Stainless Steel High Vacuum Angle/In-line Valve

Transcription

1 Stainless Steel igh Vacuum ngle/in-line Valve XM, XY Series ody material: SS3 (conforms to Stainless steel 304) precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve. Lightweight & compact ngle type/ XM Series XM series with flange Weight onductance (kg) (L/s) XM-6 XM-5 XM- XM XM XM : ommon to all series. Piping example In-line type XY Series ombination of piping allows space saving. XL Q - XS XV XT YV 479

2 Series Variations pplication ir operated Shaft seal system s ngle type In-line type XM XY Valve type Operating pressure Pa 6 Flange size 5 63 Options high temp. Switch Indicator specification Single acting (N..) Note) Particulate free ellows seal XM XY ouble acting tmospheric pressure to x 0-6 Note) XM XY Reduces particulates liminates pump overload ellows, O-ring seal Single acting (N..) Standard PT. PT. Manual XM XY Particulate free ellows seal Note) tmospheric Manual pressure to x 0-6 Standard Standard Please contact SM for with solenoid valve. Note) The in-line valve is not available in flange size 6. ellows seal, Single acting: XM, XY ellows seal, ouble acting: XM, XY ellows type is particulate free and completely cleaned. Pressure balancing mechanism. stage control, Single acting: XM, XY Initial stage exhaust valve and main exhaust valve are combined. (flow rate -step control valve) esigned with a compact system and reduced piping. Prevents particulate turbulence inside the chamber during exhaustion. Prevents pumps from running while overloaded. Initial exhaust valve flow is adjustable and adjustment can be locked. ellows seal, Manual operation: XM, XY ellows type is particulate free and completely cleaned. Pressure balance mechanism allows unrestricted exhaust direction. Low actuation torque (0.5 N m or less). Spring provides standard sealing load. andle height is the same when valve is open or closed. Indicator to confirm opening and closing of valve is standard equipment. 4

3 Stainless steel igh Vacuum ngle/in-line Valve Normally losed/ellows Seal XM, XY Series q Flange size Size e Indicator/Pilot port direction XM F K L M ngle type In-line type Indicator Pilot port direction Without indicator Flange side Flange side Left flange surface With indicator Rear flange surface Right flange surface XM Left flange surface Without indicator Rear flange surface Right flange surface Flange side r Temperature specifications 0 Temperature range 5 to 60 5 to y Number of auto switches/etecting position Quantity Without auto switch pcs. pc. pc. etecting position Valve open/closed Valve open Valve closed u Seal material and its changed part Seal material Seal material FKM N PM P arrel Perfluoro Kalrez Q R R R3 S T U hemraz XM XY VMQ FKM for Plasma ULTI RMOR ompound No W 79 SS59 SS630 SS U46 Produced by Mitsubishi able Industries, Ltd. arrel Perfluoro is a registered trademark of Matsumura Oil o., Ltd. Kalrez is a registered trademark of. I. du Pont de Nemours and ompany or its affiliates. hemraz is a registered trademark of reene, Tweed Technologies, Inc. ULTI RMOR is a registered trademark of Nippon Valqua Industries, Ltd. Left flange surface q w e r t y w Flange type XM XY XY Rear flange surface ow to Order 6 M9N 5 M9N Right flange surface Type K (N) F K (N) XY Indicator Pilot port direction F Without indicator Rear flange side Rear flange side With indicator Left flange surface Right flange surface K Left flange surface Without indicator M Right flange surface t uto switch type uto switch M9N(M)(L)(Z) -M9N(M)(L)(Z) M9P(M)(L)(Z) -M9P(M)(L)(Z) M9(M)(L)(Z) -M9(M)(L)(Z) 90(L) -90(L) 93(M)(L)(Z) -93(M)(L)(Z) pplicable flange size 6, 5,,, 63, 63, 6 (034), (0), 63 (4) 5,,, 63, 63, Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Flange size 6 is not available.) M9// Without auto switch (with built-in magnet) uto switches are not applicable for high-temperature specifications (Temperature specification 0). Standard lead wire length is 0.5 m. dd L to the end of the part number when 3 m is desired, M when m, and Z when 5 m. x.) -M9NL Part numbers indicating changed seal material and leakage hanged Leakage (Pa m 3 /s or less) Note ) part Note ) Internal xternal w, e w e.3 x 0-0 (FKM).3 x x x 0-0 (FKM).3 x 0 - (FKM).3 x x 0 - (FKM).3 x 0-9 Note ) Values at ambient temperatures, excluding gas permeation. Note ) Refer to parts number of onstruction on the page 48 for changed part. Number indicates parts number of onstruction accordingly. Left flange surface Note) The XMV and XYV series with solenoid valve are also available. Please contact SM for details. Rear flange surface Flange side To order something else (standard), list the symbols starting with X, followed by each symbol for seal material and then changed parts at last. x.) XM-6-M9N-XN u Right flange surface 48 XL Q - XS XV XT YV

4 XM, XY Series Specifications Flange (valve) size Valve type Fluid Operating temperature ( ) Operating pressure (Pa)(abs) onductance (L/s) Note ) Internal Leakage (Pa m 3 /s) xternal Operating time (s) Flange type XM-6 XM-5 XY-5 XM- XY- XM- XY- XM-63 XY-63 XM- XY- 6, F034 5, F0 63, F4 Normally closed (Pressurize to open, spring seal) Inactive gas under vacuum 5 to 60 (igh temperature type: 5 to ) x 0-6 up to atmospheric pressure x 0-0 { x 0-0 } at ambient temperature, excluding gas permeation (Standard material: FKM).3 x 0 - { x 0 - } at ambient temperature, excluding gas permeation (Standard material: FKM) , F, F, K (N), F, K (N) Principle materials Pilot pressure (MPa)() Pilot port size Weight (kg) Note ) XM XY Note ) onductance is the value for the molecular flow of an elbow having the same dimensions. Note ) Figures in ( ) indicates the weight of F (conflate) fittings. ody: SS3 (onforms to Stainless steel 304) ellows: Stainless steel 36L ellows holder: Stainless steel 304. FKM (Standard seal material) 0.4 to 0.7 M5 Rc / (0.37) 0.6. (.76) (4.96) onstruction XM/ngle type XY/In-line type uto switch (Option) q onnet assembly (Maintenance part) (Includes w, t, y, u) Magnet (Option) Pilot port u ellows holder (Material: Stainless steel 304) e xterior seal (Maintenance part) ellows side exhaust y ellows (Material: Stainless steel 36L) ellows side exhaust t Valve (Material: Stainless steel 304) w Valve seal (Maintenance part) r ody (Material: SS3) Valve side exhaust Valve side exhaust Refer to page 497 for maintenance parts. 48

5 Stainless steel igh Vacuum ngle/in-line Valve XM, XY Series imensions XM/ngle type øl øfd øfc L (øfc) (K flange) (F flange) ø XM-6 XM-5 XM- XM- XM-63 XM Fd 95 0 Fc P.. L P.. 7 P P.. 9. L 6 x ø4.4 6 x ø6.6 8 x ø8.4 XY/In-line type ø øfd XL (K flange) Q - XS 45 XV XT YV XY-5 XY- XY- XY-63 XY Fd

6 q Flange size Size ngle type In-line type e Pilot port direction XM Pilot port direction Flange side K Left flange surface L Rear flange surface M Right flange surface r Temperature specifications Temperature range 5 to to y Number of auto switches/etecting position Quantity Without auto switch pcs. pc. pc. etecting position Valve open/closed Valve open Valve closed u Seal material and its changed part Seal material N P Q R R R3 S T U Stainless steel igh Vacuum ngle/in-line Valve ouble cting/ellows Seal XM, XY Series Flange size 6, 5, Flange size, 63, Flange size 5, Flange size, 63, Note) The XM and XY series with solenoid valve are also available. Please contact SM for details. XM XY Seal material FKM PM arrel Perfluoro Kalrez hemraz VMQ FKM for Plasma ULTI RMOR Produced by Mitsubishi able Industries, Ltd. Left flange surface Rear flange surface Flange side ow to Order XM XM XY XY Right flange surface ompound No W 79 SS59 SS630 SS U46 arrel Perfluoro is a registered trademark of Matsumura Oil o., Ltd. Kalrez is a registered trademark of. I. du Pont de Nemours and ompany or its affiliates. hemraz is a registered trademark of reene, Tweed Technologies, Inc. ULTI RMOR is a registered trademark of Nippon Valqua Industries, Ltd M9N M9N 5 M9N M9N q w e r t y w Flange type XM Type K (N) F pplicable flange size 6, 5,,, 63, 63, 6 (034), (0), 63 (4) XY K (N) XY Pilot port direction Rear flange surface K Left flange surface M Right flange surface Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Flange size 6 is not available.) M9// Without auto switch (with built-in magnet) uto switches are not applicable for high-temperature specifications (Temperature specification 0). Standard lead wire length is 0.5 m. dd L to the end of the part number when 3 m is desired, M when m, and Z when 5 m. x.) -M9NL Part numbers indicating changed seal material and leakage hanged Leakage (Pa m 3 /s or less) Note ) part Note ) Internal xternal w, e w e.3 x 0-0 (FKM).3 x x x 0-0 (FKM).3 x 0 - (FKM).3 x x 0 - (FKM).3 x 0-9 Note ) Values at ambient temperatures, excluding gas permeation. Note ) Refer to parts number of onstruction on the page 485 for changed part. Number indicates parts number of onstruction accordingly. To order something else (standard), list the symbols starting with X, followed by each symbol for seal material and then changed parts at last. x.) XM-6-M9N-XN 5,,, 63, 63, t uto switch type uto switch M9N(M)(L)(Z) -M9N(M)(L)(Z) M9P(M)(L)(Z) -M9P(M)(L)(Z) M9(M)(L)(Z) -M9(M)(L)(Z) 90(L) -90(L) 93(M)(L)(Z) -93(M)(L)(Z) Left flange surface u Rear flange surface Flange side Right flange surface

7 Stainless steel igh Vacuum ngle/in-line Valve XM, XY Series Specifications Flange (Valve) size Valve type Fluid Operating temperature ( ) Operating pressure (Pa)(abs) onductance (L/s) Note ) Internal Leakage (Pa m 3 /s) xternal Operating time (s) Flange type XM-6 XM-5 XY-5 XM- XY- XM- XY- XM-63 XY-63 XM- XY- 6, F034 5, F0 63, F4 ouble acting (ual operation), pressurize to open/close Inactive gas under vacuum 5 to 60 (igh temperature type: 5 to ) x 0-6 up to atmospheric pressure x 0-0 { x 0-0 } at ambient temperatures, excluding gas permeation (Standard material: FKM).3 x 0 - { x 0 - } at ambient temperatures, excluding gas permeation (Standard material: FKM) , F, F, K (N), F, K (N) Principle materials Pilot pressure (MPa)() Pilot port size Weight (kg) Note ) XM XY Note ) onductance is the value for the molecular flow of an elbow having the same dimensions. Note ) Figures in ( ) indicates the weight of F (conflate) fittings. ody: SS3 (onforms to Stainless steel 304) ellows: Stainless steel 36L ellows holder: Stainless steel 304. FKM (Standard seal material) 0.3 to to 0.6 M5 Rc / (0.) 0.6. (.76).0 3. (5.6) onstruction XM/ngle type uto switch (Option) Pilot port (Pressurized to close) q onnet assembly (Maintenance part) (Includes w, t, y, u) Magnet (Option) Pilot port (Pressurized to open) u ellows holder (Material: Stainless steel 304) e xterior seal (Maintenance part) y ellows (Material: Stainless steel 36L) ellows side exhaust t Valve (Material: Stainless steel 304) w Valve seal (Maintenance part) XY/In-line type ellows side exhaust XL Q - XS XV XT YV r ody (Material: SS3) Valve side exhaust Valve side exhaust Refer to page 497 for maintenance parts. 485

8 XM, XY Series imensions XM-6 to /ngle type øl XM-6 XM-5 XM Fc P.. L P.. 7 P L 6 x ø4.4 6 x ø6.6 XM- to /ngle type ø (K flange) (F flange) K øfd øfc L øfc L (øfc) (F flange) øl ø 486 XM- XM-63 XM Fd 95 0 Fc P.. L L K P x ø

9 Stainless steel igh Vacuum ngle/in-line Valve XM, XY Series imensions XY- 5, /In-line type ø 45 XY-5 XY XY- to /In-line type ø øfd XL (K flange) Q K - XS XV 45 XT YV øm XY- XY-63 XY Fd K M

10 Stainless steel igh Vacuum ngle/in-line Valve Stage ontrol, Single cting/ellows, O-ring Seal XM, XY PT. Series ow to Order ngle type In-line type XM XY 5 5 M9N M9N Note) The XMV and XYV series with solenoid valve are also available. Please contact SM for details. q w e r t y u q Flange size Size 5 63 XM XY e Pilot port direction XM Pilot port direction Flange side K Left flange surface L Rear flange surface M Right flange surface Rear flange surface Left flange surface Right flange surface Flange side w Flange type XM Type K (N) F XY K (N) pplicable flange size 5,,, 63, 63, (0), 63 (4) 5,,, 63, 63, XY Pilot port direction Rear flange surface K Left flange surface M Right flange surface Rear flange surface Left flange surface Right flange surface Flange side r Temperature specifications Temperature range 0 5 to 60 5 to y Number of auto switches/etecting position Quantity etecting position Without auto switch pcs. pc. pc. Valve open/closed Valve open Valve closed u Seal material and its changed part Seal material N P Q R R R3 S T U Seal material FKM PM arrel Perfluoro Kalrez hemraz VMQ FKM for Plasma ULTI RMOR ompound No W 79 SS59 SS630 SS U46 The material used in the sliding part of the S-valve is: FKM : Produced by Mitsubishi able Industries, Ltd. arrel Perfluoro is a registered trademark of Matsumura Oil o., Ltd. Kalrez is a registered trademark of. I. du Pont de Nemours and ompany or its affiliates. hemraz is a registered trademark of reene, Tweed Technologies, Inc. ULTI RMOR is a registered trademark of Nippon Valqua Industries, Ltd. 488 t uto switch type uto switch M9N(M)(L)(Z) -M9N(M)(L)(Z) M9P(M)(L)(Z) -M9P(M)(L)(Z) M9(M)(L)(Z) -M9(M)(L)(Z) 90(L) -90(L) 93(M)(L)(Z) -93(M)(L)(Z) Remarks Without auto switch (without built-in magnet) Solid state auto switch Reed auto switch (Flange size 6 is not available.) M9// Without auto switch (with built-in magnet) uto switches are not applicable for high-temperature specifications (Temperature specification 0). Standard lead wire length is 0.5 m. dd L to the end of the part number when 3 m is desired, M when m, and Z when 5 m. x.) -M9NL Part numbers indicating changed seal material and leakage Leakage (Pa m 3 /s or less) Note ) hanged part Note ) Internal xternal w, e, r, t w, r, t e.3 x 0-0 (FKM).3 x x x 0-0 (FKM).3 x 0 - (FKM).3 x x 0 - (FKM).3 x 0-9 Note ) Values at ambient temperatures, excluding gas permeation. Note ) Refer to parts number of onstruction on the page 490 for changed part. Number indicates parts number of onstruction accordingly. To order something else (standard), list the symbols starting with X, followed by each symbol for seal material and then changed parts at last. x.) XM-5-M9N-XN

11 Stainless steel igh Vacuum ngle/in-line Valve XM, XY Series Specifications Flange (Valve) size Valve type Fluid Operating temperature ( ) Operating pressure (Pa)(abs) Main exhaust valve onductance (L/s) Note ) Initial exhaust valve 0.5 to 3 to 8.5 to 4 to 8 4 to 8 Internal.3 x 0-0 { x 0-0 } at ambient temperatures, excluding gas permeation (Standard material: FKM) Leakage (Pa m 3 /s) xternal.3 x 0 - { x 0 - } at ambient temperatures, excluding gas permeation (Standard material: FKM) Main exhaust valve Operating time (s) Initial exhaust valve Flange type Principle materials Note 3) Pilot pressure (MPa)() Pilot port size Weight (kg) Note ) XM XY XM-5 XY-5 5, F0 63, F4 Normally closed (Pressurize to open, spring seal) [both main & initial exhaust valves] Inactive gas under vacuum 5 to 60 (igh temperature type: 5 to ) x 0-6 up to atmospheric pressure XM- XY-, F XM- XY- XM-63 XY-63, K (N), F XM- XY-, K (N) ody: SS3 (onforms to Stainless steel 304) ellows: Stainless steel 36L ellows holder: Stainless steel 304. FKM (Standard seal material) 0.4 to 0.7 [both main and initial exhaust valves] M5 Rc / (.86) (5.46) Note ) Main exhaust valve conductance is the valve for the molecular flow of an elbow having the same dimensions. The initial exhaust valve is the value for the viscous flow. Note ) Figures in ( ) indicates the weight of F (conflate) fittings. Note 3) coating of vacuum grease [Y-V] is applied to the seal-material sliding portion (initial exhaust valves sliding parts) of the vacuum part. XL Q - XS XV XT YV 489

12 XM, XY Series onstruction XM/ngle type djustment nut Initial exhaust valve opening adjustment Magnet (Option) ellows holder!0 (Material: Stainless steel 304) ellows o (Material: Stainless steel 36L) O-ring for sliding Valve S (Material: FKM) O-ring to fix t uto switch (Option) q onnet assembly (Maintenance part) (Includes w, t, u, i, o,!0) Pilot port S (For initial exhaust) Pilot port M (For main exhaust) e xterior seal (Maintenance part) ellows side exhaust Valve M u (Material: Stainless steel 304) ody y (Material: Stainless steel SS3) Valve S i (Material: Stainless steel 304) Valve side exhaust w Valve seal (Maintenance part) r Valve S seal assembly (Maintenance part) (Material: Stainless steel Seal material) XY/In-line type uto switch (Option) onnet assembly (Maintenance part) q (Includes w, t, u, i, o,!0) Pilot port S (For initial exhaust) Pilot port M (For main exhaust) xterior seal (Maintenance part) e djustment nut (With knurl) Initial exhaust valve opening adjustment Magnet (Optional)!0 ellows holder (Material: Stainless steel 304) o ellows (Material: Stainless steel 36L) ellows side exhaust O-ring to move valve S (Material: FKM) Valve seal (Maintenance part) w Valve S seal assembly (Maintenance part) (Material: Stainless steel SUS304 + Seal material) Valve side exhaust t O-ring to fix u Valve M (Material: Stainless steel 304) y ody (Material: Stainless steel SS3) i Valve S (Material: Stainless steel 304) Refer to page 497 for maintenance parts. <Operating principle> XM, XY Series z Initial exhaust valve opening adjustment The initial exhaust rate should be adjusted without applying the pilot pressure to the pilot port S before operation. The initial exhaust rate is set to zero by gently turning the adjustment nut clockwise until it stops. (o not use any tools.) The initial exhaust rate is adjusted by turning the adjustment nut counterclockwise. The number of adjustment nut (its pitch is mm) rotations and initial exhaust conductance should be confirmed referring to the figure on the right. x Opening of the initial exhaust valve (valve S) When the pilot pressure is applied to the pilot port S, the valve S is removed from the valve S seal assembly, and the valve opens the adjusted amount. c Opening of the main exhaust valve (valve M) When the pilot pressure is applied to the pilot port M, the valve M is removed from the body seat portion, and the valve fully opens. v losing of the initial exhaust valve, the main exhaust valve y removing the pilot pressure from the pilot port S and pilot port M, both S and M valves return to their previous positions and they are sealed. 490 Initial exhaust valve conductance (L/s) (viscous flow) Shows flow rate when P= 0. MPa XM/XY-63 XM/XY- XM/XY-5 XM/XY- XM/XY djustment nut rotations (n)

13 ø Stainless steel igh Vacuum ngle/in-line Valve XM, XY Series imensions XM/ngle type øl øfd øfc L K M S (øfc) (K flange) (F flange) XM-5 XM- XM- XM-63 XM Fd 95 0 Fc K P.. L P P.. 9. L 6 x ø6.6 8 x ø8.4 XY/In-line type XL ø øfd (K flange) Q M S K - XS XV 45 XT YV XY-5 XY- XY- XY-63 XY Fd K

14 Stainless steel igh Vacuum ngle/in-line Valve Manual Valve/ellows Seal XM, XY Series ow to Order RoS ngle type In-line type XM XY 6 5 q w e q Flange size Size 6 5 XM XY w Flange type XM Type F pplicable flange size 6, 5,, 6 (034), (0) XY 5,, e Seal material and its changed part Seal material N P Q R R R3 S T U Seal material FKM PM arrel Perfluoro Kalrez hemraz VMQ FKM for Plasma ULTI RMOR : Produced by Mitsubishi able Industries, Ltd. ompound No W 79 SS59 SS630 SS U46 Part numbers indicating changed seal material and leakage hanged Leakage (Pa m 3 /s or less) Note ) part Note ) Internal xternal w, e w e.3 x 0-0 (FKM).3 x x x 0-0 (FKM).3 x 0 - (FKM).3 x x 0 - (FKM).3 x 0-9 Note ) Values at ambient temperatures, excluding gas permeation. Note ) Refer to parts number of onstruction on the page 493 for changed part. Number indicates parts number of onstruction accordingly. To order something else (standard), list the symbols starting with X, followed by each symbol for seal material and then changed parts at last. x.) XM-6-XN arrel Perfluoro is a registered trademark of Matsumura Oil o., Ltd. Kalrez is a registered trademark of. I. du Pont de Nemours and ompany or its affiliates. hemraz is a registered trademark of reene, Tweed Technologies, Inc. ULTI RMOR is a registered trademark of Nippon Valqua Industries, Ltd. 49

15 Stainless steel igh Vacuum ngle/in-line Valve XM, XY Series Specifications Flange (valve) size Valve type Fluid Operating temperature ( ) Operating pressure (Pa)(abs) onductance (L/s) Note ) Internal Leakage (Pa m 3 /s) xternal Flange type Principle materials Pilot torque (N m) andle revolutions Weight (kg) Note ) XM XY XM-6 XM-5 XY-5 Note ) onductance is the value for the molecular flow of an elbow having the same dimensions. Note ) Figures in ( ) indicates the weight of F (conflate) fittings. XM- XY- XM- XY- 6, F034 5, F0 Manual type Inactive gas under vacuum 5 to x 0-6 up to atmospheric pressure x 0-0 { x 0-0 } at ambient temperature, excluding gas permeation (Standard material: FKM).3 x 0 - { x 0 - } at ambient temperature, excluding gas permeation (Standard material: FKM), F, F ody: SS3 (onforms to Stainless steel SUS304), ellows: Stainless steel SUS36L, ellows holder: Stainless steel SUS304. FKM (Standard seal material) (0.35) (.7) onstruction XM/ngle type XY/In-line type Indicator q andle assembly (Maintenance part) (Includes w, t, y, u) u ellows holder (Material: Stainless steel 304) e xterior seal (Maintenance part) y ellows (Material: Stainless steel 36L) ellows side exhaust t Valve (Material: Stainless steel 304) w Valve seal (Maintenance part) ellows side exhaust XL Q - XS XV XT YV Valve side exhaust r ody (Material: SS3) Refer to page 497 for maintenance parts. Valve side exhaust 493

16 XM, XY Series imensions XM/ngle type øl ø ø ø ø øfc L (øfc) (F flange) XM-6 XM-5 XM- XM Fc P.. L P.. 7 P L 6 x ø4.4 6 x ø6.6 XY/In-line type 494 XY-5 XY- XY

17 XM, XY Series lossary Seal Materials Shaft Sealing Method Please note that the following are general features and subject to change depending on processing conditions. For details, please contact sealing component manufacturerers. FKM (Fluororubber) With low outgassing, low permanent-setting and low gas permeation rates, this is the most popular seal material for high vacuums. Standard material used by SM s high vacuum angle valve is Mitsubishi able Industries, Ltd. (ompound No. 349-). It is advisable to choose a model depending on its application, because an improved material compound (330-75) which reduces the weight reduction ratio with O plasma is also available. Kalrez Kalrez is a registered trademark of. I. du Pont de Nemours and ompany or its affiliates. This material, perfluoroelastomer (FFKM), has excellent heat and chemical resistance, but its permanent-setting is large, and special caution is required. Variations are available with improved plasma (O, F4) and particulate resistance; therefore it is advisable to select types based upon the application. ompound No. 79: Standard Kalrez, excellent in gas and heat resistance. hemraz hemraz is a registered trademark of reene, Tweed Technologies, Inc. This material, perfluoroelastomer (FFKM), has excellent chemical and plasma resistance and has slightly higher heat resistance than FKM. Several variations of hemraz are available and it is advisable to choose based upon the particular plasma being used and other conditions, etc. ompound No. SS59: xcellent physical properties and especially effective for moving parts. ompound No. SS630: pplicable to both fixed and moving parts and compatible with a wide variety of applications. ompound No. SS38: The cleanest material among hemraz, developed for high-density plasma instruments. arrel Perfluoro arrel Perfluoro is a registered trademark of Matsumura Oil o.,ltd. ompound No. W: Perfluoroelastomer (FFKM) which does not contain a metal filler. Resistant against NF3, N3. Low particle generation under dry process conditions. ULTI RMOR ULTI RMOR is a registered trademark of Nippon Valqua Industries, Ltd. Fluoro-based rubber which does not contain a metal filler. Seal material which is plasma-resistant and has low gas emittance and heat resistance. Silicone (Silicone rubber, VMQ) This material is relatively inexpensive, has good plasma resistance, but its gas permeation rate is high. Optional seal material used by SM s high vacuum angle valve is Mitsubishi able Industries, Ltd. (ompound No. 3-, White) It has a low weight-reduction ratio and low particle generation within O plasma and N3 gas environments. PM (thylenepropylene rubber) Relatively lower priced and excellent in weatherability, chemical and heat resistance, but with no resistance at all to general mineral oil. Optional seal material used by SM s high vacuum angle valve is Mitsubishi able Industries, Ltd. (ompound No. 0-) Resistant to N3 gas, etc. ellows ellows offer cleaner sealing with reduced particle generation and less outgassing. The two major bellow types are: Formedbellows and Welded-bellows. Formed-bellows produce less dusts and offer higher dust resistance. Welded-bellows allow longer strokes, but generate more dust particles and offer less dust resistance. Please note, the endurance depends on length and speed of the strokes. 3 Response time/operation time Valve opening The time from the application of voltage to the actuation solenoid valve until 90% of the valve stroke has been completed is the valve opening response time. Valve opening operation time indicates the time from the start of the stroke until 90% of movement has been completed. oth of these become faster as the operating pressure is increased. Valve closing The time from the cut off of power to the actuation solenoid valve until 90% of the valve return stroke has been completed is the valve closing response time. Valve closing operation time indicates the time from valve opening until 90% of return movement has been completed. oth of these become slower as the operating pressure is increased. XL Q - XS XV XT YV 495

18 XM, XY Series Specific Product Precautions e sure to read this before handling the products. Warning Precautions on esign ll models. The body material is SS3 (conforms to Stainless steel 304), the bellows is Stainless steel 36L, and other metal seal material is Stainless steel 304. Standard seal material in the vacuum section is FKM that can be changed to the other materials (please refer ow to Order ). Use fluids those are compatible with using materials after confirming.. Select materials for the actuation pressure piping, and heat resistance for fittings that are suitable for the applicable operating temperatures. with auto switch. The switch section should be kept at a temperature no greater than 60. Selection aution ll models. When controlling valve responsiveness, take note of the size and length of piping, as well as the flow rate characteristics of the actuating solenoid valve.. ctuating pressure should be kept within the specified range. 0.4 to 0.5 MPa is recommended. 3. Use within the limits of the operating pressure range. 4. The actuating piston chamber and the bellows chamber are directly connected to the atmosphere. Please use in an environment in which dust emissions will not cause problems. igh temperature types. In the case of gases which cause a large amount of deposits, heat the valve body to prevent deposits in the valve. Mounting aution ll models. In high humidity environments keep valves packaged until the time of installation.. In case with switches, secure the lead wires so that they have sufficient slack, without any unreasonable force applied to them. 3. Perform piping so that excessive force is not applied to the flange sections. In case there is vibration of heavy objects or attachments, etc., secure them so that torque is not applied directly to the flanges. 4. Vibration resistance allows for normal operation up to 30 m/s (45 to z), but continuous vibration may cause a decline in durability. rrange piping to avoid excessive vibrations or shocks. igh temperature types (s/xm, XY; Temperature specifications/0). When a valve is to be heated, only the body section should be heated, excluding the bonnet (handle) section. aution hamber hamber Recommended exhaust direction [Vacuum pump connected on bellows side] Valve side Vacuum pump Valve side Piping. efore mounting, clean the surface of the flange seal and the O-ring with ethanol, etc.. There is an indentation of 0. to 0. mm in order to protect the flange seal surface, and it should be handled so that the seal surface is not damaged in any way. 3. xhaust direction uring operation, the direction of the exhaust may be determined freely, but in cases where a flow is generated by the exhaust, a decline in durability may result. The exhaust direction shown in the figure below (bellows side exhaust) is recommended. Please take all available precautions, as the life of the equipment is affected by conditions of usage. /ngle type /In-line type ellows side ellows side Vacuum pump 496

19 XM, XY Series Specific Product Precautions e sure to read this before handling the products. aution. When removing deposits from a valve, take care not to damage any of its parts.. Replace the bonnet assembly and the O-ring when the end of its service life is approached. 3. If damage is suspected prior to the end of the service life, perform early maintenance. aution Maintenance Maintenance Parts. The bonnet or handle assembly should also be replaced when changing the seal material. ue to the different materials used, changing only the seal may prove inadequate. 4. SM specified parts should be used for service. Refer to the onstruction/maintenance parts table. 5. When removing seal material (such as valve, exterior seals), take care not to damage the sealing surfaces. When installing the valve and exterior seals, be sure that the O-ring is not twisted. onnet & andle assembly/onstruction part number: Temperature specifications Indicator 6 5 eneral XL6-30- XL5-30- XM use XL6-30- XL5-30- XY igh XL6-30- XL5-30- temperature XL6-30- XL5-30- eneral use XL6-30- XL5-30- igh temperature XL6-30- XL5-30- eneral use : XL5-30- igh Standard temperature XL5-30- XM XY XM XY XM XY igh : temperature as standard Standard XL6-30- XL5-30- Valve size XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- onnet assembly XL XL XL XL XL XL XL XL XL andle assembly XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- XL-30- Note ) List the optional seal material symbol (refer to Table below) after the model number, except for the standard seal material (FKM: compound no. 349-, produced by Mitsubishi able Industries, Ltd.) Note ) n auto switch magnet is not attached. In cases where an auto switch magnet is attached, please add -M9// at the end of the part number. (Not available for high temperature models) Note 3) uto switch and solenoid valve are not attached. When a set including auto switch and solenoid valve is required, please add the symbols after the auto switch in ow to Order at the end of the part number. xterior seal, (M) Valve seal, S Valve seal assemblies escription Valve size XM XY XM XY XM XY XM XY XM XY Material onstruction no. xterior seal e Valve seal w S Valve seal assembly r Standard Special Standard Special Standard Special Note ) List the optional seal material symbol (refer to Table below) after the model number, except for the standard seal material (FKM: compound no. 349-, produced by Mitsubishi able Industries, Ltd.) Note ) Refer to the onstruction of each series for the construction numbers. Table Optional seal material 6 S568-05V S V5V -V5 5 S V S V4V -V4 S V S S V S P4V -P4 XL--9- S568-06V XL--9- S S V S S568-7V S568-7 XL--9- S568-06V XL--9- S S V S S568-33V S XL XL S V S V85V -V85 XL--9- XL--9- -XN -XP -XQ -XR -XR -XR3 -XS XT -XU arrel Seal material PM Kalrez hemraz FKM for ULTI VMQ Perfluoro Plasma RMOR ompound No. 0- W 79 SS59 SS630 SS U46 Note) ue to the different materials used, changing only the seal may prove inadequate. : Produced by Mitsubishi able Industries, Ltd. arrel Perfluoro is a registered trademark of Matsumura Oil o., Ltd. Kalrez is a registered trademark of. I. du Pont de Nemours and ompany or its affiliates. hemraz is a registered trademark of reene, Tweed Technologies, Inc. ULTI RMOR is a registered trademark of Nippon Valqua Industries, Ltd. 497 XL Q - XS XV XT YV