1This is a positioning module developed for alignment stage by. 2 Height adjustment is not required.

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2 Alignment Module Ball screw Linear / Rotation Points Flexibility of freely designing the stage according to the usage Linear Way Positioning module enabling various motions 1This is a positioning module developed for alignment stage by combining the high rigidity Crossed Roller Bearing and Linear Way based on the Precision Positioning Table TU. 3This unit helps you freely design the alignment stage according to the usage by combining various stages and bases into the Alignment Module. Large stage of 2,000 class is also supported! Ball screw 2 Height adjustment is not required. the heights of respective Alignment Module. Tolerance of height dimension is managed at high precision of ± m. Alignment stage can be configured without adjusting 00mm 00mm Alignment Module Motor bracket Configuration example and operating principle of alignment stage Crossed Roller Bearing Sensor Stage configuration example Reference position X motion Y motion Track rail Major product specifications Accuracy XY motion Center reference angle compensation Arbitrary position reference angle compensation Driving method Precision ball screw Positioning repeatability ±0.002 Variation Linear motion rolling guide and bearing Built-in lubrication part Material of table and bed Sensor Linear Way ball type Crossed Roller Bearing No built-in High carbon steel Provided as standard Positioning accuracy Lost motion Parallelism in table motion A Parallelism in table motion B Attitude accuracy Straightness Backlash Shape Model and size Size W L H mm Stroke length mm W H L N=0.2kgf=0.22lbs. 31

3 Identification Number Example of an Identification Number Model Size and stroke length Designation of motor attachment Type and presence/absence of ball screw Ball screw lead Page -319 Page -319 Page -319 Page -3 Page / AT02 G Identification Number and Specification Model Size and stroke length Designation of motor attachment : Alignment Module 2- : Width 2mm, stroke length mm, height 7mm 0- : Width 0mm, stroke length mm, height 7mm - 90: Width mm, stroke length 90mm, height 1mm -1: Width mm, stroke length 1mm, height 1mm AT00: Without motor attachment To specify the motor attachment, select it from the list of Table 1. Motor should be prepared by customer. Please specify motor attachment applicable to motor for use. If motor attachment is specified, a coupling shown in Table 2 is mounted on the main body before shipment. However, the final position adjustment should be made by customer since it is only temporarily fixed. For a product without motor attachment (AT00), no coupling is attached. Table 1 Application of motor attachment Motor to be used Type Manufacturer Series Model Rated output W SGMMV-A2A Flange size mm Motor attachment 2 0 AT01 2 SGMMV-A3A AT01 SGMJV-AA AT02 SGMAV-AA AT02 YASKAWA SGMJV-01A 0 AT02 AT03 0 ELECTRIC - SGMAV-01A AT02 AT03 CORPORATION SGMAV-C2A 1 AT03 SGMJV-02A AT0 0 SGMAV-02A AT0 SGMJV-0A AT0 00 SGMAV-0A AT0 HG-AK023 AT01 2 HG-AK033 AT01 HF-MP03, HG-MR03 AT02 HF-KP03, HG-KR03 AT02 Mitsubishi 0 HF-MP, HG-MR AT02 AT03 AC servo Electric J3, J 0 HF-KP, HG-KR AT02 AT03 motor Corporation HF-MP23, HG-MR23 AT0 0 HF-KP23, HG-KR23 AT0 HF-MP3, HG-MR3 AT0 00 HF-KP3, HG-KR3 AT0 MSMDA AT07 MSMEA AT07 3 MSMD01 AT07 AT0 0 Panasonic MSME01 AT07 AT0 MINAS A Corporation MSMD02 AT09 0 MSME02 AT09 MSMD0 AT 00 MSME0 AT ADMA-RL AT02 Hitachi Industrial 0 ADMA-01L 0 AT02 AT03 Equipment AD ADMA-02L 0 AT0 Systems Co., Ltd ADMA-0L 00 AT0 Remark: For detailed motor specifications, please see respective motor manufacturer's catalog. Table 2 Coupling models Motor attachment Coupling models Manufacturer Coupling inertia J C - kg m 2 AT01 UA-1C- Sakai Manufacturing Co., Ltd 0.02 AT02 UA-C- Sakai Manufacturing Co., Ltd 0.0 AT03 UA-2C- Sakai Manufacturing Co., Ltd AT0 UA-C- 1 Sakai Manufacturing Co., Ltd 0.3 AT0 UA-3C- 1 Sakai Manufacturing Co., Ltd 1.3 AT0 UA-1C- Sakai Manufacturing Co., Ltd 0.02 AT07 UA-C- Sakai Manufacturing Co., Ltd 0.0 AT0 UA-2C- Sakai Manufacturing Co., Ltd AT09 UA-C- 11 Sakai Manufacturing Co., Ltd 0.3 AT UA-3C- 1 Sakai Manufacturing Co., Ltd 1.3 Remark: For detailed coupling specification, please see the manufacturer's catalog. Type and presence/absence of ball screw Ball screw lead G: Ground ball screw N: Without ball screw When selecting N, specify AT00 for 3 and set "No symbol" for. : Lead mm (applicable to 2 and 0) : Lead mm (applicable to and ) 319 1N=0.2kgf=0.22lbs. 3

4 Specifications Table 3 Accuracy Model and size Stroke length 1 Length of track rail Note 1 Not applicable to "Without ball screw" specification. Positioning repeatability 1 Positioning accuracy ( 1 ) Parallelism in motion B Backlash Sensor Specification Table 9 Sensor timing chart Table Height Table Maximum speed Model and size Ball screw lead mm Model and size Module height Tolerance of height Remark: These are values of distance between mounting surface and the center of module upper surface under the condition where upper and lower axis intersect orthogonally and the linear motion rolling guide of each axis stays at the center of the stroke. Maximum speed mm/s Remark: To measure the practical maximum speed, it is required to consider operation patterns based on the motor to be used and load conditions. Table Specifications of ball screw Model and size Shaft dia. Overall length Origin encoder C phase Pre-origin sensor CCW limit sensor CW limit sensor Mechanical stopper Model and size A B C D E F Note 1 The origin is the center of stroke. OFF Opposite motor side ON C D Stroke length OFF OFF Motor side Example of Motion Specification F Combining the enables the following table configurations. And, as it is possible to attach this unit to the device to be delivered, if you are interested, please contact. B E A 1 Table 7 Maximum carrying mass Model and size Table Table inertia and starting torque Model and size Horizontal Maximum carrying mass Table inertia J T - kg m 2 Vertical Starting torque T S N m unit: kg Reference position X motion Y motion Mounting For the processing accuracy of the Precision Positioning Table mounting surface and the tightening torque of the fixing screws, see page XY motion Center reference angle compensation Arbitrary position reference angle compensation 1N=0.2kgf=0.22lbs. 322

5 Dimensions of Motor Attachment 2 0 AT Through AT M3 Through AT M Depth 39. AT M Through 2 9. AT Through PCD2 3. AT M Through PCD, Evenly distributed at Through. Counterbore depth. -M3 Through PCD, Evenly distributed at 90 AT M Through PCD, Evenly distributed at Through Counterbore depth. -M3 Through PCD, Evenly distributed at 90 AT0 AT M Depth -. Through Counterbore depth 7. -M Depth AT Through. Counterbore depth. AT Through Counterbore depth. -. Through Counterbore depth 7. -M Depth AT Through Counterbore depth 7. -M Depth AT Through Counterbore depth N=0.2kgf=0.22lbs. 32

6 Alignment Module 2 Without motor attachment and with ball screw 0 Without motor attachment and with ball screw 3-M Depth M3 Through ± Through. Counterbore depth ± mass: 0.kg Through. Counterbore depth 3.1 mass: 2.0kg 2 Without ball screw 0 Without ball screw M3 Through 1 3-M Depth ± ± Through. Counterbore depth Through. Counterbore depth 3.1 mass: 0.kg mass: 1.kg 32 1N=0.2kgf=0.22lbs. 32

7 Alignment Module Without motor attachment and with ball screw Without motor attachment and with ball screw M Depth ± Through 9. Counterbore depth mass: kg mass: kg Without ball screw 2 -M Depth M Depth ± Through 11 Counterbore depth Without ball screw 3 3 -M Depth ± ± Through 9. Counterbore depth mass: kg 2-7 Through 11 Counterbore depth mass: 1kg 327 1N=0.2kgf=0.22lbs. 32