High Purity Chemical Valve

Transcription

1 High urity hemical Valve Series LV/LV/ Integral Fittings/Threaded orts/manual Operation (Integral Fittings/Threaded orts) Series LV ir Operated Type Integral Fittings Series LV /.O. with same configuration/double ompatible with 0 fluid temperature ody material: F ew F ir Operated Type Threaded orts Series LV.6.7 Diaphragm material TF, R, R are selectable LV LV LVD LVQ LQ LV TL/TIL LQ Series LV ody material: F / ew F / ew F Stainless steel/ steel Manual Operation Series Integral fitting type/threaded type Locking and non-locking types available.8 Series ody material: F / ew F / ew F Stainless steel/ steel 7

2 revents Micro-ubbles Diaphragm (TF) Special diaphragm construction ensures gentle opening and closing that prevents the formation of micro-bubbles. Minimal dead space In addition to a body designed for smooth flow with minimal internal dead space, integral fittings eliminate the possibility of residual liquid in pipe threads. Outstanding corrosion resistance ody (ew F) ompatible with chemicals such as acids, bases and ultra DI water. T. Stable Sealing Surface Guide ring unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation with a stable work surface. Low particle generation iston bumper bumper absorbs piston momentum to minimize impact-induced particles. ack-pressure resistance and long life uffer The diaphragm is supported by a buffer that minimizes deformation, which gives it long life and resistance to backpressure. Different tubing sizes can be selected Hyper fitting o leak design (quadruple seal) ut lock mechanism (sealing) High flexural strength (tubing supports) Main applications and fields LV I manufacturing lines nalytical Instruments harmaceutical manufacturing hemicals leaning equipment Medical equipment LV Medical nalytical Instruments I manufacturing hemicals leaning equipment Food processing For shut off For air bleeding 8

3 High urity hemical Valve Series LV ir Operated Integral Fitting Type Series LV Type asic type With flow rate adjustment With bypass With flow rate adjustment & bypass With indicator Suck back Manifold ( stations max.).o. Double.O. Double Double Double Double Double Double Double Single type Unit Tubing O.D. Metric Inch Single type Unit LV ø,, 6 /8, /6, / LV 6, 8, /, /8 LV ø, /8, / LV ø6, /, /.6 LV6 ø, /, LV LV LVD LVQ LQ LV TL/TIL LQ port R ir Operated Threaded Type Series LV.7 ody material ote ) ort size Stainless steel (SUS6) LV LV LV LV LV LV6 ø ø ø ø0 ø /8 / /8 / / /8 /8 / / / ote ) Refer to the page 7 for the applicable optional body materials. Type asic type With flow rate adjustment With bypass With flow rate adjustment & bypass With indicator Manifold ( stations max.).o. Double.O. Double Double Double Double Double Double Double F port R ote ) ote ) Only F is applicable as a body material. 9

4 Series LV Manually Operated Series.8 Integral Fitting Type Type asic type on-locking Locking Tubing O.D. Metric Inch 0 ø,, 6 /8, /6, / 0 6, 8, /, /8 0 ø, /8, / Manifold ( stations max.) Threaded Type Type asic type 0 ø 0 0 ø Stainless steel (SUS6) F Stainless steel (SUS6) F Stainless steel (SUS6) F /8 / / / / /8 /8 /8 /8 / / / Material ort size on-locking Locking Manifold ( stations max.) 60

5 ir Operated Type Integral Fitting Type (Hyper Fittings) Series LV ody class 6 pplicable tubing size onnecting tubing O.D. Metric sizes ody class 6 ø ø ø6 ø ø ø ø Orifice dia. ø ø ø6 ø ody class 6 Inch sizes 0 /8 0 /6 07 / /8 / / asic size With reducer ote) pplicable fittings for body class 6 is LQ. How to Order Valves (Single Type) LV 0 S 06 0.O. Double ort (OUT) different dia. size il LQ integral fitting ote) Refer to variations in the table below for valve type combinations. pplication orts & same size Refer to the Different diameter tubings can be selected applicable tubing table within the same body to the left. class. Variations Type asic type Material ody il F ilot port thread type il Tubing O.D..O. Double Metric Inch.O. Double F F F ody class,,, 6,,, 6 Option il one With flow rate adjustment With bypass With flow rate adjustment & bypass With indicator ote) Refer to Variations in the table below for option combinations. Options can not be combined each other. ctuator section nd plate LV0 ø,, 6 VDF /8, /6, / Diaphragm TF TF TF Thread type M Rc /8 T /8 LV0 6, 8, /, /8 pplicable option LV0 ø, /8, / ote Hydrofluoric acid compatible (Only LV0, 0 type) mmonium hydroxide compatible LV0 ø6, /, / LV60 ø, /, LV LV LVD LVQ LQ LV TL/TIL LQ With flow rate adjustment With bypass With flow rate adjustment & bypass With indicator Double Double Double Double Double Double 6

6 Series LV Standard Specifications Metric size Tubing O.D. Inch size Flow v x -6 m characteristics v Withstand pressure (Ma) Operating pressure (Ma) LV0 6 / ø LV0 / to or less 0. or less LV0 / ø 60. LV0 / ø6 6 LV60 ø 8 0 to or less 0. or less ack pressure /.O. (Ma) Double Valve leakage (cm /min) 0 (with water pressure) ilot air pressure (Ma) 0. to 0. ilot port size M Rc /8, T /8 Fluid temperature ( ) 0 to 0 mbient temperature ( ) 0 to 60 Mass (kg) ote ) ontact SM if the valve is to be used with vacuum and flow. Different Diameter Tubing pplicable with Reducer Different diameter tubing can be selected (within a body class) by using a nut and insert bushing (reducer). With reducer Tubing O.D. ody Metric sizes Inch sizes class 6 8 /8 /6 / /8 / / 6 ote) Refer to page 89 for information on changing tubing sizes. Specific roduct recautions e sure to read before handling. Refer to front matters and for Safety Instructions, and pages 9 and 9 for High urity hemical Valve recautions. aution. onnect tubing with special tools. Refer to the pamphlet High-urity Fluoropolymer Fittings HYR FIT- TIG /Series LQ, Work rocedure Instructions (M-0-) for connecting tubing and special tools. (Downloadable from our web site.) iping aution. Tighten the nut to the end surface of the body. s a guide, refer to the proper tightening torques shown below. Tightening torque for piping ody class Torque ( m). to.0.0 to. 7. to to.0 6. to 6.0 6

7 ir Operated Type Integral Fitting Type (Hyper Fittings) Series LV Suck ack change of volume inside the suck back valve pulls in liquid at the end of the nozzle to prevent dripping. Single type Unit type djustment knob djusts the amount of suck back. Lock nut Locks the adjustment knob position. Options With flow rate adjustment djustment knob djusts the amount of suck back. Lock nut Locks the adjustment knob position. djustment knob djusts the flow rate. Lock nut Locks the adjustment knob position. Suck back body The flow rate is adjusted by controlling the diaphragm stroke. djustment knob djusts the flow rate. Lock nut Locks the adjustment knob position. Standard Specifications ote ) Tubing O.D. Flow characteristics ody class Withstand pressure (Ma) Operating pressure (Ma) Maximum suck back volume (cm ) ilot air pressure (Ma) ilot port size Fluid temperature ( ) mbient temperature ( ) Mass (kg) How to Order LV S 06 il U ody class Suck back valve ody type Single type Unit type with way valve LQ integral fitting With bypass Metric sizes Inch sizes v x -6 m v LV LVU (), (), 6 (/8), (/6), / ø to to 0. M 0 to 0 0 to ote ) Different diameter tubing shown in ( ) can be selected when used with a reducer. Refer to page 89 for details. pplicable tubing size onnecting tubing O.D. Metric sizes Inch sizes ort (OUT) different dia. size il asic size ø ø ø6 pplication orts & same size Refer to the Different diameter applicable tubing can be selected within the tubing in the table below. same body class. ody class /8 /6 / With reducer small amount of fluid from the inlet side is allowed to flow continuously to the outlet side by providing a bypass inside the body. LV LV LVD LVQ LQ LV TL/TIL LQ djustment knob djusts the flow rate. Lock nut Locks the adjustment knob position. 6

8 Series LV onstruction Standard type type.o. type Double type q q q e w e w e w r t y With reducer With flow rate adjustment With bypass u i t y i Suck back (single type) Suck back (unit type) i i i e y t e q y t e e w r w r With indicator arts list o. Description ctuator section ody Diaphragm nd plate Insert bushing 6 ut 7 ollar 8 Flow rate adjuster section 9 Indicator 6 Material F TF F F F Option VDF VDF o

9 ir Operated Type Integral Fitting Type (Hyper Fittings) Series LV asic type LV L D LV x øm LVD LVQ Sensor (reathing port) R x Q LQ LV TL/TIL SM G H LQ J (F) (mm) D F G H J L M Q R LV M x 0.8 M x 0. LV LV LV Rc /8 T /8 Rc /8 T /8 LV

10 Series LV With flow rate adjustment With bypass SM SM SM (mm) LV S. (mm) LV T LV 9 LV 9. LV. LV. LV6 6 LV W SM (Max. T) S LV LV 9 LV. (mm) T (mm) W LV0 6 LV0 90 LV0. LV0 7 LV (Max. S) (Max. T) With flow rate adjustment & bypass With indicator (Max. S) Suck back (Single type) Suck back (Unit type). x ø. 0 (Max..) M x 0.8 M x 0.8 (Max..) M x SM SM SM 0 (78).. 6 () 66

11 Series LV Manifolds Manifold Specifications ody class LL 0 S ody class ase type Stacking type Manifold stations 0 stations 0 LL LL LL Manifold type (I), (OUT) type Valve stations Stacking type ommon I/Individual OUT to stations Tubing size (port ) Tubing size (port ) /8 / / /8 / / ote ) ontact SM if the manifold will be used with vacuum and flow. How to Order Manifold ase stations LQ integral fitting How to Order Valve Tubing size for port and L side connection Tubing size lug Ø6 /" Ø8 Ø /8" Ø ody class to /8" Ø /" Ø /" Ø, /" Ø /" Ø, /" Tubing size for port and R side connection Tubing size ody class L side, R side same size lug to Ø6 /" Ø8 Ø /8" Ø /8" Ø /" Ø il /" Ø, /" Ø /" Ø, /" LL / / LV LV LVD LVQ LQ LV TL/TIL LQ LV 0 S 07 ody class ody class Orifice dia. ø ø ø0 0.O. Double ody type Stacking type for manifold LQ integral fitting Tubing size Tubing size Ø, /8" Ø /6" Ø6 /" Ø6 /" Ø8 Ø /8" Ø /8" Ø /" Ø /" Ø, /" ody class Material ody il F Option il one With flow rate adjustment With indicator ote) Options can not be combined each other. ilot port thread type il F F F ctuator section nd plate VDF ody class // // Dia- phragm TF TF TF Thread type M Rc /8 T /8 pplicable option ote Hydrofluoric acid compatible mmonium hydroxide compatible 67

12 Series LV How to Order Manifold ssembly (xample) nter the part number of the valves to be mounted together with the manifold base part number.... Stations <xample> LL-0-S set set Manifold base part no. LV0-S07- sets sets Valve part no. (stations & ) LV0-S07 set set Valve part no. (station ) dd the symbol at the beginning of part numbers for valves, etc. to be mounted. nter together in order counting from station on the left side, with the (OUT) ports in front. Stations are counted from station on the left side, with the (OUT) ports in front. (OUT) port Manifold variations Type asic type With flow rate adjustment Manifold material.o. Double Double LV0 LV0 LV0 Tubing size.o. Double Double / Ø /8 Ø8 F / Ø LV0 / Ø6 LL- Stations -- Y x Mounting hole for W U H V G D L L L x Q (Max. S) reathing port: R SM SM SM SM /8 / / / LL 6. LL 7 LL 60 LL D itch = n x port G H Q M x 0.8 Rc /8 T /8 R M x 0. Rc /8 T /8 S. 9. U V (mm) W Y M. M 6. M6 7. M6 7. LL LL LL LL Station L L L L L L L L L L L L (mm)

13 Series LV ort Standard Specifications Flow characteristics v x -6 m v Withstand pressure (Ma) Operating pressure (Ma) Valve leakage (cm /min) ilot air pressure (Ma) ilot port size Fluid temperature ( ) mbient temperature ( ) Mass (kg) How to Order Valve LV 0 0 S 07 LV00 ø to 0. 0 (with water pressure) 0. to 0. M x to 0 0 to LV LV LVD LVQ LQ LV TL/TIL LQ R ody class ody class Orifice dia. Ø 0 LQ integral fitting pplicable tubing size Metric sizes Inch sizes onnecting tubing O.D. asic size ø ø ø6 /8 /6 / ody class With reducer onstruction q e w arts list r y t o. 6 Description ctuator section ody Diaphragm nd plate ut Insert bushing Material F TF F F 69

14 Series LV 0 R M x 0.8 ilot port SM SM 66. SM M x 0. reathing port.. 79 x ø

15 ir Operated Type Threaded Type Series LV 0 6.O. Double ody class 6 ote) Refer to Variations in the table below for valve type combinations. Variations ody material ote) LV 0 0 ody class Orifice dia ø ø ø ø0 ø How to Order Valves (Single Type) ort size /8 / /8 / / /8 /8 / / / ort size Stainless steel (SUS6) ort size ody class 6 il Thread type Thread type Rc T Option LV LV0 LV0 LV0 LV0 LV60 ø ø ø ø0 ø /8 / /8 / / /8 /8 / il Material ody Stainless steel D F G H F Stainless steel Stainless steel F F one With flow rate adjustment With bypass With flow rate adjustment & bypass With indicator ote) Refer to Variations in the table below for option combinations.options can not be combined each other. ctuator section nd plate VDF / / Diaphragm TF TF TF R R TF R R TF pplicable option ote xcept LV60 xcept LV xcept LV60 xcept LV60 Hydrofluoric acid compatible (Only LV0, 0 type) xcept LV60 xcept LV60 mmonium hydroxide compatible xcept LV ote) Refer to the Material table for the applicable optional body materials. LV LV LVD LVQ LQ LV TL/TIL LQ Type asic type With flow rate adjustment With bypass With flow rate adjustment & bypass With indicator.o. Double Double Double Double.O. Double Double Double Double F 7

16 Series LV Standard Specifications asic type With flow rate adjustment LV LV0 LV0 LV0 LV0 LV60 ort size ø /8, / ø /8, / /, /8 ø /8, / ø0 /, / ø Flow characteristics v x -6 m v Withstand pressure (Ma) Operating pressure (Ma) ote ) ack pressure /.O. 0. or less 0 to or less 0 to or less (Ma) Double 0. or less 0. or less 0. or less Valve leakage (cm /min) ilot air pressure (Ma) 0 (with water pressure) 0. to 0. ilot port size Fluid temperature ( ) mbient temperature ( ) M Rc /8, T /8 ote ) 0 to 0 0 to 60 Mass (kg) Stainless steel (SUS) F ote ) 0 to 60 when the diaphragm is R or R. ote ) The.O. type is not available for LV. ote ) ontact SM if the valve will be used with vacuum and flow. Specific roduct recautions e sure to read before handling. Refer to front matters and for Safety Instructions, and pages 9 and 9 for High urity hemical Valve recautions. aution iping. void using metal fittings with a resin body (taper threads). This can cause damage to the valve body. Options With flow rate adjustment djusts the flow rate by controlling the diaphragm stroke. djustment knob djusts the flow rate. Lock nut Locks the adjustment knob position. 7

17 ir Operated Type Threaded Type Series LV onstruction Standard type type.o. type Double type Y packing q e w r Y packing q e w q e w LV LV LVD LVQ With flow rate adjustment t With indicator y LQ LV TL/TIL LQ arts list o. Description ctuator section ody Diaphragm nd plate (F body only) Flow rate adjuster section 6 Indicator Material Stainless steel F TF R R Option VDF VDF 7

18 Series LV ody material: Stainless steel asic type x Q Sensor (reathing port) R G H x L L LV x F LV0 LV60 With flow rate adjustment (Max. S) With indicator (mm) S LV. LV LV 9 LV. LV6 6 W (mm) W LV0 66. LV0 89. LV0 LV0. LV60 8 (mm) F G H L Q R LV LV M x 0.8 M x Rc /8, / T /8, / M x 0.8 ø. M x 0. LV M6 x Rc /, /8 T /, /8 LV LV M8 x. M8 x Rc /8, / T /8, / Rc /, / T /, / Rc /8 T /8 Rc /8 T /8 LV6 8 8 M8 x Rc T 7

19 J ir Operated Type Threaded Type Series LV ody material: asic type L D LV LV x øm LVD Sensor (reathing port) R x Q LVQ LQ LV SM G H TL/TIL LQ x LV With flow rate adjustment With indicator (Max. S) x Ø Depth L 9. SM LV LV LV LV (mm) S. 9. SM W (mm) W LV0 67 LV0 88. LV0. LV0 7 LV60 (mm) D G H J L M Q R LV LV Rc /8, / T /8, / Rc / T / M x 0.8 ø. M x 0. LV Rc /8 T /8 LV Rc / T / Rc /8 T /8 Rc /8 T /8 LV Rc / T / 7

20 Series LV ody material: F asic type J L D x øm x R Sensor (reathing port) U G H SM x Q (LV6) With flow rate adjustment (Max. S) With indicator (mm) W (mm) SM LV LV LV LV LV6 S SM LV0 LV0 LV0 LV0 LV60 W (mm) D G H J L M Q R U LV Rc / T / M x 0.8 M x 0. LV Rc /8 T /8 LV LV LV Rc / T / Rc / T / Rc T 7 Rc /8 T /8 Rc /8 T /8 76

21 Series LV Manifolds Manifold Specifications LL LL LL LL Manifold type Stacking type (I), (OUT) type Valve stations ort size (port ) / ommon I/Individual OUT to stations /8 / / LV LV ort size (port ) / /8 / ote ) ontact SM if the manifold will be used with vacuum and flow. How to Order Manifold ase LL 0 0 / LVD LVQ LQ LV ody class ody class ase type Stacking type Manifold stations 0 stations 0 stations ort size (port ) Thread type il ort size / /8 / / Thread type Rc T ody class Material Manifold F TL/TIL LQ How to Order Valve LV 0 0 ody class ody class Orifice dia. ø ø ø0 0.O. Double Option il one With flow rate adjustment With indicator ote) Options can not be combined each other. ody type Stacking type for manifold Material ody F ctuator section nd plate Diaphragm TF pplicable option ote ort size (port ) ort size / /8 / / ody class Thread type il F Thread type Rc T F F VDF TF TF Hydrofluoric acid compatible (Only LV0, 0 type) mmonium hydroxide compatible 77

22 Series LV How to Order Manifold ssembly (xample) nter the part number of the valves to be mounted together with the manifold base part number.... Stations Manifold variations Type Manifold material ort size LV0 / ø LV0 LV0 F /8 / ø LV0 / ø0 (OUT) port <xample> LL-0-0- set Stations are counted from station on the left side, with the (OUT) ports in front. set Manifold base part no. LV0-0- sets sets Valve part no. (stations & ) LV0-0- set set Valve part no. (station ) asic type With flow rate adjustment.o. Double.O. Double dd the symbol at the beginning of part numbers for valves, etc. to be mounted. nter together in order counting from station on the left side, with the (OUT) ports in front. Double Double LL- Stations -- Y x Mounting hole for W Sensor (reathing port) U L L L x R (mm) S LL. LL LL 9 LL. V (OUT) port n x Q (I) port x Q itch = (Max. S) G H LL LL LL LL Station L L L L L L L L L L L L (mm) LL 0 LL 7 LL 60 LL G H M Q R Rc /, T / M x 0.8 Rc /8, T /8 Rc /8 Rc /, T / T /8 Rc /, T / U M x 0. Rc /8 T /8 V. 6 9 W M M M6 M6 (mm) Y

23 Series LV ort Standard Specifications ort size Flow v x -6 m characteristics v Withstand pressure (Ma) Operating pressure (Ma) Valve leakage (cm /min) ilot air pressure (Ma) ilot port size Fluid temperature ( ) mbient temperature ( ) Mass (kg) How to Order Valve LV LV00 ø / to 0. 0 (with water pressure) 0. to 0. M x to 0 0 to LV LV LVD LVQ LQ LV TL/TIL LQ R ody class ody class Orifice dia. Ø Thread type il Thread type Rc T Material ody ctuator section Diaphragm F TF 0 ort size 0 ort size / onstruction q e w R arts list o. Description Material ctuator section r ody Diaphragm F TF nd plate Stainless steel 79

24 Series LV R M x 0.8 ilot port x Rc/ ( x T/) M x 0. reathing port x M x 0.8 Depth

25 Manually Operated Integral Fitting Type/Threaded Type Series Integral fitting type Threaded type ody class ody class il L ody class 0 S ody class ort size Orifice dia. ø ø Orifice dia. ø ø 0 Lever operation Lever operation on-locking type (self-reset type) Locking type ort size /8 / / /8 /8 / How to Order Valve (Single Type) ody class LQ integral fitting ilot port thread type il ort (OUT) different dia. size il Refer to the applicable tubing table to the right Material Thread type Rc T pplication orts & same size Different diameter tubings can be selected within the same body class. ote) ody Stainless steel (SUS) F Integral fitting type/variations Type asic type ctuator section nd plate pplicable tubing size Inch sizes onnecting tubing O.D. Metric sizes ø ø ø6 ø ø /8 /6 / /8 / asic size Diaphragm TF TF TF ote) Refer to Variations for port size and material combinations. Tubing O.D. Metric Inch 0 ø,, 6 /8, /6, / 0 6, 8, /, /8 ody class With reducer 0 ø, /8, / LV LV LVD LVQ LQ LV TL/TIL LQ on-locking Locking Threaded type/series variation Type asic type ort size 0 ø 0 0 ø /8 / / / / /8 /8 /8 /8 / / / Stainless Stainless Stainless steel F steel F steel F (SUS6) (SUS6) (SUS6) on-locking Locking 8

26 Series Standard Specifications/Integral Fitting Type Metric size Tubing O.D. Inch size Flow v x -6 m characteristics v Withstand pressure (Ma) Operating pressure (Ma) ack pressure (Ma) Valve leakage (cm /min) ction Fluid temperature ( ) mbient temperature ( ) Mass (kg) 0 6 / ø / to or less 0 (with water pressure) Toggle type (non-locking/locking) 0 / ø to 60 0 to ote) ontact SM if the valve is to be used with flow. Specific roduct recautions e sure to read before handling. Refer to front matters and for Safety Instructions, and pages 9 and 9 for High urity hemical Valve recautions. aution iping Integral fitting type. onnect tubing with special tools. Refer to the pamphlet High-urity Fluoropolymer Fittings HYR FITTIG /Series LQ, Work rocedure Instructions (M- 0-) for connecting tubing and special tools. (Downloadable from our web site.) Different Diameter Tubing pplicable with Reducer Different diameter tubing can be selected (within a body class) by using a nut and insert bushing (reducer). With reducer Tubing O.D. ody Metric sizes Inch sizes class 6 8 /8 /6 / /8 / ote) Refer to page 89 for information on changing tubing sizes. Standard Specifications/Threaded Type ort size /8, / /, /8 /8, / ø ø Flow characteristics v x -6 m v Withstand pressure (Ma). Tighten the nut to the end surface of the body. s a guide, refer to the proper tightening torques shown below. Tightening torque for piping ody class Torque ( m). to.0.0 to. 7. to 9.0 Threaded type. void using metal fittings with a resin body (taper threads). This can cause damage to the valve body. 8 Operating pressure (Ma) ack pressure (Ma) Valve leakage (cm /min) ction Fluid temperature ( ) mbient temperature ( ) Stainless steel (SUS) Mass (kg) F to or less 0 (with water pressure) Toggle type (non-locking/locking) 0 to 60 0 to

27 Manually Operated Integral Fitting Type/Threaded Type Series onstruction Integral fitting type u Threaded type u With reducer r t y i q e w q e w r arts list o. Description ctuator section ody Material ote F Integral fitting type Stainless steel Threaded type F LV LV LVD LVQ Diaphragm nd plate TF F body only LQ t y Insert bushing ut Lever ollar F F F LV TL/TIL LQ /Integral Fitting Type J L G D x øm Locking type on-locking type 60 (H) (H) (F) (mm) D F G H H J L M

28 Series /Threaded Type ody material: Stainless steel ody material: L G D G Locking type on-locking type L G D 60 x øm (H) (H) Locking type 60 on-locking type x (H) (H) L SM x F J x ody material: F x øm Locking type on-locking type 60 (H) (H) SM J x ody material D F G H H J L M (mm) Stainless steel (SUS) M x 0.8 M6 x M8 x Rc /8, /, T /8, / Rc /, /8, T /, /8 Rc /8, /, T /8, / Rc /, T / Rc /8, T / Rc /, T / Rc /, T / F Rc /8, T / Rc /, T / 8

29 Series /Integral Fitting Type Manifolds Manifold Specifications LLH LLH LLH How to Order Manifold ase LLH 0 S Manifold type Stacking type (I), (OUT) type ommon I/Individual OUT Valve stations to stations Tubing size (port ) /8 / Tubing size (port ) / /8 ote ) ontact SM if the manifold will be used with vacuum and flow. / / LV LV LVD LVQ LQ LV ody class ody class ase type Stacking type Manifold stations 0 stations 0 stations LQ integral fitting Tubing size for port and L side connection Tubing size lug Ø6 /" Ø8 Ø /8" Ø /8" Ø /" Ø /" Ø, /" ody class to Tubing size for port and R side connection Tubing size lug Ø6 /" Ø8 Ø /8" Ø /8" Ø /" Ø /" Ø, /" ody class to TL/TIL LQ How to Order Valve 0 S 07 ody class ody class Orifice dia. Ø Ø8 Ø il L 0 ody type Stacking type for manifold Lever operation Lever operation on-locking type (self-reset type) Locking type LQ integral fitting Tubing size Tubing size Ø, /8" Ø /6" Ø6 /" Ø6 /" Ø8 Ø /8" Ø /8" Ø /" ody class 8

30 Series How to Order Manifold ssembly (xample) nter the part number of the valves to be mounted together with the manifold base part number.... Stations Threaded type manifold/variations Type Manifold material Tubing size 0 / Ø 0 F /8 Ø8 0 / Ø Manifold Stations are counted from station on the left side, with the (OUT) (OUT) port ports in front. <xample> LLH-0-SH set set Manifold base part no. 0-S07 sets sets Valve part no. (stations & ) 0L-S07 set set Valve part no. (station ) on-locking Locking dd the symbol at the beginning of part numbers for valves, etc. to be mounted. nter together in order counting from station on the left side, with the (OUT) ports in front. LLH- Stations - Y x Mounting hole for W D G L L L V on-locking type 60 Locking type (H) (H) SM SM SM SM / / / /8 U itch = x port n x port LLH 6. LLH 7 LLH D G 0. H 8.. H U 7.. V 7 6 W M M M6 (mm) Y LLH LLH LLH Station L L L L L L L L L (mm)

31 Series /Threaded Type Manifolds Manifold Specifications LLH LLH LLH Manifold type Stacking type (I), (OUT) type Valve stations ort size (port ) / ommon I/Individual OUT to stations /8 / LV LV ort size (port ) / /8 ote ) ontact SM if the manifold will be used with vacuum and flow. How to Order Manifold ase / LVD LVQ LQ ody class ody class LLH 0 0 ase type Stacking type Manifold stations 0 0 stations stations ort size (port ) Thread type il ort size / /8 / Thread type Rc T ody class Material Manifold F LV TL/TIL LQ How to Order Valve Threaded type 0 0 ody class ody class Orifice dia. ø ø 0 Material ody F ctuator section nd plate Diaphragm TF ody type Stacking type for manifold Thread type il Thread type Rc T il L Lever operation Lever operation on-locking type (self-reset type) Locking type ort size (port ) ort size / /8 / ody class 87

32 Series How to Order Manifold ssembly (xample) nter the part number of the valves to be mounted together with the manifold base part number.... Stations Threaded type manifold/variations Type Manifold material ort size 0 / ø 0 F /8 0 / ø Manifold Stations are counted from station on the left side, with the (OUT) (OUT) port ports in front. <xample> LLH-0-0- set set Manifold base part no sets sets Valve part no. (stations & ) 0L-0- set set Valve part no. (station ) on-locking Locking dd the symbol at the beginning of part numbers for valves, etc. to be mounted. nter together in order counting from station on the left side, with the (OUT) ports in front. LLH- Stations -- Y x Mounting hole for W U Locking type on-locking type G L L L 60 R (H) (H) (OUT) port n x itch = (I) port x LLH 0 LLH 7 LLH G 0. H H Rc/, T/ Rc/8, T/8 Rc/, T/ R. U. 8 W M M M6 (mm) Y LLH LLH LLH Station L L L L L L L L L (mm)

33 Series LV Fittings and Special Tools Fittings hanging tubing sizes The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing. ody class 6 art composition Tubing O.D. omponent parts Metric sizes Inch sizes ut Insert ollar (insert assembly) 6 8 /8 /6 / /8 / / asic size Reducer type Yes Yes Yes Yes o Yes hanging the tubing size xample) hanging the tubing from an O.D. /" to O.D. /8" in body class. repare an insert bushing and nut for /8" O.D. tubing (LQ-U0) and change the tubing size. (Refer to the section on how to order fitting parts.) aution. onnect tubing with special tools. Refer to the pamphlet High-urity Fluoropolymer Fittings HYR FITTIG /Series LQ, Work rocedure Instructions (M-0- ) for connecting tubing and special tools. (Downloadable from our web site.) LV LV LVD LVQ LQ LV TL/TIL LQ ote) Tubing is sold separately. Insert bushing LQ-07 ut LQ-07 Insert bushing LQ-0 ut LQ-0 How to order fitting parts Tubing O.D. /" LQ-U07 (asic size) Tubing ollar Tubing O.D. /8" LQ-U0 (Reducer type) Tubing LQ U 0 Type U is recommended when changing tubing sizes. Tubing size 6 ody class 6 Type of fitting il pplicable fitting LQ LQ ody class pplicable fitting LQ LQ U Type of part Type of part Insert bushing & nut Insert bushing ut Tubing O.D. /8", ø ø /6" ø6 /" ø6 ø /" /8" ø ø /8" /" ø /" /", ø /", ø ", ø ody class 6 pplicable fitting LQ LQ 89

34 pplicable Fluids Material and fluid compatibility check list for air and manually operated high purity valves ody material Diaphragm material hemical Stainless steel SUS6 Fluoro resin F olyphenylene sulfide resin Fluoro resin TF itrile rubber R thylene propylene rubber R cetone mmonium hydroxide ote ) ote ) ote ) ote ) Isobutyl alcohol ote ) ote ) ote ) Isopropyl alcohol ote ) ote ) ote ) Hydrochloric acid Ozone (dry) Hydrogen peroxide oncentration % or less, 0 or less thyl acetate ote ) ote ) ote ) utyl acetate ote ) ote ) ote ) itric acid (except fuming nitric acid) DI water oncentration % or less ote ) Sodium hydroxide oncentration 0% or less itrogen gas Super pure water Toluene Hydrofluoric acid Sulfuric acid (except fuming sulfuric acid) ote ) ote ) ote ) ote ) ote ) hosphoric acid oncentration 80% or less The material and fluid compatibility check list provides reference values as a guide only. ote ) Use a stainless steel body, as static electricity may be generated. ote ) Use caution as permeation may occur and any permeated fluid could effect other material parts. Table symbols : an be used : an be used in certain conditions : annot be used ompatibility is indicated for fluid temperatures of 0 or less. The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product. The data above is based on the information presented by the material manufacturers. SM is not responsible for its accuracy and any damage happened because of this data. 90

35 Series LV High urity hemical Valve recautions e sure to read before handling. Refer to front matters and for Safety Instructions. Warning Design & Selection. onfirm the specifications. Give careful consideration to operating conditions such as the application, fluid and environment, and use within the operating ranges specified in this catalog.. Fluids Operate after confirming the compatibility of the product's component materials with fluids, using the check list on features page 90. ontact SM regarding fluids other than those in the check list. Operate within the indicated fluid temperature range.. Maintenance space nsure the necessary space for maintenance and inspections.. Fluid pressure range eep the supplied fluid pressure within the operating pressure range shown in the catalog.. mbient environment Operate within the ambient operating temperature range. fter confirming the compatibility of the product's component materials with the ambient environment, operate so that fluid does not adhere to the product's exterior surfaces. 6. Liquid seals When circulating fluid rovide a relief valve in the system so that fluid does not get into the liquid seal circuit. 7. ountermeasures for static electricity Since static electricity may be generated depending on the fluid being used, implement suitable countermeasures. Warning Mounting. If air leakage increases or equipment does not operate properly, stop operation. fter mounting, perform suitable function and leak tests to confirm that the mounting is correct.. Instruction manual Mount and operate the product after reading the manual carefully and understanding its contents. lso keep the manual where it can be referred to as necessary.. reparation before piping efore piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe. Install piping so that it does not apply pulling, pressing, bending or other forces on the valve body.. Use the tightening torques shown below when making connections to the pilot port. Operating port tightening torque Guideline for tightening torque umber of turns when the fitting is screwed into the body with to windings of sealant tape applied to threaded portion of the piping. The value may differ for types other than sealant type.. Use pilot ports and sensor (breathing) ports as indicated below. aution Operating port M Rc, T /8.O. Double iping Torque ( m) /6 turn with a tightening tool after first tightening by hand ort ressure reathing ressure ort reathing ressure ressure 0.8 to.0. Use of metal fittings Do not use metal fittings for piping on taper threads made of resin, as this may cause damage to the threads. LV body ported tightening torque for fittings. Guideline for reaking torque Tightening torque Size tightening torque ( m) ( m) (umber of turns) LV0 to 0. to to turns LV0 6 to 8 to to turns LV0 to to 7 to turns LV0 8 to 0 8 to to turns Sensor (breathing) port reathing reathing reathing In the case of and.o. types, the port which does not receive operating pressure is released to atmosphere. When intake and exhaust directly from the valve is not desired due to problems with the ambient environment or scattering of dust, etc., install piping and perform intake and exhaust at a location which does not present a problem.. onnect tubing with special tools. Refer to the pamphlet High-urity Fluoropolymer Fittings HY- R FITTIG /Series LQ, Work rocedure Instructions (M-0-) for connecting tubing and special tools. (Downloadable from our web site.) LV LV LVD LVQ LQ LV TL/TIL LQ 9

36 Series LV High urity hemical Valve recautions e sure to read before handling. Refer to front matters and for Safety Instructions. Warning Warning Warning Maintenance. Maintenance should be performed in accordance with the procedures in the instruction manual. Incorrect handling can cause damage or malfunction of machinery and equipment, etc.. efore removing equipment or compressed air supply/exhaust devices, shut off the air and power supplies, and exhaust compressed air from the system. Further, when restarting equipment after remounting or replacement, first confirm safety and then check the equipment for normal operation.. erform work after removing residual chemicals and carefully replacing them with DI water or air, etc.. Do not disassemble the product. roducts which have been disassembled cannot be guaranteed. If disassembly is necessary, contact SM.. In order to obtain optimum performance from valves, perform periodic inspections to confirm that there are no leaks from valves or fittings, etc. aution Operating ir Supply. Use clean air. Do not use compressed air which includes chemicals, synthetic oils containing organic solvents, salt, or corrosive gases, etc., as this may cause damage or malfunction. Operating nvironment. Do not use in a location having an explosive atmosphere.. Do not operate in locations where vibration or impact occurs.. Do not use in locations where radiated heat will be received from nearby heat sources.. Removal of drainage Flush drainage from filters regularly. Warning recautions on Usage. Operate within the ranges of the maximum operating pressure and back pressure. aution. When the diaphragm is made of TF lease note that when the product is shipped from the factory, gases such as and air may leak from the valve at a rate of cm /min (when pressurized).. When operated at a very low flow rate, the series LV with flow rate adjustment may vibrate, etc. depending on the operating conditions. Therefore, operate it after careful examination of the flow rate, pressure and piping conditions.. In the series LV, water hammering may occur depending on the fluid pressure conditions. In most cases, improvement is possible by adjusting the pilot pressure with a speed controller, etc., but the flow rate, pressure and piping conditions should be reviewed.. To adjust the flow rate for the series LV with flow rate adjustment, open gradually starting from the fully closed condition. Opening is accomplished by turning the adjustment knob counter clockwise. dditionally, do not apply any unreasonable force to the adjustment knob when nearing a fully opened or closed state. This may result in deformation of the orifice sheet surface or damage to the threaded part of the adjustment knob. It is in the fully closed condition when the product is shipped from the factory.. fter a long period of nonuse, perform a test run before beginning regular operation. 6. Since the LV is packaged in a clean room use sufficient care in handling when opened. 7. Take extra care when setting the operating direction and when handling the lever of series. 9