Product Families. Transfer Door Valves. Transfer Slit Valve Families ARM lock system. lsolation valves. SMART Gate valve Families SMART lock system
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1 Product amilies Transfer oor Valves ock system Vacuum level materials Opening sizes Transfer Slit Valve amilies RM lock system V grade UV grade luminum lloy Stainless steel 304 Stainless steel 304 3xmm 46x36mm x336mm 70x0mm 3xmm 46x36mm x336mm 70x0mm 3xmm 46x36mm ock system ctuator Orientation ctuator type Vacuum level lange Types UV grade lsolation valves SMRT ate valve amilies SMRT lock system Side of valve s body n- xis with SMRT lock system On valve s bonnet Manual lever Pneumatic Pneumatic V grade UV grade V grade UV grade V grade SO- SO- SO- ctuator type Types Vacuum level lange Types Manual wheel /SO- lsolation Poppet Valve amilies ngle Y shape ngle Y shape UV grade V grade UV grade V grade UV grade V grade UV grade V grade /SO- /SO- Pneumatic /SO- ctuator type Types lange Types lsolation all Valve amilies Manual lever Pneumatic asting N machined asting N machined 5
2 Product ntroduction Transfer Slit Valve ( TSV ) is connecting two sealed chambers as gate. The object transfer to another chamber. Transfer Slit Valve is designed for single axis motion, no vibration and particle free. Special design RM O motion, make sure the gate absolutely seal in closing position when the power and air are failure during the processing. The valve designed for long endurance up to 1 million cycle. Valve is simple design for easy maintenance, no extra gear, no need to relocation position of mechanism. Product eatures RM O uto- Relocation Mechanism - Stay in closed position against larger pressure difference. - eep closed position losing the air power. Vulcanised seal Particle free sealing technology No gaps eature - Patented mechanism - ow maintenance cost - No gears, no need relocation - More reliable - Particle free seal No gaps between seal and plates roove creates the space to trap particle RM ock System Open losed 6 Телефон: +7 (499) (многоканальный) info@erstvak.com
3 ayout for nline process system Object transfer from load lock to processing chamber. Processing hamber The Transfer Slit Valve is better performance than ircle ate valve. Transfer Slit Valve has no vibration for object transaction. Transfer Slit Valve oad ock Transfer Slit Valve for multiple processing system. Processing hambers oad ock Processing hambers losed position Open position Valve's operation oncept ate plate 7
4 Position pin holes roove for claws olts holes for chamber interface ate Plate Valve ody onnet Plate ir connectors ctuator lectronic connector for position indicator 8 Телефон: +7 (499) (многоканальный) info@erstvak.com
5 Technical ata for Transfer Slit Valve eedthrough ate seal onnet seal Operate pressure range eak rate ycle life Temperature for Temperature for ctuator Temperature for solenoid / position indicator ake Temperature material Mechanism material ctuator material Mouting position igh Vacuum Ultra igh Vacuum Welded ellows in M3 Welded ellows in M3 M vulcanize ring with bonding on the M vulcanize ring with bonding on the metal ( Optional for M) metal ( Optional for M) M vulcanize ring O metal gasket 760 Torr ~ 1x10 Torr 1,000 mbar~1.33x10 mbar 100 kpa~ 1.13x10 kpa 1 x 10 Torr l/s, e 1.33x10 mbar l/s, e x10 kpa Torr ~ 1x10 Torr 1,000 mbar~1.33x10 mbar 100 kpa~ 1.13x10 kpa 1 x 10 Torr l/s, e 1.33x10 mbar l/s, e 1.13x10 kpa >5,000,000 ycles luminum version: 1 (30 ) open and close Stainless Steel version= 00 (39 ) open and close 100 (1 ) (1 )for M gate seal 00 (39 )for M gate seal Optional for luminum, SUS304/ Optional for SUS304/ and 316/ and SUS316/ Steel and luminum luminum ny Valve operation data Pneumatic operating pressure Position indicator (uild in) ycles counter (uild in) Solenoid (optional) ailure protection (uild in) 3 bar~5 bar kpa~0 kpa 43 psi~7 psi uild in micro switchwith 9 pin connector uild in micro switch with visual 7 digital numbers Optional for 4V, standard uild in RM lock system ( valve colsed position remain and locked ) Valve's Performance data Maximum differential pressure againest gate Maximum differential pressure at opening Pneumatic valve open / close time Valve's ondantance (Molecular flow) 3xmm 0.5(s) 1,590(l/s) 46x36mm x336mm 70x0mm <900 Torr <1,00 mbar <10 kpa <.5 Torr <30 mbar < 3kpa 0.5(s) 0.7(s) 0.9(s) 3,(l/s) 5,000(l/s) 10,400(l/s) 9
6 10 igure 85 igure 1 igure 3 Телефон: +7 (499) (многоканальный) info@erstvak.com
7 Transfer Slit Valves, luminum imension in mm atalog PN Size igture TSV-3x- 3 x TSV-46x36-46 x TSV-x336- x TSV-70x0-70 x Transfer Slit Valves, SUS 304 imension in mm atalog PN Size igture TSV-3x-04 3 x TSV-46x x TSV-x x TSV-70x x Transfer Slit Valves, UV, SUS 304 imension in mm atalog PN Size igture TSV-UV-3x-04 3 x TSV-UV-46x x
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NW Pillow lock-mounte all earings Miniature ouble-shiele orrosion-resistant ightweight Ø W Ø eatures: ubricate for the life of the bearing Meical, scientific & pharmaceutical applications Operating Temperature:
Your Global Source for Today s Most Popular Solenoid Valves
lcon Solenoid Valves Your Global Source for Today s Most Popular Solenoid Valves lcon Solenoid Valves Your Global Source for Today s Most Popular Solenoid Valves lcon Solenoid Valves, a division of International
--Pump flow and pressure required. Operation
FLXFILL PUMP Pumped Fill nclosure Overview The Preferred FlexFill Pump package is designed for pumped filling of single or multiple tank systems. It includes the Preferred FS controller that can communicate
CSSDR-1. C Series Carbon Steel Bar Stock Ball Valves 4.1
Series arbon Steel ar Stock all Valves Lockout hole diameter is 8mm SSR-1 Reduced port NPT ends to NS 1.2.1 One piece body lowout-proof stem 2 p.s.i., W.O.G. omplies with N MR-13 N MR-175/SO 15156 4.1
3/2 ^ % Features. Construction. Electrical
4 Pilot Operated Spool Valves xplosionproof Solenoid Valves 316L odies 1/4" NPT 3/2 SRIS 364 eatures Ideal for oil and gas control panel applications rop-in replacement design - compatible with most existing
26 Series assuredautomation.com. Stainless Steel 2-way Full Port Ball Valve (Cutaway View) PARTS & FEATURES
6 Series Stainless Steel -way ull Port all Valve The 6 is a full port, 36 stainless steel, NPT threaded end automated ball valve. t can be equipped with a manual handle or with direct mount pneumatic or
HYDRAULIC CONTROL VALVES
HYDRAULIC CONTROL VALVES INC. VALVES, INC HYDRAULIC CONTROL VALVES WORKING PRINCIPALS It is automatic hydraulic control valve designed for make desired modulation processes in main valve network line as
Couplings - Quick Disconnect
ouplings - Quick isconnect Hydraulic - eneral Purpose... -1-3, -6 Hydraulic - Non Spill...-4-6 Pneumatic - eneral Purpose Manual onnect...-7-9 Pneumatic - eneral Purpose Push-to-onnect...-1-13 Industrial
Right Angle Control Valve 7051
Right ngle Control Valve 7051 15 up to 50 PN 40 Pneumatically operated valve for control loops with neutral up to highly aggressive media Integrated positioner Compact design ll parts in contact with medium
G765, 3-Way, Mixing Flanged Globe Valve
pplication This valve is typically used in large ir Handling Units (HU) on heating or cooling coils. This valve is suitable for use in a hydronic system with variable flow. Suitable ctuators Non-Spring
Modular Tubing Systems
Modular Tubing Systems d a i r y a c c e p t e d s a n i t a r y e q u i p m e n t The Jacob USD Dairy Certified Quick-Connect System Is s Easy s... 1. Open 2. Fit 3. Close The newly developed combination
DRV4 and DRV4G Cast Steel Pressure Reducing Valves
Local regulations may restrict the use of this product to below the conditions quoted. n the interests of development and improvement of the product, we reserve the right to change the specification without
^ % 3/2 5/2 SERIES 362/562. Features. Construction. Nominal Ambient Temp. Ranges. Electrical
Pilot Operated Stainless Steel Spool Valves xplosionproof Solenoid Valves 6 Stainless Steel odies /4" NPT / / SRIS 6/6 eatures Ideal for valve automation for the oil and gas market Reliable, robust design