Digital Flow Switch for Deionized Water and Chemicals Body and sensor New PFA Tube Super PFA

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Chastity Hodge
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CAT.ES- A for Deionized Water and Chemicals Body and sensor New PFA Tube Super PFA Three types of flow range. to l /min (PFD).

Dust generation of particles/cc or less (aerage number) Karman ortex eliminates moing parts and allows low dust generation.

Fill the flow path with sulfuric acid and leae it for minutes.

1 CAT.ES- A for Deionized Water and Chemicals Body and sensor New PFA Tube Super PFA Three types of flow range. to l /min (PFD). to l /min (PFD). to l /min (PFD) Swept flow characteristics Tapered side seal minimizes dead olume to reduce accumulation of liquid pool. Dust generation of particles/cc or less (aerage number) Karman ortex eliminates moing parts and allows low dust generation. Particle characteristics (reference) Particle ratio [number/cc] Duration of flow [min] or particles/cc Swept flow characteristics (reference) Ratio of resistance [kω m] Duration of flow [min] Tube Fill the flow path with sulfuric acid and leae it for minutes. After disposing the sulfuric acid, flush the flow path out with deionized water and measure the resistance rate of the fluid that is discharged from the downstream side. A quick recoery time indicates little liquid pool. The data was obtained by performing an actual minutes supersonic cleaning using an aerage MΩ cm of deionized water at class clean room (l/min flow rate). The diameter of the measured particles ranges from. to.µm. The flow rate used during measuring is cc/min. Processing chart for series PFD Remote type sensor unit Assembly Common enironment Supersonic cleaning Double-packing Drying Clean room class Shipment Body Vibration reducing seals Malfunctions ( errors) that would otherwise be caused by ibration are preented. types of s aailable With button operation, types of specification combinations are aailable. Output Output Switch Switch Switch Accumulated pulse Accumulated pulse Switch Accumulated pulse Accumulated pulse

2 For Deionized Water and Chemicals Series PFD Remote Type Unit Specifications for Unit PFD Flow rate range 9 How to Order. to l/min. to l/min Output specifications to l/min Output for display unit Note ) + analog ( to V) Port size: (inch) Output for display unit Note ) + analog ( to ma) / / / PFD PFD PFD Note ) Output for the display units of PFD / Model Measured fluid Detection style Flow rate measuring range Operating pressure range Note ) Proof pressure Note ) Operating fluid temperature Linearity Note ) Repeatability Temperature characteristics Output specifications Power supply oltage Current consumption Enironmental resistance Enclosure Weight Port size Wetted material Pulse Analog Operating temperature range Voltage resistance Insulation resistance Vibration resistance Impact resistance Noise resistance PFD PFD PFD Liquid not to corrode nor erode deionized water and/or Teflon. Viscosity: mpa s (cp) or less Karman ortex. to l/min. to l/min Note ) to l/min to MPa to.mpa.mpa.9mpa to 9 C ±.%F.S. or less (at C water) ±%F.S. or less (at C water) ±%F.S. or less ( to C) Pulse, N channel, open drain, for display unit PFD / (Specifications: Maximum load current of ma; Maximum applied oltage of V) Voltage Note ) to V within the flow rate range Linearity: ±%F.S. or less, allowable load resistance: kω or more Current Note ) to ma within the flow rate range Linearity: ±%F.S.or less, allowable load resistance: Ω or less with VDC, Ω or less with VDC to VDC (ripple ±% or less) ma or less (without load) IP Operating: to C, Stored: to C in stock (no freeze nor condensation) VAC for min between external terminals and case MΩ or more (VDC) between external terminals and case.9m/s 9m/s to X,Y,Z directions times for each Vp-p, Pulse width: µs, Standing: ns g (without lead wire) g (without lead wire) / inch tube / inch tube / inch tube Body: new PFA, : new PFA, Tube: super PFA Note ). to l/min (.MPa) with iscosity of mpa s (cp) or less Note ) The operating pressure range drops according to the fluid temperature. See attached graph. Note ). times of the maximum operating pressure and arying with fluid temperature. Note ) The system accuracy when combined with PFD. Note ) When the oltage is selected. Note ) When the current is selected. Note ) The sensor unit is conformed to CE mark. Operating pressure [MPa].. PFD PFD / 9 Fluid temperature [ C]

For Deionized Water and Chemicals Series PFD How to Order Remote Type Display Unit PFD A M Specifications for Display Unit Output specifications NPN open collector s PNP open collector s Panel

3 For Deionized Water and Chemicals Series PFD How to Order Remote Type Display Unit PFD A M Specifications for Display Unit Output specifications NPN open collector s PNP open collector s Panel mounting Unit specification Nil With unit switching function M Fixed SI unit Note ) Note ) Fixed units: Real-time flow rate: l/min Accumulated flow: l Model Flow rate measurement range Note ) Set flow rate range Note ) Minimum setting unit Note ) Accumulated pulse flow rate exchange alue (Pulse width: ms) Note ) Note ) Real-time flow rate Display units Accumulated flow Accumulated flow range Linearity Note ) Repeatability Temperature characteristics Current consumption Weight Note ) Output specifications Enironmental resistance Switch Accumulated pulse Enclosure Operating temperature range Voltage resistance Insulation resistance Vibration resistance Impact resistance Noise resistance PFD/. to.l/min. to.l/min. to l/min. to.l/min. to.l/min. to l/min.l/min.l/min.l/min.l/pulse.l/pulse.l/pulse NPN open collector (PFD, PFW, PFW) PNP open collector (PFD, PFW, PFW) l/min, gal (US)/min l, gal (US) to l ±.%F.S. or less ±.%F.S. or less ±%F.S. or less ( to C) ±%F.S. or less ( to C) ma or less g Maximum load current: ma Internal oltage drop:.v or less (with load current of ma) Maximum applied oltage: V s Maximum load current: ma Internal oltage drop:.v or less (with load current of ma) s NPN open collector or PNP open collector (same as switch ) IP Operating: to C, Stored: to C (no freezing nor condensation) VAC for min between external terminals and case MΩ or more (VDC Mega) between external terminals and case to Hz at whicheer is smaller:.mm amplitude or 9m/s acceleration in X, Y, Z directions for hrs each 9m/s to X, Y, Z directions times for each Vp-p, Pulse width: µs, Standing: ns Indicator light -digits -segment LED Status LED s : when light is on, OUT: Green; OUT: Red Power supply oltage to VDC (ripple ±% or less) Response time sec. or less Hysteresis Hysteresis mode: adjustable (can be set from ) Window comparator mode Note ) : fixed ( digits) Note ) The alue aries depending on set flow range Note ) For digital flow switch with unit switching function. (Fixed SI unit [l/min or l] will be set for switch types without unit switching function.) Note ) The system accuracy when combined with PFD. Note ) Switch and accumulated pulse can be selected using the control button operation during initial setting. Output Output Switch Switch Accumulated pulse Accumulated pulse Switch Accumulated pulse Switch Accumulated pulse Note ) Window comparator mode: Since hysteresis (H) will reach digits, keep P_ and P_ or n_ and n_ apart by digits more. (In case of OUT, n_, to be n_, and P_, to be P_,.) Note ) The display unit is conformed to CE mark.

4 Series PFD Flow Characteristics (Pressure Characteristics) PFD PFD PFD... Pressure loss [MPa].... Pressure loss [MPa] Pressure loss [MPa] Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PFD/ o! u!! y w r! e! q t i Parts list Number 9 Parts Body Tube Housing A Housing B Housing C Bushing Cap Gasket O-ring Thread Lead wire Material New PFA New PFA Super PFA PPS PPS PPS POM PPS FKM FKM SUS PVC PFD o! u!!ywr e! q t i

5 For Deionized Water and Chemicals Series PFD Dimensions: Separate Type Unit PFD-/- øa -ø. Model PFD PFD A. 9. Internal circuits and wiring examples z to, are terminal numbers. t Analog White Analog White Brown Black Blue Brown Black Blue Display (PFD / ) PFD - - Display (PFD / ) Switch or Pluse Switch or Pluse + + to VDC to VDC PFD - - PFD-9 Wiring Brown () DC(+) Black () OUT White () Analog Blue () DC( ) ø9. Use this sensor by connecting to SMC remote type display unit Series PFD. -ø. Analog Flow direction current [ma] oltage [V]. (in case of PFD). (in case of PFD) (in case of PFD) Flow rate [l/min]

6 UNIT Series PFD Dimensions: Separate Type Display Unit PFD -A Panel mounting type. SMC FLOW SWITCH RESET SET... A Internal circuits and wiring examples z to, are terminal numbers. Black Brown Blue Series PFD NC PFD-A(-M) OUT OUT + to VDC 9.. x.(=.) -M +. Panel fitting dimension +. Black Brown Blue Series PFD NC PFD-A(-M) OUT OUT + to VDC View A The applicable panel thickness is to.mm. Do not connect the white wire of the sensor to c of the display unit. Terminal block number

7 For Deionized Water and Chemicals Series PFD Functions/PFD Refer to the operation manual how to set and to operate. Flow rate measurement selection Real-time flow rate and accumulated flow rate can be selected. Up to of flow rate alue can be accumulated. Output types Real-time switch, accumulated switch, or accumulated pulse can be selected as an type. Unit switching Display Real-time flow rate l/min GPM GPM = gal (US)/min Accumulated flow l gal (US) Note ) Fixed SI unit (l/min, l, m or m x) will be set for the type without the unit switching function. Real-time switch ( ) "P" YES Hysteresis mode P- P- Real-time flow rate Window comparator mode H : Hysteresis H H Flow rate measuring unit confirmation This function allows to confirm the accumulated flow rate when real-time flow rate is selected and to confirm the real-time flow rate when accumulated flow rate is selected. Error correction LED display Contents Solution A current of more than ma is flowing to OUT Check the load and wiring for OUT OUT For OUT is the same. Output mode Note) "n" NO YES NO P- P- Real-time flow rate Hysteresis mode n- n- Real-time flow rate Window comparator mode H : Hysteresis H H n- n- Real-time flow rate The setting data has changed for whateer reasons. The flow rate is oer the flow rate measurement range. Perform the RESET operation, and reset all data again. Reduce the flow rate until it is within the flow rate range, using an adjustment ale. Key lock This function preents incorrect operations such as changing the set alue accidentally. Accumulation clearance This is to clear the accumulated alue. Note) Output mode is set to inerted at the factory before shipment. Accumulated switch ( ) OUT "P" Output mode "n" Note ) P- Accumulated flow rate n- Accumulated flow rate Note) Output mode is set to inerted at the factory before shipment. Accumulated pulse ( ) "P" OUT Output mode msec Note ) "n" Note) Refer to the specifications of display unit for the flow rate alue per pulse.

8 Applicable Fluid Compatibility checklist: materials of digital flow switch for deionized water and chemicals and fluid Chemical Compatibility Acetone Ammonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone Hydrogen peroxide Ethyl acetate Butyl acetate Nitric acid (except fuming nitric acid) Deionized water Sodium hydroxide Ultra deionized water Toluene Hydrofluoric acid Sulfuric acid (except fuming sulfuric acid) Phosphoric acid Concentration % or less C or less Concentration % or less Concentration % or less Concentration % or less Concentration % or less Note ) The material and fluid compatibility check list proides reference alues as a guide only. Note ) Consult SMC for made to order specifications such as: Teflon coated threads to preent rust/corrosion when in contact with strong acid or alkali. Compatibility is indicated for fluid temperatures at C or less. Consult SMC regarding fluids other than the aboe. Consult SMC regarding operating conditions. The product is not explosion proof. Please be sure to take measures to guard it from explosie gas when using explosie fluid. : Can be used Table symbols : Can be used under certain conditions : Cannot be used

Three types of flow range. 0.4 to 4 L/min (PF2D504) 1.8 to 20 L/min (PF2D520) 4.0 to 40 L/min (PF2D540) Swept flow characteristics (reference)

Three types of flow range. 0.4 to 4 L/min (PF2D504) 1.8 to 20 L/min (PF2D520) 4.0 to 40 L/min (PF2D540) Swept flow characteristics (reference) Digital Flow Switch for Deionized Water and Chemical Liquids PFD Series RoHS single controller can monitor the flow rate of different sensors. Body and New PF Tube Super PF Dust generation of particles/cc