STP MAGNETICALLY LEVITATED TURBOMOLECULAR PUMPS SEMICONDUCTOR PUMPS AND EXHAUST MANAGEMENT. STP features

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1 STP MGNETILLY LEVITTED TUROMOLEULR PUMPS dvantage series The new dvantage series of magnetically levitated turbo pumps have been designed to provide the highest levels of throughput required by the next generation of semiconductor etch and VD processes. They have been developed, using continuous improvement techniques, from the ultra reliable, high performance H series of products. Their advanced rotor design combined with selection of the best materials has allowed the creation of the next generation of high throughput turbo pump inside the same footprint as many of the existing models. The range contains pumps with throughput speeds from 1300 l s -1 to 3500 l s -1. STP features amp/div 157 O Edwards is a leader in clean and dry vacuum technology. The first STP pumps were sold in 1983 and there are now over 70,000 installations worldwide. 85% are operating on semiconductor process tools where they demonstrate exceptional levels of reliability. STP pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration. Proven reliability. lean oil-free high vacuum. omplete range from 300 to 3500 l s -1. pplication specific models. Very low noise and vibration. Low cost of ownership. Virtually maintenance free. Installation in any orientation. Full remote control interface. Supported globally by O Edwards Proven magnetic bearing technology The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. s well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. STP range UHV series The Ultra High Vacuum series of magnetically levitated turbo molecular pumps are the products of choice for the semiconductor, surface science or high energy physics industries. They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels. The pumps are all D powered, eliminating the need for batteries, they use a half rack controller which features auto-tuning and advanced diagnostic features. The range contains pumps with speeds from 300 l s -1 to 1000 l s -1 all of which are available in ISO or F flange variants. High throughput series The High Throughput Series of magnetically levitated turbo pumps generate the high gas flows required by the current generation of semiconductor etch, ion implant and LD systems. ll the pumps feature a five active axis magnetic bearing system and a D drive for increased robustness and stability. They use a Holweck stage to provide advanced throughput performance. They operate via a half rack controller with auto-tuning, advanced diagnostics and an integrated temperature management system. The range operates with throughput speeds from 300 l s -1 to 1300 l s Oil free ll STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in the semiconductor industry (where device densities are constantly increasing) and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements). Maintenance free Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination. Vibration free Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peak-to-peak vibration level is less than 0.02 µm. This amplitude remains constant throughout the life of the pump and is free from troublesome sub-harmonics. µm -3 5x10 Residual gas analysis Hz Vibration analysis STP300 displacement/frequency utomatic balancing system (S) S is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimizes the vibration transmitted to the inlet flange. S works at all pump rotational speeds. SEMIONDUTOR PUMPS ND EXHUST MNGEMENT For North merican orders shop online: or call:

2 158 Safety backup bearings STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation. Optimized rotors The multistage pure bladed rotors in the UHV pumps provide the high vacuums required for clear beamlines on D SEM machines, mass spectrometers and ion implanters. They provide optimum pumping performance with excellent light gas compression ratios. ompound rotors The high throughput pumps incorporate a Holweck drag stage that increases the pumps throughput at low pressure. N 2 O TMS dvanced series compound rotors The advanced series pumps have a redesigned compound rotor, the materials of manufacture have been improved to reduce the clearances within the pump, the rotors have an advanced 3D design and the Holweck stage has been redesigned to increase the throughput. orrosion resistant To ensure a high level of resistance to corrosion, the corrosion resistant () and high throughput (H-) pumps have nickel coated rotors/stators and pump internals suitable for ion implantation and plasma etching. Further enhanced levels of protection are available on request. Nitrogen purging The corrosion resistant () pumps and the high throughput (H-) pumps have a nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases minimizing their damage to the pumps motor and sensor coils. TMS system The O Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particle condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions but also increase its operational life. Scientific applications STP pumps are used extensively in the world s foremost research and development institutes. The pumps satisfy stringent performance criteria and reliability expectations. They are also used in the following applications: Scientific instruments: surface analysis, mass spectrometry, electron microscopy High energy physics: beam lines, accelerators Radioactive applications: fusion systems, cyclotrons PPLITIONS Semiconductor fabrication STP turbomolecular pumps are the number one choice for the world's leading semiconductor etch and implant manufacturers. The pumps are installed on the harshest applications (for example, metal etch) and demonstrate exceptional levels of reliability. Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon Electron cyclotron resonance (ER) etch Film deposition VD, PEVD, ERVD, MOVD Sputtering Ion implantation source, beam line pumping end station ME Diffusion Photo resist stripping rystal/epitaxial growth Wafer inspection Load lock chambers For North merican orders shop online: or call:

3 STP301/STP301 TUROMOLEULR PUMP Maximum allowable inlet pressure mbient cooled (5 x 10 - ) Pa (Torr) Water cooled 2.5 (0.02) Pa (Torr) Maximum continuous outlet pressure mbient cooled 13 (0.1) Pa (Torr) Water cooled 26 (0.15) Pa (Torr) Rated speed 8000 rpm Starting time 3 min Maximum inlet flange temperature 120 º Input voltage 100 to 120 V ac (±10%) or 200 to 20 V ac (±10%) Power consumption Start up 0.55 kv With Temperature Management System - Weight Pump 11 kg ontroller 7 kg 159 O Edwards STP301 and corrosion resistant STP-301 are for use in electron microscopes and semiconductor applications. O Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries. Features & benefits dvanced rotor technology Maximized process flexibility Oil free Low vibration High reliability Maintenance free dvanced controller design uto tuning Self diagnostic functions D motor drive attery-free operation ompact design Small footprint Half rack controller TEHNIL DT Inlet flange ISO100 / DN100F KF25 Purge port KF10 ( version only) Water cooling fitting PT1/ Pumping speed N l s -1 He 280 l s -1 H l s -1 ompression ratio N 2 >10 8 He >5 x 10 5 H 2 >2 x 10 Ultimate pressure with bake out heating 6.5 x 10-6 (5 x 10-8 ) Pa (Torr) 10-8 order (10-10 order) Pa (Torr) (Not version) 10-7 order (10-9 order) Pa (Torr) ( version only) l s -1 N l s -1 H l s -1 He 8 x M8 x 16 Electrical connectors for control unit Purge port ( version only) Outlet flange For North merican orders shop online: or call: Ø SEMIONDUTOR PUMPS ND EXHUST MNGEMENT

4 ontroller ORDERING INFORMTION PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP301 ISO100 inlet DN100F inlet STP301 ISO100 inlet DN100F inlet ontroller V 50/60 Hz RS V 50/60 Hz RS onnection cables 1.5 m m m m m D m D m Power able (ring terminal) European plug UK Plug Options Water cooling coil Horizontal Vibration isolator ISO DN100F For North merican orders shop online: or call:

5 STP301 TUROMOLEULR PUMP Maximum allowable inlet pressure mbient cooled (5 x 10 - ) Pa (Torr) Water cooled 2.5 (0.02) Pa (Torr) Maximum continuous outlet pressure mbient cooled 13 (0.1) Pa (Torr) Water cooled 26 (0.15) Pa (Torr) Rated speed 8000 rpm Starting time 3 min Maximum inlet flange temperature 120 º Input voltage V or V Power consumption Start up 550 V ontinuous 150 V Weight Pump 11 kg ontroller 7 kg 161 O Edwards corrosion resistant STP301 turbomolecular pump offers field proven reliability for use in the harshest of semiconductor applications. O Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. Features & benefits dvanced rotor technology Maximized process flexibility Oil free Low vibration High reliability Maintenance free Harsh process compatible Increased life dvanced controller design uto tuning Self diagnostic functions D motor drive attery-free operation ompact design Small footprint Half rack controller TEHNIL DT Inlet flange ISO100 / DN100F KF0 or KF25 Purge port KF10 Water cooling fitting PT1/ Pumping speed N l s -1 He 280 l s -1 H l s -1 ompression ratio N 2 >10 8 He >5 x 10 5 H 2 >2 x 10 Ultimate pressure ISO inlet flange 10-7 (10-9 ) Pa (Torr) F inlet flange 10-8 (10-10 ) Pa (Torr) l s -1 N l s -1 H l s -1 He Electrical connector D ooling water out (accessory) E ooling water in (accessory Purge port SEMIONDUTOR PUMPS ND EXHUST MNGEMENT For North merican orders shop online: or call:

6 ontroller ORDERING INFORMTION PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP301 ISO100 inlet KF25 outlet ISO100 inlet KF0 outlet DN100F inlet KF25 outlet DN100F inlet KF0 outlet ontroller V 50/60 Hz RS V 50/60 Hz RS onnection cables 1.5 m m m m m D m D m Power able (ring terminal) European plug UK Plug Options Water cooling coil Horizontal Vibration isolator ISO DN100F For North merican orders shop online: or call:

7 STP51/STP51 TUROMOLEULR PUMP Maximum allowable inlet pressure mbient cooled (5 x 10 - ) Pa (Torr) Water cooled 2.5 (0.02) Pa (Torr) Maximum continuous outlet pressure mbient cooled 13 (0.1) Pa (Torr) Water cooled 26 (0.15) Pa (Torr) Rated speed 8000 rpm Starting time 3 min Maximum inlet flange temperature 120 º Input voltage 100 to 120 V ac (±10%) or 200 to 20 V ac (±10%) Power consumption Start up 0.55 kv With Temperature Management System - Weight Pump 12 kg ontroller 7 kg 163 O Edwards STP-51 and corrosion resistant STP-51 are for use in electron microscopes, scientific instruments and semiconductor applications. O Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP51 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries. Features & benefits dvanced rotor technology Maximized process flexibility Oil free Low vibration High reliability Maintenance free dvanced controller design uto tuning Self diagnostic functions D motor drive attery-free operation ompact design Small footprint Half rack controller TEHNIL DT Inlet flange ISO160K / DN160F KF25 Purge port KF10 ( version only) Pumping speed N 2 0 l s -1 He 20 l s -1 H l s -1 ompression ratio N 2 >10 8 He >5 x 10 5 H 2 >2 x 10 Ultimate pressure with bake out heating 6.5 x 10-6 (5 x 10-8 ) Pa (Torr) 10-8 order (10-10 order) Pa (Torr) (Not version) 10-7 order (10-9 order) Pa (Torr) ( version only) 1 80 l s -1 N l s -1 H l s -1 He 200 ISO x M8 x 16 Ø Ø160 Ø156 Ø180 Ø128 Ø203 Ø x Ø8. Electrical connector ( version only) D ooling coil (ccessory) DN160F (F6) SEMIONDUTOR PUMPS ND EXHUST MNGEMENT For North merican orders shop online: or call:

8 ontroller ORDERING INFORMTION PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP51 ISO160 inlet DN160F inlet STP51 ISO160 inlet DN160F inlet ontroller V 50/60 Hz RS V 50/60 Hz RS onnection cables 1.5 m m m m m D m D m Power able (ring terminal) European plug UK Plug Options Water cooling coil Horizontal Vibration isolator ISO DN160F For North merican orders shop online: or call:

9 STP51 TUROMOLEULR PUMP Maximum allowable inlet pressure mbient cooled (5 x 10 - ) Pa (Torr) Water cooled 2.5 (0.02) Pa (Torr) Maximum continuous outlet pressure mbient cooled 13 (0.1) Pa (Torr) Water cooled 26 (0.15) Pa (Torr) Rated speed 8000 rpm Starting time 3 min Maximum inlet flange temperature 120 º Input voltage V or V Power consumption Start up 550 V ontinuous 150 V Weight Pump 12 kg ontroller 7 kg 165 O Edwards corrosion resistant STP51 turbomolecular pumps offers field proven reliability for use in the harshest of semiconductor applications. O Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP51 has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. Features & benefits dvanced rotor technology Maximized process flexibility Oil free Low vibration High reliability Maintenance free Harsh process compatible Increased life dvanced controller design uto tuning Self diagnostic functions D motor drive attery-free operation ompact design Small footprint Half rack controller TEHNIL DT Inlet flange ISO160 / DN160F KF0 or KF25 Purge port KF10 Water cooling fitting PT1/ Pumping speed N 2 0 l s -1 He 20 l s -1 H l s -1 ompression ratio N 2 >10 8 He >5 x 10 5 H 2 >2 x 10 Ultimate pressure ISO inlet flange 10-7 (10-9 ) Pa (Torr) F inlet flange 10-8 (10-10 ) Pa (Torr) 1 80 l s -1 N l s -1 H l s -1 He SEMIONDUTOR PUMPS ND EXHUST MNGEMENT For North merican orders shop online: or call:

10 ontroller D ISO E F 171 Ø Ø156 Ø180 Ø203 Ø x Ø8. Electrical connector D ooling water out (accessory) E ooling water in (accessory) Purge port DN160F (F6) ORDERING INFORMTION PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP51 ISO160 inlet KF25 outlet ISO160 inlet KF0 outlet DN160F inlet KF25 outlet DN160F inlet KF0 outlet ontroller V 50/60 Hz RS V 50/60 Hz RS onnection cables 1.5 m m m m m D m D m Power able (ring terminal) European plug UK Plug Options Water cooling coil Horizontal Vibration isolator ISO DN160F For North merican orders shop online: or call:

11 STP-L51/STP-L51 TUROMOLEULR PUMP l s STP-L51() Pa ls -1 H ls -1 He 3 50 ls -1 N 2 Torr 167 The new O Edwards STP-L51() has been designed to meet the low vibration requirements of advanced spectroscopy and microscopy tools. It is based on O Edwards class leading STP51() model but provides the advantage of having the vibration isolation system built into the pump body. This revolutionary design provides an array of benefits to user. Features & benefits Low vibration uilt in vibration isolation system gives improved performance over STP51() and external isolator Increased pumping performance No external isolator so conductance losses are reduced giving true 50 l/s performance More compact design onsiderably smaller than STP51() and external isolator Easy installation One single pump component reduces installation time TEHNIL DT Inlet flange ISO160K KF 25 Purge port KF10 ( version only) Pumping speed N 2 50 l s -1 H 2 10 l s -1 ompression ratio N 2 >10 8 H 2 >2 x 10 Ultimate pressure with bake out heating 10-6 order (10-8 order) Pa (Torr) Maximum allowable inlet pressure 6.7 x 10-2 (5 x 10 - ) Pa (Torr) Maximum allowable backing pressure 13 (0.1) Pa (Torr) Rated speed 8000 rpm Starting time 3 min Mounting position any Recommended purge gas flow 10 (1.7 x 10-2 ) sccm Input voltage 100 to 120 V ac (±10%) or 200 to 20 V ac (±10%) Typical power consumption 0.55 kv Weight Pump 1 kg ontroller 7 kg Electrical connector Purge port ( version only) SEMIONDUTOR PUMPS ND EXHUST MNGEMENT For North merican orders shop online: or call:

12 ontroller ORDERING INFORMTION PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP-L51 ISO160K STP-L51 ISO160K ontroller V 50/60 Hz RS V 50/60 Hz RS onnection cables 1.5 m m m m m D m D m Power able (ring terminal) European plug UK Plug Options Water cooling coil Horizontal Vibration isolator ISO DN160F For North merican orders shop online: or call:

13 STP603/STP603 TUROMOLEULR PUMP Rated speed rpm Starting time 6 min Maximum inlet flange temperature 120 º Input voltage 100 to 120 V ac (±10%) or 200 to 20 V ac (±10%) Power consumption (continuous) 0.8 kv Weight Pump 31 kg ontroller 9 kg 1 Water cooled 2 With cooling water, for bakeout 169 O Edwards STP603 and corrosion resistant STP603 are new turbomolecular pumps for use in the most advanced semiconductor applications. O Edwards rotor technology gives class-leading performance for maximum process flexibility. oth pumps have been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. Features & benefits dvanced rotor technology Maximized process flexibility Oil free Low vibration High reliability Maintenance free Harsh process compatible ( version) Increased life dvanced controller design uto tuning Self diagnostic functions D motor drive attery-free operation ompact design Small footprint Half rack controller TEHNIL DT l s -1 N l s -1 He l s -1 H 2 SEMIONDUTOR PUMPS ND EXHUST MNGEMENT Inlet flange ISO160K / ISO160F KF0 Purge port KF10 Pumping speed N l s -1 H l s -1 ompression ratio N 2 >10 8 H 2 >10 5 Ultimate pressure with bake out heating 10-7 (10-9 ) order Pa (Torr) 10-8 (10-10 ) order Pa (Torr) (Not version) 6.5 x 10-6 (5 x 10-8 ) Pa (Torr) ( version only) Maximum continuous outlet pressure1 13 (0.1) Pa (Torr) Maximum Nitrogen throughput2 130 sccm Electrical connector Purge port ( version only) For North merican orders shop online: or call:

14 L type connector ORDERING INFORMTION ontroller 90 Polarizing groove Polarizing boss PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP603 ISO160F ISO160K STP603 ISO160F ISO160K ontroller 100 V-120 V/ V 50/60 Hz RS onnection cables Straight connector 2 m m m m m Right angle connector L270 1 m L270 2 m L0 2 m L90 20 m L m L0 20 m Power cable 5 m (ring terminal) For North merican orders shop online: or call:

15 STP1003/STP1003 TUROMOLEULR PUMP Maximum Nitrogen throughput2 130 sccm Rated speed rpm Starting time 6 min Maximum inlet flange temperature 120 º Input voltage 100 to 120 V ac (±10%) or 200 to 20 V ac (±10%) Power consumption (continuous) 0.8 kv Weight Pump 31 kg ontroller 9 kg 1 Water cooled 2 With cooling water, for bakeout 171 O Edwards STP1003 and corrosion resistant STP1003 are new turbomolecular pumps for use in the most advanced of semiconductor applications. O Edwards rotor technology gives class-leading performance for maximum process flexibility. oth pumps have been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. Features & benefits dvanced rotor technology Maximized process flexibility Oil free Low vibration High reliability Maintenance free Harsh process compatible ( version) Increased life dvanced controller design uto tuning Self diagnostic functions D motor drive attery-free operation ompact design Small footprint Half rack controller TEHNIL DT l s -1 N l s -1 He l s -1 H 2 SEMIONDUTOR PUMPS ND EXHUST MNGEMENT Inlet flange ISO200K / ISO200F / ISO250K / ISO250F / DN200F KF0 Purge port KF10 ( version only) Pumping speed N l s -1 H l s -1 ompression ratio N 2 >10 8 H 2 >10 5 Ultimate pressure with bake out heating 10-7 (10-9 ) order Pa (Torr) 10-8 (10-10 ) order Pa (Torr) (Not version) 6.5 x 10-6 (5 x 10-8 ) Pa (Torr) ( version only) Maximum continuous outlet pressure1 13 (0.1) Pa (Torr) Electrical connector Purge port ( version only) For North merican orders shop online: or call:

16 L type connector ORDERING INFORMTION ontroller 90 Polarizing groove Polarizing boss PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP1003 ISO200K ISO250K DN200F STP1003 ISO200K ISO200F ISO250K ISO250F ontroller 100 V-120 V/ V 50/60 Hz RS onnection cables Straight connector 2 m m m m m Right angle connector L270 1 m L270 2 m L0 2 m L90 20 m L m L0 20 m Power cable 5 m (ring terminal) For North merican orders shop online: or call:

17 STPH301 HIGH PERFORMNE TUROMOLEULR PUMP Ultimate pressure with bake out heating 10-7 (10-9 ) order Pa (Torr) Maximum continuous outlet pressure1 5 x 10 2 (3.75) Pa (Torr) Maximum Nitrogen throughput sccm Rated speed 8000 rpm Starting time min Maximum inlet flange temperature 120 º Input voltage 100 to 120 V ac (±10%) or 200 to 20 V ac (±10%) Power consumption 0.6 kv Weight Pump 15 kg ontroller 9 kg 1 Water cooled 173 O Edwards high performance STPH301 turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pump's field proven reliability and class-leading performance give maximum process flexibility. The STPH301 has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. Features & benefits dvanced rotor technology Higher gas throughput Maximized process flexibility Oil free Low vibration High reliability Maintenance free Harsh process compatible Increased life dvanced controller design uto tuning Self diagnostic functions D motor drive attery-free operation ompact design Small footprint Half rack controller 5 axis magnetic suspension system Zero contamination Low maintenance ny orientation operation 1 r 2 N 2 3 He H 2 ISO100K F 5 E Ø130 Ø156 Ø SEMIONDUTOR PUMPS ND EXHUST MNGEMENT TEHNIL DT D Inlet flange ISO100K KF0 Purge port KF10 Water cooling fitting PT1/ Pumping speed N l s -1 H l s -1 ompression ratio N 2 >10 8 H Electrical connector D ooling water out E ooling water in Purge port F Temperature sensor connector For North merican orders shop online: or call: Ø x M8 x

18 L type connector ORDERING INFORMTION Polarizing groove Polarizing boss PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STPH301 ISO100K inlet ontroller V/ V 50/60 Hz RS onnection cables Straight connector 2 m m m m m Right angle connector L270 1 m L270 2 m L0 2 m L90 20 m L m L0 20 m Power cable 5 m (ring terminal) ontroller For North merican orders shop online: or call:

19 STPH51 HIGH PERFORMNE TUROMOLEULR PUMP Ultimate pressure with bake out heating 10-7 (10-9 ) order Pa (Torr) Maximum continuous outlet pressure1 5 x 10 2 (3.75) Pa (Torr) Maximum Nitrogen throughput sccm Rated speed 8000 rpm Starting time min Maximum inlet flange temperature 120 º Input voltage 100 to 120 V ac (±10%) or 200 to 20 V ac (±10%) Power consumption 0.6 kv Weight Pump 15 kg ontroller 9 kg 1 Water cooled 175 O Edwards high performance STPH51 turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pump's proven reliability and class-leading performance give maximum process flexibility. The STPH51 has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. Features & benefits dvanced rotor technology Higher gas throughput Maximized process flexibility Oil free Low vibration High reliability Maintenance free Harsh process compatible Increased life dvanced controller design uto tuning Self diagnostic functions D motor drive attery-free operation ompact design Small footprint Half rack controller 5 axis magnetic suspension system Zero contamination Low maintenance ny orientation operation TEHNIL DT Inlet flange ISO160K KF0 Purge port KF10 Water cooling fitting PT1/ Pumping speed N 2 50 l s -1 H l s -1 ompression ratio N 2 >10 8 H r 2 N 2 3 He H 2 ISO160K 8 x M8 X 20 Electrical connector D ooling water out E ooling water in Purge port F Temperature sensor connector For North merican orders shop online: or call: D F 5 E Ø180 Ø156 Ø Ø SEMIONDUTOR PUMPS ND EXHUST MNGEMENT

20 L type connector ORDERING INFORMTION Polarizing groove Polarizing boss PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STPH51 ISO160K inlet ontroller V/ V 50/60 Hz RS onnection cables Straight connector 2 m m m m m Right angle connector L270 1 m L270 2 m L0 2 m L90 20 m L m L0 20 m Power cable 5 m (ring terminal) ontroller For North merican orders shop online: or call:

21 STP803 DVNTGE TUROMOLEULR PUMP Power consumption (continuous) Weight Pump ontroller 1 Water cooled 0.85 kv 31 kg 9 kg 177 O Edwards STP803 is a new turbomolecular pump designed for use in semiconductor applications. O Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STP803 has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. Features & benefits dvanced rotor technology Maximized process flexibility Oil free Low vibration High reliability Maintenance free Harsh process compatible Increased life dvanced controller design uto tuning Self diagnostic functions D motor drive attery-free operation ompact design Small footprint Half rack controller TEHNIL DT Inlet flange ISO160F / DN160F KF0 Purge port KF10 Water cooling fitting PT1/ Pumping speed N l s -1 H l s -1 ompression ratio N 2 >10 8 H Ultimate pressure with bake out heating 10-7 (10-9 ) order Pa (Torr) Maximum continuous outlet pressure1 3 x 10 2 (2) Pa (Torr) Maximum Nitrogen throughput sccm Rated speed rpm Starting time 7 min Maximum inlet flange temperature 120 º Input voltage V (±10%) 1 r 2 N 2 3 H 2 Electrical connector D ooling water out E ooling water in Purge port F Temperature sensor connector SEMIONDUTOR PUMPS ND EXHUST MNGEMENT For North merican orders shop online: or call:

22 L type connector ORDERING INFORMTION ontroller 90 Polarizing groove Polarizing boss PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP803 ISO60F inlet DN160F inlet ontroller V/ V onnection cables Straight connector 2 m m m m m Right angle connector L270 1 m L270 2 m L0 2 m L90 20 m L m L0 20 m Power cable 5 m (ring terminal) For North merican orders shop online: or call:

23 STP1303 DVNTGE TUROMOLEULR PUMP Input voltage V ac (±10%) Power consumption (continuous) 0.85 kv Weight Pump 39 kg ontroller 9 kg 1 Water cooled 179 O Edwards STP1303 is a new turbomolecular pump designed for use in semiconductor applications. dvanced rotor technology gives classleading performance for maximum process flexibility. The STP1303 has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. Features & benefits dvanced rotor technology Higher gas throughput Maximized process flexibility Oil free Low vibration High reliability Maintenance free Harsh process compatible Increased life dvanced controller design uto tuning Self diagnostic functions D motor drive attery-free operation ompact design Small footprint Half rack controller TEHNIL DT 1 r 2 N 2 3 H 2 SEMIONDUTOR PUMPS ND EXHUST MNGEMENT Inlet flange ISO200F / DN200F KF0 Purge port KF10 Water cooling fitting PT1/ Pumping speed N l s -1 H l s -1 ompression ratio N 2 >10 8 H Ultimate pressure with bake out heating 10-7 (10-9 ) order Pa (Torr) Maximum continuous outlet pressure1 3 x 10 2 (2) Pa (Torr) Maximum Nitrogen throughput sccm Rated speed rpm Starting time 7 min Maximum inlet flange temperature 120 º Electrical connector D ooling water out E ooling water in Purge port F Temperature sensor connector For North merican orders shop online: or call:

24 L type connector ORDERING INFORMTION 180 ontroller 0 90 Polarizing groove Polarizing boss PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP1303 ISO200F inlet DN200F inlet ontroller V/ V 50/60 Hz RS onnection cables Straight connector 2 m m m m m Right angle connector L270 1 m L270 2 m L0 2 m L90 20 m L m L0 20 m Power cable 5 m (ring terminal) For North merican orders shop online: or call:

25 STP1603 TUROMOLEULR PUMP Ultimate pressure with bake out heating 10-7 Pa Maximum allowable backing pressure 266 (2.0) Pa (Torr) Maximum allowable gas flow, N sccm Rated speed rpm Starting time 7 min Mounting position ny Water cooling Flow 2 l min -1 Temperature 5-25 º Pressure 3 kgf / cm -2 Recommended purge gas flow 20 sccm Input voltage V ac (±10%) Typical power consumption 0.85 kv Weight Pump 35 kg ontroller 9 kg NEW 181 The small and powerful O Edwards STP1603 turbo-molecular pump has been designed using O Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. It's half rack controller and compact design provide considerable space saving, whilst it's advanced deposition reduction system gives improved reliability and performance. The STP1603 has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes. Features & benefits dvanced Rotor Design Increased performance Higher gas throughput High reliability Maintenance free Harsh process compatible 5 xis Magnetic Suspension System Zero contamination Low vibration orrosion Resistant Harsh process compatible Increased life ompact onstruction Small footprint Half rack controller dvanced ontroller Design Tuning free Self diagnostic functions D motor drive attery-free operation TEHNIL DT Inlet flange ISO200F KF0 Purge port KF10 Water cooling fitting PT1/ Pumping speed N l s -1 H l s -1 ompression ratio N 2 >10 8 H 2 >7 x N 2 2 r 3 He H 2 Electrical connector D ooling water out E ooling water in Purge port For North merican orders shop online: or call: û D Ø285 Ø237 Ø270 Ø210 35û 30 û E 12 x Ø ISO200F Ø x M2 x 20 SEMIONDUTOR PUMPS ND EXHUST MNGEMENT

26 L type connector ORDERING INFORMTION 182 NEW 0 90 Polarizing groove Polarizing boss PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP1603 ISO200F ontroller V RS onnection cables Straight connector 2 m m m m m Right angle connector L270 1 m L270 2 m L0 2 m L90 20 m L m L0 20 m Power cable 5 m (ring terminal) ontroller For North merican orders shop online: or call:

27 STP2203 DVNTGE TUROMOLEULR PUMP Maximum allowable gas flow, N sccm Rated speed rpm Starting time 7 min Mounting position ny Water cooling Flow 2 l min -1 Temperature 5-25 º Pressure 2.9 x 10 5 Pa 3 kgf/cm Recommended purge gas flow 20 (3. x 10-2 ) sccm Input voltage V ac (±10%) Typical power consumption 1.5 kv Weight Pump 61 kg ontroller 12 kg 183 O Edwards STP2203 is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. new half rack controller gives additional space savings and incorporates D drive technology for battery-free operation. The STP2203 has been approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries. Features & benefits dvanced rotor technology Higher gas throughput Maximized process flexibility 5 axis magnetic suspension system Zero contamination Low maintenance orrosion resistant Harsh process compatible Increased life ompact construction Small footprint Half rack controller dvanced controller design Tuning free Self diagnostic functions D motor drive attery-free operation 1 r 2 N 2 3 He H 2 SEMIONDUTOR PUMPS ND EXHUST MNGEMENT TEHNIL DT Inlet flange ISO250F / IF305 KF0 Purge port KF10 Water cooling fitting PT1/ Pumping speed N l s -1 H l s -1 ompression ratio N 2 >10 8 H x 10 Ultimate pressure 10-6 (10-8 ) order Pa (Torr) Maximum allowable inlet pressure 2.7 (0.02) Pa (Torr) Maximum allowable backing pressure 00 (3) Pa (Torr) For North merican orders shop online: or call:

28 Polarizing groove Polarizing boss ontroller STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP2203 ISO200F DN250F ontroller V 50/60 Hz RS onnection cables Straight connector 1 m m m m m m m Right angle connector L m L m L m L m L270 2 m L90 3 m L0 10 m L m L0 15 m L0 20 m L90 30 m Power cable 5 m (ring terminal) For North merican orders shop online: or call: Electrical connector D ooling water out E ooling water in Purge port F Temperature sensor connector L type connector ORDERING INFORMTION PRODUT DESRIPTION ORDERING NUMER

29 STP2503 TURO PUMP Maximum allowable inlet pressure Water cooling 3.0 sccm With Temperature Management System unit 1.52 sccm Maximum allowable backing pressure 333 (2.5) Pa (Torr) Maximum allowable gas flow, N sccm Rated speed rpm Starting time 9 min Mounting position ny Water cooling Flow 2 l min -1 Temperature 5-25 º Pressure 2.9 x 10 5 Pa 3 kgf/cm -2 Recommended purge gas flow 20 sccm Input voltage V ac (±10%) Typical power consumption 1.5 kv Weight Pump 72 kg ontroller 12 kg NEW 185 The new O Edwards STP2503 turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. Its enhanced rotor design, half rack controller and battery free D drive operation provide considerable space saving and class leading performance. The STP2503 has been qualified on major 300 mm metal and poly etch processes. Features & benefits dvanced Rotor Design Increased performance Higher gas throughput High reliability Maintenance free Harsh process compatible 5 xis Magnetic Suspension System Zero contamination Low vibration orrosion Resistant Harsh process compatible Increased life ompact onstruction Small footprint Half rack controller dvanced ontroller Design Tuning free Self diagnostic functions D motor drive attery-free operation TEHNIL DT Inlet flange ISO250F KF0 Purge port KF10 Water cooling fitting PT1/ Pumping speed N l s -1 H l s -1 ompression ratio N 2 >10 8 H 2 6 x 10 3 Ultimate pressure 10-6 Pa 1 r 2 N 2 3 H 2 Electrical connector D ooling water out E ooling water in Purge port For North merican orders shop online: or call: E D Ø335 Ø333 Ø350 Ø x Ø Ø x M6 x 2 ISO250F SEMIONDUTOR PUMPS ND EXHUST MNGEMENT

30 NEW L type connector ORDERING INFORMTION ontroller 90 Polarizing groove Polarizing boss PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP2503 ISO250F inlet ontroller V RS onnection cables Straight connector 1 m m m m m m m Right angle connector L m L m L m L m L270 2 m L90 3 m L0 10 m L m L0 15 m L0 20 m L90 30 m Power cable 5 m (ring terminal) For North merican orders shop online: or call:

31 STP3003 TURO PUMP Maximum allowable inlet pressure Water cooling 3.0 sccm With TMS unit 1.52 sccm Maximum allowable backing pressure 333 (2.5) Pa (Torr) Maximum allowable gas flow, N sccm Rated speed rpm Starting time 9 min Mounting position ny Water cooling Flow 2 l min -1 Temperature 5-25 º Pressure 2.9 x 10 5 Pa 3 kgf/cm -2 Recommended purge gas flow 20 sccm Input voltage V ac (±10%) Typical power consumption 1.5 kv Weight Pump 72 kg ontroller 12 kg NEW 187 The new O Edwards STP3003 turbo pump has been designed to accommodate the high gas flows required by the next generation of semiconductor and thin film etch processes. Its enhanced rotor design, half rack controller and battery free D drive operation provide considerable space saving and class leading performance. The STP3003 has been qualified on major 300 mm metal and poly etch processes Features & benefits dvanced Rotor Design Increased performance Higher gas throughput High reliability Maintenance free Harsh process compatible 5 xis Magnetic Suspension System Zero contamination Low vibration orrosion Resistant Harsh process compatible Increased life ompact onstruction Small footprint Half rack controller dvanced ontroller Design Tuning free Self diagnostic functions D motor drive attery-free operation TEHNIL DT Inlet flange ISO320F KF0 Purge port KF10 Water cooling fitting PT1/ Pumping speed N l s -1 H l s -1 ompression ratio N 2 >10 8 H 2 6 x 10 3 Ultimate pressure with bake out heating 10-6 Pa 1 r 2 N 2 3 He H 2 70 ISO320F E D Ø25 Ø333 Ø350 Ø172 Ø20 Ø28 12 x Ø1 Electrical connector D ooling water out E ooling water in Purge port x M6 x 2 15 Ø SEMIONDUTOR PUMPS ND EXHUST MNGEMENT For North merican orders shop online: or call:

32 L type connector ORDERING INFORMTION 188 NEW ontroller 0 90 Polarizing groove Polarizing boss PRODUT DESRIPTION ORDERING NUMER STP pump is supplied with an inlet screen. For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below. STP3003 ISO320F inlet ontroller V RS onnection cables Straight connector 1 m m m m m m m Right angle connector L m L m L m L m L270 2 m L90 3 m L0 10 m L m L0 15 m L0 20 m L90 30 m Power cable 5 m (ring terminal) For North merican orders shop online: or call:

33 ESSORIES INLET VIRTION ISOLTOR 189 an be fitted for those applications where a vibration level less than 0.02 µm peak-to-peak is required. ORDERING INFORMTION PRODUT DESRIPTION Inlet vibration isolator (match to inlet flange size) ISO100 DN100F 6 inch F ISO160 DN160F 8 inch F ISO100 ORDERING NUMER SEMIONDUTOR PUMPS ND EXHUST MNGEMENT For North merican orders shop online: or call:

34 SHIPPING KITS Shipping kits are available to protect pumps removed from process chambers for maintenance or servicing. These enable the pump to be purged and sealed in accordance with the manufacturer s recommendations and protect the pump during storage and transportation. These kits are available for the full range of O Edwards turbomolecular pumps. ORDERING INFORMTION 190 INLET FLNGE OUTLET FLNGE PURGE PORT SUITLE FOR USE WITH PUMPS ORDERING NUMER ISO100K NW25 N/ STP200, STP300, STP300H, STP301, STPH ISO100F NW25 N/ STP200, STP300, STP301, STPH DN100F NW25 N/ STP200, STP300, STP301, STPH VG100 NW25 N/ STP200, STP300, STP301, STPH ISO100K NW25 NW10 STP300, STP301, STPH ISO100F NW25 NW10 STP300, STP301, STP DN100F NW25 NW10 STP300, STP301, STPH VG100 NW25 NW10 STP300, STP301, STPH ISO100K NW0 NW10 STP301V, STP301V3, STPH ISO100F NW0 NW10 STP301V, STP301V3, STPH DN100F NW0 NW10 STP301V, STP301V3, STPH VG100 NW0 NW10 STP301V, STP301V3, STPH ISO160K NW25 N/ STPH300, STP00, STP ISO160F NW25 N/ STPH300, STP00, STP DN160F NW25 N/ STPH300, STP00, STP VG160 NW25 N/ STPH300, STP00, STP ISO160K NW25 NW10 STPH300, STP00, STP ISO160F NW25 NW10 STPH300, STP00, STP DN160F NW25 NW10 STPH300, STP00, STP VG160 NW25 NW10 STPH300, STP00, STP ISO160K NW0 NW10 STPH51, STP600, STP603, STPH600, STPH803, STP ISO160F NW0 NW10 STPH51, STP600, STP603, STPH600, STPH803, STP DN160F NW0 NW10 STPH51, STP600, STP603, STPH600, STPH803, STP VG160 NW0 NW10 STPH51, STP600, STP603, STPH600, STPH803, STP ISO200K NW0 N/ STP1000, STP ISO200F NW0 N/ STP1000, STP S 6 NW0 N/ STP1000, STP DN200F NW0 N/ STP1000, STP VG200 NW0 N/ STP1000, STP ISO200K NW0 NW10 STP1000, STP1003, STPH ISO200F NW0 NW10 STP1000, STP1003, STPH1000, STPH751E, STPH1301L(1)(), STPH1303, STPH1303V2, STP S 6 NW0 NW10 STPH DN200F NW0 NW10 STP1000, STP1003, STPH VG200 NW0 NW10 STP1000, STP1003, STPH1000, STPH1303, STP ISO250F NW0 NW10 STP2001, STPH1000, STPH2000, STP2001, STPH2001, STPH2002, STP2002, STP2203V ISO250F NW0 STP2203PV VG250 NW0 NW10 STP2001, STPH200O, STP2001, STPH2001, STPH2002, STP2002, STP For North merican orders shop online: or call:

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