Scientific vapor pumps

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1 Scientific vapor pumps Vapor pumps for scientific instruments and R&D applications Diffusion pumps technology and applications - Diffstak -4 Diffstak installation - EO50/60-4 Diffstak combined outfits -5 Vapor pump accessories -5 idealvac.com (505) idealvac.com

2 VAPOR PUMPS FOR SCIENTIFIC INSTRUMENTS AND R&D APPLICATIONS Diffusion Vapor pumps pumps for scientific technology instruments and applications R&D applications Scientific and R & D applications require special vapor pumps and accessories. It is important to minimize any backstreaming of the vapor pump fluid, and the number of elastomer seals used in system design needs to be kept to a minimum, to give clean pumping with minimal outgassing. For bench-top or transportable instruments, compact air-cooled pumps are essential. BOC Edwards offers a range of vapor pumps and accessories which are designed to meet these needs. Measurement methods The methods used to measure pressure and flow have become more accurate in recent years allowing much tighter controls over system conditions. The speeds and throughputs quoted in the catalog for the diffusion pumps are based on actual pump data derived from measurements made with the latest technology total pressure gauges and mass flow transducers in accordance with ISO standards. Some confusion could arise with previously published speed and throughput figures for older designed pumps where, historically, pressure measurements were made with partial pressure gauges like the McLeod gauge. This older gauge can indicate speeds up to 0% higher than that expected using state of the art total pressure gauges. Further confusion could arise from the measurement standards chosen to determine pumping performance. In the case of AVS (American Vacuum Society), this can indicate speeds and throughput up to 5% higher than ISO figures. Historical industry practice meant that in considering the above, and potential gauge accuracy of ± 5%, it was possible to have speeds quoted 60% higher than might be expected using modern total pressure measurement equipment. This should be carefully considered when comparing specifications for older derived data published for similarly sized competitor pumps and BOC Edwards diffusion pumps. Ultimate vacuum The ultimate vacuum of a vapor pump is the lowest pressure achieved in tests on the pump, measured above the inlet of the pump (or above the high vacuum valve for the Diffstaks). The ultimate vacuum depends on: the type of fluid used in the pump; the temperature of the inlet baffle; the amount of outgassing from the vacuum system; and the amount of leakage into the system. Critical backing pressure The critical backing pressure is the highest pressure that a pump can tolerate in the backing line. If the pressure is higher than the critical backing pressure, the pump may stall. The critical backing pressure depends on: the pump design; the power of the heaters; and the fluid used in the vapor pump. Backstreaming Backstreaming is the direct movement of molecules of pump fluid vapor from the pump toward the vacuum system. All BOC Edwards pumps are specially designed to minimize backstreaming; the pumps have a guard ring (sometimes called a cool-cap) fitted above the top jet. The guard ring condenses vapor molecules moving from the top jet toward the vacuum system. In some sensitive applications, backstreaming may be very undesirable; you can minimize backstreaming if you fit a baffle or a trap to the top of the pump. Diffstak vapor diffusion pumps The compact water-cooled Diffstak pumps with an integral cooled baffle offer exceptionally clean pumping with very low backstreaming, reduced outgassing, and a reduction in the number of elastomer seals required for installation. The Diffstak design has been proven over many years with thousands of pumps installed. They are supplied in three types: standard, cryo-cooled and unvalved. (C collar model pumps). The standard Diffstak pumps have integral high vacuum valves and watercooled baffles. The cryo-cooled versions (CR model pumps) have a liquid nitrogen cooled baffle supplied from a reservoir attached to the pump and are intended for pumping heavy vapor loads. Valves on both versions are supplied as either manually operated (M-model pumps) or pneumatically operated (P-model pumps). When comparing pumping speeds, note that the speeds quoted for valved Diffstaks are the speeds above the high vacuum valve, taking full account of the valve's impedance. The unvalved Diffstaks are for systems requiring the highest possible ultimate vacuum or for those which do not need a high vacuum valve. All sizes are available with ISO flanges while two sizes are also available with CF flanges. (F ConFlat model pump). The complete range is shown in the table below. Refer to the following pages for full technical data for each of the pumps and also for full details of installations, spares and accessories. STANDARD CRYO-COOLED UNVALVED DIFFSTAK DIFFSTAK DIFFSTAK ISO FLANGE CF FLANGE 6/50M or P CR6/50M or P 6/50C 0/00M or P CR0/00M or P 0/00C 0/00F 60/700M or P CR60/700M or P 60/700C 60/700F 50/000M or P CR50/000M or P 50/000C Fast cycling on unvalved systems For fast cycling pumping systems we recommend our TV range of water or air-cooled pumps. Primarily designed for the evacuation of cathode ray tubes, they will also suit other fast cycling pumping applications. Accessories For vapor pump accessories see page -5. APPLICATIONS Mass spectrometry Gas analysis Leak detection Thin film coating High vacuum systems Lamp evacuation Surface physics Small vacuum ovens Vacuum isolation/cryo transfer EO50/60 diffusion pump The EO50/60 is a compact, fast warm-up, air-cooled diffusion pump and makes a good choice for small, low-cost systems. The high helium pumping speed from a pump only 76 mm high is a particular benefit for GCMS applications. For EO, EO4, EO6 diffusion pumps contact BOC Edwards. ConFlat is a registered trademark of Varian, Inc

3 DATA SUMMARY VAPOR PUMPS PUMP 6/50M 6/50C 6/50P Catalog page -4-5 Nitrogen l s Hydrogen l s Hydrogen (baffled) l s - Minimum backing pump displacement m h Inlet connection ISO6 ISO6 NW NW PUMP 0/00M 0/00P 0/00C 0/00F Catalog page -6-7 Nitrogen l s Hydrogen l s Hydrogen (baffled) l s - Minimum backing pump displacement m h Inlet connection ISO0 ISO0 / 6 in NW5 NW5 PUMP 60/700M 60/700P 60/700C 60/700F Catalog page -8-9 Nitrogen l s Hydrogen l s Hydrogen (baffled) l s - Minimum backing pump displacement m h- Inlet connection ISO60 ISO60 / 8 in SCIENTIFIC VAPOR PUMPS PUMP 50/000M 50/000C 50/000P Catalog page - - Nitrogen l s Hydrogen l s Hydrogen (baffled) l s - Minimum backing pump displacement m h Inlet connection ISO50 ISO50 NW40 NW40 PUMP EO50/60 Catalog page -4 Air l s- 60 Air (baffled) l s - 7 Nitrogen l s - Hydrogen l s - 70 Hydrogen (baffled) l s - 50 Minimum backing pump displacement m h - Inlet connection NW50 flange NW flange For maximum throughput. (6/50M and 6/50P For applications where maximum throughput is not required, use an RV.)

4 STANDARD DIFFSTAK 6/50M AND 6/50P 60 (4.7) (8.8) Ø0 (5.) 5 7 (4.) (0.67) 4 x Ø9 (0.5) x Ø (4.) 94 (.70) 50 (.97) 70 (.75) (.56) (.5) (5.6) 6 (8.50) Ø76 (.99) 5 (4.9) Diffstak 6/50M 4 Diffstak Standard Diffstak 6/50M Standard Diffstak 6/50P M model pumps have a manually operated high vacuum isolation valve. P model pumps have a pneumatically actuated high vacuum isolation valve. nitrogen 5 l s - hydrogen 00 l s - Minimum backing pump displacement 5 m h - RV5 Recommended fluid Santovac 5 Fluid charge (dry) 60 ml Inlet connection compatible with ISO6 NW Cooling water connection 6 mm compression fittings 0.45 kw Minimum cooling-water flow at 0 C 4 l h - Pneumatic connections 6 mm coupling x!/4 BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 psi Maximum 6.9 bar / 0 psi 6/50M 8 kg 6/50P 9 kg For maximum throughput. For applications where maximum throughput is not required, use an RV. 6/50P only Santovac Silicone DC Silicone DC704EU Silicone DC l s Diffstak 6/ mbar Diffstak 6/50P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak 6/50M -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B44978 Diffstak 6/50P -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B44978 Supplied with: NW elbow, NW centering-ring, NW clamp, water pipe couplings and ferrules, inlet ISO 6 Co-Seal 60 (4.7) (8.8) Ø0 (5.) 5 7 (4.) (0.67) 94 (.70) 50 (.97) 4 x Ø9 (0.5) x Ø (4.) Ø76 (.99) 5 (4.9) Heater (0.45 kw) -5 V H V H V H07009 Valve plate "O" ring VIT05 H06050 Valve shaft seal "O" ring VIT00 H060 Valve blanking plate "O" ring VIT0 H060 Backing "O" ring assembly (fluoroelastomer) C595 Drain and filler plug "O" rings H007 ck of 5 For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page 5-4; for electropneumatic control valves, see page 5-0; for thermal snap-switch accessories, see page -5; for hardware components, see page 6-; and for vapor pump fluids, see page (5.) 70 (.75) (.56) (.5) 0 (8.66) Santovac is a registered trademark of Santovac Fluids Inc, USA

5 UNVALVED DIFFSTAK 6/50C Ø95 (.74) 69 (.7) 48 (5.8) 79 (7.05) 4 (.5) 70 (.76) Ø76 (.99) 50 (.97) 85 (.5) 55 (6.) 94 (.70) (4.80) 9 (7.56) Unvalved Diffstak 6/50C C model pumps have an unvalved ISO collar inlet flange. nitrogen 50 l s - hydrogen 5 l s - Minimum backing pump displacement 5 m h - RV5 Recommended fluid Santovac 5 Fluid charge (dry) 60 ml Inlet connection ISO6 NW Cooling water connection 6 mm compression fittings Minimum cooling-water flow at 0 C 4 l h kw 5 kg For maximum throughput. Diffstak 6/50C -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B44978 Supplied with: NW elbow, NW centering-ring, NW clamp, water pipe couplings and ferrules, inlet ISO 6 Co-Seal. Heater (0.45 kw) -5 V H V H V H07009 For information about spares, refer to standard Diffstak 6/50 (see page -4). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page 5-4; for electropneumatic control valves, see page 5-0; for thermal snap-switch accessories, see page -5; for hardware components, see page 6-; and for vapor pump fluids, see page For information on the Cryo-cooled version, contact BOC Edwards. 5SCIENTIFIC VAPOR PUMPS Santovac Silicone DC Silicone DC704EU Silicone DC l s Diffstak 6/50C -5-4 mbar

6 6 STANDARD DIFFSTAK 0/00M AND 0/00P Standard Diffstak 0/00M Standard Diffstak 0/00P M model pumps have a manually operated high vacuum isolation valve. P model pumps have a pneumatically actuated high vacuum isolation valve. nitrogen 80 l s - hydrogen 500 l s - Minimum backing pump displacement 5 m h - RV5 or RV8 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection compatible with ISO0 NW5 Cooling water connection 6 mm compression fittings 0.65 kw Minimum cooling-water flow at 0 C 60 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 psi Maximum 6.9 bar / 0 psi 0/00M kg 0/00P kg For maximum throughput 0/00P only Santovac Silicone DC Silicone DC704EU Silicone DC (7.) Diffstak 0/00M 47 (7.) Diffstak 0/00P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak 0/00M -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B46978 Diffstak 0/00P -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B46978 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules, inlet ISO 0 Co-Seal 76 (.87) Ø65 (6.5) 76 (.87) Ø65 (6.5) 8 5 (4.5) (.8) 8 5 (.8) (4.5) 8 x Ø9 (0.5) x Ø45 (5.7) 8 x Ø9 (0.5) x Ø45 (5.7) 5 (6.0) Ø (4.7) 7 (5.0) 8 Ø (4.) 40 (.58) Heater (0.65 kw) -5 V H V H V H Valve plate "O" ring VIT046 H0606 Valve shaft seal "O" ring VIT00 H060 Valve blanking plate "O" ring VIT0 H060 Backing "O" ring assembly (fluoroelastomer) C5495 Drain and filler plug "O" rings H007 ck of 5 (7.) 7 (5.0) 7 (5.0) 8 (7.) 86 (.9) (4.8) 40 (.57) 86 (.9) 6 6 (4.7) (4.8) (4.7) 7 (.67) 75 (.8) l s - For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page 5-4; for electropneumatic control valves, see page 5-0; for thermal snap-switch accessories, see page -5; for hardware components, see page 6-; and for vapor pump fluids, see page Diffstak 0/ mbar

7 UNVALVED DIFFSTAK 0/00C AND 0/00F Ø0 (5.) 84 (.) 77 (6.97) 06 (8.) 44 (6.0) 7 (5.0) Ø (4.7) 40 (.57) 86 (.9) (4.8) 6 (8.5) 7 (5.0) 59 (6.6) 5 (9.9) Unvalved Diffstak 0/00C Unvalved Diffstak 0/00F C model pumps have an unvalved ISO collar inlet flange. F model pumps are unvalved and have a copper compression gasket flange (ConFlat ). nitrogen 00 l s - hydrogen 55 l s - Minimum backing pump displacement 5 m h - RV5 or RV8 Recommended fluid Santovac 5 Fluid charge (dry) 5 ml Inlet connection 0/00C ISO0 0/00F 6 inch NW5 Cooling water connection 6 mm compression fittings Minimum cooling-water flow at 0 C 60 l h kw 0/00C 9 kg 0/00F kg For maximum throughput Santovac Silicone DC Silicone DC704EU Silicone DC l s - Diffstak 0/00C Diffstak 0/00F Diffstak 0/00C -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B46978 Diffstak 0/00F -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules inlet ISO Co-Seal (C version only). Ø5 (5.98) 5 (4.) 98 (7.8) 7 (8.94) 6 x Ø8. (0.) x Ø0. (5.) 45 (7.) Ø9 (4.9) 7 (5.0) 7 (5.0) 59 (6.6) 5 (9.9) Heater (0.65 kw) -5 V H V H V H For information about spares, refer to standard Diffstak 0/00 (see page -6). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page 5-4; for electropneumatic control valves, see page 5-0; for thermal snap-switch accessories, see page -5; for hardware components, see page 6-; and for vapor pump fluids, see page For information on the Cryo-cooled version, contact BOC Edwards. 40 (.57) 86 (.9) (4.8) 6 (8.5) 7SCIENTIFIC VAPOR PUMPS Diffstak 0/00C, F mbar

8 STANDARD DIFFSTAK 60/700M AND 60/700P 6 (4.0) 64 (4.) Ø5 (8.86) 58 (4.84) (.8) 8 x Ø (0.4) x Ø00 (7.87) 9 (7.56) 50 (5.9) Ø57 (6.8) 70 (6.69) 8 (8.58) 90 (.54) 4 50 (4.88) (5.9) 54 (.94) 8 Standard Diffstak 60/700P M model pumps have a manually operated high vacuum isolation valve. P model pumps have a pneumatically actuated high vacuum isolation valve. nitrogen 700 l s - hydrogen 00 l s - Minimum backing pump displacement m h - RV or EM8 Recommended fluid Santovac 5 Fluid charge (dry) 55 ml Inlet connection compatible with ISO60 NW5 Cooling water connection mm compression fittings.5 kw Minimum cooling-water flow at 0 C 5 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 psi Maximum 6.9 bar / 0 psi 60/700M 6 kg 60/700P 7 kg For maximum throughput 60/700P only Santovac Silicone DC Silicone DC704EU Silicone DC l s - 4 Diffstak 60/700M 6 (4.0) Diffstak 60/700P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak 60/700M -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B48978 Diffstak 60/700P -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B48978 Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules, inlet ISO 60 Co-Seal 490 (9.9) Ø5 (8.86) 58 (4.84) (.8) 9 (7.5) 8 x Ø (0.4) x Ø00 (7.87) 9 (7.56) 50 (5.9) Ø57 (6.8) 70 (6.69) 8 (8.58) Heater (one heater of each power is required) -5 V 0.5 kw H V kw H V 0.5 kw H V kw H V 0.5 kw H V kw H Valve plate "O" ring VIT H06 Valve shaft seal "O" ring VIT0 H060 Valve blanking plate "O" ring VIT0 H060 Backing "O" ring assembly (fluoroelastomer) C5495 Drain and filler plug "O" rings H007 ck of 5 89 (.50) 4 50 (4.88) (5.9) 0 (.99) Diffstak 60/ mbar For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page 5-4; for electropneumatic control valves, see page 5-0; for thermal snap-switch accessories, see page -5; for hardware components, see page 6-; and for vapor pump fluids, see page 6-46.

9 UNVALVED DIFFSTAK 60/700C AND 60/700F Ø80 (7.09) 8 (4.5) 4 (9.5) 90 (.4) 578 (.76) 9 (7.56) 50 (5.9) Ø56 (6.4) 90 (.54) 50 (5.9) 87 (.) PHOTO REQUIRED 70 (6.69) 8 (8.58) 55 (.98) Unvalved Diffstak 60/700C Unvalved Diffstak 60/700F C model pumps have an unvalved ISO collar inlet flange. F model pumps are unvalved and have a copper compression gasket flange (ConFlat ). nitrogen 760 l s - hydrogen 4 l s - Minimum backing pump displacement m h - RV or EM8 Recommended fluid Santovac 5 Fluid charge (dry) 50 ml Inlet connection 60/700C ISO60 60/700F 8 inch NW5 Cooling water connection mm compression fittings Minimum cooling-water flow at 0 C 5 l h -.5 kw 60/700C 8 kg 60/700F 0 kg For maximum throughput Santovac Silicone DC Silicone DC704EU Silicone DC l s Diffstak 60/700C, F mbar Diffstak 60/700C Diffstak 60/700F Diffstak 60/700C -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B48978 Diffstak 60/700F -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B Supplied with: NW5 elbow, NW5 centering-ring, NW5 clamp, water pipe couplings and ferrules, inlet ISO 60 Co-Seal (C version only). Ø0 (7.99) 8 (4.65) 5 (9.9) 0 x Ø8. (0.) x Ø8 (7.) 00 (.8) 588 (.5) (5.9) Ø56 (6.4) 9 (7.56) (6.69) 8 (8.58) 55 (.98) 90 (.54) 50 (5.9) 87 (.) Heater (one heater of each power is required) -5 V 0.5 kw H V kw H V 0.5 kw H V kw H V 0.5 kw H V kw H For information about spares, refer to standard Diffstak 60/700 (see page -8). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page 5-4; for electropneumatic control valves, see page 5-4; for thermal snap-switch accessories, see page -5; for hardware components, see page 6-; and for vapor pump fluids, see page For information on the Cryo-cooled version, contact BOC Edwards. 9SCIENTIFIC VAPOR PUMPS

10 STANDARD DIFFSTAK 50/000M AND 50/000P 769 (0.8) 65 (4.6) Ø5 (.9) Diffstak 50/000M 94 (.7) (8.5) 4 (.5) 408 (8.) 90 (.4) x Ø (0.4) x Ø (.) Ø6 (.8) 4 (9.5) 4 (6.) 80 (7.09) 0 (.94) 4 (5.8) (.) 6 (4.9) Standard Diffstak 50/000M M model pumps have a manually operated high vacuum isolation valve. P model pumps have a pneumatically actuated high vacuum isolation valve. nitrogen 000 l s - hydrogen 000 l s - Minimum backing pump displacement 40 m h - EM40 Recommended fluid Santovac 5 Fluid charge (dry) 500 ml Inlet connection compatible with ISO50 NW40 Cooling water connection mm compression fittings.5 kw Minimum cooling-water flow at 0 C 80 l h - Pneumatic connections 6 mm coupling x ¼ BSP male stud Pneumatic actuating pressure Minimum.4 bar / 5 psi Maximum 6.9 bar / 0 psi 50/000M 59 kg 50/000P 60 kg For maximum throughput. 50/000P only Santovac Silicone DC Silicone DC704EU Silicone DC (0.8) Diffstak 50/000P The BRV and PVK valves shown in these dimension diagrams are optional accessories. Diffstak 50/000M -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B50978 Diffstak 50/000P -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B50978 Supplied with: NW40 elbow, NW40 centering-ring, NW40 clamp, water pipe couplings and ferrules, inlet ISO 50 trapped "O" ring 74 (8.5) Ø5 (.9) 94 (8.5) (.7) 4 (.5) 465 (8.) x Ø (0.4) x Ø (.) 9 (9.0) Ø6 (.8) (9.5) 4 (6.) Heater (one heater of each power is required) -5 V 0.85 kw H V.4 kw H V 0.85 kw H V.4 kw H V 0.85 kw H V.4 kw H Valve plate "O" ring VIT0449 H0609 Valve shaft seal "O" ring VIT (pack of ) H06 Valve blanking plate "O" ring VIT8 (pack of ) H068 Backing "O" ring assembly (fluoroelastomer) C5695 Drain and filler plug "O" rings (pack of 5) H (.4) 80 (7.09) 0 (.94) 4 (5.8) (.) 590 (.) l s - For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page 5-4; for electropneumatic control valves, see page 5-0; for thermal snap-switch accessories, see page -5; for hardware components, see page 6-; and for vapor pump fluids, see page Diffstak 50/ mbar

11 UNVALVED DIFFSTAK 50/000C C model pumps have an unvalved ISO collar inlet flange. nitrogen 0 l s - hydrogen 00 l s - Minimum backing pump displacement 40 m h - EM40 Recommended fluid Santovac 5 Fluid charge (dry) 500 ml Inlet connection ISO50 NW40 Cooling water connection mm compression fittings Minimum cooling-water flow at 0 C 80 l h -.5 kw 46 kg For maximum throughput Santovac Silicone DC Silicone DC704EU Silicone DC l s - 4 Diffstak 50/000C -5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B50978 Supplied with: NW40 elbow, NW40 centering-ring, NW40 clamp, water pipe couplings and ferrules, inlet ISO 50 trapped "O" ring Heater (one heater of each power is required) -5 V 0.85 kw H V.4 kw H V 0.85 kw H V.4 kw H V 0.85 kw H V.4 kw H For information about spares, refer to standard Diffstak 50/000 (see page -). For information about installation of Diffstak pumps, see page -. For details of suitable backing/ roughing valves, see page 5-4; for electropneumatic control valves, see page 5-0; for thermal snap-switch accessories, see page -5; for hardware components, see page 6-; and for vapor pump fluids, see page For information on the Cryo-cooled version, contact BOC Edwards. SCIENTIFIC VAPOR PUMPS Diffstak 50/000C -5-4 mbar Ø90 (.4) 4 (5.59) 57 (4.06) 8 (5.0) 706 (7.8) 90 (.4) 80 (7.09) Ø6 (.8) 0 (.94) (.) 5 (0.55) 4 (9.5) 90 (.4) 50 (9.8)

12 DIFFSTAK INSTALLATION Diffstak installation M-model pumps have a manually operated high vacuum valve. P-model pumps have a pneumatically operated high vacuum valve. Both M-model and P-model pumps have inlet flanges which are compatible with ISO flanges: the internal diameter of the inlet flange is narrower and the flange is deeper than a standard ISO flange, to accommodate the high vacuum valve. C-model pumps do not have a high vacuum valve and have an ISO flange on the inlet (see pages -5 -). F-model pumps do not have a high vacuum valve and have a CF flange on the inlet (see pages -7 and -9). Refer to the diagrams and the tables on these pages to identify the pipeline components and valves required to complete the typical Diffstak installation shown. Items supplied with the pump are shown as a dotted line. Read the footnotes below the diagrams and the tables for more information and for details of the installation requirements for the different models of Diffstaks. 6/50, 0/00, 60/700 installation 9 *** 5P ** * 5P 5 4P 4P * 8 DIAGRAM COMPONENT 6/50 COMPONENT 0/00 COMPONENT 60/700 COMPONENT KEY DESCRIPTION SIZE QUANTITY SIZE QUANTITY SIZE QUANTITY ISO tube/collar assembly ISO6 ISO0 ISO60 Rotable flange pack ISO6 ISO0 ISO60 4 Bolts (size minimum length, mm) M- and P-model M M M 90 8 F-model M M Inlet seal ISO6 ISO0 ISO60 5 BRV valve, manual BRVM BRV5M BRV5M BRV valve, pneumatic BRVP BRV5P BRV5P 6 Clamp NW NW5 NW5 7 "O' ring assembly NW NW5 NW port light-weight electropneumatic control valve port electropneumatic control valve *** 5-port electropneumatic control valve These items are supplied with the pumps, except that the inlet seal for the F-model pumps is not supplied. Not required for F-model pumps; use CF fittings (which must be obtained from another supplier) Not required for C-model pumps; use claw clamps to bolt the pump ISO inlet flange directly to the ISO tube/collar assembly. 4 Bolts are not available from BOC Edwards. Bolts are not required for C-model pumps; use claw clamps to bolt the pump ISO inlet flange directly to the ISO tube/collar assembly; use 4 claw clamps for ISO6, ISO0 and ISO60 flanges. 5 These inlet seals are suitable for standard, cryo-cooled and C-model pumps only; use CF fittings (which must be obtained from another supplier) for F-model pumps. 6 Required only for pneumatic operation BRV valves; use either 5-port control valve or 4-port control valves. If you use 4-port control valves, you can use the isolation position of the BRV valve. 7 Required only for P-model pumps, to control the operation of the high vacuum valve.

13 50/000 installation 7 6 P ** 5P 5 4 * * P 7 6 ** DIAGRAM COMPONENT COMPONENT KEY DESCRIPTION SIZE QUANTITY ISO tube/collar assembly ISO50 Rotatable flange pack ISO50 Bolts (size, minimum length, M mm) M- & P-model 4 Inlet seal, trapped "O" ring ISO50 5 PV40 valve, manual PV40MK PV40 valve, pneumatic PV40PK 6 Clamp NW "O' ring assembly NW "T' piece NW40 These items are supplied with the pump. Not required for C-model pumps; use 6 claw clamps to bolt the pump ISO inlet flange directly to 9 Elbow NW40 the ISO tube/collar assembly. 4 -port electropneumatic Bolts are not available from BOC Edwards. Bolts are not required for Model-C pumps; use 6 claw control valve clamps to clamp the pump ISO inlet flange directly to the ISO tube/collar assembly. 5 5-port electropneumatic 4 Required only for pneumatic operation PVPK valves; use -port control valve for each of the two PVPK valves. control valve 5 Required only for P-model pumps, to control the high vacuum valve. SCIENTIFIC VAPOR PUMPS

14 EO50/60 AIR COOLED DIFFUSION PUMP 4 54 (.) 76 (.99) 6 (0.6) 76 (6.9) (.6) 8 (.) 540 (.6) 4 9 (.58) NW50 6 (.44) 80 (.5) EO50/60 The model EO50/60 is a compact, fast warm-up air-cooled diffusion pump supplied complete with high integrity inlet Co-Seal, flange clamping ring and optional baffle. The jet assembly is removable for easy cleaning. It meets the need for a low-cost, high vacuum pump for use in desk top or mobile scientific instruments, leak detectors, and general laboratory applications. In many applications the rapid warm-up capability will enable the EO50/60 to be used without an isolation valve. However, the pump is not intended for use on valveless systems where rapid cycling from atmospheric pressure through the hot pump is required. BOC Edwards offers the TV range of diffusion pumps for these applications. Air 60 l s - (7 l s - baffled) Hydrogen 70 l s - (50 l s - baffled) Fluid charge 0 ml Recommended fluid Santovac 5, Silicone DC704EU Minimum backing pump displacement m h - EM.5 Inlet connection NW50 flange NW flange 00 W or 50 W Warm-up time 4 min kg Minimum cooling air flow 4.5 m h - Santovac Silicone DC Silicone DC704EU Silicone DC l s EO50/60 EO50/60 pump, 50/60 Hz, single phase Pump voltage Fan voltage 90 V (0.5 kw) 5 V B V (0. kw) 5 V B V (0.5 kw) 0 V B V (0. kw) 0 V B V (0. kw) 0 V B00740 Supplied with: NW50 combined baffle and centering-ring, NW50 centering-ring and "O" ring, NW50 clamp and NW Co-Seal and clamp. Heater (0. kw) -5 V H V H V H Heater (0.5 kw) 90 V H V H Inlet Co-Seal fluoroelastomer B Backing NW "O" ring assembly, nitrile C59 ACCESSORIES NW Pump ready thermal snap-switch Cooling fail thermal snap-switch Santovac 5 (0 ml) Silicone DC704EU (500 ml) 4 (5.59) B B H400 H040 For valves, see page 5-4. For NW pipeline fittings, see page 6-7. For vapor pump fluids, see page For EO, EO4, EO6 diffusion pumps contact BOC Edwards mbar DC704EU Santovac 5

15 DIFFSTAK COMBINED OUTFITS 65 (4.) 540 (.6) 40 (.9) Diffstak combined outfits Compact unit, delivering ~ x -8 mbar ultimate pressure (depending on vapor pump fluid used) Integrated manual backing/roughing valve and water cooled baffle Active Pirani gauge head * in backing line automatically interlocks the Diffstak Enhanced safety shields for the highest temperature surfaces Castors are fitted as standard Fully factory tested These are compact, high performance units featuring either the 6 mm or 0 mm Diffstak both backed by the RV5 two-stage rotary pump. Inlet pumping speeds above the valve are 5 l s - and 80 l s - respectively. The Diffstak has an integral water cooled baffle and is fitted with manual quarterswing and backing/roughing valves. A manual air admittance valve and a Pirani gauge are fitted in the backing line to the rotary pump. The unit is supplied complete with rotary pump oil but vapor pump fluid should be selected from the fluids and sealants section. Additional gauges are optional extras. A separate display or controller is required to show the pressure measured by the Pirani gauge head. 6 mm Diffstak outfit above Diffstak valve 5 l s - Ultimate vacuum (with Santovac 5 fluid) x -8 mbar x -6 Minimum cooling water flow 4 l h - Maximum power 0.8 kw (approx.) 5 kg Vapor pump Diffstak 6 / 50M Rotary vacuum pump RV5 Backing/roughing valve BRVK Vacuum gauge pirani APG-M-NW6 0 mm Diffstak outfit above Diffstak valve 80 l s - Ultimate vacuum (with Santovac 5 fluid) x -8 mbar x -6 Minimum cooling water 60 l h - Maximum power.0 kw (approx.) 6 kg Inlet connection ISO 0 Outlet connection NW5 Vapor pump Diffstak 0 / 00M Rotary vacuum pump RV5 Backing/roughing valve BRV5K Vacuum gauge pirani APG-M-NW5 The Diffstak combination includes the inlet flange Co-Seal, rotary pump oil and instruction manual. The Diffusion pump oil is not included, but can be ordered through BOC Edwards, see page The power cable (line cord) is not included and needs to be ordered separately, through BOC Edwards, see above. To meet your special requirements we also offer custom built Diffstak combined outfits or combined outfits featuring turbomolecular pumps, see page -7. Please contact us for further details. VAPOR PUMP THERMAL SNAP-SWITCHES Vapor pump accessories 6 mm Diffstak Combined Outfit (requires electrical supply cable) 5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B mm Diffstak Combined Outfit (requires electrical supply cable) 5 V -ph 50/60 Hz B V -ph 50/60 Hz B V -ph 50/60 Hz B66960 ACCESSORIES Line cords for combined outfit m electrical supply cable with IEC socket UK, three pin plug North European plug No plug USA plug A A A A COOLING-FAIL THERMAL SNAP-SWITCH This switch opens at a preset temperature to indicate failure of the cooling water flow. The switch resets (closes) when the pump cools down to a preset temperature. 65 (.56) 4 (0.55) Use with these pumps Diffstak, EO, EO4, EO6, EO9 8B4A and 0B5A Electrical data 5 A at 0 V a.c. or 40 V a.c. Preset operation temperatures Open 46 ± 5 ºC Close (automatic reset) 8 ± 5 ºC 5 (.8) 5SCIENTIFIC VAPOR PUMPS Cooling-fail thermal snap-switch B00000

16 COOLING-FAIL THERMAL SNAP-SWITCH (EO50/60 AND SI0) This switch opens at a preset temperature to indicate failure of the cooling water flow. The switch resets (closes) when the pump cools down to a preset temperature. Ø5.88 (0.6) Ø.68 (0.4) (0.0) (0.7) PUMP-READY THERMAL SNAP-SWITCH This switch opens at a preset temperature to indicate that the pump is at operating temperature. It can be used to control the opening of a high vacuum valve. The switch resets (closes) when the pump cools down to a preset temperature. Ø (0.6) (0.0) (0.6) Ø.6 (0.4) 0.5 (.9).8 (0.94) 0.5 (.9).8 (0.94) 6 Use with these pumps Electrical data Preset operation temperatures Open 50 ± ºC Close (automatic reset) 5 ± ºC Cooling-fail thermal snap-switch EO50/60, SI0, EO0/90 5 A at 0 V a.c. resistive or A at 40 V a.c. resistive B COOLING-FAIL THERMAL SNAP-SWITCH (TVA50/60 AND TVW50/60) This switch opens at a preset temperature to indicate failure of the cooling water flow. The switch resets (closes) when the pump cools down to a preset temperature. Ø5.88 (0.6) Ø.68 (0.4) 0.5 (.9) (0.94) 8.54 (0.0) (0.7) Use with these pumps 90 Electrical data Preset operation temperatures Open 80 ±.8 ºC Close (automatic reset) 60 ±.8 ºC Pump-ready thermal snap-switch All Diffstak, EO50/60, SI0, EO0/ EO4, EO6, EO9 6 A at 0 V a.c. resistive or A at 40 V a.c. resistive or 7 A ar 0 V a.c. or dc, resistive BOILER PROTECTION THERMAL SNAP-SWITCH This switch opens at a preset temperature when the pump boiler base exceeds the maximum safe operating temperature. The switch resets (closes) when the pump cools down to a preset temperature. Ø8.0 (0.7) Ø.6 (0.4) (0.0) (0.6) B (.9).8 (0.94) Use with these pumps Electrical data Preset operation temperatures Open 60 ± ºC Close (automatic reset) 50 ± ºC Cooling-fail thermal snap-switch TVA50/60, TVW50/60 5 A at 0 V a.c. resistive or A at 40 V a.c. resistive B00400 Use with these pumps Electrical data Pre-set operation temperatures Open 00 ± 4.4 ºC Close (automatic reset) 84 ± 4.4 ºC EO50/60, EO0/90, SI0 5 A at 0 V a.c. 50/60 Hz A at 40 V a.c. 50/60 Hz Boiler protection thermal snap-switch B00400

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