High Purity Chemical Valve

Transcription

1 T.S70- -U High urity hemical Valve Integral Fittings Series LV /.O. with same configuration/double ompatible with 00 fluid temperature ew ody material: ew F Series LV port added Threaded orts Series LV Diaphragm material TF, R, R are selectable ew Series LV ody material: ew F / Stainless steel / port added Manual Operation Series LVH Locking and non-locking types available Integral fitting type/threaded type Series LVH ody material: ew F / Stainless steel /

2 revents Micro-ubbles Diaphragm (TF) Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. Minimal dead space In addition to a body designed for smooth flow with minimal internal dead space, integral fittings eliminate the possibility of residual liquid in pipe threads. Outstanding corrosion resistance ody (ew F) ompatible with chemicals such as acids, bases and ultra DI water. T. Stable Sealing Surface Guide ring unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation with a stable work surface. Low particle generation iston bumper bumper absorbs piston momentum to minimize impact-induced particles. ack-pressure resistance and long life uffer The diaphragm is supported by a buffer that minimizes deformation, which gives it long life and resistance to backpressure. Different tubing sizes can be selected Hyper fitting o leak design (quadruple seal) ut lock mechanism (sealing) High flexural strength (tubing supports) Main applications and fields LV I manufacturing lines nalytical Instruments I manufacturing nalytical Instruments harmaceutical manufacturing hemicals leaning equipment Medical equipment LV Medical hemicals leaning equipment Food processing LVH For shut off For air bleeding Features

3 High urity hemical Valve Series LV ir Operated Integral Fitting Type Series LV Type asic type With flow rate adjustment With bypass With flow rate adjustment & by-pass With indicator Double Double Double Orifice diameter Tubing O.D. Metric Inch.O..O. Double Double Double Double Double LV ø, /8, /, / LV, 8, 0 /, /8 LV ø0 0, /8, / LV ø, 9 /, /. LV ø 9, /, Suck back Manifold ( stations max.) Single type Unit Single type Unit port R ir Operated Threaded Type Series LV. ody material ote ) Orifice diameter ort size Stainless steel (SUS) LV LV LV LV LV LV ø ø ø ø0 ø /8 / /8 / / /8 /8 / / / ote) Refer to the page for the applicable optional body materials. Type asic type With flow rate adjustment With bypass With flow rate adjustment & by-pass With indicator Manifold ( stations max.) Double Double Double Double F.O. Double.O. Double Double Double port R ote ) ote) Only F is applicable as a body material. Features

4 Series LV Manually Operated Series LVH. Integral Fitting Type Type asic type Orifice diameter Tubing O.D. Metric Inch on-locking Locking LVH0 ø, /8, /, / LVH0, 8, 0 /, /8 LVH0 ø0 0, /8, / Manifold ( stations max.) Threaded Type Type asic type on-locking Locking Orifice diameter Material ort size LVH0 ø SUS F /8 / / / LVH0 LVH0 ø SUS F SUS F / /8 /8 /8 /8 / / / Manifold ( stations max.) Special Tools. 9 Features

5 Integral Fitting Type (Hyper Fittings) Series LV ody class pplicable tubing size onnecting tubing O.D. Metric sizes Inch sizes ody class ø ø ø0 ø ø9 ø /8 / / /8 / / asic size Orifice dia. ø ø0 ø ø ody class With reducer How to Order Valves (Single Type) LV 0 S 0 0.O. Double ote) Refer to variations in the table below for valve type combinations. ort (OUT) different dia. size il Refer to the applicable tubing table to the left. pplication orts & same size Different diameter tubings can be selected within the same body class. Variations Type asic type Material ody il F F F F ody class,,,,,, Option il ilot port thread type.o. Double il Orifice diameter Tubing O.D. Metric Inch.O. Double ctuator section nd plate VDF LV0 ø, /8, /, / one With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator ote) Refer to Variations in the table below for option combinations. Options can not be combined each other. Diaphragm TF TF TF Thread type M Rc /8 T /8 LV0, 8, 0 /, /8 pplicable option LV0 ø0 0, /8, / ote Hydrofluoric acid compatible (Only LV0, 0 type) mmonium hydroxide compatible LV0 ø, 9 /, / LV0 ø 9, /, With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator Double Double Double Double Double Double

6 Series LV Standard Specifications Tubing O.D. Orifice diameter Flow v x 0 - m characteristics v Withstand pressure (Ma) Operating pressure (Ma) ack pressure (Ma) Metric size Inch size /.O. Double Valve leakage (cm /min) ilot air pressure (Ma) ilot port size Fluid temperature ( ) mbient temperature ( ) LV0 / ø LV0 0 / to or less 0. or less LV0 / ø0 0. M Rc /8, T /8 0 (with water pressure) 0. to 0. 0 to 00 0 to 0 LV0 9 / ø 0 to or less 0. or less LV0 ø 9 8 Weight (kg) ote ) ontact SM if the valve is to be used with vacuum and flow. Different Diameter Tubing pplicable with Reducer Different diameter tubing can be selected (within a body class) by using a nut and insert bushing (reducer). With reducer Tubing O.D. ody Metric sizes Inch sizes class /8 / / /8 / / ote) Refer to page 9 for information on changing tubing sizes. Specific roduct recautions e sure to read before handling. Refer to pages through 7 for safety instructions and high purity chemical valve precautions. aution iping. onnect tubing with special tools. Refer to pages 9 through regarding tubing connection and special tools.. Tighten the nut to the end surface of the body. s a guide, refer to the proper tightening torques shown below. Tightening torque for piping ody class Torque (m) 0. to to.0.0 to.. to.0. to.0

7 Integral Fitting Type Series LV Suck ack change of volume inside the suck back valve pulls in liquid at the end of the nozzle to prevent dripping. Single type Unit type djustment knob djusts the amount of suck back. Lock nut Locks the adjustment knob position. djustment knob djusts the amount of suck back. Lock nut Locks the adjustment knob position. djustment knob djusts the flow rate. Lock nut Locks the adjustment knob position. Standard Specifications ote ) Tubing O.D. Orifice diameter Flow characteristics How to Order Metric sizes Inch sizes v x 0 - m v Withstand pressure (Ma) Operating pressure (Ma) Maximum suck back volume (cm ) ilot air pressure (Ma) ilot port size Fluid temperature ( ) mbient temperature ( ) Weight (kg) LV LVU (), (/8), (/), / to to 0. M 0 to 00 0 to 0 ø ote ) Different diameter tubing shown in ( ) can be selected when used with a reducer. Refer to page 9 for details. Suck back body LV S 0 ody class ody class Suck back valve ort (OUT) different dia. size il Refer to the applicable tubing in the table below. pplication orts & same size Different diameter tubing can be selected within the same body class. Options With flow rate adjustment The flow rate is adjusted by controlling the diaphragm stroke. djustment knob djusts the flow rate. Lock nut Locks the adjustment knob position. il U ody type Single type Unit type with way valve pplicable tubing size onnecting tubing O.D. Metric sizes 0 0 Inch sizes With by-pass small amount of fluid from the inlet side is allowed to flow continuously to the outlet side by providing a by-pass inside the body ø ø /8 / / asic size ody class With reducer djustment handle djusts the flow rate. Lock nut Locks the adjustment knob position.

8 Series LV onstruction Standard type type.o. type Double type With reducer With flow rate adjustment With by-pass Suck back (single type) Suck back (unit type) With indicator arts list o. Description Material Option ctuator section VDF ody F Diaphragm TF nd plate VDF Insert bushing F 7 ut ollar F F 8 9 Flow rate adjuster section Indicator

9 Integral Fitting Type Series LV asic type -Q Sensor (reathing port) R SM G H L D J (F) -øm (mm) D F G H J L M Q R LV M M LV LV LV Rc /8 T /8 Rc /8 T /8 LV

10 Series LV With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator W (Max. S) (Max. S) SM SM (Max. T) SM (mm) S LV. LV LV 9 LV. LV (mm) T LV 9. LV. LV 0. SM (Max. T) (mm) S LV LV 9 LV. (mm) T LV0 LV0 LV0 LV0 LV0 W Suck back (Single type) SM M (Max..) Suck back (Unit type) SM M (Max..) 0 M SM. 0 (78). (0) ø

11 Series LV Manifolds Manifold Specifications LL LL LL Manifold type (I), (OUT) type Valve stations Stacking type ommon I/Individual OUT to stations Tubing size (port ) Tubing size (port ) /8 / / /8 / / ote ) ontact SM if the manifold will be used with vacuum and flow. LL / / How to Order Manifold ase LL 0 S ody class ody class ase type Stacking type Manifold stations 0 stations 0 stations Tubing size for port and L side connection Tubing size lug Ø /" Ø8 Ø0 /8" Ø0 /8" Ø /" Ø /" Ø9, /" Ø /" Ø9, /" How to Order Valve ody class to Tubing size for port and R side connection Tubing size lug Ø /" Ø8 Ø0 /8" Ø0 /8" Ø /" Ø /" Ø9, /" Ø /" Ø9, /" ody class to ody class ody class Orifice dia. ø ø ø0 LV 0 0.O. Double ody type Stacking type for manifold Tubing size S0 S0 S0 S0 S07 S0 S07 S08 S0 S S0 S S S S S S9 S07 Tubing size /8" Ø /" Ø /" Ø /" Ø8 Ø0 /8" Ø0 /8" Ø /" Ø /" Ø9, /" ody class Option il Material ody il F F one With flow rate adjustment With indicator ote) Options can not be combined each other. ilot port thread type il F F ctuator section nd plate VDF ody class // // Diaphragm TF TF TF Thread type M Rc /8 T/8 pplicable option ote Hydrofluoric acid compatible (Only LV0, 0 type) mmonium hydroxide compatible 7

12 Series LV How to Order Manifold ssembly (xample) nter the part number of the valves to be mounted together with the manifold base part number.... Stations Manifold variations Type Orifice diameter Manifold material Tubing size LV0 / Ø LV0 LV0 F /8 / Ø8 Ø0 LV0 / Ø asic type Stations are counted from station on the left side, with the (OUT) ports in front. (OUT) port <xample> LL-0-S set set Manifold base part no. LV0-S07- sets sets Valve part no. (stations & ) LV0-S07 set set Valve part no. (station ) With flow rate adjustment.o. Double.O. Double dd the symbol at the beginning of part numbers for valves, etc. to be mounted. nter together in order counting from station on the left side, with the (OUT) ports in front. Double Double LL- Stations -- (Max. S) -Q reathing port: R D U H SM SM SM SM V G / / / /8 itch = n- port Y -Mounting hole for W LL. LL 7 LL 0 LL D G H Q M Rc /8 T /8 L L L R M Rc /8 T /8 S. 9. U V 7. (mm) W Y M. M. M 7. M 7. LL LL LL LL Station L L L L L L L L L L L L (mm)

13 Series LV ort Standard Specifications Orifice diameter Flow characteristics v x 0 - m v Withstand pressure (Ma) Operating pressure (Ma) Valve leakage (cm /min) ilot air pressure (Ma) ilot port size Fluid temperature ( ) mbient temperature ( ) Weight (kg) LV00 ø to 0. 0 (with water pressure) 0. to 0. M 0 to 00 0 to How to Order Valve LV 0 0 S 07 R ody class ody class Orifice dia. Ø 0. pplicable tubing size onnecting tubing O.D. Metric sizes 0 0 Inch sizes ø ø /8 / / asic size ody class With reducer onstruction arts list o. Description ctuator section ody Diaphragm nd plate ut Insert bushing Material F TF F F 9

14 Series LV -ø. M ilot port SM M reathing port. SM. 0.. SM R

15 Threaded Type Series LV 0 Variations ody class.o. Double ote) Refer to Variations in the table below for valve type combinations. ody material How to Order Valves (Single Type) LV 0 0 ody class ote ) Orifice dia ø ø ø ø0 ø ort size /8 / /8 / / /8 /8 / / / il ort size ody class Thread type Orifice diameter ort size Stainless steel (SUS) Thread type Rc T Option LV0 LV0 LV0 LV0 LV0 LV0 ø ø ø ø0 ø /8 / /8 / / /8 /8 / / / il Material D F G H ody Stainless steel F Stainless steel Stainless steel F F one With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator ote) Refer to Variations in the table below for option combinations. Options can not be combined each other. ctuator section nd plate VDF Diaphragm TF TF TF R R TF R R TF pplicable option ote xcept LV0 xcept LV0 xcept LV0 xcept LV0 Hydrofluoric acid compatible (Only LV0, 0 type) xcept LV0 xcept LV0 mmonium hydroxide compatible xcept LV0 ote) Refer to the Material table for the applicable optional body materials. Type asic type With flow rate adjustment With by-pass With flow rate adjustment & by-pass With indicator.o. Double Double Double Double.O. Double Double Double Double F

16 Series LV Standard Specifications asic type With flow rate adjustment LV0 LV0 LV0 LV0 LV0 LV0 Orifice diameter ort size ø /8, / ø /8, / /, /8 ø /8, / ø0 /, / ø Flow characteristics v x 0 - m v Withstand pressure (Ma) Operating pressure (Ma) 0 to 0. 0 to 0. ack pressure ote ) /.O. 0. or less 0. or less 0. or less (Ma) Double 0. or less 0. or less 0. or less Valve leakage (cm /min) ilot air pressure (Ma) ilot port size Fluid temperature ( ) mbient temperature ( ) M 0 (with water pressure) 0. to 0. Rc /8, T /8 ote ) 0 to 00 0 to 0 Weight (kg) Stainless steel (SUS) F ote ) 0 to 0 when the diaphragm is R or R. ote ) The.O. type is not available for LV0. ote ) ontact SM if the valve will be used with vacuum and flow. Specific roduct recautions e sure to read before handling. Refer to pages through 7 for safety instructions and high purity chemical valve precautions. aution iping. void using metal fittings with a resin body (taper threads). This can cause damage to the valve body. Options With flow rate adjustment djusts the flow rate by controlling the diaphragm stroke. djustment knob djusts the flow rate. Lock nut Locks the adjustment knob position.

17 Threaded Type Series LV onstruction Standard type type.o. type Double type Y packing Y packing With flow rate adjustment With indicator arts list o. Description ctuator section ody Diaphragm nd plate (F body only) Flow rate adjuster section Indicator Material Stainless steel F TF R R Option VDF VDF

18 Series LV ody material: Stainless steel asic type LV0 -F Sensor (reathing port) R L -Q L G H - LV0 LV0 With flow rate adjustment (Max. S) With indicator (mm) S LV. LV LV 9 LV. LV W LV0 LV0 LV0 LV0 LV0 (mm) W (mm) F G H L Q R LV LV M M Rc /8, / T /8, / M. M LV M Rc /, /8 T /, /8 LV LV M8 M Rc /8, / T /8, / Rc /, / T /, / Rc /8 T /8 Rc /8 T /8 LV M Rc T

19 Threaded Type Series LV ody material: asic type -Q Sensor (reathing port) R G H SM J - L D -øm LV0 With flow rate adjustment With indicator (Max. S) -Ø Depth L 9. SM (mm) S LV. LV LV 9 LV. SM W LV0 LV0 LV0 LV0 LV0 (mm) W (mm) D G H J L M Q R LV LV Rc /8, / T /8, / Rc / T / M. M LV Rc /8 T /8 LV Rc / T / Rc /8 T /8 Rc /8 T /8 LV Rc / T /

20 Series LV ody material: F asic type -R Sensor (reathing port) U G H SM J Q (LV) - L D -øm With flow rate adjustment (Max. S) With indicator (mm) W (mm) SM LV LV LV LV LV S. 9. SM LV0 LV0 LV0 LV0 LV0 W (mm) D G H J L M Q R U LV Rc / T / M M LV Rc /8 T /8 LV LV Rc / T / Rc / T / Rc /8 T /8 Rc /8 T /8 LV Rc T 7

21 Series LV Manifolds Manifold Specifications LL LL LL LL Manifold type Stacking type (I), (OUT) type ommon I/Individual OUT Valve stations to stations ort size (port ) / /8 / / ort size (port ) / /8 / / ote ) ontact SM if the manifold will be used with vacuum and flow. How to Order Manifold ase LL 0 0 ody class ody class ase type Stacking type Manifold stations 0 stations 0 stations Thread type il ort size / /8 / / Thread type Rc T ort size (port ) ody class Material Manifold F How to Order Valve LV 0 0 ody class ody class Orifice dia. ø ø ø0 0.O. Double Option il one With flow rate adjustment With indicator ote) Options can not be combined each other ody type Stacking type for manifold ort size (port ) ort size / /8 / / ody class Material ody F F Thread type il F F Thread type Rc T ctuator section nd plate VDF Diaphragm TF TF TF pplicable option ote Hydrofluoric acid compatible (Only LV0, 0 type) mmonium hydroxide compatible 7

22 Series LV How to Order Manifold ssembly (xample) nter the part number of the valves to be mounted together with the manifold base part number.... Stations Manifold variations Type Orifice diameter Manifold material ort size LV0 / ø LV0 LV0 F /8 / ø LV0 / ø0 (OUT) port Stations are counted from station on the left side, with the (OUT) ports in front. <xample> LL-0-0- set set Manifold base part no. LV0-0- sets sets Valve part no. (stations & ) LV0-0- set set Valve part no. (station ) asic type With flow rate adjustment.o. Double.O. Double dd the symbol at the beginning of part numbers for valves, etc. to be mounted. nter together in order counting from station on the left side, with the (OUT) ports in front. Double Double LL- Stations -- (Max. S) LL LL LL LL (mm) S. 9. (OUT) port n-q itch = L L L Y -R G H V (I) port -Q -Mounting hole for W Sensor (reathing port) U LL LL LL LL Station L L L L L L L L L L L L (mm) LL LL LL LL G H M Q Rc /, T / Rc /8, T /8 Rc /, T / Rc /, T / R M Rc /8 T /8 U M Rc /8 T /8 V 9. 9 W M M M M (mm) Y

23 Series LV ort Standard Specifications Orifice diameter ort size Flow characteristics v x 0 - m v Withstand pressure (Ma) Operating pressure (Ma) Valve leakage (cm /min) ilot air pressure (Ma) ilot port size Fluid temperature ( ) mbient temperature ( ) Weight (kg) LV00 ø / to 0. 0 (with water pressure) 0. to 0. M 0 to 00 0 to 0 0. How to Order Valve LV R ody class ody class Orifice dia. Ø Thread type il Thread type Rc T Material ody ctuator section Diaphragm F TF 0. ort size 0 ort size / onstruction R arts list o. Description Material ctuator section ody Diaphragm F TF nd plate Stainless steel 9

24 Series LV x M Depth Rc/ (-T/) M ilot port M reathing port 0. R 0

25 Manually Operated Series LVH Integral fitting type Threaded type ody class ody class il L ody class ody class ort size Orifice dia. ø ø0 ort size /8 / / /8 /8 / How to Order Valve (Single Type) LVH 0 S 0 LVH 0 0 Orifice dia. ø ø 0 Lever operation Lever operation on-locking type (self-reset type) Locking type ody class ilot port thread type il ort (OUT) different dia. size il Refer to the applicable tubing table to the right Material Thread type Rc T pplication orts & same size Different diameter tubings can be selected within the same body class. ody Stainless steel (SUS) F Integral fitting type/variations Type asic type Orifice diameter Tubing O.D. Metric Inch ctuator section nd plate LVH0 ø, /8, /, / pplicable tubing size onnecting tubing O.D. Metric sizes ø ø ø0 ø Inch sizes 0 /8 0 / 07 / /8 / asic size LVH0, 8, 0 /, /8 Diaphragm TF TF TF LVH0 ø0 0, /8, / ody class With reducer on-locking Locking Threaded type/series variation Type asic type Orifice diameter ort size Material LVH0 ø LVH0 LVH0 ø /8 / / / / /8 /8 /8 /8 / / / Stainless Stainless Stainless steel F steel F steel F (SUS) (SUS) (SUS) on-locking Locking

26 Series LVH Standard Specifications/Integral Fitting Type Metric size Tubing O.D. Inch size Orifice diameter Flow v x 0 - m characteristics v Withstand pressure (Ma) Operating pressure (Ma) ack pressure (Ma) Valve leakage (cm /min) ction Fluid temperature ( ) mbient temperature ( ) Weight (kg) LVH0 / ø LVH0 LVH0 0 /8 / ø to or less 0 (with water pressure) Toggle type (non-locking/locking) 0 to 0 0 to ote) ontact SM if the valve is to be used with flow. Specific roduct recautions e sure to read before handling. Refer to pages through 7 for safety instructions and high purity chemical valve precautions. iping aution Integral fitting type. onnect tubing with special tools. Refer to pages 9 through regarding tubing connection and special tools.. Tighten the nut to the end surface of the body. s a guide, refer to the proper tightening torques shown below. Tightening torque for piping ody class Torque (m) 0. to to.0.0 to. Threaded type. void using metal fittings with a resin body (taper threads). This can cause damage to the valve body. Different Diameter Tubing pplicable with Reducer Different diameter tubing can be selected (within a body class) by using a nut and insert bushing (reducer). With reducer Tubing O.D. ody Metric sizes Inch sizes class 8 0 /8 / / /8 / Standard Specifications/Threaded Type ort size ote) Refer to page 9 for information on changing tubing sizes. Orifice diameter Flow characteristics Withstand pressure (Ma) Operating pressure (Ma) ack pressure (Ma) Valve leakage (cm /min) ction Fluid temperature ( ) mbient temperature ( ) Weight (kg) v x 0 - m v Stainless steel (SUS) F LVH0 /8, / ø LVH0 LVH0 /, /8 /8, / ø to or less 0 (with water pressure) Toggle type (non-locking/locking) 0 to 0 0 to

27 Manually Operated Integral Fitting Type/Threaded Type Series LVH onstruction Integral fitting type Threaded type With reducer arts list o. Description ctuator section ody Diaphragm nd plate Insert bushing ut 7 Lever 8 ollar Material F Stainless steel F TF F F F ote Integral fitting type Threaded type F body only /Integral Fitting Type on-locking type Locking type 0 (H) (H) (F) J L G D -øm LVH0 0 LVH0 LVH D 8.. F 79 0 G H 7. 9 H 7 J L 7 7 M... (mm)

28 Series LVH /Threaded Type ody material: Stainless steel L ody material: Locking type on-locking type Locking type on-locking type 0 ody material: F Locking type on-locking type 0 J L G D (H) (H) -F 0 (H) (H) SM (H) (H) - J - L G D G -øm SM - -øm ody material LVH0 Stainless steel (SUS) LVH0 LVH0 LVH0 LVH0 LVH0 LVH0 F LVH0 LVH D F M M M8 G H H J L M (mm) Rc /8, /, T /8, / Rc /, /8, T /, /8 Rc /8, /, T /8, / Rc /, T / Rc /8, T /8 Rc /, T / Rc /, T / Rc /8, T /8 Rc /, T /

29 Series LVH /Integral Fitting Type Manifolds Manifold Specifications LLH LLH LLH Manifold type Stacking type (I), (OUT) type ommon I/Individual OUT Valve stations to stations Tubing size (port ) /8 / / Tubing size (port ) / /8 / ote ) ontact SM if the manifold will be used with vacuum and flow. How to Order Manifold ase LLH 0 S ody class ody class ase type Stacking type Manifold stations 0 stations 0 stations Tubing size for port and L side connection Tubing size lug Ø /" Ø8 Ø0 /8" Ø0 /8" Ø /" Ø /" Ø9, /" ody class Tubing size for port and R side connection Tubing size lug Ø /" Ø8 Ø0 /8" Ø0 /8" Ø /" Ø /" Ø9, /" ody class How to Order Valve LVH 0 S07 ody class ody class Orifice dia. Ø Ø8 Ø il L 0 ody type Stacking type for manifold Lever operation Lever operation on-locking type (self-reset type) Locking type Tubing size S0 S0 S0 S0 S07 S0 S07 S08 S0 S S0 S S S Tubing size /8" Ø /" Ø /" Ø /" Ø8 Ø0 /8" Ø0 /8" Ø /" ody class

30 Series LVH How to Order Manifold ssembly (xample) nter the part number of the valves to be mounted together with the manifold base part number.... Stations Threaded type manifold/variations Type Manifold Orifice diameter Manifold material Tubing size LVH0 / Ø LVH0 F /8 Ø8 LVH0 / Ø0 Stations are counted from station on the left side, with the (OUT) (OUT) port ports in front. <xample> LLH-0-SH set set Manifold base part no. LVH0-S07 sets sets Valve part no. (stations & ) LVH0L-S07 set set Valve part no. (station ) on-locking Locking dd the symbol at the beginning of part numbers for valves, etc. to be mounted. nter together in order counting from station on the left side, with the (OUT) ports in front. LLH- Stations - on-locking type Locking type G 0 D V (H) (H) SM SM SM SM /8 U / / / - port n- port itch = Y -Mounting hole for W LLH LLH LLH D G H 8.. H U V 7 W M M M (mm) Y.. 7. L L L LLH LLH LLH Station L L L L L L L L L (mm)

31 Series LVH /Threaded Type Manifolds Manifold Specifications LLH LLH LLH Manifold type Stacking type (I), (OUT) type ommon I/Individual OUT Valve stations to stations ort size (port ) ort size (port ) / / /8 /8 ote ) ontact SM if the manifold will be used with vacuum and flow. / / How to Order Manifold ase LLH 0 0 ody class ody class ase type Stacking type Manifold stations 0 stations 0 stations ort size (port ) Thread type il ort size / /8 / Thread type Rc T ody class Material Manifold F How to Order Valve Threaded type LVH 0 0 ody class ody class Orifice dia. ø ø 0 Material ody F ctuator section nd plate Diaphragm TF Thread type ody type Stacking type for manifold il Thread type Rc T il L Lever operation Lever operation on-locking type (self-reset type) Locking type ort size (port ) ort size / /8 / ody class 7

32 Series LVH How to Order Manifold ssembly (xample) nter the part number of the valves to be mounted together with the manifold base part number.... Stations Threaded type manifold/variations Type Orifice diameter Manifold material ort size LVH0 / ø LVH0 F /8 LVH0 / ø Manifold Stations are counted from station on the left side, with the (OUT) (OUT) port ports in front. <xample> LLH-0-0- set set Manifold base part no. LVH0-0- sets sets Valve part no. (stations & ) LVH0L-0- set set Valve part no. (station ) on-locking Locking dd the symbol at the beginning of part numbers for valves, etc. to be mounted. nter together in order counting from station on the left side, with the (OUT) ports in front. LLH- Stations -- Locking type on-locking type 0 U itch = Y R (H) (H) (OUT) port n- -Mounting hole for W (I) port - G L L L LLH LLH LLH G H 8.. H Rc/, T/ Rc/8, T/8 Rc/, T/ R 9. U. 8 W M M M (mm) Y.. 7. LLH LLH LLH Station L L L L L L L L L (mm)

33 Series LV Fittings and Special Tools Fittings hanging tubing sizes The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing. ody class art composition Tubing O.D. Metric sizes Inch sizes ut /8 / / /8 / / asic size Reducer type Yes Yes omponent parts Insert ollar (insert assembly) Yes o Yes Yes hanging the tubing size xample) hanging the tubing from an O.D. /" to O.D. /8" in body class. repare an insert bushing and nut for /8" O.D. tubing (LQ-U0) and change the tubing size. (Refer to the section on how to order fitting parts.) ote) Tubing is sold separately. Insert bushing LQ-07 ut LQ-07 Insert bushing LQ-0 ut LQ-0 How to order fitting parts Tubing O.D. /" LQ-U07 (asic size) Tubing ollar Tubing O.D. /8" LQ-U0 (Reducer type) Tubing LQ U 0 Type U is recommended when changing tubing sizes. Tubing size ody class il Type of fitting pplicable fitting LQ LQ ody class pplicable fitting LQ LQ U Type of part Type of part Insert bushing & nut Insert bushing ut Tubing O.D. /8" ø /" ø /" ø ø0 /" /8" ø0 ø /8" /" ø /" /", ø9 /", ø9 ", ø ody class pplicable fitting LQ LQ 9

34 Series LV Special Tools How to order fitting jigs LQ G J il S Insert pin material Resin Stainless steel (J/ type ony) Option (L/M type only) il Option one il Insert pin/holder type Metric size Inch size With bracket Type ody class ote ) ompatible pins and holders are included with all sizes. (with the parts case) Option Description art o. J /, racket assembly LQ-GL J type type L / M,,,,, L type M type (for short piping) Table Tubing size symbols Type ody lass J L ø 0 0 ø ø Metric sizes 08 ø0 0 0 ø Tubing O.D. ø9 9 9 ø /8" /" 0 0 Inch sizes /" /8" /" /" 9 9 " Replacement parts Insert pin holder assembly (with the parts case) Insert pin (single) Holder (single) Description art o. LQ-G J - Type Insert pin/ Holder type Insert pin material il Metric sizes (J/ type only) Inch sizes il Resin S Stainless steel LQ-G J - ody class (Refer to Table ) Type LQ-GH J - 07 Type 07 Tubing size symbol (Refer to Table ) Insert pin material (J/ type only) il S Resin Stainless steel Tubing size symbol (Refer to Table ) ote) Replacement part type J shows the parts for LQ-GJ and LQ-G. Replacement part type L shows the parts for LQ-GL and LQ-GM. 0

35 High urity hemical Valve Series LV Special Tools LQ-GJ LQ-G 7 7 (Max. 0) ø 7 0 LQ-GJ ø ST OS. LQ-G (adjustable) LQ-GM LQ-GL 9 (Max. 9) (Max. 9) ST OS. LQ-GM R -R 0 8 ST OS. LQ-GL -R -R

36 Series LV Fitting ssembly rocedure ssemble fittings following the procedure shown below. J type y Tubing o Hook u Fitting nut y Tubing t Insert bushing! Holder assembly replacement screw e ase i Holder assembly q Lever pin r Insert pin assembly t Insert bushing!0 Insert pin assembly replacement screw J type fitting assembly procedure ull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. lace the insert bushing t on the insert pin assembly r. ut the end of the tubing y at a right angle and pass it through the fitting nut u. fter placing the tubing y in the holder assembly i, push it onto the insert bushing t until it stops and clamp it with the hook o. aution When the tubing y is curved, straighten it out before using it. The tubing y may slip if there is oil or dust, etc., on the holder assembly i. Remove the contamination using alcohol or another suitable cleaner. ress the insert bushing t into the tubing y by turning the lever assembly w. acked state w Lever assembly To replace the insert pin assembly r and holder assembly i, use the insert pin assembly replacement screw!0 and the holder assembly replacement screws!, respectively. type Holder assembly replacement screw Insert pin assembly replacement screw type fitting assembly procedure For procedure to set and press fit the insert pin assembly, refer to L, M type fitting assembly procedures. For procedure to set the tubing, refer to J type procedure. Lever Refer to J type assembly procedure. Tubing Insert bushing Holding screw Tighten the fitting nut u until it reaches the prescribed position on the body (end face). s a guide, refer to the proper tightening torques shown below. ST OS. ut tightening torque for piping nd face ody class LQ 0. to 0. Torque (m) LQ. to.0 ote ) In case of body class, the nut should be tightened manually. ody Sectional view Standard size nd face Reducer type Optimum position Minimum position Tubing Seal Insert bushing recautions on installation e careful not to scratch or dent the seal of the insert bushing. (Refer to the illustration on the left.) When the insert bushing inserted, its tubing end should be closer to seal side than the minimum position. (Refer to the illustration on the left.)

37 High urity hemical Valve Series LV Fitting ssembly rocedure ssemble fittings following the procedure shown below. L type r Tubing t Fitting nut u nob w Insert pin assembly e Insert bushing L and M type fitting assembly procedure Turn the lever q and move to ST OS. lace the insert bushing e on the insert pin assembly w. Space y Holder assembly r Tubing e Insert bushing ST OS. q Lever ut the end of the tubing r at a right angle and pass it through the fitting nut t. fter placing the tubing r in the holder assembly y, push it onto the insert bushing e until it stops and clamp it with the knob u. When tightening the tubing r with the knob u, maintain a uniform gap on both sides of the holder. aution When the tubing r is curved, straighten it out before using it. The tubing r may slip if there is oil or dust, etc. on the holder assembly y. Remove the contamination using alcohol or another suitable cleaner. M type!0 Holder assembly replacement screw ( places) o Insert pin assembly replacement screw ress the insert bushing e into the tubing r by turning the lever q. (ressing in can be accomplished with or turns of the lever q.) To replace the insert pin assembly w and holder assembly y, use the insert pin assembly replacement screw o and the holder assembly replacement screws!0, respectively.! lamp assembly! Handle (M type only) q Lever 7 In case of M type for short piping, remove the handle!, slide the clamp assembly! to attain the specified length, then secure it again with the handle!. Tighten the fitting nut t to the prescribed position on the body (end face). s a guide, refer to the proper tightening torques shown below. ody Sectional view nd face Standard size nd face ut tightening torque for piping Torque (m) ody class LQ 0. to to.0.0 to.. to.0. to.0 LQ. to.0.0 to. 7. to 9 to ote ) In case of body class, the nut should be tightened manually. Reducer type Optimum position Minimum position Tubing Seal Insert bushing recautions on installation e careful not to scratch or dent the seal of the insert bushing. (Refer to the illustration on the left.) When the insert bushing inserted, its tubing end should be closer to seal side than the minimum position. (Refer to the illustration on the left.)

38 pplicable Fluids Material and fluid compatibility check list for air and manually operated high purity valves ody material Diaphragm material hemical Stainless steel SUS Fluoro resin F olyphenylene sulfide resin Fluoro resin TF itrile rubber R thylene propylene rubber R cetone mmonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone (dry) Hydrogen peroxide oncentration % or less, 0 or less thyl acetate utyl acetate itric acid (except fuming nitric acid) oncentration 0% or less DI water Sodium hydroxide oncentration 0% or less itrogen gas Super pure water Toluene Hydrofluoric acid Sulfuric acid (except fuming sulfuric acid) hosphoric acid oncentration 80% or less The material and fluid compatibility check list provides reference values as a guide only. ote ) Use a stainless steel body, as static electricity may be generated. ote ) Use caution as permeation may occur and any permeated fluid could effect other material parts. Table symbols : an be used : an be used in certain conditions : annot be used ompatibility is indicated for fluid temperatures of 00 or less. The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product. The data above is based on the information presented by the material manufacturers. SM is not responsible for its accuracy and any damage happened because of this data.

39 Series LV Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by labels of "aution", "Warning" or "Danger". To ensure safety, be sure to observe ISO ote ), JIS 870 ote ) and other safety practices. aution : Operator error could result in injury or equipment damage. Warning : Operator error could result in serious injury or loss of life. Danger : In extreme conditions, there is a possible result of serious injury or loss of life. ote ) ISO : neumatic fluid power --General rules relating to systems ote ) JIS 870 : neumatic system axiom. Warning. The compatibility of equipment is the responsibility of the person who designs the system or decides its specifications. Since the products specified here are used in various operating conditions, their compatibility for the specific system must be based on specifications or after analysis and/or tests to meet your specific requirements. The expected performance and safety assurance will be the responsibility of the person who has determined the compatibility of the system. This person should continuously review the suitability of all items specified. Referring to the latest catalogue information with a view to giving due consideration to any possibility of equipment failure when configuring a system.. Only trained personnel should operate machinery and equipment. ssembly, handling or repair of machinery and equipment should be performed by trained and experienced operators.. Do not service machinery/equipment or attempt to remove components until safety is confirmed.. To promote safe operation, be sure to observe company standards and legal regulations, etc. Refer to ISO, JIS 870 (pneumatic system axiom), labor health and safety laws and other safety regulations.

40 Series LV High urity hemical Valve recautions e sure to read before handling. Design & Selection Warning. onfirm the specifications. Give careful consideration to operating conditions such as the application, fluid and environment, and use within the operating ranges specified in this catalogue.. Fluids Operate after confirming the compatibility of the product's component materials with fluids, using the check list on features page. ontact SM regarding fluids other than those in the check list. Operate within the indicated fluid temperature range.. Maintenance space nsure the necessary space for maintenance and inspections.. Fluid pressure range eep the supplied fluid pressure within the operating pressure range shown in the catalogue.. mbient environment Operate within the ambient operating temperature range. fter confirming the compatibility of the product's component materials with the ambient environment, operate so that fluid does not adhere to the product's exterior surfaces.. Liquid seals When circulating fluid rovide a relief valve in the system so that fluid does not get into the liquid seal circuit. 7. ountermeasures for static electricity Since static electricity may be generated depending on the fluid being used, implement suitable countermeasures. Warning Mounting. If air leakage increases or equipment does not operate properly, stop operation. fter mounting, perform suitable function and leak tests to confirm that the mounting is correct.. Instruction manual Mount and operate the product after reading the manual carefully and understanding its contents. lso keep the manual where it can be referred to as necessary. aution iping. reparation before piping efore piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe. Install piping so that it does not apply pulling, pressing, bending or other forces on the valve body.. Use the tightening torques shown below when making connections to the pilot port. Operating port tightening torque Operating port M Rc, T /8 Torque (m) / turn with a tightening tool after first tightening by hand 0.8 to.0. Use of metal fittings Do not use metal fittings for piping on taper threads made of resin, as this may cause damage to the threads. LV body ported tightening torque for fittings. Size LV0 LV0 LV0 LV0 Guideline for tightening torque umber of turns when the fitting is screwed into the body with to windings of sealant tape applied to threaded portion of the piping. The value may differ for types other than sealant type.. Use pilot ports and sensor (breathing) ports as indicated below..o. Double reaking torque to to 8 to 8 to 0 ort ressure reathing ressure Tightening torque (m) ort reathing ressure ressure 0. to to to 7 8 to 0 Guideline for tightening torque (umber of turns) to turns to turns to turns to turns Sensor (breathing) port reathing reathing reathing In the case of and.o. types, the port which does not receive operating pressure is released to atmosphere. When intake and exhaust directly from the valve is not desired due to problems with the ambient environment or scattering of dust, etc., install piping and perform intake and exhaust at a location which does not present a problem.. See page regarding tubing connections. Warning Operating ir Supply. Use clean air. Do not use compressed air which includes chemicals, synthetic oils containing organic solvents, salt, or corrosive gases, etc., as this may cause damage or malfunction.

41 Series LV High urity hemical Valve recautions e sure to read before handling. Warning Warning Operating nvironment. Do not use in a location having an explosive atmosphere.. Do not operate in locations where vibration or impact occurs.. Do not use in locations where radiated heat will be received from nearby heat sources. Maintenance. Maintenance should be performed in accordance with the procedures in the instruction manual. Incorrect handling can cause damage or malfunction of machinery and equipment, etc.. efore removing equipment or compressed air supply/exhaust devices, shut off the air and power supplies, and exhaust compressed air from the system. Further, when restarting equipment after remounting or replacement, first confirm safety and then check the equipment for normal operation.. erform work after removing residual chemicals and carefully replacing them with DI water or air, etc.. Do not disassemble the product. roducts which have been disassembled cannot be guaranteed. If disassembly is necessary, contact SM.. In order to obtain optimum performance from valves, perform periodic inspections to confirm that there are no leaks from valves or fittings, etc. aution. Removal of drainage Flush drainage from filters regularly. Warning recautions on Usage. Operate within the ranges of the maximum operating pressure and back pressure. aution. When the diaphragm is made of TF lease note that when the product is shipped from the factory, gases such as and air may leak from the valve at a rate of cm /min (when pressurized).. When operated at a very low flow rate, the series LV with flow rate adjustment may vibrate, etc. depending on the operating conditions. Therefore, operate it after careful examination of the flow rate, pressure and piping conditions.. In the series LV, water hammering may occur depending on the fluid pressure conditions. In most cases, improvement is possible by adjusting the pilot pressure with a speed controller, etc., but the flow rate, pressure and piping conditions should be reviewed.. To adjust the flow rate for the series LV with flow rate adjustment, open gradually starting from the fully closed condition. Opening is accomplished by turning the adjustment knob counter clockwise. dditionally, do not apply any unreasonable force to the adjustment handle when nearing a fully opened or closed state. This may result in deformation of the orifice sheet surface or damage to the threaded part of the adjustment handle. It is in the fully closed condition when the product is shipped from the factory.. fter a long period of nonuse, perform a test run before beginning regular operation.. Since the LV is packaged in a clean room use sufficient care in handling when opened. 7. Take extra care when setting the operating direction and when handling the lever of series LVH. 7

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