D iaphragm Valve s. for Atomic L aye r D e position. Atomic Layer Deposition (ALD) Diaphragm Valves.

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1 D iaphragm Valve s for tomic L aye r D e position tomic Layer Deposition (LD) Diaphragm Valves Ultrahigh cycle life with high-speed actuation C v range from 0.27 to 0.62 Up to 392 F (200 C) capability with thermal actuators Electronic actuator position-sensing option Suitable for ultrahigh-purity applications with 316L VIM-VR stainless steel body VCR, tube butt weld, and modular surface-mount end connections

2 Diaphragm Valves for tomic Layer Deposition (LD) Contents Features Materials of Construction Process Specifications Technical Data Ordering Information and Dimensions Two-Port Valves Modular Surface-Mount Valves Multiport and Elbow Valves Multivalve Manifolds Options and ccessories Features Normally closed and normally open pneumatic actuation Flow coefficients of 0.27 to 0.62 standard; custom flow coefficients available Two-port straight and elbow configurations Two-, three- and four-port multiport valves and multivalve manifolds Two- and three-port modular surfacemount valves in in. (LD3 series only) and 1.5 in. platforms C-seal design (all valves) W-seal design (LD3 series only) VCR, H Type VCR, and tube butt weld end connections in 1/4, 3/8, and 1/2 in. and 6, 10, and 12 mm sizes Diaphragm Elgiloy material for strength and corrosion resistance Optimized, patent-pending design for ultrahigh cycle life Seat Fully contained seat design High-purity grade PF, fully fluorinated Ultrahigh cycle life road range of chemical compatibility Excellent resistance to swelling and contamination High-integrity seat seal performance ody ody seal provides ultrahigh cycle life 316L VIM-VR stainless steel body material for ultrahighpurity applications Fully swept flow path minimizes entrapment areas facilitates purging maximizes flow capacity Optional body holes to accommodate heater cartridges ctuators Standard Pneumatic actuator for high-speed and repeatable actuation Capable of valve opening or closing time of less than 5 ms Factory-set flow adjusting mechanism ensures precise and consistent C v from valve to valve Optional electronic actuator-position sensor verifies open position of pneumatically actuated valves Optional solenoid pilot valve for electronic control of highspeed actuation Thermal Same performance and options as standard actuator with the following additional features: Includes thermal isolation coupling for thermal applications Limits conductive heat transfer from the body to the actuator Provides a more uniform valve body temperature to reduce cold spots Significantly reduces electrical power required to heat the valve Extends the life of the actuator in applications where the body is heated

3 Materials of Construction Diaphragm Valves for tomic Layer Deposition (LD) 3 Component Material Grade/ STM Specification 1 Pneumatic actuator assembly Cylinder, cap Pistons ase Flow adjusting mechanism O-rings Springs utton luminum Powdered metal 300 series SS normally open; aluminum normally open and normally closed Powdered metal 300 series SS normally open; none normally closed 316 SS/479 Fluorocarbon FKM S SS/479 ushing Carbon-filled PTFE 2 Thermal isolation coupling housing (thermal model only) 316 SS/479 3 Thermal isolation coupling stem (thermal model only) S onnet nut 316 SS/479 5 onnet S Diaphragm Elgiloy/MS Seat High-purity PF Type II/D3307 8a ody 316L VIM-VR SS/SEMI F Ultrahigh-Purity➀ 8b Welded VCR end connections 316L VR SS/SEMI F High-Purity➀ Lubricant Wetted components listed in italics. ➀ 20 % minimum elongation allowed. PTFE-based a ctuator Shown b Process Specifications See Swagelok Ultrahigh-Purity Process Specification (SC-01), MS-06-61, for details on processes, process controls, and process verification. Cleaning ssembly and Packaging Wetted Surface Roughness (R a ) Testing Ultrahigh-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system Performed in ISO Class 4 work areas; valves are double bagged and vacuum sealed in cleanroom bags. Electropolished and finished to an average of 5 µin. (0.13 µm) LD3 normally closed: Inboard helium leak tested to a rate of std cm 3 /s at the seat, envelope, and all seals. LD3 and LD6 normally open and LD6 normally closed: Inboard helium leak tested to a rate of std cm 3 /s at the seat and to a rate of std cm 3 /s at the envelope and all other seals. Technical Data Valve Series Working Pressure psig (bar) Operating➀ urst Standard ctuator Temperature Rating F ( C) Operating➁➂ Thermal ctuator➁ Short- Term akeout Flow Coefficient (C v )➃ Orifice in. (mm) ctuation 0.16 LD3 392 (200) 0.27 Vacuum to > to to 392 (4.1) (valve 145 (10.0) (220) (0 to 120) (0 to 200) LD6 open) (5.8) Normally Open ctuation 0.16 LD3 392 (200) 0.27 Vacuum to > to to 392 (4.1) (valve 145 (10.0) (220) (0 to 120) (0 to 200) LD6 open) (5.8) Internal Volume➄ in. 3 (cm 3 ) Tube utt Weld ody 2-Port Surface- Mount ctuation Pressure psig (bar) Pneumatic ctuator➄ ➀ Recommended operating pressure of less than 35 psig (2.4 bar) for optimal cycle life. ➁ ctuator temperature is limited to 248 F (120 C); valve body temperature is rated to 392 F (200 C). ➂ See pages 11 and 12 for maximum operating temperatures for products with an electronic actuator-position sensor, solenoid pilot valve, or both. ➃ Custom flow coefficients available; contact your authorized Swagelok representative for more information. ➄ LD3 series in. platform surface-mount valve: Internal volume for 2-port body: in. 3 (1.3 cm 3 ) ctuation pressure: normally closed, 60 to 90 psig (4.2 to 6.2 bar); normally open, 70 to 90 psig (4.9 to 6.2 bar). ir displacement: 0.03 in. 3 (0.49 cm 3 ) (1.4) 0.26 (4.3) (1.4) 0.26 (4.3) (0.79) 50 to (3.5 to 6.2) (1.4) (0.79) 70 to (4.9 to 6.2) (1.4) ir Displacement in. 3 (cm 3 ) (0.69) (1.2) (0.44) (0.75)

4 4 Diaphragm Valves for tomic Layer Deposition (LD) Ordering Information and Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. Two-Port Valves For a complete ordering number, add C for a normally closed actuator or NO for a normally open actuator. Standard ctuator Thermal ctuator 1.49 (37.8) ir inlet 1/8-27 NPT Normally Open Standard ctuator LD3 ottom 1.06 (26.9) 1.49 (37.8) ir inlet 1/8-27 NPT ir inlet (M5) 1.06 (26.9) Four mounting holes, M H thread, 0.25 (6.4) deep, located 45 from center line, on a 1.00 (25.4) bolt circle. M H holes are compatible with mounting screws (31.8) utt Weld End Connections 0.44 (11.2) Female VCR Fitting 0.44 (11.2) 0.44 (11.2) Integral Male VCR Fitting 1.25 (31.8) LD6 ottom Inlet/Outlet Size Standard ctuator Ordering Number LD3 Series Thermal ctuator Ordering Number Normally Closed Dimensions, in. (mm) Normally Open Female 1/4 in. 6LVV-LD3FR4-P- 6LVV-LD3TFR4-P (70.6) 3.50 (88.9) 3.22 (81.8) Integral male 1/4 in. 6LVV-LD3VR4-P- 6LVV-LD3TVR4-P- (standard (standard 2.30 (58.4) Rotatable male 1/4 in. 6LVV-LD3MR4-P- 6LVV-LD3TMR4-P- actuator) actuator) 2.78 (70.6) Tube butt weld, 0.30 in. long 1/ in. 6LVV-LD3W4-P- 6LVV-LD3TW4-P (114) 4.22 (107) 1.74 (44.2) Tube butt weld, 0.26 in. long 1/ in. 6LVV-LD3W4S-P- 6LVV-LD3TW4S-P- (thermal (thermal 1.61 (40.9) actuator) actuator) Tube butt weld, 7.6 mm long 6 1 mm 6LVV-LD3W6M-P- 6LVV-LD3TW6M-P (44.2) LD6 Series Female 1/2 in. 6LVV-LD6FR8-P- 6LVV-LD6TFR8-P- 1/4 in. 6LVV-LD6HMR4-P- 6LVV-LD6THMR4-P (75.2) 4.76 (121) 4.48 (114) 3/ in. 6LVV-LD6W6-P- 6LVV-LD6TW6-P- (thermal (thermal actuator) actuator) 1/ in. 6LVV-LD6W8-P- 6LVV-LD6TW8-P (57.2) 10 1 mm 6LVV-LD6W10M-P- 6LVV-LD6TW10M-P (106) Female H type 1/4 in. 6LVV-LD6HFR4-P- 6LVV-LD6THFR4-P (70.6) Female/rotatable male 1/4 in. 6LVV-LD6HFR4HMR4-P- 6LVV-LD6THFR4HMR4-P- H type 3.76 (95.5) 3.48 (88.4) 2.96 (75.2) (standard (standard Rotatable male 1/2 in. 6LVV-LD6MR8-P- 6LVV-LD6TMR8-Pactuator) actuator) 4.16 (106) Rotatable male H type Tube butt weld, 0.50 in. long Tube butt weld, 12.7 mm long 12 1 mm 6LVV-LD6W12M-P- 6LVV-LD6TW12M-P-

5 Diaphragm Valves for tomic Layer Deposition (LD) 5 Ordering Information and Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. Modular Surface-Mount Valves C-Seal Design For a complete ordering number, add C for a normally closed actuator or NO for a normally open actuator. LD series 1.5 in. platform modular surface-mount valves with C-seals are IGC II compatible. For more information about IGC II integrated gas components, see the IGC II Integrated Gas Components Substrates, Manifolds, Mounting Components, and ssembly Hardware catalog, MS W-Seal Design Insert W into an LD3 series ordering number as shown. Examples: 6LVV-MSM-LD3E-W2-P-C for a in. 2-port valve with standard actuator 6LVV-MSM-LD3T-W3-P-C for a 1.5 in. 3-port valve with thermal actuator Standard ctuator 1.5 in. Platform Normally Open Standard ctuator 1.5 in. Platform Thermal ctuator, in. Platform ir inlet (M5) 1.49 (37.8) ir inlet 1/8-27 NPT ir inlet (M5) Four through holes, 0.17 (4.4) dia in. C-Seal Platform ottom 1.50 (38.2) 1.50 (38.2) Four through holes, 0.17 (4.4) dia in. W-Seal Platform ottom Four through holes, 0.22 (5.6) dia 1.5 in. C-Seal Platform ottom 1.50 (38.2) Four through holes, 0.22 (5.6) dia 1.5 in. W-Seal Platform ottom 1.50 (38.2) Surface- Mount Platform in. 1.5 in. 1.5 in. Ports Standard ctuator Ordering Number Thermal ctuator Ordering Number LD3 Series 2 6LVV-MSM-LD3E-2-P- 6LVV-MSM-LD3ET-2-P- 3 6LVV-MSM-LD3E-3-P- 6LVV-MSM-LD3ET-3-P- 2 6LVV-MSM-LD3-2-P- 6LVV-MSM-LD3T-2-P- 3 6LVV-MSM-LD3-3-P- 6LVV-MSM-LD3T-3-P- LD6 Series 2 6LVV-MSM-LD6-HF2-P- 6LVV-MSM-LD6T-HF2-P- 3 6LVV-MSM-LD6-HF3-P- 6LVV-MSM-LD6T-HF3-P-, in. (mm) Normally Open C-Seal W-Seal C-Seal W-Seal 3.40 (86.4) 4.40 (112) 3.02 (76.7) 4.02 (102) 3.15 (80.0) 4.15 (105) 3.40 (86.4) 4.40 (112) 3.70 (94.0) 4.70 (119) 3.45 (87.6) 4.45 (113) 2.74 (69.6) 3.74 (95.0) 2.87 (72.9) 3.87 (98.3) 3.45 (87.6) 4.45 (113) 3.42 (86.9) 4.42 (112)

6 6 Diaphragm Valves for tomic Layer Deposition (LD) Multiport and Elbow Valves To order a valve, select designators for: multiport or elbow flow path end connections for each port Flow Paths Select a flow path as viewed from the top of the valve. Insert the flow path designator in the valve ordering number, as shown on the next page. n a next to the port number in the Flow Path column indicates a port above the valve seat. b next to the port number in the Flow Path column indicates a port below the valve seat. Flow Path Ports Schematic Closed Open Designator D Select an end connection for each port on the body in numerical order. Insert the end connection designator in the valve ordering number in the same sequence it is selected. 4 E End Connection LD3 Series Designator 3 1/4 in. rotatable male 2 1/4 in. tube butt weld, 0.30 in. (7.6 mm) tube stub, in. wall 1 3 C 1/4 in. tube butt weld, 0.26 in. (6.6 mm) short tube stub, in. wall F F 6 mm tube butt weld, 7.6 mm (0.30 in.) tube stub, 1 mm wall 4 G LD6 Series H type D L 1/4 in. rotatable male H type E 2 N 1/2 in. female 8 R 1/2 in. rotatable male 7 3/8 in. tube butt weld, 0.50 in. (12.7 mm) tube stub, in. wall 9

7 Diaphragm Valves for tomic Layer Deposition (LD) 7 Multiport and Elbow Valves Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. Port 1 L Top Port 4 Port 3 L L L LD3: 1.06 (26.9) square LD6: 1.25 (31.8) square Port 2 Port 1 Side Port 5 Not shown: 4 bottom mounting holes same as 2-port body, page 4. Exception: Valve with bottom port (port 5, N body), no mounting holes (11.2) M Port 2 LD3 Series 1/4 in, rotatable male 1/4 in. tube butt weld, 0.30 in. (7.6 mm) tube stub 1/4 in. tube butt weld, 0.26 in. (6.6 mm) tube stub 6 mm tube butt weld, 0.30 in. (7.6 mm) tube stub LD6 Series H type 1/4 in. rotatable male H type 1/2 in. female 1/2 in. rotatable male 3/8 in. tube butt weld, 0.50 in. (12.7 mm) tube stub Dimensions in. (mm) L M 1.39 (35.3) 1.39 (35.3) 0.87 (22.1) 0.81 (20.6) 0.87 (22.1) 1.39 (35.3) 1.48 (37.6) 2.08 (52.8) 1.12 (28.4) For all other valve dimensions, see Two-Port Valves, page (32.5) 1.63 (41.4) 0.76 (19.3) 0.70 (17.8) 0.76 (19.3) 1.21 (30.7) 1.30 (33.0) 1.90 (48.3) 0.95 (24.1) Ordering Information uild a multiport or elbow valve ordering number by combining the designators in the sequence shown. 6LVV LD3 C P C Material 316L VIM-VR stainless steel Series, ctuator LD3 = LD3, standard LD3T = LD3, thermal LD6 = LD6, standard LD6T = LD6, thermal ctuation C = Normally closed NO = Normally open Process Swagelok Ultrahigh-Purity Process Specification (SC-01); electropolished, R a 5 µin. (0.13 µm) average Flow Path See page 6. Example Ordering Numbers Select a designator for each port on the valve. See page 6. Port 1 Port 2 Port 3 Port 4 Port 5 Designator 6LVV-LD3R22P-C 6LVV-LD3TD1313P-NO 6LVV-LD6DEDP-C Material 316L VIM-VR stainless steel Series, actuator LD3, standard actuator LD3, thermal actuator LD6, standard actuator Flow path 2-port, R pattern 4-port, D pattern 3-port, pattern Port 1 end connection 1/4 in. rotatable male 1/4 in. tube butt weld H type Port 2 end connection 1/4 in. rotatable male H type Port 3 end connection 1/4 in. rotatable male 1/4 in. tube butt weld H type Port 4 end connection Port 5 end connection Process Swagelok Ultrahigh-Purity Process Specification (SC-01) ctuation Normally closed Normally open Normally closed

8 8 Diaphragm Valves for tomic Layer Deposition (LD) Multivalve Manifolds To order a multivalve manifold, select designators for: flow path end connections for each port Flow Paths Select a flow path. Insert the flow path designator in the manifold ordering number, as shown on page 10., P2, and designate port numbers. V1 and V2 designate valve numbers. Manifold Series Schematic Flow Path Designator 2-valve, 3-port monoblock 1-valve, 3-port monoblock 2-valve, 3-port double pattern LD3 LD6 LD3 LD6 LD3 P2 V1 V2 P2 V1 V2 P2 V1 V2 P2 V1 V1 P2 V2 V1 P2 V2 V1 P2 V1 V1 P2 V2 V2 Front Side 1V 2V 5V 1D Select an end connection for each port on the body in numerical order. Place the end connection designator in the valve ordering number in the same sequence it is selected. End Connection LD3 Series, ll Ports LD6 Series, Port 2 Designator 2 1/4 in. rotatable male 1 1/4 in. tube butt weld, 0.30 in. (7.6 mm) tube stub, in. wall 3 LD6 Series, Ports 1 and 3 H type D 1/4 in. rotatable male H type E 3/8 in. tube butt weld, 0.50 in. (12.7 mm) tube stub, in. wall 9

9 Multivalve Manifolds Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. Diaphragm Valves for tomic Layer Deposition (LD) 9 1V and 2V Multivalve Manifolds Standard ctuators Port (37.8) 5V Multivalve Manifolds Normally Open Standard ctuator dia Port 2 L (64.5) Port 1 Port 3 Port 1 Port 3 L1 ottom C L1 Port 1 Port (11.2) D 0.44 (11.2) 1.25 (31.8) L4 ottom 1.58 (40.1) L3 Port 1 Port 3 Four mounting holes, M H thread, 0.25 (6.4) deep, located 45 from center line, on a 1.00 (25.4) bolt circle. M H holes are compatible with mounting screws. End Connection 1/4 in. rotatable male 1/4 in. tube butt weld, 0.30 in. (7.6 mm) tube stub, in. wall 1/4 in. rotatable male 1/4 in. tube butt weld, 0.30 in. (7.6 mm) tube stub, in. wall H type 1/4 in. rotatable male H type VCR fitting 3/8 in. tube butt weld, 0.50 in. (12.7 mm) tube stub, in. wall ctuator Normally Closed Normally Open Normally Closed LD3 Series Dimensions, in. (mm) Normally Open Standard 3.32 (84.3) 3.00 (76.2) 2.73 (69.3) 2.44 (62.0) Thermal 4.18 (106) 3.87 (98.3) 3.22 (81.8) 2.94 (74.7) Standard 3.32 (84.3) 3.00 (76.2) 2.73 (69.3) 2.44 (62.0) 2.39 Thermal (106) 3.87 (98.3) 3.22 (81.8) 2.94 (74.7) (60.7) (62.5) (26.9) Standard 3.32 (84.3) 3.00 (76.2) 2.73 (69.3) 2.44 (62.0) Thermal 4.18 (106) 3.87 (98.3) 3.22 (81.8) 2.94 (74.7) LD6 Series Standard 3.67 (93.2) 3.37 (85.6) 2.86 (72.6) 2.58 (65.6) Thermal 4.53 (115) 4.23 (107) 3.36 (85.3) 3.08 (78.2) C D L1 L2 L3 L (51.6) 1.81 (46.0) Thermal 4.53 (115) 4.23 (107) 3.36 (85.3) 3.08 (78.2) Standard 3.67 (93.2) 3.37 (85.6) 2.86 (72.6) 2.58 (65.6) 2.59 (65.8) 1.25 (31.8) 2.03 Thermal 4.53 (115) 4.23 (107) 3.36 (85.3) 3.08 (78.2) (51.6) 2.66 (67.6) 3.35 (85.1) 2.79 (70.9) 2.66 (67.6) Standard 3.67 (93.2) 3.37 (85.6) 2.86 (72.6) 2.58 (65.6) 3.35 Thermal 4.53 (115) 4.23 (107) 3.36 (85.3) 3.08 (78.2) (85.1) Standard 3.67 (93.2) 3.37 (85.6) 2.86 (72.6) 2.58 (65.6) Standard 3.67 (93.2) 3.37 (85.6) 2.86 (72.6) 2.58 (65.6) 2.39 (60.7) Thermal 4.53 (115) 4.23 (107) 3.36 (85.3) 3.08 (78.2) Standard 3.67 (93.2) 3.37 (85.6) 2.86 (72.6) 2.58 (65.6) Thermal 4.53 (115) 4.23 (107) 3.36 (85.3) 3.08 (78.2) 1.81 (46.0) 2.79 (70.9) 1.18 (30.0) 0.90 (22.9) 2.18 (55.4) 1.81 (46.0)

10 10 Diaphragm Valves for tomic Layer Deposition (LD) Multivalve Manifolds Dimensions Dimensions, in inches (millimeters), are for reference only and are subject to change. Side Top L1 L1 L1 1D Multivalve Manifolds Standard ctuators 1.49 (37.8) End Connection 1/4 in. rotatable male 1/4 in. tube butt weld, 0.30 in. (7.6 mm) tube stub, in. wall Dimensions, in. (mm) L (80.3) (standard actuator) 4.16 (106) (thermal actuator) 1.39 (35.3) 0.87 (22.1) ottom Four mounting holes, M H thread, 0.25 (6.4) deep, located 45 from center line, on a 1.00 (25.4) bolt circle. M H holes are compatible with mounting screws. Ordering Information uild a multivalve manifold ordering number by combining the designators in the sequence shown. 6LVV 3T 1V P Material 316L VIM-VR stainless steel Series, ctuator 3 = LD3, standard 3T = LD3, thermal 6 = LD6, standard 6T = LD6, thermal Flow Path 1V = 2-valve, 3-port monoblock (LD3 and LD6) 2V = 2-valve, 3-port monoblock (LD3 only) 5V = 1-valve, 3-port monoblock (LD6 only) 1D = 2-valve, 3-port double pattern (LD3 only) ctuation dd the designator for valve 1 followed by the designator for valve 2, if applicable. = Normally closed NO = Normally open Process Swagelok Ultrahigh-Purity Process Specification (SC-01); electropolished, R a 5 µin. (0.13 µm) average Select a designator for each port on the valve. See page 8. Port 1 Port 2 Port 3 Example Ordering Numbers Designator 6LVV-32V323P- 6LVV-3T1D212P-SNO 6LVV-6T5VD1EP- Material 316L VIM-VR stainless steel Series, actuator LD3, standard actuator LD3, thermal actuator LD6, thermal actuator Flow path 2 valve, 3-port monoblock, 2V 2 valve, 3-port double pattern, 1D 1 valve, 3-port monoblock, 5V Port 1 end connection 1/4 in. tube butt weld H type Port 2 end connection 1/4 in. rotatable male 1/4 in. rotatable male Port 3 end connection 1/4 in. tube butt weld 1/4 in. rotatable male H type Process Swagelok Ultrahigh-Purity Process Specification (SC-01) Valve 1 actuation Normally closed Normally closed with sensor Normally closed Valve 2 actuation Normally closed Normally open

11 Options and ccessories Valves with electronic actuator-position sensors (right), solenoid pilot valve assemblies (page 12), and heater cartridge holes (page 12) are available. Electronic actuatorposition sensor C Solenoid pilot valve Diaphragm Valves for tomic Layer Deposition (LD) 11 Electronic ctuator-position Sensors Transmit a signal to an electrical device indicating the open position of pneumatically actuated valves. Sensors and electrical connectors described below are third-party products. Sensor Technical Information Output Output Function Voltage Operating Temperature Wiring Diagram 3-wire V (dc) transistor (current-sourcing) Normally open 10 to 30 V (dc) polarity protected pulsed SCP 23 to 70 C ( 10 to 158 F) N + U K Load Dimensions Dimensions, in. (mm) ctuator C Normally closed 1.28 (32.5) 0.75 (19.0) 0.60 (15.2) Normally open 1.14 (29.0) 0.82 (20.8) 1.18 (30.0) Ordering Information To order one option, add a designator to the valve ordering number. To order two or more options, add the designators in the sequence shown below. 6LVV LD3W4-P-C S V H Electronic actuator-position sensor ctuator Shown Heater cartridge holes Factory-ssembled Electronic ctuator-position Sensors To order an electronic actuatorposition sensor factory assembled to a valve, add a designator to the valve ordering number. Examples: 6LVV-LD3W4-P-CS 6LVV-MSM-LD6-HF2-P-CSL Sensor Electrical Connector Short pigtail➀ Long cable with flying leads Designator S SL ➀ mating direct-current M8 3 wire push-on straight female connector is available. Ordering number: MS CS LF 1 Solenoid pilot valve assembly Examples: 6LVV-LD3W4-P-CH for a valve with heater cartridge holes 6LVV-LD3W4-P-CS for a valve with electronic actuatorposition sensor with short pigtail electrical connector 6LVV-LD3W4-P-CSLH for a valve with electronic actuatorposition sensor with long cable with flying leads electrical connector and heater cartridge holes 6LVV-3T1V333P-V for a multivalve manifold with solenoid pilot valve assembly on valve 2 6LVV-31V333P-SVSV for a multivalve manifold with electronic actuator-position sensor with short pigtail electrical connector and solenoid pilot valve assembly on both valves

12 Options and ccessories Solenoid Pilot Valve ssemblies Fast-acting, high-flow solenoid pilot valve enhances LD series valve response time. Includes tubing, connectors, and rotatable mounting bracket for installation versatility. See illustration on page 11 for assembly dimensions. See table below for technical information. For additional technical information, see MC valve part number 34--GDFC-1KT. Solenoid Pilot Valve Technical Information Component Solenoid Pilot Valve Push-to- Connect Fitting Tubing MC valve V, 4 W Temperature rating: 50 C (122 F) maximum, continuous use Porting: M H thread, compatible with screws Material: glass-filled nylon and nickel-plated brass Temperature rating: 80 C (176 F) Material: polyurethane Temperature rating: 100 C (212 F) Solenoid pilot valve Heater Cartridge Holes Valves are available with holes in the body to accommodate heater cartridges. Hole size: 1/8 in. through holes for two-port, three-port, and elbow bodies; 1/8 by 1 in. deep holes for monoblock bodies. Two-port and monoblock bodies feature two body holes; three-port and elbow bodies feature one body hole. For more information, contact your authorized Swagelok representative. Ordering Information. To order a valve with heater cartridge holes, add H to the ordering number. Examples: 6LVV-LD3W4-P-CH 6LVV-MSM-LD6-2-P-CH Heater cartridge holes Factory-ssembled Solenoid Pilot Valves To order a solenoid pilot valve factory assembled, add V to the ordering number. Examples: 6LVV-LD3W4-P-CV 6LVV-MSM-LD6-2-P-CV In modular surface-mount systems, the solenoid pilot valve may interfere with adjacent components. Solenoid Pilot Valves for Field ssembly Ordering number for a solenoid pilot valve component only: MS-PVK-LD3-MC34 Safe Product Selection When selecting a product, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user. Caution: Do not mix or interchange parts with those of other manufacturers. Warranty Information Swagelok products are backed by The Swagelok Limited Lifetime Warranty. For a copy, visit swagelok.com or contact your authorized Swagelok representative. IGC, Swagelok, VCR TM Swagelok Company Elgiloy TM Elgiloy Limited Partnership MC TM MC Valves, Inc. 2007, 2008 Swagelok Company Printed in U.S.. GLI June 2008, R6 MS