HVB/HVL. Solenoid valve for high vacuum. For vacuum, inert gas, air, nitrogen CONTENTS. Overview

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1 HV/HVL For vacuum, inert gas, air, nitrogen HN/G US/G F/G Overview dvanced technology, such as stability in the leak amount (vacuum holding force) and increased seal life, is required when the degree of vacuum increases. The HV Series introduces special technology throughout for the valve seat shape, seal material and surface processing, etc. stable performance is realized even at a high vacuum. Use this for various vacuum devices, including electronic beams, molecular accelerators and vacuum deposition. The HVL Series is the conventional high vacuum solenoid valve to which a device is added to provide a several-second delay when opening the valve. This prevents various troubles in vacuum devices during power failures. Use this to prevent release to atmospheric pressure at a power failure, or to prevent oil from entering the piping if the manual valve is not properly opened after the power stops. Features Special packing seal adopted FKM with outstanding seal life. High corrosion proof Stainless steel is adopted for body. High vacuum holding force The low leakage provides a stable vacuum holding force. ack pressure usable (reverse vacuum) * Excluding some models Easy maintenance Simple structure facilitates maintenance. CONTENTS Safety precautions 1 Direct acting port solenoid valve Product introduction 1 HV1 HV11 HV1 HV 71 8 Delay vacuum solenoid valve HVL 1 lways read the precautions in the Introduction and page 1 before starting use. FG/G FV FW/G FH FL G P/ D PK/ DK For dry air Explosion proof HV/ HVL S/ SV NP/NP/ NVP CH/G MX/G Other G.P. systems PD/FD/ PJ CVE/ CVSE CPE/ CPD Medical analysis Custom order 1

2 Safety precautions lways read this section before starting use. (HV/HVL) Design & Selection CUTION 1 Working fluid The high vacuum device is designed for controlling fluids (inert gas, air, vacuum). If other fluids (active gas, fluids, solids, etc.) are passed, the product will not operate correctly, or its performance could drop markedly. (1) Joint tightening method JXR joint (when gasket material is nickel/sus1) Using fingers, tighten the nut until the gasket contacts the bead surface, and then tighten another 1/8 turn with a tool. (Consult with CKD for all other materials.) Female nut ead Gland Installation & djustment WRNING 1 Installation Incorrect mounting and piping will result in product trouble, may cause trouble in the user's system, and may result in death or serious injury. The user is responsible for making sure that the operator has read the instruction manual and fully comprehends the system. fter mounting, carry out an appropriate function test to confirm that the product is correctly mounted. CUTION 1 Direction when connecting pipes (some models) The vacuum valve is basically designed so that all connection ports can be connected to the vacuum pump. However, with some models (see below), the connection port to the vacuum pump is limited. <Table 1> Vacuum pumps with limited connection ports Model HV1-1F-1 HV71-1F-1 Vacuum pump connection port When using the models shown above and using a port other than the designated port when connecting to the vacuum pump, trouble such as a seal fault or operation fault could result. Tightening the joint Make sure that there is no dirt, scratches or burrs on the seal section before tightening the joint with the following procedures. Gasket Double barbed joint Confirm that the front ferrule, back ferrule and nut are properly attached, and then insert the tube until it contacts the back of the body. Tighten the nut as far as possible with fingers, and then tighten 1 1/ turn with a tool. Cap nut Front ferrule ack ferrule Tube () fter tightening the joint, always carry out a leak test, and confirm that there are no leaks. High temperature caution during solenoid valve coil energizing The coil section of the solenoid valve (HV/HVL) will heat up when energized. Especially, the class H specification coil (some of the HV coils) will become very hot when energized. There is a risk of burns if these coils are touched directly. Cautions for wiring solenoid valve (1) s a guide, use a wire with a nominal cross section of 0. mm or more. Make sure that excessive force is not applied on the lead wire. () lways use within the allowable voltage range. Use exceeding the allowable voltage range could result in operation faults or coil damage. () Provide a breaker, such as a fuse, on the control circuit side to protect the electric equipment. () Use of a switching circuit which does not generate contact chattering will increase the solenoid valve's durability. () If the electric circuit system is susceptible to solenoid surging, provide measures such as inserting a surge absorber in parallel to the solenoid. 1

3 HN/G US/G CUTION When Using 1 Electric shock risk: Solenoid valve electrical wiring connections (bare live parts) There is a risk of electric shock by touching the electrical wiring connections (bare live parts) of the solenoid valve (HV/HVL). lways disconnect the power supply before disassembly and inspection. Never touch the live parts with wet hands. F/G FG/G FV FW/G FH FL G P/ D PK/ DK For dry air Explosion proof HV/ HVL S/ SV NP/NP/ NVP CH/G MX/G Other G.P. systems PD/FD/ PJ CVE/ CVSE CPE/ CPD Medical analysis Custom order 1

4 New HV Series high-vacuum solenoid valve maintaining new easier-to-use series has been added to the reliable, proven conventional series Durability,000,000 times (*CKD conditions) This highly reliable high-quality valve provides superior performance even in continuous long-term use. Power consumption reduced by 0% (CKD comparison) Power consumption is greatly reduced. This valve saves power even in long-term use with power on continuously. Vacuum leakage: 1 x 10-9 Pa m /s or less The high vacuum has a stable leakage range both inside and outside. High vacuum solenoid valve 1

5 high vacuum degree and providing outstanding durability HN/G US/G F/G FPD manufacturing system Optical electronic devices FG/G FV FW/G FH Lightweight and compact This valve is lighter and smaller than the conventional type. Coil width: % smaller Weight : % lighter nalysis equipment Wide variations Orifices are available in diameters of 1,,,.,and. Coil widths are available at, 8,, and 0 mm. Unlimited installation This valve can be installed to match the installation site, thereby saving space. FL G P/ D PK/ DK For dry air Explosion proof HV/ HVL S/ SV NP/NP/ NVP CH/G MX/G Three connection types JXR male threads Connectable to VCR female threads Double barbed joint Connectable to a swage joint NPT Other G.P. systems PD/FD/ PJ CVE/ CVSE CPE/ CPD Medical analysis Custom order Series variation Coil width (mm) Orifice (mm) Connection Double barbed joint 17

6 HV 1 Series Orifice: ø1, ø, ø, ø., ø NC (normally closed) type HV 1 Series JIS symbol NC (normally closed) type Common specifications Item Working fluid Withstanding pressure MPa Fluid temperature C mbient temperature C Heat proof class llowable voltage fluctuation tmosphere Valve structure Valve seat leakage Pa m /s He External leakage Pa m /s He Mounting attitude Number of endurance times HV*1 ir, vacuum, inert gas (*1).0 to 0 to (no freezing) Rated voltage ±10% Not in explosive or corrosive environment Direct acting poppet structure 1.0 x 10-9 or less (*) 1.0 x 10-9 or less Free,000,000 times Individual specifications Item Port size (*) NC (normally closed) type HV1 1/" JXR male joint 1/" double barbed joint NPT 1/8, Rc 1/8 HV1 1/" JXR male joint 1/" double barbed joint NPT 1/8, 1/, Rc 1/8, 1/ HV1 1/" JXR male joint 1/" double barbed joint NPT 1/, Rc 1/ /8" JXR male joint /8" double barbed joint NPT /8, Rc /8 HV1 1/" JXR male joint 1/" double barbed joint NPT 1/, Rc 1/ /8"JXR male joint /8" double barbed joint NPT /8, Rc /8 Orifice (mm) 1.. Cv flow factor (*) Working pressure range Pa (abs) (*10) 1.0 x 10 - to 1.0 x x 10 - to 0. x x 10 - to 0.8 x x 10 - to 0. x x 10 - to 1.0 x x 10 - to 0. x x 10 - to 0. x x 10 - to 0.8 x x 10 - to 0. x 10 Max. working pressure diff. (*) (MPa) ack pressure (*7) (MPa) Rated voltage 100 VC 0/0 Hz 00 VC 0/0 Hz VDC 1 VDC Power consumption (W) C DC *1: The durability may drop considerably depending on the degree of dryness. *: This value applies when port is the vacuum side. *: The JXR joint can be connected with the VCR joint. *: Keep the leakage current at the following value or less. *: The listed Cv flow factors are for the NPT connection. *: The maximum working pressure differential indicates the difference of pressures between port (high pressure side) and port (low pressure side). *7: Pressure at which pressurizing from port with port released to atmospheric pressure is possible. *8: 8. (W) at 1 VDC. *9: The weights listed are for the grommet lead wire and NPT connection. *10: The working pressure range vacuum does not guarantee the vacuum attainment time or that the vacuum will not change. *11: FKM is used for sealant material, so consider the generation of discharge gas when using (*8) 11. Weight (*9) (kg) Leakage current Voltage Series HV*1 100 VC m or less 00 VC 1 m or less VDC 1 m or less 1 VDC m or less

7 HV 1 Series How to order HV 1 RM C DCV Size variation (coil width) Connection C Orifice Table 1: Joint type and orifice combinations C Orifice Connection Z Joint type Size ø1 ø HV1 RM JXR male 1/" S Double barbed 1/" N NPT 1/8" Rc 1/8" HV1 RM JXR male 1/" S Double barbed 1/" N NPT 1/8" 8N NPT 1/" Rc 1/8" 8 Rc 1/" HV1 RM JXR male 1/" RM JXR male /8" S Double barbed 1/" S Double barbed /8" 8N NPT 1/" 10N NPT /8" 8 Rc 1/" 10 Rc /8" HV1 RM JXR male 1/" RM JXR male /8" S Double barbed 1/" S Double barbed /8" 8N NPT 1/" 10N NPT /8" 8 Rc 1/" 10 Rc /8" E Other options D Coil option *1 * ø ø. ø F Voltage <Example of model number> HV1-RM--C-DCV Series: HV1 Size variation : mm Connection : 1/" JXR male joint C Orifice : ø D Coil option : Grommet lead wire E Other options : Mounting plate F Voltage : VDC *1: The surge suppressor is incorporated as standard in the model with full wave rectifier. *: compact terminal box (Pg9) is used when D G or HS is selected for HV1. Symbol Descriptions Size variation mm 8 mm mm 0 mm Connection (refer to Table 1) RM 1/" JXR male joint RM /8" JXR male joint S 1/" double barbed joint S /8" double barbed joint N NPT 1/8 8N NPT 1/ 10N NPT /8 Rc 1/8 8 Rc 1/ 10 Rc /8 C Orifice (refer to Table 1) Z ø1 ø ø ø. ø D Coil option For C Grommet lead wire CR Std. ll wave rectifier For DC C Std. Grommet lead wire Grommet lead wire CS Surge suppressor G Option DIN terminal box (Pg11) DIN terminal box + light HS Surge suppressor (Pg11) E Other options lank Std. lank Option Mounting plate HV1 HV1 F Voltage C100V 100 VC 0/0 Hz C00V 00 VC 0/0 Hz DCV VDC DC1V 1 VDC Select from the combinations indicated with above. HV1 HV1 HN/G US/G F/G FG/G FV FW/G FH FL G P/ D PK/ DK For dry air Explosion proof HV/ HVL S/ SV NP/NP/ NVP CH/G MX/G Other G.P. systems PD/FD/ PJ CVE/ CVSE CPE/ CPD Medical analysis Custom order 19

8 HV 1 Series Internal structure and parts list 1 Port No. Parts name Material 1 Coil assembly Core assembly Plunger assembly (Molded coil) SUS0, SUS1L SUS0, FKM Stainless steel Stainless steel, fluoro rubber No. Parts name Material O ring Spring ody FKM SUS0 SUS0 or SCS1 Fluoro rubber Stainless steel Stainless steel Dimensions Grommet lead wire (voltage: DC type) and JXR male joint type HV*1- RM -*- C RM G H J D F Port E C L K Lead wire length 00 mm HV1-RM HV1-RM HV1-RM HV1-RM HV1-RM HV1-RM C D E F G H J K 1 L M x 0.7 depth M x 0.8 depth 8 M x 0.8 depth 8 M x 0.8 depth 8 M x 0.8 depth 8 M x 0.8 depth 8 0

9 HV 1 Series Dimensions Grommet lead wire (voltage: DC type) and double barbed joint type HV*1- S -*- C S HN/G US/G F/G Port E F FG/G FV D FW/G C FH H FL G Lead wire length 00 G P/ D HV1-S HV1-S HV1-S HV1-S HV1-S HV1-S C Grommet lead wire (voltage: DC type) and NPT type HV*1- N -*- C 8N 10N 8 10 D E F G 1 H M x 0.7 depth M x 0.8 depth 8 M x 0.8 depth 8 M x 0.8 depth 8 M x 0.8 depth 8 M x 0.8 depth 8 PK/ DK For dry air Explosion proof HV/ HVL S/ SV NP/NP/ NVP CH/G MX/G Other G.P. systems Port D E F G C PD/FD/ PJ CVE/ CVSE CPE/ CPD Medical analysis J Custom order HV1-N/ HV1-8N/ 8 HV1-10N/ HV1-10N/ H C 8 D E F Lead wire length 00 G NPT1/8 NPT1/8, NPT1/ NPT1/, NPT/8 NPT1/, NPT/8 H 1 J M x 0.7 depth M x 0.8 depth M x 0.8 depth 8 M x 0.8 depth 8 1

10 HV 1 Series Optional dimensions Grommet lead wire (voltage: C type) and all wave rectifier HV*1-*-*- CR Refer to the grommet lead wire (DC type) dimensions on the previous page for common dimensions. Port HV1 HV1 HV1 HV DIN terminal box (with light and surge suppressor) HV*1-*-*- G HS E F (coil width) C Port D JXR male joint: RM, RM Port G Port H Double barbed joint: S, S NPT joint: N, 8N, 10N HV1 HV1 HV1 HV C 8 D E Pg9 Pg11 Pg11 Pg11 F 8 0 G H

11 HV 1 Series Optional dimensions Mounting plate HV1-*-*-* 0 0 -ø HN/G US/G F/G FG/G 1 FV FW/G 1 -ø. FH FL G t1. P/ D PK/ DK For dry air Mounting plate HV 1-*-*-* 0 Explosion proof HV/ HVL S/ SV NP/NP/ NVP CH/G MX/G Other G.P. systems PD/FD/ PJ CVE/ CVSE CPE/ CPD Medical analysis Custom order -ø. -ø 0 8 t

12 HV11 Series HV11 Series NC (normally closed) type Port size: NPT1/8 JIS symbol NC (normally closed) type Specifications Item Working fluid Working pressure range Max. working differential pressure Pa (abs) MPa Pa m /s (He) Pa m /s (He) Valve seat leakage External leakage Withstanding pressure ack pressure (Note ) Fluid temperature mbient temperature Orifice Cv flow factor MPa MPa C C mm Frequency cycle/min. or less Port size Mounting attitude Weight kg Electric specifications Rated voltage llowable voltage fluctuation Power consumption W Heat proof class Temperature rise K HV11-N-* HV11-8R-* (custom order) Vacuum, inert gas (Note 1) 1. x 10 - to x 10 (Note ) x 10-9 or less 1.0 x 10-9 or less to 0 to NPT1/8 1/ inch VCR female Vertical position with coil facing upward , 00 VC (0/0 Hz), VDC Rated voltage ±10%.0 70 Note 1: The durability may drop considerably depending on the degree of dryness. Note : Pressure at which pressurizing from port with port released to atmospheric pressure is possible. Note : The working pressure range vacuum does not guarantee the vacuum attainment time or that the vacuum will not fluctuate. Note : FKM is used for sealant material, so consider the generation of discharge gas when using. How to order HV 11 N C100V Orifice ø1. Port size Symbol Descriptions Port size N NPT1/8 8R 1/" VCR female joint (custom order) Voltage Voltage C100V 100 VC (0/0 Hz) C00V 00 VC (0/0 Hz) DCV VDC Note: The older model HV11-N- is equivalent to the HV11-N-.

13 HV11 Series Internal structure and parts list HN/G 1 US/G Port 7 No. Parts name Material 1 7 Core assembly Plunger assembly Coil assembly Core O ring Spring ody SUS1 SUS0 SUS0 FKM SUM FKM SUS0 SUS0 F/G FG/G FV FW/G FH FL Dimensions and optional dimensions G HV11 ø P/ D PK/ DK For dry air Port 00 Line diode (No line diode for DC) -NPT1/8 7 Explosion proof HV/ HVL S/ SV NP/NP/ NVP CH/G ø 1 MX/G -M x 0.7 depth Other G.P. systems VCR joint (custom order) HV11-8R Line diode (No line diode for DC) PD/FD/ PJ CVE/ CVSE CPE/ CPD Medical analysis Custom order Note: The DC specifications are not provided with a line diode. 7 Port 1 8 -M x 0.7 depth -1/" VCR female joint

14 HV1 Series HV1 Series NC (normally closed) type Port size: NPT1/ (with O ring sheet) JIS symbol NC (normally closed) type Specifications Item Working fluid Working pressure range Max. working differential pressure Valve seat leakage External leakage Withstanding pressure ack pressure (Note ) Fluid temperature mbient temperature Orifice Cv flow factor Pa (abs) MPa Pa m /s (He) Pa m /s (He) MPa MPa C C mm Frequency cycle/min. or less Port size Mounting attitude Weight kg Electric specifications Rated voltage llowable voltage fluctuation Power consumption W Heat proof class Temperature rise K HV1-8N-* HV1-8R-* (custom order) Vacuum, inert gas (Note 1) 1. x 10 - to x 10 (Note ) x 10-9 or less 1.0 x 10-9 or less to 0 to NPT1/ (with O ring seat) 1/ inch VCR female Vertical position with coil facing upward , 00 VC (0/0 Hz), VDC Rated voltage ±10% 1 80 Note 1: The durability may drop considerably depending on the degree of dryness. Note : Pressure at which pressurizing from port with port released to atmospheric pressure is possible. Note : The working pressure range vacuum does not guarantee the vacuum attainment time or that the vacuum will not fluctuate. Note : FKM is used for sealant material, so consider the generation of discharge gas when using. How to order HV 1 8N M C100V Orifice ø Connection Symbol Descriptions Connection 8N NPT1/ (with O ring sheet) 8R 1/ " VCR female joint (custom order) Option Option lank lank M HP terminal box G1/ N HP terminal box + light G1/ Mounting plate C Voltage C Voltage C100V 100 VC (0/0 Hz) C00V 00 VC (0/0 Hz) DCV VDC

15 HV1 Series Internal structure and parts list HN/G 1 Port 7 No. Parts name Material 1 7 Coil assembly Core assembly Plunger assembly Spring O ring ody Cushion plate SUS0 SUS0 SUS1L SUS0 FKM PET SUS0 FKM SUS0 PET US/G F/G FG/G FV FW/G FH FL Dimensions and optional dimensions G HV1-8N 8 (00) P/ D PK/ DK For dry air Port 0. 0 ø 0. -M depth ø -NPT1/ Explosion proof HV/ HVL S/ SV NP/NP/ NVP CH/G N MX/G Other G.P. systems VCR joint (custom order) HV1-8R Square terminal box HV1-*-*- M N PD/FD/ PJ CVE/ CVSE CPE/ CPD 8 Medical analysis Custom order Mounting plate HV1-*-* ø. -ø t Port 8 8 -M depth 8 1-1/" VCR female joint G1/ 7

16 HV 71 Series HV 71 Series NC (normally closed) type Port size: ø8, ø flange JIS symbol NC (normally closed) type Specifications HV1-1F HV71-1F Item -8-8H H -1-1H Working fluid Vacuum, inert gas (Note 1) Working pressure range 1. x 10 - to.0 x x 10 - to.0 x x 10 - to 1.0 x x 10 - to 1. x x 10 - to.0 x x 10 - to 1.0 x x 10 - Pa (abs) to 1.0 x 10 Max. working differential pressure MPa Orifice mm Cv flow factor xial Radial ack pressure (Note ) MPa Valve seat leakage Pa m /s (He) 1.0 x 10-9 or less External leakage Pa m /s (He) 1.0 x 10-9 or less Withstanding pressure MPa 0. Fluid temperature C to mbient temperature C 0 to Frequency cycle/min. or less 10 Mounting attitude Free Port size ø8 flange ø flange Weight kg Electric specifications Rated voltage 100, 00 VC (0/0 Hz), VDC llowable voltage fluctuation Rated voltage 10% Power consumption W C:. C:. 19 DC: 0 DC: 0 Heat proof class H H H Temperature rise K Note 1: The durability may drop considerably depending on the degree of dryness. Note : Pressure at which pressurizing from port with port released to atmospheric pressure is possible. (Note that the reverse vacuum is not available for HV1-1F-1 and HV71-1F-1. ) Note : Grease for high vacuum is used on the wetted O ring. 8

17 HV 71 Series How to order HV 1 1F 8 Size variation Size variation C Orifice N C100V Symbol Size variation Descriptions 0 mm 7 70 mm Connection 1F ø8 flange 1F ø flange C Orifice 8 ø8 1 ø1 1 ø1 HV71 D Heat proof class *1 D Heat proof class Class H Class H <Example of model number> HV1-1F-8-N-C100V Series: HV1 Size variation : 0 mm Connection : ø8 flange C Orifice : ø8 D Heat proof class : Class E Option : HP terminal box + light G1/ F Voltage : 100 VC (0/0 Hz) E Option * F Voltage E Option lank lank HP terminal box M G1/ N HP terminal box + light G1/ F Companion flange MF HP terminal box G1/ + companion flange HP terminal box + light G1/ NF + companion flange F Voltage C100V 100 VC (0/0 Hz) C00V 00 VC (0/0 Hz) DCV VDC Note on model no. selection *1: D H is not available for HV1 orifice ø1. *: E M/N/MF/NF are not available for C voltage specifications when H is selected for D. *: Consult with CKD for details on joints (double barbed, JXR) other than listed above. HV1 9

18 HV 71 Series Internal structure and parts list 1 Port 7 8 No. Parts name Material 1 Core assembly SUS0, SUS1, SUS0 Coil assembly Plunger assembly SUS0, FKM, PF, PET Spring SUS0 O ring FKM ody SCS1 7 O ring FKM 8 ase cover SUS0 Dimensions and optional dimensions HV71 ø D Line diode øe Port ø ø F L K C Terminal box G øj -ø. (HV1) -ø.8 (HV71) Note: This can be used as the bolt hole. H Dimensions C D E F G H J K L HV M HV M Note: The line diode is enclosed only with the heat proof class H C specifications. Thus, the terminal box cannot be assembled with this series. Note: The mounting bolts and applicable O-rings are enclosed when the companion flange is ordered. 0

19 HV 71 Series Dimensions Companion flange dimensions xial piping Radial piping 8 C0. -ød Stainless steel tube for piping (JIS G9) Companion flange dimension Companion flange dimensions a b c d Mounting bolt HV1 8 0± M-1 HV71.± M-1 O ring JIS 01 V- *The mounting bolts and applicable O-rings are enclosed when the companion flange is ordered. øa øb øc Welding Port Port 1