Applications Served Rotary stages Barrels Platens Planetaries Web coater rollers used in thin film deposition and etching processes

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2 KJL Solid Shaft Rotary Feedthroughs (Thread Mount) These ferrofluid rotary feedthroughs are sealed by a fluorocarbon o- ring. The operator mounts these drives to the vacuum chamber by screwing them into a corresponding threaded hole. On some models the drive s threaded end is inserted through a suitable diameter hole in the chamber wall and retained with a nut. Some models are threaded only part way. They will accommodate various wall thicknesses when used with a sleeve or spacer over the unthreaded portion so that the nut compresses the o-ring. In vacuum practice, the o-ring is compressed against the vacuum chamber s inner surface to limit virtual leaks. s shown in the dimensional drawings, most ferrofluid feedthroughs are designed to be installed this way. few, however, are intended to have the o-ring sealing against the air surface. To reduce the virtual leaks associated Part No. Mounting Water ooling Shaft O.. Face Seal O-Ring KLFTM /16-24 UNF-2 No 3/16 O-V012 KLFTM /16-20 UNF-2 No 1/4 O-V015 KLFTM UNS-2 No 1/2 O-V128 KLFTM050114W 1-14 UNS-2 Yes 1/2 O-V128 KLFTM UNS-2 No 3/4 O-V128 KLFTM075114W 1-14 UNS-2 Yes 3/4 O-V128 imensions (Imperial inches) Part No. F KLFTM KLFTM KLFTM KLFTM050114W KLFTM KLFTM075114W with the thread, the feedthrough has a flat machined along the length of its threaded portion. Please refer to the technical notes about loading, temperature, and other relevant information before specifying a feedthrough. Features Special magnetic fluid in place of an o-ring seal around dynamic parts Unlike typical o-rings, the ferrofluid remains intact for years of operation despite the shaft s motion pplications Served Rotary stages arrels Platens Planetaries Web coater rollers used in thin film deposition and etching processes Specifications (Metric Millimeters) Part No. Mounting Water ooling Shaft O.. Face Seal O-Ring KLFMTM04M12 M12 x 1.5 No 4 O-V015 KLFMTM05M12 M12 x 1.5 No 5 O-V015 KLFMTM06M12 M12 x 1.5 No 6 O-V015 KLFMTM12M25 M25 X 1.5 No 12 O-V220 KLFMTM12M25W M25 X 1.5 Yes 12 O-V220 KLFMTM20M30 M30 X 1.5 No 30 O-V226 KLFMTM20M30W M30 X 1.5 Yes 30 O-V226 imensions (Metric Millimeters) Part No. F Keyway KLFMTM04M N/ KLFMTM05M N/ KLFMTM06M N/ KLFMTM12M W x 2.50 x 20.0 L KLFMTM12M25W W x 2.50 x 20.0 L KLFMTM20M W x 3.50 x 25.0 L KLFMTM20M30W W x 3.50 x 25.0 L F Kurt J. Lesker ompany sales@lesker.com

KJL Hollow Shaft Rotary Feedthroughs (artridge Mount) artridge mounted ferrofluid rotary feedthroughs can replace existing vacuum shafts or spindles which use dynamic o-ring seals (defined as o-ring

To remedy this, replace the shaft having the dynamic seal and select a cartridge feedthrough with an O that slips inside the seal well in the process vacuum wall.

3 KJL Hollow Shaft Rotary Feedthroughs (artridge Mount) artridge mounted ferrofluid rotary feedthroughs can replace existing vacuum shafts or spindles which use dynamic o-ring seals (defined as o-ring seals which press against a moving surface). ynamic o-ring seals frequently cause leaks in processes using vacuum in a manufacturing environment. To remedy this, replace the shaft having the dynamic seal and select a cartridge feedthrough with an O that slips inside the seal well in the process vacuum wall. The static o-ring seals on the cartridge s grooved outer surface do not move, making them far less likely to leak than dynamic o-ring seals. imensions (Imperial Inches) Part No. F KLFH KLFH KLFH KLFH KLFH F Part No. Mounting Shaft O.. Outer O-Ring Inner O-Ring KLFH050 artridge ccepts O-V032 O-V014 KLFH100 artridge ccepts O-V037 O-V022 KLFH150 artridge ccepts O-V041 O-V029 KLFH200 artridge ccepts O-V153 O-V033 KLFH300 artridge ccepts O-V159 O-V151 imensions (Metric Millimeters) Part No. F KLFMH KLFMH KLFMH KLFMH KLFMH KLFMH KLFMH Specifications (Metric Millimeters) Part No. Mounting Shaft O.. Face Seal O-Ring Outer O-Ring Inner O-Ring KLFMH10 artridge ccepts 10 (-.01 / -0.03) O-V128 O-V131 O-V012 KLFMH20 artridge ccepts 20 (-.01 / -0.03) O-V135 O-V137 O-V019 KLFMH25 artridge ccepts 25 (-.01 / -0.03) O-V137 O-V140 O-V022 KLFMH30 artridge ccepts 30 (-.01 / -0.03) O-V142 O-V147 O-V025 KLFMH40 artridge ccepts 40 (-.01 / -0.03) O-V151 O-V152 O-V129 KLFMH50 artridge ccepts 50 (-.01 / -0.03) O-V152 O-V153 O-V135 KLFMH75 artridge ccepts 75 (-.01 / -0.03) O-V159 O-V160 O-V149

KJL Hollow Shaft Rotary Feedthroughs (O-Ring Flanged) These ferrofluid rotary feedthroughs are particularly useful for process development applications involving modified shaft details requiring

Most models in this group of feedthroughs have o-ring grooved NSI/S compatible flanges (alternate flange designs are listed with dimensions below).

4 KJL Hollow Shaft Rotary Feedthroughs (O-Ring Flanged) These ferrofluid rotary feedthroughs are particularly useful for process development applications involving modified shaft details requiring supply of cooling, power, or instrumentation leads to the rotating part. Most models in this group of feedthroughs have o-ring grooved NSI/S compatible flanges (alternate flange designs are listed with dimensions below). Please note, a eublin water union allows for external water connections. The water feed tubes rotate along with the feedthrough. imensions (Imperial Inches) F Part No. F olt Holes KLFHOF (4) x 0.75 O on 4.75 KLFHOF05060W (4) x 0.75 O on 4.75 KLFHOF (4) x 0.75 O on 5.5 KLFHOF10070W (4) x 0.75 O on 5.5 KLFHOF (4) x 0.75 O on 5.5 KLFHOF15070W (4) x 0.75 O on 5.5 KLFHOF (4) x 0.75 O on 5.5 KLFHOF20070W (4) x 0.75 O on 5.5 KLFHOF (8) x 0.87 O on 8.5 KLFHOF30010W (8) x 0.87 O on 8.5 Part No. Mounting Water ooling Shaft O.. Face Seal O-Ring Inner O-Ring KLFHOF Flange No ccepts O-V238 O-V014 KLFHOF05060W 6.00 Flange Yes ccepts O-V238 O-V014 KLFHOF Flange No ccepts O-V244 O-V022 KLFHOF10070W 7.00 Flange Yes ccepts O-V244 O-V022 KLFHOF Flange No ccepts O-V244 O-V029 KLFHOF15070W 7.00 Flange Yes ccepts O-V244 O-V029 KLFHOF Flange No ccepts O-V244 O-V033 KLFHOF20070W 7.00 Flange Yes ccepts O-V244 O-V033 KLFHOF Flange No ccepts O-V262 O-V151 KLFHOF30010W Flange Yes ccepts O-V262 O-V151 imensions (Metric Millimeters) Part No. F olt Holes KLFMHOF (4) x 10 O on 70 KLFMHOF1090W (4) x 10 O on 70 KLFMHOF (4) x 10 O on 85 KLFMHOF20105W (4) x 10 O on 85 KLFMHOF (4) x 10 O on 100 KLFMHOF25120W (4) x 10 O on 100 KLFMHOF (4) x 10 O on 100 KLFMHOF30120W (4) x 10 O on 100 KLFMHOF (4) x 12 O on 120 KLFMHOF40145W (4) x 12 O on 120 KLFMHOF (4) x 12 O on 135 KLFMHOF50160W (4) x 12 O on 135 KLFMHOF (8) x 12 O on 185 KLFMHOF75210W (8) x 12 O on 185 Kurt J. Lesker ompany sales@lesker.com

Specifications (Metric Millimeters) Part No. Mounting Water ooling Shaft O.. Face Seal O-Ring Inner O-Ring KLFMHOF1090 90 Flange No ccepts 10 (-0.01 / -0.

5 Specifications (Metric Millimeters) Part No. Mounting Water ooling Shaft O.. Face Seal O-Ring Inner O-Ring KLFMHOF Flange No ccepts 10 (-0.01 / -0.03) O-V223 O-V012 KLFMHOF1090W 90 Flange Yes ccepts 10 (-0.01 / -0.03) O-V223 O-V012 KLFMHOF Flange No ccepts 20 (-0.01 / -0.03) O-V226 O-V019 KLFMHOF20105W 105 Flange Yes ccepts 20 (-0.01 / -0.03) O-V226 O-V019 KLFMHOF Flange No ccepts 25 (-0.01 / -0.03) O-V229 O-V022 KLFMHOF25120W 120 Flange Yes ccepts 25 (-0.01 / -0.03) O-V229 O-V022 KLFMHOF Flange No ccepts 30 (-0.01 / -0.03) O-V232 O-V025 KLFMHOF30120W 120 Flange Yes ccepts 30 (-0.01 / -0.03) O-V232 O-V025 KLFMHOF Flange No ccepts 40 (-0.01 / -0.03) O-V235 O-V129 KLFMHOF40145W 145 Flange Yes ccepts 40 (-0.01 / -0.03) O-V235 O-V129 KLFMHOF Flange No ccepts 50 (-0.01 / -0.03) O-V238 O-V135 KLFMHOF50160W 160 Flange Yes ccepts 50 (-0.01 / -0.03) O-V238 O-V135 KLFMHOF Flange No ccepts 75 (-0.01 / -0.04) O-V250 O-V149 KLFMHOF75210W 210 Flange Yes ccepts 75 (-0.01 / -0.04) O-V250 O-V149 KJL Solid Shaft Rotary Feedthroughs (aseplate Mount) These ferrofluid rotary feedthroughs are sealed by a fluorocarbon o-ring. The operator mounts these drives to the vacuum chamber by placing them in a suitable smooth-sided port in the chamber wall, using a capture nut to secure the unit. Some models are threaded only part way. They will accommodate various wall thicknesses when used with a sleeve or spacer over the unthreaded portion so that the nut compresses the o-ring. In vacuum practice, the o-ring is compressed against the vacuum chamber's inner surface to limit virtual leaks. s shown in the dimensional drawings, most ferrofluid feedthroughs are designed to be installed this way. few, however, are intended to have the o-ring sealing against the air surface. To reduce the virtual leaks associated with the thread, the feedthrough has a flat machined along the length of its Part No. Mounting Shaft O.. Face Seal O-Ring KLFP /4" P 1/4" O-V026 KLFP " P 1/4" O-V026 KLFP " P 3/8" O-V026 KLFP " P 3/8" O-V132 KLFP " P 1/4" O-V026 KLFP " P 1/4" O-V132 imensions (Imperial Inches) Part No. F KLFP KLFP KLFP KLFP KLFP KLFP Specifications (Metric Millimeters) Part No. Mounting Shaft O.. Face Seal O-Ring KLFMP P 6 P35 KLFMP P 10 P41 imensions (Metric Millimeters) Part No. F KLFMP KLFMP F

KJL Solid Shaft Rotary Feedthroughs (F Flanged) esigned to provide rotary motion under high vacuum, these ferrofluid feedthroughs have onflat-compatible (F) mounting flanges.

F flanged rotary motion feedthroughs routinely operate in the 10-6 torr range and, when properly prepared & installed, may be used to mid 10-10 torr. Part No. Mounting Shaft O.. Shaft O.. KLFF025133 1.

6 KJL Solid Shaft Rotary Feedthroughs (F Flanged) esigned to provide rotary motion under high vacuum, these ferrofluid feedthroughs have onflat-compatible (F) mounting flanges. Normal helium leak detectors capable of detecting 1 x std cc/sec of Helium flow detect no leakage for F mounts under static and dynamic testing. F flanged rotary motion feedthroughs routinely operate in the 10-6 torr range and, when properly prepared & installed, may be used to mid torr. Part No. Mounting Shaft O.. Shaft O.. KLFF F No 1/4 KLFF F No 1/4 KLFF025275W 2.75 F Yes 1/4 KLFF F No 3/8 KLFF037275W 2.75 F Yes 3/8 KLFF F No 1/2 imensions (Imperial Inches) Part No. KLFF KLFF KLFF025275W KLFF KLFF037275W KLFF What s New? nhanced ordering tables ven more stringent security asier to use navigation ll new drawings and product views Featured products and news ven more technical resources VacuFIN our revamped and pinpoint accurate site search Things To o Sign up for our Vacu program Subscribe to our RSS News Feed - Lesker Times rowse our newly revamped careers section Purchasers: order online efficiently with our Quick Order sheet found on the homepage. Kurt J. Lesker ompany sales@lesker.com

7 KJL Solid Shaft Rotary Feedthroughs (O-Ring Flanged) These ferrofluid rotary feedthroughs are sealed by a fluorocarbon o-ring. The operator mounts these drives to the vacuum chamber by placing them in a suitable smooth-sided port in the chamber wall and using a capture nut. Some models are threaded only part way. They will accommodate various wall thicknesses when used with a sleeve or spacer over the unthreaded portion so that the nut compresses the o-ring. In vacuum practice, the o-ring is compressed against the vacuum chamber's inner surface to limit virtual leaks. s shown in the dimensional drawings, most ferrofluid feedthroughs are designed to be installed this way. few, however, are intended to have the o-ring sealing against the air surface. To reduce the virtual leaks associated with the thread, the feedthrough has a flat machined along the length of its threaded portion. imensions (Imperial Inches) Part No. Mounting Water ooling Shaft O.. Face Seal O-Ring KLFOF Flange No 1/2 O-V234 KLFOF05060W 6.00 Flange Yes 1/2 O-V234 KLFOF05070W 7.00 Flange Yes 1/2 O-V351 KLFOF07550W 5.00 Flange Yes 3/4 O-V337 KLFOF Flange No 3/4 O-V234 KLFOF10060W 6.00 Flange Yes 1 O-V340 Part No. olt Holes Keyway KLFOF (4) x 0.75 O on W x x 1.00 L KLFOF05060W (4) x 0.75 O on W x x 1.00 L KLFOF05070W (6) x O on W x x 3.38 L KLFOF07550W (6) x O on W x x 1.00 L (2.00 L Vac S) KLFOF (4) x 0.75 O on W x x 1.00 L KLFOF10060W (6) x O on W x x 2.50 L (3.50 L Vac S) Specifications (Metric Millimeters) Part No. Mounting Shaft O.. Face Seal O-Ring KLFMOF Flange 6 O-V214 KLFMOF Flange 10 O-V217 KLFMOF Flange 12 O-V220 KLFMOF Flange 20 O-V226 KLFMOF Flange 30 O-V346 imensions (Metric Millimeters) Part No. olt Holes Keyway KLFMOF (4) x 10 O on 60 N/ KLFMOF (4) x 10 O on W x 1.85 x 14.0 L KLFMOF (4) x 10 O on W x 2.50 x 20.0 L KLFMOF (4) x 10 O on W x 3.55 x 25.0 L KLFMOF (6) x 12 O on W x 5.00 x 80.0 L

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INDIAN INSTITUTE OF TECHNOLOGY KANPUR Kanpur , Uttar Pradesh, India Centre for Lasers and Photonics

INDIAN INSTITUTE OF TECHNOLOGY KANPUR Kanpur 208016, Uttar Pradesh, India Centre for Lasers and Photonics Enquiry no.: CELP/RV/EQP/MHR/2017/1 Enquiry date: 23/04/2018 Closing date: 17/05/2018 Sealed quotations