Space Saving Vacuum Ejector / Vacuum Pump System

Transcription

1 CT.US0-1'-UK Space Saving acuum jector / acuum ump System Conventional ZX 21. mm mm ZQ Series ZQ Width mm Weight 9 g Single unit with vacuum pressure switch and suction filter jector ump System NW asy-to-use vacuum pressure switch ush button type provides easy operation. acuum pressure switch with LD display NN open collector 1 output + analogue voltage N open collector 1 output + analogue voltage NN open collector 2 outputs N open collector 2 outputs With One-touch fittings Can copy to up to switches simultaneously. The settings of the master pressure switch (source of copy) can be copied to the slave pressure switches. Reduction in setting work revention of mistakes in setting Copy Copy Master pressure switch (source of copy) Slave pressure switch 1 switch 2 switches switches

2 Space Saving acuum jector Series ZQ How to Order jector Unit or Made to Order, refer to page 13. ZQ1 0 1U K1 L q w e r t y u i o!0!1!2!3 G!4 Q q Nozzle nominal size w xhaust type 0 07 ø0. ø0.7 ø1.0 1U 3M With silencer for single unit With silencer for manifold e Solenoid valve combination r ilot valve (Refer to Table (1).) t Solenoid valve rated voltage Symbol K1 Note 1) K2 J1 Note 1) J2 Q1 Q2 N1 N2 Normally closed Normally open Normally closed Normally open Latching positive common Latching positive common Latching negative common Latching negative common acuum release valve Normally closed Normally closed None None Normally closed None Normally closed None Y Standard (DC: 1 W) Note 2) DC low wattage type (0. W) Note 2) Note 2) void energizing the solenoid valve for long periods of time. (Refer to Design and Selection on Specific roduct recautions.) 24 DC 12 DC Note 1) In cases when K2 or J2 (supply valve normally open) is selected for the solenoid valve combination, when vacuum is stopped for long periods of time ( minutes or more), do not continue to energize the supply valve, and shut off the air supply. 1

3 Space Saving acuum jector Series ZQ y lectrical entry Note 3) u Manual override L LO L-type plug connector, with 0.3 m lead wire, with light/surge voltage suppressor L-type plug connector, without connector, with light/surge voltage suppressor Non-locking push type Latching type: ush-locking type Locking type (Q1/Q2/N1/N2: Not applicable) Note 3) Latching type supply valve: vailable in only. In this case, the supply valve and release valve come with a push-locking type. G Grommet, with 0.3 m lead wire Note 4) i acuum pressure switch suction filter C C 0 to 1 ka/nn open collector 2 outputs, with suction filter 0 to 1 ka/n open collector 2 outputs, with suction filter 0 to 1 ka/nn open collector 1 output + analogue voltage, with suction filter 0 to 1 ka/n open collector 1 output + analogue voltage, with suction filter 0 to 0 ka/nn open collector 2 outputs, with suction filter 0 to 0 ka/n open collector 2 outputs, with suction filter 0 to 0 ka/nn open collector 1 output + analogue voltage, with suction filter 0 to 0 ka/n open collector 1 output + analogue voltage, with suction filter only Note 4) The filter included in this product is of an simple type, and will become clogged quickly in environments with high quantities of dust or particulates. lease make additional use of an air suction filter of the Z, Z or ZC series. Warning The filter case of this suction filter is made of nylon. Contact with alcohol or similar chemicals may cause it to be damaged. lso, do not use the filter when these chemicals are present in the atmosphere. o acuum pressure switch unit specifications M!0 acuum pressure switch lead wire specifications G With unit switching function Note ) ixed SI unit Note ) With unit switching function Note ) (Initial value psi) Note ) Under the New Measurement Law, sales of switches with the unit switching function are not allowed for use in Japan. Note ) ixed unit: ka Without connector Lead wire with connector (Lead wire length 2 m) With connector cover Note 7)!1Check valve K None With check valve Note 7) The check valve has a function to prevent the exhaust air from the silencer overflowing to the vacuum side when a manifold is used. However, depending on usage conditions, it does not always suppress air overflow to the desired extent. During usage, please inspect thoroughly with actual machine. lso, in order to completely prevent the overflow of exhaust air, leave plenty of space between the check valve unit and adjacent ejector to avoid interference from the ejector s exhaust unit. Warning q Cannot be used for vacuum retention. w Use a release valve. (Without a release valve, a workpiece may not be released.)!4 racket With racket N Without racket Note 8)!2 itting ( ) Symbol Note 8)!3 itting ( ) Symbol pplicable tubing O.D. Without fitting (M x 0.8) ø3.2 (Straight) ø4 (Straight) ø (Straight) ø3.2 (lbow) ø4 (lbow) pplicable tubing O.D. Without Without fitting (M x 0.8) ø4 (Straight) ø (Straight) ø4 (lbow) art no. acuum pressure switch Q00-0-M Q00-0-C3 Q00-0-C4 Q00-0-C Q00-1-LC3 Q00-1-LC4 art no. KJS04-M KJS0-M KJL04-M Object spec. Manifold Single unit ilter only KJS23-M KJS04-M KJS0-M KJL23-M KJL04-M Note 8) or filter only (Without vacuum pressure switch) When neither fitting nor fitting are needed, enter nothing or 00 in the dotted line above How to Order. 2

4 Series ZQ Number of stations Note) 01 1 station 02 2 stations 08 Manifold 8 stations Note) Number of stations varies according to nozzle nominal size during simultaneous operation. Maximum Number of Stations in Simultaneous Operation Nozzle nominal size ø0. ø0.7 ø1.0 Maximum number of stations in simultaneous operation 8 stations stations 4 stations How to Order low/xhaust Characteristics ZZQ1 07 S C ir pressure supply () position oth sides S xhaust With silencers (oth sides) acuum release pressure supply (D ) None (Release pressure is supplied from the.) rovided (ir can be C alternatively supplied from the.) Manifold Ordering xample ZZQ8-S 1 pc. ZQ3M-K1YL-G-Q 4 pcs. (Stations 1 to 4) ZQ13M-K1YL-G-Q 4 pcs. (Stations to 8) Note) y viewing the front side of vacuum (), stations are counted starting from station 1 on the left side. Left acuum () ZQ3M-K1YL-G-Q ZQ13M-K1YL-G-Q Right How to Read low Characteristics ZQ / xhaust Characteristics Maximum vacuum pressure (ka) Maximum vacuum pressure (ka) Maximum vacuum pressure (ka) Maximum vacuum pressure Supply pressure (Ma) Maximum vacuum pressure Supply pressure (Ma) Supply pressure (Ma) 20 1 ZQ1 / xhaust Characteristics Maximum vacuum pressure ir consumption ir consumption Maximum suction flow ZQ7 / xhaust Characteristics 3 ir consumption Maximum suction flow Maximum suction flow Maximum suction flow (l/min(nr)) ir consumption (l/min(nr)) Maximum suction flow (l/min(nr)) ir consumption (l/min(nr)) Maximum suction flow (l/min(nr)) ir consumption (l/min(nr)) ZQ / low Characteristics Maximum vacuum pressure (ka) Suction flow (l/min(nr)) ZQ7 / low Characteristics Maximum vacuum pressure (ka) ZQ1 / low Characteristics Maximum vacuum pressure (ka) Suction flow (l/min(nr)) Supply pressure 0.3 Ma Supply pressure 0.43 Ma Supply pressure 0.43 Ma Suction flow (l/min(nr)) acuum pressure max 1 Q1 Suction flow Qmax low characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, a change in vacuum pressure will also be expressed. Normally this relationship is expressed in ejector standard use. In the graph, max is max. vacuum pressure and Qmax is max. suction flow. The valves are specified according to catalogue use. Changes in vacuum pressure are expressed in the below order. 1. When ejector suction is covered and made airtight, suction flow becomes 0 and vacuum pressure is at maximum value (max). 2. When suction is opened gradually, air can flow through, (air leakage), suction flow increases, but vacuum pressure decreases. (condition 1 and Q1) 3. When suction is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near 0. (atmospheric pressure). When vacuum (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near 0. When ventirative or leaky work must be adsorbed, please note that vacuum pressure will not be high. recautions e sure to read before handling. Refer to Handling recautions for roducts (M-03-3) for Safety Instructions and acuum quipment recautions. Caution Refer to the vacuum equipment model selection on est neumatics No.r for the selecting and sizing of Series ZQ.

5 Space Saving acuum jector Series ZQ Specifications jector Model Nozzle nominal diameter (mm) Maximum suction flow (l/min (NR)) ir consumption (l/min (NR)) Maximum vacuum pressure Supply pressure range Supply pressure Note) Operating temperature range luid ZQ Note) Maximum suction flow can be obtained by standard supply pressure. ZQ ka 0.3 to 0. Ma (Normally open: 0.3 to 0.4 Ma) 0.3 Ma 0.43 Ma to 0 C ir / Inert gas ZQ Weight Single unit With suction filter Note 1) 9 With vacuum pressure switch and suction filter Note 2) nd plate assembly for manifold g 9 g 122 g Note 1) Including a 0.3 m connector for supply valve and vacuum release valve. Note 2) Including a 0.3 m connector for supply valve and vacuum release valve and a 2 m connector for vacuum pressure switch. Calculation of weight for the manifold type (Single unit weight) x (Number of stations) + (Weight of end plate assembly for manifold) xample) acuum pressure switch + 8 stations with suction filter 9 g x g = 994 g Supply alve / acuum Release alve Normally closed Type Standard (1 W) Low wattage type (0. W) Latching type Model Refer to How to Order for L Q1- Q1Y- Q1 - ( solenoid valves on page. ) Manual override Rated coil voltage ower consumption (current value) lectrical entry DC Non-locking push type / Locking type (Tool type) 12, 24 DC 12, 24 DC 1 W 0. W 1 W Grommet L-type plug connector (with light/surge voltage suppressor) L-type plug connector with light/surge ( voltage suppressor ) Normally open ZQ1-Q120- ush-locking type Non-locking push type / Locking type (Tool type) 12, 24 DC 12, 24 DC Grommet L-type plug connector with light/surge ( voltage suppressor ) 4

6 Series ZQ Specifications acuum ressure Switch Model Rated pressure range Set pressure range/display pressure range Withstand pressure Minimum setting unit ower supply voltage Current consumption Switch output Repeatability Hysteresis nvironmental resistance Temperature characteristics Lead wires Maximum load current Maximum applied voltage Residual voltage Response time Short circuit protection Hysteresis mode Window comparator mode Output voltage (rated pressure range) nalogue oltage Linearity output output Output impedance Display system Display accuracy Operation indicator light nclosure mbient humidity range Withstand voltage Insulation resistance ibration resistance Impact resistance ZQ1-ZS (ZS) ZQ1-ZS (ZS) 0 to 1 ka 0 to 0 ka to ka to ka 00 ka 0.1 ka 12 to 24 DC %, Ripple (p-p) % or less (with power supply polarity protection) 40 m or less NN or N open collector: 2 outputs (selectable) 80 m 28 (with NN output) 2 or less (with load current of 80 m) 2. ms or less (Response time selections with anti-chattering function: 20, 0, 00, 00 and 2000 ms) With short-circuit protection 0.2 %.S. 1 digit ariable (0 or above) Note 1) 1 to 2.%.S. 1%.S. or less pprox. 1 kω 3 1/2-digit, 7 segment LD 1-colour display (Red) ±2%.S. 1 digit (at ambient temperature of 2 ±3 C) Lights when ON, OUT1: Green, OUT2: Red I40 Operating/Stored: 3 to 8% RH (with no condensation) 00 C for 1 min. between live parts and case 0 MΩ or more (at 00 DC) between live parts and case to Hz at the smaller of amplitude 1. mm or acceleration 20 m/s 2 in X, Y, Z directions for 2 hrs. each (De-energized) 0 m/s 2 in X, Y, Z directions 3 times each (De-energized) ±2%.S. (at 2C of ambient temperature range between and 0 C) Oil-resistant cabtire cord Cross section: 0.1 mm 2 (WG2), cores, 2 m, Conductor O.D.: 1.0 mm Note 1) If the applied voltage fluctuates around the set-value, the hysteresis must be set to a value more than the fluctuating width, otherwise chattering will occur. Note 2) or others, refer to ejector specifications on page 4. Construction Single unit Manifold t e r y o w u q i Component arts No. Description Material oppet valve assembly Nozzle Diffuser acuum release flow adjustment needle luminum alloy luminum alloy Stainless steel Replacement arts No. Description Material art no Solenoid valve ilter element Sound absorbing material 1 (single unit) acuum pressure switch Sound absorbing material 2 (manifold) Refer to page. XT S ZQ-S Refer to page ZZQ-S

7 Space Saving acuum jector Series ZQ Solenoid alve ctuation 1 Normally closed Q1 1 0 ZQ1-Q1 2 0 C C ctuation 2 Normally open ilot valve Standard (1 W) Solenoid valve rated voltage 24 DC 12 DC acuum pressure switch for ZQ ZQ1-ZS - - ZQ1-ZS - - ZQ1-ZSC - - ZQ1-ZS - - ZQ1-ZS - - ZQ1-ZS - - ZQ1-ZSC - - ZQ1-ZS - - How to Order ilot valve Standard (DC: 1 W) Y Low wattage type (0. W) L Latching positive common N Latching negative common Series ZS ZS- -- ZS- -- ZS- -C- ZS- -- ZS- -- ZS- -- ZS- -C- ZS- -- L L Q Q Manual override Note) Connector assembly part no. Solenoid valve rated voltage 24 DC 12 DC Non-locking push type Latching type: ush-locking type Locking type Note) Latching type: vailable in only acuum ressure Switch ZQ1-ZS acuum pressure switch specifications 0 to 1 ka/nn open collector 2 outputs, with suction filter 0 to 1 ka/n open collector 2 outputs, with suction filter 0 to 1 ka/nn open collector 1 output + analogue voltage, with suction filter 0 to 1 ka/n open collector 1 output + analogue voltage, with suction filter 0 to 0 ka/nn open collector 2 outputs, with suction filter 0 to 0 ka/n open collector 2 outputs, with suction filter 0 to 0 ka/nn open collector 1 output + analogue voltage, with suction filter 0 to 0 ka/n open collector 1 output + analogue voltage, with suction filter acuum pressure switch unit specifications With unit switching function Note 1) M ixed SI unit Note 2) With unit switching function Note 1) (Initial value psi) Note 1) Under the New Measurement Law, sales of switches with the unit switching function G are not allowed for use in Japan. Note 2) ixed unit: ka lectrical entry Note) L LO G L-type plug connector, with 0.3 m lead wire L-type plug connector, without connector Grommet, with 0.3 m lead wire Note) Mounting screws are attached. acuum pressure switch lead wire specifications Without connector Lead wire with connector (lead wire length 2 m) With connector cover Note 3) Check valve K None With check valve Specification 0 to 1 ka/nn open collector 2 outputs 0 to 1 ka/n open collector 2 outputs 0 to 1 ka/nn open collector 1 output + analogue voltage 0 to 1 ka/n open collector 1 output + analogue voltage 0 to 0 ka/nn open collector 2 outputs 0 to 0 ka/n open collector 2 outputs 0 to 0 ka/nn open collector 1 output + analogue voltage 0 to 0 ka/n open collector 1 output + analogue voltage How to order connector assembly Single XT1-14- DC positive common Latching XT1-13- DC negative common Latching XT1-13N- Lead wire length mm 00 mm 00 mm 2000 mm 3000 mm Connector, socket (3 pcs) only XT1-12 Lead wire length of the plug connector The lead wire length for a valve with a lead wire is 300 mm. When in need of a valve with a lead wire longer than 00 mm, place an order for a valve without a connector and connector assembly. Note 3) The check valve has a function to prevent the exhaust air from the silencer overflowing to the vacuum side when a manifold is used, but it is incapable of completely preventing overflow. During usage, please inspect thoroughly with actual machine. lso, in order to completely prevent the overflow of exhaust air, leave plenty of space between the check valve unit and adjacent ejector to avoid interference from the ejector s exhaust unit. Warning q Cannot be used for vacuum retention. w Use a vacuum release valve. (Without a vacuum release valve, the workpiece may not be released.) Lead wire with connector part no. ZS-39-G Note Lead wire length 2 m (With connector cover) itting ( ) Symbol pplicable tubing O.D. 0 Without fitting (M x 0.8) 1 ø3.2 (Straight) 2 ø4 (Straight) 3 ø (Straight) 4 ø3.2 (lbow) ø4 (lbow) The vacuum pressure switch mounted on this product is equivalent to our product, the ZS series compact digital pressure switch. ressure switch acuum jector Series ZQ ZQ1 Q or details regarding vacuum pressure correspondence switches, refer to the catalogue, table acuum ressure Switch for ZQ ZQ1 ZS Series ZS (CT.US0-7). Digital ressure Switch Series ZS ZS acuum pressure switch lead wire specification Rated pressure range/output specifications (Refer to rated pressure range/output specifications correspondence table) acuum pressure switch unit specification Rated pressure range/output specifications correspondence table

8 Series ZQ Type K1 ZQ1 1U-K Q acuum pressure switch acuum () (M) Note 4) 8.4 (300) (.3) (Grommet type) (With L-type plug connector) x ø3.2 through (ody mounting hole) (3.1) Release valve xhaust part 7. Note 1) (3.7) 4 x ø3. Mounting hole acuum release flow adjusting needle ilot pressure exhaust () M3, tmospheric release Note 4) ir pressure supply () M Note 4) Circuit diagram acuum () (M) Note 4) 8.4 (3.1) 3. (C type) XH ZQ1 1U-K Q - -Q K-Q K- -Q Type J1 ZQ1 1U-J Q (With L-type plug connector) x ø3.2 through (ody mounting hole) (3.1) racket (Standard) Note 1) The above dimensions are for ZQ1 1U-K1 L- G -00-Q. In case of ZQ1 1U-K Q, the overall length is Note 2) marked with are those after bracket is mounted. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of, and s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used. acuum pressure switch xhaust part 7. Note 1) (3.7) ilot pressure exhaust () M3, tmospheric release Note 4) ir pressure supply () M Note 4) Circuit diagram ZQ1 1U-J Q XH - -Q K- -Q K- -Q racket (Standard) Note 1) The above dimensions are for ZQ1 1U-J1 L- G -00-Q. In case of ZQ1 1U-J Q, the overall length is Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of, and s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used.

9 Space Saving acuum jector Series ZQ Type K2 ZQ1 1U-K Q acuum () (M) Note 4) 9.7 (With L-type plug connector) (8.4) 2 x ø3.2 through (ody mounting hole Note 2) ) Release valve xhaust part 87.2 Note 1) 7.3 ilot exhaust ( ) M3, tmospheric release Note 4) ir pressure supply ( ) M Note 4) acuum release flow adjusting needle 0.8 Circuit diagram ZQ1 1U-K2 - - XH -Q - -Q K - -Q racket (Standard) Note 1) The above dimensions are for ZQ1 1U-K2 L- - -Q. In case of ZQ1 1U-K Q, the overall length is 7.. Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of, and s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used. Type J2 ZQ1 1U-J Q acuum () (M) Note 4) 9.7 (With L-type plug connector) (8.4) 2 x ø3.2 through (ody mounting hole Note 2) ) xhaust part 87.2 Note 1) ilot exhaust ( ) M3, tmospheric release Note 4) ir pressure supply ( ) M Note 4) racket (Standard) Circuit diagram ZQ1 1U-J Q XH - -Q Note 1) The above dimensions are for ZQ1 1U-J2 L- -Q. In case of ZQ1 1U-J Q, the overall length is 7.. Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of, and s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used. 8

10 0 0 0 Series ZQ Type Q1, N1 ZQ1 1U-Q Q ZQ1 1U-N Q acuum () (M) Note 4) 8.4 (With L-type plug connector) (3.1) x ø3.2 through (ody mounting hole) Release valve 7. Note 1) xhaust part acuum pressure switch (3.7) acuum release flow adjusting needle ilot pressure exhaust () M3, tmospheric release Note 4) ir pressure supply () M Note 4) Circuit diagram acuum () (M) Note 4) 8.4 XH Q ZQ1 1U- N Q - -Q Type Q2, N2 ZQ1 1U-Q Q ZQ1 1U-N Q (With L-type plug connector) (3.1) 2 x ø3.2 through (ody mounting hole) K- -Q K racket (Standard) Q Note 1) The above dimensions are for ZQ1 1U- N1 L- G -00-Q. Q In case of ZQ1 1U- N Q, the overall length is Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of, and s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to -Q the catalogue to confirm the sizes of the fittings to be used. xhaust part 7. Note 1) (3.7) acuum pressure switch ilot pressure exhaust () M3, tmospheric release Note 4) ir pressure supply () M Note 4) Circuit diagram XH Q ZQ1 1U- N Q - -Q K- -Q K- -Q racket (Standard) Q Note 1) The above dimensions are for ZQ1 1U- N2 L- G -00-Q. Q In case of ZQ1 1U- N Q, the overall length is Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of, and s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used.

11 0 0 Space Saving acuum jector Series ZQ Manifold type (without D ) ZZQ1 -S ZQ1 3M Q 8.9 Note 2) 3. (With L-type plug (0.1) connector) ttached washer acuum pressure switch 7.8 ttached washer Left 21 Right acuum () (M) Note ). (ody mounting hole Note 4) ) 9 8. (R) Note 1) 111 Note 1) Release valve (3.7) Common pilot pressure exhaust () (One-touch fitting: pplicable tubing O.D. ø4) Common air pressure supply () (One-touch fitting: pplicable tubing O.D. ø8) Right Left Circuit diagram XH Left L2 L1 13 (itch) = 8 2 x ø3. (ody mounting hole Note 4) ) (mm) n L1 L Note 1) The above dimensions are for ZZQ4-S. ZQ1 3M-K1 L- G-00-Q. ZQ1 3M-K2 L- GK-00-Q. ZQ1 3M-J1 L--00-Q. ZQ1 3M-Q1L- -00-Q. K In case of ZQ1 3M- J Q, the overall length is Q In case of ZQ1 3M- N Q, the overall length is K In case of ZQ1 3M- J Q, the overall length is 7.. Q In case of ZQ1 3M- N Q, the overall length is 111. acuum release flow adjusting needle xhaust part K Note 2) The above dimensions are for ZQ1 3M- J Q. Note 3) marked with are those after the attached square bracket is mounted. Note 4) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note ) The pitches of s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used. Note ) When the release valve is not used, design the circuit for vacuum release separately in order to release a workpiece. XH Right ZQ1 3M-K Q ZQ1 3M-K2 - K- -Q ZQ1 3M-J1 -- -Q ZQ1 3M-Q1 - K- -Q

12 0 0 Series ZQ Manifold type (with D ) ZZQ1 -SC ZQ1 3M Q acuum pressure switch 8.9 Note 2) Left 21 Right acuum () (M) Note 4) (3.7) Common air pressure supply () (One-touch fitting: pplicable tubing O.D. ø8) Right Left Common pilot pressure exhaust () (One-touch fitting: pplicable tubing O.D. ø4) Release to the atmosphere. Release valve Common release pressure supply (D) (One-touch fitting: pplicable tubing O.D. ø4) L2 L1 8 4 x M through (for mounting) 13 (itch) = acuum release flow adjusting needle xhaust part (mm) n L1 L Note 1) The above dimensions are for ZZQ4-SC. ZQ1 3M-K1 L- G-00-Q. ZQ1 3M-K2 L- G-00-Q. ZQ1 3M-J1 L- -00-Q. ZQ1 3M-Q1 L- G-00-Q. In case of ZQ1 3M Q, the overall length is In case of ZQ1 3M- - G-00-Q, the overall length is 112. K Note 2) The above dimensions are for ZQ1 3M- J Q. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used. Note ) When the release valve is not used, design the circuit for vacuum release separately in order to release a workpiece. Circuit diagram Left D XH Right D XH ZQ1 3M-K Q ZQ1 3M-K2 - ZQ1 3M-J1 ZQ1 3M-Q1 - K- -Q -- -Q K- -Q 11

13 Space Saving acuum jector Series ZQ ittings / itting type filter dimensions after installation <With vacuum pressure switch> pplicable thread size: M acuum () pplicable tubing O.D.: ø3.2 acuum () pplicable tubing O.D.: ø4 acuum () pplicable tubing O.D.: ø acuum () Q00-0-M Q00-0-C3 Q00-0-C4 Q00-0-C (3.7) Q00-1-LC3 Q00-1-LC4 pplicable tubing O.D.: ø3.2 acuum () pplicable tubing O.D.: ø4 acuum () KJS23-M pplicable tubing O.D.: ø3.2 (C. ) KJS04-M pplicable tubing O.D.: ø4 (C. ) KJS0-M pplicable tubing O.D.: ø (C. ) KJL23-M KJL04-M ø8.4 pplicable tubing O.D.: ø3.2 (C. ) ø9.3. pplicable tubing O.D.: ø4 (C. ) pplicable tubing O.D.: ø4 (. ) KJS04-M pplicable tubing O.D.: ø (. ) KJS0-M pplicable tubing O.D.: ø4 (. ). ø ø7.9 ø 9.2 ø7.9 ø 9.2 < only> (for ejector) KJL04-M 12

14 Space Saving acuum jector Series ZQ Made to Order Specifications lease contact for detailed dimensions, specifications, and lead times. 1 ort xhaust Specifications Manifold ZZQ1 Stations 2 X12 ort exhaust specifications xhaust is changed for ort xhaust Specifications. Manifold type (without D ) ZZQ1-2-X12 ZQ1 3M Q 2 x Rc 1/4 XH

15 Space Saving acuum jector Series ZQ Manifold xploded iew e y b r y y r y No a) part t Component arts Description a) part Hexagon socket head cap screw nd block L nd block R jector assembly jector body gasket for manifold xhaust block gasket t a) part t art no. Refer to How to Order below.-q Refer to Table (1) (including 1 pc. of y). Refer to Table (1) (including 1 pc. of t). ZQ-3-00-S ZQ S Note 2) Note 2) Note 1) Refer to pages 1 and 2 for detailed description of How to Order. Note 2) pcs. are included in one set. w Table (1) Note 1) ZQ1 3M Q (1 pc. each in t and y is included.) Description nd block L nd block R q b) view With D ZQ1L-2-S-S ZQ1R-2-S-S Without D ZQ1L-1-S-S ZQ1R-1-S-S Working rocedure Disassembly Loosen and remove the clamp rod q. ssembly 1. Install the ejector body gasket for manifold t into the gasket groove of each ejector assembly r. Install the exhaust block gasket y around the projected part. 2. Install the exhaust block gasket y around the projected part of the end block L w. 3. Install the ejector body gasket for manifold t into the gasket groove of the end block R e. 4. lign the ejector assemblies r, end block (L) w, and end block (R) e using positioning pins (at the two a positions) and fasten with clamp rods q (2 pcs.) (with a tightening torque of 0. N m ± 0.0 N m). Replacement of ort ittings (With vacuum pressure switch) fittings are cassette style for easy replacement. The fittings are blocked by a clip. Remove the clip with a flat blade screwdriver, etc. to replace the fittings. When mounting the fittings, after inserting the fitting assembly until it stops, then put the clip into the prescribed position completely. How to Order Hexagon Socket Head Cap Screw ZQ ST Note) 2 pcs. are included in one set. 0 Number of stations 0 1 station 0 2 stations 8 8 stations pplicable tubing O.D. pplicable tubing O.D. ø3.2 pplicable tubing O.D. ø4 pplicable tubing O.D. ø M female thread Clip (ZK1-C-) pcs. in one set Straight Q00-0-C3 Q00-0-C4 Q00-0-C Q00-0-M itting assembly lbow Q00-1-LC3 Q00-1-LC4 14

16 Space Saving acuum ump System Series ZQ acuum ump Unit How to Order ZQ00 U K1 L G q w e r t y u i o!0!1!2 Q q ody type U M or single unit or manifold w Solenoid valve combination e ilot valve (Refer to Table (1).) r Solenoid valve rated voltage Symbol K1 K2 Note 1) J1 J2 Note 1) Q1 Q2 N1 N2 Normally closed Normally open Normally closed Normally open Latching positive common Latching positive common Latching negative common Latching negative common acuum release valve Normally closed Normally closed None None Normally closed None Normally closed None Y Standard (DC: 1 W) Note 2) DC low wattage type (0. W) Note 2) Note 2) void energizing the solenoid valve for long periods of time. (Refer to Specific roduct recautions 1; Caution on Design and Selection.) 24 DC 12 DC The air in the adsorption section of this product is not released to the atmosphere at the vacuum suspension state. s for K1, K2, Q1 and N1, use the vacuum release valve when a workpiece is detached. Concerning J1, J2, Q2 and N2, devise the circuit for the vacuum release additionally when a workpiece is detached. Note 1) In cases when K2 or J2 (supply valve normally open) is selected for the solenoid valve combination, when vacuum is stopped for long periods of time ( minutes or more), do not continue to energize the supply valve, and shut off the air supply. 1

17 Space Saving acuum ump System Series ZQ t lectrical entry Note 3) y Manual override L LO L-type plug connector, with 0.3 m lead wire, with light/surge voltage suppressor L-type plug connector, without connector, with light/surge voltage suppressor Non-locking push type Latching type: ush-locking type Locking type (Q1/Q2/N1/N2: Not applicable) Note 3) Latching type supply valve: vailable in Nil only. In this case, the supply valve and release valve come with a push-locking type. G Grommet, with 0.3 m lead wire Note 4) u acuum pressure switch suction filter C C 0 to 1 ka/nn open collector 2 outputs, with suction filter 0 to 1 ka/n open collector 2 outputs, with suction filter 0 to 1 ka/nn open collector 1 output + analogue voltage, with suction filter 0 to 1 ka/n open collector 1 output + analogue voltage, with suction filter 0 to 0 ka/nn open collector 2 outputs, with suction filter 0 to 0 ka/n open collector 2 outputs, with suction filter 0 to 0 ka/nn open collector 1 output + analogue voltage, with suction filter 0 to 0 ka/n open collector 1 output + analogue voltage, with suction filter only Note 4) The filter included in this product is of an simple type, and will become clogged quickly in environments with high quantities of dust or particulates. lease make additional use of an air suction filter of the Z, Z or ZC series. Warning The filter case of this suction filter is made of nylon. Contact with alcohol or similar chemicals may cause it to be damaged. lso, do not use the filter when these chemicals are present in the atmosphere. i acuum pressure switch unit specifications M o acuum pressure switch lead wire specifications G With unit switching function Note ) ixed SI unit Note ) With unit switching function Note ) (Initial value psi) Note ) Under the New Measurement Law, sales of switches with the unit switching function are not allowed for use in Japan. Note ) ixed unit: ka Without connector Lead wire with connector (Lead wire length 2 m) With connector cover!0 itting ( ) Note 7) Note 7)!1 itting (S / ) Symbol pplicable tubing O.D. Without fitting (M x 0.8) ø3.2 (Straight) ø4 (Straight) ø (Straight) ø3.2 (lbow) ø4 (lbow) art no. acuum pressure switch Q00-0-M Q00-0-C3 Q00-0-C4 Q00-0-C Q00-1-LC3 Q00-1-LC4 ilter only KJS23-M KJS04-M KJS0-M KJL23-M KJL04-M Symbol pplicable tubing O.D. Without Without fitting (M x 0.8) ø4 (Straight) ø (Straight) ø4 (lbow) art no. KJS04-M KJS0-M KJL04-M Object spec. Manifold Single unit!2 racket With racket N Without racket Note 7) or filter only (Without vacuum pressure switch) When neither fitting nor S/ fitting are needed, enter nothing or 00 in the dotted line above How to Order. 1

18 Series ZQ Manifold How to Order ZZQ1 Number of stations 01 1 station 02 2 stations 08 8 stations 08 O Manifold Ordering xample ZZQ8-R0 1 pc. ZQ00M-K1L-G-Q 4 pcs. (Stations 1 to 4) ZQ00M-K1YL-G-Q 4 pcs. (Stations to 8) Note) y viewing the front side of vacuum (), stations are counted starting from station 1 on the left side. Left Right acuum pressure supply ( ) ort location (Refer to Table (1).) L Left side R Right side Table (1) ir ressure Supply ort Location on the Manifold D C Manifold ort location L (Left side) R (Right side) L (Left side) R (Right side) S Note) Left D S Note) Right Note) The position of each is shown as right and left sides viewed from the front side of the vacuum. Release pressure is commonly supplied from the S. S: ilot presure supply, : acuum pressure supply, D: Release pressure supply D acuum ZQ3M-K1YL-G-Q ZQ13M-K1YL-G-Q C Release pressure supply (D ) None (Release pressure is supplied from the S.) rovided (ir can be alternatively supplied from the S.) Specifications Common Switching method for vacuum/release valve Cv factor acuum pressure supply () Supply pressure range ilot/ressure (S) Supply pressure for vacuum release (D) Operating temperature range luid Supply alve / acuum Release alve Manual override Rated coil voltage ower consumption (current value) lectrical entry iloted to 1.3 ka 0.3 to 0. Ma (Normally open: 0.3 to 0.4 Ma), and also D pressure S pressure to 0 C ir / Inert gas Weight Single unit With suction filter Note 1) With vacuum pressure switch and suction filter Note 2) nd plate assembly for manifold 9 g 9 g 122 g Note 1) Including a 0.3 m connector for supply valve and vacuum release valve. Note 2) Including a 0.3 m connector for supply valve and vacuum release valve and a 2 m connector for vacuum pressure switch. Calculation of weight for the manifold type (Single unit weight) x (Number of stations) + (Weight of end plate assembly for manifold) xample) acuum pressure switch + 8 stations with suction filter 9 g x g = 994 g Type Normally closed Latching type Normally open Item Standard (1 W) Low wattage type (0. W) (Refer to How to Order for L Model Q1- Q1Y- Q1 N - ZQ1-Q120- solenoid valves on page 19.) DC 0.3 to 0. Ma (Normally open: 0.3 to 0.4 Ma) Non-locking push type / Locking type (Tool type) 12, 24 DC 12, 24 DC 12, 24 DC 12, 24 DC 1 W 0. W 1 W Grommet L-type plug connector (with light/surge voltage suppressor) ush-locking type L-type plug connector (with light/surge voltage suppressor) Non-locking push type / Locking type (Tool type) Grommet (with light/surge voltage suppressor) 17

19 Space Saving acuum ump System Series ZQ Specifications acuum ressure Switch Model Rated pressure range Set pressure range/display pressure range Withstand pressure Minimum setting unit ower supply voltage Current consumption Switch output Maximum load current Maximum applied voltage Residual voltage Response time Short circuit protection Repeatability Hysteresis mode Hysteresis Window comparator mode nalogue output Display system Display accuracy Operation indicator light nvironmental resistance Temperature characteristics Lead wires oltage output Output voltage (rated pressure range) Linearity Output impedance nclosure mbient humidity range Withstand voltage Insulation resistance ibration resistance Impact resistance ZQ1-ZS (ZS) 0 to 1 ka to ka ZQ1-ZS (ZS) 0 to 0 ka to ka 00 ka 0.1 ka 12 to 24 DC ±%, Ripple (p-p) % or less (with power supply polarity protection) 40 m or less NN or N open collector: 2 outputs (selectable) 80 m 28 (with NN output) 2 or less (with load current of 80 m) 2. ms or less (Response time selections with anti-chattering function: 20, 0, 00, 00 and 2000 ms) With short-circuit protection ±0.2%.S. ±1 digit ariable (0 or above) Note 1) 1 to ±2.%.S. ±1%.S. or less pprox. 1 kω 3 1/2-digit, 7 segment LD 1-colour display (Red) ±2%.S. ±1 digit (at ambient temperature of 2 ±3 C) Lights when ON, OUT1: Green, OUT2: Red I40 Operating/Stored: 3 to 8% RH (with no condensation) 00 C for 1 min. between live parts and case 0 MΩ or more (at 00 DC) between live parts and case to Hz at the smaller of amplitude 1. mm or acceleration 20 m/s 2 in X, Y, Z directions for 2 hrs. each (De-energized) 0 m/s 2 in X, Y, Z directions 3 times each (De-energized) ±2%.S. (at 2 C of ambient temperature range between and 0 C) Oil-resistant cabtire cord Cross section: 0.1 mm 2 (WG2), cores, Conductor O.D.: 1.0 mm Note 1) If the applied voltage fluctuates around the set-value, the hysteresis must be set to a value more than the fluctuating width, otherwise chattering will occur. Note 2) or others, refer to ejector specifications on page 17. Construction r w q u e t y i Component arts No Replacement arts No. 4 7 Description Description oppet valve assembly for supply valve oppet valve assembly for vacuum release valve acuum release flow adjusting needle Solenoid valve ilter element acuum pressure switch itting Material Material luminum alloy art no. Refer to page 19. XT S Refer to page 19. Refer to How to Order on page

20 Series ZQ Solenoid alve ctuation 1 Normally closed Q1 1 0 ZQ1-Q1 2 0 C C ctuation 2 Normally open ilot valve Standard (1 W) Solenoid valve rated voltage 24 DC 12 DC How to Order ilot valve Standard (DC: 1 W) Y Low wattage type (0. W) L Latching positive common N Latching negative common L L Q Q Manual override Note) Note) Mounting screws are attached. Connector assembly part no. Solenoid valve rated voltage 24 DC 12 DC Non-locking push type Latching type: ush-locking type Locking type Note) Latching type: vailable in only lectrical entry Note) L LO G ZQ1-ZS acuum pressure switch specifications 0 to 1 ka/nn open collector 2 outputs, with suction filter 0 to 1 ka/n open collector 2 outputs, with suction filter 0 to 1 ka/nn open collector 1 output + analogue voltage, with suction filter 0 to 1 ka/n open collector 1 output + analogue voltage, with suction filter 0 to 0 ka/nn open collector 2 outputs, with suction filter 0 to 0 ka/n open collector 2 outputs, with suction filter 0 to 0 ka/nn open collector 1 output + analogue voltage, with suction filter 0 to 0 ka/n open collector 1 output + analogue voltage, with suction filter acuum pressure switch unit specifications M acuum ressure Switch With unit switching function Note 1) ixed SI unit Note 2) With unit switching function Note 1) (Initial value psi) Note 1) Under the New Measurement Law, sales of switches with the unit switching function are not allowed for use in Japan. Note 2) ixed unit: ka 19 ressure switch correspondence table acuum pressure switch for ZQ ZQ1-ZS - - ZQ1-ZS - - ZQ1-ZSC - - ZQ1-ZS - - ZQ1-ZS - - ZQ1-ZS - - ZQ1-ZSC - - ZQ1-ZS - - Series ZS ZS- -- ZS- -- ZS- -C- ZS- -- ZS- -- ZS- -- ZS- -C- ZS- -- L-type plug connector, with 0.3 m lead wire L-type plug connector, without connector Grommet, with 0.3 m lead wire acuum pressure switch lead wire specifications Without connector Lead wire with connector G (lead wire length 2 m) With connector cover Rated pressure range/output specifications correspondence table Check valve K Lead wire with connector part no. ZS-39-G Note 3) None With check valve How to order connector assembly Single XT1-14- DC positive common Latching XT1-13- DC negative common Latching XT1-13N- Connector, socket (3 pcs) only XT1-12 Lead wire length 300 mm 00 mm 00 mm mm mm Lead wire length of the plug connector The lead wire length for a valve with a lead wire is 300 mm. When in need of a valve with a lead wire longer than 00 mm, place an order for a valve without a connector and connector assembly. Note 3) The check valve has a function to prevent the exhaust air from the silencer overflowing to the vacuum side when a manifold is used, but it is incapable of completely preventing overflow. During usage, please inspect thoroughly with actual machine. lso, in order to completely prevent the overflow of exhaust air, leave plenty of space between the check valve unit and adjacent ejector to avoid interference from the ejector s exhaust unit. Warning q Cannot be used for vacuum retention. w Use a vacuum release valve. (Without a vacuum release valve, the workpiece may not be released.) Note Lead wire length 2 m (With connector cover) Specification 0 to 1 ka/nn open collector 2 outputs 0 to 1 ka/n open collector 2 outputs 0 to 1 ka/nn open collector 1 output + analogue voltage 0 to 1 ka/n open collector 1 output + analogue voltage 0 to 0 ka/nn open collector 2 outputs 0 to 0 ka/n open collector 2 outputs 0 to 0 ka/nn open collector 1 output + analogue voltage 0 to 0 ka/n open collector 1 output + analogue voltage itting ( ) Symbol pplicable tubing O.D. 0 Without fitting (M x 0.8) 1 ø3.2 (Straight) 2 ø4 (Straight) 3 ø (Straight) 4 ø3.2 (lbow) ø4 (lbow) The vacuum pressure switch mounted on this product is equivalent to our product, the ZS series compact digital pressure switch. acuum ump System Series ZQ acuum ressure Switch for ZQ Digital ressure Switch Series ZS ZQ1 ZS ZQ1 ZS Rated pressure range/output specifications (Refer to rated pressure range/output specifications correspondence table) Q or details regarding vacuum pressure switches, refer to the catalogue, Series ZS (CT.S0-7). acuum pressure switch lead wire specification acuum pressure switch unit specification

21 Space Saving acuum ump System Series ZQ Type K1 ZQ00U-K Q acuum () (M) Note 4) 8.4 (300) (.3) (Grommet type) (With L-type plug connector) (3.1) x ø3.2 through (ody mounting hole) Release valve 4 x ø3. Mounting hole acuum pressure switch xhaust part Note 1) (3.7) acuum release flow adjusting needle ilot pressure exhaust () M3, tmospheric release Note 4) ilot pressure supply (S) M Note 4) acuum pressure supply () M Note 4) S Circuit diagram S ZQ00U-K Q - -Q Type J1 ZQ00U-J Q acuum () (M) Note 4) 8.4 (With L-type plug connector) (3.1) x ø3.2 through (ody mounting hole) racket (Standard) Note 1) The above dimensions are for ZQ00U-K1 L- G -00-Q. In case of ZQ00U-K Q, the overall length is Note 2) marked with are those after bracket is mounted. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of S,, and s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used Note 1) xhaust part acuum pressure switch (3.7) ilot pressure exhaust () M3, tmospheric release Note 4) ir pressure supply () M Note 4) acuum pressure supply () M Note 4) S 0.8 Circuit diagram S ZQ00U-J Q - -Q racket (Standard) Note 1) The above dimensions are for ZQ00U-J1 L- G-00-Q. In case of ZQ00U-J Q, the overall length is Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of S,, and s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used. 20

22 Series ZQ Type K2 ZQ00U-K Q (With L-type plug connector) 2 x ø3.2 through (ody mounting hole Note 2) ) 8. Release valve ilot pressure exhaust () M3, tmospheric release Note 4) acuum () (M) Note 4) 9.7 (8.4) Note 1) 8.3 ilot pressure supply (S) M Note 4) acuum pressure supply () M Note 4) S 0.8 acuum release flow adjusting needle Circuit diagram S ZQ1 1U-K Q - -Q racket (Standard) Note 1) The above dimensions are for ZQ00U-J Q. In case of ZQ00U-K Q, the overall length is Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of S,, and s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used. Type J2 ZQ00U-J Q acuum () (M) Note 4) 9.7 (With L-type plug connector) 2 x ø3.2 through (ody mounting hole Note 2) ) (8.4) Note 1) ilot pressure exhaust () M3, tmospheric release Note 4) ilot pressure supply (S) M Note 4) acuum pressure supply () M Note 4) S 0.8 racket (Standard) Circuit diagram S 21 ZQ1 1U-J Q - -Q Note 1) The above dimensions are for ZQ00U-J Q. In case of ZQ00U-K Q, the overall length is Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of S,, and s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used. Note ) In order to release a workpiece, design the circuit for vacuum release separately.

23 0 0 0 Space Saving acuum ump System Series ZQ Type Q1, N1 ZQ00U-Q Q ZQ00U-N Q acuum () (M) Note 4) 8.4 (With L-type plug connector) (3.1) x ø3.2 through (ody mounting hole) Release valve Note 1) acuum pressure switch ilot pressure exhaust () M3, tmospheric release Note 4) ilot pressure supply (S) M Note 4) xhaust part acuum pressure supply () (3.7) M Note 4) acuum release flow adjusting needle S 0.8 Circuit diagram racket (Standard) S ZQ00U-Q Q - -Q Type Q2, N2 ZQ00U-Q Q ZQ00U-N Q acuum () (M) Note 4) 8.4 (With L-type plug connector) (3.1) x ø3.2 through (ody mounting hole) Q Note 1) The above dimensions are for ZQ00U- N1 L- G-00-Q. Q In case of ZQ00U- N1 --Q, the overall length is Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of S,, and s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used Note 1) xhaust part acuum pressure switch (3.7) ilot pressure exhaust () M3, tmospheric release Note 4) ir pressure supply () M Note 4) acuum pressure supply () M Note 4) S 0.8 Circuit diagram S Q ZQ00U Q - -Q N racket (Standard) Note 1) The above dimensions are for ZQ00U-Q2 L- G-00-Q. Q In case of ZQ00U- N Q, the overall length is 87.2 Note 2) The dimensions after bracket is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note 4) The pitches of S,, and s are determined assuming the use of the KJ series onetouch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used. Note ) In order to release a workpiece, design the circuit for vacuum release separately. 22

24 0 0 Series ZQ Manifold type (without D ) ZZQ1 - O ZQ00M Q Left side Right side 8.9 Note 2) (With L-type plug 3. connector) (0.1) ttached washer acuum pressure switch 7.8 ttached washer Left 21 Right acuum () (M) Note ). (ody mounting hole Note 4) ) Right 7. Note 1) 111 Note 1) (3.7) Common pilot pressure exhaust () (One-touch fitting: pplicable tubing O.D. ø4) Supply Common vacuum pressure supply () valve (One-touch fitting: pplicable tubing O.D. ø8) Release valve (R) 8. Left Circuit diagram Left S L2 L1 13 (itch) = 8 2 x ø3. (ody mounting hole Note 4) ) (mm) n L1 L Note 1) The above dimensions are for ZZQ4-RO. ZQ00M-K1 L- G-00-Q. ZQ00M-K2 L- G-00-Q. ZQ00M-J1 L--00-Q. ZQ00M-Q1 L- G-00-Q. K In case of ZQ00M- J --00-Q, the overall length is Q In case of ZQ00M- N --00-Q, the overall length is K In case of ZQ00M- J Q, the overall length is 7.. Q In case of ZQ00M- N Q, the overall length is S acuum release flow adjusting needle Common pilot pressure supply (S) (One-touch fitting: pplicable tubing O.D. ø8) K Note 2) The above dimensions are for ZQ00M- J Q. Note 3) marked with are those after the attached washer is mounted. Note 4) When the body is mounted, tighten with a torque of 0. ± 0.0 N m. Note ) The pitches of s are determined assuming the use of the KJ series one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. lease refer to the catalogue to confirm the sizes of the fittings to be used. Note ) When the release valve is not used, design the circuit for vacuum release separately in order to release a workpiece. Right ZQ00M-K Q ZQ00M-K Q ZQ00M-J1 -- -Q ZQ00M-Q Q 23