2-Color Display Digital Flow Switch

Transcription

1 -Color Display Digital Flow Switch Series Flow rate range:, 5, 5, l/min. Minimum unit setting:. l/min. (. l/min when the flow rate range is 5, 5, l/min.) Repeatability: ±%F.S. or less Grease-free Flow adjustment valve is integrated. (Reduced piping and space saving) Response time: Either 5 msec.,.5 sec., sec. or sec. can be chosen. Fluid ir, N, r, CO -color display Irregular value at a glance Flow adjustment valve V PF PFW PFD IF 99

2 -Color Display Digital Flow Switch Integrated flow adjustment valve Reduces piping installation work and space requirements. Special design provides smooth adjustment to match needle rotations. Flow characteristics Piping variations One-touch fittings, female threads, straight piping, and bottom piping are selectable. Series 7 Flow rate Number of needle rotations Indicator function Flashing speed varies according to flow rate. Color changes from green to red when rated flow rate is exceeded. Can be used as a simple monitor. Series 5 Flashing Flashing speed Fast Slow Flow rate High Low Connectors Connection and removal of wiring is easy. Series Support for vertical and horizontal secure mounting (panel mount) single panel opening is sufficient. Reduces panel fitting work and enables space-savings. 4.5 Power supply / Output connector SET SET SET Panel opening e-con connector Sensor connector Integrated type Remote type Measurement flow range (l/min). to (. to 5).5 to 5 (.5 to.5) to 5 ( to 5) to ( to 5) ( ): Fluid: CO 9 Model Sensor unit Model Display unit

3 P9-P97-E.qxd..7 7:7 PM Page 9 Series 6 Same size even when the model with different flow rate range (, 5, 5, l/min) is chosen. 67 Lightweight: 55 g (7) (7) (With one-touch fitting, without flow adjustment valve) Conventional model PF7: 9 g 4 4 Compact 6 Comparison with the conventional model PF7 ( to l/min) Reduced piping space Mountable in a narrow location since the straight piping length is not required. straight piping length of times the piping diameter is required for the conventional model. Straight piping length 4.6 Comparison with the conventional model PF7 ( to l/min) when ø6 one-touch fittings are attached. Piping Variations Female thread: Rc /, /4 폷 NPT /, /4 폷 G /, /4 Straight Bottom With Without flow adjustment flow adjustment One-touch fitting: ø4, ø6, ø, ø/4 Straight Bottom S S S S V PF PFW PFD IF S S S S Mounting Bottom mounting Bracket Panel mount D rail Through-hole mounting 9

4 Main Functions Selection of fluid ir, Nitrogen (N), rgon (r) or Carbon dioxide (CO) can be selected using the buttons. Power-saving mode Turning off the display can save power consumption. Secret code setting function The user must input a secret code to cancel the keylock mode. This ensures that only authorized persons can operate the switch. Flashing Flashing For details and other functions, refer to page 99. The decimal point indicators flash in power-saving mode. Selection of indication unit External input Indication resolution User can select between NR and Nl/min for each fluid. [NR] Indicates the flow rate converted to a volume under standard conditions: C, atm (atmosphere), 65%RH [Nl/min] Indicates the flow rate converted to a volume under normal conditions: C, atm (atmosphere). Can be selected from accumulated value external reset, auto-shift and auto-shift zero. Minimum unit setting can be selected from l/min,. l/min and. l/min. Depends on the model. Refer to the specifications (P. 99) for details. Several Combinations Depending on the installation conditions, it is possible to add or remove the flow adjustment valve, change the fitting type and the piping direction as desired. Clip Refer to page 9 for details. Flow adjustment valve Recommended ir Circuits Dryer IDF IDU Compressed air line ir filter Regulator Micro mist separator F R IR Vacuum line MD FD Vacuum line Flow switch Female thread One-touch fitting The accuracy may fluctuate by to % just after replacement. (Repeatability does not change.) Suction filter ZF SFD Flow switch pplications Control of metal wire tension Welder Models compatible with argon (r) and carbon dioxide (CO) mixed gas are available. Refer to page 94 for details. ccumulated indication shows the operating flow rate or residual amount (of N etc.) in a gas cylinder. Flow control of N gas to prevent lead frame oxidation. N blow prevents distortion of camera image due to air turbulence. Detection camera Suction check 9

5 Comparison with Float Type Flow Meter Digital display With switch output and analog output Control by sensor output Visual control Indicated value depends on the viewing angle. With switch output and analog output Without output function Not subject to pressure variations photoelectric switch, or similar, must be prepared separately. Indicated value is the same at any installation position. (No conversion is needed.) Indicated value depends on installation position. (Conversion is required.) Can detect whether greater or less than set flow rate. The flow condition can be controlled all the time. Can only detect when float passes. Cannot detect whether greater or less than set flow rate. ON ON V OFF OFF PF Free mounting orientation Less Flow rate Greater Less Flow rate Greater PFW PFD IF ccumulated flow display Mounting orientation is not limited. Vertical orientation only ble to confirm the total air consumption per day (Max l) ccumulated pulse output is also equipped. Not displayable 9

6 94

7 -Color Display Digital Flow Switch Features P. 9 to 9 Series 7 Integrated Display How to Order P. 96 Specifications P. 9 Piping Specifications / Mass P. 99 nalog Output P. 99 Internal Circuits and Wiring Examples P. 99 Dimensions P. 9 Series 5 Remote Sensor Unit Series 7, 5 Common Specifications Series Flow Sensor Monitor How to Order P. 9 Specifications P. 9 Piping Specifications / Mass P. 9 nalog Output P. 9 Internal Circuits and Wiring Examples P. 9 Dimensions P. 9 Pressure Loss / Flow Characteristics P. 9 Parts Description P. 9 Construction P. 9 Detection Principle P. 9 Component Parts P. 9 How to Order P. 9 Specifications P. 94 nalog Output P. 94 Internal Circuits P. 95 Descriptions P. 96 Dimensions P. 97 Function Details P. 99 V PF PFW PFD IF Made to Order Changing the piping entry direction P. 94 combination for and side Compatible with argon (r) and carbon P. 94 dioxide (CO) mixed gas Specific Product Precautions P

8 S S S S S S S S -Color Display Digital Flow Switch Series 7 Integrated display Integrated display 7 How to Order 7 C4 M Type Integrated display Rated flow range (Flow rate range) Symbol N N F F C4 C6 C N to (5) l/min.5 to 5 (.5) l/min to 5 (5) l/min to (5) l/min ( ): Fluid: CO Flow adjustment valve Nil None S Yes Description Rc/ Rc/4 NPT/ NPT/4 G/ G/4 ø4 (5/") one-touch fitting ø6 one-touch fitting ø (5/6") one-touch fitting ø/4" one-touch fitting Port size Flow rate range 5 5 Piping entry direction Nil L Straight Bottom Different combinations of piping entry directions for and side are available as made-to-order. (Refer to page 94.) Unit specification M Nil Fixed SI unit Note) With unit switching function Note) Fixed unit: Real-time flow rate: l/min ccumulated flow: l Calibration certificate Nil None With calibration certificate The certificate is written in English and Japanese. Other languages are available as specials. Instruction manual Nil With instruction manual (Leaflet: Japanese and English) N None Output specification B C D E F G H NPN outputs PNP outputs NPN output + nalog ( to 5 V) NPN output + nalog (4 to m) PNP output + nalog ( to 5 V) PNP output + nalog (4 to m) NPN output + External input Note ) PNP output + External input Note ) Option (Refer to page 97.) Note ) User can select from accumulated value external reset, auto-shift and auto-shift zero. Made to Order (Refer to page 97 and 94.) Option (Refer to page 97.) Piping Variations With one-touch fittings (C4, C6, C, N7) Female thread (,, N, N, F, F) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) With flow adjustment valve (S) 96

9 S S -Color Display Digital Flow Switch Series 7 Option Nil With lead wire with connector ( m) W With lead wire with connector ( m) + Rubber cover for connector (silicon rubber) Z Without lead wire with connector ZS--F ZS--D ZS--D Lead wire length m Lead wire length m Option Nil None R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) T Panel mount adapter (For without flow adjustment valve) ZS--M Mounting screw (accessory) ZS--MS Mounting screw (accessory) ZS--J Panel mount adapter B Panel mount adapter Panel V Panel mount adapter (For with flow adjustment valve) ZS--JS Panel mount adapter B Mounting bracket Panel mount adapter Panel Piping direction: Cannot be mounted with bottom piping type. Each option is not assembled with the product, but shipped together. Made to Order Symbol X69 X694 X7 Mounting bracket Specification/Description Change of piping entry direction combination Compatible with argon (r) and carbon dioxide (CO) mixed gas For details, refer to page 94 through to 94. V PF PFW PFD IF D Rail Mounting Bracket (Order Separately) ZS R 4 5 Stations station stations stations 4 stations 5 stations D rail (supplied by customers) Port size F: G/4 cannot be mounted on the D rail. 97

10 Series 7 Specifications Model pplicable fluid Dry air, N, r, CO (ir quality grade is JIS B9.-,. to.6. and ISO57.-,. to.6..) Rated flow range Dry air, N, r. to l/min.5 to 5 l/min to 5 l/min to l/min (Flow rate range) CO. to 5 l/min.5 to.5 l/min to 5 l/min to 5 l/min Dry air, N, r. to.5 l/min.5 to 6. l/min to 5.5 l/min to 5 l/min Displayable range Note ) CO. to 5. l/min.5 to. l/min to 6. l/min to 5 l/min Dry air, N, r to.5 l/min to 6. l/min to 5.5 l/min to 5 l/min Settable range Note ) CO to 5. l/min to. l/min to 6. l/min to 5 l/min Minimum unit setting Note ). l/min. l/min. l/min. l/min ccumulated pulse flow rate exchange value. l/pulse. l/pulse. l/pulse l/pulse Real-time flow rate l/min, CFM x - Indication unit Note ) ccumulated flow l, ft x - Linearity Repeatability Pressure characteristics Temperature characteristics Operating pressure range Rated pressure range Proof pressure ccumulated flow range Switch output Maximum load current Maximum applied voltage Internal voltage drop Response time Output protection ccumulated pulse output Response time nalog output Note 5) Hysteresis Note 6) Voltage output Current output Hysteresis mode Window comparator mode Display accuracy: ±%F.S. or less (Fluid: Dry air) nalog output accuracy: ±5%F.S. or less ±%F.S. or less (Fluid: Dry air) nalog output accuracy: ±%F.S. or less ±5%F.S. or less (based on.5 MPa) ±%F.S. (5 to 5 C) ±5%F.S. ( to 5 C) kpa to 75 kpa 7 kpa to 75 kpa MPa Max l Note 4) NPN or PNP open collector output m VDC (at NPN output) NPN output: V or less (at m) PNP output:.5 V or less (at m) s (5 ms,.5 s, s can be selected.) Short-circuit protection, Overcurrent protection NPN or PNP open collector output (Same as switch output).5 s or less (9% response) Voltage output: to 5 V Output impedance: kω Current output: 4 to m Max. load impedance: 6 Ω, Min. load impedance: 5 Ω Variable Variable External input No-voltage input (Reed or Solid state) Input ms or more Display method -digit, 7-segment LED -color display (Red/Green) Renewed cycle: times/sec Status LED s Power supply voltage Current consumption : Illuminates when output is turned ON (Green). : Illuminates when output is turned ON (Red). 4 VDC ± % 55 m or less Enclosure IP4 Operating fluid temperature to 5 C (with no freezing and condensation) Operating temperature range Operating: to 5 C Stored: to 6 C (with no freezing and condensation) Environmental Operating humidity range Operating, Stored: 5 to 5%R.H. (with no condensation) Withstand voltage VC for min. between external terminal and case resistance Insulation resistance 5 MΩ or more (5 VDC Mega) between external terminal and case Vibration resistance Without orifice: to 5 Hz with a.5 mm amplitude or 9 m/s acceleration, in each X, Y, Z direction for hrs, whichever is smaller. With orifice: to 5 Hz with a.5 mm amplitude or 9.6 m/s acceleration, in each X, Y, Z direction for hrs, whichever is smaller. Impact resistance 49 m/s in X, Y, Z directions times each Note ) When the minimum unit setting. l/min is selected for l/min type, the indication upper limit will be [9.99 l/min]. When the minimum unit setting. l/min is selected for l/min type, the indication upper limit will be [99.9 l/min]. Note ) User can select between. l/min and. l/min for the 7, and between. l/min and l/min for the 7 respectively. If the indication unit is selected to CFM, the minimum unit setting cannot be changed. t the time of shipment from the factory, the minimum unit setting is set to. l/min for the 7 and l/min for the 7 respectively. Note ) Set to NR at the time of shipment from the factory. NR is used for standard conditions: C, atm and 65%R.H. Nl/min is used for normal conditions: C and atm. When equipped with a unit switching function. (The SI unit (l/min or l) is fixed for types with no unit switching function.) Note 4) Cleared when the power supply is turned off. Hold function can be selected. (Interval of min or 5 min can be selected). If the 5 min interval is selected, the life of the memory element (electronic part) is limited to million cycles. (If energized for 4 hours, life is calculated as 5 min x million = 5 million min = 9.5 years). Therefore, if using the hold function, calculate the memory life for your operating conditions, and use within this life. Note 5) Set to.5 s (9%), can be changed to ms. Note 6) Set to hystresis mode at the time of shipment from the factory. Can be changed to window comparator mode using push-buttons. 9

11 -Color Display Digital Flow Switch Series 7 Piping Specifications / Mass Port size Mass Part no. Wetted parts material Rc / Rc /4 N NPT / N NPT /4 F F G/ G/4 C4 ø4 (5/") one-touch fitting Straight Without orifice: 95 g Straight Without orifice: 5 g Straight Without orifice: 55 g Bottom Without orifice: 5 g Bottom Without orifice: 5 g Bottom Without orifice: 65 g Straight With orifice: 5 g Straight With orifice: 65 g Straight With orifice: 95 g Bottom With orifice: 45 g Bottom With orifice: 75 g Bottom With orifice: 5 g LCP, PBT, Brass (Electroless nickel plated), HNBR (+ Fluoro coated), FKM (+ Fluoro coated), Silicon, u, Stainless steel 4 C6 ø6 one-touch fitting C ø (5/6") one-touch fitting N7 ø/4" one-touch fitting nalog Output Note: nalog output at maximum rated flow rate when CO is selected is [V] for the voltage output type and [m] for the current output type. nalog output [V] nalog Voltage Output ( to 5 V) 5 Max. rated Model flow value [l/min] Max. rated 7--C/E 75--C/E 75--C/E 7--C/E flow value Internal Circuits and Wiring Examples nalog output [m] Max. rated flow value nalog Current Output (4 to m) Max. rated Model flow value [l/min] 7--D/F (5) 75--D/F 5 (.5) 75--D/F 5 (5) 7--D/F (5) ( ): Fluid: CO NPN outputs type 7--- NPN + nalog output type 7--C- NPN + nalog output type 7--D- NPN + External input type 7--G- Main circuit Brown Black White Blue 4 VDC Main circuit Brown Black White nalog output Blue 4 VDC Main circuit Brown Black White External input Blue 4 VDC Max. V, m Internal voltage drop V or less Max. V, m Internal voltage drop V or less C: nalog output to 5 V Output impedance kω D: nalog output 4 to m impedance 5 to 6 Ω Max. V, m Internal voltage drop V or less External input: No-voltage input Reed switch or solid state switch input msec or more V PNP outputs type 7--B- Main circuit Brown Black White Blue 4 VDC PNP + nalog output type 7--E- PNP + nalog output type 7--F- Main circuit Brown Black White nalog output Blue 4 VDC PNP + External input type 7--H- Main circuit Brown Black White External input Blue 4 VDC PF PFW PFD IF Max. m Internal voltage drop.5 V or less Max. m Internal voltage drop.5 V or less ccumulated pulse output wiring examples NPN outputs type 7--- NPN + nalog output type 7--C-/7--D- NPN + External input type 7--G- PNP outputs type 7--B- PNP + nalog output type 7--E-/7--F- PNP + External input type 7--H- E: nalog output to 5 V Output impedance kω F: nalog output 4 to m impedance 5 to 6 Ω Black White (-7--- only) Blue Brown Black Max. m Internal voltage drop.5 V or less White (7--B- only) External input: No-voltage input Reed switch or solid state switch input msec or more Max. V, m Max. m V or 5 msec 5 msec V or 5 msec 5 msec 99

12 Series 7 Dimensions 7-C4/C6/C/N7 One-touch fitting pplicable tube O.D. (mm). ø4 (5/") ø6 ø (5/6") ø/4" (4.) 4. x one-touch fitting 9.4 x.4 7-C4L/C6L/CL/N7L One-touch fitting pplicable tube O.D. (mm). ø4 (5/") ø6 ø (5/6") ø/4"... 4 (4.) x.6 depth 5 x one-touch fitting x.4 6 With rubber cover for connector 9 x.6 depth 5

13 -Color Display Digital Flow Switch Series 7 Dimensions 7-(N)/(N)/F 7 Width across flats 7. 4 (4.) x port size Rc /, /4 NPT /, /4 G / x.4 7-(N)L/(N)L/FL. 4 (4.) x port size Rc /, /4 NPT /, /4 G / Width across flats 7 x.4 6 x.6 depth 5 V PF PFW PFD IF x.6 depth 5 9

14 Series 7 Dimensions 7-F 7 Width across flats. 4 (4.) x port size G /4 x.4 7-FL x.6 depth (4.) x port size G /4 Width across flats x x.6 depth 5

15 -Color Display Digital Flow Switch Series 7 Dimensions 7S-C4/C6/C/N One-touch fitting pplicable tube O.D. (mm) ø4 (5/") ø6 ø (5/6") ø/4" (4.) 5.5 (Max. 5.5) x one-touch fitting x.4 x.6 depth 5 7S-C4L/C6L/CL/NL 4 (4.) (Max. 5.5) One-touch fitting pplicable tube O.D. ø4 (5/") ø6 ø (5/6") ø/4" (mm)... V PF PFW PFD IF x one-touch fitting x.4 6 x.6 depth 5 9

16 Series 7 Dimensions 7S-(N)/(N)/F Width across flats 7. 4 (4.) 5.5 (Max. 5.5) 7S-(N)L/(N)L/FL 5 x port size Rc /, /4 NPT /, /4 G / x.4 x.6 depth 5 4 (4.). 5.5 (Max. 5.5) Width across flats 7 x.4 x port size 6 Rc /, /4 NPT /, /4 G / 94 x.6 depth 5

17 -Color Display Digital Flow Switch Series 7 Dimensions 7S-F Width across flats. 4 (4.) 5.5 (Max. 5.5) x port size G /4 x.4 x.6 depth 5 7S-FL 5 V PF PFW. PFD IF 7 4 (4.) 5.5 (Max. 5.5) x port size G /4 Width across flats x.4 6 x.6 depth 5 95

18 Series 7 Dimensions Panel mount / Without flow adjustment valve / Straight One-touch fitting pplicable tube O.D. ø4 (5/") ø6 ø (5/6") ø/4 (mm) Panel mount / With flow adjustment valve / Straight One-touch fitting pplicable tube O.D. ø4 (5/") ø6 ø (5/6") ø/4 (mm) Panel thickness to Panel thickness to. 5.5 (Max. 5.5) Panel mount / Without flow adjustment valve 5 Panel mount / With flow adjustment valve Panel thickness to. 4.5 Panel thickness to. 5.5 (Max. 5.5) Panel Fitting Dimensions Panel Fitting Dimensions 94 or more Note) 94 or more Note) or more 4 x R or less 4 x R or less 4 or more 4 x R or less 4 x R or less 4 x R or less 4 x R or less Panel thickness to. mm Note) Piping entry direction: Minimum dimensions for bottom side piping. If using straight piping, the piping material and tubing need to be taken into consideration when designing the system. If a bend (R) is used, limit it to R or less. 96 Panel thickness to. mm Note) Piping entry direction: Minimum dimensions for bottom side piping. If using straight piping, the piping material and tubing need to be taken into consideration when designing the system. If a bend (R) is used, limit it to R or less.

19 -Color Display Digital Flow Switch Series 7 Dimensions With bracket / Without flow adjustment valve With bracket / With flow adjustment valve x (Max. 5.5) x.4 D rail mounting x n pcs Lead wire with connector ZS--D Brown White Black Blue Terminal semi-stripped ± 5 ± 5 V Cable Specifications of Lead Wire with Connector PF PFW Rated temperature Rated voltage Number of wires Nominal cross section area C V 4 WG6 PFD IF Conductor Material Construction Soft copper wire /. mm External diameter pprox..5 mm D rail (supplied by customers) Port size, F: G/4 cannot be mounted on the D rail. Insulation Material External diameter Colors Cross-linked vinyl chloride resin compound pprox.. mm Brown, White, Black, Blue Material Sheath Color Finished external diameter Oil-resistant vinyl chloride resin compound Light gray ø

20 -Color Display Digital Flow Switch Series 5 Remote sensor unit Remote sensor unit 5 How to Order 5 C4 Type Remote sensor unit Made to Order (Refer to page 99 and 94.) Rated flow range (Flow rate range). to (5) l/min 5.5 to 5 (.5) l/min 5 to 5 (5) l/min to (5) l/min ( ): Fluid: CO Symbol N N F F C4 C6 C N7 Flow adjustment valve Nil None S Yes Description Rc/ Rc/4 NPT/ NPT/4 G/ G/4 ø4 (5/") one-touch fitting ø6 one-touch fitting ø (5/6") one-touch fitting ø/4" one-touch fitting Port size Flow rate range 5 5 Calibration certificate Nil None With calibration certificate The certificate is written in English and Japanese. Other languages are available as specials. Instruction manual Nil With instruction manual (Leaflet: Japanese and English) N None Output specification No. Description nalog output ( to 5 V) nalog output (4 to m) Option (Refer to page 99.) Option (Refer to page 99.) pplicable display unit Piping entry direction Nil L Straight Bottom Different combinations of piping entry directions for and side are available as made-to-order. (Refer to page 94.) Piping Variations With one-touch fittings (C4, C6, C, N7) Female thread (,, N, N, F, F) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) With flow adjustment valve (S) 9

21 -Color Display Digital Flow Switch Series 5 Option Nil With lead wire with connector ( m) W With lead wire with connector ( m) + Rubber cover for connector (silicon rubber) Z Without lead wire with connector ZS--F ZS--D ZS--D Lead wire length m Lead wire length m Option Nil None R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) T Panel mount adapter (For without flow adjustment valve) ZS--M Mounting screw (accessory) ZS--MS Mounting screw (accessory) ZS--J Panel mount adapter B Panel mount adapter Panel Mounting bracket Piping direction: Cannot be mounted with bottom piping type. V Panel mount adapter (For with flow adjustment valve) ZS--JS Panel mount adapter V Panel mount adapter B PF PFW Mounting bracket Panel Each option is not assembled with the product, but shipped together. Made to Order Symbol X69 X694 Specification/Description Change of piping entry direction combination For details, refer to page 94 and 94. PFD IF D Rail Mounting Bracket (Order Separately) ZS R 4 5 Stations station stations stations 4 stations 5 stations D rail (supplied by customers) Port size F: G/4 cannot be mounted on the D rail. 99

22 Series 5 Specifications Model pplicable fluid Rated flow range Note) (Flow rate range) ccuracy Repeatability Pressure characteristics Operating pressure range Rated pressure range Proof pressure Dry air, N, r CO Temperature characteristics Response time Dry air, N, r, CO (ir quality grade is JIS B9.-,. to.6. and ISO57.-,. to.6..). to l/min.5 to 5 l/min to 5 l/min to l/min. to 5 l/min.5 to.5 l/min to 5 l/min to 5 l/min ±%F.S. or less ±%F.S. or less (Fluid: Dry air) ±5%F.S. or less (based on.5 MPa) ±%F.S. (5 to 5 C) ±5%F.S. ( to 5 C) kpa to 75 kpa 7 kpa to 75 kpa MPa 5 msec or s (with response time selection function: s at no-voltage input) Refer to the internal circuits and wiring examples on page 9. nalog output Voltage output Current output Voltage output: to 5 V Output impedance: kω Current output: 4 to m Max. load impedance: 6 Ω, Min. load impedance: 5 Ω Status LED s Power supply voltage Current consumption Environmental resistance Enclosure Operating fluid temperature Operating temperature range Operating humidity range Withstand voltage Insulation resistance Vibration resistance Impact resistance Note: Flow rate unit is based on standard conditions ( C, atm, 65% RH). Power ON indicator: Lights when power is turned on (Green). Flow rate indicator: Flashes when flow is applied (Green). 4 VDC ± % 5 m or less IP4 to 5 C (with no freezing and condensation) Operating: to 5 C Stored: to 6 C (with no freezing and condensation) Operating, Stored: 5 to 5%R.H. (with no condensation) VC for min. between external terminal and case 5 MΩ or more (5 VDC Mega) between external terminal and case Without orifice: to 5 Hz with a.5 mm amplitude or 9 m/s acceleration, in each X, Y, Z direction for hrs, whichever is smaller. With orifice: to 5 Hz with a.5 mm amplitude or 9.6 m/s acceleration, in each X, Y, Z direction for hrs, whichever is smaller. 49 m/s in X, Y, Z directions times each 9

23 -Color Display Digital Flow Switch Series 5 Piping Specifications / Mass Port size Part no. Rc / Rc /4 N NPT / N NPT /4 F F G/ G/4 C4 ø4 (5/") one-touch fitting C6 ø6 one-touch fitting C ø (5/6") one-touch fitting N7 ø/4" one-touch fitting Mass Wetted parts material Straight Without orifice: 95 g Straight Without orifice: 5 g Straight Without orifice: 55 g Bottom Without orifice: 5 g Bottom Without orifice: 5 g Bottom Without orifice: 65 g Straight With orifice: 5 g Straight With orifice: 65 g Straight With orifice: 95 g Bottom With orifice: 45 g Bottom With orifice: 75 g Bottom With orifice: 5 g LCP, PBT, Brass (Electroless nickel plated), HNBR (+ Fluoro coated), FKM (+ Fluoro coated), Silicon, u, Stainless steel 4 nalog Output nalog output [V] 5 Note: nalog output at maximum rated flow rate when CO is selected is 4.57 [V] for the voltage output type and. [m] for the current output type. nalog Voltage Output ( to 5 V) Max. rated flow value Model [l/min] 5-- (5) (.5) (5) 5-- (5) ( ): Fluid: CO Internal Circuits and Wiring Examples 5 Main circuit Brown Black White Response time selection input Blue 4 VDC Max. rated flow value nalog output [m] 4 Max. rated flow value nalog Current Output (4 to m) Max. rated flow value Model [l/min] 5-- (5) (.5) (5) 5-- (5) ( ): Fluid: CO V PF PFW PFD IF 9

24 Series 5 Dimensions 5-C4/C6/C/N7. FLOW SENSOR POWER FLOW One-touch fitting pplicable tube O.D. ø4 (5/") ø6 ø (5/6") ø/4" (mm) (4.) 4. x one-touch fitting 9.4 x.4 5-C4L/C6L/CL/N7L One-touch fitting pplicable tube O.D. (mm). ø4 (5/") ø6 ø (5/6") ø/4"... 4 (4.) x.6 depth 5 FLOW SENSOR POWER FLOW x one-touch fitting x.4 6 With rubber cover for connector 9 x.6 depth 5

25 -Color Display Digital Flow Switch Series 5 Dimensions 5-(N)/(N)/F 7 Width across flats 7. FLOW SENSOR POWER FLOW 4 (4.) x port size Rc /, /4 NPT /, /4 G / x.4 5-(N)L/(N)L/FL. 4 (4.) x.6 depth 5 V FLOW SENSOR POWER FLOW PF PFW PFD IF x port size Rc /, /4 NPT /, /4 G / Width across flats 7 x.4 6 x.6 depth 5 9

26 Series 5 Dimensions 5-F 7 Width across flats. FLOW SENSOR POWER FLOW 4 (4.) x port size G /4 x.4 x.6 depth 5 5-FL FLOW SENSOR POWER FLOW. 7 4 (4.) x port size G /4 Width across flats x x.6 depth 5

27 -Color Display Digital Flow Switch Series 5 Dimensions 5S-C4/C6/C/N One-touch fitting pplicable tube O.D. (mm) FLOW SENSOR POWER FLOW ø4 (5/") ø6 ø (5/6") ø/4" (4.) 5.5 (Max.5.5) x one-touch fitting x.4 x.6 depth 5 5S-C4L/C6L/CL/NL. 5 FLOW SENSOR POWER FLOW One-touch fitting pplicable tube O.D. ø4 (5/") ø6 ø (5/6") ø/4" (mm)... V PF PFW PFD IF 4 (4.) 5.5 (Max.5.5) x one-touch fitting x.4 6 x.6 depth 5 95

28 Series 5 Dimensions 5S-(N)/(N)/F Width across flats 7. FLOW SENSOR POWER FLOW 4 (4.) 5.5 (Max. 5.5) x port size Rc /, /4 NPT /, /4 G / x.4 x.6 depth 5 5S-(N)L/(N)L/FL 5 FLOW SENSOR POWER FLOW. 4 (4.) 5.5 (Max. 5.5) Width across flats 7 x.4 x port size 6 Rc /, /4 NPT /, /4 G / 96 x.6 depth 5

29 -Color Display Digital Flow Switch Series 5 Dimensions 5S-F Width across flats. FLOW SENSOR POWER FLOW 4 (4.) 5.5 (Max. 5.5) x port size G /4 x.4 x.6 depth 5 5S-FL 5 V FLOW SENSOR PF POWER FLOW PFW. PFD IF 7 4 (4.) 5.5 (Max. 5.5) x port size G /4 Width across flats x.4 6 x.6 depth 5 97

30 Series 5 Dimensions Panel mount / Without flow adjustment valve / Straight FLOW SENSOR POWER FLOW One-touch fitting pplicable tube O.D. ø4 (5/") ø6 ø (5/6") ø/4 (mm) Panel mount / With flow adjustment valve / Straight FLOW SENSOR POWER FLOW One-touch fitting pplicable tube O.D. ø4 (5/") ø6 ø (5/6") ø/4 (mm) Panel thickness to Panel thickness to. 5.5 (Max.5.5) Panel mount / Without flow adjustment valve 5 Panel mount / With flow adjustment valve FLOW SENSOR POWER FLOW 9.9 FLOW SENSOR POWER FLOW 4.5 Panel thickness to. 4.5 Panel thickness to. 5.5 (Max.5.5) Panel Fitting Dimensions Panel Fitting Dimensions 94 or more Note) 94 or more Note) or more 4 x R or less 4 x R or less 4 or more 4 x R or less 4 x R or less 4 x R or less 4 x R or less Note) Piping entry direction: Minimum dimensions for bottom side piping. If using straight piping, the piping material and tubing need to be taken into consideration when designing the system. If a bend (R) is used, limit it to R or less. 9 Panel thickness to. mm Panel thickness to. mm Note) Piping entry direction: Minimum dimensions for bottom side piping. If using straight piping, the piping material and tubing need to be taken into consideration when designing the system. If a bend (R) is used, limit it to R or less.

31 -Color Display Digital Flow Switch Series 5 Dimensions With bracket / Without flow adjustment valve With bracket / With flow adjustment valve x.4 FLOW SENSOR FLOW SENSOR 4 6 POWER FLOW 4 6 POWER FLOW 4 x (Max. 5.5) D rail mounting Lead wire with connector ZS--D x n pcs Brown White Black Blue Terminal semi-stripped FLOW SENSOR POWER FLOW FLOW SENSOR POWER FLOW FLOW SENSOR POWER FLOW ± Cable Specifications of Lead Wire with Connector 5 ± 5 V PF PFW Rated temperature Rated voltage Number of wires Nominal cross section area C V 4 WG6 PFD IF Conductor Material Construction Soft copper wire /. mm External diameter pprox..5 mm D rail (supplied by customers) Port size, F: G/4 cannot be mounted on the D rail. Insulation Material External diameter Colors Cross-linked vinyl chloride resin compound pprox.. mm Brown, White, Black, Blue Material Sheath Color Finished external diameter Oil-resistant vinyl chloride resin compound Light gray ø Connects to the series. 99

32 Series 7/5 Common Specifications Pressure Loss (Pressure: 5 [kpa]) 7, 5 / For (l/min).5 75, 55 / For 5 (l/min). Pressure loss (kpa) Pressure loss (kpa) Flow rate (l/min) Flow rate (l/min) 75, 55 / For 5 (l/min) 4 7, 5 / For (l/min) 4 Pressure loss (kpa) Pressure loss (kpa) Flow rate (l/min) 4 6 Flow rate (l/min) Flow Characteristics 7, 5 / For (l/min) 5 75 (kpa) (kpa) 75, 55 / For 5 (l/min) (kpa) Flow rate (l/min) 5 (kpa) Flow rate (l/min) 75 (kpa) (kpa) 5 5 Number of needle rotations 5 5 Number of needle rotations 75, 55 / For 5 (l/min) Flow rate (l/min) 6 (kpa) 75 (kpa) 4 (kpa) 7, 5 / For (l/min) Flow rate (l/min) (kpa) 75 (kpa) 6 4 (kpa) Number of needle rotations Number of needle rotations

33 -Color Display Digital Flow Switch Series 7/5 Parts Description 7 LED display Output () indicator Output () indicator Button Piping port 5 Power confirmation indicator (Green) Construction S Flow rate confirmation indicator (Green) Button Button Body Flow adjustment valve Knurled lock nut Through-hole Description Output () indicator (Green) Output () indicator (Red) LED display Button Button Button Reset Body Flow adjustment valve Piping port Knurled lock nut Power confirmation indicator (Green) Flow rate confirmation indicator (Green) Item Illuminates when the output () is turned on. Flashes when overcurrent error occurs. Illuminates when the output () is turned on. Flashes when overcurrent error occurs. Indicates the flow rate, set mode state and error code. The display color can be selected between red and green according to the output () status. Selects the operation mode and increases the set value for ON and OFF. Used to transfer to peak indication mode. Selects the operation mode and decreases the set value for ON and OFF. Used to transfer to bottom indication mode. Used to make changes in each mode and to enter the set value. Reset function is activated by pressing and buttons simultaneously. Returns the indicated value to zero and clears errors. Main body of the flow switch Orifice mechanism to adjust the flow rate Connection port for piping Used to fix the needle. Illuminates when power is supplied. Flashing interval changes according to flow rate. Flashes faster when flow rate is increased. Color changes to red when exceeding the rated flow rate. q wqoire uy! o t w!5!!4!!6! Component Parts No. Description Material Note Fitting for piping Brass Electroless nickel plated O-ring FKM Fluoro coated O-ring HNBR Fluoro coated 4 Rectifying module Stainless steel 4 5 Body PBT 6 Sensor housing LCP 7 Sensor chip Silicon Orifice Brass Electroless nickel plated 9 Seal FKM Fluoro coated Mesh Stainless steel 4 Bottom piping adapter PBT O-ring HNBR Fluoro coated Flow adjustment valve assembly PBT 4 Body B Brass Electroless nickel plated 5 Needle Brass Electroless nickel plated 6 O-ring HNBR Fluoro coated 7 O-ring HNBR Fluoro coated V PF PFW PFD IF Detection Principle!7 This MEMS sensor chip consists of upstream temperature measuring sensor (Ru) and downstream temperature measuring sensor (Rd), which are placed symmetrically from the center of a platinum thin film coated heater (Rh) mounted on a membrane, and an ambient temperature sensor (Ra) for measuring gas temperature. The principle is as shown in the diagram on the right. (a) When the gas is static, the temperature distribution of heated gas centered around Rh is uniform, and Ru and Rd have the same resistance. (b) When the gas flows from the left side, it upsets the balance of the temperature distribution of heated gas, and the resistance of Rd becomes greater than that of Ru. The difference in resistance between Ru and Rd is proportional to the gas velocity, so measurement and analysis of the resistance can show the flow direction and velocity of the gas. Ra is used to compensate the gas and/or ambient temperature. Flow Ra Ra Ru Rh Rd (a) The gas is static. Ru Rh Rd (b) The gas flows from the left side. 9

34 Series 7/5 Component Parts No. Description Model Straight piping 4 Body Lead wire with connector ( m) Rubber cover for connector (silicon rubber) side Bottom piping adapter (with pin) ZS--D ZS--F ZS--PL e w q i o 5 side Bottom piping adapter (with pin) ZS--PL 6 For straight piping Flow adjustment valve assembly (with pin) For l/min For 5 l/min For 5 l/min For l/min ZS--N ZS--5N ZS--5N ZS--N i o t Bottom piping 7 For bottom piping Flow adjustment valve assembly (with pin) For l/min For 5 l/min For 5 l/min For l/min ZS--NL ZS--5NL ZS--5NL ZS--NL One-touch fitting ø4 (5/") ø6 ø (5/6") ø/4" ZS--C4 ZS--C6 ZS--C ZS--N7 r o i y i 9 Female thread Rc / NPT / G / Rc /4 ZS-- ZS--N ZS--F ZS-- i o NPT /4 G /4 ZS--N ZS--F o Straight piping with flow adjustment valve u Bottom piping with flow adjustment valve o i 9

35 Flow Sensor Monitor Series RoHS How to Order 4 5 Output specification NPN outputs + to 5 V output NPN outputs + 4 to m output NPN outputs + External input Note) PNP outputs + to 5 V output PNP outputs + 4 to m output PNP outputs + External input Note) Note) User can select from accumulated value external reset, auto-shift and auto-shift zero. M L Instruction manual Nil With instruction manual (Leaflet: Japanese and English) N None Calibration certificate Nil None With calibration certificate The certificate is written in English and Japanese. Other languages are available as specials. Symbol Nil L Content Voltage input Current input Type Remote display unit Nil M Input specification pplicable remote type sensor unit 5(S)--- 5(S)--- Unit specification With unit switching function Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min ccumulated flow: l None Power supply / Output connector Option Power supply / Output connector ZS-- Option Nil None With sensor connector F Option Nil None Bracket E M x 5 l Panel mount adapter Panel Sensor connector (e-con connector) ZS--C- Note) Connector is not connected, but shipped together. M x 5 l Bracket V PF PFW PFD IF Note) Cable is not connected, but shipped together. B Option / Part No. Description Power supply / Output connector ( m) Bracket Sensor connector Panel mount adapter Panel mount adapter + Front protective cover Part no. Note ZS-- ZS--B With M x 5 l ( pcs.) ZS--C- pc. ZS-7-C With M x l ( pcs.) ZS-7-D With M x l ( pcs.) D Panel mount adapter Panel mount adapter + Front protective cover Panel Front protective cover Panel mount adapter Note) Options are not assembled, but shipped together. Mounting screw (M x l) Mounting screw (M x l) 9

36 Series Specifications Model Rated flow range Dry air, N, r (Flow rate range) CO Note ) Displayable range Settable range Note ) Minimum unit setting Note ) ccumulated pulse flow rate exchange value Indication unit Note ) Dry air, N, r CO Dry air, N, r CO ccumulated flow range Note 4) Power supply voltage Current consumption Sensor input Number of inputs:. to l/min. to 5 l/min. to.5 l/min. to 5. l/min to.5 l/min to 5. l/min. l/min. l/pulse.5 to 5 l/min to 5 l/min.5 to.5 l/min to 5 l/min.5 to 6. l/min to 5.5 l/min.5 to. l/min to 6. l/min to 6. l/min to 5.5 l/min to. l/min to 6. l/min. l/min. l/min. l/pulse. l/pulse Real-time flow rate l/min, CFM x - ccumulated flow l, ft x l 4 VDC (ripple ± % or less) (With polarity protection) 5 m or less : Voltage input to 5 VDC (input impedance: MΩ) : Current input 4 to mdc (input impedance: 5 Ω) to l/min to 5 l/min to 5 l/min to 5 l/min to 5 l/min to 5 l/min. l/min l/pulse Hysteresis Note 5) Hysteresis mode: Variable, Window comparator mode: Variable NPN or PNP open collector output: outputs Switch output Maximum load current: m, max. load voltage VDC (at NPN output), Residual voltage V or less (at load current m), With short-circuit protection ccumulated pulse output NPN or PNP open collector output (Same as switch output) Response time s (5 ms,.5 s, s can be selected.) Repeatability ±.%F.S. or less, nalog output accuracy: ±.%F.S. or less Voltage output: to 5 VDC ( l/min to max. rated flow rate value) Output impedance: pprox. kω, ccuracy: ±%F.S. or less (relative to display value) nalog output Current output: 4 to mdc ( l/min to max. rated flow rate value) Max. load impedance: 6 Ω (at 4 VDC), Min. load impedance: 5 Ω ccuracy: ±%F.S. or less (relative to display value) Display accuracy ±.5%F.S. ± digit or less Display method +/-digit, 7-segment LED -color display (Red/Green) Sampling cycle: times/sec Status LED s : Illuminates when output is turned ON (Green). : Illuminates when output is turned ON (Red). External input Note 6) No-voltage input (Reed or Solid state), LOW level input msec or more, LOW level.4 V or less Enclosure IP4 Operating temperature range Operating: to 5 C Stored: to 6 C (with no freezing and condensation) Operating humidity range Operating, Stored: 5 to 5%R.H. (with no condensation) Withstand voltage VC for min. between whole charging part and live part Insulation resistance 5 MΩ or more (5 VDC Mega) between whole charging part and live part Vibration resistance to 5 Hz with a.5 mm amplitude or 9 m/s acceleration, in each X, Y, Z direction for hrs, whichever is smaller. (de-energized) Impact resistance m/s in X, Y, Z directions times each(de-energized) Temperature characteristics ±.5%F.S. or less (based on 5 C) Connection Power supply / Output connection: 5P connector, Sensor connection: 4P connector Material Front case, Rear case: PBT Mass g (Without cable) 5 g (With cable) Note ) Select the sensor to connect in the initial setting. If CO is selected as the operating fluid, the value is / on the maximum side. Note ) When l/min with a minimum unit setting of. l/min is selected for the connected sensor, the upper limit of the display range is.5 l/min. When l/min with a minimum unit setting of. l/min is selected for the connected sensor, the upper limit of the display range is 5. l/min. The setting at the time of shipment is l/min with a minimum unit setting of. l/min for the connected sensor. Note ) When equipped with a unit switching function. (The SI unit (l/min or l) is fixed for types with no unit switching function.) Note 4) The accumulated flow value is cleared to when power is turned off. It is possible to select function that holds the accumulated flow value so it is not cleared. (The accumulated flow value can be held at - or 5-minute intervals.) The service life of the memory element (electronic component) is limited to million overwrite cycles (assuming 4-hour operation, 5 minutes x million cycles = 5 million minutes = 9.5 years) when 5-minute intervals are selected. Therefore, when using the holding function, calculate the service life based on the usage conditions, and use the switch within the service life. pplies to models equipped with a unit switching function. (The SI unit (l/min or l) is fixed for types with no unit switching function.) Note 5) Set to hystresis mode at the time of shipment from the factory. Can be changed to window comparator mode using push-buttons. Note 6) ccumulated external reset function at the time of shipment from the factory. uto-shift or auto-shift zero function can be selected using push-buttons. nalog Output Note: nalog output at maximum rated flow rate when CO is selected is [V] for the voltage output type and [m] for the current output type. to 5 VDC nalog output [V] 94 5 Max. rated flow value 4 to mdc nalog output [m] 4 Max. rated flow value Rated flow range. to l/min.5 to 5 l/min to 5 l/min to l/min ( ): Fluid: CO Max. rated flow value [l/min] (5) 5 (.5) 5 (5) (5)

37 Flow Sensor Monitor Series Internal Circuits NPN open collector output: outputs Max. V, m, residual voltage V or less nalog output: to 5 V Output impedance: approx. kω PNP open collector output: outputs Max. m, residual voltage V or less nalog output: to 5 V Output impedance: approx. kω Main circuit (Brown) nalog output (Gray) (Black) (White) (Blue) + 4 VDC Main circuit (Brown) nalog output (Gray) (Black) (White) (Blue) + 4 VDC NPN open collector output: outputs Max. V, m, residual voltage V or less nalog output: 4 to m Max. load impedance: Ω ( VDC) 6 Ω (4 VDC) Min. load impedance: 5 Ω Main circuit (Brown) nalog output (Gray) (Black) (White) (Blue) + 4 VDC 4 PNP open collector output: outputs Max. m, residual voltage V or less nalog output: 4 to m Max. load impedance: Ω ( VDC) 6 Ω (4 VDC) Min. load impedance: 5 Ω (Brown) nalog output (Gray) + (Black) (White) (Blue) Main circuit 4 VDC NPN open collector output with external input: outputs Max. V, m, residual voltage V or less Main circuit (Brown) uto-shift input (Gray) (Black) (White) (Blue) + 4 VDC 5 PNP open collector output with external input: outputs Max. m, residual voltage V or less (Brown) + uto-shift input Main circuit (Gray) (Black) (White) (Blue) 4 VDC V PF PFW PFD IF ccumulated pulse output wiring example Max. V, m Black White 4 5 Brown Black Max. m Blue White V or V or 5 msec 5 msec 5 msec 5 msec 95

38 Series Descriptions LCD Display Shows the current flow rate, mode setting, selected display unit, and error code. Four display modes are available, some of which use indications that are fixed either red or green, and others use indications that change from green to red. Output () Indicator (Green) Lights when the output () is turned on. Button Used for mode selection and increasing the ON/OFF setting value. lso used to switch to peak display mode. Output () Indicator (Red) Lights when the output () is turned on. SET Button Used to activate mode changes and new setting values. Button Used for mode selection and decreasing the ON/OFF setting value. lso used to switch to bottom display mode. 96

39 Flow Sensor Monitor Series Dimensions Power supply / Output connector ±. x M x.5 Thread depth Sensor connector With bracket Sensor connector (ZS--C-) Pin no. 4 to 5 V or 4 to m Terminal name N.C Bracket View V PF PFW PFD With panel mount adapter With panel mount adapter + Front protective cover IF Panel thickness dimension:.5 to 6 Panel mount adapter + Front protective cover Panel mount adapter 97

40 Series Dimensions Panel fitting dimensions Secure mounting of n ( or more) switches (horizontal) pc..4 x n pcs. +.5 x (n pcs. ) x R or less 4 x R or less 4 or more Secure mounting of n ( or more) switches (vertical).4 4 or more x n pcs. +.5 x (n pcs. ) 4 x R or less Note) If a bend (R) is used, limit it to R or less. Power supply / Output connector (ZS--) Brown 5 Black 4 White nalog output or auto-shift input Gray Blue 9 Cable Specifications Rated temperature Rated voltage Number of wires Conductor Insulation Sheath Nominal cross section area Material Construction External diameter Material External diameter Standard thickness Colors Material Standard thickness Color Finished external diameter 5 C V 5. mm Soft copper wire 4 /. mm.5 mm Cross-linked vinyl chloride resin compound pprox.. mm.7 mm Brown, Black, White, Gray, Blue Oil-resistant vinyl chloride resin compound.5 mm Light gray (Munsell N7) ø4.

41 Series Function Details Output operation The output operation can be selected from the following: Output (hysteresis mode and window comparator mode) corresponding to real-time flow rate, Output corresponding to accumulated flow, ccumulated output pulse output t the time of shipment from the factory, it is set to hysteresis mode and normal output. Indication color The indication color can be selected for each output condition. The selection of the indication color provides visual identification of abnormal values. (The indication color depends on setting.) Selection of operating fluid The fluid can be selected. If argon (r) or carbon dioxide (CO) is used, the setting needs to be changed. Note) When CO is selected, the upper limit of the measured flow rate range will be / of that for other fluids. Setting of response time The flow rate may change momentarily during transition between ON (open) and OFF (closed) of the valve. It can be set so that this momentary change is not detected. <Principle> When the switch has been in ON area for a set period of time, the output will turn on (or off). Green for ON, Red for OFF Red for ON, Green for OFF Red all the time Green all the time Dry air, N rgon CO Selection of indication unit reference The indication unit reference can be selected between standard conditions and normal conditions. Standard conditions: Flow rate converted to a volume at C and atm (atmosphere) Normal conditions: Flow rate converted to a volume at C and atm (atmosphere).5 sec..5 sec. sec. sec. Indication mode The indication mode can be selected between real-time flow rate and Real-time flow rate display ccumulated flow display accumulated flow. External input function The external input function can be selected from accumulated value external reset, auto-shift and auto-shift zero. (Input signal: Connect input line to GND for ms or more.) External reset: This function resets the accumulated value to uto-shift: when an input signal is applied. This function generates an output corresponding to the change in relation to real-time flow rate when an input signal is applied. uto-shift zero: This function displays real-time flow rate as when a positive input signal is applied in the auto shift function described above. Set values and flow rates that are relatively on the negative side are expressed by illumination of the decimal point on the far left. Indication resolution The indication resolution of the 7 and 7 series can be changed to enable values to be indicated in smaller steps. resolution resolution by. l/min by l/min by. l/min by. l/min ccumulated value hold ccumulated value is not cleared even when the power supply is turned off. The accumulated value is memorized every or 5 min. during measurement, and continues from the last memorized value when the power supply is turned on again. The life time of the memory element is million access cycles. Take this into consideration before using this function. Selection of analog output filter This selection is available when using a product with an analog output. signal with fast response speed can be generated by turning off the analog output filter. Selection of power-saving mode The power-saving mode can be selected. With this function, if no buttons are pressed for sec., it shifts to power-saving mode. t the time of shipment from the factory, the product is set to the normal mode (the power-saving mode is turned off). (When power-saving mode is activated, the decimal point flashes.) Setting of secret code The user can select whether a secret code must be entered to release key lock. t the time of shipment from the factory, it is set such that the secret code is not required. Peak/Bottom value indication The maximum (minimum) flow rate is detected and updated from when the power supply is turned on. In peak (bottom) value indication mode, this maximum (minimum) flow rate is displayed. Keylock function Prevents operation errors such as accidentally changing setting values. Zero clear function llows the user to adjust the measured flow rate indication to zero. The adjustment range is ±7%F.S. of the initial factory setting. Error indication function When an error or abnormality arises, the location and contents are displayed. Description Contents ction Flow rate error Overcurrent error System error Zero clear error Flow rate error The flow rate exceeds the upper limit of indicated flow rate range. There is a reverse flow equivalent to 5% or more. current of m or more is applied to the switch output (). current of m or more is applied to the switch output (). Possibility of internal circuit damage before factory adjustment. System error. Possibility of data memorizing failure or internal circuit damage. If zero clear is performed (by holding down and buttons simultaneously for sec.) while there is some flow, Er4 will be displayed for sec. The flow rate exceeds the accumulated flow rate range. Decrease the flow rate. Turn the flow to correct direction. Eliminate the cause of the overcurrent by turning off the power supply and then turn on it again. Stop operation immediately and contact SMC. Reset the unit, and carry out all settings again. Perform zero clear of accumulated flow rate when there is no flow. Clear the accumulated flow rate. (This error does not matter when the accumulated flow rate is not being used.) If the error or abnormality cannot be solved by the action above, please contact SMC for further investigation. 99 V PF PFW PFD IF