A Resource for Semiconductor Manufacturers Illustrated Parts Guide for Axcelis GSD 200E² 160V
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1 Illustrated Parts Guide for Axcelis GSD 00E² 0V GSD Water Cooled & Non-Water Cooled Bushing and Liner Flange Upgrades Pgs. - Source Body Components Non-Vaporizer / Vaporizer Pgs. -0 Extraction Electrode Version Pgs. - High Current Post Accel Extraction Electrode Assembly/Resolve Housing Aperture Pg. 0 GSD Analyzer Components Pg. Faraday Flag Selective Aperture Components Pg. - GSD EMER Components & Upgrades Pg. - Faraday Strike Plates Pg. 0 G-0-0AH Rev 0
2 Source Body Components Non-Vaporizer 0 See pg. See pg. 0 SHCS - X / SST SHCS - X / SST 000 # Washer, - SST,.0 TH, / ID, / OD Lock Washer No. Internal Tooth # Regular Spring Washer, - SST 000 BHSS -x/ SST K Retainer Pin Assembly Filament Insulator, Ceramic 00 Ball Joint, Graphite 0 0 Skt Joint 00 Arc Chamber Mounting Screw 0 Cathode Wire 0 Repeller, Tungsten 0 A Compression Spring, Stainless 00 A Ceramic Spacer 0 0B Insulator Mounting Block W/ Screws 0 0A Screw Retainer, No Slots 0 0W Cathode Repeller, Fully Dense / Pure Tungsten 0 0GC Cathode Support Plate, Graphite 0 REV A 0 A Repeller Insulator 00 A GSD ELS Cathode, Arc Wire, Tungsten 000 A GSD ELS Filament,.00 0 G-0-0H Rev 0
3 0 0 Nut /- Hex, SST SHCS - X /, SST 000 SHCS 0- X / SST 0000 # WASHER, - SST,.0 TH, / ID, / OD # Flat Washer, Standard, - SST Washer Filament Feed-Thru # Regular Spring Washer, - SST Lock Washer No.0 Regular Spring X /, Button Head Socket Screw, SST X / Button Head Socket Screw, SST 00 O-Ring - Buna N No OEM Reference O-Ring Buna-N 000 Vaporizer Exit Shield No OEM Reference Source Body 0 Shoulder Screw Spring 00 0 Filament Clamp 0 0A Filament Clamp Assembly No OEM Reference 0A- Screw, - X /, Fillister Head, Slotted No OEM Reference Filament Feed Strap 00 0 Insulator, Cathode Feed Thru 0 Feed-Thru Cathode 00 Connector, Feed-Thru / Cathode 0 B Heat Shield Retainer, Used with P/N A 000 A Source Body Shield, Vaporizer Version No OEM Reference B Source Body Shield, Non-Vaporizer Version No OEM Reference 0V O-Ring -0 Buna-N No OEM Reference A Feed-Thru Insulator, Long 0 G-0-0H Rev 0
4 0 SHCS 0- X SST 000 Fitting, Connector, /, / Male NPT, SST 000 BHSS / -0 X SST 00 Fitting, Male Elbow, / TUBE, / NPT, Knob, Plastic Fluted Hand Knob 000 Tube / OD X.00 Wall LDPE Yellow Fitting, QC Series Instrumentation Quick Connect Stem, Key No OEM Reference 0 Fitting, QC Series Instrumentation Quick Connect Stem, Key No OEM Reference 0 Threaded Stud Vaporizer Blank-off Plate No OEM Reference A Source Handle 00 Feed-Thru Connector 000 Positive Feed-Thru 00 0 Negative Feed-Thru 000 Gas Feed Tube Assembly 00 Insulator 0 A Fitting, Union Elbow, / W/O Nut, SST No OEM Reference V O-Ring- Viton 00 A0 Street Elbow, º / NPTF X / NPTM, SST 0 G-0-0H Rev 0
5 Gas Feed Tube and Nozzle Options (Used in place of OEM P/N 00 - Glemco P/N ) Item P/N Description OEM A-S Gas Feed Tube Assembly, Stainless Body, Stainless Fitting No OEM Reference AM-S Gas Feed Tube Assembly, Molybdenum Body, Stainless Fitting No OEM Reference A Gas Feed Nozzle, Tungsten No OEM Reference AG Gas Feed Nozzle, Graphite No OEM Reference AM Gas Feed Nozzle, Molybdenum No OEM Reference G-0-0H Rev 0
6 Source Body Arc Chamber/ Face Plates Non-Vaporizer Item P/N Description OEM GSD ELS Arc Chmb.,. Repeller Hole, No Vaporizer Ports, No Liner Pocket, Tungsten 0 0 GSD Face Plate, R, Molybdenum 0 0 GSD Face Plate, 0R, Molybdenum 0 0C GSD Face Plate 0R Molybdenum 0 0CW GSD Face Plate 0R, Tungsten 0 0T GSD Face Plate, Molybdenum 000 0TW GSD Face Plate, Tungsten 000 0W GSD Face Plate, R, Tungsten 00 0W GSD Face Plate, 0R, Tungsten 0 G-0-0H Rev 0
7 Source Body Components Vaporizer 0 0 SHCS - X / SST SHCS - X / SST 000 # Washer, - SST,.0 TH, / ID, / OD 00 0 Lock Washer No. Internal Tooth No. Regular Spring Washer, - SST 000 BHSS -x/ SST K Retainer Pin Assembly 00 0 Filament Insulator, Ceramic 00 Arc Chamber Mounting Screw 0 0 Cathode Wire 0 Repeller, Tungsten Repeller Screw 00 Arc Chamber, ELS, W/ Vaporizer Ports, No Liner Pocket, Tungsten 0 A Ceramic Spacer 0 0B Insulator Mounting Block W/ Screws 0 0A Screw Retainer, No Slots 0 0W Cathode Repeller, Fully Dense / Pure Tungsten 0 A Repeller Insulator 00 A Cathode, Arc Wire, Tungsten w/.mm Tungsten Button TW Face Plate, T, Tungsten 000 G-0-0H Rev 0
8 0 0 0 SHCS - X / SST 000 SHCS 0- X / SST 0000 # Washer, - SST,.0 TH, / ID, / OD 00 No. Flat Washer, Standard, - SST 00 Washer No.0 Standard - SST No. Regular Spring Washer, - SST Lock Washer No.0 Regular Spring X /, Button Head Socket Screw, SST 00 BHSS - X.0 Long - SST Ball Joint, Graphite 0 SKT Joint 00 Shoulder Screw Spacer 0 Shoulder Screw Spring 00 Retainer Washer, Vaporizer Heat Shield 000 Vaporizer Heat Shield 0 0 Filament Clamp 0 Insulator, Cathode Feed Thru 0 Connector, Feed-Thru / Cathode 0 A Compression Spring, Inconel 00 0 B Heat Shield Assembly 0 C Ball Joint, Alumina 0 C SKT Joint, Alumina No OEM Reference A Compression Spring, Gas Feed, GSD, Long Life Gas Feed, GSD, Long Life 00 G-0-0H Rev 0
9 0 Nut /- Hex SST 0000 Washer Filament Feed-Thru 000 BHSS / -0 X SST 00 O-Ring - Buna N No OEM Reference O-Ring Buna-N 000 Source Body W/ Vaporizer Ports 0 Source Handle 00 Feed-Thru Cathode 00 0V O-Ring -0, Viton No OEM Reference 0 A Feed-Thru Insulator, Long 0 G-0-0H Rev 0
10 0 SHCS 0- X SST 000 Fitting, Connector, /, / Male NPT, SST 000 Fitting, Male Elbow, / TUBE, / NPT, SST 000 Fitting, Union Elbow, /, SST Knob, Plastic Fluted Hand Knob 000 Tube / ODX.00 Wall LDPE Yellow Fitting, QC Series Instrumentation Quick Connect Stem, Key No OEM Reference 0 Fitting, QC Series Instrumentation Quick Connect Stem, Key No OEM Reference 0 Threaded Stud Feed-Thru Connector 000 Positive Feed-Thru 00 0 Negative Feed-Thru 000 Gas Feed Tube Assembly 00 Cooling Tube Assembly 000 Insulator 0 Dual Vaporizer Assembly, -/ Nozzle Thread, 00 V O-Ring, -, Viton 00 A0 Street Elbow, DEG. / NPTF X / NPTM, SS 0 0 G-0-0H Rev 0
11 GSD Water Cooled Bushing and Liner Flange Upgrades Source Liner Flange, Water Cooled, Modified 00MOD 0A Source Flange, Water Cooled, Modified 0MOD A Beam Defining Aperture 00 Source Collar 00 Source Clamp Ring, Graphite 0 Source Shield 0, 0 GSD II Source Bushing, High Voltage 00 G-0-0H Rev 0
12 GSD Non-Water Cooled Bushing and Liner Flange Enhanced Upgrades Item P/N Description OEM A Source Liner Flange, Non-Water Cooled, Modified 00MOD 0C Source Flange, Fixed Clamp Ring, Glemco Design 0 A Beam Defining Aperture 00 B Source Bushing, High Voltage Insulating, Non-Lead 00 C Source Collar, Rigid Mount Non-Floating 00 B Source Shield, Fixed Clamp Flange, Graphite 00 G-0-0H Rev 0
13 Extraction Electrode Version 0 Washer, No.,.0 Thick X. ID X.0 OD, 00 Series, SST X /, Flat Head Socket Screw, - SST X / Flat Head Cap Screw, Slotted, Vented, SST 00 Flat Head Screw, - X /, Slotted, Vented 00-0 X / Slotted PHCS, - SST 00 Extraction Electrode Aperture, Graphite 000 Spacer, Ground Electrode, Graphite 0 Standoff, Ceramic 0 Suppression Strap, Aluminum 00 REV A 0 End Plate, Graphite 0 A00 - X /, Pan Head Phillips Screw, - SST 00 A Ground Electrode Aperture 0 - Shoulder Screw, Lower Extraction Electrode 0 A Insulator Shield, Aluminum 00 A Extraction Electrode, Graphite 0 A Ground Plate, Graphite 0 G-0-0H Rev 0
14 0 00 Ceramic Standoff, / Dia X / Long SHCS - X / SST 000 # Flat Washer, Standard, - SST 00 Fitting, Fast & Tite Male Elbow, White Polypro No OEM Reference - X / Button Head Socket Screw, SST 00 BHSS - x / Electrode Mounting Plate Nut 0 Extension Spring, Short Extension Spring, Long 0 0 Electrode Mounting Plate, Bottom SST Top Electrode Mounting Plate With Cam Assy. 0 A00 - X /, Pan Head Phillips Screw, - SST 00 AV Top Extraction Electrode Assembly Arm, VIG 00 AV Bottom Extraction Electrode Assembly Arm, VIG 0 -L Bellows Shield, Left 0 -R Bellows Shield, Right 00 - Liner, Extraction Electrode 0 A Shield, Extraction Insulator 0 G-0-0H Rev 0
15 0 0 /-0 X Socket Head Cap Screw, SST 00 - X /, SHCS, - SST 000 O-Ring - Buna-N 00-0 X / Slotted PHCS, - SST 00 Readback Harness, Extraction Electrode 0 Lead Screw Assembly No OEM Reference 0 Modified Linear Slide Bearing No OEM Reference Feed-Thru, 0Kv 00 V O-Ring Viton E A - X / Vented Button Head Socket Screw, SST No OEM Reference 0A Modified Linear Slide Bearing No OEM Reference - No. Linear Slide Mtg Plate No OEM Reference - No. Linear Slide Mtg Plate No OEM Reference - Sensor Plate Assembly No OEM Reference -0 Sensor Plate Assembly No OEM Reference - Handle, Extraction Assembly No OEM Reference - Shield Plate No OEM Reference - Brace Clamp No OEM Reference - Bearing Screw Assembly No OEM Reference 0 - Washer Face Jam Nut /- UNF No OEM Reference G-0-0H Rev 0
16 0 0 Hex Head Screw 0- X /, - SST No OEM Reference Dowel Pin /D x / - SST No OEM Reference Nut, 0- Hex, - SST 000 Retaining Ring No OEM Reference - X /, SHCS, - SST SHCS - X / SST 000 SHCS 0- X / SST 00 SHCS 0- X SST 000 Bearing, Angular Contact No OEM Reference 0 Sprocket No OEM Reference 00 O-Ring -0 -Buna-N 00 O-Ring Buna-N 000 A Split Circular Hub Clamp No OEM Reference A Anti Backlash Nut No OEM Reference - Mounting Block No OEM Reference - Bearing Housing No OEM Reference - Bearing Spacer No OEM Reference - Lead Screw Mounting Plate No OEM Reference - Acme Lead Screw,/-, TPI No OEM Reference 0 - Spacer, Leadscrew Assy No OEM Reference G-0-0H Rev 0
17 /-0 X Socket Head Cap Screw, SST 00 VSHCS, /-0 X, - SST Vented, Cap Screw No OEM Reference O-Ring, Buna-N 000 Feed-Thru Shield, Aluminum 0 A Nut, /-0, Hex, Thin (Jam), SST 00 A0 Flat Washer Ø. ID, Ø.0 OD, X.0-.0 No OEM Reference - Extraction Electrode Housing No OEM Reference V- Mounting Plate No OEM Reference B Electrode Insulator, % AlO Not glazed w/ - Threaded Hole. 0 G-0-0H Rev 0
18 Extraction Electrode Version Motor Drive Assembly P/N OEM 0 GSD00 Motor Drive Assembly * P/N A0 Mounting Bolts for P/N Glemco, also offers this component in a convenient individual package. Package includes: P/N OEM 0 GSD00 Motor Tach Assembly (x) P/N A0 Mounting Bolts* FH, M X 0. X mm, 0 Head, Slotted (x) G-0-0H Rev 0
19 GSD Analyzer Components 0 Extension Liner 0 Accel Graphite Tube 0 Exit Liner 0 Inner Exit Shield 00 Liner 0 Threaded Insulating Cap 0 Liner, Magnet, Duct 0 Inner Beam Dump 0 0 Terminal Aperture 00 0 A Post Accel Aperture 00 A Liner 0 A Magnet Analyzer 0 V Liner, Magnet, Duct, Vig 0 G-0-0H Rev 0
20 High Current Post Accel Extraction Electrode Assembly/Resolve Housing Aperture 0 - X /, Set Screw, - SST 000 SHCS -0 X / SST 00 FHSS No.- / LG SST No OEM Reference Wire, Safety, Ø.0, 0 SST Ceramic Standoff, / Dia X / Long X - Thread 0 Bar 00 Small Cup Large Cup Post Accel Aperture 0 0 A Post Accel Aperture Block, Modified, Graphite 0 Electrode Standoff Rev. C 0 Resolving Housing Aperture 0 00A Shield, Extraction Electrode, Graphite No OEM Reference 00C Single Gas Ground Electrode Plate 0 B Extraction Aperture 0 A - X / Flat Head Screw, - SST, º 000 A VSS, - X /, SST 00 00AW Shield, Extraction Electrode, Tungsten 0 0 G-0-0H Rev 0
21 Faraday Flag Selective Aperture Components 0-0 X / Button Head Socket Screw, SST No OEM Reference - X / Button Head Socket Screw, SST X / Button Head Socket Screw, SST X /, Button Head Socket Screw, SST 00 0 Standoff Insulator 0 0 Top Insulator 0 Strike Block, Faraday Flag 00 Rev. A 0 Shield, Faraday Flag 0 Shield, Faraday Flag 00 0 Shield Tube, Selectable, Graphite 00 Shield, Graphite 00 A Magnet,.0 X. X., Samarium Cobalt, Special No OEM Reference 00A Burn-Thru Sensor Plate, Graphite A Selectable Aperture, Graphite Cover Plate, Aluminum G Cover Plate, Graphite Bracket, Magnet, Right Bracket, Magnet, Left Support Plate, Bracket 00 G-0-0H Rev 0
22 *See Note * Note: P/N T - Feed Thru Installation Tool This handy tool is designed to help hold the Feed-Thru stationary while tightening the hex nut with a wrench. SHCS /-0 X. No OEM Reference Seal Block, GSD & HE Faraday Flag 00 K O-Ring.ID X.0W, 0 Kalrez A Washer, Flat.0 ID X.00 ODX.00 Thick, Black Oxide Finish No OEM Reference A Washer, Lock, / Regular Spring.0ID,.OD,.0 Thick Black Oxide Finish No OEM Reference Amp Mini MHV Coaxial Connector, Feed-Thru 0 0- Faraday Cup 00 G-0-0H Rev 0
23 0 0 Nut -0 Hex - SST X /, SHCS, SST SHCS - x.0 SST 00 No. Flat Washer,.0 Thick, SST 0000 SHCS /-0 x.0, Alloy No OEM Reference 0 Lock Washer REG. Spring.0 ID,.0 OD,.0 Thick No. K000 0 Lock Washer No.0 Regular Spring 000 Shaft Clamp Spacer, SST 0 A O-Ring -0 Buna-N No OEM Reference 0 A Limit Switch 00 A Fitting, / NPT Male 0 A Air, Cylinder Bore X. Stroke No OEM Reference A Flow Control, Recessed No OEM Reference A Washer, Flat.0 ID X.00 ODX.00 Thick No OEM Reference A Washer, Lock, / Reg. Spring.0ID,.OD,.0 Thick No OEM Reference A Nut, Hex 0-, Nylon No OEM Reference A PH, 0- X, Nylon Slotted No OEM Reference A SHCS /-0 X -/, Alloy No OEM Reference A PH, -0 X / Slotted Pan HDSS - No OEM Reference 0 A Washer, Shoulder,.0 ID,.00 OD X.00 Lng Shoulder,. OD X.0 Shank Lth., Nylon Arm, Limit Switch Activator Cover Manifold Support Plate, Bracket 00 G-0-0H Rev 0
24 Upgraded Faraday Flag Aperture Components Spacer, Strike Plate, Graphite 00 Strike Plate, Graphite 0 B Selectable Aperture No OEM Reference C Selectable Aperture Electrode, mm,.mm, mm 00 V Spacer Strike Plate, Graphite VIG 00 AV Strike Plate, Serrated, Graphite VIG 0 G-0-0H Rev 0
25 GSD EMER Components P/N A 0 0 A SHCS, -0 X -/,-, SST S000 A O-Ring, -, Buna-N 000 SHCS, -0 X /, SST SHCS, -0 X /, -, SST 00 SHCS, 0- x /, Long, SST 00 Washer, Flat, #,.0 Thick X. ID X.0 OD, 00 Series, SST 000 Washer, Flat, #, Standard, -, SST 00 0 Washer, Lock, Regular Spring, #,.0 Thick X.0 ID X.0 OD, SST K000 0 Washer, Lock, Regular Spring, #0,.0 Thick X.00 ID X. OD, SST Washer, Lock, Regular Spring, #,.00 Thick X. ID X. OD, SST BHSS, - X / Long, -, SST 00 BHSS, - X / Long, -, SST 000 V O-Ring, -0, Viton 00 Magnetic Deflector Magnet 0 0 Front Shield, Electromagnetic Energy Reflector, Graphite 0 0A Rear Shield, Electromagnetic Energy Reflector, Graphite 0 - Base Plate No OEM Reference - Support Arm, EMER Assembly Mounting Block, Magnet Insulator, Feed-Thru Connector No OEM Reference - EMER Electronics No OEM Reference - Ground Strap No OEM Reference -0 Insulator, Feed-Thru No OEM Reference A- Side Plate No OEM Reference Bias Ring Aperture Insulator 0 Amp Mini MHV Coaxial Connector, Feed-Thru, Potted w/ Teflon Insulated Lead Wire 0 Aperture, Back Bias, EMER Assembly, Graphite 0 G-0-0H Rev 0
26 Electron Shower Components 0 SHCS -0 X / SST X /, SHCS, SST X / SHCS, SST Washer Flat X.0 Thick SST # Regular Spring Washer, - SST BSHG Snap Insulator 00 Electron Shower Aperture Entrance 0 REV A Electron Shower Target, Graphite 0 A Electron Shower Tube 0 0 A Electron Shower Tube Insulator 00 REV A G-0-0H Rev 0
27 0 * Note Also available E-Shower Upgrade Kit P/N K0A Kit Includes: 0A (x) A (x) (x) 0A (x) (x) 00 O-Ring -0 Buna-N 0 / E0000 / 000 SHCS -0 X / SST 000 / 00 / 000 O-Ring - Buna-N 000 E-Shower Base Insulator No OEM Reference Clamp Feed Strap A00 Feed-Thru Insulator S REV A A O-Ring - Buna-N 00 0A Electron Shower Feed-Thru, For Glemco Design No OEM Reference A Strap Mount, S 0 0A Spacer, for Glemco Design, Vespel No OEM Reference Feed-Thru Nut, 0-, SST S G-0-0H Rev 0
28 0 SHCS -0 X / SST 0000 SHCS - X / SST 000 / 000 No. Flat Washer,.0 Thick, SST 0000 / 000 / 00 # Flat Washer, Standard, - SST 00 / 00 / # Lock Washer,. ID. OD SST 000 E-Shower Aperture, Graphite 0 Strap Straight, Silver 0 A BHSS - x / - SST 000 A -x/ Fillister HD Slotted 00 0 A SHCS, -0 X / SST No OEM Reference 0A E-Shower Filament 00 REV A HC E-Shower Filament Insulator, Boron Grad, HBC 0 0A Filament Mount, One Piece Type 0 / 000 0A Expansion Strap, RT, E-Shower Silver Strap 0 G-0-0H Rev 0
29 V Bellows Liner Components 0 V Bellows Liner Flange, Aluminum 000 0A V Bellows Liner Flange, Custom, Aluminum 000 0B V Bellow Valve Door Interface, Aluminum V Bellows Liner, Kapton 000 G-0-0H Rev 0
30 Faraday Strike Plates Faraday Strike Plate, Disc 0 Faraday Strike Plate, Disc 0 Faraday Strike Plate, Disc 0 Faraday Strike Plate, Disc 00 0 G-0-0H Rev 0
31 End Station Components Item P/N Description OEM C No. - Wafer Arm Guide, 0mm, ESD Conductive Material 00 C No. - Wafer Arm Guide, 0mm, ESD Conductive Material 00 C No. - Wafer Arm Guide, 0mm, ESD Conductive Material 00 0A Unclamper Roller Assembly 00 G-0-0H Rev 0
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1 CHASSIS, CHANNEL, MAIN, ST, PAINTED, OIL FIRED 1 JD8000 2ASSY SEE FIG 1-7 BLOWER, AIR, ASSY, 6" OD X 4" W X 1/2" SHAFT 1 JB2000 3ASSY SEE FIG 1-1
1 CHASSIS, CHANNEL, MAIN, ST, PAINTED, OIL FIRED 1 JD8000 2ASSY SEE FIG 1-7 BLOWER, AIR, ASSY, 6" OD X 4" W X 1/2" SHAFT 1 JB2000 3ASSY SEE FIG 1-1 BURNER, GUN, OIL, DOUBLE, ELECTRODE 1 JB1000 4 TANK,
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1 CHASSIS, CHANNEL, MAIN, ST, PAINTED, OIL FIRED 1 JD8000 2ASSY SEE FIG 1-10 BLOWER, AIR, ASSY, 6" OD X 4" W X 1/2" SHAFT 1 JB2000 3ASSY SEE FIG 1-2
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