Normally Closed Type High Vacuum Straight Solenoid Valve. How to Order XSA S 5 G. Fitting size. Fitting Type

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1 Series XS Normally losed Type igh Vacuum Straight Solenoid Valve ow to Order [Option] Normally closed high vacuum straight solenoid valve XS 1 1 S Solenoid size 1 No.1 No. No. 1 Orifice symbol ø ø ø4. 4 ø6 Refer to table q below for applications. itting size /8 Refer to table q below for applications. V S itting Type VR Swagelok VR itting and Swagelok itting are registered trademarks of the Swagelok ompany. T Spacer Electrical options S Z rommet onduit Terminal IN terminal Voltage 1 0 V (With rectifier) 4 V 6 1 V 9 Other (6 V, V) E-compliant Q E-compliant With spacer With surge voltage suppressor /Surge voltage suppressor Refer to Table e below in case spacers only are required separately. E-compliant Table q: Model, itting size, Orifice Solenoid valve model (itting size) XS1 () XS () XS () (/8) 1 (ø) Orifice symbol (iameter) (ø) (ø4.) 4 (ø6) Table e: Spacer part nos. Model art No. XS1 XS1-8-4 XS XS-8-4 XS 9 Table w: Voltage,, Electrical options, T Electrical options S S 1 (0 V) (4 V) 6 (1 V) ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San rancisco, Main Office: (60) Outside ocal rea: (800) Z

2 Series XS Specifications Model XS1-1 XS1- XS- XS- XS- XS-4 ction Normally closed direct acting port solenoid valve luid Inert gas Orifice diameter mmø 4. 6 v factor ctuation pressure difference Ma Note 1) Reverse pressure potential Ma Note ) ort pressure a 1 x 6 Internal 1. x 9 {1 x 8 } at ordinary temperatures, excluding gas permeation eakage a m /s External 1. x 11 {1 x } at ordinary temperatures, excluding gas permeation {Torr l /s} VR 1. x 11 {1 x } itting Swagelok 1. x {1 x 9 } iping connection system VR /SW (Swagelok) onnection size /8 Operating temperature to 40 Rated voltage 0 V (with full wave rectifier) 6/1/4//0 V ower consumption W llowable voltage fluctuation % ± Weight kg Note ) Service life (Million cycles) 00 Note 1) The actuation pressure difference indicates the difference between ort (high pressure side) and ort (low pressure side). Example) In the case of 0. Ma, ort is a vacuum (1 Torr or less), while ort can be pressurized to 0. Ma { kgf/cm }. Note ) Reverse pressure potential indicates the pressure which can be applied from ort when ort is at atmospheric pressure. Note ) Indicates case of grommet type electrical entry. onstruction/operation Stroke q Retainer (Maintenance part) w oil assembly (Maintenance part) e ore assembly (Maintenance part) r rmature assembly (Includes y u, maintenance part) t Exterior seal (Maintenance part) y Spring (Maintenance part) OUT IN u Valve i ody (or Swagelok ) i ody (or VR ) o Spacer (Optional) <<Options>> o Spacer: spacer used to raise the body when fastening it onto a flat area. <<Operating principle>> y energizing the coil assembly w, the armature assembly r overcomes the composite force, consisting of the force acting on the valve u due to differential pressure and the reactive force of the spring y, and is adsorbed to the core assembly e, opening the valve u. When energizing of the coil assembly w is canceled, the armature assembly r is separated from the core assembly e by the reactive force of the spring y, closing the valve u. 0 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San rancisco, Main Office: (60) Outside ocal rea: (800)

3 Series XS imensions rommet () onduit () 70± 90± ()1/ IN terminal () 9. 9 OUT IN E ()1/ ø6 to 9 (body dimension) (s) (XS-S) () -M Thread depth M (fitting size) Terminal (T) ± K (XS-V) Spacer 1 ()1/ (mm) Model XS1-S(V) XS-S(V) XS-S(V) XS-4S(V) ( ) are VR type 41(1) 46.(7) 46.(7) 0() s Swagelok type E rommet onduit Terminal K Model XS1-S(V) XS-S(V) XS-S(V) XS-4S(V) IN terminal M 8 (Unit: inch) /8 1 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San rancisco, Main Office: (60) Outside ocal rea: (800)

4 Specific roduct recautions 4 e sure to read before handling. ngle Solenoid Valve/Series XS Warning recautions on esign 1. The body material is 606, the bellows and other parts are SUS16 and 1r stainless steel, and the seal material is fluoro rubber (Viton ). Use fluids which are compatible with these materials.. In cases without an operating power supply, the starting voltage is applied for only 0.1 to 0.s, and after this, a holding voltage (% of the starting voltage) must be applied. If not performed properly, this can cause burning of the coil and fire, etc.. e certain to install a fuse or short circuit breaker in the power supply circuit. Selection 1. Use within the limits of the operating pressure range. There will be a marked decrease in durability at pressures above specification. Mounting 1. In high humidity environments, keep valves packaged until the time of installation.. Secure the lead wires so that they have sufficient slack, without any unreasonable force applied to them. iping 1. efore mounting, clean the surface of the flange seal and the O- ring with ethanol, etc.. e sure that the flange O-ring is compressed by 1% or more.. There is an indentation of 0.1 to 0.mm in order to protect the flange seal surface, and it should be handled so that the seal surface is not damaged in any way. When using an outer ring, be sure that the O-ring is compressed sufficiently. (There is basically no problem with the outer ring.) Maintenance 1. Replace the core and armature assemblies when the end of their service life is approached.. If damage is suspected prior to the end of the service life, perform early maintenance.. SM specified parts should be used for service parts. Refer to Replacement parts on page 4 for further details. Straight Solenoid Valve/Series XS Warning recautions on esign 1. The body material is SUS04, the electromagnet is 1r stainless steel, and the seal material is fluoro rubber (Viton ). Use fluids which are compatible with these materials.. e certain to install a fuse or short circuit breaker in the power supply circuit. Mounting 1. In high humidity environments, keep valves packaged until the time of installation.. Secure the lead wires so that they have sufficient slack, without any unreasonable force applied to them. iping 1. efore mounting, clean the sealing surface with ethanol, etc.. asten the VR and SW (Swagelok) properly, in accordance with the specified torque and methods prescribed by both companies. Reference VR: 1/8 turn after tightening by hand SW: 1 turns after tightening by hand. ttach the valve using body bottom mounting screws (-M =1). * VR itting is a registered trade mark of the ajon ompany, and Swagelok itting is a registered trade mark of the rawford itting ompany Inc.. Maintenance 1. Replace the armature and core assemblies when the end of their service life is approached.. If damage is suspected prior to the end of the service life, perform early maintenance.. SM specified parts should be used for service parts. ront matter 4 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San rancisco, Main Office: (60) Outside ocal rea: (800)

5 Specific roduct recautions 6 e sure to read before handling. Maintenance arts Straight solenoid valve (normally closed) onstruction No. escription Retainer XS1 VX oil assembly 0V VX X44 ore assembly rmature assembly Exterior seal XS1-0-1 XS1-0-4 S68-016V Refer to the onstruction/operation sections for construction numbers. ow to Order oil ssembly ( for XS) VX XS VX VX01-00-X44 (Refer to the section "ow to Order oil ssembly") XS-0-1 XS-0-4 S68-019V XS VX VX01-00-X44 XS4-0-1 XS4-0-4 oil assembly pplications Size part no. pplicable Series No.1 Solenoid No. Solenoid XS1 XS 00 No. Solenoid XS rommet onduit IN terminal oil insulation type lass insulation Terminal box T With terminal box Rated voltage Note1) 0 4V 06 1V 1 6V V 0V Note 1) If the leading "0" is removed from voltage symbols 0, 06, these are the same as the solenoid valve symbols. Electrical options S With Surge voltage suppressor Z /surge voltage suppressor ow to Order (Example) Series XS1 with 1V grommet. Mode: VX (Example) Series XS with 4V IN terminal (terminal box). Mode: VX01-00T-0 (Example) Series XS with 4V terminal, surge voltage suppressor and light. Mode: VX01-00TZ-0 oil combinations (, oil insulation type, Electrical options) Without electrical options T T With surge voltage suppressor S TS TS With electrical options rommet onduit T IN terminal T The applicable voltage with light, and with light/surge voltage suppressor, is 4V only. /surge voltage suppressor TZ TZ ront matter 6 ourtesy of Steven Engineering, Inc.-0 Ryan Way, South San rancisco, Main Office: (60) Outside ocal rea: (800)