CLEAN ROBOTS CLEAN. Type

Transcription

1 LEN Type Product Lineup LEN ROOTS Suitable for electronics component, food, and medical unit related work in clean room. High sealing structure, dust generation prevention, and improvement of suction efficiency are achieved. oth the high cleanliness degree and high performance are established. lean contribute to automation and labor saving of production systems in clean rooms. 48

2 oth high cleanliness degree and high performance were achieved. lean single-axis, artesian, and SR were added to the product lineup. lean SR G/X type P.462 The Z-axis spline is covered with bellows made of materials with low dust generation and other sliding parts are sealed completely. Harnesses are also incorporated completely and the inside of the robot is sucked from the rear of the base to prevent dust generation. rm length: 18 mm to 1 mm Suction amount: 3 to 6 Nl/min. leanliness degree: LSS ISO3 (ISO ) Maximum payload: LSS1 (FED-STD-29D) 2 kg YK2XG YK4XG POINT 1 Vertical bellows structure improves the reliability of the clean performance. s a beltless structure is used, no dust generation caused by the belt occurs. Furthermore, as the G type was renewed to a structure, in which the bellows are installed on the Z-axis vertically, the reliability of the clean performance was further improved. Note. Except for YKX to YK1X POINT 3 ompletely beltless structure improves the rigidity. completely beltless structure was achieved using a ZR-axis direct coupling structure. s a speed reducer is coupled to the tip rotation axis, the R-axis tolerable moment of inertia is very high and the high-speed movement is possible even with a heavy workpiece or largely offset workpiece. Note. Except for YKX to YK1X POINT 2 High durability s a beltless structure is used, the robot can be operated without worry about belt elongation and secular change Note. dditionally, the bellows installed on the Z-axis use material with high durability to ensure the durability performance. Note. Except for YKX to YK1X onventional model Vertical axis motor Rotation axis motor Drive by pulley and timing belt Rigidity and accuracy are determined by belt. Secular change, such as belt elongation occurs. G/X type (Including YK18X/YK22X) Rotation axis Hollow motor Vertical axis all screw Vertical axis motor (direct coupling) Rotation axis hollow speed reducer High rigidity and high accuracy No worry about belt elongation and breakage Maintenance free Type Model rm length (mm) Maximum payload (kg) Standard cycle time (sec.) eltless structure Page Micro-mini type Small type Medium type Large type YK18X P.462 YK22X P.463 YK2XG P.464 YK3XG P.466 YK4XG P.468 YKX P.472 YKXGL 4.74 P.47 YK6X P.47 YK6XGL P.473 YK7X P.476 YK8X P.477 YK1X P

3 LEN Type Product Lineup lean single-axis type P.442 The type are single-axis " series" with clean room specifications. ccording to the applications, an optimal robot can be selected from 14 models from a lightweight and compact model to a large model with a maximum payload of 12 kg. s an air joint for suction is provided as standard equipment, grease with low dust generative characteristics is used, and stainless sheets with an excellent durability are used for the slide table surface, high cleanliness degree is achieved. Stroke: to 2 mm Suction amount: 1 to 9 Nl/min. leanliness degree: LSS1 Note Maximum payload: 12 kg (When installed horizontally) Note. 4L/4LH, L/LH, and 6L are LSS ISO3 (ISO ). 6L L 4L POINT Excellent maintenance ability For 4L to 6L models, removing the screws from the side panel of the slider will allow replacement of the inner roller without detaching the tool. For 8 to 2 models, even when the direct coupling structure is used, the motor or ball screw can be replaced individually. s the table top can be slid horizontally by removing the screws, this ensures easy maintenance work. Model Size (mm) Note Lead (mm) Maximum payload (kg) Maximum speed (mm/sec.) Horizontal Vertical Stroke (mm) Page L 4L : P.442 W4 H to 4 4LH 4LH : P L L : P.444 W H to 8 LH LH : P L W6 H to 8 P W8 H to 8 P L W8 H to 1 P LH W8 H to 1 P W14 H to 1 P W136 H to 1 P H W136 H to 1 P W168 H to 12 P.43 17L W168 H to 2 P.44 2 W22 H to 12 P.4 Note 1. The size shows approximate maximum cross sectional size.

4 lean single-axis SS type (TRNSERVO) P.439 The SS type are stepping motor single-axis "TRNSERVO series" with clean room specifications. Use of a newly developed vector control method achieves the function and performance equivalent to the servomotor at a low cost even using the stepping motor. s an air joint for suction is provided as standard equipment, grease with low dust generative characteristics is used and stainless sheets with an excellent durability are used for the slide table surface, the high cleanliness degree is achieved. Stroke: to 8 mm Suction amount: 1 to 8 Nl/min. leanliness degree: LSS1 Maximum payload: 12 kg (When installed horizontally) SS4 SS SSH Model Size (mm) Note 1 Lead (mm) SS4 SS SSH W49 H9 W H6 W H6 Maximum payload (kg) Horizontal Vertical Maximum speed (mm/sec.) (horizontal) / (vertical) (horizontal) / 2 (vertical) Stroke (mm) Page to 4 P.439 to 8 P.44 to 8 P.441 Note 1. The size shows approximate maximum cross sectional size. lean artesian type P.46 This artesian robot type is applicable to clean rooms. s stainless sheets with excellent durability are used, the opening can be designed to be its minimum level and the area applicable to LSS1 with less suction amount. Furthermore, as the ZR-axis of the SXYx uses a super high speed unit of the SR robot, this achieves great reduction of the cycle time. Suction amount: 6 to 9 Nl/min. leanliness degree: LSS1 Note Maximum payload: 2 kg Maximum speed: 1 mm/sec. Note. User wiring: D-Sub 2-pin connector (Numbers 1 to 24 are already wired and number 2 is frame ground.) Note. User tubing: ф 6-air tube, 3 pcs. SXYx Type Model xis Movement range Maximum speed (mm/sec.) Maximum payload (kg) Page 2 axes SXYx SXYx (ZS12) 3 axes SXYx (ZS6) SXYx (ZRS12) 4 axes SXYx (ZRS6) X 1 to 1 mm 1 Y 1 to 6 mm 1 X 1 to 1 mm 1 Y 1 to 6 mm 1 Z 1 mm 1 X 1 to 1 mm 1 Y 1 to 6 mm 1 Z 1 mm X 1 to 1 mm 1 Y 1 to 6 mm 1 Z 1 mm 1 R /sec X 1 to 1 mm 1 Y 1 to 6 mm 1 Z 1 mm R /sec 2 P.46 3 P.48 P.49 3 P.46 P.461 1

5 rticulated Y LM1 ompact single-axis TRNSERVO Single-axis LEN ROOTS LEN TYPE single-axis PHSER artesian SR ONTENTS LEN ROOTS SPEIFITION SHEET 436 SINGLE-XIS TRNSERVO SS4 439 SS 44 SSH 441 4L 442 4LH 443 L 444 LH 44 6L L 448 8LH H L RTESIN 2 axes SXYx 46 3 axes / ZS SXYx 48 4 axes / ZRS SXYx 46 SR YK18X 462 YK22X 463 YK2XG 464 YK3XG 466 YK4XG 468 YKXGL 47 YKX 472 YK6XGL 473 YK6X 47 YK7X 476 YK8X 477 YK1X 478 YP-X LEN ONTROLLER INFORMTION Single-axis artesian SR Main functions P.48 43

6 rticulated Y LM1 LEN ROOTS SPEIFITION SHEET lean single-axis TRNSERVO Degree of cleanliness LSS 1 Intake air 1 to 8N /min ompact single-axis TRNSERVO Single-axis Model SS4 SS Lead (mm) Payload Stroke (mm) and maximum speed (mm/sec) (kg) Horizontal Vertical Detailed info page P.439 P.44 single-axis PHSER SSH P.441 artesian SR YP-X LEN ONTROLLER INFORMTION Single-axis artesian SR Degree of cleanliness 4L/4LH/L/LH/6L... ISO LSS 3 (ISO ) Note Models other than those shown above... LSS 1 Note. lass 1 (.1µm) equivalent to FED-STD-29D Intake air 2 to 9N /min Model servo Payload Repeatability Lead Stroke (mm) and maximum speed (mm/sec) motor (kg) (mm) (mm) output (W) Horizontal Vertical L / 4LH 3 +/ L / LH 3 +/ L 6 +/ / L 1 +/ LH 1 +/ / / H 2 +/ / L 6 +/ /

7 rticulated Y LM1 ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR Detailed info page 4L : P.442 4LH : P.443 L : P.444 LH : P.44 P.446 P.447 P.448 P.449 P.4 P.41 P.42 P P.44 P.4 YP-X LEN ONTROLLER INFORMTION Single-axis artesian SR 437

8 rticulated Y LM1 ompact single-axis TRNSERVO LEN ROOTS SPEIFITION SHEET lean cartesian Degree of cleanliness LSS 1 Intake air 6 to 9N /min perture designed to minimal dimensions by use of stainless steel sheet Installed clean robot dedicated cable duct rm variations Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION Note : User cable D-Sub 2 pin connector : 24 conductors,.3 sq (No. 1 through 24 are already connected and No.2 is for grounding) Note : User tube three ϕ6 air tubes Type Model xis Moving range Maximun speed (mm/sec) 2 axes SXYX X 1 to 1mm 1 Y 1 to 6mm 1 X 1 to 1mm 1 SXYX (ZS12) Y 1 to 6mm 1 3 axes Z 1mm 1 X 1 to 1mm 1 SXYX (ZS6) Y 1 to 6mm 1 Z 1mm X 1 to 1mm 1 SXYX (ZRS12) Y 1 to 6mm 1 Z 1mm 1 4 axes R /sec X 1 to 1mm 1 SXYX (ZRS6) Y 1 to 6mm 1 Z 1mm R /sec lean SR Maximum payload (kg) Detailed info page 2 P.46 3 P.48 P.48 3 P.46 P.46 /G/GL Degree of cleanliness... LSS 1 G/GL... ISO LSS 3 (ISO ) Note Intake air 3 to 6N /min Harness placed completely on inside Note. lass 1 (.1µm) equivalent to FED-STD-29D Special model for clean rooms with moving Y-axis carriage installed upward. T1 T3 ellows cover fitted in axial tip M M M M Single-axis artesian SR Type Tiny type Small type Medium type Large type Passed 2 million stroke durability test R axis tolerable moment of inertia (kgm 2 ) rm length (mm) and XY axis combined maximum speed (m/s) Standard Maximum Model cycle time payload (sec) (kg) YK18X 3.3m/s P.462 YK22X 3.4m/s P.463 Detailed info page YK2XG 4.m/s.7 4. P.464 YK3XG.6m/s.7 4. P.466 YK4XG 6.1m/s.7 4. P.468 YKXGL.1m/s P.47 YKX 4.9m/s P.472 YK6XGL 4.9m/s P.473 YK6X.6m/s P.47 YK7X 6.7m/s P.476 YK8X 7.3m/s P.477 YK1X 8.m/s P

9 SS4 E compliance Origin on the non-motor side is selectable SS4 asic specifications S Model Lead Type rake Direction of air coupler installation Origin position Stroke able length Note 2 12: 12mm S: Straight N: With no brake RJ: Right (Standard) N: Standard Note 1 to 4 1L: 1m 6: 6mm : With brake LJ: Left Z: Non-motor side (mm pitch) 3L: 3m 2: 2mm L: m 1L: 1m Note 1. If changing from the origin position at the time of purchase, the machine reference amount must be reset. For details, refer to the manual. Note 2. The robot cable is flexible and resists bending. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P.6. Motor 42 Step motor Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw ϕ8 (lass 1) Maximum motor torque (N. m).27 all screw lead (mm) Maximum speed (mm/sec) Maximum Horizontal payload (kg) Vertical Max. pressing force (N) Stroke (mm) to 4 (mm pitch) Overall length Horizontal Stroke+216 (mm) Vertical Stroke+261 Maximum outside dimension of body cross-section (mm) W49 H9 able length (m) Standard: 1 / Option: 3,, 1 Degree of cleanliness LSS 1 Note 2 Intake air (N /min) Lead Note 1. Positioning repeatability in one direction. Note 2. Per 1cf (.1μm base), when suction blower is used. SS ϕ6 Suction air joint Mounting direction: RJ (Note 2) 34. (1) 1 49 llowable overhang Note Static loading moment Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 1kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg 3 3 6kg kg Lead 2 Lead 2 Note. Distance from center of slider upper surface to conveyor center-of-gravity at a guide service life of 1, km (Service life is calculated for 4mm stroke models). pprox. 2 (able length) 161+/-2: When origin is on motor side (161: When origin is on non-motor side) Effective stroke able securing position (Note 3) 124+/-1 (Note 1) 21 2-ϕ3H7 Depth6 4-M4 x.7 Depth8 9 Mounting direction: LJ 169+/-1 (with brake) (Note 1) 26+/-2 (with brake): When origin is on motor side (26 with brake: When origin is on non-motor side) 176 (with brake) 182. (with brake) (between knocks +/-.2) (with brake) L L+4 (with brake) Lead 2 x -M x.8 Depth ϕ4h7( ) Depth 6 D S2 Robot positioner I/O S2: TS-S2 Note 3 NP: NPN PN: PNP : -Link DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 SH Robot positioner I/O attery SH: TS-SH NP: NPN : With battery PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 (Incremental) SD 1 Robot driver SD: TS-SD Depth 6 I/O cable 1: 1m MR Operation method TS-S2 TS-SH TS-SD MY MP (Unit: N. m) MY MP MR Remote command Pulse train control (: When origin is on motor side) +/-2: When origin is on non-motor side 18+/-1 (Note1) R 2 (ϕ34) 4 1 (Slider top face) rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION Effective stroke Note 1. Stop positions are determined by the mechanical stoppers at both ends. L Note 2. Either right or left can be selected for the suction air joint mounting direction. This drawing shows the RJ (standard) direction Note 3. Secure the cable with a tie-band 1mm or less from unit s end face to prevent the cable from being subjected to excessive loads. Note 4. The cable s minimum bend radius is R Note. These are the weights without a brake. The weights are.2kg heavier when equipped with a brake. Weight (kg) Note TS-S2 u 49 TS-SH u 49 TS-SD u 439

10 rticulated Y SS High lead: Lead 2 E compliance Origin on the non-motor side is selectable LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SS asic specifications Motor 42 Step motor Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw ϕ12 (lass 1) Maximum motor torque (N. m).27 all screw lead (mm) Maximum speed (mm/sec) Note Maximum Horizontal payload (kg) Vertical 1 2 Max. pressing force (N) Stroke (mm) to 8 (mm pitch) Overall length Horizontal Stroke+23 (mm) Vertical Stroke+27 Maximum outside dimension of body cross-section (mm) W H6 able length (m) Standard: 1 / Option: 3,, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) Lead Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. S Note 1 Direction of air Model Lead Type rake Origin position Stroke able length coupler installation 2: 2mm S: Straight N: With no brake RJ: Right (Standard) N: Standard Note 2 to 8 1L: 1m 12: 12mm : With brake LJ: Left Z: Non-motor side (mm pitch) 3L: 3m 6: 6mm L: m 1L: 1m Note 1. Only the model with a lead of 12mm or 6mm can select specifications with brake. Note 2. If changing from the origin position at the time of purchase, the machine reference amount must be reset. For details, refer to the manual. Note 3. The robot cable is flexible and resists bending. Note 4. See P.498 for DIN rail mounting bracket. Note. Select this selection when using the gateway function. For details, see P.6. SS ϕ6 Suction air joint Mounting direction: RJ (Note 2) 36 (17) 24 pprox. 2 (able length) able securing position (Note 3) 6 Mounting direction: LJ Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Either right or left can be selected for suction air joint mounting direction. This drawing shows the RJ (standard) direction. Note 3. Secure the cable with a tie-band 1mm or less from unit s end face to prevent the cable from being subjected to excessive loads. Note 4. The cable s minimum bend radius is R3. Note. These are the weights without a brake. The weights are.2kg heavier when equipped with a brake. Note 6. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. llowable overhang Note Static loading moment Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 2kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg Lead 2 Lead 2 Note. Distance from center of slider upper surface to conveyor center-of-gravity at a guide service life of 1, km (Service life is calculated for 6mm stroke models). 178+/-2: When origin is on motor side (178: When origin is on non-motor side) 14+/-1 (Note 1) /-1 (with brake) (Note 1) 218+/-2 (with brake): When origin is on motor side (218 with brake: When origin is on non-motor side) 178 (with brake) (with brake) 11. Effective stroke 2-ϕ4H7 Depth6 4-M4 x.7 Depth8 42 (between knocks +/-.2) L L+4 (with brake) x -M6 x 1 Depth ϕ4h7 ( ) Depth D 166. (with brake) S2 Robot positioner I/O S2: TS-S2 Note 4 NP: NPN PN: PNP : -Link DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note SH Robot positioner I/O attery SH: TS-SH NP: NPN : With battery PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note (Incremental) SD 1 Robot driver SD: TS-SD +.2 Depth 6 4 I/O cable 1: 1m MR Operation method TS-S2 TS-SH TS-SD MY MP (Unit: N. m) MY MP MR Remote command Pulse train control (2: When origin is on motor side) 2+/-2: When origin is on non-motor side 2 R (ϕ34) 14+/-1(Note 1) 1 7 (Slider top face) (.) Effective stroke L Weight (kg) Note Maximum speed for each stroke (mm/sec) Note 6 Lead TS-S2 u 49 TS-SH u 49 TS-SD u

11 SSH High lead: Lead 2 E compliance Origin on the non-motor side is selectable rticulated Y SSH asic specifications S Note 1 Direction of air Model Lead Type rake Origin position Stroke able length coupler installation 2: 2mm S: Straight N: With no brake RJ: Right (Standard) N: Standard Note 2 to 8 1L: 1m 12: 12mm : With brake LJ: Left Z: Non-motor side (mm pitch) 3L: 3m 6: 6mm L: m 1L: 1m Note 1. Only the model with a lead of 12mm or 6mm can select specifications with brake. Note 2. If changing from the origin position at the time of purchase, the machine reference amount must be reset. For details, refer to the manual. Note 3. The robot cable is flexible and resists bending. Note 4. See P.498 for DIN rail mounting bracket. Note. Select this selection when using the gateway function. For details, see P.6. Motor 42 Step motor Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw ϕ12 (lass 1) Maximum motor torque (N. m).47 all screw lead (mm) Maximum speed Note 2 Horizontal (mm/sec) Vertical 2 Maximum Horizontal payload (kg) Vertical 2 4 Max. pressing force (N) Stroke (mm) to 8 (mm pitch) Overall length Horizontal Stroke+286 (mm) Vertical Stroke+36 Maximum outside dimension of body cross-section (mm) W H6 able length (m) Standard: 1 / Option: 3,, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) Lead Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. SSH ϕ6 Suction air joint Mounting direction: RJ (Note 2) 36 (17) pprox. 2 (able length) 24 able securing position (Note 3) 6 Mounting direction: LJ Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Either right or left can be selected for the suction air joint mounting direction. This drawing shows the RJ (standard) direction. Note 3. Secure the cable with a tie-band 1mm or less from unit s end face to prevent the cable from being subjected to excessive loads. Note 4. The cable s minimum bend radius is R3. Note. These are the weights without a brake. The weights are.2kg heavier when equipped with a brake. Note 6. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. llowable overhang Note Static loading moment Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 2kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg Lead 2 Lead 2 Note. Distance from center of slider upper surface to conveyor center-of-gravity at a guide service life of 1, km (Service life is calculated for 6mm stroke models) /-2: When origin is on motor side (223.: When origin is on non-motor side) 17.+/-1 (Note 1) /-1 (with brake) (Note 1) 243.+/-2 (with brake): When origin is on motor side (243. with brake: When origin is on non-motor side) 214 (with brake) (with brake) L L+2 (with brake) Effective stroke 2-ϕ4H7 Depth6 4-M x.8 Depth1 43 (between knocks +/-.2) x -M6 x 1 Depth ϕ4h7 ( ) Depth D 186. (with brake) S2 Robot positioner I/O S2: TS-S2 Note 4 NP: NPN PN: PNP : -Link DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note SH Robot positioner I/O attery SH: TS-SH NP: NPN : With battery PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note (Incremental) SD 1 Robot driver SD: TS-SD I/O cable 1: 1m MR Operation method TS-S2 TS-SH TS-SD MY MP (Unit: N. m) MY MP MR Remote command Pulse train control (62. When origin is on motor side) 62.+/-2: When origin is on non-motor side 14.+/-1 (Note 1) Effective stroke L Weight (kg) Note Lead Maximum speed (Horizontal) for each stroke (Vertical) (mm/sec) Note 6 (Horizontal) (Vertical) Depth R (ϕ34) 1 6 (Slider top face) (.) 2 34 LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION TS-S2 u 49 TS-SH u 49 TS-SD u 441

12 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 4L 4L Model servo motor output (W) 3 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw 8 (lass 1) all screw lead (mm) Maximum speed (mm/sec) Maximum Horizontal payload (kg) Vertical Rated thrust (N) Stroke (mm) to 4 (mm pitch) Overall length Horizontal Stroke+2 (mm) Vertical Stroke+24 Maximum outside dimension of body cross-section (mm) W4 H able length (m) Standard: 3. / Option: 1,, 1 Degree of cleanliness ISO LSS 3 (ISO ) Note 2 Intake air (N /min) Note Note 1. Positioning repeatability in one direction. Note 2. LSS 1 (.1μm) FED-STD-29D or equivalent when a suction blower is used. Note 3. The necessary intake amount varies depending on the use conditions and environment. 4L pprox. 2 (Motor cable length) 9. (3: Screw head) (with brakes) (2) 132+/-3 Effective stroke 73+/-3 When origin is on motor side When origin is 81+/-2 (Note 1) 44 ϕ3h7 Depth 7 on non-motor side 22+/-1 (Note 1) 24 4-M4.7 Depth 1 (3) ϕ6 suction air joint 116+/-2 (with brakes) (Note 1) 167+/- 3 (with brakes) (9) (9) Grounding terminal (M4) 14 (with brakes) (with brakes) R 38 3H7 Depth 7 ϕ4h7 Depth 6 () L L+3 (with brakes) ϕ6 suction air joint S 2 -M4.7 Depth 6 Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 2kg kg kg kg kg kg kg kg kg kg 2 4 3kg kg kg kg kg kg Lead 2 Lead 2 ERD Lead Direction of air rake designation coupler installation Origin position change Stroke able length Note 1 I/O connector specification 12: 12mm No entry: With no brake LJ: Left (Standard) None: Standard to 4 1L: 1m N1: I/O flat cable 1m (Standard) 6: 6mm K: With brake RJ: Right Z: Non-motor side (mm pitch) 3L: 3.m N2: Twisted-pair cable 2m (pulse train function) 2: 2mm L: m 1L: 1m 1K/3K/K/1K (Flexible cable) Note 1. The robot cable is standard cable (1L/3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Effective stroke L E S Weight (kg) Note Maximum speed for each stroke (mm/sec) Lead 2 12 Origin on the non-motor side is selectable asic specifications llowable overhang Note Static loading moment Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Note. Service life is calculated for 3mm stroke models. 4 H7 Depth 6 Lead 2 R E 23. ϕ (4) MR MY 4 28 MP (Unit: N. m) MY MP MR ERD Operation method Pulse train control / Operation using RS-232 communication LJ (Note 4) RJ (Note 4) Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R3. Note 3. Weight of models with no brake. The weight of brake-attached models is.2 kg heavier than the models with no brake shown in the table. Note 4. Either right or left can be selected for the installation direction for the 6 intake air joint. (The left side is the standard.) Note. External view of 4LH is identical to 4L. 442 ERD u 1

13 4LH 4LH Model servo motor output (W) 3 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw 8 (lass 1) all screw lead (mm) Maximum speed (mm/sec) Maximum Horizontal payload (kg) Vertical Rated thrust (N) Stroke (mm) to 4 (mm pitch) Overall length Horizontal Stroke+2 (mm) Vertical Stroke+24 Maximum outside dimension of body cross-section (mm) W4 H able length (m) Standard: 3. / Option:, 1 Degree of cleanliness ISO LSS 3 (ISO ) Note 2 Intake air (N /min) Note Note 1. Positioning repeatability in one direction. Note 2. LSS 1 (.1μm) FED-STD-29D or equivalent when a suction blower is used. Note 3. The necessary intake amount varies depending on the use conditions and environment. 4LH Lead Direction of air Origin position rake designation coupler installation change Stroke able length Note 1 12: 12mm No entry: With no brake LJ: Left (Standard) None: Standard to 4 3L: 3.m 6: 6mm K: With brake RJ: Right Z: Non-motor side (mm pitch) L: m 2: 2mm 1L: 1m 3K/K/1K (Flexible cable) Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. Select this selection when using the gateway function. For details, see P.6. pprox. 2 (Motor cable length) 9. (3: Screw head) (with brakes) (2) (3) 7. Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 2kg kg kg kg kg kg kg kg kg kg 2 4 3kg kg kg kg kg kg Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Note. Service life is calculated for 3mm stroke models. Lead /-3 Effective stroke 73+/-3 When origin is on motor side When origin is 81+/-2 (Note 1) 44 ϕ3h7 Depth 7 on non-motor side 22+/-1 (Note 1) 24 4-M4.7 Depth 1 ϕ6 suction air joint 116+/-2 (with brakes) (Note 1) 167+/- 3 (with brakes) 2 (9) (9) Grounding terminal (M4) 14 (with brakes) (with brakes) 37 R 38 3H7 Depth 7 ϕ4h7 Depth 6 Effective stroke L E S Weight (kg) Note Maximum speed for each stroke (mm/sec) Lead 2 12 Origin on the non-motor side is selectable () L L+3 (with brakes) Lead 2 ϕ6 suction air joint S 2 -M4.7 Depth 6 TSX Positioner Note 2 Driver: Power-supply voltage / LD monitor I/O selection attery TS-X Power capacity No entry: None NP: NPN : With battery 1: 1V/1W or less L: With LD PN: PNP (bsolute) 2: 2V/1W or less : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 3 (Incremental) SR1-X Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 Driver Power-supply voltage Driver: Power capacity 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment 4 H7 Depth 6 Lead 2 R E 23. ϕ (4) 31 MR MY MP (Unit: N. m) MY MP MR SR1-X RX221/222 RX24/34 Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2 Pulse train control LJ (Note 4) RJ (Note 4) Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R3. Note 3. Weight of models with no brake. The weight of brake-attached models is.2 kg heavier than the models with no brake shown in the table. Note 4. Either right or left can be selected for the installation direction for the 6 intake air joint. (The left side is the standard.) Note. External view of 4LH is identical to 4L. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SR1-X u 16 TS-X u 49 RDV-X u 4 443

14 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION L L Model servo motor output (W) 3 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw 12 (lass 1) all screw lead (mm) Maximum speed (mm/sec) Maximum Horizontal 3 9 payload (kg) Vertical Rated thrust (N) Stroke (mm) to 8 (mm pitch) Overall length Horizontal Stroke+21. (mm) Vertical Stroke+236. Maximum outside dimension of body cross-section (mm) W H6 L pprox. 2 (Motor cable length) 126+/-3 Effective stroke 7.+/-3 When origin is on motor side When origin is on 72+/-2 (Note 1) ϕ4h7 Depth 7 non-motor side 21.+/-1 (Note 1) 34 4-M4.7 Depth 1 9 Grounding terminal (M4) (3: Screw head) 18 (3) ϕ6 suction air joint 17+/-2 (with brakes) (Note 1) 161+/-3 (with brakes) (2) High lead: Lead 2 Note 1. The model with a lead of 2mm cannot select specifications with brake (vertical specifications). Note 2. The robot cable is standard cable (1L/3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. able length (m) Standard: 3. / Option: 1,, 1 Degree of cleanliness ISO LSS 3 (ISO ) Note 2 Intake air (N /min) Note Note 1. Positioning repeatability in one direction. Note 2. LSS 1 (.1μm) FED-STD-29D or equivalent when a suction blower is used. Note 3. The necessary intake amount varies depending on the use conditions and environment (with brakes) (with brakes) (with brakes) R (11) (96) 4 4H7 Depth 7 ϕ4h7 Depth 6 L L+3 (with brakes) ϕ6 suction air joint S 2 4 H7 Depth 6 -M.8 Depth 6 2 E Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 1kg kg kg kg kg kg kg kg kg kg kg kg kg kg 14 Lead 2 Lead 2 ERD Lead Direction of air rake designation coupler installation Origin position change Stroke able length Note 2 I/O connector specification 2: 2mm No entry: With no brake LJ: Left (Standard) None: Standard to 8 1L: 1m N1: I/O flat cable 1m (Standard) 12: 12mm K: With brake RJ: Right Z: Non-motor side (mm pitch) 3L: 3.m N2: Twisted-pair cable 2m (pulse train function) 6: 6mm L: m 1L: 1m 1K/3K/K/1K (Flexible cable) Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Note. Service life is calculated for 6mm stroke models. Effective stroke L E S Weight (kg) Note Lead Maximum speed for each stroke Note (mm/sec) Origin on the non-motor side is selectable asic specifications llowable overhang Note Static loading moment Speed setting - 9% 8% 7% Speed setting - 8% 7% 6% % R ϕ () 38 6 MR 1.7 MY 32 MP (Unit: N. m) MY MP MR ERD Operation method Pulse train control / Operation using RS-232 communication LJ (Note 4) RJ (Note 4) Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R3. Note 3. Weight of models with no brake. The weight of brake-attached models is.2 kg heavier than the models with no brake shown in the table. Note 4. Either right or left can be selected for the installation direction for the 6 intake air joint. (The left side is the standard.) Note. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. Note 6. External view of LH is identical to L. 444 ERD u 1

15 LH LH Model Note 1. The model with a lead of 2mm cannot select specifications with brake (vertical specifications). Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P.6. servo motor output (W) 3 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw 12 (lass 1) all screw lead (mm) Maximum speed (mm/sec) Maximum Horizontal 3 9 payload (kg) Vertical Rated thrust (N) Stroke (mm) to 8 (mm pitch) Overall length Horizontal Stroke+21. (mm) Vertical Stroke+236. Maximum outside dimension of body cross-section (mm) W H6 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness ISO LSS 3 (ISO ) Note 2 Intake air (N /min) Note Note 1. Positioning repeatability in one direction. Note 2. LSS 1 (.1μm) FED-STD-29D or equivalent when a suction blower is used. Note 3. The necessary intake amount varies depending on the use conditions and environment. LH 9 Grounding terminal (M4) (3: Screw head) 79 (2) 114 (with brakes) Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 1kg kg kg kg kg kg kg kg kg kg kg kg kg kg 1 38 Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Note. Service life is calculated for 6mm stroke models. Lead 2 R ϕ6 suction air joint 4H7 Depth 7 17+/-2 (with brakes) (Note 1) 161+/-3 (with brakes) (11) 18 (96) (3) L Lead 2 L+3 (with brakes) ϕ () MR MY MP (Unit: N. m) MY MP MR SR1-X RX221/222 RX24/34 pprox. 2 (Motor cable length) 126+/-3 Effective stroke 7.+/-3 When origin is on motor side When origin is on 72+/-2 (Note 1) ϕ4h7 Depth 7 non-motor side 21.+/-1 (Note 1) 34 4-M4.7 Depth (with brakes) (with brakes) High lead: Lead 2 Lead Direction of air Origin position rake designation coupler installation change Stroke able length Note 2 2: 2mm No entry: With no brake LJ: Left (Standard) None: Standard to 8 3L: 3.m 12: 12mm K: With brake RJ: Right Z: Non-motor side (mm pitch) L: m 6: 6mm 1L: 1m 3K/K/1K (Flexible cable) 4 ϕ4h7 Depth 6 TSX ϕ6 suction air joint S 2 4 H7 Depth 6 -M.8 Depth 6 2 E Positioner Note 3 Driver: Power-supply voltage / LD monitor I/O selection attery TS-X Power capacity No entry: None NP: NPN : With battery 1: 1V/1W or less L: With LD PN: PNP (bsolute) 2: 2V/1W or less : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 (Incremental) SR1-X Effective stroke L E S Weight (kg) Note Lead Maximum speed for each stroke Note (mm/sec) Origin on the non-motor side is selectable Speed setting - 9% 8% 7% Speed setting - 8% 7% 6% % Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 Driver Power-supply voltage Driver: Power capacity 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment R Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2 Pulse train control LJ (Note 4) RJ (Note 4) Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R3. Note 3. Weight of models with no brake. The weight of brake-attached models is.2 kg heavier than the models with no brake shown in the table. Note 4. Either right or left can be selected for the installation direction for the 6 intake air joint. (The left side is the standard.) Note. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. Note 6. External view of LH is identical to L. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SR1-X u 16 TS-X u 49 RDV-X u 4 44

16 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 6L 6L Model servo motor output (W) 6 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw 12 (lass 1) all screw lead (mm) Maximum speed (mm/sec) Maximum Horizontal payload (kg) Vertical Rated thrust (N) Stroke (mm) to 8 (mm pitch) Overall length Horizontal Stroke+247. (mm) Vertical Stroke+282. Maximum outside dimension of body cross-section (mm) W6 H6 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness ISO LSS 3 (ISO ) Note 2 Intake air (N /min) Note Note 1. Positioning repeatability in one direction. Note 2. LSS 1 (.1μm) FED-STD-29D or equivalent when a suction blower is used. Note 3. The necessary intake amount varies depending on the use conditions and environment. 6L 6. (3: Screw head) (3) 133.(with brakes) (11) (96) Grounding terminal (M4) Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 2kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Note. Service life is calculated for 6mm stroke models. Lead 2 pprox. 2 (Motor cable length) 18+/-3 Effective stroke 89.+/-3 When origin is on motor side When origin is on 14+/-2 (Note 1) ϕ4h7 Depth 7 non-motor side 3.+/-1 (Note 1) 34 4-M4.7 Depth ϕ6 suction air joint 139+/-2(with brakes)(note 1) 193+/-3(with brakes) (2) High lead: Lead 2 Lead Direction of air Origin position rake designation coupler installation change Stroke able length Note 2 2: 2mm No entry: With no brake LJ: Left (Standard) None: Standard to 8 3L: 3.m 12: 12mm K: With brake RJ: Right Z: Non-motor side (mm pitch) L: m 6: 6mm 1L: 1m 3K/K/1K (Flexible cable) Note 1. The model with a lead of 2mm cannot select specifications with brake (vertical specifications). Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P (with brakes) (with brakes) 4 R 4 4H7 Depth7 ϕ4h7 Depth 6 -M.8 Depth 6 Lead 2 L L+3 (with brakes) TSX ϕ6 suction air joint S 2 2 E Positioner Note 3 Driver: Power-supply voltage / LD monitor I/O selection attery TS-X Power capacity No entry: None NP: NPN : With battery 1: 1V/1W or less L: With LD PN: PNP (bsolute) 2: 2V/1W or less : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 (Incremental) SR1-X Effective stroke L E S Weight (kg) Note Maximum speed for each stroke Note (mm/sec) Origin on the non-motor side is selectable Lead Speed setting - 9% 8% 7% Speed setting - 8% 7% 6% 6% Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment 4 H7 Depth 6 R ϕ () MR MY MP (Unit: N. m) MY MP MR 3 4 SR1-X RX221/222 RX24/34 Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2-RR1 Pulse train control LJ (Note 4) RJ (Note 4) Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R3. Note 3. Weight of models with no brake. The weight of brake-attached models is.2 kg heavier than the models with no brake shown in the table. Note 4. Either right or left can be selected for the installation direction for the 6 intake air joint. (The left side is the standard.) Note. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 446 SR1-X u 16 TS-X u 49 RDV-X u 4

17 8 8 Model Lead rake Note 1 Option Stroke able length Note 2 2: 2mm No entry: With no brake Origin None: Standard 1 to 8 3L: 3.m 12: 12mm K: With brake position Z: Nonmotor (mm pitch) L: m 6: 6mm side change 1L: 1m 3K/K/1K (Flexible cable) servo motor output (W) 1 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw (lass 1) all screw lead (mm) Maximum speed Note 2 (mm/sec) Maximum Horizontal payload (kg) Vertical 4 8 Rated thrust (N) Stroke (mm) 1 to 8 (mm pitch) Overall length Horizontal Stroke+32 (mm) Vertical Stroke+3 Maximum outside dimension of body cross-section (mm) W8 H7 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 8 E Note Recommended plate nut: M3 ( 6*t1.6) E: Detail of T-groove High lead: Lead 2 Origin on the non-motor side is selectable Note 1. The model with a lead of 2mm cannot select specifications with brake (vertical specifications). Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P.6. pprox. 23 (Motor cable length) 8 64 (etween knocks +/-.2) pprox. 2 (Motor cable length) (.4) 7 Slider upper surface Grounding terminal (M4) ϕ1 ir join (63.4) 6. 6 Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg 4kg kg Lead 2 Lead 2 Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. MR MY MP (Unit: N. m) MY MP MR SR1-X RX221/222 RX24/34 Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2-RR1 Pulse train control 23+/-3: When origin is on motor side (23): When origin is on non-motor side 7 Effective stroke (117): When origin is on motor side 117+/-3: When origin is on non-motor side 117+/-1 (Note 1) 31+/-1 (Note 1) 12+/-1 (With brake) (Note 1) 238+/-3 (With brake): When origin is on motor side (238): When origin is on non-motor side (27) (16) L + 3 (With brake) L 188 (With brake) 13 x 1 -M x.8 Depth (With brake) TSX Note 3 Driver: Power-supply voltage / Positioner LD monitor I/O selection attery Power capacity TS-X 1: 1V/1W or less No entry: None NP: NPN : With battery 2: 2V/1W or less L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 SR1-X Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None (Incremental) DN: DeviceNet TM P: PROFIUS RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment 4-M6 x 1. Depth1 2-ϕH7 Depth1 ϕ1h7 Plate thickness 8 Effective stroke L D Weight (kg) Note Lead Maximum speed Note 4 (mm/sec) Speed setting 9% 8% 7% 6% Speed setting 9% 7% 6% 6% % D (67) R 2 1H7 Plate thickness 8 Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R. Note 3. Weight of models with no brake. The weight of brake-attached models is.3 kg heavier than the models with no brake shown in the table. Note 4. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SR1-X u 16 TS-X u 49 RDV-X u 4 447

18 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 8L 8L Model Lead rake Option Stroke able length Note 1 2: 2mm No entry: With no brake Origin None: Standard 1 to 1 3L: 3.m 1: 1mm K: With brake position Z: Nonmotor (mm pitch) L: m : mm side change 1L: 1m 3K/K/1K (Flexible cable) servo motor output (W) 1 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) Maximum Horizontal 2 4 payload (kg) Vertical Rated thrust (N) Stroke (mm) 1 to 1 (mm pitch) Overall length Horizontal Stroke+32 (mm) Vertical Stroke+36 Maximum outside dimension of body cross-section (mm) W8 H7 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 8L E Note Recommended plate nut: M3 ( 6*t1.6) E: Detail of T-groove 2 pprox. 23 (Motor cable length) 8 64 (etween knocks +/-.2) pprox. 2 (Motor cable length) (.4) 7 (63.4) 6. Grounding terminal (M4) Origin on the non-motor side is selectable Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. Select this selection when using the gateway function. For details, see P.6. ϕ1 ir join Slider upper surface 6 (27) Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) kg kg kg kg kg kg kg kg kg kg kg 4kg kg kg kg kg kg kg kg kg kg kg kg 1kg kg kg kg kg kg 16kg 9 9 4kg kg kg kg Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Lead 2 Lead 1 Lead 213+/-3: When origin is on motor side (213): When origin is on non-motor side /-1 (Note 1) 163+/-1 (With brake) (Note 1) 248+/-3 (With brake): When origin is on motor side (248): When origin is on non-motor side (16) Lead 2 Lead 1 Lead Effective stroke L + 3 (With brake) L 198 (With brake) 163 x 1 -M x.8 Depth (With brake) TSX Note 2 Driver: Power-supply voltage / Positioner LD monitor I/O selection attery Power capacity TS-X 1: 1V/1W or less No entry: None NP: NPN : With battery 2: 2V/1W or less L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 3 SR1-X Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None (Incremental) DN: DeviceNet TM P: PROFIUS RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment 4-M6 x 1. Depth1 2-ϕH7 Depth1 ϕ1h7 Plate thickness 8 Lead 2 Lead 1 Lead MR MY MP (Unit: N. m) MY MP MR SR1-X RX221/222 RX24/34 Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2-RR1 Pulse train control (112): When origin is on motor side 112+/-3: When origin is on non-motor side 27+/-1 (Note 1) (62) R D 2 Effective stroke Note 1. Stop positions are determined by L the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R. Note 3. Weight of models with no brake The weight of brake-attached models is.3 kg heavier than the D models with no brake shown in Weight (kg) Note the table. Lead Note 4. When the stroke is longer than 7mm, resonance of the ball Maximum Speed setting 9% 8% 7% 6% 6% % % screw may occur depending on the operation conditions (critical speed Note 4 Lead speed). In this case, reduce the (mm/sec) speed setting on the program by Lead referring to the maximum speeds Speed setting 8% 7% 6% 6% % % 4% 4% shown in the table at the left. 1H7 Plate thickness SR1-X u 16 TS-X u 49 RDV-X u 4

19 8LH 8LH Model Lead Option Stroke able length Note 1 2: 2mm Origin None: Standard 1 to 1 3L: 3.m 1: 1mm position Z: Non-motor (mm pitch) L: m : mm change side 1L: 1m 3K/K/1K (Flexible cable) Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. Select this selection when using the gateway function. For details, see P.6. servo motor output (W) 1 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) Maximum payload (kg) Horizontal Rated thrust (N) Stroke (mm) 1 to 1 (mm pitch) Overall length (mm) Stroke+389 Maximum outside dimension of body cross-section (mm) W8 H7 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 8LH E Note Recommended plate nut: M3 ( 6*t1.6) E: Detail of T-groove pprox. 23 (Motor cable length) 2 (.4) ϕ1 ir joint Slider upper surface (63.4) 6. Grounding terminal (M4) (etween knocks +/-.2) 6 (27) Origin on the non-motor side is selectable Lead 2 Lead 1 Lead Horizontal installation (Unit: mm) Wall installation (Unit: mm) 1kg Lead 2 1kg kg kg kg kg kg Lead 1 2kg kg kg kg kg 2kg Lead 2kg kg kg kg kg 8kg kg Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. 24+/-3: When origin is on motor side (24): When origin is on non-motor side 14+/-1 (Note 1) 1 8 (19) L MR MY MP (Unit: N. m) MY MP MR (144): When origin is on motor side 144+/-3: When origin is on non-motor side 44+/-1 (Note 1) 17 x 1 1 (69) 1 -M x.8 Depth1 16 TSX Note 2 Driver: Power-supply voltage / Positioner LD monitor I/O selection attery Power capacity TS-X 1: 1V/1W or less No entry: None NP: NPN : With battery 2: 2V/1W or less L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 3 SR1-X Driver: Power capacity Usable for E I/O selection attery : 1W or less No entry: Standard N: NPN : With battery E: E marking P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment ϕ1h7 Plate thickness 8 8-M6 x 1. Depth1 2-ϕH7 Depth1 Effective stroke SR1-X RX221/222 RX24/34 R D 2 Operation method Operation using RS-232 communication TS-X1 TS-X2 Remote command RDV-X2-RR1 Pulse train control Effective stroke Note 1. Stop positions are L D Weight (kg) Maximum speed Note 3 (mm/sec) Lead Speed setting 9% 8% 7% 6% 6% % % 4% Lead Lead Speed setting 8% 7% 6% 6% % % 4% 4% 3% 1H7 Plate thickness 8 determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R. Note 3. When the stroke is longer than 6mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SR1-X u 16 TS-X u 49 RDV-X u 4 449

20 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 1 1 Model Lead rake Option Stroke able length Note 2 2: 2mm No entry: With no brake Origin None: Standard 1 to 1 3L: 3.m 1: 1mm K: With brake position Z: Non-motor (mm pitch) L: m : mm change side Note 1 1L: 1m 3K/K/1K (Flexible cable) servo motor output (W) 1 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 2 Maximum Horizontal payload (kg) Vertical Rated thrust (N) Stroke (mm) 1 to 1 (mm pitch) Overall length Horizontal Stroke+283 (mm) Vertical Stroke+313 Maximum outside dimension of body cross-section (mm) W14 H8 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment Origin on the non-motor side is selectable: Lead 2 1 Note 1. If selecting mm lead specifications then the origin point cannot be changed to the non-motor side. Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P.6. Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg Lead 2 Lead 1 Lead 16+/-3: When origin is pprox. 2 (Motor cable length) on motor side (16): When origin is on non-motor side (33) ϕ12 air joint 78 (etween knocks +/-.2) 11+/-1 (With brake) (Note 1) (pprox. 2) (With brake) 8 Lead 2 Lead 1 Lead Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. 8+/-1 (Note 1) 19+/-3: (With brake) When origin is on motor side (234): When origin is on non-motor side M x.8 Depth of screw ϕH7( ) Depth1 Effective stroke L Grounding terminal (The same position on the opposite surface at 2 locations) 16 TSX 2 M x 2 19 (With brake) N-M x.8 Depth of screw 1 Note 3 Driver: Power-supply voltage / Positioner Regenerative unit LD monitor I/O selection attery Power capacity TS-X 1: 1V/1W or less No entry: None No entry: None NP: NPN : With battery 2: 2V/1W or less R: With RGT L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 SR1-X Driver: Power capacity Usable for E Regenerative unit I/O selection attery : 1W or less No entry: Standard No entry: None N: NPN : With battery E: E marking R: With RG1 P: PNP (bsolute) : -Link N: None (Incremental) DN: DeviceNet TM P: PROFIUS RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment Lead 2 Lead 1 Lead MR MY SR1-X Note RX221/222 RX24/34 MP (Unit: N. m) MY MP MR Operation method Operation using RS- 232 communication TS-X1 Note TS-X2 Note Remote command RDV-X2-RR1 Pulse train control Note. Regenerative unit is required when the models used vertically and with 7mm or larger stroke. (118): When origin is on motor side 118+/-3: When origin is on non-motor side 33+/-1 (Note 1) Effective stroke Note 1. Stop positions are determined by the L mechanical stoppers at both ends Note 2. Minimum bend radius of motor cable is M R Note 3. Weight of models with no brake. The N weight of brake-attached models is.4 Weight (kg) Note kg heavier than the models with no brake shown in the table. Maximum speed Note 4 (mm/sec) Lead Lead Lead Speed setting 9% 9% 7% 7% 6% 6% % Note 4. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 4 SR1-X u 16 TS-X u 49 RDV-X u 4

21 14 14 Model Lead rake Option Stroke able length Note 1 2: 2mm No entry: With no brake Origin None: Standard 1 to 1 3L: 3.m 1: 1mm K: With brake position Z: Nonmotor (mm pitch) L: m : mm change side 1L: 1m 3K/K/1K (Flexible cable) servo motor output (W) 1 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 2 Maximum Horizontal 3 8 payload (kg) Vertical Rated thrust (N) Stroke (mm) 1 to 1 (mm pitch) Overall length Horizontal Stroke+28 (mm) Vertical Stroke+31 Maximum outside dimension of body cross-section (mm) W136 H96 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment Z Origin on the non-motor side is selectable Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. Select this selection when using the gateway function. For details, see P.6. Z Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) Lead 2 Lead 1 Lead kg Lead 2 kg Lead 2 1kg 6 6 1kg kg kg kg kg kg kg Lead 1 2kg Lead 1 4kg kg kg kg kg kg kg 3 39 kg Lead kg Lead 1kg kg kg kg kg kg kg Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. pprox. 2 (Motor cable length) ϕ12 air joint 84 (etween knocks +/-.2) pprox (With brake) /-3: When origin is on motor side (16): When origin is on non-motor side (33) 8+/-1 7 (Note 1) 4 11+/-1 (With brake) (Note 1) /-3 (With brake): When origin is on motor side (19): When origin is on non-motor side Grounding terminal (The same position on the opposite surface at 2 location) L (With brake) TSX Note 2 Driver: Power-supply voltage / Positioner Regenerative unit LD monitor I/O selection attery Power capacity TS-X 1: 1V/1W or less No entry: None No entry: None NP: NPN : With battery 2: 2V/1W or less R: With RGT L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 3 SR1-X Driver: Power capacity Usable for E Regenerative unit I/O selection attery : 1W or less No entry: Standard No entry: None N: NPN : With battery E: E marking R: With RG1 P: PNP (bsolute) : -Link N: None (Incremental) DN: DeviceNet TM P: PROFIUS RDV-X 2 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V : 1W or less asic specifications llowable overhang Note Static loading moment Effective stroke 2-ϕ6H7( +.12 ) Depth 1 4-M6 x 1. Depth of screw 12 M x 2 N-M6 x 1. Depth of screw 1 MR MY MP (Unit: N. m) MY MP MR SR1-X- Note RX221/222 RX24/34 Operation method Operation using RS- 232 communication TS-X1 Note TS-X2 Note Remote command RDV-X2-RR1 Pulse train control Note. Regenerative unit is required when the models used vertically and with 7mm or larger stroke. (12): When origin is on motor side 12+/-3: When origin is on non-motor side (7) 3+/-1 (Note 1) rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION Effective stroke Note 1. Stop positions are determined by the L mechanical stoppers at both ends Note 2. Minimum bend radius of motor cable is R. M Note 3. Weight of models with no brake. The weight N of brake-attached models is.4 kg heavier Weight (kg) Note than the models with no brake shown in the table. Maximum speed Note 4 (mm/sec) Lead Lead Lead Speed setting 9% 9% 7% 7% 6% 6% % Note 4. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. SR1-X u 16 TS-X u 49 RDV-X u 4 41

22 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 14H 14H Model Lead rake Option Stroke able length Note 2 2: 2mm No entry: With no brake Origin None: Standard 1 to 1 3L: 3.m 1: 1mm K: With brake position Z: Non-motor (mm pitch) L: m : mm change side Note 1 1L: 1m 3K/K/1K (Flexible cable) Note 1. If selecting mm lead specifications then the origin point cannot be changed to the non-motor side. Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. Select this selection when using the gateway function. For details, see P.6. servo motor output (W) 2 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 2 Maximum Horizontal payload (kg) Vertical Rated thrust (N) Stroke (mm) 1 to 1 (mm pitch) Overall length Horizontal Stroke+349 (mm) Vertical Stroke+379 Maximum outside dimension of body cross-section (mm) W136 H96 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 14H Z Z Origin on the non-motor side is selectable: Lead 2 1 Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) (Unit: N. m) MY MP MR 1kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg Operation method 8kg kg kg SR1-X1 Note 6kg kg kg RX221/222 8kg kg kg RX24/34 Operation using RS- 232 communication 1kg kg kg TS-X11 Note Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. TS-X21 Note Remote command RDV-X21-RR1 Pulse train control Note. Regenerative unit is required when used vertically. Lead 2 Lead 1 Lead Lead 2 Lead 1 Lead pprox /-3: When origin is on motor side (Motor cable length) (24): When origin is on non-motor side (33) 14+/-1 (Note 1) 19 1 ϕ12 air joint 7 84 (etween knocks +/-.2) (pprox. 2) (With brake) /-1 (With brake) (Note 1) 33 Grounding terminal (The same position on the opposite surface at 2 location) L 179 M x 2 (12) 1 N-M6 x 1. Depth of screw 1 29 (With brake) TSX Note 3 Driver: Power-supply voltage / Positioner Regenerative unit LD monitor I/O selection attery Power capacity TS-X 11: 1V/2W No entry: None No entry: None NP: NPN : With battery 21: 2V/2W R: With RGT L: With LD PN: PNP (bsolute) : -Link N: None DN: DeviceNet TM (Incremental) EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 SR1-X 1 Driver: Power capacity Usable for E Regenerative unit I/O selection attery 1: 2W No entry: Standard No entry: None N: NPN : With battery E: E marking R: With RG1 P: PNP (bsolute) : -Link N: None (Incremental) DN: DeviceNet TM P: PROFIUS RDV-X 2 1 RR1 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V 1: 2W or less asic specifications llowable overhang Note Static loading moment Lead 2 Lead 1 Lead Effective stroke 2-ϕ6H7( +.12 ) Depth 1 4-M6 x 1. Depth of screw /-3 (With brake): When origin is on motor side (234): When origin is on non-motor side MR MY MP (14): When origin is on motor side 14+/-3: When origin is on non-motor side 4+/-1 (Note 1) Effective stroke Note 1. Stop positions are determined by the mechanical stoppers at both ends. L M N Weight (kg) Note Note 2. Minimum bend radius of motor cable is R. Note 3. Weight of models with no brake. The weight of brake-attached models is.4 kg heavier than the models with no brake shown in the table. Lead Maximum Lead speed Note 4 Lead (mm/sec) Speed setting 9% 9% 7% 7% 6% 6% % Note 4. When the stroke is longer than 7mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 42 SR1-X u 16 TS-X u 49 RDV-X u 4

23 17 17 Model Lead rake Option Stroke 2: 2mm No entry: With no brake Origin None: Standard 2 to 12 1: 1mm K: With brake position Z: Non-motor (mm pitch) change side servo motor output (W) 4 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 6 Maximum Horizontal 8 12 payload (kg) Vertical 1 3 Rated thrust (N) Stroke (mm) 2 to 12 (mm pitch) Overall length Horizontal Stroke+39 (mm) Vertical Stroke+42 Maximum outside dimension of body cross-section (mm) W168 H114 able length (m) Standard: 3. / OP:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 9mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment Z Origin on the non-motor side is selectable Z (With brake) N-M8 x 1.2 Depth of screw able length Note 1 3L: 3.m L: m 1L: 1m 3K/K/1K (Flexible cable) Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. Select this selection when using the gateway function. For details, see P.6. Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 3kg kg kg 3 3 kg kg kg kg kg kg kg kg kg kg kg kg kg kg kg Lead 2 Lead 1 Lead 2 Lead 1 Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. Grounding terminal (The same position on the opposite surface at 2 location) L 243 M x (With brake) 121 (etween knocks +/-.2) Lead 2 Lead /-3 (With brake): When origin is on motor side (272.): When origin is on non-motor side MR MY MP (Unit: N. m) MY MP MR SR1-X2 Note RX221/222 RX24/34 TS-X22 Operation method Operation using RS- 232 communication Note Remote command RDV-X22-RR1 Pulse train control (Horizontal) RDV-X22-RR2 Pulse train control (Vertical) Note. Regenerative unit is required when used perpendicularly and moving at maximum speeds exceeding 1mm/sec. pprox. 2 (Motor cable length) 242.+/-3: When origin is on motor side (242.): When origin is on non-motor side Effective stroke (12.): When origin is on motor side 12.+/-3: When origin is on non-motor side 94 7 (etween knocks +/-.2) (33) 127.+/-1 (Note 1) 4-M6 x 1. Depth of screw /-1 ϕ12 air joint 4-ϕ6H7( +.12 ) Depth 1 (Note 1) 4-M8 x 1.2 Depth of screw 2 (pprox. 2) 17.+/-1 (With brake) (Note 1) TSX 22 Note 2 Driver: Power-supply voltage / I/O selection attery Positioner Regenerative unit LD monitor Power capacity NP: NPN : With battery TS-X 22: 2V/4 to 6W No entry: None No entry: None PN: PNP (bsolute) R: With RGT L: With LD : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 3 (Incremental) SR1-X 2 Driver: Power capacity Usable for E Regenerative unit I/O selection attery 2: 4 to 6W No entry: Standard No entry: None N: NPN : With battery E: E marking R: With RG1 P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 2 Driver Power-supply voltage Driver: Power capacity Regenerative unit 2: 2V 2: 4W or less RR1 (Horizontal) RR2 (Vertical) asic specifications llowable overhang Note Static loading moment Effective stroke Note 1. Stop positions are determined L by the mechanical stoppers at both ends Note 2. Minimum bend radius of motor M cable is R. N Note 3. Weight of models with no brake. Weight (kg) Note The weight of brake-attached Maximum Lead models is 1. kg heavier than the models with no brake shown speed Note 4 Lead in the table. (mm/sec) Speed setting 8% 8% 7% 7% 6% 6% % Note 4. When the stroke is longer than 9mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. (12) rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SR1-X u 16 TS-X u 49 RDV-X u 4 43

24 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 17L Note. 17L uilt-to-order product. ontact us for the delivery period. Model Lead rake Option Stroke able length Note 1 No entry: With no brake Origin None: Standard 11 to 2 3L: 3.m K: With brake position Z: Nonmotor side change (1mm pitch) L: m 1L: 1m 3K/K/1K (Flexible cable) servo motor output (W) 6 Repeatability Note 1 (mm) +/-.2 Deceleration mechanism all screw (lass 1) all screw lead (mm) Maximum speed Note 2 (mm/sec) 1 Maximum Horizontal payload (kg) Vertical 1 Rated thrust (N) 24 Stroke (mm) 11 to 2 (1 pitch) Overall length Horizontal Stroke+48 (mm) Vertical Stroke+1 Maximum outside dimension of body cross-section (mm) W168 H114 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 18mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. 17L Z Z Origin on the non-motor side is selectable Note 1. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 2. See P.498 for DIN rail mounting bracket. Note 3. cceleration / deceleration is different depending the Positioner or or Driver. Note 4. Select this selection when using the gateway function. For details, see P.6. Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) 1kg kg kg kg kg kg 3 3 kg kg kg Lead Lead Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. pprox /-7: When origin is on motor side (Motor cable length) (299): When origin is on non-motor side 94 (33) 176.+/-2 (Note 1) ϕ12 air joint (pprox. 2) (With brake) 26.+/-2 (With brake) (Note 1) 329+/-7 (With brake): When origin is on motor side (329): When origin is on non-motor side Grounding terminal (The same position on the opposite surface at 2 location) L TSX 22 R Note 2 Driver: Power-supply voltage / Positioner Power capacity Regenerative unit LD monitor I/O selection attery Note 3 NP: NPN : With battery TS-X 22: 2V/4 to 6W R: With RGT No entry: None PN: PNP (bsolute) L: With LD : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note 4 (Incremental) SR1-X 2 R Driver: Usable for E Regenerative unit I/O selection attery Power capacity Note 3 No entry: Standard R: With RG1 N: NPN : With battery 2: 4 to 6W E: E marking P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 2 Driver Power-supply voltage Driver: Power capacity Note 3 Regenerative unit 2: 2V 2: 4W or less RR1 (Horizontal) RR2 (Vertical) asic specifications llowable overhang Note Static loading moment Lead Effective stroke 7 (etween knocks +/-.2) 4-M6 x 1. Depth of screw 2 4-ϕ6H7( +.12 ) Depth 1 4-M8 x 1.2 Depth of screw (etween knocks +/-.2) M x 2 N-M8 x 1.2 Depth of screw 18 MR MY MP (Unit: N. m) MY MP MR SR1-X2-R RX221/222 RX24/34 Operation method Operation using RS- 232 communication TS-X22-R Remote command RDV-X22-RR1 (Horizontal) Pulse train control RDV-X22-RR2 (Vertical) (186): When origin is on motor side 186+/-7: When origin is on non-motor side 66.+/-2 (Note 1) (With brake) Effective stroke L M N Weight (kg) Note Maximum speed Lead (mm/sec) Note 4 Speed setting 9% 8% Note 1. Stop positions are determined by the mechanical stoppers at both ends. Note 2. Minimum bend radius of motor cable is R. Note 3. Weight of models with no brake. The weight of brake-attached models is 1. kg heavier than the models with no brake shown in the table. Note 4. When the stroke is longer than 18mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 44 SR1-X u 16 TS-X u 49 RDV-X u 4

25 2 2 Model Lead Note 1 rake Option Stroke 2: 2mm No entry: With no brake Origin None: Standard 2 to 12 1: 1mm K: With brake position Z: Non-motor (mm pitch) change side servo motor output (W) 6 Repeatability Note 1 (mm) +/-.1 Deceleration mechanism all screw (lass 7) all screw lead (mm) 2 1 Maximum speed Note 2 (mm/sec) 1 Maximum Horizontal 12 payload (kg) Vertical 2 4 Rated thrust (N) 1 12 Stroke (mm) 2 to 12 (mm pitch) Overall length Horizontal Stroke+441 (mm) Vertical Stroke+471 Maximum outside dimension of body cross-section (mm) W22 H117 able length (m) Standard: 3. / Option:, 1 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 3 to 9 Note 4 Note 1. Positioning repeatability in one direction. Note 2. When the stroke is longer than 9mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment Z Origin on the non-motor side is selectable Z Horizontal installation (Unit: mm) Wall installation (Unit: mm) Vertical installation (Unit: mm) kg kg kg kg kg kg kg kg kg kg kg kg Lead 2 able length Note 2 3L: 3.m L: m 1L: 1m 3K/K/1K (Flexible cable) Note 1. Only the model with specifications with brake (vertical specifications) can select a lead of 1mm. Note 2. The robot cable is standard cable (3L/L/1L), but can be changed to flexible cable. See P.94 for details on robot cable. Note 3. See P.498 for DIN rail mounting bracket. Note 4. cceleration / deceleration is different depending the Positioner or or Driver. Note. Select this selection when using the gateway function. For details, see P Lead 2 Note. Distance from center of slider top to center of gravity of object being carried at a guide service life of 1, km. pprox /-3: When origin is on motor side (Motor cable length) (281): When origin is on non-motor side 94 (33) 166+/-1 (Note 1) 7 (+/-.2) ϕ12 air joint (pprox. 2) (With brake) /-1 (With brake) (Note 1) /-3 (With brake): When origin is on motor side (311): When origin is on non-motor side 33 Grounding terminal (The same position on the opposite surface at 2 location) L (With brake) TSX 22 Note 3 Driver: Power-supply voltage / Positioner Power capacity Regenerative unit LD monitor I/O selection attery Note 4 NP: NPN : With battery TS-X 22: 2V/4 to 6W No entry: None No entry: None PN: PNP (bsolute) R: With RGT L: With LD : -Link N: None DN: DeviceNet TM EP: EtherNet/IP TM PT: PROFINET GW: No I/O board Note (Incremental) SR1-X 2 Driver: Usable for E Regenerative unit I/O selection attery Power capacity Note 4 No entry: Standard No entry: None N: NPN : With battery 2: 4 to 6W E: E marking R: With RG1 P: PNP (bsolute) : -Link N: None DN: DeviceNet TM P: PROFIUS (Incremental) RDV-X 2 2 Driver Power-supply voltage Driver: Power capacity Note 4 Regenerative unit 2: 2V 2: 4W or less RR1 (Horizontal) RR2 (Vertical) asic specifications llowable overhang Note Static loading moment M x 2 N-M8 x 1.2 Depth of screw 2 Lead 2 Lead 1 Effective stroke 4-M6 x 1. Depth of screw 2 4-M8 x 1.2 Depth of screw 2 4-ϕ6H7( +.12 ) Depth (etween knocks +/-.2) MR MY MP (Unit: N. m) MY MP MR SR1-X2 Note RX221/222 RX24/34 TS-X22 Operation method Operation using RS- 232 communication Note Remote command RDV-X22-RR1 Pulse train control (Horizontal) RDV-X22-RR2 Pulse train control (Vertical) Note. Regenerative unit is required when used vertically and moving at maximum speeds exceeding 1mm/sec. (16): When origin is on motor side 16+/-3: When origin is on non-motor side 4+/-1 (Note 1) (11) rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION Effective stroke Note 1. Stop positions are determined L by the mechanical stoppers at both ends Note 2. Minimum bend radius of motor M cable is R. N Note 3. Weight of models with no brake. Weight (kg) Note The weight of brake-attached models is 2. kg heavier than the models with no brake shown in the table. Maximum speed Note 4 (mm/sec) Lead Lead Speed setting 8% 8% 7% 7% 6% 6% % Note 4. When the stroke is longer than 9mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. SR1-X u 16 TS-X u 49 RDV-X u 4 4

26 rticulated Y SXYx lean type able duct 2 axes LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SXYx D RX222 Model able ombination X axis stroke Y axis stroke able length Usable for E Input/Output selection 1 Input/Output selection 2 D: able duct T1 1 to 1cm 1 to 6cm 3L: 3.m RX222 No entry: Standard N: NPN Note 1 No entry: None T3 L: m E: E marking P: PNP N1: OP.DIO24/16 1L: 1m : -Link (NPN) Note 2 DN: DeviceNet TM P1: OP.DIO24/17 P: PROFIUS (PNP) Note 1. NPN cannot be selected if using E marking. EN: Ethernet EN: Ethernet Note 3 Note 2. vailable only for the master. See P.66 for details on Y-Link system. Note 3. Only when or DN or P was selected for I/O select 1 above, EN can be selected in I/O select 2. Y: Y-Link Note 2 asic specifications Maximum payload (kg) X axis Y axis xis construction Note 1 14H 14 servo motor output (W) 2 1 Repeatability Note 2 (mm) +/-.1 +/-.1 Drive system all screw (lass 7) all screw (lass 7) all screw lead Note 3 (Deceleration ratio) (mm) 2 2 Maximum speed Note 4 (mm/sec) 1 1 Moving range (mm) 1 to 1 1 to 6 Robot cable length (m) Standard: 3. Option:, 1 Degree of cleanliness LSS 1 Note Intake air (N /min) 6 Note 6 Note 1. Use caution that the frame machining (installation holes, tap holes) differs from single-axis '. Note 2. Positioning repeatability in one direction. Note 3. Leads not listed in the catalog are also available. ontact us for details. Note 4. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note. Per 1cf (.1μm base), when suction blower is used. Note 6. The necessary intake amount varies depending on the use conditions and environment. SXYx 2 axes T1 Grounding terminal (M4) Grounding terminal (M4) MX.9 39 ϕ /-3 X stroke M (1) 38 1 M X stroke + 34 L (X stroke + 478) 11 Grounding terminal (M4) M x 2 2 (Note 1) X stroke L K M N K 17+/-3 Y stroke Y stroke + 28 (Y-axis length) N-M6 x 1. Depth of screw Y stroke (mm) XY 2 axes RX222 4-M6 x 1. Depth of screw 12 2-ϕ6H7( +.12 ) Depth 1 (68) Operation method Operation using RS-232 communication (etween knocks +/-.2) Detail of section Note 1. The moving range when returning to origin and the stop position when stopping by mechanical stopper Y stroke Maximum speed for each X axis stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 46 RX222 u 24

27 SXYx 2 axes rticulated Y SXYx 2 axes T3 4-M6 x 1. Depth of screw 12 2-ϕ6H7( +.12 ) Depth (etween knocks +/-.2) Detail of section (68) Y stroke + 28 (Y-axis length) Y stroke 17+/ N-M6 x 1. Depth of screw 1 1 X stroke (Note 1) Grounding terminal (M4) 282+/ (1) X stroke L (X stroke + 478) 11 K M x 2 2 X stroke L K M N M M ϕ Grounding terminal (M4) 39 MX.94 Grounding terminal (M4) Note 1. The moving range when returning to origin and the stop position when stopping by mechanical stopper. LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION Y stroke Maximum speed for each X axis stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. RX222 u 24 47

28 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SXYx 3 axes / ZS lean type able duct Z-axis shaft vertical type SXYx D 1 Model able ombination stroke stroke axis stroke length X axis Y axis ZR Z axis able D: able duct T1 1 to 1cm 1 to 6cm ZS12 3L: 3.m T3 ZS6 L: m 1L: 1m X axis Y axis Z axis: ZS12 xis construction Note 1 14H 14 servo motor output (W) Z axis: ZS6 Repeatability Note 2 (mm) +/-.1 +/-.1 +/-.2 Drive system all screw (lass 7) all screw (lass 7) all screw (lass 1) all screw lead Note 3 (Deceleration ratio) (mm) Maximum speed Note 4 (mm/sec) Moving range (mm) 1 to 1 1 to 6 1 Robot cable length (m) Standard: 3. Option:, 1 Degree of cleanliness LSS 1 Note Intake air (N /min) 9 Note 6 Note 1. Use caution that the frame machining (installation holes, tap holes) differs from single-axis '. Note 2. Positioning repeatability in one direction. Note 3. Leads not listed in the catalog are also available. ontact us for details. Note 4. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note. Per 1cf (.1μm base), when suction blower is used. Note 6. The necessary intake amount varies depending on the use conditions and environment. SXYx 3 axes / ZS Grounding terminal (M4) 2. MX ϕ38 T1 Grounding terminal (M4) /-3 X stroke M (1) 38 1 M X stroke + 34 L (X stroke + 478) 11 M x 2 2 (Note 1) Grounding terminal (M4) K 17+/-3 Y stroke Y stroke + 28 (Y-axis length) N-M6 x 1. Depth of screw 1 RX34-3 / Number of controllable axes (68) Safety standard 322 Option (OP.) Y stroke (mm) ZS12 ZS6 1 to 6 3 RX34 RX24S Option (OP.) ϕ6 Operation method Operation using RS-232 communication 2 M8 x 1.2 Depth 1 Detail of section Option (OP.) ϕ12h7( -.18 ) /-2 Z stroke: 1 4 Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S Option E (OP.E) (62) bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications Maximum payload (kg) X stroke Note 1. The moving range when returning to origin and the stop position when stopping L by mechanical stopper. K M N Y stroke Z stroke 1 Maximum speed for each X axis stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 48 RX34 u 42 RX24S u 32

29 SXYx 3 axes / ZS rticulated Y SXYx 3 axes / ZS (62) Z stroke : / T3 ϕ Detail of section ϕ12h7( -.18 ) M8 x 1.2 Depth (68) Ystroke + 28 (Y-axis length) 17+/-3 Y stroke N-M6 x 1. Depth of screw 1 1 X stroke (Note 1) Grounding terminal (M4) K M x (1) X stroke L (X stroke + 478) / M 16 M Grounding terminal (M4) MX.9 Grounding terminal (M4) X stroke Note 1. The moving range when returning to origin and the stop position when stopping L by mechanical stopper. K M N Y stroke Z stroke 1 Maximum speed for each X axis stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u 32 49

30 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION SXYx lean type able duct ZR-axis integrated type 4 axes / ZRS SXYx D 1 Model able ombination X axis Y axis Z axis able ZR axis stroke stroke stroke length D: able duct T1 1 to 1cm 1 to 6cm ZRS12 3L: 3.m T3 ZRS6 L: m 1L: 1m X axis Y axis Z axis ZRS12 Z axis ZRS6 R axis xis construction Note 1 14H 14 R servo motor output (W) Repeatability Note 2 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.2 +/-. Drive system all screw (lass 7) all screw (lass 7) all screw (lass 1) Harmonic gear all screw lead Note 3 (Deceleration ratio) (mm) (1/) Maximum speed Note 4 (XYZ: mm/sec) (R: /sec) Moving range (XYZ: mm) (R: ) 1 to 1 1 to Robot cable length (m) Standard: 3. Option:, 1 Degree of cleanliness LSS 1 Note Intake air (N /min) 9 Note 6 Note 1. Use caution that the frame machining (installation holes, tap holes) differs from single-axis '. Note 2. Positioning repeatability in one direction. Note 3. Leads not listed in the catalog are also available. ontact us for details. Note 4. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table below. Note. Per 1cf (.1μm base), when suction blower is used. Note 6. The necessary intake amount varies depending on the use conditions and environment. SXYx 4 axes / ZRS Grounding terminal (M4) Grounding terminal (M4) MX.9 39 T /-3 X stroke M (1) 38 1 M X stroke + 34 L (X stroke + 478) 11 M x 2 2 (Note 1) Grounding terminal (M4) K /-3 Y stroke Y stroke + 28 (Y-axis length) N-M6 x 1. Depth of screw 1 RX34-4 / Number of controllable axes (68) Safety standard 322 Option (OP.) Y stroke (mm) ZRS12 ZRS RX34 RX24S Option (OP.) ϕ Operation method Operation using RS-232 communication 2 Detail of section Option (OP.) ϕ12h7( -.18 ) M8 x 1.2 Depth /-2 Z stroke: 1 4 Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S Option E (OP.E) (62) bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications Maximum payload (kg) X stroke Note 1. The moving range when returning to origin and the stop position when stopping by L mechanical stopper. K M N Y stroke Z stroke 1 Maximum speed for each X axis stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. 46 RX34 u 42 RX24S u 32

31 SXYx 4 axes / ZRS rticulated Y SXYx 4 axes / ZRS ϕ6 (62) Detail of section ϕ12h7( -.18 ) M8 x 1.2 Depth 1 4 Z stroke: 1 8.+/ T (68) Y stroke + 28 (Y-axis length) Y stroke 17+/ N-M6 x 1. Depth of screw 1 X stroke (Note 1) Grounding terminal (M4) K M x (1) X stroke L (X stroke + 478) / M M Grounding terminal (M4) MX.9 Grounding terminal (M4) X stroke Note 1. The moving range when returning to origin and the stop position when stopping by L mechanical stopper. K M N Y stroke Z stroke 1 Maximum speed for each X axis stroke (mm/sec) Note 2 Speed setting 8% 6% % Note 2. When the X-axis stroke is longer than 8mm, resonance of the ball screw may occur depending on the operation conditions (critical speed). In this case, reduce the speed setting on the program by referring to the maximum speeds shown in the table at the left. LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u

32 rticulated Y YK18X rm length 18mm Maximum payload 1kg Note. uilt-to-order product. ontact us for the delivery period. LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK18X 1 Model Z axis stroke able length 1: 1mm 3L: 3.m L: m 1L: 1m RX34-4 / Number of controllable axes X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-12 +/-14 +/-36 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 1. Standard cycle time: with.1kg payload Note 2 (sec).42 R-axis tolerable moment of inertia Note 3 (kgm 2 ).1 User wiring (sq wires).1 8 User tubing (Outer diameter) ϕ3 2 Travel limit 1.Soft limit, 2.Mechanical limit (X, Y, Zaxis) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) (Excluding robot cable) Note 4 6. Robot cable weight 1.kg (3.m) 2.1kg (m) 4.2kg (1m) Degree of cleanliness LSS 1 (.1 µm base) Intake air (N /min) 3 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When moving 2mm in vertical direction and 1mm in horizontal direction reciprocally. Note 3. There are limits to acceleration coefficient settings. Note 4. The total robot weight is the sum of the robot body weight and the cable weight. Safety standard Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S RX34 RX24S Option E (OP.E) bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK18X 12:User tool installation area 4-M3 x. Depth6 User tool installation tap D-sub connector for user cables 9 pin (dapted to #1 to 8) over ϕ3h Details of /-2 (Z-axis origin position) R32. 1 Z axis stroke ϕ1h7 +.1 Depth 2 4-M3 x. Depth 6 Rise by mm 64 User tubes 1 (arb fitting ϕ3) User tubes 2 (arb fitting ϕ3) fter returning to origin of Z axis Z-axis flange ϕ7 4 M6 bolts used for installation (When the arm turns 1) Keep enough space for the maintenance work at the rear of the base M3 grounding terminal 3 7 R19 X axis origin point is +/- from the base front surface R3 R71 Power capacity (V) Operation method Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. If the robot enters the inside of R3, the Z-axis flange may be in contact with the base. So, do not perform such motion D-sub connector for user cables 9 pin (dapted to #1 to 8) over internal intake pipe (bulkhead union ϕ8) X, Y, R axis joint section intake pipe (bulkhead union ϕ6) User tubes 2 (bulkhead union ϕ3) User tubes 1 (bulkhead union ϕ3) 133 +/- R18 R19 67 Z-axis flange is in contact with the base in an area 67 inside from the inner limit of this working envelope. So, do not perform any motion in this area. Right-hand side system operation range Left-hand side system operation range R19 R18 R19 R3 3 R Details of R27 (Min. cable bending radius) Do not move the cable. The user tool installation flange center line is offset within +/- relative to the R axis origin point. 4-ϕ9 X-axis and Y-axis origin positions Move counterclockwise in advance from the above position when performing origin return. 462 RX34 u 42 RX24S u 32

33 YK22X rm length 22mm Maximum payload 1kg Note. uilt-to-order product. ontact us for the delivery period. rticulated Y YK22X 1 X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-12 +/-14 +/-36 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 1. Standard cycle time: with.1kg payload Note 2 (sec).4 R-axis tolerable moment of inertia Note 3 (kgm 2 ).1 User wiring (sq wires).1 8 User tubing (Outer diameter) ϕ3 2 Travel limit 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) (Excluding robot cable) Note 4 6. Robot cable weight Degree of cleanliness Model Z axis stroke able length 1: 1mm 3L: 3.m L: m 1L: 1m RX34-4 / Number of controllable axes 1.kg (3.m) 2.1kg (m) 4.2kg (1m) LSS 1 (.1 µm base) Intake air (N /min) 3 Note 1. This is the value at a constant ambient temperature. Note 2. When reciprocating 1mm in horizontal and 2mm in vertical directions. Note 3. There are limits to acceleration coefficient settings. Note 4. The total robot weight is the sum of the robot body weight and the cable weight. Safety standard Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S RX34 RX24S Option E (OP.E) bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK22X 12:User tool installation area 4-M3 x. Depth6 User tool installation tap 26.3 D-sub connector for user cables 9 pin (dapted to #1 to 8) over R User tubes 1 (arb fitting ϕ3) User tubes 2 (arb fitting ϕ3) /-2 (Z-axis origin position) fter returning to origin of Z axis 1Z axis stroke ϕ3h Details of ϕ1h7 +.1 Depth M3 x. Depth 6 Rise by mm Z-axis flange ϕ7 4 M6 bolts used for installation (When the arm turns 1) M3 Keep enough space for the maintenance grounding terminal work at the rear of the base. X axis origin point is 3 +/- from the base front surface R7 R22 R19 7 Power capacity (V) Operation method Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. If the robot enters the inside of R3, the Z-axis flange may be in contact with the base. So, do not perform such motion. R R19 R19 67 Z-axis flange is in contact with the base in an area 67 inside from the inner limit of this working envelope. So, do not perform any motion in this area. Right-hand side system operation range Left-hand side system operation range D-sub connector for user cables 9 pin (dapted to #1 to 8) over internal intake pipe (bulkhead union ϕ8) X, Y, R axis joint section intake pipe (bulkhead union ϕ6) User tubes 2 (bulkhead union ϕ3) User tubes 1 (bulkhead union ϕ3) 133 +/- 3 R3 R R22 12 R7 LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION 26.3 Details of R27 (Min. cable bending radius) Do not move the cable. The user tool installation flange center line is offset within +/- relative to the R axis origin point. 4-ϕ9 X-axis and Y-axis origin positions Move counterclockwise in advance from the above position when performing origin return. RX34 u 42 RX24S u

34 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK2XG rm length 2mm Maximum payload 4kg YK2XG 1 S Model Z axis stroke Tool flange Hollow shaft able length 1: 1mm No entry: None S: With hollow shaft 3L: 3.m F: With tool flange L: m 1L: 1m X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-129 +/-134 +/-36 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 4 Standard cycle time: with 2kg payload (sec) Note 2.7 R-axis tolerable moment of inertia Note 3 (kgm 2 ). User wiring (sq wires).2 1 User tubing (Outer diameter) ϕ4 4 Travel limit 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 21. Degree of cleanliness ISO LSS 3 (ISO ) Note 4 +ESD Note Intake air (N /min) 3 Note 6 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When reciprocating 2mm in vertical direction and 3mm in horizontal direction (rough-positioning arch motion). Note 3. There are limits to acceleration coefficient settings. See P.67. Note 4. lass 1 (.1µm) equivalent to FED-STD-29D Note. ESD (ElectroStatic Discharge) prevention is an option. Please contact our distributor. Note 6. The necessary intake amount varies depending on the use conditions and environment. YK2XG Width across flats: 1 onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. User tubing 1 (ϕ4 black) Insert the plug provided when not used ϕ9 M8 bolt for installation, 4 bolts used User tubing 2 (ϕ4 red) (ase size) 6 F Maximum 24 during arm rotation 89 Hollow diameter: ϕ11 ross section ±2 9. (1) 9 1 ϕ Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) Z-axis bellows ±1 Maximum 66 during arm rotation Z-axis upper end mechanical stopper position Z-axis rises 4mm during return-to-origin. Z-axis lower end mechanical stopper position 28 R32 (Min. cable bending radius) Do not move the cable. RX34-4 / Number of controllable axes Machine Harness 4-ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. Hollow diameter: ϕ M4 ground terminal Safety standard 4-M3. Depth View of F Keep enough space for the maintenance work at the rear of the base. Option (OP.) Option (OP.) RX34 RX24S 129 User tubing 2 (ϕ4 red) Option (OP.) 134 R2 R ϕ16 h Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S Power capacity (V) Operation method ϕ Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 136 User tubing 1 (ϕ4 black) Insert the plug provided when not used. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. ϕ38 42 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Note. To set the standard coordinates with high accuracy, use a standard coordinate setting jig (option). Refer to the user s manual (installation manual) for more details. Our robot manuals (installation manuals) can be downloaded from our website at the address below: If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. If the robot enters the inside of R4, the Z-axis bellows may be in contact with the base. So, do not perform such motion. 2 Since this port is not used, cover it with the cap supplied with the joint. R4 Z axis tip shape 134 R1 46 Option E (OP.E) bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications User tool installation range 464 RX34 u 42 RX24S u 32

35 YK2XG rticulated Y YK2XG Tool flange mount type onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) 6.± Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) Z-axis bellows D ϕ9 M8 bolt for installation, 4 bolts used (ase size) View of F R32 (Min. cable bending radius) Do not move the cable. Machine Harness 28 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 4-ϕ11 Hollow diameter: ϕ M4 ground terminal 4-M3. Depth Keep enough space for the maintenance work at the rear of the base. (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it ϕ E ϕ3 h ϕ Detailed drawing D 134 R2 R R4 22.6± R Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 136 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. If the robot enters the inside of R4, the Z-axis bellows may be in contact with the base. So, do not 2 perform such motion. Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 4-ϕ4. through-hole Hollow diameter: ϕ ϕ4 H7 through-hole ± View of E 9 LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u 32 46

36 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK3XG rm length 3mm Maximum payload 4kg YK3XG 1 S Model Z axis stroke Tool flange Hollow shaft able length 1: 1mm No entry: None S: With hollow shaft 3L: 3.m F: With tool flange L: m 1L: 1m X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-129 +/-134 +/-36 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 4 Standard cycle time: with 2kg payload (sec) Note 2.7 R-axis tolerable moment of inertia Note 3 (kgm 2 ). User wiring (sq wires).2 1 User tubing (Outer diameter) ϕ4 4 Travel limit 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 22 Degree of cleanliness ISO LSS 3 (ISO ) Note 4 +ESD Note Intake air (N /min) 3 Note 6 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When reciprocating 2mm in vertical direction and 3mm in horizontal direction (rough-positioning arch motion). Note 3. There are limits to acceleration coefficient settings. See P.67. Note 4. lass 1 (.1µm) equivalent to FED-STD-29D Note. ESD (ElectroStatic Discharge) prevention is an option. Please contact our distributor. Note 6. The necessary intake amount varies depending on the use conditions and environment. YK3XG onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. Width across flats: 1 Hollow diameter: ϕ11 ross section ± ϕ9 M8 bolt for installation, 4 bolts used User tubing 2 (ϕ4 red) (ase size) View of F 6 F Maximum 19 during arm rotation 9. (1) ϕ Z-axis upper end mechanical stopper position Z-axis rises 4mm during return-to-origin. Z-axis lower end mechanical stopper position Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass Z-axis bellows User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) 7 48 R32 (Min. cable bending radius) Do not move the cable Machine Harness ±1 Maximum 66 during arm rotation 4-ϕ11 RX34-4 / Number of controllable axes Hollow diameter: ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) M4 ground terminal Safety standard 4-M3. Depth Keep enough space for the maintenance work at the rear of the base Option (OP.) 129 RX34 RX24S (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. 1 1 R3 ϕ16 h Option (OP.) 134 ϕ7 R User tubing 2 (ϕ4 red) ϕ38 42 Z axis tip shape Option (OP.) Power capacity (V) Operation method R1 1 User tubing 1 (ϕ4 black) Insert the plug provided when not used. Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S 276 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 136 onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 129 User tool installation range Option E (OP.E) Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Note. To set the standard coordinates with high accuracy, use a standard coordinate setting jig (option). Refer to the user s manual (installation manual) for more details. Our robot manuals (installation manuals) can be downloaded from our website at the address below: If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. Since this port is not used, cover it with the cap supplied with the joint. bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications 466 RX34 u 42 RX24S u 32

37 YK3XG rticulated Y YK3XG Tool flange mount type onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 6.± User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) D 7 2 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. Z-axis bellows User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) (ase size) 14 4-ϕ9 M8 bolt for installation, 4 bolts used 28 R32 (Min. cable bending radius) Do not move the cable. Machine Harness 4-ϕ11 Hollow diameter: ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) M4 ground terminal M3. Depth View of F Keep enough space for the maintenance work at the rear of the base. (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it E ϕ R3 ϕ Detailed drawing D R ϕ3 h R1 276 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 136 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used ϕ4. through-hole 22.6 ± ϕ4 H7 through-hole If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. Hollow diameter: ϕ ± View of E 9 LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u

38 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK4XG rm length 4mm Maximum payload 4kg YK4XG 1 X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-129 +/-144 +/-36 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 4 Standard cycle time: with 2kg payload (sec) Note 2.7 R-axis tolerable moment of inertia Note 3 (kgm 2 ). User wiring (sq wires).2 1 User tubing (Outer diameter) ϕ4 4 Travel limit 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 22. Degree of cleanliness ISO LSS 3 (ISO ) Note 4 +ESD Note Intake air (N /min) 3 Note 6 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When reciprocating 2mm in vertical direction and 3mm in horizontal direction (rough-positioning arch motion). Note 3. There are limits to acceleration coefficient settings. See P.68. Note 4. lass 1 (.1µm) equivalent to FED-STD-29D Note. ESD (ElectroStatic Discharge) prevention is an option. Please contact our distributor. Note 6. The necessary intake amount varies depending on the use conditions and environment. S Model Z axis stroke Tool flange Hollow shaft able length 1: 1mm No entry: None S: With hollow shaft 3L: 3.m F: With tool flange L: m 1L: 1m YK4XG onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Width across flats: 1 Hollow diameter: ϕ11 ross section ±2 9. (1) 1 ϕ F Z-axis upper end mechanical stopper position Z-axis rises 4mm during return-to-origin. Z-axis lower end mechanical stopper position Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass Z-axis bellows User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) ϕ9 M8 bolt for installation, 4 bolts used (ase size) View of F 48 R32 (Min. cable bending radius) Do not move the cable. RX34-4 / Number of controllable axes 117 Maximum 19 during arm rotation Machine Harness 632±1 Maximum 66 during arm rotation ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) M4 ground terminal Safety standard Hollow diameter: ϕ11 4-M3. Depth Keep enough space for the maintenance work at the rear of the base. Option (OP.) Option (OP.) 129 RX34 RX24S (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. 1 1 ϕ16 h R4 94 ϕ7 Option (OP.) R1 ϕ Power capacity (V) Operation method R Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Note. To set the standard coordinates with high accuracy, use a standard coordinate setting jig (option). Refer to the user s manual (installation manual) for more details. Our robot manuals (installation manuals) can be downloaded from our website at the address below: Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. Z axis tip shape Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S Option E (OP.E) User tool installation range bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. 468 RX34 u 42 RX24S u 32

39 YK4XG rticulated Y YK4XG Tool flange mount type onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red).± Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. Z-axis bellows D User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) ϕ M8 bolt for installation, 4 bolts used View of F 183 (ase size) Machine Harness 28 R32 (Min. cable bending radius) Do not move the cable. 4-ϕ11 Hollow diameter: ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) M4 ground terminal Keep enough space for the maintenance work at the rear of the base. 4-M3. Depth (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it ϕ R E ϕ3 h7-.21 ϕ Detailed drawing D R R ϕ4. through-hole 22.6±.2 37 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. Hollow diameter: ϕ ϕ4 H7 through-hole If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion ± View of E 9 LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u

40 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YKXGL rm length mm Maximum payload 4kg YKXGL 1 S X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-129 +/-144 +/-36 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 4 Standard cycle time: with 2kg payload (sec) Note 2.74 R-axis tolerable moment of inertia Note 3 (kgm 2 ). User wiring (sq wires).2 1 User tubing (Outer diameter) ϕ4 4 Travel limit Model Z axis stroke Tool flange Hollow shaft able length 1: 1mm No entry: None S: With hollow shaft 3L: 3.m F: With tool flange L: m 1L: 1m 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 2 Degree of cleanliness ISO LSS 3 (ISO ) Note 4 +ESD Note Intake air (N /min) 3 Note 6 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When reciprocating 2mm in vertical direction and 3mm in horizontal direction (rough-positioning arch motion). Note 3. There are limits to acceleration coefficient settings. See P.68. Note 4. lass 1 (.1µm) equivalent to FED-STD-29D Note. ESD (ElectroStatic Discharge) prevention is an option. Please contact our distributor. Note 6. The necessary intake amount varies depending on the use conditions and environment. YKXGL onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Width across flats: 1 Hollow diameter: ϕ11 ross section ±2 82. (1) 1 ϕ ϕ9 View of F 3 62 M8 bolt for installation, 4 bolts used (ase size) F Maximum 16 during arm rotation 67±1 Maximum 73 during arm rotation Z-axis upper end mechanical stopper position Z-axis rises 4mm during return-to-origin. M4 ground terminal Z-axis lower end mechanical stopper position Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. 4 Z-axis bellows User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) Machine Harness R32 (Min. cable bending radius) Do not move the cable. RX34-4 / Number of controllable axes ϕ11 Hollow diameter: ϕ11 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) Safety standard 4-M3. Depth RX34 RX24S (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. Keep enough space for the maintenance work at the rear of the base. Option (OP.) Option (OP.) 144 R2 ϕ7 R R1 7 ϕ38 42 ϕ16 h7-.18 Z axis tip shape Power capacity (V) Operation method Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 User tubing 1 (ϕ4 black) Option (OP.) User tubing 2 (ϕ4 red) Insert the plug provided when not used. Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Note. To set the standard coordinates with high accuracy, use a standard coordinate setting jig (option). Refer to the user s manual (installation manual) for more details. Our robot manuals (installation manuals) can be downloaded from our website at the address below: Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. User tool installation range Option E (OP.E) bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion. 47 RX34 u 42 RX24S u 32

41 YKXGL rticulated Y YKXGL Tool flange mount type onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used ± User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. Z-axis bellows D 7 2 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) ϕ M8 bolt for installation, 4 bolts used (ase size) Machine Harness 28 R32 (Min. cable bending radius) Do not move the cable User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) M4 ground terminal Keep enough space for the maintenance work at the rear of the base. 4-ϕ11 Hollow diameter: ϕ11 4-M3. Depth (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it View of F ϕ3 4 2 E ϕ3h7-.21 ϕ Detailed drawing D R2 R R1 7 User tubing 1 (ϕ4 black) User tubing 2 (ϕ4 red) Insert the plug provided when not used. Since this port is not used, cover it with the cap supplied with the joint. 129 onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used ±.2 47 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 Hollow diameter: ϕ ϕ4h7 through-hole If the robot enters the inside from the inner limit of the working envelope, the Z-axis bellows may be in contact with the base or the arm may be in contact with the machine harness. So, do not perform such motion View of E ± LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u

42 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YKX rm length mm Maximum payload 1kg YKX X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-12 +/-142 +/-18 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.2 +/-.1 +/-. Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 1 Standard cycle time: with 2kg payload (sec).3 R-axis tolerable moment of inertia Note 2 (kgm 2 ).12 User wiring (sq wires).2 2 User tubing (Outer diameter) ϕ6 3 Travel limit Model Z axis able stroke length 2: 2mm 3L: 3.m 3: 3mm L: m 1L: 1m RX34-4 / Number of controllable axes Safety standard 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 31 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 6 Note 4 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. There are limits to acceleration coefficient settings. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24 R Option E (OP.E) RX34 RX24-R bsolute battery E Marking Regeneratizve unit Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YKX Z3mm stroke 876 Z2mm stroke /-2 R-axis rotating radius 2 x 2-M4 x.7 Depth 1 (same for opposing side) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) D-sub connector for user wiring User tubes 1 (dapted to No.1 to 2) (ϕ6 lack) ϕ Use M1 bolt for installation (base dimensions) MX 94 ϕ68 ϕ9 4 2 ϕ M12 x 1.7 Depth 1 R 9 R2 Keep enough space for the maintenance work at the rear of the base. R R27 (Min. cable bending radius) Do not move the cable ф9 M4 grounding terminal User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) Power capacity (V) Operation method 1 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Our robot manuals (installation manuals) can be downloaded from our website at the address below: R163 R Working envelope R R R2 R Note: For details about tubing work, refer to the User s Manual X,Y axis mechanical stopper position D-sub connector for user wiring (dapted to No.1 to 2) Joint (Note) (ϕ12 x 3 pcs.) 472 RX34 u 42 RX24 u 32

43 R2 YK6XGL rm length 6mm Maximum payload 4kg YK6XGL 1 S Model Z axis stroke Tool flange Hollow shaft able length 1: 1mm No entry: None S: With hollow shaft 3L: 3.m F: With tool flange L: m 1L: 1m X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-129 +/-144 +/-36 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.1 +/-.1 +/-.4 Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 4 Standard cycle time: with 2kg payload (sec) Note 2.74 R-axis tolerable moment of inertia Note 3 (kgm 2 ). User wiring (sq wires).2 1 User tubing (Outer diameter) ϕ4 4 Travel limit 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 26 Degree of cleanliness ISO LSS 3 (ISO ) Note 4 +ESD Note Intake air (N /min) 3 Note 6 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. When reciprocating 2mm in vertical direction and 3mm in horizontal direction (rough-positioning arch motion). Note 3. There are limits to acceleration coefficient settings. See P.68. Note 4. lass 1 (.1µm) equivalent to FED-STD-29D Note. ESD (ElectroStatic Discharge) prevention is an option. Please contact our distributor. Note 6. The necessary intake amount varies depending on the use conditions and environment. YK6XGL onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 9 User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) Width across flats: 1 Hollow diameter: ϕ11 ross section ±2 82. (1) 1 ϕ Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass ϕ M8 bolt for installation, 4 bolts used (ase size) View of F F Maximum 17 during arm rotation 4 Z-axis bellows 4 User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) Machine Harness Z-axis upper end mechanical stopper position Z-axis rises 4mm during return-to-origin. Z-axis lower end mechanical stopper position 28 R32 (Min. cable bending radius) Do not move the cable. RX34-4 / Number of controllable axes 67±1 Maximum 74 during arm rotation User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) M4 ground terminal 4-ϕ RX34 RX24S (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. Hollow diameter: ϕ11 Safety standard 4-M3. Depth Keep enough space for the maintenance work at the rear of the base. Option (OP.) 129 User tubing 1 (ϕ4 black) Power capacity (V) Operation method 1 User tubing 2 (ϕ4 red) Insert the plug provided when not used. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. Operation using RS-232 communication Since this port is not used, cover it with the cap supplied with the joint. ϕ16 h7 Option (OP.) R R28 ϕ7 Option (OP.) 184 ϕ38 42 Z axis tip shape Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24S 129 Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 Option E (OP.E) Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Note. To set the standard coordinates with high accuracy, use a standard coordinate setting jig (option). Refer to the user s manual (installation manual) for more details. Our robot manuals (installation manuals) can be downloaded from our website at the address below: The arm may be in contact with the machine harness in an area inside from the inner limit of this working envelope. So, do not operate the arm in this area. User tool installation range bsolute battery E Marking Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24S u

44 R2 rticulated Y YK6XGL LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK6XGL Tool flange mount type onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. 63.± User tubing 1 (ϕ4 black) Insert the plug provided when not used. User tubing 2 (ϕ4 red) D 7 2 Tapped hole for user wiring 6-M3. Depth 6 The weight of the tool attached here should be added to the tip mass. Z-axis bellows User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) ϕ9 M8 bolt for installation, 4 bolts used (ase size) View of F Machine Harness 28 R32 (Min. cable bending radius) Do not move the cable User tubing 3 (ϕ4 blue) User tubing 4 (ϕ4 white) M4 ground terminal (No phase relation to R-axis origin.) s this hole is intended for the wiring/tubing clamp, do not attach a large load to it. Hollow diameter: ϕ11 Keep enough space for the maintenance work at the rear of the base. 4-ϕ11 4-M3. Depth Note that the robot cannot be used at a position where the base flange, robot cable, spline, bellows, and tool flange interfere with each other in the working envelope shown above. X-axis mechanical stopper position : 131 Y-axis mechanical stopper position : 146 User tubing 1 (ϕ4 black) User tubing 2 (ϕ4 red) Insert the plug provided when not used. Since this port is not used, cover it with the cap supplied with the joint. onnector for user wiring (No.1 to 1 usable, cable clamp size: ϕ13.1 to1) over with the caps provided when not used. ϕ3 4 Detailed drawing D R R ± Hollow diameter: ϕ11 E ϕ3 h ϕ ϕ4 H7 through-hole The arm may be in contact with the machine harness in an area inside from the inner limit of this working envelope. So, do not operate the arm in this area View of E ± RX34 u 42 RX24S u 32

45 YK6X rm length 6mm Maximum payload 1kg YK6X Model Z axis able stroke length 2: 2mm 3L: 3.m 3: 3mm L: m 1L: 1m X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-12 +/-14 +/-18 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.2 +/-.1 +/-. Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 1 Standard cycle time: with 2kg payload (sec).6 R-axis tolerable moment of inertia Note 2 (kgm 2 ).12 User wiring (sq wires).2 2 User tubing (Outer diameter) ϕ6 3 Travel limit RX34-4 / Number of controllable axes Safety standard 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 33 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 6 Note 4 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. There are limits to acceleration coefficient settings. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24 R Option E (OP.E) RX34 RX24-R bsolute battery E Marking Regeneratizve unit Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK6X Z3mm stroke 876 Z2mm stroke /-2 R-axis rotating radius x 2-M4 x.7 Depth 1 (same for opposing side) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) D-sub connector for user wiring (dapted to No.1 to 2) R 9 User tubes 1 (ϕ6 lack) R2 R (base dimensions) ϕ11 Use M1 bolt for installation Power capacity (V) Operation method 1 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. MX Our robot manuals (installation manuals) can be downloaded from our website at the address below: R24 14 R Working envelope 147 R6 R6 R2 R X,Y axis mechanical stopper position D-sub connector for user wiring (dapted to No.1 to 2) Joint (Note) 282 (ϕ12 x 3 pcs.) M4 grounding terminal ϕ User tubes 1 (ϕ6 lack) R27 (Min. cable ϕ68 bending radius) User tubes 2 (ϕ6 Red) ϕ9 Do not move the User tubes 3 (ϕ6 lue) M12 x 1.7 Depth 1 cable ф9 Note: For details about tubing work, refer to the User s Manual. Keep enough space for the maintenance work at the rear of the base. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION RX34 u 42 RX24 u 32 47

46 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK7X rm length 7mm Maximum payload 2kg YK7X X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-12 +/-14 +/-18 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.2 +/-.1 +/-. Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 2 Standard cycle time: with 2kg payload (sec).7 R-axis tolerable moment of inertia Note 2 (kgm 2 ).32 User wiring (sq wires).2 2 User tubing (Outer diameter) ϕ6 3 Travel limit Model Z axis able stroke length 2: 2mm 3L: 3.m 4: 4mm L: m 1L: 1m RX34-4 / Number of controllable axes Safety standard 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 7 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 6 Note 4 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. There are limits to acceleration coefficient settings. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24 R Option E (OP.E) RX34 RX24-R bsolute battery E Marking Regeneratizve unit Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK7X 96 Z4mm stroke 76 Z2mm stroke / R9. 8 ϕ9 User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) 3 R-axis rotating radius ϕ M12 x 1.7 Depth 1 R76 D-sub connector for user wiring (dapted to No.1 to 2) R16 R Keep enough space for the maintenance work at the rear of the base ϕ14 Use M12 bolt for installation 18 MX R27 (Min. cable bending radius) Do not move the cable ф9 Power capacity (V) Operation method 2 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information Joint (Note) (ϕ12 x 2 pcs.) M4 grounding terminal Our robot manuals (installation manuals) can be downloaded from our website at the address below: R21 14 Working envelope R R7 User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) Joint (Note) (ϕ12) D-sub connector for user wiring (dapted to No.1 to 2) Note: For details about tubing work, refer to the User s Manual. 9 R3 14 R7 147 R3 12 X,Y axis mechanical stopper position 123 (174) 476 RX34 u 42 RX24 u 32

47 YK8X rm length 8mm Maximum payload 2kg YK8X X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-12 +/-14 +/-18 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.2 +/-.1 +/-. Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 2 Standard cycle time: with 2kg payload (sec).7 R-axis tolerable moment of inertia Note 2 (kgm 2 ).32 User wiring (sq wires).2 2 User tubing (Outer diameter) ϕ6 3 Travel limit Model Z axis able stroke length 2: 2mm 3L: 3.m 4: 4mm L: m 1L: 1m RX34-4 / Number of controllable axes Safety standard 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 8 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 6 Note 4 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. There are limits to acceleration coefficient settings. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment. Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24 R Option E (OP.E) RX34 RX24-R bsolute battery E Marking Regeneratizve unit Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK8X 96 Z4mm stroke 76 Z2mm stroke / R9. User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) 8 3 ϕ9 R-axis rotating radius ϕ M12 x 1.7 Depth 1 R76 D-sub connector for user wiring (dapted to No.1 to 2) R16 R Keep enough space for the maintenance work at the rear of the base ϕ14 Use M12 bolt for installation MX R27 (Min. cable bending radius) Do not move the cable ф9 Power capacity (V) Operation method 2 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information Joint (Note) (ϕ12 x 2 pcs.) Our robot manuals (installation manuals) can be downloaded from our website at the address below: Joint (Note) (ϕ12) 14 R29 Working envelope R R8 14 R8 R3 R3 X,Y axis mechanical stopper position M4 grounding 9 terminal User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) User tubes 3 (ϕ6 lue) D-sub connector for user wiring (dapted to No.1 to 2) Note: For details about tubing work, refer to the User s Manual. rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION (174) RX34 u 42 RX24 u

48 rticulated Y LM1 Single-axis artesian SR ompact single-axis TRNSERVO Single-axis single-axis PHSER artesian SR YP-X LEN ONTROLLER INFORMTION YK1X rm length 1mm Maximum payload 2kg YK1X X axis Y axis Z axis R axis xis rm length (mm) specifications Rotation angle ( ) +/-12 +/-14 +/-18 servo motor output (W) Repeatability Note 1 (XYZ: mm) (R: ) +/-.2 +/-.1 +/-. Maximum speed (XYZ: m/sec) (R: /sec) Maximum payload (kg) 2 Standard cycle time: with 2kg payload (sec).6 R-axis tolerable moment of inertia Note 2 (kgm 2 ).32 User wiring (sq wires).2 2 User tubing (Outer diameter) ϕ6 3 Travel limit Model Z axis able stroke length 2: 2mm 3L: 3.m 4: 4mm L: m 1L: 1m RX34-4 / Number of controllable axes Safety standard 1.Soft limit, 2.Mechanical stopper (X, Y, Z axes) Robot cable length (m) Standard: 3. Option:, 1 Weight (kg) 9 Degree of cleanliness LSS 1 Note 3 Intake air (N /min) 6 Note 4 Note 1. This is the value at a constant ambient temperature. (X,Y axes) Note 2. There are limits to acceleration coefficient settings. Note 3. Per 1cf (.1μm base), when suction blower is used. Note 4. The necessary intake amount varies depending on the use conditions and environment., Option (OP.) Option (OP.) Option (OP.) Option D (OP.D) Specify various controller setting items. RX34 P.42 RX24 R Option E (OP.E) RX34 RX24-R bsolute battery E Marking Regeneratizve unit Expansion I/O Network option ivy System Gripper attery Specify various controller setting items. RX24 RX24S P.32 asic specifications YK1X 96 Z4mm stroke 76 Z2mm stroke / R ϕ9 User tubes 1 (ϕ6 lack) User tubes 2 (ϕ6 Red) D-sub connector for user wiring User tubes 3 (ϕ6 lue) (dapted to No.1 to 2) R-axis rotating radius ϕ M12 x 1.7 Depth 1 R R16 R Keep enough space for the maintenance work at the rear of the base MX ϕ14 Use M12 bolt for installation 18 Power capacity (V) Operation method 2 Operation using RS-232 communication Note. "Harmonic" and "Harmonic drive" are the registered trademarks of Harmonic Drive Systems Inc. Note. The movement range can be limited by changing the positions of X and Y axis mechanical stoppers. (The movement range is set to the maximum at the time of shipment.) See our robot manuals (installation manuals) for detailed information. Our robot manuals (installation manuals) can be downloaded from our website at the address below: R31 14 R R1 Working envelope R1 R4 279 User tubes 1 (ϕ6 lack) Joint (Note) User tubes 2 (ϕ6 Red) (ϕ12 x 2 pcs.) User tubes 3 (ϕ6 lue) R27 (Min. cable bending radius) Do not move the cable M4 grounding 4 terminal 9 2 Joint (Note) D-sub connector for user wiring 4-ф9 (ϕ12) (dapted to No.1 to 2) Note: For details about tubing work, refer to the User s Manual. R4 Maximum working envelope (174) 478 RX34 u 42 RX24 u 32