Vacuum Module. Series ZX. Ejector System/Vacuum Pump System

Transcription

1 Vacuum Module Series ZX Ejector System/Vacuum Pump System For electronic components and precision components up to 0 g Modular design Customized application function through selection of module components. lndex Characteristics/pplication Examples... P.64 Modular Components Introduction... P.65 Ejector System How to Order... P.66 Combination of supply valve and release valve... P.6 Construction... P.69 Ejector unit... P.70 Valve unit... P.72 Suction filter unit... P.74 Vacuum pressure switch unit... P.75 Dimensions/Without valve unit... P. Dimensions/Combination of supply valve and release valve Type K, K3, K, J, J2... P.2 to 93 Manifold specifications... P.94 Dimensions... P.96 to 90 Vacuum Pump System How to Order... P.902 Combination of supply valve and release valve... P.904 Construction... P.905 Valve unit... P.906 Suction filter unit/vacuum pressure switch unit... P.907 Dimensions/Combination of supply valve and release valve Type K, K3, K6, K... P.90 to 95 Manifold specifications... P.96 Dimensions... P.9 to 923 Unit Construction Ejector system/single, Manifold... P.924 Vacuum pump system/single, Manifold... P.926 Manifold assembly from individual unit... P.92 3 Made to Order 2 Combinations of supply valve and release valve.. P.930 High Noise Reduction Silencer ssembly... P.934 Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment 63

2 Vacuum Module: Ejector System/Vacuum Pump System Series ZX For electronic components and precision components up to 0 g Modular design Customized application function through selection of module components. Compact size and lightweight (20 g with complete unit); well suitable for actuator mounting Ejector nozzle size: ø0.5 to ø.0 (Suction flow: 5 to 22 l/min (NR)) Ejector system Ejector system Ejector unit Filter unit Ejector unit Vacuum switch unit Filter Valve unit Ejector unit Ejector unit Single unit Complete unit Ejector unit Vacuum Pump system Valve unit Ejector unit Filter unit Filter unit Filter unit Valve unit Valve unit Vacuum switch unit Valve unit Vacuum switch unit Filter Single unit Valve unit Filter Vacuum switch unit Filter Complete unit pplication Example Chip bonding Chip mounting Picking & placing Escorting printed matter miniature components 64

3 Series ZX Modular Components Introduction System Ejector System Vacuum Pump System Component equipment Characteristics P.66 to 90 P.902 to 929 Ejector unit Series ZX Nozzle diameter (mm) Z Max. suction flow (l/min(nr)) ir consumption (l/min(nr)) Maximum vacuum pressure kpa ZX ZR Exhaust release Built-in silencer/manifold exhaust Individual exhaust port: (Rc ) ZM ZM Valve unit ZX-V Component equipment Supply valve/ ZQ Function Operation Power supply voltage N.C., N.O. Solenoid valve/ir operated valve 3, 5, 6, 2, 24 VDC, 0, VC (50/60 Hz) ZH ZU Vacuum pressure switch unit Series ZS Series Set pressure range Vacuum switch dsorption confirmation switch 0 to kpa 20 kpa to kpa Vacuum switch dsorption confirmation switch 0 to kpa 20 kpa to kpa ZL ZY Hysteresis 3% or less 0.5 kpa ZF Suction filter unit ZX-F pplicable pad diameter (mm) Supply voltage Operating pressure range 2 to to.2 24 VDC Vacuum to 0.5 MPa 2 to to.2 24 VDC ZP SP ZCUK MJ Filtration 30 µm MV Unit ir supply port size Vacuum pad connection port size M5 (Standard)/M6 (Option) M5 (Standard)/M6 (Option) EP HEP Common specifications Manifold ir supply port size Exhaust port size External pilot port size Rc Rc M5 Related Equipment Stations Max. units Refer to pages 70 to 0 for detailed specifications for each unit. Refer to pages 66 and 67 for ejector system unit. Refer to page 94 for ejector system manifold. Refer to pages 902 and 903 for external vacuum supply system unit. Single unit Single unit Manifold Manifold Made to Order (Refer to pages 930 to 934 for details.) Refer to page 96 for external vacuum supply system manifold. Refer to pages 924 to 927 for units for replacement. 65

4 Vacuum Module: Ejector System Series ZX How to Order [Option] Ejector unit Components Valve unit N.C. type Vacuum switch unit ZX Ejector unit nozzle dia. Ejector exhaust Combination of supply valve and release valve K Pilot valve Solenoid valve rated voltage Electrical entry Light/Surge voltage suppressor Manual operation 5 L Z E C Vacuum switch unit Filter unit Vacuum switch Electrical entry /V port size Release flow rate L Ejector unit Valve unit N.O. type Vacuum switch unit ZX K3 5 L Z E C Ejector unit Ejector unit Ejector unit nozzle dia mm mm.0 mm Caution Caution Surge voltage suppressor Red Black Diode 2 () 3 (2) Coil Vacuum switch unit Filter unit Light/Surge voltage suppressor Coil ZX E C ZX F Ejector exhaust With silencer Port exhaust Rc Common exhaust (Manifold only) Valve unit/combination of supply valve and release valve Refer to Table () on page 67. Pilot valve When using the C type, the DC solenoids are operated via a rectifier. Therefore, when using this type, make sure to combine the connector assembly equipped with a rectifier with the exclusive solenoids. Using other combinations could lead to burned coils or other types of malfunctions. Using the DC type: Match the polarity of the connectors according to the + and marks on the connectors. Do not interchange the polarities to prevent the diodes or the switching elements from becoming burned. If lead wires are pre-connected, the red wire is + and the black wire is. Using the C type: The C type is not equipped with a surge voltage suppressor because the rectifier assembly prevents the generation of surge voltage. 66 Note ) When port exhaust is applied to the manifold, pilot exhaust is done by common exhaust. Thus, the exhaust port on the manifold base should be open while operating. Note 2) When the product is used for the manifold specification and common exhaust, the exhaust air of the operating ejector releases may enter the vacuum (V) port of the nonoperating ejector and be released if there are an operating and non-operating ejector. Select either the built-in silencer or port exhaust for the ejector exhaust method. L LN LO M MN MO G H Y DC: W (With indicator light:.05 W) C DC: 0.45 W (With indicator light: 0.5 W) Only 24 VDC and 2 VDC are applicable to 0.45 W. Solenoid valve rated voltage Note) 3 Note) 5 6 V S R 0 VC 50/60 Hz VC 50/60 Hz 24 VDC 2 VDC 6 VDC 5 VDC 3 VDC ir operated (K6, K, J3, J4, D3, D4) Note) CE marked products are not available for and 3. pplicable to plug connector only. (Connector assembly with rectifier is attached.) Electrical entry Plug connector type Grommet type Lead wire length 0.3 m Without lead wire (pplicable to DC only) Without connector Lead wire length 0.3 m Without lead wire (pplicable to DC only) Without connector Lead wire length 0.3 m (pplicable to DC only) Lead wire length 0.6 m (pplicable to DC only) ir operated Note) In the case of K or J (combination of supply and release valves), M type plug connector can not be used. Manual operation B L C CL CN Grommet type Connector type Light/Surge voltage suppressor Z S Lead wire length 0.6 m Lead wire length 3 m Lead wire length 0.6 m Lead wire length 3 m Without connector (Without lead wire) Refer to Table (3) on page 67 for part number of lead wire with connector. Vacuum switch unit/filter unit E Vacuum switch (For general purpose)(zse2)(npn) E55 Vacuum switch (For general purpose)(zse2)(pnp) With Note) dsorption suction Nozzle dia. (ø0.3 to 0.7) PB Note) confirmation filter switch (ZSP) Nozzle dia. (ø0.5 to.2) F Only suction filter Note) CE marked products are not available for and PB. Vacuum digital pressure switch unit (ZSE3) D /V port size M5 x 0. Y M6 x (Option) 2 outputs/without analog output 2 outputs/with analog output output (with trouble detection)/without analog output output (with trouble detection)/with analog output Note) nalog output is available only on grommet type. Non-locking push type Locking slotted type None With light/surge voltage suppressor With surge voltage suppressor CE compliant Release flow rate The filter mounted on the product is a simplified one. When used in an environment with a lot of dust, the filter is likely to be clogged quickly. The use with the series ZF, ZFB and ZFC is recommended. S is not available for C. DC voltage (with surge voltage suppressor) If the polarity is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged. Refer to Table (2) on page 67 for part number of lead wire with connector. Refer to page 94 for ordering the manifold. Refer to pages 924 and 925 for ordering a unit for replacement. L Vacuum switch electrical entry Q CE marked Without lock nut With lock nut Made to Order (Refer to pages 930 to 934 for details.)

5 Vacuum Module: Ejector System Series ZX Table () Valve Unit/Combination of Supply Valve and Release Valve (Refer to page 6 for detailed specifications.) Supply valve VJ VJ VJ Components Solenoid (N.C.) Solenoid (N.C.) Solenoid (N.O.) Solenoid (N.C.) ir operated (N.C.) External release ir operated (N.O.) ir operated (N.C.) Solenoid (N.C.) Solenoid (N.O.) 4 None None 3 Model ZX5-K5LZ-EC ZX5-K35MZ-EC ZX7-K5LZ-EC ZX7-K35MZ-EC ZX-K5LZ-EC ZX-K35MZ-EC Symbol K K3 K6 K J J2 ir operated valve: Controlled by external 3 port valve. External release: Directly released by external 2 port valve. Supply valve Solenoid valve ir operated N.C. N.O. N.C. N.O. (VJ4) (VJ324) (ZX) (VJ324) Table (2) Valve Unit/Valve Plug Connector ssembly Connector assembly part no. (For DC) (For 0 VC) (For VC) Lead wire length How to order For ZSE2 For ZSP 0.3 m (Standard) If ordering vacuum module with 600 mm or the longer lead wire, m specify both vacuum module For ZSE3 m ZS 20 5 and connector assembly part 5.5 m numbers. Note) If ordering a vacuum switch m Ordering example) with 3 m lead wire, specify m ZX5-K5LOZ-EC(-Q) pc. both the vacuum unit switch VJ pcs. and the 3 m lead wire with m connector part numbers. Combination N.C. (VJ4) N.O. (VJ324M) N.C. (VJ4) N.O. (VJ324M) N.C. (VJ4) N.O. (VJ324M) N.C. (VJ4) N.C. (VJ34) N.C. (VJ4) N.C. (VJ34) N.C. (VJ4) N.C. (VJ34) None Solenoid valve ir operated External release N.C. N.C. N.C. ZX (VJ4) (VJ34) (VJ34) Without valve module Ejector System/Recommended Model (The models below will have shorter deliveries.) Nozzle diameter (mm) Ejector unit exhaust type With silencer Supply valve (Pilot valve) (Direct operated) Solenoid valve rated voltage 24 VDC ZS 5 None 2 Table (3) Vacuum Switch/ Lead Wire with Connector Lead wire length Ordering example) ZX5-K5LO- ECN(-Q) pc. VJ pcs m 3 m 5 m ZS pc. The asterisk ( ) denotes the symbol for assembly. Lead wire electrical entry Plug connector type Light/Surge voltage suppressor With light/surge voltage supressor Vacuum switch unit General vacuum switch (ZSE2) Mass (g) Vacuum switch electrical entry Connector type Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment ZX -K5LZ-E ZX -K35MZ-E 67

6 Series ZX Ejector System/Combination of Supply Valve and Release Valve Combination Symbol: K Release pressure SUP port () Pilot pressure exhaust () Pilot pressure SUP port () ir pressure SUP port () Release valve Supply valve pplication: This combination is used for effecting control in accordance with electric signals. Release air supply (D) Combination Symbol: K Pilot port release valve Pilot port supply valve pplication: This combination is used for effecting control in accordance with air signals. Because the supply valve is N.O., the pressure that is supplied to the ejector is not interrupted during a power outage; as a result, the state of suction can be maintained. This combination is used for preventing the workpieces from dropping during power outages. How to Operate Valve Condition. Work adsorption 2. Vacuum release 3. Operation stop Supply valve (N.C.) Solenoid valve ON ir pressure release port () (N.C.) Solenoid valve ON How to Operate Valve Condition. Work adsorption 2. Vacuum release 3. Operation stop Supply valve (N.O.) ir operated valve ON ON (N.C.) ir operated valve ON Combination Symbol: K3 Combination Symbol: J Release valve Supply valve pplication: This combination is used for effecting control in accordance with electric signals. Because the supply valve is N.O., the pressure that is supplied to the ejector is not interrupted during a power outage; as a result, the state of suction can be maintained. This combination is used for preventing the workpieces from dropping during power outages. Supply valve pplication: This combination is used for effecting control in accordance with electric signals. vacuum release is effected by the intrusion of air between the silencer, pad, and the workpiece. This combination is used when there is no need to accelerate the vacuum release speed. How to Operate Valve Condition. Work adsorption 2. Vacuum release 3. Operation stop Supply valve (N.O.) Solenoid valve ON ON (N.C.) Solenoid valve ON How to Operate Valve Condition. Work adsorption 2. Vacuum release 3. Operation stop Supply valve (N.C.) Solenoid valve ON None Combination Symbol: K6 Combination Symbol: J2 External release port Pilot port pplication: This combination is used for effecting control in accordance with air signals. Supply valve pplication: This combination is used for effecting control in accordance with electric signals. Because the supply valve is N.O., the pressure that is supplied to the ejector is not interrupted during a power outage; as a result, the state of suction can be maintained. This combination is used for preventing the workpieces from dropping during power outages. vacuum release is effected by the intrusion of air between the silencer, pad, and the workpiece. This type is used when there is no need to accelerate the vacuum release speed. How to Operate Valve Condition. Work adsorption 2. Vacuum release 3. Operation stop Supply valve External 3 port valve ON External 2 port valve ON How to Operate Valve Condition. Work adsorption 2. Vacuum release 3. Operation stop Supply valve (N.O.) Solenoid valve ON None 6

7 Vacuum Module: Ejector System Series ZX Ejector System/Construction Z ZX ZR ZM ZM Component Parts Table () How to Order Pilot Valves No. Table (2) How to Order Solenoid Valves ZX ZX VJ4 VJ3 Type of actuation Body option N.C. type, indicate no symbol. (Individual exhaust for Pilot valve) Note) Compatible with ZX-VJ324M- and ZX-VJ34- only. Pilot valve L L Z Z Manual override Model Replacement Parts No. Description Material Note No. Description Material Part no. Poppet valve assembly ZX--0 Pilot valve 9 2 Release flow rate adjustment needle Stainless steel ZX-N ir operated 3 Manifold base luminum 4 Vacuum switch ZSE2, ZSP, ZSE3 5 Valve unit ZX-V -D- 6 Interface plate ( ) 7 Silencer case Note) Filter case Polycarbonate 2 M Y Components Supply valve Solenoid valve Solenoid valve N.C. (VJ4) N.C. (VJ4) Solenoid valve Solenoid valve N.O. (VJ324) N.C. (VJ34) ir operated ir operated N.O. (VJ324) N.C. (VJ34) ir operated N.C. (ZX) N.C. (Normally closed) N.O. (Normally open) Pilot valve Individual exhaust Common exhaust for main and pilot valves Note) In the case of Rated voltage 0 VC 3 VC 5 24 VDC 6 2 VDC V 6 VDC S 5 VDC R 3 VDC DC: W (With indicator light:.05 W) pplicable to plug C connector only. DC: 0.45 W (With indicator light: 0.5 W) Only 24 VDC and 2 VDC are applicable to 0.45 W. Note) Screw length of VJ0 and VJ300 for series ZX is different from that of the standard model. <Screw length> VJ0 M.7 x 5 VJ300 M.7 x 22 B ZX-VJ4- ZX-VJ Non-locking push type Locking slotted type ZX-VJ3 2 4 ZX- Light/Surge voltage suppressor Without light/surge voltage suppressor S With surge voltage suppressor Z With light/surge voltage suppressor Electrical entry L Connector (0.3 m) LN Connector (w/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (w/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) Note) In the case of ZX-VJ4, M, MN and MO cannot be used (7,3) Filter element Ejector assembly Gasket Silencer element Seal set Silencer assembly F ZX-FE Refer to Table (4). ZX-FG ZX-SE ZX-PK ZX-HS2 Note) Caution when handling filter case ) The case is made of polycarbonate. Therefore, do not use with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. 2) Do not expose it to direct sunlight. Combination of supply and release valve K, J K3, J2 K K6 ZX M3 Port size M3 M5 0.5 mm 0.7 mm.0 mm M3 x 0.5 M5 x 0. ZX W D 05 ssembly no. Ejector unit nozzle dia. Caution Refer to Table (), (2), (3). Table (3) How to Order ir Operated Valves 2 3 Pilot port/ External release port Table (4) How to Order Ejector ssembly Ejector type (Exhaust type) With silencer Port exhaust Common exhaust n adapter should be attached to the assembly to be used as a unit. port and V port can be connected. Ejector assembly Combination/ ZX-WD Used as a unit by attaching an adapter/ ZX-W Turning the vacuum release flow volume adjustment needle clockwise reduces the vacuum release flow volume; the needle valve is fully closed when the needle stops turning. Turning the needle 2 full turns counterclockwise from the fully closed position renders the needle valve fully open. The needle will fall out if it is turned more than 4 full turns. In order to prevent the needle from loosening and falling out, the release flow volume adjustment needle with lock nut is also available. 69 ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment

8 Series ZX Ejector Unit Specifications Unit no. Nozzle dia. (mm) Max. suction flow (l/min (NR)) ir consumption (l/min (NR)) Maximum vacuum pressure Maximum operating pressure Supply pressure range Standard supply pressure Operating temperature range Ejector exhaust type Mass Standard accessory Code Code ZX-W05 2 ZX-W07 2 ZX-W kpa 0.7 MPa 0.2 MPa to 0.55 MPa 0.45 MPa 5 to 50 C Built-in silencer For single unit and manifold Individual exhaust For single unit and manifold Built-in silencer: 35 g/port exhaust: 45 g Bracket B (ZX-OBB) Codes and are corresponding to the suffixes in How to Order to indicate the ejector exhaust method. Dimensions: ZX-W 2 How to Order ZX W 05 Nozzle diameter mm 0.7 mm.0 mm, V port size Ejector exhaust method 2 Y M5 x 0. M6 x (Option) Silencer Individual exhaust Rc JIS Symbol Silencer exhaust Port exhaust Port exhaust EXH port (EXH.) Rc / P Release pressure SUP port () Plug Note) Bracket B ZX-OBB V 2 x ø3.6 (Standard accessory) 3 (33.2) ir pressure SUP port (P) P x ø V 5.4 (55.4) Note ) Remove the plug at external release. Note 2) Dimensions : For mounting bracket B. 70

9 Vacuum Module: Ejector System Series ZX Flow Characteristics/Exhaust Characteristics ZX-W05 Exhaust Characteristics Vacuum pressure (kpa) ZX-W07 Exhaust Characteristics Vacuum pressure (kpa) ZX-W Exhaust Characteristics Vacuum pressure (kpa) Supply pressure (MPa) Vacuum pressure ir consumption Suction flow rate Vacuum pressure Supply pressure (MPa) Vacuum pressure ir consumption Suction flow rate ir consumption Suction flow rate Supply pressure (MPa) Suction flow rate (l/min (NR)) ir consumption (l/min (NR)) Suction flow rate (l/min (NR)) ir consumption (l/min (NR)) Suction flow rate (l/min (NR)) ir consumption (l/min (NR)) Flow Characteristics Vacuum pressure (kpa) Flow Characteristics Vacuum pressure (kpa) Flow Characteristics Vacuum pressure (kpa) [t 0.45 MPa] Suction flow rate (l/min (NR)) Suction flow rate (l/min (NR)) Suction flow rate (l/min (NR)) How to Read Flow Characteristics Graph Vacuum pressure Precautions Be sure to read before handling. Refer to front matters 3 and 39 for Safety Instructions and pages 44 to 46 for Vacuum Equipment Precautions. Caution Suction flow rate Flow characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, a change in vacuum pressure will also be expressed. Normally this relationship is expressed in ejector standard use. In graph, Pmax. is max. vacuum pressure and Qmax is max. suction flow. The valves are specified according to catalog use. Changes in vacuum pressure are expressed in the below order.. When ejector suction port is covered and made airtight, suction flow becomes 0 and vacuum pressure is at maximum value (Pmax). 2. When suction port is opened gradually, air can flow through, (air leakage), suction flow increases, but vacuum pressure decreases. (condition P and Q) 3. When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near 0. (atmospheric pressure). When vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near 0. When ventirative or leaky work must be adsorbed, please note that vacuum pressure will not be high. Refer to the vacuum equipment model selection on pages 25 to 43 for the selection and sizing of Series ZX. Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment 7

10 Series ZX Valve Unit: ZX-V Model/Specifications Unit no. Components Operation ZX-V - Supply valve Pilot operated Direct operated Solenoid valve ir operated Solenoid valve External N.C. N.O. N.C. N.O. N.C. N.C. release (VJ4) (VJ324M) (ZX) (VJ324) (VJ34) (VJ4) (ZX) Cv factor 0.7 Main valve Operating pressure range 0.3 to 0.6 MPa Max.operating frequency Operating temperature range 5 Hz 5 to 50 C Interface plate symbol Standard accessory Bracket C Solenoid Valve Specifications Rated voltage Electrical entry Light/Surge voltage suppressor Manual operation ir operated N.C. (VJ34) VJ4 VJ34, VJ324 24, 2, 6, 5, 3 VDC/0, VC (50/60 Hz) L plug connector, grommet L plug connector, M plug connector, grommet With or Without Non-locking push type/locking slotted type pplicable to plug connector only. Connector assembly with rectifier is attached. Model/Solenoid Valve [ ]: Mass (g) Model Solenoid valve N.C. (VJ4) Solenoid valve N.C. (VJ34) External release (ZX) ir operated N.C. (VJ34) None Solenoid valve N.C. (VJ4) K [2] K2 [73] J [77] Solenoid valve N.O. (VJ324M) K3 [32] K4 [9] J2 [0] Supply valve ir operated N.C. (ZX) K5 [73] K6 [5] J3 [4] None D [77] D2 [0] D3 [4] D2 [0] How to Order /Refer to page 66 for details. ZX V K 5 L Z B System Ejector system External vacuum supply Refer to page 906 for the specifications of ZX-VB. Combination of supply valve and release valve Pilot valve Rated voltage Manual override Light/Surge voltage suppressor Electrical entry Release flow rate adjusting /V needle port size 72

11 Vacuum Module: Ejector System Series ZX Connector ssembly for 0 VC Connector assembly with rectifier attached. Connector ssembly with Rectifier Part No. Z VJ Pilot valve for supply Pilot pressure EXH port () M3 36 Symbol Rated voltage Lead wire color 0 VC 50/60 Hz Blue (2 pcs.) 3 VC 50/60 Hz (5 VC 60 Hz) Gray (2 pcs.) Valve Unit Normally closed Rated voltage Pilot pressure EXH port () ir pressure SUP port () : Release flow rate adjusting needle with (Needle fully open) lock nut Release valve Release pressure output port (D) ir pressure output port () Release flow rate Interface plate Manual override (Non-locking) Bracket C Standard accessory Lead wire length Symbol L mm x ø3.6 Release pressure output port (D) ø ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ Normally open ir pressure SUP port () 2 x ø3 (Mounting hole) ir pressure output port () Circuit diagram MV EP HEP Related Equipment 20 Pilot valve for supply Pilot pressure EXH port () M3 Release valve Manual override (Push and turn the locking type override) Manual override Release flow rate Interface plate Bracket C Standard accessory 2 x ø3.6 Release pressure output port (D) 3.9 Circuit diagram 35.4 ir pressure SUP port () 2 x ø3 (Mounting hole) ir pressure output port () 5.4 Note) Dimensions : For mounting bracket C : For mounting spacer. 73

12 Series ZX Suction Filter Unit: ZX-F Specifications Unit no. Operating pressure range Operating temperature range Filtration efficiency Element Mass Standard accessory ZX-F Vacuum to 0.5 MPa 5 to 50 C 30 µm F 35 g Bracket (ZX-OB) Note) If not operated within the specified range of pressure and temperature, trouble may result. Filter JIS Symbol x R. ø Filter (62) 5 50 OUT port 2 x ø3.5 IN port 5 20 OUT. 6. IN Bracket (Standard accessory) 4 Note) Dimensions : For mounting bracket. Filter case Caution. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. bout this product The filter mounted on the product is a simplified one. When used in an environment with a lot of dust, the filter is likely to be clogged quickly. Select a large-volume filter such as Series ZF. 74

13 Vacuum Module: Vacuum Pressure Switch Unit Series ZX Vacuum Pressure Switch Unit/Vacuum Pressure Switch: ZSE2-0X Quick response: ms Compact size: 39H x 20W x 5D (except the connecting portion of the standard type) Improved wiring: connector type Uses a carrier diffusion semiconductor pressure sensor Pressure detector ( carrier diffusion semiconductor pressure sensor is used.) Sensor chip Filter case Caution. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water-soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Vacuum pressure setting Caution Observe the following precautions when setting the vacuum pressure. Lightly turn the screwdriver with your fingertips. To prevent damage to the trimmer groove, do not use a screwdriver that has a large grip or a tip that does not fit in the trimmer groove. Vacuum Pressure Switch Wiring Switch Main circuit of switch Pressure setting trimmer Unit no. Fluid Set pressure range Hysteresis Repeatability Temperature characteristics Voltage Port size Mass Output Indicator light Current consumption Operating temperature range Max. operating pressure ZSE2 connection ZSE2 Y Brown Black Blue Load 0X 5, V port size M5 x 0. M6 x (Option) Output specifications How to Set Vacuum Pressure Indicator light ZSE2-0X ir 0 to kpa 3% Full span or less ±% Full span or less ±3% Full span or less 2 to 24 VDC (Ripple ±% or less ) M5 x 0., M6 x (Option) 50 g Open collector 30 V, 0 m Light at ON state 7 m or less (24 VDC, at ON state) 0 to 60 C 0.5 MPa When using ejector system, instantaneous pressure up to 0.5 MPa will not damage the switch. Note) If not operated within the specified range of pressure of temperature, trouble may result. How to Order 5 55 NPN Open collector 30 V 0 m PNP Open collector 30 V 0 m Electrical entry L C CL CN ZSE2 Pressure setting trimmer selects the ON pressure. Clockwise rotation increases high vacuum set point. Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector When using the switch to confirm correct adsorption, the set pressure should be as low as possible. If setting the pressure lower than that, switch becomes ON in case when adsorption is not complete. If setting the pressure higher than that, switch does not become ON though it is absorbing workpieces properly. Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment The filter mounted on the product is a simplified one. When used in an environment with a lot of dust, the filter on the unit is likely to be clogged quickly. Use with the ZF, ZFB and ZFC series is recommended. High vacuum Supply pressure Set pressure Reliable adsorption Unstable adsorption Refer to the pressure switch ZSE2 Series catalog for the detailed specifications of pressure switches. tmospheric pressure 0 No adsorption 75

14 Series ZX Vacuum Pressure Switch Unit/Vacuum Pressure Switch: ZSE2-0X Guidelines for Use of Vacuum Pressure Switch Unit System circuit for work adsorption Ejector style External vacuum supply style Vacuum line Supply line 2 port valve ir suction filter Vacuum Pressure Switch: ZSE2-0X- Grommet: ZSE2-0X Set pressure To use for picking verification, set a vacuum pressure that can pick the workpiece without fail. Using a small diameter picking nozzle If the nozzle diameter is approximately mm, the adsorption confirmation with ZSE2/ZSE3 may not be possible since the pressure difference between ON and becomes smaller. t times like this, consider using an adsorption confirmation switch, ZSP (page 79). Note) Note that the performance of ejectors and pumps influence the conditions. External vacuum supply system 5 55 Vacuum pressure switch Vacuum line 2 port valve ir suction filter Vacuum pressure switch Using multiple pressure switches with a single vacuum source If a single vacuum source is divided so that vacuum switches can be used on individual lines, the vacuum pressure might not come within the values set with the switches because the pressure of the vacuum source fluctuates depending on the number of picks and non-picks. Especially, because pressure fluctuation exerts a great influence when picking with a small diameter nozzle, the countermeasures described below must be provided. Vacuum pressure reduction valve (Vacuum adjusting valve) Vacuum source Tank Needle valve Vacuum pressure switch Pad Workpiece djust the needle valve to reduce the pressure fluctuation between picking and non-picking. Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines. Thus, in case of an error, each valve can be turned to minimize the influences on other pads. 5 Connector: ZSE2-0X- C 55 JIS Symbol Pressure setting trimmer Indicator light (Red) Pressure setting trimmer Indicator light (Red) Lead wire length Lead wire length 600 Vacuum pressure SUP port () dapter x ø3.3 (mounting hole) 2 x ø3.3 (mounting hole) 76

15 Vacuum Module: Vacuum Pressure Switch Unit Series ZX Vacuum Pressure Switch Unit/Vacuum Pressure Switch: ZSE3-0X Built-in failure prediction output function If the attainable amount of vacuum reduces due to a decrease in performance caused by clogging of the silencer of the vacuum system (ejectors), cracked pads, or the leakage of the vacuum pipes, this function quickly detects the abnormal condition and outputs a signal to halt the system. Two independent pressure settings are possible This feature is well suited for applications that require 2 separate pressure outputs due to a change in the vacuum suction pad diameters, or for applications that require 2 pressure verifications to effect line changes in the positive pressure line. Comprehensive self diagnosis function Overcurrent detection function Overvoltage detection function Data error Data saving function LCD indication: Error indicated on LCD Operation indicator light: Red light flashes during a malfunction Even if the power is cut off, the settings are stored for 0,000 hours (approximately years) in the exclusive IC (EEPROM). Filter case Caution.The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water-soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Vacuum Pressure Switch Unit no. Fluid Set pressure range Hysteresis mode Hysteresis Window comparator mode ccuracy Operating voltage Port size Mass Indicator light Current consumption Operating temperature range Max. operating pressure Wiring ZSE3 Wiring example General connection methed Main circuit Connection with PLC t negative COM terminal Main circuit How to Order Output specifications Y LED green LED red LED green LED red 0X 2, V port size M5 x 0. M6 x (Option) NPN open collector, double output Without analog output NPN open collector, double output With analog output NPN open collector output/trouble detection/ Without analog output NPN open collector output/trouble detection/ With analog output Brown (+) Gray (nalog output) Black (Out) White (Out2) Blue ( ) Load Load 2 to 24 V Brown (+) + Gray (nalog output) Black (Out) White (Out2) Blue ( ) ZSE3-0X ir 0 to kpa Variable (Can be changed from 0) Fixed (3 digits) ±% Full span or less 2 to 24 VDC (Ripple ±% or less) M5 x 0., M6 x (Option) 50 g Light at ON state 25 m or less 0 to 60 C 0.5 MPa + DC 2 to 24 V Input terminal Input terminal Wiring specifications Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Note) nalog output is available only for grommet type. Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment How to Set Vacuum Pressure Refer to Best Pneumatics No. 6. Guidelines for Use of Vacuum Pressure Switch Unit Refer to page

16 Series ZX Vacuum Pressure Switch Unit/Vacuum Pressure Switch: ZSE3-0X Vacuum Pressure Switch/ZSE3-0X -2, 22, 23, 24 Grommet: ZSE3-0X - Connector: ZSE3-0X - C RESET button SET button DOWN button UP button RESET button SET button DOWN button UP button Lead wire length Lead wire length Vacuum pressure SUP port () 2 x ø3.3 Vacuum pressure SUP port () 2 x ø3.3 JIS Symbol 7

17 Vacuum Module: Vacuum Pressure Switch Unit Series ZX Vacuum Pressure Switch Unit/dsorption Confirmation Switch: ZSP- S B Small diameter nozzle/ø0.3 to ø.2 Filter case Caution dsorption confirmation switch dsorption nozzle ø0.3 to ø.2 Chip parts (mm 2 ) With suction filter Improved wiring: connector type Uses a carrier diffusion semiconductor pressure sensor. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water-soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. Other caution Caution It might not be possible to successfully pick a workpiece if a picking nozzle or a picking pad that is out of the applicable range is used. dsorption Confirmation Switch Specifications pplicable dsorption Nozzle Pneumatic Circuit and Principle Vacuum source Unit no. Fluid Operating pressure range pplicable adsorption nozzle dia. Hysteresis Internal orifice Mass Voltage Output Indicator light Current consumption Operating temperature range Port size How to Order Pressure sensor Circuit and Wiring dsorption nozzle (ø0.3 to ø.2) ZSP-S ZSP-B ir 20 kpa to kpa 0.3 to 0.7 mm (Refer to Graph ().) 0.5 to.2 mm (Refer to Graph (2).) 0.5 kpa ø0.5 ø0. 62 g 2 to 24 VDC (Ripple ±% or less) NPN Open collector 30 V 0 m Light at ON state 7 m (24 VDC, at ON state) 0 to 60 C (No condensation) M5 x 0., M6 x (Option) Note) If not operated within the specified range of pressure and temperature, trouble may result. Graph ()/ZSP-S Supply pressure (kpa) Wiring is the same as ZSE2. pplicable nozzle range Nozzle diameter (mm) ZSP Model Symbol pplicable model S pplicable nozzle dia. 0.3 to 0.7 mm B pplicable nozzle dia. 0.5 to.2 mm S 0X 5, V port size Y Supply pressure and nozzle diameter are expressed in the graphs below. Graph (2)/ZSP-B Supply pressure (kpa) M5 x 0. M6 x (Option) pplicable nozzle range Nozzle diameter (mm) Comprised of a pneumatically operated bridge circuit, this function puts the S4 picking nozzle into the non-picking state, and uses the S2 adjustment needle to balance (P P2) the pressure that is applied to the pressure sensor. The small pressure difference (P2 P) that is created when a part is picked by the (S4) picking nozzle and is detected by the pressure sensor. Piping specifications L C CL Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment The filter mounted on the product is a simplified one. When used in an environment with a lot of dust, the filter on the unit is likely to be clogged quickly. Use with the ZF, ZFB and ZFC series is recommended. Main circuit of switch Brown lead wire Connected to positive COM for main circuit. Output Black lead wire Load is connected. (PLC or relay) Blue lead wire Connected to power source GND terminal. 79

18 Series ZX Vacuum Pressure Switch Unit/dsorption Confirmation Switch: ZSP- S B Hysteresis Hysteresis is the difference in pressure when the output signal is ON and. The pressure to be set is the ON pressure. High vacuum Set pressure tmospheric pressure 0 Hysteresis How to Set dsorption Confirmation Needle. pply a vacuum and current. Turn the clockwise until it stops, thus fully closing the needle valve. 2. Without attaching a workpiece to the picking nozzle, turn the counterclockwise and verify the position in which the indicator light turns ON. 3. From the state described in step 2, turn back the clockwise /4 turn to full turn. Right djusting needle fully closed Left Indicator light: ON /4 to rotation Right Indicator light: 4. Pick a workpiece with the nozzle and readjust the so that the indicator light turns ON when the nozzle has picked the workpiece successfully. djusting needle Indicator light dsorption Confirmation Switch: ZSP- 0X -5 Connector: ZSP- 0X -5 (Release to atmospheric pressure) Pressure sensor djusting needle djusting needle Circuit diagram Lead wire length Connector Lead wire length Vacuum pressure SUP port () dapter 2 x ø3.3 Note) Remove the adapter when mounted on the ejector. 2 x ø3.3 0

19 Vacuum Module: Ejector System Series ZX Without Valve Unit Ejector exhaust Filter Configuration and combination Ejector unit Model ZX ir pressure SUP port (P) Release pressure SUP port () Plug () P + Vacuum switch (ZSE2) ZX -E - O+ Vacuum switch (ZSE2) dsorption confirmation switch (ZSP) Filter unit (F) E P F D 6 Pressure setting trimmer 2 x R. Vacuum switch (ZSE2) Note ) Remove the plug at external release. dsorption confirmation switch (ZSP) ZX -P ø3.6 djusting needle (62) Ejector + Silencer x R. 4 5 Bracket (Standard accessory) ZX-OB dsorption confirmation switch (ZSP) Filter 2 x R ir pressure SUP port () Filter 6.5 Spacer (ZX-S) (For side mounting) ø x ø3.3 Vacuum switch unit Ejector unit Rc / EXH port (EXH.) 4.2 Port exhaust V Bracket (ZX-OB) (Standard accessory) Note 2) Dimensions : For mounting bracket : For mounting spacer. Filter unit (F) ZX -F Ejector + Silencer 2 x R ø Filter 2 x R3.5 (Mounting hole) 5.5 Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) dsorption confirmation switch (P) Pressure sensor Filter unit (F) Bracket (Standard accessory) (Release to atmospheric pressure) 4 62 Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment

20 Series ZX Valve Unit: Type K Ejector exhaust Vacuum switch (ZSE2) Configuration and combination Vacuum switch (ZSE3) Ejector unit + Valve unit (K) + dsorption confirmation switch (ZSP) Filter unit (F) Without switch and filter Model ZX K E D P F Pilot pressure EXH port () ir pressure SUP port () Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) (D) Vacuum switch (ZSE2) ZX -K -E Port exhaust Rc / EXH port (EXH.) Manual override (Non-locking) Spacer (ZX-S) (For side mounting) dsorption confirmation switch (P) Pressure sensor (Release to atmospheric pressure) Filter unit (F) 4.6 : Release flow rate with lock nut 9.3 Ejector + Silencer 2 x R ø3.6 Without switch and filter Pilot valve for supply VJ4 Release valve VJ4 (Needle fully open) Vacuum switch ZSE2 Interface plate VJ4 VJ4 ( ) Release flow rate (6.6) V Pilot pressure EXH port () M ir pressure SUP port () 2 x ø Bracket (ZX-OB) (Standard accessory) 2 Note) Dimensions : For mounting bracket : For mounting spacer.

21 Vacuum Module: Ejector System Series ZX Vacuum switch (ZSE3) ZX -K -D dsorption confirmation switch (ZSP) ZX -K -P : Release flow rate adjusting needle with lock nut (Needle fully open) Pilot valve for supply Interface plate Pilot pressure EXH port () Manual override (Non-locking) Release flow rate ir pressure supply port () Exhaust port Filter unit ZX -K -F 2 x R. (Mounting hole) 9 UP button RESET button SET button DOWN button 2 x R. Pitch = ø Spacer (ZX-S) (For side mounting) ø3.6 2 x ø3.3 M2.5 x 63 Bracket (Standard accessory) ZX-OB Without switch and filter ZX -K djustment needle Bracket B (Standard accessory) ZX-OBB 2 x ø3.6 (Mounting hole) 2 x R Spacer : ZX-S This is inserted between a wall and a switch when the switch is mounted on the wall. ø dsorption confirmation switch 2 x R. 2 x ø3.3 (mounting hole) Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment Filter 70 Bracket (Standard accessory) ZX-OB 2 x ø3.5 (Mounting hole) 2 x ø3 (Mounting hole)

22 Series ZX Ejector exhaust Valve Unit: Type K3 Vacuum switch (ZSE2) Configuration and combination Vacuum switch (ZSE3) Ejector unit + Valve unit (K3) + dsorption confirmation switch (ZSP) Filter unit (F) Without switch and filter Model ZX K3 E P F D Pilot pressure EXH port () ir pressure SUP port () Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) (D) Vacuum switch (ZSE2) ZX -K3 -E dsorption confirmation switch (P) (Release to atmospheric pressure) Spacer (ZX-S) (For side mounting) Pressure sensor Port exhaust Rc / EXH port (EXH.) Filter unit (F) SMC SMC 2.6 SMC SMC : Release flow rate adjusting needle with lock nut 2 x R. (Mounting hole) ø3.6 (Mounting hole) Without switch and filter Pilot valve for supply (N.O.) VJ324M (Needle fully open) VJ34 Interface plate Vacuum switch ZSE SMC SMC 3( ) Release flow rate V.2 (2.5) Pilot pressure EXH port () M ir pressure SUP port () x ø3.3 (Mounting holes) 4.2 Bracket (ZX-OB) (Standard accessory) 4 Note) Dimensions : For mounting bracket : For mounting spacer. 4

23 Vacuum Module: Ejector System Series ZX dsorption confirmation switch (ZSP) ZX -K3 -P Spacer : ZX-S : Release flow rate with lock nut (Needle fully open) Filter unit (F) ZX -K3 -F djusting needle 2 x R. 9 2 x R ø ø dsorption confirmation switch 2 x ø Bracket (Standard accessory) Without switch and filter ZX -K3 9.2 Bracket B (Standard accessory) ZX-OBB 7 2 x R x ø3.6 Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment Filter unit x ø3.5 2 x ø

24 Series ZX Valve Unit: Type K6 Vacuum switch (ZSE2) Configuration and combination Vacuum switch (ZSE3) Ejector unit + Valve unit (K6) + dsorption confirmation switch (ZSP) Filter unit (F) Without switch and filter Model ZX K6 E P F D External release port Pilot port Pilot pressure EXH port () External release air supply Pilot air supply ir pressure SUP port () Ejector exhaust Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) (D) Vacuum switch (ZSE2) ZX - K6-E dsorption confirmation switch (P) (Release to atmospheric pressure) Pressure sensor Port exhaust Rc / EXH port (EXH.) M5 Pilot port Spacer (ZX-S) (For side mounting) Filter unit (F) M5 External release port Without switch and filter 4.6 Ejector + Silencer : Release flow rate with lock nut 2 x R. (Mounting hole) 9 ø Supply valve ir operated (ZX) External release (ZX) (Needle fully open) Vacuum switch ZSE2 Interface plate 2 5. Pilot pressure EXH port () M3 ( ) Release flow rate ir pressure SUP port () x ø3.3 (Mounting hole) Bracket (ZX-OB) (Standard accessory) V.2 (63.5) Note) Dimensions : For mounting bracket B : For mounting spacer 2. 6

25 Vacuum Module: Ejector System Series ZX dsorption confirmation switch (ZSP) ZX -K6-P Spacer : ZX-S djusting needle x R. ø3.6 Z ZX ZR ZM : Release flow rate with lock nut 2 x R. 9 ø ZM ZQ (Needle fully open) dsorption confirmation switch ZH ZU ZL Filter unit (F) ZX- -K6-F Spacer (ZX-S) (For side mounting) 2 x ø3.3 Bracket (Standard accessory) ZX-OB Without switch and filter ZX -K (63.5) ZY ZF ZP SP ZCUK MJ MV EP 4 5 Bracket B (Standard accessory) ZX-OBB 20 2 x ø3.6 HEP Related Equipment 2 x R. ø Filter unit 35.4 Bracket (Standard accessory) ZX-OB 2 x ø3.5 (Mounting hole) (Mounting 2 x ø3 hole) 5.4 7

26 Series ZX Valve Unit: Type K Vacuum switch (ZSE2) Configuration and combination Vacuum switch (ZSE3) Ejector unit + Valve unit (K) + dsorption confirmation switch (ZSR) Filter unit (F) Without switch and filter Model ZX K E P F D Pilot port Pilot port ir supply for supply valve pilot ir supply for release valve pilot Pilot pressure EXH port () ir pressure SUP port () Ejector exhaust Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) (D) Vacuum switch (ZSE2) ZX -K-E dsorption confirmation switch (P) (Release to atmospheric pressure) Port exhaust M3 x 0.5 (Supply valve pilot port) Rc / EXH port (EXH.) Pressure setting trimmer 29.2 Spacer (ZX-S) (For side mounting) Pressure sensor Filter unit (F) M3 x 0.5 ( pilot port) Ejector + Silencer 2 x R. ø Without switch and filter : Release flow rate with lock nut Supply valve N.O (ir operated VJ324) (ir operated VJ34) Manual override (Non-locking) Interface plate (Needle fully open) Vacuum switch ZSE Pilot pressure EXH port () M3 3( ) Release flow rate 56.5 ir pressure SUP port () 2 x ø3.3 (Mounting hole) Bracket (ZX-OB) (Standard accessory) V Note) Dimensions : For mounting bracket : For mounting spacer.

27 Vacuum Module: Ejector System Series ZX dsorption confirmation switch (ZSP) ZX -K-P : Release flow rate with lock nut (Needle fully open) Filter unit (F) ZX -K-F 2 x R djusting needle 5 2 x R. 9 ø Filter ø3.6 (Mounting hole) Without switch and filter ZX -K 4 4 dsorption confirmation switch ZSP 2 x ø Bracket (Standard accessory) ZX-OB.5 20 Bracket B (Standard accessory) ZX-OBB 2 x ø3.6 Spacer : ZX-S 4 2 x R. Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment M5 (M6) Bracket (Standard accessory) ZX-OB 2 x ø3.5 (Mounting hole) 2 x ø3 (Mounting hole) 5.4 9

28 Series ZX Valve Unit: Type J Vacuum switch (ZSE2) Configuration and combination Vacuum switch (ZSE3) Ejector unit + Valve unit (J) + dsorption confirmation switch (ZSP) Filter unit (F) Without switch and filter Model ZX J E P F D Pilot pressure EXH port () Ejector exhaust ir pressure SUP port () Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) (D) Vacuum switch (ZSE2) ZX -J -E dsorption confirmation switch (P) Port exhaust Rc / EXH port (EXH.) Manual override (Non-locking) Spacer (ZX-S) (For side mounting) Pressure sensor Filter unit (F) (Release to atmospheric pressure) Ejector + Silencer : Release flow rate with lock nut 2 x R. ø Without switch and filter Pilot valve for supply VJ4 (Needle fully open) Vacuum switch ZSE2 Interface plate ( ) Release flow rate (6.6) 2 5. Pilot pressure EXH port () M ir pressure SUP port () 2 x ø Bracket (ZX-OB) (Standard accessory) V Note) Dimensions : For mounting bracket : For mounting spacer. 90

29 Vacuum Module: Ejector System Series ZX dsorption confirmation switch (ZSP) ZX -J -P Spacer : ZX-S djusting needle 2 x R. Z ZX ZR : Release flow rate with lock nut (Needle fully open) 2 x R. ø dsorption confirmation switch ZM ZM ZQ ZH ZU ZL ZY ZF ZP Filter unit (F) ZX -J -F 2 x ø3.3 Without switch and filter ZX -J SP ZCUK MJ MV EP HEP 2 x R. 9 ø3.6 (Mounting. hole) 4. Bracket B (Standard accessory) ZX-OBB 2 x ø3.6 Related Equipment Filter unit x ø3.5 (Mounting hole) 2 x ø3 (Mounting hole) 5.4 9

30 Series ZX Ejector exhaust Valve Unit: Type J2 Vacuum switch (ZSE2) Configuration and combination Vacuum switch (ZSE3) Ejector unit + Valve unit (J2) + dsorption confirmation switch (ZSP) Filter unit (F) Without switch and filter Model ZX J2 E P F D Pilot pressure EXH port () ir pressure SUP port () Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) (D) Vacuum switch (ZSE2) ZX -J2 -E dsorption confirmation switch (P) Port exhaust Rc / EXH port (EXH.) Pressure setting trimmer 29.2 Spacer (ZX-S) (For side mounting) Pressure sensor Filter unit (F) (Release to atmospheric pressure) SMC Pilot valve for supply (N.O.) VJ324M 4.6 : Release flow rate with lock nut SMC Manual override (Push and turn the locking type override) Ejector + Silencer 2 x R ø Without switch and filter (Needle fully open) + - Manual override Vacuum switch ZSE Pilot pressure EXH port () M3 ( SMC ) Interface plate Release flow rate 7.5 ir pressure SUP port () 6 2 x ø3.3 (Mounting holes) Bracket (ZX-OB) (Standard accessory) V.2 (2.5) 4 Note) Dimensions : For mounting bracket : For mounting spacer. 92

31 Vacuum Module: Ejector System Series ZX dsorption confirmation switch (ZSP) ZX -J2 -P : Release flow rate with lock nut (Needle fully open) Filter unit (F) ZX -J2 -F djusting needle 2 x R x R. ø Spacer (ZX-S) (For side mounting) Without switch and filter ZX -J ø x ø Bracket (Standard accessory) ZX-OB Bracket B (Standard accessory) ZX-OBB x ø3.6 Spacer : ZX-S 2 x R. Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment Filter x ø3.5 (Mounting hole) 2 x ø

32 Series ZX Ejector System/Manifold Specifications Specifications Max. number of units Port Supply port [] size Exhaust port [EXH] Mass Max. units (Rc, NPT, G) (Rc, NPT, G) station: 73 g (50 g per additional station) Note ) port: Blank Note 2) Exhaust air from both sides for 4 or more stations of ZX3 manifold. ir Supply Supply port location L (Left) R (Right) B (Both sides) Manifold Port Left side Right side : Supply : Plugged (EXH port is released to atmospheric pressure.) Note) Blank plugs are attached to all ports of each valve unit. <Manifold base> How to Order Manifold <Individual spacer> ZZX 06 R Stations Supply port location ) ZX R Thread of supply and exhaust port Rc F G Note) T NPTF Note) G thread The thread ridge shape is compatible with the G thread standard (JIS B0203), but other shapes are not conforming to ISO6030 and ISO79. R L B (Ordering example) ZZX6-R pc. (Manifold base) ZX-K5LZ-EC(-Q) 5 pcs. (Vacuum single unit) ZX-BM pc. (Blank plate) First station from the valve side Caution when ordering manifold Right side ( port on the right side) Left side ( port on the left side) Both sides ( port on both sides) Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 2 EXH ports are released to atmospheric pressure in both sides. Plugs are always attached to ports and all ports of the valve unit. The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted. When it is not added, the manifold base and ejector are shipped separately. Specify the individual spacer when separating the supply and exhaust ports of the manifold ejector. Individual spacer R R6 Refer to the individual spacer. No. ZX-R R2 R3 R4 R5 R6 R7 R R R2 R3 R4 R5 R6 R7 R (Ordering example) If installed on station and station 3: ZZX6-R pc. ZX-K5LZ-EL(-Q) 6 pcs. ZX-R- ZX-R-3 ZX-R6 (Dummy spacer) 4 pcs. Symbol rrangement (First station from the right end of the valve side is station.) When spacers are mounted alternately, specify them together. When retrofitting, 3 pcs. of M2.5 x 32 (for ZX) are necessary. dummy spacer (ZX-R6) must be mounted on the stations on which individual spacers are not mounted. No. ZX-R 9 R R R2 R3 R4 R5 R6 ll stations Station only Station only bout individual spacers Manifold supply or valve unit supply can be selectable for each port. In the table below, ports with the symbol mean that they are manifold supply, while others are individual supply from the valve unit. Symbols in the table below are printed on the surface of individual spacers. R 9 R R R2 R3 R4 R5 R6 Symbol 94

33 Vacuum Module: Ejector System Series ZX Manifold/System Circuit Example When not using individual spacer When using individual spacer (When using ZX-R) Left : ir pressure SUP port : Pilot pressure SUP port : Release pressure SUP port : Pilot pressure EXH port EXH: Common EXH port <System circuit example> Right Common exhaust Common air supply Left Dummy spacer ZX-R6 side Pilot exhaust Individual air supply <System circuit example> Dummy spacer ZX-R6 Right Individual spacer ZX-R side Dummy spacer ZX-R6 Individual spacer ZX-R Common exhaust Common air supply Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment Individual spacer ZX-R 95

34 SMC SMC Series ZX Ejector System Manifold Common EXH port (EXH.) Common air pressure SUP port () End plate Manifold base Manual override (Push and turn the locking type override.) ø4 x 5.5 (Mounting holes) Exhaust adapter Rc / djusting needle dsorption confirmation switch ZSP : Release flow rate with lock nut (Needle fully open) Manual override (Simply turn the locking type override.) Body (ir operated type) (ZX) M5 x 0. (Pilot port) M5 x 0. (External release port) dapter D Individual spacer ZX-R L3 L2 L SMC SMC Pitch = 2 Pressure setting trimmer Vacuum switch ZSE2 Filter dapter B Silencer + Ejector (VJ34) (Normally closed) Pilot valve for supply (VJ324M) (Normally open) Manual override (Simply turn the locking type override.) Pilot valve for supply (VJ4) (Normally closed) (VJ4) (Normally closed) Release flow rate Release pressure supply port () M5 B 50. 3( ) ( ) ( ) EXH Pitch = 2 Individual air pressure supply port () Common EXH port (EXH.) / (Rc, NPTF, G) Common air pressure SUP port () / (Rc, NPTF, G) The common exhaust port (EXH.) is also used as the pilot pressure exhaust () port of pilot valve. Use while the port is open to the atmosphere. Symbol Stations L 33 L2 45 L (mm)

35 SMC SMC Vacuum Module: Ejector System Series ZX (In the case of individual spacer) System circuit example Individual spacer ZX-R Dummy spacer ZX-R6 Dummy spacer ZX-R6 Individual spacer ZX-R B cross section SMC SMC R6 R6 R R 33. (Standard) Pressure sensor (Option) (In the case of individual spacer) Individual spacer R Individual air supply port Dummy spacer R6 Pressure sensor Z ZX ZR ZM ZM ZQ ZH 39.9 ZU Pilot pressure EXH port () M3 cross section +- 3( +- ) ( ) ( ) External release port Pilot port Individual spacer R Dummy spacer R6 External release port Pilot port Individual spacer R ZL ZY ZF ZP SP Pitch = Individual air supply port dapter D Individual air supply port dapter D ZCUK MJ MV EP HEP Related Equipment V.7 79 Vacuum Port (V) Vacuum Port (V) V V V Pitch 4.2 = Vacuum Port (V) 97

36 Series ZX Ejector System Manifold: Type K Common EXH port (EXH.) Common air pressure SUP port () x ø : Release flow rate with lock nut (Needle fully open) Pitch = Pitch = 2 L L2 L3 Manifold base Pilot valve for supply VJ4 VJ4 Lead wire length 300 End plate (44) 6 Pressure setting trimmer Ejector + Silencer Vacuum switch ZSE2 Filter unit Release flow rate ( ) ( ) EXH Pitch = Common EXH port (EXH.) / (Rc, NPTF, G) Common air pressure SUP port () / (Rc, NPTF, G) The common exhaust port (EXH.) is also used as the pilot pressure exhaust () port of pilot valve. Use while the port is open to the atmosphere. Symbol Stations L 33 L2 45 L (mm)

37 Vacuum Module: Ejector System Series ZX.7 Circuit diagram Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment V V

38 Series ZX Ejector System Manifold: Type K3 Common EXH port (EXH.) Common air pressure SUP port ().6 Manual override (Push and turn the locking type override.) x ø : Release flow rate with lock nut (Needle fully open) 2.6 SMC SMC SMC SMC 4 20 Pitch = 2 L L2 L3 Manifold base Pilot valve for supply (N.O.) VJ324M End plate (44) 6 Pressure setting trimmer Ejector + Silencer 7.5 Manual override VJ34 Lead wire length 300 Vacuum switch ZSE2 Filter unit Release flow rate SMC SMC SMC SMC 50. 3( ) 3( ) EXH Pitch = Common EXH port (EXH.) / (Rc, NPTF, G) Common air pressure SUP port () / (Rc, NPTF, G) The common exhaust port (EXH.) is also used as the pilot pressure exhaust () port of pilot valve. Use while the port is open to the atmosphere. Symbol Stations L 33 L2 45 L (mm)

39 Vacuum Module: Ejector System Series ZX Circuit diagram Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP.7 Related Equipment V V

40 Vacuum Module: Vacuum Pump System Series ZX How to Order [Option] Valve unit N.C. type Components Vacuum switch unit ZX0 Combination of supply valve and release valve K Pilot valve Solenoid valve rated voltage Electrical entry Light/Surge voltage suppressor Manual operation 5 L Z E C Vacuum switch unit Filter unit Vacuum switch Electrical entry /V port size Release flow rate L Valve unit N.O. type Valve unit N.C. type Vacuum switch unit Filter unit ZX0 ZX0 K3 K 5 L Z E C 5 L Z F CE compliant Q CE marked Valve unit/combination of supply valve and release valve Refer to Table () on page 903. Pilot valve Caution When using the C type, the DC solenoids are operated via a rectifier. Therefore, when using this type, make sure to combine the connector assembly equipped with a rectifier with the exclusive solenoids. Using other combinations could lead to burned coils or other types of malfunctions. L LN LO M MN MO G H Plug connector type Grommet type The filter mounted on the product is a simplified one. When used in an environment with a lot of dust, the filter is likely to be clogged quickly. The use with the series ZF, ZFB and ZFC is recommended. 902 Y DC: W (With indicator light:.05 W) C DC: 0.45 W (With indicator light: 0.5 W) Only 24 VDC and 2 VDC are applicable to 0.45 W. Solenoid valve rated voltage Note) 3 Note) 5 6 V S R 0 VC 50/60 Hz VC 50/60 Hz 24 VDC 2 VDC 6 VDC 5 VDC 3 VDC ir operated (K6, K, J3, J4, D3, D4) Note) CE marked products are not available for and 3. pplicable to plug connector only. (Connector assembly with rectifier is attached.) Electrical entry Lead wire length 0.3 m Without lead wire (pplicable to DC only) Without connector Lead wire length 0.3 m Without lead wire (pplicable to DC only) Without connector Lead wire length 0.3 m (pplicable to DC only) Lead wire length 0.6 m (pplicable to DC only) ir operated Note) In the case of K (combination of supply and release valves), M type plug connector can not be used. Refer to Table (2) on page 903 for part number of lead wire with connector. Refer to page 96 for ordering the manifold. Refer to pages 926 and 927 for ordering a unit for replacement. Caution Manual operation Surge voltage suppressor Red Light/Surge voltage suppressor /V port size Light/Surge voltage suppressor None Z S Black Diode B L C CL CN E E55 Note) PB Note) F M5 x 0. M6 x (Option) Vacuum digital pressure switch unit (ZSE3) D Y Vacuum switch electrical entry Grommet type Connector type Release flow rate L Lead wire length 0.6 m Lead wire length 3 m Lead wire length 0.6 m Lead wire length 3 m Without connector (Without lead wire) Without lock nut With lock nut Refer to Table (3) on page 903 for part number of lead wire with connector. Vacuum switch unit/filter unit Vacuum switch (For general purpose)(zse2)(npn) Vacuum switch (For general purpose)(zse2)(pnp) dsorption Nozzle dia. (ø0.3 to 0.7) confirmation switch (ZSP) Nozzle dia. (ø0.5 to.2) With suction filter Only suction filter Note) CE marked products are not available for and PB. 2 outputs/without analog output 2 outputs/with analog output output (with trouble detection)/without analog output output (with trouble detection)/with analog output Note) nalog output is available on grommet type only. Non-locking push type Locking slotted type With light/surge voltage suppressor With surge voltage suppressor Coil Coil S is not available for C. DC voltage (with surge voltage suppressor) If the polarity is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged. Using the DC type: Match the polarity of the connectors according to the + and marks on the connectors. Do not interchange the polarities to prevent the diodes or the switching elements from becoming burned. If lead wires are pre-connected, the red wire is + and the black wire is. Using the C type: The C type is not equipped with a surge voltage suppressor because the rectifier assembly prevents the generation of surge voltage.

41 Vacuum Module: Vacuum Pump System Series ZX Table () Valve Unit/Combination of Supply Valve and Release Valve Supply valve Solenoid (N.C.) Solenoid (N.O.) ir operated (N.C.) ir operated (N.O.) Components Solenoid (N.C.) Solenoid (N.C.) External release ir operated (N.C.) Symbol K K3 K6 K Supply valve Solenoid valve ir operated N.C. N.O. N.C. N.O. (VJ4) (VJ324) (ZX) (VJ324) Table (2) Valve Unit/Valve Plug Connector ssembly Connector assemby part no. (For DC) VJ (For 0 VC) VJ VJ (For VC) 36 3 Lead wire length 0.3 m (Standard) 0.6 m m.5 m 2 m 2.5 m 3 m Model ZX0-K5LZ-F ZX0-K5LZ-EC ZX0-K35MZ-EC 6 6 How to order If ordering vacuum module with 600 mm or the longer lead wire, specify both vacuum module and connector assemby part numbers. (Ordering example) ZX0-K5LOZ-EC(-Q) pc. VJ pcs. N.C. (VJ4) N.C. (VJ4) N.O. (VJ324M) The asterisk ( ) denotes the symbol for assembly. Combination N.C. (VJ4) N.C. (VJ4) N.C. (VJ34) 24 VDC None Solenoid valve ir operated External release N.C. N.C. N.C. ZX (VJ4) (VJ34) (VJ34) Without valve module ZS ZS (Refer to page 904 for details specifications.) Suction filter (ZX-F) Vacuum switch (ZSE2) None Mass (g) Table (3) Vacuum Switch/Plug Connector ssembly For ZSE2 For ZSP For ZSE3 Ejector System/Recommended Model (The models below are for express delivery.) Supply valve (Pilot valve) The above models are for express delivery. (Direct operated) Solenoid valve rated voltage Lead wire electrical entry Plug connector type Lead wire length Note) If ordering switch with 5 m lead wire, specify both switch and lead wire connector part numbers. 0.6 m 3 m 5 m Ordering example) ZX0-K50Z- ECN(-Q) pc. VJ pcs. ZS pc. The asterisk ( ) denotes the symbol for assembly. Light/Surge voltage suppressor With light/surge voltage supressor Vacuum switch unit /Filter unit Vacuum switch electrical entry Connector type Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment ZX0-K5LZ-E ZX0-K35MZ-E 903

42 Series ZX Vacuum Pump System/Combination of Supply Valve and Release Valve Combination Symbol: K pplication: This combination is used for effecting control in accordance with electric signals. Combination Symbol: K6 pplication: This combination is used for effecting control in accordance with air signals. External release port Pilot port Supply valve How to Operate Valve Condition. Work adsorption 2. Vacuum release 3. Operation stop Supply valve Solenoid valve ON Solenoid valve ON How to Operate Valve Condition. Work adsorption 2. Vacuum release 3. Operation stop Supply valve Solenoid valve ON Solenoid valve ON Combination Symbol: K3 pplication: This combination is used for effecting control in accordance with electric signals. Because the supply valve is N.O., the pressure that is supplied to the ejector is not interrupted during a power outage; as a result, the state of suction can be maintained. This combination is used for preventing the workpieces from dropping during power outages. Combination Symbol: K pplication: This combination is used for effecting control in accordance with air signals. Because the supply valve is N.O., the pressure that is supplied to the ejector is not interrupted during a power outage; as a result, the state of suction can be maintained. This type is used for preventing the workpieces from dropping during power outages. Pilot port Supply valve Pilot port Supply valve How to Operate Valve Condition. Work adsorption 2. Vacuum release 3. Operation stop Supply valve Solenoid valve ON ON Solenoid valve ON How to Operate Valve Condition. Work adsorption 2. Vacuum release 3. Operation stop Supply valve ir operated valve ON ON ir operated valve ON 904

43 Vacuum Module: Vacuum Pump System Series ZX Vacuum Pump System/Construction Component Parts No Table () How to Order Pilot Valves No Note) ZX Description Poppet valve assembly Release flow rate Manifold base Vacuum switch Valve unit Interface plate Return spring Filter case Component equipment Supply valve Solenoid valve Solenoid valve N.C. (VJ4) N.C. (VJ4) Solenoid valve Solenoid valve N.O. (VJ324) N.C. (VJ34) ir operated ir operated N.O. (VJ324) N.C. (VJ34) Solenoid valve ir operated ir operated Solenoid valve M3 Port size M3 M5 M3 x 0.5 M5 x 0. Model Table (3) How to Order ir Operated Valves Caution Material Stainless steel luminum Stainless steel Polycarbonate ZX-VJ4- ZX-VJ ZX-VJ3 24 Note ZX--0 ZSE2, ZSP, ZSE3 ZX-VB -D- ()/( ) Combination of supply and release valve K, J K3, J2 Turning the vacuum release flow volume clockwise reduces the vacuum release flow volume; the needle valve is fully closed when the needle stops turning. Turning the needle 2 full turns counterclockwise from the fully closed position renders the needle valve fully open. The needle will fall out if it is turned more than 4 full turns. In order to prevent the needle from loosening and falling out, a special product is also available. K6 No. 2 and 3 models only are applicable. Indicate each part number. Pilot port/external release port Replacement Parts No. Description Material Part no. 9 Pilot valve Refer to Table (2), (3). Filter element F ZX-FE Gasket ZX-FG Table (2) How to Order Solenoid Valves ZX-VJ4-5 ZX-VJ Type of actuation 2! Note) Caution when handling filter case. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. N.C. (Normally closed) N.O. (Normally open) Body option Pilot valve Individual exhaust M Common exhaust for main and pilot valves Rated voltage Note) In the case of N.C. 0 VC type, indicate no 3 symbol. (Individual VC exhaust for Pilot 5 24 VDC valve) 6 2 VDC V 6 VDC Note) Compatible with S 5 VDC ZX-VJ324M- and ZX-VJ34- only. R 3 VDC Pilot valve pplicable to plug connector DC: W (With indicator light:.05 W) C DC: 0.45 W Y (With indicator light: 0.5 W) L L 24 VDC and 2 VDC are applicable to 0.45 W. Note) Screw length of VJ0 and VJ300 for series ZX is different from that of the standard model. <Screw length> VJ0 M.7 x 5 VJ300 M.7 x 22 Z Z Manual override B Non-locking push type Locking slotted type Light/Surge voltage suppressor Without light/surge voltage suppressor S With surge voltage suppressor Z With light/surge voltage suppressor Electrical entry L Connector (0.3 m) LN Connector (W/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (W/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) Note) In the case of ZX- VJ4, M, MN and MO cannot be used. Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment 905

44 Series ZX Valve Unit: ZX-VB Refer to page 72 for details. Model/Specifications Unit no. Components Operation Cv factor Operating pressure range Max. operating frequency Operating temperature range Interface plate symbol Standard accessory ZX-VB - Supply valve Pilot type Direct operated type Solenoid valve ir operated Solenoid valve External ir N.C. (VJ4) N.O. (VJ324) N.C. (ZX) N.O. (VJ324) N.C. (VJ4) N.C. (VJ34) release (ZX) operated (VJ34) to 0.6 MPa 5 Hz 5 to 50 C () ( ) Bracket B (ZX-OBB) Pilot pressure EXH port () Pilot pressure SUP port () Vacuum pressure SUP port () K (Normally closed) Pilot pressure EXH port () Pilot pressure SUP port () Vacuum pressure SUP port () K3 (Normally open) : Release flow rate with lock nut (Needle fully open) Pilot valve for supply Pilot pressure EXH port () M3 Pilot pressure SUP port () M3 Manual override (Non-locking) Bracket B (Standard accessory) ZX-OBB Release flow rate Interface plate Vacuum pressure SUP port () x ø x ø Pilot valve for supply (N.O.) Pilot pressure EXH port () M3 Pilot pressure SUP port () M3 79. Manual override (Push and turn Bracket B the locking type (Standard override.) accessory) ZX-OBB Release valve Manual override Release flow rate Interface plate 2 x ø3 Vacuum pressure supply port () x ø Note) Dimensions : For mounting bracket B : For mounting spacer 906

45 Vacuum Module: Vacuum Pump System Series ZX Suction Filter Unit: ZX-F Refer to page 74 for details. Unit no. Operating pressure range Operating temperature range Filtration efficiency Filter media Mass Standard accessory ZX-F Vacuum to 0.5 MPa 5 to 50 C 30 µm F 35 g Bracket (ZX-OB) Vacuum Pressure Switch Unit/ZSE2, ZSE3, ZSP Refer to pages 75 to 0 for details. Vacuum Pressure Switch High speed response/ ms Uses a carrier diffusion semiconductor pressure sensor dsorption Confirmation Switch Suitable for small size adsorption nozzle/ø0.3 to ø.2 With suction filter Improved wiring: connector type Uses a carrier diffusion semiconductor pressure sensor Specifications Note) If not operated within the specified range of pressure and temperature, trouble may be caused. Vacuum Pressure Switch Specifications Unit no. ZSE2-0X ZSE3-0X ir 0 to kpa 3% Full span or less ±% Full span or less ±3% Full span or less 2 to 24 VDC (Ripple ±% or less) M5 x 0., M6 x (Option) dsorption Confirmation Switch Specifications Unit no. Fluid Operating pressure range pplicable adsorption nozzle dia. Hysteresis Internal orifice Filter case Fluid Set pressure range Hysteresis Repeatability Temperature characteristics Voltage Port size Caution Refer to Best Pneumatics Vol.6 for details. Note) If not operated within the specified range of pressure and temperature, trouble may be caused.. The case is made of polycarbonate. Therefore, do not use it with or expose it to the following chemicals: paint thinner, carbon tetrachloride, chloroform, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, water-soluble cutting oil (alkalinic), etc. 2. Do not expose it to direct sunlight. ZSP-S ZSP-B ir 20 to kpa 0.3 to 0.7 mm 0.5 to.2 mm 0.5 kpa 0.5 mm 0. mm Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment Other caution Caution It might not be possible to successfully pick a workpiece if a picking nozzle or a picking pad that is out of the applicable range is used. 907

46 Series ZX Valve Unit: Type K Configuration and combination Valve unit (K) + Model ZX0 K Vacuum switch (ZSE2) Vacuum switch (ZSE3) dsorption confirmation switch (ZSP) Filter unit (F) E D P F Pilot pressure EXH port () Pilot pressure SUP port () Vacuum pressure SUP port () Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) (D) Vacuum switch (ZSE2) ZX0-K -E : Release flow rate with lock nut Manual override (Non-locking) Spacer (ZX-S) (For side mounting) dsorption confirmation switch (P) Pressure sensor Filter unit (F) (Release to atmospheric pressure) (Needle fully open) 9.3 Pressure setting trimmer 2 x R. ø Pilot valve for supply VJ4 VJ4 Vacuum switch ZSE2 Interface plate 2 5. VJ4 VJ4 () ( ) Release flow rate Pilot pressure SUP port () M V (6.6) Pilot pressure EXH port () M Vacuum pressure SUP port () 2 x ø3.3 (Mounting hole) Bracket (ZX-OB) (Standard accessory) Note) Dimensions : For mounting bracket : For mounting spacer. 90

47 Vacuum Module: Vacuum Pump System Series ZX Vacuum switch (ZSE3) ZX0-K -D dsorption confirmation switch (ZSP) ZX0-K -P : Release flow rate with lock nut (Needle fully open) Manual override (Non-locking) DOWN button UP button Spacer (ZX-S) (For side mounting) 4 5 djustment needle Spacer : ZX-S 2 x R. Z ZX ZR Pilot valve for supply VJ4 Interface plate VJ4 Release flow rate Pilot pressure SUP port () RESET button SET button 2 x R. 9 ø x ø3.3 2 x R. 9 ø dsorption confirmation switch ZSP ZM ZM ZQ ZH ZU ZL Pilot pressure EXH port () Vacuum pressure SUP port () Pitch = Bracket (Standard accessory) ZX-OB M2.5 x 5 Phillips screw 2 x ø3.3 ZY ZF ZP SP ZCUK Filter unit (F) ZX0-K -F MJ MV 2 x R. 4 5 ø EP HEP Related Equipment Filter 2 x ø

48 Series ZX Valve Unit: Type K3 Configuration and combination Valve unit (K3) + Model ZX0 K3 Vacuum switch (ZSE2) Vacuum switch (ZSE3) dsorption confirmation switch (ZSP) Filter unit (F) E P F D Pilot pressure EXH port () Pilot pressure SUP port () Vacuum pressure SUP port () Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) (D) Vacuum switch (ZSE2) ZX0-K3 -E : Release flow rate with lock nut Spacer (ZX-S) (For side mounting) dsorption confirmation switch (P) Pressure sensor (Release to atmospheric pressure) Filter unit (F) (Needle fully open) 2.6 SMC SMC Pilot valve for supply (N.O.) VJ324M Manual override (Push and turn the locking type override.) VJ34 Pressure setting trimmer 2 x R ø3.6 (Mounting hole) Interface plate Vacuum switch ZSE SMC SMC 3() ( ) Release flow rate Pilot pressure SUP port () M V.2 (2.5) Pilot pressure EXH port () M Vacuum pressure supply port () x ø3.3 (Mounting hole) Bracket (ZX-OB) (Standard accessory) Note) Dimensions : For mounting bracket : For mounting spacer. 9

49 Vacuum Module: Vacuum Pump System Series ZX dsorption confirmation switch (ZSP) ZX0-K3 -P Spacer : ZX-S 5 2 x R. Z ZX : Release flow rate with lock nut (Needle fully open) djustment needle 2 x R ø3.6 dsorption confirmation switch ZSP ø3.6 ZR ZM ZM ZQ ZH ZU ZL ZY ZF 5.5 ZP 2 x ø3.3 Bracket (Standard accessory) ZX-OB 4 SP ZCUK Filter unit (F) ZX0-K3 -F MJ MV 5 EP HEP Related Equipment 2 x R.. 9 ø Filter unit 2 x ø3.5 9

50 Series ZX Pilot air supply External release air supply Valve Unit: Type K6 Configuration and combination Valve unit (K6) + Model ZX0 K6 Vacuum switch (ZSE2) Vacuum switch (ZSE3) dsorption confirmation switch (ZSP) Filter unit (F) E P F D Pilot pressure EXH port () Vacuum pressure SUP port () External release port Pilot port Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) (D) Vacuum switch (ZSE2) ZX0-K6-E dsorption confirmation switch (P) : Release flow rate with lock nut M5 Pilot port Spacer (ZX-S) (For side mounting) Pressure sensor Filter unit (F) (Release to atmospheric pressure) (Needle fully open) M5 External release port Pressure setting trimmer 2 x R ø3.6 Supply valve ir operated (ZX) External release (ZX) Vacuum switch ZSE2 Interface plate () ( ) Release flow rate Pilot pressure SUP port () M V.2 (63.5) Pilot pressure EXH port () M x ø3.3 (Mounting hole) Vacuum pressure SUP port () Bracket (ZX-OB) (Standard accessory) Note) Dimensions : For mounting bracket : For mounting spacer. 92

51 Vacuum Module: Vacuum Pump System Series ZX dsorption confirmation switch (ZSP) ZX0-K6-P djusting needle Spacer : ZX-S x R. Z ZX ZR : Release flow rate with lock nut (Needle fully open) 2 x R. 9 ø dsorption confirmation switch ZSP ZM ZM ZQ ZH ZU 5.5 (63.5) 4 ZL ZY ZF ZP 2 x ø3.3 Bracket (Standard accessory) ZX-OB SP ZCUK Filter unit (F) ZX0-K6-F MJ MV 4 5 EP HEP Related Equipment 2 x R ø3.6 Filter unit 2 x ø3.5 (Mounting hole) 93

52 Series ZX Valve Unit: Type K Configuration and combination Valve unit (K) + Model ZX0 K Vacuum switch (ZSE2) Vacuum switch (ZSE3) dsorption confirmation switch (ZSP) Filter unit (F) E P F D ir supply for supply valve pilot Pilot pressure EXH port () Pilot pressure SUP port () Vacuum pressure SUP port () Pilot port Pilot port ir supply for release valve pilot Circuit diagram (Circuits other than those with vacuum switch are shown as below.) Vacuum switch (E) (D) Vacuum switch (ZSE2) ZX0-K-E dsorption confirmation switch (P) 66.6 (Release to atmospheric pressure) M3 (Pilot port for supply valve) Spacer (ZX-S) (For side mounting) Pressure sensor Filter unit (F) : Release flow rate with lock nut (Needle fully open) M3 (Pilot port for release valve) Pressure setting trimmer 2 x R ø Supply valve N.O. (ir operated VJ324) Manual override (Non-locking) (ir operated VJ34) Release flow rate Vacuum switch (ZSE2) () ( ) Interface plate Pilot pressure SUP port () M V Pilot pressure EXH port () M Vacuum pressure SUP port () x ø3.3 (Mounting hole) Bracket (ZX-OB) (Standard accessory) Note) Dimensions : For mounting bracket : For mounting spacer. 94

53 Vacuum Module: Vacuum Pump System Series ZX dsorption confirmation switch (ZSP) ZX0-K-P 5 Spacer : ZX-S : Release flow rate with lock nut djusting needle 2 x R. ø (Needle fully open) 4 2 x R. Z ZX ø3.6 ZR ZM ZM dsorption confirmation switch ZQ ZH ZU ZL ZY 2 x ø Bracket (Standard accessory) ZX-OB 4 ZF ZP SP ZCUK Filter unit (F) ZX0-K-F MJ MV 5 4 EP HEP 2 x R. 9 ø Related Equipment Filter unit 2 x ø3.5 95

54 Series ZX Vacuum Pump System/Manifold Specifications Specifications Max. number of units Port Supply port [] size Exhaust port [EXH] Mass Max. units (Rc, NPTF, G) (Rc, NPTF, G) station: 73 g (50 g per additional station) Note ) port: Blank Note 2) Vacuum from both sides of port for 6 or more stations of ZX0 external vacuum pump manifold. ir Supply Supply port location L (Left) R (Right) B (Both sides) Manifold Port : Vacuum supply from port : ir supply from port : Plugged Note) ll ports for each valve unit are provided with plugs. Left side Right side How to Order Manifold <Manifold base> ZZX Stations 0 02 F T 0 06 R 2 Thread of supply and exhaust valve Rc G Note) NPTF Note) G thread The thread ridge shape is compatible with the G thread standard (JIS B0203), but other shapes are not conforming to ISO6030 and ISO79. Supply port location Symbol R L B Supply port ir Supply location Vacuum supply ir supply port on port on Right side the right side the right side port on port on Left side the left side the left side port port on Both sides on both sides both sides Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 2 EXH ports are released to atmospheric pressure in both sides. Plugs are always attached to ports and all ports of the valve unit. (Ordering example) ZZX6-R pc. (Manifold base) ZX0-K5LZ-EC(-Q) 5 pcs. (Vacuum single unit) ZX-BM pc. (Blank plate) Caution when ordering manifold The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted. When it is not added, the manifold base and ejector are shipped separately. <Individual spacer> Specify the individual spacer when separating the supply and exhaust ports of the manifold ejector. ZX Individual spacer R R6 Refer to the individual spacer. R (Ordering example) If installed on station and station 3: ZZX6-R pc. ZX0-K5LZ-EC(-Q) 6 pcs. ZX-R- ZX-R-3 ZX-R6 (Dummy spacer) 4 pcs. rrangement (First station from the right end of the valve side is station.) ll stations Station only Station only When spacers are mounted alternately, specify them together. When retrofitting, 3 pcs. of M2.5 x 32 (for ZX) are necessary. dummy spacer (ZX-R6) must be mounted on the stations on which individual spacers are not mounted. bout individual spacers Manifold supply or valve unit supply can be selectable for each port. In the table below, ports with the symbol mean that they are manifold supply, while others are individual supply from the valve unit. Symbols in the table below are printed on the surface of individual spacers. Part no. ZX-R R2 R3 R4 R5 R6 R7 R R R2 R3 R4 R5 R6 R7 R Symbol Part no. ZX-R 9 R R R2 R3 R4 R5 R6 R 9 R R R2 R3 R4 R5 R6 Symbol 96

55 Vacuum Module: Vacuum Pump System Series ZX Manifold/System Circuit Example When not using individual spacer When using individual spacer (When using ZX-R) Left Left Z ZX Right : Vacuum pressure SUP port : Pilot pressure SUP port : Release pressure SUP port : Pilot pressure EXH port EXH: Common EXH port Common exhaust Common air supply for vacuum valve Common vacuum supply Dummy spacer ZX-R6 side Pilot exhaust ir supply for vacuum valve Individual vacuum supply Individual spacer ZX-R side Dummy spacer ZX-R6 Individual spacer ZX-R Right Common exhaust Common air supply for vacuum valve Common vacuum supply ZR ZM ZM ZQ ZH ZU ZL <System circuit example> <System circuit example> Dummy spacer ZX-R6 Individual spacer ZX-R ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment 97

56 SMC SMC Series ZX Vacuum Pump System Manifold Common EXH port (EXH.) Common pilot pressure SUP port () Common vacuum pressure SUP port () End plate Manifold base : Release flow rate with lock nut (Needle fully open) Manual override (Push and turnthe locking type override.) Manual override (Simply turn the locking type override.) L3 L2 L 22.7 SMC SMC x ø5.5 djusting needle dsorption confirmation switch ZSP 20 4 Pitch = 2 Vacuum switch ZSE2 Pressure setting trimmer Body (ir operated type) (ZX) M5 Pilot port M5 External release port dapter D Individual spacer ZX-R 9.3 (44) Filter dapter B VJ34 Pilot valve for supply (N.O.) VJ324M Manual override (Simply turn the locking type override.) Pilot valve for supply (N.C.) VJ4 VJ4 Release flow rate B () ( ) () ( ) () ( ) P EXH Pitch = 2 Common vacuum pressure SUP port () Common pilot pressure SUP port () 2 x M5 3 Common EXH port (EXH.) / (Rc, NPTF, G) Common air pressure SUP port () / (Rc, NPTF, G) Symbol Stations L 33 L2 45 L (mm) The common exhaust port (EXH.) is also used as the pilot pressure exhaust () port of pilot valve. Use while the port is open to the atmosphere. 9

57 SMC SMC Vacuum Module: Vacuum Pump System Series ZX (In the case of individual spacer) B cross section System circuit example (Standard) (Option) (In the case of individual spacer) Individual spacer ZX-R Dummy spacer ZX-R6 Dummy spacer ZX-R6 R6 R6 R Individual spacer ZX-R 39.9 cross section R Individual spacer R Z ZX ZR SMC SMC Pressure sensor Individual vacuum pressure SUP port Dummy spacer Pressure sensor ZM ZM ZQ ZH ZU ZL External release port Dummy spacer External release port ZY ZF Pilot port Pilot port ZP +- 3() ( +- ) () ( ) () ( ) 7.5 Individual spacer Individual vacuum pressure SUP port Individual spacer Individual vacuum pressure SUP port SP ZCUK MJ Individual vacuum 4.7 pressure SUP port () Pitch = 2 dapter D dapter D MV EP Individual vacuum pressure SUP port () HEP Related Equipment V.7 79 V V V 4.2 Pitch =

58 Series ZX Vacuum Pump System Manifold: Type K Common EXH port (EXH.) Common pilot pressure SUP port () Common vacuum pressure SUP port () 5 : Release flow rate with lock nut Manual override x ø5.5 L L2 L (Needle fully open).5 Pitch = 4 Pitch = 2 20 Manifold base 6 End plate 44 Pressure setting trimmer Pilot valve for supply VJ4 VJ4 Lead wire length 300 Vacuum switch ZSE2 Filter unit Release flow rate () ( ) () ( ) EXH Pitch = 2 5 Common pilot pressure SUP port () 2 x M Common EXH port (EXH.) / (Rc, NPTF, G) Common air pressure SUP port () / (Rc, NPTF, G) Symbol Stations L L2 L (mm) The common exhaust port (EXH.) is also used as the pilot pressure exhaust () port of pilot valve. Use while the port is open to the atmosphere. 920

59 Vacuum Module: Vacuum Pump System Series ZX Circuit diagram Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment V V

60 Series ZX Vacuum Pump System Manifold: Type K3 Common EXH port (EXH.) Common pilot pressure SUP port () Common vacuum pressure SUP port () 6.6 : Release flow rate with lock nut x ø5.5 (Mounting hole) 6.5 (Needle fully open) Manual override (Push and turn the locking type override.) SMC SMC SMC SMC Pitch = 2 L L2 L3 Pilot valve for supply (N.O.) VJ324M Manifold base End plate 44 Pressure setting trimmer VJ34 Manual override Release flow rate Vacuum switch ZSE2 Filter unit SMC SMC SMC SMC 50. () ( ) () ( ) EXH Pitch = Common pilot pressure SUP port () 2 x M Common EXH port (EXH.) / (Rc, NPTF, G) Common air pressure SUP port () / (Rc, NPTF, G) The common exhaust port (EXH.) is also used as the pilot pressure exhaust () port of pilot valve. Use while the port is open to the atmosphere. Symbol Stations L 33 L2 45 L (mm)

61 Vacuum Module: Vacuum Pump System Series ZX Circuit diagram Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP V V.7 Related Equipment

62 Series ZX Ejector System/Unit Construction (Refer to below for unit replacement.) Single How to order (5) Digital vacuum switch unit (For replacement) M2.5 x 63 M2.5 x 63 How to order (2) dsorption confirmation switch unit (For replacement) How to order (4) Vacuum switch unit (For replacement) M2.5 x 5 How to order () Valve unit (Supply valve: N.O.) (For replacement) Filter unit (For replacement) ZX-F-D (M2.5 x 39) Plate M2.5 x 4 How to order (3) Ejector assembly How to order () Valve unit (Supply valve: N.C.) (For replacement) () Valve unit S B ZX V K 5 L Z B L D S ZSP How to order () Valve unit (Supply valve: ir operated) (For replacement) For ejector system Combination of supply valve and release valve (Refer to page 67 for details.) Y B0X 0.3 to 0.7mm 0.5 to.2mm Pilot valve DC: W (With indicator light:.05 W) C DC: 0.45 W (With indicator light: 0.5 W) Only 24 VDC and 2 VDC are applicable to 0.45 W. Solenoid valve rated voltage 0 VC 50/60 Hz 3 VC 50/60 Hz 5 24 VDC 6 2 VDC V 6 VDC S 5 VDC R 3 VDC pplicable to plug connector only. (Connector assembly with rectifier is attached.) (2) dsorption confirmation switch unit pplicable nozzle diameter C port size M5 x 0. Y M6 x (Option) Manual operation B Electrical entry L D How to Order Unit for Replacement Light/Surge voltage suppressor None With light/surge Z voltage suppressor L plug connector Unit for replacement Piping specifications Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Unit for replacement Release flow rate Without lock nut L With lock nut Non-locking push type Locking slotted type (5) Digital vacuum switch unit ZSE X Output specifications (3) Ejector assembly ZX W D Unit for replacement Single ( and ports are equipped with plugs.) ZSE2 Nozzle diameter C mm mm.0 mm (4) Vacuum switch unit X Output specifications NPN open collector PNP open collector D 2 outputs/without analog output 2 outputs/with analog output output (with trouble detection)/without analog output output (with trouble detection)/with analog output Note) nalog output is available only on grommet type. 05 Ejector exhaust 2 5 C Piping specifications L C CL CN Unit for replacement L C CL CN Built-in silencer Port exhaust Rc D Unit for replacement Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector Piping specifications Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector D: Unit for replacement. Ex.) If an adsorption confirmation switch is replaced for a vacuum switch on ZX7-K5LZ-PBC, indicate as ZSE2-0X-5C-D. In this case, mounting screws M2.5 x 5 (2 pcs.) are required. If the unit is used on its own, not combined with others, D is not required. (Valve unit, ejector assembly and switch unit) Ex.) ZSE2-0X-5C, ZX-VK5LZ, ZX-W05

63 Vacuum Module: Ejector System Series ZX Manifold How to order (6) Digital vacuum switch unit (For replacement) M2.5 x 63 How to order (4) dsorption confirmation switch unit (For replacement) () Valve unit ZX V K 5 L Z B L D M (2) Manifold base ZX ZZX 05 R C F T (3) Ejector assembly W D mm mm.0 mm P (M2.5 x 2) How to order () Valve unit (Supply valve: N.O.) (For replacement) P (M2.5 x 2) How to order () Valve unit (Supply valve: N.C.) (For replacement) P (M2.5 x 2) How to order () Valve unit (Supply valve: ir operated) (For replacement) For ejector system Rc G NPTF 05 M2.5 x 2 Refer to page 72 for details. Combination of supply valve and release valve Pilot valve Stations 0 0 Solenoid valve rated voltage Unit for replacement Nozzle diameter 2 3 M2.5 x 4 How to order (3) Ejector assembly Electrical entry Light/Surge voltage suppressor Thread type R L B dapter D (2) Manual operation Built-in silencer Port exhaust Rc M2.5 x 2 Individual spacer R How to Order Unit for Replacement M5 x 0. M6 x (Option) How to order (2) Manifold base Individual spacer R dapter D dapter D individual spacer R assembly ssembly no. ZX-DR Manifold ll ports are equipped with plugs. Unit for replacement Release flow rate L port size Y For ejector system ( and ports are equipped with plugs.) Supply port location Right side Left side Both sides Ejector exhaust Manifold common exhaust Without lock nut With lock nut Exhaust Individual exhaust C Common exhaust (4) dsorption confirmation switch unit ZSP S B (5) Vacuum switch unit ZSE2 ZSE3 Blanking assembly 0.3 to 0.7 mm 0.5 to.2 mm 0X (6) Digital vacuum switch unit 0X B0X Output specifications 2 outputs/without analog output 2 outputs/with analog output output (with trouble detection)/without analog output output (with trouble detection)/with analog output M2.5 x 63 How to order (5) Vacuum switch unit (For replacement) dapter B M2.5 x 5 Filter unit (For replacement) (M2.5 x 39) dapter B M2.5 x 20 (M2.5 x ) Note ) Common EXH port is open for common EXH type and closed for individual EXH type. Common EXH is applicable only to ejector system common EXH type. Note 2) M5: Suffix -4, M6: Suffix - Note 3) M5: Suffix -, M6: Suffix -2 pplicable nozzle diameter Output specifications 5 55 NPN open collector PNP open collector Note) nalog output is available only on grommet type. 5 C 2 C 5 C Piping specifications D D D Unit for replacement Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Unit for replacement Piping specifications L C CL CN Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector Unit for replacement Piping specifications Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector 925 Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment

64 Series ZX Vacuum Pump System/Unit Construction (Refer to below for unit replacement.) Single How to order (4) Digital vacuum switch unit (For replacement) M2.5 x 5 How to order (2) dsorption confirmation switch unit (For replacement) M2.5 x 5 How to order (3) Vacuum switch unit (For replacement) (M2.5 x 39) How to order () Valve unit (Supply valve: N.O.) (For replacement) Filter unit (For replacement) (M2.5 x 2) Plate Cross-recessed head screw for precision machine How to order () Valve unit (Supply valve: N.C.) (For replacement) How to order () Valve unit (Supply valve: ir operated) (For replacement) How to Order Unit for Replacement () Valve unit (2) dsorption confirmation switch unit ZX V B K 5 L Z B L D S Vacuum pump for system Combination of supply valve and release valve (Refer to page 903 for details.) Y Pilot valve DC: W (With indicator light:.05 W) C DC: 0.45 W (With indicator light: 0.5 W) Only 24 VDC and 2 VDC are applicable to 0.45 W. 926 Solenoid valve rated voltage 0 VC 50/60 Hz 3 VC 50/60 Hz 5 24 VDC 6 2 VDC V 6 VDC S 5 VDC R 3 VDC pplicable to plug connector only. (Connector assembly with rectifier is attached.) Unit for replacement Release flow rate L Without lock nut With lock nut port size M5 x 0. Y M6 x (Option) Manual operation D: Unit for replacement Ex.) If an adsorption confirmation switch is replaced for a vacuum switch on ZX0-K5LZ-PBC, indicate as ZSE2-0X-5C-D. In this case, mounting screws P (2 pcs.) are required. If the unit is used on its own, not combined with others, D is not required. Ex.) ZSE2-0X-5C, ZX-VBK5LZ B Non-locking push type Locking slotted type Light/Surge voltage suppressor Z None With light/surge voltage suppressor Electrical entry L L plug connector Single ( port is equipped with plug.) ZSE2 ZSP pplicable nozzle diameter S B B0X 0.3 to 0.7 mm 0.5 to.2 mm (3) Vacuum switch unit 5 55 (4) Digital vacuum switch unit ZSE X Output specifications NPN open collector PNP open collector 0X Output specifications 5 C 2 C 5 C Piping specifications D D D Unit for replacement Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Unit for replacement Piping specifications Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Unit for replacement Piping specifications Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector 2 outputs/without analog output 2 outputs/with analog output output (with trouble detection)/without analog output output (with trouble detection)/with analog output Note) nalog output is available only on grommet type.

65 Vacuum Module: Vacuum Pump System Series ZX Manifold How to order (5) Digital vacuum switch unit (For replacement) How to order (3) dsorption confirmation switch unit M2.5 x 5 (For replacement) How to order (4) Vacuum switch unit (For replacement) How to Order Unit for Replacement () Valve unit Refer to page 906 for details. (4) Vacuum switch unit ZX V B K 5 L Z B L D M ZZX 06 R B Stations Supply port location 0 Thread type R Right side Rc L 0 Left side F G B Both sides T NPTF System for (3) dsorption confirmation switch unit external vacuum port is equipped with plug. ZSP S B How to order () Valve unit (Supply valve: N.O.) (For replacement) B0X 0.3 to 0.7 mm 0.5 to.2 mm (M2.5 x 2) (M2.5 x 2) How to order () Valve unit (Supply valve: N.C.) (For replacement) How to order () (M2.5 x 2) Valve unit (Supply valve: ir operated) (For replacement) Vacuum pump for system Combination of supply valve and release valve Pilot valve Solenoid valve rated voltage Light/Surge Electrical entry voltage suppressor Individual spacer R 5 C D dapter D () Philips screw M2.5 x 2 dapter D individual spacer R assembly ssembly no. ZX-DR Manual operation (2) Manifold base Refer to page 926 for details. pplicable nozzle diameter Piping specifications Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector port size Y Unit for replacement M2.5 x 2 Unit for replacement M5 x 0. M6 x (Option) How to order (2) Manifold base Individual spacer R dapter D ZSE2 Manifold ll ports are equipped with plugs. Release flow rate L Without lock nut With lock nut 0X (5) Digital vacuum switch unit ZSE X (M2.5 x 39 ) Filter unit (For replacement) (M2.5 x 2) dapter B (2) (M2.5 x ) 2 C (M2.5 x ) Blanking plate assembly 5 C D dapter B Note ) M5: Suffix -4, M6: Suffix - Note 2) M5: Suffix -, M6: Suffix -2 D Output specifications Unit for 5 55 NPN open collector PNP open collector replacement Piping specifications Output specifications L C CL CN Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector Unit for replacement Piping specifications L C CL CN Grommet (0.6 m) Grommet (3 m) Connector (0.6 m) Connector (3 m) Without connector 2 outputs/without analog output 2 outputs/with analog output output (with trouble detection)/without analog output output (with trouble detection)/with analog output Note) nalog output is available only on grommet type. 927 Z ZX ZR ZM ZM ZQ ZH ZU ZL ZY ZF ZP SP ZCUK MJ MV EP HEP Related Equipment