Excerpt from the Leybold Vacuum Full Line Catalog 2005 Product Section C13 Edition May 2005 C13. Vacuum Fittings and Feedthroughs.

Transcription

1 Excerpt from te Prouct Section Eition My 2005 Vcuum Fittings n Feetrougs vcuum

2 ontents Gener Mteris Te Rigt onnection from Leyo Fnge connections Proucts ISO- Fnge Fittings n omponents Aptors () mp Fnge Fittings n omponents ISO-F n DIN 2501 Fixe Fnge Fittings, ND ISO-F Fixe Fnge Fittings DIN 2501 Fixe Fnge Fittings Vcuum Greses Oservtion Winows Eectric Feetrougs Hig urrent Feetrougs Rotry Feetrougs Liqui Feetrougs Rotry / Liner Motion Feetrougs Versions for te Nort n Sout Americn ontinents ISO- Fnge Fittings n omponents Aptors () mp Fnge Fittings n omponents ISO-F n DIN 2501 Fixe Fnge Fittings ANSI Fittings Tese rguments sou convince you in fvor of fnge components from Leyo: Aviiity of components t sort notice Wor-wie vice t ny time to nswer your questions reting to vcuum systems Utiiztion of most vnce mnufcturing metos ontroe mteri quity omptie to your existing fnges of te sme system Higy ek-tigt own to ek rtes of 1 x 10-9 mr x x s -1 ; components re sujecte to eium ek test Environment-frieny cening ts wit compete wste ispos n recycing fciities Environment-frieny n secure pckging Tot Quity Mngement metos uring processing stges Low outgssing rtes of te mteris troug - coice of te rigt mteri quity, especiy for vcuum pprtus - exceent cening metos Documenttion vie for components 2

3 Gener Gener Vcuum systems (i.e. systems for pressures rnging from 2.5 r to 10-9 mr (1.9 x 10-3 Torr to 0.75 x 10-9 Torr)) re quicky n esiy sseme owing to te mour construction principe wic is se on intercngee stnr components y mens of vcuumtigt, emounte fnge connections. Iniviu components my e excnge esiy t ny time. Depening on te intene use n size of te connection, fnges of ifferent types ve een eveope. Te fnge connection ws eveope y Leyo mny yers go n s een wiey ccepte y users of vcuum equipment. Tis prouct section ists fnge connections n fittings incuing ptors for utr ig vcuum components. omponents mrke wit [< 1000 mr (< 750 Torr)] re not owe for use t pressures exceeing 1000 mr s. Te components n fnge connections re intene for use in connection wit vcuum systems. Tey ve not een esigne to support mecnic os. A os must e supporte seprtey t te connection components. Utr-Hig Vcuum omponents re escrie in Prouct Section 15. Fnge Designtions Te esigntions use y Leyo for cmp fnges, fixe fnges (ote) n cor fnges wit retining rings correspon ot to te interntion stnrs 1) n to te usu nomencture in vcuum tecnoogy. 1) Te nomin wit correspons ony pproximtey to te inner imeter, i.e. is is not necessriy ientic to te inner imeter. Differences in te ctu inner imeter re quite norm in prctice n o not contrvene stnrs. Mteris Stiness Stee Germn AISI/ DIN Designtion Mteri No. SAE X5 rni X10 rni S L X2 rni X12 rni X5 rnimo L X2 rnimo L X2 rnimo X10 rniti Ti X6 rnimoti X5 rnin 18 9 Auminum Germn AISI DIN Designtion Mteri No AA A 99.5 w AA 6012-T6 AMgSiP AA 2011-T352 AuiP (AA) GD-ASi8u F (AA) AMgSi T6 AMgSi (AA) AMgSi (AA) GK AISi 10 Mg (AA) GK ASi 10 Mgw X GD-ASi 12 Stee Germn AISI DIN Mteri No. Designtion St St K K 35 Gskets oe emic Typic Designtion Designtion Tre Nme R oroprenecoutcouc Neoprene FPM Fuorcoutcouc Viton NR Acryonitrieutienruer Perunn PTFE Poytetrfuoretyene Tefon EPDM Etyene propyene ien ruer Hoses n Tues oe emic Typic Designtion Designtion Tre Nme NR Ntur ruer PV Poyvinycorie 3

4 Gener Te Rigt onnection from Leyo 8 7 ISO-F fnges entering ring wit O-ring gsket 3 mping ring cmp fnge connection 2. Aptor reucer 3. entering ring wit O-ring gsket 4. Fexie vcuum tuing 5. mping quick-reese ring 6. Tee 7. mp 8. Eow 9. PV coie vcuum tuing 10. ross 1 Fnge 11. nk fnge 12. Sm fnge wit ose nozze 2 Vcuum seing isk consisting of centering ring n O-ring gsket wit outer support ring 3 fnge 4 ot wit nut 5 or fnge wit retining ring fnge 2 entering ring wit O-ring gsket n outer support ring 4 3 mp cmp fnge connection F F fnge connection 2. Reucer / -F 3. Aptor F-/ Doue cross 5. Ajustment piece 6. Eow 7. ermic intermeite piece 8. Tee 9. UHV oservtion winow 10. nk fnge 1. fnge 2. entering ring wit O-ring gsket n outer support ring 3. mp 4. Tee 5. ross wit ter 10/40 fnges 6. Eow 7. Fexie vcuum tuing 8. ross 9. Intermeite fnge wit guge port 10. mp fnge wit tuution 11. nk fnge 12. Fexie compenstion eement 4

5 Gener Fnge connections ISO- onnection Te ISO- connection (to DIN n ISO 2861) permits rpi fitting n repcement of components in vcuum systems. It consists of two syetric fnges (1), centering ring wit O-ring gsket (2) n cmping ring (3). Hig vcuum tigt connections cn e me witout te use of toos simpy y turning te wing nut of te cmping ring. 1 Sm fnge 2 entering ring wit O-ring 3 mping ring 4 Outer centering ring wit O-ring mp Fnge onnection fnge connection Te cmp fnge connection (to DIN n ISO 1609) ows components from 63 to 630 to e connecte in ny position regress of te ot oe rrngement on ny fixe fnges. It consists of two cmp fnge components (1), centering ring (2) wit n outer ring encosing te O-ring gsket, n sever cmps (3) wic te connection is sseme n tigtene wit. Since te centering ring cn e firmy inserte into te centering groove of te fnge, even orizont connections re quicky n esiy fitte. 1 mp fnge 2 entering ring n O-ring wit outer supporting ring 3 mp cmp fnge connection ISO-F / DIN Fixe ote Fnge Fittings Wit te pproprite cor fnges, te cmp fnge cn e connecte to vrious fixe ote fnge systems (ISO-F, 2501, etc.) see figures in section ISO-F n DIN 2501 Fixe Fnge Fittings. 1 fnges 2 Vcuum seing isk consisting of centering ring n O-ring wit outer support ring 3 Retining rings 4 ISO-F cor fnges 5 ot wit nut mpe fnge connection wit cor fnges 5

6 Gener ke Out Tempertures for te Gskets R n FPM gskets cn e inserte in iste fnge types, wie uminum gskets my e use for iger vcuum requirements. R gskets cn e use in te temperture rnge from -40 to +100 [-40 F to +212 F] (mx. keout temperture), FPM gskets from -15 to +150 [+5 F to +302 F] (mx. keout temperture). Auminum gskets from -196 to +200 [-321 F to +392 F] (mx. keout temperture grient; T mx. 2.5 /min). 1 Fnge to DIN 2501 ND6 2 Seing isk consisting of centering ring n O-ring wit outer support ring 3 fnge 4 ot wit nut 5 or fnge wit retining ring to DIN 2501 ND6 onnection etween DIN 2501 ND 6 fnge n n fnge wit DIN 2501 cor fnge ISO- Fnge Fittings n omponents 16 to 50 Auminum Design (to DIN ) [Tues simir DIN ] Te sm fnge connection eveope y Leyo s ecome te sis of te interntion stnr for vcuum tecnoogy. Avntges to te User Quick, sfe n reie No toos re nee to provie vcuum-tigt se Suite own to pressures of 10-7 mr (0.75 x 10-7 Torr) Esy to issseme n cen In te cse of speci requirements s to egssing for te purpose of reucing te outgssing rte n in cse of speci requirements s to corrosion resistnce, we recoen te use of stiness stee components. Quick mping Ring Avntges to te User Quick n effective fitting n isssemy n e fitte wit one n osing ction vi ever wit cmping spring orrosion resistnt 16 to 50 Stiness Stee Design (to DIN ) [Tues simir DIN ] Avntges to te User Quick, sfe n reie n e ke out up to 200 (392 F) wen using met ses n e egsse up to 150 (302 F) wit FPM gskets Wit met ses suite for pressures own to 10-9 mr (0.75 x 10-9 Torr) orrosion resistnt Low egssing rte For stnr ppictions invoving pressures up to 2.5 r (1.9 x 10 3 Torr) s. n e egsse up to 200 (392 F) wit UHV uminum rings or isks Fexie ompenstion Eements Vcuum systems n pump systems often require components wic re cpe of protecting sensitive instruments ginst impcts or excessive virtions wie inking tues t te sme time. Avntges to te User Esy n quick to inst Sfe n reie Tues my e turne in ny irection No centering n seing ring require pe of witstning tempertures up to 80 (176 F) Suite for pressures own to 10-5 mr (0.75 x 10-5 Torr) 6

7 ISO- Fnge Fittings n omponents Fitting centering ring to component Quick cmping ring Sm fnge connection wit utr seing ring Fitting n eow mping ring for utr seing isk Sm fnge connection wit cmping ring 1 Sm fnge port 2 Housing w wit tree tp 3 w 4 entering ring Sm fnge connection Sm fnge components me of stiness stee Nomin imeter 10 ISO- 16 ISO- 25 ISO- 40 ISO- 50 ISO- A D Numer of cws

8 ISO- Fnge Fittings n omponents entering Rings (Auminum /Stiness Stee ) wit O-Ring (R/FPM) 1 1 Dimension rwing for te centering rings wit O-ring Dimension rwing for te centering ring ptors wit O-ring Orering Informtion Auminum/R Auminum/FPM Stiness stee/fpm entering Ring Aptors (Auminum /Stiness Stee ) wit O-ring (R/FPM) 1 1 Dimension rwing for te centering rings wit sintere met fiter n O-ring /16 20/25 32/ entering Rings (Stiness Stee) wit Sintere Met Fiter (Stiness Stee n O-Ring (FPM) Orering informtion Auminum/R Auminum/FPM Stiness stee/fpm 1 1 Orering informtion Stiness stee Air trougput t 20 n 200 mr ifferenti pressure pprox. 1m 3 x -1 x cm 2 ; pore size: 20 µm Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 8

9 ISO- Fnge Fittings n omponents entering Rings wit Fine Fiter (Stiness Stee ), O-Ring (FPM) Dimension rwing for te centering rings wit fine fiter Orering informtion Stiness stee Fiter mteri: Stiness stee mes , size of pore: 4 µm, seprtion gre: 1 µm prtices to 98% Outer entering Rings (Auminum ) wit O-Ring (R/FPM) 1 1 Dimension rwing for te outer centering rings wit O-ring 1 1 Orering informtion Auminum/R Auminum/FPM 10/16 20/25 32/ Utr Seing Rings (Auminum ) 1 2 Dimension rwing for te utr seing rings Tecnc Dt 1 2 Orering Informtion Auminum (set of 3 pieces) 10/16 20/25 32/ Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 9

10 ISO- Fnge Fittings n omponents Outer Support Rings (Stiness Stee ) for Utr Seing Rings ød Dimension rwing for te outer support rings Dimension rwing for te spre O-ring gskets for fnge connections s Tecnc Dt Spre O-Ring Gskets for Fnge onnections D Tecnc Dt s Orering Informtion Stiness stee Orering Informtion 10/16 20/25 32/ ) ) ) FPM (set of 10 pieces) ) Aso for ptor/centering rings mping Rings (Auminum ) Dimension rwing for te cmping rings Tecnc Dt A Orering Informtion Auminum Mx. torque t te wing nut: 2 Nm Quick mping Rings (Auminum ) Tecnc Dt x 1 x 1 Dimension rwing for te quick cmping rings r 1 r x x 1 Orering Informtion Auminum 10/16 20/25 32/ /16 20/25 32/ Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 10

11 ISO- Fnge Fittings n omponents mping ors (Auminum ) for Utr Seing Rings Dimension rwing for te cmping cors for utr seing rings D D Hexgon socket screw to DIN 912 Orering Informtion Auminum 10/16 20/25 32/ M 4 x 30 M 6 x 30 M 8 x 35 M 8 x 50 M 4 x 1.18 M 6 x 1.18 M 8 x 1.38 M 8 x w, compete (Auminum ) M Top View Dimension rwing for te cw, compete Orering Informtion Auminum Fnges wit Sort Tuution (Stee / Stiness Stee ) Orering Informtion Stee Dimension rwing for te fnges wit sort tuution 1 2 Orering Informtion Stiness stee Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 11

12 ISO- Fnge Fittings n omponents Fnges wit Long Tuution (Stee / Stiness Stee ) Orering Informtion Stee Dimension rwing for te fnges wit ong tuution 1 2 Orering Informtion Stiness stee nk Fnges (Auminum / Stiness Stee ) Dimension rwing for te nk fnges Orering Informtion Auminum Stiness stee Eows 90 (Auminum / Stiness Stee ) 1 Dimension rwing for te eows 90 ; stiness stee (eft) n uminum (rigt) 1 1 onuctnce /s Orering Informtion Auminum Stiness stee Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 12

13 ISO- Fnge Fittings n omponents Tees (Auminum / Stiness stee ) Dimension rwing for te tees 1 1 (Auminum) 1 (Stiness stee) onuctnce /s 4-Wy rosses (Auminum / Stiness ) Dimension rwing for te 4-wy crosses Dimension rwing for te 4-wy reucer crosses wit ter 10 fnges Orering Informtion Auminum Stiness stee onuctnce /s Orering Informtion Auminum Stiness stee Wy Reucer rosses wit 10 Fnges (Auminum / Stiness stee ) / 1 1 Orering Informtion Auminum Stiness stee Reucers (Auminum / Stiness Stee ) Dimension rwing for te reucers 1 / 1 25/16 40/16 50/ /16 40/16 40/25 50/ Orering Informtion Auminum Stiness stee Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 13

14 ISO- Fnge Fittings n omponents Intermeite Pieces (Auminum / Stiness Stee ) Dimension rwing for te intermeite pieces Orering Informtion Auminum Stiness stee eows (Stiness Stee ) wit Fnges (Stiness Stee ) Dimension rwing for te eows wit fnges W tickness mx. extension, xi ompression Tension mx. nge egress 1) Lter motion Orering Informtion Vcuum Hoses 1) wit Fnges (Stiness Stee ) Dimension rwing for te vcuum oses wit fnges ±21 ±17 ±15 ±15 ±4 ±3.5 ±7 ±8 ± 0.16 ± 0.14 ± 0.28 ± 0.31 Stiness stee ) Wen utiizing te mximum ening nge, no extension ong te xi xis wi e possie! Mx. ening rius (insie) wit mutipe ening wit singe en W tickness Orering Informtion = 0250 (09.84 ) = 0500 (19.69 ) = 0750 (29.53 ) = 1000 (39.37 ) ) Fexie vcuum oses must e inke to n extern mecnic ssemy PV oie Vcuum Hoses witout Fnges 1 Dimension rwing for te PV vcuum oses 1 Lengt Orering Informtion PV coie vcuum ose m y te metre y te metre y te metre Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 14

15 ISO- Fnge Fittings n omponents Fnges wit Hose Nozze (Auminum ) 1 Dimension rwing for te fnges wit ose nozze 1 1 (tue) 1 Orering Informtion Auminum Hose mps (Stiness Stee ) (m / mx.) Orering Informtion Stiness stee / / / / / / Dimension rwing for te ose cmps Eows 90 wit Hose Nozze (Auminum ) 1 1 Dimension rwing for te eows 90 wit ose nozze 1 (tue) 1 Orering Informtion Auminum R ompenstion Eements wit Integrte Support Ring 1 Dimension rwing for te compenstion eements wit integrte support ring D D ( tue toernce) 1 Lek rte mr x x s -1 Orering Informtion x x x 10-5 Stiness stee/r ) ) ) 1) Is suppie compete wit stiness stee ose cmps Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 15

16 ISO- Fnge Fittings n omponents Ruer Vcuum Hoses (NR) for Hose Nozzes 1 Dimension rwing for ruer vcuum oses 1 Lengt Hrness Sore A m Temperture rnge F Orering Informtion Ruer vcuum ose y te metre y te metre y te metre 55 ± 5 55 ± 5 55 ± 5 30 to to to to to to Fnges wit Hose Nozzes (Auminum n Stiness Stee ) 1 1 Dimension rwing for te fnges wit ose nozze 1 1) Orering Informtion Auminum Stiness stee ) Aso recoene insie imeter for te ose Fnges wit ompression Fitting for Gss/Met/Pstic Tues (Auminum / FPM) 1 ømx. Di ore Dimension rwing for te fnges wit compression fitting (gss) 1 Di ore -mx. Orering Informtion ± 0.2 ± ompression Fitting Seing set (FPM) for ig tempertures (150 (302 F)) (set = 10 pieces) Ony for pressure 1000 mr ( 750 Torr) Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 16

17 ISO- Fnge Fittings n omponents Screw-in Fnges (Stiness Stee / FPM) SW 1 2 G Dimension rwing for te screw-in fnges G (ccoring to DIN ISO 228-1) SW (wit cross fts) Orering Informtion Stiness stee Stiness stee Nicke-pte stee Screw-on Fnges (Stiness Stee / FPM) SW 1 2 G 1 Dimension rwing for te screw-on fnges G (ccoring to DIN ISO 228-1) SW (wit cross fts) Orering Informtion Stiness stee , /8" 1/2" M 16 x 1.5 1" 1/8" 1 1/2" 3/8" 1/2" M 16 x " 1/8" 1 1/2" /8" 1/2" 1" 1 1/2" Fnges wit Groun one (Stiness Stee ) Dimension rwing for te fnges wit groun cone KNS - / 1 Tper Orering Informtion Stiness stee / / / / / / :10 1:10 1: Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 17

18 Aptors Aptors/Reucers 1 1 Dimension rwing for te ptor reucers ; eft: uminum; rigt: stiness stee s t 1 1 s t Weigt kg s Orering Informtion Stiness stee Auminum Aptors F (Stiness Stee ) Dimension rwing for te ptors F ISO- 1 1 or F inc Orering Informtion Stiness stee /16" 2 3/4" 1 5/16" 2 3/4" 2 3/4" opper Gskets for F-Fnges (OFH-opper - Oxygen-Free) Set of 10 Set of 5 Insie imeter F x x x x x x x Orering Informtion OFH opper FPM Gskets for F-Fnges Set of 5 F Profie se, set of 2 Gsket wit support ring Degssing temperture F x x 1 FPM O-ring wit Support Ring x x x x x Orering Informtion FPM Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 18

19 Aptors ots, Nuts n Wsers for F-Fnges Dimensions ( x ) Torque F Nm Quntity per set ots Nuts Wsers Orering Informtion Set / /250 M 4 x 20 M 6 x 35 M 8 x 50 M 8 x 55 M 8 x 60 M 4 x 0.79 M 6 x 1.38 M 8 x 1.97 M 8 x 2.17 M 8 x For etis on UHV ses n furter components, see Prouct Section 15. Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 19

20 () mp Fnge Fittings n omponents Attcing cmp fnge component n fitting of te cmp Tigtening te cmping ot cmp fnge connection Fnge omponents 63 to 630 (to DIN in ine wit ISO 1609/3669) Te cmp fnge connection ws introuce to te vcuum inustry y Leyo. Since te fitting of cmp fnges oes not epen on ny ot oes in te fnge, tese components my e inste in ny orienttion. Avntges to te User Quick to fit Sfe n reie n e turne in ny irection Esy to issseme, tus esy to cen Suite for pressures own to 10-7 mr (0.75 x 10-7 Torr) wen using O-rings n own to 10-9 mr (0.75 x 10-9 Torr) wen using met gskets Esiy pte to oter fnge systems Mounte y mens of cmps () or cor fnge wit retining ring (ISO-F, DIN 2501) mp fnge components re use wit R or FPM gskets or wit utr seing isks me of uminum Degssing tempertures for R, mx. 100 for FPM, mx. 150 for te utr seing isk, mx. 200 Te pressure rnge for te ppiction epens in ec cse on te seing meto wic is use n is tus imite for utr seing isks to 10-9 mr (0.75 x 10-9 Torr), for FPM gskets to 10-8 mr (0.75 x 10-8 Torr) n for R see components to 10-7 mr (0.75 x 10-7 Torr). Fexie ompenstion Eements (R) Vcuum systems n pump systems often require components wic re cpe of protecting sensitive instruments ginst impcts or excessive virtions wie inking tues t te sme time. Avntges to te User Esy n quick to inst Sfe n reie Tues my e turne in ny irection No centering ring n seing ring is neee since te se is provie y te smoot tue surfce pe of witstning tempertures up to 100 (212 F) Suite for pressures own to 10-5 mr (0.75 x 10-5 Torr) 1 mp fnge 2 w 3 se pte 4 w Nomin imeter A Numer D Screws Numer of cmps for cws of cws M 8 x M 8 x M 8 x M 8 x M 10 x M 10 x M 10 x M 10 x M 10 x M 10 x M 12 x M 12 x M 12 x M 12 x M 12 x M 12 x M 12 x M 12 x

21 () mp Fnge Fittings n omponents entering Rings (Auminum / Stiness Stee) wit O-Ring (NR) 2 1 Dimension rwing for te centering rings wit O-ring s 1 2 s Orering Informtion Auminum/FPM Auminum/R Stiness stee/fpm s Orering Informtion Auminum/FPM Auminum/R entering Rings wit Fine Fiter (Stiness Stee ), O-Ring (FPM) 2 1 Dimension rwing for te centering rings wit fine fiter Orering Informtion Stiness stee Fiter mteri: Stiness stee , size of pores: 4 µm, seprtion gre: 1 µm prtices to 98% Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 21

22 () mp Fnge Fittings n omponents Utr Seing Disks (Auminum ) 1 1 Dimension rwing for te utr seing isks 1 1 / ISO-F Orering Informtion Auminum entering Ring Aptors (Auminum) wit O-Ring (FPM), to LF Stnr Dimension rwing for te centering ring ptors wit O-ring mps for / LF Orering Informtion Auminum/FPM 100 / / / M Dimension rwing for te cmps, rigt M 1 Numer of require cmps per connection M 1 Orering Informtion tre 63 / / / / / 6 4 / 6 8 / / 12 M 10 M 10 M 12 M 12 M to to to to to to 1.06 to 1.38 to 1.54 to 1.93 to set = 4 cmps Gvnize stee Stiness stee Exct numers of cmps see first pge of te section () mp Fnge Fittings n omponents Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 22

23 () mp Fnge Fittings n omponents ws (Gvnize Stee ) for 1 Dimension rwing for te cws for 3 2 Numer of require cws per connection Orering Informtion tre 63 / / / / 8 8 / / M 8 M 10 M 12 M set = 4 cws Exct numers of cmps see first pge of te section () mp Fnge Fittings n omponents ws for Seing Groove in se Pte (Gvnize Stee ) for 1 Dimension rwing for te cws for seing groove Orering Informtion tre 63 / / / M 8 M 10 M 12 M set = 4 cws Exct numers of cmps see first pge of te section () mp Fnge Fittings n omponents nk Fnges (Nicke-Pte Stee / Stiness Stee ) t 1 t 1 2 Dimension rwing for te nk fnges t t 1 tre Orering Informtion M 8 M 8 M 8 M 8 M 8 M 8 M 8 M 8 M Nicke-pte stee Stiness stee M 8 tree ore from nomin size 500 Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 23

24 () mp Fnge Fittings n omponents mp Fnges wit Tuution (Stee , / Stiness Stee ) s 2 1 Dimension rwing for te cmp fnges wit tuution 1 2 s (stee) s (stiness stee) Orering Informtion Stee Stiness stee Weing Fnges 1 2 Dimension rwing for te weing fnges Orering Informtion Stee Stiness stee Aptors F 1 2 Dimension rwing for te ptors F F o. D. inc 1 2 Orering Informtion DIN /2" 6" 8" Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 24

25 () mp Fnge Fittings n omponents Aptors-Reucers 1 Dimension rwing for te ptors-reucer ; eft: uminum; rigt: stiness stee s t 1 s t Weigt / kg s Orering Informtion Stiness stee Auminum / / / Reucing Fnges (Stiness Stee ) 1 2 øk 3 Dimension rwing for te reucing fnges 1 1 Reucers (Stiness Stee ) 1 Dimension rwing for te reucers k tre Orering Informtion Stiness stee 1 Orering Informtion Stiness stee 160/63 160/ / / / M 8 M 8 M 8 M 10 M /63 250/ Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 25

26 () mp Fnge Fittings n omponents Eows (Stiness Stee ); from 160 Mitre Eow 1 1 Dimension rwing for te eows (eft) n mitre eow (rigt) 1 Weigt onuctnce kg s /s Orering Informtion Stiness stee Tees (Stiness Stee ) 1 Dimension rwing for te tees 1 Weigt kg s Orering Informtion Stiness stee Wy rosses (Stiness Stee ) 1 Dimension rwing for te 4-wy crosses 1 Orering Informtion Stiness stee rncing Pieces wit Lter 16/25/40 Fnges (Stiness Stee ) A c 40 Ansict: View: A c1 c Dimension rwing for te rncing pieces wit ter 16/25/40 fnges c c 1 c 2 Orering Informtion Stiness stee n not e use wit cor fnges ISO-F n DIN 2501 Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 26

27 () mp Fnge Fittings n omponents Mesurement Fnges 16 1 Dimension rwing for te mesurement fnges Numer of tree oes Orering Informtion tre Stiness stee Auminum Recoene centering ring Require cws kits Require cws kits ws, compete for 16 re incue M 8 M 8 M x x x kits 4 kits 4 kits eows (Stiness Stee ) wit Fnges (Stiness Stee ) 1 Dimension rwing for te eows 1 Weigt kg s Mx. extension, xi ompression Tension Mx. ening nge Degrees 1) Lteri ispcement Orering Informtion , ±30 ±30 ±14 ± Stiness stee ) Wen utiizing te mximum en, no extension ong te xi xis wi e possie! Fexie Vcuum Hoses (Stiness Stee ) wit Fnges (Stiness Stee ) Dimension rwing for te fexie vcuum oses 1 1 Mx. ening rius wit mutipe ening wit singe en Orering Informtion Stiness stee Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 27

28 () mp Fnge Fittings n omponents Fexie ompenstion Eements (R) 1 Dimension rwing for te fexie compenstion eements D D 1 Orering Informtion R ) ) ) 1) Is suppie compete wit stiness stee ose cmps onnections for Fexie ompenstion Eements (Auminum ) 2 Dimension rwing for te connections for fexie compenstion eements Orering Informtion Auminum Spre O-Ring Gskets for mp Fnge Fittings Dimension rwing for te spre O-ring for cmp fnge fittings s s Quntity per set Orering Informtion FPM s Quntity per set Orering Informtion FPM Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 28

29 () mp Fnge Fittings n omponents ots for mp Fnge Fittings (Stee 8.8, zinc cote) Dimension rwing for te ots for cmp fnge fittings Dimensions tre Quntity per set ots Nuts Wsers Orering Informtion Set M 8 M 10 M 12 M Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 29

30 ISO-F n DIN 2501 Fixe Fnge Fittings ISO-F n DIN 2501 Fixe Fnge Fittings, ND 6 Note: ND 6 sttes imension n oes not refer to n operting pressure of 6 r! In ition to cmp fnge connections, fixe wee fnges (ISO-F or to DIN 2501) re use in te re of vcuum engineering to interconnect vves, pumps n oter components. Mting cmp fnges wit tuution using cor rings n seing isk Avntges to te User A ig vcuum se is mintine so t rge nomin wit n ig mecnic os DIN 2501 Eveny istriute seing force troug rge numer of ots n e esiy pte to oter fnge systems ISO-F Vcuum seing isks consist of R O-ring se wit inner n outer uminum ring Fixe fnges n cor fnges my so e constructe s met ses y using utr seing isks Mting cmp fnges using ote cor rings n utr seing isk DIN (ISO-F) omprison: mp fnge wit cor fnge to DIN 2501 n cmp fnge wit cor fnge to DIN ; ISO-F ots n nuts Retining ring or Fnge Stiness Stee Gvnize 8.8 stee Stee Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 30

31 ISO-F Fixe Fnge Fittings ISO-F or Fnges wit Retining Ring for use wit mp Fnge Fittings (Stee ) k 2 1 Dimension rwing for cor fnges wit retining ring 1 2 k ISO-F Orering Informtion Nicke-pte stee k ISO-F Orering Informtion Nicke-pte stee Vcuum Seing Disks for ISO-F Fnges (Auminum/R) 1 Dimension rwing for vcuum seing isks 1 ISO-F Orering Informtion AIuminum/R ISO-F Orering Informtion AI/R Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 31

32 ISO-F Fixe Fnge Fittings Spre O-Ring Gskets ISO-F Fnge onnection Dimension rwing for O-rings s s ISO-F Quntity per set Orering Informtion R s ISO-F Quntity per set Orering Informtion R Utr Seing Disks (Auminum ) for ISO-F Fnges 1 Dimension rwing for O-rings / ISO-F Orering Informtion Auminum ots for ISO-F Fnge onnection (Stee 8.8, zinc cote) Dimension rwing for te ots for ISO-F fnge fconnections Dimensions ISO-F tre Quntity per set ots Nuts Wsers Orering Informtion Set M 8 M 10 M 12 M Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 32

33 ISO-F Fixe Fnge Fittings ots for ISO-F Fnge onnection (Stee 8.8, zinc cote) s Dimension rwing for te ots for ISO-F fnge fconnections Dimensions s ISO-F tre Quntity per set ots Nuts Wsers Orering Informtion Set 40 F ISO-F/ F ISO-F M 6 M 8 M Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 33

34 DIN 2501 Fixe Fnge Fittings DIN 2501 Fixe Fnge Fittings; Dimensions to DIN 2501, ND 6 Note: ND 6 sttes imension n oes not refer to n operting pressure of 6 r! or Fnges wit Retining Ring (Stee ) k 1 Dimension rwing for cor fnges wit retining ring 1 k DIN Orering Informtion Stee Spre O-Ring Gskets for Vcuum Seing Disks DIN 2501 Dimension rwing for O-ring gskets s s ISO-F Quntity per set Orering Informtion R ots n Nuts for DIN or Fnge Dimension rwing for ots n nuts Dimensions Numer of ots/nuts require Orering Informtion DIN tre 1 ot (gvnize 8.8 stee) 1 nut (gvnize 8.8 stee) M 12 M 16 M 16 M For seing fnges see te centering rings escrie in te section () mp Fnge Fittings n omponents. Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 34

35 Vcuum Greses Vcuum Greses RAMSAY greses for uricting groun joints n rin vve in fore-vcuum ines consist of speci gres of prffin jey to wic coutcouc is e for ttining te specific consistence. RAMSAY grese tick is use to uricte groun joints. Use own to 10-2 mr/torr. RAMSAY grese soft is use to uricte rin vves. Use own to 10-2 mr/torr. GLEITLEN is speci grese use to uricte stirrer sfts (KPG stirrers, mong oters) of sizes in te ortory. Use own to 10-2 mr/torr. LITHELEN contins itium compouns, n components contriuting to iger vpor pressures ve een remove troug ig-vcuum pre-processing. It my e use witin wie temperture rnge (from 0 to 150 (32 F to 302 F)) n in ppictions from tmosperic pressure own to 10-8 mr (0.75 x 10-8 Torr). Siicone ig-vcuum grese Dow orning contins compouns of ig moecur weigt togeter wit cin eements contining siicon n oxygen. At tempertures over 220 (428 F) te siicone grese wi poymerise giving off gs. It my e use witin wie temperture rnge (from -40 to 200 (-40 F to 392 F)) n in ppictions from tmosperic pressure own to 10-6 mr/torr. DYNAFAT is use to uricte gskets. Sfety t seets re vie to profession users from: e-mi sfety-t@eyovc.e or Internet Overview Seing Greses Appiction Dt RAMSAY RAMSAY GLEITLEN LITHELEN Siicone ig- DYNAFAT grese, tick grese, soft vcuum grese Verwenungszweck Gresing of groun Gresing of groun Luriction of Gresing of groun Gresing of groun Luriction joints n rin joints n rin stirrer sfts joints n rin joints n rin of gskets vves, use own vves, use own (KPG stirrerr) vves t ow vves t ow to pressures of to pressures of pressures n pressures n 10-2 mr/torr 10-2 mr/torr ig working ig working tempertures tempertures RAMSAY RAMSAY GLEITLEN LITHELEN Siicone ig- DYNAFAT grese, tick grese, soft vcuum grese Vpor pressure t 20 (68 F) Dripping point mr/torr ( F) > 56 (> 133) > 56 (> 133) > 50 (> 122) > 210 (> 410) 1) 148 (298) Mx. working temperture ( F) Orering Informtion Tin 50 g (0.11 s) Tue 050 g (0.11 s) Tue 100 g (0.22 s) 30 (86) 30 (86) 30 (86) 150 (302) 200 (392) 110 (230) RAMSAY RAMSAY GLEITLEN LITHELEN Siicone ig- DYNAFAT grese, tick grese, soft vcuum grese ) over 220 (428 F) poymeristion 35

36 Oservtion Winows Oservtion Winows for Vcuum Systems Oservtion of te penomen in te vcuum cmer is very importnt for mny vcuum processes. Mesurements n monitoring cn often e ccompise ony y mens of extern instruments use uner norm tmosperic pressure conitions. Tis cs for igy trnsprent, rugge oservtion winows feturing wie nge view. Avntges to te User Ft esign Esy to fit n remove Esy to cen Wie viewing nge 66 n e ke out up to 150 (302 F) My e comine wit n components No speci mounting components re require Te FPM O-ring ses ginst te tmospere (integrte centering ring) Ec oservtion winow is sujecte to ek test (terey ensuring sfe opertion!) Mounting: Pce te winow in te fnge n eveny press te O-ring into its groove. Dismounting: Ho te oservtion winow wit te winow sowing to te ottom. Use ot tums to press te winow out of te fnge ring Mounting of oservtion winows Viewing nge into vcuum cmer troug oservtion winow (mounting on mtcing fnges wit tuution) 36

37 Oservtion Winows O-ring 2 Gss 3 Fnge n oservtion winows, fuy inste Winow imensions for te oservtion winows 100 (%) Trnsmission Weenänge Wveengt (nm) 1700 Trnsmittnce s function of te wveengt for Leyo viewports 40 to 160 for ifferent winow ticknesses Oservtion Winows Tickness of gss winow Dimeter of gss winow Viewing nge Te gss use is orosiicte gss (OROFLOAT 33) wit refrctive inex of n = Dieectric numer (t 25 (77 F)) 4.8 t 1 MHz Fnge mteri Stiness stee Gss mteri orosiicte O-ring mteri FPM Orering Informtion Oservtion Winows Oservtion Winows

38 Feetrougs Eectric Feetrougs Gener Eectric feetrougs for vcuum ppictions, s we s teir corresponing connectors, compy wit te Germn VDE Regutions 0100, 0660 n 0110, Section 1. Te tter refers to ir gps n ekge pts. A current feetrougs re teste ccoring to VDE Regutions Importnt Te speci region sfety regutions must e oserve! Tese my iffer from te regutions wic ppy in Germny! Te votges stte on te foowing pges ppy to tmosperic pressure n te rigt connector from Leyo. Te votge specifictions ppy so to tt prt of te feetroug wic is expose to te vcuum, provie te pressure in tese res is ess tn 10-1 mr (0.75 x 10-1 Torr). At pressures over 10-1 mr (0.75 x 10-1 Torr) votge rekowns my occur epening on te istnce etween te eectroes, te type of rrefie gs, te type of contmintion, te istriution of te eectric fie, etc. Opertors re vise to ceck ec ppiction iniviuy or to get in touc wit Leyo for vice. In ppictions were VDE regutions nee not e ppie, iger operting votges re permissie. Pese contct us for furter informtion regring your prticur ppiction. Te test n operting votges refer to vcuum pressure of < 1 x 10-4 mr (< 0.75 x 10-4 mr) n wen using te connectors recoene y Leyo. Eectric power my ony e ppie vi te extern pugs. Arevitions use in connection wit feetrougs: F Feetroug E Eectric L Liqui N Norm P Precision F Frequency H urrent HV Votge L Liner R Rotry 38

39 Feetrougs Eectric Feetrougs FE 16 / 9S FE 16 / 9 Vcuum connection 16 ISO- 16 ISO- Numer of feetrougs Votge per poe 1) urrent per poe 1) V A onnection Vcuum sie Air sie soer connection connector connector connector Dimeter of connecting wire Test votge () V / Hz 1.2 (0.05) 1.2 (0.05) 500 / / 50 Tigtness mr x x s -1 1 x x 10-9 Pressure (soute) 2) keout temperture (feetroug, connector) mr (Torr) ( F) 1 x 10-8 to 2.5 (0.75 x 10-8 to 2.5) 1 x 10-8 to 2.5 (0.75 x 10-8 to 2.5) 130 (266) 130 (266) Housing Insutor Se ontct (feetroug, connector) nicke-pte rss PEEK / Arit FPM go-pte rss nicke-pte rss PEEK / Arit FPM go-pte rss Orering Informtion Eectric Feetrougs onnector: vcuum sie onnector: ir sie FE 16 / 9S FE 16 / ) Loc regutions concerning use must e foowe 2) Pressure mx. 10 r (7.5 Torr) wit extern centering ring Dimension rwing for te feetroug FE 16/9S (eft) n te connector for ir sie (rigt) Dimension rwing for te feetroug FE 16/9 (eft), te connector for vcuum sie (mie) n te connector for ir sie (rigt) 39

40 Feetrougs Screw off tue Dimension rwing for te feetroug FE 40/7S (eft) n te connector for ir sie (rigt) Dimension rwing for te feetroug FE 40/7 (eft), te connector for vcuum sie (mie) n te connector for ir sie (rigt) 1 M Dimension rwing for te feetroug FEHV 40/1 (eft) n te connector for ir sie (rigt) Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 40

41 Feetrougs FE 40 / 7S FE 40 / 7 FEHV 40 / 1 Vcuum connection Numer of feetrougs Votge per poe 1) urrent per poe 1) onnection Vcuum sie Air sie Dimeter of connecting wire Test votge V A () kv / Hz 40 ISO- 40 ISO- 40 ISO soer connection connector screw couping connector connector connector i. 1.6 (0.06) i. 1.6 (0.06) i. 5 (0.2) 15 / 50 Tigtness mr x x s -1 Pressure (soute) 2) 1 x x x x 10-8 mr x x s -1 1 x 10-8 mr x x s -1 1 x 10-8 mr x x s -1 to 2.5 r (1.9 Torr) to 2.5 r (1.9 Torr) to 2.5 r (1.9 Torr) keout temperture (feetroug, connector) Housing Insutor Se ontct (feetroug, connector) ( F) 130 (266) 130 (266) 130 (266) crom-pte stee crom-pte stee crom-pte stee PTFE / Arit PTFE / Arit PTFE / Arit FPM FPM FPM go-pte stiness stee go-pte stiness stee nicke-pte rss Orering Informtion Eectric Feetrougs onnector: vcuum sie onnector: ir sie FE 40 / 7S FE 40 / 7 FEHV 40 / ) Loc regutions concerning use must e foowe 2) Pressure mx. 10 r (7.5 Torr) wit extern centering ring Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 41

42 Feetrougs Hig urrent Feetrougs Seection of eectroes Sie into mounte feetroug urrent connection wit wter cooing ø c 1 1 ø 2 Feetroug ø 3 Wter connection strigt eectroe urrent connection Strigt eectroe nge eectroe nge eectroe T-eectroe T-eectroe X c G 3/ G 3/ Dimension rwing for te feetroug FEH 40/1 (eft) n current connection wit wter cooing (rigt) Dimension rwings for te copper eectroes for te feetroug FEH 40/1 42

43 Feetrougs FEH 40/1 Vcuum connection Numer of feetrougs Votge urrent wit wter cooing V A A 40 ISO Tigtness mr x x s -1 Pressure (soute) 1 x x 10-8 mr to 2.5 r (mx. 10 r wit extern centering ring) keout temperture Housing Insutor Se ( F) 110 (230) uminum termopst n termoset FPM Orering Informtion Hig urrent Feetrougs urrent connection wit wter cooing 1) Strigt eectroe Ange eectroe T-eectroe FEH 40/ ) not insute 43

44 Feetrougs Rotry Feetrougs ISO- For trnsmitting ig torque Wit FPM sft se n erings FR 25/50 N FR 63/100 N Vcuum connection Feetroug / se Sft connection () Trnsfere torque Nm Rottion spee 1) 1/min Sft o Ri N Axi N Service ife (revoutions) Tigtness, sttic mr x x s -1 Pressure (soute) Operting temperture, mx. ( F) keout temperture ( F) Mteris expose to process mei Weigt kg (s) Orering Informtion 25 ISO- 63 ISO- FPM FPM i. 8 (0.31) i. 20 (0.79) x x x 10-9 mr to 1 r 1 x 10-9 mr to 1 r 50 (122) 50 (122) 110 (230) 110 (230) stiness stee, uminum, FPM stiness stee, uminum, FPM 0.2 (0.44) 2 (4.42) FR 25/50 N FR 63/100 N Rotry Feetroug ) 1) Wen reuce service ife is ccepte, te rottion spee cn e increse y up to fctor of two 2) entering ring R/uminum FPM/stiness stee g6 8 g g g x g6 66 g x g g Dimension rwing for te feetroug FR 25/50 N Dimension rwing for te feetroug FR 63/100 N 44

45 Feetrougs Liqui Feetrougs For H 2 O n LN 2 Termicy insute Especiy suite for very ot n very co ppictions FL 40K/2 Vcuum connection Feetroug / se onnection Numer of tues () 40 ISO- wee i. 8 x 1 (0.31 x 0.04) 2 Tigtness mr x x s -1 Pressure (soute) 1 x x 10-9 mr to 2.5 r (mx. 10 r wit extern centering ring) Temperture rnge Mteri ( F) -200 to +150 (-328 to +302) stiness stee Weigt kg (s) Orering Informtion Liqui Feetroug 0.3 (0.66) FL 40K/ Dimension rwing for te iqui feetroug FL 40K/2 45

46 Feetrougs Rotry / Liner Motion Feetrougs Two FPM sft ses Direct pus/pu n rotry ctution Wit ocking ring n option ntirottion evice 7 M3 2 Deti A 6 7 M3 Dimension Te Anti-rottion evice = 1 from FNRL 16/50 FNRL 25/ Dimension Te 1 A 3 2 Deti A Feetrougs FNRL 16/ g g FNRL 25/ g6 0.98g mx. 2 3 Dimension rwing for te nti-rottion evice FNRL 16/ FNRL 25/ Dimension rwing for te feetrougs FNRL FNRL 16/50 FNRL 25/ Importnt: In te te of Section Gener te Germn esigntion for te type of stee is so stte in ccornce wit AISI. 46