2Fully closed loop control is configure and the positioning. 4 Simple system configuration is available

Transcription

1 TXM CTXM TXMCTXM 13 1

2 Super Precision Positioning Table TX Ball screw TX M inear Points Ball screw inear Roller Way Slide table 1 Ultimate high accuracy table of rolling guide type High precision, high rigidity Precision Positioning Table H based positioning table with positioning accuracy almost the same as ir Stage with ultimate rolling guide C-ube inear Roller Way Super MX incorporated and by a thorough investigation of the accuracy of each part. imit sensor Head Scale High positioning accuracy and resolution performance realized with an onboard super high accuracy linear encoder 2Fully closed loop control is configure and the positioning accuracy of the entire stroke is guaranteed with a direct feed back of positional information from a super high accuracy linear encoder with resolution of.16m. Ultimate high running performance produced by adopting roller type linear motion rolling guide 3Ultimate running accuracy is achieved since components processed and assembled with high accuracy are combined with C-ube inear Roller Way Super MX that exhibits the highest level of running performance with a rolling guide. TXMCTXM Bed Y-table Positioning accuracy m Test portion: CTX22M-3 X-axis Y-axis ttitude accuracy sec Test portion: CTX22M-3 X-axis pitching X-axis yawing Y-axis pitching Y-axis yawing Stroke Stroke CTX M Simple system configuration is available not required like ir Stage. System configuration is made simple, and space saving and cost reduction of the device can be realized since air supply device for driving is X-table Variation Major product specifications ccuracy Shape 12 TX12M Table width unit: Driving method inear motion rolling guide Built-in lubrication part Precision ball screw inear Roller Wayroller type ubrication part "C-ube" is built-in Positioning repeatability Positioning accuracy ost motion ± TX22M 22 Material of table and bed Sensor Cast iron Provided as standard Parallelism in table motion Parallelism in table motion B ttitude accuracy sec 32 TX32M 32 Straightness Backlash TX2M 2 1 1N=.12f=.228lbs. 1=.3937inch 16

3 Identification Number Example of an Identification Number (Single-axis specification) TX 22 M - / T2 1 Identification Number Example of an Identification Number (Two-axis specification) CTX 12 M / T1 C 1 Page Page Size Page Size Designation of motor attachment Ball screw lead Designation of linear encoder Page -17 Page -17 Page -17 Page -17 Page -17 Identification Number and Specification Size Designation of motor attachment Ball screw lead Designation of linear encoder TXM: Super Precision Positioning Table TX (single-axis specification) Size indicates table width. Select a size from the list of Table 1. Select a stroke length from the list of Table 1. s for a motor attachment, select it from the list of Table 3. Motor should be prepared by customer. Please specify motor attachment applicable to motor for use. coupling shown in Table is mounted on the main body before shipment. However, the final position adjustment should be made by customer since it is only temporarily fixed. : ead 1: ead 1 No symbol : Without linear encoder : Resolution.6 to.m (For C servomotor manufactured by YSKW EECTRIC CORPORTION) 1 : Resolution.1 to.2m (C servomotors manufactured by Mitsubishi Electric Corporation and Panasonic Corporation) 2 : Resolution.1 to.m (C servomotors manufactured by Mitsubishi Electric Corporation and Panasonic Corporation) When specifying the attachment for a stepper motor, set "No symbol". For details on the resolution, please see the section of maximum speed. For linear encoder specification, please see Table X-axis stroke length Y-axis stroke length Designation of motor attachment Ball screw lead Designation of combination direction Designation of linear encoder Page -18 Page -18 Page -18 Page -18 Page -18 Page -18 Identification Number and Specification Size X-axis stroke length Y-axis stroke length Designation of motor attachment Ball screw lead Designation of combination direction Designation of linear encoder CTXM: Super Precision Positioning Table TX (two-axis specification) Size indicates table width. Select a size from the list of Table 2. Tables of different sizes can also be combined. Select a stroke length from the list of Table 2. s of respective axes are displayed in cm. Different stroke lengths can be specified for X- and Y-axes. s for a motor attachment, select it from the list of Table 3. Motor should be prepared by customer. Please specify motor attachment applicable to motor for use. coupling shown in Table is mounted on the main body before shipment. However, the final position adjustment should be made by customer since it is only temporarily fixed. : ead 1: ead 1 No symbol : Standard configuration C : Reverse configuration Standard configuration: direction under the condition where X-axis motor side is placed at the front and Y-axis motor side is placed on the right side respectively. Reverse configuration: direction under the condition where X-axis motor side is placed at the front and Y-axis motor side is placed on the left side respectively. Specify "No symbol" if 2 is selected for Y-axis stroke length for CTX22M. No symbol : Without linear encoder : Resolution.6 to.m (For C servomotor manufactured by YSKW EECTRIC CORPORTION) 1 : Resolution.1 to.2m (C servomotors manufactured by Mitsubishi Electric Corporation and Panasonic Corporation) 2 : Resolution.1 to.m (C servomotors manufactured by Mitsubishi Electric Corporation and Panasonic Corporation) When specifying the attachment for a stepper motor, set "No symbol". For details on the resolution, please see the section of maximum speed. For linear encoder specification, please see Table 1. TXMCTXM 17 1N=.12f=.228lbs. 1=.3937inch 18

4 Identification Number and Specification Specifications Table 1 Sizes and stroke lengths Table 2 Sizes, table width dimensions, and stroke lengths Table width CTX12M 12 CTX22M 22 Table 3 pplication of motor attachment s of motor to be used Type Manufacturer Series C servo motor Stepper motor YSKW EECTRIC CORPORTION Mitsubishi Electric Corporation Panasonic Corporation ORIENT MOTOR Co., td. Table width TX12M 12 1,, 2, 2, 3 TX22M 22, 2, 2, 3, TX32M 32 3,, TX2M 2, 6, 8 Rated output W SGMV-2 2 X-axis Y-axis Flange size TX12M CTX12M Motor attachment TX22M CTX22M TX32M TX2M T1 SGMV- 6 T2 - SGMV-6 T3 SGMV T HF-KP23, HG-KR23 2 T1 6 J3, J HF-KP3, HG-KR3 T2 T3 HF-KP73, HG-KR T MSME2 2 T 6 MINS MSME T6 T7 MSME8 7 8 T8 R66 T9 6 R69 T9 R98 T11 T12 8 R911 T11 T12 step S66 T1 6 S69 T1 S98 T11 T12 8 S911 T11 T12 RK6RKS6 6 T1 RK RK9RKS9 8 T11 T12 Remark: For detailed motor specifications, please see respective motor manufacturer's catalog. Table ccuracy Single-axis specification Two-axis specification TX12M TX22M TX32M TX2M CTX12M CTX22M X-axis Y-axis Positioning Positioning Repeatability accuracy ost motion 1 Notes 1 When no linear encoder is used, this represents the value for backlash. 2 This represents accuracy in pitching and yawing. Remark: The values in indicate values without a linear encoder Parallelism in table motion Straightness in ttitude vertical accuracy 2 Straightness in sec horizontal unit: Squareness of XY motion TXMCTXM Table Coupling models Motor attachment Coupling models Manufacturer Coupling inertia J C 1 - m 2 T1 R-3C- 81 Sakai Manufacturing Co., td.281 T2 R-3C-121 Sakai Manufacturing Co., td.87 T3 R-3C-1 Sakai Manufacturing Co., td.87 T R-C-19 Sakai Manufacturing Co., td 1.36 T R-3C- 811 Sakai Manufacturing Co., td.281 T6 R-3C-121 Sakai Manufacturing Co., td.87 T7 R-3C-1 Sakai Manufacturing Co., td.87 T8 R-C-19 Sakai Manufacturing Co., td 1.36 T9 R-3C- 81 Sakai Manufacturing Co., td.281 T1 R-3C- 8 8 Sakai Manufacturing Co., td.281 T11 R-3C-121 Sakai Manufacturing Co., td.87 T12 R-3C-1 Sakai Manufacturing Co., td.87 Remark: For detailed coupling specifications, please see respective manufacturer's catalog. 19 1N=.12f=.228lbs. 1=.3937inch

5 Specifications Table 6 Maximum speed attained when a motor manufactured by YSKW EECTRIC CORPORTION is used (with linear encoder) Resolution m/pulse ead Maximum speed /s ead Serial conversion unit 1 JZDP-D3--E YSKW EECTRIC CORPORTION Note 1 Serial conversion unit is attached. Remarks 1. The values in are applicable to TX32M and TX2M. 2. Practical maximum speed varies depending on load condition. 3. To change the maximum speed, the resolution needs to be changed by setting the electronic gear for driver. Table 7 Maximum speed attained when a motor manufactured by Panasonic Corporation is used (with linear encoder) Resolution m/pulse ead Maximum speed /s ead 1 signal conversion unit PE371TT PE371TT IP81 IP81 Note 1 linear encoder signal conversion unit corresponding to resolution is attached. Remarks 1. The values in are applicable to TX32M and TX2M. 2. Practical maximum speed varies depending on load condition. 3. When you wish to change the maximum speed, change the resolution using the internal switch of linear encoder signal conversion unit attached to the main body. Table 8 Maximum speed attained when a motor manufactured by Mitsubishi Electric Corporation is used (with linear encoder) Resolution m/pulse ead Maximum speed /s ead 1 signal conversion unit PE371TT PE371TT IP81 Note 1 linear encoder signal conversion unit corresponding to resolution is attached. Remarks 1. The values in are applicable to TX32M and TX2M. 2. Practical maximum speed varies depending on load condition. 3. When you wish to change the maximum speed, change the resolution using the internal switch of linear encoder signal conversion unit attached to the main body. Table 1 specification Item Content IP81R Manufacturer Material of scale main body Glass Coefficient of linear expansion / 81-6 ccuracy class m/m 1 Output signal Sine wave Signal cycle Vpp/m 1 Maximum operation speed m/s 1.2 Cord diameter. Cord bending radius or more Table 11 Serial conversion unit specification for YSKW EECTRIC CORPORTION Item Content Manufacturer YSKW EECTRIC CORPORTION JZDP-D3--E Signal resolution 1/26 of input two phase sine wave pitch Maximum responding frequency khz 2 Size 9623 Mass. Table 12 signal conversion unit specification for Panasonic Corporation and Mitsubishi Electric Corporation Manufacturer Item Content PE371TT PE371TT1 Signal resolution Depends on the internal switch setting Maximum responding frequency Depends on the internal switch setting Converter section 8217 Size Connector section 8217 Cord length 1 Mass.2 Table 13 Maximum carrying mass TX12M TX22M TX32M TX2M Ball screw lead Horizontal Maximum carrying mass Vertical TXMCTXM Table 9 Maximum speed attained when no linear encoder is used Motor type ead Maximum speed /s ead 1 C servo motor TX12M TX22M 2 TX32M TX2M 22 8 TX12M Stepper motor TX22M TX32M 3 Remark: The values of respective axes in tables of two-axis specification are the same as those of tables of single-axis specification. 1 1N=.12f=.228lbs. 1=.3937inch 2

6 Specifications Table 1 Specifications of linear motion rolling guide /2 /2 Table.1 Specifications of ball screw 1 TX12M TX22M TX32M TX2M Slide unit 2 Slide unit Basic dynamic load rating 1 C N Ball screw type Ground screw Ground screw Ground screw Ground screw /2 Y Z /2 Basic static load rating 1 C N ead Slide unit 1 Slide unit 3 Shaft dia. xial clearance rrangement TX12M TX22M TX32M TX2M Note 1 Represent the value per slide unit. Remark: The values of respective axes in tables of two-axis specification are the same as those of tables of single-axis specification. Basic dynamic load rating C N Basic static load rating C N Remark: The values of respective axes in tables of two-axis specification are the same as those of tables of single-axis specification. X X R Z Driving positiony d, Z d Y d Y Z d Table.2 Specifications of ball screw 2 Table 16 Table inertia and starting torque Single-axis specification Two-axis specification Shaft dia. Overall length TX12M TX22M TX32M TX2M TX12M TX22M TX32M TX2M CTX12M CTX22M X-axis Y-axis ead Table inertia J T 1 - m 2 ead Coupling inertia J C 1 - m 2 Starting torque T S Nm Remark: s for tables of two-axis specification, the figures represent values in X-axis. For values in Y-axis, see the table for single-axis specification. unit: TXMCTXM Mounting For the processing accuracy of the Precision Positioning Table mounting surface and the tightening torque of the fixing screws, see page N=.12f=.228lbs. 1=.3937inch

7 Sensor Specification Table 17 Sensor timing chart Dimensions of Motor ttachment TX12M, CTX12M TX22M, CTX22M Throughmachined on motor attachment -M Throughmachined on motor bracket PCD7, Evenly distributed at M Depth 1 PCD7, Evenly distributed at 9 C W CCW T T Motor bracket Motor attachment -. Throughmachined on motor attachment -M Depth 8machined on motor bracket PCD7, Evenly distributed at M Depth 8 PCD7, Evenly distributed at 9 8 B ON T T6 S/2 1 C ON G OFF S/2 1 OFF Originwithout linear encoder Originlinear encoder Pre-originphoto sensor CW limitphoto sensor T9 T1 Motor bracket 21 Indicates the extent 2 31 of coupling insertion in the case 9. of with origin sensor. Motor attachment M Depth 8 6 T11 Indicates the extent of coupling insertion in the case of with origin sensor M6 Through 8 TXMCTXM OFF CCW limitphoto sensor Mechanical stopper TX32M TX2M Ball screw lead B C E F G TX12M TX22M TX32M TX2M E 3 / / / / Note 1 See the dimension tables on page -7 to Remarks 1. For detailed specifications of respective sensors, please see the section of sensor specification in General Explanation. 2. The values of respective axes in tables of two-axis specification are the same as those of tables of single-axis specification. F unit: T3 T7 Indicates the extent of coupling insertion in the case of with origin sensor M Depth 1 PCD7, Evenly distributed at 9 8 -M Depth 8 PCD7, Evenly distributed at 9 8 -M6 Through 8 T T M6 Depth 12 PCD9, Evenly distributed at M Depth 1 PCD9, Evenly distributed at 9 12 T12 1N=.12f=.228lbs. 1=.3937inch 6

8 TX12M Super Precision Positioning Table TX TX22M -M Depth 1 -M Depth M8 Depth M Depth Hole for n-m8 2. Hole for n-m TXMCTXM 2 S/2 13 S/2 2 S/2 22 S/ Identification number S Overall length Mounting holes of bed B C n unit: MassRef. TX12M TX12M TX12M TX12M TX12M Note 1 This applies to T1 and T. C B B C Identification number S Overall length Mounting holes of bed (the number of holespitch) n unit: MassRef. TX22M TX22M TX22M TX22M TX22M N=.12f=.228lbs. 1=.3937inch 8

9 TX32M Super Precision Positioning Table TX TX2M -M1 Depth 2 -M8 Depth M1 Depth 2 -M1 Depth Hole for 8-M Hole for n-m1 TXMCTXM S/2 2 S/2 S/2 32 S/ Identification number S 28 Overall length Mounting holes of bed MassRef. TX32M TX32M TX32M unit: Identification number S Overall length Mounting holes of bed (the number of holespitch) n unit: MassRef. TX2M TX2M TX2M N=.12f=.228lbs. 1=.3937inch 16

10 Super Precision Positioning Table TX CTX12M CTX22M Y M Depth 1 Hole for n-m Y M Depth 1 TXMCTXM -M Depth 1 Hole for n-m8 -M Depth Only with CTX12M Only with CTX12M X X Identification number unit: S Overall length Mounting holes of bed MassRef. X-axis Y-axis X Y n CTX12M CTX12M CTX12M CTX12M Note 1 This applies to T1 and T. Remark: s a combination of stroke length other than listed above and a table of different size as well as production of cableveyor specification are possible, please contact. Identification number S Overall length Mounting holes of bed X-axis Y-axis X Y (the number of holespitch) n unit: MassRef. CTX22M CTX22M CTX22M CTX22M Remark: s a combination of stroke length other than listed above and a table of different size as well as production of cableveyor specification are possible, please contact N=.12f=.228lbs. 1=.3937inch 162