Gate valve control system Series 64

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ate valve control system Series ontrol and isolation valve eneral purpose stainless steel valve daptive pressure control with stepper motor or throttling by adjustable 3-position pneumatic actuator

1 ate valve control system Series ontrol and isolation valve eneral purpose stainless steel valve daptive pressure control with stepper motor or throttling by adjustable 3-position pneumatic actuator ody material stainless steel Throttling gate valve with 3-position pneumatic actuator double acting with position indicator with solenoids ontrol gate valve with stepper motor N ISO-F Ordering numbers (specify control voltage) F-F metric threads F-F UNF threads S-LP (T) S () JIS 00-PE 00-E 00-UE 00-TE 00-JE 0-PE 0-E 0-UE 0-TE 0-JE 0-PE 0-E 0-UE 0-TE 0-JE 0-PE 0-E 0-UE 0-TE 0-JE 050-PE on request on request 050-TE 050-JE 051-JE PE on request on request 052-E 052-JE with position indicator, without solenoids: E2 00-PE52 00-E52 00-UE52 00-TE52 00-JE52 2-PE52 2-E52 2-UE52 2-TE52 2-JE52 2-PE52 2-E52 2-UE52 2-TE52 2-JE52 2-PE52 2-E52 2-UE52 2-TE52 2-JE52 -PE52 on request on request -TE52 -JE JE PE52 on request on request 252-E JE52 Pressure controller Type Ordering numbers PM-5 local and remote control 1PM-1 x y PM- remote control with service box interface PFO = Power Failure Option (valve closes at power failure) 1PM-2 x y = without PFO = Nid PFO Interface Sensor(s) = without 1 = without 2 = logic 1 E = logic 2 = RS232 1 H = RS232 2 J = RS5 1 K = RS5 2 onnection cable ontrol gate valve pressure controller Ordering numbers length 3 m ( ft) 0V-99L length m (33 ft) 0V-99LJ other lengths to max. 50 m (170 ft) 0V-99LX *) *) specify length X in m/ft VT Vakuumventile, H-99 Haag, Switzerland Tel Fax

2 Series Sealing materials ate: VITON onnet: VITON Feedthrough Rotary feedthrough / VITON 1 valve gate ball pairs 7 gate seal a valve seat side 2 ball guidance 5 detents actuator shaft 3 leaf spring crank bolt 9 counter-plate Features VTLOK configuration 3-position pneumatic actuator or stepper motor Function The valve gate acts as a throttling element and varies the conductance of the valve opening. ctuation is performed either with a 3-position pneumatic actuator or with a stepper motor and controller. With the 3-position pneumatic actuator, it is not only possible to move the valve gate to the open and closed position, but also to any preset intermediate position. The stepper motor/controller version ensures accurate pressure control due to exact gate positioning. For leaktight closing the VTLOK principle is applied. For details see page 201. ontrol range VT has a software «Valve Evaluation Tool» to determine the most suitable product for a specific application. Please contact us to assist you when selecting a product. *) approx. upper pressure limit (depending on pump size, pump type and customer system) Valve types 1) ontrol gate valve with stepper motor N - 2) ontrol gate valve with stepper motor N 3) ontrol gate valve with adjustable 3-position pneumatics N - gaz flow (mbar ls -1 ) 1.00E E E E E E E E E-0 turbo pump N turbo pump N 1.00E-05.00E E E E E E E E E+02 1) 2) 3) *) minimum controllable conductance of the valve pressure (mbar).00e+05.00e+0.00e+03.00e+02.00e+01.00e+00.00e-01.00e-02.00e-03 gaz flow (sccm) N VT Vakuumventile, H-99 Haag, Switzerland Tel Fax

3 ate valve control system Series Technical data Leak rate: body, valve seat < 1-9 mbar Is -1 Pressure range - N mbar to 2 bar (abs) - N mbar to 1.2 bar (abs) ifferential pressure - Valve closed N - 2 bar in either direction N bar in either direction - uring opening / closing 30 mbar ycles until first service 000 Operating temperature 1) - Valve body - mbient temperature 1) - Pneumatic actuator, motor 50 - Position indicator 0 - Solenoid 50 Material - Valve body, gate ISI 30 (1.301) - Mechanism ISI 300 and series (1.301, 1.3, 1.03, 1.01, 1.037) Mounting position - N - any - N horizontal only (vertical mounting position: see «Options») Valve position visual (mechanical and on controller) onnections actuator - 3-position pneumatic actuator compressed air (see table below) - Solenoids 2 V, 2 x 2.5 W (others see «options») 1) Maximum values: depending on operating conditions and sealing materials - Position indicator: contact rating - Voltage 30 V / - urrent Power 9 W - Stepper motor VT Pressure ontroller stepper motor 3-position pneumatic actuator N (nominal I..) F-F standard flanges ISO-F S-LP JIS molecular flow conductance minimum controllable conductance minimum closing or opening time weight minimum adjustable conductance compressed air pressure min. - max. overpressure closing or opening time weight O.. ls -1 ls -1 s kg lbs ls -1 bar psi s kg lbs VT Vakuumventile, H-99 Haag, Switzerland Tel Fax

4 Options ertain options are not available for some nominal diameters or cannot be combined. Moreover, options can affect the general technical data. iagram 1 iagram 2 ctuator: - ctuator rotated by 90 / to position 2 or 3 (position 1 is standard): see dimensional drawings on pages and 9 for optimum adaptation - ctuator on -side (-side is standard) - Stepper motor for vertical mounting position N (closing time 15 s, cycles until first service ) - Solenoids for impulse actuation: actual valve position is maintained at power failure - Solenoid separate, for external mounting - Solenoid for, V 2,,, 115,, 220 V / 50 Hz 2,, 115,, 220 V / 0 Hz Valve: - Sizes N 3 and 0 on request - ustomer specified flanges - For direct mounting to flat chamber (diagram 1) Special flange for mounting to chamber wall, standard flange on opposite side - Other sealing materials - Watercooled or waterheated flanges (ISO-F) - Rotary feedthrough with pump port - Ports (diagram 2) for roughing (by-pass), venting or for gauges Series a valve seat side N valve recoended port X Y Z F-F ISO-KF Ordering information for options: Ordering No. of valve-x (e. g. 2-E52-X, X = actuator 2, port KF0 in position 2) Heater Thermostat temperature control 0,, 0 or temperature sensor for external control (PT or thermocouple) Supply voltage: - 0 V resp V Insulation box for touch protection ccessories Fittings for installation of the valve: series 32 and 33 Seal kit onsisting of seals for gate, bonnet and rotary feedthrough Ordering No.: see operating manual or price list VT Vakuumventile, H-99 Haag, Switzerland Tel Fax

5 ate valve control system Series Stepper motor N (") N - (" - 1") a valve seat side e mechanical position indication standard actuator position (1) g required for dismantling i for attachment optional actuator positions b compressed air connection c electrical connection Projection E N 1 1 K L M N O O1 P Q R S U V W X VT Vakuumventile, H-99 Haag, Switzerland Tel Fax

6 Series 3-position pneumatic actuator N - (" - 1") a valve seat side e mechanical position indication standard actuator position (1) g required for dismantling i for attachment optional actuator positions b compressed air connection c electrical connection 1) L + W, N : without pneumatic connection shorter N 1 1 K L M N O O1 P Q R R1 S U V W X 503 1) ) VT Vakuumventile, H-99 Haag, Switzerland Tel Fax

7 ate valve control system Series Flange dimensions ISO-F N - (" - 1") N H I ExF E x F x M x M x M x M x M 1 x M H I F-F N - (" - ") metric threads ±0.2 (.00") H2 ExF +0.1 (.00") 0 (.0") H1 N O (.51") E x F 1 x M 20 x M 2 x M 32 x M H1 H F-F N - (" - ") UNF threads N 1) 1) O / ±0.2 (.00") H (.00") 0 (.0") H ExF (.51") E x F 1 x 5 /1" 2 UNF 20 x 5 /1" 2 UNF 2 x 5 /1" 2 UNF 32 x 5 /1" 2 UNF 30 x 3 /" 2 UNF H H ) O.. " VT standard, O /" option Projection E a valve seat side Ordering information for option: O /" Ordering No. of valve-x (e. g. 0-UE-X, X = O /") 90 VT Vakuumventile, H-99 Haag, Switzerland Tel Fax

8 Series Flange dimensions S-LP N - (" - 1") with or without O-ring groove For orders with O-ring groove specify:, or «+» "" "" ExF H N 1 S-LP 3 1 1) E x F H O-Ring I.. x d x 3 /" 1 UN x x x 3 /" 1 UN x x x 3 /" UN x x x 3 /" UN x x x 3 /" UN x x x 1" UNF x x.275 1) S JIS N - (" - 1") ExF N E x F x M x M x M x M x M x M x M Projection E a valve seat side VT Vakuumventile, H-99 Haag, Switzerland Tel Fax

9 ate valve control system Series Pressure controller PM-5 PM- PM-5: Version for local and remote control PM-: Version for remote control Features PM- PM-5 Fast and accurate adaptive pressure control X X utomatic learning of system parameters X X Hold function for plasma ignition X X Position control X X Local operation X Interface for service box X Operation with remote control interface X X 1) Large information display X LE function indicators X Interface for linear pressure sensors (capacitance manometers) X X Zero adjust of sensor X X losing of valve at power failure (option) X 1) X 1) 1) Option Pressure control The PM- / PM-5 controllers ensure fast and accurate pressure control. The LERN function, being performed only once during system set-up, automatically determines all relevant system parameters. uring pressure control the pressure controller continuously adapts to the process conditions (gas type, gas flow). No parameter inputs are necessary. Position control The PM- / PM-5 controllers are provided with a position control mode that allows to control any valve position between open closed with selectable speed. Local operation The PM-5 controller can be operated locally via keyboard and display on the front panel. In combination with a service box the PM- controller can also be operated locally. isplay The PM-5 controller has a large display for pressure, position and status information. The pressure can be displayed in various ranges (0-1, 2.5, 5,, ) and units (mbar, µbar, kpa, Pa, Torr, mtorr). Remote operation y means of a remote control interface the controllers PM- / PM-5 can be controlled by a host system (see selectable interface options below). Logic interface igital inputs - opening and closing of valve - control mode and setpoint selection - LERN, zero adjust, and hold - keyboard interlock igital outputs nalog inputs nalog outputs - valve position open and closed - remote control status - setpoint deviation - pressure and position setpoints - current pressure and valve position 92 VT Vakuumventile, H-99 Haag, Switzerland Tel Fax

Series RS232 interface Serial RS232 interface - operation of all functions, selectable baudrate (1-19) igital inputs igital outputs - opening and closing of valve - valve position open and closed

W mbient temperature 0-50 Pressure control accuracy Position control 0.

10 Series RS232 interface Serial RS232 interface - operation of all functions, selectable baudrate (1-19) igital inputs igital outputs - opening and closing of valve - valve position open and closed Power Failure Option This function is available as an option. It automatically closes the valve at power failure. Technical data Mains voltage - 20 V (± %), 50/0 Hz Power required max. W mbient temperature 0-50 Pressure control accuracy Position control 0.1 % of the sensor full scale range 0 positions Pressure sensor - Sensor input voltage 0-1 V, 2 V, 5 V, V (selectable) - Sensor input differential, R i > kohm - Sensor power supply + 15 V (± 5 %), max. 1 m *) 15 V (± 5 %), max. 1 m *) *) total for both sensors with 2-sensor version Power Failure Option (PFO) - kku type Nid - Minimum charge time h - Life time (35 ) 20 months Inputs (interface option) - igital control with relay contacts or optocouplers - nalog 0 - V, R i > kohm Outputs (interface option) - igital potential-free relay contacts max. 70 V, 500 m, W - nalog 0 - V, max. 1 m imensions (w x h x d) 21 x x 2 (9.5" x 3.5" x.5") 1 2 of 19" rack insert, 2 height units Weight: without PFO / with PFO 2. kg (5.7 lbs) / 3. kg (7.5 lbs) Options - Service box for PM-: 00S-29NN (picture 1) - onnection of 2 sensors - RS5 interface - Master slave adapter for synchronizing 2 valves - ustomer specific software on request - lank panel for installation into 19" rack: 23-R1 (picture 2) - Installation kit for connecting 2 controllers in a 19" rack: 23-R2 picture 1 picture 2 VT Vakuumventile, H-99 Haag, Switzerland Tel Fax

HV gate valve Series 11

HV gate valve Series 11 Main applications General purpose valve for isolation in high vacuum systems Especially suited to pump isolation Ordering information Valve with manual actuator crank handle Ordering