Aluminum High Vacuum Angle Valve

Transcription

1 luminum High Vacuum ngle Valve Series X RoHS X X Q High fluorine resistance inimal outgassing inimal contamination from heavy metals X YV ø00, ø60 XF(V) 09

2 ightweight, ompact arge conductance, small body Excellent resistance against fluorine corrosion (body) luminum High Vacuum ngle Valve Series X ow outgassing ow outgassing makes it possible to use a lower capacity pump and also to shorten evaluation time. X Series ase odel (mm) X-6 X X- 65 X X-6 88 X XF XF-60 8 ommon to all series. (mm) Weight (kg) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. omparison with F25 flange e ody r ody 2 t ody onductance (/s) ittle heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or r (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. Temperature distribution of 20 specifications Temperature ( ) e, r, t q, w w ellows q Valve Heater Time (minutes) High Vacuum ngle Valves Series X Features X/XV (ellows seal, Single acting) Particulate-free and clean room compatible bellows type Pressure-balance mechanism X/XV (ellows seal, Double acting) Particulate-free and clean room compatible bellows type Pressure-balance mechanism XF/XFV (O-ring seal, Single acting) High speed response Particulates are reduced through special surface treatment of shaft seal. XG/XGV (O-ring seal, Double acting) High speed response Particulates are reduced through special surface treatment of shaft seal. 0 XD/XDV (2-Step control, Single acting) Initial stage exhaust valve and main exhaust valve are combined. (flow rate 2-step control valve) Designed with a compact system and reduced piping Prevents particulate turbulence inside the chamber during exhaustion. Prevents pumps from running while overloaded. Initial exhaust valve flow is adjustable. XH (ellows seal, anual) ellows type is particulate free and cleaned. Pressure balance mechanism allows unrestricted exhaust direction. ow actuation torque (0.5 N m or less) Spring provides standard sealing load. Handle height is the same when valve is open or closed. Indicator to confirm opening and closing of valve is standard equipment. XS (ellows pressure balance, Normally closed XS electromagnetic) Particulates are reduced because there are no sliding metal parts. Pressure balance mechanism allows unrestricted exhaust direction. control power supply circuit for solenoid valve drive has been made standard. an be used in portable equipment since air for drive is not necessary.

3 Series Variations High Vacuum ngle Valves ctuation pplication Shaft seal system odel X Valve type Operating pressure (Pa) (abs) eakage (Pa m /s) Flange size Option High Note) Note) Internal External Switch Heater Indicator temperature spec. Page (Size 6: None) Single acting XV (With solenoid (N..) valves) P.2 to P.5 X X Q Particle free cleaned ellows seal X 0-6 to atmospheric pressure X Double XV (With solenoid acting valves) (Size 6: None) P.6 to P.20 YV XF Electromagnetic anual ir operated High speed operation High volume operation Prevents turbulence of particulates. Prevents a pump from running overloaded. Particle free cleaned For portable equipment not requiring air O-ring seal ellows seal O-ring seal ellows seal (ellows balance) Single acting XFV (With solenoid (N..) valves) XG Double XGV (With solenoid acting valves) XD XDV (With solenoid valves) XH XS Single acting (N..) 0-5 to atmospheric pressure 0-6 to atmospheric pressure 0-6 to anual atmospheric pressure Single 0 acting -6 to 0. Pa (G) (N..) (Size 6: None) (Size 6: None) Standard Standard P.22 to P. P.2 to P.4 P.44 to P.49 P.50 Standard Standard (Size 6: None) P.5 P.52 to P.54 Note) In case of standard seal material (F) Heater and high temperature specifications are not available with switches.

4 luminum High Vacuum ngle Valve Normally losed/ellows Seal Series X/XV RoHS How to Order X 6 9N q w e r t y u X q Flange size Size w Flange type Type F (NW) D (DN) r Temperature specifications/heater High H0 temperature H4 type H5 pplicable flange 6, 25,, 50, 6, 80 6, 80 y Number of auto switches/ounting position Temperature 5 to 60 5 to 50 Note) Size 6 is not applicable for H4, H5, Size 25 not for H4. Quantity Without auto switch 2 pcs. pc. pc. Heater With 00 heater With 20 heater ounting position Valve open/closed Valve open Valve closed u ody surface treatment/seal material and its changed part ody surface treatment Seal material N P Q R R S T U Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. ompound No W 79 SS592 SS60 SSE U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of E. I. du Pont de Nemours and ompany or its affiliates. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. 2 e Indicator/Pilot port direction Indicator Pilot port direction F G J Without indicator With indicator Flange side Flange side eft flange surface eft flange surface Without indicator t uto switch type uto switch model 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9()()(Z) D-9()()(Z) 9// eft flange surface Flange side Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) Note ) uto switches shown above cannot be mounted on the high temperature type. For the high temperature type, a semi-standard product that uses the heat resistant auto switch D-F7NJ is available. For details, please contact S. Note 2) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N Seal material changed part and leakage Note 2) hanged eakage (Pa m /s or less) Note ) part Internal External None w, e w e. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F). x 0 - (F). x 0-9. x 0 - (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of onstruction on page 4 for changed part. Number indicates parts number of onstruction accordingly. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) X-6-9N-XN

5 ir Operated/with Solenoid Valve luminum High Vacuum ngle Valve Series X/XV How to Order [Option] XV q Flange size Size XV w Flange type Type F (NW) D (DN) 6 G 9N G q w e r t y u i ir operated/with solenoid valve pplicable flange 6, 25,, 50, 6, 80 6, 80 e Indicator/Pilot port direction Indicator Pilot port direction F eft flange surface With G indicator J eft flange surface Without indicator type plug connector ( power supply) not attached for J, of sizes 6 and 25. o!0 eft flange surface X X Q X YV r uto switch type uto switch model 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9()()(Z) D-9()()(Z) 9// Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N y Rated voltage E-compliant 00 V, 50/60 Hz V, 50/60 Hz 4 0 V, 50/60 Hz 220 V, 50/60 Hz 5 24 VD 6 2 VD Seal material N P Q R R S T U Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. u Electrical entry G Grommet (ead wire length 00 mm) H Grommet (ead wire length 600 mm) type plug connector type plug connector ompound No W 79 SS592 SS60 SSE U46 t Number of auto switches/ounting position Quantity Without auto switch 2 pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed i ight/surge voltage suppressor None S With surge voltage suppressor Z With light/surge voltage suppressor With light/surge voltage suppressor U (Non-polar type) S type: Not available for. U type: D only. o ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Surface treatment Note 2) eakage (Pa m /s or less) External: Hard anodized Internal: Raw material hanged part Internal External: Hard anodized Internal: Oxalic acid anodized None. x 0-0 (F) w, e. x 0-8 w. x 0-8 e. x 0-0 (F)!0 E-compliant Q E-compliant Note ) External. x 0 - (F). x 0-9. x 0 - (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of onstruction on page 4 for changed part. Number indicates parts number of onstruction accordingly. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XV-6-9N-G-XN Note ) Option specifications/ombinations This model has indicator, auto switch and (DN) flange options, but high temperature/heater options are not available. Note 2) Solenoid valves XV-6, 25,, 50: SYJ9, XV-6, 80: SYJ59 Example) SYJ9-GS, etc. For details, consult your S sales representative. For option Q, the solenoid valve should be a E-compliant product.

6 R P Series X/XV Specifications odel X(V)-6 X(V)-25 X(V)- X(V)-50 X(V)-6 X(V)-80 Valve type Fluid Operating temperature ( ) X XV Normally closed (Pressurize to open, Spring seal) Inert gas under vacuum 5 to 60 (High temperature type: 5 to 50) 5 to 50 Operating pressure (Pa) (abs) x 0-6 to atmospheric pressure onductance (/s) Note ) Internal In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation eakage (Pa m /s) External In case of standard material F:. x 0 - at normal temperature, excluding gas permeation Flange type F (NW) F (NW), (DN) Principal materials ody: luminum alloy, ellows: Stainless steel 6, ain part: Stainless steel, F (Standard seal material) Surface treatment External: Hard anodized Internal: Raw material Pilot pressure (Pa) (G) Pilot port size Weight (kg) 0.4 to 0.7 X 5 Rc/8 XV 5: Port (P), Port (R) Rc/8: Port (P), 5: Port (R) X XV Note ) onductance is the value for an elbow with the same dimensions. Note 2) For valve heater specifications, refer to ommon Option [] Heater on page 55. onstruction/operation uto switch (Option) Port (P) (Pressure port) Port (R) (Exhaust port) Indicator (Option) Heater (Option) q onnet assembly (aintenance parts) (Including w, t, y, u) agnet (Option) Pilot port Solenoid valve u ellows holder (aterial: Stainless steel 04) e Exterior seal (aintenance part) y ellows (aterial: Stainless steel 6) t Valve (aterial: Stainless steel 04) With solenoid valve ellows side exhaust w Valve seal (aintenance part) r ody (aterial: 606) Valve side exhaust Refer to the back of page 6 for aintenance Parts. <Working principle> y applying pressure from the pilot port, the piston-coupled valve overcomes the force of the spring or operating force by pressure, and the valve opens. In the case of the XV, port (P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 4 <Options> uto switch: Heater: Indicator: The magnet activates the auto switch. With 2 auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 20, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly is a heat resistant structure. This does not apply in cases where a solenoid valve is attached. When the valve is open, an orange marker appears in the center of the name plate.

7 luminum High Vacuum ngle Valve Series X/XV Dimensions X/ir operated (b) D (a) E øfn (F flange) øfd ( flange) X X Q E (c) Heater (Option) uto switch (Option) X H øg YV odel X-6 X-25 X- X-50 X-6 X (mm) D E Note ) Fn Fd G H Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page 6. XV/With solenoid valve J Port P (Pressure port) N Port R (Exhaust port) odel XV-6 XV-25 XV- J Other dimensions are the same as the X. For details, consult your S sales representative. (mm) N odel XV-50 XV-6 XV-80 J Other dimensions are the same as the X. For details, consult your S sales representative. (mm) N 2 2 5

8 luminum High Vacuum ngle Valve Double cting/ellows Seal RoHS Series X/XV How to Order Flange size 6, 25, X 6 9N Flange size 50, 6, 80 X 50 9N q w e r t y u X6 to q Flange size Size w Flange type Type F (NW) D (DN) pplicable flange 6, 25,, 50, 6, 80 6, 80 e Pilot port direction Pilot port direction Flange side eft flange surface eft flange surface r Temperature specifications/heater Temperature Heater 5 to 60 High H0 temperature H4 5 to 50 With 00 heater type H5 With 20 heater Note) Size 6 is not applicable for H4, H5, Size 25 not for H4. y Number of auto switches/ounting position Quantity Without auto switch 2 pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed u ody surface treatment/seal material and its changed part ody surface treatment Seal material N P Q R R S T U Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. ompound No W 79 SS592 SS60 SSE U46 t uto switch type uto switch model 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9()()(Z) D-9()()(Z) 9// Flange side Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) Note ) uto switches shown above cannot be mounted on the high temperature type. For the high temperature type, a semi-standard product that uses the heat resistant auto switch D-F7NJ is available. For details, please contact S. Note 2) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N Seal material changed part and leakage Note 2) hanged eakage (Pa m /s or less) Note ) part Internal External None. x 0-0 (F). x 0 - (F) w, e. x 0-8. x 0-9 w. x 0-8. x 0 - (F) e. x 0-0 (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of onstruction on page 8 for changed part. Number indicates parts number of onstruction accordingly. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) X-6-9N-XN 6

9 ir Operated/with Solenoid Valve luminum High Vacuum ngle Valve Series X/XV How to Order [Option] XV q Flange size Size Flage size 6, 25, Flage size 50, 6, 80 XV XV 6 9N G 50 9N q w e r t ir operated/with solenoid valve!0 ody surface treatment/seal material and its changed part ody surface treatment Seal material N P Q R R S T U w Flange type Type F (NW) D (DN) r uto switch type uto switch model 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9()()(Z) D-9()()(Z) 9// y Rated voltage E-compliant 00 V, 50/60 Hz V, 50/60 Hz 4 0 V, 50/60 Hz 220 V, 50/60 Hz 5 24 VD 6 2 VD Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td.! E-compliant Q E-compliant pplicable flange 6, 25,, 50, 6, 80 6, 80 Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N u Type of actuation 2 position single W 2 position double ompound No W 79 SS592 SS60 SSE U46 e Pilot port direction G y u Solenoid valve direction eft flange surface flange surface type plug connector ( power supply) not attached for of sizes 6 and 25. : Size 6, 25, only. : Size 50, 6, 80 only. i o!0! t Number of auto switches/ounting position Quantity Without auto switch 2 pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed i Electrical entry G Grommet (ead wire length 00 mm) H Grommet (ead wire length 600 mm) type plug connector type plug connector To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XV-6-9N-G-XN o ight/surge voltage suppressor None S With surge voltage suppressor Z With light/surge voltage suppressor With light/surge voltage suppressor U (Non-polar type) S type: Not available for. U type: D only. Seal material changed part and leakage Note 2) eakage (Pa m /s or less) Note ) hanged part Internal External None. x 0-0 (F). x 0 - (F) w, e. x 0-8. x 0-9 w. x 0-8. x 0 - (F) e. x 0-0 (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of onstruction on page 8 for changed part. Number indicates parts number of onstruction accordingly. Note ) Option specifications/ombinations This model has auto switch and (DN) flange options, but high temperature/heater options are not available. Note 2) Solenoid valves 2 position single: XV-6, 25, : SYJ90 XV-50, 6, 80: SY20 2 position double: XV-6, 25, : SYJ290 XV-50, 6, 80: SY220 Example) SYJ90-GS, SYJ290-GS, SY20-GS-4, SY220-GS-4 For details, consult your S sales representative. For option Q, the solenoid valve should be a E-compliant product. eft flange surface 7 X X Q X YV

10 R P Series X/XV Specifications odel X(V)-6 X(V)-25 X(V)- X(V)-50 X(V)-6 X(V)-80 Valve type Fluid Operating X Double acting (Dual operation), Pressurize to open/close Inert gas under vacuum 5 to 60 (High temperature type: 5 to 50) temperature ( ) XV 5 to 50 Operating pressure (Pa) (abs) x 0-6 to atmospheric pressure onductance (/s) Note ) Internal In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation eakage (Pa m /s) External In case of standard material F:. x 0 - at normal temperature, excluding gas permeation Flange type F (NW) F (NW), (DN) Principal materials ody: luminum alloy, ellows: Stainless steel 6, ain part: Stainless steel, F (Standard seal material) Surface treatment Pilot pressure (Pa) (G) External: Hard anodized 0. to 0.6 Internal: Raw material 0.4 to 0.6 Pilot port size Weight (kg) X X Rc/ XV XV 0.2 5: Port (P), Port (R), Port 5(R) Note ) onductance is the value for an elbow with the same dimensions. Note 2) For valve heater specifications, refer to ommon Option [] Heater on page 55. onstruction/operation Port 5(R) (Exhaust port) Plate Port (P) (Pressure port) Port (R) (Exhaust port) Solenoid valve Heater (Option) agnet (Option) uto switch (Option) Pilot port (pressurize to close) P-2 q onnet assembly (aintenance parts) (Including w, t, y, u) Pilot port (pressurize to open) P- u ellows holder (aterial: Stainless steel 04) e Exterior seal (aintenance part) y ellows (aterial: Stainless steel 6) t Valve (aterial: Stainless steel 04) With solenoid valve ellows side exhaust w Valve seal (aintenance part) r ody (aterial: 606) <Working principle> y applying pressure from the pilot port P-, the pistoncoupled valve overcomes the operating force by the pressure, and the valve opens. (Pilot port P-2 is open) lternatively, by applying pressure to actuation port P-2, the valve closes. (Pilot port P- is open) In the case of the XV, port (P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. In the case of a double solenoid, the valve moves to the opposite side from that in which the solenoid valve is turned ON. 8 <Options> uto switch: Heater: Valve side exhaust Refer to the back of page 6 for aintenance Parts. The magnet activates the auto switch. With 2 auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 20, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly is a heat resistant structure. This does not apply in cases where a solenoid valve is attached.

11 luminum High Vacuum ngle Valve Series X/XV Dimensions X6, 25, / ir operated E (b) D (a) øfn (F flange) X X Q E (c) Heater (Option) uto switch (Option) X H J øg YV odel X-6 X-25 X D 2 E Note ) 2 Fn 0 55 Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions.oreover, heater mounting positions will differ depending on the type of heater.for further details, refer to mounting positions under Replacement Heaters on page 6. G H 9 6 (mm) J X50, 6, 80/ ir operated E E (b) D (a) øfn (F flange) øfd ( flange) E (c) H J øg (mm) odel X-50 X-6 X D E Note ) 0.5 Fn Fd 95 0 G H J Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions.oreover, heater mounting positions will differ depending on the type of heater.for further details, refer to mounting positions under Replacement Heaters on page 6. 9

12 E E Q P Series X/XV Dimensions XV/With solenoid valve R Port R P N In case of double solenoid valve (Exhaust port) odel XV-6 XV-25 XV N P Other dimensions are the same as the X. Note) For details, consult your S sales representative. Q (mm) R R In case of double solenoid valve Port R (Exhaust port) P N Port P (Pressure port) Q Port P (Pressure port) In case of single solenoid valve In case of single solenoid valve Port R (Exhaust port) 20 odel XV-50 XV-6 XV N P Other dimensions are the same as the X. Note) For details, consult your S sales representative. Q (mm) R

13 X X Q X YV 2

14 I luminum High Vacuum ngle Valve Normally losed/o-ring Seal Series XF/XFV RoHS How to Order ade to Order specifications (For details, refer to pages 26 to ) XF 6 9N q w e r t y u XF q Flange size Size w Flange type Type F (NW) D (DN) pplicable flange 6, 25,, 50, 6 80, 00, 60 6, 80, 00, 60 e Indicator/Pilot port direction Indicator Pilot port direction F G J Without indicator With indicator Flange side Flange side eft flange surface eft flange surface Without indicator eft flange surface V V E U H V U G H Flange side r Temperature specifications/heater Temperature 5 to 60 High H0 temperature H4 type H5 y Number of auto switches/ounting position 5 to 50 Note) Size 6 is not applicable for H4, H5, Size 25 not for H4. Seal material N P Q R R S T U Quantity Without auto switch 2 pcs. pc. pc. Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. Heater With 00 heater With 20 heater ounting position Valve open/closed Valve open Valve closed ompound No W 79 SS592 SS60 SSE U46 t uto switch type uto switch model 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9()()(Z) D-9()()(Z) 9// Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) Note ) uto switches shown above cannot be mounted on the high temperature type. For the high temperature type, a semi-standard product that uses the heat resistant auto switch D-F7NJ is available. For details, please contact S. Note 2) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N u ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Surface treatment Note 2) eakage (Pa m External: Hard anodized Internal: Raw material /s or less) External: Hard anodized Internal: Oxalic acid anodized hanged part None w, e w e Note ) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of onstruction on page 24 for changed part. Number indicates parts number of onstruction accordingly. Note ) Part e (exterior seal) is not changeable for sizes 6 and 25. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XF--9N-XN Internal. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F) Note ) External. x 0-0 (F). x 0-8. x 0-0 (F). x

15 I ir Operated/with Solenoid Valve luminum High Vacuum ngle Valve Series XF/XFV How to Order [Option] XFV XFV q Flange size w Flange type Size D Type F (NW) (DN) r uto switch type uto switch model 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9()()(Z) D-9()()(Z) 9// 6 G 9N G q w e r t y u ir operated/with solenoid valve pplicable flange 6, 25,, 50, 6 80, 00, 60 6, 80, 00, 60 Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N y Rated voltage E-compliant u Electrical entry 00 V, 50/60 Hz G V, 50/60 Hz H 0 V, 50/60 Hz V, 50/60 Hz 5 24 VD 6 2 VD Seal material N P Q R R S T U Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. Grommet (ead wire length 00 mm) Grommet (ead wire length 600 mm) type plug connector type plug connector ompound No W 79 SS592 SS60 SSE U46 i e Indicator/Pilot port direction Indicator Pilot port direction F eft flange surface With G indicator J eft flange surface Without indicator type plug connector ( power supply) not attached for J, of sizes 6 and 25. eft flange surface o V V E U H V U t Number of auto switches/ounting position Quantity Without auto switch 2 pcs. pc. pc. i ight/surge voltage suppressor None S With surge voltage suppressor Z With light/surge voltage suppressor With light/surge voltage suppressor U (Non-polar type) S type: Not available for. U type: D only. G H ounting position Valve open/closed Valve open Valve closed o ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Surface treatment Note 2) eakage (Pa m /s or less) External: Hard anodized Internal: Raw material hanged part External: Hard anodized Internal: Oxalic acid anodized None w, e w e Internal. x 0-0 (F). x 0-8. x 0-8. x 0-0 (F) Note ) External. x 0-0 (F). x 0-8. x 0-0 (F). x 0-8 Note ) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of onstruction on page 24 for changed part. Number indicates parts number of onstruction accordingly. Note ) Part e (exterior seal) is not changeable for sizes 6 and 25. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XFV--9N-G-XN Note ) Option specifications/ombinations This model has indicator, auto switch and (DN) flange options, but high temperature/heater options are not available. Note 2) Solenoid valves XFV-6, 25, : SYJ9, XFV-50, 6, 80, 00, 60: SYJ59 Example) SYJ9-GS. For details, consult your S sales representative. For option Q, the solenoid valve should be a E-compliant product.!0!0 E-compliant Q E-compliant X X Q X YV 2

16 Series XF/XFV Specifications Valve type Fluid odel Operating temperature ( ) XF XFV XF(V)-6 XF(V)-25 XF(V)- XF(V)-50 XF(V)-6 XF(V)-80 XF(V)-00 XF(V)-60 Normally closed (Pressurize to open, Spring seal) Inert gas under vacuum 5 to 60 (High temperature type: 5 to 50) 5 to 50 Operating pressure (Pa) (abs) x 0-5 to atmospheric pressure onductance (/s) Note ) Internal In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation eakage (Pa m /s) External In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation Flange type F (NW) F (NW), (DN) Principal materials Note ) ody: luminum alloy, ain part: Stainless steel, F (Standard seal material) Surface treatment External: Hard anodized Internal: Raw material Pilot pressure (Pa) (G) 0.4 to 0.7 Pilot port size XF 5 Rc/8 Rc/4 XFV 5: Port (P), Port (R) Rc/8: Port (P), 5: Port (R) XF Weight (kg) XFV Note ) onductance is the value for an elbow with the same dimensions. Note 2) For valve heater specifications, refer to ommon Option [] Heater on page 55. Note ) coating of vacuum grease [Y-V2] is applied to the seal-material sliding portion of the vacuum part. onstruction/operation Heater (Option) agnet (Option) Indicator (Option) uto switch (Option) q onnet assembly (aintenance parts) (Including w, t, y, u, i) R P With solenoid valve Port (P) (Pressure port) Plate Port (R) (Exhaust port) Solenoid valve Pilot port (pressurize to open) e Exterior seal (aintenance part) i Shaft seal (aterial: F) o Scraper (aterial: F) y Spring (aterial: Oil-tempered wire/ Electroless nickel plated) Shaft side exhaust u Shaft (aterial: Stainless steel 04) t Valve (aterial: Stainless steel 04) w Valve seal (aintenance part) r ody (aterial: 606) Valve side exhaust Refer to the back of page 6 for aintenance Parts. <Working principle> y applying pressure from the pilot port, the piston-coupled valve overcomes the force of the spring or operating force by pressure, and the valve opens. In the case of the XFV, port (P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 24 <Options> uto switch: Heater: Indicator: The magnet activates the auto switch. With 2 auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 20, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly is a heat resistant structure. This does not apply in cases where a solenoid valve is attached. When the valve is open, an orange marker appears in the center of the name plate.

17 R P luminum High Vacuum ngle Valve Series XF/XFV Dimensions XF/ir operated (b) D (a) E E (c) øfn (F flange) Heater (Option) uto switch (Option) øfd ( flange) X X Q X øg H YV odel XF-6 XF-25 XF- XF-50 XF-6 XF-80 XF-00 XF D 2 2 E Note ) 2 Fn Fd G Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page 6. (mm) H XFV/With solenoid valve J Port P (Pressure port) N Port R (Exhaust port) odel XFV-6 XFV-25 XFV- XFV-50 XFV-6 XFV-80 XFV-00 XFV-60 J Other dimensions are the same as the XF. Note) For details, consult your S sales representative. (mm) N

18 luminum High Vacuum ngle Valve/Normally losed/o-ring Seal Series XF ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. With ypass Valve (Flange size: 80) () () H I 7 GH VU U VVE () e Shaft seal (F) Scraper (F) Pilot port: 5 t w u X-6 -X65 r ead wire length: 500 mm ( type: 000 mm) y Pilot port: Rc/8 ypass valve adjustment nut (Initial exhaust) djustment pitch: mm/rotation ock nut Width across flats (ax. ) 7.5 i!0 ø8 ø2 ø ø8 ø2 ø q o omponent Parts No. Description aterial Remarks ody onnet assembly O-ring Hexagon socket head cap screw Stainless steel O-ring omputer name plate uto switch Indicator ypass valve O-ring O-ring O-ring Hexagon socket head cap screw Stainless steel 0, = 60 Option Option 4, = 26 O-ring Part No. Seal material symbol N P Q R R S T U Internal seal 2-2-V85V 2-V85-XN 2-V85-XP 2-V85-XQ 2-V85-XR 2-V85-X 2-V85-XR 2-V85-XS 2-V85-XT 2-V85-XU External seal r S V S XN S XP S XQ S XR S X S XR S XS S XT S XU O-ring Part No. Seal material symbol Internal seal 8-2-V5V External seal 8-2 S V External seal o S568-07V N 2-V5-XN S XN S XN P 2-V5-XP S XP S XP Q 2-V5-XQ S XQ S XQ R R 2-V5-XR 2-V5-X 2-V5-XR S XR S XR S X S X S XR S XR S T 2-V5-XS 2-V5-XT S XS S XT S XS S XT U 2-V5-XU S XU S XU Note) coating of vacuum grease (fluorinated grease: Y-V2) is applied to the shaft seal, scraper and O-ring o.

19 ade to Order Series XF Flange type Type F(NW) D (DN) How to Order Valve XFR 80 9N X ain valve: Indicator/ Pilot port direction Indicator Pilot port direction Without indicator Flange side Flange side F eft flange surface With indicator G J Without indicator eft flange surface Flange: uto switch type (Operating temperature 5 to 60 ) uto switch model Switch type Without auto switch (without built-in magnet) 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9()()(Z) 9// Solid state auto switch Reed auto switch D-9()()(Z) Without auto switch (with built-in magnet) Note) Types with auto switches are not available in case of high temperature types. type: ead wire length 000 mm aintenance Parts w onnet ssembly Part No. XF80-0-H onnet assembly Temperature Indicator 5 to 60 5 to 50 Without indicator With indicator Without indicator With indicator Temperature specifications Temperature 5 to 60 H0 5 to 50 Flange: Number of auto switches/ounting position Quantity ounting position Without auto switch 2 pcs. pc. pc. Valve open/closed Valve open Valve closed Part no. XF80-0- XF80-0- XF80-0-H XF80-0-H Same as How to Order. Specifications Valve type ain valve: Normally closed Shaft seal type O-ring seal Operating pressure range Fluid Operating temperature onductance Operating pressure Flange ypass valve mounting position/ Pilot port direction ounting position Pilot port direction Flange side eft flange eft flange surface surface Flange side Right flange 2 surface eft flange surface Rear flange surface 9N-XN ypass valve: Normally closed ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 200 /s ax. 25 /s (alculated value) 0.4 to 0.7 Pa F80 Seal material Seal material F EPD arrel Perfluoro alrez N P Q R R S T U hemraz VQ F FOR PS UTI ROR ompound No W 79 SS592 SS60 SSE U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of E. I. du Pont de Nemours and ompany or its affiliates. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. When the seal material is not being changed, there is no need to select a symbol. Seal material changed part hanged part eakage (Pa m /s or less) Note) Internal External None. x 0-9 (F). x 0-9 (F) 2-8- r 8-2 o. x 0-7. x x 0-7. x 0-9 (F) r 8-2 o. x 0-9 (F). x 0-7 Note) Values at normal temperature, excluding gas permeation. i ypass Valve Part No. X Pilot port direction Pilot port direction Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) Temperature specifications Temperature 5 to 60 H0 5 to 50 6 X65 Seal material changed part hanged part None Seal material: Same as the seal materials of How to Order Valve. 27 X X Q X YV

20 luminum High Vacuum ngle Valve/Normally losed/o-ring Seal Series XF ade to Order Specifications 2 Please consult with S for detailed dimensions, specifications and delivery. With ypass Valve (Flange size: 00) () () H I GH 54 VU U VVE () e t w u X-6 -X65 ead wire length: 500 mm ( type: 000 mm) y Shaft seal (F) Scraper (F) Pilot port: 5 r 0.2 Pilot port: Rc/8 ypass valve adjustment nut (Initial exhaust) djustment pitch: mm/rotation 299 ock nut Width across flats (ax. ) 7.5 i!0 ø02 ø2 ø ø02 ø2 ø4 2- q 08 O-ring Part No. Seal material symbol N P Q R R S T U Internal seal 2- S568-49V S XN S XP S XQ S XR S X S XR S XS S XT S XU External seal r S V S XN S XP S XQ S XR S X S XR S XS S XT S XU omponent Parts No. Description aterial Remarks O-ring Part No. ody 606 Seal material symbol Internal seal 8- External seal 8-2 External seal o 2 onnet assembly 2-V5V S V S568-07V 2- O-ring N 2-V5-XN S XN S XN Hexagon socket head cap screw Stainless steel 2, = 70 P 2-V5-XP S XP S XP 4 O-ring Q 2-V5-XQ S XQ S XQ omputer name plate uto switch Indicator Option Option R R 2-V5-XR 2-V5-X 2-V5-XR S XR S XR S X S X S XR S XR 8 8- ypass valve O-ring S T 2-V5-XS 2-V5-XT S XS S XT S XS S XT 8-2 O-ring U 2-V5-XU S XU S XU 9 0 O-ring Hexagon socket head cap screw Stainless steel 4, = Note) coating of vacuum grease (fluorinated grease: Y-V2) is applied to the shaft seal, scraper and O-ring o o

21 ade to Order Series XF Flange type Type F(NW) D (DN) How to Order Valve XFR 00 9N X ain valve: Indicator/ Pilot port direction Indicator Pilot port direction Without indicator Flange side Flange side F eft flange surface With indicator G J Without indicator eft flange surface Flange: 9N()()(Z) 9P()()(Z) 9()()(Z) 90() uto switch type uto switch model Switch type Without auto switch (without built-in magnet) D-9N()()(Z) D-9P()()(Z) D-9()()(Z) D-90() Solid state auto switch Reed auto switch 9()()(Z) D-9()()(Z) 9// Without auto switch (with built-in magnet) Note ) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Note 2) Types with auto switches are not available in case of high temperature types. Temperature specifications Temperature 5 to 60 H0 5 to 50 Number of auto switches/ounting position Quantity ounting position Without auto switch 2 pcs. pc. pc. Valve open/closed Valve open Valve closed ypass valve mounting position/pilot port direction ounting position Pilot port direction Flange side eft flange eft flange surface surface Flange side Right flange 2 surface eft flange surface Rear flange surface Flange: Seal material Seal material F EPD arrel Perfluoro alrez N P Q R R S T U hemraz VQ F FOR PS UTI ROR ompound No W 79 SS592 SS60 SSE U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of E. I. du Pont de Nemours and ompany or its affiliates. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. When the seal material is not being changed, there is no need to select a symbol. Seal material changed part hanged part eakage (Pa m /s or less) Note) Internal External None. x 0-9 (F). x 0-9 (F) 2-8- r 8-2 o. x 0-7. x x 0-7. x 0-9 (F) r 8-2 o. x 0-9 (F). x 0-7 Note) Values at normal temperature, excluding gas permeation. X X Q X YV aintenance Parts w onnet ssembly Part No. XF N-XN onnet assembly Temperature Indicator 5 to 60 5 to 50 Without indicator With indicator Without indicator With indicator Specifications Valve type Shaft seal type Operating pressure range Fluid Operating temperature onductance Operating pressure Flange Part no. XF00-0- XF00-0- XF00-0-H XF00-0-H Same as How to Order. ain valve: Normally closed ypass valve: Normally closed O-ring seal ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 00 /s ax..5 /s (alculated value) 0.4 to 0.7 Pa F00 i ypass Valve Part No. X Pilot port direction Pilot port direction Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) Temperature specifications Temperature 5 to 60 H0 5 to 50 6 X65 Seal material changed part hanged part None Seal material: Same as the seal materials of How to Order Valve. 29

22 luminum High Vacuum ngle Valve/Normally losed/o-ring Seal Series XF ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. With ypass Valve (Flange size: 60) () () () 200 H e t w u I GH VU U VVE X-6 -X65 ead wire length: 500 mm ( type: 000 mm) y Shaft seal (F) Scraper (F) r 0.2 Pilot port: Rc/4 ypass valve adjustment nut (Initial exhaust) djustment pitch: mm/rotation i!0 ø5 ø88 ø90 2- q omponent Parts No. Description aterial Remarks ody onnet assembly O-ring Hexagon socket head cap screw Stainless steel O-ring omputer name plate uto switch Indicator ypass valve O-ring O-ring O-ring Hexagon socket head cap screw Stainless steel 20, = 70 Option Option 4, = 0 Pilot port: 5 (ax. ) ø5 ø88 ø O-ring Part No. Seal material symbol N P Q R R S T U ock nut Width across flats o Internal seal 2-2-G55V 2-G55-XN 2-G55-XP 2-G55-XQ 2-G55-XR 2-G55-X 2-G55-XR 2-G55-XS 2-G55-XT 2-G55-XU External seal r S568-67V S XN S XP S XQ S XR S X S XR S XS S XT S XU O-ring Part No. Seal material symbol Internal seal 8- External seal 8-2 External seal o 2-V5V S V S568-07V N 2-V5-XN S XN S XN P 2-V5-XP S XP S XP Q 2-V5-XQ S XQ S XQ R R 2-V5-XR 2-V5-X 2-V5-XR S XR S XR S X S X S XR S XR S T 2-V5-XS 2-V5-XT S XS S XT S XS S XT U 2-V5-XU S XU S XU Note) coating of vacuum grease (fluorinated grease: Y-V2) is applied to the shaft seal, scraper and O-ring o.

23 ade to Order Series XF Flange type Type F(NW) D (DN) XFR 60 9N X ain valve: Indicator/ Pilot port direction Indicator Pilot port direction Without indicator Flange side Flange side F eft flange surface With indicator G J Without indicator eft flange surface Flange: 9N()()(Z) 9P()()(Z) 9()()(Z) 90() uto switch type uto switch model Switch type Without auto switch (without built-in magnet) D-9N()()(Z) D-9P()()(Z) Solid state auto switch D-9()()(Z) D-90() Reed auto switch 9()()(Z) D-9()()(Z) 9// Without auto switch (with built-in magnet) Note ) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Note 2) Types with auto switches are not available in case of high temperature types. Temperature specifications Temperature 5 to 60 H0 5 to 50 Number of auto switches/ounting position Quantity ounting position Without auto switch 2 pcs. pc. pc. Valve open/closed Valve open Valve closed ypass valve mounting position/pilot port direction ounting position Pilot port direction Flange side eft flange eft flange surface surface Flange side Right flange 2 surface eft flange surface Rear flange surface Flange: How to Order Valve Seal material Seal material F EPD arrel Perfluoro alrez N P Q R R S T U hemraz VQ F FOR PS UTI ROR ompound No W 79 SS592 SS60 SSE U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of E. I. du Pont de Nemours and ompany or its affiliates. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. When the seal material is not being changed, there is no need to select a symbol. Seal material changed part hanged part eakage (Pa m /s or less) Note) Internal External None. x 0-9 (F). x 0-9 (F) 2-8- r 8-2 o. x 0-7. x x 0-7. x 0-9 (F) r 8-2 o. x 0-9 (F). x 0-7 Note) Values at normal temperature, excluding gas permeation. X X Q X YV aintenance Parts w onnet ssembly Part No. XF N-XN onnet assembly Temperature Indicator 5 to 60 5 to 50 Without indicator With indicator Without indicator With indicator Specifications Valve type Shaft seal type Operating pressure range Fluid Operating temperature onductance Operating pressure Flange Part no. XF60-0- XF60-0- XF60-0-H XF60-0-H Same as How to Order. ain valve: Normally closed ypass valve: Normally closed O-ring seal ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 800 /s ax..5 /s (alculated value) 0.4 to 0.7 Pa F60 i ypass Valve Part No. X Pilot port direction Pilot port direction Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) Temperature specifications Temperature 5 to 60 H0 5 to 50 6 X65 Seal material changed part hanged part None Seal material: Same as the seal materials of How to Order Valve.

24 I luminum High Vacuum ngle Valve Double cting/o-ring Seal RoHS Series XG/XGV How to Order ade to Order specifications (For details, refer to pages 8 to 4) Flange size 6, 25, XG 6 9N XG Flange size 50, 6, 80, 00, 60 XG 50 9N q w e r t y u q Flange size Size r Temperature specifications/heater Temperature Heater 5 to 60 High H0 temperature H4 5 to 50 With 00 heater type H5 With 20 heater Note) Size 6 is not applicable for H4, H5, Size 25 not for H4. y Number of auto switches/ounting position Quantity Without auto switch 2 pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed u ody surface treatment/seal material and its changed part ody surface treatment Seal material N P Q R R S T U w Flange type Type Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. D F (NW) (DN) pplicable flange 6, 25,, 50 6, 80, 00, 60 6, 80, 00, 60 ompound No W 79 SS592 SS60 SSE U46 e Pilot port direction Pilot port direction Flange side eft flange surface t uto switch type uto switch model 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9()()(Z) D-9()()(Z) 9// Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Not applicable to flange size 6) Without auto switch (with built-in magnet) Note ) uto switches shown above cannot be mounted on the high temperature type. For the high temperature type, a semi-standard product that uses the heat resistant auto switch D-F7NJ is available. For details, please contact S. Note 2) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N eft flange surface V V E U H V U G H Flange side Seal material changed part and leakage Note 2) hanged eakage (Pa m /s or less) Note ) part Internal External None. x 0-0 (F). x 0-0 (F) w, e. x 0-8. x 0-8 w. x 0-8. x 0-0 (F) e. x 0-0 (F). x 0-8 Note ) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of onstruction on page 4 for changed part. Number indicates parts number of onstruction accordingly. Note ) Part e (exterior seal) is not changeable for sizes 6 and 25. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XG--9N-XN 2

25 I ir Operated/with Solenoid Valve luminum High Vacuum ngle Valve Series XG/XGV How to Order [Option] XGV q Flange size Size Seal material N P Q R R S T U Flange size 6, 25, Flange size 50, 6, 80 w Flange type D r uto switch type uto switch model 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9()()(Z) D-9()()(Z) Seal material F EPD arrel Perfluoro alrez hemraz Type F (NW) (DN) VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. XGV XGV 6 9N G 50 9N G q w e r t y u i ir operated/with solenoid valve e Pilot port direction pplicable flange 6, 25,, 50, 6, 80 6, 80 ompound No W 79 SS592 SS60 SSE U46 o!0 t Number of auto switches/ounting position Solenoid valve direction eft flange surface Flange surface type plug connector ( power supply) not attached for of sizes 6 and 25. : Size 6, 25, only. : Size 50, 6, 80 only. Quantity Without auto switch 2 pcs. pc. pc. eft flange surface ounting position Valve open/closed Valve open Valve closed Reed auto switch (Not applicable to flange size 6) 9// Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N y Rated voltage E-compliant u Type of actuation i Electrical entry o ight/surge voltage suppressor 00 V, 50/60 Hz 2 position single G Grommet (ead wire length 00 mm) None V, 50/60 Hz W 2 position double H Grommet (ead wire length 600 mm) S With surge voltage suppressor 0 V, 50/60 Hz type plug connector Z With light/surge voltage suppressor V, 50/60 Hz type plug connector With light/surge voltage suppressor U 5 24 VD (Non-polar type) 6 2 VD S type: Not available for.!0 ody surface treatment/seal material and its changed part U type: D only. ody surface treatment Seal material changed part and leakage Surface treatment Note 2) eakage (Pa m /s or less) Note ) External: Hard anodized Internal: Raw material hanged part Internal External External: Hard anodized Internal: Oxalic acid anodized None. x 0-0 (F). x 0-0 (F) w, e. x 0-8. x 0-8 w. x 0-8. x 0-0 (F) e. x 0-0 (F). x 0-8! E-compliant Q E-compliant Remarks Without auto switch (without built-in magnet) Solid state auto switch Note ) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of onstruction on page 4 for changed part. Number indicates parts number of onstruction accordingly. Note ) Part e (exterior seal) is not changeable for sizes 6 and 25. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XGV--9N-G-XN Note ) Option specifications/ombinations This model has auto switch and (DN) flange options, but high temperature/heater options are not available. Note 2) Solenoid valves 2 position single: XGV-6, 25, : SYJ90 XGV-50, 6, 80: SY20 2 position double: XGV-6, 25, : SYJ290 XGV-50, 6, 80: SY220 Example) SYJ90-GS, SYJ290-GS, SY20-GS-4, SY220-GS-4 For details, consult your S sales representative. For option Q, the solenoid valve should be a E-compliant product. V V E U H V U G H! X X Q X YV

26 R P Series XG/XGV Specifications odel Valve type Fluid Operating temperature ( ) Operating pressure (Pa) (abs) onductance (/s) Note ) Internal eakage (Pa m /s) External Flange type Principal materials Surface treatment Pilot pressure (Pa) (G) Pilot port size Weight (kg) XG XGV XG XGV XG XGV XG(V)-6 XG(V)-25 XG(V)- XG-50 XG-6 XG-80 XG-00 XG-60 Double acting (Dual operation), Pressurize to open/close Inert gas under vacuum 5 to 60 (High temperature type: 5 to 50) 5 to 50 tmospheric pressure to x In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation F (NW) F (NW), (DN) ody: luminum alloy, ain part: Stainless steel, F (Standard seal material) External: Hard anodized Internal: Raw material 0. to to Rc/8 5: Port (P), Port (R), Port 5(R) Note ) onductance is the value for an elbow with the same dimensions. Note 2) For valve heater specifications, refer to ommon Option [] Heater on page 55. Note ) coating of vacuum grease [Y-V2] is applied to the seal-material sliding portion of the vacuum part. onstruction/operation uto switch (Option) Port 5(R) (Exhaust port) Plate Heater (Option) Pilot port (pressurize to close) q onnet assembly (aintenance parts) (Including w, t, y, u) agnet (Option) Port (P) (Pressure port) Port (R) (Exhaust port) Solenoid valve Pilot port (pressurize to open) e Exterior seal (aintenance part) y Shaft seal (aterial: F) u Scraper (aterial: F) With solenoid valve Shaft side exhaust t Valve (aterial: Stainless steel 04) w Valve seal (aintenance part) r ody (aterial: 606) <Working principle> y applying pressure from the pilot port P-, the pistoncoupled valve overcomes the operating force by the pressure, and the valve opens. (Pilot port P-2 is open) lternatively, by applying pressure to pilot port P-2, the valve closes. (Pilot port P- is open) In the case of the XGV, port (P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. In the case of a double solenoid, the valve moves to the opposite side from that in which the solenoid valve is turned ON. 4 Valve side exhaust Refer to the back of page 6 for aintenance Parts. <Options> uto switch: The magnet activates the auto switch. With 2 auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 20, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly is a heat resistant structure. This does not apply in cases where a solenoid valve is attached.

27 luminum High Vacuum ngle Valve Series XG/XGV Dimensions XG6, 25, / ir operated E (b) D (a) E (c) øfn (F flange) Heater (Option) uto switch (Option) X X Q X J øg H YV odel XG-6 XG-25 XG D 2 E Note ) Fn G H 9 6 (mm) J Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page XG50, 6, 80, 00, 60/ ir operated E E (b) D (a) øfn (F flange) øfd ( flange) E (c) H J øg odel XG-50 XG-6 XG-80 XG-00 XG D E Note ) Fn Fd G H Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page 6. J (mm)

28 E E P Series XG/XGV Dimensions XGV/With solenoid valve R P N Port R (Exhaust port) In case of double solenoid valve Q odel XGV-6 XGV-25 XGV N P Other dimensions are the same as the XG. Note) For details, consult your S sales representative. (mm) R R In case of double solenoid valve Port R (Exhaust port) P N Port P (Pressure port) Port P (Pressure port) In case of single solenoid valve Q Q In case of single solenoid valve Port R (Exhaust port) (mm) odel XGV-50 XGV-6 XGV N P Q R Other dimensions are the same as the XG. Note) For details, consult your S sales representative. 6

29 X X Q X YV 7

30 luminum High Vacuum ngle Valve/Double cting/o-ring Seal Series XG ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. With ypass Valve (Flange size: 80) () () () e Shaft seal (F) Scraper (F) Pilot port: 5 (ax. ) 7.5 u o t w ø8 ø2 ø4 90 X-6 -X r ø8 ø q ead wire length: 500 mm ( type:,000 mm) ( type:,000 mm) (Z type: 5,000 mm) 250 F flange ø8 ø0 omponent Parts No. Description aterial Remarks ody onnet assembly O-ring Hexagon socket head cap screw O-ring omputer name plate uto switch SS Refer to maintenance parts 0, = 20 Option 7 High vacuum angle valve (ypass valve) Refer to maintenance parts O-ring O-ring O-ring 9 Hexagon socket head cap screw Stainless steel 4, = 8 flange ypass valve adjustment nut (Initial exhaust) djustment pitch: mm/rotation ock nut Width across flats 7-2 O-ring Part No. Seal material symbol N P Q R R S T U 7- i Internal seal 2-2-V85V 2-V85-XN 2-V85-XP 2-V85-XQ 2-V85-XR 2-V85-X 2-V85-XR 2-V85-XS 2-V85-XT 2-V85-XU y Pilot port: Rc/8 External seal r S V S XN S XP S XQ S XR S X S XR S XS S XT S XU O-ring Part No. Seal material symbol Internal seal 7-2-V5V External seal 7-2 S V External seal i S568-07V N 2-V5-XN S XN S XN P 2-V5-XP S XP S XP Q 2-V5-XQ S XQ S XQ R R 2-V5-XR 2-V5-X 2-V5-XR S XR S XR S X S X S XR S XR S T 2-V5-XS 2-V5-XT S XS S XT S XS S XT U 2-V5-XU S XU S XU Note) coating of vacuum grease (fluorinated grease: Y-V2) is applied to the shaft seal, scraper and O-ring i.

31 ade to Order Series XG Flange type D Type F (NW) (DN) How to Order Valve XGR 80 X ain valve: Pilot port direction Pilot port direction Flange side eft flange surface Flange: Temperature specifications Temperature Heater 5 to 60 H0 5 to 50 uto switch type (Operating temperature 5 to 60 ) uto switch model Switch type Without auto switch ypass valve mounting position/ (without built-in magnet) Pilot port direction 9N()()(Z) D-9N()()(Z) ounting position Solid state 9P()()(Z) D-9P()()(Z) auto switch 9()()(Z) D-9()()(Z) eft flange 90() D-90() surface Reed auto switch 9()()(Z) D-9()()(Z) 9// Without auto switch (with built-in magnet) Right flange 2 surface Note) Types with auto switches are not available in case of high temperature types. Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. aintenance Parts w onnet ssembly Part No. Specifications Valve type ain valve: Double acting Shaft seal type O-ring seal Operating pressure range Fluid Operating temperature onductance Operating pressure Flange Weight Rear flange surface S S Flange: Number of auto switches/ounting position Quantity ounting position Without auto switch 2 pcs. Valve open/closed pc. Valve open pc. Valve closed XG80-0-H- 9N-XN onnet assembly Temperature Part no. 5 to 60 XG to 50 XG80-0-H- Same as How to Order. ypass valve: Normally closed ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 200 /s ax. 25 /s (alculated value) 0.4 to 0.6 Pa F80, kg onductance is the value for the molecular flow of an elbow with the same dimensions. Pilot port direction Flange side eft flange surface Flange side eft flange surface Seal material Seal material F EPD arrel Perfluoro alrez N P Q R R S T U hemraz VQ F FOR PS UTI ROR ompound No W 79 SS592 SS60 SSE U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of E. I. du Pont de Nemours and ompany or its affiliates. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. When the seal material is not being changed, there is no need to select a symbol. Seal material changed part eakage (Pa m /s or less) Note) Internal External. x 0-9 (F). x 0-9 (F). x 0-7. x 0-7. x 0-7. x 0-9 (F). x 0-9 (F). x 0-7 hanged part None 2-7- r 7-2 i 2-7- r 7-2 i Note) Values at normal temperature, excluding gas permeation. i ypass Valve Part No. X Pilot port direction Pilot port direction Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) 6 X65 Temperature specifications Temperature 5 to 60 H0 5 to 50 Seal material changed part hanged part None Seal material: Same as the seal materials of How to Order Valve. 9 X X Q X YV

32 luminum High Vacuum ngle Valve/Double cting/o-ring Seal Series XG ade to Order Specifications 2 Please consult with S for detailed dimensions, specifications and delivery. With ypass Valve (Flange size: 00) () () 54 () Shaft seal (F) Scraper (F) Pilot port: 5 (ax. ) 7.5 t w e X-6 -X65 r ø02 ø ead wire length: 500 mm ( type:,000 mm) ( type:,000 mm) (Z type: 5,000 mm) ø02 ø0 ypass valve adjustment thread (Initial exhaust) djustment pitch: mm/rotation ock nut Width across flats 7-2 y Pilot port: Rc/ u flange o 7- i ø02 ø2 2- F flange ø4 q O-ring Part No. 08 Seal material symbol Internal seal 2- External seal r S568-49V S V N S XN S XN P S XP S XP Q S XQ S XQ R S XR S XR S X S X R S XR S XR S S XS S XS T S XT S XT U S XU S XU omponent Parts No. Description aterial Remarks O-ring Part No. ody 606 Seal material symbol Internal seal 7- External seal 7-2 External seal i 2 onnet assembly Refer to maintenance parts 2-V5V S V S568-07V 2- O-ring N 2-V5-XN S XN S XN Hexagon socket head cap screw SS 2, = 20 P 2-V5-XP S XP S XP 4 O-ring Q 2-V5-XQ S XQ S XQ 5 omputer name plate R 2-V5-XR S XR S XR 6 uto switch Option 2-V5-X S X S X 7 High vacuum angle valve R 2-V5-XR S XR S XR Refer to maintenance parts (ypass valve) S 2-V5-XS S XS S XS 7- O-ring T 2-V5-XT S XT S XT 7-2 O-ring U 2-V5-XU S XU S XU 8 O-ring Note) coating of vacuum grease (fluorinated grease: Y-V2) is applied to 9 Hexagon socket head cap screw Stainless steel 4, = the shaft seal, scraper and O-ring i.

33 ade to Order Series XG Flange type XGR 00 Type ain valve: Pilot port direction D F (NW) (DN) Pilot port direction Flange side eft flange surface Flange: Temperature specifications Temperature Heater 5 to 60 H0 5 to 50 uto switch type (Operating temperature 5 to 60 ) uto switch model Switch type Without auto switch ypass valve mounting position/ (without built-in magnet) Pilot port direction ounting position 9N()()(Z) 9P()()(Z) 9()()(Z) D-9N()()(Z) D-9P()()(Z) D-9()()(Z) 90() D-90() Reed auto switch 9()()(Z) D-9()()(Z) 9// Without auto switch (with built-in magnet) Note) Types with auto switches are not available in case of high temperature types. Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Specifications Valve type Shaft seal type Operating pressure range Fluid Operating temperature onductance Operating pressure Flange Weight Solid state auto switch Number of auto switches/ounting position Flange: Quantity ounting position Without auto switch 2 pcs. Valve open/closed pc. Valve open pc. Valve closed aintenance Parts w onnet ssembly Part No. XG00-0-H- 9N-XN onnet assembly Temperature 5 to 60 5 to 50 Part no. XG XG00-0-H- Same as How to Order. eft flange surface Right flange surface Rear flange surface ain valve: Double acting ypass valve: Normally closed O-ring seal ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 00 /s ax..5 /s (alculated value) 0.4 to 0.6 Pa F00, kg onductance is the value for the molecular flow of an elbow with the same dimensions. 2 How to Order Valve S S X Pilot port direction Flange side eft flange surface Flange side eft flange surface Seal material Seal material F EPD arrel Perfluoro alrez N P Q R R S T U hemraz VQ F FOR PS UTI ROR ompound No W 79 SS592 SS60 SSE U46 arrel Perfluoro is a registered trademark of atsumura Oil o., td. alrez is a registered trademark of E. I. du Pont de Nemours and ompany or its affiliates. hemraz is a registered trademark of Greene, Tweed & o. UTI ROR is a registered trademark of Nippon Valqua Industries, td. When the seal material is not being changed, there is no need to select a symbol. Seal material changed part hanged part eakage (Pa m /s or less) Note) Internal External None. x 0-9 (F). x 0-9 (F) 2-7- r 7-2 i. x 0-7. x x 0-7. x 0-9 (F) r 7-2 i. x 0-9 (F). x 0-7 Note) Values at normal temperature, excluding gas permeation. i ypass Valve Part No. X Pilot port direction Pilot port direction Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) 6 X65 Temperature specifications Temperature 5 to 60 H0 5 to 50 Seal material changed part hanged part None Seal material: Same as the seal materials of How to Order Valve. 4 X X Q X YV

34 luminum High Vacuum ngle Valve/Double cting/o-ring Seal Series XG ade to Order Specifications Please consult with S for detailed dimensions, specifications and delivery. With ypass Valve (Flange size: 60) () () 200 () t w e Shaft seal (F) Scraper (F) Pilot port: 5 X-6 -X65 r ead wire length: 500 mm ( type:,000 mm) ( type:,000 mm) (Z type: 5,000 mm) 9 ypass valve adjustment thread (Initial exhaust) djustment pitch: mm/rotation ock nut Width across flats y Pilot port: Rc/8 (ax. ) 7.5 u o ø5 ø88 ø ø5 ø90 2- q 8 F flange omponent Parts No. Description aterial Remarks ody onnet assembly O-ring Hexagon socket head cap screw O-ring omputer name plate uto switch SS Refer to maintenance parts 20, = 0 Option 7 High vacuum angle valve (ypass valve) Refer to maintenance parts O-ring O-ring O-ring Hexagon socket head cap screw Stainless steel 4, = 42 ø5 ø80 flange O-ring Part No. Seal material symbol N P Q R R S T U i Internal seal 2-2-G55V 2-G55-XN 2-G55-XP 2-G55-XQ 2-G55-XR 2-G55-X 2-G55-XR 2-G55-XS 2-G55-XT 2-G55-XU External seal r S568-67V S XN S XP S XQ S XR S X S XR S XS S XT S XU O-ring Part No. Seal material symbol Internal seal 7- External seal 7-2 External seal i 2-V5V S V S568-07V N 2-V5-XN S XN S XN P 2-V5-XP S XP S XP Q 2-V5-XQ S XQ S XQ R 2-V5-XR S XR S XR 2-V5-X S X S X R 2-V5-XR S XR S XR S 2-V5-XS S XS S XS T 2-V5-XT S XT S XT U 2-V5-XU S XU S XU Note) coating of vacuum grease (fluorinated grease: Y-V2) is applied to the shaft seal, scraper and O-ring i.

35 ade to Order Series XG Flange type D XGR Type F (NW) (DN) Specifications Valve type Shaft seal type Operating pressure range Fluid Operating temperature onductance Operating pressure Flange Weight 60 ain valve: Pilot port direction Pilot port direction Flange side eft flange surface Flange: Temperature specifications Temperature Heater 5 to 60 H0 5 to 50 ain valve: Double acting ypass valve: Normally closed O-ring seal ellows seal tmospheric pressure to x 0-5 Pa Inert gas under vacuum 5 to 60 (Option: 5 to 50 ) 800 /s ax..5 /s (alculated value) 0.4 to 0.6 Pa F60, kg onductance is the value for the molecular flow of an elbow with the same dimensions. X Seal material Seal material F EPD arrel Perfluoro alrez N P Q R R S T U hemraz VQ F FOR PS UTI ROR ompound No W 79 SS592 SS60 SSE U46 uto switch type (Operating temperature 5 to 60 ) uto switch model Switch type arrel Perfluoro is a registered trademark Without auto switch ypass valve mounting position/ of atsumura Oil o., td. (without built-in magnet) Pilot port direction alrez is a registered trademark of E. I. du Pont 9N()()(Z) D-9N()()(Z) de Nemours and ompany or its affiliates. Solid state ounting position Pilot port direction hemraz is a registered trademark of 9P()()(Z) D-9P()()(Z) auto switch S Flange side Greene, Tweed & o. 9()()(Z) D-9()()(Z) eft flange eft flange surface UTI ROR is a registered trademark 90() D-90() surface of Nippon Valqua Industries, td. Reed auto switch 9()()(Z) D-9()()(Z) S Flange side 9// Without auto switch (with built-in magnet) Right flange 2 surface When the seal material is not Note) Types with auto switches are not available in case of high temperature types. being changed, there is no need eft flange surface Standard lead wire length is 0.5 m. dd to Rear flange to select a symbol. the end of the part number when m is surface desired, when m, and Z when 5 m. Seal material changed part Number of auto switches/ounting position Flange: eakage (Pa m Quantity ounting position hanged part /s or less) Note) Internal External Without auto switch None. x 0-9 (F). x 0-9 (F) 2 pcs. Valve open/closed 2-7- r 7-2 i. x 0-7. x 0-7 pc. Valve open x 0-7. x 0-9 (F) pc. Valve closed r 7-2 i. x 0-9 (F). x 0-7 Note) Values at normal temperature, excluding gas permeation. aintenance Parts w onnet ssembly Part No. XG60-0-H- 9N-XN onnet assembly Temperature Part no. 5 to 60 XG to 50 XG60-0-H- Same as How to Order. How to Order Valve i ypass Valve Part No. X Pilot port direction Pilot port direction Rear (as seen from body connection point) eft (as seen from body connection point) Right (as seen from body connection point) 6 X65 Temperature specifications Temperature 5 to 60 H0 5 to 50 Seal material changed part hanged part None Seal material: Same as the seal materials of How to Order Valve. 4 X X Q X YV

36 luminum High Vacuum ngle Valve 2-Step ontrol, Single cting/ellows Seal, O-ring Seal Series XD/XDV RoHS How to Order XD 25 9N q w e r t y u XD q Flange size Size w Flange type Type F (NW) D (DN) pplicable flange 25,, 50, 6, 80 6, 80 e Pilot port direction Pilot port direction Flange side eft flange surface eft flange surface Flange side r Temperature specifications/heater High H0 temperature H4 type H5 Temperature 5 to 60 5 to 50 Heater With 00 heater With 20 heater Note) Size 25 is not applicable for H4. y Number of auto switches/ounting position Quantity ounting position Without auto switch 2 pcs. Valve open/closed pc. Valve open pc. Valve closed u ody surface treatment/seal material and its changed part ody surface treatment Seal material N P Q R R S T U Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. ompound No W 79 SS592 SS60 SSE U46 t uto switch type uto switch model 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9()()(Z) D-9()()(Z) 9// Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Note ) uto switches shown above cannot be mounted on the high temperature type. For the high temperature type, a semi-standard product that uses the heat resistant auto switch D-F7NJ is available. For details, please contact S. Note 2) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N Seal material changed part and leakage Note 2), ) hanged eakage (Pa m /s or less) Note ) part Internal External None. x 0-0 (F). x 0 - (F) w, e, r, t. x 0-8. x 0-9 w, r, t. x 0-8. x 0 - (F) e. x 0-0 (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of onstruction on page 47 for changed part. Number indicates parts number of onstruction accordingly. Note ) hanges to seal material for part no. r S valve seal assembly are only applicable for sizes 25, and 50. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XD-25-9N-XN 44

37 ir Operated/with Solenoid Valve luminum High Vacuum ngle Valve Series XD/XDV How to Order [Option] XDV q Flange size Size XDV w Flange type Type F (NW) D (DN) r uto switch type uto switch model 9N()()(Z) D-9N()()(Z) 9P()()(Z) D-9P()()(Z) 9()()(Z) D-9()()(Z) 90() D-90() 9()()(Z) D-9()()(Z) 9// 25 9N q w e r t y ir operated/with solenoid valve pplicable flange 25,, 50, 6, 80 6, 80 Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. dd to the end of the part number when m is desired, when m, and Z when 5 m. Example) -9N y Rated voltage E-compliant u Electrical entry 00 V, 50/60 Hz V, 50/60 Hz 0 V, 50/60 Hz V, 50/60 Hz 5 24 VD 6 2 VD type is not available for size 25. G e Solenoid valve direction u i Solenoid valve direction eft flange surface eft flange surface o t Number of auto switches/ounting position Quantity Without auto switch 2 pcs. pc. pc. ounting position Valve open/closed Valve open Valve closed o ody surface treatment/seal material and its changed part ody surface treatment Seal material changed part and leakage Surface treatment Note 2), ) eakage (Pa m /s or less) Note ) hanged External: Hard anodized Internal: Raw material part Internal External External: Hard anodized Internal: Oxalic acid anodized None. x 0-0 (F). x 0 - (F) w, e, r, t w, r, t e. x 0-8. x 0-8. x 0-0 (F). x 0-9. x 0 - (F). x 0-9 Seal material N P Q R R S T U Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR G H Produced by itsubishi able Industries, td. Grommet (ead wire length 00 mm) Grommet (ead wire length 600 mm) type plug connector type plug connector ompound No W 79 SS592 SS60 SSE U46 i ight/surge voltage suppressor None S With surge voltage suppressor Z With light/surge voltage suppressor With light/surge voltage suppressor U (Non-polar type) S type: Not available for. U type: D only. Note ) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of onstruction on page 47 for changed part. Number indicates parts number of onstruction accordingly. Note ) hanges to seal material for part no. r S valve seal assembly are only applicable for sizes 25, and 50. To order something other than (standard), list the symbols starting with X, followed by each symbol for body surface treatment, seal material and then changed part. Example) XDV-25-9N-G-XN Note ) Option specifications/ombinations This model has auto switch and (DN) flange options, but high temperature/heater options are not available. Note 2) Solenoid valves ain exhaust odel Initial exhaust valve valve Example XDV-25 V4 V4-GS V4 XDV-/50/6/80 SYJ4 SYJ4-GS For details, consult your S sales representative. For option Q, the solenoid valve should be a E-compliant product.!0!0 E-compliant Q E-compliant 45 X X Q X YV

38 Series XD/XDV Specifications odel XD(V)-25 XD(V)- XD(V)-50 XD(V)-6 XD(V)-80 Valve type Fluid Operating temperature ( ) Operating pressure (Pa) (abs) Normally closed (Spring Return and seal) [oth main & initial exhaust valves] Inert gas under vacuum x 0-6 to atmospheric pressure XD 5 to 60 (High temperature type: 5 to 50) XDV 5 to 50 ain exhaust valve onductance (/s) Note ) Initial exhaust valve 0.5 to 2 to to 4 to 8 4 to 8 Internal In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation eakage (Pa m /s) External In case of standard material F:. x 0 - at normal temperature, excluding gas permeation Flange type F (NW) F (NW), (DN) Principal materials Note ) ody: luminum alloy, ellows: Stainless steel 6, ain part: Stainless steel, F (Standard seal material) Surface treatment External: Hard anodized Internal: Raw material Pilot pressure (Pa) (G) 0.4 to 0.7 [oth main & initial exhaust valves] XD 5 Rc/8 Pilot port size XDV 5: Port (P), Port (R) Weight (kg) XD XDV Note ) The main exhaust valve conductance is the valve for the molecular flow of an elbow with the same dimensions. The initial exhaust valve conductance is the value for the viscous flow. Note 2) For valve heater specifications, refer to ommon Option [] Heater on page 55. Note ) coating of vacuum grease [Y-V2] is applied to the seal-material sliding portion (initial exhaust valves sliding parts) of the vacuum part. 46

39 luminum High Vacuum ngle Valve Series XD/XDV onstruction/operation Initial exhaust solenoid valve Port (R) (Exhaust port) ain exhaust solenoid valve Initial exhaust solenoid valve ain exhaust solenoid valve With solenoid valve XDV-25 Port (P) (Supply port) Plate Port (R) (Exhaust port) Port (P) (Pressure port) djustment nut (External knurling product) Valve open adjustment for initial exhaust) agnet (Option) ellows holder!0 (aterial: Stainless steel 04) Heater (Option) ellows o (aterial: Stainless steel 6) O-ring for S Valve sliding (aterial: F) O-ring for fixing t Valve u (aterial: Stainless steel 04) ody y (aterial: 606) S Valve i (aterial: Stainless steel 04) Valve side exhaust O-ring for S valve sliding "" uto switch (Option) q onnet assembly (aintenance parts) (Including w, r, t, u, i, o,!0) Pilot port S (for initial exhaust valve) Pilot port X Q (for main exhaust valve) X e Exterior seal (aintenance part) ellows side exhaust w Valve seal (aintenance part) r S Valve seat assembly (aintenance parts) (aterial: Stainless steel 04 + Sealant) Refer to the back of page 6 for aintenance Parts. X YV XDV- to 80 t <Working principle> z Initial exhaust valve opening adjustment The initial exhaust rate should be adjusted before operation, with the pilot port S in an unpressurized state. The initial exhaust rate is set to zero by gently turning the adjustment nut to the right until it stops. (Do not use any tools.) The initial exhaust rate is adjusted by turning the nut to the left. x Opening of the initial exhaust valve (valve S) When pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount. When the initial exhaust solenoid valve is turned ON and pressure is constantly applied to port (P) on model XDV, the valve opens the adjusted amount. c Opening of the main exhaust valve (valve ) When pressure is applied to the pilot port, the valve is removed from the body sheet portion, and the valve fully opens. When the initial exhaust solenoid valve is turned ON and pressure is constantly applied to port (P) on model XDV, the valve fully opens. v losing of the initial exhaust / main exhaust valves y removing pressure from pilot port S and pilot port, both S and valves revert to their previous positions and are sealed. y turning OFF the initial exhaust valve and main exhaust valve on model XDV, both valves revert to their previous position and are sealed. i Note) fter the opening adjustment of the initial exhaust valve, it will be lightly locked in place and will not rotate. To fix it in place, please tighten with the tightening torque shown in the below table. (Tightening with excessive torque can result in damaged components or the generation of abnormal noise.) r Initial exhaust valve conductance /s (viscous flow) XD-25 XD-50 XD- XD-6 XD djustment nut rotations n Initial exhaust valve conductance <Options> uto switch: The magnet actuates the auto switch. With two auto (for main switches, the open and closed positions are detected, exhaust and with one auto switch, either the open or closed valve position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 20, depending on the heater option and valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly is a heat resistant structure. This is not available with solenoid valve. Section Thread Tightening Torque odel XD(V)-25 XD(V)- XD(V)-50 XD(V)-6 XD(V)-80 Tightening torque 0.08 N m (0.8 kgf cm) or less 0. N m ( kgf cm) or less 47

40 Series XD/XDV Dimensions XD/ir operated (b) D E (a) øfn (F flange) øfd ( flange) E (c) S J H Heater (Option) uto switch (Option) øg odel XD-25 XD- XD-50 XD-6 XD D 2 2 Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page 6. E 2 Fn Fd 95 0 G H J (mm)

41 luminum High Vacuum ngle Valve Series XD/XDV Dimensions XDV-25/With solenoid valve (For ) 55.4 (For D) 48 UUVV GHV E I H ø (F flange) X X Q (8.5) X max. Initial exhaust solenoid valve 5 Port (R) (EXH) (Exhaust port) Port (P) (Pressure port) ø26 øfn (F flange) øfd ( flange) YV 50 5 Port (R) (Exhaust port) uto switch (Option) Initial exhaust solenoid valve N 5.5 ain exhaust solenoid valve XDV- to 80/With solenoid valve ain exhaust solenoid valve 5 Port (P) (Pressure port) øg odel Fn Fd G N (mm) XDV- XDV-50 XDV-6 XDV Note) For details, consult your S sales representative. 49

42 luminum High Vacuum ngle Valve anual/ellows Seal Series XH RoHS XH XH 6 q w e w Heater H4 H5 Heater With 00 heater With 20 heater pplicable flange size eody surface treatment/seal material and its changed part Note) Size 6 is not applicable for H4, H5, Size 25 not for H4. ody surface treatment Seal material changed part and leakage Note 2) Surface treatment eakage (Pa m hanged /s or less) External: Hard anodized Internal: Raw material part Internal External: Hard anodized Internal: Oxalic acid anodized None. x 0-0 (F) w, e. x 0-8 w. x 0-8 e. x 0-0 (F) Seal material N P Q R R S T U Seal material F EPD arrel Perfluoro alrez hemraz VQ F for Plasma UTI ROR Produced by itsubishi able Industries, td. Specifications High vacuum manual angle valve (ellows seal) q Flange size Size ompound No W 79 SS592 SS60 SSE U46 How to Order Note ) External. x 0 - (F). x 0-9. x 0 - (F). x 0-9 Note ) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of onstruction on page 5 for changed part. Number indicates parts number of onstruction accordingly. To order something other than (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed part. Example) XH-6-XN odel XH-6 XH-25 XH- XH-50 Valve type Fluid ( ) Operating pressure (Pa) (abs) Inert gas under vacuum 5 to to atmospheric pressure onductance (/s) Note ) eakage (Pa m /s) Flange type Principal materials Internal External In case of standard material F:. x 0-0 at normal temperature, excluding gas permeation In case of standard material F:. x 0 - at normal temperature, excluding gas permeation F (NW) ody: luminum alloy, ellows: Stainless steel 6, ain part: Stainless steel, F (Standard seal material) Surface treatment External: Hard anodized Internal: Raw material ctuation torque (N m) Handle revolutions Weight (kg) Note ) The conductance is the same as that of an elbow of the same dimensions. Note 2) For valve heater specifications, refer to ommon Option [] Heater on page

43 luminum High Vacuum ngle Valve Series XH onstruction/operation Indicator Handle assembly (aintenance parts) q (Including w, t, y, u) Heater (Option) u ellows holder (aterial: Stainless steel 04) e Exterior seal (aintenance part) y ellows (aterial: Stainless steel 6) ellows side exhaust t Valve (aterial: Stainless steel 04) w Valve seal (aintenance part) X X Q X YV Valve side exhaust r ody (aterial: 606) Refer to the back of page 6 for aintenance Parts. <Working principle> y turning the handle to the left, the valve opens. The handle does not move up and down, but the indicator shows the open or closed position of the valve. s the handle is turned to the right, the valve closes, and when the turning force of the handle suddenly ceases to be felt, the valve is sealed. The sealing force for the valve comes from the spring, and is constant. <Options> Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 00 or 20, depending on the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. Indicator: When the valve is open, an orange marker appears in the center of the name plate. Dimensions E (b) D øf E E (a) (c) øh øg odel XH-6 XH-25 XH- XH D 2 2 E Note ) 2 Note ) Dimension E applies when heater option is included. (ead wire length: approx. m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. oreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement Heaters on page 6. F G (mm) H

44 luminum High Vacuum ngle Valve Electromagnetic/ellows Pressure alance Series XS RoHS How to Order Without control power supply With control power supply Starting voltage 5 24 VD Note ) Holding voltage is 25% of starting voltage. Note 2) For other rated voltages (48, 00 VD), please consult with S. XS 25 5 XS 25 P Electrical entry G T D G G Grommet onduit Terminal DIN terminal E-compliant Q Note) E-compliant Note) DIN terminal D only for 00 VD High vacuum angle valve (ellows pressure balance, 2-stage voltage switching type) 6 25 Valve size F6 F25 ontrol power supply P With control power supply Note) There are no E-compliant products with the control power supply. Electrical entry G Grommet Voltage 00 V V 5 24 VD Warning () In case there is no control power supply (XS-25- : 24/48/00 VD), starting voltage should be applied for only 0.5 to 0.2 s, in accordance with the prescribed method (indicated on the back of the coil). ontinuously applying starting voltage can cause overheating of the coil and fire. Holding voltage is 25% of the starting voltage (the application method is shown on the back of the solenoid coil). Example) Starting voltage Voltage 6 VD 24 VD Holding voltage 0.5 to 0.2 Time (s) 52