Series Compatible with. Secondary Batteries. Material restriction Copper metal, Zinc, Nickel Nickel plating, Zinc chromate 90-Series

Transcription

1 Series Compatible with Secondary Batteries For longer life, low dew point Material restriction + Lub-retainer Service life has been improved with a lub-retainer compared with SMC s standard models. Compatible with a low dew point ( 40 C). Series Material restriction Copper metal, Zinc, Nickel Nickel plating, Zinc chromate -Series Copper metal restriction Copper metal, Nickel plating 25-Series Dust-tight Material restriction + Lub-retainer + Heavy-duty scraper Dustproofing has been improved with a lub-retainer and heavy-duty scraper. -XC4 Series Low dust Material restriction + Vacuum port for vacuum suction Using a vacuum port for vacuum suction enables reducing more dust particles than - series. 92-MSQB Series Compatible with main products to terminal devices C-E08-6A

2 Secondary battery manufacturing process Electrode production Environment Copper-free (prohibited materials)/ Dust Weighing Kneading Coating Dry Roll Press Winding Layering Service life (Environmental resistance) Standard - Series -XC4 Series Series Contaminant countermeasures (Cleanliness level) Anode plate Separator Cathode plate Separator Material restriction - Series Restricting material prevents contamination by foreign matter. Material restriction: - + Lub-retainer Series Service life has been improved with a lubretainer compared with SMC s standard models. Compatible with a low dew point ( 40 C). - Series Series Material restriction: - + Lub-retainer: + Heavy-duty scraper XC4 Series Dustproofing has been improved with a lubretainer and heavy-duty scraper. XC4 Series Material restriction: - + Vacuum port for vacuum suction 92- Series Using a vacuum port for vacuum suction enables reducing more dust particles than - series. 92- Series Copper metal restriction 25- Series 25- Series *Depending on the device, some products are not for. See device introduction pages. Front matter 1

3 Cell assembly Environment Copper-free (prohibited materials)/low dew point/chemical resistant/ High-speed, high-frequency specifications Inspection/Packaging Environment High-temperature/Long-loading time Liquid injection Sealing Activation Inspection Package Recommended devices Standard Front matter 2

4 Actuators Material restriction - Series Mounting dimensions are the same as those of the standard series. Bushing Material Copper Steel Piston rod Material Carbon steel + Hard chrome plated Stainless steel Hard chrome plated Rod end nut Material Steel Stainless steel 304 Tie-rod nut Material Steel Stainless steel 304 indicate the restricted materials. *Actuators do not use metal containing copper. Mounting Bracket Foot style, Trunnion ( style, Flange style etc. ) Pivot bracket Steel + Raydent treatment Resin bushing + Steel + Raydent treatment Raydent treatment Resin bushing - CDG1 Series Double clevis style Material Change (Related Products) Shock Absorber The outer tube surface treatment has been changed to Raydent treatment. Using lowdust fluorine grease. Change of outer tube surface treatment Auto Switch The connector material of the auto switch with pre-wired connector has been changed to resin, and the auto switch mounting screw material has been changed to stainless steel. Floating Joint External parts such as casings, studs, threads, and nuts are changed to stainless steel. -RB Series -J Series Resin connector Mounting screw material changed to stainless steel D-M9BWSDPC-0 Series *The lead wires and connector pins are made of copper. Front matter 3

5 Actuators Improved service life Series Material restriction + Lub-retainer Service life has been improved with a lub-retainer compared with SMC s standard models. Compatible with a low dew point ( 40 C). Air Cylinder Mounting dimensions are not interchangeable with the - series. Lub-retainer Lub-retainer Grease lubrication CQ2 Series For use in dusty environment -XC4 Series Material restriction + Lub-retainer + Heavy-duty scraper Dustproofing has been improved with a lub-retainer and heavy-duty scraper. Air Cylinder Mounting dimensions are not interchangeable with the - and series. Note) For some models, the minimum operating pressure may be different from that of standard models. Lub-retainer Heavy-duty scraper Heavy-duty scraper Lub-retainer Mounting Dimension Comparison - spec. Mounting dimensions are the same as those of standard models. spec. 5 to 7 mm longer Lub-retainer Removal of foreign particles 3 to 5 mm longer Lub-retainer Heavy-duty scraper XC4 spec. CQ2-XC4 Series Front matter 4

6 - Series Pneumatic equipment material restriction Mounting dimensions are the same as those of the standard series. *Coils for solenoid valves, connector pins, and lead wires are made of copper. Solenoid Valve Changed to with resin pre-wired connector. Mounting screw material changed to stainless steel Mounting screw material has been changed to stainless steel. Mounting screw material changed to stainless steel Resin connector -SV Series -SS5V Series Mist Separator Mounting screw material has been changed to stainless steel. Regulator Valve (wetted parts) material has been changed to stainless steel. Changed to stainless steel With fitting for relief port -AM Series -AR Series Pressure Switch Changed to with resin pre-wired connector. Fittings/Speed Controller Stainless steel specifications (Stainless steel 303) Resin connector -I(Z)SE Series KG Series AS-FG Series Front matter 5

7 92-MSQB Series Material restriction + Vacuum port for vacuum suction Using a vacuum port for vacuum suction enables reducing more dust particles than - series. Rotary Actuator A vacuum port for vacuum suction has been added to reduce the number of dust particles being emitted from the bearing part. Vacuum port (Vacuum suction) 92-MSQB Series Recommended System Circuit for the Secondary Battery Manufacturing Process When the pneumatic equipment is used in the secondary battery manufacturing process, the system circuit shown below is recommended for dust particle generation countermeasures. Recommended System Circuit Secondary battery manufacturing process q Exhaust piping of the solenoid valve w Breathing piping for the regulator e Drainage piping q r w e rclean Exhaust Cleaner/-AMP Series Exhaust air treatment from solenoid valves and regulators When exhaust air from the solenoid valve or the relief port/bleed hole of the regulator enters the clean exhaust cleaner (-AMP series), it can prevent dust particles from being emitted. r Front matter 6

8 Applicable Products Directional Control Valves Material restriction: - series Material restriction + Lub-retainer: series Material restriction + Lub-retainer + Heavy-duty scraper: -XC4 series Material restriction + Vacuum port for vacuum suction: 92- series SY5000, 7000 Description Series : Available as standard : Consult your SMC sales representative. Remarks 5 Port Solenoid Valve SV2000, 4000 VQ1000Y, 2000Y Separate Type Double Check Block VQ1000 VQ2000 VP342, 542 VP742 3 Port Solenoid Valve VT317 VG342 Finger Valve VHK2 Actuators Description Series - : Available as standard : Consult your SMC sales representative. : Made-to-Order XC4 25- Remarks Standard (Double acting only) CDJ2 ø10, ø16 Standard CDM2 ø20 to ø40 Air Cylinder Standard (Double acting only) Rubber Bumper Air Cushion CDG1N CDG1A *1 - series for ø20 to ø series for ø20 to ø series for ø25 to ø100 Standard MDB ø40 to ø100 Standard CDA2 ø40 to ø100 *Refer to the auto switches (Front matter 13) for the models that can be mounted on actuators. *1 Not compatible with ø20 and ø25. Front matter 7

9 Actuators Description Series - Applicable Products : Available as standard : Consult your SMC sales representative. : Made-to-Order XC4 25- Remarks Standard CDU *1 ø10 to ø32 Free Mount Cylinder Non-rotating rod CDUK *2 *1 ø10 to ø32 Standard (Double acting only) CDQS *3 ø12 to ø25 Compact Cylinder Anti-lateral load (Double acting only) CDQSS ø12 to ø25 Standard (Double acting only) CDQ2 *4 ø12 to ø100 Basic MY1B ø20 to ø63 Mechanically Jointed Rodless Cylinder Linear guide 1-axis MY1H ø16 to ø40 Linear guide 1-axis MY2H ø16, ø25 Basic CY3B ø15 to ø40 Magnetically Coupled Rodless Cylinder Direct mount CY3R(G) ø15 to ø40 Cross roller guide MXS *5 ø16, ø20, ø25 (Basic only) Air Slide Table Recirculating linear guide MXQ *5 - series for ø6 to ø25 (Basic only) 25- series for ø6 to ø25 (Stopper) Slide bearing MGPM *4 - series for ø12 to ø series for ø12 to ø100 Compact Guide Cylinder Ball bushing bearing MGPL *4 ø12 to ø63 Slide bearing CXSM ø15 to ø25 Dual Rod Cylinder Ball bushing bearing CXSL ø6 to ø32 *Refer to the auto switches (Front matter 13) for the models that can be mounted on actuators. *1 Not compatible with ø10 and ø16. *2 Not compatible with ø10. *3 Not compatible with ø12. *4 Not compatible with ø12 and ø16. *5 Not compatible with ø6, ø8,ø12 or ø16. Front matter 8

10 Applicable Products Actuators Description Series - Material restriction: - series Material restriction + Lub-retainer: series Material restriction + Lub-retainer + Heavy-duty scraper: -XC4 series Material restriction + Vacuum port for vacuum suction: 92- series : Available as standard : Consult your SMC sales representative. : Made-to-Order XC4 25- Remarks Guide Cylinder Ball bushing bearing MGGL ø20 to ø50 Cylinder with Lock Standard CDNGN *1 ø20 to ø40 Cylinder with Lock Standard CDNAN ø40 to ø100 Compact Cylinder with Lock Standard (Double acting only) CDLQ ø20 to ø100 Stopper Cylinder Standard RSDQ ø20 to ø50 Standard RSH ø20, ø32 Heavy Duty Stopper Cylinder Standard RS1H ø50 to ø63 *Refer to the auto switches (Front matter 13) for the models that can be mounted on actuators. *1 Not compatible with ø20 and ø25. Related Products Description Series Remarks : Available as standard Standard JA - series for applicable cylinders ø80 and ø series for applicable cylinders ø6 to ø15 (JS) 25- series for applicable cylinders ø20 to ø160 (Standard) Floating Joint For compact cylinder JB - series for applicable cylinders ø12 to ø series for applicable cylinders ø12 and ø16 (JS) 25- series for applicable cylinders ø20 to ø160 (Standard) Stainless steel JS - series for applicable cylinders ø10 to ø series available as standard Standard RB M8 to M27 Shock Absorber Standard RBC M8 to M27 Rotary Actuator : Available as standard : Consult your SMC sales representative. Description Series Remarks Rotary Table Rack & Pinion MSQB Size: 20 to 100 *Refer to the auto switches (Front matter 13) for the models that can be mounted on rotary actuators. Front matter 9

11 Air Grippers Description Series - Applicable Products : Available as standard : Consult your SMC sales representative. : Made-to-Order XC4 25- Remarks Standard MHZ2 ø16 to ø40 Long stroke MHZL2 ø10 to ø25 With dust cover MHZJ2 ø10 to ø25 Long stroke (with dust cover) MHZL2 ø10, ø16, ø20 Parallel Type Air Gripper Wide MHL2 *1 - series, series, and XC4 series are for ø20 and ø series is for ø10 and ø32. Low Profile Air Gripper MHF2 ø8, ø12, ø16, ø20 3-finger air gripper MHS3 ø16, ø20, ø25 4-finger air gripper MHS4 ø16, ø20, ø25 *Refer to the auto switches (Front matter 13) for the models that can be mounted on air grippers. *1 Please contact SMC for ø40. Vacuum Equipment Description Series : Available as standard : Consult your SMC sales representative. Remarks Large Size Vacuum Module Ejector unit Manifold ZR ZZR Space Saving Vacuum Ejector & Vacuum Pump System Ejector unit Manifold ZQ ZZQ With connector cover With connector cover -X125: Port exhaust Vacuum Ejector Body ported ZH Compatible with standard models Air Suction Filter With one-touch fittings In-line ZFC Compatible with standard models Vertical vacuum entry (without buffer) ZPT Pad material: Fluororubber Vacuum Pad Vertical vacuum entry (with buffer) ZPT Pad material: Fluororubber Pad ZP Mounting on a special adapter Pad material: Fluororubber Front matter 10

12 Applicable Products Air Preparation Equipment Description Series - Material restriction: - series Material restriction + Lub-retainer: series Material restriction + Lub-retainer + Heavy-duty scraper: -XC4 series Material restriction + Vacuum port for vacuum suction: 92- series : Available as standard Remarks Membrane Air Dryer IDG50L to 100L With fittings for purge air discharge Main Line Filter AFF4C to 22C, 37B, 75B Drain discharge is possible only manually. Mist Separator AM250C to 550C, 650, 850 Drain discharge is possible only manually. Micro Mist Separator AMD250C to 550C, 650, 850 Drain discharge is possible only manually. Clean Air Filters : Available as standard Description Series - Remarks SFD100 Compatible with standard models Clean Air Filter SFD200 AMP220, 320, 420 With element service indicator Exhaust Cleaner for Clean Rooms AMP T-X1 With element service indicator [1500 l/min (ANR)] Air Filters/Pressure Control Equipment Description Series : Available as standard : Consult your SMC sales representative. Remarks Air Filter AF30 to series is for AF20 to AF60. Drain discharge is possible only manually. Mist Separator AFM30, 40 Drain discharge is possible only manually. Micro Mist Separator AFD30, 40 Drain discharge is possible only manually. Regulator AR20 to 50 Regulator with Backflow Function AR25K to 60K 25- series is for AR20K to AR50K. - series is with a joint at the relief port. Order a pressure gauge separately. *Please contact SMC for pressure gauges. Front matter 11

13 Air Filters/Pressure Control Equipment Description Series - Applicable Products : Available as standard Remarks Filter Regulator with Backflow Function For Air Combination (Modular connection bracket) AW30K to 60K Y30 to 60 Y30T to 60T With fitting for relief port Drain discharge is possible only manually. Order a pressure gauge separately. Spacer T-bracket spacer For 30 to 60 Precision Regulator IR1000 to 3000 Order a pressure gauge separately. Electro-Pneumatic Regulator ITV1000 to 3000 This is not completely copper-free since the electric circuit is included. (Wetted parts are copper-free.) Residual Pressure Indicator CB-97XH Compatible with standard models *Please contact SMC for pressure gauges. Fittings/Flow Control Equipment Description Series - : Available as standard Remarks Quick Exhaust Valve with Built-in One-touch Fittings AQ240F, 340F Check Valve with One-touch Fittings AKH4 to 12 Speed Controller with One-touch Fittings Stainless Steel Specifications AS-FG Compatible with standard models One-touch Fittings Stainless Steel Specifications KG Compatible with standard models Detection Switches Description Series : Available as standard : Consult your SMC sales representative. Remarks 2-Color Display High-Precision Digital Pressure Switch ZSE30A / ISE30A High Precision Digital Pressure Switch ZSE40 / ISE40 - series is with resin pre-wired connectors. General Purpose High Precision Digital Pressure Switch ISE50 With resin pre-wired connector 2-Color Display Digital Flow Switch PFM Note) Copper will be exposed when the connector cover moves. Digital Flow Switch for Water PF2W - series covers 25- series. Front matter 12

14 Applicable Products Series Auto Switches Applicable cylinder Mounting CDJ2 Series CDG1 Series MGG Series Band mounting *1 2-Color Display Solid State Switch D-M9BWSDPC-0 D-M9BWVSDPC-0 D-M9BWL-0 D-M9BWVL-0 CDQ2 Series RSQ Series Rail mounting *1 *2 CDA2 Series CDNA Series Tie-rod mounting *1 Reed Switch D-AL-0 CDU Series CQ Series MY Series CY3R Series RSQ Series MSQ Series MHZJ Series *4 MHZL Series *4 MHS Series *4 MX Series *2 Direct mounting (Round groove) MY Series *3 CY3R Series MGP Series MLGP Series RSH Series MHL Series *4 Direct mounting *1 (Square groove) 2-Color Display Solid State Switch D-Y7BWL-0 D-Y7BWVL-0 MY1B50 Series Direct mounting Reed Switch D-Z80L-0 RSH Series MY1B25 to 63 Direct mounting *1 Can be mounted on the products by using an auto switch mounting bracket. *The auto switch mounting bracket material is also restricted. *2 The D-AL-0 cannot be mounted on the RSH, RS1H, MY1B25 to 63, CDNA50. *3 The D-M9BW(V)-0 cannot be mounted on the MY1B50. *4 Reed switches (D-AL-0 and D-Z80L-0) cannot be mounted on the MHZJ, MHZL, MHS, MHL series. Front matter 13

15 Table Comparing Materials and Treatment of Components Product, Series Parts Standard 25 series series Cylinder CQ2 Cylinder MGPM Air slide table MXQ Solenoid valve Filter AF30 to 60 Bushing (ø50 to ø100) Piston Rod Mounting bracket Bushing Guide bushing Guide rod Plate Piston Piston spacer Packing support Bolts and screws Bolts and screws Drain plug Rod Bracket Check valve plug Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Material Treatment Copper metal Aluminum Chromate S45C Hard-chrome-plated Iron Ni-plated (Copper base) Copper metal Lead bronze casting Iron Hard-chrome-plated Iron Ni-plated (Copper base) Brass (ø6 and ø8) Aluminum (ø12 and up) Electroless Ni-plated (ø6 and ø8) Chromate (ø12 and up) Brass Electroless Ni-plated Brass Electroless Ni-plated Iron Ni-plated (Copper base) Iron Ni-plated (Copper base) Brass Electroless Ni-plated Brass Steel belt Electrodeposition painted (Black) Brass Iron metal Aluminum Chromate S45C Hard-chrome-plated Iron Raydent -treated Iron metal Iron metal Iron Hard-chrome-plated SUS304 SUS304 (ø6 and ø8) Aluminum (ø12 and up) Chromate (ø12 and up) SUS304 SUS303 Iron Black dyeing SUS SUS303 SUS303 Steel belt Electrodeposition painted (Black) SUS303 Iron metal Aluminum Anodized (ø12 to ø40) SUS304 Hard-chrome-plated Iron Raydent -treated Iron metal Iron metal SUS440C Hard-chrome-plated SUS304 SUS304 (ø6 and ø8) Aluminum (ø12 and up) Anodized (ø12 and up) SUS304 SUS303, SUS304 Iron Raydent -treated SUS SUS303 SUS303 Steel belt Raydent -treated SUS303 Packing retainer Material Treatment AR50, 60: Brass AR50, 60: Aluminum AR50, 60: Aluminum Regulator AR25K to 60K Valve Stem Bonnet Bracket Material Treatment Material Treatment Material Treatment Material Treatment Brass Brass AR25 to 40: POM AR50, 60: ADC AR25 to 40: AR50, 60: Chromate, black painted Steel belt Electro-deposition painted (Black) SUS303 SUS303 AR25 to 40: POM AR50, 60: ADC AR25 to 40: AR50, 60: Chromate, black painted Steel belt Electro-deposition painted (Black) SUS303 SUS303 ADC Chromate, black painted Steel belt Raydent -treated Front matter 14

16 Related Products 1 Clean Clean Room Products Consult SMC about Material restriction. Products for use in clean rooms. Particle reducing products. Assembled inside a clean room and shipped in double packaging. Clean Series 10-/11-/12-/13- Clean Rodless Cylinder Series CYP Clean One-touch Fittings for Driving Air Piping Series KPQ/KPG Clean Speed Controller with One-touch Fitting Series AS-FPQ/FPG Exhaust Cleaner for Clean Room Series AMP Non-Metallic Pump/ Double Acting Pump Series PAF High Vacuum Equipment Clean Regulator Series SRH Precision Clean Regulator Series SRP Fluoropolymer Equipment Polyolefin Tubing Series TPH Soft Polyolefin Tubing Series TPS Series CYP Series KPQ Clean Blow Products Products for clean air lines. Assembled inside a clean room and double packaging. Clean Gas Filter Clean Air Filter/ Hollow Fiber Element Clean Air Module Clean Regulator Clean Regulator/ Fluoropolymer Type Clean One-touch Fittings (for Blowing) Polyolefin Tubing Air Operated Chemical Valve/ Threaded Type High Vacuum Straight Solenoid Valve Series SF Series SFD Series LLB Series SRH/SRP Series SRF Series KP Series TPH/TPS Series LVA Series XSA Series LLB Series SFD Series SRH Front matter 15

17 Related Products 2 Fluoropolymer Equipment made with fluoropolymer excels in corrosion resistance and heat resistance. Consult SMC about Material restriction. Pressure Control Equipment Clean Regulator/ Fluoropolymer Type Series SRF Series SRF Fittings and Tubings Fluoropolymer Fittings Hyper Fitting Series LQ1/LQ3 Series LQ1 Series LQ3 Fluoropolymer Tubing Series TL/TIL FEP Tubing (Fluoropolymer) Series TH/TIH Soft Fluoropolymer Tubing Series TD/TID Series TL/TIL Flow Sensor Digital Flow Switch for Deionized Water and Chemicals Series PF2D Monitor Fluid Control Equipment Air Operated Chemical Valve Series LV Series PF2D Sensor Series LVC Pump Non-Metallic Pump/ Double Acting Pump Series PAF Series PAF 3 Antistatic Equipment Consult SMC about Material restriction. Antistatic performance achieved through conductive measures for a reduction in static-related trouble. Actuators Antistatic Air Cylinder (Made to Order) CM2-X1051 Vacuum Equipment Vacuum Pad Series ZP Series KA Fittings and Tubings Antistatic One-touch Fittings Miniature Fittings/Stainless Steel 316 Miniature Fittings Antistatic Tubing Series KA Series MS Series M Series TA Series TA Flow Control Equipment Antistatic Speed Controller (Made to Order) AS-X260 Front matter 16

18 Related Products 4 Static Neutralization Equipment Ions generated by corona discharge neutralize static electricity. Ionizer Ionizer/Nozzle Type Measurement Equipment Measures the electrostatic potential. Electrostatic Sensor Handheld Electrostatic Meter Series IZS31 Series IZN10 Series IZD10/IZE11 Series IZH10 Consult SMC about Material restriction. Series IZS31 Sensor Monitor Series IZD/IZE 5 Explosion Proof Equipment Consult SMC about Material restriction. Intrinsically Safe Explosion-proof System 5 Port Solenoid Valve Series 51-SY Explosion Proof Solenoid Valve Series 50-VFE/VPE Series 51-SY Series 50-VFE/VPE 6 Electric Actuators/Cylinders Consult SMC about Material restriction. Electric Actuator Electric Actuator with Integrated Guide Short Stroke Electric Actuator Electric Cylinder Electric Gripper Electric Slide Table e-rodless Actuator Series LJ1/LG1 Series LTF Series LX Series LZB/LDZB/LZC/LDZC Series LEHZ/LEHF Series LES Series E-MY2 Series LJ1 Series LX Series LEHZ Series E-MY2 a Front matter 17

19 CONTENTS Product name Series Page Product name Series Page Directional Control Valves Single Valve/Sub-plate Type IP67 Compliant EX124 Integrated Type (for Output) Serial Transmission System EX124 Integrated Type (for Output) Serial Transmission System D-sub Connector Plug-in Unit Base Mounted 3 Port Solenoid Valve Pilot Operated Poppet Type 3 Port Solenoid Valve Pilot Operated Poppet Type 3 Port Solenoid Valve Direct Operated Poppet Type Finger Valve Actuators Air Cylinder: Standard Type Double Acting, Single Rod Air Cylinder: Standard Type Double Acting, Single Rod Air Cylinder: Standard Type Double Acting, Single Rod Free Mount Cylinder Double Acting, Single Rod Free Mount Cylinder: Non-rotating Rod Type Double Acting, Single Rod Compact Cylinder: Standard Type Double Acting, Single Rod Compact Cylinder: Anti-lateral Load Type Compact Cylinder: Standard Type Double Acting, Single Rod Compact Cylinder: Long Stroke Type Double Acting, Single Rod Mechanically Jointed Rodless Cylinder Basic Type Mechanically Jointed Rodless Cylinder Linear Guide Type Mechanically Jointed Rodless Cylinder Linear Guide Type Magnetically Coupled Rodless Cylinder/ Basic Type Magnetically Coupled Rodless Cylinder/ Direct Mount Type Air Slide Table Air Slide Table Compact Guide Cylinder Guide Cylinder Cylinder with Lock Double Acting, Single Rod Cylinder with Lock Double Acting, Single Rod Compact Cylinder with Lock Double Acting, Single Rod Stopper Cylinder/Fixed Mounting Height Heavy Duty Stopper Cylinder Floating Joint /Standard Type /For Compact Cylinders /Stainless Steel Type Shock Absorber Rotary Table/Rack & Pinion Style -SV -SV-X124 -SV-X166 -SV -VQ1000-X121 -VQ2000-X121 -VP300/500 -VG342 -VT317 -VHK -CDJ2 CDG1 CDA2 CDU CDUK CDQS CDQSS CDQ2 CDQ2 MY1B MY1H MY2H CY3B CY3R MXS MXQ MGP MGG CDNG CDNA CDLQ -RSDQ -RSH/RS1H -JA -JB -JS -RB/RBC 92-MSQ P.2 P.3 P.4 P.5 P.7 P.7 P.8 P.9 P.10 P.11 P.12 P.13 P.14 P.15 P.16 P.17 P.18 P.19 P.20 P.21 P.22 P.23 P.24 P.25 P.26 P.27 P.28 P.29 P.30 P.31 P.32 P.33 P.34 P.35 P.35 P.35 P.36 P.37 Air Grippers Parallel Style Air Gripper with Dust Cover Parallel Style Air Gripper/Long Stroke Type Parallel Style Air Gripper: Wide Type Parallel Style Air Gripper MHZJ2 -MHZL2 - MHL2 -MHS Air Preparation Equipment Main Line Filter Mist Separator Micro Mist Separator Membrane Air Dryer Clean Air Filter Exhaust Cleaner for Clean Room -AFF -AM -AMD -IDG -SFD -AMP P.38 P.39 P.40 P.41 P.42 P.43 P.44 P.45 P.46 P.47 Air Filters/Pressure Control Equipment Air Filter Mist Separator Micro Mist Separator Regulator Regulator with Backflow Function Filter Regulator with Backflow Function Precision Regulator Electro-Pneumatic Regulator Check Valve with One-touch Fittings High-Precision Digital Pressure Switch High-Precision Digital Pressure Switch for General Fluids 2-Color Display Digital Flow Switch Digital Flow Switch For Water Solid State Auto Switch Direct Mounting Style Reed Auto Switch Direct Mounting Style -AF30 to -AF60 -AFM30/-AFM40 -AFD30/-AFD40 -AR30/-AR40 -AR25K to -AR60K -AW30K to -AW60K -IR1000/2000/3000 -ITV2000 Flow Control Related Products Quick Exhaust Valve with One-touch Fittings -AQ240F/340F -AKH Vacuum Equipment Space Saving Vacuum Ejector Vacuum Pad/Vertical Vacuum Entry /Without buffer /With buffer -ZQ Detection Switches Auto Switches Auto Switch Mounting Bracket Part No. -ZPT -ZPT -ZSE40/-ISE40 -ZSE50F/-ISE50 -PFM7 -PF2W D-M9BW(V)SDPC-0 D-M9BW(V)L-0 D-Y7BW(V)L-0 D-AL-0 D-Z80L-0 P.48 P.49 P.49 P.50 P.50 P.51 P.52 P.53 P.54 P.55 P.56 P.57 P.57 P.58 P.59 P.60 P.61 P.62 P.63 P.64 P.65 P.65 P.66 1 Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches Auto Switches

20 Single Valve/Sub-plate Type IP67 Compliant -SV Series SV W1 UD Material restriction 2 4 Series -SV2000 -SV4000 Thread type Rc F G N NPT T NPTF A B SOL.a SOL.a Type of actuation 2 position single (A) 4 (A) 4 (B) (EA) (P)(EB) 2 position double (B) (EA) (P)(EB) 3 position closed center (A) 4 (B) (EA) (P)(EB) 3 position exhaust center (A) 4 (B) (EA) (P)(EB) 3 position pressure center (A) 4 (A) 4 (A) 4 (B) (EA) (P)(EB) 4 position dual 3 port valve: N.C./N.C. 5 (EA) 5 (EA) SOL.b 1 (P) 1 (P) (B) 2 3 (EB) 4 position dual 3 port valve: N.O./N.O. SOL.b (B) 2 3 (EB) 5 6 Pilot type R Light/Surge voltage suppressor U R With light/surge voltage suppressor(non-polar type) With surge voltage suppressor(non-polar type) M12 waterproof connector W1 W2 W3 W4 W7 Rated voltage 24 VDC 12 VDC Internal pilot External pilot *External pilot specifications is not available for 4 position dual 3 port valves. Cable length (mm) Port size Port size Applicable series Without sub-plate 1/4 3/8 1/2 Manual override Non-locking push type D Push-turn locking slotted type -SV2000 -SV4000 -SV C 4 position dual 3 port valve: N.C./N.O. SOL.a (A) 4 5 (EA) SOL.b 1 (P) (B) 2 3 (EB) *4 position dual 3 port valve is not available for the -SV4000. *Specifications and dimensions for the -series are the

21 EX124 Integrated Type (for Output) Serial Transmission System Tie-rod base SI Unit Part No. IP65 Compliant SS5V 2 10S QD 05 U X124 Series -SV2000 -SV4000 Q Protocol type SI unit part no. CE-certified Q DeviceNet (Negative common) EX124D-SDN1-X188 -SV-X124 Series 2 4 C4 C6 C8 M Stations 2 stations 8 stations 2 stations SI unit Protocol type DeviceNet Valve stations Note (1) Double wiring specifications (2) Specified layout stations (up to 16 solenoids possible.) Including the number of blanking plate assemblies. A, B port One-touch fitting for ø4 One-touch fitting for ø6 One-touch fitting for ø8 A, B ports mixed Manifold Specifications Material restriction 1. Special SI unit: EX124D-SDN1-X188 (PNP open collector) SUP/EXH block assembly specifications Internal pilot R External pilot P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used on all manifold stations. Use of a single solenoid will result in an unused control signal. If this is not desired, order with a specified layout. Note 2) Specified layout: Indicate wiring specifications on a manifold specification sheet. (Note that double, 3 and 4 position valves cannot be used where single solenoid wiring has been specified.) A, B port size (Metric) P, E port Applicable series One-touch fitting for ø10 -SV2000 N3 N7 N9 M A, B port One-touch fitting for ø5/32" One-touch fitting for ø1/4" One-touch fitting for ø5/16" A, B ports mixed *In the case of mixed specifications (M), indicate separately on the manifold specification sheet. *Port sizes of X, PE port for external pilot specifications (R) are ø4 mm or ø5/32 inch. 2. Enclosure: IP65 compliant A, B port size (Inch) P, E port Applicable series One-touch fitting for ø3/8" -SV2000 Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches *Specifications and dimensions for the -series are the 3 Auto Switches

22 EX124 Integrated Type (for Output) Serial Transmission System -SV-X166 Series IP65 Compliant Tie-rod base Manifold SS5V 2 10S V D 05 U X166 Material restriction 2 4 Series -SV2000 -SV4000 Specifications 1. Special SI unit: EX124D-SMJ1-X182 (Negative common) 2. Enclosure: IP65 compliant V SI unit Protocol type CC-Link SUP/EXH block assembly specifications Internal pilot R External pilot Stations 2 stations 8 stations 2 stations Valve stations Note (1) Double wiring specifications (2) Specified layout stations (up to 16 solenoids possible.) Including the number of blanking plate assemblies. P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used on all manifold stations. Use of a single solenoid will result in an unused control signal. If this is not desired, order with a specified layout. Note 2) Specified layout: Indicate wiring specifications on a manifold specification sheet. (Note that double, 3 and 4 position valves cannot be used where single solenoid wiring has been specified.) SI Unit Part No. Protocol type SI unit part no. CE-certified V CC-Link (Negative common) EX124D-SMJ1-X182 C4 C6 C8 C8 C10 C12 M A, B port One-touch fitting for ø4 One-touch fitting for ø6 One-touch fitting for ø8 One-touch fitting for ø8 One-touch fitting for ø10 One-touch fitting for ø12 A, B ports mixed A, B port size (Metric) P, E port Applicable series One-touch fitting for ø10 One-touch fitting for ø12 -SV2000 -SV4000 N3 N7 N9 N9 N11 M A, B port One-touch fitting for ø5/32" One-touch fitting for ø1/4" One-touch fitting for ø5/16" One-touch fitting for ø5/16" One-touch fitting for ø3/8" A, B ports mixed A, B port size (Inch) P, E port Applicable series One-touch fitting for ø3/8" One-touch fitting for ø3/8" -SV2000 -SV4000 *In the case of mixed specifications (M), indicate separately on the manifold specification sheet. *Port sizes of X, PE port for external pilot specifications (R) are ø4 mm or ø5/32 inch for -SV2000 series and ø6 mm or ø1/4 inch for -SV4000 series. *Specifications and dimensions for the -series are the 4

23 Tie-rod base D-sub Connector -SV Series SS5V 2 10FD 1 Series 2 -SV SV4000 Material restriction Connector entry direction Stations 2 stations Manifold Upward Lateral Valve stations Note (1) Double wiring specifications 11 stations 2 stations (2) Specified layout 20 stations (Up to 23 solenoids possible.) Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations. Use of a single solenoid will result in an unused control signal. If this is not desired, order with a specified layout. Note 2) Specified layout: Indicate wiring specifications on the manifold specification sheet. (Note that double, 3 and 4 position valves cannot be used where single solenoid wiring has been specified.) U D B P, E port location U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) R 05 U Pilot type Internal pilot External pilot Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment A, B port size (metric) C4 C6 C8 C8 C10 C12 M A, B port One-touch fitting for ø4 One-touch fitting for ø6 One-touch fitting for ø8 One-touch fitting for ø8 One-touch fitting for ø10 One-touch fitting for ø12 A, B ports mixed P, E port Applicable series One-touch fitting for ø1 One-touch fitting for ø12 -SV2000 -SV4000 A, B port size (inch) N3 N7 N9 N9 N11 M A, B port One-touch fitting for ø5/32" One-touch fitting for ø1/4" One-touch fitting for ø5/16" One-touch fitting for ø5/16" One-touch fitting for ø3/8" A, B ports mixed P, E port Applicable series One-touch fitting for ø3/8" One-touch fitting for ø3/8" -SV2000 -SV4000 *In the case of mixed specifications (M), indicate separately on the manifold specification sheet. *Port sizes of X, PE port for external pilot specifications (R) are ø4 mm or ø5/32 inch for -SV2000 series and ø6 mm or ø1/4 inch for -SV4000 series. *Specifications and dimensions for the -series are the 5 Detection Switches Auto Switches

24 -SV Series Solenoid Valves SV F Material restriction Manual override : Non-locking push type D: Push-turn locking slotted type 2 4 Series -SV2000 -SV A B C Type of actuation 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 4 position dual 3 port valve: N.C./N.C. 4 position dual 3 port valve: N.O./N.O. 4 position dual 3 port valve: N.C./N.O. *4 position dual 3 port valve is not available for the -SV4000. R Pilot type Internal pilot External pilot *External pilot specifications is not available for 4 position dual 3 port valves. Rated voltage 5 24 VDC 6 12 VDC Light/Surge voltage suppressor U R With light/surge voltage suppressor With surge voltage suppressor *Specifications and dimensions for the -series are the 6

25 -VQ1000 -VQ2000 Plug-in Unit Base Mounted -VQ1000-X121 Series -VQ2000-X121 Series Double Check Block (Separated Type) VQ1000 FPG C6 C6 Material restriction *Specifications and dimensions for the -series are the OUT side port size C4 C6 IN side port size C4 C6 X121 For blanking manual specification One-touch fitting for ø4 One-touch fitting for ø6 One-touch fitting for ø4 One-touch fitting for ø6 VQ2000 FPG X121 Material restriction *Specifications and dimensions for the -series are the OUT side port size 01 Rc 1/8 IN side port size 01 Rc 1/8 For blanking manual specification Detection Switches Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Vacuum Equipment Flow Control Related Products 7 Auto Switches

26 3 Port Solenoid Valve Pilot Operated Poppet Type -VP300/500 Series Rubber Seal Material restriction Series VP solenoid valve VP DZ 02 A Passage symbol A N.C. (Normally closed) B N.O. (Normally open) Only "A" is available for external pilot type. 4 Body size standard standard Type of actuation Common use to normally closed and normally open (Pilot) 2 Body type Body ported Thread type F N T Rc G NPT NPTF Port size Port size Rc -VP VP542 R Valve option Standard (Internal pilot) External pilot Rated voltage VDC 12 VDC Light/Surge voltage suppressor None Z* With light/surge voltage suppressor *Option Electrical entry D DIN terminal Manual override Push type B Locking type (Slotted) C Locking type (Manual) Pilot Valve Assembly SF4 Rated voltage VDC 12 VDC 5 Material restriction Electrical entry D DIN terminal D Z 50 Manual override Push type B Locking type (Slotted) C Locking type (Manual) Light/Surge voltage suppressor None Z* With light/surge voltage suppressor *Option Pilot Valve Assembly and Electrical Entry Electrical entry Surge voltage suppressor Indicator light DZ *Specifications and dimensions for the -series are the 8

27 3 Port Solenoid Valve Pilot Operated Poppet Type Material restriction -VG342 Series Rubber Seal VG342 5 D Z 04 A R Valve option Internal pilot External pilot Light/Surge voltage suppressor Z Rated voltage VDC 12 VDC Electrical entry D DIN terminal None With light/surge voltage suppressor Port size *Specifications and dimensions for the -series are the Passage symbol External pilot A N.C. (Normally closed) B N.O. (Normally open) Thread type Rc F G N NPT T NPTF Pilot valve option Y E Standard type Energy-saving type (DC only) Continuous duty type Detection Switches Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Vacuum Equipment Flow Control Related Products 9 Auto Switches

28 3 Port Solenoid Valve Direct Operated Poppet Type -VT317 Series Rubber Seal Material restriction V T DZ 02 Port size (8A) T Body type Body ported E V Valve option Standard type Continuous duty type For vacuum Light/Surge voltage suppressor Electrical entry D S Z Z: With light/surge voltage suppressor Rated voltage VDC 12 VDC Electrical entry D DIN terminal *Specifications and dimensions for the -series are the 10

29 Standard Type Finger Valve -VHK Series Standard type 2 Material restriction Applicable Series VHK 02S 06F Valve model 2 2 port valve 1(P) port size 04F 06F 08F 01S 02S 03S ø4 ø6 ø8 R 1 8 R 1 4 R 3 8 (Standard) R (Option) 2(A) port size Bracket Knob color Gray *Specifications and dimensions for the -series are the Red L Type Bracket Part No. 1(P): One-touch fitting 2(A): One-touch fitting Applicable tubing O.D. (mm) Bracket 1(P) 2(A) assembly no. ø4 04F 06F 08F ø4 ø4 ø6 ø8 L None With L-bracket *Bracket and screws are attached. -VHK-B1A Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products 1(P): One-touch fitting 2(A): One-touch fitting 2(A) Applicable tubing O.D. (mm) 1(P) ø4 ø6 ø8 Applicable tubing O.D. (mm) ø4 ø6 ø8 1(P): Male thread 2(A): One-touch fitting 2(A) Applicable tubing O.D. (mm) 1(P) ø4 ø6 ø8 Port size R ø6 ø8 ø4 ø6 ø6 ø8 -VHK-B1A -VHK-B1A 1(P): Male thread 2(A): One-touch fitting Connection thread R Applicable tubing O.D. (mm) Bracket 1(P) 2(A) assembly no. ø4 1 8 ø6 -VHK-B1A ø8 1 4 ø6 ø8 -VHK-B1A 3 8 ø6 ø8 -VHK-B1A Vacuum Equipment Detection Switches Auto Switches 11

30 Air Cylinder: Standard Type Double Acting, Single Rod -CDJ2 Series ø10, ø16 B L F D Mounting style Basic style Axial foot style Rod side flange style Double clevis style (Except ø6) Bore size mm mm Cylinder standard stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, , 30, 45, 60, 75, 100, 125, 150, 175, 200 *Manufacture of intermediate strokes at 1 mm intervals is possible. (Spacers are not used.) Built-in Magnet Cylinder Model Suffix the symbol -B (Band mounting style) to the end of part number for cylinder with auto switch. Example Band mounting style -CDJ2B16-60-B With auto switch Material restriction CDJ2 L16 60 With auto switch (Built-in magnet) Head cover port location Bore size (mm) ø10, ø16 Perpendicular to axis R Axial *Double clevis is only available for being perpendicular to axis. M9BWL Number of auto switches 2 pcs. S 1 pc. n n pcs. Auto switch Without auto Switch *For the applicable auto switch model, refer to the table below. *Specifications and dimensios for the -series are the Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Indicator light Wiring (Output) Load voltage DC AC Auto switch model Lead wire length (m) 3(L) Pre-wired connector SDPC Applicable load Solid state switch Reed switch Diagnostic indication (2-color indication) Grommet Yes No 2-wire 24 V 12 V 100 V or less M9BW A IC circuit Relay, PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BWL-0, D-M9BWSDPC-0 and D-AL-0. *Models D-M9BWVL-0 or M9BWVSDPC-0 cannot be mounted. *The auto switch is shipped together but not assembled. (Only auto switch mounting brackets are assembled before shipment.) *Refer to pages 66 to 68 for details on auto switch mounting brackets. Mounting Bracket Part No. Mounting bracket Bore size (mm) Foot bracket Flange bracket -CJ-L006B -CJ-F006B -CJ-L010B -CJ-F010B -CJ-L016B -CJ-F016B 12

31 With auto switch 91 Material restriction With lub-retainer Air Cylinder: Standard Type Double Acting, Single Rod Mounting Bracket Part No. Mounting bracket Foot Flange Trunnion pin Clevis Pivot bracket With auto switch (Built-in magnet) Min. order CG-L020 -CG-F020 -CG-T020 -CG-D020 -CG A CDG1 Series ø20, ø25, ø32, ø40, ø50 B L F G U T D Built-in Magnet Cylinder Model CDG1 L N Mounting style Basic style Axial foot style Rod side flange style Head side flange style Rod side trunnion style Head side trunnion style Clevis style *series foot and rod side flange are assembled before shipment. - If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. - (Example) CDG1FN N 25 -CG-L025 -CG-F025 -CG-T025 -CG-D025 -CG A Type Rubber bumper Bore size Bore size (mm) 32 -CG-L032 -CG-F032 -CG-T032 -CG-D032 -CG A 20 mm 25 mm 32 mm 40 mm 50 mm Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Solid state switch Reed switch Special function Diagnostic indication (2-color indication) Electrical entry Grommet Indicator light Yes No Wiring (Output) 2-wire Load voltage DC AC 24 V 12 V 100 V or less *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC 40 -CG-L040 -CG-F040 -CG-T040 -CG-D040 -CG A 50 -CG-L050 -CG-F050 -CG-T050 -CG-D050 -CG A M9BWL Number of auto switches 2 pcs. S 1 pc. n n pcs. Auto switch Without auto switch *For the applicable auto switch model, refer to the table below. Cylinder stroke (mm) Bore size (mm) Auto switch model M9BW Standard stroke (1) (mm) 25, 50, 75, 100, 125, 150, , 50, 75, 100, 125, 150, 200, 250, 300 *Order part numbers for auto switches alone are D-M9BWL-0, D-M9BWSDPC-0 and D-AL-0. *Models D-M9BWVL-0 or M9BWVSDPC-0 cannot be mounted. *The auto switch is shipped together but not assembled. (Only auto swich mounting brackets are assembled before shipment.) *Refer to pages 66 to 68 for details on auto switch mounting brackets. A Description Long stroke (2) (mm) 201 to to to to to 1200 Maximum manufacturable stroke (mm) 1500 Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible. (Spacers are not used.) Note 2) Long stroke is compatible with the axial foot and rod side flange types. When other mounting brackets are used or the long stroke exceeds the limit, the allowable maximum stroke length is determined using the stroke selection table. *Specifications and dimensions for the -series are the Lead wire length (m) Pre-wired connector 3(L) SDPC Applicable load IC circuit Relay, PLC Foot x 2, Mounting bolt x 8 Flange x 1, Mounting bolt x 4 Trunnion pin x 2, Trunnion bolt x 2, Flat washer x 2 Clevis x 1, Mounting bolt x 4, Clevis pin x 1, Retaining ring x 2 Pivot bracket x 1 13 Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches Auto Switches

32 Air Cylinder: Standard Type Double Acting, Single Rod CDA2 Series ø40, ø50, ø63, ø80, ø100 With auto switch 91 With auto switch (Built-in magnet) B L F G C D T Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the - auto switch. - (Example) CDA2L Material restriction With lub-retainer CDA2 L M9BWL Mounting style Basic style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style Center trunnion style Bore size mm 50 mm 63 mm 80 mm 100 mm Number of auto switches 2 pcs. S 1 pc. 3 3 pcs. n n pcs. Auto switch Without auto switch *Refer to the table below for the applicable auto switch model. Cylinder stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, , 350, 400, 450, , 50, 75, 100, 125, 150, 175, 200, 250, 50, , 350, 400, 500, , 50, 75, 100, 125, 150, 175, 200, 250, 80, , 350, 400, 450, 500, 600, 700 *Intermediate strokes not listed above are produced upon receipt of order. *Specifications and dimensions for the -series are the Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Indicator light Wiring (Output) Load voltage DC AC Auto switch model Perpendicular In-line Lead wire length (m) 3(L) Pre-wired connector SDPC Applicable load Solid state switch Reed switch Diagnostic indication (2-color indication) Grommet Yes M9BWV M9BW 2-wire 24 V 12 V No 100 V or less A** IC circuit Relay, PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC **Models D-AL-0 cannot be mounted on cylinders of ø50. *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. (Only auto swich mounting brackets are assembled before shipment.) *Refer to pages 66 to 68 for details on auto switch mounting brackets. Mounting Bracket Part No. Bore size (mm) Axial foot* Flange 40 CA2-L04 CA2-F04 50 CA2-L05 CA2-F05 63 CA2-L06 CA2-F06 80 CA2-L08 CA2-F CA2-L10 CA2-F10 Single clevis Double clevis** CA2-C04 CA2-D04 CA2-C05 CA2-D05 CA2-C06 CA2-D06 CA2-C08 CA2-D08 CA2-C10 CA2-D10 *When axial foot brackets are used, two pieces should be ordered for each cylinder. **Double clevis type is packed with clevis pin, flat washer and cotter pin. 14

33 Free Mount Cylinder Double Acting, Single Rod ø10, ø16, ø20, ø25, ø32 With auto switch CDU D M9BWL Built-in magnet CDU Series Bore size 10 mm 16 mm 20 mm 25 mm 32 mm Applicable Auto Switches/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Solid state switch Reed switch 91 Material restriction With lub-retainer Diagnostic indication (2-color indication) Grommet Indicator light Yes No Wiring (Output) 2-wire Load voltage DC AC 24 V 12 V Auto switch Without auto switch *Refer to the table below for applicable auto switches. Number of auto switches 2 pcs. S 1 pc. - Action Built-in Magnet Cylinder Model D Double acting If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. - (Example) CDU20-25D Standard stroke (mm) ø6, ø10, ø16 5, 10, 15, 20, 25, 30 ø20, ø25, ø32 5, 10, 15, 20, 25, 30, 40, V or less Auto switch model Perpendicular In-line M9BWV *Specifications and dimensions for the -series are the M9BW A Lead wire length (m) Pre-wired connector 3(L) SDPC Applicable load IC circuit Relay, PLC Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. Detection Switches 15 Auto Switches

34 Free Mount Cylinder: Non-rotating Rod Type Double Acting, Single Rod CDUK Series ø10, ø16, ø20, ø25, ø32 With auto switch CDUK D M9BWL 91 Material restriction With lub-retainer Number of auto switches 2 pcs. S 1 pc. Built-in magnet Non-rotating rod type Auto switch Without auto switch *Refer to the table below for applicable auto switches Built-in Magnet Cylinder Model - If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. - (Example) CDUK20-25D Bore size 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Standard stroke (mm) ø10, ø16 5, 10, 15, 20, 25, 30 ø20, ø25, ø32 5, 10, 15, 20, 25, 30, 40, 50 *Specifications and dimensions for the -series are the Applicable Auto Switches/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Indicator light Wiring (Output) Load voltage DC AC Auto switch model Perpendicular In-line Lead wire length (m) 3(L) Pre-wired connector SDPC Applicable load Solid state switch Reed switch Diagnostic indication (2-color indication) Grommet Yes No 2-wire 24 V 12 V 100 V or less M9BWV M9BW A IC circuit Relay, PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. 16

35 Compact Cylinder: Standard Type Double Acting, Single Rod ø12, ø16, ø20, ø25 With auto switch CDQS B D B L F G D With auto switch (Built-in magnet) Mounting style Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Double clevis style *In the case of long strokes, use either ends tapped mounting or bracket mounting. *Mounting brackets are shipped together, (but not assembled). Mounting Brackets for -series/part No. Bore size (mm) Foot (1) -CQS-L012 -CQS-L016 -CQS-L020 -CQS-L025 Bore size 12, CDQS Series Bore size mm 16 mm 20 mm 25 mm Cylinder stroke (mm) Standard stroke Long stroke 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Flange -CQS-F012 -CQS-F016 -CQS-F020 -CQS-F025 Double clevis -CQS-D012 -CQS-D016 -CQS-D020 -CQS-D025 35, 40, 45, 50, 75, 100, 125, 150, 175, , 100, 125, 150, 175, , 100, 125, 150, 175, 200, 250, 300 Action D Double acting Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Solid state switch Reed switch 91 Diagnostic indication (2-color indication) Material restriction With lub-retainer Grommet Indicator light Yes No Wiring (Output) 2-wire Load voltage DC AC 24 V 12 V 100 V or less Auto switch model Perpendicular In-line M9BWV *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC Note1) When ordering foot bracket, order 2 pieces per cylinder. Note2) Parts belonging to each bracket are as follows. Foot or Flange style: Body mounting bolt Double clevis style: Clevis pin, Type C snap ring for axis, Body mounting bolt M9BWL Body option <Standard stroke> Standard C With rubber bumper M Rod end male thread *Combination of body options is available. M9BW A Auto switch Without auto switch * Refer to the table below for the applicable auto switch model. Number of auto switches S n 2 pcs. 1 pc. n pcs. <Long stroke> With rubber bumper C Rod end female thread (Standard) With rubber bumper CM Rod end male thread *Rubber bumper is standard equipment for long stroke type. Built-in Magnet Cylinder Model Mounting Brackets for series/part No. Bore size (mm) If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. - (Example) CDQSL25-30D *Specifications and dimensions for the -series are the Lead wire length (m) Pre-wired connector 3(L) SDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. Note) Auto switches of models D-M9BWVL-0 or M9BWVSDPC-0 cannot be mounted on the port depending on cylinder stroke and fitting size. Consult SMC. CQS-L012 CQS-L016 CQS-L020 CQS-L025 CQS-F012 CQS-F016 CQS-F020 CQS-F025 Applicable load IC circuit Foot (1) Flange Double clevis Relay, PLC -CQS-D012 -CQS-D016 -CQS-D020 -CQS-D Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches Auto Switches

36 Compact Cylinder: Anti-lateral Load Type CDQSS Series ø12, ø16, ø20, ø25 With auto switch (Built-in magnet) Mounting style Type Anti-lateral load type With auto switch CDQS B S D C B L F G D 91 Material restriction With lub-retainer Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Double clevis style *Mounting brackets are shipped together, (but not assembled). S Bore size (mm) 12, 16 20, 25 Bore size mm 16 mm 20 mm 25 mm Cylinder stroke (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Indicator light Wiring (Output) Load voltage DC AC Auto switch model Perpendicular In-line Body option C CM Action D Double acting M9BWL Auto switch Without auto switch *Refer to the table below for the applicable auto switch model. With rubber bumper Rod end female thread (Standard) With rubber bumper Rod end male thread Number of auto switches 2 pcs. S 1 pc. n n pcs. Built-in Magnet Cylinder Model - If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. - (Example) CDQSLS12-25D Only for models with cushions *Specifications and dimensions for the -series are the Lead wire length (m) Pre-wired connector 3(L) SDPC Applicable load Solid state switch Reed switch Diagnostic indication (2-color indication) Grommet Yes No 2-wire 24 V 12 V 100 V or less M9BWV M9BW A IC circuit Relay, PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. Note) Auto switches of models D-M9BWVL-0 or M9BWVSDPC-0 cannot be mounted on the port depending on cylinder stroke and fitting size. Consult SMC. Mounting Brackets for -series/part No. Bore size (mm) Foot (1) -CQS-L012 -CQS-L016 -CQS-L020 -CQS-L025 Flange -CQS-F012 -CQS-F016 -CQS-F020 -CQS-F025 Double clevis -CQS-D012 -CQS-D016 -CQS-D020 -CQS-D025 Mounting Brackets for series/part No. Bore size (mm) Note1) When ordering foot bracket, order 2 pieces per cylinder. Note2) Parts belonging to each bracket are as follows. Foot or Flange style: Body mounting bolt Double clevis style: Clevis pin, type C retaining ring for axis, Body mounting bolt Foot (1) Flange Double clevis CQS-L012 CQS-L016 CQS-L020 CQS-L025 CQS-F012 CQS-F016 CQS-F020 CQS-F025 -CQS-D012 -CQS-D016 -CQS-D020 -CQS-D025

37 With auto switch - - CDQ2 Series ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 CDQ mm 16 mm 20 mm 25 mm 32 mm Mounting Brackets for -series/part No. Bore size (mm) Foot (1) Flange CQ-L012 -CQ-L016 -CQ-L020 -CQ-L025 -CQ-L032 -CQ-L040 -CQ-L050 -CQ-L063 -CQ-L080 -CQ-L100 -CQ-F012 -CQ-F016 -CQ-F020 -CQ-F025 -CQ-F032 -CQ-F040 -CQ-F050 -CQ-F063 -CQ-F080 -CQ-F100 B 20 Bore size Double clevis -CQ-D012 -CQ-D016 -CQ-D020 -CQ-D025 -CQ-D032 -CQ-D040 -CQ-D050 -CQ-D063 -CQ-D080 -CQ-D mm 50 mm 63 mm 80 mm 100 mm 30 D Cylinder stroke (mm) 12, 16 20, 25 32, to 100 Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Reed switch Solid state switch B A L 91 Special function Diagnostic indication (2-color indication) Material restriction With lub-retainer Through-hole (Standard) Both ends tapped style Foot style Electrical entry Grommet Compact Cylinder: Standard Type Double Acting, Single Rod With auto switch (Built-in magnet) Mounting style F G D Yes Rod side flange style Head side flange style Double clevis style *Mounting brackets are shipped together, (but not assembled). Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. (Example) CDQ2L32-25DZ Indicator Wiring light (Output) 2-wire Load voltage No 100 V or less Auto switch model DC AC Perpendicular In-line 24 V 12 V M9BWV *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC M9BW M9BWL Mounting Brackets for series/part No. Bore size (mm) Foot (1) Flange CQ-L012 CQ-L016 CQ-L020 CQ-L025 -CQ-L032 -CQ-L040 -CQ-L050 -CQ-L063 -CQ-L080 -CQ-L100 CQ-F012 CQ-F016 CQ-F020 CQ-F025 -CQ-F032 -CQ-F040 -CQ-F050 -CQ-F063 -CQ-F080 -CQ-F100 Number of auto switches 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, , 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Lead wire length (m) Pre-wired connector Applicable load Double clevis -CQ-D012 -CQ-D016 -CQ-D020 -CQ-D025 -CQ-D032 -CQ-D040 -CQ-D050 -CQ-D063 -CQ-D080 -CQ-D100 Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Parts belonging to each bracket are as follows. Foot, Flange: Body mounting bolt/double clevis: Clevis pin, Type C retaining ring for axis, body mounting bolt A Z Auto switch mounting groove Z Action D Double acting Auto switch Without auto switch *Refer to the table below for the applicable auto switch model. ø12 to ø25 ø32 to ø100 3(L) 2 sides 4 sides Body option C M Standard (Rod end female thread) With rubber bumper Rod end male thread *Combination of body options is available. SDPC S n IC circuit *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *When mounting the D-M9BW(V)L-0, D-M9BW(V)SDPC-0 or AL-0 on cylinders with ø32 to ø50 other than on the port face, order the auto switch mounting bracket separately. Refer to pages 66 to 68 for details. 2 pcs. 1 pc. n pcs. *Specifications and dimensions for the -series are the Relay, PLC 19 Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches Auto Switches

38 Compact Cylinder: Long Stroke Type Double Acting, Single Rod CDQ2 Series ø32, ø40, ø50, ø63, ø80 ø100 With auto switch 91 A L F G D - - Material restriction With lub-retainer With auto switch (Built-in magnet) Mounting style Both ends tapped style Foot style Rod side flange style Head side flange style Double clevis style *Mounting brackets are shipped together, (but not assembled). CDQ Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. (Example) CDQ2L40-200DCZ 32 mm 40 mm 50 mm A Bore size mm mm mm Cylinder stroke (mm) 32, 40, 50 63, 80, DC 125, 150, , 250, 300 D Action Double acting M Z Auto switch mounting groove Z Body option Cushion C Rubber bumper M9BWL Auto switch Without auto switch *Refer to the table below for the applicable auto switch model. ø12 to ø25 ø32 to ø100 2 sides 4 sides Standard (Rod end female thread) Rod end male thread Number of auto switches 2 pcs. S 1 pc. n n pcs. *Specifications and dimensions for the -series are the Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Indicator Wiring light (Output) Load voltage Auto switch model DC AC Perpendicular In-line Lead wire length (m) 3(L) Pre-wired connector SDPC Applicable load Reed switch Solid state switch Diagnostic indication (2-color indication) Grommet Yes 2-wire 24 V 12 V No 100 V or less M9BWV M9BW A IC circuit Relay, PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *When mounting the D-M9BW(V)L-0, D-M9BW(V)SDPC-0 or AL-0 on cylinders with ø32 to ø50 other than on the port face, order the auto switch mounting bracket separately. Refer to pages 66 to 68 for details. Mounting Brackets for - and series/part No. Bore size (mm) Foot (1) Flange CQ-L032 -CQ-L040 -CQ-L050 -CQ-L063 -CQ-L080 -CQ-L100 -CQ-F032 -CQ-F040 -CQ-F050 -CQ-F063 -CQ-F080 -CQ-F100 Double clevis -CQ-D032 -CQ-D040 -CQ-D050 -CQ-D063 -CQ-D080 -CQ-D100 Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Parts belonging to each bracket are as follows. Foot or Flange style: Body mounting bolt, Double clevis/clevis pin, Type C retaining ring for axis, Body mounting bolt 20

39 Basic type - ø20, ø25, ø32, ø40, ø50, ø63 MY1B Basic type MY1B Series Bore size (mm) mm mm mm mm mm mm Cylinder stroke (mm) 100, 200, 300, 400, 500, 600, , 0, 1000, 1200, 1400, , 2000 Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Solid state switch Reed switch 91 Material restriction With lub-retainer Special function Diagnostic indication (2-color indication) 20, 25, 32, 40 50, 63 Electrical entry Grommet Mechanically Jointed Rodless Cylinder Basic Type G Indicator light Yes No Piping Standard type Centralized piping type *The cylinder stroke is used every one millimeter up to the maximum stroke. When exceeding 2,000 mm, consult SMC. Wiring (Output) 2-wire Load voltage Auto switch model DC AC Perpendicular In-line 24 V 12 V 100 V or less M9BWV** [Y7BWV] *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC M9BWL Stroke adjusting unit Without adjusting unit L With low load shock absorber + Adjusting bolt H With high load shock absorber + Adjusting bolt LH With one L unit and one H unit each No stroke adjustment units are used for ø50 and ø63. M9BW** [Y7BW] Z80 Number of auto switches S n 2 pcs. 1 pc. n pcs. Auto switch Without auto switch (Built-in magnet) Applicable auto switches vary depending on the bore size. Select an applicable one referring to the table below. Suffix for stroke adjusting unit Both sides S One side Note) S is applicable for stroke adjusting units L and H. *Specifications and dimensions for the -series are the Lead wire length (m) Pre-wired connector 3(L) SDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0, D-Y7BW(V)L-0, D-Y7BW(V)SDPC-0 and D-Z80L-0. *The auto switch is shipped together but not assembled. *Refer to pages 66 to 68 for details on the auto switch mounting brackets. Applicable load IC circuit Relay, PLC **Models D-M9BW(V)L-0 or D-M9BW(V)SDPC-0 cannot be mounted on cylinders of ø50. Select auto switches from those specified in brackets [ ]. 21 Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches Auto Switches

40 Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø16, ø20, ø25, ø32, ø40 Linear guide type 91 Material restriction With lub-retainer Bore size mm 20 mm 25 mm 32 mm 40 mm MY1H Linear guide type G L H LH Note) - - Piping Standard type Centralized piping type Cylinder stroke (mm) 50, 100, 150, , , 300, 350, , 32, , 500, 550, 600 Stroke adjusting unit Without adjusting unit With low load shock absorber + Adjusting bolt With high load shock absorber + Adjusting bolt With one L unit and one H unit each MY1H16 is not available with H unit. M9BWL Number of auto switches 2 pcs. S 1 pc. n n pcs. Auto switch Without auto switch (Built-in magnet) *Refer to the table below for the applicable auto switch model. Suffix for stroke adjusting unit Both ends S One end Note) S is applicable for stroke adjusting units L and H. *Specifications and dimensions for the -series are the Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Indicator light Wiring (Output) Load voltage Auto switch model DC AC Perpendicular In-line Lead wire length (m) Pre-wired connector 3(L) SDPC Applicable load Solid state switch Reed switch Diagnostic indication (2-color indication) Grommet Yes No 2-wire 24 V 12 V 100 V or less M9BWV M9BW A IC circuit Relay, PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. *Refer to pages 66 to 68 for details on the auto switch mounting brackets. 22

41 Linear Guide Type H - ø16, ø25 MY2H Series MY2 H 16 G 300 Guide type Linear guide, Single axis Bore size mm mm Stroke (mm) 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 Applicable Auto Switch/Refer to pages 62 to 65 for the detailed specifications of auto switches. Type Special function Solid state switch Reed switch 91 Diagnostic indication 2-color indication Material restriction With lub-retainer Electrical entry Grommet Mechanically Jointed Rodless Cylinder Linear Guide Type G Indicator light Yes Piping Centralized piping type (Standard) Wiring (Output) 2-wire Load voltage L Auto switch model DC AC Perpendicular In-line 24 V 12 V M9BWV M9BW M9BWL Stroke adjusting unit Lead wire length (m) Pre-wired connector Applicable load 3(L) SDPC No 100 Vor less A *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. L H LH S n Auto switch type Without auto switch (Built-in magnet) *Refer to the table below for the applicable auto switch model. Stroke adjusting unit position Both ends S One end Note) S is applicable for stroke adjusting units L and H. Without adjusting unit With low load shock absorber With high load shock absorber With one L unit and one H unit each Number of auto switches 2 pcs. 1 pc. n pcs. *Specifications and dimensios for the -series are the IC circuit Relay, PLC Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches 23 Auto Switches

42 Magnetically Coupled Rodless Cylinder/ Basic Type - CY3B Series ø15, ø20, ø25, ø32, ø40 Basic type CY3B Material restriction With lub-retainer Basic type Bore size mm mm mm mm mm *Specifications and dimensions for the -series are the Standard stroke Bore size (mm) Standard stroke (mm) 50, 100, 150, 200, 250, 300, 350, , , 150, 200, 250, 300, 350, 400, , 600, 700, , 150, 200, 250, 300, 350, 400, , 600, 700, 800, 0, 1000 Maximum available stroke (mm) Note 1) For strokes exceeding the maximum, consult SMC. Note 2) The longer the stroke, the larger the amount of deflection in a cylinder tube. Pay attention to the mounting bracket and clearance value. Note 3) Intermediate stroke is available by the 1 mm interval. 24

43 91 Material restriction With lub-retainer Magnetically Coupled Rodless Cylinder/ Direct Mount Type - Direct mount type G CY3R Series ø15, ø20, ø25, ø32, ø40 CY3R Piping type Standard type Centralized piping type Bore size mm mm mm mm mm M9BWL Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) 50, 100, 150, 200, 250, 300, , 450, , 150, 200, 250, 300, 350, , 500, 600, 700, Number of auto switches 2 pcs. S 1 ps. n n pcs. Auto switch type Without auto switch (Built-in magnet) *Refer to the table below for auto switch model numbers. Switch rail With switch rail N Without switch rail Note) A type with switch rail has built-in auto switch magnets. Max. stroke Max. stroke without switch (mm) with switch (mm) , 150, 200, 250, 300, 350, , 500, 600, 700, 800, 0, 1000 Note 1) The longer the stroke, the larger the amount of deflection in a cylinder tube. Pay attention to the mounting bracket and clearance value. Note 2) Intermediate stroke is available by the 1 mm interval. *Specifications and dimensions for the -series are the Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Applicable Auto Switches/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Indicator light Wiring (output) Load voltage DC AC Auto switch model Lead wire length (m) 3(L) Pre-wired connector SDPC Applicable load Vacuum Equipment Solid state switch Reed switch Diagnostic indication (2-color display) Grommet Yes No 2-wire 24 V 12 V 100 V or less M9BW A IC circuit Relay, PLC Detection Switches *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BWL-0, D-M9BWSDPC-0 and D-AL-0. *Models D-M9BWVL-0 or M9BWVSDPC-0 cannot be mounted. *The auto switch is shipped together but not assembled. *Refer to pages 66 to 68 for details on the auto switch mounting brackets. Auto Switches 25

44 Air Slide Table - MXS Series Air slide table MXS AS M9BWL 91 Material restriction With lub-retainer Bore size (Stroke (mm)) ø16 ø20 ø25 Nii TN TF Port thread type M thread ø16 Rc NPT ø20, ø25 G Symmetric type L Standard type Symmetric type 10, 20, 30, 40, 50, 75, 100, , 20, 30, 40, 50, 75, 100, 125, , 20, 30, 40, 50, 75, 100, 125, 150 Number of auto switches S n 2 pcs. 1 pc. n pcs. Auto switch Without auto switch (Built-in magnet) *For the applicable auto switch models, refer to the table below. Adjuster option Without adjuster AS Adjuster on extension end AT Adjuster on retraction end A Adjuster on both ends BS Absorber on extension end BT Absorber on retraction end B Absorber on both ends ASBT Adjuster on extension end + Absorber on retraction end BSAT Absorber on extension end + Adjuster on retraction end *Specifications and dimensions for the -series are the Applicable Auto Switches/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Indicator light Wiring (Output) Load voltage Auto switch model DC AC Perpendicular In-line Lead wire length (m) 3(L) Pre-wired connector SDPC Applicable load Reed switch Solid state switch Diagnostic indication (2-color indication) Grommet Yes No 2-wire 24 V 12 V 100 V or less M9BWV M9BW A IC circuit Relay, PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. 26

45 ø6 ø8 ø12 ø16 ø20 ø25 Air Slide Table - MXQ Series ø6, ø8, ø12, ø16, ø20, ø25 Bore size (Stroke mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, , 20, 30, 40, 50, 75, 100, , 20, 30, 40, 50, 75, 100, 125, , 20, 30, 40, 50,7 5, 100, 125, 150 MXQ AS M9BWL Applicable Auto Switch/Refer to pages 62 to 65 for the detailed specifications of auto switches. Type Reed switch Solid state switch 91 Special function Diagnostic indication (2-color indication) Material restriction With lub-retainer Electrical entry Grommet Port thread type M thread ø6 to ø16 Rc TN TF NPT G ø20, ø25 Indicator light Yes Wiring (Output) 2-wire Symmetric type L Standard type Symmetric type Load voltage Auto switch model DC AC Perpendicular In-line 24 V 12 V M9BWV Adjuster option AS AT A BS BT B CS CT C ASBT ASCT BSAT BSCT CSAT CSBT M9BW Without adjuster Extension end adjuster Retraction end adjuster Double end adjuster Extension end absorber Retraction end absorber Double absorber Extension end metal stopper Retraction end metal stopper Double metal stopper Extension end adjustor + Retraction end absorber Extension end adjustor + Retraction end metal stopper Extension end absorber + Retraction end adjuster Extension end absorber + Retraction end metal stopper Extension end metal stopper + Retraction end adjuster Extension end metal stopper + Retraction end absorber Lead wire length (m) Pre-wired connector No 100 V or A less *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC 3(L) Number of auto switches 2 pcs. S 1 pc. n n pcs. Auto switch Without auto switch (Built-in magnet) *For the applicable auto switch model, refer to the table below. *- and series MXQ6 products do not have shock absorbers. *Specifications and dimensions for the -series are the SDPC Applicable load IC circuit Relay, PLC Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. 27 Auto Switches

46 Compact Guide Cylinder - MGP Series ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Compact Guide Cylinder MGP M M9BWL 91 Material restriction With lub-retainer Compact Guide Cylinder M L Bearing type Slide bearing Ball bushing bearing Number of auto switches S n 2 pcs. 1 pc. n pcs. Auto switch Without auto switch (Built-in magnet) *For the applicable auto switch model, refer to the table below mm 16 mm 20 mm 25 mm Bore size mm mm mm mm Cylinder stroke (mm) 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, , 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, , , , 50, 75, 100, 125, 150, 175, 200, 250, 300, to *Specifications and dimensions for the -series are the Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Indicator light Wiring (Output) Load voltage Auto switch model DC AC Perpendicular In-line Lead wire length (m) 3(L) Pre-wired connector SDPC Applicable load Reed switch Solid state switch Diagnostic indication (2-color indication) Grommet Yes 2-wire 24 V 12 V M9BWV M9BW 100 V or No less A IC circuit Relay, PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. *Refer to pages 66 to 68 for details on the auto switch mounting brackets. Minimum Operating Pressure for Products for series Specifications Bore size (mm) 12, 16, 20, 25 Minimum operating pressure 0.2MPa 32, 40, 50, MPa 28

47 Guide Cylinder - ø20, ø25, ø32, ø40, ø50 Guide Cylinder MGG Series MGG L B Bore size mm mm mm mm mm Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Reed switch Solid state switch 91 Material restriction With lub-retainer Special function Diagnostic indication (2-color indication) Electrical entry Grommet L B F Indicator light Yes Bearing type Ball bushing bearing Mounting style Basic style Front mounting flange style Wiring (Output) 2-wire Load voltage DC 24 V 12 V AC M9BWL Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) 20 75, 100, 125, 150, , 100, 125, 150, , 300 Long stroke (mm) 250, 300, 350, , 400, 450, , 400, 450, 500, , 400, 450, 500, 600, 700, , 400, 450, 500, 600, 700, 800, 0, 1000 *Intermediate strokes and short strokes other than the above are produced upon receipt of order. Auto switch model M9BW Auto switch Number of auto switches Lead wire length (m) Pre-wired connector 3(L) SDPC No 100 V or A IC circuit less S n 2 pcs. 1 pc. n pcs. Without auto switch (Built-in magnet) *For the applicable auto switch model, refer to the table below. *Specifications and dimensions for the -series are the Specifications for the series are the same as standard products. Applicable load Relay, PLC Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BWL-0, D-M9BWSDPC-0 and D-AL-0. *Models D-M9BWVL-0 or M9BWVSDPC-0 cannot be mounted. *The auto switch is shipped together but not assembled. (Only auto switch mounting brackets are assembled before shipment.) *Refer to pages 66 to 68 for details on the auto switch mounting brackets. 29 Auto Switches

48 Cylinder with Lock Double Acting, Single Rod CDNG Series ø20, ø25, ø32, ø40 With auto switch CDNG L N D M9BWL Material restriction 91 With lub-retainer With auto switch (Built-in magnet) B L F G U T D Built-in Magnet Cylinder Model - If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. - (Example) CDNGLN D Mounting style Basic style Axial foot style Rod side flange style Head side flange style Rod side trunnion style Head side trunnion style Clevis style *Mounting brackets are shipped together, (but not assembled). N Cushion type Rubber bumper Bore size mm mm mm mm Locking direction D Both directions Cylinder stroke (mm) Bore size (mm) Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Indicator light Standard stroke (mm) (1) 25, 50, 75, 100, 125, 150, , 50, 75, 100, 125, 150, 200, 250, 300 Number of auto switches 2 pcs. S 1 pc. n n pcs. Auto switch Without auto switch *For the applicable auto switch model, refer to the table below. Long stroke (mm) 201 to to to to 800 Max. manufacturable stroke (mm) 1500 Note 1) Intermediate strokes other than the above are produced upon receipt of order. Spacers are not used for intermediate strokes. Note 2) Long strokes are applicable to the axial foot style and rod side flange style. In the case of other mounting brackets or when long stroke limits are exceeded, the maximum useable stroke is determined by the stroke selection table (information edition). *Specifications and dimensions for the -series are the Specifications for the series are the Wiring (Output) Load voltage DC AC Auto switch model Lead wire length (m) Pre-wired connector 3(L) SDPC Applicable load Solid state switch Reed switch Diagnostic indication (2-color indication) Grommet Yes No 2-wire 24 V 12 V 100 V or less M9BW A IC circuit Relay, PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BWL-0, D-M9BWSDPC-0 and D-AL-0. *Models D-M9BWVL-0 or M9BWVSDPC-0 cannot be mounted. *The auto switch is shipped together but not assembled. (Only auto switch mounting brackets are assembled before shipment.) *Refer to pages 66 to 68 for details on the auto switch mounting brackets. Mounting Bracket Part No. Mounting bracket Axial foot * Flange Trunnion pin Clevis ** Rod side pivot bracket Head side pivot bracket CNG-L020 CNG-F020 -CG-T020 -CG-D020 CNG CG A Bore size (mm) CNG-L025 CNG-L032 CNG-F025 CNG-F032 -CG-T025 -CG-T032 -CG-D025 -CG-D032 CNG CNG CG A -CG A 40 CNG-L040 CNG-F040 -CG-T040 -CG-D040 CNG CG A *When ordering foot bracket, order 2 pieces per cylinder. **Clevis pin, retaining ring, and mounting bolt are shipped together with clevis style. ***Mounting bolts are included with the foot and flange styles.

49 Cylinder with Lock Double Acting, Single Rod CDNA Series ø40, ø50, ø63, ø80, ø100 Directional Control Valves With auto switch B L F G C D T Material restriction 91 With lub-retainer With auto switch (Built-in magnet) Mounting style Basic style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style Center trunnion style Built-in Magnet Cylinder Model - If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. - (Example) CDNALN D CDNA N LN50 Type Non-lube Bore size mm 50 mm 63 mm 80 mm 100 mm *Specifications and dimensions for the -series are the same as standard products. Specifications for the series are the 100 D Locking direction D Both directions M9BWL Cylinder stroke (mm) Number of auto switches S n 2 pcs. 1 pc. n pcs. Auto switch Without auto switch *For the applicable auto switch model, refer to the table below. Bore size Standard stroke (mm) (mm) (1) 25, 50, 75, 100, 125, 150, 175, 200, 250, , 350, 400, 450, , 50, 75, 100, 125, 150, 175, 200, 250, 50, , 350, 400, 450, 500, , 50, 75, 100, 125, 150, 175, 200, 250, 80, , 350, 400, 450, 500, 600, 700 Long stroke (mm) (2) ø80: 1000 ø100: Note 1) Intermediate strokes other than the above are produced upon receipt of order. Spacers are not used for intermediate strokes. Note 2) Long stroke applies to the axial foot style and the rod side flange style. When exceeding the stroke range for each bracket, determine the maximum strokes referring to the Selection Table (front matter 29 in Best Pneumatics No. 2). Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Solid state switch Reed switch Special function Diagnostic indication (2-color indication) Electrical entry Grommet Indicator light Yes No Wiring (Output) 2-wire Load voltage DC AC 24 V 12 V 100 V or less Auto switch model Perpendicular In-line M9BWV M9BW Lead wire length (m) Pre-wired connector 3(L) SDPC A** Applicable load IC circuit Relay, PLC Flow Control Related Products Vacuum Equipment *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL **Models D-AL-0 cannot be mounted on cylinders of ø50. With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. (Only auto switch mounting brackets are assembled before shipment.) *Refer to pages 66 to 68 for details on the auto switch mounting brackets. Mounting Bracket Part No. Detection Switches Bore size (mm) 40 Foot * -CA1-L04 Flange -CA1-F04 Single clevis -CA1-C04 Double clevis ** -CA1-D CA1-L05 -CA1-F05 -CA1-C05 -CA1-D CA1-L06 -CA1-F06 -CA1-C06 -CA1-D CA1-L08 -CA1-F08 -CA1-C08 -CA1-D CA1-L10 -CA1-F10 -CA1-C10 -CA1-D10 * When ordering foot bracket, order 2 pieces per cylinder. **Clevis pin, plain washer, and cotter pin are shipped together with double clevis style. 31 Auto Switches

50 Compact Cylinder with Lock Double Acting, Single Rod CDLQ Series ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 With auto switch 91 Material restriction With lub-retainer With auto switch (Built-in magnet) Built-in Magnet Cylinder Model - If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. - (Example) CDLQL32-30D-B *Specifications and dimensions for the -series are the Specifications for the series are the same as standard products. CDLQ B Mounting style ø20, ø25 ø32 to ø100 Through-hole/ B B Through-hole (Standard) Both ends tapped common (Standard) A Both ends tapped style L Foot style L Foot style F Rod side flange style F Rod side flange style G Head side flange style G Head side flange style D Double clevis style D Double clevis style *Mounting bracket is shipped together, (but not assembled). 40 Bore size mm mm mm mm mm mm mm mm 30 D F C M CM Action D Double acting Applicable Auto Switch/Refer to pages 62 to 65 for detailed specifications of auto switches. Type Special function Electrical entry Indicator light Wiring (Output) Load voltage DC AC M9BWL Number of auto switches Auto switch Without auto switch *For the applicable auto switch model, refer to the table below. Locking direction F Extension locking B Retraction locking Body option Standard (Rod end female thread) With rubber bumper Rod end male thread With rubber bumper, Rod end male thread Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40, 50, 63, 80, , 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Auto switch model Perpendicular In-line Lead wire length (m) Pre-wired connector 3(L) SDPC S n 2 pcs. 1 pc. n pcs. Applicable load Solid state switch Reed switch Diagnostic indication (2-color indication) Grommet Yes No 2-wire 24 V 12 V 100 V or less M9BWV M9BW A IC circuit Relay, PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *When mounting the D-M9BW(V)L-0, M9BW(V)SDPC-0, or AL-0 on cylinders with ø32 to ø50 other than on the port face, order the auto switch mounting brackets separately. Refer to page 66 for details. *When using mounting brackets (foot, head side flange, or double clevis), an auto switch may or may not be mounted later. Confirm specifications. Mounting Bracket Part No. Bore size (mm) Foot (1) Flange CLQ-L020 CLQ-L025 CLQ-L032 CLQ-L040 CLQ-F020 CLQ-F025 CLQ-F032 CLQ-F040 Double clevis (3) Bore size (mm) Foot (1) Flange Double clevis (3) CLQ-D020 CLQ-D025 CLQ-D032 CLQ-D CLQ-L050 CLQ-L063 CLQ-L080 CLQ-L100 CLQ-F050 CLQ-F063 CLQ-F080 CLQ-F100 CLQ-D050 CLQ-D063 CLQ-D080 CLQ-D100 Note1) When ordering foot bracket, order 2 pieces per cylinder. Note2) Parts belonging to each bracket are as follows. Foot, Flange: Body mounting screws, Double clevis: Clevis pin, type C retaining ring for shaft, Body mounting screws, Flat washer. Note3) Clevis pin and retaining ring are included with the double clevis style. 32

51 Stopper Cylinder / Fixed Mounting Height -RSDQ Series ø20, ø32, ø40, ø50 Directional Control Valves With auto switch Material restriction RSDQ With auto switch (Built-in magnet) B A Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. (Example) -RSDQB32-15D Mounting bracket Through-hole (Standard) Both ends tapped style TN TF B 20 Bore size mm mm mm mm Port thread type Rc NPT ø20 to ø50 G Note) TF for ø20 indicates M5. Cylinder stroke (mm) 20 10, 15, , 15, , 25, , 25, D M9BWL Rod end configuration K R L Number of auto switches 2 pcs. S 1 pc. Auto switch Without auto switch *For the applicable auto switch model, refer to the table below. Configuration Round bar type Chamfered type Roller type Lever type (Non-adjustable) (1) Application Basic style Note 1) The lever types are applicable only to ø32, ø40 and ø50. Action D Double acting B Double acting with spring loaded T Single acting (Spring extend) *Specifications and dimensions for the -series are the Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Solid state switch Reed switch Special function Diagnostic indication (2-color indication) Electrical entry Grommet Indicator light Yes No Wiring (Output) 2-wire Load voltage DC AC 24 V 12 V 100 V or less Auto switch model Perpendicular In-line M9BWV M9BW A Lead wire length (m) Pre-wired connector 3(L) SDPC Applicable load IC circuit Relay, PLC Vacuum Equipment Detection Switches *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *When mounting the D-M9BW(V)L-0, M9BW(V)SDPC-0, or AL-0 on cylinders with ø32 to ø50 other than on the port face, order the auto switch mounting brackets separately. Refer to page 66 for details. 33 Auto Switches

52 Heavy Duty Stopper Cylinder -RSH/RS1H Series ø20, ø32 ø50, ø63 Piping direction Flange side Positional relationship of lever and port -RSH20 Port Direction of transfer Bore size mm mm Cylinder stroke mm (-RSH20) mm (-RSH32) -RSH32 Direction of transfer Port Heavy Duty Stopper Cylinder ø20, ø32 Heavy Duty Stopper Cylinder ø50, ø63 A Piping direction Flange side Axial direction (tube) Material restriction D B T RSH 32 RS1H 50 Bore size mm mm 30 Action Double acting type Double acting spring type Single acting/spring extended Cylinder stroke 30 mm (-RS1H50, 63) D D L L Roller material L Resin M Carbon steel Option D C Note 1) Without option With lock mechanism With cancel cap Note 1) Options can be combined. Indicate the part No. according to the priority order of D.C. M9BWL M9BWL Number of auto switches (auto switch number mounted) S 2 pcs. 1 pc. Auto switch Without auto switch (Built-in magnet) *For the applicable auto switch model, refer to the table below. Positional relationship of lever and port *Specifications and dimensions for the - series are the same as standard products. Direction of transfer Port Port Port Direction P of transfer Q R Direction of transfer Direction of transfer Port Applicable auto switches/refer to pages 62 to 65 for detailed auto switch specifications. Type Solid state switch Reed switch Special function Diagnostic indication (2-color indication) Electrical entry Indicator light Yes No Wiring (Output) Load voltage DC AC Grommet 2-wire 24 V 12 V 100 V or less Auto switch model Perpendicular In-line *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-Z80L-0. *The auto switch is shipped together but not assembled. *Refer to pages 66 to 68 for details on the auto switch mounting brackets. 34 M9BWV M9BW Z80 Lead wire length (m) 3(L) Pre-wired connector SDPC Applicable load IC circuit Relay, PLC

53 Standard Type Material restriction JA Applicable bore size (mm) Model Standard *Specifications and dimensions for the -series are the For Compact Cylinders Stainless Steel Type Floating Joint -J Series Material restriction Applicable bore size (mm) J S J B For compact cylinders/female thread Applicable bore size (mm) Applicable bore size (mm) , 40 50, Thread nominal size (Standard) Nominal thread size Applicable cylinder nominal thread size M22 x 1.5 M26 x 1.5 Thread nominal size Nominal thread size Applicable cylinder nominal thread size M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 *Specifications and dimensions for the -series are the Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Material restriction Stainless steel type Applicable bore size (mm) Applicable bore size (mm) , , , 63 Nominal thread size Applicable cylinder nominal thread size M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 *Specifications and dimensions for the -series are the 35 Detection Switches Auto Switches

54 Shock Absorber -RB/RBC Series Material restriction RB C Shock absorber C Type Basic type With cap Replacement part no./cap (Resin part only) O.D threadstroke RBC 08 Applicable model 08 -RBC0805, RBC RBC1006, RBC RBC1411, 1412 C Cap Cap cannot be mounted for basic type. Please place an order with cap type from the beginning. *Specifications and dimensions for the -series are the 36

55 Basic type 92 Material restriction + 92 Vacuum port for vacuum suction Note) Restricted material is used in part. Rotary Table/Rack & Pinion Style 92-MSQ Series Size: 10, 20, 30, 50, 70, 100, 200 MSQ B 10 A A Size With adjustment bolt Applicable Auto Switch/Refer to pages 62 to 65 for detailed auto switch specification. Type Reed switch Solid state switch Special function Diagnostic indication (2-color display) Electrical entry Grommet Indicator light Yes No Wiring (Output) 2-wire Load voltage M9BWL Auto switch model DC AC Perpendicular In-line 24 V 12 V 100 V or less M9BWV *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC M9BW *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and D-AL-0. *The auto switch is shipped together but not assembled. A Lead wire length (m) 3(L) Number of auto switches S n Auto switch type 2 pcs. 1 pc. n pcs. Without auto switch (built-in magnet) *Refer to the table below for auto switch types. Pre-wired connector SDPC Applicable load IC circuit Relay, PLC Detection Switches Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Vacuum Equipment Flow Control Related Products 37 Auto Switches

56 Parallel Style Air Gripper with Dust Cover -MHZJ2 Series Material restriction MHZJ2 Number of fingers 2 2 fingers Bore size mm mm mm mm D 16 D F Action Double acting M9BW Dust cover type Fluororubber (FKM) F Number of auto switches 2 pcs. S 1 pc. n n pcs. Auto switch Without auto switch (Built-in magnet) *For the applicable auto switch model, refer to the table below. *Specifications and dimensions for the -series are the Applicable Auto Switch/Refer to pages 62 to 65 for further information on the auto switch. Type Special function Electrical entry Indicator light Wiring (Output) Load voltage Auto switch model DC AC Perpendicular In-line Lead wire length (m) Applicable model 3(L) SDPC Applicable load Solid state switch Diagnosis (2-color indicator) Grommet Yes 2-wire 24 V 12 V M9BWV M9BW Relay, PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0 and D-M9BW(V)SDPC-0. *The auto switch is shipped together but not assembled. Note) Take note of hysteresis with 2-color indication type auto switches. Refer to page 438 in Best Pneumatic No.4 for auto switch specifications. If an auto switch is mounted where the green light is lit and the air gripper has a short stroke, the auto switch may detect an unnecessary portion due to its operating range. Check that auto switch mounting is correct and adjust if necessary. This also applies to when the red light is lit. *Through-hole mounting is not used when mounting the auto switch for the -MHZJ2-10D. *When using the perpendicular auto switch for ø10, the fitting and auto switch could mutually interfere. Use the extension fitting shipped in the package to avoid interference. 38

57 Parallel Style Air Gripper/Long Stroke Type -MHZL2 Series Material restriction MHZL2 Number of fingers 2 2 fingers Bore size/stroke Bore size (mm) Stroke 10 mm 8 16 mm mm D F Action Double acting Applicable Auto Switch/Refer to pages 62 to 65 for further information on the auto switch. Type Special function Electrical entry Solid state switch Indicator light Wiring (Output) D Load voltage Auto switch model DC AC Perpendicular In-line M9BW Dust cover type Fluororubber (FKM) F Number of auto switches 2 pcs. S 1 pc. n n pcs. Auto switch Without auto switch (Built-in magnet) *For the applicable auto switch model, refer to the table below. Lead wire length (m) Pre-wired connector 3(L) SDPC Applicable load Diagnostic Grommet Yes 2-wire (2-color indication) 24 V 12 V Relay, M9BWV M9BW PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0 and D-M9BW(V)SDPC-0. *The auto switch is shipped together but not assembled. Note) Take note of hysteresis with 2-color indication type auto switches. Refer to page 438 in Best Pneumatic No.4 for auto switch specifications. If an auto switch is mounted where the green light is lit and the air gripper has a short stroke, the auto switch may detect an unnecessary portion due to its operating range. Check that auto switch mounting is correct and adjust if necessary. This also applies to when the red light is lit. *When using the perpendicular auto switch for ø10, the fitting and auto switch could mutually interfere. Use the extension fitting shipped in the package to avoid interference. Detection Switches Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Vacuum Equipment Flow Control Related Products 39 Auto Switches

58 Parallel Style Air Gripper: Wide Type - MHL2 Series ø20, ø25 MHL 2 20 D M9BW 91 Material restriction With lub-retainer Wide opening Number of fingers 2 2 fingers Bore size mm mm D Action Double acting Auto switch *For the applicable auto switch model, refer to the table below. Opening/Closing stroke(mm) 1 2 ø ø Number of auto switches 2 pcs. S 1 pc. n n pcs. Without auto switch (Built-in magnet) *Specifications and dimensions for the -series are the Applicable Auto Switch/Refer to pages 62 to 65 for further information on the auto switches. Type Special function Electrical entry Indicator light Wiring (Output) Load voltage Auto switch model DC AC Perpendicular In-line Lead wire length (m) 3(L) Pre-wired connector SDPC Applicable load Solid state switch M9BWV M9BW Diagnostic Grommet Yes 2-wire (2-color indication) 24 V 12 V Relay, PLC Y7BWV Y7BW *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0, D-M9BW(V)SDPC-0 and DY7BW(V)L-0. *The auto switch is shipped together but not assembled. *For the M9 auto switch, the auto switch mounting bracket model -BMG2-012 is shipped with one for each auto switch. Note 1) Take note of hysteresis with 2-color indication type auto switches. Refer to page 487 in Best Pneumatic No.4 for auto switch specifications. If an auto switch is mounted where the green light is lit and the air gripper has a short stroke, the auto switch may detect an unnecessary portion due to its operating range. Check that auto switch mounting is correct and adjust if necessary. This also applies to when the red light is lit. Note 2) The mounting bracket (-BMG2-012) is required to mount the M9 auto switch. 40

59 Parallel Style Air Gripper -MHS Series ø16, ø20, ø25 Material restriction MHS 3 Number of fingers 3 3 fingers 4 4 fingers *Specifications and dimensions for the -series are the Bore size mm mm mm 20 D M9BW Action D Double acting Applicable Auto Switch/Refer to pages 62 to 65 for further information on auto switches. Type Special function Electrical entry Solid state switch Indicator light Wiring (Output) Load voltage Auto switch model DC AC Perpendicular In-line Number of auto switches 2 pcs. S 1 pc. Auto switch Without auto switch (Built-in magnet) *For the applicable auto switch model, refer to the table below. Lead wire length (m) Pre-wired connector 3(L) SDPC Applicable load Diagnostic Grommet Yes 2-wire (2-color indication) 24 V 12 V Relay, M9BWV M9BW PLC *Additional symbols for auto switch: Lead wire length 3 m L Example: M9BWL With pre-wired connector SDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-0 and D-M9BW(V)SDPC-0. *The auto switch is shipped together but not assembled. Note) Take note of hysteresis with 2-color indication type auto switches. Refer to page 606 in Best Pneumatic No.4 for auto switch specifications. If an auto switch is mounted where the green light is lit and the air gripper has a short stroke, the auto switch may detect an unnecessary portion due to its operating range. Check that auto switch mounting is correct and adjust if necessary. This also applies to when the red light is lit. Detection Switches Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Vacuum Equipment Flow Control Related Products 41 Auto Switches

60 Main Line Filter -AFF Series -AFF2C to -AFF22C AFF 22C 10 Material restriction 2C 4C 8C 11C 22C Body size Applicable compressor output (guide) 2.2 kw 3.7 kw 7.5 kw 11 kw 22 kw Thread type Type Rc F G* 1 N NPT *1 Conforms to ISO Port size Size 1/8 1/4 3/8 1/2 3/4 1 Option Description H For medium air pressure (1.6 MPa) R IN-OUT reversal direction Accessory Description B Bracket* 2 *2 Bracket is included, (but not assembled). Applicable body size 2C 4C 8C 11C 22C -AFF37B/75B AFF 37B 10 Material restriction 37B 75B Body size Applicable compressor output (guide) 37 kw 75 kw Thread type Type Rc F G N NPT Port size Size Option R Accessory Description B Bracket* 1 *1 Bracket is included, (but not assembled). Description IN-OUT reversal direction Applicable body size 37B 75B Bracket Part No. Applicable model Bracket assembly (with 2 mounting screws) 42 *Specifications and dimensions for the -series are the -AFF2C -AFF4C -AFF8C -AFF11C -AFF22C -AFF37B -AFF75B -AM-BM101 -AM-BM102 -AM-BM103 -AM-BM104 -AM-BM105 -BM56 -BM57

61 -AM150C to -AM550C Material restriction -AM650/850 Bracket Part No. Applicable model Bracket assembly (with 2 mounting screws) Mist Separator -AM Series Material restriction AM 550C 10 Body size Applicable compressor output (guide) 150C 2.2 kw 250C 3.7 kw 350C 7.5 kw 450C 11 kw 550C 22 kw Body size Applicable compressor output (guide) kw kw Thread type Type Rc F G* 1 N NPT *1 Conforms to ISO AM Thread type Type Rc F G N NPT Port size Option Description H For medium air pressure (1.6 MPa) R IN-OUT reversal direction Applicable body size Size 150C 250C 350C 450C 550C Option Description R IN-OUT reversal direction -AM150C -AM250C -AM350C -AM450C -AM550C -AM650 -AM850 -AM-BM101 -AM-BM102 -AM-BM103 -AM-BM104 -AM-BM105 -BM56 -BM Accessory Description B Bracket* 2 *2 Bracket is included, (but not assembled). 1/8 1/4 3/8 1/2 3/4 1 Port size Size Accessory Description B Bracket* 1 *1 Bracket is included, (but not assembled). Applicable body size *Specifications and dimensions for the -series are the 43 Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches Auto Switches

62 Micro Mist Separator -AMD Series -AMD150C to -AMD550C AMD 550C 10 Material restriction Body size 150C 250C 350C 450C 550C Thread type Type Rc F G* 1 N NPT *1 Conforms to ISO Port size Applicable body size Size 150C 250C 350C 450C 550C Accessory Description B Bracket* 2 *2 Bracket is included, (but not assembled). 1/8 1/4 3/8 1/2 3/4 1 Option Description H For medium air pressure (1.6 MPa) R IN-OUT reversal direction -AMD650/850 AMD Material restriction Body size Thread type Type Rc F G N NPT Port size Accessory Description B Bracket* 1 *1 Bracket is included, (but not assembled). Size Option Description R IN-OUT reversal direction Applicable body size Bracket Part No. Applicable model Bracket assembly (with 2 mounting screws) *Specifications and dimensions for the -series are the -AMD150C -AMD250C -AMD350C -AMD450C -AMD550C -AMD650 -AMD850 -AM-BM101 -AM-BM102 -AM-BM103 -AM-BM104 -AM-BM105 -BM56 -BM57 44

63 Membrane Air Dryer -IDG Series Single Unit/Standard Dew Point 40 C Specifications Directional Control Valves Material restriction Size Bracket Assembly Part No. Standard dew point temperature Applicable model Part no. -IDG50L -BM64 -IDG75L, 100L -BM65 *With cap bolts (2 pcs.) and spring washers (2 pcs.) IDG 50 L Flow rate by size Outlet air flow rate l/min Purge air flow rate (ANR) 110/40 240/80 300/100 L Standard dew point ( C) 40 Thread type Type Rc N NPT F G 03 Port size Bore 02 1/4 03 3/8 04 1/2 P With fitting for purge air discharge Contents P With fitting for purge air discharge Accessory Description None (Standard) B With bracket Note) When symbol B is indicated, a bracket assembly with a part number shown in the table left below is included as an accessory. Size Option Contents Flow direction (Left Right) R Flow direction (Right Left) *Specifications and dimensions for the -series are the Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Detection Switches Vacuum Equipment Flow Control Related Products 45 Auto Switches

64 Clean Air Filter -SFD Series SFD 200 C08 Material restriction Clean air filter 1 2 Size Max. flow rate 100 l/min (ANR) Note) 500 l/min (ANR) Note) The SFD100 as standard is compatible with secondary batteries. It is not used for selection with the -series. Port size Connection size C08 C10 C12 02 N02 F02 ø8 ø10 ø12 Clean One-touch fittings (Series KP) Rc 1/4 NPT 1/4 G 1/4 Note Female thread Case material 0 Resin *Specifications and dimensions for the -series are the 46

65 Models Material restriction Model Maximum flow capacity l/min (ANR) Port size (nominal size B) Mass (kg) Exhaust Cleaner for Clean Room -AMP Series AMP Body size Size 1/4 standard 3/8 standard 1/2 standard Element construction AMP /4, 3/ Port size 1/4 3/8 1/2 3/ Stage 2 stage Port size Body size AMP /8, 1/ Optional specifications R Accessories (optional) B -AMP /2, 3/ T Name None With bracket With element service indicator Description Flow direction Left Right Flow direction Right Down Note) The brackets are shipped together, (but not assembled). *Specifications and dimensions for the -series are the Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Bracket Part No. Applicable model Bracket assembly with 2 cap bolts ( with 2 spring washers ) -AMP220 -AMP320 -AMP420 -BM66 -BM67 -BM68 Detection Switches Vacuum Equipment Flow Control Related Products 47 Auto Switches

66 Air Filter -AF30 to -AF60 AF 30 q w 03 e B r t Option/Semi-standard: Select one each for a to c. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. Example) -AF30-N03B-RZ Material restriction w e r t Option Semi-standard Thread type a b c Port size Mounting Flow direction Pressure unit N F Note 1) A bracket is not assembled and supplied loose at the time of shipment. Including 2 mounting screws. Note 2) : For thread type: NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.) Bracket Part No. -AF30 -AF30P-050AS Note 1) B R Note 2) Z Note) Assembly of a bracket and 2 mounting screws. Without mounting option With bracket Flow direction: Left to right Flow direction: Right to left Description Rc NPT G 1/4 3/8 1/2 3/4 1 Name plate and caution plate for bowl in imperial units: MPa Name plate and caution plate for bowl in imperial units: psi, F -AF40 -AF40P-050AS Model -AF AF40P-070AS q Body size Note 2) -AF50 -AF50P-050AS Note 2) Note 2) Note 2) *Specifications and dimensions for the -series are the -AF60 -AF50P-050AS -AC Series Accessories: Spacer/Bracket Y 30 T q Material restriction Spacer w w Option a Mounting T Without mounting option With bracket Note) Applicable to -AF40-06, -AFM40-06 and -AFD Description 30 q Body size Note) 60 *Specifications and dimensions for the -series are the

67 Mist Separator -AFM30/-AFM40 Micro Mist Separator -AFD30/-AFD40 -AFM Series Nominal filtration rating: 0.3 µm -AFD Series Nominal filtration rating: 0.01 µm w e r t Option Semi-standard AFM 30 AFD 30 Thread type a b c Port size Mounting Flow direction Pressure unit q N F Note 1) B + R + Note 2) Z w 03 B 03 e B r Without mounting option With bracket Flow direction: Left to right Flow direction: Right to left t Description Rc NPT G 1/4 3/8 1/2 3/4 Name plate and caution plate for bowl in imperial units: MPa Name plate and caution plate for bowl in imperial units: psi, F Option/Semi-standard: Select one each for a to c. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. Example) -AFM30-N03B-RZ Note 1) A bracket is not assembled and supplied loose at the time of shipment. Including 2 mounting screws. Note 2) : For thread type: NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.) *Specifications and dimensions for the -series Bracket Part No. are the Model -AF30P-050AS -AF40P-050AS Note) Assembly of a bracket and 2 mounting screws. w Material restriction Option -AFM30 -AFD30 a Mounting T -AFM40 -AFD40 Material restriction Without mounting option With bracket Note) Applicable to -AF40-06, -AFM40-06 and -AFD AFM AFD AF40P-070AS -AC Series Accessories: Spacer/Bracket Description Y 30 T q Spacer w q Body size Note 2) q Note 2) Body size Note) 60 *Specifications and dimensions for the -series are the 49 Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches Auto Switches

68 Regulator -AR30/-AR40 Regulator with Backflow Function -AR25K to -AR60K With the backflow function it incorporates a mechanism to exhaust the air pressure in the outlet side reliably and quickly. Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. AR 30 Material restriction q K w e 03 r B t y Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. Example) -AR30K-03B-1NR w e r t y With backflow function Mounting Note 1) Option B, H are not assembled and supplied loose at the time of shipment. Note 2) Assembly of a bracket and set nuts (-AR30 and -AR40, -AR25(K) to -AR40(K)) Including 2 mounting screws for the -AR50(K) and -AR60(K). Note 3) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more. Note 4) : For thread type: NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.) Bracket, Set Nut/Part No. Model Option Note 1) Bracket assembly Set nut K B H Note 2) -AR25K -AR30(K) -AR40(K) -AR50K -AR60K -AR25P-270AS AR25P-260S Description Without backflow function With backflow function -AR30P-270AS AR30P-260S Note 1) Assembly of a bracket and set nuts. Note 2) Assembly of a bracket and 2 mounting screws. Note 3) Please consult with SMC regarding the set nuts for the -AR50(K) and -AR60(K). 50 Note 1) Option Semi-standard Thread type a b c d e Port size Set pressure Exhaust mechanism Flow direction Pressure unit N F Note 3) + N + R + Note 4) Z Rc NPT G 1/4 3/8 1/2 3/4 1 Without mounting option With bracket With set nut (for panel fitting) 0.05 to 0.85 MPa setting 0.02 to 0.2 MPa setting Relieving type Non-relieving type Flow direction: Left to right Flow direction: Right to left Name plate and pressure gauge in imperial units: MPa Name plate and pressure gauge in imperial units: psi -AR40P-270AS AR40P-260S 25 Note 4) 30 Note 4) q Body size 40 Note 4) 50 Note 4) Note 2) -AR50P-270AS Note 3) Note 3) 60 Note 4) *Specifications and dimensions for the -series are the

69 Filter Regulator with Backflow Function -AW30K to -AW60K Integrated filter and regulator units save space and require less piping. With the backflow function it incorporates a mechanism to exhaust the air pressure in the outlet side reliably and quickly. w e r t y Example) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. AW 30 Material restriction With backflow function Note 1) Option Semi-standard Thread type a b c d e Port size Mounting Set pressure Exhaust mechanism Flow direction Pressure unit K 03 B q w e r t y K + N F Note 2) B H + Note 3) 1 + N + R + Note 4) Z Description With backflow function Rc NPT G 1/4 3/8 1/2 3/4 1 Without mounting option With bracket With set nut (for panel fitting) 0.05 to 0.85 MPa setting 0.02 to 0.2 MPa setting Relieving type Non-relieving type Flow direction: Left to right Flow direction: Right to left Name plate, caution plate for bowl, and pressure gauge in imperial units: MPa Name plate, caution plate for bowl, and pressure gauge in imperial units: psi, F Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. Example) -AW30K-03B-1N 30 q Body size 40 Note 1) Option B, H are not assembled and supplied loose at the time of shipment. Note 2) Assembly of a bracket and set nuts. (-AW30(K) and -AW40(K)) Including 2 mounting screws for the -AW60(K). Note 3) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more. Note 4) : For thread type: NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.) Bracket, Set Nut/Part No. Optional specifications Note 1) Bracket assembly Set nut -AW30K -AR30P-270AS AR30P-260S Note 1) Assembly of a bracket and set nuts. Note 2) Assembly of a bracket and 2 mounting screws. Note 3) Please consult with SMC regarding the set nuts for the -AW60(K). Model -AW40K -AR40P-270AS AR40P-260S -AW60K Note 2) -AW60P-270AS Note 3) Note 4) Note 4) 60 Note 4) *Specifications and dimensions for the -series are the 51 Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches Auto Switches

70 Precision Regulator -IR1000/2000/3000 Series IR Material restriction Precision regulator Body size -IR1000 -IR2000 -IR3000 Accessory None B With bracket Port size Symbo size 1/8 1/4 3/8 1/2 Application -IR1000 -IR2000 -IR Type of setting Basic type (Handle) Regulating pressure range For -IR1000/2000 series to 0.2 MPa to 0.4 MPa to 0.8 MPa For -IR3000 series to 0.2 MPa to 0.4 MPa to 0.8 MPa Bracket Part No. *Specifications and dimensions for the -series are the -IR1000 -IR1010 -IR1020 INI Part no. -IR2000 -IR2010 -IR2020 INI IR3000 -IR3010 -IR3020 INI

71 Electro-Pneumatic Regulator Material restriction -ITV2000 Series ITV Model type Pressure range MPa 0.5 MPa 0.9 MPa Power supply voltage VDC 12 to 15 VDC Input signal Current 4 to 20 ma (Sink type) Current 0 to 20 ma (Sink type) Voltage 0 to 5 VDC Voltage 0 to 10 VDC Preset input Monitor output None (for preset input) Analog output 1 to 5 VDC Switch output/npn output Switch output/pnp output Analog output 4 to 20 ma (Sink type) Thread type N T F Rc NPT NPTF G N Bracket B C Port size 2 3 1/4 3/8 Pressure display unit MPa kgf/cm 2 bar psi kpa Cable connector type N Without cable connector Without bracket Flat bracket L-bracket Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Bracket Part No. *Specifications and dimensions for the -series are the Vacuum Equipment Flat bracket L-bracket Description Part No. -ITV20 P (Mounting thread is not included.) P (Mounting thread is not included.) Detection Switches 53 Auto Switches

72 Quick Exhaust Valve with One-touch Fittings -AQ240F/340F Series IN, OUT port applicable tubing O.D. 04 ø4 Body size 2 M5 Exhaust port 04 Applicable tubing O.D. ø4 AQ F AQ 340F Material restriction Exhaust port 06 Applicable tubing O.D. ø6 Quick exhaust valve Body size 3 1/8 IN, OUT port applicable tubing O.D. 06 ø6 With One-touch fittings In-line type *Specifications and dimensions for the -series are the 54

73 Check Valve with One-touch Fittings -AKH Series Straight type Material restriction *Specifications and dimensions for the -series are the AKH Applicable tubing O.D. Metric size ø4 ø6 ø8 ø10 ø12 Directional Control Valves Auto Switches Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Detection Switches Vacuum Equipment Flow Control Related Products 55

74 Space Saving Vacuum Ejector -ZQ Series Single Unit ZQ1 05 3M K1 5 G D31 CL q w e r t y u i o Material restriction qnozzle nominal size wexhaust type esolenoid valve combination ø0.5 ø0.7 ø1.0 3M With silencer for manifold Supply valve Vacuum release valve K1 Normally closed Normally closed rpilot valve tsolenoid valve rated voltage yelectrical entry Y Standard (DC: 1 W) Note 1) DC low wattage type (0.5 W) Note 1) Avoid energizing the solenoid valve for long periods of time VDC 12 VDC G Grommet, with 0.3 m lead wire Note 2) uvacuum pressure switch suction filter ivacuum switch electrical entry Note 3) ocheck valve D31 D32 D51 D52 1 NPN output + Analog output, with suction filter, Pressure range 100 to 0 kpa 2 NPN outputs, with suction filter, Pressure range 100 to 0 kpa 1 PNP output + Analog output, with suction filter, Pressure range 100 to 0 kpa 2 PNP outputs, with suction filter, Pressure range 100 to 0 kpa Note 2) The filter included in this product is of an simple type, and will become clogged quickly in environments with high quantities of dust or particulates. Please make additional use of an air suction filter of the ZFA, ZFB or ZFC series. CL Connector type, with 2 m lead wire None K With check valve Note 3) The check valve has a function to prevent the exhaust air from the silencer overflowing to the vacuum port side when a manifold is used. However, depending on usage conditions, it does not always suppress air overflow to the desired extent. During usage, please inspect thoroughly with actual machine. Also, in order to completely prevent the overflow of exhaust air, leave plenty of space between the check valve unit and adjacent ejector to avoid interference from the ejector s exhaust unit. Manifold ZZQ1 07 B 2 B X125 Material restriction Maximum Number of Stations in Simultaneous Operation Number of stations Note) 01 1 station 02 2 stations 56 Nozzle nominal size ø0.5 ø0.7 ø1.0 Maximum number of stations in simultaneous operation 8 stations 6 stations 4 stations 08 8 stations Note) Number of stations varies according to nozzle nominal size during simultaneous operation. Port exhaust specifications Vacuum release pressure supply port (PD port) B None (Release pressure is supplied from the P port.) Exhaust specifications 2 Port exhaust Rc 1/4 Air pressure supply (P) port position B Both sides *Specifications and dimensions for the -series are the

75 Vacuum Pad/ Vertical Vacuum Entry -ZPT Series 16 B5 -ZPTSeries Without buffer ZPT B F Material restriction Pad diameter (mm) 16 ø16 Pad type B Bellows Vacuum entry/mounting thread diameter Connection Thread diameter Female thread B5 M5 x 0.8 Material F Fluororubber Replacement Parts: Pad Unit (With lock ring) Pad Unit Material restriction ZP 16 B F Material F Fluororubber Pad diameter (mm) Pad type 16 ø16 B Bellows *Specifications and dimensions for the -series are the Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products -ZPTSeries With buffer ZPT 06 U F K 6 B5 A8 Material restriction Pad diameter (mm) 06 ø6 U Pad type Flat *Specifications and dimensions for the -series are the Material F Fluororubber Buffer stroke 6 6 mm Buffer type K Non-rotating Mounting thread diameter/ Male thread A8 M8 x 1 Vacuum entry port B5 M5 x Vacuum Equipment Detection Switches Auto Switches

76 High-Precision Digital Pressure Switch -ZSE40/-ISE40 Series Set pressure range to MPa For positive pressure For Positive Pressure ISE SDPC M For Vacuum/Compound Pressure ZSE SDPC M Material restriction F Set pressure range 10.0 to kpa For vacuum pressure to kpa For compound pressure Option None Panel mount (ZS-22-A) Piping specifications E 01: R 1/8 (with M5 female threads) R 1/8 M5 x 0.8 female threads Panel mount + Front protective cover (ZS-24-C) F *Specifications and dimensions for the -series are the Input/Output specifications 22 NPN open collector 2 outputs 62* PNP open collector 2 outputs *Optional Lead wire length SDPC 0.5 m *With M12 connector *When optional parts only are required, order with the part numbers inside ( ). Unit specifications With unit switching function M SI units only Note) Note) Fixed units For vacuum/compound pressure : kpa For positive pressure : MPa 58

77 High-Precision Digital Pressure Switch for General Fluids -ZSE50F/-ISE50 Series Directional Control Valves For positive pressure For compound pressure 02 Material restriction Panel Mount Part No. Option Panel mount Panel mount + Front protection cover ISE50 02 ZSE50 F 02 Piping specifications R 1/4 (M5 with female screw), Piping in backward direction Part no. ZS-24-E ZS-24-F Input/ output specifications 22 NPN open collector 2 output 62* PNP open collector 2 output *Optional *Specifications and dimensions for the -series are the Qty SDPC SDPC Lead wire length SDPC 0.5 m *With M12 connector M M Option None Panel mount E F Panel mount + Front protection cover Unit specification With unit switching function M Fixed SI unit Note) Note) Fixed units: For compound pressure : KPa For positive pressure : MPa Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Detection Switches Vacuum Equipment Flow Control Related Products 59 Auto Switches

78 2-Color Display Digital Flow Switch Integrated display -PFM7 Series Integrated display Material restriction 7 PFM7 10 C6 B Type Integrated display Rated flow range (Flow rate range) to 10 (5) l/min 50 1 to 50 (25) l/min 11 2 to 100 (50) l/min * ( ): Fluid: CO2 M Option None Bracket (For without flow adjustment valve) ZS-33-M-X221 R Mounting screw (accessory) C6 C8 Description ø6 One-touch fitting ø8 (5/16") One-touch fitting Port size Flow rate range T Panel mount adapter (For without flow adjustment valve) ZS-33-J Panel mount adapter A Panel mount adapter B B E Output specification 2 PNP outputs 1 PNP output + Analog (1 to 5 V) Panel Unit specification M Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l Mounting bracket *Specifications and dimensions for the -series are the 60

79 For Water Digital Flow Switch Integrated Display Type Material restriction Remote Type Sensor Unit Material restriction -PF2W Series Flow rate range to 4 l/min 20 2 to 16 l/min 40 5 to 40 l/min PF2W Port size 3/8 1/2 3/4 Flow rate (l/min) Flow rate range to 4 l/min 20 2 to 16 l/min 40 5 to 40 l/min Thread type Rc N NPT F G Port size Applicable model -PF2W704, -PF2W720 -PF2W720, -PF2W740 -PF2W740 PF2W Thread type Rc N NPT F G M Unit specification M Output specification 67 PNP open collector 2 outputs With unit switching function Fixed SI unit Note) Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Lead wire M12 3 m lead wire with connector N Without lead wire Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Port size 3/8 1/2 3/4 Flow rate (l/min) Port size Applicable model -PF2W504, -PF2W520 -PF2W520, -PF2W540 -PF2W540 Vacuum Equipment N Lead wire M12 3 m lead wire with connector Without lead wire Output specification Specification Applicable monitor unit (monitor) model 1 Output for monitor unit + Analog output (1 to 5 V) Series PF2W300 2 Output for monitor unit + Analog output (4 to 20 ma) Note) The monitor is not compatible with -series products. *Specifications and dimensions for the -series are the 61 Detection Switches Auto Switches

80 Solid State Auto Switch D-M9BW(V)SDPC-0 Series Compatible with Secondary Batteries/Material restriction Auto Switch Specifications Refer to SMC website for the details of the products conforming to the international standards. Auto switch model Applicable load Power supply voltage Current consumption Load voltage Load current Internal voltage drop Leakage current Response time Indicator light Electrical entry Lead wire Impact resistance Connector standards Enclosure Insulation resistance Withstand voltage Ambient temperature Standard PLC: Programmable Logic Controller D-M9BW(V)SDPC-0 24 VDC relay, PLC 10 VDC to 28 VDC 2.5 ma to 40 ma 4 V or less 0.8 ma or less 1 ms or less Operating position Red light is ON. Proper operating position Green light is ON. Grommet Oilproof flexible heavy-duty vinyl cord, ø2.7 x 3.2, ellipse Switch, 1,000 m/s 2 Connector, 300 m/s 2 JIS C 4524, JIS C 4525 IEC , NECA 0402 In compliance with IP 67 when coupled 50 MΩ or more (500 VDC Mega) between lead wire and case 1,000 VAC for 1 min. (between lead wire and case) -10 C to 60 C CE marking Dimensions D-M9BWSDPC-0 M2.5 x 4l Slotted set screw Indicator light Special order number Connector size M12 (mm) Date of manufacturing Most sensitive position D-M9BWVSDPC-0 M2.5 x 4l Slotted set screw Indicator light Connector size M12 Special order number Date of manufacturing Most sensitive position 62

81 Solid State Auto Switch D-M9BW(V)L-0 Series Compatible with Secondary Batteries/Material restriction Auto Switch Specifications Auto switch model Applicable load Power supply voltage Current consumption Load voltage Load current Internal voltage drop Leakage current Response time Indicator light Electrical entry Lead wire Impact resistance Insulation resistance Withstand voltage Ambient temperature Standard Dimensions D-M9BWL-0 Refer to SMC website for the details of the products conforming to the international standards. PLC: Programmable Logic Controller D-M9BW(V)SDPC-0 24VDC relay, PLC 10 VDC to 28 VDC 2.5 ma to 40 ma 4 V or less 0.8 ma or less 1 ms or less Operating position Red light is ON. Proper operating position Green light is ON. Grommet Oilproof flexible heavy-duty vinyl cord, ø2.7 x 3.2, ellipse, 0.15 mm 2, double core 1,000 m/s 2 50 MΩ or more (500 VDC Mega) between lead wire and case 1,000 VAC for 1 min. (between lead wire and case) -10 C to 60 C CE marking Date of manufacturing M2.5 x 4l Slotted set screw Indicator light Most sensitive position Special order number (mm) Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products D-M9BWVL-0 M2.5 x 4l Slotted set screw Indicator light Vacuum Equipment Detection Switches Most sensitive position Special order number Date of manufacturing 63 Auto Switches

82 Solid State Auto Switch D-Y7BW(V)L-0 Series Compatible with Secondary Batteries/Material restriction Auto Switch Specifications Refer to SMC website for the details of the products conforming to the international standards. Auto switch model Applicable load Power supply voltage Current consumption Load voltage Load current Internal voltage drop Leakage current Response time Indicator light Electrical entry Lead wire Impact resistance Insulation resistance Withstand voltage Ambient temperature Standard PLC: Programmable Logic Controller D-Y7BW(V)L-0 24 VDC relay, PLC 10 VDC to 28 VDC 2.5 ma to 40 ma 4 V or less 0.8 ma or less 1 ms or less Operating position Red light is ON. Proper operating position Green light is ON. Grommet Oilproof flexible heavy-duty vinyl cord, ø3.4, 0.15 mm 2, double core 1,000 m/s 2 50 MΩ or more (500 VDC Mega) between lead wire and case 1,000 VAC for 1 min. (between lead wire and case) -10 C to 60 C CE marking Using flexible cable as standard spec. The optimum operating position can be determined by the color of the light. (Red Green Red) Dimensions D-Y7BWL-0 M2.5 x 4l Slotted set screw Indicator light (mm) Date of manufacturing Most sensitive position D-Y7BWVL-0 M2.5 x 4l Slotted set screw Indicator light Date of manufacturing Most sensitive position 64

83 Reed Auto Switch Direct Mounting Style D-AL-0/D-Z80L-0 Series Compatible with Secondary Batteries / Material restriction Auto Switch Specifications D-AL-0 (Without indicator light) M2.5 x 4L Slotted set screw Most sensitive position 24.5 PLC: Programmable Logic Controller Auto switch model Applicable load D-AL-0 IC circuit, Relay, PLC AC AC AC Load voltage 24 V DC or less 48 V DC or less 100 V DC or less Maximum load current Contact protection circuit Internal resistance Standard 50 ma 40 ma None 1 Ω or less (Including lead wire length of 3 m) CE marking 20 ma Lead wiresoilproof heavy-duty vinyl cord, ø2.7, 0.18 mm 2 x 2 cores (Brown, Blue), 3 m Dimensions D-AL-0 Auto Switch Specifications D-Z80L-0 (Without indicator light) Auto switch model D-Z80L-0 Applicable load Relay, PLC, IC circuit AC Load voltage 24 V DC or less 48 V AC 100 V AC DC DC Maximum load current 50 ma 40 ma 20 ma Contact protection circuit None Internal resistance 1 Ω or less (Including 3 m lead wire) Standard CE marking Lead wiresoilproof heavy-duty vinyl cord, ø2.7, 0.18 mm 2 x 2 cores (Brown, Blue), 3 m Dimensions D-Z80L-0 Refer to SMC website for the details of the products conforming to the international standards. ø2.7 (mm) Refer to SMC website for the details of the products conforming to the international standards. PLC: Programmable Logic Controller (mm) Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Flow Control Related Products Vacuum Equipment Detection Switches Most sensitive position 65 Auto Switches

84 Auto Switches Auto Switch Mounting Bracket Part No. Applicable cylinder series: -/CDLQ, -RSDQ Applicable auto switches : D-M9BW(V)L-0, D-M9BW(V)SDPC-0, D-AL-0 Applicable bore size (mm) Cylinder series Auto switch mounting Auto switch mounting CDLQ brackets are not required. brackets are not required. qbq-2 qbq-2 w-bq2-012 w-bq2-012 ebba2 ebba2 -RSDQ q-bq2-012 wbba2 qbq-2 w-bq2-012 ebba2 Port side C A B Auto switch mounting surface and auto switch mounting bracket used Auto switch mounting rail only Port side A, B, C side q-bq2-012 wbba2 (See the table below for screws and nuts.) Two types of auto switch bracket are used as a set. w q Auto switch mounting brackets are not required. qbq-2 (Only resin spacers are used.) w-bq2-012 ebba2 (See the table below for screws and nuts.) Three types of auto switch bracket are used as a set. e w q Note 1) When a compact auto switch is mounted on 3 sides (A, B, and C above) other than the port side of each cylinder series with ø32 to ø50, auto switch mounting brackets above are required. Order them separately from cylinders. Order example -RSDQB32-20D-M9BWL 1 BQ2 2 (Only resin spacers are used.) -BQ BBA2 2 Note 2) When shipping cylinders, auto switch mounting brackets and auto switches are shipped together. Details of stainless steel mounting screw set Part No. Description Part Size M3 x 0.5 x 6L Auto switch mounting screw M3 x 0.5 x 8L BBA2 M3 x 0.5 x 10L Auto switch mounting nut (square) M3 x 0.5 Auto switch mounting nut (convex) M3 x 0.5 Quantity Applicable bore size ø20, ø25 ø32 to ø50 ø20, ø25 ø32 to ø50 Note 3) A spacer (black resin) for BQ-2 is not included. Note 4) Use auto switch mounting screws and nuts for lengths applicable to individual bore sizes. 66

85 Auto Switches Auto Switch Mounting Bracket Part No. Applicable cylinder series: -CDJ2, -/CDG1, -/MGG, -/CDNG Applicable auto switches : D-M9BWL-0, D-M9BWSDPC-0, D-AL-0 Cylinder series -CDJ2 CDG1 MGG CDNG Applicable bore size (mm) qbj2-010 wbj3-1 ebba4 qbj2-010 wbj3-1 ebba4 qbma2-020 wbj3-1 ebba4 qbma2-025 wbj3-1 ebba4 qbma2-032 wbj3-1 ebba4 qbma2-040 wbj3-1 ebba4 Note) Since mounting screws attached to BJ2- and BMA2- are made of steel, use stainless steel mounting screw set BBA4. Details of stainless steel mounting screw set Description Part No. Part Size Quantity BBA4 Applicable cylinder series: -/CDA2, -CDNA Applicable auto switches : D-M9BW(V)L-0, D-M9BW(V)SDPC-0, D-AL Cylinder series CDA2 CDNA Auto switch mounting screw Applicable bore size (mm) BA7-040 M3 x 0.5 x 14L 1 -BA7-040 Part No. of applicable auto switch mounting bracket BJ2-010/BJ2-016 BMA2-020/BMA2-025/BMA2-032 BMA2-040/BMA2-050 c d Switch holder (Resin) Switch bracket (Stainless steel) -BA BA BA7-080 b Auto switch mounting screw (Steel) a Auto switch mounting band qbma2-050 wbj3-1 ebba4 Auto switch e Switch spacer (Stainless steel) Set screw (Unused) qbj2- and BMA2- are the set of a and b above. wbj3-1 is the set of c, d, and e above. Directional Control Valves Air Filters/Pressure Control Equipment Air Preparation Equipment Air Grippers Actuators Vacuum Equipment Note) D-AL-0 cannot be mounted on ø50. Detection Switches Flow Control Related Products 67 Auto Switches

86 Auto Switches Auto Switch Mounting Bracket Part No. Applicable air gripper series: -/91MHL2 Applicable cylinder series : -/MY1B, -/MY1H, -/CY3R, -/MGP, -RS(1)H Applicable auto switches : D-M9BW(V)L-0, D-M9BW(V)SDPC-0, D-AL-0 Air gripper series Cylinder series Applicable bore size (mm) MHL2 -BMG BMG MY1B Note 1) -BMG MY1H CY3R MGP -RSHNote 2) -BMG2-012 Auto switch mounting brackets are not required. Auto switch mounting brackets are not required. -BMG2-012 Auto switch mounting brackets are not required. -BMG BMG BMG BMG BMG BMG RS1HNote 2) -BMG BMG2-012 Note 1) -/MY1B series D-M9BW(V)L-0 or D-M9BW(V)SDPC-0 cannot be mounted on ø50. D-AL-0 cannot be mounted. Note 2) -RS(1)H series D-AL-0 cannot be mounted. For -/MY1B and -/MY1H series For -/CY3R, -/MGP and -RS(1)H series -BMG BMG

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