Air Slide Table. Series MXQ. Improved load resistance. High precision, compact design. Symmetric type is also standardized.

Transcription

1 ir Slide Table Series MXQ,,, 1,, igh precision, compact design Positioning hole Workpiece mounting taps mproved strength Dual rods Comparison of MXQ and MXS MXQ- MXS- Repeatability Parallelism eight tolerance.. Wide variety of adjuster option mproved workpiece mounting repeatability End plate uses extra super duralumin. (Except the one with buffer) Twice the output of conventional cylinders ±. ±. Recirculating linear guide Wide type linear guide block body made of martensitic stainless steel Width Dimensions eight Overall length mproved load resistance Load resistance against sudden and excessive external forces is nearly three times greater than Series MXS. Symmetric type is also standardized. vailable for all option ody mounting through-hole uto switch mounting groove uto switches can be mounted in grooves provided on the side of the body where they do not protrude. ntegrating table with guide rail Made of martensitic stainless steel Positioning hole Reproducibility for mounting on the body has been improved. ody mounting taps Mounting is possible from directions. 1. Lateral mounting (ody tapped) MX MXU MXS MXQ MX MXW MX MXP MXY MTS Wide Variety of Option djuster option and function option can be combined Symmetric type djuster option With stroke adjuster unctional option With buffer mechanism. Lateral mounting (ody through-hole). Vertical mounting (ody tapped) With shock absorber With end lock xial piping type s -axis for picking and placing pplication Example or positioning of pallets on a conveyor D- ndividual

2 ir Slide Table Series MXQ Series Variations Standard type MXQ MXQ MXQ MXQ1 MXQ MXQ Symmetric type MXQL MXQL MXQL MXQ1L MXQL MXQL djuster Option djuster at extension end ore size 1 Retraction end adjuster Standard stroke With uffer Mechanism uffer mechanism in operational condition uto switch Rubber stopper Extension end Retraction end oth ends unctional Option djuster option Shock absorber Extension end Retraction end oth ends Protects workpieces and tools, etc., by eliminating impact at the end of the extension stroke. uffer unit is auto switch capable. ( ) Normally O ON is buffer in operation. Metal stopper Extension end Retraction end oth ends Spring unctional option With buffer With end lock xial piping type With End Lock Lock piston uto switch Reed auto switch D-9 D-9 V Solid state auto switch D-M9 D-M9 V -color indication solid state auto switch D-M9 W D-M9 WV olds the cylinder s home position to prevent dropping of the workpiece even if the air supply is cut off. Cylinder air supply port MX MXU MXS MXQ MX MXW MX MXP MXY MTS uffer stroke Magnet Three different types of adjusting bolt have been standardized for front end rear and double end adjusters and cushion mechanisms. Rubber stopper Standard stroke adjuster Shock absorber or use in harsh conditions. bsorbs the impact at the stroke end for smooth stopping. mproved stopping accuracy. Metal stopper mproved stopping accuracy. Without cushioning function for use with light loads and low speeds. Normal condition Magnet pplication Example uto switch( Normally ON O is buffer in operation. ) The normally ON/O setting is changed by changing the direction of the auto switch mounting. n workpiece insertion processes when there is a problem such as faulty positioning, the buffer mechanism absorbs the shock from the workpiece impact to prevent damage. Locked Unlocked xial Piping Type Centralized piping in axial direction to maintain clear space around the body. ir gripper Workpiece uffer mechanism Speed controller D- N ndividual 9

3 Series MXQ Selection Selection Step ormula/data Selection Example 1 Operating Conditions Enumerate the operating conditions considering the mounting position and workpiece configuration. inetic Energy ind the kinetic energy E () of the load. ind the allowable kinetic energy Ea (). Confirm that the kinetic energy of the load does not exceed the allowable kinetic energy. Load actor to be used Type of cushion Workpiece mounting position Mounting orientation verage speed Va (mm/s) Load mass W (kg): ig. (1) Overhang Ln ig. () -1 Load actor of Load Mass ind the allowable load mass Wa (kg). Wa = β Wmax No need to consider this load Workpiece mounting coefficient : ig. () factor in the case of using perpendicularly in a vertical llowable load weight coefficient β: raph (1) position. (Define α1 =.) Max. allowable load mass Wmax: Table () ind the load factor of the load α1 = W/Wa weight α1. - Load actor of the Static Moment ind the static moment M (N m). ind the allowable static moment Ma (N m). ind the load factor α of the static moment. 1 V E = W () 1 Collision speed V = 1. Va Ea = E max ) Correction factor (Reference values) Workpiece mounting coefficient : ig. () Max. allowable kinetic energy Emax: Table (1) inetic energy (E) llowable kinetic energy (Ea) M = W x 9. (Ln + n)/1 Correction value of moment center position distance n: Table () Ma = γ Mmax Workpiece mounting coefficient : ig. () llowable moment coefficient γ : raph () Maximum allowable moment Mmax: Table () α = M/Ma L1 Yawing L L+ 1 E = x 1 () =. 1 V = 1. x = Ea = 1x.11 =.11 Cylinder: MXQ1- Cushion: Rubber stopper Workpiece table mounting Mounting: orizontal wall mounting verage speed: Va = [mm/s] Load mass: W = 1 [kg] L1 = 1 mm L = mm L = mm Can be used based on E =. Ea =.11 Examine My. My = 1 x 9. (1 + )/1 =.9 = May = 1 x 1 x 1 = 1 Mymax = 1 = 1 γ = 1 α =.9/1 =. Wa = 1 x 1 x = = 1 β = 1 Wmax = α1 = 1/ =. Rolling Examine Mr. Mr = 1 x 9. ( + 1.)/1 =.9 = 1. Mar = Mrmax = = 1 γ = 1 α' =.9/ =.11 - Load actor of Dynamic Moment ind the dynamic moment Me (N m). (Ln + n) Me = 1/ We x 9. 1 Collision equivalent to impact We = δ W V δ: umper coefficient Rubber stopper without adjuster = /1 Shock absorber = 1/1 Metal stopper= 1/1 Correction value of moment center position distance n: Table () Pitching Examine Mep. ( + 1.) Mep = 1/ x 1. x 9. x =. 1 We = /1 x 1 x = 1. = 1. Meap = 1 x. x 1 =. = 1 γ =. Mpmax = 1 α =./. =. ind the allowable dynamic moment Mea (N m). ind the load factor α of the dynamic moment. Mea = γ Mmax Workpiece mounting coefficient : ig. () llowable moment coefficient γ : raph () Max. allowable moment Mmax: raph () α = Me/Mea Yawing Examine Mey. ( +.) Mey = 1/ x 1. x 9. x =. 1 We=1 =. Meay =. (Same value as Meap) α' =./. =. - Sum of the Load actors Use is possible if the sum of the load factors does not exceed 1. Σαn = α1 + α + + αn 1 Σαn = α1 + α + α' + α + α' = =.9 1 nd it is possible to use. 9

4 ir Slide Table Series MXQ ig. (1) Load Mass: W (kg) MXQ MXQ MXQ MXQ1 MXQ MXQ MXQ MXQ MXQ MXQ1 MXQ MXQ W W Symbol W No need to consider this load factor in the case of using perpendicularly in a vertical position. Symbol n (n = 1 to ) E Emax Ln (n = 1 to ) M (Mp, My, Mr) Ma (Map, May, Mar) Me (Mep, Mey) Mea (Meap, Meay) Mmax (Mpmax, Mymax, Mrmax) V Mp Mp W W L1 L1 Mep llowable kinetic energy djuster option Without adjuster Rubber stopper Shock absorber Metal stopper MXQ MXQ MXQ MXQ1 MXQ MXQ Caution The maximum operating speed for metal stopper is mm/s MXQ MXQ MXQ MXQ1 MXQ MXQ Correction value of moment center position distance (Refer to igure ().) 1, Stroke L Pitch/Yaw moment: Mpmax/Mymax Stroke ig. () Overhang: Ln, Correction Value of Moment Center Position Distance: n Static moment Dynamic moment Pitch moment Yaw moment Roll moment 1 My My Mey Static moment: Moment generated by gravity Dynamic moment: Moment generated by impact when colliding with stopper Table (1) llowable inetic Energy: Emax () Table () Definition Correction value of moment center position distance inetic energy llowable kinetic energy Overhang Static moment (Pitch,Yaw,Roll) llowable static moment (Pitch,Yaw,Roll) Dynamic moment (Pitch,Yaw) llowable dynamic moment (Pitch,Yaw) Maximum allowable moment (Pitch,Yaw,Roll) Collision speed L W W L L Maximum allowable load weight Mr Mr Maximum llowable Load Mass: Wmax (kg) Table () Correction Value of Moment Center Position Distance: n or,, and,there is no difference in the corrected values due to the stroke. Table () Maximum llowable Moment: Mmax (N m) Roll moment: Mrmax Stroke Unit mm mm Nám Nám Nám Nám Nám mm/s 1 1 W W L L Symbol Va W Wa We Wmax = > C ig. () Workpiece Mounting Coefficient: Table mounting W W =1 End plate mounting =. raph (1) llowable Load Mass Coefficient: > llowable load mass coefficient: > 1 verage speed Va (mm/s) raph () llowable Moment Coefficient: C llowable moment coefficient: C 1 verage speed Va (mm/s) Collision speed V (mm/s) Use the average speed when calculating static moment. Use the collision speed when calculating dynamic moment. Definition verage speed Load mass llowable load mass Weight equivalent to impact Max. allowable load mass Load factor llowable load mass coefficient llowable moment coefficient Workpiece mounting coefficient Unit mm/s kg kg kg kg 91 MX MXU MXS MXQ MX MXW MX MXP MXY MTS D- ndividual

5 ir Slide Table Series MXQ ø, ø, ø, ø1, ø, ø ow to Order MXQ S R M9W Type Nil TN T ø ø ø ø1 ø ø Nil S T S (1) T (1) (1) CS CT C ST (1) SCT ST (1) SCT (1) CST CST (1) Port thread type M thread Rc NPT ø to ø1 ø, ø ore size/stroke 1,,,, 1,,,,, 1,,,,,, 1 1,,,,,, 1, 1,,,,,, 1,, 1 1,,,,,, 1,, 1 Symmetric type Nil Standard type L Symmetric type Without adjuster Extension end adjuster Retraction end adjuster Double end adjuster Extension end absorber Retraction end absorber Double absorber Extension end metal stopper Retraction end metal stopper Double metal stopper Extension end adjustor + Retraction end absorber Extension end adjustor + Retraction end metal stopper Extension end absorber + Retraction end adjuster Extension end absorber + Retraction end metal stopper Extension end metal stopper + Retraction end adjuster Extension end metal stopper + Retraction end absorber Special function djuster option Note 1) W/ shock absorber is not available in Series MXQ. -wire (NPN) -wire (PNP) -wire -wire (NPN) -wire (PNP) -wire -wire (NPN equivalent) unctional option Nil Standard type With buffer R () With end lock P xial piping type R () With buffer and end lock P With buffer, xial piping type Note ) W/ end lock is not available in Series MXQ. Option Combinations djuster option V V unctional option Load voltage DC V, V V V, V V V V Nil R P R P C 1 V 1 V or less uto switch model Perpendicular M9NV M9PV M9V M9NWV M9PWV M9WV 9V 9V 9V Number of auto switches Nil S n n-line M9N M9P M9 M9NW M9PW M9W pcs. 1 pc. n pcs. uto switch Nil Without auto switch (uilt-in magnet) or the applicable auto switch model, refer to the table below. or the applicable auto switch to buffer, refer to page 9. t requires to order separately. Nil S () () () T () S T CS () () () CT C () ST () SCT () ST SCT CST () CST () : vailable, : Not available Note ) With the combination of buffer mechanism and extension end stroke adjuster, the buffer stroke decreases by the amount of stroke adjusted with the extension end stroke adjuster. pplicable uto Switch/Refer to pages to for the detailed specifications of auto switches. Reed switch Solid state switch Diagnostic indication (-color indication) Electrical entry rommet rommet No Yes Yes ndicator light Wiring (Output) -wire Lead wire length symbols:. m Nil (Example) M9NW 1 m M (Example) M9NWM m L (Example) M9NWL m (Example) M9NW Since there are other applicable auto switches than listed, refer to page for details. or details about auto switches with pre-wired connector, refer to pages and. uto switches are shipped together (not assembled). 9 Lead wire length (m). (Nil) 1 (M) (L) () Made to Order Refer to page 9 for details. Pre-wired connector Solid state auto switches marked with are produced upon receipt of order. pplicable load C circuit C circuit C circuit C circuit Relay, PLC Relay, PLC

6 ir Slide Table Series MXQ Specifications Symbol -X -X9 -X11 -X -X1 -X -X1 -X -X9 -X -X Made to Order Specifications (or details, refer to pages to 1.) PTE grease rease for food Specifications djusting bolt, long specification (djustment range: 1 mm) djusting bolt, long specification (djustment range: mm) eat treated metal stopper bolt (djustment range: mm) eat treated metal stopper bolt (djustment range: 1 mm) eat treated metal stopper bolt (djustment range: mm) Without built-in auto switch magnet luororubber seals nti-corrosive specifications for guide section EPDM seals or clean room specifications, refer to Pneumatic Clean Series catalog. ore size Piping port size luid ction Operating pressure Proof pressure mbient and fluid temperature Piston speed Cushion Lubrication uto switch Stroke length tolerance Option djuster option unctional option 1 M x. ir Double acting.1 to. MPa 1. MPa 1 to C to mm/s (djuster option/metal stopper: to mm/s) Rubber bumper (Standard, djuster option/rubber stopper) Shock absorber (djuster option/shock absorber) None (djuster option/metal stopper) Non-lube Reed auto switch (-wire, -wire) Solid state auto switch (-wire, -wire) -color indication solid state auto switch (-wire, -wire) Rubber stopper Shock absorber Metal stopper With buffer () mm Extension end (S) Retraction end (T) oth ends () Extension end (S) Retraction end (T) oth ends () Extension end (CS) Retraction end (CT) oth ends (C) With end lock (R) xial piping type (P) +1 Rc 1/, NPT 1/, 1/ Stroke adjustment range to mm W/ shock absorber is not available in Series MXQ. Stroke adjustment range to mm W/ end lock is not available in Series MXQ. or details of adjuster and functional option, refer to pages 9 and 9 in Option Specifications. MX MXU MXS MXQ MX MXW MX MXP MXY MTS Standard Stroke MXQ MXQ MXQ MXQ1 MXQ MXQ Standard stroke 1,,,, 1,,,,, 1,,,,,, 1 1,,,,,, 1, 1,,,,,, 1,, 1 1,,,,,, 1,, 1 D- ndividual 9

7 Series MXQ Theoretical Output The dual rod ensures an output twice that of existing cylinders. ore size 1 Rod size 1 Operating direction OUT N OUT N OUT N OUT N OUT N OUT N Piston area (mm ) Theoretical output (N) = Pressure (MPa) x Piston area (mm ) OUT N Operatingpressure (MPa) (N) Mass (g) MXQ MXQ MXQ MXQ1 MXQ MXQ Standard stroke dditional weight of adjuster option Rubber stopper Shock absorber Metal stopper With buffer Extension end Retraction end Extension end Retraction end Extension end Retraction end Extra for option With end lock xial pipingtype (S: Stroke ) 1 +. S +. S +. S +. S 1 +. S +. S Option Specifications Stroke djustment Range of djuster Option (dentical for extension and retraction ends) Type Rubber stopper With shock absorber Metal stopper Stroke adjustment range tomm Refer to the dimensions on page. tomm * Optional wide adjustment range adjuster are available with rubber stopper and metal stopper. ow to Order Stroke djuster (ccessory) MXQ S L X11 S T S T CS CT 9 djuster option Rubber stopper Shock absorber Metal stopper Extension end Retraction end Extension end Retraction end Extension end Retraction end 1 Symmetric type Nil L 1 Standard type Symmetric type pplicable bore size djustment range Nil -X11 -X mm 1 mm mm Standard Option Note 1) -X (adjustingrange: mm) is not available in Series MXQ. Note ) -X11 and -X are not available with shock absorber. Note ) W/ Shock absorber is not available in Series MXQ. Note ) or dimensions, refer to pages to. or the symmetric type, refer to the external dimensions symmetrically. (Symmetric type is what the direction of the adjustingbolt is reversed.)

8 ir Slide Table Series MXQ Table ccuracy Shock bsorber Specifications Radial internal clearance (µm) to to to 1 to to 1 to MXQ MXQ MXQ MXQ1 MXQ MXQ... side parallelism to side side traveling parallelism to side C side perpendicularity to side M dimension tolerance W dimension tolerance 1) ±.1 mm for mm or longer stroke MXQ MXQ MXQ MXQ1 MXQ MXQ C M W Refer to Table (1). Refer to raph (1).. mm ±. mm (±.1 mm) 1 ±.1 mm Table (1) Side Parallelism to Side Stroke Radial clearance raph (1) Side Traveling Parallelism to Side Traveling parallelism Stroke Shock absorber model pplicable slide table Max. energy absorption () Stroke absorption Max. collision speed (mm/s) Max. operating frequency (cycle/min) Max. allowable thrust (N) mbient temperature range ( C) Spring force (N) Mass (g) Extended Retracted R R R R111 R1 MXQ MXQ MXQ1 MXQ MXQ.9 MXQ MXQ MXQ MXQ MXQ MXQ1 MXQ MXQ With End Lock Specifications uffer Mechanism Specifications 1 1. MXQ1 1 to mm/s to 1 to.. pplicable uto Switch to uffer MXQ The shock absorber service life is different from that of the MXQ cylinder depending on operating conditions. Refer to the R Series Specific Product Precautions for the replacement period. ore size Piston speed olding force (N) or caution on end lock, refer to page 1. ore size Piston speed uffer stroke uffer stroke load (N) Stroke at Maximum stroke MXQ to mm/s (orizontal mounting to mm/s) Note 1) or caution on handling the one with buffer mechanism,refer to page 1. Note ) The buffer stroke decreases by the amount of stroke adjusted with the extension end stroke adjuster. 1 9 MX MXU MXS MXQ MX MXW MX MXP MXY MTS Traveling parallelism: The amount of deflection on a dial gauge when the table travels a full stroke with the body secured on a reference base surface. Type Solid state switch model D-M9V D-M9NV D-M9PV Specifications With light, -wire With light, -wire, Output: NPN With light, -wire, Output: PNP The auto switch for buffer must be ordered separately. Electrical entry direction Vertical D- ndividual 9

9 Series MXQ Table Deflection (Reference Values) Table displacement due to pitch moment load Table displacement when loads are applied to the section marked with the arrow at the full stroke. Table displacement due to yaw moment load Table displacement when loads are applied to the section marked with the arrow at the full stroke. Table displacement due to roll moment load Table displacement of section when loads are applied to the section with the slide table retracted. Lr ø ø ø Lr= mm Table displacement amount MXQ- MXQ- MXQ- MXQ- MXQ-1 Table displacement amount...1 MXQ- MXQ- MXQ- MXQ- MXQ-1 Table displacement amount.1.1. MXQ-1 MXQ- MXQ- MXQ- MXQ- 1 1 Load (N) Load (N) Load (N) ø ø ø Lr= mm Table displacement amount... MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 Table displacement amount...1 MXQ- MXQ- MXQ- MXQ- MXQ-1 MXQ- Table displacement amount.1. MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ- Load (N) Load (N) Load (N) ø Table displacement amount MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 ø Table displacement amount....1 MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 ø Table displacement amount MXQ-1 MXQ- MXQ- Lr=9 mm MXQ- MXQ- MXQ- MXQ Load (N) Load (N) Load (N) 1 9

10 ir Slide Table Series MXQ The graphs below show the table displacement when the static moment load is applied to the table. The graphs do not show the loadable mass. Refer to the Selection for the loadable mass. Table displacement due to pitch moment load Table displacement when loads are applied to the section marked with the arrow at the full stroke. Table displacement due to yaw moment load Table displacement when loads are applied to the section marked with the arrow at the full stroke. Table displacement due to roll moment load Table displacement of section when loads are applied to the section with the slide table retracted. MX Lr MXU ø1 Table displacement amount... MXQ1- MXQ1-1 MXQ1- MXQ1- MXQ1- MXQ1- MXQ1- MXQ1-1 ø1 Table displacement amount... MXQ1- MXQ1- MXQ1- MXQ1- MXQ1-1 MXQ1- MXQ1- MXQ1-1 ø1 Table displacement amount....1 MXQ1-1 MXQ1- MXQ1- MXQ1- Lr= mm MXQ1- MXQ1- MXQ1-1 MXQ1- MXS MXQ MX MXW MX MXP Load (N) Load (N) 1 Load (N) MXY ø Table displacement amount... MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ-1 MXQ- MXQ- MXQ-1 ø Table displacement amount.... MXQ- MXQ- MXQ- MXQ- MXQ-1 MXQ- MXQ- MXQ-1 MXQ-1 ø Table displacement amount... MXQ-1 MXQ- MXQ- MXQ- Lr=1 mm MXQ- MXQ- MXQ-1 MXQ- MXQ-1 MTS 1 Load (N) 1 Load (N) 1 Load (N) ø Table displacement amount... MXQ- MXQ-1 MXQ- MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ-1 ø Table displacement amount MXQ- MXQ- MXQ-1 MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ-1 ø Table displacement amount.... MXQ- 1 MXQ- MXQ- MXQ- Lr= mm MXQ- MXQ- MXQ-1 MXQ- MXQ-1 1 Load (N) 1 Load (N) Load (N) D- ndividual 9

11 Series MXQ Dimensions: MXQ asic style x M. x. thread depth or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.) Operating port x M x. Max. 1 (Retraction end adjuster) (djuster at extension end).. djuster at extension end. (djuster at extension end) x M x. thread depth +. ø9 depth. 11 M +. ø depth.. N 1 x (NN 1) x.. +. depth.. N x M x. thread depth Note 1) Note ) x M. x. thread depth.. Retraction end adjuster +. 9 depth. ø. Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction. 1.. x M. x. thread depth. ø. ø ø ottom view of MXQ- NN x M x. thread depth Section 1.. ø. Section ø MXQ-1 MXQ- MXQ- MXQ- MXQ- 1 N Refer to the bottom view of MXQ-. 9 NN M

12 ir Slide Table Series MXQ With buffer (ø): MXQ- x M x. thread depth MX 1 MXU.. Operating port x M x.. MXS MXQ MX MXW MX MXP MXY MTS xial piping type (ø): MXQ- P.. D- ndividual 99

13 Series MXQ Dimensions: MXQL/Symmetric Type asic style or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.) x M x. thread depth. x M. x. thread depth M.. Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction. (djuster at extension end) N 1 x +. depth x M. x. thread depth. 1 djuster at extension end. (djuster at extension end). +. ø depth. Retraction end adjuster N x M x. thread depth Note 1) Note ). 1.. x M. x. thread depth +. ø9 depth. Operating port x M x.. Max. 1 (Retraction end adjuster) +. 9 depth. ø. ottom view of MXQL- ø. ø NN x M x. thread depth ø. 1 1 ø. ø (NN 1) x 1.. Section 1.. Section MXQL-1 MXQL- MXQL- MXQL- MXQL- 1 N Refer to the bottom view of MXQL-. 1 NN M

14 ir Slide Table Series MXQ With buffer (ø): MXQL-.. MX MXU MXS MXQ MX MXW 1 MX MXP x M x. thread depth.. Operating port x M x.. MXY MTS xial piping type (ø): MXQL- P D- ndividual 11

15 Series MXQ Dimensions: MXQ asic style x M x. thread depth Operating port x M x. or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.). Max. 11 (Retraction end adjuster) djuster at extension end. (djuster at extension end) 1 x M x. thread depth (djuster at extension end). 1 M ø depth N x M x. thread depth Note 1) Note ) N 1 x (NN 1) x. +. depth 1 Retraction end adjuster x M x. thread depth N x M x. thread depth. ø... Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction. ø. ø ø. 1 ottom view of MXQ-.. ø. ø MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ- +. ø9 depth N Refer to the bottom view of MXQ-. 1 NN depth N NN x M x. thread depth Section M Section

16 ir Slide Table Series MXQ With shock absorber (ø): MXQ- S/T/ Shock absorber at retraction end Shock absorber at extension end Max. Max. Extension end Retraction end 1. x M x. thread depth. Operating port x M x Stroke djustable Range With buffer (ø): MXQ- Note that the top of the shock absorber unit will be higher than that of the table. 1 MX MXU MXS MXQ MX MXW MX MXP MXY MTS With end lock (ø): MXQ- R. 1 xial piping type (ø): MXQ- P 1. Operating port x M x D- ndividual. 1

17 Series MXQ Dimensions: MXQL/Symmetric Type asic style or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.) x M x. thread depth (djuster at extension end) 1 djuster at extension end. (djuster at extension end) M. N 1 x +. ø depth depth. N x M x. thread depth. 1 1 Retraction end adjuster N x M x. thread depth Note 1) Note ) Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction. x M x. thread depth 1.. ottom view of MXQL- 1.. x M x. thread depth +. ø9 depth Operating port x M x.. Max. 11 (Retraction end adjuster) +. 9 depth NN x M x. thread depth 1 (NN 1) x ø. ø. ø.. Section ø. ø. ø.. Section MXQL-1 MXQL- MXQL- MXQL- MXQL- MXQL- N Refer to the bottom view of MXQL-. 1 NN N M

18 ir Slide Table Series MXQ With shock absorber (ø): MXQL- S/T/ Stroke djustable Range Extension end Retraction end x M x. thread depth 11. * Other dimensions are the same as basic style With buffer (ø): MXQL- 1.. Max... Max. Shock absorber at extension end Shock absorber at retraction end Note that the top of the shock absorber unit will be higher than that of the table.. 1 MX MXU MXS MXQ MX MXW MX MXP MXY MTS * Other dimensions are the same as basic style With end lock (ø): MXQL- R 1. * Other dimensions are the same as basic style Operating port x M x. xial piping type (ø): MXQL- P Operating port x M x. D- ndividual * Other dimensions are the same as basic style 1

19 Series MXQ Dimensions: MXQ asic style 9. (djuster at extension end). 9. djuster at extension end x M x. thread depth +. ø9 depth Operating port x M x. 1. N x M x. thread depth Note 1) Note ) or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.) Max. 1 (Retraction end adjuster) Retraction end adjuster Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction (djuster at extension end). x M x. thread depth 1 N 1 x M +. 9 depth 1. 9 x M x. thread depth N x M x. thread depth ottom view of MXQ (NN 1) x ø. ø. ø9 ø. ø. ø9 +. ø9 depth MXQ- 1 MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 N Refer to the bottom view of MXQ-. 1 NN N +. 9 depth M NN x M x. thread depth 1 Section Section

20 ir Slide Table Series MXQ With shock absorber (ø): MXQ- S/T/ Shock absorber at extension end Shock absorber at retraction end 9. Max. 1 1 Max. 9. Stroke djustable Range Extension end Retraction end With buffer (ø): MXQ- 1 x M x. thread depth MX MXU MXS MXQ MX MXW MX MXP MXY MTS With end lock (ø): MXQ- R Operating port x M x. 1 xial piping type (ø): MXQ- P 1 1. Operating port x M x. 1.. D- ndividual

21 Series MXQ Dimensions: MXQL/Symmetric Type asic style or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.) x M x. thread depth 1 1 (djuster at extension end). 1 M N 1 x depth 1. 1 N x M x. thread depth Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction. 9. x M x. thread depth +. ø9 depth N x M x. thread depth Note 1) Note ) djuster at extension end Retraction end adjuster. 9. (djuster at extension end) 1 x M x. thread depth. +. ø9 depth 9. Operating port x M x. Max. 1 (Retraction end adjuster) depth. ottom view of MXQL NN x M x. thread depth 1 ø. ø. ø9 ø. ø. ø9 (NN 1) x 1 Section 1 Section MXQL- 1 MXQL- MXQL- MXQL- MXQL- MXQL- MXQL-1 N Refer to the bottom view of MXQL-. 1 NN N M

22 ir Slide Table Series MXQ With shock absorber (ø): MXQL- S/T/ Stroke djustable Range Extension end Retraction end x M x. thread depth 1. 1 With buffer (ø): MXQL Max. 1 1 Max. 9. Shock absorber at extension end Shock absorber at retraction end 1 MX MXU MXS MXQ MX MXW MX MXP MXY MTS With end lock (ø): MXQL- R Operating port x M x. xial piping type (ø): MXQL- P.. 1 Operating port x M x. D ndividual

23 Series MXQ Dimensions: MXQ1 asic style x M x. thread depth or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.) 9. (djuster at extension end) (djuster at extension end) 11.. x M x 1 thread depth djuster at extension end 1 1 M +. ø9 depth N 1 x. (NN 1) x. 1 1 Operating port x M x depth 11 N x M x. thread depth Note 1) Note ) x M x. thread depth ottom view of MXQ1- N x M x. thread depth. 1. ø.1 Max. (Retraction end adjuster) Retraction end adjuster Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction. ø9. ø1. ø ø9. ø1. MXQ1-1 MXQ1- MXQ1- MXQ1- MXQ1- MXQ1- MXQ1-1 MXQ1- +. ø9 depth N Refer to the bottom view of MXQ NN depth N NN x M x 1 thread depth M Section Section

24 ir Slide Table Series MXQ With shock absorber (ø1): MXQ1- S/T/ Shock absorber at retraction end. Max. Shock absorber at extension end. x M x 1 thread depth Operating port x M x..... Max. Stroke djustable Range Extension end Retraction end With buffer (ø1): MXQ1-1 MX MXU MXS MXQ MX MXW MX MXP MXY MTS With end lock (ø1): MXQ1- R 9 xial piping type (ø1): MXQ1- P 1 1 Operating port x M x.. D- ndividual

25 Series MXQ Dimensions: MXQ1L/Symmetric Type asic style or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.) N x M x. thread depth x M x 1 thread depth (djuster at extension end). 1 M 1 N 1 x depth 1 Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction. 9. x M x. thread depth.. (djuster at extension end) +. ø9 depth djuster at extension end Retraction end adjuster N x M x. thread depth Note 1) Note ) 11. ottom view of MXQ1L x M x. thread depth Operating port x M x. +. ø9 depth Max. (Retraction end adjuster) +. 9 depth 11 NN x M x 1 thread depth 1 ø.1 ø9. ø1. ø.1 ø9. ø (NN 1) x Section Section MXQ1L- 1 MXQ1L- MXQ1L- MXQ1L- MXQ1L- MXQ1L- MXQ1L-1 MXQ1L- N Refer to the bottom view of MXQ1L-. 1 NN N M

26 ir Slide Table Series MXQ With shock absorber (ø1): MXQ1L- S/T/ Stroke djustable Range Extension end Retraction end x M x 1 thread depth With buffer (ø1): MXQ1L Max. Max.. Shock absorber at extension end Shock absorber at retraction end. MX MXU MXS MXQ MX MXW MX MXP MXY MTS With end lock (ø1): MXQ1L- R 9 Operating port x M x. xial piping type (ø1): MXQ1L- P Operating port x M x. D- ndividual 1 11

27 Dimensions: MXQ asic style or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.). (djuster at extension end). 1 x M x 1 thread depth 1 +. ø9 depth 1. (djuster at extension end) djuster at extension end x M x 1 thread depth Operating port x Rc 1/ (NPT 1/, 1/) 1 M N x M x. thread depth Note 1) Note ) N -1 x depth Series MXQ (NN-1) x 1 1 x M x. thread depth ottom view of MXQ- N x M x 1 thread depth 9 ø.1 Max.1 (Retraction end adjuster) Retraction end adjuster Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction. 1. ø9. ø11 ø.1 1. ø9. ø11 MXQ- 1 MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 MXQ- MXQ-1 N 1 9 Refer to the bottom view of MXQ ø9 depth NN depth N NN x M x 1 thread depth Section M Section

28 ir Slide Table Series MXQ With shock absorber (ø): MXQ- S/T/ Shock absorber at retraction end. Shock absorber at extension end. Max... 1 Max.. x M x 1 thread depth 1 1. Operating port x Rc 1/ (NPT 1/, 1/). 1 Stroke djustable Range MX Extension end Retraction end MXU Other dimensions are the same as basic style. Note that the top of the shock absorber unit will be higher than that of the table. MXS MXQ With buffer (ø): MXQ- MX MXW. MX MXP. MXY. MTS Other dimensions are the same as basic style. With end lock (ø): MXQ- R Other dimensions are the same as basic style. xial piping type (ø): MXQ- P Operating port x Rc 1/ (NPT 1/, 1/) 11. D- ndividual Other dimensions are the same as basic style. 1 11

29 Series MXQ Dimensions: MXQL/Symmetric Type asic style or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.). x M x 1 thread depth 1 N x M x 1 thread depth x M x. thread depth (djuster at extension end) 1 M N 1 x depth 1. Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction. 1. (djuster at extension end) +. ø9 depth djuster at extension end Retraction end adjuster N x M x. thread depth Note 1) Note ) 1 ottom view of MXQL-. x M x 1 thread depth Operating port x Rc 1/ (NPT 1/, 1/) +. ø9 depth +. 9 depth Max. 1 (Retraction end adjuster) NN x M x 1 thread depth ø.1 ø9. ø11 ø.1 ø9. ø11 9 MXQL- 1 MXQL- MXQL- MXQL- MXQL- MXQL- MXQL-1 MXQL- MXQL-1 N 1 9 Refer to the bottom view of MXQL-. 11 NN (NN 1) x Section Section N M

30 ir Slide Table Series MXQ With shock absorber (ø): MXQL- S/T/ Stroke djustable Range Extension end Retraction end x M x 1 thread depth With buffer (ø): MXQL- 1 1 Max.. Max... Shock absorber at retraction end.... Shock absorber at extension end Note that the top of the shock absorber unit will be higher than that of the table. MX MXU MXS MXQ MX MXW MX MXP MXY MTS With end lock (ø): MXQL- R. Operating port x Rc 1/ (NPT 1/, 1/) xial piping type (ø): MXQL- P Operating port x Rc 1/ (NPT 1/, 1/) D- ndividual 1

31 Series MXQ Dimensions: MXQ asic style. (djuster at extension end) 1.. x M x 1. thread depth (djuster at extension end) 1 1 djuster at extension end x M x 1. thread depth 9 Operating port x Rc 1/ (NPT 1/, 1/) 1 M +. ø9 depth N 1 x (NN 1) x N x M x 1 thread depth 11 Note 1) Note ) +. 9 depth 1 1 or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.) Max. (Retraction end adjuster) Retraction end adjuster 1. Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction. N x M x 1. thread depth 11. x M x 1 thread depth 1 ø11 ø. ottom view of MXQ- ø. 11. ø. ø11 ø MXQ- 1 MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 MXQ- MXQ-1 +. ø9 depth N 1 Refer to the bottom view of MXQ-. 11 NN depth N NN x M x 1. thread depth 1 M Section Section

32 ir Slide Table Series MXQ With shock absorber (ø): MXQ- S/T/ Shock absorber at retraction end. Max. 9 Shock absorber at extension end. 1 Max. x M x 1. thread depth Operating port x Rc 1/ (NPT 1/, 1/) 9 1. Stroke djustable Range Extension end Retraction end With buffer (ø): MXQ-. 9. MX MXU MXS MXQ MX MXW MX MXP MXY MTS With end lock (ø): MXQ- R xial piping type (ø): MXQ- P Operating port x Rc 1/ (NPT 1/, 1/) D- ndividual 1

33 Series MXQ Dimensions: MXQL/Symmetric Type asic style or detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster. Rubber stopper (Refer to page.) Metal stopper (Refer to page.) 9. x M x 1. thread depth (djuster at extension end) 1 M N 1 x +. 9 depth N x M x 1. thread depth 1. Note 1) f long bolts are used, they can touch the guide block and cause malfunction, etc. Refer to the Specific Product Precautions. Note ) Since the table is made of a magnetic substance, it could become magnetized if touched by a magnet, etc. This could cause auto switch malfunction. x M x 1 thread depth 1. (djuster at extension end) djuster at extension end +. ø9 depth Retraction end adjuster N x M x 1 thread depth 11 Note 1) Note ). ottom view of MXQL x M x 1. thread depth 9 1 Operating port x Rc 1/ (NPT 1/, 1/) +. ø9 depth Max. (Retraction end adjuster) 1 NN x M x 1. thread depth 1 (NN 1) x +. 9 depth 11. Section ø. ø11 ø 11. Section ø. ø11 ø MXQL- 1 MXQL- MXQL- MXQL- MXQL- MXQL- MXQL-1 MXQL- MXQL-1 N 1 Refer to the bottom view of MXQL-. NN N M

34 ir Slide Table Series MXQ With shock absorber (ø): MXQL- S/T/ Stroke djustable Range Extension end Retraction end 1.. Max. 9 1 Max. Shock absorber at retraction end. MX MXU Shock absorber at extension end MXS With buffer (ø): MXQL- MXQ MX x M x 1. thread depth MXW MX MXP MXY MTS With end lock (ø): MXQL- R 9 Operating port x Rc 1/ (NPT 1/, 1/) xial piping type (ø): MXQL- P Operating port x Rc 1/ (NPT 1/, 1/) D- ndividual 1

35 Series MXQ External Dimensions of djuster Rubber Stopper (S/T) Extension End ody mounting section D M P pplicable size MXQ (L) MXQ-S (L) MXQ-S (L)-X11 Stroke adjustment range 1 ody mounting section C D E M 1... M x. P 1) M. x. Table mounting section Q 1). M. x MXQ (L) MXQ-S (L) MXQ-S ( L)-X M x 1 M x M x 1 C E MXQ (L) MXQ-S (L)-X MXQ-S (L) MXQ-S (L)-X11 MXQ-S (L)-X M x 1 M x M x Table mounting section Q MXQ1 (L) MXQ-S1 (L) MXQ-S1 (L)-X11 MXQ-S1 (L)-X M1 x 1 M x M x 1 MXQ (L) MXQ-S (L) MXQ-S (L)-X M x 1. M x M x 1 MXQ (L) MXQ-S (L)-X MXQ-S (L) MXQ-S (L)-X M1 x 1. M x 1 1 M x 1 MXQ-S (L)-X. Retraction End 1) Size of hexagon socket head cap screw ) t is also available in the symmetric type. or ow to Order, refer to page 9. Dimensions are the same as standard type. pplicable size Stroke adjustment range C D E 1) MXQ-T (L) MXQ (L) MXQ-T (L)-X M x. M. x D E MXQ-T (L) MXQ (L) MXQ-T (L)-X11 MXQ-T (L)-X M x 1 M x MXQ-T (L) MXQ (L) MXQ-T (L)-X M x 1 M x 1 MXQ-T (L)-X. C MXQ-T1 (L) MXQ1 (L) MXQ-T1 (L)-X11 MXQ-T1 (L)-X MXQ-T (L) MXQ (L) MXQ-T (L)-X M1 x 1 M x 1. M x M x 1 MXQ-T (L)-X. MXQ-T (L) MXQ (L) MXQ-T (L)-X M1 x 1. M x 1 MXQ-T (L)-X. 1) Size of hexagon socket head cap screw ) t is also available in the symmetric type. or ow to Order, refer to page 9. Dimensions are the same as standard type.

36 ir Slide Table Series MXQ Dimensions of djusting olt/rubber Stopper pplicable size Stroke adjustment range C D M M D C MXQ- MXQ (L) MXQ--X11 MXQ- MXQ (L) MXQ--X11 MXQ--X MXQ- MXQ (L) MXQ--X11 MXQ--X MXQ- MXQ1 (L) MXQ--X11 MXQ--X MXQ- MXQ (L) MXQ--X11 MXQ--X MXQ- MXQ (L) MXQ--X11 MXQ--X M x. M x 1 M x 1 M1 x 1 M x 1. M1 x 1. MX MXU MXS MXQ MX MXW MX MXP ow to Order djusting olt/rubber Stopper MXY MXQ X11 MTS pplicable bore size 1 ø ø ø ø1 ø ø djustment range Nil -X11 -X mm 1 mm mm -X (adjusting range: mm) is not available in Series MXQ. or dimensions, refer to the figure above. Symmetric type is also the same. D- ndividual

37 Series MXQ External Dimensions of djuster With Shock bsorber (S/T) Extension End ody mounting section Table mounting section D P Q M C E E1 L MXQ-S (L) MXQ-S (L) MXQ-S (L) MXQ-S (L) MXQ-S1 (L) pplicable size MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) MXQ-S (L) MXQ-S (L) MXQ-S1 (L) MXQ-S (L) MXQ-S (L) Stroke adjustment range ody mounting section C D E E1 M M x 1 1. M x 1 1. M1 x 1 M1 x 1. M1 x 1. P *1) M x M x M x 1 M x 1 M x 1 Table mounting section L Q 1) M x M x M x 1 M x M x Retraction End 1) Size of hexagon socket head cap screw ) t is also available in the symmetric type. or ow to Order, refer to page 9. Dimensions are the same as standard type. D E E1 C MXQ-T (L) MXQ-T (L) MXQ-T (L) MXQ-T (L) MXQ-T1 (L) pplicable size MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) MXQ-T (L) MXQ-T (L) MXQ-T1 (L) MXQ-T (L) MXQ-T (L) Stroke adjustment range 1 C D E E1 1) M x 1 M x 1 M1 x 1 M1 x 1. M1 x 1. M x M x 1 M x M x 1 M x 1 1) Size of hexagon socket head cap screw ) t is also available in the symmetric type. or ow to Order, refer to page 9. Dimensions are the same as standard type.

38 ir Slide Table Series MXQ External Dimensions of djuster Metal Stopper (CS/CT) Extension End ody mounting section D P M E C Table mounting section Q L Retraction End pplicable size MXQ-CS (L) MXQ (L) MXQ-CS (L)-X11 MXQ-CS (L) MXQ (L) MXQ-CS (L)-X11 MXQ-CS (L)-X MXQ-CS (L) MXQ (L) MXQ-CS (L)-X11 MXQ-CS (L)-X MXQ-CS1 (L) MXQ1 (L) MXQ-CS1 (L)-X11 MXQ-CS1 (L)-X MXQ-CS (L) MXQ (L) MXQ-CS (L)-X11 MXQ-CS (L)-X MXQ-CS (L) MXQ (L) MXQ-CS (L)-X11 MXQ-CS (L)-X Stroke ody mounting section Table mounting section adjustment range C D E M P *1) L Q 1) M x. M x 1 M x 1 M1 x 1 M x 1 M x 1. M1 x 1. M. x 1. M x 1. M x. 11 M x 1 M x M. x M x 1 M x M x 1 M x M x 1) Size of hexagon socket head cap screw ) t is also available in the symmetric type. or ow to Order, refer to page 9. Dimensions are the same as standard type. 1 1 MX MXU MXS MXQ MX MXW MX MXP MXY MTS pplicable size Stroke adjustment range C D E 1) C D E MXQ-CT (L) MXQ (L) MXQ-CT (L)-X11 MXQ-CT (L) MXQ (L) MXQ-CT (L)-X11 MXQ-CT (L)-X MXQ-CT (L) MXQ (L) MXQ-CT (L)-X11 MXQ-CT (L)-X MXQ-CT1 (L) MXQ1 (L) MXQ-CT1 (L)-X11 MXQ-CT1 (L)-X MXQ-CT (L) MXQ (L) MXQ-CT (L)-X11 MXQ-CT (L)-X MXQ-CT (L) MXQ (L) MXQ-CT (L)-X11 MXQ-CT (L)-X M x. M x 1 M x 1 M1 x 1 M x 1. M1 x 1. M. x M x M x 1 M x M x 1 M x 1 1) Size of hexagon socket head cap screw ) t is also available in the symmetric type. or ow to Order, refer to page 9. Dimensions are the same as standard type. D- ndividual

39 Series MXQ Dimensions of djusting olt/metal Stopper pplicable size Stroke adjustment range C D M MXQ- MXQ (L) MXQ--X M x. MXQ- MXQ (L) MXQ--X M x 1 MXQ--X MXQ- MXQ (L) MXQ--X11 1 M x 1 MXQ--X MXQ-1 MXQ1 (L) MXQ-1-X M1 x 1 M D C MXQ-1-X MXQ- MXQ (L) MXQ--X11 MXQ--X MXQ- MXQ (L) MXQ--X11 MXQ--X 1 1 M x 1. M1 x 1. ow to Order djusting olt/metal Stopper MXQ X11 pplicable bore size MXQ MXQ MXQ MXQ1 MXQ MXQ ø ø ø ø1 ø ø djustment range Nil -X11 -X mm 1 mm mm -X (adjusting range: mm) is not available in Series MXQ. or dimensions, refer to the figure above. Symmetric type is also the same.

40 ir Slide Table Series MXQ Construction MX MXU MXS MXQ MX MXW MX MXP With buffer With end lock xial piping type Component Parts Component Parts: With End Lock No No. 1 Description ody Table End plate uide block Cover Return guide Scraper Rod Piston assembly Rod cover Seal support ead cap loating bushing Rod bumper End bumper Steel balls Parallel pin Piston seal Rod seal O-ring Description End plate Spring collar ead cap Spring Magnet Material luminum alloy Stainless steel luminum alloy Stainless steel Synthetic resin Synthetic resin Stainless steel, NR Stainless steel luminum alloy rass Synthetic resin Stainless steel Polyurethane Polyurethane igh carbon chrome bearing steel Stainless steel NR NR NR Component Parts: With uffer Replacement Parts: Seal it ore size 1 it no. MXQ -PS MXQ -PS MXQ-PS MXQ1-PS MXQ-PS MXQ-PS Contents Material luminum alloy Stainless steel Stainless steel Stainless steel Note ard anodized eat treated, Electroless nickel plated ard anodized eat treated With magnet on one side nodized Electroless nickel plated Note ard anodized Replacement Parts: Seal it for with End Lock ore size 1 it no. MXQ R-PS MXQR-PS MXQ1R-PS MXQR-PS MXQR-PS Contents No. 9 1 No. 9 1 Description Locking body Table support Rod cover Piston rod ushing lanking plug Return spring Piston seal Rod seal O-ring O-ring Description xial piping plate Pipe ushing Stud O-ring O-ring asket O-ring Material luminum alloy Carbon steel luminum alloy Stainless steel luminum alloy rass Stainless steel NR NR NR NR Component Parts: xial Piping Type Replacement Parts: Seal it for xial Piping Type ore size 1 it no. MXQ P-PS MXQ P-PS MXQP-PS MXQ1P-PS MXQP-PS MXQP-PS Note ard anodized nti-corrosive treated Chromated Electroless nickel plated Material Note luminum alloy ard anodized luminum alloy ard anodized luminum alloy Chromated rass Electroless nickel plated NR NR NR, Stainless steel NR Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Contents Replacement Parts: rease Pack pplied section uide Cylinder rease pack part no. R-S- (g) R-S-1 (1g) R-S- (g) R-S- (g) R-L- (g) R-L-1 (1g) R-L- (g) R-L- (g) MXY MTS D- ndividual

41 Series MXQ uto Switch Proper Mounting Position (Detection at Stroke End) E uto Switch Mounting Reed uto Switch: D-9, D-9, D-9, D-9V, D-9V, D-9V E Stroke Stroke MXQ MXQ MXQ MXQ1 MXQ MXQ MXQ MXQ MXQ MXQ1 MXQ MXQ Solid State uto Switch: D-M9, D-M9N, D-M9P, D-M9W, D-M9NW, D-M9PW E Stroke Stroke (1) (.). (). () 1. (9). ().. (1) (.). (1) 1. (1) 1. (9). (). (1) 1 (.). (1) 1. (1) 1. (). () 11. (9) 1 (11.). () 1. (1) 1. (9). () 11. (9) 9 (.). (). () 9. (). () (.). (). () 1. (9) 9. () 9. () () () () ().... () () () () ( ): Denotes D Solid State uto Switch: D-M9V, D-M9NV, D-M9PV, D-M9WV, D-M9NWV, D-M9PWV E Stroke Stroke MXQ MXQ MXQ MXQ MXQ MXQ djust the auto switch after confirming the operating conditions in the actual setting. Operating Range Caution uto Switch Mounting Tool When tightening the auto switch mounting screw (included with auto switch), use a watchmaker s screwdriver with a handle about to mm in diameter. Tightening Torque Tightening Torque of uto Switch Mounting Screw (N m) uto switch model D-9 (V) D-M9 (V) D-M9 W(V) Tightening torque.1 to.. to.1 Operating range uto switch model D-9, 9 V D-M9, M9 V D-M9 W, M9 WV... pplicable bore size Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed (assuming approximately ±% dispersion). t may vary substantially depending on an ambient environment uto switch mounting screw (included with auto switch) uto switch Watchmaker s screwdriver Other than the applicable auto switches listed in ow to Order, the following auto switches can be mounted. Normally closed (NC = b contact) solid state auto switches (D-9/9 types) and solid state auto switch D- are also available. Refer to pages and for details.

42 Series MXQ Specific Product Precautions 1 e sure to read before handling. Refer to front matters and for Safety nstructions and pages to 11 for ctuator and uto Switch Precautions. Selection Caution 1. Operate loads within the range of the operating limits. Select the model considering maximum allowable load and allowable moment. Refer to pages 9 and 91 for the details. When actuator is used outside of operating limits, eccentric loads on guide will be in excess of this causing vibration on guide, inaccuracy, and shortened life.. f intermediate stops by external stopper is done, avoid ejection. f lurching occurs damage can result. When making a stop with an external stopper to be followed by continued forward movement, first supply pressure to momentarily reverse the table, then retract the intermediate stopper, and finally apply pressure to the opposite port to operate the table again.. Do not use it in such a way that excessive external force or impact force could work on it. This could result in damage. Mounting Caution 1. Do not scratch or dent the mounting side of the body, table or end plate. This can cause loss of parallelism in the mounting surfaces, vibration in the guide unit and increased operating resistance, etc.. Do not scratch or dent on the forward side of the rail or guide. This could result in looseness and increased operating resistance, etc.. Do not apply excessive power and load when work is mounted. f the external force more than the allowable moment were applied, looseness of the guide unit or increased operating resistance could take place.. latness of mounting surface should be less than. mm. Poor parallelism of the workpiece mounted on the body, the base, and other parts can cause vibration in the guide unit and increased operating resistance, etc.. Select the proper connection with the load which has external support and/or guide mechanism on the outside, and align it properly.. void contact with the body during operation. ands, etc., may get caught in the stroke adjuster. nstall a cover as a safety measure if there are instances to be near the slide table during operation.. eep away from objects which are influenced by magnets. s the body magnets are built-in, do not allow close contact with magnetic disks, magnetic cards or magnetic tapes. Data may be erased.. Do not touch a magnet to the table section. Since the table is made from the magnetic substance, it could turn to be magnetized if it stuck by a magnet, etc. That could cause auto switches, etc. to malfunction. Mounting 9. When mounting the body, use screws with appropriate length and do not exceed the maximum tightening torque. Tightening with a torque above the limit could malfunction. Whereas tightening insufficiently could result in misalignment or come to a drop. 1. Lateral Mounting (ody tapped) MXQ (L) MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) MXQ (L) MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) olt M x. M x. M x. M x 1 M x 1 M x 1. olt M x. M x. M x. M x. M x. M x 1 Maximum tightening torque (N m) l Maximum screw-in depth (l mm) 1 1. Lateral Mounting (ody through-hole) Maximum tightening torque (N m) l Vertical Mounting (ody tapped) l l mm MX MXU MXS MXQ MX MXW MX MXP MXY MTS MXQ (L) MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) olt M. x. M x. M x. M x. M x. M x 1 Maximum tightening torque (N m) Maximum screw-in depth (l mm) 1 9 D- ndividual

43 Series MXQ Specific Product Precautions e sure to read before handling. Refer to front matters and for Safety nstructions and pages to 11 for ctuator and uto Switch Precautions. MXQ (L) MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) MXQ (L) MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) Mounting Caution 1. ront Mounting l Caution To prevent the workpiece holding bolts from touching the end plate, use bolts that are. mm or more shorter than the maximum screw-in depth. f long bolts are used, they can touch the end plate and cause malfunction, etc. l olt M x. M x. M x. M x 1 M x 1 M x 1. M x. M x. M x. M x. M x. M x 1 Maximum tightening torque (N m) Top Mounting Maximum screw-in depth (l mm) uide block Caution To prevent the workpiece holding bolts from touching the guide block, use bolts that are. mm or more shorter than the maximum screw-in depth. f long bolts are used, they can touch the guide block and cause malfunction, etc. olt Maximum tightening torque (N m) Maximum screw-in depth (l mm) The positioning hole on the table and the positioning hole at the bottom of the body do not have the same center. Use these holes during reinstallation after the table has been removed for the maintenance of an identical product. Operating Environment Caution 1. Do not use in the environment, where the product could be exposed to the liquid such as cutting oil, etc. Using in the environment where the product could be exposed to cutting oil, coolant or oil, etc. could result in looseness, increased operating resistance, or air leakage, etc.. Do not use in the environment, where the product could be exposed directly to the foreign matters such as powder dust, blown dust, cutting chip, spatter etc. This could result in looseness and increased operating resistance, and air leakage, etc. Please consult with SMC regarding use in this kind of environment.. Do not use in direct sunlight.. When there are heat sources in the surrounding area, block them off. When there are heat sources in the surrounding area, radiated heat may cause the product s temperature to rise and exceed the operating temperature range. lock off the heat with a cover, etc.. Do not subject it to excessive vibration and/or impact. Please consult with SMC regarding use in this kind of environment, as this can cause damage and malfunction.. Use caution for the anticorrosiveness of linear guide section. Martensitic stainless steel is used for the table and guide block. ut, use caution that anti-corrosiveness is inferior to the austenitic stainless steel. Especially, rust may be generated in an environment where waterdrops are likely to adhere due to condensation, etc. Caution for djuster Option Stroke djuster Caution 1. Do not replace with the bolt other than the original adjusting bolt. This could result in looseness and damage due to impact forces, etc.. ollow the table for tightening torque of lock nuts. nsufficient torque will cause a decrease in the positioning accuracy. MXQ (L) MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) Tightening torque (N m) When stroke adjuster is adjusted, do not hit the table with the wrench. This could result in looseness. 1

44 Series MXQ Specific Product Precautions e sure to read before handling. Refer to front matters and for Safety nstructions and pages to 11 for ctuator and uto Switch Precautions. Caution on djuster Option With Shock bsorber Caution 1. Do not rotate the screw set on bottom of shock absorber. This is not an adjusting screw. Turning it could cause oil leakage.. Do not scratch the exposed portion of the piston rod. Durability could be degraded and lead to return defect. Piston rod Damage is not allowed. pplicable size MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) Caution pplicable size MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) Tightening torque (N m) Shock absorber model R R R R111 R1 Turning the bottom screw is not allowed.. Shock absorber is considered a consumable component. When energy absorption is decreased, replace it. Service Life and Replacement Period of Shock bsorber 1. llowable operating cycle under the specifications set in this catalog is shown below. 1. million cycles R million cycles R1 to R1 Specified service life (suitable replacement period) is the value at room temperature ( to C). The period may vary depending on the temperature and other conditions. n some cases the absorber may need to be replaced before the allowable operating cycle above. Rubber Stopper Caution MXQ (L) MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) Caution on Mounting djuster Option 1. Use caution that the length of the bolts for mounting on the body and the bolts for the table is different from each other in some models. Stroke adjuster at extension end (S) of MXQ and has the different length of a hexagon socket head cap screw for mounting on the body and on the table. Use sufficient care for mounting. f assembled by making an error in length, it could cause looseness or lead to malfunction.. ollow the table below for tightening torque of mounting bolts. nsufficient torque will cause a decrease in the positioning accuracy and lead to malfunction. Stroke adjuster at extension end (S) Table mounting section ody mounting section Thread size Tightening torque (N m) M. x. M x.9 M x.1 M x 1. M x 1. M x 1 1. Stroke adjuster at retraction end (T) Thread size Tightening torque (N m) Thread size Tightening torque (N m) M. x M x 1 M x M x 1 M x 1 M x M. x M x M x 1 M x M x 1 M x Shock bsorber Caution 1. Use caution that the length of the bolts for mounting on the body and the bolts for the table is different from each other in some models. Shock absorber at extension end (S) for MXQ and has the different length of a hexagon socket head cap screw for mounting on the body and on the table. Use sufficient care for mounting. f assembled by making an error in length, it could cause looseness or lead to malfunction.. ollow the table below for tightening torque of mounting bolts. nsufficient torque will cause a decrease in the positioning accuracy and lead to malfunction. MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) Metal Stopper Caution MXQ (L) MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L) Shock absorber at extension end (S) Table mounting section ody mounting section Thread size Tightening torque (N m) M x.9 M x.1 M x 1. M x 1. M x 1 1. Stroke adjuster at extension end (CS) Table mounting section ody mounting section Thread size Tightening torque (N m) M. x. M x.9 M x.1 M x 1. M x 1. M x 1 1. Shock absorber at retraction end (T) Thread size Tightening torque (N m) Thread size Tightening torque (N m) M x M x M x 1 M x M x M x M x 1 M x M x 1 M x Use caution that the length of the bolts for mounting on the body and the bolts for the table is different from each other in some models. Stroke adjuster at extension end (CS) of MXQ,, and has the different length of a hexagon socket head cap screw for mounting on the body and on the table. Use sufficient care for mounting. f assembled by making an error in length, it could cause looseness or lead to malfunction.. ollow the table below for tightening torque of mounting bolts. nsufficient torque will cause a decrease in the positioning accuracy and lead to malfunction. Stroke adjuster at retraction end (CT) Thread size Tightening torque (N m) Thread size Tightening torque (N m) M. x M x 1 M x M x 1 M x M x M. x M x M x 1 M x M x 1 M x MX MXU MXS MXQ MX MXW MX MXP MXY MTS D- ndividual

45 Series MXQ Specific Product Precautions e sure to read before handling. Refer to front matters and for Safety nstructions and pages to 11 for ctuator and uto Switch Precautions. With End Lock Caution Caution on andling unctional Option 1. Use position, or port solenoid valves. malfunction may occur with a control circuit that exhausts from both ports, such as exhaust center position valves. Recommended pneumatic circuit With uffer Mechanism Caution 1.t must be oriented as shown below. n horizontal operation, the buffer may travel the stroke length and activate the auto switch depending on the load and the speed. Therefore, adjust the speed according to the load. Caution on andling Symmetric Type Caution 1. Maintain a minimum spacing of at least mm if standard style and symmetric style are used side by side. t malfunctions if standard style and symmetric style are used close side by side. llow a space of mm or more for a side by side mounting. W ir slide table Vertical use. e sure to use meter-out speed control valves. f it is used in meter-in speed control or without a speed controller, it may result in malfunction.. When releasing the end lock manually, be sure that air pressure is released. f the end lock is unlocked while the air pressure still remains, it will lead to damage a workpiece, etc. due to unexpected lurching. ow to Unlock the End Lock efore proceeding, make sure that there is no residual air pressure. (1) Push down the lock piston pin. () Slide the table forward. orizontal use. uto switch with buffer function: Refer to the following table for the proper mounting positions for detection at stroke end. Normally O detection () Normally ON detection djust the auto switch position according to the load and the speed. (1) MXQ (L) MXQ (L) MXQ (L) MXQ1 (L) MXQ (L) MXQ (L).. 1 1

46 Series 1- - MXQ ir slide table ø, ø, ø, ø1, ø, ø ow to Order Clean series 1 Vacuum suction type (Special treatment on guide) Port thread type Symbol Thread type M-thread Nil Rc TN NPT T ore size ø to ø1 ø, ø ø, ø ø, ø 1 MXQ M9N MXQ M9N Copper, fluorine and silicon-free + Low particle generation Vacuum suction type Number of auto switches Nil pcs. S 1 pc. n "n" pcs. Symmetric type Nil Standard type L Symmetric type 1 ore size / Stroke 1,,,, 1,,,,, 1,,,,,, 1 1,,,,,, 1, 1,,,,,, 1,, 1 1,,,,,, 1,, 1 Nil S T CS CT C djuster option Without adjuster Extension end Rubber Retraction end stopper oth ends Extension end Metal Retraction end stopper oth ends unctional option Nil Standard type P xial piping type The combination of axial piping type and both ends adjusters or retraction end adjuster is not available. Type of auto switch Nil Without auto switch or the applicable auto switch model, refer to the table below. uto switch specifications (Refer to est Pneumatics catalog for detailed specifications and auto switches not in the following table.) Reed switch Type Solid state switch Special function Electrical entry rommet rommet ndicator light Yes Yes Lead wire length symbols:.m Nil (Example) 9 m L (Example) 9L Refer to page for a list of applicable auto switches. Wiring (Output) -wire V -wire (NPN) -wire V Load voltage DC C V V V 1V uto switch model Electrical entry direction n-line 9 M9N M9 Lead wire length (m). pplicable load Nil (L) Relay, PLC Relay, PLC PLC: Programmable Logic Controller 1