Vacuum Components C A T A L O G

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1 Vacuum Components C A T A L O G 1

2 Contents 1 Vacuum valves Angle Valves - 4 Inline Valves - 10 Butterfly & Check Valves s & Fittings Elastomer Seal ISO-KF - 18 Elastomer Seal ISO-LF - 34 Metal Seal CF - 42 Weldable Components

3 1 Section 1 Vacuum Valves Angle Valves Introduction - 4 Air open / Spring close - 6 Air open /Air close - 7 Manual operation - 8 Inline Valves Introduction - 10 Air open / Spring close - 11 Air open /Air close - 12 Manual operation - 13 Butterfly & Check Valves Introduction - 14 Air open / Spring close - 15 Manual operation - 15 Check valve

4 Angle valves Section 1.1 Instruction Neoma high vacuum angle valves are devices that regulate Standard Features the flow of gases, fluids or materials through a structure or UHV, HV series aperture by opening, closing or obstructing a port or passageway. CF, ISO KF, ISO LF flange and tube weld port connections. Angle valve assembly consist of an actuator, a poppet and a valve Manual and Electropneumatic actuators body. The actuator provides the power to position or transport the 220VAC air solenoid valve valve's poppet which is attached to the valve's body via a circular FKM elastomer poppet bonnet flange. The poppet closes or opens one of the valve's Welded bellows actuator body ports. The valve body is a vacuum tight chamber that is TIG welded internal body joints or precision cast body screwed, flanged or welded into a larger vacuum vessel or Electropolished or mechanical polished interior and exterior system. structures. Option Features 24VDC air solenoid valve Magnet, Position sensor(2ea) ISO-KF FLANGE CF FLANGE Port connection guide ISO-LF FLANGE WELDING VCR 4

5 Angle valves Section 1.1 Material of construction Valve Body Shaft Seal Body Seal Poppet Seals Air Piston Seals General specification Bakeability Leak tightness Electropneumatic actuator Manual Actuator Orientation Sealing Specification Fabricated stainless steel type 304 casting and flange welded using the TIG welding process. Internal welds are inspected for pits, cracks, andother irregularities that may cause virtual leaks. Each valve is tested with a helium mass spectrometer leak detector and is guaranteed vacuum tight at minimum sensitivity of std.cc/sec. FKM O-Ring Optional FFKM O-Ring are available. FKM O-Ring FFKM O-Ring available on request. NBR O-Ring Under vacuum, 200 intermittently maximum in the open position.150 sustained contact Neoma for higher temperature requirements. Each valve is tested with a helium mass spectrometer leak detector and is guaranteed vacuum tight at minimum sensitivity of std.cc/sec. Air Pressure : psig. Electrical Power : 220VAC 60Hz, 24VDC Loss of Power : Valves close. Manual models employ a rising acme thread for smooth operation. Valve up to and including 4" ports can be installed in either a vertical or horizontal orientation. Valve with 6" and larger ports must be installed in vertical orientation. 2-1/2 inch and smaller valves will against 15 psi differential atmospheric pressure in either direction. Valve structure AIR CYLINDER POSITION SENSOR SPRING AIR OPEN / SPRING CLOSE MAGNET AIR CONTROL SOLENOID VALVE WELDED BELLOWS ACTUATOR SEAL VALVE BODY POPPET POPPET SEAL FKM OR FFKM 5

6 neoma.co.kr Air open / Spring close Stainless Steel construction Electropneumatic operation For Tubing O.D. A B C D Ref.No. Part No. Remarks NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" Stem Stem Stem Stem Stem Stem Stem Option 24V DC Solenoid valve V AC Solenoid valve - 02 Magnet, Position sensor(2ea)

7 neoma.co.kr Air open /Air close Stainless Steel construction Electropneumatic operation For Tubing O.D. A B C D Ref.No. Part No. Remarks NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" NW160 6" NW200 8" NW250 10" NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" NW160 6" NW200 8" NW250 10" Stem Stem Stem Stem Stem Stem Stem Stem Stem Stem Option 24V DC Solenoid valve V AC Solenoid valve - 02 Magnet, Position sensor(2ea)

8 Manual operation neoma.co.kr Stainless Steel construction For Tubing O.D. A B C D Ref.No. Part No. Remarks NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" NW160 6" NW200 8" NW250 10" NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" NW160 6" NW200 8" NW250 10" Stem Stem Stem Stem Stem Stem Stem Stem Stem Stem 8

9 9

10 Inline valves Section 1.2 Instruction Neoma high vacuum Inline valves are devices that regulate Standard Features the flow of gases, fluids or materials through a structure or UHV, HV series aperture by opening, closing or obstructing a port or passageway. CF, ISO KF, ISO LF flange and tube weld port connections. Angle valve assembly consist of an actuator, a poppet and a valve Manual and Electroneumatic actuators body. The actuator provides the power to position or transport the 220VAC air solenoid valve valve's poppet which is attached to the valve's body via a circular FKM elastomer poppet bonnet flange. The poppet closes or opens one of the valve's Welded bellows actuator body ports. The valve body is a vacuum tight chamber that is TIG welded internal body joints screwed, flanged or welded into a larger vacuum vessel or Electropolished interior and exterior structures. system. Option Features 24VDC air solenoid valve Magnet, Position sensor(2ea) ISO-KF FLANGE CF FLANGE Port connection guide ISO-LF FLANGE WELDING VCR 10

11 Air open / Spring close neoma.co.kr Stainless Steel construction Electropneumatic operation For Tubing O.D. A B C D Ref.No. Part No. Remarks NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" Stem Stem Stem Stem Stem Stem Stem Option 24V DC Solenoid valve V AC Solenoid valve - 02 Magnet, Position sensor(2ea)

12 Air open /Air close neoma.co.kr Stainless Steel construction Electropneumatic operation For Tubing O.D. A B C D Ref.No. Part No. Remarks NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" NW160 6" NW200 8" NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" NW160 6" NW200 8" Stem Stem Stem Stem Stem Stem Stem Stem Stem Option 24V DC Solenoid valve V AC Solenoid valve - 02 Magnet, Position sensor(2ea)

13 Manual operation neoma.co.kr Stainless Steel construction Manual operation For Tubing O.D. A B C D Ref.No. Part No. Remarks NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" NW160 6" NW200 8" NW16 3/4" NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" NW160 6" NW200 8" Stem Stem Stem Stem Stem Stem Stem Stem Stem 13

14 Butterfly & Check valves Section 1.3 Instruction Neoma Butterfly valves and check valve require one-quarter Standard Features turn rotation of the handle and electroneumatiac actuator to go HV series from fully open to the fully closed position. Quick open / Quick close with positive locks Neoma Butterfly valves and check valve are low outgassing. Manual and Electroneumatic actuators All material surfaces are machined and electropolished. 220VAC air solenoid valve FKM elastomer Electropolished interior and exterior structures. Option Features 24VDC air solenoid valve Limits switch Box Butterfly Valve / Worm gear type Butterfly Valve / Handle type Butterfly Valve / Air open / Air close Check Valve 14

15 Butterfly Valve, Air open / Air close For Tubing O.D. A B C D Ref.No. Part No. Remarks NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" Stainless Steel construction EPDM standard NW160 6" Butterfly Valve, Worm gear type For Tubing O.D. A B C D Ref.No. Part No. Remarks NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" Stainless Steel construction EPDM standard NW160 6" Butterfly Valve, Handle type For Tubing O.D. A B C D Ref.No. Part No. Remarks NW25 1" NW40 1-1/2" NW50 2" NW63 2-1/2" NW80 3" NW100 4" NW160 6" Stainless Steel construction EPDM standard

16 Check Valve For Tubing O.D. A B C D Ref.No. Part No. Remarks NW25 1" NW40 1-1/2" NW50 2"

17 2 Section 2 s & Fittings Elastomer Seal ISO KF Introduction - 18 KF s & Fittings - 19 LF Introduction - 34 LF s & Fittings - 35 Metal Seal CF Introduction - 42 CF s & Fittings - 43 Weldable Components Introduction - 62 Tubings & Fittings - 63 Formed bellows - 69 Welded bellows

18 Elastomer ISO Section 2.1 Instruction KF system Neoma KF flange systems are disigned to ISO 2681 specifications for standard "inch" tube sizes from to 2.00 inches. They are compatible with other manufactures' ISO-KF style flanges. Applications ISO-KF flange systems can be used in a wide variety of applications including; Roughing and foreline plumbing Small systems Systems requiring frequent cleaning or modification Research and development laboratories Features Vacuum rated to 1x10-8 Torr Bakeable to 150 Fast connect and disconnect Economical reusable fittings Genderless geometry Rotatable bolt ring adapter Elastomer gasket Varied fastening methods ISO KF and LF compatible Speciality fittings available Type 304 stainless steel construction 18

19 , Short Weld Stub Stainless Steel Type 304 Butt Weld Standard Inch Stub Diameters For Tubing O.D. NW10 1/2" NW16 1/2" NW16 3/4" NW25 1" NW40 1 1/2" NW50 2" A B C Ref.No. Part No (25) 1.50 (38) 2.00 (51) (1.7) (1.7) (1.7) (1.7) (1.7) (1.7) K050-SWS K075-SWS K100-SWS K150-SWS K200-SWS , Long Weld Stub Stainless Steel Type 304 Butt Weld Standard Inch Stub Diameters For Tubing O.D. NW10 1/2" NW16 1/2" NW16 3/4" NW25 1" NW40 1 1/2" NW50 2" A B C Ref.No. Part No (25) 1.50 (38) 2.00 (51) (1.7) (1.7) (1.7) (1.7) (1.7) (1.7) 1.58 (40) 1.58 (40) 1.58 (40) 1.58 (40) 1.58 (40) 1.58 (40) K050-LWS K075-LWS K100-LWS K150-LWS K200-LWS

20 , Blank with Bore Stainless Steel Type 304 Standard Inch Tube O.D.'s For Tubing O.D. NW10 1/4" NW10 3/8" NW10 1/2" NW16 3/8" NW16 1/2" NW16 3/4" NW25 1/4" NW25 3/8" NW25 1/2" NW25 3/4" NW25 1" NW40 1/4" NW40 3/8" NW40 1/2" NW40 3/4" NW40 1" NW40 1 1/2" NW50 1/4" NW50 3/8" NW50 1/2" NW50 3/4" NW50 1" NW50 1 1/2" NW50 2" A B C Ref.No. Part No (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) (7) (10) (11) (10) (17) (7) (10) (17) (22) (7) (8) (11) (17) (22) (35) (7) (8) (11) (17) (22) (35) (48) N/A N/A N/A K075W N/A K075W N/A K075W N/A K100W N/A K100W (26) N/A (10) (26) (39) N/A (10) (26) (39) (51) K100W K100W K150W K150W K150W K150W K150W K200W K200W K200W K200W K200W K200W

21 , Blank-Off NW10 NW16 NW25 NW40 NW50 A Ref.No. Part No (5) 0.20 (5) 0.20 (5) 0.20 (5) 0.20 (5) K075-B K100-B K150-B K200-B Stainless Steel Type 304 Blank Off Unused Ports, Unbored Stub NW10 NW16 NW25 NW40 NW50 A B Ref.No. Part No (25) 1.50 (38) 2.00 (51) 1.00 (25) 1.00 (25) K075-US K100-US K150-US K200-US Stainless Steel Type 304 Wtub may be turned, bored, or tapped to fit 21

22 Seal, Centering Ring Assembly, Viton A Ref.No. Part No. NW10 NW16 K075-CR NW25 K100-CR NW40 K150-CR NW50 K200-CR Max Replaceable Stainless Steel Type 304 Seal, Centering Ring Assembly, Buna-N A Ref.No. Part No. NW10 NW16 K075-CRB NW25 K100-CRB NW40 K150-CRB NW50 K200-CRB Max Replaceable Stainless Steel Type

23 Seal, Centering Ring Assembly, Silicone A Ref.No. Part No. NW10 NW16 K075-CRS NW25 K100-CRS NW40 K150-CRS NW50 K200-CRS Max NW80/100 include aluminum space ring Stainless Steel Type 304 Seal, Centering Ring Assembly w/ Screen, Viton A Ref.No. Part No. NW NW NW NW Stainless Steel Centering Ring Replaceable Viton 72 Mesh Screen Stainless Steel Seal, Adaptive Centering Ring Assembly, Viton Ref.No. Part No. NW16 NW10 K CR NW25 NW20 K CR NW40 NW32 K CR Stainless Steel Centering Ring Replaceable Viton For obsolete bore sizes 23

24 Seal, O-Ring, Viton Standard O-Ring A Ref.No. Part No. NW NW K075-O NW K100-O NW K150-O NW K200-O Standard inch O-Ring sizes NW L250-O NW L300-O NW L400-O Seal, O-Ring, Buna-N Standard O-Ring A Ref.No. Part No. NW NW K075-OB NW K100-OB NW K150-OB NW K200-OB Standard inch O-Ring sizes NW L250-OB NW L300-OB NW L400-OB

25 Seal, O-Ring, Silicone Standard O-Ring A Ref.No. Part No. NW NW K075-OS NW K100-OS NW K150-OS NW K200-OS Standard inch O-Ring sizes Seal, Overpressure NW10 Standard O-Ring 100 PSIG A B C Ref.No. Part No (31) 1.09 (28) (4) NW PSIG 1.31 (33) 1.16 (29) (4) NW PSIG 1.70 (43) 1.56 (40) (4) NW40 75 PSIG 2.31 (59) 2.16 (55) (4) NW PSIG 2.75 (70) 2.67 (68) (4) Stainless Steel Fit over OD of O-Ring See page 4 for installation Use to retain when system is used at internal pressures over atmospheric. Clamps, Wing Nut NW16 10/16 NW25 25/20 NW40 40/32 NW50 50 Fit s A B C Ref.No. Part No (57) 2.76 (70) 3.39 (86) 4.33 (110) 1.69 (43) 2.17 (55) 2.76 (70) 3.70 (94) 0.63 (16) 0.63 (16) 0.63 (16) 0.79 (20) K075-C K100-C K150-C K200-C Aluminum Dimensions are for reference only 25

26 Clamps, Toggle Aluminum Dimensions are for reference only NW16 10/16 NW25 25/20 NW40 40/32 NW50 50 Fit s A B C Ref.No. Part No (57) 2.76 (70) 3.39 (86) 4.33 (110) 1.69 (43) 2.17 (55) 2.76 (70) 3.70 (94) (20) (21) 0.89 (23) K075-T K100-T K150-T K200-T Clamps, Bulkhead Aluminum Adapts to a baseplate or fixed flange Standard KF assembly Stainless Steel bolt and washers included, 10-32x5/8" Number of Bolts NW16 6 NW25 6 NW40 6 NW50 8 A B C Ref.No. Part No (9) 0.39 (10) 0.37 (9) 0.40 (10) 2.00 (51) 2.37 (60) 2.94 (75) 3.75 (95) 1.50 (38) 1.89 (48) 2.44 (62) 3.25 (83) K075-BC K100-BC K150-BC K200-BC Conical Reducers A B Ref.No. Part No. NW25 to NW (16) 2.04 (52) NW25 to NW (16) 1.57 (40) NW40 to NW (16) 3.08 (78) NW40 to NW (22) 2.75 (70) NW40 to NW (22) 1.57 (40) Mates differing ISO-KF size Stainless Steel Type 304 NW50 to NW (22) 2.75 (70) NW50 to NW (22) 1.57 (40) NW50 to NW (34) 2.80 (71) NW50 to NW (34) 1.57 (40)

27 Nipple Reducers A Ref.No. Part No. NW25 to NW (40) NW40 to NW (40) NW40 to NW (40) NW50 to NW (40) NW50 to NW (40) Mates differing ISO-KF size Stainless Steel Type 304 NW50 to NW (40)

28 Conical Reducers A B C Ref.No. Part No. NW63 to NW (86) 2.37 (60) 1.37 (35) NW63 to NW (86) 2.37 (60) 1.87 (47) NW80 to NW (118) 2.87 (73) 1.37 (35) NW80 to NW (118) 2.87 (73) 1.87 (47) NW100 to NW (118) 3.83 (97) 1.87 (47) Stainless steel type 304 Special adapters available upon request NW63 to NW (72) L250XK150 FCR High conductance adapter 2.85 NW63 to NW50 (72.4) L250XK200 FCR NW80 to NW (104) L300XK150 FCR NW80 to NW (104) L300XK200 FCR NW100 to NW (104) L400XK200 FCR Step Adapters A B Ref.No. Part No. NW63 to NW (45) L250XK075 -LP NW63 to NW (45) L250XK100 -LP NW63 to NW (45) 1.37 (35) L250XK150 -LP NW63 to NW (45) 1.87 (47) L250XK200 -LP NW80 to NW (45) 1.37 (35) L300XK150 -LP Stainless steel type NW80 to NW50 (45) 1.87 (47) L300XK200 -LP NW100 to NW (45) 1.87 (47) L400XK200 -LP NW63 to NW (69) 1.37 (35) L250XK NW63 to NW (88) 1.87 (47) L250XK NW80 to NW (69) 1.37 (35) L300XK NW80 to NW (88) 1.87 (47) L300XK

29 Adapters, ISO-KF to NPT-F Pipe Teflon tape recommended to Compatible with most TC and Pirani tubes Stainless steel type 304 (NPT) NW10 1/8" NW10 1/4" NW16 1/8" NW16 1/4" NW25 1/8" NW25 1/4" NW40 1/8" NW40 1/4" NW50 1/8" NW50 1/4" A B Ref.No. Part No (16) 0.62 (16) 0.62 (16) 0.62 (16) 0.88 (22) 0.88 (22) 1.25 (32) 1.25 (32) 1.75 (44) 1.75 (44) 1.00 (25) 1.00 (25) 1.00 (25) 1.00 (25) ISO-KF Elbow 90 Smooth Radius Stainless Steel type 304 Same size flanges both ports Standard modulus NW16 NW25 NW40 NW50 NW16 NW25 NW40 NW50 A Ref.No. Part No (41) 1.67 (42) 2.46 (62) 3.23 (82) 1.57 (40) 1.97 (50) 2.56 (65) 2.76 (70)

30 ISO-KF Elbow 90 with Tangents Stainless Steel type 304 Same size flanges both ports Standard modulus NW16 NW25 NW40 NW40 NW50 NW50 A Ref.No. Part No (49) 2.23 (57) 3.15 (80) 5.12 (130) 4.29 (140) 5.51 (140) K075-2LL K100-2LL K150-2LL K200-2LL ISO-KF Elbow 45 with Tangents A Ref.No. Part No. NW NW Stainless Steel type 304 Same size flanges both port NW40 NW40 NW (46) 1.68 (43) 2.54 (65)

31 ISO-KF Cross NW16 NW25 NW40 NW50 A B Ref.No. Part No (38) 2.04 (52) 2.46 (62) 3.21 (82) 3.0 (76) 4.08 (104) 4.92 (124) 6.42 (164) Stainless Steel type 304 Same size flanges all ports Standard modulus ISO-KF Tee NW16 NW25 NW40 NW50 A B Ref.No. Part No (38) 2.04 (52) 2.46 (62) 3.21 (82) 3.0 (76) 4.08 (104) 4.92 (124) 6.42 (164) Stainless Steel type 304 Same size flanges all ports Standard modulus 31

32 ISO-KF Tee, Reducing Stainless Steel type 304 Same size flanges thru ports NW25 NW25 NW40 NW40 NW50 NW50 (ISO) Tee NW16 NW16 NW16 NW25 NW25 NW40 A B C Ref.No. Part No (78) 2.16 (54) 5.50 (140) 4.60 (116) 3.10 (130) 5.42 (138) 1.53 (39) 1.08 (27) 2.75 (70) 2.30 (58) 2.55 (65) 2.71 (69) 2.04 (52) 1.97 (50) 2.46 (62) 2.46 (62) 3.23 (82) 3.23 (82) , Half Nipples Stainless Steel Type 304 Butt Weld Standard Inch Stub Diameters For Tubing O.D. NW16 3/4" NW25 1" NW40 1 1/2" NW40 1 1/2" NW50 2" A B C Ref.No. Part No. Price 1.00 (25) 1.00 (25) 1.50 (38) 2.00 (51) (1.7) (1.7) (1.7) (1.7) (1.7) 1.57 (40) 1.57 (40) 1.57 (40) 1.57 (40) 1.57 (40) K K K K K ISO-KF Straight Nipples Stainless Steel type 304 Special Lengths to order NW16 NW16 NW25 NW25 NW40 NW40 NW50 NW50 A Ref.No. Part No (80) 3.00 (76) 3.94 (100) 4.08 (104) 5.12 (130) 4.93 (125) 5.51 (140) 6.43 (163) K K K K

33 ISO-KF Flexible Coupling, Thick Wall Stainless Steel NW16 NW25 NW40 NW50 Hose Wall 0.01 (0.25) 0.01 (0.25) (0.4) (0.4) A B Spring Rate Ref.No. Part No ISO-KF Flexible Coupling, Thin Wall Stainless Steel NW16 NW25 NW40 NW50 Hose Wall (0.15) (0.15) (0.15) (0.15) A B Spring Rate Ref.No. Part No ISO-KF Flexible Hose with braid protection Stainless Steel NW16 NW25 NW40 NW50 Hose Wall (0.15) (0.15) (0.15) (0.15) A B Spring Rate Ref.No. Part No

34 Elastomer ISO Section 2.2 Instruction LF system Neoma ISO flange systems are munufactured to the international Standards Organization specification so they can be mated to other manufacturers' ISO flanges. Applications The ISO-Universal component system is used in a variety of industries from process manufacturing to semiconductor fabrication to thin film deposition. Some uses in vacuum systems are; Roughing and foreline plumbing for large vacuum systems High vacuum, high conductance, interconnections Modular system which will be modified frequently Experimental system in Research laboratories Features Vacuum rated to 1x10-8 Torr Bakeable to 150 Fast connect and disconnect Economical reusable fittings Genderless geometry Rotatable bolt ring adapter Elastomer gasket Varied fastening methods ISO KF and LF compatible Speciality fittings available Type 304 stainless steel construction 34

35 Large- ISO LF, Claw-Clamp A B C Ref.No. Part No. NW63 BLANK 3.74 (95) 0.47 (12) L250-B NW80 BLANK 4.33 (110) 0.47 (12) L300-B NW100 BLANK 5.12 (130) 0.47 (12) L400-B NW160 BLANK 7.09 (180) 0.47 (12) L600-B NW200 BLANK 9.45 (240) 0.47 (12) L800-B Claw Clamp type NW250 BLANK (290) 0.47 (12) L1000-B NW320 BLANK (370) 0.67 (17) L1200-B NW400 BLANK (450) 0.67 (17) L1600-B NW500 BLANK (550) 0.67 (17) L2000-B NW63 WELD 3.74 (95) 0.47 (12) 2.51 (64) L250-W NW80 WELD 4.33 (110) 0.47 (12) 3.01 (76) L300-W NW100 WELD 5.12 (130) 0.47 (12) 4.01 (102) L400-W NW160 WELD 7.09 (180) 0.47 (12) 6.02 (153) L600-W NW200 WELD 9.45 (240) 0.47 (12) 8.02 (204) L800-W NW250 WELD (290) 0.47 (12) (255) L1000-W NW320 WELD (370) 0.67 (17) (325) L1200-W NW400 WELD (450) 0.67 (17) (407) L1600-W NW500 WELD (550) 0.67 (17) (509) L2000-W

36 Large- ISO LF, Bolt A B C D Ref.No. Part No. NW63 BLANK 5.12 (130) 0.47 (12) 4.33 (110) L250-BB NW80 BLANK 5.71 (145) 0.47 (12) 4.92 (125) L300-BB NW100 BLANK 6.50 (165) 0.47 (12) 5.71 (145) L400-BB NW160 BLANK 8.86 (225) 0.63 (16) 7.87 (200) L600-BB NW200 BLANK (285) 0.63 (16) (260) L800-BB NW250 BLANK (335) 0.63 (16) (310) L1000-BB Bolt type NW320 BLANK (425) 0.79 (20) (395) L1200-BB NW400 BLANK (510) 0.79 (20) (480) L1600-BB NW500 BLANK (610) 0.79 (20) (580) L2000-BB NW63 WELD 5.12 (130) 0.47 (12) 2.51 (64) 4.33 (110) L250-BW NW80 WELD 5.71 (145) 0.47 (12) 3.01 (76) 4.92 (125) L300-BW NW100 WELD 6.50 (165) 0.47 (12) 4.01 (102) 5.71 (145) L400-BW NW160 WELD 8.86 (225) 0.63 (16) 6.02 (153) 7.87 (200) L600-BW NW200 WELD (285) 0.63 (16) 8.02 (204) (260) L800-BW NW250 WELD (335) 0.63 (16) (255) (310) L1000-BW NW320 WELD (425) 0.79 (20) (325) (395) L1200-BW NW400 WELD (510) 0.79 (20) (407) (480) L1600-BW NW500 WELD (610) 0.79 (20) (509) (580) L2000-BW

37 Large- ISO LF, Band Clamp NW63 NW80 NW100 NW160 NW200 NW63 BLANK BLANK BLANK BLANK BLANK WELD Banded Clamp NW80 WELD NW100 NW160 NW200 WELD WELD WELD A B C Ref.No. Part No (95) 4.33 (110) 5.12 (130) 7.09 (180) 9.45 (240) 3.74 (95) 4.33 (110) 5.12 (130) 7.09 (180) 9.45 (240) 0.47 (12) 0.47 (12) 0.47 (12) 0.47 (12) 0.47 (12) 0.47 (12) 0.47 (12) 0.47 (12) 0.47 (12) 0.47 (12) 2.51 (64) 3.01 (76) 4.01 (102) 6.02 (153) 8.02 (204) L250-CFB L300-CFB L400-CFB L600-CFB L800-CFB L250-CFW L300-CFW L400-CFW L600-CFW L800-CFW Seal, Centering Ring Assembly, Viton Stainless Steel centering ring Replaceable Viton Aluminum spacer ring Rated 150 max NW63 NW80 NW100 NW160 NW200 NW250 NW320 NW400 NW500 A B Ref.No. Part No (67) 3.14 (80) 3.86 (98) 5.87 (149) 8.23 (209) (257) (311) (393) (494) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.15 (4) 0.22 (6) 0.22 (6) 0.22 (6) L250-CRSS L300-CRSS L400-CRSS L600-CRSS L800-CRSS L1000-CRSS L1200-CRSS L1600-CRSS L2000-CRSS

38 Clamp, Single Claw Aluminum clamp Stainless steel bolt Stainless steel washer To join an LF flange to a tapped bolted flange Bolt NW63 M 8 NW80 M 8 NW100 M 8 NW160 M 10 NW200 M 10 NW250 M 10 NW320 M 12 NW400 M 12 NW500 M 12 A B C Ref.No. Part No (30) 1.20 (30) 1.20 (30) 1.25 (32) 1.25 (32) 1.25 (32) 1.57 (40) 1.57 (40) 1.57 (40) 0.39 (10) 0.39 (10) 0.39 (10) 0.39 (10) 0.39 (10) 0.39 (10) 0.72 (18) 0.72 (18) 0.72 (18) 0.62 (16) 0.62 (16) 0.62 (16) 0.80 (20) 0.80 (20) 0.80 (20) 1.04 (26) 1.04 (26) 1.04 (26) SC SC SC Clamp, Double Claw Aluminum clamp Stainless steel bolt Stainless steel washer To join an LF flange to a tapped bolted flange NW63 NW80 NW100 NW160 NW200 NW250 NW320 NW400 NW500 A B C Ref.No. Part No (24) 0.93 (24) 0.93 (24) 1.10 (28) 1.10 (28) 1.10 (28) 1.32 (34) 1.32 (34) 1.32 (34) 1.98 (50) 1.98 (50) 1.98 (50) 1.98 (50) 1.98 (50) 1.98 (50) 2.60 (66) 2.60 (66) 2.60 (66) 0.62 (16) 0.62 (16) 0.62 (16) 0.80 (20) 0.80 (20) 0.80 (20) 1.04 (26) 1.04 (26) 1.04 (26)

39 Conical Reducers A B C Ref.No. Part No. NW63 to NW (105) 2.87 (73) 2.37 (60) NW63 to NW (105) 3.83 (97) 2.37 (60) NW80 to NW (105) 3.83 (97) 2.87 (73) NW80 to NW (241) 5.78 (147) 2.87 (73) NW100 to NW (241) 5.78 (147) 3.83 (97) Stainless steel type 304 Unlisted combinations available upon request High conductance adapter Step Reducers A B Ref.No. Part No. NW63 to NW (102) 2.37 (60) NW63 to NW (102) 2.37 (60) NW63 to NW (102) 2.37 (60) NW100 to NW (102) 3.83 (97) NW63 to NW (75) 2.31 (59) Stainless steel type 304 Short overall length NW63 to NW (75) 2.31 (59) NW63 to NW (75) 2.31 (59) NW100 to NW (75) 3.83 (97)

40 Tees A B Ref.No. Part No. NW (83) NW (89) NW (105) NW (149) NW (184) ISO-MF flanges same size all ports Stainless steel type 304 NW (248) Standard flange face to centerline dimention Larger sizes available on request NW (276) Crosses A B Ref.No. Part No. NW (83) 6.92 (176) NW (89) 7.72 (196) NW (105) 8.50 (216) NW (149) (276) NW (184) (336) ISOLF flanges same size all ports Stainless steel type 304 Standard flange face to centerline dimensions Larger sizes available on request Straight Section Nipple A B Ref.No. Part No. NW (203) NW (173) NW (260) NW (321) NW (394) Stainless steel type 304 Special lengths to order LF type flanges 40

41 ISO-LF Flexible Coupling Spring Rate A B Thick Ref.No. Part No. NW NW NW NW Stainless steel Formed bellows butt welded Thin wall NW ISO-LF Medium Wall Flexible Hose Spring Rate A B Thick Ref.No. Part No. NW NW NW NW Stainless steel Formed bellows butt welded Mediun wall NW ISO-LF Flexible Hose with braid Protection Spring Rate A B Thick Ref.No. Part No. NW NW NW NW Stainless steel Formed bellows butt welded Mediun wall NW

42 Metal CF Section 2.3 Instruction CF system Neoma CF flange systems are compatible with other Conflat style flanges and are available in size from 1-1/3 to 10 inches OD for 1/4 to 8 inch tube. Special specification could be available upon request. Applications Neoma CF flanges are requiring a very clean environment, ultrahigh vacuum conditions, high temperature, or where critical or dangerous materials must be excluded. These include : Difficult applications with corrosive, radioactive, toxic or air sensitive materials. Materials creation and processing units Analytical instrumentation including electron spectrometers, mass spectrometers, and electron microscopes. High energy physics installation such as accelerators and fusion devices. Features Neoma CF metal flange Conflat compatible Genderless mating Rotatable and non-rotatable Tapped or clearance bolt holes Wire flanges used for tubes larger than 14 inches diameter Double Sided flanges Reducing flanges Hybrid Adapters interconnect dissimilar flange systems 42

43 1 1/3" CF Non-rotatable Rotatable Bolt Hoes A Ref.No. Part No. 1 1/3 Non Tapped Blank F133000T /3 Non Tapped 1 1/3 Non Tapped 1 1/3 Non Tapped 1 1/3 Non Tapped (6.4) (9.58) F133025T F133038T F133050T /3 Non Thru Blank F /3 Non Thru 1 1/3 Non Thru 1 1/3 Non Thru 1 1/3 Non Thru (6.4) (9.58) F F F /3" CF Weld Stubs Non-rotatable Rotatable Bolt Hoes A Ref.No. Part No. 1 1/3 Non Thru 1 1/3 Non Tapped (16) (16) F F133075T

44 1 1/3" CF Rotatable Rotatable Bolt Hoes A Ref.No. Part No. 1 1/3 Rotatable Tapped Blank F133000RT /3 Rotatable Tapped 1 1/3 Rotatable Tapped 1 1/3 Rotatable Tapped 1 1/3 Rotatable Tapped (6.4) (9.58) F133025RT F133038RT F133050RT /3 Rotatable Thru Blank F133000R /3 Rotatable Thru 1 1/3 Rotatable Thru 1 1/3 Rotatable Thru 1 1/3 Rotatable Thru (6.4) (9.58) F133025R F133038R F133050R /3" CF Weld Stubs Rotatable Rotatable Bolt Hoes A Ref.No. Part No. 1 1/3 Rotatable Thru 1 1/3 Rotatable Tapped (16) (16) F133075R F133075RT

45 2 1/8" CF Non-rotatable Rotatable Bolt Hoes A B Ref.No. Part No. 2 1/8 Non Tapped Blank F218000T /8 Non Tapped 2 1/8 Non Tapped 2 1/8 Non Tapped /8 Non Tapped (6) (25) F218075T F218100T /8 Non Thru Blank F /8 Non Thru 2 1/8 Non Thru 2 1/8 Non Thru /8 Non Thru (6) (25) F F /8" CF Rotatable Rotatable Bolt Hoes A B Ref.No. Part No. 2 1/8 Rotatable Tapped Blank F218000RT /8 Rotatable Tapped 2 1/8 Rotatable Tapped 2 1/8 Rotatable Tapped /8 Rotatable Tapped (6) (25) F218075RT F218100RT /8 Rotatable Thru Blank F218000R /8 Rotatable Thru 2 1/8 Rotatable Thru 2 1/8 Rotatable Thru /8 Rotatable Thru (6) (25) F218075R F218100R

46 2 3/4" CF Non-rotatable Rotatable Bolt Hoes A B Ref.No. Part No. 2 3/4 Non Tapped Blank F275000T /4 Non Tapped 2 3/4 Non Tapped 2 3/4 Non Tapped /4 Non Tapped /4 Non Tapped /4 Non Tapped /4 Non Tapped (6) (25) (32) (38) 1.75 (45) F275025T F275050T F275075T F275100T F275125T F275150T F275175T /4 Non Thru Blank F /4 Non Thru 2 3/4 Non Thru 2 3/4 Non Thru /4 Non Thru /4 Non Thru /4 Non Thru /4 Non Thru (6) (25) (32) (38) 1.75 (45) F F F F F F F

47 2 3/4" CF Rotatable Rotatable Bolt Hoes A B C Ref.No. Part No. 2 3/4 Rotatable Tapped Blank F275000RT /4 Rotatable Tapped 2 3/4 Rotatable Tapped 2 3/4 Rotatable Tapped /4 Rotatable Tapped /4 Rotatable Tapped /4 Rotatable Tapped /4 Rotatable Tapped (6) (25) (32) (38) 1.75 (45) 1.56 F275025RT F275050RT F275075RT F275100RT F275125RT F275150RT F275175RT /4 Rotatable Thru Blank F275000R /4 Rotatable Thru 2 3/4 Rotatable Thru 2 3/4 Rotatable Thru /4 Rotatable Thru /4 Rotatable Thru /4 Rotatable Thru /4 Rotatable Thru (6) (25) (32) (38) 1.75 (45) 1.56 F275025R F275050R F275075R F275100R F275125R F275150R F275175R

48 3 3/8" CF Non-rotatable Rotatable Bolt Hoes A B Ref.No. Part No. 3 3/8 Non Tapped Blank F338000T /8 Non Tapped (35) (38) F338150T /8 Non Tapped (48) (51) F338200T /8 Non Thru Blank F /8 Non Thru (35) (38) F /8 Non Thru (48) (51) F /8" CF Rotatable Rotatable Bolt Hoes A B C Ref.No. Part No. 3 3/8 Rotatable Tapped Blank 3 3/8 Rotatable Tapped 3 3/8 Rotatable Tapped (35) (48) (38) (51) 3 3/8 Rotatable Thru Blank 3 3/8 Rotatable Thru 3 3/8 Rotatable Thru (35) (48) (38) (51) 2.03 (52) 2.03 (52) 2.03 (52) 2.03 (52) 2.03 (52) 2.03 (52) F338000RT F338150RT F338200RT F338000R F338150R F338200R

49 4 1/2" CF Non-rotatable Rotatable Bolt Hoes A B Ref.No. Part No. 4 1/2 Non Tapped Blank F450000T /2 Non Tapped (35) (38) F450150T /2 Non Tapped (48) (51) F450200T /2 Non Tapped (60) (64) F450250T /2 Non Thru Blank F /2 Non Thru (35) (38) F /2 Non Thru (48) (51) F /2 Non Thru (60) (64) F /2" CF Rotatable Rotatable Bolt Hoes A B C Ref.No. Part No. 4 1/2 Rotatable Tapped Blank F450000RT /2 Rotatable Tapped (35) (38) F450150RT /2 Rotatable Tapped (48) (51) F450200RT /2 Rotatable Tapped (60) (64) F450250RT /2 Rotatable Thru Blank F450000R /2 Rotatable Thru (35) (38) F450150R /2 Rotatable Thru (48) (51) F450200R /2 Rotatable Thru (60) (64) F450250R

50 4 5/8" CF Non-rotatable Rotatable Bolt Hoes A B Ref.No. Part No. 4 5/8 Nonrotatable Tapped Blank F458000T /8 Nonrotatable Tapped (60) (64) F458250T /8 Nonrotatable Tapped (73) (76) F458300T /8 Nonrotatable Thru Blank F /8 Nonrotatable Thru (60) (64) F /8 Nonrotatable Thru (73) (76) F /8" CF Rotatable Rotatable Bolt Hoes A B C Ref.No. Part No. 4 5/8 Rotatable Tapped Blank F458000RT /8 Rotatable Tapped (60) (64) F458250RT /8 Rotatable Tapped (73) (76) F458300RT /8 Rotatable Thru Blank F458000R /8 Rotatable Thru (60) (64) F458250R /8 Rotatable Thru (73) (76) F458300R

51 6" CF Non-rotatable Rotatable Bolt Hoes A B Ref.No. Part No. 6 Non Tapped Blank F600000T Non Tapped 3.81 (97) (102) F600400T Non Thru Blank F Non Thru 3.81 (97) (102) F " CF Rotatable Rotatable Bolt Hoes A B C Ref.No. Part No. 6 Rotatable Tapped Blank F600000RT Rotatable Tapped 3.81 (97) (102) F600400RT Rotatable Thru Blank F600000R Rotatable Thru 3.81 (97) (102) F600400R

52 8" CF Non-rotatable Rotatable Bolt Hoes A B Ref.No. Part No. 8 Non Tapped Blank F800000T Non Tapped (148) (152) F800600T Non Thru Blank F Non Thru (148) (152) F " CF Rotatable Rotatable Bolt Hoes A B C Ref.No. Part No. 8 Rotatable Tapped Blank F800000RT Rotatable Tapped (148) (152) F800600RT Rotatable Thru Blank F800000R Rotatable Thru (148) (152) F800600R

53 10" CF Non-rotatable Rotatable Bolt Hoes A B Ref.No. Part No. 10 Non Tapped Blank F T Non Tapped (198) (203) F T Non Thru Blank F Non Thru (198) (203) F " CF Rotatable Rotatable Bolt Hoes A B C Ref.No. Part No. 10 Rotatable Tapped Blank F RT Rotatable Tapped (198) (203) F RT Rotatable Thru Blank F R Rotatable Thru (198) (203) F R

54 CF Double-Sided s Designed to be inserted between two flanges of the same size Requires double-sided flange hardware Can be easily modified to accommodate side ports for such things as gas inlets, gauges, valves, etc. 1 1/3 Blank /3 Blank /3 1 1/3 1 1/3 1 1/3 1 1/3 A B C Ref.No. Part No (7) 0.38 (10) (16) 0.63 (16) /8 Blank /8 2 1/ (26) /4 Blank /4 Blank /4 Blank /4 2 3/4 2 3/4 2 3/4 2 3/4 2 3/4 2 3/4 2 3/4 2 3/4 2 3/4 2 3/4 2 3/4 2 3/ (7) 0.26 (7) (26) 1.01 (26) 1.26 (32) 1.26 (32) 1.51 (38) 1.51 (38) 1.51 (38) /8 Blank / (38) (8) (8) 0.30 (8) 0.30 (8) 0.30 (8) (25) 0.69 (18) 0.69 (18) FD FD FD FD FD FD FD FD FD FD FD FD FD FD FD FD FD FD

55 CF Double-Sided s Designed to be inserted between two flanges of the same size Requires double-sided flange hardware Can be easily modified to accommodate side ports for such things as gas inlets, gauges, valves, etc. 3 3/8 A B C Ref.No. Part No (51) /2 Blank /2 4 1/2 4 1/ (38) 2.01 (51) 2.51 (64) /8 Blank /8 4 5/ (64) 3.00 (76) Blank (102) Blank (153) Blank (204) (18) 0.69 (18) 0.69 (18) 0.69 (18) 0.69 (18) 0.81 (21) 0.81 (21) 0.81 (21) 0.78 (20) 0.78 (20) 0.88 (22) 0.88 (22) 0.97 (25) 0.97 (25) FD FD FD FD FD FD FD FD FD FD FD FD FD FD CF Half Nipple 1 1/3 2 1/8 2 3/4 3 3/8 4 1/2 4 5/8 Non-Rotatable 6 Butt weld For use with orbital welders Thru holes 8 10 For Tubing (O.D.) A Ref.No. Part No (25) 1.50 (38) 2.00 (51) 2.50 (64) 3.00 (76) 4.00 (102) 6.00 (152) 8.00 (203) 1.50 (38) 2.05 (52) 2.46 (62) 3.21 (82) 4.13 (105) (135) 6.56 (167) 8.00 (203)

56 CF Full Nipple Special lengths to order Thru holes 1 1/3 2 1/8 2 3/4 3 3/8 4 1/2 4 5/ For Tubing (O.D.) A Ref.No. Part No (25) 1.50 (38) 2.00 (51) 2.50 (64) 3.00 (76) 4.00 (102) 6.00 (152) 8.00 (203) 3.00 (76) 4.08 (104) 4.92 (125) 6.42 (163) 8.26 (210) (270) (333) (406) CF Elbow 45 with Tangents 1 1/3 1 1/3 2 1/8 2 3/4 3 3/8 4 1/2 Both flanges rotatable 4 5/8 Special length to order Thru holes For Tubing (O.D.) A Ref.No. Part No (25) 1.50 (38) 2.00 (51) 2.50 (64) 3.00 (76) 4.00 (102) 6.00 (152) 8.00 (203) 0.81 (21) L (34) 1.83 (46) 2.54 (64) 3.38 (86) 4.06 (103) 5.25 (133) 5.76 (146) 6.95 (177) L L L L L L

57 CF Elbow 90 Smooth Radius 1 1/3 1 1/3 2 1/8 2 1/8 2 3/4 3 3/8 Both flanges rotatable 4 1/2 Special length to order Thru holes 4 5/ For Tubing (O.D.) A Ref.No. Part No (25) 1.00 (25) 1.50 (38) 2.00 (51) 2.50 (64) 3.00 (76) 4.00 (102) 6.00 (152) 8.00 (203) 1.50 (38) L L (56) 2.46 (63) 3.23 (82) 4.13 (105) 4.88 (123) 6.44 (163) 9.50 (241) (317) L L L LR LR LR CF Tee CF s same size on all sides 1 1/3 2 1/8 2 3/4 3 3/8 4 1/2 4 1/2 4 5/8 4 5/ For Tubing (O.D.) A B Ref.No. Part No (25) 1.50 (38) 2.00 (51) 2.50 (64) 2.50 (64) 3.00 (76) 3.00 (76) 4.00 (102) 4.00 (102) 6.00 (152) 6.00 (152) 8.00 (203) 1.50 (38) 2.06 (52) 2.46 (63) 3.21 (82) 3.00 (76) 4.12 (105) 4.92 (125) 6.42 (166) (105) 8.26 (210) (126) 9.88 (251) (135) (270) (167) 8.00 (203) (333) )

58 CF Cross CF s same size on all sides 1 1/3 2 1/8 2 3/4 3 3/8 4 1/2 4 1/2 4 5/8 4 5/ For Tubing (O.D.) A B Ref.No. Part No (25) 1.50 (38) 2.00 (51) 2.50 (64) 2.50 (64) 3.00 (76) 3.00 (76) 4.00 (102) 4.00 (102) 6.00 (152) 6.00 (152) 8.00 (203) 8.00 (203) 1.50 (38) 2.06 (52) 2.46 (63) 3.21 (82) 3.00 (76) 4.12 (105) 4.92 (125) 6.42 (166) (105) 8.26 (210) (126) 9.88 (251) T (135) (270) T (167) (333) T (203) ) CF, Flexible Coupling I.D A B Ref.No. Part No. 1 1/ / / / / / Stainless Steel Flexible coupling for vibrations and alignment Thru holes /

59 CF Medium Wall Flexible Hose Static Bend Radius Wall Thickness A B Ref.No. Part No. 1 1/ / / / / Stainless Steel 2 3/ / / / / / /

60 CF Hardware, Copper Gasket Type Description Q'ties Ref.No. Part No. 1 1/3 0.64ID Copper gasket, etched individually ed 10 GK /8 1.00ID Copper gasket, etched individually ed 10 GK /4 1.45ID Copper gasket, etched individually ed 10 GK /4 1.53ID Copper gasket, etched individually ed 10 GK /4 BLANK Copper gasket, etched individually ed 10 GK-150S /8 2.01ID Copper gasket, etched individually ed 10 GK /2 2.51ID Copper gasket, etched individually ed 10 GK /8 3.01ID Copper gasket, etched individually ed 10 GK ID Copper gasket, etched individually ed 10 GK /4 5.01ID Copper gasket, etched individually ed 10 GK ID Copper gasket, etched individually ed 10 GK ID Copper gasket, etched individually ed 10 GK ID Copper gasket, etched individually ed 10 GK / ID Copper gasket, etched individually ed 10 GK ID Copper gasket, etched individually ed 10 GK / ID Copper gasket, etched individually ed 10 GK

61 CF Hardware, Hex Head Sets Type Description Q'ties Ref.No. Part No. 1 1/3 Tapped Bolt set, 8/32x.62 (socket head cap bolt) /3 Tapped Bolt set, 8-32x.50 (socket head cap bolt) /3 Tapped Bolt set, 8-32x.56 (socket head cap bolt) 25 Bolt set, 8-32x /3 Tapped 25 (socket head cap bolt) 2 1/8 Tapped Bolt set,1/4-28x /4 Tapped Bolt set 1/4-28x /8 Tapped Bolt set 5/16-24x /2 Tapped Bolt set 5/16-24x /8 Tapped Bolt set 5/16-24x Tapped Bolt set 5/16-24x Tapped Bolt set 5/16-24x Tapped Bolt set 5/16-24x /3 Thru Bolt/nut set, 8-32x.75 (socket head cap bolt) /3 Thru Bolt/nut set, 8-32x.75 Ag(socket head cap bolt) /3 Thru Bolt/nut set, 8-32x.87 (socket head cap bolt) /3 Thru Bolt/nut set, 8-32x.87 Ag(socket head cap bolt) /8 Thru Bolt set,1/4-28x /8 Thru Bolt set,1/4-28x /4 Thru Bolt set 1/4-28x /4 Thru Bolt set 1/4-28x /8 Thru Bolt set 5/16-24x /2 Thru Bolt set 5/16-24x /8 Thru Bolt set 5/16-24x Thru Bolt set 5/16-24x Thru Bolt set 5/16-24x Thru Bolt set 5/16-24x

62 Weldable Components Section 2.4 Instruction Weldable Components Neoma tube fittings are convenient "building-block" components offering great flexiblility in the design and construction of vacuum systems. All fittings are fabricated from type 304 stainless steel tubing. Features Mating CF, ISO, ASA flanges available UHV rated to 1x10-10 Torr High temperature rated to 450 Standard matte finish 62

63 Tubing OD Thickness Ref.No. Part No (25) 1.50 (38) 2.00 (51) 2.50 (64) 3.00 (76) 4.00 (102) 4.00 (102) (1.7) (1.7) (1.7) (1.7) (1.7) (1.7) (1.7) (2.1) ST ST ST ST ST ST Elbow OD Thickness A Ref.No. Part No L-NF L-NF L-NF L-NF LR-NF LR-NF

64 45 Elbow OD Thickness M R Ref.No. Part No LSNF LSNF LSNF LSNF LSNF LSNF LSNF 90 Elbow with Tangents OD Thickness A R Ref.No. Part No LL-NF LL-NF LL-NF LL-NF LL-NF LL-NF LL-NF

65 45 Elbow with Tangents OD Thickness A R M Ref.No. Part No L-NF L-NF L-NF L-NF L-NF L-NF L-NF Way Cross OD Thickness A Ref.No. Part No NF NF NF NF NF NF T-NF T-NF

66 Tee OD Thickness A Ref.No. Part No NF NF NF NF NF NF NF NF

67 Reducing Tee OD Thickness A B Ref.No. Part No. 1.00X X X X NF X X NF X X X NF X NF X X X X X NF X NF X NF X X X X X X NF

68 Concentric Reducer OD Thickness A Ref.No. Part No. 1.00X X X X X X X X X X X X X X X End Cap OD Thickness A Ref.No. Part No

69 Flexible Coupling, Weld Cuff, Thin Wall Norminal Wall A B Ref.No. Part No Stainless Steel Flexible Coupling, Standard Cuff, Thin Wall Hose Wall A B Ref.No. Part No Stainless Steel

70 Weldable Flexible Hose, Medium Wall Static Bend Radius Hose Wall A Spring Rate Ref.No. Part No Stainless Steel Unsheathed Butt Welded Special lengths to order Thick wall hose static bend radius is to point of permanent deformation " "

71 Weldable Flexible Hose, Thin Wall Static Bend Radius Hose Wall A Spring Rate Ref.No. Part No Stainless Steel Unsheathed Butt Welded Special lengths to order

72 Welded bellows(metric dimension) Outer Dia(mm) Inner Dia(mm) Outer Dia(mm) Inner Dia(mm) Outer Dia(mm) Inner Dia(mm) Pressure : High vacuum ~0.1MPa Temperature : -250~350 Fluid : not to damage the material Compressic : 10mm/Seg. x No. of Seg. Life cycle : 1 x 100,000 cycle Standard material : SUS304 stainless steel Refer to the other welded bellows catalogue, if need more detail information

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Integrated Process Solutions. Series 88. CF Component Ultra high vacuum fittings Sizes 1 1/3'' to 4 5/8''

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