3 X-axis stroke length. 4 Y-axis stroke length

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3 Identification Number and Specification Example of identification number Single axis TX / P0 1 Example of identification number X-Y specification CTX / P01 5 C 1 1 Series 4 Motor and electrical devices code 1 Series 5 Motor and electrical devices code 2 Size 5 Motor type 2 Size 6 Motor type Stroke 6 Ball screw code X-axis stroke 7 Ball screw code 7 Resolurion 4 Y-axis stroke 8 Mounting direction 9 Resolution 1 Series TX Super Precision Positioning Table TX Single axis 1 Series CTX Super Precision Positioning Table X-Y specification 2 Size Width of table Select from Table 1. 2 Size Width of table Select from Table. Stroke 4 Motor and electrical devices code 5 Motor type Select from Table 1. with motor and electrical devices Super Precision Positioning Table TX is operated by full closed control. Electrical devices, C servo motor, driver, serial exchange unit, motor code, encoder cord and serial exchange cord are appended to the table. Select servomotor from Table 2. Combination of tables in different sizes is possible. X-axis stroke 4 Y-axis stroke Indicate the stroke by "cm". 5 Motor and electrical devices code Select from Table. with motor and electrical devices Super Precision Positioning Table TX is operated by full closed control. Electrical devices, C servo motor, driver, serial converter, motor cord, encoder cord and serial converter cord are appended to the table. 6 Ball screw code 5 5 lead lead 6 Motor type 7 Ball screw code Select servomotor from Table lead lead 7 Resolution No symbol For the motor of Yaskawa Electric Corporation 1 Minimum resolution 0.1 m 0.1 m or 0.2 m can be selected. 2 Minimum resolution 0.01 m 0.01 m, 0.02 m, 0.04 m or 0. m can be selected. 8 Mounting direction No symbol X-axis motor locates degrees from Y-motor in clockwise direction when looking down. C X-axis motor locates degrees from Y-motor in counterclockwise direction when looking down. Please refer the maximum speed on page 6. Table 1 s and stroke s TX20 Width of table Stroke unit Table 2 Motor types TX20 With brake Without brake Manufacture Y09 Y04 Yaskawa Electric Corporation Y1 Y5 Yaskawa Electric Corporation P01 P018 Panasonic Corporation J01 J018 Mitsubishi Electric Corporation Y040 Y044 Yaskawa Electric Corporation Y2 Y6 Yaskawa Electric Corporation P0 P019 Panasonic Corporation J0 J019 Mitsubishi Electric Corporation Y041 Y045 Yaskawa Electric Corporation Y Y7 Yaskawa Electric Corporation P0 P019 Panasonic Corporation J0 J019 Mitsubishi Electric Corporation Y042 Y046 Yaskawa Electric Corporation Y4 Y8 Yaskawa Electric Corporation P015 P020 Panasonic Corporation J015 J020 Mitsubishi Electric Corporation Remark For the detail of motor, see motor and driver specification on page to Resolution Please refer the maximum speed on page 6. Table s and stroke s C C Width of table 220 X-axis No symbol For the motor of Yaskawa Electric Corporation 1 Minimum resolution 0.1 m 0.1 m or 0.2 m can be selected. 2 Minimum resolution 0.01 m 0.01 m, 0.02 m, 0.04 m or 0. m can be selected. Stroke Y-axis unit Table 4 Motor types With brake Without brake Manufacture Y09 Y04 Yaskawa Electric Corporation C Y1 Y5 Yaskawa Electric Corporation P01 P018 Panasonic Corporation J01 J018 Mitsubishi Electric Corporation Y040 Y044 Yaskawa Electric Corporation C Y2 Y6 Yaskawa Electric Corporation P0 P019 anasonic Corporation J0 J019 Mitsubishi Electric Corporation Remarks 1. For the table with brake, motor with brake is mounted on Y-axis only. For example, if Y04 is selected, X-axis has Y09 and Y-axis has Y For the detail of motor, see motor and driver specification on page to 17. 1N 0.2f lbs inch 4

4 ccuracy Maximum Speed Table 5 ccuracy Single axis X-Y axis Stroke X-axis Y-axis Positioning accuracy Repeatability ost motion Parallelism in table operation ttitude accuracy 1 sec. Straightness in vertical Straightness in horizontal Squareness of X-Y travel TX C C Note 1 mounts in the table show pitching and yawing. unit Maximum speed of Super Precision Positioning Table TX is shown below. Maximum speed and resolution are given by the lead of ball screw and driver's parameter (Electric gear). ctual speed should not exceed values in Table 6 to 8. Table 6 Maximum speeds for the motor of YSKW EECTRIC CORPORTION ead of ball screw Resolution m/pulse Maximum speed 1 /s Maximum speed 2 /s Note 1 pplicable to motor code Y09 to Y046. Note 2 pplicable to motor code Y1 to Y8 Remarks 1. Values in are applicable for TX20 and. 2. ctual maximum speed may be affected by load condition.. If higher speed is required, change resolution by electric gear. Table 7 Maximum speeds for the motor of Panasonic Corporation Table 8 Maximum speeds for the motor of Mitsubishi Electric Corporation ead of ball screw Resolution m/pulse Maximum speed /s inear encoder serial converter 1 ead of ball screw Resolution m/pulse Maximum speed /s inear encoder serial converter PE71 TT PE71 TT PE71 TT PE71 TT Note 1 Selectable resolution is according to the type of linear encoder serial converter. Remarks 1. Values in are applicable to TX20 and. 2. ctual maximum speed may be affected by load condition.. If higher speed is required, change resolution by the switch in linear encoder serial coveter PE71 TT PE71 TT PE71 TT PE71 TT Note 1 Selectable resolution is according to the type of linear encoder serial converter. Remarks 1. Values in are applicable to TX20 and. 2. ctual maximum speed may be affected by load condition.. If higher speed is required, change resolution by the switch in linear encoder serial coveter. 5 1N 0.2f lbs inch 6

5 Maximum oad Mass Specifications for inear Motion Rolling Guides and Ball Screws Maximum load masses of Super Precision Positioning Table TX are shown in Table 9. The values in the table are reference values for the maximum mass that can be mounted on each models used in horizontal position and vary much depending on the position of load mass. Table 9 Maximum oad Mass The specifications of liner motion rolling guides and ball screws used in Super Precision Positioning Table TX are shown in Table and 11 as a reference. These load ratings are not applicable for the maximum load on product. Table Specifications of linear motion rolling guide Slide unit 2 Y Slide unit 1 oad mass W H /2 /2 0 X TX20 Ball screw lead Height H ength unit Remarks 1. The above values are obtained by calculating the mass for which the rating life of the ball screw or linear motion rolling guide becomes 18,000 hours when the table is operated continuously at the maximum speed for each size, and 0.2s each, at acceleration and at deceleration. 2. For CTX, consider load mass for each axis independently. /2 /2 Slide unit 4 Slide unit Table 11 Specifications of ball screws Driving position Yd,Zd 1N 0.2f lbs inch 7 8 TX20 Basic dynamic load rating 1 Basic static load rating 1 C C0 N N 0 Z X 0 Z ocations Note 1 Values in the table are load ratings for one slide unit. Remark For X-Y axis table, load rating of each axis is the same as that of single axis. TX20 Type ead Outside dia. of screw xial clearance Remark For X-Y axis table, load rating of each axis is the same as that of single axis. Y Yd Basic dynamic load rating C N Zd Basic static load rating Ground type ball screw Ground type ball screw 0 2 Ground type ball screw Ground type ball screw C0 N

6 Table Inertia and Starting Torque Sensor Specification Table 12 Table inertia, coupling inertia and starting torque Single axis X-Y axis Mode number TX20 C C Stroke X-axis Y-axis Table inertia JT 5 m 2 ead 5 ead Coupling inertia JC 5 m 2 Starting torque TO N m Remark For X-Y axis table, values in the table show of X axis. Values of Y axis are applicable to the single axis in the table. Table 1 Specifications of sensor Sensor Pre-origin, CW limit, CCW limit Item Type Photo sensor Power supply voltage DC5 24V % Current consumption 15m or less Open collector Max. current m Output pplied voltage DC0V or less Residual voltage 0.7V or less at m in-flow current 0.4V or less at 16m in-flow current Output operation When approaching ON Operation indicator Operation indicator ED red Circuit diagram Main circuit Table 15 Sensor timing chart CW CCW VCC OUT1 OUT2 GND Table Specifications of connector Pin No Signal name Pre-origin CW limit CCW limit Power input GND Sensor-side connector type Cap housing Contactor Opposite-side connector type 1 Plug housing Contactor 16-1 Note 1 Opposite-side connector and contactor are not appended. Remarks 1. Connector is made by Tyco Electronics Co., td. 2. The origin signal of linear encoder from driver can be used as origin point. number C C TX20 OFF E C S/2 1 OFF S/2 1 F OFF Origin inear encoder Pre-origin Photo sensor CCW limit Photo sensor CW limit Photo sensor Mechanical stopper Ball screw lead C E F /2 1 /2 1 /2 1 / unit Note 1 Refer to dimension tables on page 19 to 22. Remark For X-Y axis table, specification of each axis are the same as those of single axis N 0.2f lbs inch 9

7 System Configuration Super Precision Positioning Table TX is operated by highly accurate full-closed-loop control and electric devices C servo motor, driver, serial exchange unit, motor code, encoder code and serial exchange unit cord to each model are designated to achieve best performance. s of these devices are shown below. Exclusive controller, pulse and limit codes are prepared by customer. o Teaching box TEM5-TB i Prograable controller CTN480G Power supply DC24V Power cord!0 9 Power cord C 20V e Driver 1 Serial converter is appended for YSKW motor. inear encoder serial converter is appended for Panasonic or Mitsubishi motor. 2 Power code is prepared by customer. DC24V power supply is prepared by customer. Items qsuper Precision Positioning Table TX Motor without brake Motor with brake 1 edriver wmotor cord wmotor cord rencoder cord tserial converter yserial converter cord upower supply cord for encoder Fig.1 Electric Devices w r u y t Serial converter Table 16 Electric devices for the motor of Yaskawa Electric Corporation ppended code Note 1 For "with brake model", power supply for brake release is needed. 2 Separation cord for encoder power supply is required when Panasonic motor is selected. Remarks 1. For CTX X-Y stage, two sets of driver and serial converter are appended. 2. The of motor cord, encoder cord and serial converter cord are m each.. For "with brake model" in X-Y axis table, brake is applicable to Y axis only.. Example If Y04 is selected, X-axis has Y09 and Y-axis has Y04. q Super Precision Positioning Table TX TX Single axis CTX X-Y specification C C TX20 Y09 Y1 Y040 Y2 Y041 Y Y042 Y4 JZSP-CSM02-0-E JZSP-CSM0-0-E Y04 Y5 Y044 Y6 Y045 Y7 Y046 Y8 JZSP-CSM12-0-E JZSP-CSM1-0-E SGDS SGDV-1R601 SGDS SGDV-2R801 SGDS SGDV-R801 SGDS SGDV-5R E E E E JZSP-CSP01-0-E JZDP-D E JZSP-CP-0-E Not appended 2 Table 18 Electric devices for the motor of Panasonic Corporation ppnded Items qsuper Precision Positioning Table TX Motor without brake Motor with brake 1 wmotor cord wmotor cord brake cord 2 edriver rencoder cord tinear encoder serial converter yinear encoder cord upower supply cord for encoder code C C TX20 P01 P0 P015 MFMC002EED P018 P019 P020 MFMC002EED MFMCB000GET MDDT7F MBDDT22F MBDDT520F MFEC000ED PE71 TT or PE71 TT Special cord by 4 Special cord by 5 Note 1 For "with brake model", power supply for brake release is needed. 2 For "with brake model", brake cord is appended. Selectable resolution is according to the type of linear encoder serial converter. See page 6. 4 number TE20T4-EC0 5 number TE20T-EC Remarks 1. For CTX X-Y stage, two sets of driver and serial converter are appended. 2. The of motor cord, encoder cord and serial converter cord are m each.. The of power supply cord for linear encoder is 0.2m. 4. For "with brake model" in X-Y axis table, brake is applicable to Y axis only. 4. Example If P018 is selected, X-axis has P01 and Y-axis has P018. Table 19 Electric devices for the motor of Panasonic Corporation with prograable controller CTN480G Separate purchase required Items code iprograable controller CTN480G oteaching box TEM5-TB TEV2-D!0Pulse and limit cord TEV-D Remarks 1. Cord in have high bending resistance. 2. The of pulse and limit cord can be specified by in the end of supplemental code. Selecting is up to 20m in increments of 1m. 2. The under m is also selected by two digits. Example of m: TEV2-D0. The of pulse and limit cord is 1.5m. 4. For X-Y axis table, two pieces each of pulse and limit cord are necessary. Table 17 Electric devices for the motor of Yaskawa Electric Corporation with prograable controller CTN480G Separate purchase required iprograable controller CTN480G oteaching box TEM5-TB TEM7-D!0Pulse and limit cord TEM8-D Remarks 1. Cord in have high bending resistance. 2. The of pulse and limit cord can be specified by in the end of supplemental code. Selecting is up to 20m in increments of 1m. 2. The under m is also selected by two digits. Example of m: TEM7-D0. The of pulse and limit cord is 1.5m. 4. For X-Y axis table, two pieces each of pulse and limit cord are necessary. 11 Items code 1N 0.2f lbs inch 12

8 System Configuration Specifications of Motor and Driver Table 20 Electric devices for the motor of Mitsubishi Electric Corporation ppnded Motor and Driver of Yaskawa Electic Corporation RoHS compliance Items code qsuper Precision Positioning Table TX C C TX20 P Motor without brake Motor with brake 1 edriver rencoder cord tinear encoder serial converter yinear encoder cord wmotor cord wmotor cord brake cord 2 upower supply cord for encoder J01 J0 J015 MR-PWS1CB2M-1- J018 J019 J020 MR-PWS1CB2M-1- MR-BKS1CB2M-1- MR-J-20-KE0 MR-J-40-KE0 MR-J--KE0 MR-JENCB2M-1- PE71 TT or PE71 TT Special cord by 4 Not appended 5 Note 1 For "with brake model", power supply for brake release is needed. 2 For "with brake model", brake cord is appended. Selectable resolution is according to the type of linear encoder serial converter. See page 6. 4 number TE20T4-EC0 5 Separation cord for encoder power supply is required when Panasonic motor is selected. Remarks 1. For CTX X-Y stage, two sets of driver and serial converter are appended. 2. The of motor cord, encoder cord and serial converter cord are 2m each.. The of linear encoder cord is m. 4. For "with brake model" in X-Y axis table, brake is applicable to Y axis only. 4. Example If J018 is selected, X-axis has J01 and Y-axis has J018. Table 21 Electric devices for the motor of Mitsubishi Electric Corporation with prograable controller CTN480G Separate purchase required Items iprograable controller oteaching box!0pulse and limit cord code CTN480G TEM5-TB TEV4-D TEV5-D Remarks 1. Cord in have high bending resistance. 2. The of pulse and limit cord can be specified by in the end of supplemental code. Selecting is up to 20m in increments of 1m. 2. The under m is also selected by two digits. Example of m: TEV2-D0. The of pulse and limit cord is 1.5m. 4. For X-Y axis table, two pieces each of pulse and limit cord are necessary. Motor specifications Motor code Y09 Y040 Y041 Y042 Y04 Y044 Y045 Y046 Y1 Y2 Y Y4 Y5 Y6 Y7 Y8 SGMS-02C21-E SGMS-04C21-E SGMS-06C21-E SGMS-08C21-E SGMS-02C2C-E SGMS-04C2C-E SGMS-06C2C-E SGMS-08C2C-E SGMV-0221 SGMV-0421 SGMV-0621 SGMV-0821 SGMV-022C SGMV-042C SGMV-062C SGMV-082C Motor mounting dimension Motor code Power supply voltage V M Rated output W Rated torque N m Instantaneous maximum torque N m Rated number of revolution r /min W M R E d D P M E R d D 4-M 000 unit Motor inertia JM 4 m Encoder specification Incremental 17bits 172pulse/rev Coon for incremental and absolute 20bits 48576pulse/rev Mass Y09 Y040 Y041 Y042 Y04 Y044 Y045 Y046 Y1 Y2 Y Y4 Y5 Y6 Y7 Y N 0.2f lbs inch

9 Specifications of Motor and Driver Driver specifications code of driver Item pplicable motor code Rated output Servo motor Feed back inear encoder Coand input pulse SGDS-0202-E SGDS-0402-E SGDS-0802-E Y09 Y04 Y040 Y044 Y041 Y045 Y042 Y046 W W 600W 7W Serial encoder Selection one from Symbol with pulse line, CCW or CW with pulse line, two phases pulse with -degree difference -phases or B-phases. Motor and Driver of Panasonic Corporation RoHS compliance D P Type of coand input pulse Capability of coand input speed Main power supply voltage Control circuit supply voltage Continuous rated current rms Maximum consumption current rms mbient temperature in operation mbient temperature in storage mbient temperature in operation and storage Mass Ref. Driver specifications code of driver Item pplicable motor code Rated output Servo motor Feed back inear encoder Coand input pulse Type of coand input pulse Capability of coand input speed Main power supply voltage Control circuit supply voltage Continuous rated current rms Maximum consumption current rms mbient temperature in operation mbient temperature in storage mbient temperature in operation and storage Mass Ref. ine driver 1Mpps Single phase C 20V 15 % /60Hz Single phase C 20V 15 % /60Hz %RH or less Keep dewdrop free SGDV-1R SGDV-2R SGDV-R SGDV-5R Y1 Y5 Y2 Y6 Y Y7 Y4 Y8 W W 5W 7W Serial encoder Selection one from Symbol with pulse line, CCW or CW with pulse line, two phases pulse with -degree difference -phases or B-phases. ine driver Open collector ine driver 4Mpps Open collector kpps Three phases C 20V 15 % /60Hz Three phases C 20V 15 % /60Hz %RH or less Keep dewdrop free Motor specifications Motor code P01 P0 P015 P018 P019 P020 Item MSMD022S1 MSMD042S1 MSMD082S1 MSMD022S1B MSMD042S1B MSMD082S1B Motor mounting dimension Motor code P01 P0 P015 P018 P019 P020 Driver specifications Power supply voltage V code of driver pplicable motor code Rated output Servomotor Feed back inear encoder Coand input pulse M Rated output W 7 7 E R Rated torque N m d Instantaneous maximum torque N m M Rated number of revolution r /min W M R E d D P M unit Motor inertia JM 4 m MDDT7F MBDDT22F MBDDT520F P01 P018 P0 P019 P015 P020 W W 7W Serial encoder Incremental encoder Selection one from Symbol with pulse line, CCW or CW with pulse line, two phases pulse with -degree difference -phases or B-phases. Encoder specification Coon for incremental and absolute 17bits 172pulse/rev Mass Type of coand input pulse Capability of coand input speed ine driver 4Mpps Main power supply voltage Single phase 15 % C 240V /60Hz Single phase Three phases C 240V 15 % /60Hz Continuous rated current rms Maximum consumption current rms Control circuit supply voltage mbient temperature in operation mbient temperature in storage mbient temperature in operation and storage Mass Ref Single phase C 240V 15 % /60Hz 0 55 Keep freeze free Keep freeze free %RH or less Keep dewdrop free N 0.2f lbs inch 16

10 Caution in Use Motor and Driver of Mitsubishi Electric Corporation RoHS compliance Motor specifications M E R d D 4-M P Super Precision Positioning Table TX is a precision equipment. careful handling is strongly required. Do not apply any excessive force or heavy shock. Make sure the mounting surfaces to be free from dirt and harmful foreign objects. Good flatness is required for mounting surfaces to assure positioning accuracy. 8 m or better is recoended. Grease is applied to the linear motion rolling guide and ball screw at delivery. Dust preventive cover is required to protect the inside of table from foreign particles or dusts. In case foreign particles or dusts enter into the table, intensive cleaning and re-greasing are necessary. The re-lubrication interval varies depending on the operating conditions of the table. six month interval is generally recoended. If the table operation consists of reciprocating motions with many cycles and long strokes, re-lubrication in every three months with replacing old grease is recoended. Super Precision Positioning Table TX is machined, assembled and adjusted very precisely. Therefore, never disassemble or modify the table. inear encoder is made of glass. Great care is necessary not to apply load and/or shock to it. Please make sure that surface of linear scale must be kept clean by ethyl alcohol or alternative cleaning solution, otherwise, malfunction or irregular operation may happen. In the application of dusty environment, dust protective cover for linear encoder is recoended. Motor code Power supply voltage V Rated output W Rated torque N m Instantaneous maximum torque N m Rated number of revolution r /min Motor inertia JM 4 m 2 Encoder specification Mass J01 J0 J015 J018 J019 J020 HF-KP2 HF-KP4 HF-KP7 HF-KP2B HF-KP4B HF-KP7B Coon for incremental and absolute 18bits 2624pulse/rev Motor mounting dimension unit Motor code W M R E d D P M J01 J0 J015 J018 J019 J Driver specifications code of driver Item pplicable motor code Rated output Servomotor Feed back inear encoder Coand input pulse Type of coand input pulse Capability of coand input speed Main power supply voltage Control circuit supply voltage Continuous rated current rms Maximum consumption current rms mbient temperature in operation mbient temperature in storage mbient temperature in operation and storage Mass Ref. MR-J-20-KE0 MR-J-40-KE0 MR-J--KE0 J01 J018 J0 J019 J015 J020 W W 7W Serial encoder Incremental encoder Selection one from Symbol with pulse line, CCW or CW with pulse line, two phases pulse with -degree difference -phases or B-phases. ine driver Open collector ine driver 4Mpps Open collector kpps Single phase Three phases C 20V 15 % /60Hz Single phase C 20V 15 % /60Hz Keep freeze free Keep freeze free %RH or less Keep dewdrop free N 0.2f lbs inch 18

11 Dimension Super Precision Positioning Table TX Dimension Super Precision Positioning Table TX TX20 4-M5 depth 4-M5 depth 4-M depth 20 4-M8 depth number -0-1 Stroke S Total Mounting holes for bed unit Table mass 1 Ref number TX20-00 TX20- Stroke S Total Mounting holes for bed unit Table mass 1 Ref TX M M S/2 15 S/ S/2 20 S/ n-mounting hole for M n-mounting holes for M 25.2 Note 1 Motor weight is not included. 2 Refer "specifications of Motor and Driver" on page to 17. Note 1 Motor weight is not included. 2 Refer "specifications of Motor and Driver" on page to M8 depth 16 4-M5 depth number Stroke S Total Mounting holes for bed number pitch n unit Table mass 1 Ref M depth 20 4-M depth S/2 420 S/ M M S/2 220 S/ number Stroke S Total Mounting holes for bed number pitch n unit Table mass 1 Ref n-mounting holes for M n-mounting holes for M 17 0 Note 1 Motor weight is not included. 2 Refer "specifications of Motor and Driver" on page to 17. Note 1 Motor weight is not included. 2 Refer "specifications of Motor and Driver" on page to N 0.2f lbs inch 20

12 Dimension Super Precision Positioning Table TX Dimension Super Precision Positioning Table TX C C M 2 21 Y M5 depth 4-M5 depth n-mounting hole for M5 M Y M5 depth 4-M8 depth 16 n-mounting holes for M X 25 M 2 15 number C- C-20 C-2020 C-020 X M 2 21 unit Stroke S Total Mounting holes for bed Table mass 2 Ref. X-axis Y-axis X Y Note 1 Motor weight is not included. 2 Refer "specifications of Motor and Driver" on page to 17. Remark Different stroke s, combination of different table sizes and tables with plastic cable carrier can be available. Consult. number C-2020 C-020 C-00 C- unit Stroke S Total Mounting holes for bed Table mass 2 Ref. X-axis Y-axis X Y number pitch n Note 1 Motor weight is not included. 2 Refer "specifications of Motor and Driver" on page to 17. Remark Different stroke s, combination of different table sizes and tables with plastic cable carrier can be available. Consult. 21 1N 0.2f lbs inch 22

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