Components for Varian E500 or E220 Implanters

Transcription

1 A

2 P/N Retaining Pin Assembly Includes 1 each, P/N 55068, 99035, and All items are assembled, as shown. (4) P/N Nut, Hex, 18-8 Nut OEM P/N Filament Insulator Boron Nitride (3) OEM E P/N 55064W Arc Chamber Top Plate OEM E P/N End Cap Retainer Graphite (2) P/N Filament / Repeller Insulator Aluminum Oxide (3) OEM E P/N 51109A Filament / Repeller Boron Nitride (3) OEM E P/N 55080W Filament Shield OEM E P/N Filament Insulator Boron Nitride (3) OEM E P/N 55061W Refl ector End Plate OEM E P/N 55079W Repeller Shield OEM E P/N 55074W Refl ector OEM E P/N 55065W Arc Chamber Side Plate (2) OEM E P/N Manifold Clamp Graphite (2) P/N 55083BW Glemco Design Tbc* Base Plate Liner OEM E *See Note 2 Below* P/N Filament Screw Tantalum OEM E P/N Filament Varian E 220/E500 OEM E *See Note 1 Below* P/N 55082W Filament End Plate OEM E P/N Manifold Graphite P/N 55103A Source Gas Tube Tantalum OEM E *Note 1: Glemco also provides P/N 51068C and 51068D as alternatives for this source assembly. B. *Note 2: Glemco also offers the standard base plate, 55083W A-1 A. P/N 51068C Filament, 2% Ceriated, Ø.094 OEM E B. P/N 51068D Filament OEM E A. P/N 55083W Base Plate Liner OEM E

3 P/N x 1/4 Phillips FHCS 18-8 Vented OEM P/N Vaporizer Heat Shield Aluminum OEM E P/N Source Body Aluminum *See Note Below* P/N Internal Refl ector Aluminum (4) P/N Arc Chamber Mounting Bracket OEM E P/N Insulator W/ Helicoils Boron Nitride OEM E P/N Arc Chamber Mounting Bracket OEM E P/N x 5/16 SHCS 18-8 Vented OEM E P/N x 5/16 SHCS 18-8 Vented OEM E P/N x 1/2 FHSS 18-8 OEM E P/N Filament Clamp Molybdenum OEM E P/N x 7/8 FHSS 18-8 P/N X 1/2 BHSS, OEM P/N Filament Feed Strap Silver OEM E / E P/N Refl ector Strap Silver OEM E P/N X 3/8 BHSS OEM P/N Clamp, Filament Strap Molybdenum (2) OEM E P/N Filament Clamp Molybdenum OEM E P/N Filament Feed Strap Silver OEM E / E P/N 83165V AS-568A UNI O-Ring OEM P/N 8A445 SHCS, BH, Vented, 6-32 x 1/2 OEM E / P/N #6 X 1/8 Spacer OEM E *Note : The Source Body, P/N 55105, is provided with Source Body Refl ectors (4), P/N 55088, FHSS x 1/2, P/N 82594, Retainer Pin Anchor Block (2), P/N 55104, FHSS x 7/8, P/N 82597, and O-Ring-265,, P/N 83165V, OEM P/N #6 Regular Spring Washer, 18-8 OEM E / A-2

4 P/N PHS 4-40 x 5/16 Nylon (2) OEM E P/N Feed-Thru Insulator Shield Virgin Tefl on (2) OEM E P/N PH, 6-32 X 2-1/ (6) OEM P/N #6 Flat Washer Nylon(6) OEM E P/N Electrical, 9/16-18 Threaded Sleeve P/N #6 Regular Spring Washer, 18-8 (6) OEM E P/N Feed-Thru Insulator Torlon (6) OEM E P/N Feed-Thru Copper OEM E *Note: Includes P/N P/N SHCS 6-32 X 1 1/4 OEM E P/N Feed-Thru Connector OEM E *See Note Below* P/N 83012V AS-568A UNI O-Ring (2) OEM E P/N Handle OEM E P/N Feed-Thru Manifold OEM E P/N Quick Disconnect Coupling (2) OEM E P/N x 5/8 SHCS 18-8 OEM E *Note: Assembly Includes A. P/N Feedthru Connector Body OEM E B. P/N Feedthru Connector Lock OEM E C. P/N Ø.0625 x.188 Spring Pin, C OEM (2) D. P/N Spring, compression, Ø.125 X.590 Long OEM E (2) A B D A-3

5 P/N X 1/2 SHCS OEM / P/N Manifold Assembly OEM E P/N 83008V O-RING 108 OEM P/N Thermocouple Mounting Bracket OEM E P/N x 3/8 P. PHS 18-8 OEM E P/N Thermocouple Connector P/N X 1/4, SHCS, 18-8 OEM E / P/N X 1/2 SHCS (5) OEM / P/N Front Ferrule 1/8 P/N Back Ferrule 1/8 P/N #6 Regular Spring Washer, 18-8 (5) OEM P/N Washer #6 Standard 18-8 (5) OEM E P/N 83112V O-Ring 212 OEM E P/N SHCS X 3/8 OEM E P/N Vaporizer Blankoff Clamp OEM E P/N 83031V AS-568A UNI O-Ring OEM E P/N SHCS 6-32 X 1 1/4 OEM E P/N Vaporizer Blank-Off Aluminum OEM E P/N Sub-Block Manifold Nylon OEM E P/N 83010V O-Ring, -110 OEM E P/N O-Ring, -237 Buna N OEM E *Note: The handles have been removed for drawing clarity. A-4

6 Index by OEM Number A A A A A A A A A A A A A A-4 E A-1 E A-1 E A-4 E A-2 E A-1 E A-3 E A-3 E A-3 E A-2 E A-2 E A-1 E A-2 E A-2 E A-1 E A-1 E A-1 E A-2 E A-1 E A-1 E A-3 E A-4 E A-2 E A-2 E A-1 E A-1 E A-1 E A-4 E A-4 E A-1 E A-2 E A-4 E A-1 E A-2 E A-2 E A-1 E A-1 E A-1 E A-3 E A-4 E A-3 E A-4 E A-4 E A-4 E A-3 E A-3 E A-3 E A-4 E A-3 E A-2 E A-2 E A-2 E A-3 E A-4 E A-4 E A-2 E A-2 / A-3 E A-4 Index by Glemco Part Number A A C A D A A A A A A A A W A W A A A W A A A A W A W A A W A BW A W A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A A V A V A V A V A V A A V A A A A A A A A-2 8A445 A-2 Index - OEM / Glemco PN.