AMAT xr Replacement Components and Assemblies

Transcription

1 Copyright 2016 PLANSEE SE. All rights reserved. Mar 1, _50140_AMAT - AMAT xr - Replacement Components and Assemblies

2 AMAT xr Plansee No. Description XR BERNAS ION SOURCE CONSUMABLES XR IHC ION SOURCE CONSUMABLES XR / QUANTUM CATHODE OPTIONS XR SINGLE BELLOWS EXTRACTION ASSY XR DUAL BELLOWS EXTRACTION ASSY XR SOURCE CHAMBER ASSY ANALYZER XR ANALYZER XR PRE-DEFINING COMPONENTS XR MRS ASSY POST ACCEL XR POST ACCEL XR MOVEABLE PA XR PFS HDPFS CONSUMABLES HDPFS MOUNTING XR BEAM STOP 2 Mar 1, 2016

3 XR BERNAS ION SOURCE CONSUMABLES RETAINER, FRONT PLATE 1 STK FRONT PLATE HALF 2 EA LINER, SIDE 2 EA LINER, BASE 1 EA LINER,END,ANTI-CATHODE 1 EA ANTICATHODE 1 EA STRAP, LINK, ANTICATHODE 1 EA SUPPORT BAR, ANTI-CATHODE 1 EA ARC CHAMBER BERNAS 1 EA SHIELD, INSULATOR 6 EA INSULATOR W/HELICOIL 6 EA SUPPORT, ARC CHAMBER, LOWER 1 STK SLEEVE, OVEN NOZZLE 2 EA PLUG, ARC CHAMBER, SDS 1 EA SUPPORT, ARC CHAMBER, UPPER 1 STK E-CLIP TO SUIT M4 SHFT SS 4 EA COMPRESSION SPRING 4 EA SST WASHER, FLAT, M4 4 EA PIN, RETAINING 4 EA STRAP, ION SOURCE 2 EA CLAMP, FILAMENT, L/H ST THUMBSCREW, M4 6 EA SCREW, M4 MODIFIED 2 EA COLLET, FILAMENT CLAMP 2 EA CLAMP, FILAMENT, R/H 1 EA REFLECTOR 2 EA FILAMENT, ARC, CHAM, DIA EA LINER, END, FILAMENT 1 EA FRONT PLATE, HALF, TUNGSTEN 2 EA Mar 1, 2016

4 XR IHC ION SOURCE CONSUMABLES RETAINER, FRONT PLATE 1 STK FRONT PLATE, L/H, GRAPH 1 EA FRONT PLATE, R/H, GRAPH 1 EA LINER, BASE ST LINER, END ANTI-CATHODE 1 EA ANTICATHODE 1 EA SUPPORT BAR, ANTI-CATHODE 1 EA THUMBSCREW,M4,CAPTIVE 6 STK SHIELD, INSULATOR 1 EA INSULATOR W/HELICOIL 8 EA ARC CHAM INDIRECT 1 EA PLUG, ARC CHAMBER, SDS 2 EA SLEEVE, OVEN NOZZLE 1 EA LINER, BASE ST E-CLIP TO SUIT M4 SHFT SS 4 EA COMPRESSION SPRING 4 EA SST WASHER, FLAT, M4 8 EA PIN, RETAINING 4 EA SUPPORT BAR, CATHODE 1 EA SHIELD, INSULATOR LONG 4 EA FILAMENT CLAMP, L/H 1 EA CAM RETAINER 2 EA PLANSEE DESIGN CAM, FILAMENT CLAMP 2 EA PLANSEE DESIGN FILAMENT CLAMP, R/H 1 EA FILAMENT GUIDE 2 EA FILAMENT, ARC CHAMBER, IHC 1 EA LINER, END CATHODE 1 EA Application Note: The cam (#230) and cam retainer (#220) shown are minor modifications of the standard parts ( & ) and have been designed to secure together via threads, instead of press fit. These parts are not inter-changeable with the AMAT design and must be used together. Plansee also offers a one-piece, graphite, top plate (Part No ) that helps ensure consistent aperture size and location for customers that replace both sides during each PM. 4 Mar 1, 2016

5 XR / QUANTUM CATHODE OPTIONS CATHODE SLOTTED 1 EA CATHODE SLOTTED 1 EA PLANSEE DESIGN W CATHODE, 3 MM BUTTON 1 SA CATHODE 3MM BUTTON 1 EA PLANSEE DESIGN Application Note The one piece designs are more cost effective than the 2 piece welded versions, but may require additional time to reach operating temperature due to the greater thermal conductivity, resulting more heat losses during burn in. 5 Mar 1, 2016

6 XR SINGLE BELLOWS EXTRACTION ASSY SST FHS 1.575LG 4 EA SST FHSV.312LG 3 EA MOUNTING, SUPP. ELECTRODE 1 EA ELECTRODE SUPPRESSION 1 EA SST BHCSV.315LG 4 EA CERAMIC STANDOFF 3 EA MOUNTING, GROUND ELECTRODE 1 EA PLANSEE DESIGN SST BHCSV.312LG 5 EA GROUND ELECTRODE 1 STK SPACER, GRAPHITE 4 EA SUPPRESSION RING 1 STK PLANSEE DESIGN Application Note: The Ground Mount plate listed as balloon 70 is shown as a Plansee Design because it accepts standard and reversible electrodes. No other modifications have been made to this part. In an effort to reduce the cost of the suppression ring for this assembly, Plansee offers a graphite version of This part is a dimensional match to the standard aluminum part and can be used in all the same functions. Reversible (Twin/Dual) Electrode's<(>,<)> and graphite versions of the Mount Plates< (>,<)> which accept standard and reversible electrodes<(>,<)> are also available for this assembly for customers who run their process recipes within an energy range that only requires one aperture size. The part numbers for these parts include: SAP# Description: Suppression Electrode, Reversible SAP# Description: Mounting, Suppression Electrode, Graphite Note: Accepts standard and reversible electrodes SAP# Description: Ground Electrode, Reversible SAP# Description: Mounting, Ground Electrode, Graphite Note: Accepts standard and reversible electrodes 6 Mar 1, 2016

7 XR DUAL BELLOWS EXTRACTION ASSY SST FHS 1.575LG 4 EA SCREW, SST FH.394LG 4 EA MOUNTING, SUPP. ELECTRODE 1 EA SUPPRESSION ELECTRODE 1 EA SST BHCSV.315LG 4 EA MOUNT PLATE, GROUND ELECTRODE 1 EA ELECTRODE, GROUND 1 EA SPACER, GRAPHITE 4 EA SUPPRESSION RING 1 STK PLANSEE DESIGN BRACKET, SUPPRESSION, 1 AS ELECTRODE BRACKET, GROUND ELECTRODE 1 AS Application Note: Reversible (Twin/Dual) Electrodes and Mounts are also available for this assembly for customers who run their process recipes within an energy range that only requires one aperture size. The part numbers for these parts include: SAP# Description: Suppression Electrode, Reversible SAP# Description: Mounting, Suppression Electrode Note: Accepts standard and reversible electrodes SAP# Description: Ground Electrode, Reversible SAP# Description: Mounting, Ground Electrode Note: Accepts standard and reversible electrodes 7 Mar 1, 2016

8 xr SOURCE CHAMBER ASSY COVER, PLATE SOURCE 1 EA SST FHSVM.315LG MOS2 COATED 2 EA SHIELD, GPH (55X94) INSERT 1 EA PLANSEE DESIGN SHIELD, GRAPHITE, FRAME 1 EA PLANSEE DESIGN LINER,CLAMP PLATE 1 EA Application Note: Part numbers and , when assembled form a dimensional match to This insert design allows customers to rotate and reuse the aperture when needed, as well as replace the consumable aperture. By shrinking the size of the consumable part, the new insert can be made of a higher grade of graphite, which has shown to last longer in the tools and shed less particles. If a one-for-one part is required, use the part number below: SAP# Description: Shield, Graphite (55x94) 8 Mar 1, 2016

9 ANALYZER INSERT, INNER 1 EA INSERT, OUTER 1 EA INSERT, NEUTRAL 1 EA Mar 1, 2016

10 XR ANALYZER INSERT, OUTER 1 EA INSERT, NEUTRAL, FLIGHT TUBE 1 EA INSERT, INNER 1 EA COVER, FLIGHT TUBE COLUMN 2 EA Mar 1, 2016

11 XR PRE-DEFINING COMPONENTS HOLDER, PRE-DEF. APT 1 EA APERTURE, PRE-DEFINING, 25 X 68 1 EA APERTURE, PRE-DEFINING, 40 X 64 1 EA Mar 1, 2016

12 XR MRS ASSY PRE MRS SLIT 1 EA LOW DOSE SLIT 1 EA VANE, MRS 2 EA POST MRS SLIT 1 STK Application Note: Due to the different process mixes run, alternate versions of the MRS Vane are available. These alternate designs range from lower cost models to particle reducing designs and can be seen on the MRS Vane Options Page (# ) 12 Mar 1, 2016

13 POST ACCEL INSERT, EH-1 1 EA HOLDER, EH-1 1 STK APERTURE, EH0 1 EA ELECTRODE, EH1 1 EA Mar 1, 2016

14 XR POST ACCEL ELECTRODE EH-1 1 EA ELECTRODE, EH0 1 EA ELECTRODE, EH1 1 EA Mar 1, 2016

15 XR MOVEABLE PA ELECTRODE,EH3 1 EA MOUNTING, EH3 ELECTRODE 1 EA ELECTRODE, EH4 1 EA APERTURE,(EPG1) 1 EA SCREEN ENTRY, TUBE SIDE 2 EA SCREEN ENTRY 2 EA Mar 1, 2016

16 XR PFS PIGTAIL FILAMENT 2.4 DIA 1 EA GAS SEAL, BOR NIT (PFS) 1 EA TOP SHIELD (GAS SEAL PFS) 1 EA ARC CHAM. REMO INS PFS 1 EA SHIELD GUIDE TUBE(TOP) PI EA SHIELD, GUIDE TUBE (PRE) 2 EA SHIELD, GUIDE TUBE (POST) 2 EA SHIELD, GUIDE TUBE (BOT) 1 EA Mar 1, 2016

17 HDPFS CONSUMABLES GUIDE TUBE BOTTOM 1 EA FILAMENT SHIELD 1 EA FRONT APERTURE 1 EA GUIDE TUBE SIDE,LEFT 1 EA MAGNET, GUIDE TUBE 7 EA MAGNET RETAINER, G. TUBE 7 EA GUIDE TUBE TOP 1 EA MIDDLE APERTURE 1 EA GUIDE TUBE SIDE,RIGHT 1 EA FILAMENT INSULATOR 4 EA BOLT, SST SHOULDER.394LG 4 EA FILAMENT CLAMP ASSY 2 AS INSULATOR, FILAMENT CLAMP 1 EA MAGNET SOURCE(EG:44297) 1 EA HEAT SHIELD 1 EA SUPPORT, GUIDE TUBE 4 EA ARC CHAMBER 1 EA FILAMENT 2 EA APERTURE PLATE, 50% RED 1 EA GUIDE TUBE PLATE 1 EA Application Note: The assembly shown on this page represents the consumable parts found in one of the 9500/XR HD-PFS assemblies. For information on the parts used in your tools assembly please contact your local representative. 17 Mar 1, 2016

18 HDPFS MOUNTING MOUNT BRCKET,LEFT 1 EA MOUNT PLATE,TOP 1 EA MOUNT BRACKET, RIGHT 1 EA MOUNT PLATE, INSULATOR 1 EA INSULATING FLANGE 1 EA CONN STRAP SET 1 EA INSULATOR 2 EA FEED ROD SET 1 JEU INSULATING FLANGE 1 EA SOURCE CHAMBER ASSY 1 AS GAS LINE ASSEMBLY 1 AS SPUTTER SHIELD 1 EA INSULATOR, TYPE SM7 2 EA SUPPORT PLATE 1 EA INSULATOR, SUPPORT PLATE 1 EA MOUNT PLATE, SOURCE CHAMBER 1 EA Application Note: The assembly shown on this page represents the mounting found in one of the 9500/ XR HD-PFS assemblies. For information on the parts used in your tools assembly please contact your local representative. 18 Mar 1, 2016

19 XR BEAM STOP APERTURE PLATE 1 EA SHIELDING,END 2 EA SHIELDING,SIDE 2 EA BEAM STOP 1 EA Mar 1, 2016