Super Precision Positioning Table

Transcription

1 uper Precision Positioning Table Gentle to The Earth CT-7184 June 2011 Overseas Dept.

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3 Identifi cation Number and pecifi cation Example of identification number (ingle axis) 1 eries 2 ize 3 troke length 1 eries 2 ize TX 220 M 10 / Y With or without motor TXMuper Precision Positioning Table TXM ingle axis Width of table elect from Table 1. 3 troke length elect from Table 1. 4 With or without motor No symbol Without motor With Motor If the motor is prepared on the customer side, specify Without motor. no symbol Motor type elect motor from Table 2. When Without motor no symbolis selected in item 4, motor attachment and coupling applicable to the selected motor are mounted at delivery. 6 Ball screw code 7 Linear encoder lead 1010 lead When V is specified on item, specify No symbol. Please refer to Maximum speed shown on page 6 for resolution. Table 1s and stroke length Width of troke length table TX420M Motor Type 6 Ball screw code 7 Linear Encoder type No symbol Without linear encoder 0 Resolution pplicable for Y 1 Resolution pplicable for P and J 10 Resolution pplicable for P and J Table 2Motor type Motor code Without Manufacture With breke brake Y01 Y0 Yaskawa Electric P023 P028 Panasonic J013 J018 Mitsubishi Electric V011 V012 Oriental Motor Y02 Y06 Yaskawa Electric P024 P029 Panasonic J014 J019 Mitsubishi Electric V013 V014 Oriental Motor Y03 Y07 Yaskawa Electric P024 P029 Panasonic J014 J019 Mitsubishi Electric V013 V014 Oriental Motor Y04 Y08 Yaskawa Electric TX420M P02 P030 Panasonic J01 J020 Mitsubishi Electric Remark : For the detail of motor, see motor and driver specifi cation on page 16 to 19. Example of identification number (X-Y specification) CTX 220 M / Y02 C 0 1 eries 2 ize 3 X-axis stroke length 4 Y-axis stroke length With or without motor 1 eries Width of table 2 ize elect from Table 3. Combination of tables in different size is possible. 3 X-axis stroke length 4 Y-axis stroke length Indicate the stroke length by cm. CTXMuper precision Positioning Table TXM X-Y specification lect from Table 3. No symbol Without motor With or without motor With Motor If the motor is prepared on the customer side, specify Without motor. no symbol 6 Motor type elect motor from Table 4. When Without motor no symbolis selected in item, motor attachment and coupling applicable to the selected motor are mounted at delivery. 7 Ball screw code 8 Mounting direction lead 1010 lead 6 Motor type 7 Ball screw code 8 Mounting direction 9 Linear encoder No symbol X-axis motor locates 90 degrees from Y-motor in clockwise direction when looking down. C X-axis motor locates 90 degrees from Y-motor in counterclockwise direction when looking down. No symbol Without linear encoder 0 Resolution pplicable for Y 9 Linear encoder 1 Resolution pplicable for P and J 10 Resolution pplicable for P and J When V is specified on item 6, specify No symbol. Please refer to Maximum speed shown on page 6 for resolution. Table 3s and stroke length Width of table C C 220 troke length X-axis Y-axis Table 4Motor type Motor code Without brake With brake Motor manufacture Y01 Y0 Yaskawa Electric C P023 P028 Panasonic J013 J018 Mitsubishi Electric V011 V012 Oriental Motor Y02 Y06 Yaskawa Electric C P024 P029 Panasonic J014 J019 Mitsubishi Electric V013 V014 Oriental Motor Remarks 1 For the table with brake, motor with brake is mounted on Y-axis only. For example, if Y0 is selected, X-axis has Y01 and Y-axis has Y0. 2 For the detail of motor, see motor and driver specifi cation on page 16 to = inch 4

4 ccuracy Maximum peed Table ccuracy ingle axis X-Y axis TX420M C C troke length X-axis Y-axis Positioning accuracy Parallelism Repeatability Lost motion 1 in table operation Notes 1 The values show backlash when without linear encoder. 2 The values in the table show pitching yawing. Remark The values in are applicable to tables without linear encoder ttitude ccuracy 2 sec traightness in vertical traightness in horizontal unit : quareness of X-Y travel Maximum speed of uper Precision Positioning Table TX is different by application of linear encoder. Maximum speed and resolution are given by the lead of ball screw, drivers parameter Electric gear, and setting of linear encoder serial converting unit. ctual speed should not exceed values in Table 6 to 9. Table with Linear encoder Table 6Maximum speed for the motor of Yaskawa Electric Corporation Resolution Maximum speed/s m/pulse lead lead Remarks 1Values in are applicable for TX320 and TX420. 2ctual maximum speed may be affected by load condition. 3If higher speed is required, change resolution by electric gear. Table 7Maximum speed for the motor of Panasonic Corporation Resolution Maximum speed/s m/pulse lead lead Note 1 electable resolution is according to the type of linear encoder serial converter. Remarks 1Values in are applicable for TX320 and TX420. 2ctual maximum speed may be affected by load condition. 3If higher speed is required, change resolution by the switch in linear encoder serial converter. erial converter JZDP-D E Linear encoder serial converter 1 PE371TTL0 PE371TTL10 Table 8Maximum speed for the motor of Mitsubishi Electric Corporation Resolution Maximum speed/s Linear encoder m/pulse lead lead10 serial converter PE371TTL PE371TTL10 Note 1 electable resolution is according to the type of linear encoder serial converter. Remarks 1Values in are applicable for TX320 and TX420. 2ctual maximum speed may be affected by load condition. 3If higher speed is required, change resolution by the switch in linear encoder serial converter. Table without Linear Encoder Table 9Maximum speed for the table without linear encoder Type of motor Number of motor rotation Maximum speed/s r/min lead lead10 C ervo motor TX420M tepper motor RemarkFor CTX, each axis can be considered as single stage. 1 = inch 6

5 Maximum Load Mass pecifi cations fof Linear Motion Rolling Guides and Ballcrews Maximum load masses of uper Precision Positioning Table TX are shown in Table10. The values in the table are reference values for the maximum mass that can be mounted on each models used in horizontal position and very much depending on the position of load mass. Table 10Maximum Load Mass The specifications of linear motion rolling guides and ball screws used in uper Precision Positioning Table TX are shown in Table 11 and 12 as reference. These load ratings are not applicable for the maximum load on product. Table 11pecifications of linear motion rolling guide L Load massw lide unit 2 Y lide unit 1 TX420M Ball screw lead unit : kg Height LengthL H Remarks 1 The above values are obtained by calculating the mass for which the rating life of the ball screw or linear motion rolling guide becomes 18,000 hours when the table is operated continuously at the maximum speed for each size, and 0.2s each, at acceleration and direction. 2For CTX, consider load mass for each axis independently. H Basic dynamic load rating 1 Basic static load rating 1 C C 0 N N L Locations TX420M Note 1 Values in the table are load ratings for one slide unit. Remark For X-Y axis table, load rating of each axis is the same as that of single axis. Table 12pecification of ball screws L L/2 L/2 lide unit 4 /2 /2 lide unit 3 Type 0 0 Z lead Outside dia. of screw xial clearance Location of center of thrust Y d,z d Y d Basic dynamic load rating C N Z d Basic static load rating C 0 N Ground type ball screw Ground type ball screw Ground type ball screw TX420M Ground type ball screw RemarkFor X-Y axis table, load rating of each axis is the same as that of single axis. X X 0 Z Y 7 1 = inch 8

6 Table inertia and tarting Torque ensor pecifi cation Table 13Table inertia, coupling inertia and starting torque ingle axis troke length -axis -axis Table inertia J T 10 kgm 2 lead lead Coupling Inertia J C 10 kgm 2 tarting torqu T 0 Nm TX420M C C RemarkFor X-Y axis table, values in the table show of X axis. Values of Y axis are applicable to the single axis in table. X-Y axis Table 14pecifications of sensors ensor Photo sensor Item Limit, Pre-origin, Origin Power supply voltage DC24V10 Current consumption 1m or less Open collector, NPN transistor Max. current 0m Output pplied voltage DC30V or less Residual voltage 0.7V or less at 0m in-flow current 0.4V or less at 16m in-flow current Output operation When approachingon/off Optional 1 Operation indicator LED red, Light ON Circuit diagram Note 1 OUT1 is selected for ON when approaching at delivery. Table 1pecifications of connectors Pin No. ignal name ensor-side connector type Opposite-side connector type 1 1 Origin Cap housing Plug housing Pre-origin 3 CW limit 4 CCW limit Power input 6 GND Main circuit Connector Connector Note 1 Prepare the opposite-side connector by customer. Remarks 1Connector is made by Tyco Electronics Japan G.K. 2 bove table shows connector specifi cation in case of table with stepper motor. In case of C servomotor, origin signal from encoder of linear encoder shall be used. VCC OUT1 OUT2 GND 9 1 = inch 10

7 ensor pecifi cation ystem Confi guration Table 16Timing chart of sensors Most suitable control system is prepared for each type of motor with uper Precision Positioning Table TX. Please specify electric devices with following model number separately when ordering a positioning table. CW CCW C servo motor Teaching box TE10M-TB Prograable controller CTN480G uper Precision Positioning Table TXM TXMingle axis Ball screw lead C E F TX420M OFF E 3 L/ L/ L/ L/ Note 1 : Refer to dimension tables on page 21 to 26. Remark : For X-Y axis table, specifi cation of each axis are the same as those of single axis. B C /2 1 OFF /2 1 F OFF OriginWithout linear encoder OriginWith linear encoder Pre-originPhoto sensor CCW limitphoto sensor CWlimitPhoto sensor Mechanical stopper unit : Fig.1Electric Devices for C servo motor Notes 1 : erial converter is appended for Yaskawa Electric motor. Linear encoder serial converter is appended for Panasonic or Mitsubishi Electric motor. 2 : Power cord shall be prepared at customer side. 3 : DC24V power supply shall be prepared at customer side. Table 17Electric devices for the motor of Yaskawa Electric Corporation number uper Precision Positioning Table TX TX TX220 CTX CTX220 TX320 TX420 Motor without Motor code Y01 Y02 Y03 Y04 brake Motor cord Motor with brake 1 3 Power supply DC24V Power cord 2 JZP-CM02--E JZP-CM22--E JZP-CM03--E JZP-CM23--E Motor code Motor cord Power cord 2 GDV-1R601 JZP-CM12--E JZP-CM32--E GDV-2R801 erial converter 1 GDV-3R801 CTXMX-Y axis JZP-CM13--E JZP-CM33--E GDV-R01 Driver With linear encoder Without linear encoder GDV-1R601 GDV-2R801 GDV-3R801 GDV-R01 Encoder cord JZP-CP01--EJZP-CP21--E erial converter cord 2 JZP-CLP70--E erial converter 3 JZDP-D E Driver Notes 1 : For table with brake, power supply for brake release shall be prepared at customer side. 2 : With linear encoder, serial converter cord shall be prepared at customer side. 3 : With linear encoder, serial converter is appended. Remarks 1 : Cord inhave high bending resistance. 2 : Each of is necessary for single axis specifi cation without linear encoder. Each two sets of are necessary for X-Y axis specifi cation without linear encoder. Each of is necessary for single axis specifi cation with linear encoder. Each two sets of are necessary for X-Y axis specifi cation with linear encoder. 3 : Length of motor cord, encoder cord, serial converter cord can be selectable from 3m, m, 10m, or 20m by at the end of model number. The length under 10m is also selected by two digits.example of 3m : JZP-CM02-03E 4 : For X-Y axis table with brake, brake on motor is applicable to Y-axis only. Example : If Y0 is selected, X-axis has Y01 and Y-axis has Y0. 11 Table 18Electric devices for the motor of Yaskawa Electric Corporation with R prograable controller CTN480G number Prograable controller CTN480G Teaching box TE10M-TB TE10M7-LD Pulse and limit cord TE10M8-LD Remarks 1 : Cord inhave high bending resistance. 2 : The length of pulse and limit cord can be specifi ed by in the end of supplemental code. electing length is up to 20m in increments of 1m. The length under 10m is also selected by two digits.example of 3m : TE10M7-LD03 3 : The length of pulse and limit cord is 1.m. 4 : For X-Y axis table, two pieces of pulse limit cord are necessary. 1 = inch 12

8 ystem Confi guration Table 19Electric devices for the motor of Panasonic Corporation uper Precision Positioning Table TX Motor without brake Motor with brake 1 TX CTX number TX220 TX320 CTX220 TX420 Motor code P023 P024 P02 Motor cord MFMC00NJD Motor code P028 P024 P030 Motor cord MFMC00NJD Brake cord 2 MFMCB00PJT Driver MDHT107 MBDHT210 MCDHT320 Encoder cord MFEC00MJD Linear encoder cord 3 TE20U7-EC Linear encoder serial converter 4 PE371TTL0or PE371TTL10 Notes 1 : For table with brake, power supply for brake release shall be prepared at customer side. 2 : For table with brake, brake cord shall be prepared at customer side. 3 : With linear encoder, linear encoder serial converter cord is required. 4 : With linear encoder, linear encoder serial converter corresponding to specifi ed resolution is appended. Please refer to Maximum speed shown on page 6. Remarks 1 : Each of is necessary for single axis specifi cation without linear encoder. Each two sets of are necessary for X-Y axis specifi cation without linear encoder. Each of is necessary for single axis specifi cation with linear encoder. Each two sets of are necessary for X-Y axis specifi cation with linear encoder. 2 : Length of motor cord and encoder cord can be selectable from 3m, m, 10m, or 20m by at the end of model number. The length under 10m is also specifi ed by two digits.example of 3m : MFMC0030NJD 3 : Length of linear encoder serial converter cord can be selectable from 1m or 2m by at the end of model number. The length is specifi ed by two digits.example of 1m : TE20U7-EC01 4 : For X-Y axis table with brake, brake on motor is applicable to Y-axis only. Example : If P028 is selected, X-axis has P023 and Y-axis has Y028. Table 20Electric devices for the motor of Panasonic Corporation with R Prograable controller CTN480G number Prograable controller CTN480G Teaching box TE10M-TB TE10V2-LD Pulse and limit cord TE10V3-LD Remarks 1 : Cord inhave high bending resistance. 2 : The length of pulse and limit cord can be specifi ed by in the end of supplemental code. electing length is up to 20m in increments of 1m. The length under 10m is also selected by two digits. (Example of 3mTE10V2-LD03 3 : The length of pulse and limit cord is 1.m. 4 : For X-Y axis table, two pieces of pulse limit cord are necessary. Table 21 Electric devices for the motor of Mitsubishi Electric Corporation number uper Precision Positioning Table TX TX CTX TX220 CTX220 Motor code J013 J014 J01 Motor without MR-PW1CBLM-1-L brake Motor cord MR-PW1CBLM-1-H Motor code J018 J019 J020 MR-PW1CBLM-1-L Motor with Motor cord MR-PW1CBLM-1-H brake 1 MR-BK1CBLM-1-L Brake cord 2 MR-BK1CBLM-1-H With linear encoder MR-J3-20-KE00 MR-J3-40-KE00 MR-J3-70-KE00 Driver Without linear encoder MR-J3-20 MR-K3-40 MR-J3-70 MR-J3ENCBLM-1-L Encoder cord MR-J3ENCBLM-1-H Linear encoder cord 3 TE20T4-EC Linear encoder serial converter 4 PE371TTL0or PE371TTL10 Notes 1 : For table with brake, power supply for brake release is needed. 2 : For table with brake, brake cord shall be prepared at customer side. 3 : With linear encoder, linear encoder serial converter cord shall be prepared at customer side. 4 : With linear encoder, linear encoder serial converter corresponding to specifi ed resolution is appended. Please refer to Maximum speed shown on page 6. Remarks 1 : Cord in have high bending resistance. 2 : Each of is necessary for single axis specifi cation without linear encoder. Each two sets of are necessary for X-Y axis specifi cation without linear encoder. Each of is necessary for single axis specifi cation with linear encoder. Each two sets of are necessary for X-Y axis specifi cation with linear encoder. 3 : Length of motor cord, encoder cord, serial converter cord can be selectable from 2m, m, or 10m by at the end of model number. The length under 10m also is specifi ed by two digits.example of 2m : MR-PW1CBL2M-1-L 4 : Length of linear encoder serial converter cord can be selectable from 1m or 2m by at the end of model number. The length is specifi ed by two digits.example of 1m : TE20T4-EC01 : For X-Y axis table with brake, brake on motor is applicable to Y-axis only. Example : If J018 is selected, X-axis has J013 and Y-axis has J018. Table 22 Electric devices for the motor of Mitsubishi Electric Corporation with R Prograable controller CTN480G number Prograable controller CTN480G Teaching box TE10M-TB TE10V2-LD Pulase and limit cord TE10V3-LD Remarks 1 : Cord inhave high bending resistance. 2 : The length of pulse and limit cord can be specifi ed by in the end of supplemental code. electing length is up to 20m in increments of 1m. The length under 10m is also selected by two digits.example of 3m : TE10V4-LD03 3 : The length of pulse and limit cord 1.m. 4 : For X-Y axis table, two pieces of pulse limit cord are necessary. TX320 TX = inch 14

9 ystem Confi guration pecifi cations of Motor and Driver tepper motor C servo motor and Driver of Yaskawa Electric Corporation (RoH compliance) Teaching box TE10M-TB CTN480G uper Precision Positioning Table TXM TXMingle axis P Driver D CTXMX-Y axis LE d Notes 1 : Power cord is prepared by customer. 2 : DC24V power supply is prepared by customer. Table 23Electric devices for the motor of Oriental Motor 1 Fig.2Electric devices for tepper motor number uper Precision Positioning Table TX TX TX220 CTX CTX220 Motor code V011 V013 Motor without TE20R8-M Motor cord brake TE20R9-N Driver RKD14L- RKD14H- Motor code V012 V014 Motor with brake 1 Motor cord TE201-MB TYE202-NB Driver RKD14LM- RKD14HM- Note 1 : For with brake model, power supply for brake release is needed. Remarks 1 : Cord inhave high bending resistance. 2 : Each of and is necessary for single axis specifi cation. Each two sets of and are necessary for X-Y axis specifi cation. 3 : The length of motor cord can be specifi ed by in the end of supplemental code. electing length is up to 20m in increments of 1m. The length under 10m is also selected by two digits.example of 3m : TE20R8-M03 4 : For X-Y axis table with brake, brake on motor is applicable to Y-axis only. Example : If V012 is selected, X-axis has V011 and Y-axis has V012. Table 24Electric devices for the motor of Oriental Motor Corporation with R prograable controller CTN480G Prograable controller Teaching box Pulse and limit cord 3 Power supply DC24V Power cord 2 Power cord 2 number CTN480G TE10M-TB TE103-LD TE104-LD Remarks 1 : Cord in have high bending resistance. 2 : The length of pulse and limit cord can be specifi ed by in the end of supplemental code. electing length is up to 20m in increments of 1m. The length under 10m is also selected by two digits.example of 3mTE103-LD03 3 : The length of pulse and limit cord is 1.m. 4 : For X-Y axis table, two pieces of pulse limit cord are necessary. TX320 Motor specifications Motor code Motor model number Power supply voltage V Rated output W Rated torque N m Instantaneous maximum torque N m Rated number of revolution r/min Motor inertiaj M 10 4 kgm 2 Encoder specification Y01 GMV Y02 GMV Y03 GMV Coon for 1.7 Y04 GMV incremental and absolute Y0 GMV-0232C bits 1. Y06 GMV-0432C pulse/rev 1.8 Y07 GMV-0632C Y08 GMV-0832C Motor mounting dimension unit : Motor code WL M LR LE d D P M Y Y Y Y Y Y Y Y Driver specifications Item number of driver GDV-1R601 GDV-2R801 GDV-3R801 1 = inch Mass kg GDV-R01 GDV-1R601 GDV-2R801 GDV-3R801 GDV-R01 pplicable motor code Y01, Y0 Y02, Y06 Y03, Y07 Y04, Y08 Rated output 200W 400W 0W 70W Feedback ervo motor Linear encoder 1 erial encoder Coand input pulse election one from symbol with pulse line, CCW or CW with pulse line, two phase pulse with 90-degree difference Type of coand input pulse Line driver or Open collector Capability of coand input speed Line driver : 4MppsOpen collector : 200kpps Main power supply voltage Three phasesc200230v110%0/60hz Control circuit supply voltage Three phasesc200230v110%0/60hz Continuous rated currentrms Maximum consumption currentrms mbient temperature in operation 0 mbient temperature in storage 208 mbient temperature in operation and storage 90RH or less Keep dewdrop free Masskg Note 1 : pplicable with linear encoder. LM LR 4-M 16

10 pecifi cations of Motor and Driver C servo motor and Driver of Panasonic Corporation (RoH compliance) C servo motor and Driver of Mitsubishi Electric Corporation (RoH compliance) P P D W D Motor specifications 17 Instantaneous Power Rated Rated Rated Motor Motor model supply number of Motor inertiaj output torque maximum M Encoder Mass code number voltage revolution 10 W N m torque kgm 2 specification kg V r/min N m P023 MME P024 MME Coon for 1.2 P02 MME incremental and absolute P028 MME0221B bits 1.3 P029 MME0421B pulse/rev 1.7 P030 MME0821B Motor mounting dimension unit : Motor code WL M LR LE d D P M P P P P P P Driver specifications Note 1 : pplicable with linear encoder. LM LE LR d 4-M Motor specification Motor code Motor model number Power supply voltage V Rated output W Rated torque N m number of driver MDHT107 MBDHT210 MCDHT320 Item pplicable motor code P023, P028 P024, P029 P02, P030 Rated output 200W 400W 70W Feedback ervo motor erial encoder Linear encoder 1 Incremental encoder Coand input pulse election one from ymbol with pulse line, CCW or CW with pulse line, two phases pulse with 90-degree difference. Type of coand input pulse Line driver, Photo coupler Capability of coand input speed Line receiver : 4MppsPhoto coupler : 00kpps Main power supply voltage ingle phasec200240v110%0/60hz Continuous rated currentrms Maximum consumption currentrms Control circuit supply voltage ingle phase C200240V110%0/60Hz mbient temperature in operation 0Keep freeze free mbient temperature in storage 206Keep freeze free mbient temperature in operation and storage 90RH or lesskeep dewdrop free Masskg Instantaneous maximum torque N m Rated number of revolution r/min Motor inertiaj M 10 4 kgm 2 Encoder specification J013 HF-KP J014 HF-KP Coon for 1. J01 HF-KP incremental and absolute J018 HF-KP23B bits 1.6 J019 HF-KP43B pulse/rev 2.1 J020 HF-KP73B Motor mounting dimension unit : Motor code WL M LR LE d D P M J J J J J J Driver specification number of driver MR-J3-20-KE00 MR-J3-40-KE00 MR-J3-70-KE00 Item pplicable motor code J013, J018 J014, J019 J01, J020 Rated output 200W 400W 70W Feed back ervo motor erial encoder Linear encoder 1 Incremental encoder Coand input pulse election one from ymbol with pulse line, CCW or CW with pulse line, two phase pulse with 90-degree difference. Type of coand input pulse Line driver, Open collector Capability of coand input speed Line driver : 4MppsOpen collector : 200kpps Main power supply voltage ingle phase/three phasec200230v110% 0/60Hz Control circuit supply voltage ingle phasec200230v110%0/60hz Continuous rated currentrms Maximum consumption currentrms mbient temperature in operation 0Keep freeze free mbient temperature in storage 206Keep freeze free mbient temperature in operation and storage 90RH or less Keep dewdrop free Masskg Note 1 : pplicable with linear encoder. LM LE LR d 4-M 1 = inch Mass kg 18

11 pecifi cations of Motor and Driver Caution in Use tepper motor and Driver of Oriental Motor CorporationRoH compliance Motor pecifications Motor Motor model Maximum holding Current Roter inertiajm Mass tep angle code number torquen m -phase 10 kgm 2 kg V011 PK69E V012 PK69EM V013 PK96E V014 PK96EM Motor mounting dimension Motor code WLM LR LE d D B M V V V V LM LE LR Driver specifications number of driver RKD14L- RKD14LM- RKD14H- RKD14HM- pplicable motor code V011 V012 V013 V014 Executing type Micro step Coand input pulse CW/CCW signal, pulse/rotational direction signal Type of coand input pulse Photo coupler input, input resistance 220, input current 1020m Main power supply voltage ingle phase 10011V1 0/60Hz4. mbient temperature in operation 00Keep Freeze free mbient temperature in storage 8 or lesskeep dew drop free Masskg 0.8 d D W 4-M B uper Precision Positioning Table TX is a precision equipment. careful handling is strongly required. Do not apply any excessive force or heavy shock. Make sure the mounting surfaces to be free from dirt and harmful foreign objects. Good flatness is required for mounting surfaces to assure positioning accuracy. 8m or better is recoended. Lubricating part, C-Lube is built-in the linear motion rolling guides and the ball screw. It achieves long-term maintenance free. Grease is applied to the linear motion rolling guide and ball screw at delivery. Dust preventive cover is required to protect the inside of table from foreign particles or dusts. In case foreign particles or dusts enter into the table, intensive cleaning and re-greasing are necessary The re-lubrication interval varies depending on the operating conditions of the table. six months interval is generally recoended. If the table operation consists of reciprocating motions with many cycles and long strokes, re-lubrication in every three months with replacing old grease is recoended. uper Precision Positioning Table TX is machined, assembled and adjusted very precisely. Therefore, never disassemble or modify the table. Linear encoder is made of glass. Great care is necessary not to apply load and/or shock to it. Please make sure that surface of linear scale must be kept clean by ethyl alcohol or alternative cleaning solution, otherwise, malfunction or irregular operation may happen. In the application of dusty environment, dust-protective cover for linear encoder is recoended. The appearance, specifications and other details of the products are subject to change without prior for improvement. Duration and scope of warranty The period of warranty for the precision positioning table and related electrical devices is set at one year after delivery. If a failure occurs while the product is correctly being used and the failure is clearly attributable to its manufacture, the product will be repaired at no cost within the warranty period. warranty here means the guarantee of the precision positioning table itself as a single unit. It shall be a fare-paying service is required. When the trouble is not obviously judged by our product deficiency as a result of our investigation, the customer shall be responsible for the repair coast. econdary damage that occurs on the product breakdown or use is out of our warranty. When disposing of the product, treat them as ordinary industrial waste

12 R uper Precision Positioning Table TX R uper Precision Positioning Table TX 4-M Depth 10 4-M Depth 10 4-M8 Depth 16 4-M Depth Number 100 unit : troke length Total length Mounting holes of bed Mass 1 Ref. L B C n kg Notes 1 Motor weight is not included. 2 Refer to specifi cations of motor and driver. RemarkTwo dots-dash line in above drawing shows linear encoder. L 20 /2 13 / C B B C 12. LM n-mounting holes for M Number /2 190 L unit : troke length Total length Mounting holes of bed Mass 1 Ref. L NumberPitch n kg Notes 1 Motor weight is not included. 2 Refer to specifi cations of motor and driver. RemarkTwo dots-dash line in above drawing shows linear encoder /2 2 LM n-mounting holes for M

13 R uper Precision Positioning Table TX R uper Precision Positioning Table TX TX420M 4-M10 Depth 20 4-M8 Depth 16 4-M10 Depth 20 4-M10 Depth L 180 unit : Number troke length Total length Mounting holes of bed Mass 1 Ref. L kg Notes 1 Motor weight is not included. 2 Refer to specifi cations of motor and driver. RemarkTwo dots-dash line in above drawing shows linear encoder. LM /2 320 / n-mounting holes for M Number unit : troke length Total length Mounting holes of bed Mass 1 Ref. L NumberPitch n kg TX420M TX420M TX420M Notes 1 Motor weight is not included. 2 Refer to specifi cations of motor and driver. RemarkTwo dots-dash line in above drawing shows linear encoder L 280 LM 2 1 /2 420 / n-mounting holes for M

14 R uper Precision Positioning Table TX C R uper Precision Positioning Table TX C Number LM 2 21 LY unit : troke length Total length Mounting holes of bed Mass 1 Ref. X-axis Y-axis LX LY n kg C C C C Notes 1 Motor weight is not included. 2 Refer to specifi cations of motor and driver. Remarks 1Two dots-dash line in above drawing shows linear encoder. 2Deferent stroke length, combination of different table sizes and tables with plastic cable carrier can be available. Consult R. In case ofc LX M Depth 10 In case ofc M Depth 10 n-mounting holes for M LM Number 1 LY LM unit : troke length Total length Mounting holes of bed Mass 1 Ref. X-axis Y-axis LX LY NumberPitch n kg C C C C Notes 1 Motor weight is not included. 2 Refer to specifi cations of motor and driver. Remarks 1Two dots-dash line in above drawing shows linear encoder. 2Deferent stroke length, combination of different table sizes and tables with plastic cable carrier can be available. Consult R LX 4 4-M Depth 10 4-M8 Depth 16 n-mounting holes for M8 2 LM

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