RoHS Directive-Compliant Motorized Linear Slides EZS Series for Clean Room Use. Features

Transcription

1 Motorized Actuators RoHS Directive-Compliant Series for Clean Room Use The Series for Clean Room Use is a product designed with the same level of function and performance as the Series but is ideal for clean room environment. Connection Information Technical reference Page G- Safety standards Page H-4 List of products conforming to safety standards (product name, applicable standards, file number, certification body) Page H-2 Features ISO Standard Class 3 Clean Room Level This product has achieved the ISO Standard Class 3 rating (equivalent to FED Standard Class ) through reduced dustgenerative properties using grease and improved airtight properties using a stainless sheet. Reference ISO Standard Class 3: 000 particles or less of 0. μm particles or more per m 3 of air. FED Standard Class : Only particle of 0.5 μm particles or more per cf (= cubic feet) of air. Utilizes Low Dust-Generative Grease The bearings for the ball screw, guide and table roller use clean room grease with reduced dust-generative properties. Stainless Sheet Linear Slides with Air Couplers for Suction on Either the Left or Right Air couplers for suction prevent dust from forming on the outside of the linear slide by sucking out dust generated internally. Left and right joints offer easy installation for your products. Air Couplers for Suction Directions (Right) 2 (Left) E-76 ORIENTAL MOTOR GENERAL CATALOGUE Features E-76 /General Specifications of Motor E-77 /System Configuration E-78 /Product Line E-80

2 Dust Generation Measurement Method Clean room level measurements are done in accordance with "JIS B 9926." Clean Chamber ULPA Filter Air Flow Linear Slide Internal Suction Particle Counter Suction Cubic Foot (cf)/min Correlation Diagram of Dust-Generation and Suction Amount (Actual measurement value sample data ) 3D050C-A 00,000,000 Particle Diameter 0. μm min. 0,000,000 Particle Diameter 0.3 μm min.,000,000 Particle Diameter 0.5 μm min. Particulate Generation [Pieces/m 3 ] 00,000 0,000, D050C-A 00,000,000 Particulate Generation [Pieces/m 3 ] 0,000,000,000,000 00,000 : 500 mm Condition : Horizontal Operating Speed : 800 mm/s Acceleration : 20 m/s 2 : Operation Duty : 50% Internal Suction Volume [I/min] Particle Diameter 0.μm min. Particle Diameter 0.3μm min. Particle Diameter 0.5μm min. 0,000,000 : 500 mm Condition : Horizontal 00 Operating Speed : 800 mm/s Acceleration : 20 m/s 2 0 : Operation Duty : 50% Internal Suction Volume [I/min] Customer Support Centre Singapore: , Malaysia: , Others: Suction Pump Exhaust 4D050C-A 00,000,000 Particulate Generation [Pieces/m 3 ] 0,000,000,000,000 00,000 General Specifications of Motor General Specifications of Controllers Page E-67 These are the values after rated operation under normal ambient temperature and humidity. 24 VDC Item Insulation Resistance Dielectric Strength Operating Ambient Temperature Specifications The measured value is 00 MΩ min. when a 500 VDC megger is applied between the following places: Motor Case Excitation and Sensor Windings No abnormality is judged even with application between the following places for minute: Motor case Excitation and Sensor Windings 0.5 kvac 50 Hz Motor case Electromagnetic Brake Windings 0.5 kvac 50 Hz C (non-freezing) Operating 85% max. (non-condensing) Ambient Humidity Note Do not measure insulation resistance or perform the dielectric strength test while the linear slide and controller are connected. ISO Standards Class/Particle Size (μm) Class max max max. Particle Diameter 0. μm min. Particle Diameter 0.3 μm min. Particle Diameter 0.5 μm min. 0,000,000 : 500 mm Condition : Horizontal 00 Operating Speed : 800 mm/s Acceleration : 20 m/s 2 0 : Operation Duty : 50% Internal Suction Volume [I/min] Single-Phase 00-5 VAC/Single-Phase VAC Item Insulation Resistance Dielectric Strength Specifications The measured value is 00 MΩ min. when a 500 VDC megger is applied between the following places: Motor Case Excitation and Sensor Windings No abnormality is judged even with application between the following places for minute: Motor Case Excitation and Sensor Windings 3 4:.0 kvac 50 Hz 6:.5 kvac 50 Hz.0 kvac 50 Hz Operating Ambient C (non-freezing) Temperature Operating 85% max. (non-condensing) Ambient Humidity Note Do not measure insulation resistance or perform the dielectric strength test while the linear slide and controller are connected. Motorized Actuators Introduction Types ELS Clean Room DRS DRL Motorized Cylinders Compact Linear Actuators ELC EZA DG Hollow Rotary Actuators Custom-Design Program "FACE" E-82 /Controller Specifications, Dimensions E-66 /Connection and Operation E-68 E-77

3 Motorized Actuators System Configuration Using in Controller Mode Not supplied Required Products (Sold separately) Motor Cables ( Page E-98 ) 2 Teaching Pendant ( Page E-00 ) 3 Data Editing Software ( Page E-0 ) or Series For Clean Room Use Linear Motion Controller To RS-232C Port Linear Slide Computer (Connected by the customer) Programmable Controller 24 VDC Power Supply AC Power Supply or DC Power Supply (Main power supply) (Sold separately) 4 Sensor Sets ( Page E-98 ) 5 Sensor Extension Cables ( Page E-99 ) or 7 I/O Cables ( Page E-00 ) or 9 Battery Set ( Page E-02 ) 6 Connector Terminal Block Conversion Unit ( Page E-99 ) 8 Connector Terminal Block Conversion Unit ( Page E-99 ) 0 DIN Rail Mounting Plate ( Page E-02 ) Number Name Overview Page Motor Cables This dedicated cable connects the linear slide and linear motion controller ( 20 m). Be sure to purchase this cable. E-98 2 Teaching Pendant Various data can be set and operated at your fingertips. The cable length is 5 m. E-00 3 Data Editing Software Various data can be set and edited on a personal computer. A dedicated communication cable is included (5 m).e-0 4 Sensor Sets Three sets of sensors, sensor mounting brackets and cables with connector (2 m), as well as a shielding plate. E-98 5 Sensor Extension Cables Cable for connecting the linear motion controller and sensor ( m, 2 m). E-99 6 Connector Terminal Block Conversion Unit Set of terminal block and cable for connecting the linear motion controller and sensor ( m). E-99 7 I/O Cables Cable for connecting the linear motion controller and programmable controller ( m, 2 m). E-00 8 Connector Terminal Block Conversion Unit Set of terminal block and cable for connecting the linear motion controller and sensor ( m). E-99 9 Battery Set Required for use in the absolute mode. E-02 0 DIN Rail Mounting Plate Use this when installing the linear motion controller to a DIN rail. E-02 System Configuration Example Sold Separately Sold Separately Series Sensor Extension Cable Motor Cable (2 m) Teaching Pendant I/O Cable ( m) 2 Sensor Set (2 m) 2 3D05C-A CC020ES-2 EZT CC36D- CC20D2- PAES-S 2 Not required if a sensorless return-to-home operation is performed. The system configuration shown above is an example. Other combinations are available. E-78 ORIENTAL MOTOR GENERAL CATALOGUE Features E-76 /General Specifications of Motor E-77 /System Configuration E-78 /Product Line E-80

4 Customer Support Centre Singapore: , Malaysia: , Others: Using in Driver Mode An example of a single-axis system configuration with the EMP400 Series controller is shown below. When performing return-to-home operation using the linear motion controller, refer to the system configuration example on page E-78. Teaching pendant or data editing software is required to change parameters (I/O logic, velocity filter, etc.) of the linear motion controller. Required Products (Sold separately) Series For Clean Room Use (Sold separately) 3 Sensor Sets ( Page E-98 ) Motor Cables ( Page E-98 ) Linear Slide (Connected by the customer) 24 VDC Power Supply 4 Connector Terminal Block Conversion Unit ( Page D-20 ) Controller (Sold separately) 2 Controller ( Page D- ) For the controller peripheral equipment, check the system configuration for the applicable controller. Linear Motion Controller AC or DC Power Supply (Main Power Supply) 5 Battery Set ( Page E-02 ) Programmable Controller 24 VDC Power Supply 6 DIN Rail Mounting Plate ( Page E-02 ) Number Name Overview Page Motor Cables This dedicated cable connects the linear slide and linear motion controller ( 20 m). Be sure to purchase this cable. E-98 2 Controller This controller gives commands needed to drive the linear slide. D- 3 Sensor Sets Three sets of sensors, sensor mounting brackets and cables with connector (2 m), as well as a shielding plate. E-98 4 Connector Terminal Block Conversion Unit Set of terminal block and cable for connecting the EMP Series controller and the sensor ( m). D-20 5 Battery Set Required for use in the absolute mode. E-02 6 DIN Rail Mounting Plate Use this when installing the linear motion controller to a DIN rail. E-02 Not supplied Motorized Actuators Introduction Types ELS Clean Room DRS DRL Motorized Cylinders Compact Linear Actuators ELC EZA DG Hollow Rotary Actuators System Configuration Example Sold Separately Sold Separately Series Motor Cable (2 m) Controller Sensor Set Connector Terminal Block Conversion Unit ( m) 3D05C-A CC020ES-2 EMP40-2 PAES-S CC50T The system configuration shown above is an example. Other combinations are available. Custom-Design Program "FACE" E-82 /Controller Specifications, Dimensions E-66 /Connection and Operation E-68 E-79

5 Motorized Actuators Product Number Code 3 D 050 C M - K Series Name 2 Linear Slide Size 3 Lead 4 : Series 3: Width 54 mm Height 50 mm 4: Width 74 mm Height 50 mm 6: Width 74 mm Height 66.5 mm D:2 mm E:6 mm 005: 50 mm 00: 00 mm 05: 50 mm 020: 200 mm 025: 250 mm 030: 300 mm 035: 350 mm 040: 400 mm 045: 450 mm 050: 500 mm 055: 550 mm 060: 600 mm 065: 650 mm 070: 700 mm 075: 750 mm 080: 800 mm 085: 850 mm 5 For Clean Room Use 6 Electromagnetic Brake Blank: Without Electromagnetic Brake M: With Electromagnetic Brake 7 Direction of Air Couplers for Suction : Right 2: Left 8 Power Supply Voltage K: 24 VDC A: Single-Phase 00-5 VAC C: Single-Phase VAC Product Line 50 mm increments 3 Without Electromagnetic Brake With Electromagnetic Brake 24 VDC Single-Phase 00-5 VAC Single-Phase VAC 24 VDC Single-Phase 00-5 VAC Single-Phase VAC Product Name Product Name Product Name Product Name Product Name Product Name 50 mm 3 005C -K 3 005C -A 3 005C -C 3 005CM -K 3 005CM -A 3 005CM -C 00 mm 3 00C -K 3 00C -A 3 00C -C 3 00CM -K 3 00CM -A 3 00CM -C 50 mm 3 05C -K 3 05C -A 3 05C -C 3 05CM -K 3 05CM -A 3 05CM -C 200 mm 3 020C -K 3 020C -A 3 020C -C 3 020CM -K 3 020CM -A 3 020CM -C 250 mm 3 025C -K 3 025C -A 3 025C -C 3 025CM -K 3 025CM -A 3 025CM -C 300 mm 3 030C -K 3 030C -A 3 030C -C 3 030CM -K 3 030CM -A 3 030CM -C 350 mm 3 035C -K 3 035C -A 3 035C -C 3 035CM -K 3 035CM -A 3 035CM -C 400 mm 3 040C -K 3 040C -A 3 040C -C 3 040CM -K 3 040CM -A 3 040CM -C 450 mm 3 045C -K 3 045C -A 3 045C -C 3 045CM -K 3 045CM -A 3 045CM -C 500 mm 3 050C -K 3 050C -A 3 050C -C 3 050CM -K 3 050CM -A 3 050CM -C 550 mm 3 055C -K 3 055C -A 3 055C -C 3 055CM -K 3 055CM -A 3 055CM -C 600 mm 3 060C -K 3 060C -A 3 060C -C 3 060CM -K 3 060CM -A 3 060CM -C 650 mm 3 065C -K 3 065C -A 3 065C -C 3 065CM -K 3 065CM -A 3 065CM -C 700 mm 3 070C -K 3 070C -A 3 070C -C 3 070CM -K 3 070CM -A 3 070CM -C A D (2 mm lead) or E (6 mm lead) indicating the lead is entered where the box is located within the product name. A number (right) or 2 (left) indicating the direction of the air couplers for suction is entered where the box is located within the product name. 4 Without Electromagnetic Brake With Electromagnetic Brake 24 VDC Single-Phase 00-5 VAC Single-Phase VAC 24 VDC Single-Phase 00-5 VAC Single-Phase VAC Product Name Product Name Product Name Product Name Product Name Product Name 50 mm 4 005C -K 4 005C -A 4 005C -C 4 005CM -K 4 005CM -A 4 005CM -C 00 mm 4 00C -K 4 00C -A 4 00C -C 4 00CM -K 4 00CM -A 4 00CM -C 50 mm 4 05C -K 4 05C -A 4 05C -C 4 05CM -K 4 05CM -A 4 05CM -C 200 mm 4 020C -K 4 020C -A 4 020C -C 4 020CM -K 4 020CM -A 4 020CM -C 250 mm 4 025C -K 4 025C -A 4 025C -C 4 025CM -K 4 025CM -A 4 025CM -C 300 mm 4 030C -K 4 030C -A 4 030C -C 4 030CM -K 4 030CM -A 4 030CM -C 350 mm 4 035C -K 4 035C -A 4 035C -C 4 035CM -K 4 035CM -A 4 035CM -C 400 mm 4 040C -K 4 040C -A 4 040C -C 4 040CM -K 4 040CM -A 4 040CM -C 450 mm 4 045C -K 4 045C -A 4 045C -C 4 045CM -K 4 045CM -A 4 045CM -C 500 mm 4 050C -K 4 050C -A 4 050C -C 4 050CM -K 4 050CM -A 4 050CM -C 550 mm 4 055C -K 4 055C -A 4 055C -C 4 055CM -K 4 055CM -A 4 055CM -C 600 mm 4 060C -K 4 060C -A 4 060C -C 4 060CM -K 4 060CM -A 4 060CM -C 650 mm 4 065C -K 4 065C -A 4 065C -C 4 065CM -K 4 065CM -A 4 065CM -C 700 mm 4 070C -K 4 070C -A 4 070C -C 4 070CM -K 4 070CM -A 4 070CM -C A D (2 mm lead) or E (6 mm lead) indicating the lead is entered where the box is located within the product name. A number (right) or 2 (left) indicating the direction of the air couplers for suction is entered where the box is located within the product name. E-80 ORIENTAL MOTOR GENERAL CATALOGUE Features E-76 /General Specifications of Motor E-77 /System Configuration E-78 /Product Line E-80

6 Customer Support Centre Singapore: , Malaysia: , Others: Motorized Actuators Without Electromagnetic Brake With Electromagnetic Brake 24 VDC Single-Phase 00-5 VAC Single-Phase VAC 24 VDC Single-Phase 00-5 VAC Single-Phase VAC Product Name Product Name Product Name Product Name Product Name Product Name 50 mm 6 005C -K 6 005C -A 6 005C -C 6 005CM -K 6 005CM -A 6 005CM -C 00 mm 6 00C -K 6 00C -A 6 00C -C 6 00CM -K 6 00CM -A 6 00CM -C 50 mm 6 05C -K 6 05C -A 6 05C -C 6 05CM -K 6 05CM -A 6 05CM -C 200 mm 6 020C -K 6 020C -A 6 020C -C 6 020CM -K 6 020CM -A 6 020CM -C 250 mm 6 025C -K 6 025C -A 6 025C -C 6 025CM -K 6 025CM -A 6 025CM -C 300 mm 6 030C -K 6 030C -A 6 030C -C 6 030CM -K 6 030CM -A 6 030CM -C 350 mm 6 035C -K 6 035C -A 6 035C -C 6 035CM -K 6 035CM -A 6 035CM -C 400 mm 6 040C -K 6 040C -A 6 040C -C 6 040CM -K 6 040CM -A 6 040CM -C 450 mm 6 045C -K 6 045C -A 6 045C -C 6 045CM -K 6 045CM -A 6 045CM -C 500 mm 6 050C -K 6 050C -A 6 050C -C 6 050CM -K 6 050CM -A 6 050CM -C 550 mm 6 055C -K 6 055C -A 6 055C -C 6 055CM -K 6 055CM -A 6 055CM -C 600 mm 6 060C -K 6 060C -A 6 060C -C 6 060CM -K 6 060CM -A 6 060CM -C 650 mm 6 065C -K 6 065C -A 6 065C -C 6 065CM -K 6 065CM -A 6 065CM -C 700 mm 6 070C -K 6 070C -A 6 070C -C 6 070CM -K 6 070CM -A 6 070CM -C 750 mm 6 075C -K 6 075C -A 6 075C -C 6 075CM -K 6 075CM -A 6 075CM -C 800 mm 6 080C -K 6 080C -A 6 080C -C 6 080CM -K 6 080CM -A 6 080CM -C 850 mm 6 085C -K 6 085C -A 6 085C -C 6 085CM -K 6 085CM -A 6 085CM -C 6 A D (2 mm lead) or E (6 mm lead) indicating the lead is entered where the box is located within the product name. A number (right) or 2 (left) indicating the direction of the air couplers for suction is entered where the box is located within the product name. The following items are included in each product. Linear Slide, Hexagonal Socket Head Screw for Mounting Linear Slide, Controller, Controller Mounting Bracket, User I/O Connector, Sensor I/O Connector, Operating Manual Introduction Types ELS Clean Room DRS DRL Motorized Cylinders Compact Linear Actuators ELC EZA DG Hollow Rotary Actuators Custom-Design Program "FACE" E-82 /Controller Specifications, Dimensions E-66 /Connection and Operation E-68 E-8

7 Motorized Actuators Custom-Design Program "FACE" Custom-design program "FACE" "FACE" is a program that lets you custom-design a product quickly according to your specific requirements and specifications. The Series is available with various strokes specifiable in increments of 0 mm, so you can always have the desired linear slide with the stroke you need. Product Number Code 3 D 050 C M - K Series Name : Series 2 Linear Slide Size 3: Width 54 mm Height 50 mm 4: Width 74 mm Height 50 mm 6: Width 74 mm Height 66.5 mm 3 Lead D: 2 mm E: 6 mm : mm 0 04: 0 40 mm 06 09: mm : mm : mm : mm : mm : mm : mm : mm : mm : mm : mm : mm : mm : mm 5 For Clean Room Use Electromagnetic Brake Blank: Without Electromagnetic Brake M: With Electromagnetic Brake Direction of Air Couplers for Suction : Right 2: Left Power Supply Voltage K: 24 VDC A: Single-Phase 00-5 VAC C: Single-Phase VAC Product Line 0 mm increments Custom-design program "FACE" 3 (0 mm increments) mm 0 40 mm mm mm mm mm mm mm mm mm mm mm mm Numbers Specifiable in the Box Without Electromagnetic Brake With Electromagnetic Brake 24 VDC Single-Phase 00-5 VAC Single-Phase VAC 24 VDC Single-Phase 00-5 VAC Single-Phase VAC Product Name Product Name Product Name Product Name Product Name Product Name 3D C -K 3E C -K 3D C -A 3E C -A 3D C -C 3E C -C 3D CM -K 3E CM -K A number ( ) indicating the stroke length is entered where the box is located within the product name. A number (right) or 2 (left) indicating the direction of the air couplers for suction is entered where the box is located within the product name. 4 (0 mm increments) mm 0 40 mm mm mm mm mm mm mm mm mm mm mm mm Numbers Specifiable in the Box D CM -A 3E CM -A 3D CM -C 3E CM -C Without Electromagnetic Brake With Electromagnetic Brake 24 VDC Single-Phase 00-5 VAC Single-Phase VAC 24 VDC Single-Phase 00-5 VAC Single-Phase VAC Product Name Product Name Product Name Product Name Product Name Product Name 4D C -K 4E C -K 4D C -A 4E C -A 4D C -C 4E C -C 4D CM -K 4E CM -K A number ( ) indicating the stroke length is entered where the box is located within the product name. A number (right) or 2 (left) indicating the direction of the air couplers for suction is entered where the box is located within the product name. 4D CM -A 4E CM -A 4D CM -C 4E CM -C E-82 ORIENTAL MOTOR GENERAL CATALOGUE Features E-76 /General Specifications of Motor E-77 /System Configuration E-78 /Product Line E-80

8 6 (0 mm increments) mm 0 40 mm mm mm mm mm mm mm mm mm mm mm mm mm mm mm Numbers Specifiable in the Box Customer Support Centre Singapore: , Malaysia: , Others: Without Electromagnetic Brake With Electromagnetic Brake 24 VDC Single-Phase 00-5 VAC Single-Phase VAC 24 VDC Single-Phase 00-5 VAC Single-Phase VAC Product Name Product Name Product Name Product Name Product Name Product Name 6D C -K 6E C -K 6D C -A 6E C -A 6D C -C 6E C -C 6D CM -K 6E CM -K A number ( ) indicating the stroke length is entered where the box is located within the product name. A number (right) or 2 (left) indicating the direction of the air couplers for suction is entered where the box is located within the product name. 6D CM -A 6E CM -A The following items are included in each product. Linear Slide, Hexagonal Socket Head Screw for Mounting Linear Slide, Controller, Controller Mounting Bracket, User I/O Connector, Sensor I/O Connector, Operating Manual General Specifications of Motor General Specifications of Controllers Page E-67 This is the value after rated operation under normal ambient temperature and humidity. 24 VDC Item Specifications The measured value is 00 MΩ min. when a 500 VDC megger is applied between the following places: Insulation Motor Case Excitation and Sensor Windings Resistance Dielectric Strength No abnormality is judged even with application between the following places for minute: Motor Case Excitation and Sensor Windings 0.5 kvac 50 Hz 0.5 kvac 50 Hz Operating Ambient C (non-freezing) Temperature Operating 85% max. (non-condensing) Ambient Humidity Note Do not measure insulation resistance or perform the dielectric strength test while the linear slide and controller are connected. 6D CM -C 6E CM -C Single-Phase 00-5 VAC/Single-Phase VAC Item Specifications Insulation Resistance Dielectric Strength The measured value is 00 MΩ min. when a 500 VDC megger is applied between the following places: Motor Case Excitation and Sensor Windings No abnormality is judged even with application between the following places for minute: Motor Case Excitation and Sensor Windings 3 4:.0 kvac 50 Hz 6:.5 kvac 50 Hz.0 kvac 50 Hz Operating Ambient C (non-freezing) Temperature Operating 85% max. (non-condensing) Ambient Humidity Note Do not measure insulation resistance or perform the dielectric strength test while the linear slide and controller are connected. Motorized Actuators Introduction Types ELS Clean Room DRS DRL Motorized Cylinders Compact Linear Actuators ELC EZA DG Hollow Rotary Actuators Custom-Design Program "FACE" E-82 /Controller Specifications, Dimensions E-66 /Connection and Operation E-68 E-83

9 Motorized Actuators Series for Clean Room Use 3: Width 54 mm Height 50 mm 24 VDC Maximum Transportable Mass: Horizontal 5 kg/vertical 7 kg : 50 to 700 mm (0 mm increments) Custom-design program "FACE" Linear Slide Specifications Drive System Ball Screw Repetitive Positioning Accuracy [mm] ±0.02 Resolution [mm] 0.0 Traveling Parallelism [mm] 0.03 Dynamic Permissible Moment [N m] MP: 4.2 MY: 4.2 MR: 0.5 Static Permissible Moment [N m] MP: 26.4 MY: 26.4 MR: 5 Product Name Lead Transportable Mass [kg] Thrust Electromagnetic Brake Maximum Speed () [mm/s] [mm] Horizontal Vertical [N] Holding Force [N] mm mm mm mm 3D C -K D CM -K E C -K E CM -K A number indicating the stroke length is entered where the box is located within the product name. A number (right) or 2 (left) indicating the direction of the air coupler for suction is entered where the box is located within the product name. This value applies when the linear slide is installed from the base surface. Product Number Code 3 D 050 C M - K Series Name : Series Linear Slide Size 3: Width 54 mm Height 50 mm Lead D: 2 mm E: 6 mm 005 (50 mm) 070 (700 mm) For Clean Room Use Electromagnetic Brake Blank: Without Electromagnetic Brake M: With Electromagnetic Brake Direction of Air Couplers for Suction : Right 2: Left Power Supply Voltage K: 24 VDC Linear Slide and Controller Combinations Product names for linear slide and controller combinations are shown below. Electromagnetic Brake Product Name Linear Slide Product Name Controller Product Name 3D C -K M3D C K Not Equipped 3E C -K M3E C K ESMC-K2 3D CM -K M3D CM K Equipped 3E CM -K M3E CM K A number indicating the stroke length is entered where the box is located within the product name. A number (right) or 2 (left) indicating the direction of the air couplers for suction is entered where the box is located within the product name. Positioning Distance Positioning Time The positioning time (reference) can be checked from the positioning distance. A reference value for the positioning time can be calculated by multiplying the positioning time calculated from the graph with the positioning time coefficient for the applicable stroke. Refer to page G-9 for operating speed and acceleration. 3D (2 mm lead) Horizontal Direction kg 7.5 kg E (6 mm lead) Horizontal Direction kg 5 kg Vertical Direction kg 3.5 kg Vertical Direction kg 7 kg Positioning Time Coefficient [mm] Horizontal Direction Vertical Direction 4 kg 7.5 kg 2 kg 3.5 kg Positioning Time Coefficient [mm] Horizontal Direction Vertical Direction 7.5 kg 5 kg 3.5 kg 7 kg Notes The positioning time in the graph does not include the settling time. Use a settling time of 0.5 s or less as a reference. (Settling time is adjustable by the velocity filter function.) The starting speed should be 6 mm/s or less. E-84 ORIENTAL MOTOR GENERAL CATALOGUE Features E-76 /General Specifications of Motor E-77 /System Configuration E-78 /Product Line E-80

10 Dimensions of Linear Slide (Unit = mm) Mounting Reference Surface Cables can be wired in this range 90 2 Air Coupler for Suction (For ϕ8 tube) 0KQL08-0S (SMC model) Accessory Cable Cables can be wired in this range 90 L± M3D/E C(M)2 2 M3D/E C(M) (33) 94.5 L2 (29.5 for the electromagnetic brake type) L2 (n) 00 Customer Support Centre Singapore: , Malaysia: , Others: (28) (2.5) 6.5 (0.5) A-A n M5 6 Deep B-B Details of Mounting Reference Surface Linear Slide Product Name: M3D C K, M3E C K (Without electromagnetic brake) M3D CM K, M3E CM K (With electromagnetic brake) Electromagnetic Brake A A C Mechanical Stopper Position Mechanical Stopper Position 8 Return-To-Home Operation Range Positioning Range Home Position Opposite the Motor Side Motor Side Home Position 2 B B 4 ϕ5.5, 9.5 Counterbore Deep 26.5± M2.5 3 Deep ϕ3h8 ( 0 ) 4 Deep Mounting Hole for Accessory Sensor Set M4 8 Deep 6 25± Detail View of Table Surface at C Number of Holes (n) [mm] n Numbers Specifiable in the Box within the Linear Slide Product Name [mm] Not Equipped/Equipped L Not Equipped Equipped L2 Not Equipped/Equipped Mass [kg] Not Equipped Equipped CAD Not Equipped D8 D82 D83 D84 D85 D86 D87 D88 D89 D90 D9 D92 D93 D94 Equipped D95 D96 D97 D98 D99 D200 D20 D202 D203 D204 D205 D206 D207 D208 Dimensions for Linear Slide (Unit = mm) ϕ3 Cable Hole (Reference) 94.5 (29.5 for the 7.2 electromagnetic brake type) Mounting Reference Surface 5 L2 (n) 00 L29 (72) (+6) ϕ3 (Positioning pin hole) 24 3± M5 n ϕ ±0.2 Motorized Actuators Introduction Types ELS Clean Room DRS DRL Motorized Cylinders Compact Linear Actuators ELC EZA DG Hollow Rotary Actuators Mechanical Stopper Position Table Position at Return-To-Home Dimensions under the Custom-Design Program "FACE" 0.5 Mechanical Stopper Position The mounting reference surface can be set on either side. The above figure assumes that the linear slide is mounted on its top surface. The following are dimensions under the custom-design program "FACE" with stroke in 0 mm increments. L: mm + [mm] (Overall length (L) is 35 mm longer with electromagnetic brake.) L2: 08.5 mm + [mm] For CAD data, please contact the nearest Oriental Motor sales office. Custom-Design Program "FACE" E-82 /Controller Specifications, Dimensions E-66 /Connection and Operation E-68 E-85

11 Motorized Actuators Series for Clean Room Use 3: Width 54 mm Height 50 mm Maximum Transportable Mass: Horizontal 5 kg/vertical 7 kg : 50 to 700 mm (0 mm increments) Single-Phase 00-5 VAC Single-Phase VAC Custom-design program "FACE" Linear Slide Specifications Drive System Ball Screw Repetitive Positioning Accuracy [mm] ±0.02 Resolution [mm] 0.0 Traveling Parallelism [mm] 0.03 Dynamic Permissible Moment [N m] MP: 4.2 MY: 4.2 MR: 0.5 Static Permissible Moment [N m] MP: 26.4 MY: 26.4 MR: 5 Product Name Lead Transportable Mass [kg] Thrust Electromagnetic Brake Maximum Speed () [mm/s] [mm] Horizontal Vertical [N] Holding Force [N] mm mm mm mm mm 3D C D CM E C E CM A number indicating the stroke length is entered where the box is located within the product name. A number (right) or 2 (left) indicating the direction of the air couplers for suction is entered where the box is located within the product name. An A or C indicating the power supply input is entered where the box is located within the product name. This value applies when the linear slide is installed from the base surface. Product Number Code 3 D 050 C M - A Series Name : Series Linear Slide Size 3: Width 54 mm Height 50 mm Lead D: 2 mm E: 6 mm 005 (50 mm) 070 (700 mm) For Clean Room Use Electromagnetic Brake Blank: Without Electromagnetic Brake M: With Electromagnetic Brake Direction of Air Couplers for Suction : Right 2: Left Power Supply Voltage A: Single-Phase 00-5 VAC C: Single-Phase VAC Linear Slide and Controller Combinations Product names for linear slide and controller combinations are shown below. Electromagnetic Brake Product Name Linear Slide Product Name Controller Product Name 3D C -A M3D C A ESMC-A2 Not Equipped 3D C -C M3D C C ESMC-C2 3E C -A M3E C A ESMC-A2 3E C -C M3E C C ESMC-C2 3D CM -A M3D CM A ESMC-A2 Equipped 3D CM -C M3D CM C ESMC-C2 3E CM -A M3E CM A ESMC-A2 3E CM -C M3E CM C ESMC-C2 A number indicating the stroke length is entered where the box is located within the product name. A number (right) or 2 (left) indicating the direction of the air couplers for suction is entered where the box is located within the product name. Positioning Distance Positioning Time The positioning time (reference) can be checked from the positioning distance. A reference value for the positioning time can be calculated by multiplying the positioning time calculated from the graph with the positioning time coefficient for the applicable stroke. Refer to page G-9 for operating speed and acceleration. 3D (2 mm lead) Horizontal Direction Vertical Direction Positioning Time Coefficient kg 7.5 kg E (6 mm lead) Horizontal Direction kg 5 kg kg 3.5 kg Vertical Direction kg 7 kg [mm] Horizontal Direction Vertical Direction 4 kg 7.5 kg 2 kg 3.5 kg Positioning Time Coefficient [mm] Horizontal Direction Vertical Direction 7.5 kg 5 kg 3.5 kg 7 kg Notes The positioning time in the graph does not include the settling time. Use a settling time of 0.5 s or less as a reference. (Settling time is adjustable by the velocity filter function.) The starting speed should be 6 mm/s or less. E-86 ORIENTAL MOTOR GENERAL CATALOGUE Features E-76 /General Specifications of Motor E-77 /System Configuration E-78 /Product Line E-80

12 Dimensions of Linear Slide (Unit = mm) Mounting Reference Surface Cables can be wired in this range 90 2 Air Coupler for Suction (For ϕ8 tube) 0KQL08-0S (SMC model) Accessory Cable Cables can be wired in this range 90 L± M3D/E C(M)2 2 M3D/E C(M) (33) 94.5 L2 (29.5 for the electromagnetic brake type) L2 (n) 00 Customer Support Centre Singapore: , Malaysia: , Others: (28) (2.5) 6.5 (0.5) A-A n M5 6 Deep B-B Details of Mounting Reference Surface Linear Slide Product Name: M3D C, M3E C (Without electromagnetic brake) M3D CM, M3E CM (With electromagnetic brake) Electromagnetic Brake A A C Mechanical Stopper Position Mechanical Stopper Position 8 Return-To-Home Operation Range Positioning Range Home Position Opposite the Motor Side Motor Side Home Position 2 B B 4 ϕ5.5, 9.5 Counterbore Deep 26.5± M2.5 3 Deep ϕ3h8 ( 0 ) 4 Deep Mounting Hole for Accessory Sensor Set M4 8 Deep 6 25± Detail View of Table Surface at C Number of Holes (n) [mm] n Numbers Specifiable in the Box within the Linear Slide Product Name [mm] Not Equipped/Equipped L Not Equipped Equipped L2 Not Equipped/Equipped Mass [kg] Not Equipped Equipped CAD Not Equipped D8 D82 D83 D84 D85 D86 D87 D88 D89 D90 D9 D92 D93 D94 Equipped D95 D96 D97 D98 D99 D200 D20 D202 D203 D204 D205 D206 D207 D208 Dimensions for Linear Slide (Unit = mm) ϕ3 Cable Hole (Reference) 94.5 (29.5 for the 7.2 electromagnetic brake type) Mounting Reference Surface 5 L2 (n) 00 L29 (72) (+6) ϕ3 (Positioning pin hole) 24 3± M5 n ϕ ±0.2 Motorized Actuators Introduction Types ELS Clean Room DRS DRL Motorized Cylinders Compact Linear Actuators ELC EZA DG Hollow Rotary Actuators Mechanical Stopper Position Table Position at Return-To-Home Dimensions under the Custom-Design Program "FACE" 0.5 Mechanical Stopper Position The mounting reference surface can be set on either side. The above figure assumes that the linear slide is mounted on its top surface. The following are dimensions under the custom-design program "FACE" with stroke in 0 mm increments. L: mm + [mm] (Overall length (L) is 35 mm longer with electromagnetic brake.) L2: 08.5 mm + [mm] For CAD data, please contact the nearest Oriental Motor sales office. Custom-Design Program "FACE" E-82 /Controller Specifications, Dimensions E-66 /Connection and Operation E-68 E-87