Vacuum regulator: IRV P.1276

Transcription

1 acuum System Peripherals acuum regulator, Electronic vacuum regulator, Directional control valve, acuum pressure switch, Pressure gauge for vacuum, Flow control equipment acuum Regulator acuum regulator: IR P.276 Electronic acuum Regulator Electronic vacuum regulator: lt29 Directional Control alve Selection guide of directional control valve (Ejector system/acuum pump system) /SYJ/QZ/K/KF X2/X3 T/P/G/N EX3/QD SJ36 acuum Pressure Switch. ZSE3/ZSE4/ZSE8/ZSE5F 2. ZSE6F/ZSE3/ZSE/ZSE2 3. PS/Z/PSE2/3/53 4. PSE54/PF Pressure Gauge for acuum Pressure gauge for vacuum: GZ46 Flow Control. Speed controller: S 2. Check valve: K 3. Check valve with onetouch fitting: KH 4. Check valve, ushing type: K P.277 P.278 P.28 P.28 P.282 P.283 P.284 P.285 P.286 P.287 P.288 P.289 P.29 P.29 P.29 P.29 Z ZY ZF ZP J EP Related ade to Order. acuum release valve with throttle valve: SY52R 2. acuum release valve with throttle valve: S4RX8 3. ir suction filter (Filter volume: cm 3 ): FGZG22 P.29 P.295 P.296 Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com 275

2 acuum System Peripherals: acuum Regulator: IR/2 Refer to the catalog (CT.ES62) IR/2 for details. llows adjustment of vacuum line pressure Standard connections Single sided connections Straight Elbow Fluid Set pressure range () tmospheric intake consumption (2) Knob resolution mbient and fluid temperature C. side tubing O.D. SET. side tubing O.D. Weight (without accessory) Standard connections Single sided connections IR IR2 ir to.3 kpa.6l/min (NR) or less.3 kpa or less 5 to 6 C ø6, ø8 ø/4", ø5/6" 35 g (IRC8) 25 g (IRC8) RoHS ø6, ø8, ø ø/4", ø5/6", ø3/8" 25 g (IR2C) 25 g (IR2C) Note ) Note that the pressure range fluctuates depending on the vacuum pump pressure. Note 2) ir is always supplied from the atmosphere. Elbow Straight How to Order Standard connections 2 IR 2 ody size ax. flow 4 l/min (NR) ax. flow 24 l/min (NR) L Fittings Straight Elbow C8 Connection tubing O.D. Tubing O.D. IR IR2 C6 ø6 C8 etric ø8 C ø N7 ø/4" N9 Inch ø5/6" N ø3/8" ccessory () L ccessory 2 None () G With pressure gauge (2) (3) (With IR: GZ33K, With IR2: GZ43K) ZN (3) NPN open collector: output With ZSE3NL ZP With digital PNP open collector: output With ZSE3PL pressure NPN open collector: 2 outputs With ZSE3L Z gauge PNP open collector: 2 outputs With ZSE3L Note ) Two plug nuts are mounted. Note 2) Pressure gauge accuracy: Within ±3% of full scale Note 3) Plug nut and gauge nut are included. (Refer to the catalog (CT.ES62) back page for details.) ccessories are shipped together. None With bracket With bottom bracket Note ) ccessories are shipped together. Single sided connections 2 IR 2 ody size ax. flow 4 l/min (NR) ax. flow 24 l/min (NR) C8 ade to order Refer to page in CT.ES62. X Specification Integrated digital pressure switch for panel mounting 276 Single sided connections Single sided connections L Fittings Straight Elbow Connection tubing O.D. Tubing O.D. IR IR2 C6 ø6 C8 etric ø8 C ø N7 ø/4" N9 Inch ø5/6" N ø3/8" ccessory () L ccessory 2 None () G With pressure gauge (2) (3) (With IR: GZ33K, With IR2: GZ43K) ZN (3) NPN open collector: output With ZSE3NL ZP With digital PNP open collector: output With ZSE3PL pressure NPN open collector: 2 outputs With ZSE3L Z gauge PNP open collector: 2 outputs With ZSE3L Note ) Plug nuts are mounted. Note 2) Pressure gauge accuracy: Within ±3% of full scale Note 3) Gauge nut is included. ccessories are shipped together. None With bracket With bottom bracket Note ) ccessories are shipped together. Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com

3 acuum System Peripherals: Electronic acuum Regulator: IT29 Refer to est Pneumatics No. 5 for details. Straight type cable connector Linearity Output pressure kpa Hysteresis Output deviation %F.S Input signal %F.S. Out Return Input signal %F.S. Flow Characteristics Output pressure kpa Right angle type cable connector Flow rate l /min (NR) acuum Supply Pressure Pa: kpa How to Order IT 29 2 S 5 Pressure range 9.3 to 8 kpa 24 DC 2 to 5 DC Note) Communication models are available only for 24 DC. Input signal/communication signal oltage Power supply Current consumption in. supply vacuum pressure () ax. supply vacuum pressure Set pressure range Input signal Input impedance Output signal (4) (onitor output) Linearity Hysteresis Repeatability Sensitivity Temperature characteristics Output pressure ccuracy display Units mbient and fluid temperature Enclosure Weight (7) CC DN PR RC Current type (2) oltage type Preset input Current type oltage type Preset input nalog output Switch output Current type 4 to 2 m DC Current type to 2 m DC oltage type to 5 DC oltage type to DC Preset input CCLink DeviceNet PROFIUS DP RS232C communication onitor output Without (In the case of communication models) Without (In the case of preset input) nalog output to 5 DC Switch output/npn output Switch output/pnp output nalog output 4 to 2 m DC (Sink type) IT29 IT29 24 DC ±% 2 to 5 DC 24 DC type:.2 or less (6) 2 to 5 DC type:.8 or less Set pressure 3.3 kpa kpa.3 to 8 kpa 4 to 2 m DC, to 2 m DC to 5 DC, to DC 4 points 25 Ω or less (3) pprox. 6.5 kω 24 DC type: approx. 4.7 kω, 2 DC type: approx. 2. kω to 5 DC (Load impedance: kω or more) 4 to 2 m DC (Sink type) (Load impedance: 25 Ω or less) Output accuracy: Within ±6% (F.S.) NPN open collector output: ax. 3, 8 m PNP open collector output: ax. 8 m Within ±% (Full span) Within.5% (Full span) Within ±.5% (Full span) Within.2% (Full span) Within ±.2% (Full span)/ C ±2% (F.S.), ± digit kpa inimum display: (5) to 5 C (No condensation) IP65 35 g Note ) The minimum supply vacuum pressure should be 3.3 kpa more than the maximum vacuum pressure setting value. Note 2) 4 to 2 m DC is not possible with the 2wire type. (24 DC or 2 to 5 DC) is required. Note 3) This value does not include the over current circuit. If the over current circuit is included, the input impedance should be changed, depending on the input power supply. 35 Ω or less when the input power supply is 2 DC m. Note 4) Either analog output or switch output must be selected. Furthermore, when switch output is selected, either NPN output or PNP output must also be selected. Please note that the preset input type is not equipped with an output signal function. Note 5) Please contact SC regarding indication with other units of pressure. Note 6) ax. current consumption is.6 or less for communication specification. Note 7) The weight is increased by about 8 g (by g for PROFIUS DP) for communication specification. N T F Rc NPT NPTF G [Option] CE compliant Q ccessory (racket) Without bracket Flat bracket C Lbracket Thread type Port size 2 /4 CE compliant 277 Z ZY ZF ZP J EP Pressure display unit Related 5 kpa Note) For the communication models, CC, DN, PR and RC, only is available as it does not have a pressure display. Cable connector type S L N Straight type 3 m Right angle type 3 m Without cable connector Note) Order communication cable (other than RS232C) separately. See below. Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com

4 Solenoid valve Compact 3 port solenoid valve, SYJ Compact size: mm (, SYJ3) 5 mm (SYJ5) 8 mm (SYJ7) Low power consumption:. W 3 port solenoid valve QZ mm: QZ 5 mm: QZ2 8 mm: QZ3 3 port solenoid valve K KF Compact 2 port solenoid valve X2 3 port solenoid valve T T37/37/325 3 port solenoid valve P P3/5/7 3 port solenoid valve G342 SYJ3/5/7 QZ/ 2/3 () Compact 3 port solenoid valve X3/32/33 acuum pilot 2 port valve N acuum System Peripherals: Directional Control alve guide for selecting the solenoid valve model to accommodate the system n array of solenoid valves (2/3 port valve) for controlling the ejector/external vacuum supply system How to read the chart The solenoid valves are available in the following constructions: the standard product (for general use), the external pilot specification, and the vacuum specification. Select the optimal model in accordance with your circuit configuration and the effective area. For detailed specifications of these products, refer to the respective catalog that is available separately. System Circuit construction alve construction acuum release valve Standard lanking External pilot spec. (R) Ejector System acuum spec. () Standard Supply valve External pilot spec. (R) acuum spec. () External acuum Pump Supply System System acuum switching valve Standard lanking () External pilot spec. (R) (3) (2) Directional Control alve/acuum System Peripherals Divider valve of vacuum supply air External acuum spec. () Standard pilot spec. (R) acuum spec. ().4 to to to to.63 to to to 38 3 x.5 5 x.8 8, 4 No. 5 x.8 No. 8, 4 5 x to 3 8 () (2) () (2).29 to.6 8 to 3 8 No.7 8 to to 2 No. No.7 No. Catalog CT.ES97 2 to 3 4 No. 9.6 to 35 3 to to 2 No.7 (N2 to 3) (N4 to 7) Caution Flow characteristics C(dm 3 /(s bar)) Caution on Selection Use a plug cap at R port of 2 port valve and 3 port valve for vacuum release valve and vacuum switching valve. (Except EX 3) ) Leakage cm 3 /min or less 2) Leakage: 6 Pam 3 /sec (at pressure differential of. Pa) 3) pplications are different from vacuum holding valve. 4) Refer to front matter 32 of est Pneumatics No. for flow characteristics. 5) Conversion from sonic conductance C: S = 5. x C.4 2 Port size est Pneumatics No. Z ZY ZF ZP J EP Related 3 position valve EX3 2.4 to 3 8 to 2 No. acuum/release unit QD.27 5 x.8 No. acuum release valve with throttle valve SJ x.8 No. 278 Note ) For up to.2 kpa of vacuum, it can be used as the standard product ( cm 3 /min max. leakage). bove that, it will be the specification ( 5 cm 3 /sec max. leakage). Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com 279

5 acuum System Peripherals: Directional Control alve/solenoid alve Compact 3 port solenoid valve, SYJ Possible to use with vacuum up to at kpa Compact size: Width mm (, SYJ3) Width 5 mm (SYJ5) Width 8 mm (SYJ7) Low power consumption.w (With energy saving circuit) Piping specifications ody ported Solenoid valve SYJ32/322 SYJ52/522 SYJ72/722 Port size 3 x.5 5 x.8 8 Refer to est Pneumatics No. for details. Flow characteristics C (dm 3 /(s bar)) /24 () 5 x.8.37 ase mounted (With subplate) SYJ34/324 SYJ54/524 5 x ody ported ase mounted SYJ74/724 8, port solenoid valve QZ/2/3 ase mounted /etal Seal, Rubber Seal Piping specifications Solenoid valve Port size ase mounted (With subplate) QZ QZ 2 QZ 3 QZ5 QZ25 QZ235 QZ225 QZ245 QZ35 QZ335 QZ325 QZ , 4 4, 3 8 Refer to est Pneumatics No. for details. Flow characteristics C (dm 3 /(s bar)) port solenoid valve K Compact size: Width 8 mm Possible to use with vacuum ody ported ase mounted Piping specifications Solenoid valve Port size ody ported ase mounted (With subplate) K332 For vacuum: K332 K334 For vacuum: K334 5 x.8 5 x.8 Flow characteristics C (dm 3 /(s bar)) acuum specification: Operating pressure range.2 kpa to. Pa Low wattage style (2 W DC) and long period energized style available. 8 8 Refer to est Pneumatics No. for details port solenoid valve KF Compact size: Width 8 mm Possible to use with vacuum ody ported ase mounted Piping specifications Solenoid valve Port size ody ported ase mounted (With subplate) KF332 For vacuum: KF332 KF334 For vacuum: KF334 5 x.8 5 x Flow characteristics C (dm 3 /(s bar)) acuum specification: Operating pressure range.2 kpa to. Pa Low wattage style (2 W DC) and long period energized style available. Refer to est Pneumatics No. for details. 28 Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com

6 Directional Control alve/solenoid alve/acuum System Peripherals Compact 2 port solenoid valve Series X2 options & For medium vacuum, non leakage Leakage: 6 Pam 3 /sec (at pressure differential of. Pa) Pressure:. Pa abs (medium vacuum) Orifice dia. (mm ø) alve specifications N.O. N.O. N.O. N.O. N.O. N.O. N.O. N.O. N.O. X2 X22 X22 X222 X222 X2222 X232 X2322 X23 X232 X223 X2232 X233 X2332 X224 X2242 X234 X2342 X225 X235 X226 X236 Port size Rc 8 8, 4 4, 3 8 8, 4 4, 3 8 4, 3 8 4, , , 2 Refer to est Pneumatics No. 7 for details. Flow characteristics C (dm 3 /(s bar)) Z Compact 3 port solenoid valve Series X3 options & For medium vacuum, non leakage Leakage: 6 Pam 3 /sec (at pressure differential of. Pa) Pressure:. Pa abs (medium vacuum) (/N.O./C.O.) Orifice dia. (mm ø) X3 2 4 X X X X X X X X X X X Port size Rc 8 4 Refer to est Pneumatics No. 7 for details. Flow characteristics C (dm 3 /(s bar)) ZY ZF ZP J EP Related 2.2 X X X X X X For acuum Pad X33 X324 X334 Port size Rc 8, 4 4, 3 8 Refer to est Pneumatics No. 7 for details. Orifice dia. (ø) Flow characteristics Pressurised side acuum side R P Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com 28

7 Directional Control alve/solenoid alve/acuum System Peripherals 3 port solenoid valve T, P P542 T37 T325 /Rubber Seal Piping specifications ody ported ody ported ase mounted ody ported Solenoid valve Port size T325() 4, 3 8 T37() 8, 4 T37() 4 P342 8, 4 P542 4, 3 8 P , 2 P344 8, 4 P544 4, 3 8 P , 2 P ,, 3 4 P ,, 4 P385 4, 2, 2 Flow characteristics C (dm 3 /(s bar)) to to to to to to to 28 Low wattage (2 W DC) type and long period energized type available. Long period energized type available. : acuum specification: Operating pressure range.2 kpa to. Pa Refer to est Pneumatics No. for details. Refer to the catalog (CT.ES97) for the P series. 23 to 3 57 to 65 3 port solenoid valve G342 G342 /Rubber Seal Piping specifications Solenoid valve Port size 2 to 3 G342 4 ody ported For acuum: G342R 2 to 3 4 Operating pressure range:.2 kpa to.9 Pa Refer to est Pneumatics No. for details. Flow characteristics C (dm 3 /(s bar)) 26 to to acuum pilot 2 port valve N It is used when the valve is to be operated by the main vacuum in the absence of pressurized air. (acuum pilot) Fluid acuum Operating pressure range kpa to atmospheric pressure Pilot pressure range to 47.9 kpa N2 4 N2 N2 4 5 N25 N3 4 2 N32 N N425 N N532 N5 4 32F N532F N6 4 4 N64 N6 4 4F N64F N7 4 5 N75 N7 4 5F N75F Port size Orifice dia ø [mm] Refer to est Pneumatics No. 7 for details. Flow chracteristics ass [kg] easured by air easured by water C[dm 3 /(bar,sec)] b Cv v x 6 m ir operated.6.9 External pilot solenoid Port size Orifice dia Flow chracteristics ass [kg] Screwin Flange ø [mm] Cv ir operated External pilot solenoid Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com

8 Directional Control alve/solenoid alve/acuum System Peripherals 3 position valve EX3 ir operated type Internal/External pilot solenoid type acuum suction and release The 3 port, 3 position double solenoid that permits vacuum suction, release, and suspension (closed) is ideal for a system where many valves are used for a single circuit. acuum/release unit QD Response speed 3 msec (at 5 mm )/ 8.5 msec (at mm ) Distance from a unit to a workpiece (Piping I.D. ø2.5) Smooth removal of workpiece without overshoot No blow off of workpiece by release air No need to adjust the timing for switchover vacuum and positive pressure. (Single signal control) No need to set a restriction circuit for release air ody ported Operation Fluid Proof pressure ir operated Operating pressure range Suction filter External pilot solenoid Internal pilot solenoid alve construction Fluid Operating pressure range Response time Note) EX32 2 EX ase mounted EX322 acuum pad() (P) 2 EX ir operated, External pilot solenoid, Internal pilot solenoid ir.5 Pa Low vacuum ac. to. Pa External pilot pressure.2 to. Pa Low vacuum ac. to. Pa External pilot pressure External pilot pressure.2 to.9 Pa.2 to.7pa.2 to.7pa Suction (Negative pressure) Release (Positive pressure) Suction (OFF) Release (ON) Suction (ON) Release (OFF) Note) ased on JIS (Use clean air). <N.O. specifications> N.O. specifications specifications Positive pressure (Release air): P acuum pressure (Suction air): acuum pump Pressurized air Q (For filling release air) uiltin tank 4 EX35 6 EX37 2 EX to.9 Pa Refer to est Pneumatics No. for details. Direct operated poppet ir, Inert gas/compatible with low ozone to kpa to.7 Pa 2 msec 4 msec 4 msec 2 msec Connection port (5 or Rc /8) Refer to est Pneumatics No. for details. Sequential switching operation prevents the inflow of pressurized air into the vacuum pump system. Caution To maintain the vacuum of port via the closed center, be aware that the vacuum could be decreased due to leakage from the vacuum pad and the piping. QD5W (For switchover) Workpiece: (Pad or nozzle) Z ZY ZF ZP J EP Related Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com 283

9 Directional Control alve/solenoid alve acuum System Peripherals acuum release valve with throttle valve SJ36 alve construction Fluid Operating pressure range pa Release pressure port (P) acuum pressure port 3/5 (E) Pilot X port Refer to est Pneumatics No. for details. 3 position, 3 port valve with throttle valve ir.25 to.7 kpa to.7 ().25 to.7 (2) Note ) Can be used with positive pressure depending on applications. Note 2) Pressure of the pilot X port must be the same as that of the release port (P) or more. dsorption Transfer System Circuit Example 2 spool valves included. Possible to control vacuum adsorption and release by a valve..5 W (With energy saving circuit) Width mm (Same as Series SJ3) With throttle valve that can control the flow rate of release air Replaceable filters are built in the vacuum side and release side respectively With a pressure detection port that enables users to connect a pressure switch, etc. Can be mounted with a 4 port solenoid valve SJ2/3 (ade to Order). (Please contact SC for details.) Possible to switch pressure of two wiring systems by applying different positive pressures to (P) port and 3/5 (E). (In this case, flow rate is adjustable only at the P port side.) (Ejector) acuum pump acuum pressure switching valve Filter acuum side W Pad side Release air SJ36 Release pressure switching valve (uiltin throttle valve) Pressure switch, etc. Filter Release side 284 Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com

10 acuum System Peripherals: acuum Pressure Switch Refer to est Pneumatics No. 6 for details. 2Color Display High Precision Digital Pressure Switch: ZSE3(F) Rated pressure range Display/Set pressure range Proof pressure Setting/Display resolution Fluid Switch output ax. load current ax. applied voltage Residual voltage Response time Short circuit protection Rated pressure range Display/Set pressure range Proof pressure Set pressure resolution pplicable fluid Switch output ax. load current ax. applied voltage Residual voltage Response time Short circuit protection 5 kpa. kpa ir/noncorrosive gas/nonflammable gas 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) 4 m or less NPN or PNP open collector output: output NPN or PNP open collector output: 2 outputs (Selection) 8 m 28 (With NPN output) or less (With load current of 8 m) 2.5 ms or less (Response time selections with antichattering function: 2 ms, ms, 5 ms, ms, 2 ms) With short circuit protection 2Color Display HighPrecision Digital Pressure Switch: ZSE4(F) Rated pressure range Display/Set pressure range Proof pressure pplicable fluid Switch output ax. load current ax. applied voltage Residual voltage Response time Short circuit protection ZSE3 (acuum pressure). to. kpa. to 5. kpa ZSE4 (acuum pressure). to.3 kpa. to 5. kpa ZSE3F (Compound pressure). to. kpa 5. to 5. kpa ZSE4F (Compound pressure). to. kpa 5. to 5. kpa 5 kpa. kpa ir/noncorrosive gas/nonflammable gas 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) 45 m or less NPN or PNP open collector output: 2 outputs (Selection) 8 m 25 (With NPN output) or less (With load current of 8 m) 2.5 ms (Response time selections with antichattering function: 2 ms, ms, 5 ms, ms, 2 ms) With short circuit protection 2Color Display Digital Pressure Switch for General Fluids: ZSE8 ZSE8 (acuum pressure). to. kpa ZSE8F (Compound pressure). to. kpa. to. kpa. to. kpa 5 kpa Fluid that will not corrode stainless steel 63 and 34 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) 45 m or less NPN output, NPN 2 outputs, PNP output, PNP 2 outputs 8 m 28 (With NPN output) or less (With load current of 8 m) 2.5 ms (Response time selections with antichattering function: 2 ms, ms, 5 ms, ms, 2 ms) With short circuit protection Z ZY ZF ZP J EP Related HighPrecision Digital Pressure Switch for General Fluids: ZSE5F Rated pressure range Display/Set pressure range Proof pressure Set pressure resolution pplicable fluid Switch output ax. load current ax. applied voltage Residual voltage Response time Short circuit protection ZSE5F. to. kpa. to. kpa 5 kpa. kpa Fluid that will not corrode stainless steel 63 and 34 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) 55 m or less NPN or PNP open collector output: 2 outputs 8 m 3 (With NPN output) or less (With load current of 8 m) 2.5 ms or less (Response time selections with antichattering function: 24 ms, 92 ms, 768 ms) With short circuit protection Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com 285

11 acuum Pressure Switch/acuum System Peripherals Refer to est Pneumatics No. 6 for details. HighPrecision Digital Pressure Switch for General Fluids: ZSE6F Rated pressure range Set pressure range Proof pressure Set pressure resolution pplicable fluid Switch output ax. load current ax. applied voltage Residual voltage Response time Short circuit protection ZSE6F (Compound pressure). to. kpa. to. kpa 5 kpa kpa. Fluid that will not corrode stainless steel 63 and 34 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) 55 m or less NPN or PNP open collector output (2 outputs) 8 m 3 (With NPN output) or less (With load current of 8 m) 2.5 ms or less (Response time selections with antichattering function: 24 ms, 92 ms, 768 ms) With short circuit protection LCD Readout Digital Pressure Switch: ZSE3 ZSE3 Pressure setting range to kpa aximum operating pressure 2 kpa Set pressure resolution kpa pplicable fluid ir/noncorrosive gas/nonflammable gas 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) 25 m or less Compact Pressure Switch: ZSE Pressure setting range Proof pressure Temperature characteristics Port size Operating temperature range ZSE to kpa 5 kpa ±3% F.S. 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) 7 m or less at 24 DC, 2 output: 25 m or less at 24 DC : R /, 5 x.8, T: NPTF /, 5 x.8, : Z ejector mounted style 8 8 to 6 C (No condensation or freezing) Compact Pressure Switch: ZSE2 ZSE2 Pressure setting range to kpa Proof pressure 5 kpa Operating voltage 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) Operation indicator light Lights up when ON (Red) 7 m or less (When 24 DC is ON) Operating temperature range to 6 C (No condensation or freezing) : R /, 5 x.8, T: NPTF /, 5 x Port size X: With suction filter (For mounting on Z unit) R: ase mounted style (For mounting on unit) 286 Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com

12 acuum Pressure Switch/acuum System Peripherals Refer to est Pneumatics No. 6 for details. ir Checker Electronic Pressure Switch: PS Switch output ax. operating pressure Set pressure range pplicable fluid Operation indicator light Temperature characteristics Repeatability Hysteresis Load voltage Load current Leakage Internal voltage drop Operating temperature range dsorption Confirmation Switch: Z Pressure Sensor Controller: PSE3 Display/Set pressure (differential pressure) range Pressure range Rated pressure (differential pressure) range to kpa For compound pressure to kpa PSR6L Present prss. Setting prss.: ON Pa. to.4 Pa ir/noncorrosive gas/nonflammable gas ON: When red LED turns on ±3% F.S. ±% F.S. 4% F.S. or less 2 to 24 DC ±%, Ripple (pp) % or less 5 to 4 m m or less 5 or less to 6 C (No condensation) ZS Z pplicable fluid Rated pressure range ir 2 to kpa pplicable adsorption nozzle dia. ø.3 to ø.7 ø.5 to ø.2 Hysteresis.5 kpa Internal orifice ø.5 ø.8 Switch output 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) NPN Open collector 3, 8 m ultichannel Controller: Series PSE2 Switch output for sensor Power supply current for sensor PSE2 PSE2 NPN open collector PNP open collector 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) 55 m or less ( for sensor is not included.) [].5 4 m maximum ( m maximum for the total power supply current when 4 sensors are input.) to kpa For vacuum to kpa to kpa For low pressure to kpa PSE3. to Pa 5 to 5 kpa For positive pressure to Pa to 5 kpa.2 to 2 kpa For slight differential pressure to 2 kpa 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) 5 m or less ( for sensor is not included.) Z ZY ZF ZP J EP Related Pressure Sensor: PSE53 PSE535 Rated pressure range to kpa Proof pressure 5 kpa pplicable fluid ir/noncorrosive gas/nonflammable gas 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) 5 m or less Output specifications nalog output ( to 5, Output impedance: pprox. kω) Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com 287

13 acuum Pressure Switch/acuum System Peripherals Refer to est Pneumatics No. 6 for details. Compact Pneumatic Pressure Switch: PSE54 PSE54 PSE543 Rated pressure range to kpa to kpa Proof pressure pplicable fluid Output specifications 5 kpa ir/noncorrosive gas/nonflammable gas 2 to 24 DC ±%, Ripple (pp) % or less (With power supply polarity protection) 5 m or less nalog output ( to 5, Output impedance: pprox. kω) 2Color Display Digital Flow Switch: PF Integrated type PF7 PF725 PF75 Separate sensor unit PF5 PF525 PF55 Separate monitor unit PF3 PF7 PF5 pplicable fluid Rated flow rate range (Flow rate range) Dry air, N2, r, CO2 (ir quality degrees: JIS to.6.2, ISO to.6.2) Dry air, N2, r CO2.2 to l/min.2 to 5 l/min.5 to 25 l/min.5 to 2.5 l/min to 5 l/min to 25 l/min 2 to l/min 2 to 5 l/min Flow Sensor: PF Series PF Features Set flow rate range (l/min) to.5 to to 3.5 to.5 to 3 to 3 dsorption confirmation of tiny workpiece Repeatability ±2% F.S. or less Response speed 5 ms or less, Withstand pressure 5 kpa Greasefree, RoHScompliant Compatible with all flow rates with a voltage monitor 288 Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com

14 GZ46 GZ462 Selection Caution. Do not expose the gauge to shocks or vibrations. 2. Please contact SC if the gauge is exposed to pressure pulsations or high frequency operation. ounting Caution. During transport and installation, make sure the gauge is not exposed to shock, such as dropping, to maintain precision. 2. To ensure the proper posture of the gauge, the zero point of the graduation on the gauge must face downward and perpendicular to the ground. 3. Do not install the gauge in an area that is exposed to high temperatures or humidity. 4. When attaching the pressure gauge, make sure to place a wrench directly on the squared off portion. If a force is applied to some other area to screw in the gauge, it could cause the gauge to leak or to become damaged. Dimensions How to install cover assembly acuum System Peripherals: Pressure Gauge for acuum: Series GZ (45.5) 2 (4) Type Connecting () Fluid (2) Indication accuracy Parts washing Case (Surface treatment) Clear cover aterial (Surface treatment) ody ourdon tube With attachment C cover assembly C How to Order GZ46 GZ46E ack screw R 8 R 4 (Option: = with 5 x thread) ir ±3% F.S. (Full span) Wetted parts degrease washing Rolled steel (lack melamine coating) Polycarbonate Polycarbonate (Hard coated) Part no: G463 Part no: G462 rass rass (Electroless nickel plated) (3) rass Part no: 354 Part no: 3543 Note ) When attaching the pressure gauge, make sure not to fasten excessively, since it could cause the gauge to leak or to become damaged. Use port tape as sealant. Recommended fastening torque = R /8: 7 to 9 N. m, R /4: 2 to 4 N. m. Note 2) Please consult with SC if other fluids are used, a corrosive problem may result. Note 3) obile parts (gear, etc) inside the pressure gauge is made of brass. GZ 46 E K K C Pressure gauge for vacuum 46 O.D. ø42.5 E Pressure unit for positive pressure K Unit kpa Note), which stands for pressure unit, mmhg for both positive and vacuum pressure is no longer sold for use in Japan after the new Weight and easurement ct was implemented. (Stock item) External parts oilfree Copper/Fluorinefree Display pressure range 2 Unit: kpa to to to 2 Pressure unit for vacuum K Unit kpa Connecting 2 Note) X3 (wetted parts) is not stainless steel specifications. Option 5 (Female thread) Note) Use 5 female thread for panel mounting. ttachment (Covering assembly) C C Without covering assembly Clear cover has no protrusion (Clear cover is irremovable.) Clear cover has no protrusion (Clear cover is removable.) Pressure range Note) kpa Unit Connecting Note GZ46K to 2 to kpa R 8, 4 GZ46K to 2C, C to kpa R 8, 4 With covering assembly GZ46K to 2 to kpa R 8, 4 5 (Female thread) GZ46EK to 2 to kpa R 8, 4 5 (Female thread) GZ46K2K to 2 to 2 kpa R 8, 4 Note) Do not apply pressure that exceeds max. display pressure, since it would cause the gauge to malfunction. Other versions (not including models below) can be made on a madetoorder basis. (ade to order) Please consult with SC for details, as delivery times may be extended. Pressure range Note) kpa Unit Connecting Note GZ46KK to 2 to kpa R 8, 4 Note) Do not apply pressure that exceeds max. display pressure, since it would cause the gauge to malfunction. 5 x.8 x 5. Remove machine screw ( location) of pressure gauge. 2. Set the cover on pressure gauge. 3. Tighten the machine screw to cover. Tightening torque is.3 to.5 N m. With cover assembly (For panel mounting) Type C (Clear cover is not mountable, or removable.) 4.5 (45.5) 2 (4) Size R 8 R 4 5 x.8 x 5 Panel cut dimensions Plate thickness ax. 3.5 t Type C (Clear cover is mountable and removable.) 4.5 (45.5) 5 5 x.8 x 5 Z ZY ZF ZP J EP Related Remove machine screw ( ): Port size is R 4 48 x 2, 48 x 2, Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com 289

15 acuum System Peripherals: Flow Contorol Refer to est Pneumatics No. 6 for details. Speed controller S Possible to control vacuum release air With onetouch fitting The tubing can be removed and installed through Onetouch operation. The body can be screwed in directly to the equipment that you are using. s a result, the piping labor can be dramatically reduced. Elbow type S2F5 X24 S22F SX24 S22F2 SX24 S32F3 SX24 S42F4 SX24 Universal type S3F5 X24 S23F SX24 S23F2 SX24 S33F3 SX24 S43F4 SX24 Port size Rc 5 x pplicable tubing O.D. (mm) Dimensions: Same dimensions as mentioned in pages 42 and 42 of est Pneumatics No. 6. Flow rate: Same as controlled flow of the standard product. Check valve K Large valve capacity Low cracking pressure/.2 Pa Elbow type K2 K4 K6 Port size Rc 8, (Rc 4 ) 4, 3 8, 2 95 (Rc 2 ) 3 4, 23 (Rc ) Series K Check valve with Onetouch fitting Straight type: KH Easily installed in pipe lines. etric size KH pplicable tubing O.D. ø4 ø6 ø8 ø ø Inch size KH pplicable tubing O.D Check valve with Onetouch fitting ale connector type: KH Can be used directly on equipment. etric size pplicable Port size R tubing O.D KH 8 2 ø4 ø6 ø8 ø ø (R /8) 4 (R /4) Inch size 32 tubing O.D. UNF KH 9 3 pplicable ø5/32 ø/4 ø5/6 ø3/8 ø/2 Port size NPT (NPT /8) 4 (NPT /4) Check valve ushing type: K Can be used in applications with splashing coolant and spatter, etc. R thread 2 K 3 4 Female thread Rc NPT thread ale thread R (mm ) K Female thread NPT ale thread NPT Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com

16 acuum System Peripherals: ade to Order acuum Release alve with Throttle alve: SY52R Line for vacuum adsorption transfer uiltin throttle valve in the vacuum release valve Can be mounted on the SS5Y52type (Individual wiring type) and SS5Y52Ptype (Flat ribbon cable type) anifold alve effective area : mm 2 port Port size Note ) E Note 2) E C6 C Note ) Refer to the part numbers for the port size. Note 2) When the builtin throttle valve is fully open. alve type Type of actuation Fluid P (External pilot pressure) Operating E (acuum release pressure) pressure range E (acuum) Pilot valve exhaust method mbient and fluid temperature How to Order External pilot type, Dual 2 port solenoid valve Normally closed ( valve) ir.5 to.7 Pa to.7 Pa kpa to Pa Pilot valve individual exhaust to 5 C (No condensation) : mm 2 Effective rea/ass port Port size Note ) E Note 2) E C6 C Note ) Refer to the part numbers for the port size. Note 2) When the builtin throttle valve is fully open. Single unit: External pilot type dual 2 port solenoid valve SY52R 5 L C6 Note 3) Coil specifications Note 3) Rated voltage Electrical entry Note 3) Note 3) Light/surge voltage suppressor anual override Note 3) Refer to the Series SY5 catalog. Note 3) port Sol.a E (P) Note 3) CE compliant racket Without bracket F2 With bracket (F2) racket part no.: SX568 port size C6 ø6 Onetouch fitting C8 ø8 Onetouch fitting P (X) E (ac.) Sol.b ass (g) Z ZY ZF ZP J EP Related anifold: ody ported bar stock (2/2P type) Specify the part numbers for valves and options together beneath the manifold base part number in order starting from the first station. P SS5Y5 2 P 8 anifold type Individual wiring type Flat ribbon cable type Stations Note 5) Note 4) CE compliant 3 3 stations Thread type Note 4) 2 2 stations Note 4) Refer to the Series SY5 catalog. Note 5) 2P (Flat ribbon cable type): ax. 2 stations Example SS5Y525 set SY52R5LOUC6 5 sets The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com 29

17 + + ade to Order/acuum System Peripherals External Pilot Type, Dual 2 Port Solenoid alve: Single Unit/anifold Dimensions/SY52R 22.6 (45.2) (4.7) x 3 x.5 thread depth 3.5 (For mounting bracket) (37.) (45.) (2 x ø3.2) (For mounting) Details of anual Portion Type D Type E LOCK LOCK pprox. 3 (Lead wire length) PUSH 2.7 PUSH Light/surge voltage suppressor anual override (Push and turn the locking type override) 56.8 (Fully open state) (Stroke: pprox. 3) 35. (C) 28. (DC) anual portion Throttle valve (djust with a torque of.3 N m or less.) x ø3.2 (For mounting manifold) Onetouch fitting ( Port) pplicable tubing O.D.: ø6 (SC) : ø8 (SC) 28. (4.9) 44.4 Sol.a Sol.b Rc /8 (E Port) acuum release port (P) PE Port ø x ø2.2 (For manifold gasket positioning) PE Port ø E (P) P (X) E (C.) + E P E + 5. (2.) Rc /8 (P Port) External pilot port (X) Rc /8 (E Port) acuum port (C.) [Remarks for valves] Note ) Refer to est Pneumatics No. Series SY for the details of electrical entry and electrical circuit with a light/surge voltage suppressor. Note 2) Diagrams above are compatible with SY52RL(F2). Note 3) When mounted with brackets, the product is mounted in a place specified with one dot chain lines. Note 4) pplicable pilot valves are SY4/SY Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com

18 ade to Order/acuum System Peripherals Dimensions/SS5Y52P Stations Onetouch fitting ( Port) pplicable tubing O.D.: ø6(sc) x ø4.5 (For mounting) anual override (Nonlocking) Light/surge voltage suppressor (C) E (X) P (P) E Polarity indication E P E Pneumatic Circuit SOL.b Wiring unit + + (Pitch) P = 7.5 pplicable connector: 26 pins, IL type With strain relief (Conforming to ILC8353) SOL.a SOL.b SOL.a L L E P E (n station) ( station) SOL.b SOL.a SOL.b SOL.a Triangle mark Throttle valve (djust with a torque of.3 N m or less.) SOL.b SOL.a 54.6 ax SOL.b SOL.a (3.2) 7.9 SOL.b SOL.a 54.6 SOL.b SOL.a PE Port E (C) P (X) E (P) Rc /4 (P, E, E Port) Z ZY ZF ZP J EP Related Schematic of Connector (Example: For this figure) (Light/surge voltage suppressor is not included.) Triangle mark indication position L: Dimensions: mm L n L L n: Stations pplicable blanking plate assembly part no.: SS5Y52: SY5262 (with screws and gaskets) SS5Y52P: SY5262 (with screws, gaskets and dust cap) The product cannot be mounted with standard products Series SY5/5 on a manifold Common Common Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com Unused terminal Unused terminal Unused terminal Unused terminal Solenoid b Solenoid a Station 8 Solenoid b Solenoid a Station 7 Solenoid b Solenoid a Station 6 Solenoid b Solenoid a Station 5 Solenoid b Solenoid a Station 4 Solenoid b Solenoid a Station 3 Solenoid b Solenoid a Station 2 2 Solenoid b Solenoid a Station 293

19 Series SS5Y52 Specific Product Precautions e sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions. Caution How to Use anifold <2/2P Type> piping port is different from that for the standard product. When not connected properly, the product will not operate properly. [P port: External pilot port, E port: acuum release pressure port, E port: acuum suction port] <2P Type>. If a large amount of drainage is included in the supply air, it may cause electrical trouble since a wiring unit is located in the place where exhaust from the PE port directly goes through. e sure to control the supply air. 2. For more than stations, both poles of the common should be wired. 3. When replacing a solenoid valve, etc., be sure to mount it by placing the solenoid a side on the connector (IL type) side. 4. Terminal no. is not indicated on the connector. 5. The terminal no. indicated in the connection schematic of connector, as shown in the reference, means a correlation of, 2, from the triangle mark side on the flat ribbon cable of connector. (Refer to the reference drawing.) Triangle mark Reference drawing Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com

20 ade to Order/acuum System Peripherals 2 acuum Release alve with Throttle alve: S4RX8 For vacuum adsorption transfer With a throttle valve that can control the flow rate of release air (Slotted type is used to ensure safety.) Possible to block release air and vacuum at the same time (3 position function) Compatible with manifold Series S Sol.a P (X) E (ac.) Sol.b Common specifications Type of actuation alve type Fluid Internal pilot type 3 position, 3 port solenoid valve Normally closed () ir Operating P (acuum release pressure).5 to.7 Pa pressure range E (acuum pressure) mbient and fluid temperature llowable voltage fluctuation Electrical entry ass kpa to Pa (tmospheric pressure) to 5 C to +% Plugin type 73 g Note) other than the above are the same as Series S Dimensions How to Order Refer to How to Order Series S (Standard). S4R F X8 Rated voltage Light/surge voltage suppressor anual override Note) Please contact SC when the product is mounted with a standard 5 port solenoid valve on a manifold. Dimensions other than the throttle valve for vacuum release are the same as the standard product (S). 54. Z ZY ZF ZP anual override (Nonlocking) : Orange : Green Z x ø2.2 (For mounting manifold) J EP Throttle valve (djust with a torque of.3 N m or less.) Related Note) Use the manifold that the product is mounted on after mounting a plug to the port. For safe operation, be sure to read the Safety Instructions on front matters 38 and 39 before handling. Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com 295

21 ade to Order/acuum System Peripherals 3 ir Suction Filter (Filter volume: cm 3 )/FGZG22 Used to shorten the response time of vacuum adsorption Shorten the arrival time of vacuum pressure when adsorbing the workpiece by reducing the volume of the filter used for the vacuum adsorption system. This product is mainly used for the semiconductor manufacturing equipment handler (Reducing the cycle time of the equipment). olume of air suction filter: cm 3 pplication Example When the standard air suction filter (ZF) volume is 5 cm 3, the volume is reduced to 4 cm 3 by using this filter (volume: cm 3 ). This volume (4 cm 3 ) is equivalent to ø4 mm tubing (I.D. 2.5 mm) and length of approx. 8 mm. Fluid Operating pressure Withstand pressure mbient and fluid temperature Nominal filtration Element differential pressure resistance ir, Nitrogen Negative pressure.5 Pa to 6 C (No freezing) : μm, 2: 2 μm 4: 4 μm, 7: 7 μm.5 Pa JIS How to Order ir Suction Filter FGZG22 Element with Cylindrical ase (Replacement element part no.) EW Nominal filtration μm 2 2 μm 4 4 μm 7 7 μm Note ) Replace the filter element when the pressure drops approximately.2 Pa. Note 2) During disassembly and assembly, confirm that there are no scratches or damage, etc, on the Oring. Note 3) When disassembling, a wrench (nominal size 8) is required. Please consult with SC for information not specified such as how to replace (disassemble) elements, etc. Dimensions Width across flats 8 ø2 5 x.8 OUT 7.3 yetquw 5.7 r 5 x.8 IN ø2.5 Description No. Description Element with cylindrical base 2 Case 3 Oring 4 Seal 5 Seal 6 Cover 7 Element guide aterial C Transparent nylon NR Nylon NR 27 PTFE Note ) erify the directions for IN and OUT that are indicated on the body to ensure a proper connection. It is not possible to ensure the sealing performance of the filter element if connections are reversed. Note 2) When an element becomes clogged, stop operation, change the inside pressure to atmospheric pressure, and then replace the element (element with cylindrical base). Note 3) Do not use in a line where a pressurized condition is maintained since the body may be damaged. Note 4) Do not use the product in an atmosphere and place where there is direct contact with chemicals. It may cause damage to the body. (lcohol, acetone, etc. also cause damage, so be sure for the product not to be close to them.) For safe operation, be sure to read the Safety Instructions on front matters 38 and 39 before handling. 296 Courtesy of Steven Engineering, Inc.23 Ryan Way, South San Francisco, C ain Office: (65) 58892Outside Local rea: (8) 25892www.stevenengineering.com