To order spares for systems not under warranty contact:

Transcription

1 Press the model number to link to desired product , , , 682, Holders To order spares for systems under warranty contact: To order spares for systems not under warranty contact:

2 Service Parts, Spares and Consumables - Model 600 P/N Description Picture Category & Products Model 600 Standard Octogun Cathode Cover 600 Standard Octogun High Voltage End Cap Assembly (Excludes Teflon Connector ) 600 Standard Octogun Ceramic Insulator 600 Standard Octogun Anode 600 Standard Octogun Eight Aperture Cathode, Stainless Steel, Standard 600 Standard Octogun Cathode Screw, 1/Pack 600 Standard Octogun Octogun O-Ring kit, Viton (For all 4 guns) 600 Standard Octogun Page 2 of 86

3 Service Parts, Spares and Consumables - Model 600 Model 600 Whisperlok Raise/Lower System Flanged Fluoroseal with Lip 600 Whisperlok Raise/Lower System Whisperlok O-Ring kit (2 Assemblies, compatible with RIBE) 600 Whisperlok Raise/Lower System Model 600 Specimen Chamber Viewing Port Window, 50mm Diameter x 3mm Thickness 600 Specimen Chamber Sputter Shield Window, 32mm Diameter x 2.5mm Thickness 600 Specimen Chamber Teflon Connector 600 Specimen Chamber Airlock O-ring Kit Viton (For 2 assemblies) (2x#026, 2x#117, 2x#120, 2x#122, 2x#136, 4x#154, 2x#224) Missing Image 600 Specimen Chamber Main Work Chamber O-Ring Kit Viton 600 Specimen Chamber Page 3 of 86

4 Service Parts, Spares and Consumables - Model 600 Model 600 Penning Gauge Penning Gauge Repair Kit (Batch #'s 26-28, o-rings x3 & P/N cathode) Missing Image 600 Penning Gauge Penning Gauge Repair Kit (Batch #'s 29 & up, o-rings x3 & P/N cathode) (Also used in PIPS and IBC, Batch #'s 1-6) 600,681,691 Gauges - MDP Manifold Model 600 Specimen Holders A3 Standard Specimen Holder, 3mm 600 Specimen Holders B3 Cold Stage Specimen Holder, 3mm 600 Specimen Holders C3 Specimen Holder Short Base, 3mm Missing Image 600 Specimen Holders Plate Retaining Screw (00 90x1/8) x Specimen Holders Specimen Support Plate, 3mm Molybdenum, 5/Pack 600 Specimen Holders Page 4 of 86

5 Service Parts, Spares and Consumables - Model Specimen Clamping Plate, 3mm Molybdenum, 5/Pack 600 Specimen Holders Page 5 of 86

6 Service Parts, Spares and Consumables - Model P/N Description Picture Category & Products V, 170mA Lamp (Used in old Disc Cutter also in old 656 Dimple Grinder and Microscope),656 Lamps V Lamp for Stereo Microscope on Dimple Grinder, 5/Pack, 656 Lamps Microscope Power Cord Electronics Ultrasonic Cutting Head (Includes Threaded Adapter) Electronics Coil Assembly (Transformer) Electronics Dial Indicator (Includes adapter) Mechanical Washers, Copper, 5/Pack Mechanical Page 6 of 86

7 Service Parts, Spares and Consumables - Model Specimen Table (Standard, non-magnetic) Slurry Retaining Ring (Includes o-ring) Slotted Specimen Mount, 4/Pack Cutting Tool Wrench Magnetic Base Base for Hexagonal Indexing Specimen Table Specimen Table (X-Y Positioning) Page 7 of 86

8 Service Parts, Spares and Consumables - Model Rectangular Alignment Plate 4X5mm (Teflon jaw). (This item fits the Vice below) Clamping Vice Brass Tubes, 3mm Dia x 33mm Long, 10/Pack Epoxy Mixing Cup (Teflon) Teflon Mold Syringe Kit Circular Cutting Tool, 3.0mm Disc Diameter Cutting Tools Page 8 of 86

9 Service Parts, Spares and Consumables - Model Circular Cutting Tool, 2.7mm Disc Diameter Cutting Tools Circular Cutting Tool, 2.3mm Disc Diameter Cutting Tools Circular Cutting Tool, 0.25mm Hole Diameter Cutting Tools Circular Cutting Tool, 0.5mm Hole Diameter Cutting Tools Circular Cutting Tool, 2mm Hole Diameter Cutting Tools Circular Cutting Tool, 4mm Hole Diameter Cutting Tools Circular Cutting Tool, 1mm Hole Diameter Cutting Tools Page 9 of 86

10 Service Parts, Spares and Consumables - Model Circular Cutting Tool, 1.1mm Hole Diameter Cutting Tools Rectangular Cutting Tool, 1mm x 2mm Cutting Tools Rectangular Cutting Tool, 1mm x 4mm Cutting Tools Rectangular Cutting Tool, 1.4mm x 2.16mm Cutting Tools Rectangular Cutting Tool, 2mm x 15mm Cutting Tools Rectangular Cutting Tool, 2.8mm x 7.6mm Cutting Tools Rectangular Cutting Tool, 3.5mm x 6.5mm Cutting Tools Page 10 of 86

11 Service Parts, Spares and Consumables - Model Rectangular Cutting Tool, 4mm x 8mm Cutting Tools Square Cutting Tool, 5mm Cutting Tools Square Cutting Tool, 10mm Cutting Tools Square Cutting Tool, 12mm Cutting Tools Rectangular Cutting Tool, 2.1mm x 8mm Cutting Tools Rectangular Cutting Tool, 0.8mm x 4.5mm Cutting Tools Circular Cutting Tool, 0.4mm Hole Diameter Cutting Tools Page 11 of 86

12 Service Parts, Spares and Consumables - Model Circular Cutting Tool, 0.6mm Hole Diameter or 0.3mm Disc Diameter Cutting Tools Circular Cutting Tool, 2.5mm Disc Diameter Cutting Tools Circular Cutting Tool, 0.8mm Hole Diameter or 0.5mm Disc Diameter Cutting Tools Circular Cutting Tool, 8mm Hole Diameter Cutting Tools Circular Cutting Tool, 1.3mm Hole Diameter Cutting Tools Rectangular Cutting Tool, 1mm x 3mm Cutting Tools Rectangular Cutting Tool, 1.5mm x 4mm Cutting Tools Page 12 of 86

13 Service Parts, Spares and Consumables - Model Circular Cutting Tool, 1.5mm Disc Diameter Cutting Tools Circular Cutting Tool, 1.8mm Disc Diameter Cutting Tools Circular Cutting Tool, 2mm Disc Diameter Cutting Tools Circular Cutting Tool, 1.8mm Hole Diameter Cutting Tools Circular Cutting Tool, 1.5mm Hole Diameter or 1.0mm Disc Diameter Cutting Tools Circular Cutting Tool, 5mm Disc Diameter Cutting Tools Circular Cutting Tool, 7mm Disc Diameter Cutting Tools Page 13 of 86

14 Service Parts, Spares and Consumables - Model Circular Cutting Tool, 10mm Disc Diameter Cutting Tools Circular Cutting Tool, 4mm Disc Diameter Cutting Tools Rectangular Cutting Tool, 4mm x 5mm Cutting Tools Rectangular Cutting Tool, 2mm x 3mm Cutting Tools Rectangular Cutting Tool, 2.5mm x 3mm Cutting Tools G-1 Epoxy with Hardener (18 grams resin, 2 grams hardener) Consumables G-2 Epoxy with Hardener (18 grams resin, 2 grams hardener - No Carcinogens) Consumables Page 14 of 86

15 Service Parts, Spares and Consumables - Model Cutting Grit, Container of 0.5kg Consumables Cutting Grit, Container of 0.5kg Consumables Cutting Grit, Container of 0.5kg Consumables Viton O-ring #033 for Slurry Retaining Ring O-Rings Page 15 of 86

16 Service Parts, Spares and Consumables - Models 623, 626 P/N Description Picture Category & Products Model 623 Disc Grinder Knob Assembly 623 Disc Grinder Specimen Mount, Pyrex, 4/Pack (Used with Dimple Grinder 15mm wheels) Specimen Mount, Stainless Steel, 4/Pack (Used with Dimple Grinder 15mm wheels) Specimen Mount, Pyrex, 4/Pack (Used with Dimple Grinder 20mm wheels) Specimen Mount, Stainless Steel, 4/Pack (Used with Dimple Grinder 20mm wheels) Mounting Spacer (Required for the Hot Plate with & ) Specimen Mounting Wax (Crystal Bond) (12 Rods, 3.5mmx32mm) 623,656,960,961 Supplies, Consumables Page 16 of 86

17 Service Parts, Spares and Consumables - Models 623, Glass Lapping Plates, 3/Pack Lapping Discs Kit of 5µm, 15µm and 40µm, 20/Pack Each Size 623 Consumables Lapping Discs, 5µm, 60/Pack 623 Consumables Lapping Discs, 15µm, 60/Pack 623 Consumables Lapping Discs, 40µm, 60/Pack 623 Consumables Model 626 Cryotransfer System Clipring, +/- 70 Degrees 626 Cryotransfer Clipring Tool, +/- 70 Degrees 626 Cryotransfer Page 17 of 86

18 Service Parts, Spares and Consumables - Models 623, Specimen Grid Holder, 5/Pack (Lid not included) Specimen Grid Holder Transfer Tool, 5/Pack Clipring, Aluminum, 5/Pack 3mm inner diameter Clipring, Phosphor Bronze, 5/Pack 3mm inner diameter Clipring Insertion Tool Cryo-Storage System with 5 Liter Dewar for up to 100 Specimens Specimen Grid Holder Top Cover, 5/Pack 626 Page 18 of 86

19 Service Parts, Spares and Consumables - Models 623, Cryo-Storage Bottle with Dewar Hook, 5/Pack Missing Image 626 Page 19 of 86

20 Service Parts, Spares and Consumables - 655, 656 P/N Description Picture Category & Products Model 655 Dry Pumping Station O-ring Kit Missing Image Spare Diaphragms, 4/Pack (Supplied with screws for KNF pumps) 655 Consumables Model 656 Dimple Grinder Fuse 1/2A Slow Blow 120V, 5/Pack 656 Fuses Fuse 1/4A Slow Blow 220V, 5/Pack 656 Fuses V, 170mA Lamp (Used in old Disc Cutter also in old 656 Dimple Grinder and Microscope),656 Lamps V Lamp for Stereo Microscope on Dimple Grinder, 5/Pack, 656 Lamps Rocker On-Off Switch 250V, 15A 656 Electronics Page 20 of 86

21 Service Parts, Spares and Consumables - 655, Push Button Switch, Momentary (For lamp) 656 Electronics Push Button Switch, Alternate Action (Arm, Table, Auto) 656 Electronics Grinding Wheel Motor 656 Electronics FR Turntable Motor Assembly (batch 1-3) (O-ring coupling) (For very old Dating back to 1986) 656 Electronics Turntable Motor with Gear Head (For batch 8 & up, after around 1990) 656 Electronics FR Turntable Motor with Gear Head (Batch 4 through 7 only, until around 1990) (Hex Nut coupling) 656 Electronics Main PC Board, CE 656 Electronics Page 21 of 86

22 Service Parts, Spares and Consumables - 655, Bearing, 10mmX19mmX7mm 656 Mechanical Grinding Wheel Clamping Screw 656 Mechanical Grinding Wheel Bearing Assembly 656 Mechanical Turntable Motor Housing for (Batch 8 & up) 656 Mechanical Page 22 of 86

23 Service Parts, Spares and Consumables - 655, 656 Model 656 Grinding/Polishing Wheels Spherical Grinding Wheel, Phosphor Bronze, 10mm, 4/Pack Missing Image 656 Polishing Wheels Spherical Grinding Wheel, Stainless Steel, 10mm, 4/Pack 656 Polishing Wheels Spherical Grinding Wheel, Phosphor Bronze, 15mm, 4/Pack 656 Polishing Wheels Spherical Grinding Wheel, Stainless Steel, 15mm, 4/Pack 656 Polishing Wheels Spherical Grinding Wheel, Phosphor Bronze, 20mm, 4/Pack 656 Polishing Wheels Spherical Grinding Wheel, Stainless Steel, 20mm, 4/Pack 656 Polishing Wheels Flat Grinding Wheel, Phosphor Bronze, 15mm, 4/Pack 656 Polishing Wheels Page 23 of 86

24 Service Parts, Spares and Consumables - 655, Polishing Wheel, 10mm, 4/Pack (Requires Felt Ring ) Missing Image 656 Polishing Wheels Polishing Wheel, 15mm, 4/Pack (Requires Felt Ring ) 656 Polishing Wheels Polishing Wheel, 20mm, 4/Pack (Requires Felt Ring ) Missing Image 656 Polishing Wheels Felt Polishing Ring, 10mm, 15/Pack (For Polishing Wheel ) 656 Polishing Wheels Felt Polishing Ring, 15mm, 15/Pack (For Polishing Wheel ) 656 Polishing Wheels Felt Polishing Ring, 20mm, 15/Pack (For Polishing Wheel ) 656 Polishing Wheels Model 656 Specimen Platforms Specimen Mount, Pyrex, 4/Pack (For 15mm wheels) 656 Platforms Page 24 of 86

25 Service Parts, Spares and Consumables - 655, Specimen Mount, Stainless Steel, 4/Pack (For 15mm wheels) 656 Platforms Specimen Mount, Stainless Steel, 4/Pack (For 22mm Disc Grinder) Missing Image 656 Platforms Specimen Mount, Pyrex, 4/Pack (For 20mm wheels) 656 Platforms Specimen Mount, Stainless Steel, 4/Pack (For 20mm wheels) 656 Platforms Specimen Mount, Stainless Steel (For 10mm wheels) 656 Platforms Centering Ring (For use with X Specimen Mount) 656 Platforms Centering Ring (For use with X Specimen Mount) 656 Platforms Model 656 Consumables Page 25 of 86

26 Service Parts, Spares and Consumables - 655, Cubic Boron Nitride (KGBN) Polishing Compound, 5gm syringe 0-2µm (#1MUS) 656 Consumables Cubic Boron Nitride (KGBN) Polishing Compound, 5gm syringe 2-4µm (#5MUS) 656 Consumables Cubic Boron Nitride (KGBN) Polishing Compound, 5gm syringe 4-6µm (#3MUS) 656 Consumables Specimen Mounting Wax (Crystal Bond) (12 Rods, 3.5mmx32mm) 623,656,960,961 Supplies, Consumables Alumina Polishing Suspension 0.05µm (2oz) 656 Consumables Page 26 of 86

27 Service Parts, Spares and Consumables - 681, 682, 683 P/N Description Picture Category & Products Fuse 5 x 20mm, 3.15A (MDP Driver Card) Cabinet, Electronics Fuses Fuse 1.0A Slow Blow (5x20mm) (Distribution Board) Cabinet, Electronics Fuses Fuse, Plug-in Type, 3.0A (Distribution Board) Cabinet, Electronics Fuses Fuse 3AG Slow Blow 3A, 110V Cabinet, Electronics Fuses Fuse 3AG Slow Blow 1-1/2A, 220V Cabinet, Electronics Fuses Lamp 2.7V T-1, Trimmed (Used in IBC, PIPS and in Ilion+ Microscope) 681, Electronics, Lamps Lamp, Lens end 682 Electronics, Lamps Page 27 of 86

28 Service Parts, Spares and Consumables - 681, 682, Solenoid Valve Assembly Electronics Solenoid Valve 2-Way Electronics Solenoid valve 3-Way Electronics Solenoid Valve 3-Way (SV4 or SV5 Shutter or Whisperlok ) Electronics Solenoid valve 2-Way (SV6 or SV7) Electronics Chell Needle Valve Assembly Electronics FR Argon Gas Regulator Assembly (Specify if PIPS, Ilion+ or PECS) Cabinet Page 28 of 86

29 Service Parts, Spares and Consumables - 681, 682, Cabinet Cooling Fan, 120VAC - 50 / 60Hz Cabinet Vent or Vacuum Switch (SW1 or SW3) Cabinet, Electronics In-Out Switch - Old Style Being used on systems built before May 2008 Note: A replacement for this part should be a modified rather than the newer ,682,683 Cabinet, Electronics New replacement for In-Out Switch This is a modified P/N This is a replacement for P/N on systems built before May ,682,683 Cabinet, Electronics In-Out Switch - New Style Being used on systems built after May ,682,683 Cabinet, Electronics Argon Gas Switch For Sputter Gun 681,682,683 Cabinet, Electronics Argon Gas Switch For Etching Gun 681,682,683 Cabinet, Electronics Page 29 of 86

30 Service Parts, Spares and Consumables - 681, 682, Motor Speed or KeV Control 681 Cabinet, Electronics Motor Speed Control/Switch 681 Cabinet, Electronics Rotate Motor Cable Assembly 681,682,683 Electronics, Cables FR Ion Beam Coater HV Power supply 681 Cabinet, Electronics, Power Supplies PECS HV Power Supply 682,683 Cabinet, Electronics, Power Supplies PECS Switching Module, Tri-HV 682 Cabinet, Electronics, Power Supplies MDP Controller Board TCP 035 (Used in systems shipped prior to Jan. 2003) 681,682,683,691 Cabinet, Electronics, Boards Page 30 of 86

31 Service Parts, Spares and Consumables - 681, 682, Power Distribution Board (Used in systems shipped prior to Jan. 2003) 681,682,683,691 Cabinet, Electronics, Boards Power Distribution Board (For new instruments shipped since Jan. 2003) Cabinet, Electronics, Boards Microscope Switch Board 681,682,683 Cabinet, Electronics, Boards LCD Display Board 681,682,683 Front Panel, Electronics, Boards Rock/Rotate PC Board 681,682,683 Front Panel, Electronics, Boards LCD Display 681,682,683,693 Front Panel, Electronics Loadlock Control 681,682,683 Front Panel, Electronics Page 31 of 86

32 Service Parts, Spares and Consumables - 681, 682, Digital Timer (Refer to document for instruction of modifying a new timer for an old system) 681,682,683,691 Front Panel, Electronics FR Digital Timer - Upgraded. (Used on older systems) 681,682,683,691 Front Panel, Electronics Chamber Vacuum Analog Meter 681,682,683,691 Front Panel, Electronics Power Switch 240V Front Panel, Electronics Power switch 120V Missing Image 681 Front Panel, Electronics IKR 251 Cold Cathode Gauge (For instruments shipped since Jan. 1996) Gauges CC Gauge Maintenance Kit (For instruments shipped since Jan. 1996) Gauges Page 32 of 86

33 Service Parts, Spares and Consumables - 681, 682, FR Thickness Probe Front Entry 681,682 Gauges FR Penning Gauge Baffle Assembly (PIPS and IBC Shipped Before Jan.1996) Missing Image 681,691 Gauges Penning Gauge Tube Repair Kit (PIPS and IBC Shipped Before Jan.1996) 600,681,691 Gauges - MDP Manifold Pfeiffer MVP Diaphragm Pump only. No isolation table 681,682,683,691 Pumps Pfeiffer MVP Diaphragm Pump Assembly (With isolation table - Upgrade of ASF or KNF version to MVP015-2) Missing Image 681,682,683,691 Pumps FR Pfeiffer MVP Diaphragm Pump Assembly (With isolation table - Upgrade of MVP012 or 015 to MVP015-2) Missing Image 681,682,683,691 Pumps Pfeiffer Membrane Pump MVP 020-3DC. (With Isolation Table),950 Pumps Page 33 of 86

34 Service Parts, Spares and Consumables - 681, 682, Pfeiffer Membrane Pump MVP 020-3DC. (Without Isolation Table),950 Pumps TMH071 Turbo MDP Pump,950 Pumps Centering Ring, Splinter Shield,950 Pumps Diaphragm Pump Isolator,950 Pumps Airlock Window, Quartz, 25mm Diameter 681 Chamber Liquid Nitrogen Trap Chamber FR Potentiometer Assembly (For Rocker Assembly) 681,682,683 Mechanical Model 681, 682, 683 Gun Assembly Page 34 of 86

35 Service Parts, Spares and Consumables - 681, 682, FR Sputter (Coating) Gun Assembly Complete 681,682 Ion Gun Assembly FR Etching Gun Assembly Complete 682,683 Ion Gun Assembly FR HV Feed Through Assembly (For Sputter Gun) 681,682, Ion Gun Assembly FR HV Feed Through Assembly (For Etching Gun) 681,682,683 Ion Gun Assembly Front Polepiece (For Sputter & Etching Guns) 681,682,683 Ion Gun Assembly Rear Polepiece (For Sputter Gun) 681,682 Ion Gun Assembly Rear Polepiece (For Etching Gun) 682,683 Ion Gun Assembly Page 35 of 86

36 Service Parts, Spares and Consumables - 681, 682, Anode Cup Insulator (For Sputter & Etching Guns) 681,682,683 Ion Gun Assembly Anode Cup (For Sputter & Etching Guns) 681,682,683 Ion Gun Assembly Magnet Assembly (For Sputter & Etching Guns) Ion Gun Assembly Contact Pin (For Sputter & Etching Guns) 681,682,683 Ion Gun Assembly Model 681, 682, 683 & Holders Cutting Screen Clamp 682,683 Slope Cutter, Holders Hex Tool 682,683 Slope Cutter, Holders Cutting Fixture 682,683 Slope Cutter, Holders Page 36 of 86

37 Service Parts, Spares and Consumables - 681, 682, Sample Stage 1.25" 681,682,683 Holders Gas Supply Tubing with Fittings, Tygon Tubing 1/4"OD, 1/8"ID 2ft Spanner Wrench (For changing oil cartridge in Turbo Pumps), Vise Mount 681,682, Specimen Mount 2-Position 681,682, Specimen Mount 3-Position 681,682,683 Page 37 of 86

38 Service Parts, Spares and Consumables - 681, 682, Stub Mount Adapter (Holds four 10mm stubs) 681,682, Adapter 1.0 inch to 1.25 inch 681,682, Pin Stub Mount (Holds three 12mm pin stubs) 681,682,683 Model 681, 682, 683 Targets FR Field Replacement Target Actuator Assembly, Left 681,682 Chamber, Targets FR Field Replacement Target Actuator Assembly, Right 681,682 Chamber, Targets Target Port Blanking Plug 681 Chamber, Targets Blank Target Mount (Holds 2 Targets) 681,682 Chamber, Targets Page 38 of 86

39 Service Parts, Spares and Consumables - 681, 682, Standard Dual Target Set Carbon/Chromium (Includes target mount ) 681,682 Chamber, Targets Dual Target Set Chromium/Chromium (Includes target mount ) 681,682 Chamber, Targets Target - Carbon 681,682 Consumables, Targets Target - Chromium 681,682 Consumables, Targets Target - Gold/Palladium 50/50 681,682 Consumables, Targets Target - Iridium 681,682 Consumables, Targets Target - Platinum 681,682 Consumables, Targets Page 39 of 86

40 Service Parts, Spares and Consumables - 681, 682, Target - Tantalum 681,682 Consumables, Targets Target - Titanium 681,682 Consumables, Targets Target - Tungsten 681,682 Consumables, Targets Target - Tin 681,682 Consumables, Targets Target - Quartz 681,682 Consumables, Targets Target - Gold 681,682 Consumables, Targets Target - Aluminum Oxide (Al2O3) Missing Image 681,682 Consumables, Targets Page 40 of 86

41 Service Parts, Spares and Consumables - 681, 682, Target - Nickel 681,682 Consumables, Targets Target - Platinum/Iridium. 90% Pt. and 10% Ir. Missing Image 681,682 Consumables, Targets Target - Silver 99.98% Missing Image 681,682 Consumables, Targets Target - Palladium 99.95% Missing Image 681,682 Consumables, Targets Target - Aluminum 99.99% Missing Image 681,682 Consumables, Targets Target - Molybdenum 99.95% Missing Image 681,682 Consumables, Targets Target - Niobium 99.95% 681,682 Consumables, Targets Page 41 of 86

42 Service Parts, Spares and Consumables - 681, 682, Target - Nickel Oxide 681,682 Consumables, Targets Target - Platinum/Palladium (80% Pt - 20% Pd) Missing Image 681,682 Consumables, Targets Target - Cobalt 99.95% Missing Image 681,682 Consumables, Targets Target - Copper 99.99% Missing Image 681,682 Consumables, Targets Target - Zinc 99.95% Missing Image 681,682 Consumables, Targets C Target Gluing Kit (Customer Installed) 681,682 Consumables, Targets Model 681, 682, 683 Consumables Krytox Grease, 1/2 oz. Syringe,950 Consumables Page 42 of 86

43 Service Parts, Spares and Consumables - 681, 682, Thickness Probe Crystals 5/Pack 681,682 Tools, Consumables Cutting Screen x1 682,683 Consumables, Slope Cutter Pfeiffer MVP 015 and Diaphragm Pump, Repair kit + Procedure (4 valves, 2 diaphragms, 8 seals) 681,682,683,691 Pumps - Consumables Pfeiffer MVP 020-3DC Pump Repair Kit,950 Pumps, Consumables KnF Pump, Replacement Diaphragms (Batch 2-4) 681,682,683,691 Pumps, Consumables KnF Pump, Replacement Valve Plates (Batch 2-4) 681,682,683,691 Pumps, Consumables MDP Oil Cartridge (For all Pfeiffer Turbo Pumps),950 Pumps, Consumables Model 681, 682, 683 Page 43 of 86

44 Service Parts, Spares and Consumables - 681, 682, Complete O-ring Kit - PECS 681,682, O-Ring kit Viton (#005 X10) (Used in Chamber & Whisperlok ) O-Ring kit Viton (#010 X10) (Used in Main Assembly & MDP Manifold) O-Ring kit Viton (#012 X10) (Used in Chamber, MDP Manifold, Faraday Cage & Needle Valve) O-Ring kit Viton (#022 X5) (Used in Chamber & Faraday Cage) O-Ring kit Viton (#032 X5) (Used in Chamber & 36mm Stage) 681,682, O-Ring kit Viton (#039 X5) (Used in MDP Manifold & Cold Stage) Page 44 of 86

45 Service Parts, Spares and Consumables - 681, 682, O-Ring kit Viton (#047 X5) (Used in 15mm Holder) 681,682, O-Ring kit Viton (#118 X5) (Used in MDP Manifold) O-Ring kit Viton (#123 X5) (Used in MDP Manifold) O-Ring kit Viton (#129 X5) (Used in 15mm Stage & 36mm Stage) 681,682, O-Ring kit Viton (#136 X5) (Used in MDP Manifold) Quad-Ring kit Viton (#028 X5) (Used in 36mm Stage) 681,682, Quad-Ring kit Viton (#110 X10) (Used in 36mm Stage) 681,682,683 Page 45 of 86

46 Service Parts, Spares and Consumables - 681, 682, O-Ring kit Viton - Penning Ion Gun (#020 X3, #022 X6) 681,682,683, O-Ring kit - Chamber (3x#010, 1x#012, 1x#022, 2x#028, 1x#030, 2x#032, 1x#033, 1x#044) 681, O-Ring kit - 36mm Stage (1x#028 Quad Ring, 1x#030, 1x#031, 2x#032, 1x#110 Quad Ring, 1x#129, 1x#133) 681, O-Ring kit - Thickness Probe (2x#006, 3x#018, 1x#028) 681, O-Ring kit - Etching Chamber (1x#005, 1x#010, 2x#014, 1x#020, 1x#043, 1x#045) 682,683 Page 46 of 86

47 Service Parts, Spares and Consumables P/N Description Picture Category & Products Fuse 5 x 20mm, 3.15A (MDP Driver Card) Cabinet, Electronics Fuses Fuse 1.0A Slow Blow (5x20mm) (Distribution Board) Cabinet, Electronics Fuses Fuse, Plug-in Type, 3.0A (Distribution Board) Cabinet, Electronics Fuses Fuse 3AG Slow Blow 3A, 110V Cabinet, Electronics Fuses Fuse 3AG Slow Blow 1-1/2A, 220V Cabinet, Electronics Fuses Lamp 2.7V T-1, Trimmed (Used in IBC, PIPS and in Ilion+ Microscope) 681, Electronics, Lamps Lamp, Halogen, PIPS CCD Illuminator Electronics, Lamps Page 47 of 86

48 Service Parts, Spares and Consumables Solenoid Valve Assembly Electronics Solenoid Valve 2-Way (SV3) Electronics Solenoid valve 3-Way (SV2) Electronics Solenoid Valve 3-Way (SV4 or SV5 Shutter or Whisperlok ) Electronics Solenoid valve 2-Way (SV6 or SV7) Electronics Chell Needle Valve Assembly Electronics FR Argon Gas Regulator Assembly (Specify if PIPS, Ilion+ or PECS) Cabinet Page 48 of 86

49 Service Parts, Spares and Consumables Cabinet Cooling Fan, 120VAC - 50 / 60Hz Cabinet Vent or Vacuum Switch (SW1 or SW3) Cabinet, Electronics FR High Voltage Power Supply Cabinet, Electronics, Power Supplies Switching Module, Dual-HV Cabinet, Electronics, Power Supplies DC Power Supply, 24VDC - 160W Electronics, Power Supplies MDP Controller Board TCP 035 (Used in systems shipped prior to Jan. 2003) 681,682,683,691 Cabinet, Electronics, Boards Pressure/Vac Sensor Board Cabinet, Electronics, Boards Page 49 of 86

50 Service Parts, Spares and Consumables Pressure/Vacuum Sensor (Foreline) Cabinet, Electronics Power Distribution Board (Used in systems shipped prior to Jan. 2003) 681,682,683,691 Cabinet, Electronics, Boards Power Distribution Board (For new instruments shipped since Jan. 2003) Cabinet, Electronics, Boards Microscope Switch Board Cabinet, Electronics, Boards LED Display Panel Board 691 Front Panel, Electronics, Boards FR Dual Beam Modulation Board (Batch 6 and up) (Specify S/N when ordering for PIPS) Front Panel, Electronics, Boards Load-Lock PCA Board only - No switches Front Panel, Electronics, Boards Page 50 of 86

51 Service Parts, Spares and Consumables Pressure Test Board (Replaces ) (Specify S/N when ordering for PIPS) Front Panel, Electronics, Boards Digital Timer (Refer to document for instruction of modifying a new timer for an old system) 681,682,683,691 Front Panel, Electronics FR Digital Timer - Upgraded. (Used on older systems) 681,682,683,691 Front Panel, Electronics Chamber Vacuum Analog Meter 681,682,683,691 Front Panel, Electronics Power Switch 240V Front Panel, Electronics IKR 251 Cold Cathode Gauge (For instruments shipped since Jan. 1996) Gauges CC Gauge Maintenance Kit (For instruments shipped since Jan. 1996) Gauges Page 51 of 86

52 Service Parts, Spares and Consumables FR Penning Gauge Baffle Assembly (PIPS and IBC Shipped Before Jan.1996) Missing Image 681,691 Gauges Penning Gauge Tube Repair Kit (PIPS and IBC Shipped Before Jan.1996) 600,681,691 Gauges - MDP Manifold Pfeiffer MVP Diaphragm Pump (No isolation table) 681,682,683,691 Pumps Pfeiffer MVP Diaphragm Pump Assembly (With isolation table - Upgrade of ASF or KNF version to MVP015-2) Missing Image 681,682,683,691 Pumps FR Pfeiffer MVP Diaphragm Pump Assembly (With isolation table - Upgrade of MVP012 or 015 to MVP015-2) Missing Image 681,682,683,691 Pumps Pfeiffer Membrane Pump MVP 020-3DC. (With Isolation Table),950 Pumps Pfeiffer Membrane Pump MVP 020-3DC. (Without Isolation Table),950 Pumps Page 52 of 86

53 Service Parts, Spares and Consumables TMH071 Turbo MDP Pump,950 Pumps Centering Ring, Splinter Shield,950 Pumps Diaphragm Pump Isolator,950 Pumps Viewing Port 691 Chamber Airlock Window, Quartz, 25mm Diameter,950 Chamber FR Shutter Assembly, Blade & Bracket 691 Chamber Shutter Blade 691 Chamber Page 53 of 86

54 Service Parts, Spares and Consumables Sputter Shield Assembly 691 Chamber Liquid Nitrogen Trap Chamber Cold Stage Dewar Assembly (For systems with Cold Stage) 691 Chamber Rotation Motor Assembly Whisperlok Whisperlok Board Assembly (For instruments shipped since Jan. 1996) Whisperlok Piston Bellows Assembly 691 Whisperlok Piston Bellows Assembly (For Pips with Cold Stage) 691 Whisperlok Page 54 of 86

55 Service Parts, Spares and Consumables Spring Specimen Mount Assembly 691 Whisperlok Hinged Conductor Assembly (For Pips with Cold Stage) 691 Whisperlok Model 691 Gun Assembly FR Standard Gun (Includes magnet assembly but no housing) Ion Gun Assembly FR Broad Beam Gun Conversion kit x2 Missing Image 691 Ion Gun Assembly FR Standard Gun Conversion kit x2 Missing Image 691 Ion Gun Assembly FR Potted End Cap, HV Feed Through and Rear Pole Piece Ion Gun Assembly FR Complete Ion Gun Assembly - Left 691 Ion Gun Assembly Page 55 of 86

56 Service Parts, Spares and Consumables FR Complete Ion Gun Assembly - Right 691 Ion Gun Assembly FR Complete Broad-Beam Ion Gun Assembly - Left 691 Ion Gun Assembly FR Complete Broad-Beam Ion Gun Assembly - Right 691 Ion Gun Assembly Ion Gun Knob Assembly, Left 691 Ion Gun Assembly Ion Gun Knob Assembly, Right 691 Ion Gun Assembly Potted End Cap Assembly Ion Gun Assembly HV Feed Through Ion Gun Assembly Page 56 of 86

57 Service Parts, Spares and Consumables Front Pole Piece Ion Gun Assembly Rear Pole Piece Ion Gun Assembly Anode Cup Insulator Ion Gun Assembly Anode Cup Ion Gun Assembly Magnet Assembly Ion Gun Assembly Contact Pin Ion Gun Assembly Model 691 & Holders FR Beam Alignment Screen 691,, Whisperlok Page 57 of 86

58 Service Parts, Spares and Consumables FR Rimmed Specimen Post (molybdenum) Specimen Post (Copper) x FR Duo Post, Glue Type, 3mm, (one post) Aluminum FR Duo Post, Clamp Type, 3mm, (one post) Aluminum FR Duo Post, Glue Type, 2.3mm, (one post) Aluminum FR Duo Post, Clamp Type, 2.3mm, (one post) Aluminum Duo Post Loading Dock, includes tweezers 691 Page 58 of 86

59 Service Parts, Spares and Consumables Graphite loading dock with LED illuminator Graphite Specimen Holder (One) Specimen Post Storage Block FR Specimen Post Carrier x Precision Point Tweezers Multi Purpose Tool Gas Supply Tubing with Fittings,950 Page 59 of 86

60 Service Parts, Spares and Consumables Tygon Tubing 1/4"OD, 1/8"ID 2ft Spanner Wrench (For changing oil cartridge in Turbo Pumps), Coupling - Quick Connect with Shutoff - Male, Gas-Line Supplies Coupling - Quick Connect with Shutoff - Female, Gas-Line Supplies VDC Power Supply for CCD Camera, Power Supplies Model 691 Consumables Krytox Grease, 1/2 oz. Syringe,950 Consumables MOS2 Powder Lubricant (1 Gram) (For Quad Seal used in Cold Stage) 691 Consumables Page 60 of 86

61 Service Parts, Spares and Consumables Pfeiffer MVP 015 and Diaphragm Pump, Repair kit + Procedure (4 valves, 2 diaphragms, 8 seals) 681,682,683,691 Pumps - Consumables Pfeiffer MVP 020-3DC Pump Repair Kit,950 Pumps, Consumables KnF Pump, Replacement Diaphragms (Batch 2-4) 681,682,683,691 Pumps, Consumables KnF Pump, Replacement Valve Plates (Batch 2-4) 681,682,683,691 Pumps, Consumables MDP Oil Cartridge (For all Pfeiffer Turbo Pumps),950 Pumps, Consumables Model O-Ring kit Viton #005 X10 (Used in Chamber & Whisperlok ) O-Ring kit Viton - #010 X10 (Used in Main Assembly & MDP Manifold) Page 61 of 86

62 Service Parts, Spares and Consumables O-Ring kit Viton - #012 X10 (Used in Chamber, MDP Manifold, Faraday Cage & Needle Valve) O-Ring kit Viton - #015 X10 (Used in Faraday Cage) O-Ring kit Viton - #022 X5 (Used in Chamber & Faraday Cage) O-Ring kit Viton - #039 X5 (Used in MDP Manifold & Cold Stage) O-Ring kit Viton - #118 X5 (Used in MDP Manifold) O-Ring kit Viton - #123 X5 (Used in MDP Manifold) O-Ring kit Viton - #136 X5 (Used in MDP Manifold) Page 62 of 86

63 Service Parts, Spares and Consumables Quad-Ring kit Viton - #012 X10 (Used in Cold Stage) Quad-Ring kit Viton - #111 X5 (Used in Cold Stage) O-Ring kit - Chamber (1x#005, 1x#011, 2x#012, 1x#019, 1x#022, 1x#030, 1x#042, 2x#044, 1x#012-Quad Ring) O-Ring kit - Whisperlok (1x#005, 1x#008, 1x#031, 1x#035, 1x#135) O-Ring kit - Penning Ion Gun (2x#020, 2x#023, 2x#024, 4x#030) O-Ring kit - Cold Stage (1x#008, 1x#012-Quad Ring, 1x#014, 1x#031, 1x#039, 1x#111- Quad Ring, 1x#135) Page 63 of 86

64 Service Parts, Spares and Consumables P/N Description Picture Category & Products Fuse 5 x 20mm, 3.15A (MDP Driver Card) Cabinet, Electronics Fuses Fuse 1.0A Slow Blow (5x20mm) (Distribution Board) Cabinet, Electronics Fuses Fuse, Plug-in Type, 3.0A (Distribution Board) Cabinet, Electronics Fuses Fuse 3AG Slow Blow 3A, 110V Cabinet, Electronics Fuses Fuse 3AG Slow Blow 1-1/2A, 220V Cabinet, Electronics Fuses Lamp 2.7V T-1, Trimmed (Used in IBC, PIPS and in Ilion+ Microscope) 681, Electronics, Lamps Lamp, Halogen, PIPS CCD Illuminator Electronics, Lamps Page 64 of 86

65 Service Parts, Spares and Consumables Solenoid Valve Assembly Electronics Solenoid Valve 2-Way (SV3) Electronics Solenoid valve 3-Way (SV2) Electronics Solenoid Valve 3-Way (SV4 or SV5 Shutter or Whisperlok ) Electronics Solenoid valve 2-Way (SV6 or SV7) Electronics Chell Needle Valve Assembly Electronics FR Argon Gas Regulator Assembly (Specify if PIPS, Ilion+ or PECS) Cabinet Page 65 of 86

66 Service Parts, Spares and Consumables Cabinet Cooling Fan, 120VAC - 50 / 60Hz Cabinet Vent or Vacuum Switch (SW1 or SW3) Cabinet, Electronics FR High Voltage Power Supply Cabinet, Electronics, Power Supplies Switching Module, Dual-HV Cabinet, Electronics, Power Supplies DC Power Supply, 24VDC - 160W Electronics, Power Supplies Pressure/Vac Sensor Board Cabinet, Electronics, Boards Pressure/Vacuum Sensor (Foreline) Cabinet, Electronics Page 66 of 86

67 Service Parts, Spares and Consumables Power Distribution Board Cabinet, Electronics, Boards Microscope Switch Board Cabinet, Electronics, Boards FR Dual Beam Modulation Board (Batch 6 and up) (Specify S/N when ordering for PIPS) Front Panel, Electronics, Boards Pressure Test Board (Replaces ) (Specify S/N when ordering for PIPS) Front Panel, Electronics, Boards Relay Board 693 Front Panel, Electronics, Boards LCD Display Board 693 Front Panel, Electronics, Boards LCD Display 681,682,683,693 Front Panel, Electronics Page 67 of 86

68 Service Parts, Spares and Consumables Power Switch 240V Front Panel, Electronics IKR 251 Cold Cathode Gauge Gauges CC Gauge Maintenance Kit Gauges Pfeiffer Membrane Pump MVP 020-3DC. (With Isolation Table),950 Pumps Pfeiffer Membrane Pump MVP 020-3DC. (Without Isolation Table),950 Pumps TMH071 Turbo MDP Pump,950 Pumps Centering Ring, Splinter Shield,950 Pumps Page 68 of 86

69 Service Parts, Spares and Consumables Diaphragm Pump Isolator,950 Pumps Viewing Port 693 Chamber Airlock Window, Quartz, 25mm Diameter,950 Chamber Shutter Blade 693 Chamber Liquid Nitrogen Trap Chamber O-Ring Shield 693 Chamber Cold Stage Dewar Assembly 693 Chamber Page 69 of 86

70 Service Parts, Spares and Consumables Rotation Motor Assembly Whisperlok Whisperlok Board Assembly Whisperlok Whisperlok Assembly (For Cold Stage and non Cold Stage units) 693 Whisperlok Hinged Conductor Assembly 693 Whisperlok Model 693 Gun Assembly FR Standard Gun (Includes magnet assembly but no housing) Ion Gun Assembly FR Potted End Cap, HV Feed Through and Rear Pole Piece Ion Gun Assembly Complete Ion Gun Assembly - Left 693 Ion Gun Assembly Page 70 of 86

71 Service Parts, Spares and Consumables Complete Ion Gun Assembly - Right 693 Ion Gun Assembly Ion Gun Knob Assembly, Left 693 Ion Gun Assembly Ion Gun Knob Assembly, Right 693 Ion Gun Assembly Potted End Cap Assembly Ion Gun Assembly HV Feed Through Ion Gun Assembly Front Pole Piece Ion Gun Assembly Rear Pole Piece Ion Gun Assembly Page 71 of 86

72 Service Parts, Spares and Consumables Anode Cup Insulator Ion Gun Assembly Anode Cup Ion Gun Assembly Magnet Assembly Ion Gun Assembly Contact Pin Ion Gun Assembly Model 693 & Holders SEM Stub for 1 sample SEM Stub for 6 samples Sample Blade Kit (10 Pieces) Page 72 of 86

73 Service Parts, Spares and Consumables Sample Blade Kit (100 Pieces) 10 X Beam Alignment Screen Precision Point Tweezers Multi Purpose Tool Gas Supply Tubing with Fittings, Tygon Tubing 1/4"OD, 1/8"ID 2ft Spanner Wrench (For changing oil cartridge in Turbo Pumps),950 Page 73 of 86

74 Service Parts, Spares and Consumables Coupling - Quick Connect with Shutoff - Male, Gas-Line Supplies Coupling - Quick Connect with Shutoff - Female, Gas-Line Supplies VDC Power Supply for CCD Camera, Power Supplies Model 693 Consumables Krytox Grease, 1/2 oz. Syringe,950 Consumables Pfeiffer MVP 020-3DC Pump Repair Kit,950 Pumps, Consumables MDP Oil Cartridge (For all Pfeiffer Turbo Pumps),950 Pumps, Consumables Model Quad-Ring Buna - #4116 (Used in Chamber) 693 Page 74 of 86

75 Service Parts, Spares and Consumables O-Ring kit Viton #005 X10 (Used in Chamber & Whisperlok ) O-Ring kit Viton - #010 X10 (Used in Main Assembly & MDP Manifold) O-Ring kit Viton - #012 X10 (Used in Chamber, MDP Manifold, Faraday Cage & Needle Valve) O-Ring kit Viton - #015 X10 (Used in Faraday Cage) O-Ring kit Viton - #022 X5 (Used in Chamber & Faraday Cage) O-Ring kit Viton - #039 X5 (Used in MDP Manifold & Cold Stage) O-Ring kit Viton - #118 X5 (Used in MDP Manifold) Page 75 of 86

76 Service Parts, Spares and Consumables O-Ring kit Viton - #123 X5 (Used in MDP Manifold) O-Ring kit Viton - #136 X5 (Used in MDP Manifold) Quad-Ring kit Viton - #012 X10 (Used in Cold Stage) Quad-Ring kit Viton - #111 X5 (Used in Cold Stage) O-Ring kit - Chamber (1x#005, 1x#011, 2x#012, 1x#019, 1x#022, 1x#030, 1x#042, 2x#044, 1x#012-Quad Ring) O-Ring kit - Whisperlok (1x#005, 1x#008, 1x#031, 1x#035, 1x#135) O-Ring kit - Penning Ion Gun (2x#020, 2x#023, 2x#024, 4x#030) Page 76 of 86

77 Service Parts, Spares and Consumables O-Ring kit - Cold Stage (1x#008, 1x#012-Quad Ring, 1x#014, 1x#031, 1x#039, 1x#111- Quad Ring, 1x#135) Page 77 of 86

78 Service Parts, Spares and Consumables P/N Description Picture Category & Products I/O Expansion Board 950 Cabinet, Electronics, Boards VGX Single Board Computer 950 Cabinet, Electronics, Boards RF Generator Assembly 950 Cabinet, Electronics Mass Flow Controller, Alicat, for O2 or AR Starting October 2010, this will be installed on new systems, replacing the Brooks. The Brooks will still be used for service. 950 Cabinet, Electronics Mass Flow Controller, Alicat, for H2 Starting October 2010, this will be installed on new systems, replacing the Brooks. The Brooks will still be used for service. 950 Cabinet, Electronics FR Mass Flow Controller Kit, Alicat, for O2 or AR This is an upgrade kit for replacing a Brooks MFC with an Alicat MFC 950 Cabinet, Electronics FR Mass Flow Controller kit, Alicat, for H2 This is an upgrade kit for replacing a Brooks MFC with an Alicat MFC 950 Cabinet, Electronics Page 78 of 86

79 Service Parts, Spares and Consumables Mass Flow Controller, Brooks, 40SCCM, for O2 or AR (New) Starting October 2010, it will no longer be installed on new systems but will still be used for service. 950 Cabinet, Electronics Mass Flow Controller, Brooks, 40SCCM, for O2 or AR (Rebuilt) Starting October 2010, it will no longer be installed on new systems but will still be used for service. 950 Cabinet, Electronics Mass Flow Controller, Brooks, 20SCCM, for H2 (New) Starting October 2010, it will no longer be installed on new systems but will still be used for service. 950 Cabinet, Electronics Mass Flow Controller, Brooks, 20SCCM, for H2 (Rebuilt) Starting October 2010, it will no longer be installed on new systems but will still be used for service. 950 Cabinet, Electronics Pfeiffer Membrane Pump MVP 020-3DC. (With Isolation Table),950 Pumps Pfeiffer Membrane Pump MVP 020-3DC. (Without Isolation Table),950 Pumps TMH071 Turbo MDP Pump,950 Pumps Page 79 of 86

80 Service Parts, Spares and Consumables Centering Ring, Splinter Shield,950 Pumps Diaphragm Pump Isolator,950 Pumps Airlock Window, Quartz, 25mm Diameter,950 Chamber Pfeiffer MVP 020-3DC Pump Repair Kit,950 Pumps, Consumables MDP Oil Cartridge (For all Pfeiffer Turbo Pumps),950 Pumps, Consumables Gas Supply Tubing with Fittings, Spanner Wrench (For changing oil cartridge in Turbo Pumps),950 Page 80 of 86

81 Service Parts, Spares and Consumables Krytox Grease, 1/2 oz. Syringe,950 Consumables Chamber Seal Conductive O-Ring 139" X 3.734" O-Ring kit Viton, (#117 X5) 950 Page 81 of 86

82 Service Parts, Spares and Consumables - Holders P/N Description Picture Category & Products Anti-Twist Washers x10 - Beryllium Anti-Twist Washers mo/set of 10 Missing Image Anti-Twist Washers x10 - copper Hexring - Phosphor Bronze Hexring - Beryllium Hexring - Beryllium (.02 thick with no lip) Hexring - Stainless Steel Page 82 of 86

83 Service Parts, Spares and Consumables - Holders Hexring Tool, Beryllium (For use with series Hexrings) Hexring Tool Non Beryllium Style Power Supply/Cooling Holder Connecting Cable, 5-Pin Missing Image Power Supply/Cooling Holder Connecting Cable, 7-Pin Molecular Sieve Charge for 626.DH, 613, 651, 636.DH Missing Image Loading Ring Hexring - Tantalum Page 83 of 86

84 Service Parts, Spares and Consumables - Holders x10 Specimen Washers - Inconel Missing Image x10 Specimen Washers - Tantalum Hexring - Inconel Missing Image Hexring Tool (For use with series Hexring) Power Supply/Heating Holder Connecting Cable, 5-pin Specimen Grids, Set of 25 25X Hexring Beryllium (Used with JEOL URP) Page 84 of 86

85 Service Parts, Spares and Consumables - Holders Hexring - Phosphor Bronze (Used with JEOL URP) Hexring Tool (For use with series Hexrings) Cable for FEI Compustage Cable for JEOL Microactive Goniometer Hexlock x2, Phosphor Bronze Hexlock x2, Tantalum Washer x2, Phosphor Bronze Page 85 of 86

86 Service Parts, Spares and Consumables - Holders Washers x2, Tantalum Hexlock Tool X4 Phosphor Bronze 2-Specimen Cartridges with 8 Splitrings 4 X Set of 5 Splitrings Splitring Tool Missing Image Splitring Seating Tool Page 86 of 86