AMAT VIISTA MEDIUM CURRENT Replacement Components and Assemblies

Transcription

1 Copyright 2016 PLANSEE SE. All rights reserved. Mar 1, _46896_VIISTAMC - AMAT VIISTA MEDIUM CURRENT - Replacement Components and Assemblies

2 AMAT VIISTA MEDIUM CURRENT Plansee No. Description BERNAS SOURCE BERNAS LINER SOURCE BERNAS LINER OPTIONS /900 IHC SOURCE /900 CLAMP OPTIONS EXTRACTION XE/XER/900 EXTRACTION ANALYZER RESOLVING APERTURE ELECT UPSTREAM ACCEL COLUMN PLASMA FLOOD 2 Mar 1, 2016

3 BERNAS SOURCE SIDE PLATE, GAS NOZZLE 1 EA E SIDE PLATE 1 EA E FILAMENT BERNAS ARC SOURCE 2 STK E /001/ BASE PLATE, BERNAS A/C 1 EA E ARC CHAMBER TOP 1 EA E END PLATE, BERNAS 1 EA E REFLECTOR, THREADED 2 EA E INSULATOR, OUTER 2 EA E BAFFLE, INNER INSULATOR 2 EA E INSULATOR, INNER BERNAS 2 EA E GRAPHITE INSERT 2 EA E FILAMENT INSULATOR 4 EA E INSULATOR, FILAMENT, BERNAS 8 EA E SOURCE FILAMENT CLAMP 4 EA E GAS FEED TUBE 1 EA E RETAINER HOOK 4 EA E Mar 1, 2016

4 BERNAS LINER SOURCE A/C SUPPORT PLATE 1 EA PLANSEE DESIGN GAS FEED RETAINER 1 EA PLANSEE DESIGN GAS FEED TUBE 1 EA PLANSEE DESIGN GAS NOZZLE 1 EA PLANSEE DESIGN END LINER TEXTURED 2 EA PLANSEE DESIGN SIDE LINER W/ NOZ TEXTURED 1 EA PLANSEE DESIGN VIISTA A/C TOP 1 EA PLANSEE DESIGN VIISTA A/C TOP SHIM 1 EA PLANSEE DESIGN SIDE LINER TEXTURED 1 EA PLANSEE DESIGN BASE LINER, VAP. 1 EA PLANSEE DESIGN INSULATOR, CAPTIVE, VIISION 4 EA PLANSEE DESIGN VAPORIZER NOZZLE 2 EA PLANSEE DESIGN SOLID CHBR, CAPTIVE INSUL. 1 EA PLANSEE DESIGN SOLID CHBR, CAPTIVE INSUL. 1 EA PLANSEE DESIGN BASE LINER 1 EA PLANSEE DESIGN Plansee-designed Bernas liner source reduces cost of consumables and conserves gas while maintaining source life and performance. Available for tools with or without vaporizers. 4 Mar 1, 2016

5 BERNAS LINER OPTIONS END LINER 2 EA PLANSEE DESIGN SIDE LINER W/ NOZ 1 EA PLANSEE DESIGN SIDE LINER 1 EA PLANSEE DESIGN BASE LINER, VAP. 1 EA PLANSEE DESIGN BASE LINER 1 EA PLANSEE DESIGN END LINER TEXTURED 1 EA PLANSEE DESIGN SIDE LINER W/ NOZ TEXTURED 1 EA PLANSEE DESIGN SIDE LINER TEXTURED 4 EA PLANSEE DESIGN BASE LINER TEXTURED, VAP 1 EA PLANSEE DESIGN BASE LINER TEXTURED, NON-VA 1 EA PLANSEE DESIGN Use 40 or 90 with vaporizer feed and 50 or 100 with gas only ion source. Textured liners are recommended for use where deposits or flaking are likely to cause source failure. All textured liners are reversible and reusable. 5 Mar 1, 2016

6 /900 IHC SOURCE SHCS, 6-32,.375LG, SST 2 EA E CLAMP ARM, PH1 2 EA E CLAMP FILAMENT VER.2 IHC 2 STK E FILAMENT, PH1, W 1 STK E SHCS, 4-40,.460LG, MO 1 EA E TZM CLAMP CATHODE VER.2 IHC 1 STK E CATHODE, HC 1 STK E END CAP, IHC SOURCE 1 STK E PLATE, SIDE, IHC ARC CHAMBER 2 STK E SOURCE FRONT PLATE 1 EA E PLATE, END, REP 1 STK E REPELLER, HC 1 STK E REPELLER CLAMP, HC 1 STK E MC CLAMP ARM, IHC 2 EA E SST SHCS.625LG 2 EA E STRAP, FILAMENT CLAMP, LEFT, PH2 1 EA E STRAP, FILAMENT CLAMP, RIGHT, PH2 1 EA E STRAP CATHODE VER.2 IHC 1 STK E INSULATOR, DUAL MOUNT, HC 4 EA E NUTPLATE, BARCLAMP, HC/MC 2 STK E NUT, 4-40, MO 1 EA E PLATE, BASE, IHC ARC CHAMBER 1 STK E GRAPHITE INSERT 1 EA E GAS TUBE, IHC, SOURCE 1 EA E CLAMP, CATHODE STRAP, IHC 1 EA E INSULATOR, BASE FEEDTHRU 1 EA E (EG:25317) BASE PLATE, A/C, PH2, NV, ASSY 1 AS PLANSEE DESIGN See Supporting Document for base plate (220) modified design. See Shaftless cathode section for extended service life. 6 Mar 1, 2016

7 /900 IHC SOURCE 7 Mar 1, 2016

8 /900 CLAMP OPTIONS CLAMP, FILAMENT, LEFT, PH2 1 EA E CLAMP, FILAMENT, RIGHT, PH2 1 EA E CLAMP, CATHODE, PH2 1 AS E SHCS, 4-40,.460LG, MO 2 EA E NUT, 4-40, MO 2 EA E CLAMP ARM, PH2/3 2 STK PLANSEE DESIGN FILAMENT CLAMP, PH 2/3 2 EA PLANSEE DESIGN NUT PLATE, BARCLAMP, HC/MC 4 EA E SHCS, 6-32,.375LG, SST 2 EA E MC CLAMP ARM, IHC 2 EA E CATHODE CLAMP, VHC 1 EA E INSULATOR, OUTER 1 EA E SHCS, 4-40,.460LG, MO 1 EA E NUT, 4-40, MO 2 EA E CLAMP, REPELLER, VIISTA 1 EA Plansee advises switching to the two-piece clamps (#60-150) for reduced cost of ownership. 8 Mar 1, 2016

9 EXTRACTION GROUND ELECTRODE, EA E SUPPRESSION ELECTRODE 1 EA E EXTRACTION BLOCK SPACER 1 EA E INSULATOR, 60 KV 3 EA E GROUND ELECTRODE FRAME 1 EA PLANSEE DESIGN SUPPRESSION ELECTRODE FRAME 1 EA PLANSEE DESIGN GRAPHITE SCREW 4 EA PLANSEE DESIGN INSERT, ELECTRODE, VMC, GPH 2 EA PLANSEE DESIGN INSERT, ELECTRODE, VMC, W 2 EA PLANSEE DESIGN Standard OEM and Plansee-designed insert versions shown. The Plansee-designed insert can be used in suppression or ground electrode frame (identical mounting). Any combination of graphite or tungsten inserts can be used. Typical customer configurations are either all graphite inserts (80), or tungsten insert (90) in suppression (60) with graphite insert (80) in ground (50). 9 Mar 1, 2016

10 XE/XER/900 EXTRACTION FRAME, SUPP ELECTRODE, XER, XPT 1 EA PLANSEE DESIGN GRAPHITE SCREW 4 EA PLANSEE DESIGN GROUND ELECTRODE, FRAME 1 EA PLANSEE DESIGN BLOCK, SPACER, GRAPHITE 1 EA E PLATE, SUPPRESSION 1 EA E INSULATOR, SUPPRESSION ASSY 2 EA E INSULATOR, SUPPRESSION ASSY 2 EA E INSERT, ELECTRODE, VMC, GPH 2 EA PLANSEE DESIGN INSERT, ELECTRODE, VMC, W 2 EA PLANSEE DESIGN SUPPRESSION ELECTRODE 1 STK E Standard OEM and Plansee-designed insert versions shown. The Plansee-designed insert can be used in suppression or ground electrode frame (identical mounting). Any combination of graphite or tungsten inserts can be used. Typical customer configurations are either all graphite inserts (70), or tungsten insert (80) in suppression (10) with graphite insert (70) in ground (30). The one-piece tungsten suppression electrode (90) is the standard OEM part, but cost can be reduced significantly by using the frame and insert design. Plansee does not currently offer a standard one-piece ground electrode (E ). 10 Mar 1, 2016

11 ANALYZER LINER, BOTTOM POLE 1 EA E LINER, TOP POLE 1 EA E APERTURE ENTRANCE 1 EA E Mar 1, 2016

12 RESOLVING APERTURE INSULATOR 2 EA E INSULATOR 2 EA E FARADAY SHIELD 1 EA E SHIELD, APERTURE, EXIT 1 EA E HOUSING LINER 1 EA E RESOLVING APERTURE SHIELD 1 EA E SHIELD AND EXIT, RESOLVING 1 EA PLANSEE DESIGN APERTURE The likelihood of aperture burn-through and subsequent beam strike to vacuum chamber wall is reduced by combining shield and exit aperture in a single (monolithic) component. Plansee recommends use of the one-piece design (70) to limit damage to the vacuum chamber wall. This piece is represents the combination of OEM#s E & E Mar 1, 2016

13 ELECT UPSTREAM ACCEL COLUMN ACCEL COLUMN, INSERT 1 EA PLANSEE DESIGN ACCEL COLUMN, FRAME 1 EA PLANSEE DESIGN SCREW, FH, GPH, 632,.22LG 2 EA PLANSEE DESIGN The two-piece Plansee-design reduces cost and improves wear characteristics of the beam defining surfaces. The design utilizes higher density/hardness material for the insert at a lower cost than the overall electrode. Plansee does not currently offer a standard one-piece electrode (E ). 13 Mar 1, 2016

14 PLASMA FLOOD PFG APERTURE 1 EA E PFG FILAMENT, EA E FILAMENT CLAMP, PFG, EA E PFG FILAMENT INSULATOR 1 EA E NUT, FILAMENT CLAMP 2 EA E RETAINER, PFG FILAMENT 2 EA E PFG APERTURE 1 EA E PFG FILAMENT 1 EA E CLAMP, FILAMENT 2 STK E CLAMP HOLDER, W 2 EA E FILAMENT INSULATOR, PFG 1 EA E NUT, FILAMENT CLAMP 2 EA E RETAINER, PFG FILAMENT 2 EA E FILAMENT BERNAS PFG 1 STK G PIG TAIL FILAMENT PFG JIG 1 STK PLANSEE DESIGN Version 1 Older version designed for the 810 tool. Not shown in this assembly is the clamp holder piece that is used with the older PFG assembly Version 2 Most fabs currently using this design. Extended life filament (140) should only be used on Version 2. Alignment jig (150) for extended life filament not shown. 14 Mar 1, 2016