Three types of flow range. 0.4 to 4 L/min (PF2D504) 1.8 to 20 L/min (PF2D520) 4.0 to 40 L/min (PF2D540) Swept flow characteristics (reference)

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1 Digital Flow Switch for Deionized Water and Chemical Liquids PFD Series RoHS single controller can monitor the flow rate of different sensors. Body and New PF Tube Super PF Dust generation of particles/cc or less (average number) Karman vortex eliminates moving parts and allows low dust generation. Particle characteristics (reference) Particle ratio [number/cc] 0 or particles/cc Duration of flow [hour] The data was obtained by performing an actual 0 minutes supersonic cleaning using an average 6 MΩ cm of deionized water at class 0000 clean room ( L/min flow rate). The diameter of the measured particles ranges from 0. to 0. µm. The flow rate used during measuring is 00 cc/min. Processing chart for PFD series Remote type sensor unit ssembly Common environment Three types of flow range 0. to L/min (PFD0).8 to 0 L/min (PFD0).0 to 0 L/min (PFD0) Swept flow characteristics (reference) Ratio of resistance [kω m] -channel Flow Monitor PFD00 series Swept flow characteristics Tapered side seal minimizes dead volume to reduce accumulation of liquid pool. 000 Fill the flow path with sulfuric acid and leave it for 0 minutes. 00 fter disposing the sulfuric acid, flush the flow path out with deionized water and 0 measure the resistance rate of the fluid that is discharged from the downstream side quick recovery time Duration of flow [min] indicates little liquid pool. Tube PF PFW PFD Supersonic cleaning Double-packing Drying Body Vibration reducing seals Malfunctions (output errors) that would otherwise be caused by vibration are prevented. Clean room class 000 Shipment 8

2 B Remote Type Unit Flow rate range 0 0. to L/min 0.8 to 0 L/min 0 to 0 L/min Port size: (inch) 9 Specifications for Unit Measured fluid Detection style Rated flow range Operating pressure range Note ) Proof pressure Note ) Operating fluid temperature ccuracy Note ) Repeatability Temperature characteristics Output specifications Power supply voltage Current consumption Enclosure Operating temperature range Voltage resistance Insulation resistance Environmental resistance Standards Lead wire Weight Port size Wetted material Made to Order Pulse output nalog output /8 / / LQ series fluoropolymer fittings mounting type is also available. Refer to page 9. How to Order PFD0 PFD0 PFD0 Operating pressure [MPa] Option (Refer to page 9.) Nil C PFD 0 None e-con connector x pc. The cable and connector are shipped unassembled. PFD0 PFD0 PFD0 Liquid not to corrode nor erode deionized water and/or fluoropolymer. Viscosity: mpa s (cp) or less Karman vortex 0. to L/min.8 to 0 L/min Note ) to 0 L/min 0 to MPa 0 to 0.6 MPa. MPa 0.9 MPa 0 to 90 C ±.% F.S. (at C water) ±% F.S. (at C water) ±% F.S. (0 to 0 C, based on C) Pulse output, N channel, open drain, output for monitor unit PFD 00/0 (Specifications: Maximum load current of 0 m; Maximum applied voltage of 0 V) Voltage output Note ) to V ccuracy: ±% F.S., Min. load impedance: 00 kω (Output impedance: kω) Current output Note 6) to 0 m ccuracy: ±% F.S.or less, Max. load impedance: 00 Ω or less with VDC, 600 Ω or less with VDC to VDC ±0% 0 m or less (without load) IP6 Operating: 0 to 0 C, Stored: to 8 C in stock (with no condensation and freezing) 000 VC for min. between external terminals and case 0 MΩ or more (00 VDC measured via megohmmeter) between external terminals and case CE, RoHS Cabtire cord, cores ø., m 0 g (without lead wire) g (without lead wire) /8 inch tube / inch tube / inch tube Body: New PF, : New PF, Tube: Super PF Note ).6 to 0 L/min (0. MPa) with viscosity of mpa s ( cp) or less Note ) The operating pressure range drops according to the fluid temperature. See attached graph. Note ). times of the maximum operating pressure and varying with fluid temperature. Note ) The system accuracy when combined with PFD0. Note ) When the voltage output is selected. Note 6) When the current output is selected. Note 7) The sensor unit conforms to the CE marking. Note 8) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website ( 8 For Deionized Water and Chemical Liquids Digital Flow Switch PFD RoHS Series PFD 0 C Output specification Symbol Specification Output for monitor unit + analog output ( to V) Output for monitor unit + analog output ( to 0 m) pplicable monitor unit (monitor) model PFD00/00 series PFD00 series Refer to pages 0 and 0 for Flow Switch Precautions. For details about the Specific Product Precautions, refer to the Operation Manual on the SMC website, Click here for details. PFD 0/ Fluid temperature [ C]

3 For Deionized Water and Chemical Liquids Digital Flow Switch PFD Series How to Order Remote Type Monitor Unit PFD0 0 M 0 Output specification NPN open collector outputs PNP open collector outputs Unit specification Nil With unit switching function M Fixed SI unit Note) Note) Fixed units: Real-time flow rate: L/min ccumulated flow: L Mounting Panel mounting Specifications for Monitor Unit Refer to pages 0 and 0 for Flow Switch Precautions. For details about the Specific Product Precautions, refer to the Operation Manual on the SMC website, Click here for details. Flow rate measurement range Note ) Set flow rate range Note ) Minimum set unit Note ) ccumulated pulse flow rate exchange value (Pulse width: 0ms) Note ) Note ) Real-time flow rate Display units ccumulated flow ccumulated flow range Note ) ccuracy Note ) Repeatability Temperature characteristics PFD00/0 0. to. L/min. to.0 L/min. to L/min 0. to. L/min. to.0 L/min. to L/min 0.0 L/min 0. L/min 0. L/min 0.0 L/pulse 0. L/pulse 0. L/pulse L/min, gal (US)/min L, gal (US) 0 to L ±.% F.S. ±0.% F.S. ±% F.S. ( to C, based on C) ±% F.S. (0 to 0 C, based on C) Current consumption (No load) Weight Note ) Output specifications Environmental resistance Switch output ccumulated pulse output Enclosure Operating temperature range Voltage resistance Insulation resistance NPN open collector (PFD00) PNP open collector (PFD0) 60 m or less g Maximum load current: 80 m Internal voltage drop: V or less (with load current of 80 m) Maximum applied voltage: 0 V outputs Maximum load current: 80 m Internal voltage drop:. V or less (with load current of 80 m) outputs NPN open collector or PNP open collector (same as switch output) IP0 Operating: 0 to 0 C, Stored: to 8 C (with no condensation and freezing) 000 VC for min. between external terminal and case 0 MΩ or more (00 VDC measured via megohmmeter) between external terminal and case Standards CE, RoHS Indicator light -digits 7-segment LED Status LED s : when light is on, OUT: Green; OUT: Red Power supply voltage to VDC ±0% Response time sec. or less Hysteresis Hysteresis mode: adjustable (can be set from 0) Window comparator mode Note ) : fixed ( digits) Note ) The value varies depending on set flow range Note ) For digital flow switch with unit switching function. (Fixed SI unit [L/min or L] will be set for switch types without the unit switching function.) Note ) The system accuracy when combined with PFD. Note ) Switch output and accumulated pulse output can be selected using the control button operation during initial setting. PF PFW PFD Output Output Switch output Switch output ccumulated pulse output ccumulated pulse output Switch output ccumulated pulse output Switch output ccumulated pulse output Note ) Window comparator mode: Since hysteresis (H) will reach digits, keep P_ and P_ or n_ and n_ apart by 7 digits more. (In case of output OUT, n_, to be n_, and P_, to be P_,.) Note 6) The monitor unit conforms to the CE marking. Note 7) ccumulated flow rate is reset when the power supply turns OFF. Note 8) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website ( 8

4 PFD Series How to Order -channel Flow Monitor Remote Type Monitor Unit PFD0 Output specification ccessory / Power supply output cable ( m) 0 NPN outputs PNP outputs Nil M Unit specification With unit switching function Fixed SI unit Note) Note) Fixed units: Real-time flow rate: L/min ccumulated flow: L M Option (Refer to page 9.) Nil None C connector ( pc.) Option (Refer to page 9.) Nil B None Panel mounting Front protective cover + Panel mounting Connectable remote type sensor part is PFD-- (with analog output to V). Specifications Refer to pages 0 and 0 for Flow Switch Precautions. For details about the Specific Product Precautions, refer to the Operation Manual on the SMC website, Click here for details. pplicable flow rate sensor Flow rate measurement range Note ) Set flow rate range Note ) Minimum set unit Note ) ccumulated pulse flow rate exchange value (Pulse width: 0ms) Note ) Note ) Real-time flow rate Display units ccumulated flow ccumulated flow range Note ) Power supply voltage Current consumption Power supply voltage for sensor Power supply current for sensor Note ) input No. of inputs Input protection Output Note ) specifications Switch output (Real-time switch output, ccumulated switch output) ccumulated pulse output No. of outputs Output protection Hysteresis Response time Note ) ccuracy Note ) Repeatability Note ) Temperature characteristics Display method Status LED s Enclosure Operating temperature range Operating humidity range Standards Connection Material Weight Resistance PFD to.0 L/min 0. to.0 L/min 0.0 L/min 0.0 L/pulse PFD00/0 PFD0--. to.0 L/min. to.0 L/min 0. L/min 0. L/pulse PFD0--. to.0 L/min. to.0 L/min 0. L/min 0. L/pulse L/min, gal (US)/min L, gal (US) 0 to L, 0 to gal (US) VDC ±0% (With power supply polarity protection) m or less (Not including the current consumption of the sensor) Same as [Power supply voltage] Max. 0 m (However, the total current for the inputs is 0 m maximum or less.) to VDC (Input impedance: pprox. 800K Ω) inputs Excess voltage protection Maximum load current: 80 m NPN open collector (PFD00) Internal voltage drop: V or less (with load current of 80 m) Maximum applied voltage: 0 V Maximum load current: 80 m PNP open collector (PFD0) Internal voltage drop: V or less (with load current of 80 m) NPN open collector or PNP open collector (same as switch output) outputs ( output per sensor input) Short circuit protection Hysteresis mode: Variable (can be set from 0), Window comparator mode: Fixed (-digits) s or less ±% F.S. ±% F.S. ±% F.S. (0 to 0 C, based on C) For measured value display: -digits, 7-segment LED (Orange) For channel display: -digit, 7-segment LED (Red) Illuminates when output is OUT: Red IP6 for the front face only, the rest is IP0. Operating: 0 to 0 C, Stored: 0 to 60 C (with no freezing and condensation) Operating or Stored: to 8%RH (with no condensation) CE, RoHS Power supply / Output connection: 8P connector, connection: P connector (e-con) Housing: PBT, Monitor: PET, Backside rubber: CR 60 g (Except for any accessories that are shipped together. Note ) Fixed SI unit [L/min or L] will be set for switch types without the unit switching function. ( -M is suffixed at the end of part number.) ccumulated flow is reset when the power supply turns OFF. Note ) If Vcc side on sensor input connector part is short-circuited with the 0V side, the flow monitor inside will be damaged. Note ) Switch output and accumulated pulse output can be selected during initial setting. Note ) The system accuracy when combined with an applicable flow sensor. Note ) This product conforms to the CE marking. Note 6) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website ( 8

5 For Deionized Water and Chemical Liquids Digital Flow Switch PFD Series Set Flow Rate Range and Rated Flow Range Set the flow rate within the rated flow range. The set flow rate range is the range of flow rate that can be set on the controller The rated flow range is the range that satisfies the sensor s specifications (accuracy, linearity etc.). It is possible to set a value outside off the rated flow range, however, the specification is not be guaranteed. Flow rate range 0.L/min.8L/min 0L/min Rated flow range of sensor Set flow rate range of sensor L/min 0L/min 0L/min PFD0 0.L/min 0.L/min L/min.L/min PFD0.8L/min.L/min 0L/min L/min PFD0.L/min L/min 0L/min L/min Flow Rate Characteristics (Pressure Characteristics) PFD0 PFD0 PFD Pressure loss [MPa] PFD0/0 PFD Flow rate (L/min) Construction o! q t i o Pressure loss [MPa] !0 u!0! y w r!0 e!0 u!0!y w r e Flow rate (L/min) Parts list Number Pressure loss [MPa] Flow rate (L/min) Parts Body Tube Housing Housing B Housing C Bushing Cap Gasket O-ring Thread Lead wire Material New PF New PF Super PF PPS PPS PPS POM PPS FKM FKM Stainless steel 0 PVC PF PFW PFD! q t i 8

6 U U PFD Series Dimensions: Remote Type Unit PFD0-/ PFD0 PFD0 ø9. ø x ø. PFD ø9.0 x ø Main circuit Main circuit Output for Black PFD Brown DC(+) Blue DC( ) White nalog output Monitor PFD Main circuit Main circuit Monitor PFD Black Brown DC(+) Blue DC( ) White nalog output 8 Switch 7 output 6 + to VDC + to VDC Switch output Internal Circuits and Wiring Examples -/ nalog voltage output nalog current output - nalog voltage output Flow direction nalog output 0 Current [m] Voltage [V] Cable Specifications No. of cable wire Nominal cross-sectional area Conductor Dimension Insulator Dimension Material Sheath O.D. 0. mm pprox. 0. mm pprox. 0.9 mm Brown, White, Blue, Black Oil-resistant PVC. mm (In case of PFD0).8 0 (In case of PFD0) 0 (In case of PFD0) Flow rate [L/min]

7 For Deionized Water and Chemical Liquids Digital Flow Switch PFD Series Dimensions: Remote Type Monitor Unit 0 PFD0 - Panel mounting type SMC FLOW SWITCH 0 UNIT.8 RESET SET 6. x 7. (=.6) 8 x M 9. Note) View Panel fitting dimensions or more Internal Circuits and Wiring Examples -0 NPN ( outputs) Black input Brown DC(+) Blue DC( ) - PNP ( outputs) Black input Brown DC(+) Blue DC( ) Main circuit Main circuit OUT OUT DC(+) DC( ) OUT OUT DC(+) DC( ) + to VDC + to VDC PF PFW PFD R. or less Note) Decide the length of taking into account the size of terminal you use. The applicable panel thickness is to. mm. Corner: R. or less 87

8 PFD Series Dimensions: Remote Type Monitor Unit for Deionized Water and Chemical Liquids (-channel Controller) PFD00/ (7.). L/min L OUT SMC SET FLOW CH 6.8 Front protective cover + Panel mounting () connector (option) Panel fitting dimensions or more R or less or more 6. Front protective cover Waterproof seal Panel Panel mounting adapter pplicable panel thickness: 0. to 8 mm 88

9 U U For Deionized Water and Chemical Liquids Digital Flow Switch PFD Series Dimensions: Remote Type Monitor Unit for Deionized Water and Chemical Liquids (-channel Controller) CH connector port connector (P x ) Connector (option) r e w q Power supply / Output connector port Pin no. Terminal DC+ N.C. DC IN: to V Connector no. Cable wire color Brown Not used Blue White Power supply / Output connector (8P) q w e r t y Pin no. u i Terminal DC (+) DC ( ) CH_OUT N.C. CH_OUT CH_OUT CH_OUT N.C. Power supply / Output connector (accessory) Pin no. 8 Yellow N.C. 7 Green CH_OUT 6 Red CH_OUT Gray CH_OUT White N.C. Black CH_OUT Blue DC( ) Brown DC(+) 000 Internal Circuits and Wiring Examples PFD00 NPN ( outputs) Main circuit Brown DC(+) White CH_OUT Gray Red Green CH_OUT Blue Cable Specifications No. of cable wire Nominal cross-sectional area 8 0. mm Conductor Insulator Sheath Dimension Dimension Material pprox. 0. mm pprox. 0.9 mm Brown, White, Blue, Black, Gray, Red, Green, Yellow Heat-resistant polyethylene O.D..8 mm CH_OUT CH_OUT DC( ) + VDC PFD0 PNP ( outputs) Main circuit Brown DC(+) White CH_OUT Gray Red Green CH_OUT Blue CH_OUT CH_OUT DC( ) + VDC PF PFW PFD 89

10 PFD Series Functions/PFD Refer to the Operation Manual for information on setting and operating. Flow rate measurement selection Real-time flow rate and accumulated flow rate can be selected. flow rate of up to can be accumulated. The accumulated flow rate is reset when the power supply turns OFF. Unit switching Display GPM = gal (US)/min Real-time flow rate L/min GPM ccumulated flow L gal (US) Note) Fixed SI unit (L/min, L, m or m x0) will be set for the type without the unit switching function. Flow rate measuring unit confirmation This function allows to confirm the accumulated flow rate when real-time flow rate is selected and to confirm the real-time flow rate when accumulated flow rate is selected. Error correction For PFD00/0 LED display For PFD00/0 LED display Contents current of more than 80 m is flowing to OUT. current of more than 80 m is flowing to OUT. The set data has changed for some reason. The flow rate is over the flow rate measurement range. Contents Over current is flowing to the load of a switch output. Internal data error. Internal data error. Solution Check the load and the wiring for OUT. Check the load and the wiring for OUT. Perform the RESET operation, and reset all the data again. Use an adjustment valve, etc. to reduce the flow rate until it is within the flow rate range. Contact SMC. Solution Shut off the power supply. fter eliminating the output factor that caused the excess current, turn the power supply back on. Output types Real-time switch output, accumulated switch output, or accumulated pulse output can be selected as an output type. Real-time switch output OUT OUT is also the same. "P" Output mode Note ) "n" NO OFF n- n- Real-time flow rate Note ) Output mode is set to inverted output at the factory before shipment. ccumulated switch output OUT "P" Output mode Note ) "n" YES NO YES Hysteresis mode OFF P- ccumulated flow rate OFF n- ccumulated flow rate OFF P- P- Real-time flow rate Window comparator mode H : Hysteresis H H OFF P- P- Real-time flow rate Hysteresis mode OFF n- n- Real-time flow rate Window comparator mode H : Hysteresis H H Note ) Output mode is set to inverted output at the factory before shipment. Internal data error. ccumulated pulse output Internal data error. Internal data error. Shut off the power supply and then reset the switch. "P" OFF The flow rate is over the flow rate measurement range. Use an adjustment valve, etc. to reduce the flow rate until it is within the flow rate range. OUT Output mode 0 msec Key lock This function prevents incorrect operations such as changing the set value accidentally. Note ) "n" OFF Note) Refer to the specifications of monitor unit for the flow rate value per pulse. ccumulation clearance This is to clear the accumulated value. 90

11 For Deionized Water and Chemical Liquids Digital Flow Switch PFD Series Functions Copy function (PFD00, 0 only) Information to be copied is: Flow rate range Display mode Display unit (Only available when the unit specification is nil.) Output method Output mode Channel select function (PFD00, 0 only) Every pushing the button, channel selection... is available. The flow rate measurement of each selected channel is shown in the monitor unit. Flow rate value Changes displaying the channel shown every about seconds and its detected flow rate. Peak hold, Bottom hold display function (PFD00, 0 only) The maximum or minimum value can be held in the case where the real-time flow rate display mode is selected during the initial setting. The hold value is reset when the power supply turns OFF or the hold is released. Channel scan function (PFD00, 0 only) Option When only optional parts are required, order with the part numbers listed below. e-con connector Part no. Qty. ZS-8-C- e-con connector PFD0 PFD In addition to the connector shown above, those listed below (female contact) can be connected. Manufacturer M Japan Limited Tyco Electronics Japan G.K. OMR Corp FL -76- XN-0 Panel mounting PF Pin no. ZS--E Description Panel mounting adapter, B Note With mounting bracket Part no. ZS-6-B ZS-6-C Description Panel mounting adapter Note With waterproof seal, mounting screw Front protective cover + Panel mounting adapter With waterproof seal, mounting screw PFW Panel PFD0 Front protective cover PFD Panel mounting adapter Panel mounting adapter B Mounting bracket (accessory) PFD0 Waterproof seal (accessory) Panel Mounting screw (M x 8 L) (accessory) Panel mounting adapter 9

12 PFD Series Made to Order Please contact SMC for detailed dimensions, specifications and lead times. Fluoropolymer fittings mounting type (Space saving type) ttached insert bushings and nuts for LQ series fluoropolymer fittings on double end piping. How to Order PFD0 S Refer to page 8 for details about How to Order. S Dimensions LQ fitting size: 8 ± 7. (86) 70 External dimensions of the body are the same as those of standard products. Refer to page 86. With LQ fitting IN side (With reducer) (With reducer) Size OUT side (With reducer) (With reducer) ø9. LQ fitting size: 8 ± ø9. PFD0 S S LQ fitting size: 8 ± (86) With LQ fitting IN side (With reducer) (With reducer) Size OUT side (With reducer) (With reducer) ø.7 LQ fitting size: 9 ± 9 ø.7 PFD0 S 9 S LQ fitting size: 6 ± 9 (97) With LQ fitting IN side 6 (With reducer) 6 (With reducer) Size OUT side 6 (With reducer) 6 (With reducer) 6 ± 9. ø9.0 LQ fitting size: 6 9 ø9.0

13 SMC SMC SMC SMC SMC Made to Order Related Products How to Order Fittings for a Product with Nuts How to order a flow sensor, PFDS series, etc. nut type fittings without a nut (including insert bushings) in one place. E Union elbow P Panel mount union Union tee Union LQ Fitting type T U E SN Nut type fittings without a nut (including insert bushings) in one place pplicable tubing size Class No. pplicable tubing size (mm) Reducing 0 x 8 Class No. pplicable tubing size (inch) Reducing /8" x /" 6 8 x 6 6 x x 0 0 x 8 9 x 6 x 0 x 6 6 B B B B /" x /" /" x /8" /8" x /" /" x /8" /" x /8" " x 7/8" /" x /8" 6 9 x 6 : Basic size : With reducer Note) Please select an isometric fitting with the same size as the fitting at the flow sensor. Order example Tubing size /" x /" PFD0S---S Tubing size /" x /" IN side SMC OUT side LQEB-SN (Union elbow) LQTB-SN (Union tee) PFD0S---S LQEB-SN (Union elbow) LQTB-SN (Union tee) PF PFW Note) Flow sensors and fittings are shipped packed separately. PFD 9

14 PFD Series pplicable Fluid Compatibility checklist: Between the digital flow switch sensor material for deionized water and chemicals and the fluid selected. Fluid Compatibility cetone mmonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone Hydrogen peroxide Ethyl acetate Butyl acetate Nitric acid (except fuming nitric acid) Deionized water Sodium hydroxide Ultra deionized water Toluene Hydrofluoric acid Sulfuric acid (except fuming sulfuric acid) Phosphoric acid Concentration 0% or less Concentration 8% or less Concentration 0% or less 0 C or less Concentration 0% or less Concentration 0% or less Concentration 0% or less Concentration 0% or less Note ) The material and fluid compatibility check list provides reference values as a guide only. Note ) It is possible that some fluids are permeable depending on the type of fluid, its density and temperature. ny permeated fluid may affect the products life. Thus, when using these fluid types, verify the fluid in advance by testing it, prior to making a decision to use it. Compatibility is indicated for fluid temperatures at 90 C or less. The product does not have an explosion proof construction. Be sure to take measures to prevent the area around the product from becoming filled with an explosive gas, when using an explosive fluid. Table symbols : Can be used : Can be used under certain conditions : Cannot be used 9

15 PFD Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 0 for Safety Instructions. Return of Product Warning If the product to be returned is contaminated or is possibly contaminated with substances that are harmful to humans, for safety reasons, please contact SMC beforehand and then employ a specialist cleaning company to decontaminate the product. fter the decontamination prescribed above has been carried out, submit a Product Return Request Sheet or the Detoxification/Decontamination Certificate to SMC and await SMC s approval and further instructions before attempting to return the item. Please refer to the International Chemical Safety Cards (ICSC) for a list of harmful substances. If you have any further questions, please don t hesitate to contact your SMC sales representative. PF PFW PFD 9-