valve VFS (S=32.4mm 2 ) VVFS A-2 VFS340- D VFS340- E EA 230 or less EB EA 230 or less EB EA 0 EB Speed controller AS (S=24mm 2 ) AS (S=73mm 2 ) Silencer AN (S=35mm 2 ) AN (S=60mm 2 ) Fitting Elbow 90 5 pcs. Elbow 90 5 pcs. Check Valve Operation The combination of VFS3 00, VFS and a double check spacer can be used as prevention of falling at the stroke end but cannot hold the intermediate position of the cylinder VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

56 VFS3000 Construction 2 position single 2 position double 3 position closed centre/exhaust centre/pressure centre Closed centre Exhaust centre Pressure centre Component Parts No. q w e r t y u i Description Material Body Aluminium die-cast Sub plate Spool/Sleeve Aluminium die-cast Stainless steel Adaptor plate Resin End plate Resin Piston Resin Junction cover Resin Light cover Resin Note Platinum silver Platinum silver Black Black Sub-plate Assembly VFS3000-P- VFS3000-S Without mounting screw and gasket. Replacement Parts No. Description Material Part No. VFS3 VFS32 VFS33, 34, 35 o!0 Return spring Gasket Stainless steel NBR VFS VFS VFS VFS VFS ! Hexagonal socket head cap screw Steel M3 X 32 M3 X 32 M3 X 32!2 Detent assembly VFS3000-9A!3 Pilot valve assembly Refer to "How to order Pilot valve assembly" on p

57 VFS Position Single, 3 Position Closed Centre/Exhaust Centre/Pressure Centre/Double Check 2 position single: VFS300- F SV Bottom Ported SY SYJ SX VK VZ VF VFR VP7 2 position double: VFS3200- F 3 position closed centre: VFS3300- F 3 position exhaust centre: VFS3400- F 3 position pressure centre: VFS3500- F 3 position double check: VFS3600- F ( ):/4 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 ( ):/4 ( ):/4.7-57

58 VFS3000 Non 2 Position Single/Double, 3 Position Closed Centre/Exhaust Centre/Pressure Centre/Double Check 2 position single: VFS30- E, VFS30- D Bottom Ported ( ):/4 2 position double: VFS320- E, VFS320- D 3 position closed centre: VFS330- E, VFS330- D 3 position exhaust centre: VFS340- E, VFS340- D 3 position pressure centre: VFS350- E, VFS350- D 3 position double check: VFS360- E, VFS360- D ( ):/4 ( ):/4.7-58

59 Series VFS3000 Manifold : With Terminal Block Since lead wires of solenoid valve are connected with the terminals on upper surface of terminal block, corresponding lead wires from power source can be wired at the bottom of terminal block. area code : With Multi Connector Master connection of power and solenoid valves. Quick wiring permits easier installation. U side : With D-Sub Connector Wide range of interchangeability (MIL Spec DIN connector terminal 25 pcs attached.) Quick wiring permits ease of installation. U side Non : DIN Connector Wiring for every valve D side D side Ordering source Code - E N VV5FS3 Series VFS3000 Manifold areas Japan, Asia Australia Europe North America with terminal block 0T Stations 02 2 stations 0 0 stations (Wiring specifications: Please refer to p..7-8.) VV5FS3 Series VFS3000 Manifold with multi-connector Ordering source area code Code areas Japan, Asia - Australia E Europe N North America VV5FS3 Series VFS3000 Manifold with D-sub connector Ordering source area code Code areas Japan, Asia - Australia E Europe N North America 0C Mounting direction of connector D U D U D D side mounting U side mounting 02 0F Stations 2 stations Port size M P, EA, EB A, B Mix Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom stations Max: 8 stations (Wiring specifications: Please refer to p..7-8.) VV5FS3 Mounting direction of connector 0 D D side mounting U side mounting 02 Stations 2 stations 08 8 stations Max: 8 stations Series VFS3000 Manifold Ordering source Non area code Code areas Stations Japan, Asia - Australia 02 2 stations E Europe 0 N North America 0 stations Port size Q P, EA, EB A, B M Mix Option Q Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom Port size M P, EA, EB A, B Mix Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom Port size M P, EA, EB Q A, B Mix Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom Option Q N T F Thread N T F Thread N T F Option Thread N T F Option Thread Rc (PT) NPT NPTF G (PF) Rc (PT) NPT NPTF G (PF) Rc (PT) NPT NPTF G (PF) Rc (PT) NPT NPTF G (PF) SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-59

60 VFS3000 Manifold Specifications Base style VV5FS3-0 VV5FS3-0 Wiring With terminal block With multi-connector With D-sub connector DIN Connector Grommet terminal Porting A, B port Side, Bottom Port size No. of Applicable solenoid valve P, EA, EB A, B stations () 2 4, 3 (2) 8 2 to 0 Note ) Appropriate silencer for EA, EB port: "AN403-04" (O.D.ø27). Note 2) With multi-connector, or with D-sub connector: 8 stations max. Manifold Stations and Effective Area (mm 2 ) (Nl/min) Porting/No. of stations P A or B A EA, B EB Port size: 3/8 First station 34.2 (865) 39.6 (259) Fifth station 32.4 (767) 37.8 (206) VFS3 00- F VFS3 0- D Tenth station 32.4 (767) 37.8 (206) How to Order Manifold Please indicate manifold base style, corresponding valve, and option parts. <<Example>> with terminal block 6 stations (Manifold base) VV5FS3-0T (2 position single) VFS300-5FZ 3 (2 position double) VFS3200-5FZ. 2 (Blank plate) VVFS3000-R-03-2 <<Example>> Non with terminal block 6 stations (Manifold base) VV5FS (2 position single) VFS30-5D.. 5 (3 position exhaust centre) VFS340-5D.. (Individual EXH spacer) VVFS300-R Manifold/Option Parts Assembly Individual SUP spacer An individual SUP spacer set on manifold block can form SUP port for every valve. Body Part No. VVFS3000-P-03- VVFS3000-P-03-2 Interface speed control Needle valve set on the manifold block can control cylinder speed by throttling exhaust. Body Part No. VVFS A- VVFS A-2 Manifold Options With exhaust cleaner / Valve exhaust noise dampening: 35dB or more. Oil mist collection: Rate of collection 99.9% or more. Piping hours reduced. Individual EXH spacer An individual EXH spacer set on manifold block can form EXH port for every valve. Body Part No. VVFS3000-R-03- VVFS3000-R-03-2 Double check spacer The concurrent use of double check spacer with built-in double check valve can stop the cylinder at mid-position and hold for a long time without being affected by the air leakage across spool seals. Body Part No. VVFS A- VVFS A-2 For more information, please refer to p With control unit / Filter, regulation valve, pressure switch and air release valve are all combined to form one unit. Piping work eliminated. SUP block disk When supplying manifold with more than two different pressures, high and low, insert a block plate in between stations subjected to different pressures. Body Part No. AXT636-A EXH block disk When valve exhaust affects the other stations on the circuit or when the reverse pressure valve is used to standard manifold valve, insert EXH block plate between stations to separate valve exhaust. Body Part No. AXT636-A Interface regulator Interface regulator set on manifold block can regulate the pressure to each valve. Refer to p..7-6 for flow charactristic. Body P regulation ARBF P- ARBF P-2 A regulation ARBF A- ARBF A-2 B regulation ARBF B- ARBF B-2 Blank plate When disassembling valve for maintenance purposes or when spare manifold stations are required, install a blank plate on the manifold block. Body Part No. VVFS3000-0A For more information, please refer to p With serial interface unit Solenoid valve wiring process reduced considerably. Disperse installation possible. Manifold solenoid valve: 8 stations max, 32 positions (52 solenoids). Maintenance and inspection are easy..7-60

61 VFS3000 Manifold /Non (with terminal block): VV5FS3-0T- Station - Port size Bottom ported: VV5FS3-0T- Station 2- Port size U side SV SY SYJ SX VK VZ VF VFR VP7 General formula of weight M=0.405n (kg) n: Station : VV5FS3-0- Station - Port size Note: This valve series is now only available with DIN connector. D side VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 U side Bottom ported: VV5FS3-0- Station 2- Port size L General formula of weight M=0.309n (kg) L L2 n n: Station Calculation L=33 X n+63 L2=33 X n+75 D side.7-6

62 VFS3000 Manifold with Multi-connector/With D-sub connector with multi-connector: VV5FS3-0CD- Station - Port size, VV5FS3-0CU- Station - Port size U side Bottom ported: CD VV5FS3-0 - Station 2- Port size CU D side General formula of weight/manifold M=0.4n (kg) n: Station For Wiring specifications, please refer to p with D-sub connector: VV5FS3-0FD- Station - Port size, VV5FS3-0FU- Station - Port size U side Bottom ported: VV5FS3-0 - Station 2- Port size FD FU General formula of weight/manifold M=0.4n (kg) n: Station For Wiring specifications, please refer to p L L L2 n n: Station Calculation L=33 X n+63 L2=33 X n+75 D side.7-62

63 VFS3000 Manifold with Exhaust Cleaner Serves to protect work environment. Valve exhaust noise dampening: 35dB or more. Collection rate of drainage and oil mist: 99.9% or more. Piping process reduced. U side Exhaust cleaner AMC60-0 (Optional) Exhaust cleaner AMC60-0 (Optional) Precautions When using exhaust cleaner, mount it downwards. Refer to p.5-3- for details on exhaust cleaners. Manifold Specifications Manifold style : VV5FS3-0 : VV5FS3-0 Wiring With terminal block board With multi-connector DIN connector With D-sub connector Applicable valve VFS3 00- F VFS3 0- D Porting A, B Port P, EA, EB port Common SUP, Common EXH 4, 3 8 P: 2, EXH: No. of stations 2 to 0 () Applicable exhaust cleaner AMC60-0 (Connecting port size ) (2) Note ) With multi-connector, or with D-sub connector: 8 stations maximum. Note 2) Exhaust cleaner AMC60-0 is not attached. How to Order VV5FS3 Series VFS3000 Manifold Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Base style/wiring D side 0T With terminal block 0C With multi-connector 0F With D-sub connector 0 Connector mounting direction With connector Applicable base mounted None 0T, 0 D D-side mounting 0C, 0F U U side mounting Stations CD stations 0 stations Base style 0T, 0: 2 to 0 stations Base style 0C, 0F: 2 to 8 stations Please indicate manifold base mounting style, corresponding valve, and option parts. <<Example>> < with terminal block (6 stations) (Manifold base) VV5FS3-0T CD-Q (2 position single) VFS300-5FZ-Q (2 position double) VFS3200-5FZ-Q (Blank plate) VVFS3000-0A (Exhaust cleaner) AMC60-0 Port size M Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom Option 3 2 Thread P N T F A, B Mix Exhaust cleaner mounting direction Exhaust cleaner mounting direction CD D side D side mounting CU U side U side mounting Rc (PT) NPT NPTF G (PF) Q SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 < (6 stations) (Manifold base) VV5FS CU-Q (2 position single) VFS30-5D-Q (2 position double) VFS320-5D-Q (Blank plate) VVFS3000-0A (Exhaust cleaner) AMC

64 VFS3000 Manifold for Exhaust Cleaner : VV5FS3-0T- Station - Port size - CD CU / U side D side U side D side U side mounting D side mounting : VV5FS3-0- Station - Port size - CD CU Note: This valve series is now only available with DIN connector. D side U side U side D side U side mounting D side mounting.7-64 n L L L n: Station Calculation formula L=33 X n+63 L2=33 X n+75

65 VFS3000 Manifold with Control Unit Control units (Filter, Regulator, Pressure switch, Air release valve) are all standardized to the one unit, and can be mounted on the manifold base without any attachments. Piping processes are eliminated. U side Non Precautions When using an air filter with auto drain or manual drain, mount the filter vertically. How to Order Manifold Specifications Manifold style : VV5FS3-0 : VV5FS3-0 Wiring With terminal block With multi-connector DIN connector With D-sub connector Applicable valve VFS3 00-F VFS3 0- D Porting specifications A,B port P, EA, EB port Common SUP, Common EXH 4, No. of stations 2 to 0 With multi-connector, or with D-sub connector: 8 stations maximum. Control Unit/Specifications Air filter (With auto drain/with manual drain) Filtration Regulator 5 m Set press. (Secondary) 0.05 to 0.85MPa Pressure switch () Set press. range: OFF Differential Contact 0. to 0.6MPa 0.08MPa or less a Light LED (Red) Max. switch capacity Max. operating current 2V AC, 2W DC 24V AC, DC or less: 50mA Air release valve (Single only) Operating press. range 0. to.0mpa VV5FS AP Series VFS3000 Manifold Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Base style/wiring 0T with terminal block 0C with multi-connector 0F with D-sub connector 0 Connector mounting direction Connector mounting Applicable base None 0T, 0 D D side 0C, 0F U U side Stations 02 2 stations Porting specification 0 0 stations Port specification Porting Base style 0T, 0: 2 to P EA, EB (A, B) 0 stations Side Common Common Base style 0C, 0F: 2 2 Bottom to 8 stations Option Port size P, EA, EB A, B M Mix D side N T F Thread Rc (PT) NPT NPTF G (PF) Control unit Control equipment Air filter with auto drain Air filter with manual drain Regulator Air release valve Pressure switch Blank plate (Air release valve) Blank plate (Filter, regulator) Required manifold block Control Unit/Optional Without air release valve (F, G type only) 5 24V DC 9 Other (50 or less) A AP M MP F G C E 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations station Please indicate manifold base mounting style, corresponding valve, and option parts. <<Ordering example>> with terminal blockrequires 2 stations (Manifold base) VV5FS3-0T AP-Q (2 position single) VFS300-5FZ-Q (2 position double) VFS3200-5FZ-Q <<Ordering example>> Requires 2 stations (Manifold base) (2 position single) Voltage for air release valve Order Made Air release valve adaptor plate (2) Q Contact SMC for other voltages (9) <> VVFS A-R (D side mounting) <> VVFS A-2R (D side mounting) (3) Pressure IS000P-2- switch Filter regulator MP2-3 Blank plate Pressure switch MP3-2 Air release valve VVFS A-0 Filter element INA B Note ) Rated voltage: 24V DC to 00V AC Inner voltage drop: 4V Note 2) Combination of valve VFS3 (single) and a release valve spacer can be used an air release valve. Note 3) style cannot be mounted afterwards. VV5FS A-Q VFS30-5D-Q SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

66 VFS3000 Manifold with Control Unit : VV5FS3-0T- Station - Port size -AP /Non Example for manifold : VV5FS3-0- Station - Port size -AP Example for manifold Note: This valve series is now only available with DIN connector. L L n L2 L3 (MP) L3 (AP) Calculation L=33 X n+63 L2=33 X n+75 L3=33 X n+259 L3=33 X n

67 VFS3000 Manifold Option Parts Individual SUP spacer: VVFS3000-P-03- () VVFS3000-P-03-2 (Non ) /Non Double check spacer: VVFS A- () VVFS A-2 (Non ) Individual EXH spacer: VVFS3000-R-03- () VVFS3000-R-03-2 (Non ) Interface regulator/p port regulation: ARBF P- () ARBF P-2 (Non ) SV SY SYJ SX VK VZ VF VFR VP7 SUP, EXH block disk: AXT636-A Interface speed control: VVFS A- () VVFS A-2 (Non ) Interface regulator/a port regulation: ARBF A- () ARBF A-2 (Non ) Interface regulator/b port regulation: ARBF B- () ARBF B-2 (Non ) VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-67

68 VFS3000 Manifold Base Construction /Non Replacement Parts No. q w e r t y u i o!3 Description Metal joint A Metal joint B Gasket Gasket O ring O ring O ring Terminal assembly Junction cover assembly Rubber plug Replacement Parts Sub-assembly Note) Manifold Base/Construction: with terminal block. No. Description Assembly part No. Component parts Applicable manifold base!0 02 Manifold block!0, Terminal i, Metal joint q, w, Gasket e, r, VVFS3000-A-- 03 Manifold block assembly O ring y, u, Receptacle assembly 02 VVFS3000-A-2-03 Manifold block!0, Metal joint q, w, Gasket e, r, O ring y, u!!2 End plate (U side) assembly End plate (D side) assembly VVFS3000-2A- VVFS3000-3A- End plate (U)!, Metal joint q, w, O ring t, y End plate (D)!2, Metal joint q, w, Gasket e VVFS3000-2A-2 VVFS3000-3A-2 End plate (U)!, Metal joint q, w, O ring t, y End plate (D)!2, Metal joint q, w, Gasket e.7-68 Material Steel plate Steel plate NBR NBR NBR NBR NBR For 0T For 0SU NBR Part No. VVFS A VVFS VVFS VVFS X 6.6 X.6 (End plate) 20 X 6 X 2 (Manifold block) 6.2 X 3 X.6 VVFS3000-6A VVFS3000-4A- stations AZ738-22A- stations AXT336-9 For increasing the manifold bases, please order the manifold block assembly number of the principal part assembly 9. For plug-in: The manifold base with terminal stand (integrated with a junction cover) is required with the 8 junction cover assembly.

69 5 Port Pilot/Metal Seal /Non SeriesVFS4000 Compact despite large flow capacity /2: Nl/min 3533 Small Power Consumption/.8W DC Easy to maintain 2 styles of sub-plates: plug-in and non plug-in JIS 2 position Single Non 3 position Closed centre Model Configuration Single 2 position Double 3 position Closed centre Exhaust centre Pressure centre Double check Standard Specifications Valve Electricity Model Effective area Port size Non (mm 2 ) (Nl/min) VFS400 VFS (3239) (3533) VFS4200 VFS (3239) (3533) VFS4300 VFS (2748) (2945) VFS4400 VFS (2748) (2945) VFS4500 VFS (34) (3337) VFS4600 VFS (669) (767) Max. operating cycle (CPM) (),000, Response time (ms) (2) 40 or less 5 or less 50 or less 50 or less 50 or less Weight (kg) (3) Note ) According to JIS B8375 (Once per 30 days) for the minimum operating frequency. Note 2) According to JIS B (The value at supply press. 0.5MPa). Note 3) The figures in the above list are for without subplate. In the case of with plug-in sub-plate and with non plug-in sub-plate, add 0.50 kgf and 0.43 kgf respectively. Note 4) "Note )" and "Note 2)" are with controlled clean air. Fluid Max. operating pressure Min. opertaing pressure Proof pressure Ambient and fluid temperature Lubrication Pilot valve manual override Shock/vibration resistance Protection structure Rated voltage Allowable voltage Coil insulation Apparent power (Power consumption) AC Power consumption DC Electrical entry or less.7 Air and inert gas.0mpa 2 position 0.MPa 3 position 0.5MPa.5MPa 0 to +60 C () Not required () Non-locking push style (Flush) 50/50m/s 2 (3) E: Dust proof (class 0), E: Drip proof (class 2), D: Splash proof (class 4) (4) 00V, 200V AC 50/60Hz, 24V DC 5 to +0% rated voltage Inrush Holding Class B or equivalent (30 ) (5) 5.6VA/50Hz, 5.0VA/60Hz 3.4VA (2.W)/50Hz, 2.3VA (.5W)/60Hz.8W Conduit terminal DIN connector Note ) Use dry-air at low temperatures. Note 2) Use turbine oil No. (ISO VG32), if lubricated. Note 3) Shock resistance: No malfunction from test using drop impact tester to axis and right angle directions of main valve and armature, each one time when energized and de-energized. (Value in the initial stage.) Vibration resistance: No malfunction from test with 8.3 to 2000Hz sweep, to axis and right angle directions of main valve and armature, each one when energized and de-energized. (Value in the initial stage.) Note 4) According to JIS C0920. Note 5) According to JIS C4003. SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Double Exhaust centre Pressure centre Double check Option Specifications Manual override Voltage Porting Option Pilot style Main valve Pilot valve External pilot () Direct manual override Non-locking push style (Extended), Locking style (Slotted), Locking style (Lever) 0 to 20V, 220V, 240V AC 50/60Hz 2V, 00V DC Bottom porting With indicator light and surge voltage suppressor, Non-rotating DIN connector Note ) Operating pressure: 0 to.0mpa Pilot pressure 2 position: 0. to.0mpa 3 position: 0.5 to.0mpa.7-69

70 VFS4000 How to Order Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Body O: sub-plate Electrical entry F: conduit teminal Porting B Side Bottom Option Option In an external pilot specification, bottom porting is impossible. Port size Without sub-plate EA, EB: 3 8 Thread N T F Rc (PT) NPT NPTF G (PF) VFS F 03 Q VFS4 2 0 D 03 Q position single 2 position double 3 position closed centre Configuration 3 position pressure centre 5 3 position double check 6 Z Indicator light/surge voltage suppressor Electrical entry D: DIN connector DO: Without connector None With indicator light and surge voltage suppressor Y: DIN connector (DIN 43650) YO: Without DIN connector Pilot valve manual override : Non-locking push style (Flush) A : Non-locking push style (Extended) 3 position exhausl centre For reverse pressure, it is applicable in external pilot specification. : sub-plate Body option 0 Standard Direct manual override Option Body Protective class class I (Mark: ) Pilot R Option Voltage 00V AC (50/60Hz) 2 200V AC (50/60Hz) 3 0V to 20V AC (50/60Hz) 4 220V AC (50/60Hz) 5 24V DC 6 2V DC 7 240V AC (50/60Hz) 9 Other (250 or less) Order Made Contact SMC for other voltages (9) Internal External Voltage How to Order Pilot Valve Assembly SF4 F 30 00V AC (50/60Hz) 2 200V AC (50/60Hz) 3 0V to 20V AC (50/60Hz) 4 220V AC (50/60Hz) 5 24V DC 6 2V DC 7 240V AC (50/60Hz) 9 Other (250 or less) Order Made Contact SMC for other voltages (9) Option Option Refer to p..7-5 for voltage conversion. B : Locking style (Slotted) C : Locking style (Lever) Q Manual override Non-locking push style (Flush) A Non-locking push style (Extended) B Locking style (Slotted) C Locking style (Lever)

71 VFS4000 Maximum Cylinder Speed System diagram S. G. P. piping system Conditions: Supply pressure 0.5MPa, Load factor 50% Solenoid valve VFS4000 Rubber hose piping system Conditions: Supply pressure 0.5MPa, Load factor 50% SV SY SYJ SX VK VZ VF VFR VP7 System Solenoid valve Speed controller ) * + VFS { 3 8 } (S=59.4mm2) VFS { 3 8 } (S=59.4mm2) VFS { 2 } (S=65mm2) Double Check Spacer/Specification Holding cylinder mid-position Specifications for a long periods Double check spacer The concurrent use of double check spacer with built-in double check valve can Applicable stop cylinder or mid-position and hold it solenoid valve without being affected by air leakage spool seals. AS (S=2mm 2 ) AS (S=73mm 2 ) AS (S=97mm 2 ) Non Silencer AN (S=60mm 2 ) AN (S=60mm 2 ) AN (S=60mm 2 ) Double check spacer Piping 3 8 Rubber hose (Fittings 4 pcs.) 3 8 Rubber hose (Fittings 4 pcs.) 2 Rubber hose (Fittings 4 pcs.) Leakage (cm 3 / min) VVFS A- VFS4400- F Solenoid one side energized Solenoid both sides de-energized Supply pressure: 0.5MPa Precautions In the case of 3 position double check valve (VFS46 0), check the leakage from piping and fittings in between valve and cylinder by means of synthetic detergent solutions, and ensure that there is no such leakage found there. Also check the leakage from cylinder seal and piston seal. If there is any leakage, sometimes the cylinder, when valve is de-energized, can move without stopping at mid-position. Be aware that if the exhaust side is restricted excessively, the intermediate stopping accuracy will decrease and will lead to improper intermediate stops. System Solenoid valve Speed controller Silencer Piping, -. VFS AS AN B, SGP { } (S=59.4mm2) (S=2mm 2 ) (S=60mm 2 ) (Elbow 4 pcs.) VFS AS AN { } 3 8, SGP 8 (S=59.4mm2) (S=73mm 2 ) (S=60mm 2 ) (Elbow 4 pcs.) VFS { } AN B, SGP AS (S=65mm2) (S=97mm 2 ) (S=60mm 2 ) (Elbow 4 pcs.) P P A B VVFS A-2 VFS440- D VFS440- E EA 230 or less EB EA 230 or less EB EA 0 EB Check Valve Operation The combination of VFS4 00, VFS and a double check spacer can be used as prevention of falling at the stroke end but cannot hold the intermediate position of the cylinder..7-7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

72 VFS4000 Construction 2 position single 2 position double 3 position closed centre/exhaust centre/pressure centre Closed centre Exhaust centre Pressure centre Component Parts No. q w e r t y u i Description Material Body Aluminium die cast Sub plate Spool/Sleeve Aluminium die cast Stainless steel Adaptor plate Aluminium die cast End plate Aluminium die cast Piston Resin Junction cover Resin Light cover Resin Note Platinum silver Platinum silver Black Black Sub-plate Assembly 03 VFS4000-P VFS4000-S- 04 Without mounting screw and gasket. Replacement Parts No. Description Material Part No. VFS4 VFS42 VFS43, 44, 45 o!0 Return spring Gasket Stainless steel NBR VF VF VF VF A VF ! Hexagonal socket head cap screw Steel M4 X 40 M4 X 40 M4 X 40!2 Detent assembly VF4000-2A!3 Pilot valve assembly Refer to "How to order Pilot valve assembly" on p

73 VFS Position Single/Double, 3 Position Closed Centre/Exhaust Centre/Pressure Centre/Double Check 2 position single: VFS400- F SV Bottom ported SY SYJ SX VK VZ VF VFR VP7 2 position double: VFS4200- F 3 position closed centre: VFS4300- F 3 position exhaust centre: VFS4400- F 3 position pressure centre: VFS4500- F 3 position double check: VFS4600- F VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-73

74 VFS4000 Non 2 position single: VFS40- D 2 Position Single/Double, 3 Position Closed Centre/Exhaust Centre/Pressure Centre/Double Check Bottom Ported Note: This valve series is now only available with DIN connector. 2 position double: VFS4200- D 3 position closed centre: VFS430- D 3 position exhaust centre: VFS440- D 3 position pressure centre: VFS450- D 3 position double check: VFS460- D.7-74

75 Series VFS4000 Manifold : With Terminal Block Since lead wires of solenoid valve are connected with the terminals on upper surface of terminal block, corresponding lead wires from power source can be wired at the bottom of terminal block. : With Multi-connector Master connection of power and solenoid valves. Quick wiring permits easier installation. U side : With D-sub Connector Wide range of interchangeability (MIL Spec DIN connector terminal 25 pcs attached.) Quick wiring permits easier installation. U side Non : DIN Connector Wiring for every valve. D side D side VV5FS4 Series VFS4000 Manifold with terminal block Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Mounting direction D U 0T Stations 02 2 stations 0 Option stations Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom (Wiring specifications Please refer to p.7-8.) VV5FS4 Series VFS4000 Manifold with multi-connector of connector D side mounting U side mounting Ordering source area code Code areas Japan, Asia - Australia E Europe N North America VV5FS4 Series VFS4000 Manifold with D-sub connector Mounting direction D U of connector D side mounting U side mounting Ordering source area code Code areas Japan, Asia - Australia E Europe N North America 0C D Stations 02 2 stations 08 8 stations Max: 8 stations. (Wiring specifications Please refer to p..7-8.) VV5FS4 Series VFS4000 Manifold Non Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Port size M P, EA, EB Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom Option 0F Option D Stations 02 2 stations 08 8 stations Max: 8 stations. Q A, B Mix Bottom ported: Only. 3 8 Port size M P, EA, EB Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom 0 Stations 02 2 stations 0 Option 0 stations A, B Mix Bottom ported: Only. 3 8 Port size M Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom P, EA, EB Port size M A, B Mix Bottom ported: Only. 3 8 Q P, EA, EB A, B Mix Bottom ported: Only. 3 8 Q Q Thread Rc (PT) N NPT T NPTF F G (PF) Thread N T F Thread N T F N T F Rc (PT) NPT NPTF G (PF) Rc (PT) NPT NPTF G (PF) Thread Rc (PT) NPT NPTF G (PF).7-75 SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

76 VFS4000 Manifold Specifications Base style VV5FS4-0 VV5FS4-0 Wiring With terminal block With multi-connector With D-sub connector DIN Connector Porting A, B port Side, Bottom Port size P, EA, EB A, B 2 3 8, 2 With multi-connector, or with D-sub connector:8 stations max. No. of stations 2-0 Applicable solenoid valve VFS4 00- F VFS4 0- D How to Order Manifold Please indicate manifold base mounting style, corresponding valve, and option parts. <<Example>> with terminal block - 6 stations (Manifold base) VV5FS4-0T Q (2 position single) VFS400-5FZ -Q 3 (2 position double) VFS4200-5FZ -Q. 2 (Blanking plate) VFS4000-0A.. Manifold Stations and Effective Area (mm 2 ) (Nl/min Factor) Porting/No. of stations P A or B A EA, B EB Port size:/2 First station 50.4 (2748) 57.6 (340) Fifth station 48.6 (2650) 55.8 (3043) Tenth station 47.7 (2257) 55.8 (3043) - 6 stations (Manifold base) VV5FS Q.. (2 position single) VFS40-5D-Q. 5 (3 position exhaust center) VFS40-5D-Q.. (Individual EXH spacer) VVFS4000-R Manifold/Option Parts Assembly Individual SUP spacer An individual SUP spacer set on manifold block can form SUP port for every valve. Body Part No. VVFS4000-P-03- VVFS4000-P-03-2 Interface speed control Needle valve set on the manifold block can control cylinder speed by throtting exhaust. Body Part No. VVFS A- VVFS A-2 Manifold Options With exhaust cleaner / Valve exhaust noise dampening: 35dB or more. Oil mist collection: Rate of collection 99.9% or more. Piping hours reduced. Individual EXH spacer An individual EXH spacer set on manifold block can form EXH port for every valve. Body Part No. VVFS4000-R-04- VVFS4000-R-04-2 Double check spacer The concurrent use of double check spacer with built-in double check valve can stop the cylinder at mid-position and hold for a long time without being affected by the air leakage across spool seals. Body Part No. VVFS A- VVFS A-2 For more information, please refer tp p With control unit / Filter, regulation valve, pressure switch and air release valve are all combined to form one unit. Piping work eliminated. SUP block disk When supplying manifold with more than two different pressures, high and low, insert a block plate in between stations subjected to different pressures. EXH block disk When valve exhaust affects the other stations on the circuit or when the reverse pressure valve is used to standard manifold valve, insert EXH block plate in between stations to separate valve exhaust. EXH block disk Interface regulator Interface regulator set on manifold block can regulate the pressure to each valve. (Refer to p..7-6 for flow characteristic). Body Part No. AXT634-0A Body Body Part No. AXT634-A SUP block disk P regulation ARBF P- ARBF P-2 A regulation ARBF A- ARBF A-2 B regulation ARBF B- ARBF B-2 Blank plate When disessembling valve for maintenance purposes or when spare manifold stations are required, install a blank plate on the manifold block. Body Part No. VVFS4000-0A For more information, please refer to p With serial interface unit plug-in Solenoid valve wiring process reduced considerably. Disperse installation possible. Manifold solenoid valve: 8 stations max, 32 positions (52 solenoids). Maintenance and inspection are easy..7-76

77 VFS4000 Manifold /Non (With terminal block): VV5FS4-0T- Station - Port size SV SY SYJ U side SX VK VZ Bottom ported: VV5FS4-0T- Station 2- Port size VF VFR VP7 General formula of weight/manifold M=0.565n (kg) n: Stations : VV5FS4-0- Station - Port size D side U side VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Bottom ported: VV5FS4-0- Station 2- Port size Note: This valve series is now only available with DIN connector. L General formula of weight/manifold M=0.478n+0.67 (kg) L L2 n n: Station Equation L=43 X n+70 L2=43 X n+82 D side.7-77

78 VFS4000 Manifold with Multi-Connector/With D-sub Connector with Multi-connector: VV5FS4-0CD- Station - Port size, VV5FS4-0CU- Station - Port size U side Bottom ported: VV5FS4-0 - Station 2- Port size CD CU General formula of weight/manifold M=0.565n (kg) n: Station Wiring specifications: Please refer to p D side with D-sub connector: VV5FS4-0FD- Station - Port size, VV5FS4-0FU- Station - Port size U side Bottom ported: VV5FS4-0 - Station 2- Port size FD FU General formula of weight/manifold M=0.57n (kg) n: Station Wiring specifications: Please refer to p D side n L L L Equation L=43 X n+70 L2=43 X n

79 VFS4000 Manifold with Exhaust Cleaner Serves to protect work environment. Valve exhaust noise dampening: 35dB or more. Collection rate of drainage and oil mist: 99.9 % or more. Piping process reduced. U side Precautions When using exhaust cleaner, mount it downwards. Protective class class I (Mark: ) Exhaust cleaner (Optional) Exhaust cleaner (Optional) D side Manifold Specifications With terminal block Wiring With multi-connector DIN connector With D-sub connector Applicable valve VFS4 00- F VFS4 0- D Common SUP, Common EXH Porting A, B port Side: 3 8, 2, Bottom: 3 8 (option) P, EA, EB port P: 2, EXH: / 2 No. of stations 2 to 0 () Applicable exhaust cleaner AMC60-0 (Connecting port size ), AMC80-4 (Connecting port size 2 )(2) VV5FS4 Series VFS4000 Manifold Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Base style 0T 0C 0F 0 Manifold style with terminal block with multi-connector with D-sub connector : VV5FS4-0 Connector mounting direction With connector Applicable base None 0T, 0 D D-side mounting 0C, 0F U U-side mounting Stations CD stations 0 stations Base style 0T, 0: 2-0 stations Base style 0C, 0F: 2-8 stations Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom Option Please indicate manifold base mounting style, corresponding valve, and option parts. <<Example>> with terminal block (6 stations) (Monifold base) VV5FS4-0T CD-Q (2 position single) VFS400-5FZ-Q (2 position double) VFS4200-5FZ-Q (Blank plate) VVFS4000-0A (Exhaust cleaner) AMC60-0 Port size P M 3 2 Thread N T F Rc (PT) NPT NPTF G (PF) A, B Mix : VV5FS4-0 Note ) With multi-connector, or with D-sub connector: 8 stations max. Note 2) Stations of 5 or more and high frequency of operation should be used with AMC80-4. Exhaust cleaner AMC60-0 and AMC80-4 are not attached. How to Order Bottom ported: Only. 3 8 Q Exhaust cleaner mounting direction Exhaust cleaner mounting direction CD D side D side mounting CU U side U side mounting Please indicate exhaust cleaner size or port size. SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Refer to p.5.3- for details on exhaust cleaners. (6 stations) (Manifold base) VV5FS CU-Q (2 position single) VFS40-5D-Q (2 position double) VFS420-5D-Q (Blank plate) VVFS4000-0A (Exhaust cleaner) AMC

80 VFS4000 Manifold with Exhaust Cleaner /Non : VV5FS4-0T- Station - Port size - CD CU D side U side D side U side U side mounting D side mounting ( ) : AMC80 : VV5FS4-0- Station - Port size - CD CU Note: This valve series is now only available with DIN connector. D side U side U side D side U side mounting D side mounting ( ) : AMC80 n L L L n: Station Equation L=43 X n+70 L2=43 X n

81 VFS4000 Manifold with Control Unit Control unit (Filter, Regulator, Pressure switch, Air release valve) are all standardized to the one unit, and can be mounted on the manifold base without any attachments. Piping processes are eliminated Precautions When using an air filler with auto drain or manual drain, mount the filter vertcally. How to Order Manifold Specifications Wiring Manifold style Applicable valve Porting specifications No. of stations : VV5FS4-0 : VV5FS4-0 With terminal block With multi-connector DIN connector With D-sub connector VFS4 00- F VFS4 0- D Common SUP, Common EXH A, B port Side: 3 8, 2, Bottom: 3 8 P, EA, EB port Side: 2 2 to 0 () With multi-connector, or with D-sub connector: 8 stations max. Control Unit/Specifications Air fillter (With auto drain/with manual drain) Filtration Regulator 5 m Set press. (Secondary) 0.05 to 0.85MPa Pressure switch () Set press. range: OFF Differential Contact 0. to 0.6MPa 0.08MPa or less a Light LED (RED) Max. switch capacity 2VA (AC), 2W (DC) Max. operating current 24V AC, DC or less: 50mA Air release valve (Single only) Operating press. range 0. to.0mpa VV5FS4 0C D AP Series VFS4000 Manifold Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Base style/wiring 0T with terminal block 0C 0F 0 Stations 02 2 stations with multi-connector with D-sub connector Connector mounting direction Connector mounting Applicable base None 0T, 0 D D side 0C, 0F U U side Port specifications P EA, EB 0 0 stations Base style 0T,0: 2 to 0 stations Base style 0C, 0F: 2 to 8 stations Porting (A, B) Side Common Common 2 Bottom Option Port size P, EA, EB A, B M Mix Bottom ported: Only. 3 8 N T F Thread Rc (PT) NPT NPTF G (PF) Control unit Control Unit/Options Air release valve adaptor plate (2) Control apparatus Air filter with auto drain Air filter with manual drain Regulator Air release valve Pressure switch Blank plate (Air release valve) Blank plate (Filter, Regulator) Mounting manifold block <> VVFS A-R (D side mounting) <Non > VVFS A-2R (D side mounting) Pressure IS000P-2- switch With control unit/filter regulator MP2-3 Blank plate (3) Pressure switch MP3-2 Air release valve VVFS A-0 Filter element 04-5B Note ) Voltage: 24V DC to 00V AC Inner voltage drop: 4V Note 2) Combination of a valve VFS4 (single) and a release valve spacer can be used an air release valve. Note 3) The non plug-in style cannot be Voltage of air release valve None (F, G type only) 5 24V DC 9 Other (50 or less) Order Made A AP M MP F G C E 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations 2 stations station Please indicate manifold base mounting style, corresponding valve, and option parts. <<Example>> with terminal block In order to mount control unit, it requires 2 stations. (Manifold base) VV5FS4-0T AP-Q (2 position single) VFS400-5FZ-Q (2 position double) VFS4200-5FZ-Q Non - In order to mount control unit, it requires 2 stations. (Manifold base) (2 position single) Q Contact SMC for other voltages (9) VV5FS A-Q VFS40-5D-Q SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

82 VFS4000 Manifold with control unit /Non : VV5FS4-0T- Station - Port size -AP Example for manifold U side D side : VV5FS4-0- Station - Port size -AP Example for manifold Note: This valve series is now only available with DIN connector. U side D side.7-82 L L n L2 L3 (MP) L3 (AP) n: Station Equation L=43 X n+70 L2=43 X n+82 L3=43 X n L3=43 X n+298

83 VFS4000 Manifold Optional Parts Individual SUP spacer: VVFS4000-P-03- () VVFS4000-P-03-2 () /Non Double check spacer: VVFS A- () VVFS A-2 () SV SY SYJ SX Individual EXH spacer: VVFS4000-R-04- () VVFS4000-R-04-2 () Interface ragulator/p port ragulation: ARBF P- () ARBF P-2 () VK VZ VF VFR VP7 VQC SQ SUP block disk: AXT634-0A EXH block disk: AXT634-A Interface regulator/a port regulation: ARBF A- () ARBF A-2 () VQ VQ4 VQ5 VQZ VQD VFS Interface speed control: VVFS A- () VVFS A-2 () ( ): EXH block disk Interface regulator/b port regulation: ARBF B- () ARBF B-2 () VS VS7 VQ7.7-83

84 VFS4000 Manifold Base Construction /Non Replacement Parts No. q w e r t y u i o!3 Description Metal joint A Metal joint B Gasket Gasket Gasket O ring O ring Terminal assembly Junction cover assembly Rubber plug Material Steel plate Steel plate NBR NBR NBR NBR NBR 0T 0SU NBR Replacement Parts Sub-assembly Part No. VVF A VVF VVF (For end plate) VVF (For manifold block) VVF AS568-0 P-3 VVFS4000-6A VVF4000-4A- stations AZ738-30A- stations AXT336-9 For increasing the manifold bases, please order the manifold block assembly number of the principal part assembly!0. For plug-in: The manifold base with terminal stand (integrated with a junction cover) is required with the o junction cover assembly. Note) Manifold Bace/Construction: with terminal block. No. Description Assembly No. Component parts Applicable manifold base!0 03 Manifold block!0, Terminal i, Metal joint q, w, Gasket r, VVF4000-A-- 04 Manifold block assembly Receptacle assembly 03 VVF4000-A-2-04 r Manifold block!0, Metal joint q, w, Gasket Non!!2 End plate assembly (U side) End plate assembly (D side) VVF4000-3A- End plate(d)!2, Metal joint q, w, Gasket e, t, O ring y, u VVF4000-2A- VVF4000-3A-2 End plate(u)!, Metal joint q, w End plate(d)!2, Metal joint q, w, Gasket e, t, O ring y, u Non VVF4000-2A-2 End plate(u)!, Metal joint q, w Non.7-84

85 5 Port Pilot/Metal Seal /Non SeriesVFS5000 Compact despite large flow capacity 3/4: Nl/min 5595 Small Power Consumption/.8W DC Easy to maintain 2 styles of sub-plates: plug-in and non plug-in JIS 2 position Single Double 3 position Closed centre Exhaust centre Pressure centre Double check Model Configuration 2 position 2 position Single Double Closed centre Exhaust centre Pressure centre Double check Model Effective area Max. operating Response Weight Port size (mm 2 ) (Nl/min) cycle (CPM) () time (ms) (2) (kg) (3) (439) VFS500 VFS (5300) or less (5595) (439) VFS5200 VFS (5300) or less (5595) (3632) VFS5300 VFS (455) or less (47) (3828) VFS5400 VFS (47) or less (4907) (3828) VFS5500 VFS (47) or less (4809) (259) VFS5600 VFS (2650) or less (2748) Note ) According to JIS B8375 (Once per 30 days) for the minimum opereting frequency. Note 2) According to JIS B (The value at supply pressure 0.5MPa.) Note 3) The figures in the above list are without sub plate. In the case of with plug-in sub-plate, and with non plug-in sub-plate add 3 8, kg, kg and, 3 8, kg, kg respectively. Note 4) Note ) and Note 2) are with controlled clean air. Standard Specifications Valve Solenoid Fluid Max. operating pressure Min. operating pressure Proof pressure Ambient and fluid temperature Lubrication Pilot valve manual override Shock/vibration resistance Protection stucture Rated voltage Allowable voltage Coil insulation Apparent power (Power consumption) AC Power consumption DC Electrical entry Option Specifications Inrush Holding Air, inert gas.0mpa 0.MPa.5MPa 0 to +60 C () Not required (2) Non-locking push (Flush) 50/50m/s 2 (3) E type: dust proof (Protection level 0), F type: drip proof (Protection level 2), D type: splash proof (Protection level 4) (4) 00V, 200V AC, 50/60Hz, 24V DC 5 to +0% rated voltage Class B or equivalent (5) 5.6VA/50Hz, 5.0VA/60Hz 3.4VA (2.W)/50Hz, 2.3VA (.5W)/60Hz.8W Non Conduit terminal DIN connector Note ) Use dry-air at low temperatures. Note 2) Use turbine oil No. (ISO VG32), if lubricated Note 3) Shock resistance: No malfunction from test using drop impact tester to axis and right angle directions of main valve and armature, each one time when energized and de-energized. Vibration resistance: No malfunction from test with 8.3 to 2000Hz sweep, to axis and right angle directions of main valve and armature, each one when energized and de-energized. (Value in the initial stage.) Note 4) According to JIS C0920. Note 5) According to JIS C4003. Pilot External pilot () Manual override Main valve Pilot valve Direct manual override Non-locking push style (Extended), Locking style (Slotted), Locking style (Lever) Voltage Porting Option 0V to 20V, 220V, 240V AC (50/60Hz) 2V, 00V DC Bottom porting With indicator light and surge voltage suppressor, Non-rotating DIN connector Note ) Operating pressure: 0 to.0mpa Pilot pressure 0. to.0mpa.7-85 SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

86 VFS5000 How to Order Ordering source area code Code - E N areas Japan, Asia Australia Europe North America Body O: sub-plate Electrical entry F: conduit with terminal B Porting Side Bottom Option Bottom piping not available for external pilot specification Port size Without sub-plate Thread Rc (PT) N NPT T NPTF F G (PF) VFS F 04 Q VFS5 0 5 D 06 Q Option None Z With indicator light and surge voltage suppressor P Non-rotating DIN connector ZP With indicator light and surge voltage suppressor, Non-rotating DIN connector Pilot valve manual override : Non-locking push style (Flush) 2 2 position single 2 position double Configuration 3 position pressure centre 5 3 position double check 6 Electrical entry D: DIN connector DO: without DIN connector P, ZP: DIN type only. Y: DIN connector (DIN 43650B) YO: without DIN connector A : Non-locking push style (Extended) B : Locking style (Slotted) 3 position closed centre 3 3 position exhausl centre 4 Body : sub-plate Body option 0 Standard Direct manual override Option Protective class class I (Mark: ) Pilot R Option Voltage 00V AC 50/60Hz 2 200V AC 50/60Hz 3 0 to 20V AC 50/60Hz 4 220V AC 50/60Hz 5 24V DC 6 2V DC 7 240V AC 50/60Hz 9 Other (250 or less) Order Made Contact SMC for other voltages (9) Internal External How to Order Pilot Valve Assembly SF4 Voltage F 30 Q 00V AC 50/60Hz 2 200V AC 50/60Hz 3 0 to 20V AC 50/60Hz 4 220V AC 50/60Hz 5 24V DC 6 2V DC 7 240V AC 50/60Hz 9 Other(250 or less) C : Locking style (Lever) Option Manual override Non-locking push style (Flush) A Non-locking push B style (Extended) Locking style (Slotted) C Locking Style (Lever) Option Order Made Contact SMC for other voltages (9).7-86 Refer to p..7-5 for voltage conversion.

87 VFS5000 Maximum Cylinder Speed Conditions: Supply pressure 0.5MPa, Load factor 50% System diagram Rubber hose piping system Solenoid valve Speed controller ) Silencer VFS AS AN { 3 4 } { 3 4 } { 3 4 } (S=02.6mm 2 ) (S=20mm 2 ) (S=60mm 2 ) Solenoid valve VFS5000 Piping 3 4 B (Fittings 4 pcs.) SV SY SYJ SX VK VZ VF VFR VP7 Double Check Spacer/Specification Holding cylinder mid-position for a long periods The concurrent use of double check spacer with built-in double check valve can stop cylinder or midposition and hold it without being affected by air leakage spool seals. Double check spacer Specifications Double check spacer Applicable solenoid valve Leakage (cm 3 /min) S. G. P. Piping system Solenoid valve Speed controller Silencer Piping * VVFS A- VFS5400- F Solenoid one side energized Solenoid both sides de-energized Supply pressure: 0.5MPa P P A B VFS AS AN { 3 4 } { 3 4 } { 3 4 } (S=02.6mm 2 ) (S=20mm 2 ) (S=60mm 2 ) VVFS A-2 VFS540- D EA 320 or less EB EA 320 or less EB EA 0 EB 3 4 B (Fittings 4 pcs.) Check Valve Operation VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Precautions In the case of 3 position double check valve (VFS56 0), check the leakage from piping and fittings in between valve and cylinder by means of synthetic detergent solutions, and ensure that there is no such leakage found there. Also check the leakage from cylinder seal and piston seal. If there is any leakage, sometimes the cylinder, when valve is de-energized, can move without stopping at mid-position. Be aware that if the exhaust side is restricted excessively, the intermediate stopping accuracy will decrease and will lead to improper intermediate stops. The combination of VFS5 0 0, VFS and a double check spacer can be used as prevention of falling at the stroke end but cannot hold the intermediate position of the cylinder..7-87

88 VFS5000 Construction 2 position single 2 position double Closed centre 3 position closed centre/exhaust centre/pressure centre Exhaust centre Pressure centre Component Parts No. q w e r t y u i Description Body Sub plate Spool/Sleeve Adaptor plate End plate Piston Junction cover Light cover Replacement Parts.7-88 Material Aluminium die cast Aluminium die cast Stainless steel Aluminium die cast Aluminium die cast Resin Resin Resin Note Platinum silver Platinum silver Black Black Sub-plate Assembly VFS5000-P Non VFS5000-S Without mounting screw and gasket. No. Description Material Part No. VFS5 VFS52 VFS53, 54, 55 o!0 Return spring Gasket Stainless steel NBR VFS AXT AXT AXT627-8 AXT627-0-! Hexagonal socket head cap screw Steel M5 X 50 M5 X 50 M5 X 50!2 Detent assembly AXT50-9!3 Pilot valve assembly Refer to How to order Pilot valve assembly on p

89 VFS Position Single/Double, 3 Position Closed Centre/Exhaust Centre/Pressure Centre/Double Check 2 position single: VFS500- F SV SY SYJ SX VK Bottom Ported VZ VF VFR VP7 2 position double: VFS5200- F 3 position closed centre: VFS5300- F 3 position exhaust centre: VFS5400- F 3 position pressure centre: VFS5500- F 3 position double check: VFS5600- F ( ):3/4 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 ( ):3/4 ( ):3/4.7-89

90 VFS5000 Non 2 position single: VFS50- D 2 Position Single/Double, 3 Position Closed Centre/Exhaust Centre/Pressure Centre/Double Check Note: This valve series is now only available with DIN connector. ( ):3/4 2 position double: VFS520- D 3 position closed centre: VFS530- D 3 position exhaust centre: VFS540- D 3 position pressure centre: VFS550- D 3 position double check: VFS560- D ( ):3/4 ( ):3/4.7-90

91 Series VFS5000 Manifold : With Terminal Block Since lead wires of solenoid valve are connected with the terminals on upper surface of terminal block, corresponding lead wires from power source can be wired at the bottom of terminal block. : With Multi-connector Master connection of power and solenoid valves. Quick wiring permits easier installation. U side : With D-sub Connector Wide range of interchangeability (MIL Spec. DIN connector terminal 25 pcs attached.) Quick wiring permits easier installation. U side :DIN Connector Wiring for every valve. D side D side VV5FS5 Series VFS5000 Manifold with terminal block Ordering source area code Code areas Japan, Asia - Australia E Europe N North America 0T Stations 02 2 stations stations Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom Option (Wiring specifications: Please refer to p..7-8.) VV5FS5 Series VFS5000 Manifold with multi-connector Mounting direction of connector D D side mounting U U side mounting Ordering source area code Code areas Japan, Asia - Australia E Europe N North America VV5FS5 Series VFS5000 Manifold with D-sub connector Mounting direction of connector D D side mounting U U side mounting Ordering source area code Code areas Japan, Asia - Australia E Europe N North America 0C D Stations 02 2 stations 08 (Wiring specifications: Please refer to p..7-8.) VV5FS5 Series VFS5000 Manifold Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Port size M P, EA, EB stations Max: 8 stations. Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom 0F D Stations 02 2 stations 08 8 stations Option Q A, B Mix Bottom ported: only. 2 Port size M P, EA, EB Max: 8 stations. Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom 0 Stations 02 2 stations 0 0 stations Option A, B Mix Bottom ported: only. 2 Port size M Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom Option P, EA, EB Port size M A, B Mix Bottom ported: only. 2 Q P, EA, EB A, B Mix Bottom ported: only. 2 Q Q Thread Rc (PT) N NPT T NPTF F G (PF) Thread Rc (PT) N NPT T NPTF F G (PF) Thread Rc (PT) N NPT T NPTF F G (PF) Thread Rc (PT) N NPT T NPTF F G (PF) SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-9

92 VFS5000 Manifold Specifications Base style VV5FS5-0 VV5FS5-0 Wiring With terminal block With multi-connector With D-sub connector DIN Connector Porting A, B port Side, Bottom Port size P, EA, EB A, B With multi connector, with D sub-connector: 8 stations at max No.of stations Manifold Stations and Effective Area (mm 2 ) (Nl/min) Porting/No. of stations P A or B A EA, B EB Port size:/2, 3/4 First station 73.0 (3975) 88.2 (4809) Fifth station 73.0 (3975) 88.2 (4809) 2 to 0 Applicable solenoid valve VFS5 00- F VFS5 0- D Tenth station 7.4 (3897) 88.2 (4809) How to Order Manifold Please indicate manifold base mounting style, corresponding valve, and option parts. <<Example>> with terminal block 6 stations (Manifold base) VV5FS5-0T Q (2 position single) VFS500-5FZ-Q.. 3 (2 position double) VFS5200-5FZ-Q 2 (Blanking plate) VVFS5000-0A - 6 stations (Manifold base) VV5FS Q.. (2 position single) VFS50-5D-Q. 5 (3 position exhaust centre) VVFS540-5D-Q (Individual EXH spacer) AXT628-9A-2.. Manifold/Option Parts Assembly Individual SUP spacer An idividual SUP spacer set on manifold block can form SUP port for every valve. Body Part No. VVFS5000-P-04- VVFS5000-P-04-2 Interface speed control Needle valve set on the manifold block can control cylinder speed by throttling exhaust. Body Part No. VVFS A- VVFS A-2 Manifold Options With exhaust cleaner / Valve exhaust noise dampening: 35dB or more. Oil mist collection : Rate of collection 99.9% or more. Piping process reduced. Individual EXH spacer An individual EXH spacer set on manifold block can form EXH port for every valve. Body Part No. VVFS5000-R-04- VVFS5000-R-04-2 SUP block disk When supplying manifold with more than two different pressures, high and low, insert a block plate in between stations subjected to different pressures. Body Part No. AXT628-2A EXH block disk When valve exhaust affects the other stations on the circuit or when the reverse pressure valve is used to standard manifold valve, insert EXH block plate in between stations to separate valve exhaust. Body Part No. AXT52-4-A Double check spacer The concurrent use of double check spacer with built-in double check valve can stop the cylinder at mid-position and hold for a long time without being affected by the air leakage across spool seals. Body Part No. VVFS A- VVFS A-2 Interface regulator Interface regulator set on manifold block can regulate the pressure to each valve. Refer to p..7-6 for flow characteristic. Body P regulation ARBF P- ARBF P-2 A regulation ARBF A- ARBF A-2 B regulation ARBF B- ARBF B-2 For more information, please refer to p With serial interface unit Solenoid valve wiring process reduced considerably. Disperse installation possible. Manifold solenoid valve: 8 stations max, 32 positions (52 solenoids). Maintenance and inspection are easy. EXH block disk.7-92 SUP block disk Blank plate When disassembling valve for maintenance purposes or when spare manifold stations are required, install a blank plate on the manifold block. Body Part No. VVFS5000-0A

93 Manifold /Non (with terminal block): VV5FS5-0T- Station - Port size VFS5000 Bottom ported: VV5FS5-0T- Station 2- Port size General formula of weight/manifold M=0.9n+.62 (kg) VV5FS5-0- Station 2- Port size DIN connector n: Station : VV5FS5-0- Station - Port size Grommet with terminal U side D side ( ): A/B port 3/4 U side D side SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 Note: This valve series is now only available with DIN connector. General formula of weight/manifold M=0.8n+.23 (kg) n: Station n L L L Equation L=5 X n+92 L2=5 X n+0 ( ): A/B port 3/4.7-93

94 VFS5000 Manifold with Multi-Connector/With D-Sub Connector with multi-connector: VV5FS5-0CD- Station - Port size, VV5FS5-0CU- Station - Port size U side Bottom ported: VV5FS5-0 - Station - Port size CD CU D side General formula of weight/manifold M=0.96n+.709 (kg) n: Station Refer to p..7-8 for wiring specifications. ( ): A/B port 3/4 with D-sub connector: VV5FS5-0FD- Station - Port size, VV5FS5-0FU- Station - Port size U side Bottom ported: VV5FS5-0 - Station 2 - Port size FD FU General formula of weight/manifold M=0396n+.633 (kg) n: Station L L L2 n.7-94 Refer to p.7-8 for wiring specifications Equation L=5 X n+92 L2=5 X n+0 D side ( ): A/B port 3/4

95 VFS5000 Manifold with Exhaust Cleaner Serves to protect working environment. Valve exhaust noise dampening: 35dB or more. Collection rate of drainage and oil mist: 99.9% or more. Piping process reduced. U side Protective class class I (Mark: ) Exhaust cleaner (Optional) Precautions When using exhaust cleaner, mount it downwards. Refer to p.5.3- for Exhaust Cleaner details. Manifold Specifications Manifold Model : VV5FS5-0 : VV5FS5-0 Wiring With terminal block DIN connector With multi-connector Grommet terminal With D-sub connector Applicable valve VFS5 00- F VFS5 0- D, VFS5 0- E Common SUP, Common EXH Porting Rc (PT) No.of stations A, B port P, EA, EB port Side: 2, 3 4, Bottom: 2 (Option) P: 3 4, EXH: 2 2 to 0 () Applicable exhaust cleaner AMC80-4 (Connecting port Rc (PT)) (2) 2 Note ) With multi connector, or with D-sub connector: 8 stations max. Note 2) Exhaust cleaner: Not attached. How to Order VV5FS5 Series VFS5000 Manifold Ordering source area code Code areas Japan, Asia - Australia E Europe N North America D side Base style Exhaust cleaner 0T (Optional) with terminal block 0C with multi-connector 0F with D-sub connector 0 Connector mounting direction With connector Applicable base None 0T, 0 D D-side mounting 0C, 0F U U-side mounting Stations Base style 0T, 0: 2-0 stations Base style 0C, 0F: 2-8 stations CD stations 0 stations Port specifications Porting P EA, EB (A, B) Side Common Common 2 Bottom Option Please indicate manifold base mounting style, corresponding valve, and option parts. <<Example>>Á with terminal block (6 stations) (Manifold base) VV5FS5-0T CD-Q (2 position single) VFS500-5FZ-Q (2 position double) VFS5200-5FZ-Q (Blank plate) VVFS5000-0A (Exhaust cleaner) AMC80-4 (6 stations) (Manifold base) VV5FS CU-Q (2 position single) VFS50-5D-Q (2 position double) VFS520-5D-Q (Blank plate) VVFS5000-0A (Exhaust cleaner) AMC80-4 Port size M Thread Rc (PT) N NPT T NPTF F G (PF) P A, B Mix Bottom ported: Only 2 Q Exhaust cleaner mounting direction Exhaust cleaner mounting direction CD D side D side mounting CU U side U side mounting SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-95

96 VFS5000 Manifold with Exhaust Cleaner /Non : VV5FS5-0T- Station - Port size - CD CU U side mounting D side mounting ( ): A/B port 3/4 : VV5FS5-0- Station - Port size - CD CU Note: This valve series is now only available with DIN connector. U side mounting D side mounting ( ): A/B port 3/4 n L L L n: Station Equation L=5 X n+92 L2=5 X n

97 VFS5000 Manifold Option Parts Individual SUP spacer: VVFS5000-P-04- () VVFS5000-P-04-2 () /Non Double check spacer: VVFS A- () VVFS A-2 () SV SY SYJ SX Individual EXH spacer: VVFS5000-R-04- () VVFS5000-R-04-2 () Interface regulator/p port regulation: ARBF P- () ARBF P-2 () VK VZ VF VFR VP7 VQC SQ SUP block disk: AXT628-2A EXH block disk: AXT52-4-A Interface regulator/a port regulation: ARBF A- () ARBF A-2 () VQ VQ4 VQ5 VQZ VQD VFS Interface speed control: VVFS A- () VVFS A-2 () ( ) : SUP block disk Interface regulato/b port regulation: ARBF B- () ARBF B-2 () VS VS7 VQ7.7-97

98 VFS5000 Manifold Base Construction /Non Replacement Parts No. q w e r t y u i o!3 Description Metal joint A Metal joint B O ring O ring O ring O ring O ring Terminal assembly Junction cover assembly Rubber plug Material Steel plate Steel plate NBR NBR NBR NBR NBR For 0T For 0SU NBR Replacement Parts Sub-assembly No.!0!!2 Description Manifold block assembly End plate (U side) assembly End plate (D side) assembly VVFS5000-A-2- VVFS5000-2A- VVFS5000-2A-2 VVFS5000-3A- VVFS5000-3A-2 Part No. AXT628-6-A AXT AS AS AS AS AS AXT628-5-A VVFS5000-4A- stations AZ738-3A- stations AXT336-9 Assembly part No. VVFS5000-A For increasing the manifold bases, please order the manifold block assembly number of the principal part assembly!0. For plug-in: The manifold base with terminal stand (integrated with a junction cover) is required with the o junction cover assembly. Note) Manifold Base/Constraction: with terminal block. Component parts Applicable manifold base Manifold block!0, Metal joint q, w, Terminal i, O ring e, r, t, y, u, Receptacle assembly Manifold block!0, Metal joint q, w, O ring e, r, t, y, u End plate (U)!, Metal joint q, w End plate (U)!, Metal joint q, w End plate (D)!2, Metal joint q, w, O ring e, r, t, y, u End plate (D)!2, Metal joint q, w, O ring e, r, t, y, u.7-98

99 5 Port Pilot/Metal Seal /Non SeriesVFS6000 Large flow/: Nl/min 985 Low power consumption/.8w DC Easy maintenance 2 styles of sub-plates: and non plug-in JIS 2 Position Single Double Model Configuration Single 2 position Double Standard Specifications Valve Solenoid Option Specifications Model VFS600 VFS6200 VFS60 VFS620 Effective area Port size (mm 2 ) (Nl/min) (8833) 80 (985) (8833) 80 (985) Max. operating cycle (CPM) () Response Weight time (ms) (2) (kg) (3) 60 or less 60 or less Note ) According to JIS B (once per 30 days) for the min. operating frequency. Note 2) According to JIS B (The value at supply pressure 0.5MPa.) Note 3) The figures in the above list are for without sub-plate. In case of with sub-plate, add.65kg for Rc3/4 and.5kg for RC respectively. Note 4) "Note )" and "Note 2)" are with cotrolled clean air. Fluid Max. operating pressure Min. operating pressure Proof pressure Ambient and fluid temperature Lubrication Pilot valve manual override Shock/vibration resistance Protection function Rated voltage Allowable voltage Coil insulation Apparent power AC (Power consumption) Power consumption DC Electrical entry Inrush Holding Air and inert gas.0mpa 0.MPa.5MPa 0 to 60 C () Non-lube (2) Non-locking push (Flush) 50/50m/s 2 (3) E type: Dust proof (0 class), F type: Drip proof (2 class), D type: Splash proof (4 class) (4) 00V, 200V AC 50/60Hz, 24V DC 5% to +0% rated voltage Class B or equivalent (30 C) (5) 5.6VA/50Hz, 5.0VA/60Hz 3.4VA (2.W)/50Hz, 2.3VA (.5W)/60Hz.8W Conduit terminal DIN terminal Note ) Use dry-air at low temperatures Note 2) Use turbine oil No. (ISO VG32), if lubricated. Note 3) Shock resistance: No malfunction from test using drop impact tester to axis and right angle direction of main value and armature, each one time when energized and de-energized. Vibration resistance: No malfunction from test with 8.3 to 2000Hz sweep, to axis and right angle directions of main value and armature, each one when energized and de-energized. (Value in the initial stage.) Note 4) According to JIS C0920. Note 5) According to JIS C4003. Pilot External pilot () Manual override Main valve Direct manual override Allowable voltage range Piping 0 to 20V, 220V, 240V AC (50Hz/60Hz) 2V, 00V DC Bottom ported Option With indicator light and surge voltage suppressor, Non-rotating DIN terminal Note ) Operating pressure: 0 to.0mpa Pilot pressure 0. to.0mpa SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7.7-99

100 VFS6000 How to Order Ordering source area code Code areas Japan, Asia - Australia E Europe N North America Body O: sub-plate Electrical entry F: conduit terminal Piping port Without sub-plate B Side Bottom 06 Without sub-plate Rc (PT) 3 4 In case of 0 Rc (PT) option or external pilot, bottom Thread piping is not available. Rc (PT) N NPT T NPTF F G (PF) VFS F Z 0 Q VFS6 0 5 D Z 0 Q Configuration 2 position single 2 position double Option Z Electrical entry D: DIN connector DO: Without connector None With indicator light and surge voltage suppressor Y: DIN connector (DIN 43650) YO: Without DIN connector 2 Body : sub-plate Body option 0 Standard Direct manual override Option Protective class class I (Mark: ) Pilot R Option Voltage 00V AC 50/60Hz 2 200V AC 50/60Hz 3 0 to 20V AC50/60Hz 4 220V AC 50/60Hz 5 24V DC 6 2V DC 7 240V AC 50/60Hz 9 Other(250V or less) Order Made Contact SMC for other voltages (9) Internal External How to Order Pilot Valve Assembly SF4 Voltage F 22 Q 00V AC 50/60Hz 2 200V AC 50/60Hz 3 0 to 20V AC 50/60Hz 4 220V AC 50/60Hz 5 24V DC 6 2V DC 7 240V AC 50/60Hz 9 Other (250 or less) Order Made Contact SMC for other voltages (9) Refer to the p..7-5 for voltage conversion..7-00

101 VFS6000 Maximum Cylinder Speed Conditions: Supply pressure 0.5MPa, Load factor 50% System diagram Construction Component Parts No. q w e r t y u i No. o!0!!2 Description Body Sub-plate Spool/Sleeve Adapter plate End plate Piston Junction cover Light cover Replacement Parts 2 position single 2 position double Material Aluminium die-cast Aluminium die-cast Stainless steel Aluminium die-cast Aluminium die-cast Resin Resin Resin Piping length m Piping length 5m Note Platinum silver Platinum silver Black Black Rubber hose piping system Solenoid valve Steel piping system Description Material Part No. VFS6 VFS62 Return spring Gasket Stainless steel NBR VFS VFS VFS Detent assembly VFS6000-8A Pilot valve assembly Refer to the p How to Order Pilot valve assembly. System ) System * VFS {} (S=80mm 2 ) Solenoid valve VFS {} (S=80mm 2 ) Sub-plate Assembly Speed controller AS600-0 {} (S=230mm 2 ) Speed controller AS600-0 {} (S=230mm 2 ) 06 VFS6000-P VFS6000-S- 0 Mounting bolt and gasket are not included. Silencer AN600-0 {} (S=270mm 2 ) Silencer AN600-0 {} (S=270mm 2 ) Solenoid valve Piping (Hose bore size) B (Fitting 4 pcs) Piping (Hose bore size) B (Fitting 4 pcs).7-0 SV SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7

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