CAT.E 271- CAT.E829- High Vacuum Angle Valve. Series XL

Transcription

1 T.E 7- T.E89- High Vacuum ngle Valve Series XL

2 Light weight & compact Large conductance with a small valve body. High Vacuum ngle Valve Series XL High fluorine resistance Excellent resistance against fluorine corrosion. Low outgassing Low outgassing makes it possible to use a lower capacity pump and also to shorten evacuation time. Series XL XL-6 XL-5 XL- XL-50 XL-6 XL-80 ommon to all series. mm mm Weight kg onductance l/s Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. omparison with F5 flange ody luminum (setting temp.: 0 ) 0, 4, 5 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or r (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. Stainless steel (setting temp.: 0 ) 0 ody ody ellows Temperature ( ), Temperature ( ) 80 5 Valve Heater Time (minutes) Time (minutes) High Vacuum ngle Valve XL Series Features XL/XLV (ellows seal, Single acting) ellows type is particulate free and completely cleaned. Pressure balance mechanism allows unrestricted exhaust direction. XL/XLV (ellows Seal, Double acting) ellows type is particulate free and completely cleaned. Pressure balance mechanism allows unrestricted exhaust direction. Overtravel mechanism maintains constant O-ring compression (size 50, 6, 80). XLF/XLFV (O-ring seal, Single acting) Low gas entrainment with employment of O-ring seal system. High speed response and long service life. Particulates are reduced through special surface treatment of shaft seal. Features XL/XLV (O-ring seal, Double acting) Low gas entrainment with employment of O-ring seal system. High speed response and long service life. Overtravel mechanism maintains constant O-ring compression (size 50, 6, 80). Particulates are reduced through special surface treatment of shaft seal. XLD/XLDV ( stage control, Single acting) Initial exhaust valve and main exhaust valve have been integrated ( stage flow control valve). Makes compact system design and reduced piping possible. Minimizes particulates by eliminating turbulence during exhaust. Prevents pump overload. Initial exhaust valve flow is adjustable and adjustment can be locked. XLH (ellows seal, Manual operation) ellows type is particulate free and completely cleaned. Pressure balance mechanism allows unrestricted exhaust direction. Low actuation torque (0.5N m or less). Spring provides standard sealing load. Handle height is the same when valve is open or closed. Indicator to confirm opening and closing of valve is standard equipment. XLS (ellow pressure balance, Normally closed solenoid) Particulates are reduced because there are no sliding metal parts. Pressure balance mechanism allows unrestricted exhaust direction. control power supply circuit for solenoid valve drive has been made standard. an be used in portable equipment since air for drive is not necessary. XS (Direct solenoid operation) Solenoid valve with metal seal fittings (VR /Swagelok ) Particulates are reduced because there are no sliding metal parts. Improved reverse pressure performance.

3 Series Variations High Vacuum ngle Valve ctuation pplication Shaft seal system s Valve type Operating pressure Pa Leakage Pa m /sec Service life (Million cycles) Internal External Flange size Options High temp. Switch Heater Indicator specification Particulate free completely cleaned ellows Seal XL XLV (With solenoid valve) XL XLV (With solenoid valve) Single acting (N..) Double acting 0 5 to P. to P.4 P.5 to P.8 Electromagnetic Manual ir operated High speed operation High volume operation Reduces particulates Eliminates pump over loads For portable equipment not requiring air Particulate free completely cleaned For portable equipment not requiring air O-ring Seal ellows, O-ring Seal ellows Seal (ellows alance) XLF XLFV (With solenoid valve) XL XLV (With solenoid valve) XLD XLDV (With solenoid valve) XLH XLS Single acting (N..) Double acting Single acting (N..) Manual Single acting (N..) x 0 5 to to to 0-6 x 0 5 to ( Size 6, 5, ) ( Size 50, 6, 80) Standard Standard Standard Standard P.9 to P. P. to P.6 P.7 to P. P., P.4 P.5 to P.8 Heater and high temperature specifications are not available with switches. Straight Solenoid Valve (with Metallic Seal Fitting) XS- XS- XS- XS- XS- XS-4 Valve type Piping size Direct solenoid operation (N..) /4 /8 Orifice mmø Effective sectional area mm 6 9 Operating pressure Differential pressure MPa Port Pa Internal External Fitting Leakage Pa m /sec 0 - VR 0 - SWJ 0-0 Differential Pressure: Indicates the maximum operable pressure difference between port P and port. In the case of 0.8MPa, when port is a vacuum, port P can be pressurized to 0.8MPa (7kgf/cm²). VR Fitting and Swagelok Fitting are registered trade marks of the ajon ompany and the rawford Fitting ompany Inc. respectively. Service life million cycles P.9 to P. Features

4 High Vacuum ngle Valve Series XL, XLV Normally losed/ellows Seal ir Operated Type How to Order XL 6 F9N High vacuum angle valve (Normally closed, bellows seal, air operated type) Flange size Flange type Symbol Type pplicable flange size D F(NW) (DN) 6, 5,, 50, 6, 80 6, 80 Indicator/ctuation port direction F J L M Without indicator/flange side With indicator/flange side With indicator/left flange surface With indicator/rear flange surface With indicator/right flange surface Without indicator/left flange surface Without indicator/rear flange surface Without indicator/right flange surface Note) ctuation port direction (Example) Left flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. Switch quantity/ Mounting position Symbol Quantity Mounting position pcs. Valve open/closed pc. Valve open pc. Valve closed uto switch type Without auto switch (without built-in magnet) Solid state auto switches F9N D-F9N F9P D-F9P F9 D-F9 Note ) The standard lead wire length is 0.5m. For m, "L" is added at the end of the part number. (Example) F9NL: D-F9NL Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. Temperature specifications/heater Symbol Temp. range Heater H0 5 to 60 None None H With heater for 80 H 5 to 50 With heater for 00 H With heater for 0 High temp. type XL Option specifications/ombination table High temp. type Option specifications Symbol XL-6 XL-5 XL- XL-50 XL-6 XL-80 Indicator Without heater H0 With heater for 80 H With heater for 00 H With heater for 0 H Note) uto switches cannot be mounted in the case of high temperature types.

5 Series XL, XLV ir Operated Type/with Solenoid Valve How to Order XLV 6 F F9N High vacuum angle valve Normally closed, bellows seal, air operated type with solenoid valve Flange size Flange type Symbol Type pplicable flange size D F(NW) (DN) 6, 5,, 50, 6, 80 6, 80 Solenoid valve/indicator direction F With indicator/left flange surface With indicator/rear flange surface J With indicator/right flange surface Without indicator/left flange surface L Without indicator/rear flange surface M Without indicator/right flange surface Note) ctuation port direction (Example) Left flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. uto switch type Without auto switch (without built-in magnet) Solid state auto switches F9N D-F9N F9P D-F9P F9 D-F9 Note ) The standard lead wire length is 0.5m. For m, "L" is added at the end of the part number. (Example) F9NL: D-F9NL Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. Rated voltage The S type is not available for. The U type is D only. Electrical entry H L M rommet (lead wire length 00mm) rommet (lead wire length 600mm) L type plug connector M type plug connector 00V, 50/60Hz 00V, 50/60Hz 0V, 50/60Hz 4 0V, 50/60Hz 5 4VD 6 VD Light/Surge voltage suppressor S Z U Switch quantity/mounting position Symbol Quantity Mounting position pcs. Valve open/closed pc. Valve open pc. valve closed None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (non-polar type) XLV Note ) Option specifications/ombinations This model has indicator, auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves XLV-6, 5,, 50: SYJ9 XLV-6, 80: SYJ59 Example) SYJ9-S, etc. For further details on solenoid valves, refer to the SM solenoid valve catalog "SYJ 00, 500, 700" (E4-). Note ) Solenoid valves are shipped facing downward (flange side), but can be rotated to face upward.

6 Series XL, XLV Specifications XL(V)-6 XL(V)-5 XL(V)- XL(V)-50 XL(V)-6 XL(V)-80 Valve type Fluid Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (606) and SUS04/6 Operating temperature XL 5 to 60 (high temperature type: 5 to 50) XLV 5 to 50 Operating pressure Pa {Torr} tmospheric pressure to x 0-6 {760 to 7.5 x 0-9 } Note ) onductance l/s Leakage Pa m /s Internal. x 0-0 { x 0-9 } at ordinary temperatures, excluding gas permeation {Torr l/s} External. x 0 - { x 0-0 } at ordinary temperatures, excluding gas permeation Note ) Operating time s Flange type F (NW) F (NW), (DN) Principle materials ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Surface treatment Exterior: Hard anodized Interior: Machined for clean environment ctuation pressure MPa {kgf/cm } 0.4 to 0.7 {4 to 7} ctuation port size XL M5 Rc(PT ) /8 XLV M5 (Ports P, R ) Rc(PT) /8 (Port P): M5 (Port R) ctuating solenoid valve recommended v factor (XL) Service life (Million cycles) Weight kg XL XLV onstruction /Operation Note ) onductance is the same as that of an elbow with the same dimensions. Note ) The time required for 90% valve movement when an actuation pressure of 0.5MPa {5kgf/cm²} is applied. There is a difference of about 0% in this value at the upper and lower pressure limits. Note ) For valve heater specifications, refer to "ommon Option Specifications, [] Heaters" on page 4. P R Plate Port P (pressure port) Port R (exhaust port) Solenoid valve Heater (optional) Name plate uto switch (optional) Indicator (optional) onnet assembly (includes ) Piston seal Magnet (built-in only for auto switch) ctuation port Piston Exterior seal (maintenance part) Shaft seal With solenoid valve <<Options>> uto switch: Heater: Indicator: The magnet (0) actuates the auto switch (4) indicating the position of the integrated valve (5) and piston (8). With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly () is a heat resistant structure. When the valve is open, an orange marker about mm in height appears in the center of the name plate (6). Valve side exhaust ellows side exhaust ellows Spring ody Valve Valve seal (maintenance part) <<Operation principle>> y applying pressure from the actuation port (7), the piston (8), which is sealed by the shaft seal () and the piston seal (9), overcomes the force of the spring (), and the valve (5) opens. With the exhaust of air pressure, the valve (5) is closed by the force of the spring () and is sealed by the valve seal (4). In the case of the XLV, port P(9) is normally pressurized, and the valve (5) opens when the solenoid valve (8) is turned ON and closes when it is turned OFF. Operation is the same as that of the XL.

7 P R Series XL, XLV Dimensions XL/ir operated type E (b) D (a) E E Fn (F flange) Fd ( flange) (c) Heater (optional) H ø XL-6 XL-5 XL- XL-50 XL-6 XL D E Note ) Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page 4. Fn Fd (mm) H XLV/With solenoid valve J N M Port P (pressure port) L Port R (exhaust port) XLV-6 XLV-5 XLV- XLV-50 XLV-6 XLV-80 J L Other dimensions are the same as XL. M 4 4 (mm) N 4

8 High Vacuum ngle Valve Series XL, XLV Double cting/ellows Seal ir Operated Type How to Order XL 6 F9N High vacuum angle valve (Double acting, bellows seal, air operated type) Flange size Flange type Symbol Type pplicable flange size D F(NW) (DN) 6, 5,, 50, 6, 80 6, 80 ctuation port direction L M Flange side Left flange surface Rear flange surface Right flange surface Note) ctuation port direction (Example) Left flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. Switch quantity/mounting position Symbol Quantity Mounting position pcs. uto switch type Without auto switch (without built-in magnet) Solid state auto switches F9N D-F9N F9P D-F9P F9 D-F9 Temperature specifications/heater Symbol Temp. range Heater 5 to 60 None H0 None H With heater for 80 5 to 50 H With heater for 00 H With heater for 0 High temp. type Valve open/closed pc. Valve open pc. Valve closed Note ) The standard lead wire length is 0.5m. For m, "L" is added at the end of the part number. (Example) F9NL: D-F9NL Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. XL High temperature type combination table High temperature specifications Symbol XL-6 XL-5 XL- XL-50 XL-6 XL-80 Without heater H0 With heater for 80 H With heater for 00 H With heater for 0 H Note) uto switches cannot be mounted in the case of high temperature types. 5

9 Series XL, XLV ir Operated Type/with Solenoid Valve How to Order XLV 6 F9N High vacuum angle valve Double acting, bellows seal, air operated type with solenoid valve Flange size Flange type Symbol Type pplicable flange size D F(NW) (DN) 6, 5,, 50, 6, 80 6, 80 Solenoid valve direction Left flange surface L Rear flange surface M Right flange surface Note) Solenoid valve direction (Example) Left flange surface: Indicates that the direction of the solenoid valve is to the left side when the flange surface is viewed from the front. uto switch type Without auto switch (without built-in magnet) Solid state auto switches F9N F9P F9 D-F9N D-F9P D-F9 Note ) The standard lead wire length is 0.5m. For m, "L" is added at the end of the part number. (Example) F9NL: D-F9NL Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. Rated voltage 00V, 50/60Hz 00V, 50/60Hz 0V, 50/60Hz 4 0V, 50/60Hz 5 4VD 6 VD Switch quantity/mounting position Symbol Quantity Mounting position pcs. Valve open/closed pc. Valve open pc. Valve closed The S type is not available for. The U type is D only. Electrical entry H L M rommet (lead wire length 00mm) rommet (lead wire length 600mm) L type plug connector M type plug connector Solenoid valve action W Light/Surge voltage suppressor S Z U position single position double None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (non-polar type) Note ) Option specifications/ombinations This model has auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves position single : XLV-6, 5,, 50 : SYJ90 XLV-6, 80 : SYJ590 position double: XLV-6, 5,, 50 : SYJ90 XLV-6, 80 : SYJ590 Examples) SYJ90-S SYJ90-S For further details on solenoid valves, refer to the SM solenoid valve catalog "SYJ 000, 5000, 7000" (E44-). Note ) The direction of solenoid valve coils cannot be changed. XLV 6

10 Series XL, XLV Specifications Valve type Fluid XL Operating temperature XLV Operating pressure Pa {Torr} Note ) onductance l/s Leakage Pa m /s Internal {Torr l/s} External Note ) Operating time s Flange type Principle materials Surface treatment ctuation pressure MPa {kgf/cm } XL ctuation port size XLV ctuating solenoid valve recommended v factor (XL) Service life (Million cycles) Weight kg onstruction/operation XL XLV XL(V)-6 XL(V)-5 XL(V)- XL(V)-50 XL(V)-6 XL(V)-80 Double acting (dual operation), pressurize to open/close Non-corrosive gas for aluminum alloy (606) and SUS04/6 5 to 60 (high temperature type: 5 to 50) 5 to 50 tmospheric pressure to x 0-6 {760 to 7.5 x 0-9 } x 0-0 { x 0-9 } at ordinary temperatures, excluding gas permeation. x 0 - { x 0-0 } at ordinary temperatures, excluding gas permeation F (NW) F (NW), (DN) ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized Interior: Machined for clean environment 0. to 0.6 { to 6} M5 Rc(PT) /8 M5 (Ports P, R/R) Rc(PT) /8(Port P): M5(Ports R/R ) Note ) onductance is the same as that of an elbow with the same dimensions. Note ) The time required for 90% valve movement when an actuation pressure of 0.5MPa {5kgf/cm²} is applied. There is a difference of about 0% in this value at the upper and lower pressure limits. Note ) For valve heater specifications, refer to "ommon Option Specifications, [] Heaters" on page 4. With solenoid valve <<Operating principle>> y applying pressure from the actuating port []-(7), the piston (8), sealed by the shaft seal () and the piston seal (9), is operated opening the valve. (actuation port []-(7) is released) onversely, by applying pressure to actuation port []-(7), the piston (8), sealed by the cylinder seal () and the piston seal (9), is operated closing the valve (5) which is sealed by the valve seal (4). (actuation port []-(7) is released) In the case of the XLV, port P (9) is normally pressurized, and the valve (5) opens when the solenoid valve (8) is turned ON, and closes when it is turned OFF. Moreover, in the case of a double solenoid, the valve moves to the side where the solenoid valve (8) is turned ON. Operation is the same as that of the XL. For sizes 50, 6 and 80, the valve is sealed with a standard load by means of an overrun mechanism. 7 Port R (exhaust port) Plate Port P (pressure port) Port R (exhaust port) Solenoid valve Heater (optional) Stroke Name plate Valve side exhaust uto switch (optional) onnet cover ctuation port ylinder seal onnet assembly (includes ) Maintenance parts, optional (high temperature specifications) Piston seal ctuation port Magnet (option) Piston Exterior seal (maintenance part) Shaft seal ellows side exhaust ellows ody Valve seal (maintenance part) Valve <<Options>> uto switch: The magnet (0) actuates the auto switch (4) indicating the position of the integrated valve (5) and piston (8). With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly () is a heat resistant structure.

11 Series XL, XLV Dimensions XL/ir operated type (b) E D (a) E E (c) Fn (F flange) Fd ( flange) Heater (optional) H J ø XL-6 XL-5 XL- XL-50 XL-6 XL D E Note ) Fn Fd 95 0 Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page H (mm) J XLV/With solenoid valve Q Port R (exhaust port) N N With double solenoid ML P Port P (pressure port) With single solenoid (mm) XLV-6 XLV-5 XLV- XLV-50 XLV-6 XLV L M N P Q Other dimensions are the same as XL. 8

12 High Vacuum ngle Valve Series XLF, XLFV Normally losed/o-ring Seal ir Operated Type How to Order XLF 6 F9N High vacuum angle valve Normally closed, O-ring seal, air operated type ( ) Flange size Flange type Symbol Type pplicable flange size D F J L M F(NW) (DN) 6, 5,, 50, 6, 80 6, 80 Indicator/ctuation port direction Without indicator/flange side With indicator/flange side With indicator/left flange surface With indicator/rear flange surface With indicator/right flange surface Without indicator/left flange surface Without indicator/rear flange surface Without indicator/right flange surface Note) ctuation port direction (Example) Left flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. F9N F9P F9 D-F9N D-F9P D-F9 Temperature specifications/heater Symbol Temp. range Heater 5 to 60 None H0 None H With heater for 80 5 to 50 H With heater for 00 H With heater for 0 High temp. type Switch quantity/mounting position Symbol Quantity Mounting position pcs. pc. pc. Valve open/closed Valve open Valve closed uto switch type Without auto switch (without built-in magnet) Solid state auto switches Note ) The standard lead wire length is 0.5m. For m, "L" is added at the end of the part number. (Example) F9NL: D-F9NL Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. XLF Option specifications/ombination table Option specifications Symbol XLF-6 XLF-5 XLF- XLF-50 XLF-6 XLF-80 High temp. type Indicator Without heater With heater for 80 With heater for 00 With heater for 0 H0 H H H Note) uto switches cannot be mounted in the case of high temperature types. 9

13 Series XLF, XLFV ir Operated Type/with Solenoid Valve How to Order XLFV 6 F F9N High vacuum angle valve Normally closed, O-ring seal, air operated type with solenoid valve F9N F9P F Symbol Type pplicable flange size F(NW) 6, 5,, 50, 6, 80 D (DN) 6, 80 F J L M Flange size Flange type Solenoid valve/indicator direction With indicator/left flange surface With indicator/rear flange surface With indicator/right flange surface Without indicator/left flange surface Without indicator/rear flange surface Without indicator/right flange surface Note) ctuation port direction (Example) Left flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. uto switch type Without auto switch (without built-in magnet) Solid state auto switches D-F9N D-F9P D-F9 Note) The standard lead wire length is 0.5m. For m, "L" is added at the end of the part number. (Example) F9NL: D-F9NL Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. H L M S Z U Rated voltage 00V, 50/60Hz 00V, 50/60Hz 0V, 50/60Hz 4 0V, 50/60Hz 5 4VD 6 VD Switch quantity/mounting position Symbol Quantity Mounting position pcs. pc. pc. Valve open/closed Valve open Valve closed Light/Surge voltage suppressor The S type is not available for. The U type is D only. Electrical entry None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (non-polar type) rommet (lead wire length 00mm) rommet (lead wire length 600mm) L type plug connector M type plug connector XLFV Note ) Option specifications/ombinations This model has indicator, auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves XLFV-6, 5, : SYJ9 XLFV-50, 6, 80: SYJ59 Example) SYJ9-S For further details on solenoid valves, refer to the SM solenoid valve catalog "SYJ00, 500, 700" (E4-). Note ) Solenoid valves are shipped facing downward (flange side), but can be rotated to face upward. 0

14 Series XLF, XLFV Specifications Valve type Fluid Operating temperature XLF XLFV Operating pressure Pa Torr} Note ) onductance l/s Leakage Pa m /s Internal {Torr l/s} External XLF Note ) Operating time ms XLFV Flange type Principle materials Surface treatment ctuation pressure MPa {kgf/cm } ctuation port size XLF XLFV ctuating solenoid valve recommended v factor (XLF) Service life (Million cycles) Weight kg onstruction/operation <<Operating principle>> y applying pressure from the actuation port (7), the piston (8), which is sealed by the shaft seal () and the piston seal (9), overcomes the force of the spring (), and the valve (5) opens. With the exhaust of air pressure, the valve (5) is closed by the force of the spring () and is sealed by the valve seal (4). In the case of the XLFV, port P (9) is normally pressurized, and the valve (5) opens when the solenoid valve (8) is turned ON, and closes when it is turned OFF. Operation is the same as that of the XLF. XLF XLFV XLF(V)-6 XLF(V)-5 XLF(V)- XLF(V)-50 XLF(V)-6 XLF(V)-80 Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (606) and SUS04/6 5 to 60 (high temperature type: 5 to 50) 5 to 50 tmospheric pressure to x 0-5 {760 to 7.5 x 0-8 } x 0-0 { x 0-9 } at ordinary temperatures, excluding gas permeation. x 0-0 { x 0-9 } at ordinary temperatures, excluding gas permeation F (NW) F (NW), (DN) ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized Interior: Machined for clean environment 0.4 to 0.7 {4 to 7} M5 Rc(PT) /8 M5 (Ports P, R) Rc(PT) /8 (Port P): M5 (Port R) Note ) onductance is the same as that of an elbow with the same dimensions. Note ) The operating time with no solenoid valve (XLF) is the same value as the case of the solenoid valve piped directly to the bonnet, where the actuation pressure is 0.5MPa {5kgf/cm²}. The operating time becomes faster under high pressure. Note ) For valve heater specifications, refer to "ommon Option Specifications, [] Heaters" on page 4. P R With solenoid valve Plate Port P (pressure port) Port R (exhaust port) Solenoid valve Heater (optional) Name plate Shaft side exhaust Valve side exhaust <<Options>> For selections, refer to item, model number and option symbol table. uto switch (optional) Indicator (optional) Piston onnet assembly (includes ) Piston seal Magnet (optional) ctuation port Exterior seal (maintenance part) Shaft seal Scraper Spring ody Valve Valve seal (maintenance part) uto switch: The magnet (0) actuates the auto switch (4) indicating the position of the integrated valve (5) and piston (8). With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly () is a heat resistant structure. This is not available with solenoid valve. Indicator: When the valve is open, an orange marker about mm in height appears in the center of the name plate (6).

15 P R Series XLF, XLFV Dimensions XLF/ir operated type E (b) Fn (F flange) E (a) Fd ( flange) E (c) Heater (optional) ø H XLF-6 XLF-5 XLF- XLF-50 XLF-6 XLF D E Note ) Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page 4. Fn Fd (mm) H XLFV/With solenoid valve J N M Port P (pressure port) L Port R (exhaust port) XLFV-6 XLFV-5 XLFV- XLFV-50 XLFV-6 XLFV-80 J L Other dimensions are the same as XLF. M (mm) N

16 High Vacuum ngle Valve Series XL, XLV Double cting/o-ring Seal ir Operated Type How to Order XL 6 F9N High vacuum angle valve Double acting, O-ring seal, air operated type Flange size Symbol Type pplicable flange size F(NW) 6, 5,, 50, 6, 80 D (DN) 6, 80 L M Flange type ctuation port direction Flange side Left flange surface Rear flange surface Right flange surface Note) ctuation port direction (Example) Left flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. F9N F9P F9 pcs. pc. pc. D-F9N D-F9P D-F9 Temperature specifications/heater Symbol Temp. range Heater 5 to 60 None H0 H H H 5 to 50 None With heater for 80 With heater for 00 With heater for 0 High temp. type Switch quantity/mounting position Symbol Quantity Mounting position uto switch type Valve open/closed Valve open Valve closed Without auto switch (without built-in magnet) Solid state auto switches Note ) The standard lead wire length is 0.5m. For m, "L" is added at the end of the part number. (Example) F9NL: D-F9NL Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. XL High temperature type combination table High temperature specifications Symbol XL-6 XL-5 XL- XL-50 XL-6 XL-80 Without heater With heater for 80 With heater for 00 With heater for 0 H0 H H H Note) uto switches cannot be mounted in the case of high temperature types.

17 Series XL, XLV ir Operated Type/with Solenoid Valve How to Order XLV 6 F9N High vacuum angle valve Double acting, O-ring seal, air operated type with solenoid valve F9N F9P F9 Flange size Symbol Type pplicable flange size F(NW) 6, 5,, 50, 6, 80 D (DN) 6, 80 L M Flange type Solenoid valve direction Left flange surface Rear flange surface Right flange surface Note) Solenoid valve direction (Example) Left flange surface: Indicates that the direction of the solenoid valve is to the left side when the flange surface is viewed from the front. uto switch type Without auto switch (without built-in magnet) Solid state auto switches D-F9N D-F9P D-F9 Note ) The standard lead wire length is 0.5m. For m, "L" is added at the end of the part number. (Example) F9NL: D-F9NL Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. H L M S Z U Electrical entry Solenoid valve action position single W position double Rated voltage 00V, 50/60Hz 00V, 50/60Hz 0V, 50/60Hz 4 0V, 50/60Hz 5 4VD 6 VD Switch quantity/mounting position Symbol Quantity Mounting position pcs. Valve open/closed pc. pc. Valve open Valve closed Light/Surge voltage suppressor None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (non-polar type) The S type is not available for. The U type is D only. rommet (lead wire length 00mm) rommet (lead wire length 600mm) L type plug connector M type plug connector Note ) Option specifications/ombinations This model has auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves position single: XLV-6, 5, : SYJ90 XLV-50, 6, 80: SYJ590 position double: XLV-6, 5, : SYJ90 XLV-50, 6, 80: SYJ590 Examples) SYJ90-S SYJ90-S For further details on solenoid valves, refer to the SM solenoid valve catalog "SYJ 000, 5000, 7000" (E44-). Note ) The direction of solenoid valves cannot be changed. XLV 4

18 Series XL, XLV Specifications Valve type Fluid Operating temperature XL XLV Operating pressure Pa {Torr} Note ) onductance l/s Leakage Pa m /s Internal {Torr l/s} External XL Operating time ms Note ) XLV Flange type Principle materials Surface treatment ctuation pressure MPa {kgf/cm } ctuation port size XL XLV ctuating solenoid valve recommended v factor (XL) Service life (Million cycles) Weight kg XL XLV onstruction/operation <<Operating principle>> y applying pressure from the actuating port []- (7), the piston (8), sealed by the shaft seal () and the piston seal (9), is operated opening the valve (actuation port []-(7) is released). onversely, by applying pressure to actuation port []-(7), the piston (8), sealed by the cylinder seal () and the piston seal (9), is operated closing the valve (5) which is sealed by the valve seal (4) (actuation port []-(7) is released). In the case of the XLV, port P (9) is normally pressurized, and the valve (5) opens when the solenoid valve (8) is turned ON, and closes when it is turned OFF. Moreover, in the case of a double solenoid, the valve moves to the side where the solenoid valve (8) is turned ON. Operation is the same as that of the XL. For sizes 50, 6 and 80, the valve is sealed with a standard load by means of an overrun mechanism. XL(V)-6 XL(V)-5 XL(V)- XL(V)-50 XL(V)-6 XL(V)-80 Double acting (dual operation), pressurize to open/close Non-corrosive gas for aluminum alloy (606) and SUS04/6 5 to 60 (high temperature type: 5 to 50) 5 to 50 tmospheric pressure to x 0-5 {760 to 7.5 x 0-8 } x 0-0 { x 0-9 } at ordinary temperatures, excluding gas permeation. x 0-0 { x 0-9 } at ordinary temperatures, excluding gas permeation F (NW) ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized Interior: Machined for clean environment 0. to 0.6 { to 6} F (NW), (DN) M5 Rc(PT) /8 M5 (Ports P, R/R ) Rc(PT) /8 (Ports P), M5 (Ports R/R) Note ) onductance is the same as that of an elbow with the same dimensions. Note ) The operating time with no solenoid valve (XL) is the same value as the case of the solenoid valve piped directly to the bonnet, where the actuation pressure is 0.5MPa {5kgf/cm²}. The operating time becomes faster under high pressure. Note ) For valve heater specifications, refer to "ommon Option Specifications, [] Heaters" on page 4. 5 Port R (exhaust port) Plate Port P (pressure port) Port R (exhaust port) Solenoid valve Heater (optional) Name plate <<Options>> Valve side exhaust uto switch: The magnet (0) actuates the auto switch (4) indicating the position of the integrated valve (5) and piston (8). With auto switches, the open and closed positions are detected, and with auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly () is a heat resistant structure. This is not available with solenoid valve. uto switch (optional) onnet cover ctuation port ylinder seal Piston onnet assembly (includes ) Piston seal ctuation port Magnet (optional) Exterior seal (maintenance part) Shaft seal Scraper Shaft side exhaust ody Valve Valve seal (maintenance part)

19 Series XL, XLV Dimensions XL/ir operated type E (b) D (a) E E (c) Fn (F flange) Fd ( flange) Heater (optional) H J ø XL-6 XL-5 XL- XL-50 XL-6 XL D Note E Note ) E) Fn Fd H (mm) J Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page 4. Q XLV/With solenoid valve Port R (exhaust port) N N With double solenoid ML P Port P (pressure port) With single solenoid XLV-6 XLV-5 XLV- XLV-50 XLV-6 XLV-80 N Other dimensions are the same as XL. (mm) L ML MN QP QP

20 High Vacuum ngle Valve Series XLD, XLDV Smooth Exhaust Valve Normally losed/ellows, O-ring Seal ir Operated Type How to Order XLD 5 F9N High vacuum angle valve Smooth exhaust valve, normally closed, air operated type Flange size Flange type Symbol Type pplicable flange size F(NW) 5,, 50, 6, 80 D (DN) 6, 80 ctuation port direction L M Flange side Left flange surface Rear flange surface Right flange surface Note) ctuation port direction (Example) Left flange surface: Indicates that the direction of the actuation port is to the left side when the flange surface is viewed from the front. Switch quantity/mounting position Symbol Quantity Mounting position pcs. pc. pc. oth sides Valve open Valve closed uto switch type Without auto switch (without built-in magnet) Solid state auto switches F9N F9P F9 D-F9N D-F9P D-F9 Temperature specifications/heater Symbol Temp. range Heater High temp. type H0 Note ) The standard lead wire length is 0.5m. For m, "L" is added at the end of the part number. (Example) F9NL: D-F9NL Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. 5 to 60 None None H With heater for 80 H 5 to 50 With heater for 00 H With heater for 0 XLD High temperature type combination table High temp. specifications Symbol XLD-5 XLD- XLD-50 XLD-6 XLD-80 Without heater H0 With heater for 80 H With heater for 00 H With heater for 0 H Note) uto switches cannot be mounted in the case of high temperature types. 7

21 Series XLD, XLDV ir Operated Type/with Solenoid Valve How to Order XLDV 5 F9N High vacuum angle valve Smooth exhaust valve, normally closed, air operated type with solenoid valve Flange size Flange type Symbol Type pplicable flange size F(NW) 5,, 50, 6, 80 D (DN) 6, 80 H L M Light/Surge voltage suppressor S Z U None With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (non-polar type) The S type is not available for. The U type is D only. Electrical entry rommet (lead wire length 00mm) rommet (lead wire length 600mm) L type plug connector M type plug connector Solenoid valve direction L M Solid state auto switches F9N F9P F9 Left flange surface Rear flange surface Right flange surface Note) Solenoid valve direction (Example) Left flange surface: Indicates that the direction of the solenoid valve is to the left side when the flange surface is viewed from the front. uto switch type (for main exhaust valve) Without auto switch (without built-in magnet) D-F9N D-F9P D-F9 Rated voltage 00V, 50/60Hz 00V, 50/60Hz 0V, 50/60Hz 4 0V, 50/60Hz 5 4VD 6 VD Switch quantity/mounting position Symbol Quantity Mounting position pcs. pc. pc. Valve open/closed Valve open Valve closed Note ) The standard lead wire length is 0.5m. For m, "L" is added at the end of the part number. (Example) F9NL: D-F9NL Note ) n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or secured against a stopper or the valve body (depending on the valve size) for detection of valve closing. Note ) Option specifications/ombinations This model has indicator, auto switch and (DN) flange options, but high temperature/heater options are not available. Note ) Solenoid valves Initial exhaust valve Main exhaust valve Example XLDV-5 SY4 SY4-S XLDV-, 50, 6, 80 SY4 SYJ4 SYJ4-S For further details on solenoid valves, refer to the SM solenoid valve catalogs "SY00" (E4-) and "SYJ 00, 500, 700" (E4-) XLDV 8

22 Series XLD, XLDV Specifications Valve type Fluid Operating temperature Operating pressure Pa {Torr} onductance l/s Note ) Leakage Pa m /s {Torr l/s} Operating time s Note ) XLD XLDV Main exhaust valve Initial exhaust valve Internal External Main exhaust valve Initial exhaust valve Flange type Principle materials Surface treatment ctuation pressure MPa {kgf/cm } XLD ctuation port size XLDV ctuating solenoid valve Main exhaust valve recommended v factor (XLD) Initial exhaust valve Service life (Million cycles) XLD Weight kg XLDV XLD(V)-5 XLD(V)- XLD(V)-50 XLD(V)-6 XLD(V)-80 Normally closed (spring return & seal) [both main & initial exhaust valves] Non-corrosive gas for aluminum alloy (606) and SUS04/6 5 to 60 (high temperature type: 5 to 50) 5 to 50 tmospheric pressure to x 0-6 {760 to 7.5 x 0-9 } to to 8.5 to 4 to 8 4 to 8. x 0-0 { x 0-9 } at ordinary temperatures, excluding gas permeation. x 0 - { x 0-0 } at ordinary temperatures, excluding gas permeation F (NW) ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized Interior: Machined for clean environment 0.4 to 0.7 {4 to 7} [both main & initial exhaust valves] M5 Rc(PT) /8 M5 (Ports P, R) F (NW), (DN) Note ) The main exhaust valve conductance is the value for the molecular flow of an elbow having the same dimensions. The initial exhaust valve conductance is the value for the viscous flow. Note ) The time required for 90% valve movement when an actuation pressure of 0.5MPa {5kgf/cm²} is applied. There is a difference of about 0% in this value at the upper and lower pressure limits. Note ) For valve heater specifications, refer to "ommon Option Specifications, []Heaters" on page 4. 9

23 Series XLD, XLDV onstruction/operation Initial exhaust solenoid valve Main exhaust solenoid value Plate Port P (pressure port) Port R (exhaust port) Name plate Heater (optional) "" uto switch (optional) djustment nut djustment screw onnet assembly (optional/high temp. specs.) ctuation port S (for initial exhaust) Piston S (for initial exhaust) Piston M (for main exhaust) ctuation port M (for main exhaust) Magnet Exterior seal (maintenance part) Spring S ody ellows With solenoid valve ellows side exhaust <<Operating principle>> Initial exhaust valve opening adjustment The initial exhaust rate should be adjusted before operation. With actuation port S (0) in an unpressurized state on model XLD, or with initial exhaust solenoid valve (5) in the OFF state on model XLDV, the initial exhaust rate is set to zero by gently turning the adjustment nut (6) to the right until it stops. fter confirming the position of the angle adjustment scale on the name plate (5) and the angle adjustment mark on the adjustment nut (6), the initial exhaust rate is adjusted by turning the nut to the left. The pitch of the adjustment screw (9) is mm. The number of turns and initial exhaust conductance should be confirmed referring to the figure on the right. space is established between the end of the adjustment screw (9) and the shaft of valve S (8), which regulates the amount of movement of the piston S (). The initial exhaust conductance is determined by the amount of opening between valve S (8) and the valve seal S []- (4). Further turning is prevented by locking after adjustment. When the initial exhaust rate will not be adjusted, or when it will be set at a fixed rate, it can be locked by tightening the Section "" screw with a torque of approximately 5kgf cm. Operation of the initial exhaust valve The left section in the drawing shows the initial exhaust valve in a closed condition. When pressure is applied to the actuation port S (0) on model XLD, or the initial exhaust solenoid valve (5) is turned ON with port P () in a pressurized state on model XLDV, air follows the dotted line passing through the space by the shaft and fills the area below the piston S (). Piston S () is stopped when it strikes the adjustment screw (9). Through the movement of piston S (), the valve S (8) is removed from the valve S seal assembly []-(4), and initial exhaust takes place through the passage S(7). Operation of the main exhaust When pressure is applied the the actuation port M (7) on model XLD, or the main exhaust solenoid valve (6) is turned ON with port P in a pressurized state on model XLDV, the piston M (8) moves upward opening valve M (). Port S (0) remains pressurized and valve S (8) remains open. losing of both valves y removing pressure from actuation port S (0) and actuation port M (7) on model XLD, or turning OFF initial exhaust solenoid valve (5) and main exhaust solenoid valve (6) on model XLDV, the force of spring S (6) and spring M () cause valve S (8) and valve M () to contact their respective valve seats and seals, thereby sealing them. Initial exhaust valve conductance l/s (viscous flow) Valve side exhaust uto switch: (for main exhaust valve) Heater: XLD-5 Spring M Passage S Valve seal M (maintenance part) Valve M Valve S Valve seal S (maintenance part) Valve seat S XLD- XLD <<Options>> djustment nut rotations n Initial exhaust valve conductance setting XLD-6-80 The magnet () actuates the auto switch (4) indicating the position of the integrated valve M () and the piston M (8). With two auto switches, the open and closed positions are detected, and with one auto switch, either the open or closed position is detected. uto switches are applicable at ordinary temperatures only (5 to 60 ). Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0, depending on the heater option and valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. In the case of high temperature specifications, the bonnet assembly () is a heat resistant structure. This is not available with solenoid valve. 0

24 Series XLD, XLDV Dimensions XLD/ir operated type E (b) E D (a) Fn (F flange) Fd ( flange) E (c) Heater (optional) H J ø (mm) XLD-5 XLD- XLD-50 XLD-6 XLD D E Fn Fd H J Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page 4.

25 Series XLD, XLDV XLDV-5/With solenoid valve XLDV- to 80/With solenoid valve Fn (F flange) Fd ( flange) Fn (F flange) Fb ( flange) Port R (exhaust port) Initial exhaust solenoid valve Main exhaust solenoid valve ø Port P (pressure port) Max 0.5 (except connector) Max 0.5 (except connector) M Port R (exhaust port) Solenoid valve for initial exhaust N Solenoid valve for main exhaust ø Fn Fd M N XLDV XLDV- XLDV-50 XLDV-6 XLDV Port P (pressure port) (mm)

26 High Vacuum ngle Valve Series XLH Manual Valve ellows Seal How to Order XLH 6 High vacuum manual angle valve (ellows seal) Flange size Heater Symbol Heater type None H With heater for 80 H With heater for 00 H With heater for 0 XLH Heater combination table Setting temperature Symbol 80 H 00 H 0 H Note) Heater cannot be retrofitted. XLH-6 XLH-5 XLH- XLH-50 Specifications XLH-6 XLH-5 XLH- XLH-50 Fluid Non-corrosive gas for aluminum alloy (606) and SUS04/6 Operating temperature 5 to 50 Operating pressure Pa {Torr} tmospheric pressure to 0-6 {760 to 7.5 x 0-9 } Note ) onductance l/s Leakage Pa m /s {Torr l/s} Internal External. x 0-0 { x 0-9 } at ordinary temperatures, excluding gas transmission. x 0 - { x 0-0 } at ordinary temperatures, excluding gas transmission Flange type Principle materials Surface treatment ctuation torque N m {kgf cm} Handle revolutions Service life (Million cycles) Weight kg Note ) The conductance is the same as that of an elbow of the same dimensions. Note ) For valve heater specifications, refer to "ommon Option Specifications, [] Heaters" on page 4. F (NW) ody: luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Exterior: Hard anodized Interior: Machined for clean environment 0. { } 0.5 {.5 } 0.5 {.5 } 0.5 {5 }

27 Series XLH onstruction/operation Name plate Indicator Handle Heater (optional) Operating Precautions When the handle is turned to the right, the valve proceeds to close. When turning can no longer be felt in the handle, the valve is completely seated. Use caution, as there is a danger of breaking the handle if it is tightened forcefully beyond this point. Handle assembly (includes ) (maintenance part) Helium port Exterior seal (maintenance part) Operation aution Plate ellows side exhaust Spring ellows Valve Operating Precautions When the handle is turned to the right, the valve closes. When turning can no longer be felt in the handle, the valve is completely seated. Use caution, as there is a danger of breaking the handle if it is tightened forcefully beyond this point. <<Operating principle>> Valve side exhaust y turning the handle (9) to the left, the valve (6) opens. The handle (9) does not move up and down, but the indicator () shows the open or closed position of the valve. s the handle (9) is turned to the right, the valve (6) closes, and when the turning force of the handle (9) suddenly ceases to be felt, the valve (6) is sealed. The sealing force for the valve (6) comes from the spring (5), and is constant. Dimensions Valve seal (maintenance part) ody <<Options>> Heater: Simple heating is performed using thermistors. The valve body can be heated to approximately 80, 00 or 0, depending on the heater option and the valve size. The type and number of thermistors to be used will vary depending upon size and setting temperature. Indicator: When the valve is open, an orange marker appears in the center of the name plate (8). (b) E D (a) E E (c) F Heater (optional) ø XLH-6 XLH-5 XLH- XLH Note ) Dimension E applies when heater option is included. (lead wire length: approx. m) Note ) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under Replacement heaters/part Nos. on page 4. D E Note ) F (mm)

28 High Vacuum ngle Valve Series XLS Electromagnetic Type ellows Pressure alance How to Order Starting voltage 5 4VD 9 Other (48VD, 00VD) Note) Holding voltage is 5% of starting voltage. Electrical entry T D rommet onduit Terminal DIN terminal Without control power supply With control power supply XLS 5 5 XLS 5 P High vacuum angle valve ellows pressure balance, stage voltage switching type 6 5 Valve size F6 F5 ontrol power supply P With control power Voltage Electrical entry 00V 00V 5 4VD rommet 5 Warning () In case there is no control power supply (XLS-5-: 4/48/00VD), starting voltage should be applied for only 0.5 to 0.s, in accordance with the prescribed method (indicated on the back of the coil). ontinuously applying starting voltage can cause overheating of the coil and fire. Holding voltage is 5% of the starting voltage (the application method is shown on the back of the solenoid coil). Example) Starting voltage Voltage 6VD 4VD Holding voltage 0.5 to 0. Time s

29 Series XLS Specifications XLS-6 XLS-5 XLS-6-P XLS-5-P Valve type Normally closed (N..) Fluid Non-corrosive gas for aluminum alloy (606) and stainless steel (SUS5 equiv.) Operating temperature 5 to Operating pressure Pa {Torr} 0.M to x 0-6 {.5k to 7.5 x 0-9 } onductance l/s Leakage Pa m /s Internal. x 0-8 { x 0-7 } at ordinary temperatures, excluding gas permeation {Torr l/s} External. x 0 - { x 0-0 } at ordinary temperatures, excluding gas permeation Flange type/size F6 F5 F6 F5 Principle materials ody : luminum alloy ellows: Stainless steel Seal: FM (fluoro rubber) Surface treatment Exterior: Hard anodized Interior Machined for clean environment ontrol power supply No Yes Operating power supply voltage 4/6, 48/, 00/4VD 4VD 00/00V llowable voltage fluctuation % Initial Power consumption W Holding Initial urrent consumption Holding Electrical entry oil insulation Maximum operating frequency Service life (Million cycles) Weight kg onstruction/operation ±0,, D, T type type only lass 0 c.p.m Stroke Valve side exhaust Retainer oil assembly (maintenance part) ore assembly (maintenance part) rmature assembly (includes ) (maintenance part) over ore O-ring (maintenance part) Exterior onnet-o-ring }seal (maintenance part) Spring ellows ellows side exhaust Valve ody <<Operating principle>> y energizing the coil assembly () for 0.5 to 0.s with the starting voltage, the armature assembly (4) overcomes the reactive force of the spring (7) and is adsorbed to the core assembly (6), opening the valve (9). fter that, it is held with 5% of the starting voltage (when there is no power supply). (When there is a power supply, the activating voltage only is applied to the coil assembly ().) When energizing of the coil assembly () is canceled, the armature assembly (4) is separated from the core assembly (6) by the reactive force of the spring (7), closing the valve (9). Note ) The fixed seals between the interior of the body (0) and the atmosphere are the exterior seals (), and the drive section is sealed by the bellows (8). Note ) Since the seal diameter of the valve (9) and the effective pressure receiving diameter of the bellows (8) are the same, pressure is in balance and the bellows side can also be used for exhaust. 6

30 Series XLS Dimensions XLS/Without control power supply rommet () D onduit () J 70±0 (PF)/ Terminal (T) J ± L 5 (PF)/ DIN terminal (D) J L øf D øe J H 90±0 (PF)/ ø6 to 9 XLS-6- XLS-6- XLS-6-D XLS-6-T XLS-5- XLS-5- XLS-5-D XLS-5-T D 8 48 E 0 F H J (mm) L

31 Series XLS Dimensions XLS/With control power supply rommet () H D 4 øe J 50 ±0 øf 7 XLS-6-P XLS-5-P D 8 48 E 0 F H 0 5 (mm) J

32 Series XS Normally losed Type High Vacuum Straight Solenoid Valve How to Order XS S 5 Normally closed high vacuum straight solenoid valve Solenoid size No. No. No. Orifice symbol ø ø ø4.5 4 ø6 Refer to table below for applications. V S Fitting size /4 /8 Refer to table below for applications. Fitting Type VR Swagelok VR Fitting and Swagelok Fitting are registered trademarks of the ajon ompany and the rawford Fitting ompany Inc. respectively. 5 Electrical entry T D Spacer Electrical options S L Z 00V (with rectifier) 4VD 6 VD 9 Other (6VD, 48VD, 00VD) None With spacer None With surge voltage suppressor With light With light/surge voltage suppressor Refer to Table below for applications. rommet onduit Terminal DIN terminal Refer to Table below in case spacers only are required separately. Refer to Table below for applications. Voltage Refer to Table below for applications. Table :, Fitting size, Orifice Solenoid valve model (fitting size) XS (/4) XS (/4) XS (/4) (/8) (ø) Orifice symbol (diameter) (ø) (ø4.5) 4 (ø6) Table : Spacer part nos. Part No. XS XS-8-4 XS XS-8-4 XS Table : Voltage, Electrical entry, Electrical options Electrical entry Electrical options S (00V) D 5(4V) 6(V) D, T S L, Z 9

33 Series XS Specifications XS- XS- XS- ction Fluid Orifice diameter mmø v factor ctuation pressure difference MPaNote ) Note ) Reverse pressure potential MPa Port pressure Pa Internal Leakage Pa m /s External {Torr l/s} VR Fitting Swagelok Piping connection system XS- XS- XS-4 Normally closed direct acting port solenoid valve Non corrosive gas for stainless steel (SUS5 equivalent) x 0-6. x 0-9 { x 0-8 } at ordinary temperatures, excluding gas permeation. x 0 - { x 0-0 } at ordinary temperatures, excluding gas permeation. x 0 - { x 0-0 }. x 0-0 { x 0-9 } VR /SWJ (Swagelok) onnection size /4 Operating temperature 5 to Rated voltage 00V (with full wave rectifier) 6//4/48/00VD Power consumption W 5 8 llowable voltage fluctuation % ±0 Weight kg Service life (Million cycles) Note ) The actuation pressure difference indicates the difference between Port P (high pressure side) and Port (low pressure side). Example) In the case of 0.MPa, Port is a vacuum (Torr or less), while Port P can be pressurized to 0.MPa {kgf/cm }. Note ) Reverse pressure potential indicates the pressure which can be applied from Port when Port P is at atmospheric pressure. Note ) Indicates case of grommet type electrical entry. /8 onstruction/operation Stroke OUT IN Retainer (maintenance part) oil assembly (maintenance part) ore assembly (maintenance part) rmature assembly (includes (6)(7), maintenance part) Exterior seal (maintenance part) Spring (maintenance part) <<Operating principle>> y energizing the coil assembly (), the armature assembly (4) overcomes the composite force, consisting of the force acting on the valve (7) due to differential pressure and the reactive force of the spring (6), and is adsorbed to the core assembly (), opening the valve (7). When energizing of the coil assembly () is canceled, the armature assembly (4) is separated from the core assembly () by the reactive force of the spring (6), closing the valve (7). P Valve ody (for Swagelok ) ody (for VR ) <<Options>> Spacer: spacer used to raise the body when fastening it onto a flat area. P Spacer (optional) 0

34 Series XS Dimensions Electrical entry rommet () Electrical entry onduit () F 70±0 F 90±0 D H (PF)/ DIN terminal (D) F J H OUT P H IN E (PF)/ ø6 to 9 (body dimension) (s) (XS-S) P (L) -M5 Thread depth M P (fitting size) Terminal (T) F ± J 5 H (XS-V) Spacer 5 (PF)/ (mm) XS-S(V) XS-S(V) XS-S(V) XS-4S(V) ( ) are VR type 4(5) 46.5(57) 46.5(57) 50(66) s Swagelok type D 0 5 E F rommet H onduit H Terminal H J XS-S(V) XS-S(V) XS-S(V) XS-4S(V) DIN terminal H J L M P (Unit: inch) /4 /4 /4 /8

35 Response/Operation Time With pilot pressure at 0.5MPa Valve type Normally closed XL Double acting (dual operation) XL ellows seal T msec T msec Size Size Valve type Normally closed XLF Double acting (dual operation) XL O-ring seal T msec T msec Size Size Valve type Exhaust Normally closed XLD Initial exhaust valve Smooth exhaust valve T msec Size Size Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only)

36 s a function of pilot pressure Valve type Normally closed XL- Double acting (dual operation) XL ellows seal T msec 00 T msec P MPa P MPa Valve type Normally closed XLF- Double acting (dual operation) XL O-ring seal T msec T msec P MPa P MPa Valve type Main valve Normally closed XLD- Initial exhaust valve Smooth exhaust valve T msec 0 00 T msec P MPa P MPa _ Response time when open (including pnematic valve) _ Operation time when open (vacuum valve only) _ Response time when closed (including pnematic valve) _ Operation time when closed (vacuum valve only)

37 ommon Option Specifications Heaters Valve heaters are common for models XL, XL, XLD, XLF, XL and XLH. Power consumption specifications are shown in the table below. Item Rated heater voltage Heater power W (nominal value) In-rush/Normal (Option symbol) XL-5 XL- XL-50 XL-6 XL to 5V H 80 00/0 00/0 0/ 0/60 600/00 H 00 00/ 00/60 0/00 600/50 H 0 00/0 0/70 0/80 600/0 800/80 Note) In-rush current will flow to the heater for approximately 0 seconds and will then subside. Refer to Maintenance Parts on page 4 for further details regarding quantity and type. Solid State uto Switches Specifications of applicable auto switches are shown below. n auto switch should be secured against a stopper in the auto switch groove for detection of valve opening, or at a position where it lightly touches a stopper or the valve body (depending on the valve size) for detection of valve closing. uto Switch Specifications uto Switch Internal ircuits D-F9N (+) rown [Red] uto switch part no. D-F9N D-F9P D-F9 Electrical entry Lateral Wiring system wire wire Output system NPN type PNP type pplicable load 4VD relay, PL Power supply voltage /4VD (0 to 8VD) urrent consumption 8m or less 0m or less Load voltage 8VD or less 4VD (0 to 8VD) Load current 50m or less 5 to 0m Internal voltage drop 0.4V or less.5v or less 4.5V or less Leakage current 0µ or less at 4VD m or less at 4VD Indicator light Red LED lights up when ON D-F9P D-F9 Main switch circuit Main switch circuit Output lack [White] () lue [lack] (+) rown [Red] Output lack [White] () lue [lack] (+) rown [Red] Operating time... ms or less Lead wires... Oil resistant heavy duty vinyl cord, ø.7, 0.5m D-F9N, D-F9P 0.5mm² x wires (brown, black, blue [red, white, black]) D-F9 0.8mm² x wires (brown, blue [red, black]) Impact resistance m/s²{0} Insulation resistance... 50MΩ or more with 500VD between lead wire and case Withstand voltage V for min. (between lead wire and case) mbient temperature... 0 to 60 Indicator light... Lights up when ON Enclosure...IE59 Standard IP67 watertight (JISO90) For a lead wire length of m, "L" is added at the end of the part number. Example) D-F9NL uto Switch Dimensions D-F9N, D-F9P, D-F9 Main switch circuit () lue [lack] Part No. D-F9N D-F9P D-F9 L dimension (mm)