VACUUM. Technology. Vacuum wands Accessories. l l
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1 Technoogy VACUUM Vacuum wands Accessories Windrush Technoogy Ltd. Te: Fax: Emai: 1
2 Vacuum wands Features The unique vave* ensures reiabe suction and instantaneous reease of a wafer. The we-poished inner wa of the vave minimizes partice generation. The opticay poished wafer tip provides exceent adhesion to a wafer. The wand body can be easiy detached from the tubing. C series for ESD protection The conductive nyon body reduces eectrostatic effects towards a wafer. The wafer tip is made of conductive poyetheretherketone (PEEK). A resistance of Ohms provides optimum static protection. F series for ow partice emission Wand body of poytetrafuoroethyene (PTFE) for chemica resistance. A arge seection of wafer tips is avaiabe in PCTFE, PEEK and Vespe (for high temperature appications). *US patent , Japanese patents and Windrush Technoogy Ltd. Te: Fax: Emai: enquiries@windrush.net 2
3 Body Tip C: C series F: F series Vave Connection Tip materia 3F: PCTFE (poychortrifuorethyene) CP: conductive PEEK (poyetheretherketone) PK: PEEK (poyetheretherketone) VP: Vespe (poyimide) SS: SUS (stainess stee) PPS: poyphenyene suphide Vespe and Tefon are registered trademarks of DuPont K.K. 1: NC (normay cosed) Push the button to pick up the wafer. : ba swive joint Y: fixed joint Z: coet chuck joint 2: NO (normay open) Push the button to reease the wafer. Size 248 mm 3: NO/S (normay open with on/off switch) Push the button to reease the wafer. The switch maintains the system vacuum when not in use. Windrush Technoogy Ltd. Te: Fax: Emai: enquiries@windrush.net 3
4 C series The conductive nyon covered body reduces eectrostatic effects towards a wafer. The wafer tip is made of conductive PEEK. The resistance of Ohms provides optimum static protection Tips C series bodies C CP C002-Y-92-CP C003-Y-92-CP 98 connection C series tips L1 W T Seection chart, avaiabe Mode Materia W afer Size (mm) 5 " 6 " 8 " 12" T W L1 Tip C001- C002- C003- Body C001-Y C002-Y C003-Y 90-CP CP 91-CP CP CP Conductive CP PEEK CP CP CP CP 92-CP 95-CP 96-CP 97-CP 98-CP 99-CP Windrush Technoogy Ltd. Te: Fax: Emai: enquiries@windrush.net 4
5 Stands Stands for C series wands are mouded in acryic resin. Avaiabe in vertica position (wa mounting) and horizonta position (tabe-top). The 658 and 659 types are designed for NO, normay open wands, and incoporate am auto-off feature which maintains system vacuum when the wand is not in use. 658, To be mounted on the wa with adhesive tape/screws. For use in horizonta position Mode Materia Body C001 C Conductive nyon + 658* acryic resin 659* Tubing, avaiabe *Vacuum turns on when removed from the stand and shuts off when returned. L1 L3 D1 D2 Mode Materia Size (mm) D1 D2 L1 L3 Weight (g) 851-L Conductive poyurethane estmer M Windrush Technoogy Ltd. Te: Fax: Emai: enquiries@windrush.net 5
6 F series The body is made of PTFE for chemica resistance. A arge seection of wafer tips is avaiabe in PCTFE, PEEK or Vespe (for high temp.). F series bodies Tips F F 09 F003-Z-05-3F F002-Y-14-3F F series tips F connection 15-PK PCTFE PEEK Vespe 3F PK VP 15-VP Windrush Technoogy Ltd. Te: Fax: Emai: enquiries@windrush.net 6
7 F series tips L1 Mode W afer Size (mm) M ateria 4 " 5 " 6 " 8 " 12" T W L1 W SS F PK VP T, avaiabe Seection chart Tip Body Materia F001- F002- F003- F001-Y F002-Y F003-Y F001-Z F002-Z F003-Z SS Windrush Technoogy Ltd. Te: Fax: Emai: enquiries@windrush.net 7
8 Stands Stands are designed to hod the wand in a safe, readyto-use position. Mouded in acryic resin, they are avaiabe for wa (vertica position: 651, 658) or tabetop (horizonta position: 652, 659) use. See iustrations on page 5. Mode 651 Materia Body F001 F Conductive nyon + 658* acryic resin 659* Accessories (For stands and tubing see page 5 and above), avaiabe *Vacuum turns on when removed from the stand and shuts off when returned. Condition tester Leaks (indicating the wand tip requires repacing) are detected by measuring the vacuum eve. The testing surface is made of PPS. Dimensions (mm): D, 120; W, 60; H, 45. Weight: 350 g. Vacuum pumps Oi-free for cean-room use. Long-term high reiabiity. Designed to minimise noise generation. Specifications Mode FV-30 FV-60 FV-30 Pumping power (/min) Utimate pressure (mm Hg) Power consumption (W) 5 10 Dimensions (mm) (D x W x H) 132 x 76 x x 80 x 140 Weight (g) FV-60 Static-dissipative grounding kit 858 Windrush Technoogy Ltd. Te: Fax: Emai: enquiries@windrush.net 8
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