XL Series. High Vacuum Angle Valve

Transcription

1 High Vacuum ngle Valve X Series N ight weight and compact Uniform baking temperature High fluorine resistance ow outgassing ittle heavy metal contamination

2 Series X High Vacuum ngle Valve ight weight & compact arge conductance with a small valve body. High fluorine resistance Excellent resistance against fluorine corrosion. ow outgassing ow outgassing makes it possible to use a lower capacity pump and also to shorten evacuation time. Series X (mm) mm X-6 X-5 X- X X-6 X ommon to all series. mm Weight kg (lb) 0.5 (0.55) 0.45 (0.99). (.4).6 (.5).9 (6.9) 5.0 (.0) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. omparison with F5 flange onductance l/s in=5.4mm ody ittle heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or r (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. luminum (setting temp.: 0 [48 F]) 0 00, 4, 5 Stainless steel (setting temp.: 0 [48 F]) High Vacuum ngle Valve X X/XV (ellows seal, Single acting) ellows type is particulate free and completely cleaned. Pressure balance mechanism allows unrestricted exhaust direction. X/XV (ellows Seal, Double acting) ellows type is particulate free and completely cleaned. Pressure balance mechanism allows unrestricted exhaust direction. Overtravel mechanism maintains constant O-ring compression (size 50, 6, 80). XF/XFV (O-ring seal, Single acting) ow gas entrainment with employment of O-ring seal system. High speed response and long service life. Particulates are reduced through special surface treatment of shaft seal. X/XV (O-ring seal, Double acting) ow gas entrainment with employment of O-ring seal system. ody ody ellows Valve Heater Series Features Temperature ( ), Time (minutes) X/XV (O-ring seal, Double acting) continued High speed response and long service life. Overtravel mechanism maintains constant O-ring compression (size 50, 6, 80). Particulates are reduced through special surface treatment of shaft seal. XD/XDV ( stage control, Single acting) Initial exhaust valve and main exhaust valve have been integrated ( stage flow control valve). Makes compact system design and reduced piping possible. Minimizes particulates by eliminating turbulence during exhaust. Prevents pump overload. Initial exhaust valve flow is adjustable and adjustment can be locked. XH (ellows seal, Manual operation) ellows type is particulate free and completely cleaned. Pressure balance mechanism allows unrestricted exhaust direction. Temperature ( ) 80 0 XH (ellows seal, Manual operation) continued ow actuation torque (0.5N m or less). Spring provides standard sealing load. Handle height is the same when valve is open or closed. Indicator to confirm opening and closing of valve is standard equipment. XS (ellow pressure balance, Normally closed solenoid) Particulates are reduced because there are no sliding metal parts. Pressure balance mechanism allows unrestricted exhaust direction. control power supply circuit for solenoid valve drive has been made standard. an be used in portable equipment since air for drive is not necessary. XS (Direct solenoid operation) Solenoid valve with metal seal fittings (VR /Swagelok ) Particulates are reduced because there are no sliding metal parts. Improved reverse pressure performance. 0 5 Time (minutes) 60 F=(.8x )+

3 High Vacuum ngle Valve ctuation pplication Shaft seal system s Valve type Operating pressure Pa eakage Pa m /sec Service life (Million cycles) Internal External Flange size Options High temp. Switch Heater Indicator specification Particulate free completely cleaned ellows Seal X XV (With solenoid valve) X XV (With solenoid valve) Single acting (N..) Double acting 0 5 to P.4 to P.7 P.8 to P. Electromagnetic Manual ir operated High speed operation High volume operation Reduces particulates Eliminates pump over loads For portable equipment not requiring air Particulate free completely cleaned For portable equipment not requiring air O-ring Seal ellows, O-ring Seal ellows Seal (ellows alance) XF XFV (With solenoid valve) X XV (With solenoid valve) XD XDV (With solenoid valve) XH XS Single acting (N..) Double acting Single acting (N..) Manual Single acting (N..) x 0 5 to to to 0-6 x 0 5 to ( Size 6, 5, ) ( Size 50, 6, 80) Standard Standard Standard Standard P. to P.5 P.6 to P.9 P.0 to P.5 P.6, P.7 P.8 to P. Straight Solenoid Valve (with Metallic Seal Fitting) XS- XS- XS- XS- XS- XS-4 Valve type Piping size Direct solenoid operation (N..) /4 /8 Orifice mmø Effective sectional area mm 6 9 Heater and high temperature specifications are not available with switches. Pa=0.45 x 0 - psi MPa=45psi Operating pressure Differential pressure MPa Port Pa Internal External Fitting eakage Pa m /sec Differential Pressure: Indicates the maximum operable pressure difference between port P and port. In the case of 0.8MPa, when port is a vacuum, port P can be pressurized to 0.8MPa (7kgf/cm²). VR Fitting and Swagelok Fitting are registered trade marks of the ajon ompany and the rawford Fitting ompany Inc. respectively. 0 - VR 0 - SWJ 0-0 Service life million cycles P. to P.4

4 Series X How to Order Normally losed/ellows Seal ir Operated Type X 6 F9N High vacuum angle valve (Normally closed, bellows seal, air operated type) Flange size Flange type Symbol Type pplicable flange size D F(NW) (DN) 6, 5,, 50, 6, 80 6, 80 Indicator/ctuation port direction F J M Without indicator/flange side With indicator/flange side With indicator/eft flange surface With indicator/rear flange surface With indicator/right flange surface Without indicator/eft flange surface Without indicator/rear flange surface Without indicator/right flange surface Note) ctuation port direction (Example) eft flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. Switch quantity/ Mounting position Symbol Quantity Mounting position pcs. Valve open/closed pc. Valve open pc. Valve closed uto switch type Without auto switch (without built-in magnet) Solid state auto switches F9N D-F9N F9P D-F9P F9 D-F9 Note ) The standard lead wire length is 0.5m. For m, "" is added at the end of the part number. (Example) F9N: D-F9N Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. Temperature specifications/heater Symbol Temp. range Heater 5 to 60 (4 to F) H0 None None H 5 to 50 With heater for 80 (76 F) H (4 to 0 F) With heater for 00 ( F) H With heater for 0 (48 F) High temp. type X Option specifications/ombination table High temp. type Option specifications Indicator Without heater With heater for 80 (76 F) With heater for 00 ( F) With heater for 0 (48 F) Symbol Note) uto switches cannot be mounted in the case of high temperature types. H0 H H H X-6 X-5 X- X-50 X-6 X-80 4

5 Normally losed/ellows Seal ir Operated Type/With Solenoid Valve How to Order Series XV XV 6 F F9N High vacuum angle valve Normally closed, bellows seal, air operated type with solenoid valve Flange size Flange type Symbol Type pplicable flange size D F(NW) (DN) 6, 5,, 50, 6, 80 6, 80 Solenoid valve/indicator direction F J M With indicator/eft flange surface With indicator/rear flange surface With indicator/right flange surface Without indicator/eft flange surface Without indicator/rear flange surface Without indicator/right flange surface Note) ctuation port direction (Example) eft flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. uto switch type Without auto switch (without built-in magnet) Solid state auto switches F9N D-F9N F9P D-F9P F9 D-F9 Note ) The standard lead wire length is 0.5m. For m, "" is added at the end of the part number. (Example) F9N: D-F9N Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. Rated voltage The S type is not available for. The U type is D only. Electrical entry H M rommet (lead wire length 00mm) rommet (lead wire length 600mm) type plug connector M type plug connector 00V, 50/60Hz 00V, 50/60Hz 0V, 50/60Hz 4 0V, 50/60Hz 5 4VD 6 VD ight/surge voltage suppressor S Z Switch quantity/mounting position Symbol Quantity Mounting position pcs. Valve open/closed pc. Valve open pc. valve closed U None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (non-polar type) Note ) Option specifications/ombinations This model has indicator, auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves XV-6, 5,, 50: SYJ9 XV-6, 80: SYJ59 Example) SYJ9-S, etc. For further details on solenoid valves, refer to the SM solenoid valve catalog "SYJ 00, 500, 700" (E4-). Note ) Solenoid valves are shipped facing downward (flange side), but can be rotated to face upward. XV 5

6 Series X, XV Specifications High Vacuum ngle Valve Valve type Fluid Operating temperature Operating pressure Pa {Torr} Note ) onductance l/s eakage Pa m /s {Torr l/s} Operating time s Note ) Flange type Principle materials Surface treatment ctuation pressure MPa ctuation port size X XV Internal External X XV ctuating solenoid valve recommended v factor (X) Service life (Million cycles) Weight kg (lb) X XV Note ) onductance is the same as that of an elbow with the same dimensions. Note ) The time required for 90% valve movement when an actuation pressure of 0.5MPa {7psi} is applied. There is a difference of about 0% in this value at the upper and lower pressure limits. Note ) For valve heater specifications, refer to "ommon Option Specifications, [] Heaters" on page 7. onstruction /Operation X(V)-6 X(V)-5 X(V)- X(V)-50 X(V)-6 X(V)-80 Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (606) and SUS04/ to 60 (4 to F) [high temperature type: 5 to 50 (4 to 0 F)] 5 to 50 ( 4 to F) M5 (0- nominal) tmospheric pressure to x 0-6 {760 to 7.5 x 0-9 }. x 0-0 { x 0-9 } at ordinary temperatures, excluding gas transmission. x 0 - { x 0-0 } at ordinary temperatures, excluding gas transmission F (NW) 0.4 to 0.7 (58 to 0psi) M5 (0- nominal) Ports P, R/R Rc(PT) / F (NW), (DN) ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized Interior: Machined for clean environment Rc(PT) /8(Port P): M5(0- nominal) Ports R/R (0.55) 0.46 (.0). (.4).6 (.5).9 (6.9) 5.0 (.0) 0.9 (0.64) 0.49 (.08).4 (.5).64 (.6).96 (6.5) 5.06 (.6) P R Plate Port P (pressure port) Port R (exhaust port) Solenoid valve Heater (optional) Name plate uto switch (optional) Indicator (optional) onnet assembly (includes ) Piston seal Magnet (built-in only for auto switch) ctuation port Piston Exterior seal (maintenance part) Shaft seal With solenoid valve Options uto switch: Heater: Indicator: The magnet (0) actuates the auto switch (4) indicating the position of the integrated valve (5) and piston (8). With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only 5 to 60 (4 to F). Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0 (76, or 48 F) depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly () is a heat resistant structure. When the valve is open, an orange marker about mm in height appears in the center of the name plate (6). Valve side exhaust ellows side exhaust ellows Spring ody Valve Valve seal (maintenance part) Operation principle y applying pressure from the actuation port (7), the piston (8), which is sealed by the shaft seal () and the piston seal (9), overcomes the force of the spring (), and the valve (5) opens. With the exhaust of air pressure, the valve (5) is closed by the force of the spring () and is sealed by the valve seal (4). In the case of the XV, port P(9) is normally pressurized, and the valve (5) opens when the solenoid valve (8) is turned ON and closes when it is turned OFF. Operation is the same as that of the X. 6

7 P R High Vacuum ngle Valve Series X, XV Dimensions (mm) in = 5.4mm (b) X/ir operated type E D (a) E E Fn (F flange) Fd ( flange) (c) Heater (optional) H ø X-6 X-5 X- X-50 X-6 X D E Note ) Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page 46. Fn Fd (mm) H XV/With solenoid valve J N M Port P (pressure port) Port R (exhaust port) XV-6 XV-5 XV- XV-50 XV-6 XV-80 J M 4 4 (mm) N Other dimensions are the same as X. 7

8 Series X How to Order Normally losed/ellows Seal ir Operated Type X 6 F9N High vacuum angle valve (Double acting, bellows seal, air operated type) Flange size Flange type Symbol Type pplicable flange size D F(NW) (DN) 6, 5,, 50, 6, 80 6, 80 ctuation port direction M Flange side eft flange surface Rear flange surface Right flange surface Note) ctuation port direction (Example) eft flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. Switch quantity/mounting position Symbol Quantity Mounting position uto switch type pcs. Without auto switch (without built-in magnet) Solid state auto switches F9N D-F9N F9P D-F9P F9 D-F9 Temperature specifications/heater Symbol Temp. range Heater 5 to 60 (4 to F) None H0 None H 5 to 50 With heater for 80 (76 F) H (4 to 0 F) With heater for 00 ( F) H With heater for 0 (48 F) High temp. type Valve open/closed pc. Valve open pc. Valve closed Note ) The standard lead wire length is 0.5m. For m, "" is added at the end of the part number. (Example) F9N: D-F9N Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. X High temperature type combination table High temperature specifications Without heater With heater for 80 (76 F) With heater for 00 ( F) With heater for 0 (48 F) Symbol Note) uto switches cannot be mounted in the case of high temperature types. H0 H H H X-6 X-5 X- X-50 X-6 X-80 8

9 Normally losed/ellows Seal ir Operated Type/With Solenoid Valve How to Order Series X, XV XV 6 F9N High vacuum angle valve Double acting, bellows seal, air operated type with solenoid valve Flange size Flange type Symbol Type pplicable flange size D F(NW) (DN) 6, 5,, 50, 6, 80 6, 80 Solenoid valve direction M Note) Solenoid valve direction (Example) eft flange surface: Indicates that the direction of the solenoid valve is to the left side when the flange surface is viewed from the front. uto switch type Without auto switch (without built-in magnet) Solid state auto switches F9N F9P F9 eft flange surface Rear flange surface Right flange surface D-F9N D-F9P D-F9 Note ) The standard lead wire length is 0.5m. For m, "" is added at the end of the part number. (Example) F9N: D-F9N Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. Rated voltage 00V, 50/60Hz 00V, 50/60Hz 0V, 50/60Hz 4 0V, 50/60Hz 5 4VD 6 VD Switch quantity/mounting position Symbol Quantity Mounting position pcs. Valve open/closed pc. Valve open pc. Valve closed The S type is not available for. The U type is D only. Electrical entry H M rommet (lead wire length 00mm) rommet (lead wire length 600mm) type plug connector M type plug connector Solenoid valve action W ight/surge voltage suppressor S Z U position single position double None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (non-polar type) Note ) Option specifications/ombinations This model has auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves position single : XV-6, 5,, 50 : SYJ90 XV-6, 80 : SYJ590 position double: XV-6, 5,, 50 : SYJ90 XV-6, 80 : SYJ590 Examples) SYJ90-S SYJ90-S For further details on solenoid valves, refer to the SM solenoid valve catalog "SYJ 000, 5000, 7000" (N7). Note ) The direction of solenoid valve coils cannot be changed. XV 9

10 Series X, XV Specifications High Vacuum ngle Valve Valve type Fluid Operating temperature Operating pressure Pa {Torr} Note ) onductance l/s eakage Pa m /s {Torr l/s} Operating time s Note ) Flange type Principle materials Surface treatment ctuation pressure MPa ctuation port size onstruction/operation X XV Internal External X XV ctuating solenoid valve recommended v factor (X) Service life (Million cycles) Weight kg (lb) X XV X(V)-6 X(V)-5 X(V)- X(V)-50 X(V)-6 X(V)-80 Double acting (dual operation), pressurize to open/close Non-corrosive gas for aluminum alloy (606) and SUS04/ to 60 (4 to F) [high temperature type: 5 to 50 (4 to 0 F)] 5 to 50 ( 4 to F) M5 (0- nominal) tmospheric pressure to x 0-6 {760 to 7.5 x 0-9 }. x 0-0 { x 0-9 } at ordinary temperatures, excluding gas permeation. x 0 - { x 0-0 } at ordinary temperatures, excluding gas permeation F (NW) 0. to 0.6 {4 to 87psi} M5 (0- nominal) Ports P, R/R Rc(PT) / F (NW), (DN) ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized Interior: Machined for clean environment Rc(PT) /8(Port P): M5(0- nominal) Ports R/R (0.6) 0.46 (.0). (.4).7 (.75). (6.8) 5. (.4) 0. (0.7) 0.5 (.0).5 (.54).74 (.84).6 (6.97) 5.6 (.8) Note ) onductance is the same as that of an elbow with the same dimensions. Note ) The time required for 90% valve movement when an actuation pressure of 0.5MPa {7psi} is applied. There is a difference of about 0% in this value at the upper and lower pressure limits. Note ) For valve heater specifications, refer to "ommon Option Specifications, [] Heaters" on page 7. 0 With solenoid valve Operating principle y applying pressure from the actuating port []-(7), the piston (8), sealed by the shaft seal () and the piston seal (9), is operated opening the valve. (actuation port []-(7) is released) onversely, by applying pressure to actuation port []-(7), the piston (8), sealed by the cylinder seal () and the piston seal (9), is operated closing the valve (5) which is sealed by the valve seal (4). (actuation port []-(7) is released) In the case of the XV, port P (9) is normally pressurized, and the valve (5) opens when the solenoid valve (8) is turned ON, and closes when it is turned OFF. Moreover, in the case of a double solenoid, the valve moves to the side where the solenoid valve (8) is turned ON. Operation is the same as that of the X. For sizes 50, 6 and 80, the valve is sealed with a standard load by means of an overrun mechanism. Port R (exhaust port) Plate Port P (pressure port) Port R (exhaust port) Solenoid valve Heater (optional) Stroke Name plate uto switch (optional) onnet cover ctuation port ylinder seal onnet assembly (includes ) Maintenance parts, optional (high temperature specifications) Piston seal ctuation port Magnet (option) Piston Exterior seal (maintenance part) Shaft seal ellows side exhaust ellows ody Valve seal (maintenance part) Valve Valve side exhaust Options uto switch: The magnet (0) actuates the auto switch (4) indicating the position of the integrated valve (5) and piston (8). With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only 5 to 60 (4 to F). Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0 (76,, 48 F), depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly () is a heat resistant structure.

11 High Vacuum ngle Valve Dimensions (mm) Series X, XV in = 5.4mm (b) X/ir operated type E D (a) E E (c) Fn (F flange) Fd ( flange) Heater (optional) H J ø X-6 X-5 X- X-50 X-6 X D E Note ) Fn Fd 95 0 Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page H (mm) J XV/With solenoid valve Q Port R (exhaust port) N N With double solenoid M P Port P (pressure port) With single solenoid (mm) XV-6 XV-5 XV- XV-50 XV-6 XV M N P Q Other dimensions are the same as X.

12 Series XF How to Order Normally lossed/o-ring Seal ir Operated Type XF 6 F9N High vacuum angle valve Normally closed, O-ring seal, air operated type ( ) Flange size Flange type Symbol Type pplicable flange size D F J M F(NW) (DN) 6, 5,, 50, 6, 80 6, 80 Indicator/ctuation port direction Without indicator/flange side With indicator/flange side With indicator/eft flange surface With indicator/rear flange surface With indicator/right flange surface Without indicator/eft flange surface Without indicator/rear flange surface Without indicator/right flange surface Note) ctuation port direction (Example) eft flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. High temp. type F9N F9P F9 D-F9N D-F9P D-F9 Temperature specifications/heater Switch quantity/mounting position Symbol Quantity Mounting position pcs. pc. pc. Valve open/closed Valve open Valve closed uto switch type Without auto switch (without built-in magnet) Solid state auto switches Note ) The standard lead wire length is 0.5m. For m, "" is added at the end of the part number. (Example) F9N: D-F9N Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. Symbol Temp. range Heater 5 to 60 None (4 to F) H0 None H With heater for 80 (76 F) 5 to 50 H (4 to 0 F) With heater for 00 ( F) H With heater for 0 (48 F) XF Option specifications/ombination table High temp. type Option specifications Indicator Without heater With heater for 80 (76 F) With heater for 00 ( F) With heater for 0 (48 F) Symbol H0 Note) uto switches cannot be mounted in the case of high temperature types. H H H XF-6 XF-5 XF- XF-50 XF-6 XF-80

13 High Vacuum ngle Valve ir Operated Type How to Order Series XFV XFV 6 F F9N High vacuum angle valve Normally closed, O-ring seal, air operated type with solenoid valve F9N F9P F Symbol Type pplicable flange size F(NW) 6, 5,, 50, 6, 80 D (DN) 6, 80 F J M Flange size Flange type Solenoid valve/indicator direction With indicator/eft flange surface With indicator/rear flange surface With indicator/right flange surface Without indicator/eft flange surface Without indicator/rear flange surface Without indicator/right flange surface Note) ctuation port direction (Example) eft flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. uto switch type Without auto switch (without built-in magnet) Solid state auto switches D-F9N D-F9P D-F9 Note) The standard lead wire length is 0.5m. For m, "" is added at the end of the part number. (Example) F9N: D-F9N Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. H M S Z U Rated voltage 00V, 50/60Hz 00V, 50/60Hz 0V, 50/60Hz 4 0V, 50/60Hz 5 4VD 6 VD Switch quantity/mounting position Symbol Quantity Mounting position pcs. pc. pc. Valve open/closed Valve open Valve closed ight/surge voltage suppressor The S type is not available for. The U type is D only. Electrical entry None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (non-polar type) rommet (lead wire length 00mm) rommet (lead wire length 600mm) type plug connector M type plug connector XFV Note ) Option specifications/ombinations This model has indicator, auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves XFV-6, 5, : SYJ9 XFV-50, 6, 80: SYJ59 Example) SYJ9-S For further details on solenoid valves, refer to the SM solenoid valve catalog "SYJ00, 500, 700" (N0). Note ) Solenoid valves are shipped facing downward (flange side), but can be rotated to face upward.

14 Series XF, XFV Specifications High Vacuum ngle Valve 4 Valve type Fluid Operating temperature Operating pressure Pa {Torr} Note ) onductance l/s eakage Pa m /s {Torr l/s} Operating time ms Note ) Flange type Principle materials Surface treatment ctuation pressure MPa ctuation port size Note ) onductance is represented by the value of an elbow with the same dimensions. Note ) The operating time with no solenoid valve (XF) is the same value as the case of the solenoid valve piped directly to the bonnet, where the actuation pressure is 0.5MPa (7psi). The operating time becomes faster under high pressure. Note ) For valve heater specifications, refer to "ommon Option Specifications, [] Heaters" on page 7. onstruction/operation Operating principle y applying pressure from the actuation port (7), the piston (8), which is sealed by the shaft seal () and the piston seal (9), overcomes the force of the spring (), and the valve (5) opens. With the exhaust of air pressure, the valve (5) is closed by the force of the spring () and is sealed by the valve seal (4). In the case of the XFV, port P (9) is normally pressurized, and the valve (5) opens when the solenoid valve (8) is turned ON, and closes when it is turned OFF. Operation is the same as that of the XF. P R With solenoid valve XF XFV Internal External XF XFV XF XFV ctuating solenoid valve recommended v factor (XF) Service life (Million cycles) Weight kg (lb) XF XFV Plate Port P (pressure port) Port R (exhaust port) Solenoid valve XF(V)-6 XF(V)-5 XF(V)- XF(V)-50 XF(V)-6 XF(V)-80 Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (606) and SUS04/6 5 to 60 (4 to F) [high temperature type: 5 to 50 (4 to 0 F)] 5 to 50 ( 4 to F) M5 (0- nominal) Heater (optional) tmospheric pressure to x 0-6 {760 to 7.5 x 0-9 }. x 0-0 { x 0-9 } at ordinary temperatures, excluding gas transmission. x 0 - { x 0-0 } at ordinary temperatures, excluding gas transmission F (NW) M5 (0- nominal) Ports P, R Name plate 0.4 to 0.7 (58 to 0psi) Rc(PT) /8 F (NW), (DN) ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized Interior: Machined for clean environment Rc(PT) /8(Port P): M5(0- nominal) (Port) (0.55) 0.45 (0.99). (.4).6 (.5).0 (6.6) 4.8 (0.58) 0.9 (0.64) 0.49 (.08).4 (.5).66 (.65).06 (6.75) 4.86 (0.7) Shaft side exhaust Valve side exhaust Options For selections, refer to item, model number and option symbol table. uto switch (optional) Indicator (optional) Piston onnet assembly (includes ) Piston seal Magnet (optional) ctuation port Exterior seal (maintenance part) Shaft seal Scraper Spring ody Valve Valve seal (maintenance part) uto switch: The magnet (0) actuates the auto switch (4) indicating the position of the integrated valve (5) and piston (8). With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only 5 to 60 (4 to F). Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0 (76,, or 48 F), depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly () is a heat resistant structure. This is not available with solenoid valve. Indicator: When the valve is open, an orange marker about mm in height appears in the center of the name plate (6).

15 P R High Vacuum ngle Valve Dimensions (mm) Series XF, XFV in=5.4mm XF/ir operated type E (b) E (a) Fn (F flange) Fd ( flange) E (c) Heater (optional) ø H XF-6 XF-5 XF- XF-50 XF-6 XF D E Note ) Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page 46. Fn Fd (mm) H XFV/With solenoid valve J N M Port P (pressure port) Port R (exhaust port) XFV-6 XFV-5 XFV- XFV-50 XFV-6 XFV-80 J Other dimensions are the same as XF. M (mm) N 5

16 Series X, XV ir Operated Type How to Order Double cting/o-ring Seal X 6 F9N High vacuum angle valve Double acting, O-ring seal, air operated type Flange size Symbol Type pplicable flange size F(NW) 6, 5,, 50, 6, 80 D (DN) 6, 80 M Flange type ctuation port direction Flange side eft flange surface Rear flange surface Right flange surface Note) ctuation port direction (Example) eft flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. F9N F9P F9 pcs. pc. pc. D-F9N D-F9P D-F9 Temperature specifications/heater Symbol Temp. range Heater 5 to 60 None (4 to F) H0 H 5 to 50 None With heater for 80 (76 F) H H (4 to 0 F) With heater for 00 ( F) With heater for 0 (48 F) High temp. type Switch quantity/mounting position Symbol Quantity Mounting position uto switch type Valve open/closed Valve open Valve closed Without auto switch (without built-in magnet) Solid state auto switches Note ) The standard lead wire length is 0.5m. For m, "" is added at the end of the part number. (Example) F9N: D-F9N Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. High temperature type combination table High temperature specifications Without heater With heater for 80 (76 F) With heater for 00 ( F) With heater for 0 (48 F) Note) uto switches cannot be mounted in the case of high temperature types. Symbol X-6 X-5 X- X-50 X-6 X-80 H0 H H H X 6

17 Double cting/o-ring Seal ir Operated Type/with Solenoid Valve How to Order Series X, XV XV 6 F9N High vacuum angle valve Double acting, O-ring seal, air operated type with solenoid valve F9N F9P F9 Flange size Symbol Type pplicable flange size F(NW) 6, 5,, 50, 6, 80 D (DN) 6, 80 M Flange type Solenoid valve direction eft flange surface Rear flange surface Right flange surface Note) Solenoid valve direction (Example) eft flange surface: Indicates that the direction of the solenoid valve is to the left side when the flange surface is viewed from the front. uto switch type Without auto switch (without built-in magnet) Solid state auto switches D-F9N D-F9P D-F9 Note ) The standard lead wire length is 0.5m. For m, "" is added at the end of the part number. (Example) F9N: D-F9N Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. H M S Z Solenoid valve action position single W position double Rated voltage 00V, 50/60Hz 00V, 50/60Hz 0V, 50/60Hz 4 0V, 50/60Hz 5 4VD 6 VD Switch quantity/mounting position Symbol Quantity Mounting position pcs. Valve open/closed pc. pc. Valve open Valve closed ight/surge voltage suppressor U The S type is not available for. The U type is D only. Electrical entry None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (non-polar type) rommet (lead wire length 00mm) rommet (lead wire length 600mm) type plug connector M type plug connector Note ) Option specifications/ombinations This model has auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves position single: XV-6, 5, : SYJ90 XV-50, 6, 80: SYJ590 position double: XV-6, 5, : SYJ90 XV-50, 6, 80: SYJ590 Examples) SYJ90-S SYJ90-S For further details on solenoid valves, refer to the SM solenoid valve catalog "SYJ 000, 5000, 7000" (N7). Note ) The direction of solenoid valves cannot be changed. XV 7

18 Series X, XV Specifications High Vacuum ngle Valve 8 Valve type Fluid Operating temperature Operating pressure Pa {Torr} Note ) onductance l/s eakage Pa m /s {Torr l/s} Operating time ms Note ) Flange type Principle materials Surface treatment ctuation pressure MPa ctuation port size Note ) onductance is the same as that of an elbow with the same dimensions. Note ) The operating time with no solenoid valve (X) is the same value as the case of the solenoid valve piped directly to the bonnet, where the actuation pressure is 0.5MPa (7psi). The operating time becomes faster under high pressure. Note ) For valve heater specifications, refer to "ommon Option Specifications, [] Heaters" on page 7. onstruction/operation Operating principle y applying pressure from the actuating port []- (7), the piston (8), sealed by the shaft seal () and the piston seal (9), is operated opening the valve (actuation port []-(7) is released). onversely, by applying pressure to actuation port []-(7), the piston (8), sealed by the cylinder seal () and the piston seal (9), is operated closing the valve (5) which is sealed by the valve seal (4) (actuation port []-(7) is released). In the case of the XV, port P (9) is normally pressurized, and the valve (5) opens when the solenoid valve (8) is turned ON, and closes when it is turned OFF. Moreover, in the case of a double solenoid, the valve moves to the side where the solenoid valve (8) is turned ON. Operation is the same as that of the X. For sizes 50, 6 and 80, the valve is sealed with a standard load by means of an overrun mechanism. X XV Internal External X XV X XV ctuating solenoid valve recommended v factor (X) Service life (Million cycles) Weight kg (lb) X XV Port R (exhaust port) Plate Port P (pressure port) Port R (exhaust port) Solenoid valve X(V)-6 X(V)-5 X(V)- X(V)-50 X(V)-6 X(V)-80 Double acting (dual operation), pressurize to open/close Non-corrosive gas for aluminum alloy (606) and SUS04/6 5 to 60 (4 to F) [high temperature type: 5 to 50 (4 to 0 F)] 5 to 50 (4 to F) M5 (0- nominal) Heater (optional) tmospheric pressure to x 0-6 {760 to 7.5 x 0-9 }. x 0-0 { x 0-9 } at ordinary temperatures, excluding gas transmission. x 0 - { x 0-0 } at ordinary temperatures, excluding gas transmission F (NW) Name plate 0. to 0.6 (4 to 87psi) M5 (0- nominal) Ports P, R/R Rc(PT) /8 F (NW), (DN) ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized Interior: Machined for clean environment Rc(PT) /8(Port P): M5(0- nominal) (Ports R/R) (0.6) 0.46 (.0). (.4).7 (.74). (6.8) 5. (.4) 0. (0.7) 0.5 (.0).4 (.5).76 (.88).6 (6.97) 5.6 (.8) uto switch (optional) onnet cover ctuation port ylinder seal Piston onnet assembly (includes ) Piston seal ctuation port Magnet (optional) Exterior seal (maintenance part) Shaft seal Scraper Shaft side exhaust ody Valve Valve seal (maintenance part) Options Valve side exhaust uto switch: The magnet (0) actuates the auto switch (4) indicating the position of the integrated valve (5) and piston (8). With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only 5 to 60 (4 to F). Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0 (76,, 48 F) depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly () is a heat resistant structure. This is not available with solenoid valve.

19 High Vacuum ngle Valve Dimensions (mm) Series X, XV in=5.4mm (b) X/ir operated type E D (a) E E (c) Fn (F flange) Fd ( flange) Heater (optional) H J ø X-6 X-5 X- X-50 X-6 X D Note E Note ) E) Fn Fd H (mm) J Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page 46. XV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P Port P (pressure port) M With single solenoid XV-6 XV-5 XV- XV-50 XV-6 XV-80 N Other dimensions are the same as X. (mm) M MN QP QP

20 Series XD, XDV Smooth Exhaust Valve Normally losed/ellows, O-ring Seal How to Order ir Operated Type XD 5 F9N High vacuum angle valve Smooth exhaust valve, normally closed, air operated type Flange size Flange type Symbol Type pplicable flange size F(NW) 5,, 50, 6, 80 D (DN) 6, 80 ctuation port direction M Flange side eft flange surface Rear flange surface Right flange surface Note) ctuation port direction (Example) eft flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. Symbol Quantity Mounting position pcs. pc. pc. oth sides Valve open Valve closed uto switch type Without auto switch (without built-in magnet) Solid state auto switches F9N F9P F9 D-F9N D-F9P D-F9 Temperature specifications/heater Switch quantity/mounting position Symbol Temp. range Heater H0 5 to 60 (4 to F) None None H 5 to 50 With heater for 80 (76 F) H (4 to 0 F) With heater for 00 ( F) H With heater for 0 (48 F) High temp. type Note ) The standard lead wire length is 0.5m. For m, "" is added at the end of the part number. (Example) F9N: D-F9N Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. High temperature type combination table High temp. specifications Without heater With heater for 80 (76 F) With heater for 00 ( F) With heater for 0 (48 F) Symbol Note) uto switches cannot be mounted in the case of high temperature types. H0 H H H XD-5 XD- XD-50 XD-6 XD-80 XD 0

21 Smooth Exhaust Valve Normally losed/ellows, O-ring Seal ir Operated Type/with Solenoid Valve How to Order Series XD, XDV XDV 5 F9N High vacuum angle valve Smooth exhaust valve, normally closed, air operated type with solenoid valve Flange size Flange type Symbol Type pplicable flange size F(NW) 5,, 50, 6, 80 D (DN) 6, 80 H M ight/surge voltage suppressor S Z U Electrical entry None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (non-polar type) The S type is not available for. The U type is D only. rommet (lead wire length 00mm) rommet (lead wire length 600mm) type plug connector M type plug connector Solenoid valve direction M Solid state auto switches F9N F9P F9 eft flange surface Rear flange surface Right flange surface Note) Solenoid valve direction (Example) eft flange surface: Indicates that the direction of the solenoid valve is to the left side when the flange surface is viewed from the front. uto switch type (for main exhaust valve) Without auto switch (without built-in magnet) D-F9N D-F9P D-F9 Symbol Quantity pcs. pc. pc. Rated voltage 00V, 50/60Hz 00V, 50/60Hz 0V, 50/60Hz 4 0V, 50/60Hz 5 4VD 6 VD Switch quantity/mounting position Mounting position Valve open/closed Valve open Valve closed Note ) The standard lead wire length is 0.5m. For m, "" is added at the end of the part number. (Example) F9N: D-F9N Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. Note ) Option specifications/ombinations This model has indicator, auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves Initial exhaust valve Main exhaust valve Example XDV-5 SY4 SY4-S XDV-, 50, 6, 80 SY4 SYJ4 SYJ4-S For further details on solenoid valves, refer to the SM solenoid valve catalogs "SY00" (N9) and "SYJ 00, 500, 700" (N0) XDV

22 Series XD, XDV Specifications High Vacuum ngle Valve Valve type Fluid Operating temperature Operating pressure Pa {Torr} onductance l/s eakage Pa m /s {Torr l/s} Operating time s Flange type Principle materials Surface treatment Note ) Note ) ctuation pressure MPa ctuation port size XD XDV Main exhaust valve Initial exhaust valve XD XDV ctuating solenoid valve Main exhaust valve recommended v factor (XD) Initial exhaust valve Service life (Million cycles) Weight kg (lb) Main exhaust valve Initial exhaust valve Internal External XD XDV XD(V)-5 XD(V)- XD(V)-50 XD(V)-6 XD(V)-80 Normally closed (spring return & seal) [both main & initial exhaust valves] Non-corrosive gas for aluminum alloy (606) and SUS04/6 5 to 60 (4 to F) [high temperature type: 5 to 50 (4 to 0 F)] 5 to 50 (4 to F) tmospheric pressure to x 0-6 {760 to 7.5 x 0-9 } to to 8.5 to 4 to 8 4 to 8. x 0-0 { x 0-9 } at ordinary temperatures, excluding gas permeation. x 0 - { x 0-0 } at ordinary temperatures, excluding gas permeation F (NW) ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized 0.4 to 0.7 (58 to 0.50psi) [both main & initial exhaust valves] M5(0- nominal) Rc(PT) /8 M5(0- nominal) Ports P, R F (NW), (DN) Interior: Machined for clean environment (.0). (.65).8 (.97).4 (7.50) 5.6 (.5) 0.57 (.6). (.87).9 (4.9).5 (7.7) 5.7 (.57) Note ) The main exhaust valve conductance is the value for the molecular flow of an elbow having the same dimensions. The initial exhaust valve conductance is the value for the viscous flow. Note ) The time required for 90% valve movement when an actuation pressure of 0.5MPa (7psi) is applied. There is a difference of about 0% in this value at the upper and lower pressure limits. Note ) For valve heater specifications, refer to "ommon Option Specifications, []Heaters" on page 7.

23 High Vacuum ngle Valve onstruction/operation Series XD, XDV Initial exhaust solenoid valve Main exhaust solenoid value Plate Port P (pressure port) Port R (exhaust port) Name plate Heater (optional) "" uto switch (optional) djustment nut djustment screw onnet assembly (optional/high temp. specs.) ctuation port S (for initial exhaust) Piston S (for initial exhaust) Piston M (for main exhaust) ctuation port M (for main exhaust) Magnet Exterior seal (maintenance part) Spring S ody ellows With solenoid valve ellows side exhaust Operating principle Initial exhaust valve opening adjustment The initial exhaust rate should be adjusted before operation. With actuation port S (0) in an unpressurized state on model XD, or with initial exhaust solenoid valve (5) in the OFF state on model XDV, the initial exhaust rate is set to zero by gently turning the adjustment nut (6) to the right until it stops. fter confirming the position of the angle adjustment scale on the name plate (5) and the angle adjustment mark on the adjustment nut (6), the initial exhaust rate is adjusted by turning the nut to the left. The pitch of the adjustment screw (9) is mm. The number of turns and initial exhaust conductance should be confirmed referring to the figure on the right. space is established between the end of the adjustment screw (9) and the shaft of valve S (8), which regulates the amount of movement of the piston S (). The initial exhaust conductance is determined by the amount of opening between valve S (8) and the valve seal S []- (4). Further turning is prevented by locking after adjustment. When the initial exhaust rate will not be adjusted, or when it will be set at a fixed rate, it can be locked by tightening the Section "" screw with a torque of approximately 5kgf cm. Operation of the initial exhaust valve The left section in the drawing shows the initial exhaust valve in a closed condition. When pressure is applied to the actuation port S (0) on model XD, or the initial exhaust solenoid valve (5) is turned ON with port P () in a pressurized state on model XDV, air follows the dotted line passing through the space by the shaft and fills the area below the piston S (). Piston S () is stopped when it strikes the adjustment screw (9). Through the movement of piston S (), the valve S (8) is removed from the valve S seal assembly []-(4), and initial exhaust takes place through the passage S(7). Operation of the main exhaust When pressure is applied the the actuation port M (7) on model XD, or the main exhaust solenoid valve (6) is turned ON with port P in a pressurized state on model XDV, the piston M (8) moves upward opening valve M (). Port S (0) remains pressurized and valve S (8) remains open. losing of both valves y removing pressure from actuation port S (0) and actuation port M (7) on model XD, or turning OFF initial exhaust solenoid valve (5) and main exhaust solenoid valve (6) on model XDV, the force of spring S (6) and spring M () cause valve S (8) and valve M () to contact their respective valve seats and seals, thereby sealing them. Initial exhaust valve conductance l/s (viscous flow) Valve side exhaust XD-5 Spring M Passage S Valve seal M (maintenance part) Valve M Valve S Valve seal S (maintenance part) Valve seat S XD- XD djustment nut rotations n Initial exhaust valve conductance setting XD-6-80 Options uto switch: The magnet () actuates the auto switch (4) indicating (for main the position of the integrated valve M () and the piston exhaust valve) M (8). With two auto switches, the open and closed positions are detected, and with one auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only 5 to 60 Heater: (4 to F). Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0 (76,, or 48 F), depending on the heater option and valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly () is a heat resistant structure. This is not available with solenoid valve.

24 Series XD, XDV Dimensions (mm) High Vacuum ngle Valve in=5.4mm XD/ir operated type E (b) E D (a) Fn (F flange) Fd ( flange) E (c) Heater (optional) ø H J (mm) XD-5 XD- XD-50 XD-6 XD D E Fn Fd H J Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page 46. 4

25 High Vacuum ngle Valve Dimensions (mm) Series XD, XDV in=5.4mm XDV-5/With solenoid valve XDV- to 80/With solenoid valve Fn (F flange) Fd ( flange) Fn (F flange) Fb ( flange) Port R (exhaust port) Initial exhaust solenoid valve Main exhaust solenoid valve ø Port P (pressure port) Max 0.5 (except connector) Max 0.5 (except connector) M Port R (exhaust port) Solenoid valve for initial exhaust N Solenoid valve for main exhaust ø Fn Fd M N XDV XDV- XDV-50 XDV-6 XDV Port P (pressure port) (mm)

26 Series XH How to Order Manual Valve ellows Seal XH 6 High vacuum manual angle valve (ellows seal) Flange size Heater Symbol Heater type None H With heater for 80 (76 F) H With heater for 00 ( F) H With heater for 0 (48 F) Heater combination table Setting temperature Symbol 80 (76 F) H 00 ( F) H 0 (48 F) H Note) Heater cannot be retrofitted. XH-6 XH-5 XH- XH-50 Specifications XH-6 XH-5 Fluid Operating temperature Operating pressure Pa {Torr} onductance l/s eakage Pa m /s {Torr l/s} Flange type Principle materials Surface treatment Handle revolutions Note ) Internal External ctuation torque N m {kgf cm} Service life (Million cycles) Weight kg (lb) Note ) The conductance is the same as that of an elbow of the same dimensions. Note ) For valve heater specifications, refer to "ommon Option Specifications, [] Heaters" on page 7. Non-corrosive gas for aluminum alloy (606) and SUS04/6 5 to 50 (4 to 0 F) tmospheric pressure to 0-6 {760 to 7.5 x 0-9 }. x 0-0 { x 0-9 } at ordinary temperatures, excluding gas transmission. x 0 - { x 0-0 } at ordinary temperatures, excluding gas transmission F (NW) ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized Interior: Machined for clean environment 0. XH- XH { } 0.5 {.5 } 0.5 {.5 } 0.5 {5 } (0.5) 0.4 (0.90).05 (.).6 (.57) 6

27 Manual Valve ellows Seal onstruction/operation Series XH Name plate Indicator Handle Heater (optional) Operating Precautions When the handle is turned to the right, the valve proceeds to close. When turning can no longer be felt in the handle, the valve is completely seated. Use caution, as there is a danger of breaking the handle if it is tightened forcefully beyond this point. Handle assembly (includes ) (maintenance part) Helium port Exterior seal (maintenance part) Operation aution Plate ellows side exhaust Spring ellows Valve Operating Precautions When the handle is turned to the right, the valve closes. When turning can no longer be felt in the handle, the valve is completely seated. Use caution, as there is a danger of breaking the handle if it is tightened forcefully beyond this point. Operating principle Valve side exhaust y turning the handle (9) to the left, the valve (6) opens. The handle (9) does not move up and down, but the indicator () shows the open or closed position of the valve. s the handle (9) is turned to the right, the valve (6) closes, and when the turning force of the handle (9) suddenly ceases to be felt, the valve (6) is sealed. The sealing force for the valve (6) comes from the spring (5), and is constant. Dimensions (mm) in=5.4mm E Valve seal (maintenance part) ody Options (b) D Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0 (76, or 48 F), depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. Indicator: When the valve is open, an orange marker appears in the center of the name plate (8). (a) E E (c) F Heater (optional) ø XH-6 XH-5 XH- XH Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page 46. D E Note ) F (mm)

28 Series XS How to Order Electromagnetic Type ellows Pressure alance Starting voltage 5 4VD 9 Other (48VD, 00VD) Note) Holding voltage is 5% of starting voltage. Electrical entry T D rommet onduit Terminal DIN terminal Without control power supply With control power supply XS 5 5 XS 5 P High vacuum angle valve ellows pressure balance, stage voltage switching type 6 5 Valve size F6 F5 ontrol power supply P With control power Voltage Electrical entry 00V 00V 5 4VD rommet Warning () In case there is no control power supply (XS-5- : 4/48/00VD), starting voltage should be applied for only 0.5 to 0.s, in accordance with the prescribed method (indicated on the back of the coil). ontinuously applying starting voltage can cause overheating of the coil and fire. Holding voltage is 5% of the starting voltage (the application method is shown on the back of the solenoid coil). Example) Starting voltage Voltage 6VD 4VD Holding voltage 0.5 to 0. Time s 8

29 High Vacuum ngle Valve Specifications Series XS XS-6 XS-5 XS-6-P Valve type Fluid Operating temperature Operating pressure Pa {Torr} onductance l/s eakage Pa m /s {Torr l/s} Flange type/size Principle materials Surface treatment ontrol power supply Operating power supply voltage llowable voltage fluctuation % Initial Power consumption W Holding Initial urrent consumption Holding Electrical entry oil insulation Maximum operating frequency Service life (Million cycles) Weight kg (lb) Internal External onstruction/operation Non-corrosive gas for aluminum alloy (606) and stainless steel (SUS5 equiv.). x 0-8 { x 0-7 } at ordinary temperatures, excluding gas permeation. x 0 - { x 0-0 } at ordinary temperatures, excluding gas permeation No 4/6, 48/, 00/4VD Normally closed (N..) 5 to (4 to 04 F) 0.M to x 0-6 {.5k to 7.5 x 0-9 } ±0 4VD Yes 00/00V,, D, T type type only lass 0 c.p.m XS-5-P F6 F5 F6 F5 ody : luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized Interior Machined for clean environment (0.88) 0.7 (.54) 0.7 (.54).0 (.0) Stroke Valve side exhaust Retainer oil assembly (maintenance part) ore assembly (maintenance part) rmature assembly (includes ) (maintenance part) over ore O-ring (maintenance part) Exterior onnet-o-ring }seal (maintenance part) Spring ellows ellows side exhaust Valve ody Operating principle y energizing the coil assembly () for 0.5 to 0.s with the starting voltage, the armature assembly (4) overcomes the reactive force of the spring (7) and is adsorbed to the core assembly (6), opening the valve (9). fter that, it is held with 5% of the starting voltage (when there is no power supply). (When there is a power supply, the activating voltage only is applied to the coil assembly ().) When energizing of the coil assembly () is canceled, the armature assembly (4) is separated from the core assembly (6) by the reactive force of the spring (7), closing the valve (9). Note ) The fixed seals between the interior of the body (0) and the atmosphere are the exterior seals (), and the drive section is sealed by the bellows (8). Note ) Since the seal diameter of the valve (9) and the effective pressure receiving diameter of the bellows (8) are the same, pressure is in balance and the bellows side can also be used for exhaust. 9

30 Series XS Dimensions (mm) in=5.4mm High Vacuum ngle Valve XS/Without control power supply rommet () D onduit () J 70±0 (PF)/ Terminal (T) J ± 5 (PF)/ DIN terminal (D) J øf D øe J H 90±0 (PF)/ ø6 to 9 XS-6- XS-6- XS-6- D XS-6- T XS-5- XS-5- XS-5- D XS-5- T D 8 48 E 0 F H J (mm)

31 High Vacuum ngle Valve Dimensions (mm) Series XS in=5.4mm XS/With control power supply rommet () H D 4 øe J 50 ±0 øf 7 XS-6-P XS-5-P D 8 48 E 0 F H 0 5 (mm) J

32 Series XS Normally losed Type High Vacuum Straight Solenoid Valve How to Order XS S 5 Normally closed high vacuum straight solenoid valve Solenoid size No. No. No. Orifice symbol ø ø ø4.5 4 ø6 Refer to table below for applications. V S Fitting size /4 /8 Refer to table below for applications. Fitting Type VR Swagelok VR Fitting and Swagelok Fitting are registered trademarks of the ajon ompany and the rawford Fitting ompany Inc. respectively. 5 Electrical entry T D Spacer Electrical options S Z 00V (with rectifier) 4VD 6 VD 9 Other (6VD, 48VD, 00VD) None With spacer Refer to Table below in case spacers only are required separately. None With surge voltage suppressor With light With light/surge voltage suppressor Refer to Table below for applications. Refer to Table below for applications. Voltage rommet onduit Terminal DIN terminal Refer to Table below for applications. Table :, Fitting size, Orifice Solenoid valve model (fitting size) XS (/4) XS (/4) XS (/4) (/8) (ø) Orifice symbol (diameter) (ø) (ø4.5) 4 (ø6) Table : Spacer part nos. Part No. XS XS-8-4 XS XS-8-4 XS Table : Voltage, Electrical entry, Electrical options Electrical entry Electrical options S (00V) D 5(4V) 6(V) D, T S, Z

33 High Vacuum ngle Valve Specifications Series XS XS- XS- XS- ction Fluid Orifice diameter mmø v factor Note ) ctuation pressure difference MPa Reverse pressure potential MPa Port pressure Pa Internal eakage Pa m /s External {Torr l/s} VR Fitting Swagelok Piping connection system onnection size Operating temperature Power consumption W Service life (Million cycles) Note ) Non corrosive gas for stainless steel (SUS5 equivalent). x 0-9 { x 0-8 } at ordinary temperatures, excluding gas permeation. x 0 - { x 0-0 } at ordinary temperatures, excluding gas permeation. x 0 - { x 0-0 }. x 0-0 { x 0-9 } VR/SWJ (Swagelok) 5 to (4 to 04 F) Note ) The actuation pressure difference indicates the difference between Port P (high pressure side) and Port (low pressure side). Example) In the case of 0.MPa, Port is a vacuum (Torr or less), while Port P can be pressurized to 0.MPa (9psi). Note ) Reverse pressure potential indicates the pressure which can be applied from Port when Port P is at atmospheric pressure. Note ) Indicates case of grommet type electrical entry. XS- XS- XS-4 Normally closed direct acting port solenoid valve /4 x 0-6 Rated voltage 00V (with full wave rectifier) 6//4/48/00VD 5 8 llowable voltage fluctuation % ±0 Weight kg (lb) 0. (0.66) 0.5 (.0) 0.6 (.) /8 onstruction/operation Stroke OUT IN Retainer (maintenance part) oil assembly (maintenance part) ore assembly (maintenance part) rmature assembly (includes (6)(7), maintenance part) Exterior seal (maintenance part) Spring (maintenance part) Operating principle y energizing the coil assembly (), the armature assembly (4) overcomes the composite force, consisting of the force acting on the valve (7) due to differential pressure and the reactive force of the spring (6), and is adsorbed to the core assembly (), opening the valve (7). When energizing of the coil assembly () is canceled, the armature assembly (4) is separated from the core assembly () by the reactive force of the spring (6), closing the valve (7). P Valve ody (for Swagelok ) ody (for VR ) Options Spacer: spacer used to raise the body when fastening it onto a flat area. P Spacer (optional)

34 Series XS Dimensions (mm) in=5.4mm High Vacuum ngle Valve Electrical entry rommet () Electrical entry onduit () F 70±0 F 90±0 D H (PF)/ DIN terminal (D) F J H OUT P H IN E (PF)/ ø6 to 9 (body dimension) (s) (XS - S) P () -M5 Thread depth M P (fitting size) Terminal (T) F ± J 5 H (XS - V) Spacer 5 (PF)/ (mm) XS- S(V) XS- S(V) XS-S(V) XS-4S(V) ( ) are VR type 4(5) 46.5(57) 46.5(57) 50(66) s Swagelok type D 0 5 E F rommet H onduit H Terminal H J XS- S(V) XS- S(V) XS-S(V) XS-4S(V) DIN terminal H J M P (Unit: inch) /4 /4 /4 /8 4

35 High Vacuum ngle Valve With pilot pressure at 0.5MPa (7psi) Series X Valve type Normally closed X Double acting (dual operation) X ellows seal T msec T msec Size Size Valve type Normally closed XF Double acting (dual operation) X O-ring seal T msec T msec Size Size Valve type Exhaust Normally closed XD Initial exhaust valve Smooth exhaust valve T msec Size Size Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) 5

36 Series X s a function of pilot pressure Valve type Normally closed X- High Vacuum ngle Valve MPa = 45 psi Double acting (dual operation) X ellows seal T msec 00 T msec P MPa P MPa Valve type Normally closed XF- Double acting (dual operation) X O-ring seal T msec T msec P MPa P MPa Valve type Main valve Normally closed XD- Initial exhaust valve Smooth exhaust valve T msec 0 00 T msec P MPa P MPa _ Response time when open (including pnematic valve) _ Operation time when open (vacuum valve only) _ Response time when closed (including pnematic valve) _ Operation time when closed (vacuum valve only) 6

37 ommon Option Specifications Series X Heaters Valve heaters are common for models X, X, XD, XF, X and XH. Power consumption specifications are shown in the table below. Item X -5 X - X -50 X -6 X -80 Rated heater voltage Heater power W (nominal value) In-rush/Normal (Option symbol) H 80 (76 F) H 00 ( F) H 0 (48 F) 90 to 5V 00/0 00/0 0/ 0/60 600/00 00/ 00/60 0/00 600/50 00/0 0/70 0/80 600/0 800/80 Note) In-rush current will flow to the heater for approximately 0 seconds and will then subside. Refer to Maintenance Parts on page 46 for further details regarding quantity and type. Solid State uto Switches Specifications of applicable auto switches are shown below. n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or at a position where it lightly touches a stopper or the valve body (depending on the valve size) for detection of valve closing. uto Switch Specifications uto Switch Internal ircuits D-F9N D-F9P Main switch circuit Main switch circuit (+) rown [Red] Output lack [White] () lue [lack] (+) rown [Red] Output lack [White] () lue [lack] uto switch part no. Electrical entry Wiring system Output system pplicable load D-F9N D-F9P D-F9 ateral wire wire NPN type PNP type 4VD relay, P Power supply voltage /4VD (0 to 8VD) urrent consumption 8m or less 0m or less oad voltage 8VD or less 4VD (0 to 8VD) oad current 50m or less 5 to 0m Internal voltage drop 0.4V or less.5v or less 4.5V or less eakage current 0µ or less at 4VD m or less at 4VD Indicator light Red ED lights up when ON Operating time... ms or less ead wires... Oil resistant heavy duty vinyl cord, ø.7, 0.5m D-F9N, D-F9P 0.5mm² x wires (brown, black, blue [red, white, black]) D-F9 0.8mm² x wires (brown, blue [red, black]) Impact resistance m/s²{0} Insulation resistance... 50MΩ or more with 500VD between lead wire and case Withstand voltage V for min. (between lead wire and case) mbient temperature... 0 to 60 (4 to F) Indicator light... ights up when ON Enclosure... IE59 Standard IP67 watertight (JISO90) For a lead wire length of m, "" is added at the end of the part number. Example) D-F9N uto Switch Dimensions (mm) in=5.4mm D-F9N, D-F9P, D-F9 D-F9 (+) rown [Red] Main switch circuit () lue [lack] Part No. D-F9N D-F9P D-F9 dimension (mm)