Vacuum Ejector. Series ZM Applications

Transcription

1 Ejector Series ZM All in One! Built-in suction filter and silencer Air supply valve for generating a vacuum release valve (equipped with a flow volume adjustment valve) switch (solid state, diaphragm) Adaptable for a manifold application All tubing, wiring, indicators, and adjustment functions have been eliminated from the side surfaces, thus enabling assembly and maintenance while linked to a manifold. EXH system Common SUP system Common, Individual Maximum air suction volume increased by 4% Maximum vacuum pressure 4 kpa The suction volume has been increased by 4% through the adoption of a two-stage nozzle construction. Compact and lightweight 15.5 mm width, 4 g (full system) Air operated type Series ZM Applications Fields: Semiconductor and electrical, automobile assembly, food and medical equipment, and various types of manufacturing and assembly equipment Machines: Robotic hand/material handling, automotive assembling machines, automatic transfer equipment, pick and place, printing machinery Functions: adsorption transfer, vacuum adsorption retention, vacuum generated air flow [Option] Two-stage nozzle construction Application example Air pressure supply The suction volume increase by the two-stage nozzle First stage nozzle diffuser performance Second stage nozzle diffuser performance Suction volume increase Work Ejector ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment 95

2 Ejector With Valve and Switch Series ZM Note) CE compliant: For DC only. [Option] How to Order J K A B P3 P5 Q3 Q5 Y ZM Nozzle diameter 5.5 mm 7.7 mm 1 1. mm mm mm port location A Side/Bottom entry Side entry Body style 1 Single unit: With valve + With standard silencer 1S Single unit: With valve + With high noise reduction silencer 3 Note) Manifold: With common SUP valve 5 Note) Manifold: With individual SUP valve 2 Single unit: With standard silencer (Without valve) 2S Single unit: With high noise reduction silencer (Without valve) 4 Note) Manifold: Without common SUP valve 6 Note) Manifold: Without individual SUP valve Note) When the product is used for the manifold, the exhaust air of the operating ejector may enter the vacuum (V) port of the nonoperating ejector and be released if there are an operating and non-operating ejector. If this becomes a problem, consider using a double check valve (-X17 on page 14) or individual exhaust (-X111 on page 15.) Supply valve/release valve combination Supply valve (N.C.) Supply valve (N.C.), and release valve Supply valve (N.O.) Supply valve (N.O.), and release valve Air operated valve (supply valve), Port size connection M3 x.5 Air operated valve (supply valve), Port size connection M5 x. Air operated valve (supply/release valve), Port size connection M3 x.5 Air operated valve (supply/release valve), Port size connection M5 x. Without valve Pilot valve DC: 1 W (With indicator light: 1.5 W) DC:.45 W (With indicator light:.5 W) 1 Note) 3 Note) 5 6 V S R Standard supply pressure M.35 MPa S.45 MPa H.5 MPa Refer to table 1 for the selection of standard supply pressure and nozzle size. T F Thread type Rc NPTF G Note) Note) G thread The thread ridge shape is compatible with the G thread standard (JIS B22), but other shapes are not conforming to ISO163 and ISO1179. As the double solenoid specifications, -X126 and -X135 are available as a special order. (Refer to page 16.) When selecting air operated valves, there will be no symbol specified for pilot valves, solenoid valve rated voltage, electrical entry, light/surge voltage suppressor and manual override. Only 24 VDC and 12 VDC are applicable to.45 W. 96 Solenoid valve rated voltage CE compliant 1 VAC 5/6 Hz 11 VAC 5/6 Hz 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Air operated/without valve Note) CE compliant products are not available for 1 and 3. G H L LN LO switch electrical entry L C CL CN L Grommet type, with.6 m lead wire (ZSE1) Grommet type, with 3 m lead wire (ZSE1) Connector type, with.6 m lead wire (ZSE1) Connector type, with 3 m lead wire (ZSE1) Connector type, without connector assembly Grommet type, with.5 m lead wire (ZSM1) Grommet type, with 3 m lead wire (ZSM1) Light/Surge voltage suppressor Z S switch model E14 E15 E16 E17 E1 E19 E55 M15 M21 Without switch 1 output, without analog output, 3 rotation setting (ZSE1) 1 output, without analog output, 2 setting (ZSE1) 2 outputs, without analog output, 3 rotation setting (ZSE1) 2 outputs, without analog output, 2 setting (ZSE1) 1 output, analog output, 3 rotation setting (ZSE1) 1 output, analog output, 2 setting (ZSE1) 1 output, without analog output, 2 setting, PNP output (ZSE1) 1 output, without analog output, Diaphragm (1 rotation setting), Solid state(1 to 26 VDC) (ZSM1) 1 output, without analog output, Diaphragm (1 rotation setting), Reed (AC/DC 1 VAC)(ZSM1) Manual override B None With light/surge voltage suppressor With surge voltage suppressor Electrical entry Made to Order Refer to pages 14 to 16 for details. Non-locking push type Locking slotted type S is not available for AC. DC voltage (with surge voltage suppressor) If the polarity is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged. Grommet type, with.3 m lead wire (applicable to DC) Grommet type, with.6 m lead wire (applicable to DC) L plug connector, with.3 m lead wire L plug connector, without lead wire (applicable to DC) L plug connector, without connector (applicable to DC) Air operated/without valve Combination of Nozzle Diameter and Standard Supply Pressure Nozzle diameter.5 mm.7 mm 1. mm 1.3 mm 1.5 mm Release flow rate adjusting needle Without lock nut L With lock nut Compatible with release valves only. M (.35) L Standard supply pressure MPa S (.45) CE compliant Q CE compliant H (.5)

3 Ejector With Valve and Switch Series ZM Table (1) How to Order Connector for Solid State Switch Without lead wire (A connector and 4 sockets) With lead wire VJ1 VJ1 VJ A 3A 4A Lead wire length 3 mm 6 6 mm 1 1 mm mm 2 2 mm mm 3 3 mm ZS ZS Note) If ordering switch with 5 m lead wire, specify both switch and lead wire with connector part numbers. Ex.) ZM -E15CN... 1 pc. ZS-2-5A pc. 2 2 AA 5A Lead wire length Table (2) How to Order Connector for Supply Valve and Release Valve ZM Nozzle diameter Body style Standard supply pressure mm.7 mm 1. mm 1.3 mm 1.5 mm (Applicable to 1 VAC only) (Applicable to 11 VAC only) (Applicable to DC only) m 3 m 5 m Note) If ordering a valve with 6 mm or longer lead wire, indicate the valve without connector and connector assembly. Ex.) Lead wire length: 1 mm ZM -K1LO (-Q)... 1 pc. VJ1-36-1A pcs. How to Order <Without valve> For single unit For manifold, common SUP For Manifold, individual SUP <With valve> 1 For single unit 3 For manifold, common SUP 5 For manifold, individual SUP M S H Caution When using AC, the DC solenoids are operated via a rectifier. Therefore, when using this type, make sure to combine the connector assembly equipped with a rectifier with the exclusive solenoids. Using other combinations could lead to burned coils or other types of malfunctions..35 MPa (Double diffuser) (Except nozzles diameter 5,, and 15,, type).45 MPa (Single diffuser) (Nozzle diameter 13,, and 15,, only).5 MPa (Double diffuser) (Except nozzles diameter 15,, type) ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment Quick Delivery/Model <Without valve/single unit> ZM52H ZM72H ZM12H ZM132H <With valve/single unit> ZM51H-K5LZ (-Q) ZM51H-K5LZ-E15 (-Q) ZM71H-K5LZ (-Q) ZM71H-K5LZ-E15 (-Q) ZM11H-K5LZ (-Q) ZM11H-K5LZ-E15 (-Q) ZM131H-K5LZ (-Q) ZM131H-K5LZ-E15 (-Q) ZM131M-K5LZ (-Q) ZM131M-K5LZ-E15 (-Q) 97

4 Series ZM Model JIS Symbol Nozzle dia. ø (mm) Model ZM5 H ZM7 H ZM1 H ZM13 H ZM7 M ZM1 M ZM13 M ZM13 S ZM15 S Standard supply pressure H M S.5 MPa.35 MPa.45 MPa Maximum suction flow rate (l/min (ANR)) (l/min (ANR)) Diffuser construction Double diffuser Single diffuser Air supply port Exhaust port port Ejector System Circuit Ejector Specifications Fluid Maximum operating pressure Maximum vacuum pressure Supply pressure range Operating temperature range Air supply valve release valve switch Suction filter Valve Specifications How to operate Main valve Effective area Cv factor Operating pressure range Electrical entry Max. operating frequency Voltage Power consumption Without valve With valve Without valve With valve Main valve Pilot valve Electronic Diaphragm Air.7 MPa 4 kpa.2 to.55 MPa.25 to.55 MPa 5 to 6 C 5 to 5 C Poppet VJ114, VJ324M ZSE1-- ZSM1- Filteration degree: 3 μm, Material: PE (Polyethylene) Pilot type NBR poppet 3 mm to.7 MPa Plug connector, Grommet (available on DC) 5 Hz 24/12/6/5/3 VDC, 1/11 VAC (5/6 Hz) DC: 1 W (With light: 1.5 W), 1 VAC: 1.4 W (1.45 W), 11 VAC: 1.45 W (1.5 W) Made to Order (Refer to pages 14 to 16 for details.) Mass Model ZM 2 ZM 4 ZM 6 ZM 1 -J ZM 3 -J ZM 5 -J ZM 1 -K ZM 3 -K ZM 5 -K ZM 1 -A ZM 3 -A ZM 5 -A ZM 1 -B ZM 3 -B ZM 5 -B P ZM - Q Without switch E E L M (kg) -M L Stations R/L B R/L B SR/L SB

5 Ejector With Valve and Switch Series ZM Construction: ZM 1 -K L-E Component Parts No No Pilot valve for release!1 y Air pressure supply port u t port Description Body Valve cover Adapter plate Cover Tension bolt Replacement Parts Description Release flow rate adjusting needle Filter cover assembly Diffuser assembly Suction filter Silencer assembly Pilot valve Poppet valve assembly switch Check valve o!!4 Material Aluminum die-casted Zinc die-casted or resin Zinc die-casted Zinc die-casted Stainless steel/polyacetal Pilot valve for supply e!2 w q i r!3 Note Without switch: ZM-HCA, With switch: ZM-HCB Material Part no. Brass/Electroless nickel plated ZM-NA (With lock nut: ZM-ND-L) ZM-FCB- ZM - Polyethylene ZM-SF ZM-SA (High noise reduction: ZM-SA-D) VJ114- ZMA-PV2- ZSE1-- ZSM1-15 ZSM1-21 NBR ZM-CV Precautions Be sure to read before handling. Refer to front matters 3 and 39 for Safety Instructions and pages 44 to 46 for Equipment Precautions. Caution Selection and sizing of Series ZM Refer to the Equipment Model Selection on pages 25 to 43. Operation of an ejector equipped with a valve When the air supply pilot valve is turned ON, air flows to the diffuser assembly, and a vacuum is created. When the pilot valve for releasing the vacuum is turned ON, air flows to the vacuum port side, immediately causing a release in the vacuum. The release speed can be adjusted by regulating the flow volume adjustment screw. When the supply valve is turned OFF, the atmospheric pressure causes the air to flow back from the silencer, thus releasing the vacuum. However, in order to properly release a vacuum, a vacuum release valve must be used. Operating environment Because the filter cover is made of polycarbonate, do not use it with or expose it to following chemicals: paint thinner, carbon tetrachloride, chlorofrom, acetic ester, aniline, cyclohexane, trichloroethylene, sulfuric acid, lactic acid, watersoluble cutting oil (alkalinic), etc. Also, do not expose it to direct sunlight. Furthermore, avoid use in direct sunlight. Release flow rate adjusting screw Turning the vacuum release flow rate adjusting screw 4 full turns from the fully closed position renders the valve fully open. Do not turn more than four times since turning excessively may cause the screw fall off. In order to prevent the screw from loosening and falling out, the release flow rate adjusting needle with lock nut is also available. ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment 99

6 Series ZM /, Standard Supply Pressure: H.5 MPa ZM5 H (kpa) l/min (ANR) l/min (ANR) (kpa) Supply pressure (MPa) Flow rate l/min (ANR) ZM7 H (kpa) l/min (ANR) l/min (ANR) (kpa) Supply pressure (MPa) Flow rate l/min (ANR) ZM1 H (kpa) l/min (ANR) l/min (ANR) (kpa) Supply pressure (MPa) Flow rate l/min (ANR) 99

7 Ejector With Valve and Switch Series ZM /, Standard Supply Pressure: H.5 MPa ZM13 H (kpa) Supply pressure (MPa) Supply pressure (MPa) Flow rate l/min (ANR) /, Standard Supply Pressure: S.45 MPa ZM13 S (kpa) ZM15 S 1 l/min (ANR) l/min (ANR) l/min (ANR) l/min (ANR) (kpa) (kpa) Flow rate l/min (ANR) 9 ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment (kpa) l/min (ANR) l/min (ANR) (kpa) Supply pressure (MPa) Flow rate l/min (ANR) 991

8 Series ZM /, Standard Supply Pressure: M.35 MPa ZM7 M How to Read Graph (kpa) Supply pressure (MPa) ZM1 M (kpa) Supply pressure (MPa) l/min (ANR) l/min (ANR) l/min (ANR) l/min (ANR) (kpa) Flow rate l/min (ANR) (kpa) Flow rate l/min (ANR) Flow characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, a change in vacuum pressure will also be expressed. Normally this relationship is expressed in ejector standard supply pressure. In graph, Pmax is max. vacuum pressure and Qmax is max. suction flow. The values are specified according to catalog use. Changes in vacuum pressure are expressed in the order below. 1. When ejector suction port is covered and made airtight, suction flow is and vacuum pressure is at maximum value (Pmax). 2. When suction port is opened gradually, air can flow through (air leakage), suction flow increases, but vacuum pressure decreases (condition P1 and Q1). 3. When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near (atmospheric pressure). When vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near. When ventilative or leaky work must be adsorbed, please note that vacuum pressure will not be high. ZM13 M (kpa) l/min (ANR) l/min (ANR) (kpa) Supply pressure (MPa) Flow rate l/min (ANR) 992

9 Series ZM Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Switch Model ZSE1--14 ZSE1--15 ZSE1--16 ZSE1--17 ZSE1--1 ZSE1--19 ZSE1--55 ZSM1-15 ZSM1-21 Sensor type Solid state Diaphragm Switch Electronic circuit Solid state Reed Set pressure range to 11 kpa 27 to kpa Hysteresis 1 to 1% of the set pressure (Changeable) 3% full span or less (Fixed) 1 to 1% of the set pressure (Changeable) Max. 15 kpa Max. 2 kpa Repeatability ±1% full span or less ±1% or less Temperature characteristics ±3% full span or less ±5%F.S. Operating voltage 12 to 24 VDC (Ripple ±1% or less ) 4.5 to 2 VDC 1 VAC/VDC ON-OFF output NPN open collector 3 V, Max. ma PNP open collector Open collector ma 2 V, Max. 4 ma Setting points 1 point 2 points 1 point 1 point Operation indicator light Lights up when ON Lights ON (Output1: Red, Output 2: Green) Lights up when ON Lights up when ON (Red) Lights up when ON Setting trimmer 3 rotations 2 degrees 3 rotations 2 degrees 3 rotations 2 degrees 1 rotations Current consumption 17 ma or less (When 24 VDC is ON) 25 ma or less (When 24 VDC is ON) 17 ma or less (When 24 VDC is ON) 1 ma or less(24 VDC) Max. current 24 V or less:5 ma 4 V:4 ma, 1 V:2 ma Max. operating pressure.2 MPa.5 MPa When using ejector system, instantaneous pressure up to.5 MPa will not damage the switch. Solid State Switch (ZSE) Circuit/Connection ZSE1--14, -15 Main circuit of switch ZSE1--16, -17 Main circuit of switch ZSE1--1, -19 Main circuit of switch 1 kω ZSE1--55 Main circuit of switch LED Red Brown DC (+) Black OUT Blue DC (-) Brown DC (+) Black OUT1 White OUT2 Blue DC (-) Brown DC (+) Black OUT1 White OUT2 Blue DC (-) Brown DC (+) Black OUT Blue DC (-) Diaphragm Switch (ZSM) Brown lead wire: connect to power supply terminal (+) to operate the switch main circuit Black lead wire: connect to the load (PLC input or relay) Blue lead wire: connect to power supply GND terminal. In the case of connector type, do not connect the green lead wire. Brown lead wire: connect to power supply terminal (+) to operate the switch main circuit. Black lead wire: connect to load (PLC input or relay) White lead wire: connect to the load (PLC input or relay) Blue lead wire: connect to power supply GND terminal. Brown lead wire: connect to power supply terminal (+) to operate the switch main circuit. Black lead wire: connect to load (PLC input or relay) White lead wire: connect to analog load. Blue lead wire: connect to power supply GND terminal. Brown lead wire: connect to power supply terminal (+) to operate the switch main circuit. Black lead wire: connect to load (PLC input or relay) Blue lead wire: connect to power supply GND terminal. Solid State Switch: ZSM1-15 Main circuit of switch Brown Black Blue Reed Switch: ZSM1-21 Reed switch Light emitting diode Brown Polarity protection diode Blue Contact protection box The switch does not have a built-in contact protection circuit. Use this box if an induction load is applied or if the lead wire is longer than 5 meters. Brown lead wire: Connect the + power supply to operate the main switch circuit (to the + terminal of the power source). Black lead wire: Connect the load (to the input or output relay of the PLC). Blue lead wire: Connect the power supply (to the GND terminal of the power supply). 994 Internal Circuit of Contact Protection Box Contact protection box Surge absorber Choke coil Brown lead wire Black lead wire

10 Ejector With Valve and Switch Series ZM How to Set the Pressure Hysteresis The ON pressure is set with the pressure setting trimmer. The high pressure/high vacuum pressure can be set turning it clockwise. When setting, use a flat head screw driver which fits the groove in the trimmer, and turn it gently with your fingertips. Hysteresis is the difference in pressure when the output signal is ON and OFF. The pressure to be set is the ON pressure. It turns ON at the set pressure. High vacuum pressure High pressure ZSE1(L)- -14/-15/-1/-19 Hysteresis can be set using the hysteresis setting trimmer. The setting is increased by turning it clockwise, and the range is 1 to 1% of the set pressure range. When the hysteresis setting trimmer is moved after setting the ON pressure, it must be set again. Pressure setting trimmer Hysteresis setting trimmer Indicator light ZSE1(L)- -16/-17 OUT1 (black lead wire, red LED) can be set with the pressure setting trimmer 1 (SET1). OUT2 (white lead wire, green LED) can be set with the pressure setting trimmer 2 (SET2). Pressure setting trimmer 1 Hysteresis setting trimmer 2 Indicator light Atmospheric pressure SET HYS SET 1 SET 2 When using the switch to confirm correct adsorption, the vacuum pressure is set to the minimum value to reliably adsorb. If the value is set below the minimum, the switch will be turned ON even when adsorption has failed or is insufficient. If the pressure is set too high, the switch may not turn ON even though it may adsorb correctly. High vacuum Supply pressure Setting pressure Caution Reliable adsorption Unstable adsorption No adsorption Observe the following precautions for setting the vacuum pressure: Use your fingertips to gently turn the screwdriver. Do not use a screwdriver with a large grip or with a tip that does not fit into the trimmer groove because this could damage the groove. Setting pressure Atmospheric pressure How to Use Connector +21 Hysteresis ON OFF 1. Attaching and detaching connectors When assembling the connector to the switch housing, push the connector straight onto the pins until the level locks into the housing slot. When removing the connector from the switch housing, push the lever down to unlock it from the slot and then withdraw the connector straight off of the pins. Lead wire.2 to.33 mm 2 Max. cover diameter Socket ø1.7 mm Hook Hook Connector DC polarity indication Lever.2 to.33 mm Lead wire 2 Max. cover diameter Socket ø1.7 mm Connector DC polarity indication Lever Pin Groove Housing 2. Crimping of lead wires and sockets Strip 3.2 to 3.7 mm of the lead wire ends, insert each stripped wire into a socket and crimp contact it using special crimping tool. Be careful that the outer insulation of the lead wires does not interfere with the socket contact part. (Crimping tool: DXT ) Core wire crimping area Socket Socket Hook Hook Covering retainer Core wire Lead wire Covering 3. Attaching and detaching of socket to connector with lead wire Attaching Insert the sockets into the square holes of the connector (with +, 1, 2, indication), and continue to push the sockets all the way in until they lock by hooking into the seats in the connector. (When they are pushed in their hooks open and they are locked automatically.) Then confirm that they are locked by pulling lightly on the lead wires. Detaching To detach a socket from a connector, pull out the lead wire while pressing the socket s hook with a stick having a thin tip (about 1 mm). If the socket will be used again, first spread the hook outward. Connector Lead wire 995 ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment

11 Series ZM For Single Unit/Without Valve Basic Type ZM 2 M H S Supply Exhaust Air pressure supply port (P) 3 x ø4.5 Mounting hole Supply port (V) port (V) (Side entry style is equipped with plugs.) Silencer Dimensions of model with high noise reduction silencer assembly is the same as standard. <Components> For Single Unit/Without Valve Basic Type with Switch H ZM 2 M S 111 Supply Exhaust Air pressure supply port (P) 3 x ø4.5 Mounting hole Supply P V port (V) Silencer Dimensions of model with high noise reduction silencer assembly is the same as standard. V port (V) (Side entry style is equipped with plugs.)

12 Ejector With Valve and Switch Series ZM Air Operated Type H M S ZM 1 Q P Pilot pressure supply port for release (PB) Pilot pressure supply port for supply (PA) Supply ZA A: Release flow rate adjusting needle with lock nut 6.4 (9.2) 1 (Needle fully open) Air pressure supply port (P) Pilot pressure supply port for release (PB) M3 (M5) Release flow rate adjusting needle port (V) Pilot pressure supply for release A Supply Pilot pressure supply port for supply (PA) M3 (M5) Pilot pressure supply for supply 2 x ø4.5 (Mounting hole) Pilot pressure exhaust port (PE) M5 through Silencer Dimensions of model with high noise reduction silencer assembly is the same as standard. ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment port (V) (Side entry style is equipped with plugs.) 997

13 Series ZM H M S ZM 1 K E <Components> For Single Unit/With Valve Basic Type with Switch and Valve Supply Pilot pressure exhaust port (PE) A: Release flow rate adjusting needle with lock nut 1 (Needle fully open) 111 Release flow rate adjusting needle Air pressure supply port (P) Pilot valve for release 3 x ø4.5 Mounting hole Pilot valve for supply Pilot pressure exhaust port (PE) M5 through A Supply P V port (V) Silencer Dimensions of model with high noise reduction silencer assembly is the same as standard. V 13 port (V) (Side entry style is equipped with plugs.) 99

14 Ejector With Valve and Switch Series ZM Single/With Air Supply Valve (N.O.) and Release Valve Basic Type with Valve H M S ZM 1 B <Components> A: Release flow rate adjusting needle with lock nut 1 (Needle fully open) 3 Supply Pilot pressure exhaust port (PE) Pilot valve for release A Air pressure supply port (P) Supply port (V) Pilot valve for supply Pilot pressure exhaust port (PE) M5 through 2 x ø4.5 Mounting hole Silencer Dimensions of model with high noise reduction silencer assembly is the same as standard. 3 ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment port (V) (Side entry style is equipped with plugs.) 999

15 Series ZM Manifold Specifications: Series ZZM Manifold Specifications Manifold style Stacking Common air pressure supply port (P) 1 4 (Rc, NPTF, G) Individual air pressure supply port (P) 1 (Rc, NPTF, G) 1 2, 3 4 Common exhaust port (EXH) (Rc, NPTF, G) Common exhaust port (EXH) location Right side/left side/both sides Max. number of stations Max.1 stations Silencer ZZM-SA (With bolts) The common air pressure supply port (P) and individual air pressure supply port (P) can be mounted together. Right and left sides are viewed from the front side of vacuum port (V). Maximum Ejector Stations Ejector model Manifold model ZZM Stations R L ZZM Stations B ZM53 ZM Effective area of external silencer is 16 mm 2. ZM73 ZM74 1 ZZM 6 6 R ZM13 ZM14 5 R ZM133 ZM134 How to Order Ejector Manifold 4 6 ZM153 ZM Multi-ejecter Series ZM Manifold Number of stations station 5 stations 1 1 stations (Max.) By viewing the front side of vacuum port (V), stations are counted starting from station 1 on the left side. Thread type T F Rc NPTF Note) G Note) G thread The thread ridge shape is compatible with the G thread standard (JIS B22), but other shapes are not conforming to ISO163 and ISO S R L B R L Silencer for ZZM (ZZM-SA) Without exhaust port (Compatible with -X111) Common air pressure supply port (P) location Common exhaust port (EXH) and silencer location Right side Left side Both sides Both sides Right side Left side Right and left sides are viewed from the front side of vacuum port (V). Right and left sides are viewed from the front side of vacuum port (V). Common exhaust port (EXH) size The asterisk ( ) indicates the ejector model no. below the manifold base no. Prefix it to the vacuum ejector part numbers to be mounted. When it is not added, products are shipped separately. Example) ZZM6-6R 1 pc. ZM13H-J5LZ (-Q) 3 pcs. ZM133H-J5LZ (-Q) 3 pcs 1

16 Ejector With Valve and Switch Series ZM Manifold ZZM Number of ejectors Common EXH port Port location ZA A: Release flow rate adjusting needle with lock nut ZX ZR 1 ZM (Needle fully open) ZMA ZQ ZH 14 Pitch P = 16 L x ø5.6 Mounting hole ZU ZL Individual air pressure supply port (P) 1/4 (Rc, NPTF, G) Common air pressure supply port (P) 2 x M5 Common pilot pressure exhaust port (PE) ZY ZF ZP A SP ZCUK Left Right 119 AMJ AMV 2 x Rc1/ (1/-27NPTF, G1/) port (V) L2 L3 24 1/2, 3/4 (Rc, NPTF, G) Common exhaust port (EXH) AEP HEP Related Equipment 114 (mm) L Stations L1 2 ± ±1.5 6 ± ± ±1.5 1 ± ±2. 14 ± ± ±2. L2 L3 4 ± ± ± ± ±1.5 ±1.5 ± ± ± ± ± ± ± ± ±2. 16 ±2. 16 ±2. 14 ±2. 14 ±2. 2 ±2. 11

17 Series ZM <Components> Manifold/With Silencer Manifold with Silencer Dedicated for Manifold ZZM Number of ejectors S Silencer location A: Release flow rate adjusting needle with lock nut L (Needle fully open) Pitch P = 16 4 x ø5.6 Mounting hole 1/4 (Rc, NPTF, G) Common air pressure supply port (P) 2 x M5 Common pilot pressure exhaust port (PE) Individual air pressure supply port (P) A 2 x Rc1/ (1/-27NPTF, G1/) port (V) L2 L Silencer dedicated for manifold (ZZM-SA) port electrical entry (In the case of side entry/with plug at the bottom) Rc 1/ Hexagon socket head cap plug (mm) L Stations L1 2 ± ±1.5 6 ± ± ±1.5 1 ± ±2. 14 ± ± ±2. L2 L3 4 ± ± ±1.5 ± ± ±1.5 ± ± ± ± ± ± ±2. 16 ± ±2. 14 ±2. 16 ±2. 2 ±2. 14 ± ±2. 12

18 Ejector With Valve and Switch Series ZM Component Parts for Manifold q q ZA (1) Stations Manifold part no. w e r t Left side Clamp rod part no. ZZM-CR-1 ZZM-CR-2 ZZM-CR-3 ZZM-CR-4 ZZM-CR-5 ZZM-CR-6 ZZM-CR-7 ZZM-CR- ZZM-CR-9 ZZM-CR-1 y u i o (2) (3) Adapter A Adapter B Silencer Blanking plate No. Manifold part no V V!!1!1 Right side Model ZZM-SA ZZM-BP ZZM-ADA- ZZM-ADB- ZZM-GE ZZM-EPL- ZZM-GBL ZZM-GBB ZZM-GBR ZZM-EPR- ZZM-CR- t w e r Description Silencer assembly Blanking plate assembly Adapter A assembly Adapter B assembly Gasket E End plate L Gasket BL Gasket BB Gasket BR End plate R Clamp rod The used quantity varies depending on the part number. Note 1) : Symbol corresponding to the port thread type. Note 2) 2pcs. are included in one set. Quantity Station: Note Note 1) Note 1) Note 1) Refer to Table (1). Note 2) ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment 13

19 Series ZM Made to Order Specifications 1 Please contact SMC for detailed specifications, dimensions, and delivery. 1 Double Check Valve/For Manifold [Option] Single: ZM Nozzle diameter Body Supply pressure Valve Voltage Electrical entry X17 CE compliant Double check valve When a manifold is used, the exhaust that is discharged to the silencer could flow out to the vacuum port (V) side. To reduce this, a check valve is used. Warning 1. It cannot be used for maintaining a vacuum. 2. Use a vacuum release valve. (Compatible with valve K and B types only.) (The workpiece cannot be released without a vacuum release valve.) 3. Compatible with the manifold specifications only. Construction Check valve ZM-CV 14

20 Series ZM Made to Order Specifications 2 Please contact SMC for detailed specifications, dimensions, and delivery. 2 With Individual Exhaust Spacer [Option] Single: ZM Construction Nozzle diameter Body Supply pressure X111 When using an individual ejector in a clean room, the exhaust can be discharged outside of the clean room by attaching an individual exhaust spacer. (The spacer can also be installed when using a manifold. Please contact SMC for mounting dimensions.) It is possible to manufacture it with a valve and a switch. Exhaust spacer assembly: ZM SP T F Rc NPTF G Gasket ZZM Caution Stations CE compliant Individual exhaust spacer To connect a pipe to the exhaust port, do not use an elbow joint because it creates resistance and prevents the system from attaining a sufficient vacuum. When the product is used to prevent the manifold exhaust intrusion, exhaust intrusion may occur if exhaust pipes are put together. When this special product is used for all manifold stations, the following part number can be used. Spacer E Without exhaust ports on both sides Round head combination screw ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment 67.5 Standard model Individual exhaust port (EXH) Exhaust 15

21 Series ZM Made to Order Specifications 3 Please contact SMC for detailed specifications, dimensions, and delivery. 3 Double Solenoid Supply Valve [Option] Single: ZM Nozzle diameter Body Supply pressure Valve Voltage Electrical entry X126 CE compliant This is an air supply pilot valve that is made with double solenoids. It is possible to manufacture it with a switch. Double solenoid supply valve -X126 With release valve (Valve K type only) -X135 Without release valve (Valve J type only) Construction Solenoid for vacuum generating Pilot valve for air supply VJ3233- Solenoid for vacuum stopping Pilot valve for vacuum release VJ

22 Ejector with Solid State Timer Series ZMA Incorporates solid state timer function for release valve control (Timer setting with PLC is unnecessary) Timing Chart OFF Suction command ON OFF Suction output ON OFF Release output ON Timer period 2 to 2, ms Note) When power is supplied, release output is performed once for the time period only. Allows sharing of switch/valve power supply, and single line for suction signal (Valve wiring is unnecessary) Timer can be easily adjusted without programming (Reduction of the load of PLC) ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment 19

23 Ejector With Solid State Timer Series ZMA How to Order Release flow rate adjusting needle L Without lock nut With lock nut Nozzle diameter Note) Note) mm.7 mm 1. mm 1.3 mm 1.5 mm Body type For single unit Common SUP for manifold Individual SUP for manifold Note) When the product is used for the manifold, the exhaust air of the operating ejector may enter the vacuum port (V) of the non-operating ejector and be released if there are an operating and non-operating ejector. In order to reduce the exhaust intrusion, consider using a special double check valve (-X17). Standard supply pressure M S H.35 MPa.45 MPa.5 MPa Refer to Table (1) for selection of standard supply pressure and nozzle diameter. Valve Thread type T F K Rc NPTF G G thread The thread ridge shape is compatible with the G thread standard (JIS B22), but other shapes are not conforming to ISO163 and ISO1179. Switch model T14 T54 Solenoid valve rated voltage 5 24 VDC C CL CN 1 point setting, No analog output available 3 turns, NPN output 1 point setting, No analog output available 3 turns, PNP output With air supply valve, release valve Electrical entry of vacuum switch (Connector type) Lead wire length.6 m Lead wire length 3 m Without lead wire Table (1) Combination of Nozzle Diameter and Standard Supply Pressure Standard supply pressure (MPa) Nozzle diameter M (.35) S (.45) H (.5).5 mm.7 mm 1. mm 1.3 mm 1.5 mm Table (2) Lead wire with 4-wire connector P (.6 m) P (3 m) 11

24 Ejector With Solid State Timer Series ZMA Connection Example T14 VL T54 VL VS VS Max. 45. ma Internal circuit Max. 45. ma Internal circuit Brown Black White 3 V Max. ma Max. Blue Brown ma Max. White Black Blue 24 VDC 24 VDC VL: Pilot valve for release VS: Pilot valve for supply Model Nozzle diameter (mm) Ejector Specifications Fluid Max. operating pressure Max. vacuum pressure Supply pressure range Operating temperature range Suction filter Valve Specifications How to operate Main valve Effective area (Cv factor) Operating pressure range Electrical entry Max. operating frequency Voltage Air.7 MPa 4 kpa.25 to.55 MPa 5 to 5 C Polyethylene sintered metal (3 μm) Pilot type Poppet 3 mm 2 (.17).25 to.6 MPa Plug connector 5 Hz 24 VDC Switch with Timer Specifications (for controlling solenoid valve) Power source Sensor switch output Part of timer Timing Chart Wiring Model ZMA5 ZMA7 ZMA1 ZMA13 ZMA7 ZMA1 ZMA13 ZMA13 ZMA15 Suction command Suction output H H H H M M M S S OFF ON OFF ON Standard supply pressure H M S.5 MPa.35 MPa.45 MPa Operating voltage Consumption current per one unit Number of output Output Setting trimmer Operation indicator light Temperature characteristics Hysteresis Timer period Setting trimmer Temperature characteristics Maximum suction flow rate l/min (ANR) l/min (ANR) Diffuser construction Double diffuser Single diffuser OFF Release output ON Timer period 2 to 2,ms Note) When power is supplied, release output is performed once for the time period only. Brown Black White Blue DC (+) Suction command Switch output DC ( ) 24 VDC ±1% 1.1 W (at switch output OFF) 1 NPN/PNP open collector 3 turns Red LED lighting ±3% FS or less 3% FS or less (fixed) 2 to 2, ms 3 turns ±3% FS or less 111 ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment

25 Series ZMA Construction: ZMA 1 -K L-E Pilot valve for supply Pilot valve for release Air pressure supply port port Component Parts No Description Body Valve cover Adapter plate Cover Tension bolt Release flow rate adjusting needle Material Aluminum die-casted Resin Resin Zinc die-casted Stainless steel/polyacetal Brass Note ZMA-HCB Electroless nickel plated Replacement Parts No Description Filter cover assembly Diffuser assembly Suction filter Silencer assembly Pilot valve Poppet valve assembly 13 switch with timer 14 Check valve 15 Connector assembly Material Polyethylene NBR Part no. ZMA-FCB- ZMA - ZM-SF ZM-SA SY114-5LOZ ZMA-PV ZM-CV 112

26 Ejector With Solid State Timer Series ZMA /, Standard Supply Pressure: H.5 MPa ZMA5 H kpa kpa Supply pressure MPa ZMA7 H Supply pressure MPa ZMA1 H l/min (ANR) l/min (ANR) l/min (ANR) l/min (ANR) kpa kpa Flow rate l/min (ANR) Flow rate l/min (ANR) 9 ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment kpa l/min (ANR) l/min (ANR) kpa Supply pressure MPa Flow rate l/min (ANR) 113

27 Series ZMA /, Standard Supply Pressure: H.5 MPa ZMA13 H kpa l/min (ANR) l/min (ANR) kpa Supply pressure MPa Flow rate l/min (ANR) /, Standard Supply Pressure: S.45 MPa ZMA13 S kpa l/min (ANR) l/min (ANR) kpa Supply pressure MPa Flow rate l/min (ANR) ZMA15 S kpa l/min (ANR) l/min (ANR) kpa Supply pressure MPa Flow rate l/min (ANR)

28 Ejector With Solid State Timer Series ZMA /, Standard Supply Pressure: M.35 MPa How to Read Graph kpa kpa Supply pressure MPa Supply pressure MPa l/min (ANR) l/min (ANR) l/min (ANR) l/min (ANR) kpa kpa Flow characteristics are expressed in ejector vacuum pressure and suction flow. If suction flow rate changes, a change in vacuum pressure will also be expressed. Normally this relationship is expressed in ejector standard supply pressure. In graph, Pmax is max. vacuum pressure and Qmax is max. suction flow. The values are specified according to catalog use. Changes in vacuum pressure are expressed in the order below. 1. When ejector suction port is covered and made airtight, suction flow is and vacuum pressure is at maximum value (Pmax). 2. When suction port is opened gradually, air can flow through (air leakage), suction flow increases, but vacuum pressure decreases (condition P1 and Q1). 3. When suction port is opened further, suction flow moves to maximum value (Qmax), but vacuum pressure is near (atmospheric pressure). When vacuum port (vacuum piping) has no leakage, vacuum pressure becomes maximum, and vacuum pressure decreases as leakage increases. When leakage value is the same as max. suction flow, vacuum pressure is near. When ventilative or leaky work must be adsorbed, please note that vacuum pressure will not be high. ZA ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ AMV AEP HEP Related Equipment 16 kpa l/min (ANR) l/min (ANR) kpa Supply pressure MPa

29 Series ZMA Dimensions Supply Pilot pressure exhaust port (PE) (ZMA 151S-K5-T14C) A: Release flow rate adjusting needle with lock nut Pilot valve for supply S: switch trimmer T: Release period adjustment trimmer 1 (Needle fully open) Pilot valve for release Release flow rate adjusting needle Pilot pressure exhaust port (PE) M5 through 3 x Air pressure supply port (P) A port (V) x ø4.5 Mounting hole 13 port (V) 116

30 Ejector With Solid State Timer Series ZMA Manifold Specifications: Series ZZMA Manifold Specifications Manifold style Common air pressure supply port (P) Individual air pressure supply port (P) Common exhaust port Position of common exhaust port (EXH) Max. number of stations Silencer Stacking 1/4 (Rc, NPTF, G) 1/2, 3/4 (Rc, NPTF, G) Right side/left side/both sides Max.1 stations ZZM-SA (With bolts) The common air pressure supply port (P) and individual air pressure supply port (P) can be mounted together. Right and left sides are viewed from the front side of vacuum port (V). Maximum Ejector Stations (Max. operable nos. simultaneously) Manifold model Ejector model ZZMA Stations 6 R L ZMA53 ZMA54 1 ZMA73 ZMA74 ZMA13 ZMA14 5 ZMA133 ZMA134 4 ZMA153 ZMA154 3 ZZMA Stations 6B ZZMA Stations 4 R L ZZMA Stations 4B Effective area of external silencer is 16 mm 2. Cv value:. How to Order Ejector Manifold ZZMA 6 6 R R By viewing the front side of vacuum port (V), stations are counted starting from station 1 on the left side. Number of stations 1 1 station 1 1 stations (max.) Thread type T F Rc NPTF G G thread The thread ridge shape is compatible with the G thread standard (JIS B 22), but other shapes are not conforming to ISO163 and ISO1179. Common air pressure supply port (P) location Both Sides R Right Side L Left Side Right and left side are viewed from the front side of vacuum port (V). Common exhaust port(exh) and silencer location R Right Side L Left Side B Both Sides Note) Right and left side are viewed from the front side of vacuum port (V). Common exhaust port (EXH) Size 4 1/2 6 3/4 S Silencer dedicated for ZZMA (ZZM-SA) Without exhaust port (Compatible with X111) The asterisk ( ) indicates the ejector model no. below the manifold base no. Prefix it to the vacuum unit part numbers to be mounted. When it is not added, products are shipped separately. Example) Manifold model no.: ZZMA4-SR (1 pc.) Ejector model no. : ZMA73H-K5-T14C (4 pcs.) 117

31 Series ZMA Manifold ZZMA Number of ejectors Common EXH port Port position 4 x ø5.6 Mounting hole A: Release flow rate adjusting needle with lock nut 1 (Needle fully open) Pitch Individual air pressure supply port (P) 1/4 (Rc, NPTF, G) Common air pressure supply port (P) 2 x M5 x. Common air pressure exhaust port (PE) A Left Right 2 x Rc1/ port (V) 1/2, 3/4 (Rc, NPTF, G) Common exhaust port (EXH) L L1 L2 L3 Stations 1 2 ±1.5 4 ± ± ± ± ± ± ±1.5 ± ±1.5 ± ± ± ± ± ±2. 12 ± ± ± ± ±2. 14 ± ±2. 16 ± ±2. 16 ±2. 14 ±2. (mm) ±2. 14 ±2. 2 ±2. 11

32 Ejector With Solid State Timer Series ZMA Manifold/With Silencer ZZMA Number of ejectors <Components> Manifold with Silencer Dedicated for Manifold S Position of silencer ZA 4 x ø5.6 Mounting hole A: Release flow rate adjusting needle with lock nut ZX ZR ZM 1 (Needle fully open) ZMA ZQ Pitch P = 16 ZH ZU ZL 1/4 (Rc, NPTF, G) Common air pressure supply port (P) ZY Individual air pressure supply port (P) 2 x M5 x. Common air pressure exhaust port (PE) ZF ZP SP A ZCUK AMJ AMV AEP HEP 2 x Rc1/ (1/-27NPTF, G1/) port (V) Related Equipment Silencer dedicated for manifold L L1 L2 L3 Stations 1 2 ±1.5 4 ± ± ± ±1.5 ± ± ± ± ±1.5 ± ± ± ± ± ±2. 12 ± ± ± ±2. 16 ±2. 14 ± ±2. 14 ± ±2. 16 ±2. 2 ±2. (mm) ±2. 14 ± ±2. 119

33 Series ZMA Specific Product Precautions Be sure to read before handling. Refer to front matters 3 and 39 for Safety Instructions and pages 44 to 46 for Equipment Precautions. Warning Mounting 1. Do not drop or bump. Do not drop, bump or apply excessive impact (1, m/s 2 ) when handling. Even if the switch body is not damaged, the switch may suffer internal damage that will lead to malfunction. 2. Hold the product from the body side when handling. The tensile strength of the power cord is 49 N, and pulling it with a greater force can cause failure. 3. When handling the product, never move or loosen the switch assembly or the switch assembly mounting screws. Warning Wiring 1. Do not allow repeated bending or stretching forces to be applied to lead wires. Wiring arrangements in which repeated bending stress or stretching force is applied to the lead wires can cause broken wires. Warning Pressure Source 1. switches There will be no change in performance if a pressure of approximately.5 MPa is applied momentarily (when releasing vacuum), but care should be taken that pressures of.2 MPa or more are not applied on a regular basis. Warning Operating Environment 1. The product cannot be used in a strong magnetic field. 12