Vacuum Fittings ISO-KF ISO-K ISO-F CF. Feedthroughs

Transcription

1 Vcuum Fittings ISO-KF ISO-K ISO-F CF Feetrougs Excerpt from te Prouct Section Eition Decemer 2011

2 Contents Gener Introuction Mteris Te Rigt Connection from Oerikon Leyo Vcuum Fnge Connections Proucts ISO-KF Fnge Fittings n Components Aptors (ISO-K) Cmp Fnge Fittings n Components ISO-F n DIN EN Fixe Fnge Fittings, ND ISO-F Fixe Fnge Fittings DIN EN Fixe Fnge Fittings CF Fnges Oservtion Winows Oservtion Winows for Vcuum Systems CF Oservtion Winows CF Components Accessories for CF Components Feetrougs Current Feetrougs Eectric Feetrougs Hig Current Feetrougs Rotry Feetrougs Liqui Feetrougs Rotry / Liner Motion Feetrougs CF Feetrougs mecnic eectric Accessories for Feetrougs Connectors CF Liqui Feetroug Ony vie for purcse in Nort n Sout Americ ISO-KF Fnge Fittings n Components Aptors (ISO-K) Cmp Fnge Fittings n Components ISO-F n DIN EN Fixe Fnge Fittings ANSI Fittings For informtion on vcuum greses pese refer to Prouct Section Ois/Greses/Luricnts LEYBONOL. 02

3 Gener Introuction Accoring to DIN , te term Utr-ig Vcuum (UHV) esigntes te pressure rnge eow 10-7 mr. Sever pysic quntities, suc s men free pt, monoyer time, fow ensity of te prtices impinging on te ws, ek rte n te egssing rte re of significnce in te crcteriztion of tis pressure rnge. For te efinitions of tese quntities refer to tecnic puictions on tis suject. In orer to ttin or mintin pressures eow 10-7 mr, te foowing preconitions must e met: - Te vpor pressure of te pump fui or uricnt sou e in ccornce wit te esire utimte pressure - te ek n egssing rtes of te entire pprtus incuing its insttions must e extremey ow. Genery, ot ek rte n ckstreming effects troug te pump cn e kept t sufficienty ow eves y using suite UHV seing mteris n pumps. However, sufficienty ow outgssing rte cn ony e cieve y king out te entire pprtus t tempertures of out 300 C (572 F) for onger perio of time. It is ony uner tese conitions tt te mono-yers of toms or moecues, wic ttc quite firmy to te surfces of te vcuum pprtus incuing its insttions, re esore. Consequenty, components for UHV systems re genery me of stiness stee. Met gskets, cermic feetrougs n kee oservtion winows re use excusivey. For ppictions in te extreme UHV rnge (XHV) te outgssing rte of te CF fnges n te UHV components cn e reuce y out two orers of mgnitue y speci egssing process. Te ig stnr of eveopment n mnufcture comine wit te use of ig quity mteris gurntee tt UHV components from Oerikon Leyo Vcuum re e to meet even te most emning requirements. Avntges to te User - Stiize Oerikon Leyo Vcuum knife-ege - Hig reiiity - Speci knife ege profies ensure te igest egree of ek tigtness - Fnge connection cn e ke out up to 450 C (842 F) - Esy to sseme, eium-tigt - Syetric fnge connection - Equ seing profies - Sm outsie imeter wit respect to te nomin wit - Cn e joine y weing or rzing using ny esire process, so wit oter nicke cromium stee gres - For use eiter wit ft gsket me of OFHC copper (oxygenfree) or FPM (FKM) O-ring - Sef-centering - Fixe n rotry fnges in most ny size 03

4 Tese Arguments Prove Oerikon Leyo Vcuum s QUALITY - Aviiity of components t sort notice - Wor-wie vice t ny time to nswer your questions reting to vcuum systems - Utiiztion of most vnce mnufcturing metos - Environment-frieny cening ts wit compete wste ispos n recycing fciities - Environment-frieny n secure pckging - Tot Quity Mngement metos uring processing stges - Controe mteri quity - Comptie to your existing fnges of te sme system - Higy ek-tigt own to ek rtes of 1 x 10-9 mr x x s -1 ; components re sujecte to eium ek test - Low outgssing rtes of te mteris troug - coice of te rigt mteri quity, especiy for vcuum pprtus - exceent cening metos - Documenttion vie for components - Te we-proven Oerikon Leyo Vcuum geometry for te cutting eges Te stiize Oerikon Leyo Vcuum profie for te cutting eges Digrtic view Prti view - Forge stee mteris of ig tensie strengt n ensity - Mteri quity for stnr ppictions DIN correspons to AISI Tigty cecke, cose imension toernces for te entire seing geometry - Low egssing rtes of te tue mteri use Avntges Reie seing of UHV connections over unres of eting cyces Bot nut pte Copper gsket Inner prt Bots Copper gsket Nut Fixe CF fnge Rotte CF fnge 04

5 Gener Mteris Vcuum systems (i.e. systems for pressures rnging from 2.5 r to 10-9 mr (1.9 x 10-3 Torr to 0.75 x 10-9 Torr)) re quicky n esiy sseme owing to te mour construction principe wic is se on intercngee stnr components y mens of vcuum-tigt, emounte fnge connections. Iniviu components my e excnge esiy t ny time. Depening on te intene use n size of te connection, fnges of ifferent types ve een eveope. Te KF fnge connection ws eveope y Oerikon Leyo Vcuum mny yers go n s een wiey ccepte y users of vcuum equipment. Tis prouct section ists fnge connections n fittings incuing ptors for utr-ig vcuum components. Components mrke wit [< 1000 mr (< 750 Torr)] re not owe for use t pressures exceeing 1000 mr s. Te components n fnge connections re intene for use in connection wit vcuum systems. Tey ve not een esigne to support mecnic os. A os must e supporte seprtey t te connection components. Stiness Stee Germn AISI/ DIN Designtion Mteri No. SAE X5 CrNi X10 CrNi S L X2 CrNi X12 CrNi X5 CrNiMo L X2 CrNiMo L X2 CrNiMo X10 CrNiTi Ti X6 CrNiMoTi X5 CrNiN 18 9 Auminum Germn AISI DIN Designtion Mteri No AA A 99.5 w AA 6012-T6 AMgSiP AA 2011-T352 ACuBiP (AA) GD-ASi8Cu F (AA) AMgSi T6 AMgSi (AA) AMgSi1 Stee Germn AISI DIN Mteri No. Designtion St St CK CK 35 Gskets Coe Cemic Typic Designtion Designtion Tre Nme CR Coroprenecoutcouc Neoprene FPM (FKM) Fuorcoutcouc Viton NBR Acryonitrieutienruer Perunn PTFE Poytetrfuoretyene Tefon EPDM Etyene propyene ien ruer Hoses n Tues Coe Cemic Typic Designtion Designtion Tre Nme NR Ntur ruer (AA) GK AISi 10 Mg PVC Poyvinycorie Fnge Designtions (AA) GK ASi 10 Mgw Te esigntions use y Oerikon Leyo Vcuum for cmp fnges, fixe fnges (ote) n cor fnges wit retining rings correspon ot to te interntion stnrs 1) n to te usu nomencture in vcuum tecnoogy X GD-ASi 12 1) Te nomin wit correspons ony pproximtey to te inner imeter, i.e. is not necessriy ientic to te inner imeter. Differences in te ctu inner imeter re quite norm in prctice n o not contrvene stnrs. 05

6 Te Rigt Connection from Oerikon Leyo Vcuum 7 ISO-F KF fnges 2 Centering ring wit O-ring gsket 3 Cmping ring KF cmp fnge connection 2. Aptor reucer ISO-K KF 3. Centering ring wit O-ring gsket 4. Fexie vcuum tuing 5. Cmping quick-reese ring 6. Tee 7. Cmp 8. Eow 9. PVC coie vcuum tuing 10. Cross 1 Fnge 11. Bnk fnge 12. Sm fnge wit ose nozze 2 Vcuum seing isk consisting ISO-KF of centering ring n O-ring gsket wit outer support ring 3 ISO-K fnge 4 Bot wit nut 5 Cor fnge wit retining ring ISO-K fnge 2 Centering ring wit O-ring gsket n outer support ring 4 3 Cmp ISO-K cmp fnge connection ISO-K CF CF fnge connection 2. Reucer / ISO-K-CF 3. Aptor CF-ISO-K/KF Doue cross 5. Ajustment piece 6. Eow 7. Cermic intermeite piece 8. Tee 9. UHV oservtion winow 10. Bnk fnge 1. ISO-K fnge 2. Centering ring wit O-ring gsket n outer support ring 3. Cmp 4. Tee 5. Cross wit ter 10/40 KF fnges 6. Eow 7. Fexie vcuum tuing 8. Cross 9. Intermeite fnge wit guge port 10. Cmp fnge wit tuution 11. Bnk fnge 12. Fexie compenstion eement 06

7 Fnge Connections ISO-KF Connection Te ISO-KF connection (to DIN n ISO 2861) permits rpi fitting n repcement of components in vcuum systems. It consists of two syetric KF fnges (1), centering ring wit O-ring gsket (2) n cmping ring (3). Hig vcuum tigt KF connections cn e me witout te use of toos simpy y turning te wing nut of te cmping ring. 1 Sm fnge 2 Centering ring wit O-ring 3 Cmping ring 4 Outer centering ring wit O-ring ISO-K Cmp Fnge Connection ISO-KF fnge connection Te cmp fnge connection (to DIN n ISO 1609) ows components from 63 to 630 to e connecte in ny position regress of te ot oe rrngement on ny fixe fnges. It consists of two cmp fnge components (1), centering ring (2) wit n outer ring encosing te O-ring gsket, n sever cmps (3) wic te connection is sseme n tigtene wit. Since te centering ring cn e firmy inserte into te centering groove of te fnge, even orizont connections re quicky n esiy fitte. 1 Cmp fnge 2 Centering ring n O-ring wit outer supporting ring 3 Cmp ISO-K cmp fnge connection ISO-F / DIN Fixe Bote Fnge Fittings Wit te pproprite cor fnges, te cmp fnge cn e connecte to vrious fixe ote fnge systems (ISO-F, DIN EN , etc.) see figures in section ISO-F n DIN EN Fixe Fnge Fittings. 1 ISO-K fnges 2 Vcuum seing isk consisting of centering ring n O-ring wit outer support ring 3 Retining rings 4 ISO-F cor fnges 5 Bot wit nut Cmpe fnge connection wit cor fnges 07

8 Bke Out Tempertures for te Gskets CR n FPM (FKM) gskets cn e inserte in iste fnge types, wie uminum gskets my e use for iger vcuum requirements. CR gskets cn e use in te temperture rnge from -40 C to +100 C [-40 F to +212 F] (mx. keout temperture), FPM (FKM) gskets from -15 C to +150 C [+5 F to +302 F] (mx. keout temperture). Auminum gskets from -196 C to +200 C [-321 F to +392 F] (mx. keout temperture grient; T mx. 2.5 /min). 1 Fnge to DIN EN ND6 2 Seing isk consisting of centering ring n O-ring wit outer support ring 3 ISO-K fnge 4 Bot wit nut 5 Cor fnge wit retining ring to DIN EN ND6 Connection etween DIN EN ND 6 fnge n n ISO-K fnge wit DIN EN cor fnge Proucts ISO-KF Fnge Fittings n Components 16 ISO-KF to ISO-50 KF Auminum Design (to DIN ) [Tues simir DIN ] Te sm fnge connection eveope y Oerikon Leyo Vcuum s ecome te sis of te interntion stnr for vcuum tecnoogy. Avntges to te User - Quick, sfe n reie - No toos re nee to provie vcuum-tigt se - Suite own to pressures of 10-7 mr (0.75 x 10-7 Torr) - Esy to issseme n cen - In te cse of speci requirements s to egssing for te purpose of reucing te outgssing rte n in cse of speci requirements s to corrosion re-sistnce, we recoen te use of stiness stee components. Quick Cmping Ring Avntges to te User - Quick n effective fitting n isssemy - Cn e fitte wit one n- Cosing ction vi ever wit cmping spring - Corrosion resistnt 16 ISO-KF to ISO-50 KF Stiness Stee Design (to DIN ) [Tues simir DIN ] Avntges to te User - Quick, sfe n reie - Cn e ke out up to 200 C (392 F) wen using met ses - Cn e egsse up to 150 C (302 F) wit FPM (FKM) gskets - Wit met ses suite for pressures own to 10-9 mr (0.75 x 10-9 Torr) - Corrosion resistnt - Low egssing rte - For stnr ppictions invoving pressures up to 2.5 r (1.9 x 10 3 Torr) s. even wit outsie ring resp. utr seing ring n 3-prt cmping ring 5 r - Cn e egsse up to 200 C (392 F) wit UHV uminum rings or isks Fexie Compenstion Eements Vcuum systems n pump systems often require components wic re cpe of protecting sensitive instruments ginst impcts or excessive virtions wie inking tues t te sme time. Avntges to te User - Esy n quick to inst - Sfe n reie - Tues my e turne in ny irection - No centering n seing ring require - Cpe of witstning tempertures up to 80 C (176 F) - Suite for pressures own to 10-5 mr (0.75 x 10-5 Torr) 08

9 Fitting centering ring to KF component Quick cmping ring Sm fnge connection wit utr seing ring Fitting n eow Cmping ring for utr seing isk Sm fnge connection wit cmping ring 1 Sm fnge port 2 Housing w wit tree tp 3 Cw 4 Centering ring Sm fnge connection Sm fnge components me of stiness stee Nomin imeter 10 ISO-KF 16 ISO-KF 25 ISO-KF 40 ISO-KF 50 ISO-KF A B C D Numer of cws

10 Centering Rings (Auminum /Stiness Stee ) wit O-Ring (CR / FPM (FKM)) 1 ø 1 ø Dimension rwing for te centering rings wit O-ring 1 1 ISO-KF Orering Informtion Auminum/CR Auminum/FPM (FKM) Stiness stee/fpm (FKM) Centering Ring Aptors (Auminum /Stiness Stee ) wit O-ring (NBR / FPM (FKM)) 1 ø ø 2 ø 1 Dimension rwing for te centering ring ptors wit O-ring ISO-KF 10/16 20/25 32/ Orering informtion Auminum/FPM (FKM) Auminum/NBR Stiness stee/ FPM (FKM) Centering Rings (Stiness Stee) wit Sintere Met Fiter (Stiness Stee n O-Ring (FPM (FKM)) 1 ø 1 ø Dimension rwing for te centering rings wit sintere met fiter n O-ring 1 1 ISO-KF Orering informtion Stiness stee Air trougput t 20 C (68 F) n 200 mr ifferenti pressure pprox. 1 m 3 x -1 x cm 2 ; pore size: 20 µm Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 10

11 Centering Rings wit Fine Fiter (Stiness Stee ), O-Ring (FPM (FKM)) 1 ø 1 ø 2 ø Dimension rwing for te centering rings wit fine fiter ISO-KF Orering informtion Stiness stee Fiter mteri: Stiness stee mes , size of pore: 4 µm, seprtion gre: 1 µm prtices to 98% (Fiter mteri not vie sepertey) Outer Centering Rings (Auminum ) wit O-Ring (CR / FPM (FKM)) 1 ø ø 1 Dimension rwing for te outer centering rings wit O-ring ISO-KF 1 1 Orering informtion Auminum/CR Auminum/ FPM (FKM) 10/16 20/25 32/ Utr Seing Rings (Auminum ) ø 1 ø2 ø Dimension rwing for te utr seing rings ISO-KF 1 2 Orering Informtion Auminum (set of 3 pieces) 10/16 20/25 32/ Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 11

12 Outer Support Rings (Stiness Stee ) for Utr Seing Rings ød ø Dimension rwing for te outer support rings ISO-KF D Orering Informtion Stiness stee 10/16 20/25 32/ Spre O-Ring Gskets for KF Fnge Connections Dimension rwing for te spre O-ring gskets for KF fnge connections s ISO-KF s Orering Informtion FPM (FKM) (set of 10 pieces) ) ) ) ES ES ES ES ES ES ES ) Aso for ptor/centering rings Cmping Rings (Auminum ) Dimension rwing for te cmping rings ISO-KF A B C Orering Informtion Auminum Iniviuy pcke for USA Mx. torque t te wing nut: 2 Nm 10/16 20/25 32/ Quick Cmping Rings (Auminum ) r x 1 x 1 Dimension rwing for te quick cmping rings ISO-KF 1 r x x 1 Orering Informtion Auminum 10/16 20/25 32/ Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 12

13 Cmping Cors (Auminum ) for Utr Seing Rings Dimension rwing for te cmping cors for utr seing rings D ISO-KF D Hexgon socket screw to DIN 912 Orering Informtion Auminum 10/16 20/25 32/ M 4 x 30 M 6 x 30 M 8 x 35 M 8 x 50 M 4 x 1.18 M 6 x 1.18 M 8 x 1.38 M 8 x Cw, compete (Auminum ) M6 Top View Dimension rwing for te cw, compete 1 ISO-KF Orering Informtion Auminum (Set of 4 pieces) KF Fnges wit Sort Tuution (Stee / Stiness Stee ) ø 1 ø 2 Dimension rwing for te KF fnges wit sort tuution 1 2 ISO-KF Orering Informtion Stee ISO-KF Orering Informtion Stiness stee Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 13

14 KF Fnges wit Long Tuution (Stee / Stiness Stee ) ø 1 ø ISO-KF Orering Informtion Stee Dimension rwing for te KF fnges wit ong tuution ISO-KF 1 2 Orering Informtion Stiness stee Bnk Fnges (Auminum / Stiness Stee ) ISO-KF Dimension rwing for te nk fnges Orering Informtion Auminum Stiness stee Pipe Ben 90 (Stiness Stee ) / Mitre Eow 90 (Auminum ) 1 Dimension rwings for te pipe ens 90 (stiness stee, eft) n te mitre eows 90 (uminum, rigt) 1 ISO-KF Conuctnce /s Orering Informtion Auminum Stiness stee Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 14

15 Tees (Auminum / Stiness Stee ) Dimension rwing for te tees 1 1 (uminum) 1 (stiness stee) Conuctnce ISO-KF /s Orering Informtion Auminum Stiness stee Wy Crosses (Auminum / Stiness ) Dimension rwing for te 4-wy crosses Conuctnce ISO-KF /s Orering Informtion Auminum Stiness stee Wy Reucer Crosses wit 16 Fnges (Auminum / Stiness Stee ) Dimension rwing for te 4-wy reucer crosses wit ter 16 fnges / 1 ISO-KF 1 Orering Informtion Auminum Stiness stee 25/16 40/16 50/ Reucers (Auminum / Stiness Stee ) 1 / 1 ISO-KF 25/16 40/16 40/25 50/ Dimension rwing for te reucers Orering Informtion Auminum Stiness stee Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 15

16 Intermeite Pieces (Auminum / Stiness Stee ) Dimension rwing for te intermeite pieces ISO-KF Orering Informtion Auminum Stiness stee Beows (Stiness Stee ) wit Fnges (Stiness Stee ) Dimension rwing for te eows wit fnges W tickness Compression ISO-KF Tension mx. nge egress 1) Lter motion Orering Informtion Stiness stee ±21 ±17 ±15 ±15 ±4 ±3.5 ±7 ±8 ±0.16 ±0.14 ±0.28 ± ) Wen utiizing te mximum ening nge, no extension ong te xi xis wi e possie! Vcuum Hoses 1) wit Fnges (Stiness Stee ) Dimension rwing for te vcuum oses wit fnges ISO-KF Mx. ening rius (insie) wit mutipe ening wit singe en W tickness Orering Informtion = 250 ( 9.84 ) = 500 (19.69 ) = 750 (29.53 ) = 1000 (39.37 ) ) Fexie vcuum oses must e inke to n extern mecnic ssemy PVC Coie Vcuum Hoses witout Fnges 1 Dimension rwing for te PVC vcuum oses 1 Lengt Orering Informtion PVC coie vcuum ose ISO-KF m y te metre y te metre y te metre Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 16

17 KF Fnges wit Hose Nozze (Auminum ) ø 1 1 ISO-KF 1 (tue) Dimension rwing for te KF fnges wit ose nozze Orering Informtion Auminum Hose Cmps (Stiness Stee ) ISO-KF (m / mx.) Orering Informtion Stiness stee / / / / / / Dimension rwing for te ose cmps Eows 90 wit Hose Nozze (Auminum ) ø 1 Dimension rwing for te eows 90 wit ose nozze 1 ISO-KF 1 (tue) 1 Orering Informtion Auminum CR Compenstion Eements wit Integrte Support Ring 1 Dimension rwing for te compenstion eements wit integrte support ring D ISO-KF D ( tue toernce) 1 Lek rte mr x x s -1 Orering Informtion Stiness stee/cr x x x ) ) ) 1) Is suppie compete wit stiness stee ose cmps Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 17

18 Ruer Vcuum Hoses (NR) for Hose Nozzes 1 Dimension rwing for ruer vcuum oses 1 Lengt ISO-KF m Hrness Sore A Temperture rnge C F Orering Informtion Ruer vcuum ose y te metre y te metre y te metre 55 ±5 55 ±5 55 ±5-30 to to to to to to KF Fnges wit Hose Nozzes (Auminum n Stiness Stee ) ø 1 ø 1 Dimension rwing for te KF fnges wit ose nozze 1 1) ISO-KF Orering Informtion Auminum Stiness stee 1) Aso recoene insie imeter for te ose KF Fnges wit Compression Fitting for Gss/Met/Pstic Tues (Auminum /FPM (FKM)) 1 1,5 mx. Di ore Dimension rwing for te KF fnges wit compression fitting ISO-KF (gss) 1 Di ore -mx. ±0.2 ±0.008 Orering Informtion Compression Fitting Seing set (FPM (FKM)) for ig tempertures (150 C (302 F)) (set = 10 pieces) Ony for pressure 1000 mr ( 750 Torr) Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 18

19 Screw-in Fnges (Stiness Stee / FPM (FKM)) SW G 2 1 Dimension rwing for te screw-in fnges ISO-KF G (ccoring to DIN ISO 228-1) SW (wit cross fts) Orering Informtion Stiness stee Stiness stee Nicke-pte stee , /8" 1/2" M 16 x 1.5 1" 1/8" 1 1/2" 3/8" 1/2" M 16 x " 1/8" 1 1/2" Screw-on Fnges (Stiness Stee / FPM (FKM)) SW G Dimension rwing for te screw-on fnges ISO-KF G (ccoring to DIN ISO 228-1) SW (wit cross fts) /8" 1/2" 1" 1 1/2" Orering Informtion Stiness stee ISO-KF Fnges wit Groun Cone (Stiness Stee ) Dimension rwing for te KF fnges wit groun cone ISO-KF KNS - / 1 Tper Orering Informtion Stiness stee / / / / / / :10 1:10 1: Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 19

20 Aptors Aptors/Reucers ISO-KF ISO-K 1 1 Dimension rwing for te ptor reucers ISO-KF ISO-K; eft: uminum; rigt: stiness stee s t 1 1 s t Weigt ISO-KF ISO-K kg s Orering Informtion Stiness stee Auminum Aptors ISO-KF CF (Stiness Stee ) 1 1 Dimension rwing for te ptors CF ISO-KF 1 (tue) CF CF Orering Informtion Stiness stee DIN Copper Gskets for CF-Fnges (OFHC-Copper - Oxygen-Free) Set of 10 Set of 5 Insie imeter CF Orering Informtion OFHC Copper x x x x x x x Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 20

21 FPM (FKM) Gskets for CF-Fnges Set of 5 Bots, Nuts n Wsers for CF-Fnges CF x x 1 FPM (FKM) O-ring wit Support Ring Profie se, set of 2 Gsket wit support ring Degssing temperture C F Orering Informtion x x x x x FPM (FKM) Dimensions ( x ) Torque Quntity per set Bots Nuts Wsers CF Nm Orering Informtion Set / /250 M 4 x 20 M 6 x 35 M 8 x 50 M 8 x 55 M 8 x 60 M 4 x 0.79 M 6 x 1.38 M 8 x 1.97 M 8 x 2.17 M 8 x Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 21

22 (ISO-K) Cmp Fnge Fittings n Components Attcing cmp fnge component n fitting of te cmp Tigtening te cmping ot ISO-K cmp fnge connection Fnge Components 63 to 630 ISO-K (to DIN in ine wit ISO 1609/3669) Te cmp fnge connection ws introuce to te vcuum inustry y Oerikon Leyo Vcuum. Since te fitting of cmp fnges oes not epen on ny ot oes in te fnge, tese components my e inste in ny orienttion. Avntges to te User - Quick to fit - Sfe n reie - Cn e turne in ny irection - Esy to issseme, tus esy to cen - Suite for pressures own to 10-7 mr (0.75 x 10-7 Torr) wen using O-rings n own to 10-9 mr (0.75 x 10-9 Torr) wen using met gskets - Esiy pte to oter fnge systems - Mounte y mens of cmps (ISO- K) or cor fnge wit retining ring (ISO-F, DIN EN ) - Cmp fnge components re use wit CR or FPM (FKM) gskets or wit utr seing isks me of uminum - Degssing tempertures for CR, mx. 100 C (212 F) for FPM (FKM), mx. 150 C (302 F) for te utr seing isk, mx. 200 C (392 F) Te pressure rnge for te ppiction epens in ec cse on te seing meto wic is use n is tus imite for utr seing isks to 10-9 mr (0.75 x 10-9 Torr), for FPM (FKM) gskets to 10-8 mr (0.75 x 10-8 Torr) n for CR see components to 10-7 mr (0.75 x 10-7 Torr). Fexie Compenstion Eements (CR) Vcuum systems n pump systems often require components wic re cpe of protecting sensitive instruments ginst impcts or excessive virtions wie inking tues t te sme time. Avntges to te User - Esy n quick to inst - Sfe n reie - Tues my e turne in ny irection - No centering ring n seing ring is neee since te se is provie y te smoot tue surfce - Cpe of witstning tempertures up to 100 C (212 F) - Suite for pressures own to 10-5 mr (0.75 x 10-5 Torr) 1 Cmp fnge 2 Cw 3 Bse pte 4 Cw Nomin imeter 063 ISO-K 100 ISO-K 160 ISO-K 200 ISO-K 250 ISO-K 320 ISO-K 400 ISO-K 500 ISO-K 630 ISO-K A B C Numer D Screws Numer of cmps for cws of cws M 8 x M 8 x M 8 x M 8 x M 10 x M 10 x M 10 x M 10 x M 10 x M 10 x M 12 x M 12 x M 12 x M 12 x M 12 x M 12 x M 12 x M 12 x

23 Centering Rings (Auminum / Stiness Stee) wit O-Ring (CR/FPM (FKM)) 2 s ISO-K Dimension rwing for te centering rings wit O-ring s Orering Informtion Auminum/FPM (FKM) Auminum/CR Stiness stee/fpm (FKM) ISO-K s Orering Informtion Auminum/ FPM (FKM) Auminum/CR Centering Rings wit Fine Fiter (Stiness Stee ), O-Ring (FPM (FKM)) ø ø2 1 ISO-K ø Dimension rwing for te centering rings wit fine fiter Orering Informtion Stiness stee Fiter mteri: Stiness stee , size of pores: 4 µm, seprtion gre: 1 µm prtices to 98% Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 23

24 Utr Seing Disks (Auminum ) 1) 1 1 Dimension rwing for te utr seing isks 1 1 ISO-K / ISO-F Orering Informtion Auminum ) Ony for cor ring connections Centering Ring Aptors (Auminum) wit O-Ring (FPM (FKM)), ISO-K to LF Stnr Dimension rwing for te centering ring ptors wit O-ring ISO-K / LF Orering Informtion Auminum/FPM (FKM) 100 / / / Cmps for ISO-K M M ISO-K 63 / / / / 630 Numer of require cmps per connection 4 / 6 4 / 6 8 / / M 1 tre M 10 M 10 M 12 M 12 M to to to to to to 1.06 to 1.38 to 1.54 to 1.93 to 1.85 Dimension rwing for te cmps, rigt: Orering Informtion 1 set = 4 cmps Gvnize stee Stiness stee Exct numers of cmps see first pge of te section (ISO-K) Cmp Fnge Fittings n Components Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 24

25 Cws (Gvnize Stee ) for ISO-K ø Dimension rwing for te cws for ISO-K Numer of require cws per connection ISO-K tre Orering Informtion 1 set = 4 cws 63 / / / / 8 8 / / M 8 M 10 M 12 M Exct numers of cmps see first pge of te section (ISO-K) Cmp Fnge Fittings n Components Cws for Seing Groove in Bse Pte (Gvnize Stee ) for ISO-K ø Dimension rwing for te cws for seing groove ISO-K tre Orering Informtion 1 set = 4 cws 63 / / / 500 M 8 M 10 M Exct numers of cmps see first pge of te section (ISO-K) Cmp Fnge Fittings n Components Bnk Fnges (Nicke-Pte Stee / Stiness Stee ) ø 2 t 1 t 1 1 Dimension rwing for te nk fnges t t 1 ISO-K tre M 8 M 8 M 8 M 8 M 8 M 8 M 8 M 8 M Orering Informtion Nicke-pte stee Stiness stee M 8 tree ore from nomin size 500 Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 25

26 Cmp Fnges wit Tuution (Stee , / Stiness Stee ) s ø 2 ø 1 ø Dimension rwing for te cmp fnges wit tuution 1 2 s (stee) s (stiness stee) ISO-K Orering Informtion Stee , Stiness stee Weing Fnges 1 2 Dimension rwing for te weing fnges ISO-K Orering Informtion Stee Stiness stee Aptors ISO-K CF 1 2 Dimension rwing for te ptors ISO-K CF CF o. D. 1 ISO-K 2 Orering Informtion Stiness stee DIN /2" 6" 8" Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 26

27 Aptors-Reucers ISO-K KF 1 s t Dimension rwing for te ptors-reucer ISO-K KF; eft: uminum; rigt: stiness stee 1 s t Weigt ISO-K / KF kg s Orering Informtion Stiness stee Auminum / / / Reucing Fnges (Stiness Stee ) ø ø 1 ø 2 øk ø 3 Dimension rwing for te reucing fnges k ISO-K tre 160/63 160/ / / / M 8 M 8 M 8 M 10 M Orering Informtion Stiness stee Reucers (Stiness Stee) ø 1 ø Dimension rwing for te reucers 1 ISO-K Orering Informtion Stiness stee /63 250/ Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 27

28 Pipe Ben (Stiness Stee ); from 160 ISO-K Mitre Eow ISO-K Dimension rwing for te pipe ens (eft) n te mitre eows (rigt) Weigt Conuctnce kg s /s Orering Informtion Stiness stee Tees (Stiness Stee ) ISO-K Dimension rwing for te tees Weigt kg s Orering Informtion Stiness stee Wy Crosses (Stiness Stee ) 1 Dimension rwing for te 4-wy crosses ISO-K 1 Orering Informtion Stiness stee Brncing Pieces wit Lter 16/25/40 KF Fnges (Stiness Stee ) A c 40 View: Ansict: A c1 c c ISO-K Dimension rwing for te rncing pieces wit ter 16/25/40 fnges c 1 c Orering Informtion Stiness stee Cn not e use wit cor fnges ISO-F n DIN EN Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 28

29 Mesurement Fnges ø 16 1 Dimension rwing for te mesurement fnges Numer of tree oes Orering Informtion Stiness stee Recoene centering ring ISO-K tre Require cws kits Require cws kits ) Wsers n nuts for 16 KF re incue M 8 M 8 M ) ) ) 2x x x kits 4 kits 4 kits Beows (Stiness Stee ) wit Fnges (Stiness Stee ) 1 Dimension rwing for te eows ISO-K 1 Weigt kg s Compression Tension Mx. ening nge egrees 1) Lteri ispcement Orering Informtion Stiness stee , ± 30 ± 30 ± 14 ± ) Wen utiizing te mximum en, no extension ong te xi xis wi e possie! Fexie Vcuum Hoses (Stiness Stee ) wit Fnges (Stiness Stee ) 1 Dimension rwing for te fexie vcuum oses 1 Mx. ening rius wit mutipe ening wit singe en ISO-K Orering Informtion Stiness stee Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 29

30 Fexie Compenstion Eements (CR) 1 Dimension rwing for te fexie compenstion eements D D 1 ISO-K Orering Informtion CR ) ) ) 1) Is suppie compete wit stiness stee ose cmps Connections for Fexie Compenstion Eements (Auminum ) 2 1 Dimension rwing for te connections for fexie compenstion eements ISO-K 1 2 Orering Informtion Auminum O-Ring Gskets for Cmp Fnge Fittings Dimension rwing for te spre O-ring for cmp fnge fittings s ISO-K s Quntity per set Orering Informtion FPM (FKM) ES ES ES ES ES ISO-K s Quntity per set Orering Informtion FPM (FKM) Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 30

31 Bots for Cmp Fnge Fittings (Stee 8.8, zinc cote) Dimension rwing for te ots for cmp fnge fittings Dimensions Quntity per set Bots ISO-K tre Nuts Wsers Orering Informtion Set M 8 M 10 M 12 M Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 31

32 ISO-F n DIN EN Fixe Fnge Fittings, ND 6 Note: ND 6 sttes imension n not refer to n operting pressure of 6 r! In ition to cmp fnge connections, fixe wee fnges (ISO-F or to DIN EN ) re use in te re of vcuum engineering to interconnect vves, pumps n oter components. Mting cmp fnges wit tuution using cor rings n seing isk Avntges to te User - A ig vcuum se is mintine so t rge nomin wit n ig mecnic os ISO-K ISO-K DIN Eveny istriute seing force troug rge numer of ots - Cn e esiy pte to oter fnge systems ISO-F - Vcuum seing isks consist of CR O-ring se wit inner n outer uminum ring - Fixe fnges n cor fnges my so e constructe s -met ses y using utr seing isks Cor Fnge ISO-K Mting cmp fnges using ote cor rings n utr seing isk Stee DIN (ISO-F) ISO-K Comprison: Cmp fnge wit cor fnge to DIN EN n cmp fnge wit cor fnge to DIN ; ISO-F Stiness Stee Bots n nuts Retining ring Gvnize 8.8 stee Stee Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 32

33 ISO-F Fixe Fnge Fittings ISO-F Cor Fnges wit Retining Ring for use wit Cmp Fnge Fittings (Stee ) k 2 1 Dimension rwing for cor fnges wit retining ring 1 2 k Numer of oes ISO-F Orering Informtion Nicke-pte stee k Numer of oes ISO-F Orering Informtion Nicke-pte stee Vcuum Seing Disks for ISO-F Fnges (Auminum/CR) 1 Dimension rwing for vcuum seing isks 1 ISO-F Orering Informtion AIuminum/CR ISO-F Orering Informtion AI/CR Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 33

34 Spre O-Ring Gskets ISO-F Fnge Connection Dimension rwing for O-rings s s Quntity per set ISO-F Orering Informtion CR ES ES ES ES E s Quntity per set ISO-F Orering Informtion CR E E E E Utr Seing Disks (Auminum ) for ISO-F Fnges 1 Dimension rwing for O-rings ISO-K / ISO-F Orering Informtion Auminum Bots for ISO-F Fnge Connection (Stee 8.8, zinc cote) Dimension rwing for te ots for ISO-F fnge fconnections ISO-F Dimensions tre Quntity per set Bots Nuts Wsers Orering Informtion Set M 8 M 10 M 12 M Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 34

35 Bots, Nuts n Wsers for Joints wit VAT Gte Vves s Dimension rwing for te set screws, nuts n wsers ISO-F Dimensions tre s Quntity per set Bots Nuts Wsers Orering Informtion Set 40 CF ISO-F/ CF ISO-F M 6 M 8 M Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 35

36 DIN EN Fixe Fnge Fittings; Dimensions to DIN EN , ND 6 Note: ND 6 sttes imension n oes not refer to n operting pressure of 6 r! Cor Fnges wit Retining Ring (Stee ) k 1 Dimension rwing for cor fnges wit retining ring 1 k DIN Orering Informtion Stee Spre O-Ring Gskets for Vcuum Seing Disks DIN EN Dimension rwing for O-ring gskets s ISO-F s Quntity per set Orering Informtion CR ES ES ES Bots n Nuts for DIN Cor Fnge Dimension rwing for ots n nuts DIN Dimensions tre M 12 M 16 M 16 M Numer of ots/nuts require Orering Informtion ot (gvnize 8.8 stee) nut (gvnize 8.8 stee) Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 36

37 Seing Disc Assemy A B C Dimension rwing for te seing isc ssemy A B C Mteri Orering Informtion Repcee O-Ring Bun-N Viton DIN Auminum Auminum Auminum Auminum For seing ISO-K fnges see te centering rings escrie in te section (ISO-K) Cmp Fnge Fittings n Components. Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 37

38 CF Fnges Te CF fnge connection consists of two ientic fnges wit ft gsket me of OFHC copper, ots, nuts n wsers. k i.d o.d Dimension rwing for CF fnges Seing Principe Wen sseming te CF fnge connection, te ft copper gsket fits wit sigt cernce into te outer recess of te fnges n tus ssures goo centering of te fnge connection. If te fnge ots re propery tigtene ccoring to te instructions, te knife ege of te fnges penetrtes into te ft copper gsket, werey te ser ction of te outer fce of te cutting ege - s seen from te fnge xis - prouces yie pressure on te copper gsket, wie te inner fce of te ege prouces cutting ction. During tis process te copper gsket pts it-sef optimy to te microstructure of te outer knife ege. Tis expins te ig seing effect n te especiy ow ek rtes of CF fnge connections. A ri grove extening rigt up to te seing ring is provie for ek testing of te fnge connection. In orer to ensure tt te seing knife ege is not mge uring frequent use of te fnges, te convention geometry of suc knife eges for CF fnges s een eveope furter. By using te Oerikon Leyo Vcuum eveope otuse nge knife ege profie te strengt of te seing knife eges s een significnty stiize. In ition to te ctu knife ege, te fnges re provie wit concentric seing surfce for pcement of FPM (FKM) gsket or supporting ring wit FPM O-ring, wic my e ke up to 150 C (302 F) (oes not ppy to oservtion winows). Tis esign s te vntge, tt it is possie to equip te pprtus wit estomer gskets prior to fin ssemy, so tt te system cn e teste uner norm ig vcuum conitions. Outsie imeter o. D. Insie imeter i. D. Bot circe imeter k Hig Numer of oes Hoe imeter CF " 2.75" 4.50" 6.00" 8.00" 10.00" 12.00" " 1.375" 2.50" 4.00" 6.00" 8.00" 10.00" Conversion Fctors 1. Mgnetizing fie H, unit: Previousy use unit: Oerstet (Oe) 2. Strengt of te mgnetic fie B, unit: Previousy use unit: Guß (G) A x m -1 1 Oe = (A x m -1) Vs x m 2 = Tes (T) 1 G = 10-4 Vs x m 2 = 10-4 T 38

39 CF Bore Fnges, Fixe 1 1 i.d Dimension rwing for te CF ore fnges, fixe CF Outsie imeter 1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00" Insie imeter For missing imensions see t te eginning of te Section CF Fnges Orering Informtion Stiness stee DIN CF Bore Fnges, Rotte 2 1 i.d 1 2 Dimension rwing for te CF ore fnges, rotte CF Outsie imeter 1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00" Insie imeter For missing imensions see t te eginning of te Section CF Fnges Orering Informtion Stiness stee DIN CF Bnk Fnges, Fixe 1,4 i.d Dimension rwing for te CF nk fnges, fixe CF Outsie imeter 1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00" Insie imeter For missing imensions see t te eginning of te Section CF Fnges Orering Informtion Stiness stee DIN

40 CF Bnk Fnges, Rotte 1 CF Outsie imeter 1.33" 2.75" 4.50" 6.00" 8.00" 10.00" 12.00" 1 Insie imeter ,4 i.d Dimension rwing for te CF nk fnges, rotte For missing imensions see t te eginning of te Section CF Fnges Orering Informtion Stiness stee DIN CF Fnges wit Tue En i.d CF s Outsie imeter 1.33" 2.75" 4.50" 6.00" 8.00" Insie imeter s For missing imensions see t te eginning of te Section CF Fnges Dimension rwing for te CF fnges wit tue en; eft fixe, rigt rotte Orering Informtion Stiness stee DIN Tue en fixe rotte CF Reucing Fnges Outsie imeter CF " 4.50" 6.00" 6.00" 8.00" 8.00" 1 ø øk Dimension rwing for te CF reucing fnges, fixe CF k M 4 M 4 M 6 M 6 M 6 M 6 M 8 M 8 M 6 M 6 M 8 M 8 For missing imensions see t te eginning of te Section CF Fnges Orering Informtion Stiness stee DIN Mtcing stu ots

41 CF Reucing Pieces 1 CF Outsie imeter 2.75" 4.50" 6.00" 6.00" 8.00" 1 CF (tue) For missing imensions see t te eginning of te Section CF Fnges Dimension rwing for te CF reucing pieces Orering Informtion Stiness stee DIN UHV CF/KF Aptors 1 CF Outsie imeter 1.33" 1.33" 2.75" 2.75" 2.75" 4.50" 1 Dimension rwing for te CF/KF ptors 1 1 (tue) KF Orering Informtion Stiness stee DIN UHV CF/ISO-K Aptors 1 2 CF Outsie imeter 4.50" 6.00" 8.00" ISO-K Orering Informtion Dimension rwing for te CF/ISO-K ptors Stiness stee DIN

42 Oservtion Winows for Vcuum Systems Oservtion of te penomen in te vcuum cmer is very importnt for mny vcuum processes. Mesurements n monitoring cn often e ccompise ony y mens of extern instruments use uner norm tmosperic pressure conitions. Tis cs for igy trnsprent, rugge oservtion winows feturing wie nge view. Avntges to te User - Ft esign - Esy to fit n remove - Esy to cen Wie viewing nge - Cn e ke out up to 150 C (302 F) - My e comine wit KF n ISO-K components - No speci mounting components re require - Te FPM (FKM) O-ring ses ginst te tmospere (integrte centering ring) - Ec oservtion winow is sujecte to ek test (terey ensuring sfe opertion!) Viewing nge into vcuum cmer troug oservtion winow 40 ISO-KF ISO-K (mounting on mtcing fnges wit tuution) 42

43 160 ISO-K 100 ISO-K 1 40 ISO-KF 50 ISO-KF 63 ISO-K 2 ø40 ø50 ø70 ø102 ø ,5 1 O-ring 2 Gss 3 Fnge ISO-KF n ISO-K oservtion winows, fuy inste Winow imensions for te oservtion winows 100 (%) Trnsmission Wveengt (nm) 1700 Trnsmittnce s function of te wveengt for Oerikon Leyo Vcuum viewports 40 ISO-KF to 160 ISO-K for ifferent winow ticknesses Oservtion Winows Tickness of gss winow Dimeter of gss winow Viewing nge 40 ISO-KF 50 ISO-KF 63 ISO-K 100 ISO-K 160 ISO-K Te gss use is orosiicte gss (BOROFLOAT 33) wit refrctive inex of n = Dieectric numer (t 25 C (77 F)) 4.8 t 1 MHz Fnge mteri Stiness stee Gss mteri Borosiicte O-ring mteri FPM (FKM) Lek rte < 10-8 mr x /s Orering Informtion Oservtion Winows Oservtion Winows 40 ISO-KF 50 ISO-KF 63 ISO-K 100 ISO-K 160 ISO-K

44 CF Oservtion Winows Stnr gss is normy ony use for visu oservtions, for potogrpy of experiment etis n, mong oter tings, for pyrometer mesurements. Avntges to te User - Opticy pne-pre gss surfce up to just efore te ege - Fnge wit wie viewing nge Optic trnsmissivity for te CF oservtion winows s Dimension rwing for CF oservtion winows α 50 CF Tickness of te gss (s) Dimeter of viewing re () Viewing nge ( ) Spcing of te gss (), pprox. Viewing istnce Wveengt rnge nm Mteri Men trnsmission rtio % Type of gss Mx. eting rte Mx. keout temperture Orering Informtion CF oservtion winow to to to to 3000 Vcon Vcon Vcon Vcon (compen- (compen- (compen- (compenstion ring) stion ring) stion ring) stion ring) 93 in te 93 in te 93 in te 93 in te visie rnge visie rnge visie rnge visie rnge Koi Koi Koi Koi min C ( F) 400 (752) 400 (752) 400 (752) 400 (752)

45 CF Sppire Oservtion Winows Sppire exiits trnsmissivity rnge of 250 nm to 5500 nm. Te infrre imit is sifte fr in to te infrre rnge. For tis reson, gss of tis type is use in connection wit sun simution tests, Lser experiments, ig-temperture psm mesurements n spectroscopic mesurements, for exmpe. Avntges to te User - Opticy pne-pre gss surfce up to just efore te ege Optic trnsmissivity for te CF Sppire oservtion winows CF 40 s α Tickness of te gss (s) Dimeter of viewing re () Viewing nge ( ) Spcing of te gss (), pprox. Viewing istnce Wveengt rnge nm 250 to 5500 Men trnsmission rtio % > 80 Type of gs Sppire Dimension rwing for te CF sppire oservtion winows Mx. eting rte Mx. keout temperture min C ( F) (752) Orering Informtion CF sppire oservtion winows

46 CF Components CF components re mnufcture ccoring to te requirements outine in te introuctory cpter. Tey re me from seecte n corrosion resistnt types of stiness stee. Bot esign n prouction metos re suc, tt te components meet te requirements of UHV ppictions. A components re fusion wee from te insie to prevent fissures n pocket oes (virtu eks wic cnnot e octe y ek etection metos from te outsie). If weing from te outsie cnnot e voie ue to esign constrints, te weing sem penetrtes to te inner sie, te sie of te vcuum. Avntges to te User - Low egssing rtes - Hig egssing temperture - Lek rtes eow 1 x mr x x s -1 - Bsic imensions correspon to tose of te components from oter interntion mnufcturers - Bots my e inserte from te sie of te oy A crefuy impemente cening process n suite pckging for te components re essenti pre-requisites for otining pressures in te UHV rnge witin resony sort pump own times fter ssemy (proviing te reminer of te pprtus is cen too). For ppictions in te extreme UHV rnge (XHV) te outgssing rte of te CF fnges n te UHV components cn e reuce y out two orers of mgnitue y speci egssing process. 46

47 Pipe Ben 90 ; from 160 CF Mitre Eow Dimension rwing for te pipe ens 90 (eft) n te mitre eows (rigt) CF Outsie imeter 1.33" 2.75" 4.50" 6.00" 8.00" For missing imensions see t te eginning of te Section CF Fnges Orering Informtion Eow 90 wit rotte fnge Tees CF Outsie imeter 1.33" 2.75" 4.50" 6.00" 8.00" For missing imensions see t te eginning of te Section CF Fnges Dimension rwing for te tees Orering Informtion Tee wit rotte fnge on ec xis Crosses Outsie imeter CF " 2.75" 4.50" 6.00" 8.00" For missing imensions see t te eginning of te Section CF Fnges Dimension rwing for te crosses Orering Informtion Cross wit rotte fnge on ec xis

48 Doue Crosses CF Outsie imeter 2.75" 4.50" 6.00" 8.00" For missing imensions see t te eginning of te Section CF Fnges Dimension rwing for te oue crosses Orering Informtion Doue cross wit rotte fnge on ec xis Fexie Connecting Components (CF Beows) Outsie imeter CF " 2.75" 4.50" 6.00" 76 ± ± ± ± ± ± ± ±0.08 Dimension rwing for te CF eows Orering Informtion CF eows wit one rotte fnge Fexie Connecting Components (CF Corrugte Hoses) Outsie imeter A = Lengt CF " 1.33" 1.33" 1.33" Dimension rwing for te CF corrugte oses Orering Informtion CF corrugte ose wit one rotte fnge Dimensions CF 16 B C D E F G

49 Accessories for CF Components Copper Gskets for CF Fnges (OFHC Copper Oxygen-Free) 1 Dimension rwing for te copper gskets for CF fnges 2 Outsie imeter 1 Set of 5 Set of 10 CF Orering Informtion Quität: Stnr " 2.75" 4.50" 6.00" 8.00" 10.00" 12.00" x x x x x x x FPM (FKM) Profie Gsket witout Support Ring 16 CF 40 CF CF Dimension rwing for te profie gskets witout support ring Outsie imeter Bkeout temperture Set of 2 Set of 5 CF C ( F) Orering Informtion " 2.75" 4.50" 6.00" 8.00" 10.00" (320) 160 (320) 160 (320) 160 (320) 160 (320) 160 (320) x x x x x x FPM (FKM) O-ring wit Support Ring Outsie imeter CF " Bkeout temperture C ( F) 160 (320) Dimension rwing for te FPM (FKM) O-rings wit support ring Orering Informtion

50 Hexgon Bots, Set for CF Fnges Dimension rwing for te exgon ots for CF fnges Outsie imeter Dimensions ( x ) Seing torque Quntity per set Bots Nuts Wsers CF Nm (f-in) Orering informtion Set " 2.75" 4.50" 6.00" 8.00" 10.00" 12.00" M 4 x 20 M 6 x 35 M 8 x 45 M 8 x 50 M 8 x 55 M 8 x 60 M 8 x 60 M 4 x 0.79 M 6 x 1.38 M 8 x 1.77 M 8 x 1.97 M 8 x 2.17 M 8 x 2.36 M 8 x ) 1) 2 sets re require Set Screws, Nuts n Wsers for CF Fnges s Dimension rwing for te set screws, nuts n wsers for CF fnges Dimensions ( x ) s Seing torque Quntity per set Bots Nuts Wsers CF Nm (f-in) Orering informtion Set M 4 x 20 M 6 x 35 M 8 x 45 M 4 x 0.79 M 6 x 1.38 M 8 x Bots wit Bot Nut Pte n Wsers Dimension rwing for te ots wit ot nut pte n wsers Outsie imeter Dimensions ( x ) A B C Seing torque Quntity per set Bots Bot nut pte Wsers CF Nm (f-in) Orering informtion Set / " 2.75" 4.50" 6.00"/8.00" M 4 x 20 M 6 x 35 M 8 x 45 M 8 x 55 M 4 x 0.79 M 6 x 1.38 M 8 x 1.77 M 8 x

51 Notes 51

52 Feetrougs Current Feetrougs Gener Eectric feetrougs for vcuum ppictions, s we s teir corresponing connectors, compy wit te Germn VDE Regutions 0100, 0660 n 0110 Section 1. Te tter refers to ir gps n ekge pts. - A current feetrougs re teste ccoring to VDE Regutions Importnt Te speci region sfety regutions must e oserve! Tese my iffer from te regutions wic ppy in Germny! Te votges stte on te foowing pges ppy to tmosperic pressure n te rigt connector from Oerikon Leyo Vcuum. Te votge specifictions ppy so to tt prt of te feetroug wic is expose to te vcuum, provie te pressure in tese res is ess tn 10-1 mr (0.75 x 10-1 Torr). At pressures over 10-1 mr (0.75 x 10-1 Torr) votge rekowns my occur epening on te istnce etween te eectroes, te type of rrefie gs, te type of contmintion, te istriution of te eectric fie, etc. Opertors re vise to ceck ec ppiction iniviuy or to get in touc wit Oerikon Leyo Vcuum for vice. In ppictions were VDE regutions nee not e ppie, iger operting votges re permissie. Pese contct us for furter informtion regring your prticur ppiction. Te test n operting votges refer to vcuum pressure of < 1 x 10-4 mr (< 0.75 x 10-4 mr) n wen using te connectors recoene y Oerikon Leyo Vcuum. Eectric power my ony e ppie vi te extern pugs. Arevitions use in connection wit feetrougs: F Feetroug E L N P F Eectric Liqui Norm Precision Frequency HC HV L R Current Votge Liner Rotry 52

53 Eectric Feetrougs FE 16 / 9S FE 16 / 9 Vcuum connection Numer of feetrougs Votge per poe 1) Current per poe 1) V A 16 ISO-KF 16 ISO-KF Connection Vcuum sie Air sie soer connection connector connector connector Dimeter of connecting wire Test votge Pressure (soute) Bkeout temperture (feetroug, connector) () V / Hz C ( F) 0.8 (0.03) / 1.2 (0.05) 1 x x x 10-8 mr to 2.5 r 1 x 10-8 mr to 2.5 r (0.75 x 10-8 Torr to 2.5 r) (0.75 x 10-8 Torr to 2.5 r) 130 (266) 130 (266) Housing Insutor Se Contct (feetroug, connector) Stiness stee PEEK / Arit FPM (FKM) go-pte rss Stiness stee PEEK / Arit FPM (FKM) go-pte rss Orering Informtion FE 16 / 9S FE 16 / 9 Eectric Feetrougs Connector: vcuum sie Connector: ir sie 1) Loc regutions concerning use must e foowe ø 2 ø 3 ø 1 ø 4 ø 1 ø 3 ø ø ø ø ø 2 ø Dimension rwing for te feetroug FE 16/9S (eft) n te connector for ir sie (rigt) Dimension rwing for te feetroug FE 16/9 (eft), te connector for vcuum sie (mie) n te connector for ir sie (rigt) 53

54 Screw off tue ø ø 2 ø 1 2 ø 3 ø ø 1 ø ø 2 ø Dimension rwing for te feetroug FE 40/7S (eft) n te connector for ir sie (rigt) Dimension rwing for te feetroug FE 40/7 (eft), te connector for vcuum sie (mie) n te connector for ir sie (rigt) ø 1 M4 1 2 ø Dimension rwing for te feetroug FEHV 40/1 (eft) n te connector for ir sie (rigt) 54

55 FE 40 / 7S FE 40 / 7 FEHV 40 / 1 Vcuum connection Numer of feetrougs Votge per poe 1) Current per poe 1) Connection Vcuum sie Air sie Dimeter of connecting wire Test votge V A () kv / Hz 40 ISO-KF 40 ISO-KF 40 ISO-KF soer connection connector screw couping connector connector connector i. 1.8 (0.07) 15 / 50 Tigtness mr x x s -1 Pressure (soute) 1 x x x x 10-8 mr x x s -1 1 x 10-8 mr x x s -1 1 x 10-8 mr x x s -1 to 2.5 r (1.9 Torr) to 2.5 r (1.9 Torr) to 2.5 r (1.9 Torr) Bkeout temperture (feetroug, connector) Housing Insutor Se Contct (feetroug, connector) C ( F) 130 (266) 130 (266) 130 (266) crom-pte stee crom-pte stee crom-pte stee PTFE / Arit PTFE / Arit PTFE FPM (FKM) FPM (FKM) FPM (FKM) go-pte stiness stee go-pte stiness stee nicke-pte rss Orering Informtion FE 40 / 7S FE 40 / 7 FEHV 40 / 1 Eectric Feetrougs Connector: vcuum sie Connector: ir sie ) Loc regutions concerning use must e foowe 55

56 Hig Current Feetrougs - Seection of eectroes Sie into mounte feetroug - Current connection wit wter cooing ø ø1 1 ø c ø ø ø 1 ø ø 1 ø Feetroug 1 ø Wter connection Current connection strigt eectroe nge eectroe T-eectroe ø c G 3/ G 3/ Dimension rwing for te feetroug FEHC 40/1 (eft) n current connection wit wter cooing (rigt) Dimension rwings for te copper eectroes for te feetroug FEHC 40/1 56

57 FEHC 40/1 Vcuum connection Numer of feetrougs Votge Current wit wter cooing V A A 40 ISO-KF Tigtness mr x x s -1 Pressure (soute) 1 x x 10-8 mr to 2.5 r (mx. 10 r wit extern centering ring) Bkeout temperture Housing Insutor Se C ( F) 110 (230) uminum termopst n termoset FPM (FKM) Orering Informtion FEHC 40/1 Hig Current Feetrougs Current connection wit wter cooing 1) Strigt eectroe Ange eectroe T-eectroe ) not insute 57

58 Rotry Feetrougs - ISO-KF / ISO-K - For trnsmitting ig torque - Wit FPM (FKM) sft se n erings FR 25/50 N FR 63/100 N Vcuum connection Feetroug / se Sft connection () Trnsfere torque Nm Rottion spee 1) 1/min Sft o Ri N Axi N Service ife (revoutions) Tigtness, sttic mr x x s -1 Pressure (soute) Operting temperture, mx. C ( F) Bkeout temperture C ( F) Mteris expose to process mei Weigt kg (s) 25 ISO-KF 63 ISO-K FPM (FKM) FPM (FKM) i. 8 (0.31) i. 20 (0.79) x x x 10-9 mr to 1 r 1 x 10-9 mr to 1 r 50 (122) 50 (122) 110 (230) 110 (230) Stiness stee, uminum, FPM (FKM) Stiness stee, uminum, FPM (FKM) 0.2 (0.44) 2 (4.42) Orering Informtion FR 25/50 N FR 63/100 N Rotry Feetroug ) 1) Wen reuce service ife is ccepte, te rottion spee cn e increse y up to fctor of two 2) Centering ring, CR/uminum , FPM (FKM)/stiness stee ø ø 1 2 ø ø ø 1 ø 1 ø g6 8 g g g ø x g6 66 g x g g Dimension rwing for te feetroug FR 25/50 N Dimension rwing for te feetroug FR 63/100 N 58

59 Liqui Feetrougs - For H 2 O n LN 2 - Termicy insute - Especiy suite for very ot n very co ppictions FL 40K/2 Vcuum connection Feetroug / se Connection () Numer of tues Tigtness mr x x s -1 Pressure (soute) Temperture rnge C ( F) Mteri Weigt kg (s) 40 ISO-KF wee i. 8 x 1 (0.31 x 0.04) 2 1 x x 10-9 mr to 2.5 r (mx. 10 r wit extern centering ring) -200 to +150 (-328 to +302) Stiness stee 0.3 (0.66) Orering Informtion FL 40K/2 Liqui Feetroug ø ø Dimension rwing for te iqui feetroug FL 40K/2 59

60 Rotry / Liner Motion Feetrougs - Two FPM (FKM) sft ses - Direct pus/pu n rotry ctution - Wit ocking ring n option ntirottion evice M3 Dimension Te Feetrougs FNRL 16/ g g ø 2 Deti A FNRL 25/ g6 0.98g mx FNRL 16/ A ø 3 3 ø 1 FNRL 25/100 FNRL 16/50 FNRL 25/ Dimension rwing for te nti-rottion evice 2 ø Dimension Te ø Anti-rottion evice 8 = 1 from FNRL 16/50 FNRL 25/ ø Dimension rwing for te feetrougs FNRL 60

61 FNRL 16/50 FNRL 25/100 Vcuum connection 16 ISO-KF 25 ISO-KF Feetroug / se FPM (FKM) FPM (FKM) Sft connection Stroke Sft o Ri, t. mx. ispcement Torsion () () N Nm M 3 x 6 / i. 5 (M 3 x 0.24 / i. 0.20) M 4 x 8 / i. 8 (M 4 x 0.31 / i. 0.31) 50.0 (1.97) (3.94) Tigtness, sttic mr x x s -1 Operting pressure rnge (soute) 1 x x x 10-8 mr to 1 r 1 x 10-8 mr to 1 r Operting temperture, mx. Bkeout temperture C ( F) C ( F) 50 (122) 50 (122) 110 (230) 110 (230) Mteris expose to process mei Stiness stee, uminum, FPM (FKM) Stiness stee, uminum, FPM (FKM) Weigt kg (s) 0.1 (0.22) 0.2 (0.44) Orering Informtion FNRL 16/50 FNRL 25/100 Rotry / iner feetroug Anti-rottion evice

62 CF Feetrougs CF feetrougs re vie in vriety of fie-proven esigns, specificy: - Liner motion mecnic feetrougs - Rotry motion mecnic feetrougs A stiness stee eows is use to se off te CF iner n rotry feetrougs ginst te tmospere. A feetrougs cn e inste in te vcuum systems in ny orienttion. Arevitions use in connection wit feetrougs: F Feetroug E L N Eectric Liqui Norm Liner Motion Mecnic Feetrougs P Precision F Frequency HC Current HV Votge L Liner ø M6x10 50 R Rotry 15 ø33 105,5 77,5 183 Dimension rwing for te FNL 16/25 iner motion feetroug Dimension rwing for te FNL 40/50 iner motion feetroug FNL 16/25 FNL 40/50 Nomin wit Sft connection () Feetroug/se Actutor Trve () Sce ivision () Sft o Ri t mx. ispcement N Axi, ginst vcuum N Axi, ginst vtmosere N Torsion Nm (f-in) Tigtness mr x x s -1 Pressure soute Bkeout temperturefeetroug C ( F) Weigt kg (s) Mteris expose to process mei 16 CF-R 40 CF-R M 4 x 16 (M 4 x 0.63) M 6 x 10, 10 (M 6 x 0.39, 0.39) eow eow mnuy mnuy 25.0 (0.98) 50.0 (1.97) 5.0 (0.20) 10.0 (0.39) (1.77) 0.5 (4.43) 5 x x x mr to 2 r 1 x mr to 2 r 300 (572) 300 (572) 0.15 (0.33) 0.75 (1.66) Stiness stee Stiness stee Orering informtion FNL 16/25 FNL 40/50 Liner motion feetroug

63 Liner Motion Mecnic Feetrougs Te rottion of te rive kno is trnste vi geress rive system to te sft on te vcuum sie. Tis sft runs on erings wic o not require ny mintennce uring te entire service ife. Dimension rwing for te FPR 16/5 N rotry feetroug Dimension rwing for te FNR 40/20 N rotry feetroug FPR 16/5 N FNR 40/20 N Nomin wit Sft connection () 16 CF-F 40 CF-F i. 4 (0.16) i. 8(0.32) Feetroug/se eow eow Trnsfere torque Dynmic Dynmic, t 300 C (572 F) Sttic Nm (f-in) Nm (f-in) Nm (f-in) 0.4 (3.54) 4.0 (35.40) 0.2 (1.77) 2.0 (17.70) 0.2 (1.77) 3.0 (26.55) Rottion spee t mx. torque rpm rpm Sce ivision 10 Sft o Ri Axi N N Tigtness mr x x s -1 Pressure soute 5 x x x mr to 2 r 1 x mr to 2 r Bkeout temperture Weigt C ( F) kg (s) 300 (572) 300 (572) 0.3 (0.66) 1.5 (3.31) Mteris expose to process mei Stiness stee Stiness stee Orering informtion FPR 16/5 N FNR 40/20 N Rotry feetroug

64 Eectric Feetrougs Dimension rwing for te eectric feeetroug FE 40/4 (eft) n FE 40/9 (rigt) Dimension rwing for te eectric feeetroug FEHC 16/1 (eft) n FEHC 40/2 (rigt) FE 40/4 FE 40/9 FEHC 16/1 FEHC 40/2 Nomin wit Numer of feetrougs Numer of connection pieces vcuum sie (set) tmosperic sie (set) Votge per poe 1) kv Current per poe 1) A Bkeout temperture C ( F) Temperture rise t mx. current T C/min Tigtness mr x x s -1 Pressure soute Fnge Conuctor Insutor Weigt kg (s) CF 40-F CF 40-F CF 16-F CF 40-F x x (752) 400 (752) 400 (752) 400 (752) x x x x x mr 1 x mr 1 x mr 1 x mr to 2 r to 2 r to 2 r to 2 r Stiness stee Stiness stee Stiness stee Stiness stee Stiness stee Stiness stee Copper Copper A 2 O 3 A 2 O 3 A 2 O 3 A 2 O (0.66) 0.4 (0.88) 0.15 (0.33) 0.45 (0.91) Orering informtion FE 40/4 FE 40/9 FEHC 16/1 FEHC 40/2 Current feetroug Connection piece, vcuum sie (set) Connector, tmosperic sie (set) x x ) Loc sfety regutions must e met 64

65 Dimension rwing for te eectric feeetroug FEF 16/1 (eft), FEHV 16/1 (mie) un FEHV 40/3 (rigt) FEF 16/1 FEHV 16/1 FEHV 40/3 Nomin wit Numer of feetrougs Votge AC, 50 Hz kv DC kv Current A Frequency MHz Impence Insution resistnce t 20 C (68 F) Bkeout temperture wit connector C ( F) witout connector C ( F) Tigtness mr x x s -1 Pressure soute 2) Housing, fnge, conuctor Feetroug, se Weigt kg (s) CF 16-F CF 16-F CF 40-F (122) 50 (122) 50 (122) 400 (572) 1) 400 (572) 1) 400 (572) 1) 1 x x x x mr to 10 r 1 x mr to 10 r 1 x mr to 10 r Stiness stee Stiness stee Stiness stee A 2 O 3 A 2 O 3 A 2 O (0.31) 0.14 (0.31) 0.5 (1.10) Orering informtion FEF 16/1 FEHV 16/1 FEHV 40/3 Current feetroug Outsie pug (incue in eivery) Ce BNC MHV MHV UG 88/U UG 932/U UG 932/U RG 58/U RG 59/U RG 59/U 1) wit estomer se up to 150 C (302 F) 2) Pressure ti 400 C (572 F) reuce to 2 r 65