AMAT 9500 Series & xr

Transcription

1 Illustrated Parts Guide for AMAT 900 Series & xr

2 Top View

3 Top View A Retainer, Front Plate, Molybdenum G Front Plate Half, Graphite Liner, Side Plate, Tungsten Filament End Plate Liner, Graphite Filament Insert, Molybdenum A Filament Insert, Modified, Molybdenum W Filament Insert, Modified, Tungsten No OEM Reference 900 Filament Repeller End Liner Plate Anti-Cathode Repeller, Tungsten A Anti-Cathode Repeller - Anti-Flake, Tungsten Base Plate Liner, Tungsten Arc Chamber Body, Graphite 000-

4 Top View B 9 M Washer, Flat, SST M Spring Washer, SST SHCS, M x 0mm Vented, SST Retainer Pin Assembly No OEM Reference 900- Plug, Arc Chamber Port No OEM Reference 900- Port, Arc Chamber Oven Post Nozzle, (Anitmony) 000-

5 Top View C SHCS, M x 0 mm,. PITCH, SST SHCS, M X mm,. PITCH, SST No OEM Reference M Washer, Flat, SST M Spring Washer, SST No OEM Reference 0 Vented Hex Head Screw, M x mm, SST No OEM Reference 900 Clamp, Anti-Cathode Insulator Shield Insulator Mounting Block Assembly, Anti-Cathode End Screw Retainer Thumb Screw

6 Top View D M Hex Nut SHCS, M x 0 mm,. PITCH, SST SHCS, M X mm,. PITCH, SST No OEM Reference M Washer, Flat, SST M Spring Washer, SST No OEM Reference 0 Vented Hex Head Screw, M x mm, SST No OEM Reference 900 Positive Filament Clamp, Molybdenum 000-, 000-, Negative Filament Clamp, Molybdenum 000-9, 000-9, Filament Clamp Insert Filament Clamp Screw, SST Insulator Shield Insulator Mounting Block Assembly Screw Retainer Thumb Screw

7 Top View E M Hex Nut Retaining Ring No OEM Reference 0 SHCS, Cap Screw, - x, Alloy No OEM Reference M Flat Washer, SST M Flat Washer, SST M Spring Washer, SST M Spring Washer, SST No OEM Reference 0 O-Ring, -, Buna N No OEM Reference Anti-Cathode Ground Strap Filament Strap, Silver Feed-Thru Bushing Source Body 000-9

8 Bottom View

9 Bottom View A SHCS, M x 0 mm,. PITCH, SST M Flat Washer, SST M Flat Washer, SST M Spring Washer, SST Washer, Lock, M Regular Spring,. mm ID,. mm OD, - SST No OEM Reference Tubing, Polyurethane,. OD x. ID. No OEM Reference As Needed Tubing Clamp, +/, Nylon No OEM Reference / Push Connect Tube Fitting, / Male NPTF Thread No OEM Reference 9 00 Quick Connect Body, /- NPT No Key No OEM Reference 0 SHCS, M X 0MM,. Pitch, - SST Gas Feed Tube Assembly No OEM Reference 900 Gas Feed Tube Adapter Assembly Face Seal Washer Manifold Assembly, Brass

10 Bottom View B SHCS, M x 0 mm,. Pitch, SST No OEM Reference 9 SHCS, M x mm,. PITCH, SST SHCS, M X mm,. pitch, - SST No OEM Reference 0 SHCS, M X mm,. pitch, - SST M Flat Washer, SST M Flat Washer, SST M Spring Washer, SST M Spring Washer, SST M Flat Washer, SST M Spring Washer, SST M Flat Washer, SST No OEM Reference M Spring Washer, SST No OEM Reference SHCS, M X 0MM,. Pitch, - SST SHCS, M- X 0mm, - SST A Feed Thru Assembly , Feed-Thru Stabilizer, Derlin No. Diode Assembly No. Diode Assembly

11 Bottom View C O-Ring, -, Buna-N SHCS, M X mm,. PITCH, Cap Screw, - SST M Flat Washer, SST Washer, M Spring Lock Washer Washer, Lock, M Regular Spring. mm ID,. mm OD, - SST No OEM Reference 0. Banana Jack Adapter, - No OEM Reference BHSS, M X 0MM,. PITCH, - SST No OEM Reference 900 Vaporizer Blank-Off Plate, Aluminum No OEM Reference Handle V O-Ring, -, Viton 00-90

12 Dual Bellows Extraction Assembly Components 900 Ground Electrode, Graphite Electrode Suppression, Graphite Mounting Suppression Electrode, Graphite Bracket, Ground Electrode Assembly, Graphite Suppression Electrode Bracket Mounting Ground Electrode, Graphite Spacer, Graphite Suppression Ring 000-0

13 Source Chamber Components 90 Shield, Source Chamber, Graphite Liner, Clamp Plate, Graphite 000-

14 Glemco Customized Design Flight Tube - 90-S OEM: V O-Ring, -, Viton No OEM Reference A9V O-Ring, -, Viton No OEM Reference B0V O-Ring, -, Viton No OEM Reference 90-S Flight Tube, 900 IHC 000-9

15 MRS Components 9 Item P/N Description OEMs 90 Pre-Defining Aperture, mm X mm, Graphite Post MRS Slit, mm X mm Aperture, Graphite Pre-MRS Slit, Graphite A Pre-MRS Slit, Graphite A MRS Vane, Graphite 9,, , 000-0, C MRS Vane, Extended Life, Graphite 9,, , 000-0, Post MRS Slit, mm X mm Aperture, Graphite, Pre-Defining Aperture, 0mm X mm, Graphite V Pre-Defining Aperture, 0mm X mm, Graphite, VIG 000-9

16 Moveable PA Components 909 Side Screen, Entry Tube, Graphite Shield, Guide Tube Side, Graphite V Shield, Guide Tube Side, Graphite, VIG Electrode, EH, Graphite 000-9

17 End Station Components 90 Beam Stop, Graphite A Beam Stop, Leap II, Graphite D pc. Fixed Restraint, 900/Xr00, ESD DA pc. Fixed Restraint, 00mm, 900/Xr00, Bearing Grade D Moving Clip Assembly, 00mm, DR Moving Clip, Refurbishment, 00mm, REF K90D Restraint Kit, 00mm, ESD, 900/Xr00, ESD Includes: of 90D- & of B No OEM Reference