Series MXQ ø6, ø8, ø12, ø16, ø20, ø25

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1 ir Slide Table Series MXQ ø, ø, ø, ø1, ø, ø Cylinder with built-in guide rail and table Now with recirculating linear ball bearings for high rigidity and high precision ir slide table for precise assembly applications igh precision and compact MXQ compared with MXS ccuracy Parallelism MXQ-. MXS-. mple options for stroke adjustment Pin holes for positioning mproved repeatability of work mounting Work mounting tap mproved strength End plate is made of extra duralumin. (Except the buffer style) eight tolerance ±. ±. Dual rod Double the output of previous cylinder Recirculating linear ball bearing Widened main body of linear guide block is made of martensitic stainless steel Dimensions Width eight Length mproved against loads bout times stronger against unexpected excessive external forces compared with MXS series Standardized symmetric style vailable for all options Through hole for body mounting Mounting groove for auto switch uto switch is mounted in recessed groove for added protection and convenience. uilt-in table and guide rail Made of martensitic stainless steel Pin holes for positioning mproved repeatability of body mounting ody mounting tap Mounting from direction available qlateral mounting (ody tap) Wide variety of options djuster option and functional option are available in combination. Symmetric Style djuster options With stroke adjuster unctional options With buffer wlateral mounting (Through hole) evartical mounting (ody tap) With shock absorber With end lock pplications xial piping or axis of pick and place or positioning of pallet on a conveyor -

2 Series MXQ Variations Standard Symmetric MXQ MXQL MXQ MXQL MXQ MXQL MXQ1 MXQ1L MXQ MXQL MXQ MXQL ore 1 Standard stroke Rubber stopper ront end Rear end oth end djuster options Shock absorber ront end Rear end oth end Metal stopper ront end Rear end oth end unctional options uffer End lock xial piping uto switch Reed switch D-9 D-9 V Solid state switch D-M9 D-M9 V color indication solid state switch D-M9 D-M9 WV djuster Options unctional Options Extension stroke adjuster Retraction stroke adjuster With buffer With end lock Eliminates impacts at the extend stroke end to protect the work and tool. uto switch is installable on the buffer section. When buffer functioned uto switch ( ) O ON at at buffer normal operating status Maintains the original position of the cylinder after air pressure shut off, thus preventing the work from falling. Spring Lock piston Supply port to cylinder uffer stroke Magnet ll adjuster bolts are standardized for the extension and retraction end stroke adjuster, and the three different styles of cushion mechanisms. Rubber stopper Standard stroke adjuster Shock absorber or heavy duty and/or high speed use. bsorbs impact at end of stroke Provides smooth stops mproves accuracy when stopping Metal stopper mproves stopping accuracy or light duty and low speed use only Normal condition Magnet uto switch Setting ON or O at normal status according to the direction of the auto switch pplication example ( ) ON at normal status O at buffer operating or insertion application, buffer mechanism absorbs the impact of a shock and protects from damages if the work piece arrives at the wrong location as a result of poor alignment. Locked xial piping Unlocked Organizes all piping into axial directions and frees up space around the body. Speed controller uffer mechanism ir gripper Work ailure in positioning -1

3 Series MXQ/Precautions q e sure to read before handling. Selection Caution qdo not apply a load beyond the range of the operation limits. Select the model by using the maximum allowable load and allowable moment. Refer to pages p.- for details. When an actuator is used beyond its operating limits, eccentric loads on the guide section will be in excess which results in shorter life span due to play or inaccuracy of guide section. w f a table is stopped at an intermediate position by an external stopper, avoid ejection. f ejection occurs, it causes damage. f a slide table is stopped at an intermediate position by an external stopper and then forwarded to the front, draw back the intermediate stopper after supplying pressure to allow the slide table to return to the back for an instant, then supply pressure to the opposite port to operate the slide table. edo not use in circumstances that excessive, external forces or impacts would be applied. These conditions could lead to malfunctions. Caution qdo not scratch or dent the mounting side of the body, table or end plate. Decreasing flatness on the mounting surface causes play in the guide section and increases sliding resistance. wdo not scratch or dent on the forward side of the rail or guide. t can generation play in the guide section and increase sliding resistance. edo not apply excessive impacts or moments when a work is mounted. f external load beyond the specified allowable moment is applied, it generates play in the guide section and increases sliding resistance. rlatness of mounting surface should be.mm or less. nsufficient flatness of work piece of base to which an air slide table is mounted can generates play in the guide section and increase sliding resistance. twhen connecting with loads which has external support or external guide mechanism, select the connection and align properly. ytake care to prevent contact with objects such as a hand while an air slide table is in operation. hand can be caught by an adjuster. nstall a protection cover if anything could interfere during its operation. udo not bring into close contact with objects which would be influenced by magnetic fields. s an air slide table has magnets builtin, do not allow close contact with magnetic disks, magnetic cards or magnetic tapes. Data may be erased. Mounting iwhen mounting an air slide table, screws of appropriate length should be used and tightened properly within the maximum tightening torque. f screws are tightened beyond designed limits, malfunction may occur. f they are tightened insufficiently, it may result in sliding of falling off from its position. MXQ MXQ MXQ MXQ1 MXQ MXQ MXQ MXQ MXQ MXQ1 MXQ MXQ 1. Side body tapped olt used M M M M M M olt used M M M M M M Max.tightening torque Nm Max.tightening torque Nm Max.screw-in depth (l mm) 1 1. Side through hole mounting. Top body tapped l l l l mm MXQ MXQ MXQ MXQ1 MXQ MXQ olt used M. M M M M M Max.tightening torque Nm Max.screw-in depth (l mm) 1 -

4 Series MXQ/Precautions w e sure to read before handling. MXQ MXQ MXQ MXQ1 MXQ MXQ MXQ MXQ MXQ MXQ1 MXQ MXQ Mounting Caution olts used M M M M M M M M M M M M Caution 1. ront mounting l Caution Use bolts at least.mm shorter than maximum thread depth to prevent bolts from contacting the end plate. f the bolts are too long, they hit the end plate and may cause malfunctions. l olts used M M M M M M M M M M M M Max. tightening torque Nm Top mounting Max. tightening torque Nm Max. screw-in depth (l mm) uide lock Use bolts at least.mm shorter than maximum thread depth to prevent bolts from contacting the guide block. f the bolts are too long, they hit the guide block and cause damage. Max. screw-in depth (l mm). 9.. Environment Caution qdo not use in an environment exposed directly to liquids such as cutting oil. f used in an environment exposed to cutting oil, coolant or oil mist, it generates play, increased sliding resistance of air leakage. wdo not use in an environment exposed directly to powder, dust or spatter etc. t generates play, increases sliding resistance or air leakage. Consult SMC for use in such an environment. enstall a shade screen if exposed to the direct sun light. rnstall a blocking cover if a heat source is in the area. The product temperature may rise above the range of usage limit by radiant heat if a heat source is in the area. nstall a cover to block from heat source. tdo not use in the area where there are vibrations or impacts. t results in damage or malfunction. Consult SMC for usage under these environment. Caution in andling djuster Options Stroke djuster Caution qdo not replace the bolts. Use only bolts included for this use. mproper attachment may generate play or damage by force of impacts, etc. wollow the table for tightening torque of lock nuts. nsufficient tightening will cause deterioration of positioning accuracy. MXQ MXQ MXQ MXQ1 MXQ MXQ Tightening torque Nm Caution in andling djuster Options Stroke djuster Caution edo not apply a tool like a spanner to tables. t will cause a play. With Shock bsorber Caution qnever turn or adjust the screws on bottom of the shock absorber body. The screws are not for adjusting. t will cause oil leakage. wdo not scratch the sliding surface of the shock absorber piston rod. t causes loss and durability and inadequate return. Piston rod Do not damage eshock absorbers are expendable parts. t may be necessary to change them when energy absorbing capacity decreases. pplicable size MXQ MXQ MXQ1 MXQ MXQ Shock absorber R R R1 R1 R1 Do not adjust bottom screw rollow the table for tightening torque of shock absorber lock nuts. Tightening torque Nm MXQ 1. MXQ MXQ1.1 MXQ 1. MXQ -

5 Series MXQ/Precautions e e sure to read before handling. With End Lock Precautions for andling unctional Options Caution quse position, / port valve for solenoid valve. t will causes a malfunction on the control circuit that exhausts at both such as position valve with exhaust center. With uffer unction Caution quse air slide table with buffer function in the following positions. or horizontal use, adjust the speed according to the load while the auto switch may operate by a stroking buffer in operation depending on the load or speed. Precaution for Symmetric Style Caution qmaintain a minimum spacing of at least mm if standard style and symmetric style are used side by side. t malfunctions if standard style and symmetric style are used close together. mm minimum spacing Recommended pneumatic circuit W ir slide table Vertical use wmake sure to connect the cylinder to speed controller at the meter-out side. t causes a malfunction if used as a controller at meter in side or used without a speed controller. emake sure to release pressure when end lock will be released manually. f end lock is released while pressure is still remains, it may damage the actuator by unexpected ejection. ow to release end lock manually Make sure no pressure is applied before operation qpress down lock piston wslide the table forward. orizontal use wuto switch with buffer function: Refer to the following table for the proper mounting positions at detection of stroke end. lways detect O w lways detect ON q djust the switch position according to loads or speed (Unit: mm) MXQ MXQ MXQ MXQ1 MXQ MXQ.. 1-1

6 ir Slide Table Series MXQ ø, ø, ø, ø1, ø, ø ow to Order E MXQ L S R M9N S E iletage (ø à ø) Rc(Pt) (P) Symmetric Style Standard L Symmetric Number of auto switches S n 1 n ore size (Stroke mm) ø ø ø ø1 ø ø pplicable uto Switches Style Reed switch Solid state switch 1,,,, 1,,,,, 1,,,,,, 1 1,,,,,, 1, 1,,,,,, 1,, 1 1,,,,,, 1,, 1 Special function Diagnostic indication ( colour) Lead wire length djuster option Without adjuster S Extention T Rubber stopper Retraction oth ends S (1) Extention T (1) Shock absorber Retraction (1) oth ends CS Extention CT Metal stopper Retraction C oth ends Note 1) Not available with absorber for series MXQ. Electrical entry lndicator Wiring (Output) No wire rommet Yes wire (Equiv. to NPN) wire (NPN) wire (PNP) wire rommet Yes wire (NPN) wire (PNP) wire.m (Example) 9 m L 9L V V Load voltage DC Combination of Options unctional djuster options options R P R P () () () S, CS T, CT X X X X (), C X X X X S X X X T X X X X X X X X X vailable X Not available Note ) bout combination of buffer mechanism style and extetion stroke adjuster style, the buffer stroke is shortened by the adjusted length with extetion stroke adjuster. V, V V V V C 1V 1V uto switch Without auto switch Refer to the table below for Parts No. of auto switch unctional options Standard With buffer R () With end lock P xial piping R () With buffer and end lock P With buffer and axial piping Note ) Not available with end lock for series MXQ. uto switch model Electrical entry Perpendicular n-line 9V 9 9V 9 9V 9 M9NV M9N M9PV M9P M9V M9 M9NWV M9NW M9PWV M9PW M9WV M9W Lead wire (m). ( ) (L) pplicable load C C Relay PLC Relay PLC Detail spec. P..- P..- P..-9 P.- PLC: Programmable Logic Controller -1

7 ir Slide Table Series MXQ Specifications ore size Piping port luid used ction Operating pressure Proof pressure mbient and fluid temperature Operating speed range Cushion Lubrication uto switch Tolerance of stroke length 1 M Rc(PT)1/ ir Double acting.1 to.mpa 1.MPa 1 to C to mm/s (djuster option/metal stopper: to mm/s) Rubber bumper (Standard, djuster option/rubber stopper) Shock absorber (djuster option/shock absorber) None (djuster option/metal stopper) Not required Reed switch ( wire, wire) Solid state switch ( wire, wire) colour indication solid state switch ( wire, wire) +1 mm Options djuster options unctional options Extension (S) Rubber stopper Retraction (T) oth ends () Extension (S) Shock absorber Retraction (T) oth ends () Extension (CS) Metal stopper Retraction (CT) oth ends (C) With buffer () With end lock (R) xial piping (P) Stroke adjusting range to mm With shock absorber option is not available for series MXQ. Stroke adjusting range to mm End lock option is not available for series MXQ. Refer to p.-1 and -1 for the detailed specifications of adjustment and function options. Standard Stroke MXQ MXQ MXQ MXQ1 MXQ MXQ Standard stroke 1,,,, 1,,,,, 1,,,,,, 1 1,,,,,, 1, 1,,,,,, 1,, 1 1,,,,,, 1,, 1-1

8 Series MXQ Theoretical orce OUT N ntroducing dual rods, double the output of previous cylinder (Unit: N) ore size 1 Rod size 1 ction direction OUT N OUT N OUT N OUT N OUT N OUT N Piston area (mm ) Note) Theoretical force (N)=Pressure (MPa) X piston area(mm ). 1 9 Operating pressure (MPa) Weight MXQ MXQ MXQ MXQ1 MXQ MXQ Standard stroke (Unit: g) dditional weight of adjuster option dditional wight of function option Rubber stopper Shock absorber Metal stopper With xial piping With buffer Extension Retraction Extension Retraction Extension Retraction end lock (S: stroke mm) S S 1 +.S S S S Option Specifications Stroke djustable Range by djuster Options (oth are the same for front and back ends) Style Rubber stopper With shock absorber Metal stopper Stroke adjustable range to mm Refer to the dimensions on p.-1 to mm Wide range adjusters for rubber stopper and metal stopper are available as optional specification. ow to Order Stroke djuster(ccessory Parts) MXQ S L X S T S T CS CT djuster options Rubber stopper Shock absorber Metal stopper Extension Retraction Extension Retraction Extension Retraction ore size 1 ø ø ø ø1 ø ø Symmetric L Standard Symmetric djustable range mm Standard -X 1mm Option -X mm Note 1) -X (adjustable range : mm)is not adjustable for series MXQ. Note ) -X and -X are not available with shock absorber. Note ) Shock absorber is not available for series MXQ. Note ) -X and -X are not available as the built-in style. Note ) Refer to p.-1 and -1 for the dimdensions. -1

9 ir Slide Table Series MXQ Table ccuracy Shock bsorber Specifications side parallelism to side side travelling parallelism to side C side parallelism to side Dimension tolerance of M Dimension tolerance of W Radial clearance (µ m) to 1) ±.1mm for stroke mm or more Table 1 MXQ MXQ MXQ MXQ1 MXQ MXQ ig. 1 Travelling parallelism... MXQ MXQ MXQ MXQ1 MXQ MXQ to Refer to Table 1 Refer to ig.1.mm ±.mm (±.1mm) 1 to ±.1mm side parallelism to side C M Stroke to to 1 to side travelling parallelism to side W Radial clearance.9.1. (Unit: mm) Stroke Travelling Parallelism Deflection on the dial gauge when the table is fully stroked while its body is fixed to standard base surface. Shock absorber model pplicable slide table R MXQ R R1 MXQ MXQ1 R1 MXQ R1 MXQ Max. absorbing energy () bsorbed stroke Max. collision speed (mm/s) Max. used frequency (cycle/min) Max. thrust tolerance (N) mbient temperature range.9.9. to 1 to C Spring force (N) Weight (g) Expanded Compressed With End Lock Specifications ore size MXQ MXQ MXQ1 1 MXQ Operating speed range olding force (N) to mm/s 1 Note) Refer to p.-1 for cautions when handling end locks. With uffer Mechanism Specifications ore size Operating speed range uffer stroke uffer stroke t stroke load (N) t max.stroke Style Solid state switch MXQ MXQ MXQ MXQ MXQ1 MXQ MXQ 1 to mm/s ( to mm/s for horizontal use) No. Specifications Electrical entry D-M9V wire with light D-M9NV wire W/ light, Output style: NPN Perpendicular D-M9PV wire W/ light, Output style: PNP Note 1) Refer to p.-1 for cautions when handling buffer functions. Note ) When adjusting stroke with extension stroke end adjuster, the buffer stroke is shortened by the adjusted lengh. uto Switch pplied for uffer Section Please order separately for auto switch with buffer mechanism from above model. With buffer mechanism With end lock -1

10 Series MXQ Table Deflection (for reference) Table deflection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment applied at arrow for fully extended stroke of side table Table yaw deflection due to static yaw moment applied at arrow for fully extended stroke of side table. Table roll deflection arrow due to static roll moment applied at arrow when Lr = (see table) and table is retracted. Lr MXQ- ø ø ø Lr=mm Table deflection MXQ- MXQ- MXQ- MXQ- MXQ-1 Table deflection...1 MXQ- MXQ- MXQ- MXQ- MXQ-1 Table deflection.1.1. MXQ-1 MXQ- MXQ- MXQ- MXQ- 1 Load (N) 1 Load (N) Load (N) ø ø ø Table deflection... MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 Table deflection...1 MXQ- MXQ- MXQ- MXQ- MXQ-1 MXQ- Table deflection.1. Lr=mm MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ- Load (N) Load (N) Load (N) ø ø ø Table deflection MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 Table deflection....1 MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 Table deflection MXQ-1 MXQ- MXQ- Lr=9mm MXQ- MXQ- MXQ- MXQ-1 1 Load (N) 1 Load (N) Load (N) 1-1

11 ir Slide Table Series MXQ Table deflection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment applied at arrow for fully extended stroke of side table. Table yew deflection due to static yaw moment applied at arrow for fully extended stroke of side table. Table roll deflection arrow due to static roll moment applied at arrow when Lr=(see table)and table is retracted. Lr ø1 ø1 ø1 Table deflection... MXQ1- MXQ1-1 MXQ1- MXQ1- MXQ1- MXQ1- MXQ1- MXQ1-1 Table deflection... MXQ1- MXQ1- MXQ1- MXQ1- MXQ1-1 MXQ1- MXQ1- MXQ1-1 Table deflection....1 MXQ1-1 MXQ1- MXQ1- MXQ1- Lr=mm MXQ1- MXQ1- MXQ1-1 MXQ Load (N) Load (N) 1 Load (N) ø ø ø Table deflection... MXQ- MXQ-1 MXQ- MXQ- MXQ- MXQ-1 MXQ- MXQ- MXQ-1 Table deflection.... MXQ- MXQ- MXQ- MXQ- MXQ-1 MXQ- MXQ- MXQ-1 MXQ-1 Table deflection... MXQ-1 MXQ- MXQ- MXQ- Lr=1mm MXQ- MXQ- MXQ-1 MXQ- MXQ-1 1 Load (N) 1 Load (N) 1 Load (N) ø ø ø Table deflection... MXQ-1 MXQ- MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 Table deflection MXQ- MXQ- MXQ-1 MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ-1 Table deflection.... MXQ- 1 MXQ- MXQ- MXQ- Lr=mm MXQ- MXQ- MXQ-1 MXQ- MXQ-1 1 Load (N) 1 Load (N) Load (N) -

12 Series MXQ ow to Select Selection Procedure ormula and Data Selection Example 1 Operating conditions List the operating conditions according to mounting position and work form. inetic energy Calculate kinetic energy E() of load. Calculate allowable kinetic energy Ea(). Check that kinetic energy of load does not exceed allowable kinetic energy. used Type of cushion Mounting position of work Mounting direction verage speed Va (mm/s) pplied load W (N): ig 1 Overhang Ln : ig 1 V E= W ( ) 1 Collision Speed=1. Va Correction coefficient Ea= E max Work mounting coefficient : ig Max. allowable kinetic energy Emax: Table 1 inetic energy(e) llowable kinetic energy(ea) L1 L L+ Cylinder: MXQ1- Cushion: Robber stopper Mounting on work table Mounting: orizontal well verage speed : Va=[mm/s] pplied load: W=1[N] L1=1mm L=mm L=mm 1 E= 1 ( ) =. 1 V=1. X = Ea=1 X.=. Possible to use by E=. Ea=. Load rate -1 Load rate of applied load Calculate allowable applied load Wa(N). Calculate load rate of applied load α1. Wa= β Wmax Work mounting coefficient : ig llowable applied load coefficient : raph 1 Max. allowable applied load Wmax: Table α1=w/wa Wa=1 X 1 X = =1 β =1 Wmax= α1=1/=. - Load rate of static moment Calculate static moment M(Nm). Calculate allowable static moment Ma(Nm). M=W X (Ln+n)/1 Correction value for center position distance of moment n Table Yaw Examine for My My=1 X 9.(1+)/1 =.9 = Roll Examine for Mr Mr=1 X 9.(+1.)/1 =.9 =1. Calculate Load rate of static moment α. Ma= γ Mmax Work mounting coefficient : ig llowable moment coefficient γ : raph Max. allowable moment Mmax: Table May=1 X 1 X 1=1 Mymax=1 =1 γ =1 Mar= Mrmax= =1 γ =1 α=m/ma α=.9/1=. α =.9/=. - Load rate of dynamic moment Calculate dynamic moment Me(Nm). Calculate allowable dynamic moment Mea(Nm). Calculate load rate of dynamic moment α. - Sum of load rate (Ln+n) Me=1/ We X 9. 1 Load equivalent to collision We= δ W V δ: Damper coefficient Rubber stopper without adjuster=/1 Shock absorber=1/1 Metal stopper=1/1 Correction value for center position distance of moment n: Table Mea= γ Mmax Work mounting coefficient : ig llowable moment coefficient γ : raph Max. allowable moment Mmax: Table α=me/mea Pitch Yaw Examine for Mep (+1.) Mep=1/ X 1. X 9. X =. 1 We=/1 X 1 X =1. =1. Meap=1 X. X 1=. =1 γ =. Mpmax=1 α=./.=.1 Examine for Mey (+.) Mey=1/ X 1. X 9. X =. 1 We=1 =. Meay=.(Same value as Meap) α =./.=. t is possible to use when the sum of load rates does not exceed 1. Σαn=α1+α+ +αn 1 Σαn=α1+α+α +α+α = =.9 1 nd it is possible to use. -

13 ir Slide Table Series MXQ ig.1 pplied Load: W(kg) W ig. Overhang: Ln, Corrected Value for Centre Distance of Moment: n Pitch moment Yaw moment Roll moment ig. Work Mounting Coefficient: Table mounting W W Static moment Mp W Mp W L1 L1 1 My My W W L L Mr Mr W W L L W =1 End plate mounting W =. Dynamic moment L Mep L Mey Table 1 llowable inetic Energy: Emax() Table Maximum llowable llowable kinetic energy pplied Load: Wmax(kg) MXQ MXQ MXQ MXQ1 MXQ MXQ Caution Max. operating speed for metal stopper is mm/s. Table Correction Value for Center Position Distance of Moment: n MXQ MXQ MXQ MXQ1 MXQ MXQ Table MXQ MXQ MXQ MXQ1 MXQ MXQ Symbol Without adjuster Maximum llowable Moment: Mmax(Nm) Symbol n (n=1 to ) E Emax Ln (n=1 to ) M (Mp, My, Mr) Ma (Map, May, Mar) Me (Mep, Mey) Mea (Meap, Meay) Mmax (Mpmax, Mymax, Mrmax) V Note) Static moment: Moment by gravity Dynamic moment: Moment by impact of collision against stopper Rubber stopper MXQ MXQ MXQ MXQ1 MXQ MXQ Corrected value for center position distance of moment (Refer to raph ) djuster options Shock absorber..... Metal stopper Definition Correction value for center position distance of moment inetic energy llowable kinetic energy Overhang Static moment (Pitch, Yaw, Roll) llowable static moment (Pitch, Yaw, Roll) Dynamic moment (Pitch, Yaw) llowable Dynamic moment (Pitch, Yaw) Maximum allowable moment (Pitch, Yaw, Roll) Collision speed Max. allowable applied load , Stroke Unit mm mm Nm Nm Nm Nm Nm mm/s Note) No differences of corrected value according to stroke for,, and Pitch/Yaw moment: Mpmax/Mymax Stroke Roll moment: Mrmax Stroke llowable applied load coefficient β Symbol Va W Wa We Wmax α β γ raph 1 llowable moment coefficient γ raph llowable pplied Load Coefficient: β 1 verage speed Va (mm/s) llowable Moment Coefficient: γ 1 verage speed Va (mm/s) Collision speed V (mm/s) Note) Use average speed when calculating static moment. Use collision speed when calculating kinetic moment. Definition verage speed pplied load llowable applied load Load equivalent to collision Max. allowable applied load Load rate pplied load coefficient Moment coefficient Mounting work coefficient Unit mm/s kg kg kg kg -1

14 Series MXQ Dimensions MXQ asic style -M. Thread depth Refer to adjuster options for dimensions of the stroke adjuster. Rubber stopper: p.-1 Metal stopper: p.-1 Operating port -M Max. 1 (With retraction adjuster) ottom View of MXQ Extension adjuster +. ø Depth. NN-M Thread depth cross cross N-M Thread depth. (With extension adjuster) Retraction adjuster. ø. ø. ø ø. ø. ø... (NN-1) X 1 +. ø9 Depth Depth. M.. -M. Thread depth M. Thread depth. 1 (With extension adjuster) 1. N -1 X +. Depth M Thread depth MXQ-1 MXQ- MXQ- MXQ- MXQ- 1 N 1 1 NN M

15 ir Slide Table Series MXQ With buffer (ø) MXQ- -M Thread depth xial piping (ø) MXQ-P Operating port -M

16 Series MXQ Dimensions MXQ L/Symmetric Style asic style +. ø9 Depth. Refer to adjuster options for dimensions of the stroke adjuster. Rubber stopper: p.-1 Metal stopper: p.-1 ottom View of MXQL Depth. 1 1 NN-M Thread depth (NN-1) X 1. ø. ø. ø ø. ø. ø 1.. Max. 1 cross (With extension adjuster) M. Thread depth Operating port -M cross -M Thread depth -M. Thread depth. 1 (With extension adjuster) 1. N -1 X +. Depth Extension adjuster. +. ø Depth. Retraction adjuster N-M Thread depth. (With extension adjuster).... -M. Thread depth. M MXQL-1 MXQL- MXQL- MXQL- MXQL- 1 N 1 1 NN M

17 ir Slide Table Series MXQ With buffer (ø) MXQL- -M Thread depth.. xial piping (ø) MXQL-P.. 1 Operating port -M. Dimensions not indcated are the same as basic style. -

18 Series MXQ Dimensions MXQ asic style Refer to adjuster option for the dimensions of the stroke adjuster. Rubber stopper: p.-1 Metal stopper: p.-1 (NN-1) X.. ø. ø. ø.. ø. ø. ø +. ø9 Depth. (With extension adjuster) Extension adjuster +. ø Depth N-M Thread depth Retraction adjuster.. 1 -M Thread depth. (With Extension adjuster) 1 N -1 X -M Thread depth. +. Depth 1 1 -M Thread depth 1 1 Operating port -M. Max. (With retraction adjuster) Depth NN-M Thread depth cross cross M N-M Thread depth. ottom View of MXQ- 1.. MXQ-1 MXQ- MXQ- MXQ- MXQ- MXQ- N NN N M

19 ir Slide Table Series MXQ With shock absorber (ø) MXQ-S, T, Retraction end shock absorber Extension end shock absorber Max. Max.. djustable Range of Stroke (Unit: mm) Extension End Retraction End With buffer (ø) MXQ M Thread depth With end lock (ø) MXQ-R xial piping (ø) MXQ-P Operating port -M Operating port -M Dimensions not indicated are the same as basic style. 1. -

20 Series MXQ Dimensions MXQ L/Symmetric Style asic style Refer to adjuster option for the dimensions of the stroke adjuster. Rubber stopper: P.-1 Metal stopper: P ø9 Depth +. 9 Depth NN-M Thread depth -M Thread depth 1 1. (With extension adjuster) 1 N -1 X +. Depth Extension adjuster +. ø Depth. N-M Thread depth Retraction adjuster. (With extension adjuster) 1. 1 (NN-1) X.. ø. ø. ø ø. ø. ø 1.. cross.. cross ottom View of MXQL-. -M Thread depth Operating port -M Max. (With extension adjuster). -M Thread depth M N-M Thread depth. MXQL-1 MXQL- MXQL- MXQL- MXQL- MXQL- N NN N M

21 ir Slide Table Series MXQ With shock absorber (ø) MXQL-S, T, djustable Range of Stroke (Unit: mm) Extension End Retraction End Max. Max. Extension end shock absorber Retraction end shock absorber 1. With buffer (ø) MXQL-. -M Thread depth 1 Dimensions not indicated are the same as basic style.... With end lock (ø) MXQL-R Operating port -M xial piping (ø) MXQL-P. 1 Operating port -M. 1-9

22 Series MXQ Dimensions MXQ asic style (NN-1) X Refer to adjuster option for the dimensions of the stroke adjuster. Rubber stopper: P.-1 Metal stopper: P Extension adjuster. +. ø9 Depth N-M Thread depth Retraction adjuster 9. (With extension adjuster) -M Thread depth 1 (With extension adjuster). 1 N -1 X +. Depth -M Thread depth Operating port -M Max. 1 (With extension stroke adjuster). 1 ø. ø. ø9 ø. ø. ø9 +. ø9 Depth M +. 9 Depth NN-M Thread depth 1 cross cross N-M Thread depth ottom View of MXQ M Thread depth MXQ- 1 MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 N NN N M

23 ir Slide Table Series MXQ With shock absorber(ø) MXQ-S, T, Extension end shock absorber Retraction end shock absorber 9. Max. 1 1 Max M Thread depth djustable Range of Stroke (Unit: mm) Extension End 1 Retraction End 1 With buffer(ø) MXQ With end lock(ø) MXQ-R 1 Operating port -M xial piping(ø) MXQ-P Operating port -M

24 Series MXQ Dimensions MXQ L/Symmetric Style asic style +. ø9 Depth Depth Refer to adjuster option for the dimension of stroke adjuster. Rubber stopper: P.-1 Metal stopper:p.-1 ø. NN-M Thread depth 1 ø. ø9 ø. ø. ø9 1 1 (NN-1) X cross cross ottom View of MXQL M Thread depth 1 (With extension adjuster). 1 N -1 X +. Depth M Thread depth ø9 Depth N-M Thread depth Extension adjuster Retraction adjuster 9. (With extension adjuster)... -M Thread depth Operating port -M Max.1 (With retraction adjuster) N-M Thread depth 1. M MXQL- 1 MXQL- MXQL- MXQL- MXQL- MXQL- MXQL-1 N NN N M

25 ir Slide Table Series MXQ With shock absorber(ø) MXQL-S, T, djustable Range of Stroke (Unit: mm) Extension End 1 Retraction End 1 9. Max. 1 1 Max Extension end shock absorber Retraction end shock absorber With buffer(ø) MXQL- -M Thread depth With end lock(ø) MXQL-R Operating port -M 1 xial piping(ø) MXQL-P Operating port -M. 1 -

26 Series MXQ Dimensions MXQ 1 asic style (NN-1) X Refer to adjuster option for the dimension of stroke adjuster. Rubber stopper: P.-1 Metal stopper: P Extension stroke adjuster +. ø9 Depth N-M Thread depth Retraction adjuster. (With extension adjuster) -M Thread depth 1 ø.1 ø9. ø1. ø.1 ø9. ø1. +. ø9 Depth 1 M +. 9 Depth NN-M Thread depth cross cross N-M Thread depth.. ottom View of MXQ1-1.. (With extension adjuster). 1 N -1 X -M Thread depth +. 9 Depth M Thread depth 1.. Operating port -M Max. (With retraction adjuster) MXQ1-1 MXQ1- MXQ1- MXQ1- MXQ1- MXQ1- MXQ1-1 MXQ1- N NN N M

27 ir Slide Table Series MXQ With shock absorber(ø1) MXQ1-S, T, Retraction end shock absorber Extension end shock absorber. Max.. Max.. djustable Range of Stroke (Unit: mm) Extension End Retraction End With buffer(ø1) MXQ M Thread depth With end lock(ø1) MXQ1-R Operating port -M 9 xial piping(ø1) MXQ1-P Operating port -M

28 Series MXQ Dimensions MXQ 1L/Symmetric Style asic style +. ø9 Depth +. 9 Depth Refer to adjuster option for the dimension of stroke adjuster. Rubber stopper: P.-1 Metal stopper: P.-1 NN-M Thread depth -M Thread depth.. (With extension adjuster). 1 N -1 X +. 9 Depth M Thread depth ø9 Depth Extension adjuster Retraction adjuster N-M Thread depth. (With extension adjuster).. ø.1 ø9. ø cross cross ottom View of MXQ1L-.. ø.1 ø9. ø1. 1 (NN-1) X. -M Thread depth Operating port -M 1 Max. (With retraction adjuster) N-M Thread depth. 1 1 M MXQ1L- 1 MXQ1L- MXQ1L- MXQ1L- MXQ1L- MXQ1L- MXQ1L-1 MXQ1L- N NN N M

29 ir Slide Table Series MXQ With shock absorber(ø1) MXQ1L-S, T, djustable Range of Stroke (Unit: mm) Extension End Retraction End With buffer(ø1) MXQ1L- With end lock(ø1) MXQ1L-R xial piping(ø1) MXQ1L-P -

30 Series MXQ Dimensions MXQ asic style (NN-1) X Refer to adjuster option for the dimension of stroke adjuster. Rubber stopper: P.-1 Metal stopper: P Extension adjuster N-M Thread depth. (With extension adjuster) Retraction adjuster 1 -M Thread depth +. ø9 Depth 1. (With extension adjuster) ø9 Depth 1 M +. 9 Depth N-M Thread depth. ø.1 ø9. ø ø.1 ø9. ø NN-M Thread depth cross cross ottom View of MXQ-. 1. N -1 X +. Depth 1. -M Thread depth Operating port -Rc(PT)1/ 1 1. Max.1 (With retraction adjuster) 1 1 -M Thread depth 1 MXQ- 1 MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 MXQ- MXQ-1 N NN N M

31 ir Slide Table Series MXQ With shock absorber(ø) MXQ-S, T,. Retraction end shock absorber. Extension end shock absorber. Max. 1 Max. 1. djustable Range of Stroke (Unit: mm) Extension End Retraction End With buffer(ø) MXQ-... -M Thread depth With end lock(ø) MXQ-R Operating port -Rc(PT)1/ xial piping(ø) MXQ-P Operating port -Rc(PT)1/. 1-9

32 Series MXQ Dimensions MXQ L/Symmetric Style asic style +. ø9 Depth +. 9 Depth Refer to adjuster option for the dimension of stroke adjuster. Rubber stopper: P.-1 Metal stopper: P.-1 NN-M Thread depth -M Thread depth 1 1. (With extension adjuster) N -1 X +. 9 Depth M Thread depth ø9 Depth Extension adjuster Retraction adjuster N-M Thread depth. (With extension adjuster) 1.. ø.1 ø9. ø ø.1 ø9. ø cross cross (NN-1) X ottom View of MXQL M Thread depth Operating port -Rc(PT)1/ Max.1 (With retraction adjuster)... 1 M N-M Thread depth MXQL- 1 MXQL- MXQL- MXQL- MXQL- MXQL- MXQL-1 MXQL- MXQL-1 N NN N M

33 ir Slide Table Series MXQ With shock absorber(ø) MXQL-S, T, djustable Range of Stroke (Unit: mm) Extension End Retraction End With buffer(ø) MXQL- With end lock(ø) MXQL-R xial piping(ø) MXQL-P -

34 Series MXQ Dimensions MXQ asic style (NN-1) X Refer to adjuster option for the dimension of stroke adjuster. Rubber stopper: p.-1 Metal stopper: p M Depth 1. ø. ø ø ø. ø ø +. ø9 Depth NN-M Thread depth 1 cross N-M Thread depth cross ottom View of MXQ-. (With extension adjuster) Extension adjuster +. ø9 Depth N-M Thread depth Retraction adjuster M Thread depth 1 1. (With extension adjuster) N -1 X +. 9 Depth 1. -M Thread depth M Thread depth 9 Operating port -Rc(PT)1/ 1 Max.1 (With retraction adjuster) 1 MXQ- 1 MXQ- MXQ- MXQ- MXQ- MXQ- MXQ-1 MXQ- MXQ-1 N 1 NN N M

35 ir Slide Table Series MXQ With shock absorber(ø) MXQ-S, T, Retraction end shock absorber. Max. 9 Extension end shock absorber 1 Max. 1.. djustable Range of Stroke (Unit: mm) Extension End Retraction End With buffer(ø) MXQ- -M Thread depth With end lock(ø) MXQ-R Operating port -Rc(PT)1/ xial piping(ø) MXQ-P Operating port -Rc(PT)1/

36 Series MXQ Dimensions MXQ L/Symmetric Style asic style +. ø9 Depth Refer to adjuster option for the dimension of stroke adjuster. Rubber stopper: p.-1 Metal stopper: p.-1 NN-M Thread depth Max.1 (With retraction adjuster) -M Thread depth 1 1. (With extension adjuster) N -1 X +. 9 Depth 1. -M Thread depth ø9 Depth Extension adjuster N-M Thread depth Retraction adjuster. (With extension adjuster) M N-M Thread depth MXQL- 1 MXQL- MXQL- MXQL- MXQL- MXQL- MXQL-1 MXQL- MXQL-1 N 1 NN N M (NN-1) X +. 9 Depth. cross ø. ø ø. cross ø. ø ø ottom View of MXQL- Operating port -Rc(PT)1/ -M Thread depth 9

37 ir Slide Table Series MXQ With shock absorber(ø) MXQL-S, T, djustable Range of Stroke (Unit: mm) Extension End Retraction End 1 Max. 1.. Max. 9 Retraction end shock absorber Extension end shock absorber. With buffer(ø) MXQL- -M Thread depth With end lock(ø) MXQL-R Operating port -Rc(PT)1/ xial piping(ø) MXQL-P 1. 9 Operating port -Rc(PT)1/ -1

38 Series MXQ djuster Dimensions Rubber stopper(s, T) Extension End ody mounting P M D Size MXQ djusting stroke range MXQ-S MXQ-S -X 1 ody mounting C D E M 1... M P (1) M. X. Table mounting Q (1). M. X MXQ MXQ-S MXQ-S -X M M X M X 1 MXQ-S -X 9. E C MXQ MXQ-S MXQ-S-X MXQ-S-X M X 1 M X M X Table mounting Q MXQ1 MXQ-S1 MXQ-S1-X MXQ-S1-X M1 X 1 M X M X 1 MXQ-S. MXQ MXQ-S-X M X 1. M X M X 1 MXQ MXQ-S-X MXQ-S MXQ-S-X M1 X 1. M X M X 1 MXQ-S-X. Note 1) Size of hexagon head cap screw Retraction End Size djusting stroke range C D E (1) MXQ MXQ-T MXQ-T -X M M. X E D MXQ MXQ-T MXQ-T -X MXQ-T -X M M X MXQ MXQ-T MXQ-T-X M X 1 M X 1 MXQ-T-X. C MXQ1 MXQ-T1 MXQ-T1-X MXQ-T1-X MXQ-T M1 X 1 M X MXQ MXQ-T-X M X 1. M X 1 MXQ-T-X. MXQ MXQ-T MXQ-T-X M1 X 1. M X 1 MXQ-T-X. Note 1) Size of hexagon head cap screw -1

39 ir Slide Table Series MXQ With Shock dsorber(s, T) Extension End ody mounting Table mounting P D M L Q E E1 C MXQ-S MXQ-S MXQ-S MXQ-S MXQ-S1 Size MXQ MXQ MXQ1 MXQ MXQ MXQ-S MXQ-S MXQ-S1 MXQ-S MXQ-S djusting stroke range ody Mounting C D E E1 M M X 1 1. M X 1 1. M1 X 1 M1 X 1. M1 X 1. P (1) M X M X M X 1 M X 1 M X 1 Table Mounting L Q (1) M X 1. M X 1 M X 1 M X 1 M X Note 1) Size of hexagon socket head cap screws Retraction End E E1 D C MXQ-T MXQ-T MXQ-T MXQ-T MXQ-T1 Size MXQ MXQ MXQ1 MXQ MXQ MXQ-T MXQ-T MXQ-T1 MXQ-T MXQ-T djusting stroke range C D E E1 (1) M X 1 M X 1 M1 X 1 M X M X 1 M X M1 X 1. M X 1 M1 X 1. M X 1 Note 1) Size of hexagon socket head cap screws -1

40 Series MXQ djuster Dimensions Metal Stopper(CS, CT) Extension End ody mounting P M E Table mounting Q D C L Size MXQ MXQ MXQ MXQ1 MXQ MXQ MXQ-CS MXQ-CS -X MXQ-CS MXQ-CS -X MXQ-CS -X MXQ-CS MXQ-CS-X MXQ-CS-X MXQ-CS1 MXQ-CS1-X MXQ-CS1-X MXQ-CS MXQ-CS-X MXQ-CS-X MXQ-CS MXQ-CS-X MXQ-CS-X djusting stroke range ody mounting Table mounting C D E M P (1) L Q (1) M M. X 1. M M X 1. M X 1 M X... M. X M X M X M1 X 1 M X M X M X 1. M X 1 1 M X 1 M1 X 1. M X 1 1 M X Note 1) Size of hexagon socket head cap screws Retraction End E C D Size MXQ MXQ MXQ MXQ1 MXQ MXQ djusting stroke range MXQ-CT MXQ-CT -X 1 MXQ-CT MXQ-CT -X 1 MXQ-CT -X MXQ-CT MXQ-CT-X 1 MXQ-CT-X MXQ-CT1 MXQ-CT1-X 1 MXQ-CT1-X MXQ-CT MXQ-CT-X 1 MXQ-CT-X MXQ-CT MXQ-CT-X 1 MXQ-CT-X C D E (1) M M M X 1 M1 X 1 M X 1. M1 X 1. M. X M X M X 1 M X M X 1 M X 1 Note 1) Size of hexagon socket head cap screws -1

41 ir Slide Table Series MXQ Construction!1 e!!!9! i! o! w! t u @ # #1 # # $ # $ $ $ @ # $1 # With buffer With end lock xial piping Component Parts Component Parts/With end lock Description Material Note No. Description Material luminum alloy ard ody for lock luminum alloy Stainless steel eat Table support Carbon steel luminum alloy ard Rod cover luminum alloy Stainless steel eat Piston rod Stainless steel Synthetic resin # ush luminum alloy Synthetic resin #1 lanking plug rass Stainless steel, NR # Return spring Stainless steel Stainless steel # Piston seal NR With one side magnet # Rod seal NR nodized # O ring NR Electroless nickel plated # O ring NR No. Nq w e r t y u i ody Table End plate uide block Cover Return guide Scraper Rod Piston assembly Rod cover Packing support ead cap loating bush Rod damper End damper Steel ball Parallel pin Piston seal Rod seal O ring Component Parts/With buffer Description End plate Spring collar ead cap Spring Magnet Replacement Parts: Seal its ore size 1 it No. MXQ -PS MXQ -PS MXQ-PS MXQ1-PS MXQ-PS MXQ-PS luminum alloy rass Synthetic resin Stainless steel Polyurethane Polyurethane Chromium bearing steel Stainless steel NR NR NR Material luminum alloy Stainless steel Stainless steel Stainless steel Rare earth Contents Parts! from above Note ard alumite treatment Component Parts/xial piping No. # # #9 $ $1 $ $ $ Replacement Parts (Seal kits with end lock) ore size it No. 1 MXQ R-PS MXQR-PS MXQ1R-PS MXQR-PS MXQR-PS Description Plate for axial piping Pipe ush Stud O ring O ring asket O ring Contents Parts! and # to # from above Note ard anodized nticorrosive treatment Chromate treatment Electroless nickel plated Material Note luminum alloy ard anodized luminum alloy ard anodized luminum alloy Chromate treatment rass Electroless nickel plated NR NR NR, Stainless steel NR Seal kits consist of items in the list below, and can be ordered using the kit number for each respective cylinder bore size. Replacement Parts (Seal kits for axial piping) ore size it No. 1 MXQ P-PS MXQ P-PS MXQP-PS MXQ1P-PS MXQP-PS MXQP-PS Contents Parts! and $1 to $ from above Parts! and $1 to $ from above -

42 Series MXQ uto Switch/Proper Mounting Position at Detection of Stroke End E Reed Switch: D-9, D-9, D-9, D-9V, D-9V, D-9V MXQ MXQ MXQ MXQ1 MXQ MXQ E Operating Stroke Stroke range of switch (1). (1). (1).. (9) (.) (.) (.) (.) (.) (.) (.) () (1) (1) (1) (1) () () () (1) (1) (1) () (9) () () (9) (9) () (1) () () () () () () () () () () () () () () 9 ( ): D-9 Solid State Switch: D-M9, D-M9N, D-M9P, D-M9W, D-M9NW, D-M9PW MXQ MXQ MXQ MXQ1 MXQ MXQ E Stroke Stroke Operating range of switch. Solid State Switch: D-M9V, D-M9NV, D-M9PV, D-M9WV, D-M9NWV, D-M9PWV E Stroke Stroke MXQ MXQ. 1 MXQ MXQ MXQ MXQ Operating range of switch. ow to Mount uto Switch Caution Tool for Mounting uto Switch Use a clock screw driver with approximately to mm handle diameter for tightening set screws shipped with auto switch. Tightening torque Use the tightening torque value approximately. to.1 Nm. When you begin to feel that the screw is tightening, turn it 9 further. uto switch Set screw(shipped with auto switches) Small screw driver -

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