Traveling parallelism: mm. Mounting from the through-holes on the top. Tapped for mounting a work piece

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1 ir Slide Table Series RoHS Height: mm/width: mm/length: mm () Traveling parallelism: 0.00 mm Note 1) Front mounting accuracy: 0.01 mm Note ) Top mounting accuracy: 0.0 mm Integrated front mounting part and table result in a highly accurate and rigid top and front mounting surface. Note 1) Right angle degree of the front mounting surface to the body mounting surface Note ) Parallelism of the top mounting surface to the body mounting surface M or M size screws are used for body mounting. (Except for top mounting) Prevents damage to the screws when mounting Threads for through-hole mounting on the top Threads for tap mounting on the bottom M. M M M M M Mounting from the through-holes on the top Tapped for mounting a work piece Mounting from the tapped threads on the bottom uto switch mountable in two rows uto switches can be mounted in two rows for all models in the range of to. Two auto switches can be mounted with a mm or longer stroke. uto switch 0 D- -X

2 Plugs for the symmetric type Piping port xial piping plate xial piping port Retraction end stroke adjuster Extension end stroke adjuster Switch rail Vacuum port (clean specifications) Height xial Piping Width Wiring and piping can be aligned in the same direction. uto switch Total length Symmetric Type Piping ports are provided both on the right and left sides. Switch rails and axial piping plates are interchangeable between the right and left side. Symmetric type Standard type Variations Standard type Symmetric type L L L Bore size (mm). Total length Note) Values of stroke mm. Standard stroke (mm) Width 1 (mm) Height 1 Extension end djuster option Retraction end Both ends Rail switch xial piping plate Piping option xial piping type Clean Specification Clean specification products are available with no dimensional changes. The same options are available as for standard products. Theoretical output (N) / 0 0 (mm) Operating pressure: 0. MPa when operating direction is OUT. OUT IN Height (mm) llowable moment (N m) 0

3 Series Selection 1 Procedure Formula/Data Selection Example Operating Conditions Enumerate the operating conditions considering the mounting position and workpiece configuration. Load Weight Find the collision speed V (mm/s). Confirm that the load mass W (kg) does not exceed the value in the graph. Load Factor -1 Load Factor of Static Moment Find the static moment M (N m). Find the allowable static moment Ma (N m). Find the load factor of the static moment. - Load Factor of Dynamic Moment Find the dynamic moment Me (N m). Find the allowable dynamic moment Mea (N m) from graph. Find the load factor of the dynamic moment. - Sum of Load Factors Possible to use if the sum of the load factors does not exceed 1. to be used Type of cushion Mounting orientation verage operating speed Va (mm/s) Load mass W (kg) Overhang (mm) V = 1. Va Correction factor (Reference value) Graph (1) M = W x 9. (Ln + n)/00 Corrected value of moment center position distance n: Table (1) Pitch, Yaw moment: Graph () Roll moment: Graph () α1 = M/Ma Me = 1/ We x 9. (Ln + n)/00 mass equivalent to impact We = δ W V δ: Bumper coefficient Rubber bumper: /0 Metal stopper: 1/0 Corrected value of moment center position distance n: Table (1) Pitch, Yaw moment: Graph () α = Me/Mea α1 + α < 1 Cylinder: - Cushion: Rubber bumper Mounting: Horizontal wall mounting verage operating speed : Va = 0 mm/s Load mass: W = 0.1 kg L = 0 mm L = 0 mm V = 1. x 0 = Confirm that V = and W = 0.1 do not exceed the values in Graph (1). pplicable because it does not exceed the value in Graph (1). Examine Mr. Mr = 0.1 x 9.(0 + )/00 = 0.0 = Obtain Mar = 0. from Va = 0 in Graph (). α1 = 0.0/0. = 0.07 W kg 0. Examine Mep. Mep = 1/ x 0. x 9. x (0+)/00 = 0.07 We = /0 x 0.1 x = 0. = Obtain Meap = 1.1 from V = in Graph (). α = 0.07/1.1 = Meap N.m Examine Mey. V mm/s Mey = 1/ x 0. x 9. x (0+)/00 = 0. We = 0. = Obtain Meay = 1.1 from V = in Graph (). α = 0./1.1= Meay N.m α1 + α + α' = pplicable because = 0. < 1 Mar N.m 0. L V mm/s L+ 0 Va mm/s V mm/s 07 D- -X

4 L L Series Fig. (1) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: n (mm) Static moment Dynamic moment Symbol Pitch moment Yaw moment Roll moment Note) Static moment: Moment generated by gravity Dynamic moment: Moment generated by impact when colliding with stopper llowable static moment Ma N m llowable dynamic moment Mea N m Mp We W Mp L1 W Mep L verage operating speed Va mm/s Collision speed V mm/s Note) Use the average operating speed when calculating static moment. Use the collision speed when calculating dynamic moment.(refer to page 07.) Corrected value of moment center position distance (Refer to Fig..) My Pitch/Yaw moment: Mpmax/Mymax The above value represents the maximum value for each allowable load mass. For the maximum allowable load mass for each piston speed, please refer to Graph (1). Definition Roll moment: Mrmax Corrected value of moment center position distance Overhang Static moment (pitch, yaw, roll) llowable static moment (pitch, yaw, roll) Dynamic moment (pitch, yaw) llowable dynamic moment (pitch, yaw) Max. allowable moment (pitch, yaw, roll) Max. allowable load mass Rubber bumper Metal stopper The above value represents the maximum value of allowable moment. For the maximum allowable moment for each piston speed, please refer to Graph () and (). My We Graph () llowable Moment Pitch Moment: Map, Meap Yaw Moment: May, Meay, Table (1) Correction Value of Moment Center Position Distance: n (mm) Symbol n (n = 1 to ) Ln (n = 1 to ) M (Mp, My, Mr) Ma (Map, May, Mar) Me (Mep, Mey) Mea (Meap, Meay) Mmax (Mpmax, Mymax, Mrmax) W L1 W llowable static moment Ma N m L Mey 0. 1 Mr Mr, L L verage operating speed Va mm/s W W Unit mm mm N m N m N m N m N m Table () Max. llowable Load Mass: Wmax (kg) Table () Maximum llowable Moment: Mmax (N m) 0 Graph () llowable Moment Roll Moment: Mar Symbol F V Va W Wa Wmax α Fig. () llowable Static Load: F(N) Graph (1) Load Mass: W Load mass W kg Load mass W kg 0. Rubber bumper 0.0 Metal stopper Collision speed V mm/s (verage operating speed x 1.) Collision speed V mm/s (verage operating speed x 1.) 0. Rubber bumper Metal stopper Collision speed V mm/s (verage operating speed x 1.) Load mass W kg F 1 llowable static load The above value represents the applicable load at the position where the moment does not work at the time of stop. Factors such as impact, etc. are not in consideration with the value. Definition llowable static load Collision speed (verage operating speed x 1.) verage operating speed Load mass Mass equivalent to impact Max. allowable load mass Load factor F Rubber bumper Metal stopper Table () llowable Static Load: F (N) Unit N mm/s mm/s kg kg kg

5 ir Slide Table Series ø, ø, ø RoHS Bore size (Standard stroke (mm)) Symbol Bore size.,,, 1,, 1, How to Order M9BW Note) Use an optional stepped positioning pin (see page ) because the positioning pin hole of this product goes through. pplicable uto Switches/Refer to pages 19 through to 1 for further information on auto switches. Type Solid state auto switch Special function Clean Series Symmetric type Standard model no. Nil L Standard Symmetric Nil P djuster option Nil Without adjuster CS Metal stopper on extension end CT Metal stopper on retraction end C Metal stopper on both ends Clean Series : Vacuum type External dimensions are identical to the standard model. Grommet Indicator light Yes Wiring (Output) -wire(npn) -wire(pnp) -wire -wire(npn) -wire(pnp) -wire -wire(npn) -wire(pnp) -wire -wire(npn) -wire(pnp) V Load voltage DC C V 1 V 1 V V 1 V 1 V V 1 V 1 V V 1 V Functional option Without option xial piping type Switch rail Nil N uto switch model Electrical entry direction Perpendicular M9NV M9PV M9BV FN FP FB M9NWV M9PWV M9BWV M9NV 1 M9PV 1 uto switch Without auto switch Nil (Built-in magnet) For the aplicable auto switch models, refer to the table below. With magnet and switch rail Without magnet and switch rail In-line M9N M9P M9B Mode to Order Refer ro page for details. Number of auto switches Nil S n pcs. 1 pc. n pcs. IC circuit IC circuit Relay, IC PLC circuit Diagnostic M9NW indication (-color M9PW indicator) M9BW Water M9N 1 IC resistant circuit (-color M9P 1 indicator) -wire 1 V M9BV 1 M9B 1 -wire (Equiv. to NPN) V 9V 9 IC circuit Yes Grommet 1 V 0 V 9V 9 -wire Relay, V V, 1 V 0 V or less 90V 90 IC circuit PLC 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance. 1 m type lead wire is only applicable to D-9. Lead wire length symbols: 0. m Nil (Example) M9NW Solid state auto switches marked with are produced upon receipt of order. 1 m M (Example) M9NWM m L (Example) M9NWL m Z (Example) M9NWZ When an auto switch is not mounted Refer to page 1 for applicable auto switches in addition to those listed above. For details on auto switches with a pre-wired connector, refer to page 9 and 9. properly, it can cause a malfunction. Refer uto switches are shipped together (not assembled). to page 1 uto Switch Mounting. Reed auto switch Electrical entry Lead wire length (m) 1 (M) (L) (Z) 0. (Nil) Pre-wired connector pplicable load -(L) -(L) -(L) Intake flow djuster option Grade L/min (NR) Without adjuster Grade (Class 0 or equivalent) Metal stopper Grade (Class 00 or equivalent) Without adjuster Grade (Class 0 or equivalent) 1 Metal stopper Grade (Class 00 or equivalent) Without adjuster Grade (Class 0 or equivalent) Metal stopper Grade (Class 00 or equivalent) Reference value Vacuum port Intensive vacuum suction prevents the particles from discharging inside a clean room. For details about the clean series, refer to Pneumatic Clean Series catalog (CT.E0-). 09 D- -X

6 Series Specifications Bore size (mm) Piping port size Fluid ction Operating pressure Proof pressure mbient and fluid temperature. M x 0. ir Double acting 0.1 to 0.7 MPa 1.0 MPa to 0 C Operating speed range (verage operating speed) Note) Cushion 0 to 00 mm/s (Metal stopper: 0 to 0 mm/s) Rubber bumper (Metal stopper: Without cushion) Made to Order: Individual Specifications (Refer to page for details.) Symbol Specifications -X9 Fluororubber seals -X nti-corrosive guide unit -X EPDM seals Standard Lubrication adjusting range (metal stopper) uto switch length tolerance Non-lube Both ends each 0 to mm +1 mm 0 Note) verage operating speed: Speed that the stroke is divided by a period of time from starting the operation to reaching the end. Option Reed auto switch (-wire, -wire) Solid state auto switch (-wire, -wire) -color indicator solid state auto switch (-wire, -wire) Standard stroke (mm),,, 1 djuster option Metal stopper Extension end (CS) Retraction end (CT) Both ends (C) adjustment range 0 to mm,, 1, Functional option xial piping type (P) adjuster is mountable on the axial piping. Theoretical Output OUT IN (N) Bore size (mm) Rod size (mm) Operating direction Piston area (mm ) 0. Operating pressure (MPa) OUT IN OUT IN OUT IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm ) Moisture Control Tube IDK Series When operating an actuator with a small diameter and a short stroke at a high frequency, the dew condensation (water droplet) may occur inside the piping depending on the conditions. Simply connecting the moisture control tube to the actuator will prevent dew condensation from occurring. For details, refer to the IDK series in the Best Pneumatics No..

7 ir Slide Table Series Weight Basic Type (Without switch rail) -N (g) Standard stroke (mm) xial Piping Type (Without switch rail) -PN Standard stroke (mm) dditional Weight of Switch Rail Standard stroke (mm) 1 7 Table ccuracy (g) dditional weight of adjuster option Extension end Retraction end 1 (g) dditional weight of adjuster option Extension end Retraction end 1 B side parallelism to side B side traveling parallelism to side C side perpendicularity to side M dimension tolerance Radial clearance (µm) Non-rotating table accuracy (deg) Note) In theory, radial clearance and non-rotating table accuracy are zero by the preloaded specification. However, in some actual cases, a moment can be applied and can cause deflection in an individual part. Therefore, refer to the table displacement amount on page 1. Optional Specifications 0.0 mm 0.00 mm 0.01 mm ± 0.0 mm 0 Note) 0 Note) Rail assembly for mounting auto switch When auto switch is mounted on air slide table without rail (-N), this assembly is used. x M1.7 x Cross recessed head machine screw for precision instruments M1.7 x Cross recessed head machine M1.7 x screw for precision instruments Cross recessed head machine screw for precision instruments pplicable size C Non-rotating accuracy M Switch rail part no. -D- -D- -D-1 -D- -D- B Radial clearance Note With magnet and mounting screw Stepped positioning pin -LP ø øh ø 0.01 Use the optional stepped positioning pin that is provided because the positioning pin hole for the table is a through hole. Stepped Positioning Pin Part no. Note -LP Common for all models D- -X

8 Series Table Deflection (Reference Values) Table displacement due to pitch moment load Table displacement when loads are applied to the section marked with the arrow at the full stroke. Table displacement due to yaw moment load Table displacement when loads are applied to the section marked with the arrow at the full stroke. The graphs below show the table displacement when the static moment load is applied to the table. The graphs do not show the loadable mass. Refer to the Selection for the loadable mass. Table displacement due to roll moment load Table displacement when loads are applied to the section marked with the arrow with the slide table retracted. Lr=0 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) Load (N) Load (N) 0 1 Load (N) Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) Load (N) Load (N) Load (N) Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) Load (N) Load (N) Load (N) 1

9 ir Slide Table Series Dimensions Note) In the, there is no change in total length by stroke. Basic type (Without switch rail) -N Vacuum port M x 0. (Plugged when the product is a symmetric type.) (Not plugged in the case of the clean series) 1 Operating port x M x 0. (Plugged when the product is a symmetric type.) x M x 0. thread depth. 1 x M x 0. thread depth. Note ), Note ) Vacuum port M x 0. (Plugged when the product is not a symmetric type.) (Not plugged in the case of the clean series) ø depth 1. (Through) ø depth 1. Note 1) depth 1. Note 1) (Through) x M1.7 x 0. thread depth Note 1) Use an optional stepped positioning pin. (See page.) Note ) Since the body and table are constructed with a magnetic substance, it becomes magnetized when magnets, etc. are attached to them, and this may cause the auto switch malfunction. Note ) If workpiece holding bolts are used, they can touch the body and cause malfunctions, etc. Refer to the Specific Product Precautions. Operating port x M x 0. (Plugged when the product is not a symmetric type.).. ø. ø. D- x M x depth X

10 Series Dimensions With stroke adjuster With adjuster on both ends -CN With adjuster on extension end -CSN 0. Note) With adjuster on retraction end -CTN Max Note) xial piping -PN With switch rail End plate Max.. Width across flats. 1. x M. x 0. Note) Use caution because the height of the end plate's top surface will be higher than the table's top surface. xial piping plate In the case of a symmetric type, it is located on the opposite surface. x M. x 0. thread depth. Do not use in the mounting of body Operating port x M x Note) Switch rail In the case of a symmetric type, it is located on the opposite surface. Note) Use caution because the height of the end plate's top surface will be higher than the table's top surface. When all the available options are mounted (switch rail, stroke adjuster, with axial piping). Standard type -CP Symmetric type L-CP 1

11 ir Slide Table Series Dimensions Basic type (Without switch rail) -N Vacuum port M x 0. (Plugged when the product is a symmetric type.) (Not plugged in the case of the clean series) 1 J I Operating port x M x 0. (Plugged when the product is a symmetric type.) K x M x 0. thread depth. 1 x M x 0. thread depth. 1. Note ), Note ) 1 1 ø depth 1. Note 1). M K J I ZZ Z H G G 1 (Through) depth 1. Note 1) (Through) Note 1) Use an optional stepped positioning pin. (See page.) Note ) Since the body and table are constructed with a magnetic substance, it becomes magnetized when magnets, etc. are attached to them, and this may cause the auto switch malfunction. Note ) If workpiece holding bolts are used, they can touch the body and cause malfunctions, etc. Refer to the Specific Product Precautions. x M1.7 x 0. thread depth Vacuum port M x 0. (Plugged when the product is not symmetric type.) (Not plugged in the case of the clean series) Operating port x M x 0. (Plugged when the product is not a symmetric type.) ø depth. x M x depth.. ø. ø. - G G H I J K M Z ZZ D- -X

12 Series Dimensions With stroke adjuster With adjuster on both ends -CN With adjuster on extension end -CSN 0. Note) End plate Max.. 9 With adjuster on retraction end -CTN Max.. 0. Note) xial piping -PN With switch rail 1 9 Width across flats. x M. x 0. Note) Use caution because the height of the end plate's top surface will be higher than the table's top surface. xial piping plate In the case of a symmetric type, it is located on the opposite surface. x M x 0. thread depth.7 Do not use in the mounting of body Operating port x M x Note) Switch rail In the case of a symmetric type, it is located on the opposite surface.. Note) Use caution because the height of the end plate's top surface will be higher than the table's top surface. When all the available options are mounted (switch rail, stroke adjuster, with axial piping) Standard type -CP Symmetric type L-CP 1

13 ir Slide Table Series Dimensions Basic type (Without switch rail) -N 1 J I Operating port x M x 0. (Plugged when the product is a symmetric type.) Vacuum port M x 0. (Plugged when the product is a symmetric type.) (Not plugged in the case of the clean series). K x M x 0. thread depth. x M x 0. thread depth. Note ), Note ) ø depth. (Through) Note 1) Note 1) Use an optional stepped positioning pin. (See page.) Note ) Since the body and table are constructed with a magnetic substance, it becomes magnetized when magnets, etc. are attached to them, and this may cause the auto switch malfunction. Note ) If workpiece holding bolts are used, they can touch the body and cause malfunctions, etc. Refer to the Specific Product Precautions. M K J I Z ZZ H G G ø depth Note 1) (Through) x M1.7 x 0. thread depth. Vacuum port M x 0. (Plugged when the product is not a symmetric type.) (Not plugged in the case of the clean series). 1 Operating port x M x 0. (Plugged when the product is not a symmetric type.) ø depth x M x depth. ø. ø. - G G H I J K M Z ZZ D- -X

14 Series Dimensions With stroke adjuster With adjuster on both ends -CN 0. With adjuster on extension end -CSN 0. Max. Max. xial piping -PN With switch rail 19 Width across flats Hexagon socket width across flats 1. With adjuster on retraction end -CTN x M x 0. xial piping plate In the case of a symmetric type, it is located on the opposite surface. x M x 0.7 thread depth.7 Do not use in the mounting of body Operating port x M x 0. Switch rail In the case of a symmetric type, it is located on the opposite surface.. When all the available options are mounted (switch rail, stroke adjuster, with axial piping) Standard type -CP Symmetric type L-CP 1

15 ir Slide Table Series Construction With magnet and rail r!!! o u i!1 xial piping With stroke adjuster Without stroke adjuster. With adjuster on extension end! y Component Parts With Magnet, Rail No. Description Material Note No. Description Material Note 1 Body Note) Martensitic stainless steel Heat treated 1 Switch rail luminum alloy Hard anodized Note) 19 Magnet Table Martensitic stainless steel Heat treated Magnet holder Stainless steel Rod Stainless steel Piston Brass Electroless nickel plated With djuster Rod cover Resin No. Description Material Note Head cap Resin 1 End plate Stainless steel 7 Floating bushing Stainless steel Stopper pin Steel Heat treated, Trivalent chromated Floating bushing B Stainless steel djustment bolt Steel Heat treated Note), Zinc chromated 9 Roller stopper Stainless steel djustment nut Steel Zinc chromated Roller stopper B Stainless steel Note) Only the series is heat treated. Rod bumper Polyurethane 1 Plate Stainless steel xial Piping Type Plug Piston seal Rod seal O-ring Steel balls Steel + Fluorine NBR NBR NBR High carbon chrome bearing steel Zinc chromated No. 7 Description xial piping plate Stud Gasket O-ring Material luminum alloy Brass Stainless steel + NBR NBR Note Hard anodized Electroless nickel plated Note) Use caution because the martensitic stainless steel is inferior in corrosiveness when compared with austenitic stainless steel. 19 D- -X

16 Series uto Switch Mounting uto Switch Proper Mounting Position (Detection at End) Reed auto switch D-9 Solid state auto switch D-M9 D-M9W D-M9 B C Lead wire, in-line entry Figures in the table above are used as a reference when mounting the auto switches for stroke end detection. In the case of actually setting the auto switches, adjust them after confirming their operation. Reed uto Switch: D-9 B C Solid State uto Switch, -Color Indicator Solid State uto Switch: D-M9, D-M9W, D-M9 B C (mm) 0. (mm). Reed auto switch D-9V Solid state auto switch D-M9V D-M9WV D-M9V D-F D Figures in the table above are used as a reference when mounting the auto switches for stroke end detection. In the case of actually setting the auto switches, adjust them after confirming their operation. Lead wire, perpendicular entry Reed uto Switch: D-9V (mm) D Solid State uto Switch, -Color Indicator Solid State uto Switch: D-M9V, D-M9WV, D-M9V (mm) D Solid State uto Switch: D-F (mm) D

17 uto Switch Mounting Series Operating Range uto switch model D-9/9V D-F D-M9/M9V D-M9W/M9WV D-M9/M9V (mm) pplicable bore size (mm) ø ø ø Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming approximately ±0% dispersion). It may vary substantially depending on an ambient environment. uto Switch Mounting uto Switch Mounting Tool When tightening the auto switch mounting screw (included with auto switch), use a watchmaker s screwdriver with a handle about to mm in diameter. Tightening Torque Tightening Torque of uto Switch Mounting Screw (N m) uto switch model Tightening torque D-F 0. to 0. D-9(V) D-M9(V) D-M9W(V) 0.0 to 0.1 D-M9(V).. When using the following solid state auto switches (D-M9(V), M9W(V), F), mount them in the illustrated direction. The lower slot is for extension end detection. Lead wire, in-line entry (D-M9, M9W, M9) Extension end Retraction end Lead wire, perpendicular entry (D-M9V, M9WV, M9V, F) Upper slot Lower slot Extension end Retraction end uto switch mounting screw (Included with auto switch) Watchmaker s screwdriver Upper slot Lower slot uto switch on handling symmetric type 1. Maintain a minimum space if standard type and symmetric type are used side by side. If the space is insufficient, it may cause auto switches to malfunction. L L Dimension Without shielding plate mm With shielding plate mm Placing in the shield plate (0. to 0. mm iron plate) between the products allows the distance to be smaller. Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted. Normally closed (NC = b contact) solid state auto switches (D-F9G/F9H types) and a solid state auto switch (D-F) are also available. Refer to pages and 1 for details. 1 D- -X

18 Series Made to Order:Individual Specifications Please contact SMC for detailed dimensions, specifications and lead times. 1 Fluororubber Seal Symbol -X9 EPDM Seal Symbol -X Standard model no. X9 Standard model no. X Fluororubber seal EPDM seal Change the materials for the piston seal, rod seal and O-rings to fluororubber. Specifications Type Fluororubber seal Bore size (mm).,, Seal material Fluororubber Dimensions other than the above is the same as the standard type. Change the materials for the piston seal, rod seal and O-rings to EPDM. Specifications Type EPDM seal Bore size (mm).,, Seal material EPDM Grease PTFE grease Dimensions other than the above is the same as the standard type. nti-corrosive Specifications for Guide Unit Standard model no. X Symbol -X Warning Precautions Be aware that smoking cigarettes, etc. after your hands have come into contact with the grease used in this cylinder can create a gas that is hazardous to humans. nti-corrosive specifications for guide unit Martensitic stainless steel is used for the table and body. Use this treatment if more effective anti-corrosive measures are necessary. nti-corrosive treatment is applied to the table and body. Specifications Type nti-corrosive guide unit Bore size (mm).,, Surface treatment Special anti-corrosive treatment () 1 Dimensions other than the above is the same as the standard type. The special anti-corrosive treatment turns the table and body black.

19 L Series Specific Product Precautions 1 Be sure to read this before handling the products. Refer to back page 0 for Safety Instructions and pages to 1 for ctuator and uto Switch Precautions. Selection 1. Operate loads within the range of the operating limits. Select the model considering maximum loading weight and allowable moment. For details, refer to Selection on pages 07 and 0. When actuator is used outside of operating limits, eccentric loads on guide will be in excess of this causing vibration on guide, inaccuracy, and shortened life.. If intermediate stops by external stopper is done, avoid ejection. If lurching occurs, damage can result. When making an inermediate stop with an external stopper to be followed by continued forward movement, first supply pressure to momentarily reverse the table, then retract the intermediate stopper, and finally apply pressure to the opposite port to operate the table again.. Do not use it in such a way that excessive external force or impact force could work on it. This could result in damage. Mounting 1. Do not scratch or dent on the mounting side of body, table and end plate. The damage will result in a decrease in parallelism, vibration of guide and an increase in moving part resistance.. Do not scratch or dent on the forward side of the rail or guide. This could result in looseness and increased operating resistance, etc.. Do not apply excessive power and load when work is mounted. If the external force more than the allowable moment were applied, looseness of the guide unit or increased operating resistance could take place.. Flatness of mounting surface should be 0.0 mm or less. Poor parallelism of the workpiece mounted on the body, the base, and other parts can cause vibration in the guide unit and increased operating resistance, etc.. Select the proper connection with the load which has external support and/or guide mechanism on the outside, and align it properly.. void contact with the body during operation. Hands, etc. may get caught in the stroke adjuster. Install a cover as a safety measure if there are instances to be near the slide table during operation. 7. Keep away from objects which are influenced by magnets. Since a body has magnets built-in, do not allow close contact with magnetic disks, magnetic cards or magnetic tapes. Data may be erased.. Do not attach magnets to the body and table section. Since the body and table are constructed with a magnetic substance, it becomes magnetized when magnets, etc. are attached to them, and this may cause malfunction of auto switches, etc. Mounting 9. When mounting the body, use appropriate length of screws and do no exceed the maximum tightening torque. Tightening with a torque above the limit could malfunction. Whereas tightening insufficiently could result in misalignment or come to a drop. Bolt M x 0. M x 0.7 M x 0.7 Bolt M. x 0. M x 0. M x Body tapped Maximum Maximum tightening torque screw-in depth (N m) L (mm) Through-hole Maximum tightening torque (N m) L (mm)... Use the below speed controllers and fittings. If other speed controllers and fittings are used, they can interfere with the mounting surface. Vacuum port Mounting surface Side piping port S10-M S10-M SF-M S101F-M xial piping port S10-M SF-M S101F-M Side piping port L Vacuum port Miniature fittings M series xial piping port D- -X

20 Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 0 for Safety Instructions and pages to 1 for ctuator and uto Switch Precautions. L 1. Front mounting L Bolt M x 0. M x 0. M x 0.. Top mounting Bolt M x 0. M x 0. M x 0. Mounting Maximum tightening torque (N m) Maximum tightening torque (N m) Body To prevent the workpiece holding bolts from touching the guide block, use bolts that are at least shorter than the maximum screw-in depth. If longer bolts are used, they can touch the guide and cause a malfunction. Maximum screw-in depth L (mm) Body... To prevent the workpiece holding bolts from touching the guide block, use bolts that are at least shorter than the maximum screwin depth. If longer bolts are used, they can touch the guide and cause a malfunction. Maximum screw-in depth L (mm). 1. Use a stepped positioning pin that is provided optionally because the positioning pin hole for the table is through. (Refer to page.) Operating Environment 1. Do not use in an environment, where the product could be exposed to liquids such as cutting oil, etc. Using in an environment where the product could be exposed to cutting oil, coolant, oil, etc. could result in looseness, increased operating resistance, air leakage, etc.. Do not use in an environment, where the product could be exposed directly to foreign materials such as powder dust, blown dust, cutting chips, spatter, etc. This could result in looseness, increased operating resistance, air leakage, etc. Contact us regarding use in this kind of environment.. Do not use in direct sunlight.. When there are heat sources in the surrounding area, block off them off. When there are heat sources in the surrounding area, radiated heat may cause the product s temperature to rise and exceed the operating temperature range. Block off the heat with a cover, etc.. Do not subject it to excessive vibration and/or impact. Contact us regarding use in this kind of environment, since this can cause damage or a malfunction.. Be careful about the corrosion resistance of the linear guide. Be careful that the body and table use martensitic stainless steel, which is inerior to austenitic stainless steel in terms of corrosion resistance. Rust may result especially in an environment that allows water drops from condensation to stay on the surface. on djuster Option djuster 1. Refer to the below table for lock nut tightening torque. Insufficient torque will cause a decrease in the positioning accuracy. Thread size M. x 0. M. x 0. M x 0. Tightening torque (N m) When sroke adjuster is adjusted, do not hit the table with a wrench, etc. This could result in looseness.

21 Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 0 for Safety Instructions and pages to 1 for ctuator and uto Switch Precautions. on replacing standard type to symmetric type, and vice versa Switch rail, axial piping plate and port location can be changed symmetrically. In the event of replacing them, secure with the tightening torque below. Thread Cross-recessed head machine screw Stud Dedicated plug Hexagon socket set screw Thread size M1.7 x 0. M x 0. M x 0. M x 0. Tightening torque (N m) No need to applying sealant to the dedicated plug, and stud when exchanging. Switch rail part Switch rail Cross-recessed head machine screw Magnet assembly Switch rail part xial piping part Hexagon socket set screw Stud xial piping plate D- -X

Air Slide Table. Traveling parallelism: mm. Mounting from the through-holes on the top. Tapped for mounting a work piece

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