High purity gas control systems

Transcription

1 Process Gas and Vacuum Components High purity gas control systems DRY FINE SYSTEM C-035 C-035

2 Opening Up the Future for Process Control Product level controlol Part level control Cleanness control Manufacture Manufacturing methods Evaluation Design Product development Zero-particle, non-retention design product groups Philosophy is the Concept Product cleanness is comprehensively controlled conducted under CKD's original UF philosophy: Incorporate comprehensive cleanness for all factors indispensable to product development, including design, evaluation, manufacturing methods, and actual manufacture.

3 High-purity gas control system optimum for semiconductor and liquid crystal manufacturing processes using process gas, vacuums, etc. Consistent quality control, including parts and products, to ensure complete cleanness. CKD production CKD incorporates comprehensive consistent quality control for all production stages from machining and assembly to inspection and packaging. This covers all levels including products and parts. Cleanness is important to quality, so we have established reliable quality by establishing company-wide quantitative standards for each type of impurity, including chemical residue, organic carbon levels, and specific oils. Example of process gas valve and high vacuum valve production process Cleanliness control Precision cleaning Clean room Product inspection ssembly Primary packing Secondary packing (Crate packing) Chemical residue Part inspection Specific oil Organic carbon level Part machining

4 Example of high purity gas control system use High purity process in semiconductor manufacturing line Gas supply line Integrated gas supply system IGD3/IGD4 Cage protection V Vacuum gage Purge gas line Process gas component Process chamber OGD MGD PGM GD Vacuuming line Load lock chamber V Vacuuming line ir operated valve for high vacuum V V Load lock chamber Transfer chamber P Vacuum pump P Vacuum pump Process chamber 2 V To burnable gas scrubber ir supply line Clean air supply system V To combustible gas scrubber Clean air supply to drive RC2000 FCS 2F Clean room 2F Regulator box IGD4 PGM F F Utility area PT Valve manifold box IGD4 Intro 3

5 INDEX Selection guide Precautions Page Intro 5 Intro 9 Process Gas Components Process gas valves High vacuum components Regulator Integrated gas supply systems Other gas components Precautions ir operated valve GD02V ir operated valve GD2V/GD2 2V ir operated valves compatible with other variations Manual valve OGD20V Manual valve MGD20V Manual valves compatible with other variations Vacuum generator VG Series Diaphragm type extremely small flow rate adjustment valve Piston structure check valve Precautions Regulator for process gas PGM Product guide IGD3 IGD4 SEMI F86, F87 (.25" size, C seal) compatible valve Precautions Inline clean filter FCS Series Clean regulator RC2000 Series High vacuum components Precautions ir operated valve V ir operated valve V custom order ir operated valve VP Manual valve MV Manual valve MVP Leak valve FGL High vacuum solenoid valve HV Vacuum delay solenoid valve HVL Related products Solenoid valve for operation MN3E0/MN4E0 Series Solenoid valve for operation MN4G/MN4G Series Clean exhaust filter FC Series Fiber tube (joint/tube) Guide to Electric catalog 48 Intro 4

6 High purity gas control systems Selection guide <<Process Gas Components>> *Refer to Intro 7 to 8 in the introduction for the high vacuum component selection guide. Process gas valve Model No. GD0 2V ir operated valve Metal diaphragm structure 22.5 compact type Type/Classification Working fluid Connection /4" JXR male joint /4" JXR female joint Cv flow factor Page P.6 ir operated valve GD 2V/GD2 2V ir operated valve Metal diaphragm structure Standard size Parts compatible with other variations Pneumatic operated 2-port valve Normally closed Normally open Inert gas Process gas /4" JXR male joint /4" JXR female joint /4" double barbed joint 3/8" JXR male joint 3/8" JXR female joint 3/8" double barbed joint P.8 Refer to the indicated page for details P.0 *Contact CKD for details on other joints such as /8-inch JXR. OGD 20V Manual valve Metal diaphragm structure Handle open/close (90 snap action) /4" JXR male joint /4" JXR female joint /4" double barbed joint 3/8" JXR male joint 3/8" JXR female joint 3/8" double barbed joint P.24 Manual valve MGD 20V Manual valve Metal diaphragm structure Handle open/close (270 rotation) Manual 2 port valve Inert gas Process gas /4" JXR male joint /4" JXR female joint /4" double barbed joint 3/8" JXR male joint 3/8" JXR female joint 3/8" double barbed joint P.26 Parts compatible with other variations 0.26 Refer to the indicated page for details. 0.6 P.28 Other process gas valves VG Model No. Vacuum generator for process gas exhaust Working fluid Inert gas Process gas Diaphragm type extremely small flow rate adjustment valve Piston structure check valve Connection IN/4" JXR male joint VC./4" JXR female joint VENT3/8" JXR male joint Supply fluid pressure (MPa) 0.4 to 0.6 Ultimate vacuum (kpa(abs)) 3.3 or less Page P.34 P.36 Regulator PGM Model No. Working fluid Inert gas Process gas Connection /4" JXR male joint /4" JXR female joint /4" JXR male female joint /4" JXR female male joint Various integrated valve interfaces Maximum working pressure (MPa).0 Set pressure range (MPa) * to 0.2MPa (pressure range 30V) 0 to 0.2MPa (pressure range 30) 0 to 0.35MPa (pressure range 50) 0 to 0.42MPa (pressure range 60) 0 to 0.7MPa (pressure range 00) *The pressure range in parentheses is psi. Page P.42 Intro 5

7 Integrated gas supply system Integrated gas supply systems IGD3 IGD4 Model No. Seal connection method CS seal W seal.5 inches.5 inches Size Cv flow factor Page P.50 P.58 SEMI F86, F87 (.25-inch size, C seal) compatible air operated valves and manual valves are also available. (Page 67) Other gas components Clean filter Model No. FCS500/FCS000 Inline clean filter Working fluid Compressed air Nitrogen Port size ø4 to ø2 R/8 to R3/8 Rc/8 to Rc3/8 Working pressure range (MPa) Resin type to 0.99MPa Stainless steel type to.5mpa (Compressed air) to 0.99MPa (Nitrogen) Filtration 0.0 m (Removal effect 99.99%) Page P.72 Clean regulator RC2000 Model No. Working fluid Nitrogen Compressed air Rc/4 Rc3/8 Rc/2 Port size Maximum working pressure (MPa).0 (0.5 for low pressure) Set pressure range (MPa) 0.05 to 0.7 (Standard) 0.02 to 0.2 (Low pressure) Page P.82 Intro 6

8 High purity gas control systems Selection guide <<High vacuum components>> *Refer to Intro 5 and 6 in the introduction for the process gas component selection guide. Valve for high vacuum V*V Model No. ir-operated valve for high vacuum Formed bellows luminum body Type/Classification Working fluid Pneumatic operated 2-port valve Normally closed Vacuum Inert gas Port size Flange NW6 Flange NW25 Flange NW40 Flange NW50 Cv flow factor (orifice: ømm) ø6 ø24 ø40 ø50 Voltage Page P.92 V**3 ir-operated valve for high vacuum Formed bellows Compact stainless steel body type Flange NW25 Flange NW40 Flange NW50 Flange NW80 ø24 ø40 ø50 ø80 P.96 ir operated valve V**2 ir-operated valve for high vacuum Formed bellows V* Custom order Pneumatic operated 2-port valve Normally closed Normally open Double acting Vacuum Inert gas /4" tube Flange NW25 Flange NW40 Flange NW50 Flange NW80 Flange NW25 Flange NW40 Flange NW50 Flange NW80 Flange NW00 ø5 ø24 ø24 ø40 ø50 ø40 ø50 ø80 ø80 ø00 P.00 P.06 VP**2 ir-operated valve for high vacuum Double O-ring shaft sealing type /4" tube Flange NW25 Flange NW40 Flange NW50 Flange NW80 ø5 ø24 ø40 ø50 ø80 P.2 Manual valve MV*0 Manual valve for high vacuum Formed bellows Handle rotation MVP*0 Manual valve for high vacuum Double O-ring shaft sealing type Handle rotation Manual 2 port valve Vacuum Inert gas Flange NW25 Flange NW40 Flange NW50 ø24 ø40 ø50 P.8 P.20 Leak valve FGL 2 Leak valve Non-sliding type Control unit 0 to 60 sec. 2 Port solenoid valve Normally closed Nitrogen /4" double barbed joint /4" JXR male joint Maximum flow rate 32 /min Maximum flow rate 50 /min DC 2V DC 24V P.22 Intro 7

9 Model No. Type/Classification Working fluid Port size Cv flow factor (orifice: ømm) Voltage Page HV2 Manual valve for high vacuum Miniature NPT/8 /4" VCR female joint ø.6 P.26 High vacuum solenoid valve HV4 Manual valve for high vacuum HV Manual valve for high vacuum Direct acting 2 port solenoid valve Normally closed Vacuum Inert gas NPT/4 /4" VCR female joint ø48 flange ø52 flange ø5 ø8 ø2 ø5 C00V C200V DC 24V P.28 P.30 HVL 42 Vacuum delay solenoid valve Direct acting 2 port solenoid valve Normally open ir Nitrogen Rc/8 /4" double barbed joint Flange NW0 Flange NW6 ø.2 ø3 C00V C200V DC 24V P.34 Intro 8

10 Safety Precautions lways read before starting use When designing and manufacturing a device using CKD products, the manufacturer is obligated to check that device safety mechanical mechanism, pneumatic control circuit, or water control circuit and the system operated by electrical control that controls the devices is secured. It is important to select, use, handle, and maintain the product appropriately to ensure that the CKD product is used safely. Observe warnings and precautions to ensure device safety. Check that device safety is ensured, and manufacture a safe device. WRNING This product is designed and manufactured as a general industrial machine part. It must be handled by an operator having sufficient knowledge and experience in handling. Use this product in accordance of specifications. Contact CKD when using the product outside the unique specifications range, when using it outdoors, and when using it under the conditions and environment below. Do not attempt to modify or additionally machine the product. Use for special applications requiring safety including nuclear energy, railroad, aviation, ship, vehicle, medical equipment, equipment, or applications coming into contact with beverage or food, amusement equipment, emergency shutoff circuits, press machine, brake circuits, or for safeguard. 2 Use for applications where life or assets could be adversely affected, and special safety measures are required. Observe corporate standards and regulations, etc., related to the safety of device design and control, etc. ISO 444, JIS 8370 (pneumatic system rules), High Pressure Gas Maintenance Laws Occupational Safety and Sanitation Laws, and other safety regulations, corporate standards, and regulations. Do not handle, pipe, or remove devices before confirming safety. Inspect and service the machine and devices after confirming safety of the entire system related to this product. 2 Note that there may be hot or charged sections even after operation is stopped. 3 When inspecting or servicing the device, turn off the energy source (air supply or water supply), and turn off power to the facility. Discharge any compressed air from the system, and pay enough attention to possible water leakage and leakage of electricity. 4 When starting or restarting a machine or device that incorporates pneumatic components, make sure that the system safety, such as pop-out prevention measures, is secured. Observe warnings and cautions on the pages below to prevent accidents. The safety cautions are ranked as "DNGER", "WRNING" and "CUTION" in this section. DNGER: When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries, or when there is a high degree of emergency to a warning. WRNING: When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries. CUTION: When a dangerous situation may occur if handling is mistaken leading to minor injuries or physical damage. Note that some items described as "CUTION" may lead to serious results depending on the situation. In any case, important information that must be observed is explained. Intro 9

11 Process gas components CONTENTS Precautions 2 Valve for process gas 5 Regulator for process gas 37 Integrated gas supply system 45 Other components for process gas 69

12 Components for process gas Safety Precautions lways read before starting use Refer to Intro 9 for the general cautions.. Confirming specifications Design & Selection WRNING Incorrect selection and handling of devices may cause problems with this product and problems in the user's system. Confirm that the regulator specifications and the user's system are compatible before use. Confirm the compatibility of materials used for wetted area and the fluid used. Use the product within the fluid temperature and working pressure range in specifications. Installation & djustment. Working environment CUTION Do not use this product in a corrosive gas environment, or where the product may be subject to chemicals, salt water, water, steam, etc. Use this product within the ambient temperature range given in specifications. 3. Ensuring space CUTION Ensure sufficient space for installation, removal, piping, and wiring work. Ensure sufficient space for maintenance and inspection. 2. Installation WRNING Incorrect installation and piping will cause product problems, may cause problems in the user's system, and may cause death or serious injury. The user is responsible for ensuring that the operator has read the instruction manual and fully understands the system. fter installation, conduct an appropriate function test to confirm that the product is correctly installed. CUTION This product is processed with ultra-precise cleaning, and is assembled in a Class 0 super clean room. Open the clean pack in the package box in a clean environment immediately before installation. If wetted areas (inside of body, or on the joint seal surface) are touched when the regulator is installed, impurities may adhere or the highly pure gas maybe contaminated. Do not touch wetted areas of the regulator during installation. 4. Piping CUTION If dirt or burrs get on piping or in the area during piping, the valve seat or diaphragm seal may be damaged and cause leaks from the valve seat. Carefully remove any dirt or burrs before installing the valve. Check that the connection port direction is correct when piping the product. Pipe the product so that the pipe tension, compression, and bending, etc., are not applied to the valve body. Operation may fail if the piped tube is bent. Check that piping matches the required length. Select the solenoid valve for drive connected to the drive section to match specifications and application. Use air or inert gas passed through a 5 m or higher filtration capacity filter for operation air. 2

13 Components for process gas Safety precautions lways read before starting use Refer to Intro 9 for the general cautions. Installation & djustment Check that there is no dirt, scratches, or burrs get on the seal before tightening the joint in the following procedures: Tightening the joint JXR joint: for nickel, SUS36 gasket material Screw in the nut with the fingers until the gasket contacts the bead section, and then tighten another /8 turn using a tool. (Contact CKD if other materials are to be used.) ead Holder Gasket Double barbed joint Check that the front ferrule, back ferrule, and nut are properly attached, and then insert the tube until it contacts the back of the product. Tighten the nut with the fingers, then tighten another /4 turn with a tool. 5. aking CUTION Keep the baking temperature within the product's specified temperature range. Fully open the valve when baking. 6. Purging CUTION When removing a valve that has been used for toxic, combustible, or corrosive gas, fully purge the product with inert gas such as nitrogen gas. Front ferrule ack ferrule Tube 2 fter tightening the joint, always carry out a leak inspection and confirm that there are no leaks occur. During use & Maintenance. Using this product WRNING lways use this product within the specified range. Take care not to touch products with heaters with hands or body parts. Direct contact may cause burns. CUTION Do not step on valves, etc., or place heavy objects on them. 2. Maintenance/inspection WRNING lways carry out the work as specified in the instruction manual. lways turn the power off and release any fluids or pressure before starting the work. Completely purge the product with inert gas, etc., so that the residual gas does not adversely affect the workers or devices in the area. When work is completed, always carry out a leak inspection and confirm that there are no leaks exist. Do not disassemble the process gas valve. The product warranty does not apply to a valve which has been disassembled without consent from CKD and then repaired and reused. 3

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15 Valve for process gas CONTENTS ir operated valve GD0 2 V 6 GD 2 V GD2 2V 8 Parts compatible with other variations 0 Manual valve OGD 2 0V 24 MGD 2 0V 26 Parts compatible with other variations 28 Other valves for process gas Vacuum generator VG 34 Diaphragm type extremely small flow rate adjustment valve 36 Piston structure check valve 36 5

16 ir operated valve for process gas GD0 2V Series Metal diaphragm Compact type Model No. ctuation Cv flow factor GD0V NC Cv=0. Model No. ctuation Cv flow factor GD02V NO Cv=0. Saving space while maintaining basic operations Continuous use possible up to 80 Zero particle generation realized with optimum seal structure and improved surface roughness IN OUT Slim 30 diameter actuator High corrosion resistance and long life Ni-Co alloy diaphragm (4 million cycles achieved *2 ) JXR joint connection * /4-inch size male and female fittings Electropolished finish specifications 22.5mm compact body Materials for wetted areas No. 2 3 Parts name Diaphragm Valve seat ody Material Ni-Co alloy PCTFE SUS36L 2 3 *: The JXR joint can be connected to the VCR joint. *2: Life when working fluid is inert gas within specified range, which does not contain solids such as reaction products. Precautions lways read page 9 in the introduction and pages 2 to 3 to ensure correct and safe use of this product. Specifications Descriptions GD0V GD02V Working fluid Inert gas/process gas Working pressure range to 0.5 Pa(abs)-MPa Fluid temperature mbient temperature -0 to 80-0 to 80 Valve seat leakage or less Pa m 3 /s(he) External leakage or less Pa m 3 /s(he) Cv flow factor Connection 0. /4" JXR male joint /4" JXR female joint ctuation NC (normally closed) NO (normally open) Operating pressure 0.4 to 0.5 (fluid temperature 60 ) 0.4 to 0.6 MPa 0.4 to 0.45 (60 fluid temperature) Operating pressure connection port M5 Weight kg 0.22 * *: Value for GD0V-4RM (/4-inch JXR male joint). 6

17 How to order GD0 V 4R GD0 V 2 Series ir operated valve for process gas ctuation Connection Symbol Descriptions ctuation NC (normally closed) 2 NO (normally open) Connection 4RM /4" JXR male joint 4R /4" JXR female joint Dimensions GD0*V-4RM JXR male joint I IN OUT E D C F G H Model No. Symbol ctuation GD0V-4RM GD02V-4RM NC NO ø30 ø30 C D E F 4 4 G 4 4 H 2-M4 depth 5 2-M4 depth 5 I M5 M5 GD0*V-4R JXR female joint IN OUT K L J Model No. Symbol ctuation GD0V-4R GD02V-4R NC NO J K L

18 ir operated valve for process gas GD 2V Series GD2 2V Series Metal diaphragm Standard Model No. ctuation Cv flow factor GDV NC Cv=0.26 GD2V NO Cv=0.26 Model No. ctuation Cv flow factor GD2V NC Cv=0.6 GD22V NO Cv=0.6 Standard diaphragm valve V series created from a pursuit of contamination control Materials for wetted areas No. 2 3 Continuous use possible up to 80 Zero particle generation realized with optimum seal structure and improved surface roughness Valve dead space minimized Electropolished finish specifications Parts name Diaphragm Valve seat ody Material Ni-Co alloy PCTFE SUS36L 2 3 High corrosion resistance and long life Ni-Co alloy diaphragm (4 million cycles achieved *2 ) JXR joint connection * Standard (male and female) and double barbed joints *: The JXR joint can be connected to the VCR joint. *2: Life when working fluid is inert gas within specified range, which does not contain solids such as reaction products. Precautions lways read page 9 in the introduction and pages 2 to 3 to ensure correct and safe use of this product. Specifications Descriptions GD*V GD2*V Working fluid Inert gas/process gas Working pressure range to.0 Pa(abs)-MPa Fluid temperature mbient temperature -0 to 80-0 to 80 Valve seat leakage or less Pa m 3 /s(he) External leakage or less Pa m 3 /s(he) Cv flow factor Connection 0.26 /4" JXR male joint /4" JXR female joint 0.6 3/8" JXR male joint 3/8" JXR female joint /4" double barbed joint 3/8" double barbed joint ctuation NC (normally closed) NO (normally open) NC (normally closed) NO (normally open) Operating pressure NC : 0.4 to 0.6 NC : 0.4 to 0.6 MPa NO : 0.4 to 0.5 NO : 0.4 to 0.5 Operating pressure connection port Rc/8 Weight kg 0.35 * 0.88 * *: Value for GDV-4RM (/4-inch JXR male joint) and GD2V-6RM (3/8-inch JXR male joint). 8

19 How to order GD V/GD2 V 2 2 Series ir operated valve for process gas GD V 4RM GD2 V 6R Model No. Model No. ctuation Symbol Descriptions ctuation NC (normally closed) 2 NO (normally open) ctuation Symbol Descriptions ctuation NC (normally closed) 2 NO (normally open) Connection Connection 4RM /4" JXR male joint 4R /4" JXR female joint 4S /4" double barbed joint Connection Connection 6RM 3/8" JXR male joint 6R 3/8" JXR female joint 6S 3/8" double barbed joint Dimensions GD*V-4RM GD2*V-6RM JXR male joint I IN OUT D F E C H G Model No. Symbol GDV-4RM GD2V-4RM GD2V-6RM GD22V-6RM GD*V-4R GD2*V-6R JXR female joint ctuation NC NO NC NO C D E F G H I 57 ø M5 depth 6 Rc /8 76 ø M5 depth 8 Rc /8 GD*V-4S GD2*V-6S Double barbed joint IN OUT IN OUT K N L J P O M Model No. Symbol GDV-4R GD2V-4R GD2V-6R GD22V-6R ctuation NC NO NC NO J K L Model No. Symbol GDV-4S GD2V-4S GD2V-6S GD22V-6S ctuation NC NO NC NO M N O P

20 ir operated valve for process gas Parts compatible with other variations GD**V Series Custom order Model GD0*V GD*V GD2*V ody options (pages 0 to 2) Flow path direction NC/NO combination Connection Port shape combination Fluid temperature ctuator options (pages 22 to 23) Valve opening adjustment function ir indicator Microswitch Proximity switch Cylinder switch Variations How to order 2-way valve, 3-way separate flow valve GD V 4 RJ FFF F Size ctuation C Port size D Connection E Port shape combination F Fluid temperature Symbol Size 0 2 /8" /4" 3/8" ctuation NC 2 NO C Port size /4" 3/8" /2" Descriptions D Connection RJ JXR female joint (with bearing) R JXR female joint RM JXR male joint W utomatic welded joint S Double barbed joint E Port shape combination 2 way valve lank MF FM IN, OUT Same joint type IN: Male OUT: Female IN: Female OUT: Male 3-way separate flow valve FFF abc female/female/female FFM abc female/female/male FMM abc female/male/male MMM abc male/male/male WWW abc automatic welded joint abc * F Fluid temperature lank F 80 standard 80 valve seat PF Model No. G D 0 G D G D 2 D Connection Symbol RJ R RM W S 2 way valve lank MF FM 3-way separate flow valve FFF FFM FMM MMM WWW * F: Female, M: Male, W: utomatic welded joint, all joints can be combined. 0

21 How to order 2-station 3-way valve GD0*V Series How to order GD V Y 4 RJ FFF F Size Flow path direction C NC/NO combination D Port size E F Connection Port shape combination Symbol Size 0 2 Y T C /8" /4" 3/8" G Fluid temperature Descriptions Flow path direction Selector type Divider type NC/NO combination V : NC V2 : NC V : NC V2 : NO V : NO V2 : NC V : NO V2 : NO D Port size 4 /4" 6 3/8" E Connection RJ R RM JXR female joint (with bearing) JXR female joint JXR male joint F Port shape combination FFF abc female/female/female MMM abc male/male/male abc *2 G Fluid temperature lank F 80 standard 80 valve seat PF Model No. G D 0 G D G D 2 Symbol FFF MMM E Connection RJ R RM *2: F: Female, M: Male, all joints can be combined.

22 GD0*V Series GD0*V 2 way valve Custom order Dimensions GD0*V-4RJ (/4" JXR female joint (with bearing) type) GD0*V-4S GD0*V-4W (/4" double barbed joint type) (/4" automatic welded joint type) Operation port M5 ø M4 screw depth (57.4) Figure shows GD0V-4RJ female joint (with bearing) Double barbed joint: 4S Welded joint: 4W GD0*V-4RJ- GD0*V-4R- FM MF FM MF (/4" JXR female (with bearing) - male combination type) (/4" JXR female - male combination type) Operation port M Figure shows GD0V-4RJ-MF female joint (with bearing) Female joint: 4R Male joint: 4RM 2

23 GD0*V Series ir operated valve for process gas GD0*V 3-way separate flow valve Custom order Dimensions GD0*V-4RJ- GD0*V-4R- GD0*V-4RM-MMM GD0*V-4W- (/4" JXR female joint (with bearing) combination type) (/4" JXR female joint combination type) (/4" JXR male joint type) (/4" automatic welding joint combination type) Operation port M5 ø30 a c b a c b b a c M4 screw depth 5 Figure shows GD0V-4RJ-FFF female joint (with bearing) <Main port> Female joint: 4R Male joint: 4RM Welded joint: 4W <ranch port> Female joint: 4RJ- (with bearing) F Female joint: 4R- F Male joint: - M Welded joint: - W 3

24 GD0*V Series GD0*V 2-station 3-way valve Custom order Dimensions GD0V- **-4RJ- (/4" JXR female joint (with bearing) combination type) GD0V- **-4R- (/4" JXR female joint combination type) GD0V- **-4RM-MMM (/4" JXR male joint type) <Y: Selector type> <T: Divider type> V Operation port M5 b V2 Operation port M5 ø30 V Operation port M5 b V2 Operation port M5 ø a c a c M5 screw depth 6 2-M5 screw depth Figure shows GD0V-Y-4RJ-FFF female joint (with bearing) Figure shows GD0V-T-4RJ-FFF female joint (with bearing) b b V a V2 c a V V2 c <Other joint dimension> Male joint: 4RM Female joint: 4R 4

25 GD*V Series ir operated valve for process gas GD*V 2 way valve Custom order Dimensions GD*V-4RJ (/4" JXR female joint (with bearing) type) GD*V-4W (/4" automatic welded joint type) Operation port Rc/8 ø M5 screw depth 6 55 Figure shows GDV-4RJ female joint (with bearing) Welded joint: 4W GD*V-4RJ- GD*V-4R- FM MF FM MF (/4" JXR female (with bearing) male combination type) (/4" JXR female - male combination type) Operation port Rc/ Figure shows GDV-4RJ-MF female joint (with bearing) Female joint: 4R Male joint: 4RM 5

26 GD*V Series GD*V 3-way separate flow valve Custom order Dimensions GD*V-4RJ- GD*V-4R- GD*V-4RM-MMM GD*V-4W- (/4" JXR female joint (with bearing) combination type) (/4" JXR female joint combination type) (/4" JXR male joint type) (/4" automatic welding joint combination type) a c Operation port Rc/8 ø4 b a c b b 27 a c M5 screw depth 6 Figure shows GDV-4RJ-FFF female joint (with bearing) <Main port> Female joint: 4R Male joint: 4RM Welded joint: 4W <ranch port> Female joint: 4RJ- (with bearing) F Female joint: 4R- F Male joint: - M Welded joint: - W 6

27 GD*V Series ir operated valve for process gas GDV 2-station 3-way valve Custom order Dimensions GDV- **-4RJ- (/4" JXR female joint (with bearing) combination type) GDV- **-4R- (/4" JXR female joint combination type) GDV- **-4RM-MMM (/4" JXR male joint type) <Y: Selector type> <T: Divider type> V Operation port Rc/8 b V2 Operation port Rc/8 V Operation port Rc/8 b V2 Operation port Rc/8 a c a c M5 screw depth M5 screw depth Figure shows GDV-Y-4RJ-FFF female joint (with bearing) Figure shows GDV-T-4RJ-FFF female joint (with bearing) b b V a V2 c a V V2 c <Other joint dimension> Male joint: 4RM Female joint: 4R 7

28 GD2*V Series GD2*V 2 way valve Custom order Dimensions GD2*V-6RJ GD2*V-6W GD2*V-8S (3/8" JXR female joint (with bearing) type) (3/8" automatic welded joint type) (/2" double barbed joint type) GD2*V-8RM (/2" JXR male joint type) GD2*V-8R GD2*V-8RJ GD2*V-8W (/2" JXR female joint type) (/2" JXR female joint (with bearing) type) (/2" automatic welded joint type) Operation port Rc/8 ø M5 screw depth Figure shows GD2V-6RJ female joint (with bearing) Welded joint: 6W Female joint: 8RJ (with bearing) Female joint: 8R Male joint: 8RM (84.5) Double barbed joint: 8S Welded joint: 8W 8

29 GD2*V Series ir operated valve for process gas GD2*V 2 way valve Custom order Dimensions GD2*V-6RJ- GD2*V-6R- FM MF FM MF (3/8" JXR female joint (with bearing) male combination type) (3/8" JXR female - male combination type) Operation port Rc/ Figure shows GD2V-6RJ-MF female joint (with bearing) Female joint: 6R Male joint: 6RM GD2*V-8RJ- GD2*V-8R- FM MF FM MF (/2" JXR female joint (with bearing) male combination type) (/2" JXR female - male combination type) Operation port Rc/ Figure shows GD2V-8RJ-MF female joint (with bearing) Female joint: 8R Male joint: 8RM 9

30 GD2*V Series GD2*V 3-way separate flow valve Custom order Dimensions GD2*V-6RJ- GD2*V-6R- GD2*V-6RM-MMM GD2*V-6W- (3/8" JXR female joint (with bearing) combination type) (3/8" JXR female joint combination type) (3/8" JXR male joint type) (3/8" automatic welded joint combination type) The /2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size. a c Operation port Rc/8 ø55 b a c b b a c 2-M5 screw depth 6 <Main port> 20.2 Figure shows GD2V-6RJ-FFF female joint (with bearing.) Female joint: 6R Male joint: 6RM Welded joint: 6W <ranch port> Female joint: 6RJ- (with bearing) F Female joint: 6R- F Male joint: - M Welded joint: - W 20

31 GD2*V Series ir operated valve for process gas GD2V 2-station 3-way valve Custom order Dimensions GD2V- **-6RJ- (3/8" JXR female joint (with bearing) combination type) GD2V- **-6R- (3/8" JXR female joint combination type) GD2V- **-6RM-MMM (3/8" JXR male joint type) <Y: Selector type> <T: Divider type> V Operation port Rc/8 V2 Operation port Rc/8 V Operation port Rc/8 V2 b b Operation port Rc/8 a c 6 75 a c M5 screw depth M5 screw depth Figure shows GD2V-Y-6RJ-FFF female joint (with bearing) Figure shows GD2V-T-6RJ-FFF female joint (with bearing) b b V a V2 c a V V2 c <Other joint dimension> 80 Male joint: 6RM 75 Female joint: 6R 2

32 GD**V Series GD**V ctuator option Custom order Dimensions GD**V With valve opening adjusting mechanism C Operation port pplicable pipe diameter ø4 Opening adjusting dial The flow rate when the valve is open is adjustable. Model No. GD0V- GD02V- GDV- GD2V- GD2V- GD22V C ø30 ø30 ø4 ø4 ø55 ø55 Note: Keep the ambient temperature within -0 to 60. Note: The push-in joint cannot be used with GD0V or GD02V. GD**V With air indicator Operation port Rc/8 C ir indicator (Figure shows operating state) The indicator projects when the valve is operating (during air pressurization), so valve operation can be confirmed visually. Model No. GDV- GD2V- GD2V- GD22V C ø4 ø4 ø55 ø55 GD**V With microswitch C Microswitch Operation port Rc/8 Valve operation confirmation can be output from the microswitch when the valve is open. Microswitch D2JW-0-MD (OMRON) DC 3-wire reed (NC, NO) lead length 0.3m 30 VDC, 00m rating resistance load Model No. GDV- GD2V- GD2V- GD22V C ø4 ø4 ø55 ø55 22

33 GD**V Series ir operated valve for process gas GD**V ctuator option Custom order Dimensions GD**V With proximity switch Proximity switch C Operation port Rc/8 Valve operation confirmation can be output from the proximity switch when the valve is open. Proximity switch EM-030 (KEYENCE) DC 3-wire proximity (NO) lead length 2m Power voltage 0.8 to 30 VDC Current consumption 2m or less Model No. GDV- GD2V C ø4 ø55 GD**V With cylinder switch Operation port Rc/8 C Valve operation confirmation can be output from the cylinder switch when the valve is open. Cylinder switch SW-T3V (CKD) DC 3-wire proximity (NO) lead length m Power voltage 0 to 28 VDC Current consumption 0m or less (at 24V DC) Model No. GDV C ø4 Note: Keep the ambient temperature within -0 to 60. * Contact your CKD representative for details on the actuator option model No., etc. 23

34 Manual valve for process gas OGD 20V Series Metal diaphragm 90 rotation snap action type Model No. OGD0V Cv flow factor Cv=0.26 Model No. OGD20V Cv flow factor Cv=0.6 Close the valve by turning the handle Continuous use possible up to 80 Stable inner seal performance achieved with nonrotating rod (Patent pending) Handle position and top indicator indicate whether the valve is open or closed. Panel installation possible Zero particle generation realized with optimum seal structure and improved surface roughness Valve dead space minimized Electropolished finish specifications Materials for wetted areas No. Parts name Diaphragm 2 Valve seat 3 ody Material Ni-Co alloy PCTFE SUS36L 2 3 Inner seal performance stabilized with spring High corrosion resistant Ni-Co alloy diaphragm JXR joint connection * Standard (male and female) and double barbed joints *: The JXR joint can be connected to the VCR joint. Precautions lways read page 9 in the introduction and pages 2 to 3 to ensure correct and safe use of this product. Specifications Descriptions OGD0V OGD20V Working fluid Inert gas/process gas Working pressure range Pa(abs)-MPa to.0 Fluid temperature mbient temperature -0 to 80-0 to 80 Valve seat leakage or less Pa m 3 /s(he) External leakage or less Pa m 3 /s(he) Cv flow factor Connection 0.26 /4" JXR male joint /4" JXR female joint 0.6 3/8" JXR male joint 3/8" JXR female joint /4" double barbed joint 3/8" double barbed joint Weight kg 0.34 * 0.69 * *: Value for OGD0V-4RM (/4-inch JXR male joint) and OGD20V-6RM (3/8-inch JXR male joint). 24

35 OGD 0V 2 Series Manual valve for process gas How to order OGD0V OGD20V Model No. 4RM K 6RM K Connection C Handle color Symbol Descriptions 4RM /4" JXR male joint 4R /4" JXR female joint 4S /4" double barbed joint 6RM 3/8" JXR male joint 6R 3/8" JXR female joint 6S 3/8" double barbed joint C Connection Handle color K lack R Red lue Y Yellow OGD0V Model No. OGD20V Handle color lack (-K) lue (-) Red (-R) Yellow (-Y) Dimensions OGD0V-4RM- OGD20V-6RM- JXR male joint K Panel mount diameter F Panel mount thickness 5mm or less C IN OUT E H G D I J Model No. Symbol OGD0V-4RM- OGD20V-6RM C D E F G H I J 2-M5 depth 6 2-M5 depth 8 K ø20.5 ø26.5 JXR female joint OGD0V-4R- OGD20V-6R- OGD0V-4S- OGD20V-6S- Double barbed joint IN OUT IN OUT M P N L R Q O Model No. Symbol L M N Model No. Symbol OGD0V-4R- OGD20V-6R OGD0V-4S- OGD20V-6S- O P Q R

36 Manual valve for process gas MGD 20V Series Metal diaphragm 270 rotation type Model No. MGD0V Cv flow factor Cv=0.26 Model No. MGD20V Cv flow factor Cv=0.6 Manual valve incorporating basic air-operated valve performance Continuous use possible up to 80 Handle shape ensures optimum inner sealing No. 2 3 Zero particle generation realized with optimum seal structure and improved surface roughness Valve dead space minimized Electropolished finish specifications Materials for wetted areas Parts name Diaphragm Valve seat ody Material Ni-Co alloy PCTFE SUS36L 2 3 Panel installation possible Stopper prevents diaphragm damage from excessive tightening JXR joint connection * Standard (male and female) and double barbed joints High corrosion resistant Ni-Co alloy diaphragm *: The JXR joint can be connected to the VCR joint. Precautions lways read page 9 in the introduction and pages 2 to 3 to ensure correct and safe use of this product. Specifications Descriptions MGD0V MGD20V Working fluid Inert gas/process gas Working pressure range Pa(abs)-MPa Fluid temperature mbient temperature to.0-0 to 80-0 to 80 Valve seat leakage or less Pa m 3 /s(he) External leakage or less Pa m 3 /s(he) Cv flow factor Connection /4" JXR male joint 3/8" JXR male joint /4" JXR female joint 3/8" JXR female joint /4" double barbed joint 3/8" double barbed joint Weight kg 0.29 * 0.62 * *: Value for MGD0V-4RM (/4-inch JXR male joint) and MGD20V-6RM (3/8-inch JXR male joint). 26

37 How to order MGD0V 4RM MGD20V 6RM MGD 0V 2 Series Manual valve for process gas Model No. Connection Symbol Descriptions Connection 4RM /4" JXR male joint 4R /4" JXR female joint 4S /4" double barbed joint Model No. Connection Symbol Descriptions Connection 6RM 3/8" JXR male joint 6R 3/8" JXR female joint 6S 3/8" double barbed joint Note: The handle comes in standard silver and black, red, blue, and yellow Refer to Page 28 for the model no. (Dimensions are the same as following.). Dimensions MGD0V-4RM MGD20V-6RM JXR male joint IN J Panel mount diameter OUT Panel mount thickness 5mm or less C G F E D H I Model No. Symbol MGD0V-4RM MGD20V-6RM MGD0V-4R MGD20V-6R JXR female joint ø38 ø38 C D E F G H I 2-M5 depth 6 2-M5 depth 8 MGD0V-4S MGD20V-6S Double barbed joint J ø20.5 ø20.5 IN OUT IN OUT L O M K P Q N Model No. Symbol K L M Model No. Symbol MGD0V-4R MGD20V-6R MGD0V-4S MGD20V-6S N O P Q

38 Manual valve for process gas Parts compatible with other variations OGD*0V/MGD*0V Series Custom order Model Variations OGD0V OGD20V MGD0V MGD20V ody options (pages 28 to 32) Connection Port shape combination Handle color Safety specification options (page 33) Locking mechanism Double action mechanism How to order OGD-V, MGD-V Series options O GD 0V 4 RJ MF K F Handle color O G D Model No. O G D2 M GD M GD2 Model Handle color lack (-K) lue (-) Size Specifications Red (-R) Yellow (-Y) C Port size D Connection Refer to specification pages for each series. E Port shape combination Symbol O M 2 C Descriptions Model Manual (snap action) Manual (round handle) Size /4" 3/8" Port size /4" 3/8" /2" D Connection RJ JXR female joint (with bearing) R JXR female joint RM JXR male joint W utomatic welded joint S Double barbed joint E Port shape combination 2 way valve lank MF FM IN, OUT Same joint type IN: Male, OUT: Female IN: Female, OUT: Male 3-way separate flow valve FFF FFM FMM MMM WWW abc female/female/female abc female/female/male abc female/male/male abc male/male/male abc automatic welded joint abc / / * F Handle color K Y R lack lue Yellow Red * F: Female, M: Male, W: utomatic welded joint, all joints can be combined. D Connection Symbol RJ R RM W S 2 way valve lank MF FM 3-way separate flow valve FFF FFM FMM MMM WWW 28

39 OGD0V MGD0V Dimensions OGD0V-4RJ-K OGD0V-4W-K MGD0V-4RJ-K MGD0V-4R-K MGD0V-4RM-K MGD0V-4W-K MGD0V-4S-K 2 way valve Custom order (, Y, R) (/4" JXR female joint (with bearing) type) (, Y, R) (/4" automatic welded joint type) (, Y, R) (/4" JXR female joint (with bearing) type) (, Y, R) (/4" JXR female joint type) (, Y, R) (/4" JXR male joint type) (, Y, R) (/4" automatic welded joint type) (, Y, R) (/4" double barbed joint type) OGD0V Series MGD0V Series Manual valve for process gas Figure shows OGD0V-4RJ-K Female joint (with bearing) Figure shows MGD0V-4RJ-K Female joint (with bearing) ø20.5 Panel mount diameter 24 Panel mount thickness 5mm or less ø37 74 ø20.5 Panel mount diameter Panel mount thickness 5mm or less M5 screw depth 6 55 Welded joint: 4W OGD0V-4RJ- OGD0V-4R- MGD0V-4RJ- MGD0V-4R- FM MF-K (, Y, R) (/4" JXR female (with bearing) - male combination type) FM MF-K (, Y, R) (/4" JXR female - male combination type) FM MF -K (, Y, R) (/4" JXR female (with bearing) - male combination type FM MF-K (, Y, R) (/4" JXR female - male combination type) Female joint (with bearing) Female joint: 4R Male joint: 4RM 29

40 OGD0V Series MGD0V Series OGD0V MGD0V 3-way separate flow valve Custom order Dimensions OGD0V-4RJ- OGD0V-4R- OGD0V-4RM-MMM-K OGD0V-4W- MGD0V-4RJ- MGD0V-4R- MGD0V-4RM-MMM-K MGD0V-4W- -K (, Y, R) (/4" JXR female joint (with bearing) combination type) -K (, Y, R) (/4" JXR female joint combination type) (, Y, R) (/4" JXR male joint type) -K (, Y, R) (/4" automatic welded joint combination type) -K (, Y, R) (/4" JXR female joint (with bearing) combination type) -K (, Y, R) (/4" JXR female joint combination type) (, Y, R) (/4" JXR male joint type) -K (, Y, R) (/4" automatic welded joint combination type) Figure shows OGD0V-4RJ-FFF-K Female joint (with bearing) a c 82 ø20.5 Panel mount diameter b Panel mount thickness 36 5mm or less Figure shows MGD0V-4RJ-FFF-K Female joint (with bearing) a ø c 74 ø20.5 Panel mount diameter b a b 35.3 c 27 Panel mount thickness 5mm or less b a c 8 2-M5 screw depth 6 <Main port > 70.6 Female joint: 4R 57 Male joint: 4RM 55 Welded joint: 4W <ranch port> Female joint: 4RJ- (with bearing) F Female joint: 4R- F Male joint: - M Welded joint: - W 30

41 OGD20V MGD20V Dimensions OGD20V-6RJ-K OGD20V-6W-K MGD20V-6RJ-K MGD20V-6R-K MGD20V-6RM-K MGD20V-6W-K MGD20V-6S-K 2 way valve Custom order (, Y, R) (3/8" JXR female joint (with bearing) type) (, Y, R) (3/8" automatic welded joint type) (, Y, R) (3/8" JXR female joint (with bearing) type) (, Y, R) (3/8" JXR female joint type) (, Y, R) (3/8" JXR male joint type) (, Y, R) (3/8" automatic welded joint type) (, Y, R) (3/8" double barbed joint type) OGD20V Series MGD20V Series Manual valve for process gas The /2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size. (This does not apply to the double-barbed joint.) Figure shows OGD20V-6RJ-K Female joint (with bearing) Figure shows MGD20V-6RJ-K female joint (with bearing) ø26.5 Panel mount diameter 27 Panel mount thickness 5mm or less ø37 85 ø20.5 Panel mount diameter Panel mount thickness 5mm or less M5 screw depth (84.5) Welded joint: 6W Double barbed joint: 8S OGD20V-6RJ- OGD20V-6R- MGD20V-6RJ- MGD20V-6R- FM MF -K (, Y, R) (3/8" JXR female (with bearing) - male combination type) FM MF -K (, Y, R) (3/8" JXR female - male combination type) FM MF -K (, Y, R) (3/8" JXR female (with bearing) - male combination type) FM MF -K (, Y, R) (3/8" JXR female - male combination type) The /2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size Female joint: 6RJ (with bearing) Female joint: 6R Male joint: 6RM 3

42 OGD20V Series MGD20V Series OGD20V MGD20V 3-way separate flow valve Custom order Dimensions OGD20V-6RJ- OGD20V-6R- OGD20V-6RM-MMM OGD20V-6W- MGD20V-6RJ- MGD20V-6R- MGD20V-6RM-MMM MGD20V-6W- (3/8" JXR female joint (with bearing) combination type) (3/8" JXR female joint combination type) (3/8" JXR male joint type) (3/8" automatic welded joint combination type) (3/8" JXR female joint (with bearing) combination type) (3/8" JXR female joint combination type) (3/8" JXR male joint type) (3/8" automatic welded joint combination type) The /2-inch size is also available. The face-to-face distance is the same as the 3/8-inch size. a b c Figure shows OGD20V-6RJ-FFF female joint (with bearing) Figure shows MGD20V-6RJ-FFF female joint (with bearing) a 47 c 04 ø26.5 Panel mount b diameter 27 Panel mount thickness 5mm or less a ø37 c 85 ø20.5 Panel mount diameter b 6 Panel mount thickness 5mm or less b a c M5 screw depth 8 <Main port > Female joint: 6R Male joint: 6RM Welded joint: 6W <ranch port> Female joint: 6RJ- (with bearing) F Female joint: 6R- F Male joint: - M Welded joint: - W 32

43 OGD*0V MGD0V Dimensions OGD*0V- Safety specification options With locking mechanism Custom order OGD*0V Series MGD*0V Series Manual valve for process gas Handle can be padlocked not to move. () Locked when valve open (2) Locked when valve closed (3) Locked when valve open/closed The following three are available: C Model No. OGD0V- OGD20V C * Contact your CKD representative for details on the model No., etc. Outline drawing MGD0V With double action mechanism MGD0V With locking mechanism Malfunctions are eliminated by pushing and turning the handle (double action). Contact your CKD representative for details on the model No., etc. * Contact your CKD representative for details on the model No., etc. 33

44 Vacuum generator for process gas exhaust VG Series Nozzle diameter: ø0.5 Model No. VG-05F VG-05P O ring material FKM Perfluoroelastomer Energy saving evacuation Compact IN VENT Materials for wetted areas No New nozzle:. Greatly reduces fluid consumption 2. Resists primary pressure fluctuations (Patent pending) Parts name ody Nozzle Spacer Diffuser Diffuser holder O ring Material SUS36L SUS36L SUS36L SUS36L SUS36L FKM or Perfluoroelastomer VC 6 JXR joint connection * IN: /4" JXR male joint VC.: /4" JXR female joint VENT: 3/8" JXR male joint *: The JXR joint can be connected to the VCR joint. Precautions lways read page 9 in the introduction and pages 2 to 3 to ensure correct and safe use of this product. Specifications Descriptions Working fluid Fluid temperature Supply fluid Supply fluid pressure MPa MPa Supply fluid consumption /min(nr) Ultimate vacuum kpa(abs) Discharge rate /min(nr) External leakage Pa m 3 /s(he) Withstanding pressure MPa mbient temperature Port size Weight kg *: t 0.5MPa pressurization (during operation) *2: When working fluid is air VG Inert gas/process gas 0 to 80 Nitrogen, dry air 0.4 to or less * 3.3 or less 6 * * or less 3 0 to 80 IN : /4" JXR male joint (Connectable with VCR joint) VC : /4" JXR female joint (Connectable with VCR joint) VENT: 3/8" JXR male joint (Connectable with VCR joint)

45 Characteristics curve Ultimate vacuum (kpa(abs)) 00 Ultimate vacuum (MPa) Supply pressure 3.3kPa(abs) Supply fluid consumption rate, discharge rate ( /min(nr)) 20 Consumption rate, discharge rate Consumption rate Discharge rate (MPa) Supply pressure VG Series How to order VG 05 F Model No. Nozzle diameter [mm] O ring material Symbol Descriptions Nozzle diameter [mm] 05 ø0.5 O ring material F FKM P Perfluoroelastomer Dimensions VG-05* /4" JXR male joint IN VENT 3/8" JXR male joint 32.5 VC. /4" JXR female joint

46 Diaphragm type extremely small flow rate adjustment valve Piston structure check valve Custom order Diaphragm type extremely small flow rate adjustment valve Wetted areas are all metal: ody (SUS36L) Diaphragm (Ni-Co alloy) Two maximum Cv flow factors are possible: 0.03 and 0.2 Flow reaches to the maximum Cv flow factor when the handle is turned 0 times. Connection The JXR male joint, JXR female joint, and Double-barbed joint are available. Piston structure check valve The valve seat is Kalrez. Other wetted areas using SUS36L Cracking pressure is 23 kpa. Connection The JXR male joint and Double-barbed joint are available. 36

47 Regulator for process gas CONTENTS Precautions 39 PGM 42 37

48 38

49 Component for process gas Safety Precautions lways read before starting use Refer to Intro 9 for the general cautions. Regulator for process gas PGM series WRNING Install a safety device if output pressure exceeding the regulator set pressure may cause damage or faulty operation of peripherals. Design & Selection During use Pipe so fluid flows in the direction of the arrow.. Precautions for use CUTION Completely loosen the pressure adjustment knob counterclockwise (DEC) before supplying gas to the regulator. Gradually open the supply valve inlet so the supply valve can be shut immediately if any abnormal pressure rise or leak occurs. fter supplying inlet pressure, check that no outlets leak. Do not use this component as a shutoff valve. During use, a metallic noise may be heard, and outlet pressure may change violently (vibration). If this occurs, close the inlet supply valve immediately and stop use. 2. Operation methods CUTION Set pressure will increase when the pressure adjustment knob is turned clockwise (INC). If the knob is turned counterclockwise (DEC) while gas is flowing, set pressure drops. The regulator does not have a relief function, so a vent must be provided when gas is not flowing. To decrease pressure: Turn in counterclockwise direction (DEC) 3. Checking for outlet leaks CUTION djusting knob To increase pressure: Turn in clockwise direction (INC) Gradually open the inlet gas supply valve and supply inlet pressure. 2 Close outlet and inlet valves and wait for at least ten minutes. Check whether outlet pressure rises. 3 Turn the pressure adjustment knob clockwise and adjust outlet pressure to within the adjustment pressure range. Wait at least ten minutes after outlet pressure stabilizes and check whether outlet pressure rises. 4 If outlet pressure continues to rise in steps 2 and 3, an outlet leak exists. If an outlet leak is found, discontinue use immediately. leed gas, purge the regulator, then remove and replace it. 4. Checking air-tightness CUTION Regulator inlet Confirm that the regulator pressure adjustment knob is turned completely counterclockwise, then supply clean inert gas (N2, r, etc.) to the regulator inlet. 2 Close the inlet supply valve after inlet pressure stabilizes. 3 If inlet pressure gradually drops from the above state over time, a leak may exist in the regulator. Note that this applies when no outlet leak exists. Regulator outlet Confirm that the regulator pressure adjustment knob is turned completely counterclockwise, then supply clean inert gas (N2, r, etc.) to the regulator inlet. 2 Close the regulator outlet valve and set the pressure with the pressure adjustment knob. 3 Completely close the regulator inlet supply valve after inlet and outlet pressure stabilize. 4 If inlet and outlet pressure both fluctuate greatly from the above state over time, a leak may exist in the regulator outlet. Note that this applies when no outlet leak exists. If a leak is found, discontinue use immediately, and bleed gas. Purge pipes if necessary, then remove and replace the regulator. 39

50 PGM Series High-performance regulator incorporating CKD's abundant experience PGM series Slim body Easy to install, improved knob operability. Sufficient space for harnesses, etc., when IGS is installed Compatible with.25-inch size when IGS is installed Sealing performance Improved valve seat sealing reduces the occurrence of outlet leaks. Clean level compatible with ultra-high-purity gas Poppet sliding sections are reduced to minimize particle generation. Metal seal specifications apply to all screws in wetted areas. Long-life, highly corrosionresistant Hastelloy C-22 R used for diaphragm. Electropolished finish specifications Gas purging considered with reduced internal capacity and optimum flow path design. High anticorrosion grades also available! (Option) IN OUT Vibration measures New vibration prevention guards against vibration. (Patent pending) Flow characteristics Small pressure drop Large flow realized with compact size! Negative pressure control first realized with free poppet. (Patent pending) Low sliding section members ensure smooth operation and reduce hysteresis! Control of extremely small flow Problems due to changes in the MFC output signal for extremely small flows less than several + sccm have been resolved. Flow characteristics PGM-30V,30, Secondary pressure (MPa) P=0.7MPa P=0.5MPa P=0.3MPa PGM-H Secondary pressure (MPa) P=0.7MPa P=0.5MPa P=0.3MPa Flow( /min(nr))(n2) Flow( /min(nr))(n2) PGM Secondary pressure (MPa) P=0.7MPa P=0.5MPa P=0.3MPa PGM-H Secondary pressure (MPa) P=0.7MPa P=0.5MPa P=0.3MPa Flow( /min(nr))(n2) Flow( /min(nr))(n2) 40

51 PGM Series Variety bundant pressure range variations Secondary set pressure(mpa) PGM-30V Flow series 20 /min PGM-30 PGM-50 PGM-00 Flow series 50 /min PGM-H-60 PGM-H-00 Diverse connection variations /4" JXR female joint /4" JXR male joint /4" JXR male female joint /4" JXR female male joint (JXR joint type).5" C seal.5" CS seal.5" W seal.25" C seal.25" W seal ( Circled section shows each integrated valve interface) 4

52 PGM Series Metal diaphragm Model No. Flow series Secondary set pressure PGM-30V 20 /min to 0.2MPa PGM /min 0 to 0.2MPa PGM /min 0 to 0.35MPa PGM /min 0 to 0.7 MPa Model No. Flow series Secondary set pressure PGM-H /min 0 to 0.42MPa PGM-H /min 0 to 0.7 MPa Specifications Descriptions Working fluid Primary maximum working pressure MPa Secondary set pressure MPa Working fluid temperature Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Withstanding pressure MPa mbient temperature Wetted area surface treatment Connection Weight JIS Symbol PGM- 30V PGM-H kg Inert gas/process gas to to to to to to or less or less.5-5 to 40 Electropolished finish Various integrated valve (IGS) interface (PGM-*-, 2, 3, 4, 5) /4" JXR joint (Connectable with VCR) (PGM-*4R, 4RM, 4MF, 4FM) 0.39(PGM-*-4) Flow characteristics Refer to Page 40. Precautions lways read page 9 in the introduction and page 39 to ensure correct and safe use of this product. 42

53 PGM Series How to order PGM H 30 4R S Model No. Flow series Symbol Flow series lank 20 /min Descriptions H 50 /min Secondary set pressure Secondary set pressure Symbol Descriptions PGM PGM-H 30V to 0.2MPa {-0 to 30psi} 30 0 to 0.2MPa {0 to 30psi} 50 0 to 0.35MPa {0 to 50psi} 60 0 to 0.42MPa {0 to 60psi} 00 0 to 0.7MPa {0 to 00psi} C Connection C Connection 4R /4"JXR female joint 4RM /4"JXR male joint 4MF /4"JXR male female joint 4FM /4"JXR female male joint.25" C seal 2.5" C seal 3.5" CS seal 4.5" W seal 5.25" W seal D Option D S Option Poppet: Hastelloy C-22 Spring: Ni-Co alloy *: Listed flows are nominal. Confirm pressure conditions with the flow characteristics graph. *2: There is no gauge port. Internal structure and parts list IN OUT Materials for wetted areas No. Parts name Material ody Diaphragm Sheet Poppet Spring SUS36L Hastelloy C-22 PCTFE SUS36L or Hastelloy C-22 (option) SUS36 or Ni-Co alloy (option) 43

54 PGM Series Dimensions PGM-*-4R (/4"JXR female joint) ø28.6 PGM-*-4RM (/4"JXR male joint) ø28.6 Note: The flow path direction is indicated on the body by arrows. PGM-*- (.25"C seal) ø (MX95) 85(MX95) IN OUT IN OUT (MX09) IN 6.5 OUT M5 depth M5 depth ø4.7 PGM-*-2 (.5"C seal) PGM-*-3 (.5"CS seal) PGM-*-4 (.5"W seal) PGM-*-5 (.25"W seal) ø28.6 ø28.6 ø28.6 ø (MX4) 04(MX4) 04(MX4) 99(MX09) IN OUT IN OUT IN OUT IN OUT ø ø ø ø4.4 44

55 Integrated gas supply system CONTENTS Product guide 46 IGD3 (CS seal) 50 IGD4 (W seal) 60 SEMI F86 and F87 (.25 inch size, C seal) compatible valve 67 45

56 Integrated Gas System Series Integrated gas supply system IGD3/IGD4 Series Custom order Greatly improving space saving and maintenance. Overview This system was developed for use in the gas supply line of semiconductor manufacturing equipment. The SEMI standard surfacemounted air-operated valve and mass flow controller, etc., are integrated compactly. Process gas regulator PGM Series Highly accurate pressure control Gas line expansion is flexibly handled using rails Space saved using blocks with filters Compatible with both CS and W seals * This is a rail product. PT. 46

57 Integrated Gas System Series Main features Existing gas jungle Reduced footprint Footprint 50% of conventional Volume 36% of conventional Improved workability Components can be installed and removed from the top. With the rail model, gas line expansion is handled flexibly. Heating is simplified. Improved reliability CS and W seals are used. Increased corrosion resistance (zero contamination) Welded areas are reduced by 80%. Conventional causes of contamination are greatly reduced by reducing welded areas. Integrated gas supply system Improved purging The flow path is configured with little internal volume and dead volume. Purging is improved. Standardization Standardized components are promoted. 47

58 Integrated Gas System Series History of integrated gas system IGD4 W seal IGD3 CS seal IGD2 CS seal IGD CS seal 48

59 Integrated Gas System Series Flow of integrated gas supply system The layout is based on the user's specifications and flowcharts. Layout Flowchart Layout drawing Parts preparation Device manufacturers and models are selected and prepared based on the user's specifications. Components are positioned with jigs, and the base block is installed. ssembly Integrated devices are installed. ssembly 2 Completion Inspection 49

60 Integrated Gas System Series IGD3 Integrated gas supply system components ir operated valve for IGD3 Specifications Descriptions Working fluid Working pressure range Pa(abs)-MPa Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Cv flow factor Connection Operating pressure MPa NC NO Operating pressure connection port Material ody Diaphragm Sheet MGD3-0 MGD3- Inert gas/process gas to to 80-0 to CS seal (nominal 6.35) 0.4 to to 0.5 M5 SUS36L Ni-Co alloy PCTFE How to order MGD C Series Valve shape Note : Select the G pressurizing direction only when using ()valve O3 or O4. Note 2: Installation bolts, gasket, actuator, and drive air joint are not included, and must be purchased separately. Note 3: Consult with the CKD Sales Office if a valve with air joint for actuator drive is required. C ctuation (V) D ctuation (V2) <Example of model number> E ctuation (V3) MGD3-03-2C- Series: ir-operated valve for IGD3 Valve shape: /8 inch size 3-station block type valve (3-port) C ctuation (V): NC F Check valve D ctuation (V2): NO E ctuation (V3): Without V3 F With check valve G Pressurizing G Pressurizing direction: direction (a)port a pressurizing (for MFC primary side) Symbol Descriptions Series MGD3 ir operated valve for IGD3 Valve shape Cv flow factor C D F 2-station block type valve (3-port) 3-station block type valve (3-port) 4-station block type valve (4-port) -station block C type valve (2-port) -station block D type valve (2-port) -station block F type valve (3-port) C ctuation (V) NC 2 NO 3 NC (with proximity sensor (energized when valve closed)) 4 NO (with proximity sensor (energized when valve opened)) D ctuation (V2) NC 2 NO 3 NC (with proximity sensor (energized when valve closed)) 4 NO (with proximity sensor (energized when valve opened)) E ctuation (V3) NC 2 NO lank No V3 F Check valve C Check valve G Pressurizing direction a port pressurizing (for MFC primary side) b port pressurizing (for MFC secondary side) 50

61 Dimensions MGD3 Series Dimensions -station block 2-station block 3-station block 4-station block MGD3-C MGD3-02-* MGD3-03-C MGD3-04-* C V V3 V V V2 V V2 97 d c a b MGD3-04-C- c c a V V3 V2 d c b MGD3-04-2C- V V3 V2 d a c b MGD3-D a V V2 a c b b a MGD3-03-C- V V2 a c b b MGD3-04-3* C MGD3-03-C- V V2 a c b V V3 V MGD3-02-3* MGD3-03-3* C d c MGD3-F MGD C a a V V3 V2 d c b b V V2 V V V2 c V V3 c 28 c a b a V V2 b d c a a c b b V V2 a c b a c b The check valve direction is reversed for MGD3-O3-3* C-. a a V V3 V2 d c b b 5

62 Integrated Gas System Series IGD3 Components for integrated gas supply system Manual valve for IGD3 Specifications Descriptions Working fluid Working pressure range Pa(abs)-MPa Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Cv flow factor Connection Material ody Diaphragm Sheet MOGD3- Inert gas/process gas to to 80-0 to CS seal (nominal 6.35) SUS36L Ni-Co alloy PCTFE How to order MOGD3 C K S series valve shape C Handle color D Pressurizing direction E Others Symbol series MOGD3 Manual valve for IGD3 Descriptions valve shape C -station block C type valve (2-port) D -station block D type valve (2-port) C Handle color K Handle color lack R Handle color Red Handle color lue Y Handle color Yellow G Handle color Green D Pressurizing direction a port pressurizing b port pressurizing E Others S With handle lock (only when valve is closed) lank No key Note : Installation bolts and gasket are not included, and must be purchased separately. <Example of model number> MOGD3-C-K-S Series: Manual valve for IGD3 Valve shape: -station block C type valve (2-port) C Handle color: lack D Pressurizing direction: a port pressurizing E Others: With handle lock (only when valve is closed) 52

63 MOGD3 Series Dimensions MOGD3-C-* MOGD3-C-* MOGD3-D-* a b b a a b MOGD3-C-K-S MOGD3-F-* MOGD3-F-* c c 20 8 a b b a a b a c b b c a 53

64 Integrated Gas System Series IGD3 Components for integrated gas supply system Flow adjusting valve for IGD3 Specifications Descriptions Working fluid Working pressure range Pa(abs)-MPa Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Cv flow factor (max.) Connection Material ody Diaphragm * The product has a cover. MFGD3-D- MFGD3-D-4 Inert gas/process gas to to 80-0 to 80 /00 or less of maximum Cv flow factor CS seal (nominal 6.35) SUS36L Ni-Co alloy How to order Dimensions MFGD3 D MFGD3-D 39 series Symbol Descriptions series MFGD3 Flow adjusting valve for IGD3 26 valve shape valve shape D -station block D type valve (2-port) 30 C Cv flow factor (max.) C Cv flow factor (max.) Cv flow factor (max.) Cv flow factor (max.) 0.2 Note : Installation bolts and gasket are not included, and must be purchased separately. <Example of model number> MFGD3-D- Series: Flow adjusting valve for IGD3 Valve shape: -station block D type valve (2-port) C Cv flow factor (max.):

65 Integrated Gas System Series IGD3 Components for integrated gas supply system Check valve for IGD3 Specifications Descriptions Working fluid Working pressure range Pa(abs)-MPa Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Cv flow factor (max.) Connection Material ody Sheet Spring Gasket MCGP3-0D Inert gas/process gas to to 80-0 to CS seal (nominal 6.35) SUS36L Kalrez SUS36-WP PTFE How to order MCGP3 0D 023 K Dimensions MCGP3-0D-023-K Series Shape -station block D type valve (2-port) ( ) C Cranking pressure (2.3kPa) D Sheet material (Kalrez) Note : Installation bolts and gasket are not included, and must be purchased separately. <Example of model number> MCGP3-0D-023-K Series: Check valve for IGD3 Shape: -station block D type valve (2-port) C Cranking pressure: 2.3kPa D Sheet material: Kalrez

66 Integrated Gas System Series IGD3 Components for integrated gas supply system Other components for IGD3 Gasket set (2 hexagon socket head cap bolts, C-ring, gasket retainer) Material C ring: SUS36L, SUS304-WP (Non-wetted area) Gasket retainer: SUS304 Hexagon socket head cap bolt: SCM435 (Special treatment) Name Gasket set (olt length 6 mm) Gasket set (olt length 20 mm) Gasket set (olt length 30 mm) Gasket set (olt length 35 mm) Gasket set (olt length 40 mm) Gasket set (olt length 45 mm) Model No. IGD3-SEL IGD3-SEL-L20 IGD3-SEL-L30 IGD3-SEL-L35 IGD3-SEL-L40 IGD3-SEL-L45 Note : The required number of gasket sets is determined by the number of CS seals. Note 2: Contact CKD for details on applicable parts. pplicable parts MGD3-C MGD3-D MOGD3-C MOGD3-D MFGD3-D MCGP3 MGD3-F MGD3-02 MOGD3-03 MOGD3-04 ypass block (for 26 mm pitch between surfaces) ypass piping block (for 79.8 mm pitch between MFC surfaces) Sealing flange SEC-7330* -* -792(STEC MFC) SEC-7340* -* -792(STEC MFC) SEC-F730* -* -792(STEC MFC) SEC-F740* -* -792(STEC MFC) SEC (STEC MFC) FC-785X* (EJ MFC) FC-795* T-(EJ MFC) FC-D985* T-(EJ MFC) FC-D985* Y-(EJ MFC) FC-985* T-(EJ MFC) FC-985* Y-(EJ MFC) IFLOW FC* SS CS SELD9-T(Mykrolis MFC) FC-2979(Mykrolis MFC) SEC-7350* -* -792(STEC MFC) SEC-7355* -* -792(STEC MFC) SEC-F750* -* -792(STEC MFC) FC-785* T-(EJ MFC) FC-785* Y-(EJ MFC) FC-786* T-(EJ MFC) FC-786* Y-(EJ MFC) FC-796* T-(EJ MFC) FC-D986* Y-(EJ MFC) FC-986* T-(EJ MFC) FC-986* Y-(EJ MFC) each: Installer set, torque wrench, hexagon wrench bit Maintenance tool ( with magnet, hexagon wrench ball bit, extension bar ) Name Maintenance tool set See the Instruction Manual for details on use. Model No. IGD3-MINTENNCE 56

67 IGD3 Series Other components Top mount block ypass block (for 26 mm pitch between surfaces) ypass piping block (for 79.8 mm pitch between MFC surfaces) Sealing flange ase block Mount base - Mount base E-5 Mount base F

68 Integrated Gas System Series IGD4 Components for integrated gas supply system ir operated valve for IGD4 Specifications Descriptions Working fluid Working pressure range Pa(abs)-MPa Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Cv flow factor Connection Operating pressure MPa NC NO Operating pressure connection port Material ody Diaphragm Sheet MGD4-0 MGD4- Inert gas/process gas to to 80-0 to W seal (nominal 6.35) 0.4 to to 0.5 M5 SUS36L Ni-Co alloy PCTFE How to order MGD4 02 W 2 Series Valve shape C Seal shape D ctuation (V) E ctuation (V2) <Example of model number> MGD4-02-W-2 Series: ir operated valve for IGD4 Valve shape: 2-station block D type valve (3-port) C Seal shape: W seal (nominal 6.35) D ctuation (V): NC E ctuation (V2): NO Symbol MGD4 MGD4 Series Descriptions ir operated valve for IGD4 ir operated valve for IGD4 (Upgraded version type, MGD4-D only) Valve shape 0D -station block D type valve (2-port) 0X -station block X type valve (3-port) 0Y -station block Y type valve (3-port) 02 2-station block type valve (3-port) D -station block D type valve (2-port) C D Seal shape W W seal (nominal 6.35) ctuation (V) Note : Installation bolts, gasket, actuator, and drive air joint are not included, and must be purchased separately. Note 2: Consult with the CKD Sales Office if a type with installation bolts is required. Cv flow factor NC NO NC (with proximity sensor (energized when valve closed)) NO (with proximity sensor (energized when valve opened)) NC (with proximity sensor (energized when valve opened)) NO (with proximity sensor (energized when valve closed)) E ctuation (V2) NC 2 NO 3 NC (with proximity sensor (energized when valve closed)) 4 NO (with proximity sensor (energized when valve opened)) 5 NC (with proximity sensor (energized when valve opened)) 6 NO (with proximity sensor (energized when valve closed)) 58

69 MGD4 Series Dimensions Dimensions -station block MGD4-0D 26 3 (With proximity sensor) MGD4-0X (With proximity sensor) b a c b a c (24.2) b (2.9) 02.7 (37.9) a c b a c MGD4-0Y (With proximity sensor) MGD4-D (With proximity sensor) a c a c b b b b a c a c 2-station block MGD (With proximity sensor) b V V b V V (47.7) (37.9) a c a c b b a c a c 59

70 Integrated Gas System Series IGD4 Components for integrated gas supply system Manual valve for IGD4 Specifications Descriptions Working fluid Working pressure range Pa(abs)-MPa Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s(he) External leakage Pam 3 /s(he) Cv flow factor Connection Material ody Diaphragm Sheet MOGD4-0 MOGD4- Inert gas/process gas to to 80-0 to W seal (nominal 6.35) SUS36L Ni-Co alloy PCTFE How to order MOGD4 D W K S Series Valve shape C Seal shape D Handle color E Others Symbol Descriptions Series MOGD4 Manual valve for IGD4 Valve shape D -station block D type valve (2-port) 0X -station block X type valve (3-port) 0Y -station block Y type valve (3-port) C Seal shape W W seal (nominal 6.35) D Handle color K Handle color lack R Handle color Red Handle color lue Y Handle color Yellow G Handle color Green E Others S With handle lock (only when valve is closed) lank No key Note : Installation bolts and gasket are not included, and must be purchased separately. Note 2: Consult with the CKD Sales Office if a type with installation bolts is required. Cv flow factor <Example of model number> MOGD4-D-W-K-S Series: Manual valve for IGD4 Valve shape: -station block D type valve (2-port) C Seal shape: W seal (nominal 6.35) D Handle color: lack E Others: With handle lock (only when valve is closed) 60

71 Dimensions MOGD4 Series Dimensions MOGD4-0D MOGD4-0X MOGD4-D-W-* MOGD4-D-W-* -S (25) b a c b a c 6

72 Integrated Gas System Series IGD4 Components for integrated gas supply system Flow adjusting valve for IGD4 Specifications Descriptions Working fluid Working pressure range Pa(abs)-MPa Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Cv flow factor (max.) Connection Material ody Diaphragm * The product has a cover. MFGD4-D-W- MFGD4-D-W-4 Inert gas/process gas to to 80-0 to 80 /00 or less of maximum Cv flow factor W seal (nominal 6.35) SUS36L Ni-Co alloy How to order Dimensions MFGD4 D W MFGD4 39 Series Symbol Descriptions Series MFGD4 Flow adjusting valve for IGD4 26 Valve shape Valve shape D -station block D type valve (2-port) 30 C Seal shape C Seal shape W W seal (nominal 6.35) D Cv value (max.) D Cv flow factor (max.) Cv flow factor (max.) Cv flow factor (max.) 0.2 Note : Installation bolts and gasket are not included, and must be purchased separately. Note 2: Consult with the CKD Sales Office if a type with installation bolts is required. <Example of model number> MFGD4-D-W- Series: Flow adjusting valve for IGD4 Valve shape: -station block D type valve (2-port) C Seal shape: W seal (nominal 6.35) D Other: Cv flow factor (max.)

73 Integrated Gas System Series IGD4 Components for integrated gas supply system Check valve for IGD4 Specifications Descriptions Working fluid Working pressure range Pa(abs)-MPa Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Cv flow factor (max.) Connection Material ody Sheet Spring Gasket MCGP4-0D MCGP4-F Inert gas/process gas to to 80-0 to W seal (nominal 6.35) SUS36L Kalrez SUS36-WP PTFE How to order Dimensions MCGP4 0D W 023 K MCGP4-0D MCGP4-F* 39 E Sheet material 26 8 Series Symbol Descriptions Series MCGP4 Check valve for IGD Shape C Seal shape Shape 0D -station block D type valve (2-port) F Flow direction JXR joint side to W seal side F2 Flow direction W seal side to JXR joint side C W L Seal shape W seal (nominal 6.35) /4 inch JXR male joint D Cracking pressure D Cracking pressure 023 Cracking pressure 2.3 kpa E Sheet material K Sheet material Kalrez Note : Installation bolts and gasket are not included, and must be purchased separately. Note 2: Consult with the CKD Sales Office if a type with installation bolts is required /4 inch JXR male <Example of model number> MCGP4-0D-W-023-K Series: Check valve for IGD4 Shape: -station block D type valve (2-port) C Seal shape: W seal (nominal 6.35) D Cracking pressure: 2.3 kpa E Sheet material: Kalrez 63

74 Integrated Gas System Series IGD4 Components for integrated gas supply system Other components for IGD4 Specifications Descriptions Working fluid Filtration m Particle trapping rate Maximum working pressure MPa Fluid temperature External leakage Pa m 3 /s(he) Connection Materials for wetted areas Inert gas/process gas Particles m or larger: % and over (at 30 /min) to W seal (nominal 6.35) SUS36L Features Dimensions Performance equivalent to top mounted filter. Outstanding gas replacement and dry down characteristics. Space saving (Entire length of the integrated unit can be shortened.) Flow characteristics Primary pressure P = 0.2 MPa (references data) Pressure loss (MPa) Flow rate ( /min) 20 * Contact the CKD Sales Office for details on the model, etc. 64

75 Integrated Gas System Series IGD4 Components for integrated gas supply system Other components for IGD4 Gasket Name W seal gasket (nominal 6.35) Model No. IGD4-UGF-6.35GR W seal mounting bolt Name Hexagon socket head cap bolt for W seal (M5 X 2, 4 pieces) Hexagon socket head cap bolt for W seal (M5 X 35, 4 pieces) Hexagon socket head cap bolt for W seal (M5 X 40, 4 pieces) Hexagon socket head cap bolt for W seal (M5 X 43, 4 pieces) Contact CKD for details on applicable parts. Model No. IGD4-OLT-M5 2-4 IGD4-OLT-M IGD4-OLT-M IGD4-OLT-M pplicable parts MGD4-0D MGD4-D MOGD4-D MFGD4-D MCGP4-0D MCGP4-F* ypass block (for 26 mm pitch between surfaces) ypass piping block (for 79.8 mm pitch between MFC surfaces) Sealing flange SEC-G* -W-.5 (STEC MFC) MGD4-0X MGD4-02 MOGD4-0X FC-785(EJ MFC) FC-786(EJ MFC) FC-985(EJ MFC) SEC-7330* -800(STEC MFC) SEC-7340* -800(STEC MFC) SEC-F730* -800(STEC MFC) SEC-F740* -800(STEC MFC) SEC-7350* -800(STEC MFC) SEC-F750* -800(STEC MFC) FC-986(EJ MFC) Maintenance tool ( each: torque driver, torque driver bit, tweezers (gasket mounting tool)) Name Model No. Maintenance tool set IGD4-MINTENNCE See the Instruction Manual for details on use. 65

76 IGD4 Series Other components Top mount block y-pass block (For 26 mm pitch between surfaces) y-pass piping block (For 79.8 mm pitch between MFC surfaces) Sealing flange (55.4) ase block ase block (20.6 mm between surfaces) ase block 5 (4.0 mm between surfaces) 26 4 /4 inch JXR male flange /4 inch JXR male

77 Integrated Gas System Series Components for integrated gas supply system SEMI F86, F87 (.25-inch size, C seal) compatible air-operated valve, manual valve Specifications Descriptions Working fluid Working pressure range Pa(abs)-MPa Fluid temperature Working ambient temperature Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Wetted area surface treatment Connection MGD MMGD Inert gas/process gas to to to or less or less Electropolished finish specifications SEMI F86, F87 compatible Features Cv= 0.3 realized with.25 inch compact body. Outstanding valve sealing Push-in joint for /8-inch tubing integrated in actuator operation port. (ir-operated valve) LOTO mechanism integrated to prevent incorrect operation (manual valve) 67

78 68

79 Other gas components CONTENTS Precautions 70 Inline clean filter FCS 72 Clean regulator RC

80 Other gas components Safety Precautions lways read before starting use Inline clean filter FCS Series Design & Selection WRNING Use within the product's specific specification range. Do not use this product in an atmosphere containing organic solvents or chemicals, etc., or where these may come in contact with the product. Failure to observe this may damage the polyamide housing. Use stainless steel in these environments. This product is for industrial use and not for use in devices or circuits for medical equipment or devices that involve human life. CUTION Confirm the working circuit and working fluid. Install a dryer, air filter, or oil mist filter on the primary side to remove any moisture and oil and to prevent filter performance from being compromised. Do not exceed the maximum working pressure or maximum pressure difference. Failure to observe this may damage the product or element membrane. Do not let fluids exceed the maximum flow. Failure to observe this may cause filtration to drop or damage the element membrane. This device cannot be used as an absolute filter. Filtration is 99.99% within specified conditions. Installation & djustment CUTION Open the product in a clean room. The product is packaged in a clean room, and should be opened just before piping it in the clean room. void installing this product where it may be subjected to direct sunlight. Flush and clean pipes before use. ny dirt or foreign matter in piping decreases product performance. Check that foreign matter does not enter when screwing in pipes or joints. Check that pipe thread swarf or sealing agent does not enter when screwing in pipes or joints. Product performance may decrease if there is dirt or foreign matter in piping. Confirm the flow direction indicated by the arrow and connect the product correctly. Product life is shortened if installed reversed. Pipe so that excessive force is not applied to the product. Check that force such as pulling, compression, bending, or external force from the tube is not applied to the product when piping or installing. Use appropriate piping tubing. Use CKD soft nylon or urethane tubing. Consult with CKD regarding the use of fluorine resin tubing, etc. Insert piping tubing securely into the push-in joint before use. void installing where vibration or impact is present. Use the connection's width across flats when piping. When connecting R thread or Rc thread piping, place a wrench across the connection's width across flats, then pipe. void fixing the connection in other places.tighten pipes with the appropriate torque. Tighten pipes with the appropriate torque. Set screw Tightening torque N m M5 to.5 Rc/8, R/8 3 to 5 Rc/4, R/4 6 to 8 Rc3/8, R3/8 3 to 5 Do not supply sudden high pressure when supplying compressed air the first time after connecting pipes. The connected pipe may be dislocated and piped tubing may come off. During use & Maintenance CUTION Performance may decrease if the filter element is clogged. Regularly inspect and replace the element. Inspect regularly for cracks, scratches, and other deterioration in the clear resin. Cracks, scratches, and other deterioration may result in damage. Replace with a new part or SUS. Do not disassemble or modify the product. Stop the fluid supply and confirm that there is no residual pressure before maintenance. Read instructions and precautions included with the product before use or maintenance. Check that vibration, impact, and external force caused by vibrating tubing is not applied to the product during use. 70

81 Other gas components Safety Precautions lways read before starting use Refer to Intro 9 for the general cautions. Clean regulator RC2000 Series Design & Selection WRNING Use within the product's specific specification range. Install a safety device where an output pressure exceeding the regulator's set pressure value could result in damage or faulty operation of secondary side devices. CUTION Check the working circuit and working fluid. Malfunctions may result if fluids containing solids or not specified fluids flow. Connect a filter to the primary side of the product to prevent the entry of solid matter. The line may vibrate depending on work and piping conditions. Lower primary pressure if the line vibrates. Secondary pressure flows to the primary side when primary pressure is released. Other devices may malfunction if secondary fluids flow to the primary side. Provide a circuit that maintains the pressure. Set secondary side pressure of the regulator to 85% or less of the primary side, or else the pressure drop could increase. Installation CUTION Open the product in a clean room. This product is packed in a double layer in a clean room. Open the first layer, and take the product into the clean room. Open the second layer just before piping. Flush and clean pipes before use. ny dirt or foreign matter in piping decreases product performance. Check that foreign matter does not enter when screwing in pipes or joints. Check that pipe thread swarf or sealing agent does not enter when screwing in pipes or joints. Product performance may decrease if there is dirt or foreign matter in piping. Confirm the flow direction indicated by the arrow and connect the product correctly. The RC2000 does not function correctly if installed reversed. Tighten pipes with the appropriate torque. (Right table is recommended torque) Set screw M5 Rc/8 Rc/4 Rc3/8 Rc/2 Tightening torque N m.0 to.5 3 to 5 6 to 8 3 to 5 6 to 8 Sufficient maintenance space Ensure sufficient space for maintenance and inspection. Plug the pressure gauge connection port using the pressure gauge and pipe plug. void installing where vibration or impact is present. If nuts for panel installation are loosened, nuts function as a jack making it easier to remove the knob. When installing the knob, install nuts first. During use & Maintenance CUTION Release the lock before adjusting pressure. Operating the pressure adjustment knob while locked may result in damage. djust pressure in the direction of pressure rise. Pressure cannot be set correctly if adjusted downward. Non-relief pressure cannot be reduced unless secondary pressure is consuming pressure. Read instructions and precautions included with the product before use or maintenance. 7

82 Inline clean filter FCS500 Series Port size: Rc/8, Rc/4, R/8, R/4 Push-in joint ø4, ø6, ø8 Specifications Descriptions Working fluid IN side diameter (*) OUT side diameter (*2) Withstanding pressure MPa Withstanding differential pressure MPa Working pressure range MPa Working temperature range Filtration rating Treating flow rate /min (NR) Note Product mass g ody Material Case Element ssembly/inspection/packing Cleaning JIS symbol Standard element resin type Male thread pipe type P9 element stainless steel type FCS500-(*)(*2) Selection from ø4, ø6, ø (0.2 for 45 to 50 ) to 0.99 Note 2 5 to (80 for H8H8 type) 45 Polyamide Transparent polyamide FCS500-(*)(*2) Compressed air, nitrogen Selection from ø4, ø6, ø8, R/8, R/4 FCS P90 FCS P94 Rc/8 Rc/8 FCS P90 FCS P94 Rc/4 Rc/ (0.2 for 45 to 50 ) 2.25 (compressed air),.5 (nitrogen) to 0.99 Note 2 5 to to.5 (compressed air), to 0.99 (nitrogen) 5 to (removal efficiency 99.99%) 50 (80 for H88, 8H8 type) 45 Polyamide, aluminum (alumite treatment) Transparent polyamide Polypropylene + urethane Integrated manufacture in clean room Degreasing and cleaning Stainless steel Stainless steel Note : Initial flow at 0.7 MP primary pressure and 0.03 MPa pressure decrease. Note 2: Maximum working pressure differs with based on the working temperature. Check the maximum with the graph showing the relationship of the working temperature and maximum working pressure. Max. working pressure (MPa) Relationship of working temperature and maximum working pressure for the resin element and male thread piping filter Usable range Temperature ( ) Not available Flow characteristics FCS500-H8H8 FCS500-H88 FCS500-8H8 FCS P90 P94 0. Pressure loss (MPa) MPa ir flow rate (m 3 /min [NR]) MPa 0.MPa 0.3MPa 0.5MPa MPa MPa MPa FCS500-H4H4 FCS500-H6H6 FCS500-H46 Pressure loss (MPa) FCS P90 P94 (products including ø4, ø6 joint, R/8, Rc/8 connection.) ir flow rate (m 3 /min [NR]) 72

83 FCS500 Series How to order How to order Resin type FCS500 H4 H4 Model No. (Clean room specifications) (Oil-prohibited specifications) IN side port size OUT side port size IN side port size H4 ø4 H6 ø6 H8 ø8 6 R/8 8 R/4 OUT side port size H4 ø4 H6 ø6 H8 ø8 6 R/8 8 R/4 Note : Two set screws (M2.5x25) and two flat washers are included with the product. These are not included when 6 or 8 is selected for the IN or OUT connection bore size. Note 2: When using male thread piping for both IN and OUT sides, check that piping does not apply lateral load or bending torque when installing. Stainless steel type FCS P90 Model No. (Clean room specifications) (Oil-prohibited specifications) Port size ttached Port size 66 IN side/out side port size Rc/8 88 IN side/out side port size Rc/4 ttached lank None racket, set screw C Clean room specifications C Clean room specifications Structure/treatment Use of stainless steel, P90 oil treatment prohibited Use of stainless steel, P94 oil treatment prohibited Material restriction Copper-based, silicon-based, halogen-based (Fluorine, chlorine, oxalic) unacceptable. Note: "P94" is custom order. racket discrete model No. FCS500- (One bracket, 2 set screw (M4 X 6)) 73

84 FCS500 Series Internal structure and parts list Resin type IN OUT Stainless steel type 2 IN OUT 4 5 Parts list No Element Parts name ody Housing Filter Potting material Pin Pin O ring Cartridge joint Standard element resin type Polyamide Transparent polyamide Polypropylene Urethane Fluoro rubber rass (nickeling) Nitrile rubber Male thread pipe type Polyamide luminum (alumite treatment) Transparent polyamide Polypropylene Urethane Stainless steel Stainless steel P9*element stainless steel type Stainless steel Stainless steel Polypropylene Urethane Fluoro rubber (for clean room specifications P90) Nitrile rubber (for specifications P94) 74

85 Dimensions Resin type Port size IN side (cartridge joint) - OUT side (cartridge joint) Male thread pipe type Port size Cartridge joint - male thread FCS500 Series Dimensions IN side Port size ø4 ø6 ø8 OUT side port size ø4 ø6 ø8 2 Port size ø4 ø6 ø8 Port size R/8 R/4 25 IN OUT 20 IN (OUT) OUT (IN) ø8 23 ø8 4.6 Port size Male thread - male thread IN side port size R/8 R/4 OUT side port size R/8 R/4 25 IN OUT 23 ø8 Model No. Port size model No. dimension H4H FCS500 (standard element, resin type/male thread pipe type) H4H6 H6H4 83 H4H8 H8H4 84 H46 6H H48 H86 6H8 8H H6H6 85 H6H8 H8H6 86 H66 6H6 72 H68 8H H8 H88 76 H8H8 87 Stainless steel type IN side Port size Rc/8 Rc/ OUT side Port size Rc/8 Rc/4 ø2 IN OUT ø4.5 75

86 Inline clean filter FCS000 Series Port size: Rc/4, Rc3/8, R/4, R3/8 Push-in joint ø8, ø0, ø2 Specifications Descriptions Working fluid IN side diameter (*) OUT side diameter (*2) Withstanding pressure MPa Withstanding differential pressure MPa Working pressure range MPa Working temperature range Filtration rating Treating flow rate /min (NR) ody Material Case Element ssembly/inspection/packing Cleaning JIS symbol Resin type FCS000-(*)(*2) Select from push-in joint ø8, ø0, ø2, R/4, R3/8, Rc/4, Rc3/ to 0.99 Polyamide Transparent polyamide Stainless steel type (custom order) FCS000-(*)(*2)-P90 FCS000-(*)(*2)-P94 Compressed air, nitrogen Select from Rc/4, Rc3/ (compressed air),.5 (nitrogen) to.5 (compressed air), to 0.99 (nitrogen) 5 to (removal efficiency 99.99%) 300 to 400 Note Polypropylene + urethane Integrated manufacture in clean room Degreasing and cleaning Stainless steel Stainless steel Note : Initial flow at 0.7 MPa primary pressure and 0.03 MPa pressure decrease. (This varies based on connection bore size.) Flow characteristics FCS000-H8H8 FCS Pressure loss (MPa) P=0. FCS000-H0H0 FCS000-H2H2 FCS FCS FCS FCS P90/P94 FCS P90/P94 P=0.3 P=0.5 P=0. P=0.3 P=0.5 P=0.7 P=0. P=0.3 P=0.5 P= P= Pressure loss (MPa) Pressure loss (MPa) ir flow rate (m 3 /min [NR]) ir flow rate (m 3 /min [NR]) ir flow rate (m 3 /min [NR]) 76

87 How to order Resin type FCS000 H8 H8 FCS000 Series How to order Model No. (Clean room specifications) (Oil-prohibited specifications) FCS000 IN side port size OUT side port size Stainless steel type (custom order) 8 8 P90 IN side port size H8 ø8 H0 ø0 H2 ø2 8 R/4 0 R3/8 8 Rc/4 0 Rc3/8 OUT side port size H8 ø8 H0 ø0 H2 ø2 8 R/4 0 R3/8 8 Rc/4 0 Rc3/8 Note : Two set screws (M3x40), two flat washers, and two spring washers are included with the product. Model No. (Clean room specifications) (Oil-prohibited specifications) IN side port size OUT side port size C Clean room specifications IN side port size 8 Rc/4 0 Rc3/8 OUT side port size 8 Rc/4 0 Rc3/8 C Clean room specifications Structure/treatment Use of stainless steel, P90 oil treatment prohibited Use of stainless steel, P94 oil treatment prohibited Material restriction Copper-based, silicon-based, halogen-based (fluorine, chlorine, oxalic) unacceptable. Element for replacement model No. (One element, two O-lings) For resin type : FCS000-E Stainless steel type For P90 : FCS000-E-P90 (custom order) For P94 : FCS000-E-P94 (custom order) 77

88 FCS000 Series Internal structure and parts list Resin type Stainless steel type Parts list No. Parts name Resin type Stainless steel type Element Housing Filter Potting material ody Plug O ring Cartridge joint (Port size ø8, ø0, ø2) daptor (Port size Rc/4, Rc3/8, R/4, R3/8) Transparent polyamide Polyamide Polyamide Nitrile rubber rass (nickeling) Nitrile rubber luminum (lumite treatment) Polypropylene Urethane Stainless steel Stainless steel Fluoro rubber (for clean room specifications P90) Nitrile rubber (for clean room specifications P94) Stainless steel 78

89 FCS000 Series Dimensions Dimensions Resin type 86 IN OUT Set screw (M3 40) 6.6 Push-in joint (ø8, ø0, ø2) Rc screw (Rc/4, Rc3/8) Port size ø8 ø0 ø2 Port size Rc/4 Rc3/ R screw (R/4, R3/8) Port size R/4 R3/8 23 Connection model No. H8 H0 H2 Port size ø8 push-in joint ø0 push-in joint ø2 push-in joint ø7.5 ø7.5 ø R/ R3/ Rc/4 0 Rc3/8 Stainless steel type IN side port size Rc/4 Rc3/ OUT side port size Rc/4 Rc3/8 IN OUT 23 ø

90 FCS Series Example of applications and working circuits pplication. Use as a precision filtration filter to filter air and N2 gas and provide clean air. For air Inline clean filter FCS pplication 2. Use a vacuum break filter to flush the vacuum break circuit and provide clean air. Vacuum ir dryer SD For nitrogen ir filter F3000 Oil mist filter M3000 Clean regulator RC2000 ir operated valve MD 3 port valve Inline clean filter FCS Particle occurrence data * See the catalogs below for products listed on working circuit. [Pneumatic, Vacuum and uxiliary Components] (Catalog No.C-024S) [High Purity Chemical Liquid System Component] (Catalog No.C-03) Pneumatics sources Pre-filter (5 m) Oil mist filter Regulator 2 port solenoid valve 2 port solenoid valve Vacuum pump Particle counter Measuring chamber Particle counter Vacuum pump Particle occurrence is detected from the regulator and 2-port solenoid valve, etc. Particle number (Total number more than 0. m) [Piece/min] Valve operational cycle [time] Particles generated at the regulator and 2-port solenoid valve, etc., are removed by FCS. Regulator FCS Measuring chamber Particle number (Total number more than 0. m) [Piece/min] Particle number "0" Valve operational cycle [time] 80

91 Custom order These products are custom-made. Contact the CKD Sales Office for details. FCS500 FCS500 Integrated connection type This integrated connection has no sealed members and is perfect for leakage testers. Flow rate: 0 /min (NR) * Port size : R/8 FCS500 large flow rate type FCS500 Series increased flow specifications Flow rate: 00 to 20 /min (NR) * Port size : ø6, ø8 push-in joint, R/8, R/4 FCS500 FCS500 L type joint type Elbow type push-in joint reduces space when piping. Flow rate: 50 to 80 /min (NR) * Port size : ø4, ø6, ø8 L type push-in joint FCS000 stainless steel large flow rate type Flow rate: 500 /min (NR) * Port size : Rc/4, Rc3/8 * Initial flow at 0.7 MPa primary pressure and 0.03 MPa pressure decrease. Contact the CKD Sales Office for other connections and bore sizes. 8

92 Clean regulator RC2000 Series Port size: Rc/4, R3/8, R/2 Specifications Model No. RC P90 RC P90 RC P90 Working fluid Max. working pressure MPa Withstanding pressure MPa Working temperature range Set pressure range MPa Port size (IN/OUT) Pressure gauge port size Product mass kg Metal Wetted areas materials Resin Rubber ssembly/inspection/packing Cleaning (wetted areas) JIS symbol Overview The stainless steel RC2000 Series has specifications prohibiting oil, making this suitable for controlling the pressure of clean air and N2 used in semiconductor manufacturing and liquid crystal equipment. This regulator is also suitable for air (N2) exhaust because it is compact and accommodates a large flow. Features Specifications prohibiting oil ll parts are precisely cleaned (wetted) and are integrally produced from assembly to packaging in a clean room. No grease is used in wetted areas. Compact with large flow large flow of 0.8 m 3 /min is realized with a compactness of 50 mm face to face. (Flow at 0.7 MPa primary pressure, 0.5 MPa set pressure, 0. MPa pressure decrease) Reversible when back pressure is not applied Secondary pressure is reversed to the primary side when primary pressure is purged. This safety-oriented product leaves no pressure on the secondary side. Compressed air, nitrogen.0 (0.5 for low pressure).5 5 to 60 Standard: 0.05 to 0.7 Low pressure: 0.02 to 0.2 Note Rc/4 Rc3/8 Rc/ Rc/ SUS36 PTFE FKM Integrated manufacture in clean room Precision cleaning 0.59 Note : When using the standard with a set pressure of 0.4 MPa or less, check that the primary pressure difference for the set pressure is within 0.5 MPa. When using the low pressure type, check that the primary pressure difference for the set pressure is within 0.3 MPa. How to order RC LN GY493E P90 C D 82 Model No. (Clean room specifications) (Oil-prohibited specifications) Port size 8 Rc/4 0 Rc3/8 5 Rc/2 (Custom order) Option Note Pressure range Note 2 Relief mechanism lank L lank N 0.05 to 0.7MPa 0.02 to 0.2MPa Relief type Non-relief type C ttachment (attached) Note, 3 lank GY49 No attachments Pressure gauge (G49D-6- -P94) GZ49 Pressure gauge (G49D-6- -P90) 3 L type bracket E Joint (for exhaust treatment) D Clean room specifications Treatment Use of stainless steel, P90 oil treatment prohibited Note : When selecting multiple options or adjustments, indicate the model symbol in order from the top. If there is no symbol for the option or attachment, delete the hyphen "-". Example: RC P90 Note 2: If "No symbol" is selected for the pressure range, the.0 MPa pressure gauge (pressure gauge model: G49D-6-P0-P9*) is used. If "L" is selected for the pressure range, the 0.2 MP pressure gauge (pressure gauge model: G49D-6-P02-P9*) is used. Note 3: Two pipe plugs (R/8) are included with the product. If a pressure gauge is selected as an attachment, one plug is included.

93 Flow characteristics RC P90 Secondary pressure (MPa) Primary pressure 0.7MPa ir flow rate m 3 /min (NR) RC P90 Secondary pressure (MPa) RC2000 Series Flow characteristics Primary pressure 0.7MPa ir flow rate m 3 /min (NR) RC P90 Secondary pressure (MPa) Primary pressure 0.7MPa ir flow rate m 3 /min (NR) Flow characteristics (low pressure) RC2000-*-L-P90 Secondary pressure (MPa) Primary pressure 0.3MPa ir flow rate m 3 /min (NR) Pressure characteristics Secondary pressure (MPa) Secondary side flow rate 25L/min Set pressure 0.2MPa Set point Primary pressure MPa Internal structure and parts list IN OUT No Parts name Cover Pressure adjusting screw assembly Spring Diaphragm Valve O ring Plate Screw Knob Mounting nut ody ottom cap ottom rubber Spring Material (treatment) P66 Steel, SUS, FKM, POM Steel SUS36, FKM, SUS303 SUS36, FKM FKM SUS304 Steel (nickel plating) POM Zinc die casting (nickel plating) SUS36, FKM, PTFE SUS36 FKM SUS36 * mesh filter is installed on the IN side of RC P90 and RC P90. 83

94 RC2000 Series Dimensions 32 Panel cut dimension Panel plate thickness: Max. 4mm ttachment (Joint: for exhaust treatment) ø3 38 Pressure gauge port size 2-Rc/8 IN 2 OUT F C D E 3 Dimension when operating knob 59 ttachment (Pressure gauge) 36 ttachment (L type bracket) Exhaust treatment port size M5 Port size 2- Model No. RC RC RC Rc/4 Rc3/8 Rc/ C D E F 2 23 ttachment L type bracket (-3) Part model No. : RC Joint (-E) Part model No. : RC2000-E 7 (opposite side of hexagon) M5 0.8 Tube O.D. ø6 Model No. Working fluid Fluid temperature mbient temperature pplicable tube RC2000-E Compressed air, nitrogen 5 to 60 5 to 60 Urethane tube ø9 Item Metal part Rubber part Material (treatment) rass (nickeling) NR 84

95 Pressure gauge Specifications Model No. G49D-P9* Working fluid Fluid temperature mbient temperature Compressed air, nitrogen 5 to 60 5 to 60 ccuracy Note JIS class 3 equivalent ( 3%FS) Shape Display section diameter ourdon tube DT type (back side screw, stock section 4 squares) ø43 SUS36 Material Stock SCS4 (SUS36 equivalent) Housing Steel (chrome plated) Lens Pressure range MPa Glass 0 to to.0 Port size R /8 Weight g 90 Note : The indication accuracy guaranteed temperature is How to order G49D 6 P02 P90 Model No. G49D Pressure gauge Dimensions Port size 6 R/8 D Clean room specifications Structure/treatment P90 Use of stainless steel, oil treatment prohibited P94 Use of stainless steel, oil treatment prohibited P90 is clean assembly/clean packing. P94 is clean packing RC2000 Series Pressure gauge C Pressure display (MPa) P02 0 to 0.2 P0 0 to Material restriction Copper-based, silicon-based, halogen-based (fluorine, chlorine, oxalic) unacceptable. R/8 ø43 ø2 hole 85

96 86

97 High vacuum components CONTENTS Precautions 88 ir operated valve for high vacuum V*V 92 V**3 96 V**2 00 V* Custom order 06 VP**2 2 Manual valve for high vacuum MV*0 8 MVP*0 20 Leak valve (Vacuum break valve) FGL/2 22 High vacuum solenoid valve HV2 26 HV4 28 HV5/6/7/8 30 Vacuum delay solenoid valve HVL2/

98 88. Working media CUTION High vacuum components Safety Precautions lways read before starting use Refer to Intro 9 for the general cautions. The high-vacuum component is designed for the control of gas (inert gas, air, vacuum). If used with other media (active gas, fluids, solids, etc.), the product may not function correctly or the performance may drop significantly.. Installation WRNING Incorrect installation and piping will cause product problems, may cause problems in the user's system, and may cause death or serious injury. The user is responsible for ensuring that the operator has read the instruction manual and fully understands the system. fter installation, conduct an appropriate function test to confirm that the product is correctly installed. 2. Direction when connecting pipes (some models) CUTION The vacuum valve is basically designed so all ports can be used as connection ports to the vacuum pump. However, with some models (below), the port for connection to the vacuum pump is limited to one direction. <<Table >> Models with limited vacuum pump connection port <<Fig. >> Model Vacuum pump connection port VP72-50K V82-80K VP82-80K FGL (all models) HV5-2F-5 HV7-5F-5. Solenoid valve ottom port (Refer to Fig. ) ottom port (Refer to Fig. ) ottom port (Refer to Fig. ) OUT port port port CUTION Electric shock: Solenoid valve electric wiring connection (bare live section) There is a risk of electric shock of the solenoid valve (HV/ HVL) electric wiring connections (bare live section) are touched. lways disconnect the power supply before starting disassembly inspection. Do not touch the live sections with wet hands. Continuous energized use of solenoid valve When the solenoid valve HV5/6/7/8 are continuously energized and used, and then the power is turned off, the valve may not open even when reenergized. Check the conditions in Table 2 before using the valve in a continuous energized state. Design & Selection Installation & djustment ottom port Side port During use If the vacuum pump is connected to a not designated port when using models in Table, problems such as sealing faults or malfunction may occur. 3. Solenoid valve CUTION High-temperature warning during energizing of solenoid valve's coil (some models) The solenoid valve (HV/HVL) coil heats when energized. Models using the H Class specification coil (some HV models) get especially hot when energized. risk of burns exists if touched directly. Precautions for wiring solenoid valve s a guide, use a wire having a nominal cross-section of 0.5 mm 2 or larger. Check that excessive force is not applied to leads. 2 Use the product within the allowable voltage range. Use exceeding the tolerable voltage range may cause malfunctions or damage coils. 3 Provide an appropriate circuit breaker, such as a fuse, on the control circuit side to protect electrical equipment. 4 Using a switch circuit that does not generate contact chattering improves solenoid valve durability. 5 If the electric circuit is not susceptible to the solenoid surge, provide measures by inserting a surge absorber parallel to the solenoid. <<Table 2>> Conditions for continuous energizing Differential Continuous energizing working conditions * *2 *3 Model pressure llowable continuous De-energized time Differential pressure (MPa) energizing time to restarting for restarting HV5-2F-3 HV5-2F-5 HV6-2F-3 HV7-5F-3 HV7-5F-5 HV8-5F-3 HV8-5F-5-0. and over to to and over to to and over to to and over to and over to and over to to and over to to 0. Continuous energizing possible 0min 25min and over -0. to 0.MPa Continuous energizing possible 0min 25min and over to 0.0MPa Continuous energizing possible 0min 30min and over -0. to 0.2MPa Continuous energizing possible Continuous energizing possible Continuous energizing possible 60min 20min and over -0. to 0.2MPa Continuous energizing possible 40min 90min and over -0. to 0.0MPa *: Continuous energizing time which allows restarting immediately after continuous energizing *2: De-energizing time required after energizing for time shown in * *3: Differential pressure allowing restarting immediately after energizing for time longer than *

99 Precautions Proximity switch T2H, T2V, T3H, T3V, N-C2, C3 rown Connecting leads lack 3 Correctly connect leads according to the color coding. lways turn off the power for the electrical circuit on the connection side before starting this wire. Fig. Example of T2 basic circuit Fig. 2 Example () of T3 basic circuit (When switch power supply and load power supply are the same) Switch Switch Switch rown lue Fig. 3 Example (2) of T3 basic circuit (when switch power supply and load power supply are different) 2 Output circuit protection Provide a contact protection circuit to prevent switch damage and shortened life. When connecting to an induction load (relay, solenoid valve), a surge voltage will occur when the switch is turned off. Provide the protective circuit shown in Fig. 4. When connecting to a capacious load (capacitor), a rush current will occur when the switch is turned on. Provide the protective circuit shown in Fig. 5. If the lead is longer than 0 m, provide the protective circuit shown in Fig. 6 and 7 (for T2) or Fig. 8 (for T3). Switch rown lack lue rown lack lue rown lack lue Load Load Load Load 0 to 30V DC DC power supply for switch and load 0 to 28V DC DC power supply for load 30VDC or less Fig. 4 Example of using surge absorbing element for induction load Use Hitachi VO6C diode or equivalent. Fig. 5 Example of current limiting resistance R inserted in capacious load. In this case, the resistance R ( ) must satisfy the following expression: Fig. 6 Fig. 7 Fig. 8 elow 2m Switch elow 2m Switch lue L rown lue V 0.05 R = R( ) Choke coil L=several hundred H to several mh Surpassing high-frequency characteristics Wire near switch (within 2m) Switch R rown lue Rush current limiting resistance R = Largest resistance acceptable for load circuit wiring Wire near switch (within 2m) elow 2m rown Switch lack lue Electric power noise absorption circuit C=20 to 50 F Electrolytic capacitor (withstand voltage 50V and over) C2=0.0 to 0. F Ceramic capacitor Rush current limiting resistance R = 20 to 30 R2 = Largest resistance acceptable for load circuit wiring Wire near switch (within 2m) IC Load Load C C2 R R2 Connecting to a programmable controller (sequencer) Connection differs according to the programmable controller model. Connect as shown in Fig. 9 to 3. Fig. 9 Example of T2 connection to source load input (with external power supply) Fig. 0 Example of T2 connection to source load input (with integrated power supply) Fig. Example of T2 connection to sink input Programmable 24V controller rown DC COM External lack power Switch lue Input terminal COM Fig. 2 Example of T3 connection to source load input (with external power supply) Switch rown lack lue lue rown Switch lue rown Switch 24V DC Input terminal lue rown Switch Switch COM Input terminal Programmable controller Programmable controller Programmable controller rown lue Switch Switch COM Input terminal External power COM Fig. 3 Example of T3 connection to source load input (with integrated power supply) The T3 switch cannot be connected to a sink input programmable controller. Input terminal Programmable controller 89

100 Precautions Proximity switch T2H, T2V, T3H, T3V, N-C2, C3 4 Magnetic environment If the surrounding area contains a strong magnetic field or large current (large magnet, spot welder, etc.), use a strong magnetic field proof switch. When installing a cylinder with a switch nearby in parallel, or if a magnetic body moves very close to the cylinder, mutual interference may occur and may adversely affect detection accuracy. (Contact CKD for details on the strong magnetic field proof switch.) 5 Protecting the lead The lead's minimum bending radius is 9 mm and over. Pay special attention to wiring so that repeated bending strain and tensile strength are not applied to the lead. Connect an elastic lead specifications cylinder switch with higher elasticity at movable sections. (Contact CKD for details on the elasticity lead specifications cylinder switch.) 6 Parallel connection When several 2-wire switches are connected in parallel, leakage current increases in proportion to the number of connected units. Check the load specifications and determine the number of switches to be connected. Note that switch light may dim or may not light. With the 2-wire proximity switch, when one switch is changing from on to off, voltage at both ends of the switch connected in parallel drops to the internal voltage drop value when the switch is turned on and will be less than the load voltage range. Other switches will not turn on. Check the input specifications of the programmable controller, which is the connection load, before starting use. The 3-wire proximity switch has an extremely small leakage current value (0 or less), so no problem occurs under normal conditions. 7 When connecting several 2-wire switches serially, the switch voltage drop will be the total voltage drop of all connected switches. The voltage applied to the load side is the voltage obtained by subtracting the voltage drop at switches from power voltage. Check the input specifications of the programmable controller, which are load specifications, and determine the number of switches to be connected. When connecting several 3-wire proximity switches serially, switch voltage drop will be the total voltage drop of all connected switches, as with the 2-wire. Current that flows to the switch will be the total of connected switch current consumption and load current, as shown below. Thus, Check the load specifications and determine the number of switches to be connected so that the switch's maximum load current is not exceeded. Switches light only when all-switches are on. Switch lack Load current + current consumption 2 N0.n Load current + current consumption (n-) Fig.4 Current consumption rown lue Serial connections Switch Current consumption rown N0.2 lack lue Switch Current consumption rown Load Load current N0. lack lue Load current + current consumption DC power supply for switch and load 90

101 Precautions Reed switch TOH, TOV, T5H, T5V Magnetic environment 5 Contact protection void using this switch in areas with a strong magnetic field or large current (large magnet, spot welder, etc.). When installing a cylinder with a switch nearby in parallel, or if a magnetic body moves very close to the cylinder, mutual interference may occur and may adversely affect detection accuracy. (Contact CKD for details on the strong magnetic field proof switch.) 2 Protecting the lead The lead's minimum bending radius is 9 mm and over. Pay special attention to wiring so that repeated bending strain and tensile strength are not applied to the lead. Connect an elastic lead specifications cylinder switch with higher elasticity at movable sections. (Contact CKD for details on the elasticity lead specifications cylinder switch.) 3 Connecting the lead Connect the switch lead in parallel to the load instead of connecting it directly to the power. When using TO, observe points and 2 below. When using for DC purposes, connect so that the brown wire comes to the side and the blue wire comes to the side. The switch will function when connected in reverse, but the switch will not light. 2 When connected to the C relay or programmable controller input, if semi-wave rectification is conducted with that circuit, the switch may not light. The switch will light when the lead's polarity is reversed. 4 Contact capacity Do not use a load that exceeds maximum switch contact capacity. Note that with the TO switch, the switch may not light if the load is less than the rated current value. Provide the contact protection circuit shown in Figs. and 2. When connecting an inductive load, such as a relay, surge voltage will be generated when the switch turns off. Provide a protection circuit when connecting a capacitive load (capacitor), because rush current will be generated when the switch turns on. When the wiring length increases, wiring capacity is reached and rush current generated. This may damage the switch or reduce life, so provide the contact protection circuit shown in Figs. 3 and 4 if wiring length exceeds the values given in Table. Table Fig. Fig. 2 Voltage DC C rown line pplied voltage C V DC Switch Load Capacitor resistance When using capacitor, resistor When using diode C R lue line User wiring Protective circuit (spark quenching circuit) Recommended value C capacitor to 0. F R resistor to 3 OKY Electric Industries XEIKI or equivalent product pplied voltage DC rown line V Switch Load Wire length 50m 0m lue line User wiring Protective circuit General rectifying diode HITCHI V06C or equivalent product Fig. 3 Fig. 4 rown line pplied voltage C V DC pplied voltage C V DC 6 Relay Switch Load lue line elow 2m Choke coil L = several hundred H to several mh Surpassing high-frequency characteristics Wire near switch (within 2m) rown line Switch Load Use the following or equivalent relays. OMRON: MY Fuji Electric: HH5 Tokyo electricity: MPM Matsushita Electric Works: HC 7 Serial connection When connecting several TO switches serially, switch voltage drop will be the total voltage drop of all connected switches. If one TO is used to check the operation and another T5 switch is used, the voltage drop will be equivalent to one TO switch (approx. 2.4 V). The Lamps light only when all of the switches are on. 8 Parallel connection There is no limit when connecting multiple switches in parallel. However, when TO switches are connected, the switch may dim or may not light. L lue line elow 2m Rush current limiting resistance R = Largest resistance acceptable for load circuit wiring Wire near switch (within 2m) R 9

102 ir operated valve for high vacuum 4 5 V V 6 Series 7 Formed bellows type luminum body type Model No. ctuation Orifice V4V NC ø6 V5V NC ø24 V6V NC ø40 V7V NC ø50 Much smaller and lighter with aluminum body Miniature switch mountable reed switch (proximity, reed) can be connected to confirm the operation. (The switch rail kit is required for retrofitting.) 30% lower total height The compact body uses less space than the conventional model (V**3). Long-life formed bellows Material: SUS36L Durability: million times (*) * Life when working media is inert gas within specified range, which does not contain solids such as reaction products. Usable with back pressure The vacuum pump can be connected to either port. Quick attachment and removal The bellows can be attached and removed easily using a hexagon wrench. This greatly reduces "washing" and "replacement" processes. No gas traps There is no dead space where gas may get trapped. (ody has no welded parts.) Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. Light weight (verage 60% lighter than conventional product) The aluminum body and dedicated actuator reduce the weight by approx. /3 of the conventional product (SUS body). Precautions lways read page 9 in the introduction and the precautions on page 88 to 9 to ensure correct, safe use of this product. Working media Installation Direction when connecting piping Proximity switch, reed switch 92

103 Specifications Descriptions 4 V V Series ir operated valve for high vacuum V4V V5V V6V V7V Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Withstanding pressure MPa Fluid temperature mbient temperature Orifice mm Conductance Note /s Connection Control pressure MPa Weight kg JIS symbol ø6 5 NW Vacuum and inert gas to or less or less to 60 0 to 60 ø24 ø NW25 NW to ø50 80 NW50.20 Note : The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value. Switch specifications Descriptions pplications Power voltage Load voltage/current Power consumption Internal voltage drop Light Leakage current Lead wire length Note 2 Maximum impact Insulation resistance Withstand voltage mbient temperature range Protective structure Proximity switch T2H/T2V Programmable controller 0 to 30V DC, 5 to 20m Note 3 4V or less m or less Standard m (oil-resistant vinyl cabtire cord T3H/T3V Relay, programmable controller 0 to 28V DC 30V DC or less, 00m or less 0m or less at 24VDC (ON) 0.5V or less TOH/TOV Relay, programmable controller 2/24V DC 5 to 50m 00V C 7 to 20m 2.4V or less Illuminating diode (lights when ON) 0 or less 0 Standard m (oil-resistant vinyl cabtire cord Reed switch 2-conductor 0.2mm 2 ) 3-conductor 0.2mm 2 ) 980m/s 2 294m/s 2 T5H/T5V Programmable controller, relay, IC Circuit (without light), serial connection 2/24V DC 50m or less 00V C 20m or less 0V 0 20M or more when measured with 500V DC megger No failure when 000V C is applied for minute -0 to +60 IEC Standard IP67, JIS CO920 (water-tight type), oil-resistant Note 2: 3 m and 5 m leads are available as options. Note 3: The maximum load current 20 m above is at 25. If the switch's working ambient temperature is higher than 25, load current will be lower than 20 m (5 to 0 m at 60 ). Note 4: The switch rail kit is required for retrofitting (See page 94). Note 5: See page 89 to 9 for other precautions for using the switches. Standard m (oil-resistant vinyl cabtire cord 2-conductor 0.2mm 2 ) 93

104 4 V V Series How to order V Model No. 5 V 25K T5H 3 H Series ctuation NC Connection <Example of model number> V6V-40K-T5H3-H Model: V6V air operated valve for high vacuum (NC type) Series Connection : : Orifice ø40 NW40 C Switch model No. : T5H (axial lead wire) D Switch lead wire length : 3m E Switch quantity : Detect when valve is open C Switch model No. D Switch lead wire length E Switch quantity Symbol Descriptions Series 4 Orifice ø6 5 Orifice ø24 6 Orifice ø40 7 Orifice ø50 Connection 6K 25K 40K 50K NW6 NW25 NW40 NW50 Only V4V is available Only V5V is available Only V6V is available Only V7V is available C Switch model No. lank Without switch T0H xial lead wire T5H Reed T0V Radial lead wire T5V T2H xial lead wire T3H Proximity T2V Radial lead wire T3V D Switch lead wire length lank m(standard) 3 3m 5 5m E Switch quantity lank Without switch H Detect when valve is open R Detect when valve is closed D Detect when valve is open/closed 2 wire 3 wire 2 wire 3 wire 94 <How to order switch rail kit> V 4 V R TOH 3 D Series Switch rail kit <Example of model number> V7V-R-T3V-R Model: Switch rail kit for V7V Series : V7V C Switch model No. : Lead wire length : T3V (radial lead wire) m D Switch quantity : Detect when valve is closed Switch model No. C Switch lead wire length D Switch quantity Symbol Descriptions Series 4 V4V 5 V5V 6 V6V 7 V7V Switch model No. T0H T5H T0V T5V T2H T3H T2V T3V C xial lead wire Reed Radial lead wire xial lead wire Proximity Radial lead wire Switch lead wire length lank m (standard) 3 3m 5 5m D Switch quantity H Detect when valve is open R Detect when valve is closed D Detect when valve is open/closed 2 wire 3 wire 2 wire 3 wire

105 Internal structure and parts list 4 V V Series ir operated valve for high vacuum 2 3 No. 2 Parts name Cylinder (magnet integrated) Ring Material Hexagon socket head screw SUSXM O ring ody FKM ellows SUS36L 6 7 O ring FKM Valve disk O ring Plain washer Spring washer Hexagon socket head bolt SUS36L FKM SUS304 SUS304 SUSXM7 3 Rod SUS36L 2 3 Dimensions ppearance when switch is mounted IR OPERTED VLVE for VCUUM ORIFICE SERIL MIN OPERTE MODEL CKD Corporation MDE IN JPN Switch rail Switch E D G H F The entire switch rail is removed in maintenance, so the switch position need not be adjusted after assembly. <PT.P > C Model No. V4V V5V V6V V7V ø30(nw6) ø40(nw25) ø55(nw40) ø75(nw50) C D E F ø38.6 ø38.6 ø58.8 ø58.8 G M5 M5 Rc/8 Rc/8 H ø60 ø60 ø88 ø88 95

106 ir operated valve for high vacuum 5 6 V *3 7 Series 8 Formed bellows type Stainless steel body compact type Model No. ctuation Orifice V53 NC ø24 V63 NC ø40 V73 NC ø50 V83 NC ø80 Model No. ctuation Orifice V523 NO ø24 V623 NO ø40 V723 NO ø50 V823 NO ø80 Model No. ctuation Orifice V533 Double acting ø24 V633 Double acting ø40 V733 Double acting ø50 V833 Double acting ø80 Compact with improved maintenance 25% lower total height The compact body uses less space than the conventional model (V**2). Long-life formed bellows Special stainless steel material (SL350) Durability: million times (*) * Life when working media is inert gas within specified range, which does not contain solids such as reaction products. Usable with back pressure The vacuum pump can be connected to either port. Short installation/removal time one-fifth the conventional The bellows can be attached and removed easily using a hexagon wrench. This greatly reduces "washing" and "replacement" processes. Miniature switch mountable reed switch (proximity, reed) can be connected to confirm the operation. (Retrofitting possible) No gas traps The integrated blister creates a streamlined, smooth flow path. There is no dead space where gas may get trapped. Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. Precautions lways read page 9 in the introduction and the precautions on page 88 to 9 to ensure correct, safe use of this product. Working media Installation Direction when connecting piping Proximity switch, reed switch Contact CKD for the following custom orders:. Different flange surface length 2. Different flange types 3. Valve heating 4. Different O-ring materials at wetted areas 5. Slow exhaust 6. Straight piping 96

107 Specifications Descriptions Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Withstanding pressure MPa Fluid temperature mbient temperature Orifice mm Stroke mm Conductance Note /s Connection Control pressure MPa NC Weight kg NO Double acting JIS symbol V5 2 3 V6 2 3 V7 2 3 V8 2 3 ø NW NC 3 3 Vacuum and inert gas ø NW to or less or less NO to 60 0 to to V * Series ir operated valve for high vacuum 3 ø NW ø NW Double acting Note : The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value. Switch specifications Descriptions pplications Power voltage Load voltage/current Power consumption Internal voltage drop Light Leakage current Lead wire length Note 2 Proximity switch T2H/T2V Programmable controller 0 to 30V DC, 5 to 20m Note 3 4V or less m or less Standard m (oil-resistant vinyl cabtire cord 2-conductor 0.2mm 2 ) T3H/T3V Relay, programmable controller 0 to 28V DC 30V DC or less, 00m or less 0 m or less at 24 VDC (on) 0.5V or less Illuminating diode (lights when ON) 0 or less Standard m (oil-resistant vinyl cabtire cord 3-conductor 0.2mm 2 ) TOH/TOV Relay, programmable controller 2/24V DC 50m or less OOV C 7 to 20m or less 2.4V or less Maximum impact 980m/s 2 294m/s 2 Insulation resistance 20M and over when measured with 500VDC megger Withstand voltage mbient temperature range Protective structure No failure when 000VC is applied for minute -0 to + 60 IEC Standard IP67, JIS CO920 (water-tight type), oil-resistant Note 2: 3 m and 5 m leads are available as options. Note 3: The maximum load current 20 m above is at 25. If the switch's working ambient temperature is higher than 25, load current will be lower than 20 m (5 to 0 m at 60 ). Note 4: See page 89 to 9 for other precautions for using the switches. 0 Reed switch T5H/T5V Programmable controller, relay, IC Circuit (without light), serial connection 2/24V DC 50m or less OOV C 20m or less 0V 0 Standard m (oil-resistant vinyl cabtire cord 2-conductor 0.2mm 2 ) 97

108 5 V * Series How to order V K - T5H 3 - H Model No. <Example of model number > V63-40K-T5H3-H Series Series ctuation C Connection Model: V63 high vacuum air operated valve : Orifice ø40 ctuation : NC (normally closed) C Connection : NW40 D Switch model No. : T5H (xial lead wire) E Lead wire length: 3m F Switch quantity : Detect when valve is open D Switch model No. E Switch lead wire length F Switch quantity (Detecting position) Symbol Descriptions Series 5 Orifice ø24 6 Orifice ø40 7 Orifice ø50 8 Orifice ø80 ctuation NC (normally closed) 2 NO (normally open) 3 Double acting C Connection 25K NW25 Only V5*3 is available 40K NW40 Only V6*3 is available 50K NW50 Only V7*3 is available 80K NW80 Only V8*3 is available D Switch model No. lank Without switch T0H T5H T2H T3H xial lead wire xial lead wire T0V T5V T2V T3V Radial lead wire Radial lead wire Reed Proximity E Switch lead wire length lank m(standard) 3 3m 5 5m F Switch quantity lank Without switch H Detect when valve is open R Detect when valve is closed D Detect when valve is open/closed ppearance when switch is mounted T*H type (xial lead wire) 2 wire 3 wire 2 wire 3 wire T*V type (Radial lead wire) 98

109 Internal structure and parts list (NC cross-section) No. Parts name Compact cylinder Cylinder adapter ellows assembly O ring ody assembly Parallel pin O ring Valve disk O ring Plain washer Spring washer Hexagon socket head bolt Spring holder Spring Spring holder Material 5056 SL350/SUS36L FKM SUS36L SUS30 FKM SUS36L FKM SUS304 SUS304 SUS304 C3604 SWOSC-V (Electrodeposition coating) C3604 Dimensions Switch model No. V**3-*K- * * * NC type/double acting 2-H G NO CLOSE OPEN E F CLOSE OPEN D I 5 V * Series ir operated valve for high vacuum C I Model No. V5*3 V6*3 V7*3 V8*3 Symbol ø40(nw25) ø55(nw40) ø75(nw50) ø4(nw80) C Dimensions in parentheses under symbol D are for NO. D 5.5(62.5) 70.5(8.5) E F G H Rc/8 Rc/4 Rc/4 Rc3/8 I

110 ir operated valve for high vacuum 5 6 V *2 7 Series 8 Formed bellows type Model No. ctuation Orifice V52 NC ø24 V62 NC ø40 V72 NC ø50 V82 NC ø80 V2 NC ø 5 Model No. ctuation Orifice V522 NO ø24 V622 NO ø40 V722 NO ø50 V822 NO ø80 Model No. ctuation Orifice V532 Double acting ø24 V632 Double acting ø40 V732 Double acting ø50 V832 Double acting ø80 Long-life, low dust generation Pilot-operated solenoid valve installable Long-life formed bellows Special stainless steel material (SL350) Durability: million times (*) * Life when working media is inert gas within specified range, which does not contain solids such as reaction products. Usable with back pressure The vacuum pump can be connected to either port. (Excluding V82) Miniature switch mountable reed switch (proximity) can be connected to confirm the operation. (Retrofitting possible) V2 is: Ideal for leak valves Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. Ultra-compact with 5mm orifice Precautions lways read page 9 in the introduction and the precautions on page 88 to 9 to ensure correct, safe use of this product. Working media Installation Direction when connecting piping Proximity switch, reed switch 00

111 V2-8T V**2-*K Specifications Descriptions Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Withstanding pressure MPa Fluid temperature mbient temperature Orifice mm Stroke mm Conductance Note /s Connection Control pressure MPa Weight kg JIS symbol V2-8T V5 2 V6 2 V7 2 V to /4" tube NW25 Vacuum and inert gas to or less or less to 60 0 to NW to NW50 (Custom order) 0. (ack pressure not available for NC type) NW NC NO Double acting (Excluding V82) X Y 5 V * Series ir operated valve for high vacuum X Y (V82) ottom port X Side port Side port ottom port Note : The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value. Electrical specifications Rated voltage pparent power Power consumption When holding When starting C DC Heat resistance class 00V C(50/60Hz), 0V C(60Hz), 200V C(50/60Hz), 220V C(60Hz), 24V DC 3.9V(50Hz), 3.V(60Hz) 9.2V(50Hz), 7.9V(60Hz) 2.0W(50Hz),.7W(60Hz) 4.0W Switch specifications Descriptions pplications Power voltage Load voltage/current Power consumption Internal voltage drop Light Leakage current Lead wire length Note 2 Maximum impact Insulation resistance Withstand voltage mbient temperature range Protective structure N-C2 Programmable controller - 0 to 30V DC, 5 to 30m - 4V or less m or less m (oil resistant vinyl round code 2-conductor 0.2mm 2 ) Proximity switch Illuminating diode (lights when ON) N-C3 Programmable controller, relay, IC circuit, small solenoid valve 0 to 28V DC 30V DC, 50m or less 5m or less at 24V DC (when ON) 0.5V or less 0 or less m (oil resistant vinyl round code 3-conductor 0.5mm 2 ) 294m/s 2 00M and over when measured with 500VDC megger No failure when 000VC is applied for minute -0 to +60 IEC Standard IP67, JIS CO920 (water-tight type), oil-resistant Note 2: 3 m and 5 m leads are available as options. 0

112 5 V * Series How to order V K - 2C - H C2 3 - DC24V Model No. Method for V2 omitted Series Note Note 2 ctuation Note 3 Connection Note on model No. selection Note : V2 is available only for the V2-8T. (There is no option setting.) Note 2: The cylinder switch and solenoid valve are not used for the V2 type. Only NC is used for activation. Note 3: If 2 (NO) is selected for ctuation, it is basically not possible to retrofit the solenoid valve. Designate the solenoid valve at purchase. Note 4: The D Coil setting is used only when (NC) or 2 (NO) is selected for ctuation. (The solenoid valve option is not used for the double-acting valve.) C D E Coil Note 4 Switch quantity (Detecting position) F Switch type G Lead wire length H Rated voltage Symbol Descriptions Series /4" (Custom order) ctuation 2 3 NC (normally closed) NO (normally open) Double acting C Connection 8T 25K 40K 50K 80K /4" tube NW25 NW40 NW50 NW80 Only V2 is available Only V5*3 is available Only V6*3 is available Only V7*3 is available Only V8*3 is available D Coil lank 2C 2G Without solenoid valve Grommet coil DIN terminal box E Switch quantity (Detecting position) lank H R D Without switch Detect when valve is open Detect when valve is closed Detect when valve is open/closed F Switch type lank C2 C3 Without switch Proximity 2 wire Proximity 3 wire G Switch lead wire length lank 3 5 m (standard) 3m 5m H Rated voltage lank C00V C200V DC24V Without solenoid valve C00V(50/60Hz), C0V(60Hz) C200V(50/60Hz), C220V(60Hz) DC24V <Example of model number > V52-25K-2C-HC23-DC24V Model: V52 high vacuum air operated valve Series : 25 ctuation : NC (normally closed) C Connection : NW25 D Coil : Grommet coil E Switch quantity : Detect when valve is open F Switch type : Proximity 2 wire G Lead wire length : 3m H Rated voltage : 24V DC 02

113 Internal structure and parts list 5 V * Series ir operated valve for high vacuum V2-8T NC 2 8 No. Parts name Cylinder 2 Ring 3 ellows ring 4 ellows 5 Valve disk 6 ody 7 Pipe 8 O ring 9 Valve disk Material C3604 SUS304 SUS36L SUS304 SUS304 SUS304 FKM FKM/SUS Dimensions V2-8T NC ø30 ø6.35 (/4") ø6.35 (/4") ø33 ø45 03

114 5 V * Series Internal structure and parts list V**2-*K NC/NO/Double acting (The drawing below shows the NC cross-section.) 2 No. Parts name Material Cylinder (magnet integrated) ellows adaptor O ring (*) ody Formed bellows Rod Rod piece Valve disk O ring Valve disk SUS36 FKM SUS36 SL350 SUS36 SUS304 SUS36 FKM SUS36 *. The external seal differs slightly for V7 and V8. (The 3 O-ring seal is shown at left.) Dimensions V**2-*K NC/NO/Double acting X port (NC) Y port (NO, double acting) Y port (NC) X port (NO, double acting) F The options (pilot-operated solenoid valve, cylinder switch) and dimensions are available upon request. The solenoid valve option is not used for double-acting valve. E øc G øc D øh Model No. Symbol V5*2-25K V6*2-40K V7*2-50K V8*2-80K øc 40(NW25) 55(NW40) 75(NW50) 4(NW80) D E F G øh

115 05

116 Specifications Descriptions Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Withstanding pressure MPa Fluid temperature mbient temperature Large flow orifice mm Small flow orifice Note 3 mm Main valve stroke mm Small flow valve stroke mm Conductance (main valve) Note /s Connection Control pressure MPa JIS symbol V53-X* ø24 ø to NW25 V63-X* Vacuum and inert gas to or less or less to 60 0 to 60 ø40 ø to NW to 0.6 V73-X* ø50 ø to NW50 Note : The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value. Note 2: Contact CKD for details on specifications with the switch. Note 3: Contact CKD for details on small flow orifice diameters. Note 4: The bellows cannot be replaced for this customized order. Dimensions IR OPERTED VLVE for VCUUM MODEL ORIFICE MIN SERIL OPERTE CKDCorporation MDE JPN IN ir operated valve for high vacuum V Series Custom order Contact the CKD Sales Office for details. Custom order Slow exhaust (internal bypass valve) compatible Control exhaust rates in two steps -actuator slow exhaust valve 25/40/50 NC NC D C y-passing port (y-passing open/close valve) Model No. C D V53-X* V63-X* V73-X* ø40(nw25) ø55(nw40) ø75(nw50)

117 Slow exhaust (external bypass valve) compatible Control exhaust rates in two steps 2-actuator (bypass) slow exhaust valve 25/40/50 V**3 Series ir operated valve for high vacuum Specifications Descriptions V53-X* V63-X* V73-X* V83-X* Working fluid Working pressure range Pa(abs) Vacuum and inert gas to Maximum working differential pressure MPa 0. Valve seat leakage Pa m 3 /s(he) or less External leakage Pa m 3 /s(he) or less Withstanding pressure MPa Fluid temperature mbient temperature to 60 0 to 60 Orifice (main flow path) mm ø24 ø40 ø50 ø80 Stroke (Main valve) mm Conductance (main valve) Note /s Connection NW25 NW40 NW50 NW80 Control pressure MPa 0.4 to 0.6 JIS symbol NC NC Note : The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value. Note 2: Contact CKD for details on specifications with the main valve switch. Note 3: bypass valve with flow control is available. Dimensions V53-X* E 6 V X* E CLOSE OPEN D D F F C C Model No. C D V53-X* V63-X* V73-X* V83-X* ø40(nw25) ø55(nw40) ø75(nw50) ø4(nw80) E F y-pass valve y-pass pipe GDV- /4" GD2V- 3/8" 07

118 V**3 Series Straight flange compatible Ideal for installation on straight piping sections Straight flange valve 25/40/50/80 Specifications Descriptions V5 3 3-X* V6 3 3-X* V7 3 3-X* V8 3 3-X* Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa Vacuum and inert gas to Valve seat leakage Pa m 3 /s(he) or less External leakage Pa m 3 /s(he) Withstanding pressure MPa Fluid temperature mbient temperature or less to 60 0 to 60 Orifice mm Stroke mm Conductance Note /s Connection Control pressure MPa JIS symbol ø NW25 ø NW to 0.6 ø NW50 NC NO Double acting ø NW80 Note : The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value. Note 2: Contact CKD for details on specifications with the switch. Dimensions Control port side C Model No. C 2 V5 3 3-X* 2 V6 3 3-X* 2 V7 3 3-X* 2 V8 3 3-X* ø40(nw25) ø55(nw40) ø75(nw50) ø4(nw80) (38) 55(63) 9 24 Note : Dimensions in parentheses under symbol C are for NO. Note 2: Values for symbol C are maximum and differ based on the operation port direction.

119 Valve heater compatible Prevent reaction byproducts from adhering to the valve Jacket heater valve 40/50/80 V**3 Series ir operated valve for high vacuum Thermostat Thermocouple installation possible Heater (With heat insulating material) 09

120 V**2 Series Large bore size type Custom order Model No. ctuation Orifice V932 Double acting ø00 Large bore size type Long-life formed bellows Special stainless steel material (SL350) Durability: million times (*) * Life when working media is inert gas within specified range, which does not contain solids such as reaction products. Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. Usable with back pressure The vacuum pump can be connected to either port. Specifications Precautions lways read page 9 in the introduction and the precautions on page 88 to ensure correct and safe use of this product. Working media Installation Direction when connecting piping Descriptions Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Withstanding pressure MPa Fluid temperature mbient temperature Orifice mm Stroke mm Conductance Note /s Connection Control pressure MPa Weight kg JIS symbol V932-X0070 Vacuum and inert gas to or less or less to 60 0 to NW to Note : The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value. Note 2: Contact CKD for details on specifications with the switch. 0

121 Dimensions V932-X* Series ir operated valve V932-X H E C D G F Model No. Symbol V932-X-* ø34(nw00) 5 C 35 D 424 E ø85 F 3 G 07.5 H Rc3/8

122 ir operated valve for high vacuum 5 6 VP *2 7 Series 8 Double O-ring shaft seal Model No. ctuation Orifice VP52 NC ø24 VP62 NC ø40 VP72 NC ø50 VP82 NC ø80 VP2 NC ø 5 Model No. ctuation Orifice VP522 NO ø24 VP622 NO ø40 VP722 NO ø50 VP822 NO ø80 Model No. ctuation Orifice VP532 Double acting ø24 VP632 Double acting ø40 VP732 Double acting ø50 VP832 Double acting ø80 (Custom order) Double O-ring shaft seal with outstanding reliability and maintenance Pilot-operated solenoid valve installable Long-life, high sealing Outstanding life and external sealing are attained with the double O-ring seal and grease container. Durability: 500,000 times (*) * Life when working media is inert gas within specified range, which does not contain solids such as reaction products. Miniature switch mountable reed switch (proximity) can be connected to confirm the operation. (Retrofitting possible) Usable with back pressure The vacuum pump can be connected to either port. (Excluding VP72/82) VP2 only Ideal for leak valves Ultra-compact with 5mm orifice Precautions lways read page 9 in the introduction and the precautions on page 88 to 9 to ensure correct, safe use of this product. Working media Installation Direction when connecting piping Proximity switch, reed switch 2

123 VP2-8T VP**2-*K Specifications Descriptions Working fluid Working pressure range Note Pa(abs) NC NO Double acting Maximum working differential pressure Note 2 MPa Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Withstanding pressure MPa Fluid temperature mbient temperature Orifice mm Stroke mm Conductance Note 3 /s Connection Control pressure MPa Weight kg JIS symbol VP2-8T VP5 2 VP6 2 VP7 2 VP to /4" tube Vacuum and inert gas to to to to to aratropic: to ack pressure: to NC: 0.5 NO: 0.5 Double acting: NW25.6 NC: 0. NO: 0. Double acting: or less or less to 60 0 to NW to VP * Series ir operated valve for high vacuum 3 NC: 0. (ack pressure not available) NO: 0. Double acting: NW (Custom order) NC: 0. (ack pressure not available) NO: 0.5 Double acting: NW NC NO Double acting (Excluding VP72, VP82) X Y X Y (VP72, VP82) ottom port X Side port Side port ottom port Note : For VP822: Pa to Pa For VP832: Pa to Pa. Note that when using the VP822 with a barotropic setting, the range is Pa to Pa. Note 2: The back pressure type is not used for VP72 and VP82. Note 3: The conductance is the theoretical calculation value at the molecular flow range, and is not the actual measurement value. Electrical specifications Rated voltage pparent power Power consumption When holding When starting C DC Heat resistance class 00V C(50/60Hz), 0V C(60Hz), 200V C(50/60Hz), 220V C(60Hz), 24V DC 3.9V(50Hz), 3.V(60Hz) 9.2V(50Hz), 7.9V(60Hz) 2.0W (50Hz),.7W (60Hz) 4.0W Switch specifications Descriptions pplications Power voltage Load voltage/current Power consumption Internal voltage drop Light Leakage current Lead wire length Note 4 Maximum impact Insulation resistance Withstand voltage mbient temperature range Protective structure N-C2 Programmable controller 0 to 30V DC, 5 to 30m Proximity switch N-C3 Programmable controller, relay, IC circuit, small solenoid valve 0 to 28V DC 30V DC, 50m or less 5m or less at 24V DC (when ON) 0.5V or less 4V or less Illuminating diode (lights when ON) m or less m (oil resistant vinyl round code 2-conductor 0.2mm 2 ) 294m/s 2 00M and over when measured with 500VDC megger No failure when 000VC is applied for minute -0 to or less m (oil resistant vinyl round code 3-conductor 0.5mm 2 ) IEC Standard IP67, JIS CO920 (water-tight type), oil-resistant Note 4: 3 m and 5 m leads are available as options. 3

124 5 VP * Series How to order VP K - 2C - H C2 3 - DC24V Model No. Series Note Note 2 Method for VP2 omitted ctuation Note 3 Connection Note on model No. selection C D Coil Note 4 Note : VP2 is available only for the VP2-8T. (There is no option setting.) Note 2: The cylinder switch and solenoid valve are not used for the VP2 type. Only NC is used for activation. Note 3: If 2 (NO) is selected for ctuation, it is basically not possible to retrofit the solenoid valve. Designate the solenoid valve at purchase. Note 4: The D Coil setting is used only when (NC) or 2 (NO) is selected for ctuation. (The solenoid valve option is not used for the double-acting valve.) E Switch quantity (Detecting position) F Switch type G Lead wire length H Rated voltage Symbol Descriptions Series 2 /4" (custom order) ctuation NC (normally closed) 2 NO (normally open) 3 Double acting C Connection 8T 25K 40K 50K 80K /4" tube NW25 NW40 NW50 NW80 Only VP2 is available Only VP5*2 is available Only VP6*2 is available Only VP7*2 is available Only VP8*2 is available D Coil lank 2C 2G Without solenoid valve Grommet coil DIN terminal box E Switch quantity (detecting position) lank H R D Without switch Detect when valve is open Detect when valve is closed Detect when valve is open/closed F Switch type lank C2 C3 Without switch Proximity 2 wire Proximity 3 wire G Switch lead wire length lank 3 5 m (standard) 3m 5m H Rated voltage lank C00V C200V DC24V Without solenoid valve C00V(50/60Hz), C0V(60Hz) C200V(50/60Hz), C220V(60Hz) DC24V <Example of model number > VP62-40K-2C-HC23-DC24V Model: VP62 high vacuum air operated valve Series : 40 ctuation : NC (normally closed) C Connection : NW40 D Coil : Grommet coil E Switch quantity : Detect when valve is open F Switch type : Proximity 2 wire G Lead wire length : 3m H Rated voltage : 24V DC 4

125 Internal structure and parts list VP2-8T NC VP * Series ir operated valve for high vacuum *The cylinder switch and solenoid valve are not available for the VP2 type. Only NC is available for actuation. No. Parts name Material Cylinder Rod Ring O ring holder Grease container Valve disk ody Pipe O ring O ring Valve disk SUS304 C3604 SUS304 SUS304 SUS304 SUS304 SUS304 FKM FKM FKM/SUS304 Dimensions VP2-8T NC ø30 Side port ottom port ø6.35(/4") 20 ø6.35(/4") ø ø45 5

126 5 VP * Series Internal structure and parts list VP**2-*K NC/NO/Double acting No. Parts name Material Cylinder (magnet integrated) O ring holder O ring (*) ody O ring holder O ring Grease container Valve rod Rod piece Valve disk O ring Valve disk SUS36 FKM SUS FKM SUS304 SUS36 SUS304 SUS36 FKM SUS36 *. The external seal differs slightly for VP7 and VP8. (The 3 O-ring seal is shown at left.) 2 Dimensions VP**2-*K NC/NO/Double acting X port (NC) Y port (NO, double acting) Y port (NC) X port (NO, double acting) F G Side port ottom port øc E The options (pilot-operated solenoid valve, cylinder switch) and dimensions are available upon request. The solenoid valve option is not used for double-acting valve. øc D øh Model No. Symbol VP5*2-25K VP6*2-40K VP7*2-50K VP8*2-80K øc 40(NW25) 55(NW40) 75(NW50) 4(NW80) D E F G øh

127 MEMOE M O 7

128 Manual valve for high vacuum 5 MV 6 0 Series 7 Formed bellows Handle Custom order Model No. ctuation Orifice MV50 Manual ø24 MV60 Manual ø40 Model No. ctuation Orifice MV70 Manual ø50 ir-operated valve (V**2) performance is incorporated in the manual valve. Long-life formed bellows Special, stainless steel material (SL-350) provided. Corrosion resistance is outstanding. Low dust generation Wetted areas (flow path) have no sliding sections that may generate particles. Handle Usable with back pressure The vacuum pump can be connected to either port. Specifications Descriptions MV50 MV60 MV70 Working fluid Vacuum and inert gas Working pressure range Pa(abs) to 0 5 Maximum working differential pressure MPa 0. Valve seat leakage Pa m 3 /s(he) or less External leakage Pa m 3 /s(he) or less Withstanding pressure MPa 0.3 Precautions lways read page 9 in the introduction and the precautions on page 88 to ensure correct, safe use of this product. Working media Installation Direction when connecting piping Fluid temperature mbient temperature Orifice Stroke Valve structure Connection Weight JIS symbol mm mm kg ø24 5 NW to 60 0 to 60 ø40 20 Formed bellows NW ø50 22 NW

129 How to order MV K 5 MV Series Manual valve for high vacuum Internal structure and parts list Manual Series Connection Symbol Descriptions Series 5 Orifice ø24 6 Orifice ø40 7 Orifice ø50 Connection 25K 25 (Only MV50 is available) 40K 40 (Only MV60 is available) 50K 50 (Only MV70 is available) No. Parts name Material No. Parts name Material Hexagon socket set screw Handle Manual rod daptor ellows assembly O ring ody assembly E snap ring Spring washer SUS304 SUS SL350,SUS36 FKM SUS304 SUS304 SUS Rod Spring washer C snap ring Valve disk O ring Rod piece Valve disk Flat headed cross cut screw Cross headed bolt SUS36 SUS304 SUS304 SUS36 FKM SUS304 SUS36 SUS304 SUS304 Dimensions MV*0 D C C E Symbol Model No. MV50 MV60 MV70 Fully open Fully closed C ø40(nw25) ø55(nw40) ø75(nw50) D E ø48.6 ø60.5 ø79 9

130 Manual valve for high vacuum 5 MVP 6 0 Series 7 Double O-ring seal Handle Custom order Model No. ctuation Orifice MVP50 Manual ø24 MVP60 Manual ø40 Model No. ctuation Orifice MVP70 Manual ø50 ir-operated valve (VP**2) performance is incorporated in the manual valve. Handle Long-life, high sealing Outstanding life and external sealing are attained with the double O-ring seal and grease container. Usable with back pressure The vacuum pump can be connected to either port. Specifications Descriptions MVP50 MVP60 MVP70 Working fluid Vacuum and inert gas Working pressure range Pa(abs) to Maximum working differential pressure MPa 0.2 Valve seat leakage Pa m 3 /s(he) or less External leakage Pa m 3 /s(he) or less Withstanding pressure MPa 0.3 Fluid temperature 5 to 60 mbient temperature 0 to 60 Precautions Orifice Stroke mm mm ø24 5 ø40 20 ø50 22 lways read page 9 in the introduction and the precautions on page 88 to ensure correct, safe use of this product. Working media Installation Direction when connecting piping Valve structure Connection Total height: values in parentheses apply for closed valves mm Face-to-face dimensions mm Weight kg JIS symbol NW25 60(75) 50.4 O ring shaft seal NW40 85(205) NW50 230(252)

131 How to order MVP 6 0 Manual Performance class 40K Connection Symbol Descriptions Performance class 5 Orifice ø24 6 Orifice ø40 7 Orifice ø50 Connection 25K 25 Only MV50 is available 40K 40 Only MV60 is available 50K 50 Only MVP70 is available Manual valve for high vacuum Internal structure and parts list MVP Series Dimensions MVP*0 No. Parts name Material Hexagon socket set screw Handle Manual rod daptor O ring holder O ring ody assembly E snap ring Spring washer Valve rod Spring washer SUS304 SUS SUS36 FKM SUS304 SUS304 SUS36 SUS304 D No. Parts name Material C snap ring Rod piece Valve disk O ring O ring holder O ring Grease shield Valve disk Flat headed cross cut screw Cross headed bolt SUS304 SUS304 SUS36 FKM 5056 FKM SUS304 SUS36 SUS304 SUS304 C C E Symbol Model No. MVP50 MVP60 MVP70 Fully open Fully closed C ø40(nw25) ø55(nw40) ø75(nw50) D E ø48.6 ø60.5 ø79 2

132 Leak valve (Vacuum break valve) FGL 2 Series Non-sliding Control range: 0 to 60 seconds Model No. ctuation Maximum flow rate Voltage FGL NC 32 /min 2,24V DC Model No. ctuation Maximum flow rate Voltage FGL2 NC 50 /min 2,24V DC Solve all particle suspension problems with this valve. Control the vacuum break time. Chamber vacuum break time is controlled by controlling the time to attain maximum flow. Control flow rates with optimum mode Fine flow rate and time adjustment are not required. Precautions lways read page 9 in the introduction and the precautions on page 88 to ensure correct, safe use of this product. Working media Installation Direction when connecting piping Residue-free structure The flow path from in to out is straight and smooth. Highly corrosion resistant Stainless steel (SUS36L, high corrosion resistance) is used for the flow path, including the body. Non-sliding valve Wear particles do not form because no sliding sections are used. Selective connection The double-barbed joint and JXR male joint are available. What are leak valves? Principle of operation Most semiconductor manufacturing equipment wafer treatment processes are conducted in a vacuum chamber. When the wafer is loaded and unloaded, the chamber must be momentarily changed from the vacuum to atmospheric pressure. The gas introduced into the chamber could make accumulated particles suspended, which can get on the wafer and decrease yield. This vacuum break valve controls vacuum break time by changing the flow proportionately with time. This prevents particles from being suspended and improves throughput. When the current passed to the coil is increased, attraction force F applied to the plunger increases, displacing the coil to where it is balanced with leaf spring load f supporting the plunger, causing the valve opening to fluctuate. The flow curve (Fig.) is attained by continuously changing the current with the internal controller. Conventional Using leak valve Internal structure 22

133 Specifications Descriptions Working fluid Primary pressure MPa Secondary pressure range Pa(abs) Max. flow rate /min Valve seat leakage cm 3 /min or less External leakage Pa m 3 /s(he) Withstanding pressure MPa Fluid temperature mbient temperature Connection Installation position Power consumption Power voltage W Operation signal, pressure signal Nitrogen to to 30 0 to 30 /4" /4" JXR male joint Note Double barbed joint Free 2V, 24V DC 2V, 24V DC FGL 2 Series Leak valve (Vacuum break valve) FGL-4S FGL-4RM FGL2-4S FGL2-4RM /4" Double barbed joint Note : The JXR joint can be connected to the VCR joint /4" JXR male joint Note How to order FGL 4RM DC2V Model No. NC djusted pressure 0.5 MPa Series Connection C Flow rate Symbol Descriptions Series Small (flow of 32 /min) 2 Large (flow of 50 /min) Connection 4RM /4" JXR male joint 4S /4" Double barbed joint C Flow rate /min Only FGL is available /min Only FGL2 is available D Voltage D Voltage DC2V DC2V DC24V DC24V 23

134 FGL 2 Series Internal structure and parts list FGL 2-4RM FGL 2-4S No. Parts name Material 2 3 O ring Coil assembly Plunger assembly FKM No. Parts name Material Orifice O ring O ring SUS36L FKM FKM Dimensions FGL 2-4RM E /4 " JXR male joint FGL-4RM IN OUT Model No. Symbol FGL-4S FGL2-4S C 05 3 ød E (46.5) (46.5) C ød FGL 2-4S F IN FLOW OUT /4 " Double barbed joint FGL2-4S Model No. Symbol FGL-4S FGL2-4S C 05 3 D øe F (46.5) (46.5) C D øe 24

135 Piping FGL 2 Series Leak valve (Vacuum break valve) The leak valve has a maximum 0.5 cm 3 /min valve seat leak, so use a separate gas valve on the IN side. Cable connection Connect the included cable to the leak valve as shown below. The contact input or DC voltage input is selected based on the connection. Contact input DC voltage input Control signal and flow characteristics The leak valve operates with the operation signal (SIGNL) and pressure signal (PRESSURE). When SIGNL turns ON, the maximum flow is reached with preset time T and the valve closes when SIGNL turns OFF. ssist mode is used if needed. ssist mode keeps chamber pressure negative to prevent ambient atmosphere from entering when the gate is opened. ssist mode is entered by turning PRESSURE ON while SIGNL is ON and adjusting the flow from maximum flow to assist flow. 25

136 High vacuum solenoid valve HV2 Series Model No. ctuation Orifice HV2 NC.6 HV2 N.C..6 Space-saving miniature solenoid valve. Easy maintenance This simple structure has few points. High-vacuum holding Vacuum holding is stable with little leakage. Special packing incorporated FKM packing has outstanding seal life. Highly corrosion resistant Stainless steel (SUS303) is used for the body. (The VCR joint is SUS36.) No beating The DC coil eliminates beating. ack pressure usable (reverse vacuum) Precautions lways read page 9 in the introduction and the precautions on page 88 to ensure correct and safe use of this product. Working media Installation Direction when connecting piping Solenoid valve 26 Specifications Descriptions Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Withstanding pressure MPa ack pressure (Note 2) MPa Fluid temperature mbient temperature Orifice mm Cv flow factor Frequency times/min or less Port size Installation position Weight kg JIS symbol Electrical specifications Rated voltage llowable voltage fluctuation Power consumption W Heat resistance class Temperature rise K HV2-6N-* HV2-8R-* (Custom order) Vacuum/inert gas (Note ) to or less or less to 55 0 to NPT/8 /4 inch VCR female Vertical installation with coil facing upward /200V C (50/60Hz), 24V DC Rated voltage 0% Note : Robustness may drop markedly depending on dryness. Note 2: Pressurizing from the port with the port released to atmosphere is possible.

137 HV2 Series Internal structure and parts list How to order HV 2 6N 5 C00V Internal structure and parts list 2 3 Model No. Port size Voltage Orifice ø.6 Symbol Descriptions 6N NPT/8 8R /4" VCR female joint (custom order) Port size Voltage C00V C00V(50/60Hz) C200V C200V(50/60Hz) DC24V DC24V Note: The old HV-6N-5 is equivalent to HV2-6N-5. Dimensions port port No. Parts name Material Core assembly Plunger assembly Coil assembly Core O ring Spring ody SUS36 SUS405 SUS405 FKM SUM22 FKM SUS304 SUS303 HV2 ø ø port port Line diode (DC does not have a line diode.) 2-NPT /8 2-M4 0.7 depth 6 With VCR joint (customized order) Line diode (DC does not have a line diode.) port port 68 2-/4" VCR female joint 5 2-M4 0.7 depth 6 Note: The line diode is not included with the DC specifications. 27

138 High vacuum solenoid valve HV4 Series Model No. ctuation Orifice HV4 NC 5 High-function solenoid valve based on comprehensive results and experience. Easy maintenance This simple structure has few points. No beating The DC coil eliminates beating. Special packing incorporated FKM packing seal has outstanding seal life. High-vacuum holding Vacuum holding is stable with little leakage. Highly corrosion resistant Stainless steel (SUS303) is used for the body. (The VCR joint is SUS36.) ack pressure usable (reverse vacuum) Precautions lways read page 9 in the introduction and the precautions on page 88 to ensure correct and safe use of this product. Working media Installation Direction when connecting piping Solenoid valve 28 Specifications Descriptions Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Withstanding pressure MPa ack pressure (Note 2) MPa Fluid temperature mbient temperature Orifice mm Cv flow factor Frequency times/min or less Port size Installation position Weight kg JIS symbol Electrical specifications Rated voltage llowable voltage fluctuation Power consumption W Heat resistance class Temperature rise K HV4-8N-* HV4-8R-* (custom order) Vacuum, inert gas (Note ) to or less or less to 55 0 to NPT/4 (with O-ring seat) /4 inch VCR female Vertical installation with coil facing upward /200V C (50/60Hz), 24V DC Rated voltage 0% 4 80 Note : Robustness may drop markedly depending on dryness. Note 2: Pressurizing from the port with the port released to atmosphere is possible.

139 How to order HV 4 8N 5 3H C00V HV4 Series Internal structure and parts list Internal structure and parts list 7 Orifice ø5 Model No. Connection Option Symbol Descriptions Connection 8N NPT/4 (with O-ring seat) 8R /4inch VCR female joint (custom order) C Voltage port port lank None 3H Square terminal box with light G/2 3K Square terminal box G/2 Installation plate C Option Voltage C00V C00V(50/60Hz) C200V C200V(50/60Hz) DC24V DC24V 6 No. Parts name Material Coil assembly 2 Core assembly SUS405 SUS403 SUS36L 3 Plunger assembly SUS405 FKM PET Spring O ring ody Cushion plate SUS304 FKM SUS303 PET Dimensions HV (300) 46 Terminal box port N ø M5 depth 8 50 port 4 55 ø45 2-NPT/4 Installation plate G 2-4 ø5.5 2 ø With VCR joint (customized order) t port port /4" VCR female joint 2-M5 depth

140 High vacuum solenoid valve HV Series Model No. ctuation Orifice HV5 NC 8,2 HV6 NC 8 Model No. ctuation Orifice HV7 NC 2,5 HV8 NC 2,5 Large flow solenoid valve with different series and options Easy maintenance This simple structure has few component parts. Special packing incorporated FKM packing has outstanding seal life. Highly corrosion resistant Stainless steel (SCS3) is used for the body. No beating The DC coil eliminates beating. High-vacuum holding Vacuum holding is stable with little leakage. ack pressure use permissible (reverse vacuum) Note that reverse vacuum is not used with HV5-2F-5 or HV7-5F-5. Precautions lways read page 9 in the introduction and the precautions on page 88 to ensure correct and safe use of this product. Working media Installation Direction when connecting piping Solenoid valve 30

141 Specifications Descriptions Working fluid Working pressure range Pa(abs) Maximum working differential pressure MPa Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Withstanding pressure MPa ack pressure (Note 2) MPa Fluid temperature mbient temperature Orifice mm Straight Cv flow factor Radial Frequency times/min or less Port size Installation position Weight kg 5 HV Series High vacuum solenoid valve HV5- HV5- HV6- HV7- HV7- HV8- HV8-2F-3 2F-5 2F-3 5F-3 5F-5 5F-3 5F-5 Vacuum and inert gas (Note ) to to ø48 flange to to or less or less to 55 0 to to ø52 flange Vertical installation with coil facing upward to to JIS symbol Electrical specifications Rated voltage llowable voltage fluctuation Power consumption W Heat resistance class Temperature rise K H 30 00/200V C (50/60Hz), 24V DC Rated voltage 0% 9 80 C:32.5 DC:40 H 30 Note : Product life may drop markedly depending on dryness. Note 2: Pressurizing from port with port released to atmosphere is possible. (Note that reverse vacuum is not used with HV5-2F-5 or HV7-5F-5.) How to order HV 5 2F 3 3H C00V Model No. Series Connection C Orifice Note on model No. selection D Option Note : Symbol C 5 is not used for the HV6. Note 2: Symbol D 3H, 3K, 3HF, and 3KF are not used for HV6 or 8 C voltage specifications. Note 3: The old HV-2-2F is equivalent to HV5-2F-5. Note 4: The old HV-5-2F is equivalent to HV7-5F-5. E Voltage Symbol Series 5 Small Large Connection 2F 5F D lank 3H 3K F 3HF 3KF Descriptions Flange ø48 Only HV5, 6 is available Flange ø52 Only HV7, 8 is available C Orifice ø8 for HV5, 6 3 ø2 for HV7, 8 ø2 for HV5 5 ø5 for HV7, 8 Note Option E C00V C200V DC24V None Square terminal box with light G/2 Note 2 Square terminal box G/2 Note 2 With companion flange Square terminal box with light G/2 + companion flange Note 2 Square terminal box G/2 + companion flange Note 2 Voltage C00V(50/60Hz) C200V(50/60Hz) DC24V 3

142 5 HV Series Internal structure and parts list port 6 7 ø34 ø port No. Parts name Material Core Coil Plunger assembly Spring Core O ring ody O ring ase cover SUS405 SUS405,FKM SUS304 SUS403 FKM SCS3 FKM SUS304 Dimensions HV* D E Line diode F J K port ø34 ø24 port 3 d C 2 ø4.5(hv5/6) I 2 ø5.8(hv7/8) Note: This is used as the bolt through holes. Terminal box G 6 I 45 H Note: The line diode is included only with HV6 and HV8 C specifications. terminal box cannot be assembled for this series. Note: Part of the internal structure differs for the HV* -* * F-3. Model No. Symbol HV5-2F-3 HV5-2F-5 HV6-2F-3 HV7-5F-3 HV7-5F-5 HV8-5F-3 HV8-5F-5 ctuation NC NC NC NC NC NC NC C D E F G H I d J M4 4-M4 4-M4 4-M5 4-M5 4-M5 4-M K

143 Dimensions 5 HV Series Dimensions Companion flange dimensions 8 C0.5 Straight piping Radial pipe 4-d Stainless steel pipe for piping (JIS G3459) a b c Welded port port port port Companion flange dimensions Model No. Symbol ctuation HV5-2F-3 HV5-2F-5 HV6-2F-3 HV7-5F-3 HV7-5F-5 HV8-5F-3 HV8-5F-5 NC NC NC NC NC NC NC a b c d Mounting bolt O ring ± ± M4-4 M5-4 Installation bolts and applicable O-rings are included when the companion flange is ordered. JIS 240 V-24 JIS 240 V-24 33

144 Vacuum delay solenoid valve HVL 42 Series Solenoid valve with OFF delay Model No. Port size Orifice Voltage HVL2 Rc/8,/4 Double barbed joint/nw0/nw6.2 24V DC/00V C/200V C HVL42 Rc/8,/4 Double barbed joint/nw0/nw V DC/00V C/200V Prevent oil from rising when service is momentarily interrupted. Delay leak Using the CR circuit, the vacuum is broken in a several second (0 to 0 seconds) interval when power stops. (0 to 8 seconds only for HVL2 C) Easy time setting Time is easily set with a screwdriver. Separable The circuit and valve can be separated and installed. High vacuum This valve has high-vacuum holding, with a valve seat and external leakage of.3x0-9 Pa m 3 /s(he) or less. Free pressure direction Connection to the vacuum is made from either port. Highly corrosion resistant The body is of SUS303 and the valve seat of FKM. Selective connection The Rc/8 or /4-inch doublebarbed joint and NW0.6 vacuum clamp joint are used. Main applications Use as a delay vacuum solenoid valve (HVL Series) Prevent oil from rising during Valve (2) momentary service interruption [Isolation valve] Chamber Valve (2) Pump Chamber Pump Valve () Oil rises Valve () If the pipe is not released into the atmosphere when the pump stops... <Fig. > [Vacuum break valve] (HVL) <Fig. 2> Usually, after the machine stops, piping between the chamber and pump is released into the atmosphere at valve () to prevent oil from entering pipes. To protect the chamber (maintain vacuum, prevent contamination), piping must be released into the atmosphere after valve (2) is completely closed. If valve () opens before valve (2) completely closes... Rising of oil is prevented and the chamber protected by using the HVL Series!! Power ON OFF t service interruption * Chamber is contaminated * Vacuum drops Power ON OFF t service interruption Valve (2) Open Close Valve (2) Valve (2) Open Close Valve () Open Close Time T until valve (2) completely closes Chamber Valve () Pump HVL series Open (Valve ()) Close Time T until valve (2) completely closes Set HVL Series delay time (see page 35) longer than time T <Fig. 3> <Fig. 4> <Fig. 5> 34

145 Precautions lways read page 9 in the introduction and the precautions on page 88 to ensure correct and safe use of this product. Working media Installation Direction when connecting piping Solenoid valve Specifications Descriptions Working fluid Working pressure range Pa(abs) Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Withstanding pressure MPa Fluid temperature mbient temperature Orifice mm Installation position Frequency Port size Cv flow factor Delay time Rated voltage llowable voltage fluctuation Power consumption W JIS symbol HVL2.2 HVL 2 4 Series ir, nitrogen (Note ) to or less or less to 50 0 to Free How to order HVL times/minute or less Rc/8 and /4" double barbed joint, NW0.6 vacuum clamp joint C:0 to 8sec,DC:0 to 0sec C/DC:0 to 0sec 24V DC, 00V C and 200V C (HVL42: 00/200 VC power common, used accordingly by connecting) Rated voltage 0% 4 Note : Robustness may drop markedly depending on dryness. How to order HVL 2 4S 6 5 C00V Model No. Series port connection Note Note on model No. selection Note : When the type designated port and port are the same, designate only one. Example: When port and port are both Rc/8: HVL2-6-5-voltage (correct) HVL voltage (incorrect) Note 2: Power is used accordingly by connecting. C port connection Note D Voltage Symbol 4 Series Orifice.2 Orifice 3.0 Descriptions port connection Note 6 Rc/8 4S /4" double barbed joint 0K NW0 vacuum clamp joint 6K NW6 vacuum clamp joint C port connection Note 6 4S 0K 6K D DC 24V C00V C200V C00V /C200V Rc/8 /4" double barbed joint NW0 vacuum clamp joint NW6 vacuum clamp joint Voltage DC 24V C00V C200V C00/200V For both powers Note 2 Only HVL42 is available Only HVL2 is available Only HVL42 is available 35

146 HVL 42 Series Internal structure and parts list HVL2-6-5 port 3 No. Parts name Material port Socket O ring Washer Core assembly Coil assembly Plunger assembly SUS303 FKM SUS304 SUS36L,SUS405 PT SUS405, FKM,PTFE O ring Spring ody FKM SUS304 SUS303 HVL No. Parts name Material Socket O ring Washer Core assembly SUS303 FKM SUS30-CSP SUS403,SUS36L, SUS405 9 port port Coil assembly Plunger assembly O ring Spring ody Class nylon mold SUS405, FKM,PTFE FKM SUS304 SUS303 36

147 HVL 2 4 Series Dimensions Dimensions HVL2-6-5 DC M4 E D C 2-Rc /8 port C M4 + DELY DJ. F Model No. Symbol HVL2-DC24V HVL2-C00,200V C D E 5 62 F HVL G F C 43 port R3.5 D 4 E port port 2 22 H Model No. Symbol HVL42-DC24V HVL42-C00,200V C 9 20 D E F G H

148 38 MEMOE M O

149 Related products CONTENTS Operation solenoid valve MN3E0/MN4E0 40 MN4G/MN4G 40 Clean exhaust filter FC 4 Fiber tube (joint/tube) Fiber tube 42 39

150 MN3EO/MN4EO/MN4G/MN4G Series 40 Operation solenoid valve (Catalog No. CC-69) (Catalog No. C-23S) MN3EO/MN4EO Series (3, 4 port valve and two 3 port valves integrated type) Extra compact (height 39.5 mm) high-performance block manifold Compact and space saving 40 mm or less valve height is realized with a 0 mm coil width. (CKD conventional part: 46 mm) footprint of equipment is reduced. The product can be installed anywhere. Environment protection Environment-friendly halogen-free leads are used for internal wiring. (T30 type D subconnector) High performance 2 ms response has balanced port and port (CKD data value using type with two built-in 3-port valves) No more bothersome connection Use of connectors enables wiring to be completed during assembly. Specifications MN3E0 MN4E0 Descriptions Working fluid ctuation Valve structure Working pressure MPa Compressed air Pilot operated Soft spool 0.2 to 0.7 Flow characteristics C[dm 3 /(s bar)] b 0.5 to to 0.6 Electrical specifications Rated voltage V DC2, 24 Power consumption W 0.6 Note : Conversion for effective sectional area S and acoustic velocity conductance C is S 5.0xC. MN4G/MN4G Series (3, 5 port valve block manifold) User and eco-friendly next-generation block manifold Ecology Paint-less: Particles are not generated by peeling paint. Indication of material names: Material names are stamped on key components to facilitate recycling, etc. Safety Misoperation prevention incorporated in connection key Ease-of-use Reduced wiring compliance: Serial (compact slave station OPP4) Piping connection: Direct piping type, base piping type TG nameplates available Flexibility Mixed blocks compatible with MN4G and 2 mounting Reliability Responsiveness 2 ms 2 ms. (CKD data value for 4G series) Life 60,000,000 times and over (with clean air at 0.5 MPa pressure) Specifications MN3G MN4G Descriptions Working fluid ctuation Valve structure Working pressure MPa Compressed air Pilot operated Soft spool 0.2 to 0.7 Flow characteristics C[dm 3 /(s bar)] b 0.66 to to 0.30 Electrical specifications Rated voltage DC 2, 24 V C 00 Power consumption W DC2, 24 pparent power V C00V 0.55(0.6).0(.2) Note : Conversion for effective sectional area S and acoustic velocity conductance C is S 5.0xC. Note 2: Values in parentheses apply when a light is installed.

151 FC Series Clean exhaust filter FC Series Revolutionary exhaust for clean rooms. (Catalog No. CC-755) Precise filtration 0.0 m filtration, 99.99% removal High secondary cleanness 00% of 0. m and larger particles are removed *Measurement conditions: 28.3 /min (NR) flow Cost reducing and space saving Work, cost, and space required for conventional external exhaust piping are eliminated. Simplified piping ll external exhaust piping is eliminated by installing the plug on the cylinder and the silencer on the switching valve, simplifying piping. Silencer Exhaust noise is suppressed to 60 d () or less. mple variations Three types: plug, silencer, and modular. Four flow rate series: 0, 00, 200, and 600 / min (NR) are available. Specifications (FC0/FC00/FC200) Model No. FC0 FC00 FC200 Working fluid Compressed air Max. working pressure MPa 0. Min. working pressure MPa 0 Withstanding pressure MPa 0.3 Working temperature range 5 to 45 5 to 40 Port size ø4 ø6 ø8 ø0 ø2 R/8, R/4 R3/8, R/2 Product mass g Filtration rating m 0.0 (removal efficiency 99.99% and over) Secondary cleanness 00% of 0. m and larger particles removed Note Maximum processing rate /min(nr) Note : Flow rate conditions at 28.3 /min (NR) when measuring. For FC0, 0 /min (NR) applies. Specifications (FC300) Model No. Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Working temperature range Port size Product mass g Filtration rating m Secondary cleanness Maximum processing rate /min(nr) FC3000 Compressed air to 45 Rc3/8, Rc/ (removal efficiency 99.99% and over) 00% of 0. m and larger particles removed Note 600 Note : Flow rate conditions at 28.3 /min (NR) when measuring. 4

152 Fiber tube R Joint/Tube (Catalog No. CC-784) Fiber tube for push-in joint This new ultra-thin tube greatly improves usability with enlarged bore size and push-in joint. New outer grasping diameter incorporated ore size enlarged from ø.0 to ø.2, increasing flow by 3-fold Small tube volume saving energy and space Series for clean models uses highly corrosion-resistant material Push-in joint, standard PG series, and clean CG series available Specifications Fiber tube Model No. ntistatic type UP-9402-F Clean type EH-5802 Working fluid Compressed air (Note ) Working pressure range (20 ) (Note 2) Working temperature range Outer diameter inner diameter mm Inner diameter accuracy mm Outer diameter accuracy mm Durometer hardness Min. bending radius (JIS 838) mm Min. installation radius mm urst pressure (20 ) MPa Volume resistivity /cm Material Color -00kPa to 0.8MPa HD to 0 2 ntistatic urethane lack/white/transparent/transparent blue/ transparent green/yellow (Note 3)/red (Note 3) -0 to 60 (to be unfrozen) ø.8 ø kPa to.0mpa HDD Special polyolefin lack/transparent Note : Contact CKD for other working fluids. Note 2: Refer to "Relation of usable temperature and pressure (normal breaking)" for the usable pressure range. Note 3: Yellow and red are available as customized orders. Push-in joint (standard) Model No. PG Series Working fluid Compressed air (Note ) Working pressure range -00kPa to.0mpa Working temperature range -0 to 60 (to be unfrozen) pplicable tube Fiber tube (UP-9402-F, EH-5802) Note 2 Note : Contact CKD for other working fluids. Note 2: Fiber tube for barbed joints (UP-902-F) cannot be used. Note 3: This joint is sold in sets of 0. Push-in joint (clean type) Model No. CG Series Working fluid Clean air (Note ) Working pressure range -00kPa to.0mpa Working temperature range -0 to 60 (to be unfrozen) Lubricant Oil-prohibition pplicable tube Fiber tube (UP-9402-F, EH-5802) Note 2 Note : This joint uses rubber EPDM, and cannot be used with fluids containing mineral oils. Contact CKD for other working fluids. Note 2: Fiber tube for barbed joints (UP-902-F) cannot be used. Note 3: This joint is sold in single sets. 42

153 Fiber tube R Joint/Tube Fiber tube Ultra-thin tube for free piping. This ultra-thin tube is as thin and flexible as leads. Outer diameter of.8, minimum bending radius of 4 mm Electric resistance is 7 7 cm, and prevents electrostatic discharge. Ideal for fine-speed cylinder piping Wide variety of tube colors and joints (Catalog No. C-024S) Specifications Tube Descriptions Working fluid Working pressure range (20 ) (Note ) Working temperature range Outer diameter inner diameter mm Inner diameter accuracy Outer diameter accuracy Min. bending radius (JIS 838) Min. installation radius mm mm urst pressure (20 ) MPa Volume resistivity Material Color cm Dedicated joint Descriptions Port size Working fluid Working pressure range Working temperature range pplicable tube Effective sectional area mm 2 Flow rate (Note 3) /min(nr) UP *-F Compressed air -00kPa to 0.7MPa -0 to 60 (to be unfrozen) (reference value) 0 8 or less (black) 0 2 or less (colors other than black) Conductive urethane lack/white/transparent/transparent blue/transparent green/yellow (Note 2) /Red PTN* M3, M5, R/8, ø3.2 (Note 4), ø4 (Note 4), ø6 (Note 4) Compressed air -00kPa to 0.7MPa -0 to 60 (to be unfrozen) UP *-F Straight, barbed nipple: 0.3 Elbow: 0.2 Straight, barbed nipple: 20 Elbow: 3 Note : Refer to "Relation of usable temperature and pressure (normal breaking)" for the usable pressure range. Note 2: Customized order. Note 3: Flow rate is atmospheric pressure conversion at 0.5 MPa. Note 4: pplicable tube: Soft nylon tube (FH-3224, F-504, F506) Urethane tube (U-9504, U-9506) (Note 2) 43

154 44 MEMOE M O

155 System lineup CONTENTS High Purity Chemical Liquid System 46 Pneumatic components for clean room specification 46 45

156 System lineup Responding to advanced needs for semiconductor manufacturing process control High Purity Chemical Liquid System Component General Catalog WET FINE SYSTEM Responding to advanced needs for semiconductor manufacturing process control High-purity chemical liquid system component Catalog No.C-03 Industry's top results and reliability Realizing high quality with integrated production from design to assembly and packaging in advanced specification super clean rooms Diverse joint variations Pneumatic components for clean room specification Pneumatic components for clean room specification Catalog No.C-033 Use in different applications and clean room levels Pneumatic cylinder Electric driven slider Directional switching valve F.R.unit uxiliary components Electronics components Valve for air blow ccurately producing ultra clean air Model circuit for clean blow system Differential pressure gauge Inside clean room Pressure gauge Main line filter Filter Flow rate sensor Solenoid valve for air blow Needle valve Final filter Exhaust treatment Oil removing filter Regulator Clean air blow is ensured by installing a final filter at the end. 46