Air Slide Table. ø6, ø8, ø12, ø16, ø20, ø25. Work table and air cylinder are compactly integrated.

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1 ir Slide Table Series XS ø, ø, ø1, ø1, ø, ø X XU XS XQ X XW X XP XY TS Work table and air cylinder are compactly integrated. D- ndividual 9

2 ir slide table is suited for precision assembly. Symmetric Type Port location and stroke adjuster position are in opposite places from the standard body. Standard type Symmetric type mproved workpiece mounting repeatability achining of positioning hole Small clearance Proximity installation of up to mm is available. (XS) Thread for work mounting elisert is used for improved strength. lush mountable auto switches n installed auto switch in the groove of the housing body is flush with the surface. Dual piston rod The dual piston rod ensures twice the thrust of the current cylinder. ody mounting achining of positioning hole xial mounting is possible. Possible to use in an axial mounting position since the cross roller guide in the guiding parts is not properly preloaded and does not use a holding device. Threads for body mounting ounting is possible from directions. Wide variety of options djuster option and function option can be combined. unctional options With buffer mechanism 1. Lateral mounting (ody tapped). Lateral mounting (ody through-hole). Vertical mounting (ody tapped) djuster options With stroke adjuster With end lock pplication examples or positioning pallets on a conveyor With shock absorber xial piping type s -axis for picking and placing

3 ir Slide Table Series XS Series Variations ore size XS XS XS1 1 1 XS XS djuster Options unctional Options Stroke djuster With uffer echanism With End Lock djustable stroke range: to mm With adjuster at extension end (S) With adjuster at retraction end (T) With adjuster at both ends () Standard stroke 1 1 uffer mechanism in operational condition Stroke adjuster djuster options With shock absorber (Except for ø) Extension end Retraction end oth ends Protects workpieces and tools, etc., by eliminating impact at the end of the stroke s extension. uffer unit is auto switch capable. uto switch agnet ( ) Normally O ON is buffer in operation. unctional options With buffer With end lock (Except for ø) xial piping type uto switch Reed auto switch D-9 D-9 V Solid state auto switch D-9 D-9 V -color indication solid state auto switch D-9 W D-9 WV olds the cylinder s home position to prevent the workpiece from dropping even if the air supply is cut off. Lock piston Spring X XU XS XQ X XW X XP XY TS djuster at extension end djuster at retraction end uffer stroke Normal condition agnet uto switch Normally ON ( O is buffer in operation. ) Table actuation The normally ON/O setting is changed by changing the mounting direction of the auto switch. W W With Shock bsorber bsorbs the collision at stroke end and stops smoothly. Enables adjustment of stroke pplication Example uffer mechanism absorbs shock and prevents damage to the workpiece in the case where the positioning is not accurate when a load is inserted. Locked Unlocked xial Piping Type With shock absorber at extension end (S) With shock absorber at retraction end (T) With shock absorber at both ends () uffer mechanism Centralized piping in axial direction to maintain clear space around the body. ir gripper Workpiece Shock absorber at extension end Shock absorber at retraction end N Speed controller D- ndividual 1

4 Series XS Selection 1 Selection Steps ormula/data Selection Examples Operating Conditions List the operating conditions considering the mounting position and workpiece configuration. inetic Energy ind the kinetic energy E () of the load. ind the allowable kinetic energy Ea (). Confirm that the kinetic energy of the load does not exceed the allowable kinetic energy. to be used Type of cushion Workpiece mounting position ounting orientation verage speed Va (mm/s) Load mass W (kg): ig. (1) Overhang Ln : ig. () 1 V E = W () Collision speed V = 1. Va ) Correction factor (Reference values) Ea = Emax Workpiece mounting coefficient : ig. () ax. allowable kinetic energy Emax: Table (1) inetic energy (E) llowable kinetic energy (Ea) L1 L L + Cylinder: - Cushion: Rubber bumper Workpiece table mounting ounting: orizontal wall mounting verage speed: Va = [mm/s] Load mass: W = 1 [kg] L1 = mm L = mm L = mm 1 E = 1 () =. V = 1. x = Ea = 1 x.11 =.11 Can be used based on E =. Ea =.11 Load actor -1 Load actor of Load ass ind the allowable load mass Wa (kg). Note) There is no need to consider this load factor in the case of using perpendicularly in a vertical position. (Define α1 =.) Wa = β Wmax Workpiece mounting coefficient : ig. () llowable load mass coefficient β: raph (1) ax. allowable load mass Wmax: Table () Wa = 1 x 1 x = = 1 β = 1 Wmax = α1 = 1/ =. ind the load factor of the load mass α1. - Load actor of Static oment ind the static moment (N m). ind the allowable static moment a (N m). ind the load factor α of the static moment. - Load actor of Dynamic oment ind the dynamic moment e (N m). ind the allowable dynamic moment ea (N m). ind the load factor α of the dynamic moment. α1 = W/Wa = W x 9. (Ln + n)/ Correction value of moment center position distance n: Table () a = γ max Workpiece mounting coefficient : ig. () llowable moment coefficient γ: raph () aximum allowable moment max: Table () α = /a (Ln + n) e = 1/ We x 9. - Sum of Load actors Σαn = α1 + α + α 1 Possible to use if the sum of the load factors does not exceed 1. Collision equivalent to impact We = δ W V δ: umper coefficient With urethane bumper (Standard) = / With shock absorber = 1/ Correction value of moment center position distance n: Table () ea = γ max Workpiece mounting coefficient : ig. () llowable moment coefficient γ: raph () ax. allowable moment max: Table () α = e/ea Yawing Rolling Examine y. Examine r. y = 1 x 9. ( + )/ =.9 r = 1 x 9. ( + )/ =.9 = = ay = 1 x 1 x 1.9 = 1.9 ymax = 1.9 = 1 γ = 1 α =.9/1.9 =. Pitching Yawing α' =.9/1.9 =. Σαn = α1 + α + α' + α + α' = =. 1 nd it is possible to use. ar = 1.9 (Same value as ay) Examine ep. ( + ) ep = 1/ x 1. x 9. x =. We = / x 1 x = 1. = eap = 1 x. x 1.9 = 11.1 = 1 γ =. pmax = 1.9 α =./11.1 =. Examine ey. ( + 1) ey = 1/ x 1. x 9. x =. We = 1. = 1 eay = 11.1 (Same value as eap) α' =./11.1 =.

5 ir Slide Table Series XS ig. (1) Load ass: W (kg) W ig. () Overhang: Ln, Correction Value of oment Center Position Distance: n Pitch moment Yaw moment Roll moment Note) There is no need to consider this load factor in the case of using perpendicularly in a vertical position. ig. () Workpiece ounting Coefficient: Table mounting W W = 1 End plate mounting W =. W Table () aximum llowable Load ass: Wmax (kg) XS XS1 XS XS aximum allowable load mass. 1 9 Static moment Dynamic moment p XS XS1 XS XS p W L W L1 L1 ep 1 Rubber bumper llowable kinetic energy y Shock absorber L W L ey Note) Static moment: oment generated by gravity Dynamic moment: oment generated by impact when colliding with stopper y Table (1) aximum llowable inetic Energy: Emax () XS XS1 XS XS Table () aximum llowable oment: max (N m) XS XS1 XS XS Symbol Symbol n (n = 1 to ) E Ea Emax Ln (n = 1 to ) (p, y, r) a (ap, ay, ar) e (ep, ey) ea (eap, eay) max (pmax, ymax, rmax) V Table () Correction Value of oment Center Position Distance : n Correction value of moment center position distance (Refer to igure.) Stroke Definition Correction value of moment center position distance inetic energy llowable kinetic energy ax. allowable kinetic energy Overhang Static moment (Pitch, Yaw, Roll) llowable static moment (Pitch, Yaw, Roll) Dynamic moment (Pitch, Yaw) llowable dynamic moment (Pitch, Yaw) ax. allowable moment (Pitch, Yaw, Roll) Collision speed Unit mm mm N m N m N m N m N m mm/s W L llowable load mass coefficient: β llowable moment coefficient: γ r r raph (1) llowable Load ass Coefficient: β verage speed Va (mm/s) raph () llowable oment Coefficient: γ verage speed Va (mm/s) Collision speed V (mm/s) Note) Use the average speed when calculating static moment. Use the collision speed when calculating dynamic moment. Symbol Va W Wa We Wmax α β γ δ W W L L Definition verage speed Load mass llowable load mass ass equivalent to impact ax. allowable load mass Load factor llowable load mass coefficient llowable moment coefficient Damper coefficient Workpiece mounting coefficient Unit mm/s kg kg kg kg X XU XS XQ X XW X XP XY TS D- ndividual

6 ir Slide Table Series XS ow to Order ir slide table XS 1 S R 9W Nil S T S (1) T (1) (1) ST (1) ST (1) djuster option Without adjuster djuster on extension end djuster on retraction end djuster on both ends bsorber on extension end bsorber on retraction end bsorber on both ends djuster on extension end + bsorber on retraction end bsorber on extension end + djuster on retraction end Note 1) Options S, T and are not available with the XS series. pplicable uto Switches/Refer to pages 119 to 1 for further information on auto switches. Type Nii TN T Special function Electrical entry Port thread type thread Rc NPT ore size (Stroke ) 1 1 ø to ø1 ø, ø,,,,,,,,,,,,,,,,,,,,,, 1,,,,,,, 1, 1,,,,,,, 1, 1 Wiring (Output) Load voltage DC uto switch Nil Without auto switch (uilt-in magnet) ade to order or details refer to page. or the applicable auto switch models, refer to the table below. or the applicable auto switches for buffer, refer to page. unctional option Nil Standard With buffer R () With end lock P xial piping type () R With buffer and end lock P With buffer, xial piping type Note ) Option R is not available with the XS series. Option Combinations unctional djuster option option Nil R P R P Nil S T S T ST ST () () () () () : vailable : Not available Note ) When the buffer mechanism and the stroke adjuster on extension end are combined, the buffer stroke will be shorter by the length adjusted by the stroke adjuster on the extension end. Pre-wired connector pplicable load -wire (NPN) 9NV 9N C V, 1 V -wire (PNP) 9PV 9P circuit -wire 1 V 9V 9 Relay, rommet Yes V -wire (NPN) 9NWV 9NW C PLC Diagnostic indication V, 1 V -wire (PNP) 9PWV 9PW circuit (-color indication) -wire 1 V 9WV 9W rommet -wire C V 9V 9 Yes (NPN equivalent) circuit V 9V 9 Relay, -wire V 1 V No V or less 9V 9 C circuit PLC Lead wire length symbols:. m Nil (Example) 9NW Solid state auto switches marked with are produced upon receipt of order. 1 m (Example) 9NW m L (Example) 9NWL m (Example) 9NW Since there are additional applicable auto switches than are listed, refer to page for details. or details on auto switches with a pre-wired connector, refer to pages 1 and 1. uto switches are shipped together (not assembled). Solid state switch Reed switch ndicator light C uto switch model Perpendicular n-line. (Nil) Number of auto switches Nil S n Lead wire length (m) 1 () pcs. 1 pc. n pcs. (L) ()

7 ir Slide Table Series XS Specifications Symbol Specifications -X PTE grease -X9 rease for food djusting bolt, long specification -X11 (djustment range: 1 mm) djusting bolt, long specification -X1 (djustment range: mm) -X Without built-in auto switch magnet -X9 luororubber seal -X nti-corrosive specifications for guide unit -X EPD seal or clean room specifications, refer to Pneumatic Clean Series catalog. ass XS (L) (L) XS1 (L) (L) XS (L) XS (L) ade to Order (or details, refer to pages 19 to 1.) Standard Stroke XS XS1 XS XS Standard stroke,,,,,,,,,,,,,,,,,,,,,, 1,,,,,,, 1, 1,,,,,,, 1, 1 Standard stroke ore size 1 1 Piping port size luid ction Operating pressure Proof pressure mbient and fluid temperature Piston speed x. x. ir Double acting.1 to. Pa 1. Pa to C to mm/s Rc 1/, NPT 1/, 1/ Cushion Lubrication uto switch (Optional) Stroke length tolerance Option djuster options unctional options Rubber bumper (Standard, With stroke adjuster) Shock absorber (Optional) Non-lube Reed auto switch (-wire, -wire) Solid state auto switch (-wire, -wire) -color indication solid state auto switch (-wire, -wire) +1 mm Extension end (S) With stroke adjuster Retraction end (T) djuster on both ends () Extension end (S) With shock absorber Retraction end (T) bsorber on both ends () With buffer () With end lock (R) xial piping type (P) Stroke adjustment range to mm W/ shock absorber is not available with the XS series. W/ end lock is not available with the XS series. or details of adjuster and functional option, refer to Optional Specifications on pages to. Theoretical Output The dual rod ensures an output twice that of existing cylinders. ore size Rod size Operating direction Piston area (mm ) OUT OUT OUT OUT OUT OUT N N N N N N Note) Theoretical output (N) = Pressure (Pa) x Piston area (mm ) OUT Operating pressure (Pa) (g) dditional mass of adjuster option dditional mass of functional option Rubber stopper Shock absorber xial piping type With buffer With Extension end Retraction end Extension end Retraction end end lock S: Stroke 1+.1S S 9 +.1S +.1S S S (N) N X XU XS XQ X XW X XP XY TS D- ndividual

8 Series XS Table Deflection (Reference Values) Table displacement due to pitch moment load Table displacement when loads are applied to the section marked with the arrow at the full stroke. Table displacement due to yaw moment load Table displacement when loads are applied to the section marked with the arrow at the full stroke. Table displacement due to roll moment load Table displacement of section when loads are applied to the section with the slide table retracted. Lr ø. ø. ø. Lr= mm Table displacement amount...1 XS- XS- XS- XS- XS- Table displacement amount...1 XS- XS- XS- XS- XS- Table displacement amount.1.. XS- XS- XS- XS- XS- Load (N) Load (N) Load (N) ø Table displacement amount ø Table displacement amount ø Table displacement amount..1.. Lr= mm Load (N) Load (N) Load (N) ø1. ø1. ø1. Lr= mm Table displacement amount.... XS1- XS1- XS1- XS1- XS1- XS1- XS1- Table displacement amount...1 XS1- XS1- XS1- XS1- XS1- XS1- XS1- Table displacement amount XS1- XS1- XS1- XS1- XS1- XS1- XS1- Load (N) Load (N) Load (N)

9 ir Slide Table Series XS Table displacement due to pitch moment load Table displacement when loads are applied to the section marked with the arrow at the full stroke. Table displacement due to yaw moment load Table displacement when loads are applied to the section marked with the arrow at the full stroke. The graphs below show the table displacement when the static moment load is applied to the table. The graphs do not show the loadable mass. Refer to the Selection for the loadable mass. Table displacement due to roll moment load Table displacement of section when loads are applied to the section with the slide table retracted. Lr X ø1 Table displacement amount ø1 Table displacement amount ø1 Table displacement amount Lr=9 mm XU XS XQ X XW X ø Table displacement amount XS-1 Load (N) XS-1 XS- XS- XS- XS- XS- XS- XS- ø Table displacement amount Load (N) XS-1 XS-1 XS- XS- XS- XS- XS- XS- XS- ø Table displacement amount Load (N) Lr=1 mm XS- XS- XS- XS- XS-1 XS- XS- XS- XS-1 XP XY TS Load (N) Load (N) Load (N) ø Table displacement amount XS-1 XS-1 XS- XS- XS- XS- XS- XS- XS- ø Table displacement amount XS-1 XS-1 XS- XS- XS- XS- XS- XS- XS- ø Table displacement amount XS- XS- XS- XS- XS- Lr=1 mm XS- XS-1 XS- XS-1 Load (N) Load (N) 1 Load (N) D- ndividual

10 Series XS Dimensions: XS asic style x. x. thread depth Operating port x x. ax.. at retraction end)... or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.). 1. x. x. thread depth 1 Stroke adjuster at extension end N x x. thread depth Note) (elisert). Stroke adjuster at retraction end. x. x. thread depth. x x. thread depth +. ø9 depth N -1 x +. 9 depth ø. ø. ø. at retraction end) ø 1 Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. (NN-1) x +. ø9 depth depth. NN x x. thread depth Section Section XS- XS- XS- XS- XS- N NN

11 ir Slide Table Series XS With buffer (ø) XS- X x x. thread depth XU XS XQ X XW X XP XY TS xial piping type (ø) XS- P ax.. Operating port x x D- ndividual 9

12 Series XS Dimensions: asic style x x. thread depth Operating port x x.. ax. 9. at retraction end) N x x. thread depth or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.) Shock absorber (Refer to page 1.) Stroke adjuster at extension end N x x. thread depth Note) (elisert) 1 Stroke adjuster at retraction end x x. thread depth.. 1 x x. thread depth +. ø9 depth. 1 N 1 x +. 9 depth 1 at retraction end) 1 1 ø. Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. (NN 1) x ø. ø ø +. ø9 depth +. 9 depth NN x x. thread depth Section Section N NN N

13 ir Slide Table Series XS With shock absorber (ø) - S/T/ 1.. Shock absorber at extension end With end lock (ø) - R Stroke, 9 Operating port x x.. 1. Shock absorber at retraction end Shock absorber at retraction end Stroke adjustment range Extension end Retraction end 1 aximum 1 With buffer (ø) - x x. thread depth dimension (Retracted side mounting) X XU XS XQ X XW X XP XY TS xial piping type (ø) - P -R -R -R -R -R -R ax.. Operating port x x. 1. D ndividual 1

14 Series XS Dimensions: XS1 asic style x x. thread depth 9. Operating port x x.. ax. 11 at retraction end) 9. or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.) Shock absorber (Refer to page 1.) N x x. thread depth 1. Stroke adjuster at extension end N x x. thread depth. Note) (elisert) 1 Stroke adjuster at retraction end x x. thread depth +. ø9 depth.. 1 N 1 x +. 9 depth.. at retraction end) x x. thread depth. Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. (NN 1) x ø. ø. ø9 ø9 +. ø9 depth depth. NN x x. thread depth Section Section XS1- XS1- XS1- XS1- XS1- XS1- XS1- N NN N

15 ir Slide Table Series XS With shock absorber (ø1) XS1- S/T/ Shock absorber at extension end Stroke Stroke, With end lock (ø1) XS1- R Operating port x x. Shock absorber at retraction end Shock absorber at retraction end XS1- XS1- XS1- XS1- XS1- XS1- XS1- Stroke adjustment range Extension end aximum With buffer (ø1) XS1- x x. thread depth Retraction end dimension (Retracted side mounting) 1 1 X XU XS XQ X XW X XP XY TS xial piping type (ø1) XS1- P XS1-R XS1-R XS1-R XS1-R XS1-R XS1-R XS1-R ax.. Operating port x x. 9. D ndividual

16 Series XS Dimensions: asic style x x. thread depth Operating port x x ax. 1. at retraction end) 1 9. N x x. thread depth. or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.) Shock absorber (Refer to page 1.). Stroke adjuster at extension end N x x. thread depth Note) (elisert) Stroke adjuster at retraction end 1 x x. thread depth 1 x x 1 thread depth 1 +. ø9 depth.. 1 N 1 x +. 9 depth. at retraction end) Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. (NN 1) x.. 1 ø.1 ø9. ø. ø. +. ø9 depth +. 9 depth NN x x 1 thread depth 1 Section Section N NN N

17 ir Slide Table Series XS With shock absorber (ø1) - S/T/ Stroke Shock absorber at extension end Stroke to 1 With end lock (ø1) - R 1 1 Operating port x x. Shock absorber at retraction end Shock absorber at retraction end Stroke adjustment range Extension end aximum With buffer (ø1) - x x 1 thread depth Retraction end 1 dimension (Retracted side mounting) X XU XS XQ X XW X XP XY TS xial piping type (ø1) - P -R -R -R -R -R -R -R -1R ax.... Operating port x x. 1 D- ndividual

18 Series XS Dimensions: XS asic style 1 x x 1 thread depth. Operating port x Rc 1/ (NPT 1/, 1/). 1 ax. 1. at retraction end) or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.) Shock absorber (Refer to page 1.) ø9 depth ø.1 ø9. ø11 ø11. N x x 1 thread depth. Stroke adjuster at extension end N x x. thread depth Note) (elisert) Stroke adjuster at retraction end x x. thread depth x x 1 thread depth 1. N 1 x +. 9 depth at retraction end). Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. (NN 1) x depth NN x x 1 thread depth 1 +. ø9 depth Section Section XS- XS- XS- XS- XS- XS- XS- XS-1 XS-1 N NN N

19 ir Slide Table Series XS With shock absorber (ø) XS- S/T/. Shock absorber at extension end 1 Stroke to 1 With end lock (ø) XS- R.. Shock absorber at retraction end Shock absorber at retraction end Operating port x Rc 1/ (NPT 1/, 1/) XS- XS- XS- XS- XS- XS- XS- XS-1 XS-1 Stroke adjustment range Extension Retraction end end aximum With buffer (ø) XS- x x 1 thread depth dimension (Retracted side mounting) X XU XS XQ X XW X XP XY TS xial piping type (ø) XS- P ax. 11. Operating port x Rc 1/ (NPT1/, 1/) XS-R XS-R XS-R XS-R XS-R XS-R XS-R XS-1R XS-1R D- ndividual

20 Series XS Dimensions: XS asic style 1 x x 1. thread depth. Operating port x Rc 1/ (NPT 1/, 1/) ax. 1. at retraction end) 1 19 N x x 1. thread depth. or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.) Shock absorber (Refer to page 1.). Stroke adjuster at extension end. N x x 1 thread depth 1 (elisert) Note) Stroke adjuster at retraction end x x 1 thread depth ø9 depth x x 1. thread depth 1. 1 N 1 x +. 9 depth 9. at retraction end) 9 ø. ø11 ø1 Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. (NN 1) x 1 1 ø1 +. ø9 depth +. 9 depth NN x x 1. thread depth 1 Section Section XS- XS- XS- XS- XS- XS- XS- XS-1 XS-1 N NN N

21 ir Slide Table Series XS With shock absorber (ø) XS- S/T/. 1.. Shock absorber at extension end Stroke to 1 With end lock (ø) XS- R 1. Shock absorber at retraction end Shock absorber at retraction end Operating port x Rc 1/ (NPT 1/, 1/) XS- XS- XS- XS- XS- XS- XS- XS-1 XS-1 Stroke adjustment range Extension end aximum With buffer (ø) XS- x x 1. thread depth 1 Retraction end 1 1 dimension (Retracted side mounting) X XU XS XQ X XW X XP XY TS xial piping type (ø) XS- P XS-R XS-R XS-R XS-R XS-R XS-R XS-R XS-1R XS-1R ax Operating port x Rc 1/ (NPT 1/, 1/) 1 9 D- ndividual

22 Series XS Optional Specifications 1 Dimensions of djuster Option at Extension End/ Rubber Stopper (S/T) ody mounting section C P pplicable size XS (L) (L) XS-S (L) XS-S (L)-X11 XS-S (L) XS-S (L)-X11 Stroke adjustment range 1 1 ody mounting section C D E x. x 1 P. x x 1 Table mounting section Q. x x E XS1 (L) XS-S (L)-X1 XS-S1 (L) XS-S1 (L)-X x 1 x x 1 D Table mounting section (L) XS-S1 (L)-X1 XS-S1 (L) XS-S1 (L)-X11 XS-S1 (L)-X x 1 x x 1 Q XS (L) XS-S (L) XS-S (L)-X x 1. x 1 1 x XS-S (L)-X1. XS (L) XS-S (L) XS-S (L)-X x 1. x 1 1. x XS-S (L)-X1. Retraction End Size of hexagon socket head cap screw t is also available with the symmetric type. or ordering part numbers, refer to ow to Order Stroke djuster below. Dimensions are identical with the standard type. C D E or XS, ow to Order Stroke djuster (ccessory) E Stroke pplicable adjustment size range C XS (L) XS-T (L) XS-T (L)-X (L) XS-T (L) XS-T (L)-X11 XS-T (L)-X1 XS-T1 (L) XS1 (L) XS-T1 (L)-X11 XS-T1 (L)-X1 XS-T1 (L) (L) XS-T1 (L)-X11 XS-T1 (L)-X1 XS-T (L) XS (L) XS-T (L)-X11 XS-T (L)-X1 XS-T (L) XS (L) XS-T (L)-X11 XS-T (L)-X D E x x x x x 1 x 1 x. x 1 x 1 x 1 1 x 1. 1 x 1. Size of hexagon socket head cap screw t is also available with the symmetric type. or ordering part numbers, refer to ow to Order Stroke djuster below. Dimensions are identical with the standard type. S T S T XS S 1 L X11 Stroke adjuster Stroke adjuster Shock absorber Extension end Retraction end Extension end Retraction end pplicable bore size 1 1 ø ø ø1 ø1 ø ø Nil L Symmetric type Standard type Symmetric type djustable range (Stroke adjuster only) mm Standard 1 mm mm Option Nil -X11 -X1 -X1 (adjustable range: mm) is not available with the XS series. -X11 and -X1 are not available with shock absorber type. W/ shock absorber is not available with the XS series. or dimensions, refer to the figure above. s for symmetric type, view the external dimensions symmetrically. (djusting bolt in symmetric type is equipped in reverse direction.)

23 ir Slide Table Series XS Dimensions of djuster Option/With Shock bsorber (S/T) Extension End ody mounting section D P Table mounting section Q X XU XS-S XS-S pplicable size (L) XS-S (L) XS1 (L) XS-S1 (L) (L) XS-S1 (L) XS (L) XS-S (L) XS (L) XS-S (L) C XS-S XS-S1 XS-S1 1. C D E E1 ody mounting section Table mounting section E E1 P L Q x 1 x x x 1 x x x 1 x x x 1. x 1. x x 1. x 1. 1 x Size of hexagon socket head cap screw t is also available with the symmetric type. or ordering part numbers, refer to ow to Order Stroke djuster on page. Dimensions are identical with the standard type. L XS XQ X XW X XP XY TS Retraction End ody mounting section D E E1 Table mounting section Q L C XS-T XS-T P XS-T XS-T1 XS-T1 XS-T N pplicable size (L) XS-T (L) XS1 (L) XS-T1 (L) (L) XS-T1 (L) XS (L) XS-T (L) XS (L) XS-T (L) 1 C D ody mounting section Table mounting section E E1 P L N Q x 1 x x x 1 x x x 1 x x x 1. x 1 1. x x 1. x x Size of hexagon socket head cap screw t is also available with the symmetric type. or ordering part numbers, refer to ow to Order Stroke djuster on page. Dimensions are identical with the standard type. D- ndividual 1

24 Series XS Optional Specifications Dimensions of djusting olt pplicable size Stroke adjustment range C D XS (L) (L) XS- XS--X11 XS- XS--X x. x 1 XS--X1. XS-1 XS1 (L) XS-1-X x 1 XS-1-X1 XS-1 (L) XS-1-X x 1 D C XS-1-X1 XS- XS (L) XS--X x 1. XS--X1. XS- XS (L) XS--X x 1. XS--X1. ow to Order djusting olt XS 1 X11 pplicable bore size 1 1 ø ø ø1 ø1 ø ø djustment range Nil X11 X1 mm 1 mm mm -X1 (adjustable range: mm) is not available with the XS series. or dimensions, refer to the figure above. Symmetric type is also the same.

25 ir Slide Table Series XS Shock bsorber Specifications Shock absorber model pplicable slide table aximum energy absorption () Stroke absorption aximum collision speed (mm/s) aximum operating frequency (cycle/min) aximum allowable thrust (N) mbient temperature range ( C) R.9 R XS1.9 R. to to R111 XS R11 XS Spring force (N) When extended When retracted ass (g) 1 1 Note) The shock absorber service life is different from that of the XS cylinder depending on the operating conditions. Refer to the Specific Product Precautions for the replacement period. With End Lock Specifications ore size Piston speed olding force (N) XS1 1 Note) or caution on end lock, refer to page. 1 to mm/s 1 XS With uffer echanism Specifications XS X XU XS XQ X XW X XP XY TS XS XS1 XS XS ore size 1 1 Piston speed to mm/s (orizontal mounting to mm/s) uffer stroke uffer Stroke at mm stroke load (N) aximum stroke Note) or cautions on handling the buffer, refer to page. Note) f stroke is adjusted with the stroke adjuster at extension end, the buffer stroke is shortened by the adjusted length. pplicable uto Switch for uffer Type Specifications D-9V With indicator light, -wire Solid state switch D-9NV With indicator light, -wire, Output: NPN D-9PV With indicator light, -wire, Output: PNP The auto switch for the buffer must be ordered separately. Electrical entry direction Vertical D- ndividual

26 Series XS Construction e!1 o! i!9 y! u! q! w! @ # $ $ # #9 $ # # #1 $1 # With buffer With end lock xial piping type Component Parts No Description ody Table End plate Rail uide Rod Piston assembly Rod cover Seal support ead cap loating bushing Roller stopper Cylindrical roller Roller spacer Rod bumper End bumper Piston seal Rod seal O-ring Replacement Parts/ Seal it aterial luminum alloy luminum alloy luminum alloy Carbon tool steel Carbon tool steel Stainless steel luminum alloy rass Resin Stainless steel Stainless steel igh carbon chrome bearing steel Resin Polyurethane Polyurethane NR NR NR Component Parts: With uffer No. 1 Description End plate Spring collar ead cap Spring agnet aterial luminum alloy Stainless steel Stainless steel Stainless steel Note ard anodized ard anodized ard anodized eat treated eat treated With magnet on one side nodized Electroless nickel plated Note ard anodized Replacement Parts/ Seal it for With End Lock Component Parts: With End Lock No. 9 1 Description Locking body Table support Rod cover Piston rod ushing lanking plug Return spring Piston seal Rod seal O-ring O-ring Replacement Parts/ Seal it for xial Piping Type aterial luminum alloy Carbon steel luminum alloy Stainless steel luminum alloy rass Stainless steel NR NR NR NR Component Parts: xial Piping Type No. 9 1 Description xial piping plate Pipe ushing Stud Steel balls O-ring O-ring asket aterial luminum alloy luminum alloy luminum alloy rass Stainless steel NR NR Note ard anodized nti-corrosive treated Chromated Electroless nickel plated Note ard anodized ard anodized Chromated Electroless nickel plated Seal kit includes 1 set of numbered seals in the table below. Order the appropriate seal kit depending on the cylinder bore size. Replacement Parts/ rease Pack ore size 1 1 it no. XS-PS -PS XS1-PS -PS XS-PS XS-PS Contents Set of nos. above! to!9. ore size 1 1 it no. R-PS XS1R-PS R-PS XSR-PS XSR-PS Contents Set of nos. above! to!9 # to #. ore size 1 1 it no. XSP-PS P-PS XS1P-PS P-PS XSP-PS XSP-PS Contents Set of nos. above! to!9 $1 to $. pplied unit uide unit Cylinder unit rease pack part no. R-S- (g) R-S- (g) R-L- (g) R-L- (g)

27 ir Slide Table (Symmetric Type) Series XS L ir slide table 1 1 Nil TN T XS 1 L Port thread type thread Rc NPT ø to ø1 ø, ø Symmetric type ore size (Stroke ),,,,,,,,,,,,,,,,,,,,,, 1,,,,,,, 1, 1,,,,,,, 1, 1 ow to Order S 9W Number of auto switches Nil S n pcs. 1 pc. n pcs. uto switch Nil Without auto switch (uilt-in magnet) or the applicable auto switch models, refer to the table below. X XU XS XQ X XW X XP XY TS djuster option Nil Without adjuster S djuster on extension end T djuster on retraction end djuster on both ends (1) S bsorber on extension end T (1) bsorber on retraction end (1) bsorber on both ends (1) ST djuster on extension end + bsorber on retraction end (1) ST bsorber on extension end + djuster on retraction end Note 1) Options S, T and are not available with the XSL series. Note ) unctional option is not available with the XS L series. Specifications Specifications are the same as the standard type. Refer to page. pplicable uto Switches/Refer to pages 119 to 1 for further information on auto switches. Type Special function Electrical entry ndicator light Wiring (Output) Load voltage DC Pre-wired connector pplicable load -wire (NPN) 9NV 9N C V, 1 V -wire (PNP) 9PV 9P circuit -wire 1 V 9V 9 Relay, rommet Yes V -wire (NPN) 9NWV 9NW C PLC Diagnostic indication V, 1 V -wire (PNP) 9PWV 9PW circuit (-color indication) -wire 1 V 9WV 9W rommet -wire C V 9V 9 Yes (NPN equivalent) circuit V 9V 9 Relay, -wire V 1 V No V or less 9V 9 C circuit PLC Lead wire length symbols:. m Nil (Example) 9NW Solid state auto switches marked with are produced upon receipt of order. 1 m (Example) 9NW m L (Example) 9NWL m (Example) 9NW Since there are additional applicable auto switches than are listed, refer to page for details. or details on auto switches with a pre-wired connector, refer to pages 1 and 1. uto switches are shipped together (not assembled). Solid state switch Reed switch C uto switch model Perpendicular n-line. (Nil) Lead wire length (m) 1 () (L) () D- ndividual

28 Series XS L Dimensions: XSL/Symmetric Type asic style 1 or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.) x x. thread depth +. ø9 depth N 1 x +. 9 depth. 1. at retraction end) Stroke adjuster at extension end 1... Stroke adjuster at retraction end N x x. thread depth Note) (elisert) x. x. thread depth x. x. thread depth. Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. ax.. at retraction end) Operating port x x. ø ø. ø ø. x. x. thread depth +. ø9 depth depth. NN x x. thread depth (NN 1) x 11. Section 11. Section XSL- XSL- XSL- XSL- XSL- N NN

29 ir Slide Table (Symmetric Type) Series XS L Dimensions: L/Symmetric Type asic style. or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.) Shock absorber (Refer to page 1.) X +. ø9 depth x x. thread depth 1 1 N 1 x +. 9 depth at retraction end) 1 XU XS XQ X XW X 1 N x x. thread depth Note) (elisert) Stroke adjuster at extension end Stroke adjuster at retraction end x x. thread depth Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. XP XY TS 1.. N x x. thread depth. ø ax. 9. at retraction end) x x. thread depth Operating port x x. +. ø9 depth +. 9 depth NN x x. thread depth ø. ø ø (NN 1) x 1. Section 1. Section L- L- L- L- L- L- N NN N Regarding the external dimensions with a shock absorber, view the external dimensions of symmetrically on page 1. D- ndividual

30 Series XS L Dimensions: XS1L/Symmetric Type asic style.. or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.) Shock absorber (Refer to page 1.) +. ø9 depth. x x. thread depth N 1 x +. 9 depth.. at retraction end) x x. thread depth 1 1. N x x. thread depth. Note) (elisert) 9 Stroke adjuster at extension end Stroke adjuster at retraction end Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions.. N x x. thread depth x x. thread depth ø ø. ø9 ø9 9. ax. 11 at retraction end) Operating port x x. +. ø9 depth depth. NN x x. thread depth (NN 1) x Section Section XS1L- XS1L- XS1L- XS1L- XS1L- XS1L- XS1L- N NN N Regarding the external dimensions with a shock absorber, view the external dimensions of XS1 symmetrically on page.

31 ir Slide Table (Symmetric Type) Series XS L Dimensions: L/Symmetric Type asic style. +. ø9 depth x x 1 thread depth N 1 x 1 N x X. thread depth Note) (elisert) Stroke adjuster at extension end depth. at retraction end) Stroke adjuster at retraction end 1 Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. N x x. thread depth. or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.) Shock absorber (Refer to page 1.) x x. thread depth X XU XS XQ X XW X XP XY TS x x. thread depth ø.1 ø9. ø. ø. 1 ax. 1. at retraction end) Operating port x x. +. ø9 depth +. 9 depth NN x x 1 thread depth 1 (NN 1) x Section.. Section L- L- L- L- L- L- L- L-1 N NN N Regarding the external dimensions with a shock absorber, view the external dimensions of symmetrically on page. 9 D- ndividual

32 Series XS L Dimensions: XSL/Symmetric Type asic style.. 1 or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.) Shock absorber (Refer to page 1.) x x 1 thread depth ø9 depth N 1 x +. 9 depth at retraction end) x x. thread depth. N x x. thread depth Note) (elisert) Stroke adjuster at extension end. 1. Stroke adjuster at retraction end 1 1 Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. N x x 1 thread depth. 1 1 x x 1 thread depth. ø.1 ø9. ø11 ø ax. 1. at retraction end) 1 Operating port x Rc 1/ (NPT 1/, 1/) +. ø9 depth +. 9 depth NN x x 1 thread depth 1 (NN 1) x 9 Section Section 11. XSL- XSL- XSL- XSL- XSL- XSL- XSL- XSL-1 XSL-1 N NN N Regarding the external dimensions with a shock absorber, view the external dimensions of XS symmetrically on page.

33 ir Slide Table (Symmetric Type) Series XS L Dimensions: XSL/Symmetric Type asic style x x 1. thread depth depth ø9 N 1 x Stroke adjuster at extension end depth 9. at retraction end) Stroke adjuster at retraction end N x x 1 thread depth 1 Note) (elisert) or detailed dimensions on stroke adjusters, refer to the options available with adjusters. Rubber stopper (Refer to page.) Shock absorber (Refer to page 1.) 9 x x 1 thread depth Note) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. N x x 1. thread depth. X XU XS XQ X XW X XP XY TS 1 ø. ø11 ø1 ø ax. 1. at retraction end) +. ø9 depth 1 x x 1. thread depth. Operating port x Rc 1/ (NPT 1/, 1/) +. 9 depth NN x x 1. thread depth 1 XSL- XSL- XSL- XSL- XSL- XSL- XSL- XSL-1 XSL-1 N NN (NN 1) x N Section Section Regarding the external dimensions with a shock absorber, view the external dimensions of XS symmetrically on page 9. 1 D- ndividual

34 Series XS uto Switch Proper ounting Position (Detection at Stroke End) Reed uto Switch: D-9, D-9, D-9, D-9V, D-9V, D-9V E XS XS1 XS XS XS XS1 XS XS Stroke E Stroke 1 1 Solid State uto Switch: D-9, D-9N, D-9P, D-9W, D-9NW, D-9PW Stroke (1.1).9 (.). (.9). (.). (.1). (). (1.1).9 (1.) 1. (1.9) 1. (1.). (1.1). (). (1.1).9 (.). (.9). (.). (.1) 1. (1) 1. (1.1) 1.9 (.). (.9). (.). (.1) 1. (1) 1. (19.1).9 (1.) 1. (1.9) 11. (9.) 1. (1.1) 1. (1).9 (.) 9.. (.9) (.9). 9.. (.) (.) (.) (.1) (.1) (.1) (111.1). (). (). (1) 9. (9) ( ): Denotes D-9. E Stroke uto Switch ounting Solid State uto Switch: D-9V, D-9NV, D-9PV, D-9WV, D-9NWV, D-9PWV E Stroke Stroke 1 1 XS XS XS XS Note) djust the auto switch after confirming the operating conditions in the actual setting. Operating Range Caution uto Switch ounting Tool When tightening the auto switch mounting screw (included with auto switch), use a watchmaker s screwdriver with an approximately to mm diameter handle. Tightening Torque Tightening Torque of uto Switch ounting Screw (N m) uto switch model Tightening torque D-9 (V) D-9 (V) D-9 W(V). to.. to.1 uto switch model pplicable bore size 1 1 D-9 /9 V. D-9 /9 V D-9 W/9 WV... Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming approximately ±% dispersion). t may vary substantially depending on an ambient environment. uto Switch ounting screw (ncluded with auto switch) Watchmaker s screwdriver uto switch Other than the applicable auto switches listed in ow to Order, the following auto switches can be mounted. Normally closed (NC = b contact) solid state auto switches (D-9/9 types) and sold state auto switch D- are also available. Refer to pages 1 and 1 for details.

35 Series XS Specific Product Precautions 1 e sure to read before handling. Refer to front matters and for Safety nstructions and pages to 11 for ctuator and uto Switch Precautions. Selection Caution 1.Operate a load within the range of the operating limits. Select the model considering maximum loading mass and allowable moment. or details, refer to Selection on pages and. When actuator is used outside of operating limits, eccentric loads on guide will be in excess of this causing vibration on guide, inaccuracy, and shortened life.. f intermediate stops by external stopper is done, avoid ejection. f lurching occurs, damage can result. When making an intermediate stop with an external stopper to be followed by continued forward movement, first supply pressure to momentarily reverse the table, then retract the intermediate stopper, and finally apply pressure to the opposite port to operate the table again.. Do not use it in such a way that excessive external force or impact force could work on it. This could result in damage. Caution 1. Do not scratch or dent the mounting side of the body, table or end plate. The damage will result in a decrease in parallelism, vibration of the guide or an increase in moving part resistance.. Do not scratch or dent on the forward side of the rail or guide. This could result in looseness, increased operating resistance, etc.. Do not apply excessive power and load when work is mounted. f the external force more than the allowable moment were applied, looseness of the guide unit or increased operating resistance could take place.. latness of mounting surface should be. mm or less. Poor parallelism of the workpiece mounted on the body, the base, and other parts can cause vibration in the guide unit and increased operating resistance, etc.. Select the proper connection with the load which has external support and/or guide mechanism on the outside, and align it properly.. void contact with the body during operation. ands, etc. may get caught in the stroke adjuster. nstall a cover as a safety measure if there are instances to be near the slide table during operation..eep away from objects which are influenced by magnets. Since an body has magnets built-in, do not allow close contact with magnetic disks, magnetic cards or magnetic tapes. Data may be erased. ounting. When mounting the body, use screws of an appropriate length and do not exceed the maximum tightening torque. Tightening with a torque above the limit could cause malfunction. Whereas tightening insufficiently could result in misalignment or dropping. XS XS1 XS XS XS XS1 XS XS XS XS1 XS XS 1. Lateral mounting (ody tapped) olt x. x. x. x 1 x 1 x 1. olt x. x. x. x. x. x 1 olt aximum tightening torque (N m) aximum tightening torque (N m) aximum tightening torque (N m) aximum screw-in depth (l mm) Lateral mounting (Through-hole). x. x. x. x. x. x l l aximum screw-in depth (l mm) Vertical mounting (ody tapped) l aximum screw-in depth (l mm). X XU XS XQ X XW X XP XY TS D- ndividual

36 Series XS Specific Product Precautions e sure to read before handling. Refer to front matters and for Safety nstructions and pages to 11 for ctuator and uto Switch Precautions. XS XS1 XS XS XS XS1 XS XS 1. ront mounting l x. x. x. x 1 x 1 x 1. l olt Caution x. x. x. x. x. x 1 aximum tightening torque (N m) Top mounting olt ounting Caution uide aximum tightening torque (N m) aximum screw-in depth (l mm) 1 1 To prevent the workpiece holding bolts from touching the guide block, use bolts that are at least. mm shorter than the maximum screw-in depth. f longer bolts are used, they can touch the guide and cause a malfunction. aximum screw-in depth (l mm) The positioning hole on the table and the positioning hole at the bottom of the body do not have the same center. Use these holes during reinstallation after the table has been removed for the maintenance of an identical product. Operating Environment Caution 1. Do not use in an environment, where the product could be exposed to liquids such as cutting oil, etc. Using in an environment where the product could be exposed to cutting oil, coolant, oil, etc. could result in looseness, increased operating resistance, air leakage, etc.. Do not use in an environment, where the product could be exposed directly to foreign materials such as powder dust, blown dust, cutting chips, spatter, etc. This could result in looseness and increased operating resistance, and air leakage, etc. Contact us regarding use in this kind of environment.. Do not use in direct sunlight.. When there are heat sources in the surrounding area, block them off. When there are heat sources in the surrounding area, radiated heat may cause the product s temperature to rise and exceed the operating temperature range. lock off the heat with a cover, etc.. Do not subject it to excessive vibration and/or impact. Contact us regarding use in this kind of environment, since this can cause damage or a malfunction. Caution on andling djuster Option Stroke djuster Caution 1. Do not replace with the bolt other than the original adjusting bolt. This could result in looseness and damage due to impact forces, etc. Caution on andling djuster Option. Refer to the below table for lock nut tightening torque. nsufficient torque will cause a decrease in the positioning accuracy. XS XS1 XS XS Stroke djuster Caution. When stroke adjuster is adjusted, do not hit the table with a wrench, etc. This could result in looseness. With Shock bsorber Caution 1. Do not rotate the set screw on bottom of shock absorber. This is not an adjusting screw. Turning it could cause oil leakage.. Do not scratch the exposed portion of the piston rod. Durability could be degraded and the piston rod may not retract. Piston rod Damage is not allowed.. Refer to the below table for tightening torque for lock nut of shock absorber. XS1 XS XS Tightening torque (N m) Tightening torque (N m) Turning the bottom screw is not allowed.

37 Series XS Specific Product Precautions e sure to read before handling. Refer to front matters and for Safety nstructions and pages to 11 for ctuator and uto Switch Precautions. Service Life and Replacement Period of Shock bsorber Caution 1. llowable operating cycle under the specifications set in this catalog is shown below. 1. million cycles R million cycles R to R1 Note) Specified service life (suitable replacement period) is the value at room temperature ( to C). The period may vary depending on the temperature and other conditions. n some cases the absorber may need to be replaced before the allowable operating cycle above. pplicable size XS1 XS XS Shock absorber model R R R R111 R11 Caution on ounting djuster Option Rubber Stopper Caution 1. Use caution because the length of the bolts for mounting on the body and for the table are different from each other for some models. The shock absorber at the extension end (S) of the XS, and 1 has a different length hexagon socket head cap screw on the body mounting section and on the table mounting section. Use sufficient care when mounting. f assembled by making an error in length, it could cause looseness or lead to malfunction.. ollow the table below for tightening torque of mounting bolts. nsufficient torque will cause a decrease in the positioning accuracy and lead to malfunction. XS XS1 XS XS Stroke adjuster at extension end (S) ody mounting section Table mounting section Tightening Tightening Thread size torque Thread size torque Thread size (N m) (N m). x x 1 x 1 x 1 x x x x x 1 x 1 x x Stroke adjuster at retraction end (T). x x x x x 1 x 1 Tightening torque (N m) X XU XS XQ X XW X XP XY TS Shock bsorber Caution 1. Use caution because the length of the bolts for mounting on the body and for the table are different from each other for some models. The shock absorber at the retraction end (T) has a different length hexagon socket head cap screw on the body mounting section and on the table mounting section. Use sufficient care when mounting. f assembled by making an error in length, it could cause looseness or lead to malfunction.. ollow the table below for tightening torque of mounting bolts. nsufficient torque will cause a decrease in the positioning accuracy and lead to malfunction. XS1 XS XS Shock absorber at extension end (S) Shock absorber at retraction end (T) ody mounting section Table mounting section ody mounting section Table mounting section Thread size x 1 x 1 x 1 x x Tightening torque (N m) Thread size x 1 x 1 x 1 x x Tightening torque (N m) Thread size x 1 x x x 1 x 1 Tightening torque (N m) Thread size x 1 x 1 x 1 x x Tightening torque (N m) D- ndividual

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