Series Compatible with. Secondary Batteries. Material restriction Copper metal, Zinc, Nickel Nickel plating, Zinc chromate 90-Series

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1 Series Compatible with Secondary Batteries For longer life, low dew point restriction + Lub-retainer Service life has been improved with a lub-retainer compared with SMC s standard models. Compatible with a low dew point ( 40 C). 91-Series restriction Copper metal, Zinc, Nickel Nickel plating, Zinc chromate 90-Series Copper metal restriction Copper metal, Nickel plating 25-Series Dust-tight restriction + Lub-retainer + Heavy-duty scraper Dustproofing has been improved with a lub-retainer and heavy-duty scraper XC4 Series Low dust restriction + Vacuum port for vacuum suction Using a vacuum port for vacuum suction enables reducing more dust particles than 90- series. 92-MSQB Series Compatible with main products to terminal devices C-E08-6A

2 Secondary battery manufacturing process Electrode production Environment Copper-free (prohibited materials)/ Dust Weighing Kneading Coating Dry Roll Press Winding Layering Cell assembly Environment Copper-free (prohibited materials)/low dew point/chemical resistant/ High-speed, high-frequency specifications Inspection/Packaging Environment High-temperature/Long-loading time Liquid injection Sealing Activation Inspection Package Service life (Environmental resistance) 90- Series 91- -XC4 Series 91- Series Contaminant countermeasures (Cleanliness level) Anode plate Separator Cathode plate Separator Recommended devices restriction 90- Series Restricting material prevents contamination by foreign matter. restriction: Lub-retainer 91- Series Service life has been improved with a lubretainer compared with SMC s standard models. Compatible with a low dew point ( 40 C). 90- Series 91- Series restriction: Lub-retainer: Heavy-duty scraper 91-XC4 Series Dustproofing has been improved with a lubretainer and heavy-duty scraper. 91-XC4 Series restriction: Vacuum port for vacuum suction 92- Series Using a vacuum port for vacuum suction enables reducing more dust particles than 90- series. 92- Series Copper metal restriction 25- Series 25- Series *Depending on the device, some products are not for. See device introduction pages. Front matter 1 Front matter 2

3 Actuators restriction 90- Series Mounting dimensions are the same as those of the standard series. Bushing Copper Steel Piston rod Carbon steel + Hard chrome plated Stainless steel Hard chrome plated Rod end nut Steel Stainless steel 304 Tie-rod nut Steel Stainless steel 304 indicate the restricted materials. *Actuators do not use metal containing copper. Mounting Bracket Foot style, Trunnion ( style, Flange style etc. ) Pivot bracket Steel + Raydent treatment Resin bushing + Steel + Raydent treatment Raydent treatment Resin bushing CDG1 Series Double clevis style Change (Related Products) Shock Absorber The outer tube surface treatment has been changed to Raydent treatment. Using lowdust fluorine grease. Change of outer tube surface treatment Auto Switch The connector material of the auto switch with pre-wired connector has been changed to resin, and the auto switch mounting screw material has been changed to stainless steel. Floating Joint External parts such as casings, studs, threads, and nuts are changed to stainless steel. 90-RB Series 90-J Series Resin connector Mounting screw material changed to stainless steel D-M9BWSDPC-900 Series *The lead wires and connector pins are made of copper. Front matter 3

4 Actuators Improved service life 91- Series restriction + Lub-retainer Service life has been improved with a lub-retainer compared with SMC s standard models. Compatible with a low dew point ( 40 C). Air Cylinder Mounting dimensions are not interchangeable with the 90- series. Lub-retainer Lub-retainer Grease lubrication 91-CQ2 Series For use in dusty environment 91- -XC4 Series restriction + Lub-retainer + Heavy-duty scraper Dustproofing has been improved with a lub-retainer and heavy-duty scraper. Air Cylinder Mounting dimensions are not interchangeable with the 90- and 91- series. Note) For some models, the minimum operating pressure may be different from that of standard models. Lub-retainer Heavy-duty scraper Heavy-duty scraper Lub-retainer Mounting Dimension Comparison 90- spec. Mounting dimensions are the same as those of standard models. 91- spec. 5 to 7 mm longer Lub-retainer Removal of foreign particles 3 to 5 mm longer Lub-retainer Heavy-duty scraper 91-XC4 spec. 91-CQ2 -XC4 Series Front matter 4

5 90- Series Pneumatic equipment material restriction Mounting dimensions are the same as those of the standard series. *Coils for solenoid valves, connector pins, and lead wires are made of copper. Solenoid Valve Changed to with resin pre-wired connector. Mounting screw material changed to stainless steel Mounting screw material has been changed to stainless steel. Mounting screw material changed to stainless steel Resin connector 90-SV Series 90-SS5V Series Mist Separator Mounting screw material has been changed to stainless steel. Regulator Valve (wetted parts) material has been changed to stainless steel. Changed to stainless steel With fitting for relief port 90-AM Series 90-AR Series Pressure Switch Changed to with resin pre-wired connector. Fittings/Speed Controller Stainless steel specifications (Stainless steel 303) Resin connector 90-I(Z)SE Series KG Series AS-FG Series Front matter 5

6 92-MSQB Series restriction + Vacuum port for vacuum suction Using a vacuum port for vacuum suction enables reducing more dust particles than 90- series. Rotary Actuator A vacuum port for vacuum suction has been added to reduce the number of dust particles being emitted from the bearing part. Vacuum port (Vacuum suction) 92-MSQB Series Recommended System Circuit for the Secondary Battery Manufacturing Process When the pneumatic equipment is used in the secondary battery manufacturing process, the system circuit shown below is recommended for dust particle generation countermeasures. Recommended System Circuit Secondary battery manufacturing process q Exhaust piping of the solenoid valve w Breathing piping for the regulator e Drainage piping q r w e rclean Exhaust Cleaner/90-AMP Series Exhaust air treatment from solenoid valves and regulators When exhaust air from the solenoid valve or the relief port/bleed hole of the regulator enters the clean exhaust cleaner (90-AMP series), it can prevent dust particles from being emitted. r Front matter 6

7 Applicable Products Directional Control Valves restriction: 90- series restriction + Lub-retainer: 91- series restriction + Lub-retainer + Heavy-duty scraper: 91- -XC4 series restriction + Vacuum port for vacuum suction: 92- series SY5000, 7000 Description Series Port Solenoid Valve SV2000, 4000 VQ1000Y, 2000Y Separate Type Double Check Block VQ1000 VQ2000 VP342, 542 VP742 3 Port Solenoid Valve VT317 VG342 Finger Valve VHK2 Actuators Description Series : Made-to-Order 91-XC4 25- (Double acting only) CDJ2 ø10, ø16 CDM2 ø20 to ø40 Air Cylinder (Double acting only) Rubber Bumper Air Cushion CDG1 N CDG1 A *1 90- series for ø20 to ø series for ø20 to ø series for ø25 to ø100 MDB ø40 to ø100 CDA2 ø40 to ø100 *Refer to the auto switches (Front matter 13) for the models that can be mounted on actuators. *1 Not compatible with ø20 and ø25. Front matter 7

8 Actuators Description Series Applicable Products : Made-to-Order 91-XC4 25- CDU *1 ø10 to ø32 Free Mount Cylinder Non-rotating rod CDUK *2 *1 ø10 to ø32 (Double acting only) CDQS *3 ø12 to ø25 Compact Cylinder Anti-lateral load (Double acting only) CDQS S ø12 to ø25 (Double acting only) CDQ2 *4 ø12 to ø100 Basic MY1B ø20 to ø63 Mechanically Jointed Rodless Cylinder Linear guide 1-axis MY1H ø16 to ø40 Linear guide 1-axis MY2H ø16, ø25 Magnetically Coupled Rodless Cylinder Basic Direct mount CY3B CY3R(G) ø15 to ø series and 91-series are identical in construction. ø15 to ø series and 91-series are identical in construction. Cross roller guide MXS *5 ø16, ø20, ø25 (Basic only) Air Slide Table Recirculating linear guide MXQ *5 90- series for ø6 to ø25 (Basic only) 25- series for ø6 to ø25 (Stopper) Slide bearing MGPM *4 90- series for ø12 to ø series for ø12 to ø100 Compact Guide Cylinder Ball bushing bearing MGPL *4 ø12 to ø63 Slide bearing CXSM ø15 to ø25 Dual Rod Cylinder Ball bushing bearing CXSL ø6 to ø32 *Refer to the auto switches (Front matter 13) for the models that can be mounted on actuators. *1 Not compatible with ø10 and ø16. *2 Not compatible with ø10. *3 Not compatible with ø12. *4 Not compatible with ø12 and ø16. *5 Not compatible with ø6, ø8,ø12 or ø16. Front matter 8 A

9 Applicable Products Actuators Description Series restriction: 90- series restriction + Lub-retainer: 91- series restriction + Lub-retainer + Heavy-duty scraper: 91- -XC4 series restriction + Vacuum port for vacuum suction: 92- series : Made-to-Order 91-XC4 25- Guide Cylinder Ball bushing bearing MGGL ø20 to ø50 Cylinder with Lock CDNG N *1 ø20 to ø40 Cylinder with Lock CDNA N ø40 to ø100 Compact Cylinder with Lock (Double acting only) CDLQ ø20 to ø100 Stopper Cylinder RSDQ ø20 to ø50 RSH ø20, ø32 Heavy Duty Stopper Cylinder RS1H ø50 to ø63 *Refer to the auto switches (Front matter 13) for the models that can be mounted on actuators. *1 Not compatible with ø20 and ø25. Related Products Description Series JA 90- series for applicable cylinders ø80 and ø series for applicable cylinders ø6 to ø15 (JS) 25- series for applicable cylinders ø20 to ø160 () Floating Joint For compact cylinder JB 90- series for applicable cylinders ø12 to ø series for applicable cylinders ø12 and ø16 (JS) 25- series for applicable cylinders ø20 to ø160 () Stainless steel JS 90- series for applicable cylinders ø10 to ø series available as standard RB M8 to M27 Shock Absorber RBC M8 to M27 Rotary Actuator Description Series Rotary Table Rack & Pinion MSQB Size: 20 to 100 *Refer to the auto switches (Front matter 13) for the models that can be mounted on rotary actuators. Front matter 9

10 Air Grippers Description Series Applicable Products : Made-to-Order 91-XC4 25- MHZ2 ø16 to ø40 Long stroke MHZL2 ø10 to ø25 With dust cover MHZJ2 ø10 to ø25 Long stroke (with dust cover) MHZL2 ø10, ø16, ø20 Parallel Type Air Gripper Wide MHL2 *1 90- series, 91- series, and 91- XC4 series are for ø20 and ø series is for ø10 and ø32. Low Profile Air Gripper MHF2 ø8, ø12, ø16, ø20 3-finger air gripper MHS3 ø16, ø20, ø25 4-finger air gripper MHS4 ø16, ø20, ø25 *Refer to the auto switches (Front matter 13) for the models that can be mounted on air grippers. *1 Please contact SMC for ø40. Vacuum Equipment Description Series Large Size Vacuum Module Ejector unit Manifold ZR ZZR Space Saving Vacuum Ejector & Vacuum Pump System Ejector unit Manifold ZQ ZZQ With connector cover With connector cover -X125: Port exhaust Vacuum Ejector Body ported ZH Compatible with standard models Air Suction Filter With one-touch fittings In-line ZFC Compatible with standard models Vertical vacuum entry (without buffer) ZPT Pad material: Fluororubber Vacuum Pad Vertical vacuum entry (with buffer) ZPT Pad material: Fluororubber Pad ZP Mounting on a special adapter Pad material: Fluororubber Front matter 10

11 Applicable Products Air Preparation Equipment Description Series 90- restriction: 90- series restriction + Lub-retainer: 91- series restriction + Lub-retainer + Heavy-duty scraper: 91- -XC4 series restriction + Vacuum port for vacuum suction: 92- series Membrane Air Dryer IDG50L to 100L With fittings for purge air discharge Main Line Filter AFF4C to 22C, 37B, 75B Drain discharge is possible only manually. Mist Separator AM250C to 550C, 650, 850 Drain discharge is possible only manually. Micro Mist Separator AMD250C to 550C, 650, 850 Drain discharge is possible only manually. Clean Air Filters Description Series 90- SFD100 Compatible with standard models Clean Air Filter SFD200 AMP220, 320, 420 With element service indicator Exhaust Cleaner for Clean Rooms AMP T-X1 With element service indicator [1500 l/min (ANR)] Air Filters/Pressure Control Equipment Description Series Air Filter AF30 to series is for AF20 to AF60. Drain discharge is possible only manually. Mist Separator AFM30, 40 Drain discharge is possible only manually. Micro Mist Separator AFD30, 40 Drain discharge is possible only manually. Regulator AR20 to 50 Regulator with Backflow Function AR25K to 60K 25- series is for AR20K to AR50K. 90- series is with a joint at the relief port. Order a pressure gauge separately. *Please contact SMC for pressure gauges. Front matter 11

12 Air Filters/Pressure Control Equipment Description Series 90- Applicable Products Filter Regulator with Backflow Function For Air Combination (Modular connection bracket) AW30K to 60K Y30 to 60 Y30T to 60T With fitting for relief port Drain discharge is possible only manually. Order a pressure gauge separately. Spacer T-bracket spacer For 30 to 60 Precision Regulator IR1000 to 3000 Order a pressure gauge separately. Electro-Pneumatic Regulator ITV1000 to 3000 This is not completely copper-free since the electric circuit is included. (Wetted parts are copper-free.) Residual Pressure Indicator CB-97XH Compatible with standard models *Please contact SMC for pressure gauges. Fittings/Flow Control Equipment Description Series 90- Quick Exhaust Valve with Built-in One-touch Fittings AQ240F, 340F Check Valve with One-touch Fittings AKH4 to 12 Speed Controller with One-touch Fittings Stainless Steel Specifications AS-FG Compatible with standard models One-touch Fittings Stainless Steel Specifications KG Compatible with standard models Detection Switches Description Series Color Display High-Precision Digital Pressure Switch ZSE30A / ISE30A High Precision Digital Pressure Switch ZSE40 / ISE series is with resin pre-wired connectors. General Purpose High Precision Digital Pressure Switch ISE50 With resin pre-wired connector 2-Color Display Digital Flow Switch PFM Note) Copper will be exposed when the connector cover moves. Digital Flow Switch for Water PF2W 90- series covers 25- series. Front matter 12

13 Applicable Products Series Auto Switches Applicable cylinder Mounting CDJ2 Series CDG1 Series MGG Series Band mounting *1 2-Color Display Solid State Switch D-M9BWSDPC-900 D-M9BWVSDPC-900 D-M9BWL-900 D-M9BWVL-900 CDQ2 Series RSQ Series Rail mounting *1 *2 CDA2 Series CDNA Series Tie-rod mounting *1 Reed Switch D-A90L-900 CDU Series CQ Series MY Series CY3R Series RSQ Series MSQ Series MHZJ Series *4 MHZL Series *4 MHS Series *4 MX Series *2 Direct mounting (Round groove) MY Series *3 CY3R Series MGP Series MLGP Series RSH Series MHL Series *4 Direct mounting *1 (Square groove) 2-Color Display Solid State Switch D-Y7BWL-900 D-Y7BWVL-900 MY1B50 Series Direct mounting Reed Switch D-Z80L-900 RSH Series MY1B25 to 63 Direct mounting *1 Can be mounted on the products by using an auto switch mounting bracket. *The auto switch mounting bracket material is also restricted. *2 The D-A90L-900 cannot be mounted on the RSH, RS1H, MY1B25 to 63, CDNA 50. *3 The D-M9BW(V) -900 cannot be mounted on the MY1B50. *4 Reed switches (D-A90L-900 and D-Z80L-900) cannot be mounted on the MHZJ, MHZL, MHS, MHL series. Front matter 13

14 Table Comparing s and of Components Product, Series Parts 25 series 90 series Cylinder CQ2 Cylinder MGPM Air slide table MXQ Solenoid valve Filter AF30 to 60 Bushing (ø50 to ø100) Piston Rod Mounting bracket Bushing Guide bushing Guide rod Plate Piston Piston spacer Packing support Bolts and screws Bolts and screws Drain plug Rod Bracket Check valve plug Copper metal Aluminum Chromate S45C Hard-chrome-plated Ni-plated (Copper base) Copper metal Lead bronze casting Hard-chrome-plated Ni-plated (Copper base) Brass (ø6 and ø8) Aluminum (ø12 and up) Electroless Ni-plated (ø6 and ø8) Chromate (ø12 and up) Brass Electroless Ni-plated Brass Electroless Ni-plated Ni-plated (Copper base) Ni-plated (Copper base) Brass Electroless Ni-plated Brass Steel belt Electrodeposition painted (Black) Brass metal Aluminum Chromate S45C Hard-chrome-plated Raydent -treated metal metal Hard-chrome-plated SUS304 SUS304 (ø6 and ø8) Aluminum (ø12 and up) Chromate (ø12 and up) SUS304 Black dyeing SUS Steel belt Electrodeposition painted (Black) metal Aluminum Anodized (ø12 to ø40) SUS304 Hard-chrome-plated Raydent -treated metal metal SUS440C Hard-chrome-plated SUS304 SUS304 (ø6 and ø8) Aluminum (ø12 and up) Anodized (ø12 and up) SUS304, SUS304 Raydent -treated SUS Steel belt Raydent -treated Packing retainer AR50, 60: Brass AR50, 60: Aluminum AR50, 60: Aluminum Regulator AR25K to 60K Valve Stem Bonnet Bracket Brass Brass AR25 to 40: POM AR50, 60: ADC AR25 to 40: AR50, 60: Chromate, black painted Steel belt Electro-deposition painted (Black) AR25 to 40: POM AR50, 60: ADC AR25 to 40: AR50, 60: Chromate, black painted Steel belt Electro-deposition painted (Black) ADC Chromate, black painted Steel belt Raydent -treated Front matter 14

15 Related Products 1 Clean Clean Room Products Consult SMC about restriction. Products for use in clean rooms. Particle reducing products. Assembled inside a clean room and shipped in double packaging. Clean Series 10-/11-/12-/13- Clean Rodless Cylinder Series CYP Clean One-touch Fittings for Driving Air Piping Series KPQ/KPG Clean Speed Controller with One-touch Fitting Series AS-FPQ/FPG Exhaust Cleaner for Clean Room Series AMP Non-Metallic Pump/ Double Acting Pump Series PAF High Vacuum Equipment Clean Regulator Series SRH Precision Clean Regulator Series SRP Fluoropolymer Equipment Polyolefin Tubing Series TPH Soft Polyolefin Tubing Series TPS Series CYP Series KPQ Clean Blow Products Products for clean air lines. Assembled inside a clean room and double packaging. Clean Gas Filter Clean Air Filter/ Hollow Fiber Element Clean Air Module Clean Regulator Clean Regulator/ Fluoropolymer Type Clean One-touch Fittings (for Blowing) Polyolefin Tubing Air Operated Chemical Valve/ Threaded Type High Vacuum Straight Solenoid Valve Series SF Series SFD Series LLB Series SRH/SRP Series SRF Series KP Series TPH/TPS Series LVA Series XSA Series LLB Series SFD Series SRH Front matter 15

16 Related Products 2 Fluoropolymer Equipment made with fluoropolymer excels in corrosion resistance and heat resistance. Consult SMC about restriction. Pressure Control Equipment Clean Regulator/ Fluoropolymer Type Series SRF Series SRF Fittings and Tubings Fluoropolymer Fittings Hyper Fitting Series LQ1/LQ3 Series LQ1 Series LQ3 Fluoropolymer Tubing Series TL/TIL FEP Tubing (Fluoropolymer) Series TH/TIH Soft Fluoropolymer Tubing Series TD/TID Series TL/TIL Flow Sensor Digital Flow Switch for Deionized Water and Chemicals Series PF2D Monitor Fluid Control Equipment Air Operated Chemical Valve Series LV Series PF2D Sensor Series LVC Pump Non-Metallic Pump/ Double Acting Pump Series PAF Series PAF 3 Antistatic Equipment Consult SMC about restriction. Antistatic performance achieved through conductive measures for a reduction in static-related trouble. Actuators Antistatic Air Cylinder (Made to Order) CM2-X1051 Vacuum Equipment Vacuum Pad Series ZP Series KA Fittings and Tubings Antistatic One-touch Fittings Miniature Fittings/Stainless Steel 316 Miniature Fittings Antistatic Tubing Series KA Series MS Series M Series TA Series TA Flow Control Equipment Antistatic Speed Controller (Made to Order) AS-X260 Front matter 16

17 Related Products 4 Static Neutralization Equipment Ions generated by corona discharge neutralize static electricity. Ionizer Ionizer/Nozzle Type Measurement Equipment Measures the electrostatic potential. Electrostatic Sensor Handheld Electrostatic Meter Series IZS31 Series IZN10 Series IZD10/IZE11 Series IZH10 Consult SMC about restriction. Series IZS31 Sensor Monitor Series IZD/IZE 5 Explosion Proof Equipment Consult SMC about restriction. Intrinsically Safe Explosion-proof System 5 Port Solenoid Valve Series 51-SY Explosion Proof Solenoid Valve Series 50-VFE/VPE Series 51-SY Series 50-VFE/VPE 6 Electric Actuators/Cylinders Consult SMC about restriction. Electric Actuator Electric Actuator with Integrated Guide Short Stroke Electric Actuator Electric Cylinder Electric Gripper Electric Slide Table e-rodless Actuator Series LJ1/LG1 Series LTF Series LX Series LZB/LDZB/LZC/LDZC Series LEHZ/LEHF Series LES Series E-MY2 Series LJ1 Series LX Series LEHZ Series E-MY2 a Front matter 17