Series XLS. Electromagnetic Type Bellows Pressure Balance XLS 25 5 G XLS 25 P 1 G. High Vacuum Angle Valve. Without control power supply

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1 High Vacuum ngle Valve Series XLS Electromagnetic Type ellows Pressure alance How to Order Starting voltage 5 24 V 9 Other (48 V, 00 V ) Note) Holding voltage is 25% of starting voltage. Electrical entry T rommet onduit Terminal IN terminal Without control power supply With control power supply XLS 25 5 XLS 25 P High vacuum angle valve ellows pressure balance, 2 stage voltage switching type 6 25 Valve size KF6 KF25 ontrol power supply P With control power Voltage 2 Electrical entry 00 V 200 V 5 24 V rommet 30 Warning () In case there is no control power supply (XLS-25- : 24/48/00 V ), starting voltage should be applied for only 0.5 to 0.2s, in accordance with the prescribed method (indicated on the back of the coil). ontinuously applying starting voltage can cause overheating of the coil and fire. Holding voltage is 25% of the starting voltage (the application method is shown on the back of the solenoid coil). Example) Starting voltage Voltage 6 V 24 V Holding voltage 0.5 to 0.2 Time s

2 High Vacuum ngle Valve Series XLS Specifications Valve type Fluid Operating temperature Operating pressure Pa {Torr} onductance l/s Note ) Leakage Pa m 3 /s {Torr l/s} Flange type Principle materials Surface treatment ontrol power supply Operating power supply voltage llowable voltage fluctuation % Power consumption W urrent consumption Electrical entry oil insulation Maximum operating frequency Weight kg Internal External Initial Holding Initial Holding XLS-6 XLS-25 XLS-6-P XLS-25-P Normally closed (N..) Non-corrosive gas for aluminum alloy (6063) and stainless steel (SUS5 equiv.) 5 to 0.2M to x 0 6 {.5k to 7.5 x 0 9 } x 0 8 { x 0 7 } at ordinary temperatures, excluding gas permeation.3 x 0 { x 0 0 } at ordinary temperatures, excluding gas permeation KF6 KF25 KF6 KF25 ody : luminum alloy ellows: Stainless steel Seal: FKM (Fluoro rubber) Exterior: Hard anodized Interior Machined for clean environment No Yes 24/6, 48/2, 00/24 V 24 V 00/200 V ± ,,, T type type only lass 0 c.p.m onstruction/operation Stroke Valve side exhaust Retainer oil assembly ore assembly rmature assembly (includes ) over ore O-ring Exterior onnet-o-ring }seal Spring ellows ellows side exhaust Valve ody <<Operating principle>> y energizing the coil assembly w for 0.5 to 0.2 s with the starting voltage, the armature assembly r overcomes the reactive force of the spring u and is adsorbed to the core assembly y, opening the valve o. fter that, it is held with 25% of the starting voltage (when there is no power supply). (When there is a power supply, the activating voltage only is applied to the coil assembly w.) When energizing of the coil assembly w is canceled, the armature assembly r is separated from the core assembly y by the reactive force of the spring u, closing the valve o. Note ) The fixed seals between the interior of the body!0 and the atmosphere are the exterior seals e, and the drive section is sealed by the bellows i. Note 2) Since the seal diameter of the valve o and the effective pressure receiving diameter of the bellows i are the same, pressure is in balance and the bellows side can also be used for exhaust. 3

3 Series XLS imensions XLS/Without control power supply rommet () onduit () K 270±0 (PF)/2 Terminal (T) K±2 L (PF)/2 IN terminal () K L øf øe H 290±0 (PF)/2 22 ø6 to 9 XLS-6- XLS-6- XLS-6- XLS-6- T XLS-25- XLS-25- XLS-25- XLS-25- T E 30 F H K (mm) L

4 High Vacuum ngle Valve Series XLS imensions XLS/With control power supply rommet () H 4 øe 530 ±0 øf 72 XLS-6-P XLS-25-P E 30 F H 0 5 (mm)

5 Series Made to Oder Special aluminum valve products. ontact SM for applicable models. Special specifications ontents Note) Improved corrosion resistance Improved plasma resistance ody interior is oxalic acid anodized to improve corrosion resistance against chlorine system gas. (The corrosion resistance is equivalent to that of stainless steel SUS304.) Use of perfluoroelastomer for internal seals enables applications in severe operating environments, such as semiconductor manufacturing processes involving plasma generation. Oxalic acid anodized/alumite Improved resistance to corrosion and plasma ody interior = Oxalic acid anodized Internal seal = Perfluoroelastomer Elastomer Heat-resistant type (20 ) ( ) eposit prevention + Operation check + Internal processing baking heater is added for uniform heating to prevent formation of deposits. doption of a high temperature auto switch (Max. 50 ) enables operation check during heating. uto switch Heater onsult SM for the above specifications. Note) Type with improved corrosion resistance. n immersion test in Hl (% hydrochloric acid) yields results equivalent to those for SUS304 for the first 50 hours. Elusion (g/dm 2 ) 0. Oxalic acid anodized SUS Immersion time (Hr)

6 High Vacuum ngle Valve Series XL XLV XL XLV XLF XLFV XL XLV V XLH Temperature specifications Standard -6 XL6-30- XL6-30-H XLV6-30- XL6-30- XL6-30-H XLV6-30- XLF6-30- XLF6-30-H XLFV6-30- XL6-30- XL6-30-H XLV6-30- XLH6-30- Maintenance Parts ir operated angle valve/manual valve onnet & handle assembly/onstruction part number: () -25 XL XL25-30-H XLV XL XL25-30-H XLV XLF XLF25-30-H XLFV XL XL25-30-H XLV H V XLH XL-30- XL-30-H XLV-30- XL-30- XL-30-H XLV-30- XLF-30- XLF-30-H XLFV-30- XL-30- XL-30-H XLV H V-30- XLH-30- Valve size -50 XL XL50-30-H XLV XL XL50-30-H XLV XLF XLF50-30-H XLFV XL XL50-30-H XLV H V XLH XL XL63-30-H XLV XL XL63-30-H XLV XLF XLF63-30-H XLFV XL XL63-30-H XLV H V XL XL80-30-H XLV XL XL80-30-H XLV XLF XLF80-30-H XLFV XL XL80-30-H XLV H V Exterior seal, (M) Valve seal, S Valve seal ssemblies onstruction No. escription XL(,, H) [V]-6 XL(F, ) [V]-6 [V]-25 XL(,, H) [V]-25 XL(F, ) [V]-25 [V]- [V]- [V]-50 [V]-50 [V]-63 [V]-63 [V]-80 [V]-80 Exterior seal (M) Valve seal S Valve seal assembly S V XLF6-6 S V XLF25-6 S568-0V 2-V5V 2-V24V 2-P42V S V S V S V S V S V S V 2-V85V Refer to the onstruction/operation drawing of each series for the construction numbers. Replacement heaters/part Nos. (XL, XL,, XLF, XL, XLH) H2 (heater for 00 ) XL25-60M- XL25-60M- XL25-60M-2 XL25-60M-3 ngle solenoid valve Mounting position (a) (a) (a) Part Nos./Mounting positions/set quantity Set quantity H3 (heater for 20 ) XL25-60M- XL25-60M-2 XL25-60M-2 XL25-60M-3 XL25-60M-2 Mounting position (a) (a) Set quantity 2 Note ) The above (a), (b), (c) indicate heater mounting positions. The heater mounting positions (a), (b), (c) are shown in the dimension drawing for each series. Note 2) Heater set quantity indicates multiple heaters. (Example) The heaters included with XL-80-H3 are 2 pieces of XLH25-60M-2 (a set including 2 heater units). onstruction No. escription oil assembly ore assembly rmature assembly ore O-ring onnet O-ring XLS-6- XLS6-20-,, T, XLS-6-P XLS6-20-P XLS-25- XLS25-20-,, T, XLS-25-P XLS25-20-P XLS6-30- XLS XLS XLS S568-08V S568-08V S V S V Note) The voltage symbol is entered here. (Refer to "How to Order") The letters,, T and following indicate grommet, conduit, terminal and IN respectively. Refer to the onstruction/operation sections for construction numbers.