PHI nanotof II w/phi LMIG Consumable Parts List
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1 Consumable Parts List Contents VACUUM SYSTEM... 2 PUMPS... 2 GAUGES... 2 GASES... 2 E-GUN NEUTRALIZER... 2 ION NEUTRALIZER... 2 ION DETECTOR... 3 SAMPLE CHAMBER... 3 SAMPLE STAGE... 3 COMPONENT PARTS... 4 PHI LMIG COLUMN... 4 PHI LMIG SOURCE TIPS... 4 OPTIONAL HARDWARE... 5 C60 SOURCE... 5 CESIUM SOURCE ION GUN/ION NEUTRALIZER... 5 GAS CLUSTER ION BEAM (GCIB)... 5 MS/MS... 6 MISCELLANEOUS... 7 FUSES... 7 SEALS (Gaskets/O-Rings)... 7 LAMPS/FOIL/BULBS... 7 COMPUTER/PRINTER... 8
2 Part Number Description Quantity VACUUM SYSTEM PUMPS ION PUMP, 25 L/S ION PUMP, 45 L/S, CONV, 4.5 CFF ION PUMP, 15 L/S, DI, 2.75 FLANGE OIL RESERVOIR, HiPace TIP SEAL KIT-EDWARDS SCROLL PUMP MODEL nxds 15I 1 GAUGES FIL-GAUGE, ION ELECT DEGASS, GRANVILLE-PHILLIPS MICRO-ION PLUS GAUGE REPLACEMENT FILAMENT VARIAN ION GAUGE VARIAN THORIA COATED IRIDIUM FILAMENT KIT 1 1 GASES ARGON-LECTURE BOTTLE, 1400 PSI OXYGEN-LECTURE BOTTLE, 1400 PSI ASSY-GAS CYLINDER, OXYGEN 1 E-GUN NEUTRALIZER ASSEMBLY-FOR E-GUN NEUTRALIZER-Y2O3 1 ION NEUTRALIZER ASSEMBLY-IONIZER 1
3 ION DETECTOR MCP, MATCHED SET, 25mm, HOT 1 SET PHOSPHOR SCREEN 1 SAMPLE CHAMBER SEAL-FRAME O-RING, MM MULTIPLIER-ELECTRON, SEM DETECTOR O-RING, VITON (Intro Lid Seal) 1 SAMPLE STAGE Ball-Zirconia (Stage HV Isolation) 3
4 COMPONENT PARTS PHI LMIG COLUMN APERTURES-STRIP, LMIG APERTURES-STRIP, INDUSTRIAL, LMIG APERTURES-STRIP, FIB-MSMS, LMIG RETAINER-APERTURE STRIP O-RING-ISOLATION VALVE -009,.208ID, 0070W, VITON ELECTRODE-CHICANE, STOP, LMIG 1 PHI LMIG SOURCE TIPS ASSEMBLY, EMITTER, GOLD, LMIG ASSEMBLY, EMITTER, BISMUTH, LMIG ASSEMBLY, EMITTER, GALLIUM, LMIG EXTRACTOR APERTURE INSERT TANTALUM APERTURE 1
5 OPTIONAL HARDWARE C60 SOURCE C60 POWDER CARTIRIDGE 250mg C60 FILAMENT ASSEMBLY (E1487A) C60 TEMPERATURE SENSOR C60 HEATER C60 300µm APERTURE C60 100µm APERTURE C60 30µm APERTURE 1 CESIUM SOURCE ASSY-VALVE, CESIUM 5 GRAM FRIT ASSEMBLY GASKET-4.5 FLANGE ION GUN/ION NEUTRALIZER ASSY-IONIZER (Long Life) ASSY-IONIZER, O2 1 GAS CLUSTER ION BEAM (GCIB) HIPACE 300 TURBO PUMP OIL WICK HIPACE 80 TURBO PUMP OIL WICK ROUGH PUMP OIL (PFEIFFER PUMP) SKIMMER, GCIB FILAMENT ASSEMBLY INSTALLATION KIT 1
6 LENS-CERAMIC INSULATOR SOURCE-CERAMIC INSULATOR FEEDTHRU FLANGE GASKET, STAINLESS STEEL (SWAGELOK)-SS-4-VCR-2-GR 10 MS/MS MULTIPLIER CHANNELPLATES PHOSPHOR SCREEN GASKET-2VCR RESISTOR 100KΩ 1
7 MISCELLANEOUS FUSES FUSE-0.4A, 250V, S/B, 5 X 20mm, IEC FUSE-0.2A, 250V, S/B, 5 X 20mm, IEC FUSE-10A, 250V, S/B 5 X 20, SHT FUSE-PICO, 0.25A, 125V, N/B, RDL, ROHS FUSE-PICO, 2.5A, 125V, N/B, RDL, ROHS FUSE-PICO, 1A, 125V, N/B, RDL, ROHS FUSE-5A, 250 V, S/B 5 X 20mm, IEC FUSE-MICRO,.050A,125V,V/F,RDL.ROHS-RBD PICOAMMETER 1 SEALS (Gaskets/O-Rings) TIP SEAL KIT-EDWARDS SCROLL PUMP MODEL NXDS 15I GASKET RET ASY CU4VCR2GR GSKT-ALT, 0665 X 4.50 FLANGE, 2.86 ID KIT-GASKET, 1.33 OD FLANGE, (10) KIT-GASKET, 2.75 OD FLANGE, (10) KIT-GASKET, 3.37 OD FLANGE, (10) KIT-GASKET, 4.50 OD FLANGE, (10) KIT-GASKET, 6.00 OD FLANGE, (10) KIT-GASKET, 8.00 OD FLANGE, (10) GASKET-Cu, 4.5 FLANGE,.10 THICK, CLEAN (5) INTRO SEAL-FRAMED O-RING-GLT60, ZAPT, MM GASKET, STAINLESS STEEL (SWAGELOK)-SS-4-VCR-2-GR 10 LAMPS/FOIL/BULBS
8 LAMP-FOSTEC-150 WATT LAMP, HALOGEN, 150W, 120V ALUMINUM FOIL-18 WIDE X 250 FOOT ROLL 1 COMPUTER/PRINTER ALL PC AND PRINTER MEDIA ARE CONSUMABLE
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Consumable Parts List Contents VACUUM SYSTEM... 2 PUMPS... 2 GAUGES... 2 GASES... 3 SEALS (Gaskets/O-Rings)... 3 COMPONENT PARTS... 4 ANALYZER... 4 ION GUNS... 4 X-RAY MONOCHROMATOR... 4 NEUTRALIZER...
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Consumable Parts List... 2 VACUUM SYSTEM... 2 PUMPS... 2 GAUGES... 2 GASES... 2 SEALS (Gaskets/O-Rings)... 3 COMPONENT PARTS... 4 ANALYZER... 4 ION GUN... 4 X-RAY MONOCHROMATOR... 4 NEUTRALIZER... 4 MISCELLANEOUS...
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