Components for air preparation and pressure adjustment. OUT port position ( ) connected Rear side. of IN port. Air tank. directly.

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Components preparation and pressure adjustment P ir Refrigerating ir Overview ir P is a component that enables boosting by s only up to twice primary pressure (.0MPa max.

1 Components preparation and pressure adjustment P ir Refrigerating ir Overview ir P is a component that enables boosting by s only up to twice primary pressure (.0MPa max.) in combination with using air tank but not using electricity. Energy and cost saving will be achieved in total manufacturing lines, since pressure can be increased at the required point in plant. ir tank and optional pressure gauge directly combined to air are also available. Features oosting up to double ratio oosting ratio is adjusted within range of twice primary pressure (.0MPa max.) by pressure adjustment knob, since boosted with compression by piston. Flexible installation This can be installed vertically due to flexible installation attitude. Pipe can be connected from 3 directions. Tool not required pressure adjustment Enabling pressure adjustment by single hand and lock by one push. Futhermore knob can be easily manually adjusted even for high pressure setting. ongitudinal direction shortened compact shape. C O N T E N T S Series variation Product introduction Safety precautions ir (P) ir tank (T) : Standard, : Option uto. drain ir nic ir sensor Pressure OUT port position Option Model JIS symbol Same side of IN port ( ) ottom ir tank directly connected Rear side of IN port Pressure gauge Foot bracket Page ir lank D G S P ir IN OUT EXH

Double high compressed air is obtained. Refrigerating ir less air P Produce high compressed air (.0MPa max.) up to twice primary pressure (equivalent). uto.

2 Double high compressed air is obtained. Refrigerating ir less air P Produce high compressed air (.0MPa max.) up to twice primary pressure (equivalent). uto. drain ir (Option) longitudinal direction Pressure adjustment knob Tool not required and a lock by one push Pressure gauge (option) For primary pressure and secondary pressure Primary pressure (supply pressure) nic oosting to twice pressure ir sensor Pressure Set screw Flexible installation attitude design and flexible installation lways read precautions on page before starting use.

3 Plant wide total cost reduction is achieved. Pressure source Example of increasing thrust of cylinder for welding Pneumatic cylinder ow pressure line air unit Regulator Pneumatic 5 port solenoid valve Regulator Medium pressure line ir tank T ir ir tank Regulator High pressure line ir P Refrigerating ir uto. drain ir nic ir sensor Pressure Other applications. Downsized air cylinder 2. Improving unsatisfied actuator (air cylinder, air motor etc.) output 3. High pressure and quick filling to air tank. oosting in explosive environment 5. For pressure change (such as pressure decrease of line) of plant line ir 3

4 Refrigerating ir uto. drain ir ir P Series WRNING Pneumatic components Safety precautions lways read this section before starting use. Refer to Intro 7 for general precautions. Do not use the air for continuous operation such as in a compressor. The air is designed for partial boosting in a factory, etc. ife is shortened if used for high frequency continuous operation, such as in a compressor. (The air 's nominal life is approximately 5 million times when used under normal conditions) Refer to page for the estimate life calculation. Design & Selection CUTION Do not use this product if vibration exceeds 50 m/s 2 or impact exceeds 300 m/s 2. Pressure is raised by air pressure, so half of the air is discharged during boosting. If the secondary side flow rate must be, the primary side requires a flow rate of + = 2. The inside is cylindrical, so noise of 0 to 0 d (primary side 0.9 MPa and secondary side 0.95 MPa for measurement of m) is generated during boosting. * This is noise when a silencer is used. nic ir sensor Pressure WRNING Do not supply pressure exceeding 0.99 MPa onto the primary side. Check that set pressure does not exceed 0.99 MPa. CUTION Install a on the primary side to remove rust, foreign matter, and drainage. The air compresses compressed air so drainage is discharged easily from the secondary side. Installation of a is recommended to remove any moisture from piping. Install primary side piping at /2 and over to attain sufficient flow. Install a silencer (SW-, S-) or exhaust cleaner (F30-) on the exhaust port of the air. When using exhaust cleaner, common porting of the exhaust port is recommended. Use piping with a stop valve to the air tank's drain port. Regularly discharge from the tank. Installation & djustment There are no set regulations regarding the air 's installation angle, it should optimally be horizontally installed on a flat surface. Install the air using -M depth screw holes on the bottom or 2-M depth screw holes on both sides. Use these screw holes only for installing the air. -M depth OUT port position D ir rear side (air tank fixing side) The bolt used to install the air must not exceed the screw hole depth. Forcibly tightening a long bolt could damage the screw hole and cause air leakage. CKD ir edge 2-M depth

5 P Series foot bracket installed on both ends is available as an option. ( P--) Fix the air tank with the - ø3 anchor bolt hole on the bottom. When directly connecting the air to the air tank (T-2), use OUT port position D, and mount the O ring enclosed with the air tank on the air. Then, fix to the top of the air tank with a hexagon head bolt. ir O ring Hexagon head bolt Hole -ø3 Installation of an air tank and after the air is recommended for attaining stable secondary pressure. Refrigerating ir uto. drain ir WRNING Stop primary pressure and release secondary pressure before maintenance, inspecting, or repairing the air. During Use & Maintenance CUTION When setting pressure, lift the pressure adjustment knob to release the lock, and then the pressure adjustment knob. Secondary pressure increases when the pressure adjustment knob is turned clockwise. Pressure adjustment knob must be locked after using. If primary pressure exceeds set pressure due to fluctuation in pressure, etc., air is released from the pressure adjustment knob. Set a on the primary side, and adjust the pressure at least 0.MPa lower from the set pressure. nic ir sensor Pressure The silencer and pressure gauge are consumables and must be regularly replaced. *Refer to the separate Maintenance Manual (ST-300) for the maintenance procedures. ir

6 Refrigerating ir uto. drain ir nic ir sensor Pressure Functional explanation Primary pressure flowed from IN passes through check valve on IN side, and flows in chamber and. Primary pressure also passes through pressure adjustment section and switching valve, and flows in drive room. Piston moves to left hand due to pressure of drive room. ir in chamber is compressed, and passes through check valve on OUT side, and goes to OUT side. If piston reaches stroke end, changeover switch is pushed, and compressed air is supplied to pilot room of switching valve, and switching valve is switched. Then the air in drive room is exhausted, and the air is delivered to drive room. Therefore, piston moves to right hand and air in chamber is compressed, and passes through check valve on OUT side, and goes to OUT side. oosting on OUT side is compressed, if operations above are repeated. Feedback pressure is transmitted to pressure adjustment section due to OUT side pressure passes through shuttle valve, and boosting is continued until pressure adjustment spring and pressure is balanced. ir P Series JIS symbol Specifications Descriptions Working fluid Max. working pressure MPa Min. working pressure MPa Set pressure range MPa Withstanding pressure MPa Flow m 3 /min. (NR) oosting ratio mbient temperature range C ubrication Port size Weight kg Product sevice life How to order P D G ir Internal air circuit diagram Drive room Fixed orifice P Compressed air From primary pressure+0.mpa to twice primary pressure (0.99MPa max.).5 Refer to the right graph rate flow characteristics Max. double pressure (or equivalent) 0 to 50 (no freezing) Not required (use the turbine oil Class ISO VG32 if lubricated) Rc/2. 5 million (nominal) Switching valve ooster chamber OUT port position lank Same side of IN port D ottom (air tank directly connected) Rear side of IN port Option G Pressure gauge S Foot bracket IN side check valve Pressure adjustment section ooster chamber Note) Option G (pressure gauge) is installed onto air at shipment. (foot bracket) and S (silencer) are attached. IN (primary pressure) Drive room Select switch Piston OUT side check valve Piston OUT side (secondary pressure)

7 P Series Specifications Refrigerating ir Flow characteristics (With air tank T-2 installed, double pressure increase) Secondary pressure (MPa) MPa 0.MPa Primary pressure 0.5MPa Pressure characteristics (Setting: Primary pressure 0.9MPa, secondary pressure 0.97MPa, flow rate 0.02m 3 /min.nr) Secondary pressure (MPa) uto. drain ir Flow (m 3 /min. (NR)) Flow rate characteristics show max. flow rate of air. If primary pressure is constant and secondary side flow rate is increased, max. secondary pressure decreases. Note) ir needs approx. twice secondary side flow rate (max.) for primary side due to structure. Confirm that the instantaneous flow rate is within the curve. Filling characteristics Filling time (second/ ) oosting ratio (time) Filling characteristics show relations between boosting ratio and filling time, if tank etc. filled with compressed air. To find filling time, when filling tank with air, where secondary side air pressure P0, air pressure in tank before filling P, air pressure after filling P2, boosting ratio before filling k and boosting ratio after filling k2, therefore k = P and k2 = P2 are led. P0 P0 Find k and k2 at first, then read filling time t and t2 according to graph where boosting ratio k, k2, finally filling time for tank capacity ( ) is obtained with t = (t2-t) Primary pressure (MPa) Pressure characteristics show variation of set secondary pressure according to primary pressure variation. If primary pressure is decreases, secondary pressure decreases slightly. Pulsation Pulsation width (MPa) Tank capacity ( ) Pulsation shows width of pulsation if air tank is installed onto secondary side of air. Formula of air operational cycle N= Formulation of air service life Since nomin.al service life of operational cycle is 5 million T= Q P+0.7 5,000,000 N0 T-2 N : Operational cycle Q : Required flow (m 3 /min.(nr)) P : Primary pressure (MPa) T : Service life (hour) nic ir sensor Pressure ir Each characteristics are just reference, but not assured conditions.

8 Refrigerating ir uto. drain P Series Internal structure ir E PUSH T E E cross section nic 55 ir sensor Pressure CKD

9 P Series Parts list Part list No. Parts name Material Quantity No. Parts name Material Valve stem () C type snap ring for hole O ring ody block assembly Spring O ring O ring Spacer Steel ball Packing seal Detection valve body Valve stem () Pipe Tie rod O ring Plug with hexagon head hole Plain washer Spring washer Hexagon nut MY packing seal Rod bushing O ring Cylinder tube Piston rod Piston Piston packing seal Head cover Cap Gasket ip packing seal Piston Cylinder Hexagon socket head cap bolt O ring Cylinder ip packing seal Piston Spool Stopper Stainless steel Stainless steel Nitrile rubber luminum alloy Stainless steel Nitrile rubber Nitrile rubber Stainless steel Steel Nitrile rubber Copper alloy Stainless steel Stainless steel Steel Nitrile rubber Stainless steel Steel Steel Steel Nitrile rubber Oil impregnated bearing alloy Nitrile rubber luminum alloy Steel luminum alloy Nitrile rubber luminum alloy luminum alloy Nitrile rubber Nitrile rubber Polyacetal resin luminum alloy Steel Nitrile rubber luminum alloy Nitrile rubber Polyacetal resin luminum alloy Polyacetal resin Soft packing seal Spacer Spacer Soft packing seal C type snap ring for hole Spring sheet Spring Valve seat O ring Slip ring djusting assembly Guard Mounting nut djusting spring Diaphragm assembly O ring O ring Valve seat ottom spring Stud Knob Valve assembly Regulator assembly O ring Cross-recessed tapping screw Fixed orifice O ring Master valve gasket Hexagon socket head cap bolt Cross headed pan Gasket Valve Plug Spring washer Urethane rubber luminum alloy Polyacetal resin Urethane rubber Stainless steel Stainless steel Stainless steel Nitrile rubber luminum alloy Nitrile rubber Polyacetal resin PT resin Polyacetal resin Steel Nitrile rubber Nitrile rubber Copper alloy Stainless steel Polyacetal resin Polyacetal resin Nitrile rubber Steel Copper alloy Nitrile rubber Nitrile rubber Steel Steel Nitrile rubber luminum alloy Copper alloy Steel Discrete consumable parts and options Parts name Part number Remarks Select switch packing set P-K, 3 5, 2, 2, 2, 3 Quantity Refrigerating ir uto. drain ir nic ir sensor Pressure Cylinder section packing seal set P-K2 5,, 2,, 27 2 Switching valve piston assembly Switching valve sealant assembly shuttle valve assembly P-K3 P-K P-K5 3, 32, 37, 3 0 2,, 2, 3, 2, 50, 5 2, 53 2, 5 2 Using parts prior to minor changes ir Diaphragm assembly P-K 0 Pressure adjustment section valve assembly P-K7, 2, 7, 9 assembly P-K, 53 2, 5 2 racket P- For unit Pressure gauge P-GUGE Pressure gauge pc. SW- pc.

10 Refrigerating ir uto. drain ir nic ir sensor Pressure P Series Dimensions P- Optional dimensions racket (P-) installation 5 -ø Rc/2 IN Rc/2 IN Rc/ IN gauge port Rc/2 OUT E PUSH 52 to IN OUT O CK 30 5 H IN OUT H 50 E2 CKD Rc/2 OUT Pressure gauge (P-GUGE) 5 75 (SW-).2 R/ R/2 ø27 ø Rc/2 EXH Rc/ OUT gauge port (2) (2) () 5 2-M depth Rc/2 (OUT port position: ) OUT -M depth 0 Rc/2 OUT (OUT port position: D) () Rc/2(OUT port position: ) OUT

11 Features ir tank directly connected to air P- with compact body. ir tank (related T Series JIS symbol Specifications Descriptions T Working fluid Max. working pressure Hydraulic test pressure MPa MPa Compressed air mbient temperature range C 0 to 50 (no freezing) Capacity Port size Material Weight m 3 kg 0.02 Rc/2 Steel.5 Note: O ring, hexagon head bolt and spring washer are attached to install air. How to order T 2 Refrigerating ir uto. drain ir ir tank Capacity Dimensions Rc/2 ø3 Part model no. T-K (O ring, hexagon head bolt, spring washer) ±0.3 30±0.3 Rc/2 nic ir sensor ø ± Pressure 0± -ø Fixing ir 0± 0±0.3 30±0.3 ø ø view Rc/ 50 3

12 uxiliary valve ( ) Pneumatics auxiliary components Refrigerating ir uto. drain ir CONTENTS Series variation 90 Safety precautions 9 Quick exhaust valve with push-in joint (QE) 9 Quick exhaust valve (QEV2) 9 Shuttle valve (SHV2) 900 check valve with push-in joint (CH) 90 (CHV2) 90 lock valve (FPV) 90 Threshold sensor (PWS) 9 nic ir sensor Pressure uxiliary valve 9

13 Refrigerating Series variation uxiliary valve Quick exhaust and circuit switching valves, etc. are available. ir uto. drain Model Product appearance M5 ø ø / Port size (R, or Rc) / 3/ /2 3/ / /2 Page ir Quick exhaust valve Quick exhaust valve with push-in joint QE-H QE-H QEV2- QEV2- QEV2- QEV2- QEV2- QEV SHV2- nic Shuttle valve check valve with push-in joint SHV2- SHV2- SHV2- SHV2- SHV2-25 CH-M5 CH-H CH-H ir sensor CHV2- Pressure CHV2--J CHV2- CHV2--J CHV2- CHV2- CHV2-90 CHV2-25 CHV2-32 CHV2-0 FPV-M5 lock valve FPV- FPV- FPV- 90 FPV- Threshold sensor PWS-5 PWS- PWS-92 PWS-332 PWS

14 CUTION Pneumatic components (auxiliary valve) Safety precautions lways read this section before starting use. Refer to Intro 7 for general precautions, and to " details on each series. Use this product in accordance with the specifications range. Consult with CKD when using the product for special applications. Use with exceeding the specifications range may result in insufficient performance, and safety can not be secured. This product could not use in special applications and environment. For example, use for special applications including nuclear energy, railway, aircraft, marine vessel, vehicle, medical equipment, equipment, or applications coming into contact with beverage or food, amusement equipment, emergency shutoff circuits, press machine, brake circuits, or for safeguard. Confirm that the product will withstand the working environment. This product cannot be used in environments where functional obstacles could occur. Such environments include high temperatures, a chemical atmosphere, or where chemicals, vibration, moisture, water drip, or gas are present; or where ozone is generated. Do not use the product in the place that the product could directly contact with coolant or spatter, etc., Understand compressed air features before designing a circuit. The same functions as mechanical, hydraulic, and electrical methods cannot be anticipated if instantaneous service interruption and holding are required during an emergency stop. Pop-out, air discharge, or leakage due to air compression and expansion could occur. Design & Selection Safety precautions" in this section for This valve can not be used as a stop valve that has no leakage. Slight leakage is allowed in product specifications. Install a "pressure switch" and "shut-off valve" on the device's compressed air supply side. The pressure switch will disable operation until set pressure is reached. The shut-off valve will exhaust compressed air in the pressure circuit, and will prevent accidents caused by operation of components by residual pressure. Compressor Shut-off valve Pressure Valve Cylinder Indicate the maintenance conditions in the device's instruction manual. The product's function can drop markedly with working status, working environment, and maintenance, and can prevent safety from being attained. With correct maintenance, the product functions can be used to the fullest. Rubber parts deteriorate and life is shortened if ultra dry air is used. Refrigerating ir uto. drain ir nic ir sensor Pressure uxiliary valve 9

15 uxiliary valve Refrigerating ir uto. drain ir nic ir sensor Pressure Piping CUTION Do not remove the package or seal cap on the piping port until just before piping the product. If the piping port cap is removed from the piping port before piping work is started, foreign matter could enter the component from the piping port and result in faults or faulty operation. When connecting pipes, wrap sealing tape in the opposite direction from threads starting 2 mm inside from the end of piping threads. If sealing tape protrudes from pipe threads, it could be cut when screwed in. This could cause the tape to enter the components and lead to faults. Handling push-in joints and tubes Refer to Cautions of joint and tube, and "Safety Precautions" (pages 9 to 9) for handling push-in joints and tubes. lways flush just before piping component. ny foreign matter that has entered during piping must be removed so it does not enter the component. When supplying compressed air for the first time after connecting pipes, do not apply high pressure suddenly. Piping connection could be dislocated or the piping tube fly off, leading to accidents. fter connecting piping, check pipe connections for air leaks before supplying compressed air. pply a leakage detection agent on pipe connections with a brush, and check leaks. Installation & djustment pply recommended tightening torque when connecting pipes. To prevent air leakage and screw damage. First tighten the screw by hand to prevent threads are not damaged, then use a tool. Do not tighten while pressure is applied. (Recommended tightening torque) Port thread M5 Rc/ Rc/ Rc3/ Rc/2 Rc3/ Rc Rc / Rc /2 Tightening torque N m to to to to to to to to to Connect piping so that connections are not dislocated by movement, vibration, or tension. Control of actuator speed will be disabled if piping on the exhaust side of the circuit is disengaged. When using the chuck holding mechanism, the chuck will be released creating a hazardous state. Ensure spaces around the component for installation, removal, wiring, and piping work. Install an air just before the component in the circuit. Dryer ir (5μm or less) 92

16 uxiliary valve Observe the following precautions when using nylon tubes or urethane tubes for piping material. Use recommended tube and CKD plastic plug (GWP Series). Do not use metal plugs. Tube outer diameter precision Polyamide tube : Within ±0.mm Polyurethane tube (up to ø): Within ±0.mm (up to ø): Within mm Use a tube with a hardness of 92 or more. If a tube that does not satisfy diameter accuracy or hardness is used, chucking force may drop or the tube may come off or be difficult to insert. Consult with CKD when using a nondesignated tube or plug. Cut the tube with a dedicated cutter, and cut at a right angle. Do not use a worn or damaged tube. That could be crushed or rupture. Do not reuse a tube that could be deteriorated and deformed. Do not let the tube directly contact other surfaces, it could wear and break. WRNING Stop air and confirm that there is no residual pressure before replacing the tube. During Use & Maintenance Do not use this product for applications that constantly rotate, vibrate or which have a tube that moves vigorously. Use tubing that is within the minimum bending radius but long enough to avoid sharp bends. Consider changes in tubing length caused by pressure when tubing is connected, and provide sufficient length within the minimum tube bending radius. Make sure that the joint and tube are not twisted or pulled, and that moment load is not applied. Do not tighten while pressure is applied. Refrigerating ir uto. drain ir nic ir sensor Pressure uxiliary valve 93

17 Refrigerating ir uto. drain ir nic ir sensor Pressure Features Quick exhaust valve with push-in joint QE Series Port size: ø, ø JIS symbol, space saving inline type ø or ø push-in joint built-in Release to air type and type with exhaust port joint available Standard ozone-resistant materials Ozone-proof materials for degradation prevention are used as a standard for the check packing. Environment compatible products With this RoHS Directive compatible product, all substances which adversely affect the global environment have been eliminated from the materials. Specifications Descriptions Working fluid Max. working pressure MPa Min. working pressure MPa Minimum working pressure MPa Withstanding pressure (at room temperature) MPa mbient temperature range C IN, OUT Port size EXH Product weight Mounting attitude Effective IN OUT mm 2 sectional area OUT EXH mm 2 How to order QE H S pplicable tube outer diameter Option g ø ø QE-H QE-H-S QE-H QE-H-S Symbol Descriptions pplicable tube outer diameter H ø H ø Option lank S Type with exhaust port joint Released to air type ø Released to air Compressed air to 0 (no freezing) Free pplications Quick exhaust valve OUT IN ø ø 7. ir cylinder EXH OUT Quick exhaust valve IN ø Released to air.9 5 port valve 9

18 Internal structure and parts list Released to air type 9 7 QE Series Internal structure and parts list / Dimensions Type with exhaust port joint 9 Refrigerating ir uto. drain No. Parts name Material Resin body PT 2 Exhaust cover PT 3 Rubber sleeve Nitrile rubber ock ring Stainless steel 5 ock jaw rass (with electroless nickeling) Guide ring rass (with electroless nickeling) 7 Release ring cetal resin Valving element stopper rass (with electroless nickeling) 9 Valving element Hydrogen nitrile rubber Dimensions No. Parts name Material Resin body PT 2 Exhaust joint body PT 3 Plug rass (with electroless nickeling) Rubber sleeve Nitrile rubber 5 ock ring Stainless steel ock jaw rass (with electroless nickeling) 7 Guide ring rass (with electroless nickeling) Release ring cetal resin 9 Valving element stopper rass (with electroless nickeling) Valving element Hydrogen nitrile rubber O ring Nitrile rubber ir Released to air type 2-X 2-Y 2-C IN 2 OUT 2-øD Type with exhaust port joint 2 3-Y 3-C 3-X 3-øD øp2 IN OUT øp øp3 nic øp3 øp2 øp EXH E ir sensor EXH ød Pressure Symbol ød Tube outer diameter 2 3 øp øp2 øp3 øp C 3 E X Y QE-H QE-H QE-H-S QE-H-S ø ø ø ø Safety precautions lways use within the product specifications. This product is for compressed air. void using with other fluids. Securely insert the tube to the tube end, and make sure that the tube cannot be pulled off. lways provide a differential pressure when using as a shuttle valve. The product could malfunction if there is no differential pressure. Quick exhaust valve uxiliary valve 95

19 Refrigerating ir uto. drain ir nic ir sensor Pressure Features Quick exhaust valve QEV2 Series Port size: Rc/ to Rc JIS symbol arge flow rate design realizing outstanding exhaust Variety of bore sizes available Series are available for piping bore sizes Rc/ to Rc. Wide range of options Fluorine rubber specifications available as options Mounting bracket available (small bore) Eco-friendly product Eco-friendly design is free of lead and hexavalent chrome. Paint-free Sorting is simplified. Specifications Descriptions Working fluid Max. working pressure MPa Min. working pressure MPa Min. operating differential pressure MPa Withstanding pressure MPa Fluid temperature range C mbient temperature range C Port size, 2 Rc 3 Product weight g Mounting attitude Effective sectional area mm / / Operational explanation 3 / / QEV2- QEV2- QEV2- QEV2- QEV2- QEV The valve closes port 3 with pressure from port. ir passes around the valve and flows to port 2. Compressed air to 0 0 to 0 (no freezing) 3/ / Free /2 / () Usage to increase exhaust speed of air cylinder. ir cylinder Quick Quick exhaust 2 exhaust valve 2 valve 3 3/ 7 5 pplications (2) Usage to increase exhaust speed of clutch (or brake) Clutch (or brake) 3 2 Quick exhaust valve When port pressure drops, the valve closes port, opens port 3, and exhausts port 2 air. 5 port valve 3 port valve 3 9

20 QEV2 Series How to order / Internal structure and parts list How to order Quick exhaust valve Refrigerating QEV2 P ir Port size Symbol Port size Rc / Rc / Rc 3/ Descriptions uto. drain Option C ccessory Rc /2 Rc 3/ 25 Rc Option lank No option Fluoro rubber specifications C ccessory lank None ir P Mounting bracket attached Note : The installation bracket is enclosed only with QEV2- and QEV2-. Internal structure and part list QEV2-/ QEV2-/// nic ir sensor Pressure No Parts name Material ody luminum alloy die-casting Plug luminum alloy die-casting O ring Nitrile rubber (fluoro rubber) Valve Hydrogen Nitrile rubber (fluoro rubber) Cross headed pan head machine screw with Stainless steel Quick exhaust valve uxiliary valve * The material in ( ) is for option "" (fluorin rubber specification). 97

21 QEV2 Series Refrigerating Dimensions QEV2-/ ir 2-M3 2 3 uto. drain ø (racket) ir nic ir sensor Port position 2 3 QEV2- Rc / Rc / QEV2- Rc / QEV2-/ (Piping port indication) Port symbol Descriptions IN (input) 2 OUT (output) 3 EXH (exhaust) 30 Pressure Port position 2 3 QEV2- Rc 3/ Rc /2 QEV2- Rc /2 3 (Piping port indication) Port symbol Descriptions IN (input) 2 OUT (output) 3 EXH (exhaust) 9

22 Dimensions QEV2-/25 5 QEV2 Series Dimensions / Safety precautions Refrigerating ir uto. drain 5 Port position 2 3 QEV2- Rc 3/ Rc QEV2-25 Rc Safety precautions Design & Selection (Piping port indication) Port symbol Descriptions IN (input) 2 OUT (output) 3 EXH (exhaust) This valve can not be used as a stop valve that has no leakage. Slight leakage is allowed in product specifications. In the following cases, vibration may cause malfunctions or abnormal noise: When (IN) port side piping is extremely thin and long or when the direction s orifice is small, generating residual or back pressure on the port side. When differential pressure of (IN) port and (OUT) port 2 is lower than minimum working pressure (0.05 MPa) (Recommended tightening torque) Installation & djustment pply recommended tightening torque when connecting pipes. To prevent air leakage or damage of screw. First tighten the screw by hand to prevent threads, then use a tool. Do not tighten while pressure is applied. Install an air just before the component in the circuit. During Use & Maintenance efore replacing tubing, stop the air flow and confirm that no pressure remains. Rc / Rc / Rc 3/ Rc /2 Rc 3/ Rc Tightening torque N m 3 to 5 to 3 to to to 0 to 70 ir nic ir sensor Pressure Quick exhaust valve uxiliary valve 99

23 Refrigerating ir uto. drain ir nic ir sensor Pressure Features Variety of bore sizes available Series are available for piping bore sizes Rc/ to Rc. Wide range of options Fluorine rubber specifications available as options Mounting bracket available (small bore) Shuttle valve SHV2 Series Port size: Rc/ to Rc JIS symbol 2 Eco-friendly product Eco-friendly design is free of lead and hexavalent chrome. Paint-free Sorting is simplified. Specifications Descriptions Working fluid MPa Max. working pressure MPa Min. working pressure MPa Min. operating differential pressure MPa Withstanding pressure C Fluid temperature range C mbient temperature range Port size Product weight Rc g Mounting attitude Effective sectional 2 area mm2 3 2 / 22 / 2 Min. required flow * R/min. 30 *: The valve may not change completely if the flow rate is less than this value SHV2- SHV2- SHV2- SHV2- SHV2- SHV2-25 Operational explanation 2 The valve closes port 3 with pressure from port. ir flows to port 2. Compressed air to 0 0 to 0 (no freezing) 3/ Free / / () Switching manual/auto Manual pplications uto Machinery and equipment 3 2 The valve closes port with pressure from port 3. ir flows to port 2. Shuttle valve Pilot air 900

24 SHV2 Series How to order / internal structure and parts list How to order Shuttle valve SHV2 P Refrigerating ir Port size Option C ccessory Symbol Descriptions Port size 25 lank C Option ccessory lank None Rc / Rc / Rc 3/ Rc /2 Rc 3/ Rc No option Fluoro rubber specifications uto. drain ir P Mounting bracket attached Note : The installation bracket is enclosed only with SHV2- and SHV2-. Internal structure and part list SHV2-/ SHV2-///25 nic ir sensor Pressure No. Parts name ody Material luminum alloy die-casting Shuttle valve uxiliary valve 2 Plug luminum alloy die-casting 3 O ring Nitrile rubber (fluoro rubber) Valve Nitrile rubber (fluoro rubber) 5 Cross headed pan head machine screw with Stainless steel Guide ring luminum alloy * The material in ( ) is for option "" (fluorin rubber specification). 90

25 SHV2 Series Refrigerating ir Dimensions SHV2-/ 2-M3 2 3 uto. drain ø (racket) ir SHV2- Port position 2 3 Rc / (Piping port indication) Port symbol Descriptions (input) 2 OUT (output) SHV2- Rc / 3 (input) nic SHV2-/ 30 ir sensor Pressure SHV2- SHV2-30 Port position 2 3 Rc 3/ Rc /2 3 (Piping port indication) Port symbol Descriptions (input) 2 OUT (output) 3 (input) 902

26 Dimensions SHV2-/25 5 SHV2 Series Dimensions / Safety precautions Refrigerating ir 5 Port position 2 3 SHV2- Rc 3/ SHV2-25 Rc Safety Precautions Design & Selection (Piping port indication) Port symbol Descriptions (input) 2 OUT (output) 3 (input) This valve can not be used as a stop valve that has no leakage. Slight leakage is allowed in product specifications. While there is no direction to the installation, use in a range with little differential pressure (0.05MPa or less), the movement could become dull. Installation & djustment pply recommended tightening torque when connecting pipes. (Recommended tightening torque) Tightening torque N m To prevent air leakage or damage of screw. First tighten the screw by hand to prevent threads are not damaged, then use a tool. Do not tighten while pressure is applied. Rc / Rc / Rc 3/ Rc /2 3 to 5 to 3 to to Install an air just before the component in the circuit. Rc to 70 During Use & Maintenance efore replacing tubing, stop the air flow and confirm that no pressure remains. Rc 3/ to 0 uto. drain ir nic ir sensor Pressure Shuttle valve uxiliary valve 903

27 check valve with push-in joint CH Series Refrigerating and space saving line type for vacuum retention and low pressure use JIS symbol ir uto. drain ir Specifications Descriptions CH-M5 CH-H CH-H Working fluid Max. working pressure Min. working pressure Cracking pressure Working vacuum range MPa MPa MPa kpa MPa Compressed air to to 0 (no freezing) 0 to 0 (no freezing) ø. ø 2. Withstanding pressure Fluid temperature range C mbient temperature range C Port size Product weight g ø5.9 pplicable tube outer diameter ø Flow R/min.(NR) 0 Effective sectional area mm 2 2. Note: Flow rate is the atmospheric pressure conversion value at pressure 0.5MPa. ø. ø 0. How to order CH M5 C Free flow (M5 type only) explanation diagram Free flow (M5 screw side input) nic ir sensor Pressure C Selected only M5 type Port size Tube outer diameter C Free flow M5 H H M5 ø ø ø ø ø M5 screw side input M5 screw side output Note: must be selected according to above specifications. IN OUT Free flow (M5 screw side output) OUT IN room specifications (catalog No. C-033S) Dust generation preventing structure for use in cleanrooms CH P7* 90

28 Internal structure and part list CH-M5 CH-H, H CH Series Internal structure and parts list Refrigerating ir uto. drain No. Parts name Material No. Parts name Material Gasket Nitrile rubber, Steel Valve seat luminum 2 ody rass (electroless nickeling) 7 Packing seal Nitrile rubber 3 Valving element luminum Chuck holder rass (electroless nickeling) O ring Nitrile rubber 9 Chuck Stainless steel 5 Spring Stainless steel Outer ring rass (electroless nickeling) Push ring PT ir Dimensions CH-M5-* (width across flats) M5 (width across flats) 3.5 max30 3 ø (Tube outer diameter) ø9 CH-H ø9 nic ir sensor Pressure check valve with push-in joint uxiliary valve ø (Tube outer diameter) max ø (Tube outer diameter) ø9 CH-H Flow direction ø (Tube outer diameter) 3.5 max2 3.5 ø (Tube outer diameter) ø ø Flow direction 905

29 Refrigerating ir CHV2 Series Perfectly preventing reverse flow of compressed air, etc. Wide variation in types Port size: Rc/ to Rc/2 JIS symbol uto. drain ir nic ir sensor Specifications Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Cracking pressure MPa Fluid temperature C mbient temperature C Port size Rc Product weight g Effective sectional area mm 2 Features Wide variation Series are available for piping bore sizes Rc/ to Rc /2. and lightweight The body has been downsized compared to CKD conventional parts, with an average volume of 3% and average mass of 25%. mple options Fluor rubber specifications and oil-prohibition specifications available as options. n installation bracket is available for small bore sizes. Neat shape Eco-friendly product Products can be sorted and processed for recycling. How to order CHV2 J P CHV2- CHV2--J CHV2- CHV2--J CHV2- CHV2- CHV2- CHV2-25 CHV2-32 CHV2-0 Compressed air to 0 0 to 0 (no freezing) / / 3/ /2 3/ / / Operational principle Pressure 90 Port size flow compact type Note Note : flow compact type (J) is applicable only for port size Rc/ () and Rc3/ (). Note 2: Options are indicated as alphabetic order. (P) Note 3: ttachment of mounting is applicable for CHV2-, CHV2--J, CHV2- and CHV2-. Option Note 2 C ccessory Note 3 Symbol Descriptions Port size Rc/ Rc/ Rc3/ Rc/2 Rc3/ 25 Rc 32 Rc/ 0 Rc/2 Option lank No option Fluoro rubber specifications P Oil-prohibited specifications C ccessory lank None P Mounting attached room specifications (catalog No. C-033S) Dust generation preventing structure for use in cleanrooms CHV2 CHV2 P7* P0 If pressurized from arrow direction on the side body, the valve fully opens, and the flow turns to free flow. If pressurized from reverse direction of arrow on the side body, the valve closes, and flow is interrupted.

30 I CHV2 Series Internal structure / Dimensions Internal structure and parts list CHV2-, -J CHV2- to Refrigerating ir uto. drain Parts list No. 2 3 Parts name Guard O ring Tube Valving element Material luminum alloy Nitrile rubber (fluoro rubber) luminum alloy Nitrile rubber (fluoro rubber) No. 5 7 Parts name Valve guide Coil spring Guard O ring Material Polyacetal Stainless steel luminum alloy Nitrile rubber (fluoro rubber) * The material in ( ) is for option "" (fluorin rubber specification). Dimensions ir F Port size øk G J øc D Dimensions table Port size 2-E (only CHV2-, -J,, -J) øc D H E F G H I J øk nic CHV2- CHV2--J CHV2- CHV2--J CHV2- CHV2- CHV2- CHV2-25 Rc/ Rc/ Rc3/ Rc/2 Rc3/ Rc M2.5 M ir sensor Pressure CHV2-32 CHV2-0 Rc/ Rc/ Safety Precautions During Use & Maintenance Installation of CHV2 fter temporarily tightening the mounting port by hand, tighten with the width across flats using a tool. When connecting piping, tighten within the recommended tightening torque. When removing piping from this product, use the width across flats of piping to be removed. If the width across flats on the opposite side are used, the cover could loosen and lead to external leaks. uxiliary valve Check JIS symbols on the product name and pipe accordingly. If pressure is applied from IN, fluid will flow freely. If pressure is applied from OUT, fluid will be shielded. The side of the cover with a groove is IN, so check the direction when piping. Use this across widths when removing 907

31 Refrigerating ir uto. drain ir nic ir sensor Pressure Specifications How to order FPV 0 Features lock valve FPV Series Port size: (Rc or R)/ to /2 JIS symbol valve ideal for preventing dropping and for cylinder braking. and lightweight The body has been greatly downsized compared to CKD conventional parts, with an average volume of 75% and average mass of 50%. Wide range of choices Series variations from M5 to R/2 bore sizes enable direct cylinder installation. Descriptions FPV-M5 FPV- FPV- FPV- FPV- Port size Main side applicable tube O.D. Pilot side applicable tube O.D. M5 ø ø ø R/ ø Rc/ M5 ø R/ ø ø Rc/ M5 ø R3/ ø ø Rc3/ Rc/ ø R/2 ø ø Rc/2 Rc/ Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Compressed air Pilot air pressure Fluid temperature mbient temperature MPa C C * Refer to a separate table on page to 0 0 to 0 (no freezing) Product weight g Effective sectional area mm Port size pplicable tube outer diameter Port size M5 M5 R/ R/ R3/ R/2 pplicable tube outer diameter Port size M5 O ø 0 ø ø ø Rc/ Rc/ Rc3/ Rc/2 not available. pplications Used for cylinder position locking circuit Used for cylinder braking circuit FPV FPV FPV 90

32 Operational principle Valve body Internal structure and parts list Dimensions Cylinder port Pilot signal To valve The valve opens if there is a pilot signal, but closes if the pilot signal is cut off FPV-M5-0 HEX3 FPV-- ø.5 HEX HEX ø ø.5 ø 9.7 M50. M5X0. Screw depth length Pilot air pressure Set pilot air pressure within the specified range. No Pilot air pressure (MPa) 0 FPV--0 HEX Parts name body Rotary shaft Packing seal Rotary shaft O ring Packing seal O ring O ring Valve body ody Spring O ring Push-in joint FPV--0 FPV--0 ø.5 ø.5 FPV Series Dimensions Material PT (flame resistance resin) rass (electroless nickeling) Nitrile rubber rass (electroless nickeling) Nitrile rubber Nitrile rubber Nitrile rubber Nitrile rubber rass (electroless nickeling) PT (flame resistance resin) Note Stainless steel Nitrile rubber Note : Zinc alloy die-casting is applied for female thread type. R/ ø.5 C Pilot air pressure setting range Media pressure (MPa) ø ø ø ø ø C D.5.0 Refrigerating ir uto. drain ir nic ir sensor Pressure lock valve uxiliary valve (2.5) 3 D. R/ ø.2 Rc/ 909

33 FPV Series Refrigerating Dimensions 0 FPV-- 0 ø FPV-- M5X0. HEX Screw depth length ir uto. drain HEX D ø HEX (.) 25.5 ir R/ ø 0 FPV-- C ø ø 25 R/ FPV-- HEX3 ø.9 Rc/ Rc/.3 HEX D ø ø HEX 22. (.) nic R3/ ø22.5 C R3/ ø22.5. Rc3/ ir sensor FPV-- FPV-- Pressure ø HEX3 Rc/ HEX2 HEX2 R/2 ø27 D C ø ø R/2 ø (.) Rc/2 FPV--0 FPV--0 FPV--0 FPV-- FPV-- FPV-- ø3. ø.3 ø.3 ø.3 ø.3 ø.3 ø ø ø ø ø ø C D

34 FPV Series Cautions Safety Precautions Design & Selection Confirm that PTFE can be used. The sealant contains PTFE (polytetrafluoroethylene resin) powder. Check that this poses no problem during use. Installation & djustment (Piping) When supplying compressed air after connecting pipes, check leaks at all piping connections and actuator sections. Cases may occur when position locking or braking do not function correctly. Set pilot and main pressure within the specified pressure. If actuator load is high, main pressure increases and cannot be maintained. Refrigerating ir uto. drain ir nic ir sensor Pressure lock valve uxiliary valve 9

35 Refrigerating ir Threshold sensor PWS Series Detect exhaust pressure near the stroke end accurately Port size: (Rc or R)/ to /2 JIS symbol S P & Maker uto. drain ir nic ir sensor Pressure Specifications Universal coupling type connector Descriptions PWS-5 PWS- PWS-92 PWS-332 PWS-22 Working fluid Compressed air Max. working pressure Min. working pressure Withstanding pressure MPa MPa MPa Working air temperature C 5 to 0 mbient temperature C Port size M5 R (c)/ - to 0 (no freezing) R (c)/ R (c)3/ R (c)/2 Effective sectional area mm Flow R/min. (NR) Note Product weight kg uilt-in sensor module Descriptions PWS-P PWS-M Output method Compressed air Electric Switchover pressure MPa Note Working air temperature C 5 to 0 mbient temperature C - to 0 (no freezing) Effective sectional area mm 2.2 Flow R/min. (NR) Note 0 Output connection Voltage Contact ø push-in joint 0.5mm 2 3 wire 250 VC 5 or VDC 5W or less C Contact Class Insulation class pplicable tube O.D. ø.0, bore size ø2.5 rigid nylon tube Note : The flow is a value at pressure 0.5MPa. Note 2: Select pressure for P-P is that output by the air pressure signal to port S. Select pressure for P-M is the pressure changed by the electrical contact. 9

36 Operational principle The threshold sensor is attached like a joint to the cylinder port. This sensor detects pressure change generated at both ends of the piston or a drop in exhaust pressure (P2) near the stroke end and issues an air pressure signal (S) when P2 < / P. (Refer to Fig., 2) Pressure Directional switchover point How to use Inlet side pressure: P Exhaust side pressure: P2 Cylinder stroke start point Threshold sensor working pressure Cylinder stroke end Output S input Ps Fig. Fig. 2 limit switch is used to confirm cylinder operation. If it is difficult or a problem to install a limit switch, this joint threshold sensor can be used. (Refer to Fig. 3) a b Master valve P P2 To valve PWS Series Operational principle Refrigerating ir uto. drain ir Connection and installation a S b S P P2 Fig. 3 The modular threshold sensor consists of two parts, a build-in sensor module and free joint connector. Connector (free joint type) The sensor (detector) to be installed directly above the cylinder port is attached to the connector with a clip. The speed or cylinder stop valve, etc., can be attached above the connector. Parts are tightened in the connector port with the hexagon socket bolt found inside the connector. (Refer to Fig. 5) uilt-in sensor module Signal output can be either by selected from air pressure or electric. (Refer to Fig. ) Cylinder nic ir sensor Hexagon socket head bolt Threshold sensor Pressure PWS-M ømm Push-in joint Clip Fig. PWS-P lack lue rown Hexagon socket head bolt Hexagonal wrench Connection Fig. 5 Threshold sensor uxiliary valve Pneumatic outlet module ømm tube connection Electric output module (C contact) lue lack rown 93

37 PWS Series Refrigerating ir uto. drain ir Dimensions PWS-* * 2 E C D Width across flats of hexagon head.5 G Main port F Cylinder port PWS M5 PWS- PWS-92 PWS-332 PWS C D 5 E F R/ R/ R3/ R/2 G Rc/ Rc/ Rc3/ Rc/2 PWS-P PWS-M nic ir sensor Pressure Push-in joint ø S port Cabtire cable 2m 0.5mm 2 Conductor (3) Push-in joint ø Ps port

38 Integrated Gas Supply System CONTENTS Product guide 50 IGD3 (CS seal) 5 IGD (W seal) NEW 2 IGD5 (.5 inch size, W seal) NEW 72 SEMI F, F7 (.5-inch size, C seal) compatible valve 2 9

39 Integrated Gas System Series Integrated Gas Supply System IGD3/IGD/IGD5 Series Custom order Greatly improved space saving and maintenance. Overview This was developed for use in the gas supply line of semiconductor manufacturing equipment. Surface mount type air-operated valves and mass fl ow controllers standardized by SEMI are integrated compactly. We offer optimal layout according to your requested fl ow and achieve signifi cant space-saving compared to previous models structured with welded fi ttings. Regulator for process gas PGM series ccurate pressure control made possible Flexible handling of gas line expansion using rails Space-saving fi lter integrated blocks Compatible with both CS and W seals *This product is a rail type product. PT. 50

40 Integrated Gas System Series Features Existing gas jungle Footprint reduction Footprint 0% of conventional Volume % of conventional Improved workability Components can be attached and removed from the top With the rail model, gasline expansion is handled. Simplified heating Improved reliability CS seal/w seal used Increase corrosion resistance (Contamination hardly generated) Welded areas reduced by more than 0% Conventional causes of contamination are greatly reduced by reducing welded areas. Integrated Gas Supply System Improved replacement features The flow path is configured with little internal volume and dead volume. Improved purging Standardization Promoting component standardization 5

41 Integrated Gas System Series Integrated Gas Supply System History IGD5.5 inch size, W seal IGD W seal IGD3 CS seal IGD2 CS seal IGD CS seal 52

42 C C C C C C C C C C C Integrated gas supply manufacturing fl ow Integrated Gas System Series ayout is based on user specifi cations and fl owcharts. ayout MFC MFC MFC MFC MFC MFC CFlowcharts MFC MFC ayout drawing PT PT PT PT PT Parts preparation Device manufacturers and models are selected and prepared based on the user s specifi cations. Jigs are used for positioning and base blocks will be installed. ssembly ssembly 2 Integrated devices are installed. Completion Inspection 53

43 Integrated Gas System Series IGD Components for integrated gas supply ir operated valve for IGD Custom order NEW MGD series - Newly redesigned with the environment in mind *See page for previous model How to order Specifications Descriptions Working fluid Working pressure range Pa (abs)-mpa (G) Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s.he External leakage Pa m 3 /s.he Cv flow factor (, under pressure) Connection NC Operating pressure MPa NO Control port Material ody Diaphragm Sheet MGD-R-0 MGD-R- Inert gas/process gas.3 - to to to 0 - to or less.0 - or less 2. - or less inch W seal (nominal.35) 0. to to 0.5 M5 SUS3 Ni-Co alloy PCTFE MGD R 02 W 2 Series Valve shape C Seal shape D ctuation (V) <Example of model number> MGD-R-02-W- Series : ir operated valve for IGD Valve shape : 2-station block type valve (3-port) C Seal shape : W seal (nominal.35) D E ctuation (V) : NC ctuation (V2) : NO E ctuation (V2) Symbol Series MGD ir operated valve for IGD Descriptions Valve shape 0D -station block D type valve (2-port) 0X -station block X type valve (3-port) 0Y -station block Y type valve (3-port) 02 2-station block type valve (3-port) D -station block D type valve (2-port) C Seal shape W W seal (nominal.35) D ctuation (V) Cv value Note : Installation bolts, gasket, actuator and drive air fitting are not included. Please purchase them separately. Note 2: Contact with our sales office if a type with installation bolts is required NC 2 NO 3 NC (with proximity sensor (energized when valve closed)) NO (with proximity sensor (energized when valve opened)) 5 NC (with proximity sensor (energized when valve opened)) NO (with proximity sensor (energized when valve closed)) E ctuation (V2) NC 2 NO 3 NC (with proximity sensor (energized when valve closed)) NO (with proximity sensor (energized when valve opened)) 5 NC (with proximity sensor (energized when valve opened)) NO (with proximity sensor (energized when valve closed)) 2

44 MGD Series Dimensions Dimensions -station block MGD-R-0D (With proximity sensor) MGD-R-0X (With proximity sensor) (3) (5) (79) () b 5.5 b a c a c b b a c a c MGD-R-0Y (With proximity sensor) MGD-R-D (With proximity sensor) () () (92) () a b c a c b b b a c a c 2-station block MGD-R (With proximity sensor) c 22 c 3 3 (79) () (79) b a b a V2 V2 c c V V b a b a 3

45 Integrated Gas System Series IGD Components for integrated gas supply Flow control adjustment valve for IGD Custom order Specifications Descriptions Working fluid Working pressure range Pa (abs)-mpa (G) Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Cv flow factor (adjusting range) Connection Material ody Diaphragm *The product has a cover. MFGD-D-W- MFGD-D-W- Inert gas/process gas.3 - to to 0 - to 0 /0 or less of maximum Cv flow factor to to 0.2 W seal (nominal.35) SUS3 Ni-Co alloy How to order Dimensions MFGD D W MFGD 39 Series Symbol Descriptions Series MFGD Flow adjusting valve for IGD 2 Valve shape Valve shape D Shape: -station block D type valve (2-port) 30 C Seal shape C Seal shape W Seal shape: W seal (nominal.35) D Cv flow factor (adjusting range) D Cv flow factor (adjusting range) Cv flow factor (adjusting range) to 0.03 Cv flow factor (adjusting range) 0.02 to 0.2 Note : Installation bolts and gasket are not included. Please purchase them separately. Note 2: Contact with our sales office if a type with installation bolts is required. <Example of model number> MFGD-D-W- Series : Flow control adjustment valve for IGD Valve shape : -station block D type valve (2-port) C Seal shape : W seal (nominal.35) D Other : Cv flow factor (adjusting range) to

46 Integrated Gas System Series IGD Components for integrated gas supply for IGD Custom order Specifications Descriptions Working fluid Working pressure range Pa (abs)-mpa (G) Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s(he) External leakage Pa m 3 /s(he) Cv flow factor (max.) Connection Material ody Sheet Spring Gasket MCGP-0D MCGP-F Inert gas/process gas.3 - to to 0 - to W seal (nominal.35) SUS3 Kalrez SUS3-WP PTFE How to order MCGP 0D W 0 K Dimensions MCGP-0D 39 MCGP-F* E Seat material 2 Series Symbol Descriptions Series MCGP for IGD Shape C Seal shape Shape 0D -station block D type valve (2-port) F Flow direction JXR fitting side to W seal side F2 Flow direction W seal side to JXR fitting side C W Seal shape W seal (nominal.35) / inch JXR male fitting D Cranking pressure D Cranking pressure 0 Cranking pressure 2.3 kpa E Seat material K Seat material Kalrez Note : Installation bolts and gasket are not included. Please purchase them separately. Note 2: Contact with our sales office if a type with installation bolts is required. 39 / inch JXR male 7 7 <Example of model number> MCGP-0D-W-0-K Series : for IGD Shape : -station block D type valve (2-port) C Seal shape : W seal (nominal.35) D Cranking pressure : 2.3 kpa E Seat material : Kalrez Kalrez is a registered trademark of DuPont. 5

47 Integrated Gas System Series IGD Components for integrated gas supply Other components for IGD Gasket Name W seal gasket (nominal.35) IGD-UGF-.35GR W seal mounting bolt Name Hexagon socket head cap bolt for W seal (M5, pieces) Hexagon socket head cap bolt for W seal (M5 35, pieces) Hexagon socket head cap bolt for W seal (M5 0, pieces) Hexagon socket head cap bolt for W seal (M5 3, pieces) Contact CKD for details on applicable parts. IGD-OT-M5 - IGD-OT-M5 35- IGD-OT-M5 0- IGD-OT-M5 3- pplicable parts MGD-0D MGD-D MOGD-D MFGD-D MCGP-0D MCGP-F* ypass block (for 2 mm pitch between surfaces) ypass piping block (for 79. mm pitch between MFC surfaces) Sealing flange SEC-G*-W-.5 (STEC MFC) MGD-0X MGD-02 MOGD-0X FC-75 (Hitachi Metals MFC) FC-7 (Hitachi Metals MFC) FC-95 (Hitachi Metals MFC) SEC-7330*-00 (STEC MFC) SEC-730*-00 (STEC MFC) SEC-F730*-00 (STEC MFC) SEC-F70*-00 (STEC MFC) SEC-7350*-00 (STEC MFC) SEC-F750*-00 (STEC MFC) FC-9 (Hitachi Metals MFC) Maintenance tool Maintenance tools ( each: torque driver, torque driver bit, tweezers (gasket mounting tool)) Name Maintenance tool set IGD-MINTENNCE See the Instruction Manual for details on use.

48 IGD Series Other components Top mount block ypass block (for 2 mm pitch between surfaces) ypass piping block (for 79. mm pitch between MFC surfaces) Sealing fl ange (55.) ase block ase block (. mm between surfaces) 32.. ase block 5 (.0 mm between surfaces) 2 / inch JXR male fl ange / inch JXR male

49 Integrated Gas System Series IGD Components for integrated gas supply ir operated valve for IGD Custom order Specifications Descriptions Working fluid Working pressure range Pa (abs)-mpa (G) Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s (He) External leakage Pa m 3 /s (He) Cv flow factor Connection NC Operating pressure MPa NO Operating pressure connection port Material ody Diaphragm Sheet MGD-0 MGD- Inert gas/process gas.3 - to to 0 - to W seal (nominal.35) 0. to to 0.5 M5 SUS3 Ni-Co alloy PCTFE How to order MGD 02 W 2 Series Valve shape <Example of model number> MGD-02-W- C Seal shape D ctuation (V) E ctuation (V2) Series : ir operated valve for IGD Valve shape : 2-station block type valve (3-port) C Seal shape : W seal (nominal.35) D E ctuation (V) : NC ctuation (V2) : NO Symbol Series MGD MGD Descriptions ir operated valve for IGD ir operated valve for IGD (Upgraded version type, for MGD-D only) Valve shape 0D -station block D type valve (2-port) 0X -station block X type valve (3-port) 0Y -station block Y type valve (3-port) 02 2-station block type valve (3-port) D -station block D type valve (2-port) C Seal shape W W seal (nominal.35) D ctuation (V) Cv value Note : Installation bolts, gasket, actuator and drive air fitting are not included. Please purchase them separately. Note 2: Contact with the CKD Sales Office if a type with installation bolts is required NC 2 NO 3 NC (with proximity sensor (energized when valve closed)) NO (with proximity sensor (energized when valve opened)) 5 NC (with proximity sensor (energized when valve opened)) NO (with proximity sensor (energized when valve closed)) E ctuation (V2) NC 2 NO 3 NC (with proximity sensor (energized when valve closed)) NO (with proximity sensor (energized when valve opened)) 5 NC (with proximity sensor (energized when valve opened)) NO (with proximity sensor (energized when valve closed))

50 Integrated Gas System Series IGD Components for integrated gas supply Manual valve for IGD Custom order Specifications Descriptions Working fluid Working pressure range Pa (abs)-mpa (G) Fluid temperature mbient temperature Valve seat leakage Pa m 3 /s (He) External leakage Pa m 3 /s (He) Cv flow factor Connection Material ody Diaphragm Sheet MOGD-0 MOGD- Inert gas/process gas.3 - to to 0 - to W seal (nominal.35) SUS3 Ni-Co alloy PCTFE How to order MOGD D W K S Series Valve shape C Seal shape D Handle color E Other Symbol Series MOGD Manual valve for IGD D Handle color K Handle color lack R Handle color Red Handle color lue Y Handle color Yellow G Handle color Green Descriptions Valve shape D -station block D type valve (2-port) 0X -station block X type valve (3-port) C Seal shape W W seal (nominal.35) E Other S With handle lock (only when valve is closed) lank No key Cv value Note : Installation bolts and gasket are not included. Please purchase them separately. Note 2: Contact with our sales office if a type with installation bolts is required. <Example of model number> MOGD-D-W-K-S Series : Manual valve for IGD Valve shape : -station block D type valve (2-port) C Seal shape : W seal (nominal.35) D Handle color : lack E Other : With handle lock (only when valve is closed) 9

66 Refrigerating Pneumatics auxiliary components ir uto. drain ir CONTENTS Series variation 9 Safety precautions 9 Miniature joint (F) 922 (GW) 930 / mini-type (GWJ) 9 stainless steel type (ZSP) 950 stainless steel type (ZW) 959 Female joint stainless steel type (ZJ) 93 Female joint(mj) / joint (J) 99 Rotary joint (RJF) 97 Fiber tube ntistatic type, clean type push-in joint 9 Push-in joints for fiber tube clean type (standard type / clean type) 9 Flame resistant type push-in joint 99 Push-in joints for fiber tube clean type (flame resistance type) 99 ntistatic type, dedicated joint 02 Tube 0 ntistatic tube (UP-**-F) 09 Soft nylon tube (FH/F) Urethane tube (NU) 3 Urethane tube (U) Coiling tube (KX) Flame resistanttube (SR) Tube knife (Z) 0 nic ir sensor Pressure 9

67 Series variation Refrigerating ir uto. drain Model / product appearance Feature pplicable bore size Port size Page M3 M5 / / 3/ /2 ir Miniature joint F Series GW Series Miniature type arbed, clamp joint Push-in joint For R screw, standard sealant is applied. Flame resistance resin is provided as standard. ø3.2 ø ø ø3.2 ø ø ø ø ø ø mini-type GWJ Series stainless steel type ZSP Series Push-in joint type For R screw, standard sealant is applied. Push-in joint SUS303 or equivalent is used for body metal For R screw, standard sealant is applied. ø3.2 ø ø ø ø ø ø nic ø ir sensor Pressure stainless steel type ZW Series Female joint stainless steel type ZJ Series Push-in joint Flame resistance resin is provided as standard. SUS30 is used for body metal For R screw, standard sealant is applied. Easy Fit mechanism, tightening joint SUS3 is used for body metal ø ø ø ø ø ø ø ø ø Female joint MJ/J Series Tightening joint Can be used for copper tube. ø ø ø ø ø 99 ø ø Rotary joint RJF Series High rigidity and low sliding resistance achieved with built-in bearing mple lineup includes,,, or circuits 97 9

68 Series variation Model / product appearance Feature pplicable bore size M3 M5 Port size / / 3/ /2 Page Refrigerating Push-in joints for fiber tube standard type PG Series Push-in joint PP resin incorporated as standard to increase corrosion resistance For R screw, standard sealant is applied. ø. 9 ir uto. drain Push-in joints for fiber tube clean type CG Series Push-in joint PP resin incorporated as standard to increase corrosion resistance SUS30 is used for body metal ø. 9 ir Push-in joints for fiber tube flame resistant type RG Series Push-in joint Flame resistance resin is provided. For R screw, standard sealant is applied. ø. 99 Dedicated joint for fiber tube PTN* Series With retainer collar For R screw, standard sealant is applied. ø. 02 Tube nic Tube outer diameter Model Feature Page Fiber tube antistatic type (Push-in joint) Fiber tube clean type (Push-in joint) Fiber tube flame resistant type (Push-in joint) Fiber tube antistatic type ntistatic tube Soft nylon tube Urethane tube Extremely fine air tube as fine and flexible as lead wire. ppropriate where difficult to pipe or short piping such as narrow and tiny space, etc. High corrosion resistant materials (special polyolefin) incorporated for use in cleanrooms. Ideal for fields a requiring clean environment, including semiconductor manufacturing, medicine, and foodstuff manufacturers. Push-in joint tubing using flame-resistant materials. Suitable for piping in narrow space while maintaining flexibility. Extremely fine air tube as fine and flexible as lead wire. Outstanding flexibility and high piping freedom enable piping in difficult places such as small spaces. This tubing prevents electrostatic discharge and dust from accumulating. Outstanding flexibility and high piping freedom enable piping in difficult places such as small spaces. Very flexible comparing to conventional nylon tube. ppropriate for piping in limited space or complicated piping. Due to new manufacturing process, as same outer diameter as it was, while larger inner diameter and increased strength are realized. This piping tube is also used for larger than flow rate. ø. ø3.2 ø ø ø ø ø ø ø ir sensor Pressure Urethane tube Durable and flexible due to high mechanical strength. Coiling tube This is a coiling extensible tube. Flame resistant tube Flame retardant material used epoch-making tube. When welding spark, etc., contact, tube does not last burning. 9

69 Refrigerating ir uto. drain ir nic ir sensor WRNING Pneumatic components (joint ) Safety precautions lways read this section before starting use. Refer to Intro 7 for general precautions, and to " Safety precautions" in this section for details on each series. Use the product within specifications. Using this product with fluid other than compressed air or at a pressure or temperature exceeding the specifications could result in rupture, the tube coming off, or leakage. void installing this product outdoors or where it is exposed to direct sunlight. Do not use the normal joint if electrostatic discharge could build up. Otherwise faults or failure could occur. n antistatic joint and antistatic tubing should be used in such a case. Do not constantly push down or apply a load onto the push-ring for the push-in joint. The tube may lose its ability to hold. When transporting an assembled product, avoid positions which constantly press down on the push ring. CUTION Confirm that the product will withstand the working environment. This product cannot be used in an environment where it could be functional damage could occur. For example, a special environment reaching high temperatures, having a chemical atmosphere, or where vi- Design & Selection Installation & djustment bration, humidity, moisture or gas are present. n environment where ozone is generated. Outdoors or where the product could be subject to direct sunlight. Where cutting oil, coolant or spatter could come in contact. Where static electricity is a problem. Confirm that PTFE can be used. The sealant contains PTFE (polytetrafluoroethylene resin) powder. Check that this poses no problem during use. Consult with CKD if ozone could occur in supplied air. (n ozone-resistant series is available.) void using this product in hot or humid places, or where it could be subject to direct sunlight. Install this product where the temperature is 0 C or less. Flame-resistant resin (equivalent to U9 Standard V-O) is provided for GW Series' push ring, but not for GWJ Series. Check specifications when selecting the product. ZSP Series The chemical resistance is SUS0 or equivalent. Use is not possible if higher chemical resistance is required. Consult with CKD when using in a corrode environment. The joint body could be damaged under some conditions. Pressure WRNING Securely insert the tube until it contacts the joint's tube end, and check that it does not come off the joint. Stop air and confirm that there is no residual pressure before replacing the tube. Piping CUTION Observe the following precautions when using nylon tubes or urethane tubes for piping material. Use the designated tube and CKD plastic plug (GWP Series). Do not use metal plugs. Tube outer diameter precision Polyamide tube : Within ±0.mm Polyurethane tube (up to ø) : Within ±0.mm +0. (ø to) : Within 0.mm Use a tube with a hardness of 92 or more. If a tube that does not satisfy diameter accuracy or hardness is used, chucking force may drop or the tube may come off or be difficult to insert. Consult with CKD when using a nondesignated tube or plug. Use a flame resistant tube or metal pipe where spatter could occur. When using the standard push-in joint on the spiral tube, fix the base of the tube with a hose band. Rotation occurs, and holding performance is decrease. Cut the tube at right angles using a dedicated cutting tool Do not use a worn or damaged tube. That could be crushed or rupture. Do not reuse a tube that could be deteriorated and deformed. Do not let the tube directly contact other surfaces, it could wear and break. Do not use this product for applications that constantly rotate, vibrate or which have a tube that moves vigorously. The elbow type can be mounted by turning it, but must not be used for constant rotating or oscillating applications. Otherwise the joint could be damaged. Provide sufficient allowance in the tube so that it does not bent suddenly. 9

70 Use tubing within the minimum bending radius but long enough to avoid sharp bends. Consider changes in tubing length caused by pressure when tubing is connected, and provide sufficient length within the minimum tube bending radius. Measuring method () Minimum bending radius (JIS 3) The values are based on JIS 3. If tubing is tightly wound around a round rod, indicate the rod radius when variation reaches 25%. (2) Minimum installation radius To measure, simply bend the tube and confirm the radius when tube diameter deformation is %. P lways flush just before piping component. ny foreign matter that has entered during piping must be removed so it does not enter the component. Remove all swarf and foreign debris generated during piping and tube insertion before starting use. When supplying compressed air for the first time after connecting pipes, do not apply high pressure suddenly. Piping connection could be dislocated or the piping tube fly off, leading to accidents. fter connecting piping, check pipe connections for air leaks before supplying compressed air. pply a leakage detection agent on pipe connections with a brush, and check leaks. pply adequate torque when connecting pipes. To prevent air leakage and screw damage. First tighten the screw by hand to prevent threads, then use a tool. Check that the tool's hexagon face and wrench are the correct size. (Reference value) Port thread M3 M5 Rc/ Rc/ Rc3/ Rc/2 ød ar stock ød tube = to 0..0 to.5 3 to 5 to 3 to to -D 2d Tightening torque N m 0 : Deforming ratio (%) d : Tube outer diameter(mm) : Measuring volume (mm) D : Round rod diameter (mm) (Minimum bending radius of 2 time) Shall be the minimum mounting pitch when the deformation rate is %. Min. installation radius = P/2 * The above values apply when the mating screw is a JIS 03 tapered female thread for piping (material: C30D). Connect piping so that connections are not dislocated by movement, vibration, or tension. Control of actuator speed will be disabled if piping on the exhaust side of the circuit is disengaged. When using the chuck holding mechanism, the chuck will be released creating a hazardous state. Confirm that the tube has been inserted properly, and make sure that there is no tension during use. The tube could be dislocated or damaged if there is any tension. Make sure that the joint and tube are not twisted or pulled, and that moment load is not applied. Do not tighten while pressure is applied. Observe the following precautions when using nylon tubes or urethane tubes for piping material. Use a flame resistant tube or metal pipe where spatter could occur. Use a hydraulic hose for common piping for hydraulic and specifications. When using the standard push-in joint on the spiral tube, fix the base of the tube with a hose band. Rotation occurs, and holding performance is decrease. When using for hot liquids, use a soldered screw joint. The push-in join cannot be used. Check that tubing is not worn or damaged. Tubing could be crushed, break, or be dislocated. Use the designated tube. Securely insert the tube to the tube end, and make sure that the tube cannot be pulled off. RJF Series WRNING Fixing method (fixed side) lways provide a gap at the connection of the product (fixed side) and baffle to allow a slight axis deviation. pplying an excessive load on the rotating side axis could result in damage or air leaks. ir piping Fixed side Rotating side IN INDEX Fixing arm affle Provide a gap OUT Cylinder, changeover valve Rotating table Fixing method (rotating side) When using this product (rotating side) in a place with a particularly high movement frequency, always use an accurate tightening method. If the product s moving sections could pose a risk to humans, devices or s, provide a structure so that those sections cannot be directly touched. Provide sufficient space for maintenance and inspection. 9 Refrigerating ir uto. drain ir nic ir sensor Pressure

71 Refrigerating ir uto. drain ir nic ir sensor Pressure CUTION Cut the tube with a dedicated cutter, and cut at a right angle. If the set screw is M3 or M5 screw, the chamfered outer diameter of the female thread side must be within the following values. Port thread M3 M5 Pneumatic components (joint ) Safety precautions lways read this section before starting use. Refer to Intro 7 for general precautions, and to " Safety precautions" in this section for details on each series. Chamfered outer diameter (mm) ø3.3 to 3.9 ø5. to 5. Chamfered outer diameter 5 Female thread side The effective sectional area of the turn elbow (GW*- *-T, GW*-*-2T) varies based on the direction. Installation & djustment ZJ Series Except for separating the main body and nut, do not disassemble or modify joint components. Otherwise functions cannot be guaranteed. This product and nuts are made of the same material (SUS3). When tightening, stop as soon as the body and nut come in contact. Tightening tubing too much could cause seizure at threads, making it difficult to remove Do not tighten too much. tubing. ZSP Series When using a non-ckd tube, make sure that the tube s outer diameter tolerance satisfies the specifications given in Table. Table Tube outer diameter tolerance Tube type Outer diameter dimension tolerance Urethane tube Nominal diameter ±0. Nylon tube Nominal diameter ±0. Use within the recommended tightening torque range given in Table 2. Table 2 Recommended tightening torque Port thread Tightening torque N m M5.0 to.5 R/ 7 to 9 R/ to R3/ 22 to 2 R/2 2 to 30 The joint can be rotated to a random direction and mounted. However, this product must not be used for constantly rotating or swaying applications. Keeping The joint is made of highly corrosion-resistant material, but rust could spread from another point. void storing this part with products made of other materials, and store in a clean, dry place. ZJ Series Store this product with nuts as a set. If parts are stored separately, the body and nut threads or body protrusions (seals) could be damaged or connection faults or leaks occur. 9

72 During Use & Maintenance Refrigerating CUTION Mounting and removal Installation Tube ZJ Series Installation ody Sleeve integrated nut ir uto. drain 2 3 Push the tube in until it contacts the tube end. Check that the tube is not dislocated from the joint. Tube goes in to mm into the end of the joint body. The end of the mounted tube must be cut at a right angle. Removal While pushing the push ring with a finger, pull the tube to remove it. Pass tubing through the sleeve integrated with the nut. Insert tubing into the main body, and tighten the sleeve integrated with the nut until it contacts the body. Stop tightening the sleeve integrated with the nut when the body and nut come in contact. Tightening tubing too much could cause seizure at threads, making it difficult to remove tubing. Removal oosen the sleeve integrated with the nut and pull out tubing. The sleeve integrated with the nut can be reused. 2 ir nic ir sensor Pressure 9

73 Refrigerating ir uto. drain F Miniature joint Port sizem3 to /(Rc or R) types of miniature joints are available with port size M3, M5, bore size ø3.2, ø, ø ir arbed joint Straight/FTS pplicable tube O.D. : ø3.2 to ø Page : 92 Elbow/FT pplicable tube O.D. : ø3.2 to ø Page : 92 Double screw nipe ranch/ftt pplicable tube O.D. : ø3.2 to ø Page : 92 Socket arbed nipple/fts-0 pplicable tube O.D. : ø3.2 to ø Page : 92 Clamp joint Straight/FCS pplicable tube O.D. : ø3.2 to ø Page : 925 Elbow/FC Straight/FNS Straight/FSS Elbow/FS ranch/fst pplicable tube O.D. : ø3.2 to ø Page : 925 djustablesocket Page : 925 Page : 925 Page : 92 Page : 92 ush Elbow/F ranch/ft Cross/FX Deforming union Tee/FY FS nic ir sensor Pressure Page : 92 Page : 92 Page : 927 Page : 927 Page : 927 ulk head Plug Extension Manifold FWS sales unit : 5 pieces FP FS FM sales unit : piece FMH sales unit : piece Page : 927 Page : 92 Page : 92 Page : 92 Page : 92 Gasket FGS sales unit : 0 pieces Page : 92 If sales unit is not specified, the product is packed pcs/ bag. 922

74 Specifications Descriptions Working fluid Max. working pressure MPa mbient / fluid temperature C pplicable tube Note: Use urethane tube within 0 to 0 C range. (Refer to page 0 for the dimensions of tube and working pressure.) How to order F Miniature joint C Shape D Flow path shape D Port size Internal structure and parts list C pplicable tube O.D. Ozone specifications ( 5) F P room specifications (catalog No. C-033S) F P0 F Compressed air 0.7 or less -5 to 0 (no freezing) Soft nylon tube (model no. FH-322, F-0, F-0) Urethane tube (model no. U-950, U-950) Note Note : Refer to model no. sections in dimensions (pages 92 to 92) for detailed combination of model no. Note 2: Sales unit is pieces/ bag. Refer to the table on page 922 for model sales units. F Series Specifications Refrigerating ir uto. drain ir nic ir sensor Pressure 2 3 Figure shows FC type. No. Parts name Material olt O ring Clamp ring ody Gasket rass Nitrile rubber rass rass Nitrile rubber, Steel Treatment less nickeling less nickeling less nickeling 5 Safety Precautions () If urethane tube is used with 0 and over, use a clamp joint. (2) Use a nylon tube with tolerance of diameter within ±0., while urethane rubber tube +0. within 0.. (3) Type with slit on clamp ring of clamp joint is for tube O.D. 3.2mm. () If elbow, branch, cross, deforming branch or barbed joint is used at frequently moving tube section, trouble may occur. So please avoid use in such place. (5) ending radius of tube is to be the right value and over near a joint. Minimum bending radius mm arbed joint Clamp joint ø3.2 Soft nylon ø ø Soft nylon Soft nylon 0 Urethane Urethane 0 Miniature joint 9

75 F Series Refrigerating Dimensions: arbed joint (straight, elbow, branch, barbed nipple) arbed joint Straight/FTS Elbow/FT ir uto. drain E *D ir J K øh K J E øh nic ir sensor pplicable tube O.D.ø E Min. bore size H J K FTS-M3 FTS-M5 FTS- FTS-M5 FTS- ø3.2, ø ø3.2, ø ø3.2, ø ø ø M30.5 M50. R/ M50. R/ Effective sectional area (mm 2 ) ranch/ftt arbed nipple/fts* 0 D pplicable tube O.D.ø D E Min. bore size H J K FT-M3 ø3.2, ø.5 5 M FT-M5 FT-M5 ø3.2, ø ø 3.5 M50. M Effective sectional area (mm 2 ) Pressure øh ø K J øh J J E 92 pplicable tube O.D.ø D E Min. bore size H J K FTT-M3 FTT-M5 FTT-M5 ø3.2, ø ø3.2, ø ø 22 5 M30.5 M50. M Effective sectional area (mm 2 ) pplicable tube O.D.ø Min. bore size H J FTS-0 FTS-0 ø3.2, ø ø Effective sectional area (mm 2 ) 2..

76 Dimensions: Clamp joint (straight, elbow), double screw nipple (straight), socket (straight) Clamp joint Straight/FCS Elbow/FC F Series Dimensions Refrigerating ir E pplicable tube O.D.ø E Min. G I Effective bore sectional size area (mm 2 ) FCS3-M5 FCS3- FCS-M5 FCS- FCS-M5 FCS- ø3.2 ø3.2 ø ø ø ø 7 7 M50. R/ M50. R/ M50. R/ Double screw nipple Straight/FNS K K I 2-E øg Min. bore size Socket K 2.9 FC3-M5 FC-M5 FC-M5 Straight/FSS J pplicable tube O.D.ø ø3.2 ø ø *D D bore G I K... 9 Min. size... I M Effective sectional area (mm 2 ) uto. drain ir nic ir sensor Pressure Miniature joint E øg E Min. bore size K FNS-M3 FNS-M5.5 7 M30.5 M Effective sectional area (mm 2 ) FSS-M3 FSS-M5.5 7 E M30.5 M50. 7 Effective sectional area (mm 2 ) 9 925

77 F Series Refrigerating ir uto. drain ir Dimensions: Double screw nipple (elbow), Socket (branch), djustable socket (elbow, branch) Double screw nipple Socket Elbow/FS-M5 ranch/fst-m M M50. Effective sectional area mm 2 Effective sectional area mm 2 nic djustable socket Elbow/F ranch/fst ir sensor Pressure C D C K K J J 2-E 3-E Min. C D E bore size J K F-M3 F-M M30.5 M Effective sectional area (mm 2 ) Min. C E bore size J K FT-M3 FT-M5 5 9 M30.5 M Effective sectional area (mm 2 )

78 Dimensions: djustable socket (cross, deforming tee union), bush, bulk head djustable socket Cross/FX-M5 Deforming tee union/fy-m5 F Series Dimensions Refrigerating ir uto. drain M50. Min. bore size.mm Effective sectional area.7mm M50. Min. bore size.mm Effective sectional area.7mm 2 ir ush FS M50. N M30.5 ulk head FWS Material SS00D (With galvanizing) O M50. nic ir sensor E M ød ød Pressure FS-M5/M5 FS-M3M5 7 E N 3 (max) M Effective sectional area mm 2 Miniature joint FS-M5 FS-M5 E R/ R/ N 5 Effective sectional area (mm 2 ) 9 9 D d E M N O FWS-M5 FWS-M5.7.2 M50. Rc/ M M Effective sectional area (mm 2 )

79 Dimensions: Plug, extension, manifold, gasket Plug FP E Extension t F Series Refrigerating ir uto. drain FS-M5 C N M50. Effective sectional area 2.mm 2 ir FP-M3 FP-M5.5 7 C.9 7. E M30.5 M50. N Manifold FM-M5 FMH-M5 nic ir sensor -M5 0 3 Rc/ Rc/ M5 Pressure ø Gasket FGS ød 2 ød D d t FGS-M FGS-M

80 MEMO Refrigerating ir uto. drain ir nic ir sensor Pressure Miniature joint 929

81 Refrigerating ir uto. drain ir nic ir sensor Pressure GW Port size M3 to /2 (Rc or R) Straight type Single straight GWS*-* ulk head female connector GWM*-*-X Plug reducer GWP*-0 pplicable tube O.D.ø Wide connection joints and models Single straight GWS*-*-S Straight GWS*-0 Elbow type Single elbow GW*-* pplicable tube O.D.ø Female, straight GWS*-*-M Different diameter straight GWS*-0 ong elbow GW*-*- pplicable tube O.D.ø ulk head female GWS*-*-E Plug reducer GWS*-*P Single 5 elbow GW*-*-5 pplicable tube O.D.ø ulk head GWS*-*-X 3.2 Page : 93 Page : 93 Page : 93 Page : 93 Page : 935 pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø Plug GWP*-0 / / / / Page : 935 Page : 935 Page : 935 Page : 93 Page : 93 Connecting joint diameter ø pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø Turn elbow GW*-*-T / / / / Page : 93 Page : 93 Page : 937 Page : 937 Page : 937 pplicable tube O.D.ø Connecting joint diameter ø pplicable tube O.D.ø Elbow GW*-0 pplicable tube O.D.ø Tee union type oth push-in branch GWT*-* pplicable tube O.D.ø D type union Tee GWT*-*-D pplicable tube O.D.ø Union Tee GWT-0 pplicable tube O.D.ø Y type union Tee GWY*-0 Page : 937 Page : 93 Page : 93 Page : 93 Page : 93 pplicable tube O.D.ø / / / / / / / / / 930 Sales unit is pieces/ box.

GW Series Series variation Refrigerating oth ports Y tee union GWY*-* Cross shaped GWCR*-0 Tetrapod shaped GWTR*-0 C type plug GWP*-C 2 port turn elbow GW*-*-2T FY type GWFY*-0 Y type plug GWP*-Y

82 GW Series Series variation Refrigerating oth ports Y tee union GWY*-* Cross shaped GWCR*-0 Tetrapod shaped GWTR*-0 C type plug GWP*-C 2 port turn elbow GW*-*-2T FY type GWFY*-0 Y type plug GWP*-Y Tetrapod shaped (with R) GWTR*-* Double Y type GWWY*-0 Cap GWC* FY type (with R) GWFY*-* Page : 939 Page : 939 Page : 939 Page : 939 Page : 90 Double Y type (with R) GWWY*-* lanking plug GWP*- Page : 90 Page : 90 Page : 90 Page : 9 Page : 9 type plug GWP*- pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø Page : 9 Page : 9 Page : 92 Page : 92 Page : 92 pplicable tube O.D.ø Product introduction: Page 932 Specifications, model no., internal structure: Page 933 pplicable tube O.D.ø pplicable tube O.D.ø / / pplicable tube O.D.ø pplicable tube O.D.ø Manifold (single/with R) GWMF*-* Connecting joint diameter ø pplicable tube O.D.ø / / / / / ir uto. drain ir nic ir sensor Pressure Manifold (single solenoid) GWMF*-0 pplicable tube O.D.ø Manifold (double/with R) GWMF*-*-W pplicable tube O.D.ø Manifold (double solenoid) GWMF*-0-W pplicable tube O.D.ø Insert ring Custom order pplicable tube O.D.ø / / / / / / / / / / Page : 92 / Page : 93 Page : 93 Page : 93 Sales unit is pieces/ box. 93

83 Refrigerating GW Port size M3 to /2 (Rc or R) ir uto. drain ir Work environment and device-friendly flame-resistant white body series for greatly reducing piping space. Push in joint for piping. 2. size for space saving. 3. V shaped packing seal to realize smooth insertion and accurate seal.. Freely rotating elbow union to make piping and removal work easier. 5. White body blends into working environment. less nickel used for brass sections.. Flame resistant resin (equivalent to U9 Standards V-0) used for GW Series body and push ring. nic ir sensor Pressure Full flow within bore size There are no sections narrower than the bore size. flow equivalent to the bore size can be run. White color Flame resistance resin (GW series) White body blends into the work environment. Flame resistance PT (Equivalent to U9 standards V-O) is provided as standard. less nickel used for brass sections less nickel is used as standard for all brass parts to improve corrosion resistance and appearance. Easy piping work The section of the pipe connected with the main unit rotates freely, so the piping removal direction can be set as needed. ccurate tube holding The chuck bracket acts in the direction in which the tube is dislocated, ensuring highly reliable holding. Push-in installation The tube can be connected to the piping joint by pushing the tube in. V shaped packing is used for the seal between the tube and joint. The tube can be inserted with light force while obtaining a sure seal. Easy tube removal The push evenly pushes and opens the chuck, so the tube is completely released from the chuck and can be removed smoothly. Sealant applied on threads as standard Teflon resin is coated on threads. Sealing tape is not needed, reducing work hours. n even seal is attached and there is no worry of leakage, etc. 932

84 Specifications Descriptions Working fluid Max. working pressure Negative pressure Working temperature pplicable tube Shape S Straight Elbow T Union Tee TR Tetrapod shaped Y Y type union Tee FY FY type WY Double Y types CR Cross shaped P Plug C Cap M ulkhead female connector MF Manifold C MPa KPa C D E GW Series Port size M3 to R/2 pplicable tube ø3.2 to ø GW Compressed air.0-0 Note2 - to 0 (no freezing) Soft nylon tube (F-**) Urethane tube (U-95**, NU-**) Note Note : Refer to page 0 for tube dimensions, ambient temperature and working pressure. Note 2: Use a urethane tube (U95-* */NU-* *) and an insert ring together. How to order GW 5 Internal structure and parts list Ozone specifications ( 5) GW * Refer to model no. sections on dimensions page (pages 93 to 93) for combination of model no. P room specifications (catalog No. C-033S) GW GW pplicable tube O.D. C Port size D Other combinations E Option ø M3 M30.5 ong lank None ø M5 M50. T Turn P Copper and PTFE free ø ø R/ D D type ø R/ X ulk head ø ø, ø R3/ R/2 S M Round Female type ø, ø 0 No thread E ulk head female ø, ø ø, ø P Plug for ø W Double solenoid ø, ø P Plug for ø 2T 2-port turn ø, ø P Plug for ø 5 Single 5 ø, ø P Plug for ø Note: Sales unit is pcs. / bag. ø, ø P Plug for ø ø, ø ø, ø lanking plug ø, ø C C type plug ø, ø ø, ø ø, ø ø, ø ø, ø Y type plug Y type plug P7* P0 Refrigerating ir uto. drain ir nic ir sensor Pressure 2 3 No. Parts name Material rass (electroless nickeling treatment) ody * PT (flame resistance resin *2) 2 Packing seal Nitrile rubber 3 Chuck holder Polyetherimide 5 5 Chuck Push ring Stainless steel PT (flame resistance resin *2) 7 7 Outer ring Drive nipple rass (electroless nickeling treatment) rass (electroless nickeling treatment) *: The body of the single-ended straight, single-ended straight (round), female straight, bulkhead female, bulkhead, and bulkhead female connector is brass (electroless nickel d). *2: Equivalent to U9 standards V-0 933

85 GW Series Refrigerating ir uto. drain ir nic ir sensor Dimensions: Single straight, single straight (round), female straight, bulk head female Single straight GWS*-* M M5 type GWS -M5 GWS - GWS - GWS -M5 GWS - GWS - GWS - GWS - GWS - GWS - GWS- GWS- GWS- GWS- GWS- GWS- GWS- GWS- GWS- Female straight GWS*-*-M pplicable tube O.D.ø M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R/ R3/ R/2 R/ R3/ R/2 R3/ R/2 H (opposite side of hexagon) øk H K M H (opposite side of hexagon) øk Min. bore size Effective sectional area mm Single straight (round) GWS*-*-S M GWS 3-M3-S GWS 3-M5-S GWS -M3-S GWS -M5-S GWS - -S GWS -M5-S GWS - -S GWS - -S GWS - -S GWS - -S GWS --S GWS- -S GWS- -S GWS--S GWS--S GWS- -S GWS--S GWS--S pplicable tube O.D.ø 3.2 ulk head female GWS*-*-E M3,M5 type M M30.5 M50. M30.5 M50. R/ M50. R/ R/ R/ R/ R3/ R/ R/ R3/ R/2 R/ R3/ R/2 øk K M Hexagon head hole diameter øk Effective sectional area mm Pressure M M MP H (opposite side of hexagon) H (opposite side of hexagon) E(max) H2 (opposite side of hexagon) GWS - -M GWS - -M GWS - -M GWS - -M GWS --M GWS - -M GWS - -M GWS --M GWS- -M GWS--M GWS- -M GWS--M GWS--M pplicable tube O.D.ø M Rc/ Rc/ Rc/ Rc/ Rc3/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/ Rc3/ Rc/2 H Min. bore size Effective sectional area mm GWS - -E GWS - -E GWS - -E GWS - -E GWS --E GWS - -E GWS - -E GWS --E GWS- -E GWS--E GWS--E GWS--E pplicable tube O.D.ø M H H2 Rc/ Rc/ Rc/ Rc/ Rc3/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc3/ Rc/ E MP M M M M M M M M M M M2 M2 Installation hole dia. 3 3 Min. hole dia Effective sectional area mm

86 Dimensions: ulk head, bulk head female connector, straight, different diameter straight ulk head GWS*-*-X ulk head female connector GWM*-*-X GW Series Dimensions Refrigerating ir H (opposite side of hexagon) *2 MP uto. drain MP E(max) H (opposite side of hexagon) H2 (opposite side of hexagon) H3 (opposite side of hexagon) * E(max) * ir GWS -0-X GWS -0-X GWS -0-X GWS-0-X GWS-0-X pplicable tube O.D.ø H E MP M M M M M2 Installation hole dia. 3 Min. bore size Effective sectional area mm Note: n insert ring (MJU) is required for urethane tube on tightening joint side. * dimension shows a rough dimension before tightening a nut. GWM -0-X GWM -0-X GWM -0-X GWM-0-X GWM-0-X pplicable tube O.D.ø H H2 H E MP M M M M M2 Installation hole dia. 3 Min. hole dia Effective sectional area mm Straight GWS*-0 Different diameter straight GWS*-0 nic ir sensor Pressure 2 øc side side øc GWS -0 GWS -0 GWS -0 GWS-0 GWS-0 GWS-0 pplicable tube O.D.ø C Min. bore size Effective sectional area mm GWS -0 GWS -0 GWS -0 GWS-0 pplicable tube O.D.ø side side C Min. bore size 2.5 Effective sectional area mm

87 GW Serie Refrigerating ir Dimensions: Plug reducer, plug, plug reducer, single elbow Plug reducer Plug GWS*-*-P GWP*-0 uto. drain øc pplicable tube ir Connecting joint nic ir sensor GWS - P GWS - P GWS - P GWS -P GWS -P GWS -P GWS-P pplicable Connecting joint tube O.D. ø diameter ø * C Min. bore size * For connecting joint, dimension of CKD (GW Series) are shown. Plug reducer GWP*-0 Effective sectional area mm Material: Polyamide resin GWP -0 GWP -0 GWP -0 GWP-0 GWP-0 Single elbow GW*-* Connecting joint diameter ø * * 9 3 Min. Effective bore sectional size area mm * For connecting joint, dimension of CKD (GW Series) are shown Pressure øc 93 Material: Polyamide resin port size ø side side GWP -0 GWP -0 GWP -0 GWP-0 side * * * Min. bore size * For connecting joint, dimension of CKD (GW Series) are shown. 2 side Effective sectional area mm GW -M5 GW - GW - GW -M5 GW - GW - GW - GW - GW - GW - GW- GW- GW- GW- GW- GW- GW- GW- GW- M5 type M pplicable tube M O.D. ø M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R/ R3/ R/2 R/ R3/ R/2 R3/ R/2 H C H (opposite side of hexagon) M Min. bore size Effective sectional area mm

88 Dimensions:ong elbow, single 5 elbow, turn elbow, elbow ong elbow GW*-*- GW - - GW - - GW - - GW - - GW - - GW - - GW -- GW- - GW-- GW-- GW- - GW-- GW-- Turn elbow GW*-*-T 2 D GW -M5-T GW - -T GW - -T GW -M5-T GW - -T GW - -T GW --T GW - -T GW - -T GW --T GW- -T GW--T GW--T GW- -T GW--T GW--T pplicable tube O.D. ø pplicable tube O.D. ø M R/ R/ R/ R/ R/ R/ R3/ R/ R3/ R/2 R/ R3/ R/2 M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R/ R3/ R/2 H H (opposite side of hexagon) M øc H (opposite side of hexagon) H øc E C C M M5 type D Min. bore size E Effective sectional area mm Effective sectional area mm Single 5 Elbow GW*-*-5 GW -M5-5 GW - -5 GW - -5 GW -M5-5 GW - -5 GW - -5 GW --5 GW - -5 GW - -5 GW --5 GW- -5 GW- -5 GW--5 GW--5 GW- -5 GW--5 GW--5 Elbow GW*-0 GW -0 GW -0 GW -0 GW-0 GW-0 GW-0 pplicable tube O.D. ø F pplicable tube O.D. ø M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R/ R3/ R/2 R/ R3/ R/ H øc N øc H (opposite side of hexagon) M M C øe N E N C F GW Series Dimensions Min. Effective bore sectional size area mm 2 Min. bore size Effective sectional area mm Refrigerating ir uto. drain ir nic ir sensor Pressure

89 GW Series Refrigerating ir uto. drain ir nic ir sensor Pressure Dimensions: oth push-in branch, D type union Tee, Union Tee, Y type union Tee oth push-in branch GWT*-* M5 type GWT -M5 GWT - GWT - GWT -M5 GWT - GWT - GWT - GWT - GWT - GWT - GWT- GWT- GWT- GWT- GWT- GWT- Union Tee GWT*-0 pplicable tube O.D. ø M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R/ R3/ R/2 M H øE N C øc 2 D type union Tee GWT*-*-D M5 type H (opposite side of hexagon) M Min. bore size øc Effective sectional area mm GWT -M5-D GWT - -D GWT - -D GWT -M5-D GWT - -D GWT - -D GWT --D GWT - -D GWT - -D GWT --D GWT- -D GWT--D GWT--D GWT- -D GWT--D GWT--D pplicable tube O.D. ø Y type union Tee GWY*-0 J M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R/ R3/ R/2 N N F F M N øc side 2 N2 H M H (opposite side of hexagon) øE P side 2 C Min. Effective bore sectional size area mm øc D GWT -0 GWT -0 GWT -0 GWT-0 GWT-0 pplicable tube O.D. ø C E F N Min. bore size 2.5 Effective sectional area mm GWY -0 GWY -0 GWY -0 GWY-0 GWY-0 GWY -0 GWY -0 GWY -0 GWY-0 pplicable tube O.D.ø side side C D E F J N N Effective P sectional area mm

90 Dimensions: oth ports Y union Tee, cross shaped, 2 port turn elbow, tetrapod shaped (with R) oth ports Y union Tee GWY*-* M M5 type GWY -M5 GWY - GWY - GWY -M5 GWY - GWY - GWY - GWY - GWY - GWY - GWY- GWY- GWY- GWY- GWY- GWY- GW -M5-2T GW - -2T GW - -2T GW--2T GW--2T pplicable tube O.D. ø pplicable tube O.D. ø M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R/ R3/ R/2 M M50. R/ R/ R3/ R/2 H H D E C F D 3 3 J O P P Effective sectional area mm Effective sectional area mm Cross shaped GWCR*-0 GWCR -0 GWCR-0 GWCR-0 GWTR -M5 GWTR - GWTR - GWTR -M5 GWTR - GWTR - GWTR - GWTR - GWTR - GWTR - GWTR- GWTR- GWTR- GWTR- GWTR- GWTR- pplicable tube O.D. ø pplicable tube O.D. ø port turn elbow Tetrapod shaped (with R) GW*-*-2T GWTR*-* 2 D J M 2-øE H (opposite side of hexagon) H (opposite side of hexagon) øc P O P F M M M5 type D N 2 øe N M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R/ R3/ R/2 N H øc.5 2 N C F øc E øc 2-øE F.5.5 C N 9.5 E F F Min. bore size H (opposite side of hexagon) GW Series Dimensions M M5 type N Effective sectional area mm Min. bore size M Effective sectional area mm Refrigerating ir uto. drain ir nic ir sensor Pressure

91 GW Series Refrigerating Dimensions: FY type (with R), double Y type (with R), terapod shaped, FY type FY type(with R) Double Y types(with R) GWFY*-* GWWY*-* ir uto. drain D P F ir G GWFY -M5 GWFY - GWFY - GWFY -M5 GWFY - GWFY - GWFY - GWFY - GWFY - GWFY - GWFY- GWFY- GWFY- GWFY- GWFY- GWFY- pplicable tube O.D. ø N øe M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R/ R3/ R/ H C øc D E H (opposite side of hexagon) M F G N P Min. bore size M M5 type Effective sectional area mm M M M5 type H (opposite side of hexagon) GWWY-M5 GWWY- GWWY- GWWY-M5 GWWY- GWWY- GWWY- pplicable tube O.D. ø øe M M50. R/ R/ M50. R/ R/ R3/ H N øc øc D C D E P F F N P P Effective sectional area mm nic Tetrapod shaped GWTR*-0 FY type GWFY*-0 ir sensor Pressure F D P N 2 øc N øe øe øc N G F GWTR -0 GWTR -0 GWTR -0 GWTR-0 GWTR-0 pplicable tube O.D. ø C E F N Min. bore size 2.5 Effective sectional area mm GWFY -0 GWFY -0 GWFY -0 GWFY-0 GWFY-0 pplicable tube O.D. ø C D E F G N.5.5 P Min. bore size 2.5 Effective sectional area mm

92 Dimensions: Double Y, blanking plug, plug, C types plug Double Y types lanking plug GWWY*-0 GWP*- GW Series Dimensions Refrigerating ir uto. drain øe N P øc side 2 øc2 øc2 D side F P Connecting joint ød ir GWWY-0 GWWY-0 type plug GWP*- pplicable tube O.D. ø side side C.5.5 C2.5 D 2 E F N.5 P 3.5 Effective sectional area mm Material: Polyamide resin port size ø GWJP 3- GWP - GWP - GWP - GWP- GWP- GWP- C type plug GWP*-C * For connecting joint, dimension of CKD (GW Series) are shown. * d 5 nic ir sensor pplicable tube pplicable tube Pressure øc øc Connecting joint Connecting joint pplicable tube O.D. ø Connecting joint diameter ø 2 GWP GWP GWP GWP GWP GWP GWP GWP - GWP - GWP- GWP- GWP * For connecting joint, dimension of CKD (GW Series) are shown. * C Min. bore size Effective sectional area mm 2 pplicable tube O.D. ø Connecting joint diameter ø 2 GWP -C GWP -C GWP -C GWP -C GWP -C GWP -C GWP -C GWP -C GWP -C GWP-C GWP-C GWP-C * For connecting joint, dimension of CKD (GW Series) are shown. * C Min. bore size Effective sectional area mm 2 9

93 GW Series Refrigerating Dimensions: Y type plug, cap, manifold (single with R), manifold (single) Y type plug GWP*-Y Cap GWC* ir uto. drain 2-øE pplicable tube J P D øc ir nic Connecting joint pplicable tube O.D. ø Connecting joint diameter ø GWP -Y GWP -Y GWP -Y GWP -Y GWP -Y GWP -Y GWP -Y GWP -Y GWP -Y GWP-Y GWP-Y GWP-Y * For connecting joint, dimension of CKD (GW Series) are shown. Manifold (single with R) GWMF*-* * D E F J P F Min. bore size Effective sectional area mm 2 GWC GWC GWC GWC GWC pplicable tube O.D. ø Manifold (single solenoid) GWMF* øc ir sensor Pressure Q2 applicable tube outer diameter 2-Q2 applicable tube outer diameter M H 2 øc 2 øc P N2 N 2 2-ø.5 F 3-Q applicable tube outer diameter P N2 N 2-ø Q applicable tube outer diameter F GWMF - GWMF - GWMF - GWMF- GWMF- pplicable tube O.D.ø M Q Q2 R/ R/ R/ R3/ R3/ H C F N N2 P Effective sectional area mm GWMF -0 GWMF -0 GWMF -0 GWMF-0 GWMF-0 pplicable tube O.D.ø Q Q C F N N P Effective sectional area mm

94 GW Series Dimensions Dimensions: Manifold (double with R), manifold (double), insert ring Manifold (double with R) Manifold (double solenoid) GWMF*-*-W GWMF*-0-W Refrigerating ir uto. drain M H Q2 applicable tube outer diameter Q2 applicable tube outer diameter 2 P N2 N 2 2-ø.5 F F2 3 P N2 N 2-ø F2 F ir -Q applicable tube outer diameter -Q applicable tube outer diameter GWMF - -W GWMF --W GWMF--W GWMF--W GWMF--W GWMF--W pplicable tube O.D.ø M Q Q2 R/ R3/ R3/ R/2 R3/ R/2 H F F2 N N2 P Effective sectional area mm GWMF -0-W GWMF-0-W GWMF-0-W pplicable tube O.D.ø Q Q F.5 F N.5 3 N P.5 3 Effective sectional area mm U-92* Insert ring (tube ) (custom order) U-95* INS-U*- Material: rass + electroless nickeling nic ir sensor Pressure ø ø øc Tube U-92* U-95* ø ø øc INS-U32- INS-U0- INS-U0- INS-U0- INS-U- INS-U * Tube for NU is available as custom-order. * Use insert ring if tube U-92*, U-95* or NU is used for a vacuum circuit. 93

Refrigerating GWJ (mini-type) Port size M3 to / (Rc or R) ir uto. drain push-in joint with wide variation Space saving type with smaller body. Dead space of pipe can be decreased dramatically.

2 3.2 Page : 9 Page : 9 Page : 9 Page : 9 Elbow type Different diameter straight GWJS*-0 pplicable tube O.D.ø Single elbow GWJ*-* pplicable tube O.D.ø ong elbow GWJ*-*- pplicable tube O.D.ø Elbow GWJ3-0 pplicable tube O.

95 Refrigerating GWJ (mini-type) Port size M3 to / (Rc or R) ir uto. drain push-in joint with wide variation Space saving type with smaller body. Dead space of pipe can be decreased dramatically. ir Straight type Single straight GWJS*-* pplicable tube O.D.ø 3.2 Female, straight GWJS3-*-M pplicable tube O.D.ø ulk head GWJS3-0-X pplicable tube O.D.ø Straight GWJS3-0 pplicable tube O.D.ø Page : 9 Page : 9 Page : 9 Page : 9 Elbow type Different diameter straight GWJS*-0 pplicable tube O.D.ø Single elbow GWJ*-* pplicable tube O.D.ø ong elbow GWJ*-*- pplicable tube O.D.ø Elbow GWJ3-0 pplicable tube O.D.ø 3.2 / / nic ir sensor Pressure Page : 9 Page : 9 Page : 97 Page : 97 Union Tee type oth push-in branch GWJT3-* Plug pplicable tube O.D.ø 3.2 D type union Tee GWJT3-*-D pplicable tube O.D.ø Union Tee GWJT3-0 pplicable tube O.D.ø Y type union Tee GWJY* / 3.2 Page : 97 Page : 97 Page : 97 Page : 97 pplicable tube O.D.ø 3.2 / lanking plug GWJP3- pplicable tube O.D.ø Page : 9 Sales unit is pieces/ box.

96 Specifications Descriptions Working fluid Max. working pressure MPa Working temperature C pplicable tube GWJ Compressed air.0 - to 0 (no freezing) Soft nylon tube ( F-32, F-0, F-0) Urethane tube ( U-9532, U-950, U-950, NU-0, NU-0) Note GWJ Series Specifications Refrigerating ir uto. drain Note: Refer to page 0 for tube dimensions, ambient temperature and working pressure. How to order GWJ S 3 M C D * Refer to model no. selections in dimensions (pages 9 to 9) for combination of model no. ir Shape S Straight Elbow Y Y type union Tee T Union Tee P Plug Note:Sales unit is pieces/ box. pplicable tube O.D. C Port size D Other combinations 3 ø3.2 ø ø M3 M5 0 P P M30.5 M50. R/ No thread Plug for ø Plug for ø lanking plug D X M ong D type ulk head Female type room specifications (catalog No. C-033S) GWJ GWJ P7* P0 nic ir sensor Pressure Internal structure and main parts list No. Name Material ody * rass (electroless nickeling treatment) PT 2 Packing seal Nitrile rubber 3 Holder rass (electroless nickeling treatment) Chuck Stainless steel 5 Outer ring Metal type polyacetal Resin type brass (electroless nickeling treatment) Push ring Polyacetal *: The body of the single-ended straight, female straight, and bulkhead is brass (electroless nickel d). / mini-type 95

97 GWJ Serie Refrigerating ir uto. drain ir nic ir sensor Dimensions: Single straight, female straight, bulk head, straight, different diameter straight, single elbow Single straight GWJS*-* * dimension is for model with punched hexagon hole. GWJS3-M3 GWJS3-M5 GWJS3- GWJS-M3 GWJS-M5 GWJS- GWJS-M5 GWJS- R pplicable tube O.D. ø 3.2 ulk head GWJS3-0-X R M M30.5 M50. / M30.5 M50. / M50. / HEX HEX(opposite side of hexagon) øk K.... G (max) M M Min. bore size * * * Effective sectional area mm HEX(opposite side of hexagon) Female, straight GWJS3-*-M GWJS3-M3-M GWJS3-M5-M GWJS3--M Straight GWJS3-0 pplicable tube O.D. ø 3.2 Rc M HEX (opposite side of hexagon) Rc M M30.5 M50. / HEX øc C øc Min. bore size Effective sectional area mm Pressure GWJS3-0-X pplicable tube O.D. ø Different diameter straight GWJS*-0.5 HEX Min. Panel Panel Effective bore M thickness Hole sectional size / G diameter area mm M GWJS3-0 Single elbow GWJ*-* pplicable tube O.D. ø 3.2 Min. Effective C bore size sectional area mm øc øc GWJS3-0 GWJS3-0 side pplicable tube O.D.ø side side C 9.. C2.5. øc2 side Panel Hole diameter Effective sectional area mm GWJ3-M3 GWJ3-M5 GWJ3- GWJ-M3 GWJ-M5 GWJ- GWJ-M5 GWJ- pplicable tube O.D. ø 3.2 R M M30.5 M50. / M30.5 M50. / M50. / HEX HEX(opposite side of hexagon) R C Min. bore size M Effective sectional area mm

98 Dimensions: ong elbow, elbow, both push-in branch, D type union Tee, Union Tee, Y type union Tee ong elbow GWJ*-*- GWJ3-M3- GWJ3-M5- GWJ3- - GWJ-M5- GWJ- - GWJ-M5- GWJ- - pplicable tube O.D. ø 3.2 oth push-in branch GWJT3-* R M M30.5 M50. / M50. / M50. / 2 HEX øc HEX(opposite side of hexagon) R øc HEX (opposite side of hexagon) R C Min. bore size Effective sectional area mm M M Elbow GWJ3-0 GWJ3-0 pplicable tube O.D. ø 3.2 D type union Tee GWJT3-*-D D.5 C.5 øc øe D D 5.7 HEX (opposite side of hexagon) R øc GWJ Series Dimensions Min. Effective E bore size sectional area mm M Refrigerating ir uto. drain ir nic ir sensor GWJT3-M3 GWJT3-M5 GWJT3- pplicable tube O.D. ø 3.2 R M M30.5 M50. / HEX C Min. bore size Effective sectional area mm GWJT3-M3-D GWJT3-M5-D GWJT3--D pplicable tube O.D. ø 3.2 R M M30.5 M50. / HEX C Min. bore size Effective sectional area mm Pressure Union Tee GWJT3-0 Y type union Tee GWJY* øE D øc G D øc side D2 2-øE P side F / mini-type D D GWJT3-0 pplicable tube O.D. ø C.5 D 5.7 Min. Effective E bore size sectional area mm GWJY33-0 GWJY3-0 pplicable tube O.D.ø side side C.5 9. D.2.2 D2.5 E F P.5.5 G.7.7 Effective sectional area mm

99 GWJ Series Refrigerating ir uto. drain ir nic ir sensor Dimensions: lanking plug lanking plug GWJP3- GWP*- Material: Polyamide GWJP3- GWP - GWP - Connecting joint Connecting joint diameter ø *.5 * Dimension of CKD connecting joints (GW and GWJ series) are shown. ød D 5 Pressure 9

100 MEMO Refrigerating ir uto. drain ir nic ir sensor Pressure / mini-type 99

101 Refrigerating ir ZSP Stainless steel type Port size M5, R/ to R/2 uto. drain ir Straight ZSP-C*-* Page : 953 pplicable tube O.D.ø Straight union ZSP-U* Elbow ZSP-*-* pplicable tube O.D.ø Page : 953 Page : 953 pplicable tube O.D.ø Union elbow ZSP-V* Tee ZSP-*-* Union tee ZSP-E* pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø nic Page : 953 Page : 95 Page : 95 ir sensor Irregular diameter straight union ZSP-G*-* ranch Tee ZSP-D*-* Tripod elbow ZSP-VX*-* Pressure pplicable tube O.D.ø / / pplicable tube O.D.ø pplicable tube O.D.ø Page : 95 Union Y ZSP-Y* / / Page : 95 Irregular diameter union Tee ZSP-EG*-* Page : 95 ranch Y ZSP-X*-* pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø / / / / Page : 955 Page : 955 Page : 955 Sales unit is pieces per bag. 950

102 ZSP Series Series variation Refrigerating ranch double Y ZSP-RX*-* Page : 95 Irregular diameter union Y ZSP-W*-* Page : 95 ranch triple ZSP-KD*-*-* Page : 957 arrier union ZSP-M* Page : 95 pplicable tube O.D.ø pplicable tube O.D.ø / / / / pplicable tube O.D.ø / / / / pplicable tube O.D.ø Irregular diameter double Y ZSP-RG*-* pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø Tripod union ZSP-VU* Page : 95 Page : 95 Union ZSP-U* Page : 957 Irregular diameter triple ZSP-KG*-* Page : 957 Reducer ZSP-J*-* Page : 95 / / ranch elbow ZSP-X*-* Page : 957 Cap ZSP-RF* pplicable tube O.D.ø / / / / / Page : 95 / / / / / / / / / / pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø ir uto. drain ir nic ir sensor Pressure / stainless steel Sales unit is pieces per bag. 95

103 Refrigerating ir uto. drain ir nic ir sensor Pressure Specifications Descriptions Working fluid Max. working pressure MPa Use vacuum kpa mbient temperature range C stainless steel type ZSP Series Port size: M5, R/ to R/2 pplicable tube: ø to ø ZSP ir to 0 (no freezing Note ) Note: Freezing could occur by adiabatic expansion depending on air quality (dew point). How to order ZSP C C C U V E G D VX Y EG X Internal structure and parts list * Refer to model no. selections in dimensions (pages 953 to 95) for combination of model no. Shape 5 Straight Straight union Elbow Union elbow Tee Union Tee Irregular diameter straight union ranch Tee Tripod elbow Union Y Irregular diameter union tee ranch Y 7 RX RG VU W U X KD KG PF M J Features Stainless steel (SUS303 or equivalent) metal body Perfect for use in corrosive environments, or places susceptible to copper ion Diverse range of model variations diverse range of variations support various piping Environment compatible products With this RoHS Directive compatible product, all substances which adversely affect the global environment have been eliminated from the materials ranch double Y Irregular diameter double Y Tripod union Irregular diameter union Y Union ranch elbow ranch triple Irregular diameter triple Cap arrier union Reducer pplicable tube O.D. ø ø ø ø ø Port sizenote C M5 M5S M50. M50.5 (fine outline type) R/ R/ R3/ R/2 Note : If C is the tube size, select from the table for No. Parts name Material Resin body Metal body O ring Rubber sleeve ock ring ock jaw Guide ring Release ring Gasket PT Stainless steel (SUS303 or equivalent) Hydrogen nitrile rubber Hydrogen nitrile rubber Stainless steel (SUS303 or equivalent) Stainless steel (SUS30) Stainless steel (SUS303 or equivalent) Polyacetal Polyacetal 952 Meter thread type

104 Dimensions Straight ZSP-C*-* ZSP-C-M5 ZSP-C-M5S ZSP-C- ZSP-C- ZSP-C-M5 ZSP-C- ZSP-C- ZSP-C- ZSP-C- ZSP-C- ZSP-C- ZSP-C- ZSP-C- ZSP-C- ZSP-C- ZSP-C- ZSP-C- ZSP-C- Elbow ZSP-*-* M M50. M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R/ R3/ R/2 R/ R3/ R/ G C H Effective sectional area mm Weight g Note) The dimensions for the taper screw type are reference dimensions after tightening. G G ZSP--M5 ZSP-- ZSP-- ZSP--M5 ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- Meter thread type pplicable tube O.D. ø Meter thread type pplicable tube O.D. ø M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R/ R3/ R/2 R/ R3/ R/2 Gasket Gasket G C C H Weight g Note) The dimensions for the taper screw type are reference dimensions after tightening. G G 2 øc2 øc Effective sectional area mm 2 H (opposite side of hexagon) M Straight union ZSP-U*-* ZSP-U ZSP-U ZSP-U ZSP-U ZSP-U H (opposite side of hexagon) M øc Union elbow ZSP-V* 2-øC2 ZSP-V ZSP-V ZSP-V ZSP-V ZSP-V pplicable tube O.D. ø pplicable tube O.D. ø øc N C E C2.5.5 C øC C E F øc2 N.5 ZSP Series Dimensions Effective sectional area mm F Effective sectional area mm Weight g..2. Weight g Refrigerating ir uto. drain ir nic ir sensor Pressure / stainless steel

105 ZSP Series Refrigerating ir uto. drain ir nic ir sensor Pressure 95 Dimensions Tee ZSP-*-* G 0.3 ZSP--M5 ZSP-- ZSP-- ZSP--M5 ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- ZSP-- Gasket M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R/ R3/ R/2 R/ R3/ R/ G C Irregular diameter straight union ZSP-G*-* C H Note) The dimensions for the taper screw type are reference dimensions after tightening. ZSP-G- ZSP-G- ZSP-G- ZSP-G- Meter thread type pplicable tube O.D.ø side øc pplicable tube O.D.ø side side G C C C øc2 øc øC Effective sectional area mm Weight g.3 Union Tee ZSP-E* H (opposite side of hexagon) M Effective sectional area mm 2 side 2-øC Weight g ZSP-E ZSP-E ZSP-E ZSP-E ZSP-E pplicable tube O.D.ø ranch Tee ZSP-D*-* G ZSP-D-M5 ZSP-D- ZSP-D- ZSP-D-M5 ZSP-D- ZSP-D- ZSP-D- ZSP-D- ZSP-D- ZSP-D- ZSP-D- ZSP-D- ZSP-D- ZSP-D- ZSP-D- ZSP-D- ZSP-D- G2 0.3 pplicable tube O.D.ø 3-øC2 C M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R/ R3/ R/2 R/ R3/ R/2 C Meter thread type N Gasket G G E C N.5 9 C N F Effective sectional area mm Weight g Note) The and 2 dimensions for the taper screw type are reference dimensions after tightening. N 2-øE G 3-øC 2- G2 2-F 2 2-øC2 H (opposite side of hexagon) M H Effective sectional area mm øC Weight g

106 Dimensions Tripod elbow ZSP-VX*-* øC2 øe 2-N Union Y ZSP-Y* ZSP Series Dimensions Refrigerating ir G ZSP-VX-M5 ZSP-VX- ZSP-VX- ZSP-VX-M5 ZSP-VX- ZSP-VX- ZSP-VX- ZSP-VX- ZSP-VX- ZSP-VX- ZSP-VX- ZSP-VX- ZSP-VX- ZSP-VX- ZSP-VX- ZSP-VX- ZSP-VX- 0.3 Meter thread type pplicable tube O.D. ø M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R/ R3/ R/2 R/ R3/ R/ Irregular diameter union Tee ZSP-EG*-* G C C2 2 H E N F sectional Effective area mm Weight g Note) The dimensions for the taper screw type are reference dimensions after tightening. 2-Q applicable tube O.D. pplicable tube O.D. ø Gasket 2-øC3 2-øE øc 3 øc2 N2 Q Q2 C C2 C3 C 2 2 ZSP-EG ZSP-EG ZSP-EG ZSP-EG G N øC 2 2 F E N N øC H (opposite side of hexagon) M 2-F Q2 applicable tube O.D. F sectional Effective Weight area mm g 2 3 ZSP-Y ZSP-Y ZSP-Y ZSP-Y ZSP-Y pplicable tube O.D. ø ranch Y ZSP-X*-* G 0.3 ZSP-X-M5 ZSP-X- ZSP-X- ZSP-X-M5 ZSP-X- ZSP-X- ZSP-X- ZSP-X- ZSP-X- ZSP-X- ZSP-X- ZSP-X- ZSP-X- ZSP-X- ZSP-X- ZSP-X- ZSP-X- pplicable tube O.D. ø N øc Meter thread type M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R/ R3/ R/2 R/ R3/ R/2 C Gasket P C2 3.5 G øC C3.5.5 G N P E N F C C2 P E N H F øC3 øe Effective sectional area mm Effective sectional area mm Weight g Weight g Note) The dimensions for the taper screw type are reference dimensions after tightening. 3- P F M øC øe 2-2-øP2 F H (opposite side of hexagon) uto. drain ir nic ir sensor Pressure / stainless steel

107 ZSP Series Refrigerating Dimensions ranch double Y ZSP-RX*-* P Irregular diameter double Y ZSP-RG*-* P ir uto. drain ir nic ir sensor Pressure ZSP-RX- ZSP-RX- ZSP-RX- Tripod union ZSP-VU* M R/ R/ R/ G C C P 3 P2 3 H Note) The dimensions are reference dimensions after tightening. F pplicable tube O.D. ø 3-øC G N 3- F -øc øe M 2 P2 -øc2 øe 2-N E H (opposite side of hexagon) N.2.2. F Effective sectional area mm øC2 Weight g ZSP-RG- ZSP-RG- Q Q Irregular diameter union Y ZSP-W*-* pplicable tube O.D. ø N øc3 N C C2 C3 C 2 P P2 E N F. 3. øc P F øc.2 2-øC2 øe -øc2.9 2-øC P2 øe -øc Q applicable tube O.D Q2 applicable tube O.D. 2-Q2 applicable tube O.D. F.5 2 Effective sectional Weight area mm g øc Q applicable tube O.D. ZSP-VU ZSP-VU ZSP-VU ZSP-VU ZSP-VU pplicable tube O.D. ø C C2 2 3 E N F Effective sectional area mm Weight g ZSP-W- ZSP-W- ZSP-W- ZSP-W- pplicable tube O.D. ø Q Q sectional C C2 C3 C 2 P E N F Effective area mm Weight g

108 ZSP Series Dimensions Dimensions Union ZSP-U* P 3-øC ranch elbow ZSP-X*-* P 2-øC Refrigerating ir 2 N øe ZSP-U ZSP-U ZSP-U ZSP-U ZSP-U ranch triple ZSP-KD*-*-* Q applicable tube O.D. øc ZSP-KD-- ZSP-KD-- ZSP-KD-- ZSP-KD-- ZSP-KD-- ZSP-KD-- ZSP-KD-- ZSP-KD-- pplicable tube O.D.ø C3 øc3 2-øE pplicable tube O.D.ø Q Q2 C 3 C G2 M R/ R/ R/ R3/...7 C Note) The dimensions are reference dimensions after tightening. P N 3-øC P N P N G øC2 E F G E F 3-øC N H F F 3.5 Effective sectional area mm Weight g M 3-Q2 applicable tube outer diameter G P H (opposite side of hexagon) P2 3-2 N2 C Effective sectional area mm C Weight g Gasket 0.3 G Meter thread type pplicable Effective tube O.D.ø M G C C2 P H E N F sectional area mm Weight g 2 ZSP-X-M5 M ZSP-X- ZSP-X- R/ R/ ZSP-X-M5 M ZSP-X- ZSP-X- R/ R/ ZSP-X- R3/ ZSP-X- ZSP-X- R/ R/ ZSP-X- R3/ ZSP-X- ZSP-X- ZSP-X- ZSP-X- R/ R/ R3/ R/ ZSP-X- ZSP-X- ZSP-X- R/ R3/ R/ Note) The dimensions for the taper screw type are reference dimensions after tightening. Irregular diameter triple ZSP-KG*-* 2-Q applicable tube O.D. 2-øC ZSP-KG- ZSP-KG- ZSP-KG- ZSP-KG- ZSP-KG- C 2 N N2 E 2-F ZSP-KG- ZSP-KG- ZSP-KG- ZSP-KG- ZSP-KG- pplicable tube O.D.ø Q Q2 3 H (opposite 2-øC2 side of hexagon) M F 2-øE G N 3-øC2 2- P2 P P N 2-F 2-øC P2 C C Effective sectional area mm øe 3-Q2 applicable tube outer diameter 3-øC 3-2 N2 3 C Weight g uto. drain ir nic ir sensor Pressure / stainless steel

109 ZSP Series Refrigerating ir Dimensions Cap ZSP-PF* arrier union ZSP-M* uto. drain øc 2 2-T øc2 3 2-H (opposite side of hexagon) ir øc2 2-øC MP 2- ZSP-PF ZSP-PF ZSP-PF ZSP-PF ZSP-PF pplicable tube O.D.ø C C Weight g ZSP-M ZSP-M ZSP-M ZSP-M ZSP-M pplicable tube O.D.ø MP M M M M M C C H 2 27 T 5 Effective sectional area mm Weight g nic ir sensor Reducer ZSP-J*-* øc pplicable tube Pressure 2 øc2 Connecting joint side ZSP-J- ZSP-J- ZSP-J- ZSP-J- ZSP-J- ZSP-J- ZSP-J- ZSP-J- ZSP-J- ZSP-J- pplicable tube O.D.ø Connecting joint diameter ø C C Effective sectional area mm Weight g

ZW Stainless steel Series Port size M5 to R/2 Refrigerating ir uto.

Page : 92 pplicable ø Page : 92 pplicable ø nic Straight ZW-S*-0

110 ZW Stainless steel Series Port size M5 to R/2 Refrigerating ir uto. drain Single straight ZW-S*-* Page : 92 Elbow ZW-*-0 pplicable tube O.D.ø Single elbow ZW-*-* Page : 92 Union Tee ZW-T*-0 pplicable tube O.D.ø ir Page : 92 pplicable tube O.D.ø Page : 92 pplicable tube O.D.ø nic Straight ZW-S*-0 pplicable tube O.D.ø ir sensor Pressure Page : 92 / stainless steel Sales unit is piece per bag. 959

ZW Series Refrigerating ir uto. drain ir Frame resistant resin & stainless steel ZW series High efficient, clean-feeling white body Port size: M5 to R/2 pplicable bore size: ø to ø size saves space.

111 ZW Series Refrigerating ir uto. drain ir Frame resistant resin & stainless steel ZW series High efficient, clean-feeling white body Port size: M5 to R/2 pplicable bore size: ø to ø size saves space. Smooth insertion and accurate sealing. Flame-resistant resin incorporated for white body and push ring. (Equivalent to U9 standards V-O) Stainless steel incorporated for all metal parts. nic ir sensor Pressure White flame-resistant resin body Flame-resistant PT (U9 Standards V-0 or equivalent) used as standard for a white body blending in with any work environment. Full flow rate y eliminating sections narrower than the tubing's bore, a flow equivalent to the tubing's bore can be passed. Easy piping work The section of the pipe connected with the body rotates freely, so piping removal can be set freely. Standard stainless steel s a standard, all metal parts are made of stainless steel to increase corrosion resistance and appearance. Sealing agent applied on threads Teflon resin is coated on threads, eliminating the need to wind sealing tape. The even seal prevents leaks, etc. Secure tubing holding Chuck fitting acts in the direction that the tubing dislocates, ensuring highly reliable holding. Easy tubing removal The push ring evenly pushes and opens the chuck, so tubing can be removed smoothly. Push-in installation Tubing can be connected to the piping joint just by pushing in tubing. V-shape packing with outstanding accuracy is used for the seal. Flame resistant resin & stainless steel 90

112 Stainless steel series ZW Series Port size: M5 to R/2 pplicable tube: ø to ø Refrigerating ir Specifications Descriptions Working fluid Max. working pressure MPa Negative pressure kpa Working temperature C pplicable tube ZW Compressed air.0-0 Note2 - to 0 (no freezing) Soft nylon tube (F-**) Urethane tube (U-92**,U-95**,NU-**)Note Note : Refer to page 0 for tube dimensions, ambient temperature and working pressure. Note 2: Use an insert ring when using urethane tubing (U-92**, U-95**, NU-**) under vacuum pressure. (This is a customized order. Contact CKD for details.) uto. drain ir How to order * Refer to model no. sections on dimensions page (page 92) for combination of model no. ZW C D Shape pplicable tube O.D. C Port size D Option S T Straight Elbow Union Tee * Consult with CKD for other models. Note: Sales unit is piece per bag. ø ø ø ø ø M5 0 M50. R/ R/ R3/ R/2 No thread lank P None Ozone proof nic ir sensor room specifications (catalog No. C-033S) Pressure ZW P0 Internal structure and main parts list 2 3 No. Parts name Material 7 5 ody * Stainless steel (SUS30) PT (flame resistance resin *2) 2 Packing seal Nitrile rubber 3 Chuck holder Polyacetal Chuck Stainless steel (SUS30) 5 Push ring PT (flame resistance resin *2) Outer ring Stainless steel (SUS30) 7 Drive nipple Stainless steel (SUS30) / stainless steel *: The single-ended straight body is stainless steel (SUS30). *2: Equivalent to U9 standards V-O Note: For the stainless steel series, the (5) push ring color is identified with pure white. 9

113 ZW Series Refrigerating ir uto. drain ir nic ir sensor Pressure Dimensions Single straight ZW-S*-* M ZW-S -M5 ZW-S - ZW-S - ZW-S -M5 ZW-S - ZW-S - ZW-S - ZW-S - ZW-S - ZW-S - ZW-S- ZW-S- ZW-S- ZW-S- ZW-S- Single elbow ZW-*-* ZW- -M5 ZW- - ZW- - ZW- -M5 ZW- - ZW- - ZW- - ZW- - ZW- - ZW- - ZW-- ZW-- ZW-- ZW-- ZW-- M5 type M5 type pplicable tube O.D.ø M M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R3/ R/2 M pplicable tube M O.D.ø M50. R/ R/ M50. R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R3/ R/2 H (opposite side of hexagon) H H øk K M C H (opposite side of hexagon) øk Min. bore size Min. bore size Effective sectional area mm øc H (opposite side of hexagon) M Effective sectional area mm Elbow ZW-*-*-0 ZW- -0 ZW- -0 ZW- -0 ZW--0 ZW--0 Union Tee ZW-T*-0 ZW-T -0 ZW-T -0 ZW-T -0 ZW-T-0 ZW-T-0 Straight ZW-S*-0 ZW-S -0 ZW-S -0 ZW-S -0 ZW-S-0 ZW-S-0 F pplicable tube O.D.ø pplicable tube O.D.ø pplicable tube O.D.ø N øc.5.5 C N C N N E øe 2-øE E F N C F øc N N øc Min. bore size 2.5 Min. bore size 2.5 Min. bore size 2.5 Effective sectional area mm F Effective sectional area mm Effective sectional area mm

ZJ Female joint Stainless steel Series Port size R/ to R/2 Refrigerating ir uto. drain Single straight ZJ-S*-* Page : 9 oth push-in branch ZJ-T*-* pplicable tube O.D.

114 ZJ Female joint Stainless steel Series Port size R/ to R/2 Refrigerating ir uto. drain Single straight ZJ-S*-* Page : 9 oth push-in branch ZJ-T*-* pplicable tube O.D.ø Single elbow ZJ-*-* Page : 9 D type union Tee ZJ-T*-*-D pplicable tube O.D.ø ir Page : 97 pplicable tube O.D.ø Page : 97 pplicable tube O.D.ø nic Straight ZJ-S*-0 Union Tee ZJ-T*-0 ir sensor Pressure pplicable tube O.D.ø pplicable tube O.D.ø Page : 9 Sleeve integrated nut ZJ-N* pplicable tube O.D.ø Page : 9 / stainless steel Page : 9 Sales unit is piece per bag. 93

Port size: R/ to R/2 pplicable bore size: ø to ø Easy Fit mechanism (integrated nut and sleeve) improves work efficiency.

mple size variations fit various tubing. ll oil is washed and removed.

115 ZJ Series Refrigerating ir uto. drain ir Stainless steel, tightening type Female joint ZJ Series High sealing performance; repeated use possible. Port size: R/ to R/2 pplicable bore size: ø to ø Easy Fit mechanism (integrated nut and sleeve) improves work efficiency. Original sleeve eliminates tubing twisting during piping. Sleeve need not be replaced even when using repeatedly. Smooth inner bore surface. mple size variations fit various tubing. ll oil is washed and removed. nic ir sensor Pressure ody High corrosion resistant SUS3 stainless steel is incorporated for body, nut, and sleeve. Sleeve Eliminates twisting during piping. Stop ring Resolves trouble such as lost sleeves and incorrect installation direction. Stainless steel, tightening type female joint Nut Structure integrated with sleeve shortens installation and removal work. 9

Female joint Stainless steel series ZJ Series Port size: R/ to R/2 pplicable tube: ø to ø Refrigerating ir Specifications Descriptions Working fluid Working pressure MPa Negative pressure kpa Working

116 Female joint Stainless steel series ZJ Series Port size: R/ to R/2 pplicable tube: ø to ø Refrigerating ir Specifications Descriptions Working fluid Working pressure MPa Negative pressure kpa Working temperature C pplicable tube Note Note: Refer to page 0 for details on tube. How to order ZJ T 0 0 O Descriptions Compressed air, inert gas.0 or less -0 - to 0 Urethane tube (U-92**,U-95**,NU-**) Eco-flex tube (ecos-**,ecoh-**) * Refer to model no. sections on dimensions page for combination of model no. D uto. drain ir C D E Shape S Straight Elbow T Union Tee N Sleeve integrated nut pplicable tube O.D. 0 ø 0 ø 0 ø ø ø C pplicable tube bore size D Port size ø2.5 ø ø5 ø ø.5 ø7.5 ø ø9 ø 0 R/ R/ R3/ R/2 Without screw Note:Sales unit is piece per bag. E Other combinations D D type nic ir sensor room specifications (catalog No. C-033S) Pressure ZJ P90 Internal structure and main parts list 2 3 No. Parts name Material ody Stainless steel (SUS3) 2 Sleeve Stainless steel (SUS3) 3 Nut Stainless steel (SUS3) (electroless nickeling treatment) Stop ring Stainless steel (SUS30) / stainless steel 95

117 ZJ Series Refrigerating Dimensions Single straight ZJ-S**-* Single elbow ZJ-**-* ir uto. drain R Opposite side of hexagon H Opposite side of hexagon H2 H ir 2 Opposite side of hexagon H2 R nic ir sensor ZJ-S025- ZJ-S025- ZJ-S00- ZJ-S00- ZJ-S00- pplicable tube O.D.ø R / / / / 3/ Min. bore size H H2 ZJ-025- ZJ-025- ZJ-00- ZJ-00- ZJ-00- pplicable tube O.D.ø R / / / / 3/ Min. bore size H H2 Pressure ZJ-S005- ZJ-S00- ZJ-S005- ZJ-S00- ZJ-S005- ZJ-S00- ZJ-S5- ZJ-S75- ZJ-S0- ZJ-S5- ZJ-S75- ZJ-S0- / / / / 3/ 3/ / / / 3/ 3/ 3/ ZJ-005- ZJ-00- ZJ-005- ZJ-00- ZJ-005- ZJ-00- ZJ-5- ZJ-75- ZJ-0- ZJ-5- ZJ-75- ZJ-0- / / / / 3/ 3/ / / / 3/ 3/ 3/ ZJ-S5- / ZJ-5- / ZJ-S75- / ZJ-75- / ZJ-S0- / ZJ-0- / ZJ-S0- / ZJ-0- / ZJ-S09- / ZJ-09- / ZJ-S- / ZJ-S- / ZJ-S0-3/ ZJ-0-3/ ZJ-S09-3/ ZJ-09-3/ ZJ-S- 3/ ZJ-- 3/ ZJ-S0- / ZJ-0- / ZJ-S09- / ZJ-09- / ZJ-S- / ZJ-- /

118 ZJ Series Dimensions Dimensions oth push-in branch ZJ-T**-* D type union Tee ZJ-T**-*-D Refrigerating ir uto. drain 2 H R H 2 Opposite side of hexagon H2 Opposite side of hexagon H2 ir R ZJ-T025- ZJ-T025- ZJ-T00- ZJ-T00- ZJ-T00- pplicable tube O.D.ø R / / / / 3/ Min. bore size H H2 ZJ-T025- -D ZJ-T025- -D ZJ-T00- -D ZJ-T00- -D ZJ-T00--D pplicable tube O.D.ø R / / / / 3/ Min. bore size H H2 nic ir sensor ZJ-T005- ZJ-T00- ZJ-T005- ZJ-T00- ZJ-T005- ZJ-T00- ZJ-T5- ZJ-T75- ZJ-T0- ZJ-T5- ZJ-T75- ZJ-T0- / / / / 3/ 3/ / / / 3/ 3/ 3/ ZJ-T005- -D ZJ-T00- -D ZJ-T005- -D ZJ-T00- -D ZJ-T005--D ZJ-T00--D ZJ-T5- -D ZJ-T75- -D ZJ-T0- -D ZJ-T5--D ZJ-T75--D ZJ-T0--D / / / / 3/ 3/ / / / 3/ 3/ 3/ Pressure ZJ-T5- ZJ-T75- ZJ-T0- ZJ-T0- ZJ-T09- ZJ-T- ZJ-T0- /2 /2 /2 / / / 3/ ZJ-T5--D ZJ-T75--D ZJ-T0--D ZJ-T0- -D ZJ-T09- -D ZJ-T- -D ZJ-T0--D /2 /2 /2 / / / 3/ / stainless steel ZJ-T09-3/ ZJ-T09--D 3/ ZJ-T- 3/ ZJ-T--D 3/ ZJ-T0- / ZJ-T0--D / ZJ-T09- / ZJ-T09--D / ZJ-T- / ZJ-T--D /

119 ZJ Series Refrigerating Dimensions Straight ZJ-S**-0 Union Tee ZJ-T**-0 ir uto. drain Opposite side of hexagon H H ir ZJ-S025-0 ZJ-S00-0 ZJ-S005-0 ZJ-S00-0 ZJ-S5-0 ZJ-S75-0 ZJ-S0-0 ZJ-S0-0 ZJ-S09-0 ZJ-S-0 pplicable tube O.D.ø Opposite side of hexagon H2 Min. bore size H H ZJ-T025-0 ZJ-T00-0 ZJ-T005-0 ZJ-T00-0 ZJ-T5-0 ZJ-T75-0 ZJ-T0-0 ZJ-T0-0 ZJ-T09-0 ZJ-T-0 pplicable tube O.D.ø Opposite side of hexagon H2 Min. bore size H H nic ir sensor Pressure Sleeve integrated nut ZJ-N* Opposite side of hexagon H pplicable tube O.D.ø H2 ZJ-N0 ø ZJ-N0 ø.5 ZJ-N0 ø ZJ-N ø.5 ZJ-N ø 9

MJ.J Female joint / joint Port size / to

972 Page : 973 Page : 973 Tee union type

Sleeve MJN*-0 ø Insert ring MJU*-0 Page :

97 ø Pressure Elbow/J Port size R,Rc / /

120 MJ.J Female joint / joint Port size / to /2 (Rc or R) Stable and secure piping due to double chuck. This is an excellent tightening joint with high reliability. Straight type Single straight MJS*-* pplicable tube O.D.ø Straight MJS*-0 pplicable tube O.D.ø Female, straight MJS*-*-M pplicable tube O.D.ø ulk head MJS*-0-X pplicable tube O.D.ø ulk head female MJS*-*-E Page : 97 Page : 97 Page : 97 Page : 97 Page : 972 OI Co, td. pplicable tube O.D.ø Refrigerating ir uto. drain ir Female joint MJ Series Elbow type Single elbow MJ*-* pplicable tube O.D.ø Elbow MJ*-0 pplicable tube O.D.ø Female, elbow MJ*-*-M pplicable tube O.D.ø Turn elbow MJ*-*-T pplicable tube O.D.ø Page : 972 Page : 972 Page : 972 Page : 973 Page : 973 Tee union type oth push-in branch MJT*-* pplicable tube O.D.ø nic ir sensor D type union Tee MJT*-*-D pplicable tube O.D.ø Union Tee MJT*-0 pplicable tube O.D.ø Female, union Tee MJT*-*-M pplicable tube O.D.ø Sleeve MJN*-0 pplicable tube O.D.ø Insert ring MJU*-0 Page : 973 Page : 973 Page : 97 Page : 97 Page : 97 pplicable tube O.D.ø Pressure Elbow/J Port size R,Rc / / 3/ Female joint /2 Page : 975 Sales unit is pieces/ bag. 99

121 MJ Series Refrigerating ir uto. drain Specifications Descriptions MJ Working fluid Compressed air Max. working pressure MPa.0 Working temperature C - to 0 (no freezing) Soft nylon tube (F-**), Urethane tube (U-95**) Note pplicable tube Coiling tube (KX-**) Note: Refer to page 0 for tube dimensions, ambient temperature and working pressure. ir nic ir sensor Pressure How to order MJ S M * Refer to model no. sections on dimensions page (pages 97 to 97) for combination of model no. Shape Shape S Straight Elbow T Union Tee N Sleep U Insert ring pplicable tube O.D. pplicable ø tube O.D. ø ø ø ø ø C Port size C Port size R/ R/ R3/ R/2 0 Without screw D D Other combinations Other combinations D D type E ulk head female M Female T Turn X ulk head Note: Sales unit is pieces / bag. Internal structure and parts list 2 3 No. Parts name Material ody rass 2 Nut rass 3 Sleep rass Safety Precautions If urethane or soft nylon tube is used in high working temperature, use insert ring (Refer to page 97). If an insert ring is not used, tube may come off from a joint. For copper tube, use a tube with class /2H (heat treatment) or less and tube wall thickness mm or less. If a tube is used where a tube mo ves frequently, troubles may occur. So, avoid use in such place. Mounting and removal Nut Sleeve ody Tube () Couple the nut and sleeve plastic tube or cupper tube as shown in the figure, insert the tube until hitting the joint (tube end), then tighten the nut by hand. (2) Tighten the nut by spanner, etc. pplicable tightening turn is 3/ for plastic tube, while / to /2 for copper tube (/2H and wall thickness mm). (3) Cut tube as right angle as possible, please eliminate burr and foreign matter, etc. () For temporally tightening, turn should be / turn less than applicable tightening turn, while to tighten securely, tighten / turn more. For retightening, also / turn more. 970

122 Dimensions: Single straight, straight, female straight, bulk head Single straight MJS*-* H(opposite M side of hexagon) H2(opposite side of hexagon) Straight MJS*-0 H(opposite side of hexagon) H2(opposite side of hexagon) MJ Series Dimensions Refrigerating ir MJS- MJS- MJS- MJS- MJS- MJS- MJS- MJS- MJS- MJS- MJS- MJS- MJS- MJS- MJS- MJS- * and dimensions show rough dimensions before fixing nut. pplicable Min. Effective M tube O.D.ø H H2 bore sectional size area (mm 2 ) R/ R/ R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R/ R3/ R/2 R3/ R/ Female, straight MJS*-*-M M H (opposite side of hexagon) * and dimensions show rough dimensions before fixing nut. pplicable Min. Effective M H H2 bore sectional tube O.D.ø size area (mm2) MJS--M MJS--M MJS--M MJS--M MJS--M MJS--M MJS--M MJS--M MJS--M MJS--M MJS--M MJS--M MJS--M MJS--M MJS--M MJS--M Rc/ Rc/ Rc/ Rc/ Rc3/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/2 Rc/ Rc3/ Rc/2 Rc3/ Rc/ H2(opposite side of hexagon) * and dimensions show rough dimensions before fixing nut. pplicable Min. Effective H H2 bore sectional tube O.D.ø size area (mm 2 ) MJS-0 MJS-0 MJS-0 MJS-0 MJS-0 MJS ulk head MJS*-0 X * and dimensions show rough dimensions before fixing nut. Mounting thickness mm or less pplicable Installation Min. Effective H hole bore sectional tube O.D.ø diameter size area (mm2) MJS-0-X MJS-0-X MJS-0-X MJS-0-X MJS-0-X MJS-0-X H (opposite side of hexagon) ø uto. drain ir nic ir sensor Pressure Female joint 97

123 MJ Series Refrigerating Dimensions: ulk head female, single elbow, female, elbow, elbow ulk head female MJS*-*-E Single elbow MJ*-* M 2 H (opposite side of hexagon) ir uto. drain ir nic ir sensor Pressure H (opposite side of hexagon) * and dimensions show rough dimensions before fixing nut. Mounting thickness mm or less MJS--E MJS--E MJS--E MJS--E pplicable tube O.D.ø M Female, elbow MJ*-*-M C H H2 C Rc/ Rc/ Rc/ Rc3/ Installation hole diameter 9 3 Min. bore size 3.5 Model No. with * is available as custom order. Consult with CKD. 2 H2 (opposite side of hexagon) ød H (opposite side of hexagon) Effective sectional area (mm 2 ) D MJ- MJ- MJ- MJ- MJ- MJ- MJ- MJ- MJ- MJ- MJ- MJ- MJ- MJ- MJ- MJ- Elbow MJ*-0 * 2 and dimensions show rough dimensions before fixing nut. pplicable tube O.D.ø M R/ R/ R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R/ R3/ R/2 R3/ R/2 H M Min. bore size Effective sectional area (mm2) H (opposite side of hexagon) M * 2 and dimensions show rough dimensions before fixing nut. pplicable Min. Effective tube M H 2 bore sectional O.D.ø size area (mm2) MJ--M MJ--M MJ--M MJ--M MJ--M MJ--M MJ--M MJ--M MJ--M MJ--M MJ--M MJ--M Rc/ Rc/ Rc/ Rc/ Rc3/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/ Rc3/ Model No. with * is available as custom order. Consult with CKD. MJ-0 MJ-0 MJ-0 MJ-0 MJ-0 MJ-0 * and dimensions show rough dimensions before fixing nut. pplicable Effective tube Min. bore H sectional O.D.ø size area (mm 2 )

124 Dimensions: Turn elbow, both push-in branch, D type union Tee, Union Tee Turn elbow MJ*-*-T oth push-in branch MJT*-* 2 E 2 MJ Series Dimensions Refrigerating C View E pplica ble tube * 3 and dimensions show rough dimensions before fixing nut. pplicable Effective tube M H H2 2 3 C D sectional O.D.ø area (mm 2) MJ--T MJ--T MJ--T MJ--T MJ--T MJ--T MJ--T MJ--T MJ--T MJ--T R/ R/ R/ R/ R/ R/ R3/ R3/ R/2 R/ D type union Tee MJT*-*-D 2 D H 3 M H2 (opposite side of hexagon) Effective sectional area * 2 and dimensions show rough dimensions before fixing nut. pplicable Min. Effective M H 2 bore sectional tube O.D.ø size area (mm 2 ) MJT- MJT- MJT- MJT- MJT- MJT- MJT- MJT- MJT- MJT- MJT- MJT- MJT- MJT- MJT- MJT- R/ R/ R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R/ R3/ R/2 R3/ R/ Union Tee MJT*-0 M H (opposite side of hexagon) ir uto. drain ir 2 nic ir sensor M 2 Pressure H (opposite side of hexagon) * 2 and dimensions show rough dimensions before fixing nut. pplicable Min. Effective M H 2 bore sectional tube O.D.ø size area (mm 2 ) MJT--D MJT--D MJT--D MJT--D MJT--D MJT--D MJT--D MJT--D MJT--D MJT--D MJT--D MJT--D MJT--D MJT--D MJT--D MJT--D R/ R/ R/ R/ R3/ R/ R/ R3/ R/ R3/ R/2 R/ R3/ R/2 R3/ R/ MJT-0 MJT-0 MJT-0 MJT-0 MJT-0 MJT-0 H (opposite side of hexagon) * and dimensions show rough dimensions before fixing nut. Min. Effective pplicable H bore sectional tube O.D.ø size area (mm 2) Female joint 973

125 MJ Series Refrigerating ir uto. drain Dimensions: Female union Tee, sleeve, insert ring Female, union Tee MJT*-*-M 2 2 Sleeve MJN*-0 Material C30D D ø H (opposite side of hexagon) M * 2 and dimensions show rough dimensions before fixing nut. pplicable Min. Effective M H 2 bore sectional tube O.D.ø size area (mm2) MJT--M MJT--M Rc/ Rc/ ir MJT--M MJT--M MJT--M Rc/ Rc/ Rc3/ pplicable tube O.D.ø ød MJT--M Rc/ MJN-0 MJT--M MJT--M MJT--M MJT--M MJT--M MJT--M Rc/ Rc3/ Rc/ Rc3/ Rc/ Rc3/ Model No. with * is available as custom order. Consult with CKD. MJN-0 MJN-0 MJN-0 MJN-0 MJN nic ir sensor Insert ring MJ**-O Material C30D Pressure ød ød Installation procedures Insert the tube into the cap nut and the sleeve in this turn, then insert the insert ring into the root of tube. Insert the tube into the joint until it stops, then couple the cap nut and the joint. ød ød (ore size) Comformity tube MJU-0.. U-950 MJU U-950 MJU-0. U-950 MJU U-95 MJU U-95 MJF F-0 MJF F-0 MJF F-0 MJF F- MJF-0. F- MJF F- 97

126 J Series Port size: / to /2 Refrigerating ir OI Co, td. uto. drain How to order J Elbow joint Male port size Female port size Male port size R/ R/ R3/ R/2 Female port size Rc/ ir Note: Sales unit is pieces / bag. No symbol when male and female have the same diameter. Dimensions Elbow joint/j * M2 nic ir sensor Pressure M Material C30D J- J-- J- J- J- * R/ R/ R/ R3/ R/2 Rc/ Rc/ Rc/ Rc3/ Rc/ For model with * mark, consult with CKD for delivery lead time. M M2 Min. bore size 25 3 Female joint 975

127 Rotary RJF Series Refrigerating Port size: M5, Rc/ ir uto. drain ir Features High rigidity and low sliding resistance achieved with built-in bearing mple lineup includes,,, or circuits Space saving type is also available for and circuits M5 and Rc/ port sizes available (,, circuits) pplications This joint supplies compressed air to the air cylinder for rotating members such as an indexing table, rotary table or rotary drum, and blowing or changeover valves. ir Piping IN INDEX Fixing arm OUT Rotary Rotating table sylinder, switch valve nic ir sensor Pressure Specifications Descriptions Working fluid Working pressure range Working temperature range RJF-M5-0 RJF--0 RJF-M5-0 RJF--0 RJF-M5-0 RJF--0 RJF-M5- RJF-M5- RJF-M5--S Compressed air -0kPa (Note ) to 0.7MPa 5 to 0 Number of circuits Port size Tolerable revolutions (Note 2) Rotation resistance ir port minimum sectional-area Product weight M Rc / M Rc / M Rc / M M M Note : The vacuum cannot be held. Note 2: Revolutions per minute. How to order RJF-M5--S M RJF M5 0 Port size Symbol Port size M5 M5 Note Rc / Description Number of circuits Number of circuits circuits circuits circuits circuits circuits C Shape C Shape lank S Note 2 asic type Space saving type Note : Supported with number of circuits 0, 0 and 0. Note 2: Supported with number of circuits and. 97

128 Internal structure and parts list RJF-M RJF-M5- RJF Series Internal structure and parts list Refrigerating ir uto. drain ir RJF-M5--S -S 7 nic ir sensor Pressure Parts list No. Parts name Material Mounting flange luminum alloy 2 Fixed side body cover Stainless steel 3 earing retainer Stainless steel Gasket Nitrile rubber 5 Rotation side body luminum alloy Fixed side body luminum alloy 7 Packing seal Nitrile rubber cross headed pan screw Stainless steel 9 truss screw Stainless steel Single row deep groove ball bearing earing steel No. Parts name Material 3 Single row deep groove ball bearing Parallel pin Plug Hexagon socket bolt C type snap ring Rotation side body Rotation side body 2 Packing seal Gasket Parallel pin earing steel earing steel rass, Stainless steel Stainless steel Stainless steel luminum alloy luminum alloy Nitrile rubber Nitrile rubber earing steel 977 Rotary

129 RJF Series Refrigerating ir uto. drain ir nic ir sensor Pressure Dimensions (basic type) RJF-M5-0 RJF--0 RJF-M5-0 RJF--0 -ø.5 P.C.D.3 (layout evenly) ø3 0 depth depth 3 -ø.5 P.C.D.9 (layout evenly) ø3 0 depth 3 3-ø.5 P.C.D.5 (layout evenly) depth 3 3-ø.5 P.C.D.5 (layout evenly) depth ø3 0 depth ø3 0 depth 3 ø ø ø * M5 depth 5 7-M5 depth Rc / M5 depth * Rc / M5 depth 5 ø2 ø3 ø3 ø depth 3 27 ø Rc / -Rc /

130 Dimensions (basic type) RJF-M5-0 RJF--0 RJF-M ø 0 depth RJF-M depth depth 5 -ø.5 P.C.D.3 (layout evenly) ø3 0 depth depth ø5.5 P.C.D.7 (layout evenly) ø 0 depth ø5 0 depth 5 P.C.D depth 7 ø ø ø * M5 depth 5 -M5 depth Rc / -M5 depth 5 -ø5.5 ø9.5 from back surface spot face depth 5.5 P.C.D. (loyout evenly) ø * Rc / -M5 depth M5 depth ø3 ø RJF Series Dimensions ø2 Refrigerating ir uto. drain ir nic ir sensor Pressure Rotary M5 depth 5 -ø5.5 ø9.5 from back surface spot face depth 5.5 P.C.D. (loyout evenly) 979

131 RJF Series Refrigerating ir uto. drain Dimensions (space saving type) RJF-M5--S ø 0 depth ir depth 5 ø ø7 -M5 depth 5 -M5 depth 5 -ø5.5 ø9.5 from back surface spot face depth 5.5 P.C.D.7 (layout evenly) -M5 depth P.C.D.50 (layout evenly) RJF-M5--S nic ir sensor Pressure ø 0 depth depth 5 5 ø ø5.5 ø9.5 from back surface spot face depth 5.5 P.C.D.95 (layout evenly) ø70 -M5 depth 5 -M5 depth 5 -M5 depth P.C.D. (layout evenly) 90

132 Series variation Fiber tube antistatic type (push-in joint) UP Straight type Single straight PG-S2-* Port size M3 M5 R/ Union Tee type oth push-in branch PG-T2-* Port size M3 M5 O.D. x I.D. (mm) ø.ø.2 Color lack White Transparent Transparent blue Transparent green Yellow (custom order) Red (custom order) Push-in joints for fiber tube (standard type) Single straight (round) PG-S2-M3-S Port size M3 Union Tee PG-T2-0 Sales unit of standard type is pieces/ box. Push-in joints for fiber tube (clean type) Straight type Single straight CG-S2-* Port size M3 M5 R/ Union Tee type Union Tee CG-T2-0 Straight CG-S2-0 bore size ø.ø.2 Port size M3, M5, R/, ø Fiber tube clean type (push-in joint) EH Straight PG-S2-0 D type union Tee PG-T2-*-D Port size M3 M5 ulk head CG-S2-0-X Sales unit of a clean type is piece/unit. Fiber tube antistatic type, clean type (push-in joint) Push-in joints for fiber O.D. x I.D. (mm) ø.ø.2 Color lack Transparent ulk head PG-S2-0-X Port size M3 M5 R/ Elbow type Single elbow PG-2-* Page : 97 Page : 97 Page : 97 Page : 97 Page : 9 Plug type Plug reducer PG-S2-P Port size ø lanking plug PG-P2- Page : 9 Page : 9 Page : 99 Page : 99 Page : 99 Page : 99 Elbow type Single elbow CG-2-* Page : 99 Page : 99 Page : 992 Page : 992 Port size M3 M5 R/ Tee union type oth push-in branch CG-T2-* Port size M3 M5 Refrigerating ir uto. drain ir nic ir sensor Pressure Fiber tube Page : 992 9

Resistant to static electricity and dust build-up The fiber tube (UP Series) is provided with static-preventing measures, and can prevent the static electricity and the adherence of dust.

133 Fiber tube push-in joint ntistatic type UP Series Refrigerating ir uto. drain type EH Series Outer diameter: ø. Free piping Outstanding flexibility and extremely high piping freedom makes it easy to pipe difficult areas such as small spaces and short distances of approx. 0 to 300mm. Resistant to static electricity and dust build-up The fiber tube (UP Series) is provided with static-preventing measures, and can prevent the static electricity and the adherence of dust. Refrigerating ir uto. drain ir Fiber tube Series variation Model Fiber tube Push-in joint Variation Standard specifications room specifications Standard specifications room specifications Series Tube material Color Variation Series Material Urethane (antistatic) Special polyolefin rass + electroless nickeling, PP Stainless steel (oil-prohibited), PP 7 colors 2 colors Variation types, models types, models ir nic ir sensor Pressure Enlarged tube inner diameter increases flow rate " new structure with outer diameter holding method has been incorporated. The inner diameter has been increased from the conventional.0 to.2 while maintaining the original tube outer diameter., thus increasing the flow rate by approx. three-fold." Energy and space saving Enlarged from conventional.0 to.2 This O.D.. x I.D..2 tube is extremely thin, making it possible to greatly reduce piping space. The tube piping volume is also small, thereby saving energy. Push-in joints for fiber tube One-touch attachment ttachment is easier than before, and can be completed just by holding down the joint's push ring and inserting or removing the tube. Polypropylene (PP) resin is incorporated as a standard for the resin parts, thus enhancing the corrosion-resistance. ody Chuck Outer ring Push ring Miniature air components connected with fiber tubes Reduced wiring block manifold ulk head Straight lanking plug Union Tee Single elbow Single straight ir operated valve Integrated gas supply direct mounting cylinder nic ir sensor Pressure Fiber tube Conventional product Conventional product. x wires: 0mm x wires: 253mm 2.0 x wires: 39mm 2 Eliminate adverse effect onto device accuracy Stress applied to the tube by piping is greatly reduced. The bounce is equivalent to a lead wire, so adverse effects on device accuracy are minimized. models available piping stress models (tube: special polyolefin, joint: stainless steel, etc.) using highly corrosion resistant materials have been added to the series for use in clean rooms. These models are perfect in fields which require a high cleanliness, such as semiconductor manufacturing, pharmaceutical and food handling s. Packing seal Conventional product Eco-friendly products ll substances which can adversely affect the global environment, have been eliminated from the materials. Plug reducer Union Tee Union Tee Union Tee In-line speed Cartridge cylinder Guided cylinder cylinder with vacuum pad Fiber tube 92 93

134 Refrigerating ir Fiber tube (push-in joint) Outer diameter: ø. Inner diameter: ø.2 ntistatic type (UP-902-F) type (EH-502) uto. drain ir nic ir sensor Pressure Specifications ntistatic type UP-902-F type EH-502 Working fluid Compressed air (Note ) Working pressure range ( C) (Note 2) -0kPa to 0.MPa -0kPa to.0mpa mbient temperature range C - to 0 (no freezing) O.D. I.D. mm ø.ø.2 ore size precision mm ±0. Outer diameter precision mm ±0. Durometer hardness Min. bending radius (JIS 3) mm HD 9 HDD 5 5 Min. installation radius mm 7 urst pressure ( C) MPa Volume resistance ratio Ω cm to Material Color ntistatic urethane lack, white, clear, clear blue, clear green, yellow (Note 3), red (Note 3) Special polyolefin lack, transparent pplicable joint PG, CG Series (push-in type) Note Note : Consult with CKD when using other working fluids. Note 2: Refer to the graph of "Relevant of working temperature and pressure (constant vacuum break)" for details on working pressure range. Note 3: Yellow and red are custom-ordered parts. Note : This cannot be used with a barbed joint (PTN*). How to order ntistatic type UP-9 02 type W Tube size ø.ø.2 (O.D. I.D.) ength per roll m roll EH-5 02 C F ntistatic Tube color lank lack W White C Transparent C Transparent blue CG Transparent green Y Yellow (Note) R Red (Note) Note: Custom order. Tube size ø.ø.2 (O.D. I.D.) ength per roll m roll Tube color lank C lack Transparent 9

135 Characteristics graph Relevant of working temperature and pressure (normal destruction) UP-902-F Effective sectional area (mm 2 ) Pressure (MPa) Pressure (MPa) (Usable area) urst pressure Fiber tube (push-in joint) Characteristics graph EH (Usable area) Temperature ( C) (Non-usable range) (Non-usable range) Relevant of tube length and effective sectional area Temperature ( C) Tube length (m) Max. working pressure urst pressure Max. working pressure The tubing inlet and outlet are measured with a single-ended straight (PG-S2-M5) attached. 5 Refrigerating ir uto. drain ir nic ir sensor Pressure Fiber tube (push-in joint) 95

136 Push-in joints for fiber tube Refrigerating Standard typepg Series pplicable tube outer diameter: ø. Port size: M3 to R/ ir uto. drain ir Specifications Working fluid Working pressure range mbient temperature range C pplicable tube Note : Consult with CKD when using other working fluids. Note 2: Fiber tube for barbed joint (UP-92-F) is not available. Note 3: Sales unit is set ( pieces). How to order Standard type PG S 2 PG Series Compressed air (Note ) -0kPa to.0mpa - to 0 (no freezing) Fiber tube (UP-902-F, EH-502) Note 2 * Refer to the model no. on the dimensions page (pages 97 to 99) for the model no. combination. M3 S D Other combinations Shape C Port size Shape S Straight pplicable tube O.D. ø. C Port size M3 M30.5 D Other combinations S Round nic T P Elbow Union Tee Plug M5 0 P M50. R/ No thread Plug for ø D X D type ulk head Note: Sales unit is pcs./box. lanking plug ir sensor Pressure Internal structure and parts list No. Parts name ody * Material Polypropylene (semitransparent) rass (electroless nickeling) 7 2 Packing seal Hydrogen nitrile rubber 3 Chuck holder Polypropylene (semitransparent) Chuck Stainless steel 5 Outer ring rass (electroless nickeling) Push ring *2 Polypropylene (white) 7 O ring Nitrile rubber 9 Nipple rass (electroless nickeling) (R/ is with sealant) 9 Gasket Stainless steel + Nitrile rubber *: The body of the single-ended straight, single-ended straight (round), and bulkhead is brass (electroless nickel-d). *2: The PG Series is white. 9

137 PG Series Dimensions Dimensions: Single straight, single straight (round), bulk head Refrigerating Single straight PG-S2-* M H (opposite side of hexagon) PG-S2- M H (opposite side of hexagon) ir uto. drain øk øk pplicable tube O.D. ø. pplicable tube O.D. ø. PG-S2-M3 PG-S2-M5 M M30.5 M50. H K Min. bore size.5.5 Effective sectional area mm ir PG-S2- R/ Single straight (round) PG-S2-M3-S M3 7 pplicable tube O.D. ø. HEX ø.9 Effective sectional area: 0.92mm2 nic ir sensor Straight PG-S2-0 7 pplicable tube O.D. ø. Pressure ø.2 Min. bore size: ø.5 Effective sectional area: 0.2mm2 ulk head PG-S2-0-X Opposite side of hexagon Mx 7 pplicable tube O.D. ø. (panel thickness max.) Min. bore size: ø.5 Effective sectional area: 0.5mm2 Push-in joints for fiber tube 97

138 PG Series Refrigerating Dimensions: Single elbow, both push-in branch, Union Tee ir uto. drain Single elbow PG-2-* 2 pplicable tube O.D. ø. PG-2-2 pplicable tube O.D. ø. øc øc ir PG-2-M3 PG-2-M5 M M30.5 M50. M H H (opposite side of hexagon) C H (opposite side of hexagon) M Min. bore size Effective sectional area mm PG-2- R/ oth push-in branch PG-T2-* 2 2 pplicable tube O.D. ø. øc nic ir sensor H (opposite side of hexagon) Pressure M M H 2 C Min. bore size Effective sectional area mm2 PG-T2-M3 PG-T2-M5 M30.5 M Union Tee PG-T pplicable tube O.D. ø. Min. bore size: ø.5 Effective sectional area: 0.90mm ø3.2. 9

139 PG Series Dimensions Dimensions: D type tee union, plug reducer, blanking plug Refrigerating D type tee union PG-T2-*-D 2 ir uto. drain øc 2 M H (opposite side of hexagon) ir PG-T2-M3-D M M30.5 H C Min. bore size.5 Effective sectional area mm 2.05 PG-T2-M5-D M Plug reducer PG-S2-P 25. pplicable tube O.D. ø. 7 ø nic *9. Min. bore size: ø.5 Effective sectional area: 0.97mm2 * Dimensions for GWS-M5 connection joint ody material: Polyamide (P) * ody material: Polyamide (P) ir sensor Pressure lanking plug PG-P2- ø5 *3 Material: Polypropylene (PP) * Dimensions for PG or CG Series connection joint Push-in joints for fiber tube 99

140 Push-in joints for fiber tube Refrigerating type CG Series pplicable tube outer diameter: ø. Port size: M3 to R/ ir uto. drain ir Overview CG Series is the joint for clean environment to semiconductor manufacturing, medical equipment, and foods. P.P. resin, stainless steel and EPDM rubber are provided for improving corrosion resistance. This product is assembled with oil-prohibited specifications and shipped in clean packaging. Specifications Working fluid Working pressure range mbient temperature range C ubricant pplicable tube CG Series air (Note ) -0kPa to.0mpa - to 0 (no freezing) Oil-prohibition Fiber tube (UP-902-F, EH-502) Note 2 Note : Rubber EPDM material is used, so this product cannot be used with fluids that contain mineral oil. Consult with CKD when using other working fluids. Note 2: Fiber tube for barbed joint (UP-92-F) is not available. Note 3: Sales unit is each. How to order * Refer to the model no. on the dimensions page (pages 99 to 992) for the model no. combination. nic ir sensor Pressure type CG S 2 Shape 0 Shape S Straight Elbow T Union Tee Note:Sales unit is piece per bag. X C Port size pplicable tube O.D. ø. Internal structure and parts list 7 9 D Other combinations C Port size M3 M30.5 M5 M50. R/ 0 No thread D Other combinations X ulk head No. Parts name Material ody * Packing seal Chuck holder Chuck Outer ring Push ring O ring Stopper O ring Polypropylene (semitransparent) Stainless steel (SUS30) Ethylene propylene diene rubber Polypropylene (semitransparent) Stainless steel (SUS30) Stainless steel (SUS30) Polypropylene (semitransparent) Ethylene propylene diene rubber Stainless steel (SUS30) Ethylene propylene diene rubber Nipple M3,M5 Stainless steel (SUS30) R/ Polypropylene (semitransparent) Gasket Stainless steel + fluoro rubber *: The body of the single-ended straight (M3, M5) and bulkhead is stainless steel. 990 CUTION The durability of the CG Series packing (material: EPDM) is susceptible to mineral oil, so it cannot be used to pipe general components. The R/ thread does not have a sealing agent on the threads. Use the PG Series for piping to general components.

141 CG Series Dimensions Dimensions: Single-straight, straight, bulk head Refrigerating Single straight CG-S2-* CG-S2- M H (opposite side of hexagon) M H (opposite side of hexagon) ir uto. drain øk øk pplicable tube O.D. ø. pplicable tube O.D. ø. CG-S2-M3 CG-S2-M5 M M30.5 M50. H K Min. bore size.5.5 Effective sectional area mm ir CG-S2- R/ Straight CG-S2-0 7 pplicable tube O.D. ø. ø.2 Min. bore size: ø.5 Effective sectional area: 0.2mm 2 nic ir sensor Pressure ulk head CG-S2-0-X Opposite side of hexagon 7 pplicable tube O.D. ø. Mx (panel thickness max.) Min. bore size: ø.5 Effective sectional area: 0.5mm2 Push-in joints for fiber tube 99

142 CG Series Refrigerating Dimensions: Single elbow, both push-in branch, tee union ir Single elbow CG-2-* 2 CG-2-2 uto. drain pplicable tube O.D. ø. pplicable tube O.D. ø. øc øc H (opposite side of hexagon) M H (opposite side of hexagon) M ir M H 2 C Min. bore size Effective sectional area mm2 CG-2-M3 CG-2-M5 M30.5 M CG-2- R/ oth push-in branch CG-T2-* 2 2 nic ir sensor Pressure CG-T2-M3 CG-T2-M5 M M30.5 M50. H C Min. bore size.5.5 Effective sectional area mm Union Tee CG-T pplicable tube O.D. ø. øc H (opposite side of hexagon) M.7.3 pplicable tube O.D. ø. Min. bore size: ø.5 Effective sectional area: 0.90mm ø

143 Specifications pplicable tube outer diameter Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Fluid temperature C mbient temperature C Port size Number of needle turn time Free flow Flow R/min. (NR) Effective sectional area mm2 Controlled Flow R/min. (NR) flow Effective sectional area mm2 pplicable tube Elbow type with push-in joint SC3W Series pplicable tube outer diameter: ø. Port size: M3, M5 JIS symbol M3 and over Note: Fiber tube for barbed joint (UP-92-F) is not available. How to order Port size:m3 SC3W-M3-2-O-F3553 Port size:m5 SC3W-M5-2-O-F355 Dimensions Opposite side of hexagon øe K SC3W ø. Compressed air to 0 (no freezing) 0 to 0 (no freezing) Fiber tube (UP-902-F, EH-502) Flow characteristics ow speed type Flow R/min. (NR) (Pressure 0.5MPa) pplicable tube O.D. ø. 5 (ow speed type fiber tube push-in specifications) SC3W-M5-2-O-F3553 M5 and over Custom order Note SC3W-M3-2-O-F Number of needle turn (time) Effective sectional area (mm 2 ) Refrigerating ir uto. drain ir nic ir sensor Pressure M ød G øf C SC3W-M3-2-O-F3553 SC3W-M5-2-O-F355 M M30.5 M MIN C MX D E 5 F G.3.5 K 7 7 Opposite side of hexagon 7 993

144 Refrigerating ir ine type with push-in joint SC2 Series pplicable tube outer diameter: ø., ø JIS symbol (Fine speed type fiber tube push-in specifications) Custom order uto. drain ir nic ir sensor Pressure Specifications How to order Port size: ø. SC2-0-H22-F-F3555 Port size: side ø, side ø. SC2-0-H2-F-F355 Port size: side ø., side ø SC2-0-H2-F-F3557 Dimensions F øg 2-øM Not F2 E J SC2 ø. Compressed air to 0 (no freezing) 0 to 0 (no freezing) and over Fiber tube (UP-902-F, EH-502) øc I pplicable tube outer diameter Working fluid Max. working pressure MPa Min. working pressure MPa Withstanding pressure MPa Fluid temperature C mbient temperature C Number of needle turn time Free flow Flow R/min.(NR) Effective sectional area mm2 Controlled Flow R/min.(NR) flow Effective sectional area mm 2 pplicable tube Note:Fiber tube for barbed joint (UP-92-F) is not available. N Flow characteristics Fine speed type Flow R/min. (NR) (Pressure 0.5MPa) 2 D Explanatory drawing of applicable outer tubing (Only H2/H2) Note Number of needle turn (time) Valve side (Meter-out) Free flow direction Controlled flow direction Cylinder side (Meter-out) Effective sectional area (mm 2 ) SC2-0-H22-F-F3555 SC2-0-H2-F-F355 SC2-0-H2-F-F3557 Piping tube outer diameter side side ø. ø. ø ø. ø. ø MX 27 MIN 32 C D.5 E 7 F F2 G 7 I. J M (installation hole diameter) N (tube insertion length) side side Note: F and F2 dimensions are oval. 99

145 Safety Precautions Design & Selection CUTION The PG and CG Series are not made of flame-resistant resin so use care in selection. This is an extremely fine tube, so the effective sectional area is extremely small. Use with a standard cylinder may cause problems such as failure to obtain set speed, delayed response, or knocking. The piping length should be at m or less and fine speed cylinder (catalog no. CC-N-30) used. Fiber tubing is thin, so vacuum in the vacuum device increases and delays the response of the vacuum switch during vacuum break. The CG Series is for clean blow and washing lines. Check with CKD for use in other applications. The CG Series packing (material: EPDM) is susceptible to mineral oil, so it is not suitable for piping general components. Use the PG Series for piping to general components. Installation & djustment CUTION Use fiber tubing for push in joints (UP-902-F, EH-502) with the push in joint f or fiber tubing (PG, CG Series). Tubing could dislocate if fiber tubing for CKD barbed joint (UP-92-F), barbed joint for fiber tubing (PTN Series), or other brands of tubing and joints are used. Cut tubing with a dedicated cutter at a right angle. Do not use worn or damaged tubing. Tubing could be crushed or break. If cut with a dull knife, tubing could be crushed and block the flow path. Do not reuse a tube that could be deteriorated and deformed. Inspect CG-*2- regularly. Threads on CG-*2- are made of PP, so leaks could occur if threads come loose. Inspect regularly and tighten to stop any leaks. If leaks do not stop after tightening, replace the joint with a new one. Use of oil is prohibited with the CG Series, so force required to insert tubing increases. Hold tubing at the base and securely insert until contact is felt - 7 mm. pply adequate torque when connecting pipes. To prevent air leakage or damage of screw. First tighten the screw by hand to prevent threads, then use a tool. Check that the tool's hexagon face and wrench are the correct size. CG-*2- threads are made of PP. Tighten as follows: eave.5 to 2 threads at the end of tapered threads open, and wrap 2 to 2.5 times with sealing tape. Tighten lightly by hand, then tighten two to three turns with a tightening tool. The part is made of resin so it could deform or break if tightened too much. Check that tubing is not worn or damaged. Tubing could be crushed, break, or be dislocated. Do not let the tube directly contact other surfaces, it could wear and break. On devices requiring antistatic measures, ground the member to which the joint is connected. static discharge could build up in tubing if the member is not grounded. CG-*2- (R/) does not have sealing agent. Prepare sealing tape, etc., separately. During Use & Maintenance CUTION Mounting and removal Installation Tube Fiber tube (push-in joint) Cautions (Reference value) Port thread M3 M5 Rc/ * Tightening torque N m 0.3 to 0..0 to.5 3 to 5 The above values apply when partner threads are JIS 03 piping tapered female threads (material C30D). * pplies only when joint threads are metal. Removal Refrigerating ir uto. drain ir nic ir sensor Pressure Push the tube in until it contacts the tube end. Check that the tube is not dislocated from the joint. Tubing fits 7 mm from the end of the joint. The end of the mounted tube must be cut at a right angle. While pushing the push ring with a finger, pull the tube to remove it. Tubing could deform (stretch) if pulled too hard. Correctly press the push ring while removing tubing. Replace deformed tubing with new tubing. 995

146 Refrigerating ir uto. drain ir Series variation Fiber tube flame resistant type (Push-in joint) O.D. x I.D. ø.ø.0 Fiber tube flame resistant type (Push-in joint) bore size ø.ø.0 Push-in joints for fiber tube Port size M5, R/ Color Red Green nic ir sensor Push-in joints for fiber tube Straight Single straight RG-S2-* Elbow Single elbow RG-2-* Plug type lanking plug PG-P2- Pressure Port size M5 R/ Port size M5 R/ Page: 00 Page: 00 Page: 00 99

147 Flame-resistant Flame-resistant resin is used for fiber tubing and pushin joints. Fiber tube flame resistant type (Push-in joint) Outer diameter: ø.inner diameter: ø.0 Features Flexibility retained Fiber tubing remains flexible even with flame-resistant resin. (Minimum installation radius: mm) Protection against naturally occurring ozone Ozone-resistant material (HNR) is used for pushin joint packing adversely affected by ozone. Refrigerating ir uto. drain ir Flame-resistant Flame-resistant resin (U9 Standards V-0 or equivalent) is used for fiber tubing and joints (push ring and elbow). Energy saving and space saving Ultra thin size is just ø. in outer diameter ø.0 in inner diameter. Piping space is greatly reduced. Tubing piping is small, saving energy. Fiber tube ø. wires: 0mm 2 Conventional products ø3.2 wires: 253mm 2 Conventional products ø.0 wires: 39mm 2 Eliminate adverse effect onto device accuracy Tubing reaction after piping is similar to leads, greatly reducing the effect on device accuracy. Push-in mounting and removal Tubing is easily inserted or removed by pressing down on the joint push ring. Operations are simpler than for conventional models. ody Packing seal Conventional product Chuck Outer ring Push ring nic ir sensor Pressure piping stress Fiber tube flame resistant type 997

148 Refrigerating ir Flame-resistant fiber tube (push-in joint) Outer diameter: ø.inner diameter: ø.0 Flame resistance type (UP-92-SR) uto. drain ir nic ir sensor Pressure Specifications Working fluid Working pressure range ( C) (Note 2) mbient temperature range C O.D. I.D. mm ore size precision mm Outer diameter precision mm Durometer hardness Min. bending radius (JIS 3) mm Min. installation radius mm urst pressure ( C) MPa Material Color pplicable joint Flame resistance type UP-92-SR Compressed air (Note ) -0kPa to 0.7MPa - to 0 (no freezing) ø.ø.0 ±0. ±0. HD Flame resistance polyurethane rubber Green/red (Note3) RG Series (Push-in type) Note: Consult with CKD when using other working fluids. Note2: Refer to the graph of "Relevant of working temperature and pressure (constant vacuum break)" for details on working pressure range. Note3: When flame retardant is added, the hue will be lighter instead of bright red or green. How to order ntistatic type UP-9 02 Tube size ø.ø.0 (O.D. I.D.) Characteristics graph R ength per roll m roll SR Flame resistance type Relevant of working temperature and pressure (normal destruction) Pressure (MPa) (Non-usable range) (Usable area) urst pressure Max. working pressure Temperature ( C) Tube color* R Red G Green * When flame retardant is added, the hue will be lighter instead of bright red or green. Effective sectional area (mm 2 ) Relevant of tube length and effective sectional area Tube length (m) The tubing inlet and outlet are measured with a single-ended straight (RG-S2-M5) attached. 99

149 Push-in joints for fiber tube Flame resistance type RG Series pplicable tube outer diameter ø. Port size M5 to R/ Refrigerating ir Specifications Working fluid Working pressure range mbient temperature range C Compressed air (Note ) -0kPa to.0mpa - to 0 (no freezing) pplicable tube Flame resistant fiber tube (UP-92-SR) (Note2) Note: Consult with CKD when using other working fluids. Note2: Fiber tube for barbed joint (UP-92-F) is not available. Note3: Sales unit is set ( pieces). How to order RG S 2 M5 RG Series Refer to the model no. on the dimensions page for the model no. combination. uto. drain ir Shape Shape S Straight C Port size C P Port size M5 Elbow Plug M50. pplicable tube O.D.:ø. R/ lanking plug nic Internal structure and parts list ir sensor Pressure 7 9 No Parts name ody * (Single elbow) (Single straight) Packing seal Chuck holder Chuck Outer ring Push ring * O ring Nipple Gasket Material PT (flame resistance resin *2) rass (electroless nickeling) Hydrogen nitrile rubber Polypropylene Stainless steel rass (electroless nickeling) Polyamide (flame resistance resin *2) Nitrile rubber rass (electroless nickeling) (R/ is with sealant) Stainless steel + nitrile rubber *: The RG Series push ring and body (single-ended elbow) is light gray (CKD standard color). *2: Equivalent to U9 standards V-0 Fiber tube flame resistant type 999

150 RG Series Refrigerating Dimensions:Single straight, single elbow, blanking plug ir Single straight RG-S2-M5 M H (opposite side of hexagon) RG-S2- M H (opposite side of hexagon) uto. drain øk øk pplicable tube O.D.ø. pplicable tube O.D.ø. ir RG-S2-M5 RG-S2- Single elbow RG-2-M5 M M50. R/ 2 H 7 K RG-2- pplicable tube O.D.ø Min. bore size Effective sectional area mm pplicable tube O.D.ø. øc øc H (opposite side of hexagon) H (opposite side of hexagon) M M nic RG-2-M5 RG-2- lanking plug RG-P2- M M50. R/ H C Min. bore size.5.5 Effective sectional area mm ir sensor Pressure *3 ø5 Material: PT/light gray (CKD standard) (Equivalent to U9 standards V-0) * Dimensions for RG Series connection joint Safety precautions CUTION Use flame resistant fiber tubing (UP-92-SR) with a flame resistant push-in joint for fiber tubing (RG Series). Do not use in an atmosphere with possible contact with welding sparks, etc. This product is made of flame resistant resin, but is not resistant to spatter. Tubing is soft and thin and could be dislocated if too much force is applied. 00

151 MEMO Refrigerating ir uto. drain ir nic ir sensor Pressure Fiber tube flame resistant type 0

152 Refrigerating ir uto. drain ir Series variation Fiber tube antistatic type O.D. I.D. (mm) ø.ø.0 Color lack White Transparent Transparent blue Transparent green Red (custom order) Yellow (custom order) Fiber tube antistatic type tubediameter ø.ø.0 Dedicated joint Port siz M3, M5, R/, ø, ø nic ir sensor Pressure Dedicated joint Straight Elbow arbed nipple pplicable tube O.D.ø. pplicable tube O.D.ø. pplicable tube O.D.ø./3.2././ 02

Fiber tube antistatic type Outer diameter:.mm Refrigerating ir uto.

mm outer diameter and mm minimum bending radius is now available. Short distances are laid easily and stress applied on the laid tube greatly reduced.

The resistance applied on the laid tube (tube stress) is extremely small compared to conventional types, so adverse effects on the device accuracy can be eliminated.

153 Fiber tube antistatic type Outer diameter:.mm Refrigerating ir uto. drain Fiber tube Conventional tube Fiber tube Minimum bending radius mm Retainer collar Dedicated joint ir Introducing an easy-to-pipe ultra-thin tube. n ultra-thin fiber tube with a ø.mm outer diameter and mm minimum bending radius is now available. Short distances are laid easily and stress applied on the laid tube greatly reduced. The fiber tube is an extremely fine air tube as thin and flexible as a lead wire. This tube is laid easily in difficult areas such as narrow spaces and for short distance. The resistance applied on the laid tube (tube stress) is extremely small compared to conventional types, so adverse effects on the device accuracy can be eliminated. This fiber tube is suitable for small bore air cylinder piping, and contributes to device downsizing. Main features ppropriate cylinder piping of small bore size Semiconductor related small part transfer unit Suitable for stable control of fine speed cylinder speed (Since there is little piping loss, the fine speed cylinder's speed is stable. Piping tube to small part vacuum pad Fiber tube jointm3 M5 fter passing the retainer collar through the fiber tube, insert the dedicated joint in and protect with the collar. Eliminate adverse effect onto device accuracy Stress applied to the tube by piping is greatly reduced. The bounce is equivalent to a lead wire, so adverse effects on device accuracy are minimized. Easy piping The fiber tube is extremely flexible, and the minimum bending radius is a mere mm. In piping, the tube is easily laid in difficult areas such as small spaces and for short distances of only 0 to 300mm. Energy saving and space saving This. x.0 diameter tube is extremely thin, making it possible to greatly reduce piping space. The tube piping volume is also small, thereby saving energy. Resistant to static electricity and dust build-up piping stress Fiber tube ø. wires: 0mm 2 Conventional products ø3.2 wires: 253mm 2 Conventional products ø.0 wires: 39mm 2 The fiber tube's volume resistivity is approx. x Ω cm. (lack) Superior antistatic measures are taken to prevent static electricity and dust gathering. Dedicated joint available The dedicated joint is provided with a retainer collar, and is available in three screw sizes: M3, M5, and R/ (only straight). This joint is available in the straight, elbow, or barbed nipple type. Fiber tube ø. Conventional products ø, ø3.2 nic ir sensor Pressure Fiber tube antistatic type Seven tube colors Tubing is available in black, white, clear, clear blue, clear green, yellow, or red. 03

154 Fiber tube Refrigerating ir uto. drain ir nic ir sensor Pressure Specifications Tube Descriptions Working fluid Working pressure range ( C) (Note) mbient temperature range C O.D. I.D. mm ore size precision Outer diameter precision Min. bending radius (JIS 3) mm Min. installation radius mm urst pressure ( C) MPa Volume resistance ratio Ω cm Material Color pplicable joint Dedicated joint Descriptions Port size Working fluid Working pressure range mbient temperature range C pplicable tube Effective sectional area mm 2 Flow (Note 3) R/min. (NR) Tube UP 9 02 W F lank W C C CG Y R lack White Clear Clear blue Clear green Yellow (Note) Red (Note) Note: Custom order. UP-92--*-F Compressed air -0kPa to 0.7MPa - to 0 (no freezing)..0 ±0. ± (reference value) or less (black) or less (other than black) Conductive urethane lack, white, clear, clear blue, clear green, yellow (Note2), red (Note2) PTN* Series (barbed type) (Note5) PTN* M3, M5, R /, ø3.2 (Note ), ø (Note ), ø Compressed air -0kPa to 0.7MPa - to 0 (no freezing) UP-92--*-F (Note ) Straight, arbed nipple:0.3 elbow: 0.2 Straight, arbed nipple: elbow: 3 Note Refer to the graph of "Relevant of working temperature and pressure (constant vacuum break)" for details on working pressure range. Note 2 Custom order. Note 3 Flow rate is the atmospheric pressure conversion value at pressure 0.5MPa. Note pplicable tube:soft nylon tube ( FH-322,F-0,F-0) Urethane tube ( U-950,U-950) Note 5 Not available for PG, CG, RG Series (push-in type). Note Fiber tube for push-in joint (UP-902, EH-502) is not available. How to order Tube size ength per roll ø.ø.0 m roll (O.D. I.D.) Tube color ntistatic room specifications (catalog No. C-033S) PTN2 UP-9 P0 P0 Dedicated joint Sales unit pcs./set <Straight> <Elbow> PTN2 Port size M3 M5 M30.5 M50. R / <arbed nipple> M3 PTN2 0 (Note ) pplicable tube O.D. (Note) ø3.2, ø ø PTN2 Port size M3 M5 M30.5 M50. Note: pplicable tube Soft nylon tube ( FH-322, F-0, F-0) Urethane tube ( U-950,U-950) M3 0

155 Relevant of working temperature and pressure (normal destruction) 2.5 urst pressure 2.0 Pressure (MPa) (Non-usable range) (Usable range) - 0 Temperature ( C) Internal structure and parts list Max. working pressure 0 0 Fiber tube Characteristics graph / Internal structure and parts list Relevant of tube length and effective sectional area Effective sectional area(mm 2 ) Tube length (m) Refrigerating ir uto. drain ir Straight Elbow nic ir sensor Pressure arbed nipple 2 Parts list No. Name Collar 2 ody 3 Gasket Shaft Material rass (with electroless nickeling) rass (with electroless nickeling) Stainless steel + Nitrile rubber rass (with electroless nickeling) Fiber tube antistatic type 05

156 Fiber tube Refrigerating ir uto. drain ir Dimensions Straight <PTN2-M3> <PTN2-M5> <PTN2-> ø5.5 M3 Opposite side of hexagon.5 Elbow <PTN2-M3> 9. ø0.7 ø3. 5 ø7. Opposite side of hexagon 7 M5. ø0.7.5 Weight/0.7g Weight/.g Weight/5.g 5.2 Opposite side of hexagon.5 ø R / Opposite side of hexagon ø0.7 ø3..2 ø0.7 ø M ø5.5 Weight/.7g nic ir sensor <PTN2-M5>. Opposite side of hexagon 7 Pressure ø0.7 ø M5 7.5 ø7.. Weight/.2g arbed nipple <PTN2-0> <PTN2-0> ø ø0.7 ø3. ø5 Weight/0.7g ø.7 3 ø0.7 ø3. ø7 Weight/.5g 0

157 Fiber tube Cautions Safety precautions Design & Selection This is an extremely fine tube, so the effective sectional area is extremely small. Use with a standard cylinder may cause problems such as failure to obtain set speed, delayed response, or knocking. The piping length should be at m or less and fine speed cylinder (catalog no. CC-N-30) used. Fiber tubing is thin, so vacuum in the vacuum device increases and delays the response of the vacuum switch during vacuum break. Installation & djustment (piping) pply adequate torque when connecting pipes. To prevent air leak and to protect thread. Tighten by hand at first so that threads are not damaged, then use a tool. Use a tool with a suitable hexagon face and wrench size. (Reference value) Port thread Tightening torque N m M3 0.3 to 0.5 M5 to.5 R / 3 to 5 * The M3 screw could be damaged by excessive tightening torque. On devices requiring antistatic measures, ground the member to which the joint is connected. static discharge could build up in tubing if the member is not grounded. The elbow can be rotated randomly and installed, but cannot be rotated after assembly. R/ does not have sealing material. Prepare sealing tape, etc., separately. During Use & Maintenance Mounting and removal Refrigerating ir uto. drain ir Installation pprox. 0.5mm Removal nic ir sensor Precautions after mounting <Fig. > <Fig. 2> () Insert the collar into the tube. (Fig. ) (2) Insert the tube to position. (Fig. 2) (3) Insert the collar into the joint. (Fig. ) () Check that the tube is not dislocated from the joint. Note: Do not incline the tube when inserting it into the bottom of the joint. The barbed joint is thin, and could be damaged by a lateral load. () Pull the collar out with a pair of needle-nosed pliers, etc. (2) Pull out the tube. (3) When reusing the tube, cut the end off mm and over. Note: If the tube is pulled forcefully while the collar is attached, the tube could be deformed, the flow obstructed, or the tube dislocated during use. Pressure Clearance!! Fiber tube antistatic type () Check that there is no gap between the collar and joint. (The joint could break or the tube could be dislocated.) (2) If the collar does not go in, the tube may rid up on it as shown above. Follow mounting and removal procedures and assemble the collar at a position 0.5mm from the tube. 07

158 Refrigerating ir uto. drain ir nic ir sensor UP.F.U.NU.KX.SR ntistatic tube Page : 09 Flame resistant tube OI Co., td. Page : O.D. I.D. (mm) O.D. I.D. (mm) Tube O.D.., 3.2,,,,,, mm Wide tube variation great variety of tube is available according to purpose and applications. High reliable, and meeting needs of space saving and complex piping etc. Soft nylon tube Manufacturer of colors other than white: oi Co., td. OI Co., td. Urethane tube O.D. I.D. (mm) Urethane tube OI Co., td. O.D. I.D. (mm) Coiling tube OI Co., td..5 Page : Page : 3 Page : Page : Tube knife O.D. I.D. (mm) O.D. I.D. (mm) Pressure Tube knife OI Co., td. Z-00 Feature () Preventing cutting plane from air trouble by right angle cut. (2) Extremely light weight and compact. (3) Easy edge replacing. pplicable material Nylon tube Urethane tube PTFE tube Other plastic tubes Shape knife 0

159 Resistant to static electricity and dust build-up Variety of colors Tubing is available in black, white, clear, clear blue, or clear green. Colors can be used for the application. UP-F2 Series(ø3.2 to ø) Specifications Descriptions UP-9**-F2-P0 O.D. I.D. Working fluid mmmm ø3.2ø. (Note) øø2.5 Compressed air Max. working pressure MPa mbient temperature range C Durometer hardness (JIS K 72) 0.7 ( C) 0 to 0 (no freezing) HD9 (reference) Mini. bending radius (JIS 3) mm Min. installation radius mm urst pressure MPa 2. ( C) Volume resistance ratio (JIS K 9) Ω cm Material Color lack: to 5, other colors: to (referential value) ntistatic urethane lack, white, clear, clear blue, clear green, clear red (Note) Relevant of working temperature and pressure (normal / destruction) Pressure (MPa) urst pressure ntistatic tube Outer diameter: 3.2mm, mm, mm, mm, mm, mm øø.5 (Non-usable range).0 Max. working pressure 0.5 (Usable range) Temperature ( C) Features Standard clean specifications (F2 Series) Diverse lineup Six diameters are available: 3.2,,,,, and. How to order UP 9 32 Tube hardness Tube size W C ength per roll Note: ll outer diameter ø3.2 tubes and the clear red ø and ø tubes are available as custom orders. F2 ntistatic D Tube color P0 room specifications Symbol Descriptions Tube hardness 9 9 Tube size 32 ø3.2 (Note) 0 ø 0 ø C ength per roll m D Tube color lank W C C CG CR lack White Clear Clear blue Clear green Clear red (Note) Refrigerating ir uto. drain ir nic ir sensor UP-F Series (ø to ø) Specifications Descriptions O.D. I.D. mmmm Working fluid Max. working pressure MPa mbient temperature range C Durometer hardness (JIS K 72) Mini. bending radius (JIS 3) mm Min. installation radius mm urst pressure MPa Volume resistance ratio (JIS K 9) Ω cm Material Color øø5 25 UP-92**-F øø.5 Compressed air 0.7 ( C) 0 to 0 (no freezing) HD92 (reference) ( C) øø.5 3 lack: to, other colors: to (referential value) ntistatic urethane lack, white, clear, clear blue, clear green Relevant of working temperature and pressure (normal / destruction) Pressure (MPa) (Non-usable range) Max. working pressure (Usable range) urst pressure Temperature ( C) How to order UP 92 0 Tube hardness Tube size W C ength per roll F ntistatic D Tube color room specifications (catalog No. C-033S) Dust generation preventing structure for use in cleanrooms UP 92** F P0 Symbol Descriptions Tube hardness Tube size 0 ø ø ø C ength per roll m D Tube color lank W C C CG lack White Clear Clear blue Clear green Pressure ntistatic tube 09

160 ntistatic tube Refrigerating ir uto. drain ir nic ir sensor Pressure Dedicated joint / speed (Custom order) Specifications Descriptions Volume resistance ratio Resin ubricant Dimensions Ω cm pplicable tube 32 UP UP-9 0 UP-9 Sales unit is pieces/ bag. Descriptions to or less (reference value) ntistatic PT (black) Oil-prohibited Note: Other specifications are the same as the standard products. Refer to the specifications of joint GW Series or speed SC3W Series. How to order Dedicated joint GW Insert ring S Shape pplicable tube outer diameter C Port size INS UP 32 D Other combinations ntistatic + Oil-prohibited * "-F" is selected for the end of the new joint GW series model. Refer to How to order for joint GW Series for model details. * Consult with CKD for models other than above. S F Shape S Straight M ulkhead female connector Same as standard products C pplicable tube outer diameter Same as standard products D X S M E Port size Other combinations ulk head Round Female type ulk head female SC3W Port size pplicable tube outer diameter C Option ntistatic + Oil-prohibited * "-F" is selected for the end of the speed SC3W series model. Refer to How to order for speed SC3W Series for model details. * Consult with CKD for models other than above. Dedicated joint / speed Refer to the dimensions for joint GW Series (pages 930 to 93) and speed SC3W Series (pages 2 to 5). M5 I F Port size M50. pplicable tube outer diameter ø ø C Option Same as standard products Insert ring <custom order> INS-UP32- INS-UP0- INS-UP ø.7 ø2.5 ø ø2.2 ø. ø3 ø.5 ø5 ø3 Material: rass + electroless nickeling

161 ntistatic tube Safety precautions CUTION Design & Selection e sure to ground the member connected to the joint. Otherwise electrostatic discharge could build up in tubing. When using tubing where electrostatic discharge must be prevented, select black tubing. Use the same size of urethane tubing, pushin joint, and insertion ring. When using with vacuum pressure with a push-in joint, use the insert ring. Use CKD brand joints and tubes. Do not apply a pulling force exceeding the values given on the right onto the joint or tube. Installation & djustment The insertion ring is pulled out of urethane tubing with a finger when changing or modifying after piping is connected. The insertion ring need not be discarded. During Use & Maintenance Insert the insertion ring by hand. Otherwise it could deform or break and cause vacuum leakage if inserted with a tool. How to install the product Tube outer diameter ø3.2 ø ø ø ø ø (N) Pulling force Refrigerating ir uto. drain ir. Insert the insertion ring into urethane tubing with a finger. Urethane tube 2. Insert into the pushin joint (GW Series). Insert ring Insert until the flange contacts. nic ir sensor Pressure ntistatic tube

162 Refrigerating ir uto. drain ir nic ir sensor Pressure How to order FH-322 Soft nylon tube Tube size ø3.2ø2. F- Soft nylon tube W Tube size (O.D.) 32 ø3.2 ø 0 ø ø 0 ø ø 0 ø ø Soft nylon tube Soft nylon tube is very flexible comparing to conventional nylon tube, and optimum for piping in the limited space. The tube also has sufficient characteristics such as cold resistance, weather ability, oil resistance and chemical resistance, etc. For miniature joint (F) (page 90) 0 Tube color lank lack W White W C ength per roll C Tube color m lank lack (Standard) 0 0m W White (standard) R Red U lue Y Yellow G Green O Orange Note: If tube color is white "W", length per roll 0m is not available. Note: Use the FH-322 for miniature joint. F-32 can not be used. Tube F.U.NU.KX.SR Series Wide bore size available according to purposes and applications. High reliable piping tubes Outer diameter: 3.2,,,,,, mm Specifications Descriptions Manufacturer of colors other than white: oi Co., td. This table indicates the value at C. FH-322 F-32 F-0 F-0 F-0 F- F- F- F- Working fluid Compressed air O.D. I.D. mmmm mbient temperature range C to 0 (no freezing) urst pressure MPa Max. working pressure MPa Durometer hardness HDD 3 HDD 52 Min. bending radius (JIS 3) Min. installation radius mm mm White (m only), black, Standard color White, black red, blue, yellow, green, orange White, black lack Standard length per roll m /0 /0 (only black) /0 Pressure ( use burst ) change (%) Working temperature ( C) * Outer diameter dimension tolerance may vary within ±0. mm. Relevant of working temperature and pressure (use / burst) Working pressure = burst pressure 3 (Example) Tube F-0 (øø2.5) If temperature is 50 C, working pressure is 0% of working pressure of C =..0 (MPa) 0

163 Realizing magnified bore size and strength increases but still same outer diameter due to new manufacturing process. Meeting needs of large flow rate. lso economical. Common specifications Descriptions Working fluid mbient temperature range C urst pressure MPa Working pressure MPa Use vacuum kpa Urethane tube Tube size (O.D.) 0 ø 0 ø 0 0 ø ø ø Descriptions ir 0 to 0 ( C).0 ( C) -0 How to order NU 0 W ength per roll C Tube color m lank lack (standard) 0m W White (standard) Note: If tube color is white "W", length per roll 0m is not available. Note: Consult with CKD of other color. room specifications (catalog No. C-033S) Dust generation preventing structure for use in cleanrooms NU C P0 Soft urethane tube How to order Soft urethane tube U 92 pplicable tube O.D. size ø ø ø ø ø 0 room specifications (catalog No. C-033S) U-92 ength per roll m 0 0m N C C Tube color lank lack N Clear PW White pure R Red U lue Y Yellow G Green O Orange P0 F.U.NU.KX.SR Series How to order Specifications Descriptions NU-0 NU-0 NU-0 NU- NU- O.D. I.D. mmmm urst pressure MPa to 2. mbient temperature range C Durometer hardness (JIS K 72) 0 to 0 (no freezing) HDD Min. bending radius (JIS 3) mm Min. installation radius mm Outer diameter precision mm Weight g/m Tube color ength per roll m lack, white /0 (only black) Note: Refer to Intro 3 for relation of tube length and effective sectional area. Relevant of working temperature and pressure (use / burst) Pressure (MPa) (Not available) urst pressure Max. working pressure (Usable range) Temperature ( C) Relevant of working temperature and working pressure Rate of change pressure (%) Pressure resistance at is set as 0% Working temperature ( C) OI Co., td. Specifications This table indicates the value at C. Descriptions U-9 U-9 U-9 U-92 U-92 Working fluid Compressed air O.D. x I.D. mmmm urst pressure MPa Working pressure MPa Durometer hardness JIS K72 Min. bending radius mm Min. installation radius mm HD Standard color Standard length per roll m lack, clear, red, blue, yellow, green, orange, white pure /0 Working pressure = breaker pressure variation rate /3 at C When the temperature rises, the constant pressure gradually drops. Special care must be taken for temperature in use. Example) U-9, working temperature 0 C Working pressure = breaker pressure variation rate /3 = /3 0 =0.33MPa 3 Refrigerating ir uto. drain ir nic ir sensor Pressure Tube

164 F.U.NU.KX.SR Series Refrigerating ir uto. drain ir nic ir sensor Pressure Since urethane tube has high mechanical strength, the tube strongly endures external force, and also has flexibility. This is widely used in general lines, etc. How to order U-95 0 Urethane tube Urethane tube N pplicable tube O.D. size 32 ø3.2 0 ø 0 ø 0 ø ø ø Tube color lank lack N Clear Note: Indicate tube color in the remarks on the order slip. room specifications (catalog No. C-033S) U-95 KX- Coiling tube P0 coiling tube is a coil-like manufactured extensible tube. Differing from the conventional way, a joint is easily installed, since a straight section is provided with the specified length to the extensible direction from end of the coil, and the coil shrinks and extends very smoothly. Durability of coil end is also excellent. How to order 0 Coiling tube O.D. size 0 ø 0 ø ø ø Specifications This table indicates the value at C. Descriptions U-9532 U-950 U-950 U-950 U-95 U-95 Working fluid Compressed air O.D. I.D. mmmm mbient temperature range C 0 to 0 (no freezing) urst pressure MPa Max. working pressure MPa Durometer hardness JIS K 72 Min. bending radius (JIS 3) mm Min. installation radius mm Standard color Standard length per roll m HD Clear and black /0 OI Co., td * IF U-950 or less, tolerance of outer diameter may vary within 0. mm, U-950 over, may vary within 0.2 mm. Relevant of working temperature and pressure (use / burst) Pressure ( use burst ) change (%) Working temperature ( C) 50 Working pressure = breaker pressure variation rate /3 at C When the temperature rises, the constant pressure gradually drops. Special care must be taken for temperature in use. Example) U-950, working temperature 0 C Working pressure = breaker pressure variation rate /3 50 =3.2 /3 0 =0.53MPa Specifications Descriptions KX-0 KX-0 KX- KX- O.D. I.D. mmmm mbient temperature range C Use extension m D mm mm Color to 0 (no freezing) Orange * Tolerance of outer diameter may vary within 0. mm. * Tubing is made of hard nylon. Consult with CKD for urethane tubing. D (bore size) (min.) 290 OI Co., td

165 F.U.NU.KX.SR Series How to order SR Flame resistant tube Flame resistant tube Flame retardant material used epoch-making tube. If welding spatter, etc. contact, the tube is not burning. (Equivalent to U standards 9V-0: Self extinguish) How to order 0 0 pplicable tube O.D. size 0 ø 0 ø 0 ø ø ø Tube color lank lack R Red U lue G Green Note: Indicate tube color in the remarks on the order slip. Specifications Descriptions SR-0 SR-0 SR-0 SR- SR- O.D. I.D. mmmm mbient temperature range urst pressure C MPa..3 0 to 0 (no freezing) Max. working pressure MPa..... Min. bending radius mm Standard color lack, red, blue, green Standard length per roll m 0 This table indicates the value at C. Relevant of working temperature and pressure (use / burst) Working temperature ( C) Refrigerating ir uto. drain ir nic ir sensor Pressure Tube Pressure ( use burst ) change (%) OI Co., td. Working pressure = breaker pressure variation rate /3 at C When the temperature rises, the constant pressure gradually drops. Special care must be taken for temperature in use. Example) SR-0, working temperature 0 C Working pressure = breaker pressure variation rate /3 0 =.3 /3 0 =0.MPa

166 FU2 component Refrigerating ir uto. drain ir CONTENTS Product introduction Safety precautions FU2 Technical data 5 nic ir sensor Pressure component 3

167 ttaining constant pressing Refrigerating ir uto. drain ir nic ir sensor Pressure with a magnetic spring. Ideal for handling miniature devices and fragile workpieces undamaged Problems with metal springs solved Fine buffer is targeted for popular damage-free handling used in semiconductor manufacturing fields. This completely new cushioning unit uses suction of a magnet at the buffer. Soft contact and stable pressing leave workpieces damage-free. This can be used for a variety of miniature parts and fragile workpieces such as CD glass, semiconductor chips, substrates, CDs, and DVDs. Continuous pressing If the magnet assembled in the movable or fixed shaft deviates, an inclined magnetic line is generated to counter the axial section's force. Continuous magnetic return applied axially N S Pressure characteristics S N Spring type buffer N S S N Pressure generated by magnetic force can be selected from 0.2 N, 0.5 N, or.0 N depending on the model. Pressure is constant regardless of stroke. Pressure (N).0N Stroke length (mm) 0.5N 0.2N Movable axis Magnet and lightweight Using just two components a movable section and a fixed section achieves compact ultra light weight 5 g or less = FU2-7D. The light movable section touches workpieces gently and reduces shock. Fixed shaft Movable part Fixed section Rotation prevention -pole spline magnet on the inner side of the fixed shaft and the outer side of the movable shaft generates magnetic attraction to function and return to the origin. return applied rotationally (magnetic rotation prevention) N S S N N S S N

168 CKD's original absorption magnetic spring uses magnetic attraction realizing stable pushing, low particle generation, and long life in this compact, highly accurate fine buffer FU2 Series. Highly accurate bearing added to lineup Standard and high-accuracy types are available for the rod guide. The bearing type can be selected based on repeated X-Y return accuracy of the movable shaft. S: Standard/precision ±0 μm or less H/HV: /precision ±50 μm or less Y direction (μm) Rear side installation FU2-7D-S (standard bearing) FU2-D-S (standard bearing) X direction (μm) Y direction (μm) supply brackets available Standard and high-accuracy brackets are available. The high-accuracy HV can be used to supply vacuum from the bracket. Reaction from piping tubing, etc., is eliminated, further improving pressing stability Side installation FU2-7D-H/HV (precise bearing) FU2-D-H/HV (precise bearing) X direction (μm) Free head and tail combination The fine buffer's head and tail shapes can be Tail piece Diverse applications Wide variety of uses including vacuum parts pick-and- place, transport, and transfer enables this product to be used to fix or hold workpiece positioning and to pressfit or insert stoppers and parts. Device transfer FU2 Series combined to suit the application. Head piece Refrigerating ir uto. drain ir nic ir sensor FU2 Series variation FU2-7 and long life Fewer particles than generated in conventional metal spring use because there is no metal contact and movable contact area is small. Thrust is generated magnetically, eliminating metal spring fatigue and lengthening life and stable performance. FU2- O.D. ø7 h7 M0.75 ø h7 M earing precision S H HV S H HV Standard type Internal flow path precise type Standard type Internal flow path precise type CD, DVD transfer Flexible PC suction transfer iquid crystal device suction transfer Part insertion Portable button pressure inspection Pressure (N) Stroke length (mm) Tail piece shape Head piece shape No hole M3 M5 No hole M3 M5 Pressure component 5

169 Refrigerating ir uto. drain ir nic ir sensor Pneumatic components Safety precautions lways read this section before starting use. Refer to Intro 7 for general precautions. WRNING The working temperature range differs with the bearing type. e sure to use within the specified range. Standard bearing type (S): 5 to 50 C bearing (H/HV) : 5 to 0 C This product has a built-in magnet. Do not use this product where magnetic swarf or dust is present. Otherwise it could be damaged or malfunction. Fix the product in place with a nut (full thread: M, M) or hexagon socket set screw (brazed: 7D, D). When using the set screw, use the groove on the fixed shaft. NG OK fter installing the product and piping, confirm that it operates smoothly. Connection of hard tubes or piping with a small bending R can cause malfunctions or faults. Mount the product vertically. lateral load or moment force on the moving axis can change the characteristics and affect the life. NG Design & Selection CUTION When using for vacuum applications, use a tube with small piping tension as the tension resulting from the piping tube is added to the pressure. Recommended tube: UP Series (ntistatic tube, air fiber) The load (jig and workpiece) on the movable shaft must not exceed the allowable weight. FU2-7/M: 30g or less FU2-/M: 0g or less When used for a rotating application, note the maximum holding torque of the magnet. If force exceeding maximum holding torque is applied, the shaft could run out and reverse by. The internal flow path high accuracy (HV) product has a leak. Clearance sealing improves pressure stability and return accuracy. This causes the vacuum to leak. (Pressure drop within kpa compared to -0 kpa initial pressure.) Pressure WRNING efore starting operation, check for loosening or problems at load or joint connections. Start operation after confirming that devices operate correctly. fter installing, repairing, or modifying the product, conduct a function inspection and confirm that the product is correctly installed. Confirm that there is no machine interference and that the actuation is normal. Installation & djustment Using the product in the following method can cause a moment force on the moving axis even with the load capacity, and lead to malfunctions of faults.. When large jig other than vacuum pad is attached to head piece. 2. When large or irregularly shaped vacuum pad is attached. 3. When using in ways that applies a deflected load onto the moving axis.. When holding one jig or workpiece with several FU2 units. Do not apply impact on the product by dropping it, etc. The impact load can damage the product.

170 FU2 Series Installation & djustment Refrigerating CUTION Do not remove the product from the package until just before piping. Foreign matter could enter from the piping port or shaft clearance and cause faults or malfunctions. When piping, flush pipes with air to remove foreign matter, swarf, etc. pply adequate torque when connecting pipes. Port thread Tightening torque (N m) M3 0.3 to 0. M5 to.5 When tightening, be sure to use the width across flats at the section to be tightened. Using the width across flats for a different section could cause structural damage. Do not apply lubricant to the guide tube. Functions could be changed. Do not hit the guide tube or cause scratches or indents. The guide tube is thin-walled copper that deforms easily. Handle it with care. Scratches or indents on the guide tube could damage bearings and lead to faults or malfunctions. Read the instruction manual before use. Familiarize yourself with details before using the product. Use a hexagon socket set screw to fix the outer diameter brazed type (7D, D) in place and tighten with proper torque. Excessive tightening could damage the main unit or bearings and lead to faults or malfunctions. Product nominal FU2-7 FU2- Set screw size M2 hexagon socket head set screw M2.5 hexagon socket head set screw Tightening torque (N m) 0. to to 0. ir uto. drain ir nic ir sensor Pressure WRNING Refer to the instruction manual and conduct careful maintenance and inspection. Incorrect handling could result in device or damage or operation faults. During Use & Maintenance CUTION Conduct daily inspections and regular inspections to ensure that maintenance control is done correctly. Insufficient maintenance could lower product functions, shorten product life, or result in damage or incorrect operations. Stop use if leakage increases or if the device does not function correctly. fter installing, repairing, or modifying the product, conduct a function inspection and confirm that the product is correctly installed. component 7

171 Refrigerating ir FU2 Series Outer diameter: M, M, ø7, ø uto. drain ir nic ir sensor Pressure Specifications Descriptions O.D. ppearance uffer pressure (uffer operation) N Pressure displacement Note Z Values at room temperature of C FU2-7D FU2-M FU2-D FU2-M S H/HV S S H/HV S (Return) X ø7h7 0. to 0.2 Y M0.75 ±% or less øh7 S/H HV S/H HV 0. to 0.2 uffer stroke mbient temperature range C 5 to 50 5 to 0 5 to 50 5 to 50 5 to 0 5 to 50 earing clearance mm 0.2 or less 0.05 or less 0.2 or less 0.2 or less 0.05 or less 0.2 or less Max. holding torque Note 2 N cm 0.25 and over (reference value) Note 3 Note 3 Return position X-Y mm ±0. or less ±0.05 or less ±0. or less ±0. or less ±0.05 or less ±0. or less precision Z mm ±0. or less Note 3 or less oad capacity g 30 or less 0 or less Note : Indicates pressure variation within the stroke. Pressure cannot be proportional to the stroke. Note 2: If a rotary torque exceeding the maximum holding torque is applied on the moving axis, the moving axis will step out and rotate. *Holding torque: Force which can return to the original position even if force is applied in direction (Fig. ) and moving axis position deviates. Note 3: Refer to the table at right for FU2-M/D holding torque. Note : Refer to Fig. for return positioning accuracy. (FU2-M/D maximum holding torque (reference value)) The figure shows buffer return accuracy. Pressure (N) Stroke length (mm) Holding torque (N cm) Note 5: Consult with CKD for requirements not complying with specifications. Note : oad capacity indicates the maximum load (jig and object picked up) and over mounted on the head piece and over 0. to 0., 0.9 to. 2 Indicates the holding torque at the outer end. M 0. to 0., 0.9 to..2 and over.2 and over.2 and over 2.5 and over (Fig. ) Recovery detailed drawing

172 How to order FU2 D S T3 H3 Outer diameter earing precision C Pressure <Example of model number> O.D. ø h7 socket and spigot type FU2-D-HV-05--T-H5 D uffer stroke Outer diameter : øh7 socket and spigot type earing precision : Internal flow path type precise C Pressure (N) : 0.5N D uffer stroke : mm E Tail piece shape : No hole F Head piece shape : M5 female thread depth E Tail piece shape F Head piece shape Symbol Descriptions Outer diameter 7D ø7h7 socket and spigot type M M0.75 full thread type D øh7 socket and spigot type M M full thread type earing precision S Standard (bearing clearance 0.2mm or less) H (bearing clearance 0.05mm or less) Internal flow path type precise HV (earing clearance 0.05mm or less) C Pressure (N) D uffer stroke (mm) 2 2 E Tail piece shape T No hole T3 M3 female thread depth 3 T5 M5 female thread depth F Head piece shape H No hole H3 M3 female thread depth 3 H5 M5 female thread depth Combination of bearing precision, buffer stroke, tail piece shape, and head peace shaped D uffer stroke E Tail piece shape F Head piece Shape 2 T T3 T5 H H3 H5 FU2 7D FU2 Series How to order FU2 M FU2 D earing precision HV S H FU2 M Refrigerating ir uto. drain ir nic ir sensor Pressure Mounting bracket for socket and spigot type model no. O.D. Discrete bracket model no. type installation Straight installation 7D FU2-7D - FU2-7D -2 D FU2-D - FU2-D -2 component 9

173 FU2 Series Refrigerating ir Internal structure and parts list FU2-*-S (standard) -*-H (precise) FU2-*-HV (precise internal flow path type) uto. drain ir nic ir sensor Pressure 50 No Weight Parts name Tail piece Material luminum alloy Remarks less nickeling Hexagon socket head set screw Stainless steel Fixed shaft Ring magnet earing Stainless steel Plastic magnet Fluorine resin Standard bearing type Polyester-based resin Internal flow path type Head piece luminum alloy less nickeling racket material FU2-7D- FU2-7D-2 FU2-D- FU2-D Material luminum alloy Remarks less nickeling No. 7 9 Parts name O ring Tail joint Ring magnet Guide tube O ring Hexagon nut 7 9 Material Nitrile rubber luminum alloy Plastic magnet Stainless steel Nitrile rubber Carbon steel FU2-M /7D (Unit: g) Fixed Movable part Tail piece (movable part) Head piece (movable part) racket (Note 2) section (Note ) T T3 H H3 2 FU2-M-S FU2-M-S FU2-7D-S FU2-7D-S FU2-7D-H FU2-7D-H FU2-7D-HV FU2-7D-HV-02- Remarks Trivalent chromate treatment Internal flow path type less nickeling (only full thread) Note : Total weight of movable part = movable part + tail piece + head piece, product weight = fixing section + movable part + tail piece + head piece Note 2: Plug and fixing screw are included to bracket. FU2-M/D (Unit: g) Fixed Movable part Tail piece (movable part) Head piece (movable part) racket (Note 2) section (Note ) T T3 T5 H H3 H5 2 FU2-M-S-05/ FU2-M-S-05/- 2.5 FU2-M-S-05/ FU2-D-S-05/ FU2-D-S-05/ FU2-D-S-05/ FU2-D-H-05/ FU2-D-H-05/- 2.5 FU2-D-HV-05/ FU2-D-HV-05/- 2.5 Note : Total weight of movable part = movable part + tail piece + head piece, product weight = fixing section + movable part + tail piece + head piece Note 2: Plug and fixing screw are included to bracket.

174 Dimensions (FU2-7D, FU2-M) FU2-7D-S FU2-7D-H 35 [39] (Width across flats) 3.5 (.5) Stroke length 2, ø. ø ø7h7 (Width across flats) FU2-7D-HV 35 [39] 3.5 (.5) Stroke length 2, (Width across flats) O ring ø. ø. ø. ø. 3.5 FU2 Series Dimensions hole 2-ø Refrigerating ir uto. drain ir Note: Values in parentheses are dimensions for the strokes. FU2-M-S (Width across flats) Note: Values in parentheses are dimensions for the strokes. nic ir sensor Pressure component 2. ø7h7 (Width across flats) 35 [39] 3.5 (.5) Stroke length 2, ø. 3.5 (.7) M Opposite side of hexagon ø. (Width across flats) Note: Values in parentheses are dimensions for the strokes. Note: The O ring is shipped installed. pply a light coat of lubricant, such as grease, to the O ring to maintain sealing. Note: Drawing dimensions are the same regardless of head and tail shape. 5

175 FU2 Series Refrigerating ir uto. drain ir Dimensions (FU2-M, FU2-D) FU2-M-S Stroke length: 2, 0 [] (Width across flats) 5 () Stroke length 2, ø.7 Note: Values in parentheses are dimensions for the strokes. 5 M (.2) Opposite side of hexagon ø.7 (Width across flats) Stroke length: (Width across flats) 5 () 3 Stroke length ø.7 5 M (.2) ø.7 (Width across flats) FU2-D-S/H Stroke length: 2, (Width across flats) ø.7 5 Stroke length: (Width across flats) ø.7 5 () () nic ir sensor Pressure 0 [] Note: Values in parentheses are dimensions for the strokes. FU2-D-HV () 5 Stroke length 2, ø (Width across flats) 2. øh7 ø.7 (Width across flats) ø.7 5 hole 2-ø Stroke length ø 2. øh7 ø.7 (Width across flats) 0 [] O ring 2. ø 5 Stroke length 2, ø.7 (Width across flats) øh7 Note: Values in parentheses are dimensions for the strokes. Note: The O ring is shipped installed. pply a light coat of lubricant, such as grease, to the O ring to maintain sealing. Note: Drawing dimensions are the same regardless of head and tail shape. 52

176 racket dimensions FU2-7D- (ttachment: FP-M3, set screw M22) FU2-7D-2 (ttachment: FP-M3, set screw M22) FU2 Series Dimensions Refrigerating ir FU2-D- (ttachment: FP-M5, set screw M2.52.5) ø C ø C 2-ø2.7 2-M3 (Using vacuum drawing) 2-M2 (For FU2 fixing) indicates the FU2 installation reference surface ±0.03 ±0.03 ±0.03 ± M5 (Using vacuum drawing) 9± M3 (Using vacuum drawing) 2 2-M2 (For FU2 fixing) FU2-D-2 (ttachment: FP-M5, set screw M2.52.5) 25 ± ±0.03 3± M5 (Using vacuum drawing) 3 2 ø C 3 2-ø2.7.5 indicates the FU2 installation reference surface. ø C 5 2-ø3. uto. drain ir nic ir sensor Pressure.5 2-ø M2.5 (For FU2 fixing) indicates the FU2 installation reference surface M2.5 (For FU2 fixing) indicates the FU2 installation reference surface. component Note: When using for a vacuum drawing, tighten plugs (FP-M3, M5) in empty screw holes (M3, M5). 53

177 FU2 Series Refrigerating ir uto. drain eakage flux [Measuring instrument] Flux meter Probe [Measurement procedure] () Touch the probe to each measurement point on the FU2. (2) Rotate the FU2 at center shaft standards, and measure maximum flux density. Flux measurement direction Probe Flux meter [Target] () FU2-7D-S-02- (2) FU2-D-S-05- (3) FU2-D-S-05- ir [Result] flux at each position () FU2-7D-S-02- (2) FU2-D-S-05- (efore buffer operation) Unit: mt (G = 0.mT) () FU2-7D-S-02- (2) FU2-D-S nic (fter buffer operation) Max. () FU2-7D-S-02- (2) FU2-D-S-05- ir sensor Pressure (3) FU2-D-S-05- (efore buffer operation) Max. Results of measurement under flux density of 0.03 to 0.07 mt Unit: mt (G = 0.mT) Max. (fter buffer operation) Max. Results of measurement under flux density of 0.03 to 0.07 mt 5

178 2 Particle occurrence rate [Measuring instrument] Particle counter : aser dust monitor Minimum measurable particle diameter : 0.μm rate : 2.3 /min. FU2 Series Technical data Refrigerating ir [Test circuit] uto. drain 0.0μm ir purge Chamber device-compatible actuator FU2 2.3 /min From relief port or vacuum sweep port Particle counter ir [Measurement procedure] () Set a test sample in a stainless steel antistatic chamber. (2) Send clean air passed through a 0.0 μm at the same flow rate as the particle counter suction rate (2.3R/min.). (3) Confirm that the particle counter value is 0 in the immobile state. () Move the test sample, and measure particles generated during movement. * sealed chamber is used so that particles other than those generated from the test sample do not enter the chamber. *Confirm that the particle occurrence rate of the clean device-compatible actuator (vacuum sweep) to be used is 0 before starting. [Measuring condition] Quality of air Purge : "grade.2." μm gas FU2 operation speed : 50 mm/s Operation conditions : Install with no load parallel to the purge flow Measuring frequency : One minute measurement /,000 movements [Result] Model: FU2-D-S-- Particle occurrence volume (pc.) 2 0 Particle occurrence after 5,000 movements Operational cycle (cycle) Particle diameter 2.0 μm and over.0 μm and over 0.5 μm and over 0.3 μm and over 0.2 μm and over 0. μm and over nic ir sensor Pressure Particle diameter 0. μm and over 0.2 μm and over 0.3 μm and over 0.5 μm and over.0 μm and over 2.0 μm and over Total particle occurence volume Operational cycle component 55

179 FU2 Series Refrigerating ir uto. drain ir 3 Stop position precision (X-Y) [Measuring instrument] (Measuring overview fig.) (Measurement procedure) aser position sensor uffer operation Return (Full stroke) (Extended end position) [Measurement procedure] Measure X-Y positioning accuracy when manually moving the full stroke oad : oadless Installation attitude : Downward Degree of vacuum : Non vacuum Piping : None [Target] FU2-7D-S-02- FU2-7D-HV-02- FU2-D-S-05- FU2-D-HV-05- y X Y aser position sensor x nic [Result] Repeat stop position (X-Y) Y direction (μm) FU2-7D-S-02- (standard bearing) FU2-7D-HV-02- (precise bearing) FU2-D-S-05- (standard bearing) FU2-D-HV-05- (precise bearing) ir sensor Pressure 2 X direction (μm) * The above data are actual measurements. - 5

180 Systems Page Components for clean room specifications 2 Systems Ozone proof JIS symbol Index Systems

181 Systems Pneumatic components for clean room specification Pneumatic components for clean room specifications Catalog No. C-033S Compatible with a diverse range and level of clean room cleanliness Pneumatic cylinder Electric driven slider Directional switching valve unit uxiliary components nics components Valve blow Ver.2 Catalog No.C-033S ccurately producing ultra clean air Model circuit for clean blow Differential pressure gauge Inside clean room Pressure gauge Main line Filter Exhaust treatment Oil removing Regulator Flow rate sensor Solenoid valve for air blow Needle valve Final air blow is ensured by installing a final at the end. 2

182 Zero particle generation with vacuum and exhaust treatment Circuit configuration for actuators Systems Differential pressure gauge Differential pressure gauge Inside clean room Pressure gauge Standard cylinder Screw type air compressor Refrigerating dryer Filter Filter Cylinder Main line Oil removing Oil removing Regulator Switching valve control valve Exhaust treatment Cylinder Standard cylinder control valve Exhaust treatment P7 series P5 series Double rod packing is incorporated. Dust is exhaust outside the clean room from the pipe connected to the relief port at the middle section. treatment Switching valve Guided cylinder treatment P7 series P5 series relief port is provided at the sliding section of the piston rod on the outer side of rod packing. Dust is vacuumed from this port and forced out and exhausted. Guided cylinder ow particle generating exhaust treatment P72 series P52 series Double rod packing is incorporated as with the standard cylinder. Dust is exhausted outside the clean room from the pipe connected to the relief port at the middle section. ow-dust grease is used in the sliding section (piston rod, guide rod). Exhaust treatment Switching valve Cylinder ow particle generating vacuum treatment P73 series P53 series s with the standard cylinder, a relief port is provided at the sliding section of the piston rod on the outside of rod packing. Dust is vacuumed from this port and forced out an exhausted. ow-dust grease is used in the sliding section (piston rod, guide rod). treatment Switching valve Cylinder Systems 3

183

184 Ozone proof components Page Influence of ozone Ozone proof component selection guide 7 Compliance of product groups Ozone proof 5

185 Factory environments easily affected by ozone High rates of lightning (electric discharge) air Plant Strong sun rays Down wash (in-flow) Turbo compressor (Dry air) Inlets and lake (reflection) Pneumatic components affected by ozone Diaphragm and valve seat of Valve seat of air blow valve Piping hose Repeated stress accelerates rubber deterioration High air flow at orifice

186 Ozone proof component selection guide typical component consist of the following devices. Devices in the dotted box require ozone measures. Compressed air source Compressed air cleaner Control unit ctuator Compressor Main line valve fter cooler Regulator Cylinder Tank Dryer Filter ubricator Range for selection ozone proof components Filter Ejector Pad Safety precautions Ozone-proof components use fluorine rubber or hydrogen nitrile rubber for rubber parts. Special working environment and working conditions different from the standard part are considered when evaluating performance and life. Ozone proof 7

187 Compliance of product groups. Pneumatic cylinder vailable as standard. 2. Pneumatic valves Pneumatic valves are available as indicated below. Option Ozone-proof specifications are available as an option. -P Parts are available as ozone-proof specifications by adding -P to the end of the model. (Custom order) Ozone countermeasures The material of rubber parts differs from standard parts. (Dimensions are same as standard.) Option applicable model Series G Series WG2 Series MNE0 Series, 5 port valve 3 port valve, 5 port valve 3 port valve port valve 3 port valve G * MG * MNG * 3G * M3G * MN3G * WG2* MWG 2* Z MW3G2* MNE0* MN3E0* How to order Selectable with option symbol Example) Discrete [Model No.] [Solenoid position] - [Port size] - [Electric connection] [Option] - [Voltage] Example) Manifold [Model No.] [Solenoid position] - [Port size] - [Electric connection] [Option] - [Station No.] - [Voltage] -P applicable model Series S0 Series S Series MNS0 Series K Series 3M Series 3P Series 5 port valve 5 port valve 3 port valve port valve 3 port valve, 5 port valve 3 port valve 3 port valve 3 port valve S 0* MS 0* S * M(D)S * 3S* M(D)3S* MNS0* MTS0* MN3S0* MT3S0* K * MK * MNK* 3K* M3K* 3M 0* M3M 0* 3P * M3P * How to order vailable by adding -P to the end of the model. (Custom order) Example) Discrete [Model No.] [Solenoid position] - [Port size] - [Manual override] [Electric connection] [Option] - [Voltage] -P Example) Manifold [Model No.] [Solenoid position] - [Port size] - [Manual override] [Electric connection] [Option] - [Station No.] - [Voltage] -P

188 3.Refining and Pressure djusting Components () Refer to How to order for each device ( to ).. Pneumatic auxiliary components Pneumatic auxiliary components are available as follows: Option Ozone-proof specifications are available as an option. -P Parts are available as ozone-proof specifications by adding -P to the end of the model. (Custom order) Ozone countermeasures The material of rubber parts differs from standard parts. (Dimensions are the same as standard parts.) Option applicable model Series Medium bore size type SC Can be selected with option symbol "X". SC- (port size) -X How to order -P applicable model Series Direct piping, elbow type Elbow type, push-in joint Miniature joint stainless steel type SC3R SC3W F GW ZW How to order SC3R - [Port size] - [Option] P SC3W - [Port size] - [pplicable tube] - [Option] P F [Shape] [Flow path shape] [pplicable tube] - [Port size] - P GW [Shape] [pplicable tube] - [Port size] - [Other combination] - P ZW - [Shape] [pplicable tube] - [Port size] - P * The following models are available as standard parts. SC2/SCD2 Series, silencer SM/SW Series, stainless type joint ZJ Series, tube F.U.KX 5. Sensors * The following models are available as standard parts. pressure switch (reed type small pressure switch) P*0-W Series Pressure switch P000-W Series Ozone proof 9

189 Filter standard white series: Ozone proof W00-W/W3000-W W000-W/W000-W-P Series Fluoro rubber and hydrogenated nitrile rubber, etc., used for rubber part materials. Port size: Rc/ to Rc JIS symbol How to order W00 Port size Note on model no. selection Note : Refer to pages 33 and 335 for specifications and attachment. Note 2: Select options per drainage, bowl material, element, and sections. When selecting options for several items, list options in order from the top. Note 3: If "" is selected for pressure range, a low pressure gauge (0 to 0.MPa) is used. Note : Minimum operating pressure of automatic drain is 0.MPa for option symbol "F". Initially generated drainage and air are purged until pressure reaches 0. MPa. Note 5: Minimum operating pressure of automatic drain is 0.MPa for option symbol "F". Note : For "T", a gauge plug is assembled instead of a pressure gauge. Note 7: piping adaptor set *00-**-W is attached. Note : The piping adapter set and C bracket cannot be used together. Note 9: G threads and NPT threads are available for IN, OUT, gauge port and drain discharge port (metal bowl with automatic drain). Note : The adapter port size can be selected from Rc, NPT or G. lank: Rc thread, N: NPT thread, G: G thread. (example) G Note : If NPT is selected for the C piping thread, an NPT pressure gauge is enclosed. If an Rc or G thread is selected, an R thread pressure gauge is enclosed. Dimensions W Z P W Ozone proof specifications C Port thread type Option Note 2 Note 3 Note Note 5 Note Piping adapter set (ttached) Note 7 Note G ttachment (ttached) Same as standard products. Refer to pages 33 to 30. D E F Display unit G9P Symbol Descriptions Port size / / 3/ /2 3/ 25 C Port thread type Note 9 lank Rc thread N NPT thread G G thread D Option lank With manual drain cock F utomatic drain with manual override (NO type) Drainage F utomatic drain with manual override (NC type) FF arge automatic drain with manual override (NO type) FF arge automatic drain with manual override (NC type) lank Polycarbonate bowl owl material Z Nylon bowl M Metal bowl lank 5μm Element Y 0.3μm (submicron) Pressure lank 0.05 to 0.5MPa range 0.05 to 0.35MPa lank With relief mechanism Relief N Nonrelief type lank With standard pressure gauge (G0) Pressure gauge T Without pressure gauge (a gauge port is assembled with sealed) T Pressure gauge attached option (a gauge port is assembled ventilated) X IN/OUT reverse flow (right left) E Display unit lank MPa display, Rc thread J MPa display, NPT, G thread F Piping adapter set (attached) Note lank Without attachment *W / piping adapter set *W / piping adapter set *W 3/ piping adapter set *W /2 piping adapter set *W 3/ piping adapter set 25*W piping adapter set 32*W / piping adapter set *daptor screw type lank N G Rc thread NPT thread G thread G ttachment (attached) Note lank Without attachment W C type bracket 3W type bracket G9P Pressure gauge: G9D--P G59P Pressure gauge: G59D--P G0P Pressure gauge: G0D--P G50P Pressure gauge: G50D--P GP Pressure gauge: GD--P W00 W3000 W000 W000

190 Reverse and standard white series: Ozone proof W0-W/ W30-W W0-W/W0-W-P Series Fluoro rubber and hydrogenated nitrile rubber, etc., used for rubber part materials. Port size: Rc/ to Rc JIS symbol How to order W0 Port size Note on model no. selection Note : Refer to pages 32 and 33 for specifications and attachment. Note 2: Select options per drainage, bowl material, element, and sections. When selecting options for several items, list options in order from the top. Note 3: If "" is selected for pressure range, a low pressure gauge (0 to 0.MPa) is used. Note : Positions of a check valve and pressure gauge can not be changed. If the reverse direction of IN and OUT are required, indicate "X" in the end of optional section. Note 5: Min. operating pressure of automatic drain is 0.MPa for option symbol " F ". Initially generated drainage and air are purged until pressure reaches 0. MPa. Note : Minimum operating pressure of automatic drain is 0.MPa for option symbol "F". Note 7: For "T", a gauge plug is assembled instead of a pressure gauge. Note : piping adaptor set *00-**-W is attached. Note 9: The piping adapter set and C bracket cannot be used together. Note : G threads and NPT threads are available for IN, OUT, gauge port, and drain discharge port (metal bowl with automatic drain). Note : The adapter port size can be selected from Rc, NPT or G. lank: Rc thread, N: NPT thread, G: G thread. (example) G Note : If NPT is selected for the C piping thread, an NPT pressure gauge is enclosed. If an Rc or G thread is selected, an R thread pressure gauge is enclosed. Dimensions W Z P W Ozone proof specifications C Port thread type Option Note 2 Note 3 Note Note 5 Note Note 7 * Refer to "Pneumatic, and uxiliary Components" for option. Display unit Piping adapter set (ttached) Note Note 9 G ttachment (ttached) Same as standard products. Refer to pages 3 to 3. D E F G9P Symbol Descriptions Port size 25 / / 3/ /2 3/ C Port thread type Note lank Rc thread N NPT thread G G thread D Option lank F With manual drain cock utomatic drain with manual override (NO type) Drainage F FF FF utomatic drain with manual override (NC type) arge automatic drain with manual override (NO type) arge automatic drain with manual override (NC type) owl material lank Z M Polycarbonate bowl Nylon bowl Metal bowl Element lank 5μm Y 0.3μm (submicron) Pressure range lank 0.05 to 0.5MPa 0.05 to 0.35MPa Relief lank With relief mechanism N Nonrelief type Pressure gauge lank T T With standard pressure gauge (G0) Without pressure gauge (a gauge port is assembled with sealed) Pressure gauge attached option (a gauge port is assembled ventilated) X IN/OUT reverse flow (right left) E Display unit lank MPa display, Rc thread J MPa display, NPT, G thread F Piping adapter set (attached) Note lank Without attachment *W / piping adapter set *W / piping adapter set *W 3/ piping adapter set *W /2 piping adapter set *W 3/ piping adapter set 25*W piping adapter set 32*W / piping adapter set *daptor screw type lank Rc thread N NPT thread G G thread G ttachment (attached) Note lank Without attachment W C type bracket 3W type bracket G9P Pressure gauge: G9D--P G59P Pressure gauge: G59D--P G0P Pressure gauge: G0D--P G50P Pressure gauge: G50D--P GP Pressure gauge: GD--P W0 W30 W0 W0 Ozone proof

191 Regulator standard white series: Ozone proof R00-W/R00-W R3000-W R000-W/R000-W R000-W-P Series Fluoro rubber and hydrogenated nitrile rubber, etc., used for rubber part materials. Port size: Rc/ to Rc JIS symbol How to order R00 Note on model no. selection Note : Refer to pages 37 and 379 for specifications and attachment. Note 2: When selecting options for several items, list options in order from the top. Note 3: If "" is selected for pressure range, a low pressure gauge (0 to 0.MPa) is used. Note : For "T", a gauge plug is assembled instead of a pressure gauge. Working temperature becomes 5 to 50 C. Note 5: piping adaptor set *00-**-W is attached. Note : The piping adapter set and C bracket cannot be used together. Note 7: G and NPT threads are available for IN, OUT, and gauge ports. Note : The adapter port size can be selected from Rc, NPT or G. lank: Rc thread, N: NPT thread, G: G thread. (example) G Note 9: If NPT is selected for the C piping thread, an NPT pressure gauge is enclosed. If an Rc or G thread is selected, an R thread pressure gauge is enclosed. Dimensions W P W W Port size Ozone proof specifications C Port thread type D Option Note 2 Note 3 Note *Refer to "Pneumatic, and uxiliary Components" for option. Same as standard products. Refer to pages 32 to 3. E Display unit F Piping adapter set (ttached) Note 5 Note G ttachment (attached) Symbol Port size Pressure range Relief Pressure gauge E F 25 X lank lank N lank T T / / 3/ /2 3/ Descriptions C Port thread type Note 7 lank N G Rc thread NPT thread G thread D Option Display unit lank MPa display, Rc thread J MPa display, NPT, G thread Piping adapter set (attached) Note 7 lank *W *W *W *W *W 25*W 32*W *daptor screw type 0.05 to 0.5MPa 0.05 to 0.35MPa With relief mechanism Nonrelief type With standard pressure gauge (G0) Without pressure gauge (a gauge port is assembled with sealed) Pressure gauge attached option (a gauge port is assembled ventilated) IN/OUT reverse flow (right left) Without attachment / piping adapter set / piping adapter set 3/ piping adapter set /2 piping adapter set 3/ piping adapter set piping adapter set / piping adapter set lank N G Rc thread NPT thread G thread G ttachment (attached) Note lank Without attachment W C type bracket 3W type bracket W type bracket G9P Pressure gauge: G9D--P G59P Pressure gauge: G59D--P G0P Pressure gauge: G0D--P G50P Pressure gauge: G50D--P GP Pressure gauge: GD--P R00 R00 R3000 R000 R000 R000

Reverse standard white series: Ozone proof R0-W/ R-W/ R30-W R0-W/R0-W/R0-W-P Series Fluoro rubber and hydrogenated nitrile rubber, etc., used for rubber part materials.

192 Reverse standard white series: Ozone proof R0-W/ R-W/ R30-W R0-W/R0-W/R0-W-P Series Fluoro rubber and hydrogenated nitrile rubber, etc., used for rubber part materials. Port size: Rc/ to Rc JIS symbol How to order R0 W P W W Port size Ozone proof specifications C Port thread type G ttachment (attached) Symbol Descriptions Port size / / 3/ /2 3/ 25 C Port thread type Note 7 lank Rc thread N NPT thread G G thread R0 R R30 R0 R0 R0 Note on model no. selection Note : Refer to pages 3 and 37 for specifications and attachment. Note 2: When selecting options for several items, list options in order from the top. Note 3: If "" is selected for pressure range, a low pressure gauge (0 to 0.MPa) is used. Note : Positions of a check valve and pressure gauge can not be changed. If the reverse direction of IN and OUT are required, indicate "X" in the end of optional section. For "T", a gauge plug is assembled instead of a pressure gauge. Note 5: piping adaptor set *00-**-W is attached. Note : The piping adapter set and C bracket cannot be used together. Note 7: G and NPT threads are available for IN, OUT, and gauge ports. Note : The adapter port size can be selected from Rc, NPT or G. lank: Rc thread, N: NPT thread, G: G thread. (example) G Note 9: If NPT is selected for the C piping thread, an NPT pressure gauge is enclosed. If an Rc or G thread is selected, an R thread pressure gauge is enclosed. Dimensions D Option Note 2 Note 3 Note * Refer to "Pneumatic, vacuum and uxiliary components" for option. Same as standard products. Refer to pages 390 to 392. E F Display unit Piping adapter set (attached) Note 5 Note D Pressure range Relief Pressure gauge E F Option X lank lank N lank T T Piping adapter set (attached) lank *W *W *W *W *W 25*W 32*W Without attachment / piping adapter set / piping adapter set 3/ piping adapter set /2 piping adapter set 3/ piping adapter set piping adapter set / piping adapter set *daptor screw type lank Rc thread N NPT thread G G thread G Display unit lank J ttachment (attached) lank W 3W W G9P G59P G0P G50P GP 0.05 to 0.5MPa 0.05 to 0.35MPa With relief mechanism Nonrelief type With standard pressure gauge (G0) Without pressure gauge (a gauge port is assembled with sealed) Pressure gauge attached option (a gauge port is assembled ventilated) IN/OUT reverse flow (right left) MPa display, Rc thread MPa display, NPT, G thread Without attachment C type bracket type bracket type bracket Pressure gauge: G9D--P Pressure gauge: G59D--P Pressure gauge: G0D--P Pressure gauge: G50D--P Pressure gauge: GD--P Note Note 9 Ozone proof 3

193 : Ozone proof R500-P Series Fluoro rubber and hydrogenated nitrile rubber, etc., used for rubber part materials. Port size: push-in joint ø, ø JIS symbol How to order R500 SSC P G39 P Connection Ozone proof specifications Symbol Descriptions Connection S Straight IN Elbow S Straight OUT Elbow Port size C ø C ø Direction Option Option Panel mount Pressure range Relief lank P lank lank N Without nut With nut 0.05 to 0.7MPa 0.05 to 0.35MPa Relief type Nonrelief type C Pressure gauge C Pressure gauge T lank (pressure range: blank) lank (pressure range: ) G39D Without pressure gauge With pressure gauge (G29D--P) With pressure gauge (G39D--P0) With pressure gauge (G39D--P) Note on model no. selection Note : Refer to page 590 for specifications. Note 2: ø 0 to.0mpa a pressure gauge is standard. For low pressure, ø27 0 to 0. MPa low pressure gauge is provided. Note 3: Indicate option symbol "P" for panel installation. Dimensions Same as standard products. Refer to page 59.

194 lock manifold : Ozone proof MNR500-P Series Fluoro rubber and hydrogenated nitrile rubber, etc., used for rubber part materials. Port size: push-in joint ø, ø, ø How to order MNR500 SSC 5 N G39 D P JIS symbol Note Common supply type IN OUT OUT type Individual supply type IN IN C Port size Note on model no. selection D F Ozone proof specifications G Installation method Pressure gauge Note Option Note 3 Note : Refer to page 59 for specifications. Note 2: The air supply block is one station. When using three or more stations simultaneously with the common supply, increase one supply block station for every three stations. Designate with mixed manifold specifications. Note 3: Up to five direct mounting stations can be used. Note : Options and pressure gauges for each block are the same. Note 5: ø; 0 to.0 MPa pressure gauge is provided as standard. Note that in use with low pressure, the ø27: 0 to 0. MPa lowpressure gauge is selected. Note : Complete mixed manifold specifications on the page 09 when selecting specifications other than the basic model. OUT OUT Station number Note 2 E Symbol Descriptions MNR500 Common supply type MNR500 Individual supply type type IN direction S Straight Elbow OUT direction C D E F G S Port size IN-OUT C C C C C C Station number Option lank N T X Pressure gauge lank G39 Installation method lank D Straight Elbow IN;ø, OUT;ø IN;ø, OUT;ø IN;ø, OUT;ø IN;ø, OUT;ø IN, OUT;ø IN, OUT;ø station 2 stations 3 stations stations 5 stations Standard products For low pressure Nonrelief Without pressure gauge Right IN Pressure gauge (G29D--P) ow pressure gauge (for option "") G39D--P0 Pressure gauge (G39D--P) DIN rail installation Direct mount MNR500 MNR500 MNR500 MNR500 Ozone proof Dimensions Same as standard products. Refer to pages 59 and 599.

195 Precision unit: Ozone proof 70 Series Fluoro rubber and hydrogenated nitrile rubber, etc., used for rubber part materials. Port size: Rc/, 3/ How to order 70 2C EZXG P Ozone proof specifications Port size Note 2 C Option Note Note 3 Note Note 5 Note on model no. selection Note : Refer to page 53 for specifications and attachment. Note 2: If port size NPT screw is required, do not indicate nominal size C. (example) 70-2 If a pressure gauge is selected, the NPT thread pressure gauge is enclosed. Note 3: Two or more symbols can be selected each for "Regulator" and "ccessories." Note : Drainage "E" and bowl material "M" or "MG" can not be combined. Note 5: Indicate "M-G" or "MG-G" when selecting the bowl material "M" or "MG" and accessory "G". Symbol Descriptions Port size 2C Rc/ 3C Rc3/ C Option lank Manual cock E Flexible drain lank Polycarbonate bowl Z Nylon bowl M Metal bowl MG Metal bowl with gauge lank 5μm X 3μm Y 0.3μm lank Standard K Plastic knob For low pressure (0.0 to 0.25) lank Without attachment G Pressure gauge (G59D--P02) racket Drainage owl material Element Regulator ttachment Dimensions Same as standard products. Refer to page 537.

196 Regulator: Ozone proof /00-P Series Fluoro rubber or hydrogenated nitrile rubber, etc., used for rubber part materials. Port size: Rc/, Rc/ JIS symbol How to order C NP P Port size Note 2 Ozone proof specifications Symbol Port size C 2C 3C Rc/ Rc/ Rc3/ Descriptions Note on model no. selection Note : Refer to pages 552 and 553 for specifications and attachment. Note 2: If port size NPT screw is required, do not indicate nominal size C. Example) - Note 3: For the, the G9D--P (G9D--P0 for low-pressure) pressure gauge is enclosed, and for the 00 type, the G59D--P (G59D--P0 for low-pressure) is enclosed. C Option lank N Regulator K P lank ttachment G Standard Nonrelief ow pressure (0.02 to 0.3MPa) Plastic knob Panel mount Without attachment Pressure gauge racket Dimensions Same as standard products. Refer to page 555. Ozone proof 00 C Option Note Note 3

197 Reverse (check valve integrated): Ozone proof 0/2-P Series Fluoro rubber and hydrogenated nitrile rubber, etc., used for rubber part materials. Port size: Rc/, Rc/ JIS symbol How to order 0 2C NG P arge Ozone proof specifications 0 2 Port size Note 2 Symbol Port size 2C 3C C C C Rc/ Rc3/ Rc3/ Rc Rc/2 Descriptions C Option Note Note 3 Note on model no. selection Note : Refer to pages 55 and 557 for specifications and attachment. Note 2: If port size NPT screw is required, do not indicate nominal size C. Example) 0-2 Note 3: The G59D--P (G59D--P0 for low pressure) pressure gauge is enclosed. C Regulator ttachment Option lank N K P lank G Standard Nonrelief ow pressure (0.02 to 0.3MPa) Plastic knob Panel mount Without attachment Pressure gauge (G59D--P02) racket Dimensions Same as standard products. Refer to page 559.

198 Precision : Ozone proof -P Series Fluoro rubber and hydrogenated nitrile rubber, etc., used for rubber part materials. Port size: Rc/, Rc3/ JIS symbol How to order 2C K P Port size Note 2 Ozone proof specifications Note on model no. selection Note : Refer to page 5 for specifications and attachment. Note 2: If port size NPT screw is required, do not indicate nominal size C. Example) -2- Option Note 3 Symbol Port size 2C 3C Option K Regulator P lank ttachment G Descriptions Rc/ Rc3/ Plastic knob Panel mount Without attachment Pressure gauge (G59D--P02) racket Dimensions Same as standard products. Refer to page 57. Ozone proof

199 International unit (SI unit) Conversion of SI units and conventional units SI units (International units) are referred in this catalog. Conversion for SI and conventional units is shown below. SI unit conversion table (unit of a heavy line is SI unit.) Conversion example (for pressure) kgf/cm MPa MPa.072kgf/cm 2 Force N dyn kgf Viscosity Pa/s -3 - cp 3 2 Note: P=dyn/s/cm 2 =g/cm/s, Pa/s=N/s/m 2, cp=mpa/s P -2 Stress Pa or N/m MPa or N/mm kgf/mm kgf/cm Dynamic viscosity m 2 /s cst Note: St=cm 2 /s, cst=mm 2 /s St -2 Note: Pa=N/m 2, MPa=N/mm 2 Pressure Pa kpa MPa bar kgf/cm atm mmh2o or mmg mmhg to Torr Note: Pa=N/m 2 Job, energy, calorie J kw/h kgf/m kcal Note: J=W/s, J=N/m, cal=.05j (according to the Measurement aw) Power, heat flow W kgf/m/s PS kcal/h Note: W=J/s, PS: French horsepower PS=0.7355kW (according to the Measurement aw construction law) cal=.05j (according to the Measurement aw) Thermal conduction ratio W/(m k) kcal/ (h m C) Note: cal=.05j (according to the Measurement aw) Coefficient of heat transfer W/(m 2 k) kcal/(h m 2 C) Note: cal=.05j (according to the Measurement aw) Specific heat J/(kg k) kcal/(kg C) cal/(g C) Note: cal=.05j (according to the Measurement aw)

200 JIS symbol JIS symbols used in this catalog are old symbols following JIS05-: 0. Refer to JIS05-: 07 or JFPS: 0 for new symbols. Page. Element of symbol ine and port 3. Directional. Pressure Cylinder and motor Power and tank 30. ir adjustment component 9. uxiliary components and other components 30 3 JIS symbol CD data is available.

201 JIS JIS symbol list Element of symbol (a) Symbol element Name Symbol pplications Remarks ine Continuous line roken line Dashed line Double line Circle arge circle Medium circle circle Point Half circle Square Rectangle () Main line (2) Supply line to pilot valve (3) Electric signals line () Pilot operation line (2) Drain line (3) Filter () Valve switching position Envelopment line connection Energy converter () Measuring instrument (2) Rotary joint () (2) ink (3) Roller () ine connection (2) Roller shaft Pump or actuator whose turning angle is limited () Fluid control components (2) Driving motor other than electric motor Fluid adjustment components () Cushion in cylinder (2) Weight in accumulator () Cylinder (2) Valve Return line included Others: Indicate the electrical symbol to identify from the piping path Internal pilot External pilot Envelopment line indicating unit with more than one function Rotary shaft, lever, piston rod, etc. Pump, compressor, electric motor, etc. Roller: Put a point on the center. The port intersects vertically with the side. The port intersects with the corner. Filter, drain separator, lubricator, heat exchanger etc. (b) Functional element Name Symbol pplications Remarks Equilateral triangle Painted White rrow display Straight or oblique line Curve Oblique line Other Hydraulics Compressed air and other gas pressure () inear movement (2) Fluid flow path and direction in valve (3) Direction of heat flow Rotary motion Variable operation or adjustment method Electric Closed path or closed port Solenoid Temperature instruction or adjustment Driving motor Spring Needle valve Direction of fluid energy Fluid type Energy source display Including emission to atmosphere rrow indicates the rotational direction viewed from a free end of a shaft Draw oblique line with appropriate length Pump, spring, variable solenoid etc. Use the following symbols when C and DC identification is required: Closed path Closed port Refer to 7 The number of crests should be two. Other Hollow type (large) Hollow type (small) Capsule type 22 Piston Specific operations Oil tank (ventilation type) ocal display of oil tank (ventilation type) () Oil tank (closed type) (2) Pneumatics tank (3) ccumulator () uxiliary gas vessel Refer to No. 3 (a) (c) element Mnemonic symbol of valve seat of check valve Name Symbol Remarks Rod 2 way operation rrow indication is optional Rotary shaft 2 way operation rrow indication is optional Detent atch 2 way operation Vertical line on notch indicates clamp way operation *Symbol shows release method.

202 JIS Name Symbol Remarks Name No. Symbol Remarks Over center mechanism 2 way operation ever 2 way operation (including rotary motion) 2 ine and connecting port (a) ine Pedal way operation (including rotary motion) Name Symbol Remarks Connection Pedal for both foot 2 way operation (including rotary motion) Cross Not connected control plunger way operation Flexible line Hose (normally connected to movable portion) Variable stroke length limiter 22 2 way operation (b) Connecting port Name Symbol Remarks Spring way operation ir vent Performing air vent continuously Roller 2 2 way operation Performing air vent in the specified period, then closes. Pull roller 25 rrow shows operation direction. Indication may be omitted. way operation Exhaust port Performing air vent by using check mechanism, if required Pneumatics dedicated Electrical control Direct electric actuator Single acting solenoid 30 3 Solenoid, torque motor, etc. way operation The oblique line can slant downward to the right. Without connecting port With connecting port Double acting solenoid 32 2 way operation The oblique line can spread upward. Quick joint Rotary joint line 3 lines Connected Disconnected Without check valve With check valve (Self seal joint) Swivel and rotary joint way rotation 2 way rotation Single-acting variable solenoid actuator Double acting variable solenoid actuator Rotary electric actuator Indirect electric actuator Single acting solenoid Double acting solenoid way operation Proportional solenoid Force motor etc. 2 way operation Torque motor 2 way operation Electric motor * JIS categorize this as pilot operation, but the valve is typically used as a solenoid valve, so the transfer symbol (3) and (37) has been used for the electric operation classification. Pilot operation 0 3 directional (a) Operation method Name No. Symbol Remarks Manual control Pushbutton Pull-button Push/pull button 3 General symbols when the operation method is not indicated or when the number of operation directions is not specified way operation way operation 2 way operation Direct pilot operation Internal pilot External pilot 3 If pressurized areas differ, indicate numbers indicating the area ratio in the rectangle if necessary. The operation flow path is inside of device. The operation flow path is outside of device. JIS symbol

203 JIS No. of port Name No. Symbol Remarks Indirect pressure control operation Pressurized operation method Pneumatics pilot magnetic, s pilot magnetic, s pilot with manual override (b) Directional basic type 2 No. of Status of normal position position Normally closed No. Internal pilot No primary operation Primary operation by single-acting solenoid Internal pilot * Since this is generally used as solenoid valve, categorized as electric operation code. Signs are arranged as 30 s. Valve with manual override added to the above operation Symbol Remarks Normally closed No. of port 5 No. of Status of normal position position 3 3 P// connection P// connection (c) Manual Name asic type and operation method Direct acting normally closed pushbutton, spring and return Direct acting normally open pushbutton, spring and return No. of port 2 2 No. K No. of position 2 2 Combination symbol Note: Numerals indicate JIS375 (ISO5599). Operation mechanism asic type Symbol Operation mechanism 2 Symbol Remarks 2 2 Normally open Normally open Direct acting normally closed pushbutton, spring and return 3 2 C 3 2 Normally closed C Direct acting normally open pushbutton, spring and return 3 2 D 3 2 Normally open D Direct acting normally closed pull-button, spring and return P connection E Direct acting normally open pull-button, spring and return P connection F Note) Numerals indicate of JIS375 (ISO5599). 2 Direct acting normally closed pull-button, spring and return 3 2 C Direct acting normally open pull-button, spring and return 3 2 D 3 ll ports closed G 3 Direct acting normally closed push/pull button ll ports closed H 2 Direct acting normally open push/pull button //R connection I 2 Direct acting normally closed push/pull button C 5 3 //R connection J 3 2 Direct acting normally open push/pull button D 5 3 2

204 JIS Name Combination symbol Name Combination symbol asic type and operation method No. of port No. of position Operation mechanism asic type Operation mechanism Symbol asic type and operation method No. of port No. of position Operation mechanism asic type Operation mechanism Symbol Direct acting normally closed lever, spring and return 2 2 Direct acting both sides operation pushbutton 2 E 2 Direct acting normally open lever, spring and return 2 2 Direct acting both sides operation pushbutton 5 2 F 2 Direct acting normally closed lever, spring and return 3 2 C Direct acting push/pull button 2 3 E 2 Direct acting normally open lever, spring and return 3 2 D Direct acting push/pull button F 2 Direct acting lever with detent Direct acting closed center lever with detent 3 G 3 2 Direct acting lever with detent 3 2 C 3 (3) Detent (c) () atch (c) Generally, key selector valve Direct acting closed center lever with detent 5 3 H 3 2 Direct acting lever with latch 2 2 Direct acting pedal spring and return (foot valve) 2 E 2 Direct acting lever with latch 3 2 C Direct acting pedal spring and return (foot valve) 5 2 F 2 Direct acting normally closed pedal, spring and return (foot valve) 2 2 Direct acting double pedal (foot valve) 2 E 2 3 Direct acting normally open pedal, spring and return 2 2 Direct acting double pedal (foot valve) 5 2 F Direct acting normally closed pedal 3 2 C Direct acting double pedal all ports closed with detent 3 G Direct acting normally open pedal 3 2 D Direct acting double pedal all ports closed with detent 5 3 H Direct acting double pedal (foot valve for both foot) 2 2 Note: Numerals indicate JIS375 (ISO5599). (d) Direct acting double pedal (foot valve for both foot) Direct acting pushbutton spring and return 3 2 C 2 E 2 Name asic type and operation method Direct acting normally closed plunger spring and return No. of port No. of position Combination symbol Operation mechanism asic type Operation mechanism 2 2 Symbol JIS symbol Direct acting pushbutton spring and return 5 2 F 2 Direct acting normally open plunger spring and return

205 JIS Name Combination symbol Name Combination symbol asic type and operation method No. of port No. of position Operation mechanism asic type Operation mechanism Symbol asic type and operation method No. of port No. of position Operation mechanism asic type Operation mechanism Symbol Direct acting normally closed plunger 3 2 C Direct acting both sides pilot 2 2 Direct acting normally open plunger 3 2 D Direct acting both sides pilot 3 2 C Direct acting normally closed roller spring and return Direct acting pilot spring and return 2 E 2 Direct acting normally open roller spring and return Direct acting pilot spring and return 5 2 F 3 2 Direct acting normally closed roller spring and return C Direct acting both sides pilot 2 E Direct acting normally open roller spring and return D Direct acting both sides pilot 5 2 F 3 2 Direct acting normally closed single roller spring and return Direct acting all ports closed both sides pilot spring and center 3 G Direct acting normally open single roller spring and return Direct acting all ports closed both sides pilot spring and center 5 3 H Direct acting normally closed single roller spring and return C Direct acting //R connection both sides pilot spring and center 2 3 Direct acting normally open single roller spring and return (e) Pilot operated valve Name asic type and operation method Direct acting pilot normally closed spring and return Direct acting pilot normally open spring and return D No. of port No. of position Combination symbol Operation mechanism asic type Operation mechanism Symbol Direct acting both sides pilot //R connection spring and center Direct acting P// connection both sides pilot spring and center Direct acting P// connection both sides pilot spring and center * The basic valve's center position operation symbol can be written with a leader line to the basic valve center position in the drawing. Example 2 Direct acting pilot normally closed spring and return 3 2 C 3 Direct acting pilot normally open pilot 3 2 D Indirect acting normally closed pilot spring and return Note: Numerals indicate JIS375 (ISO5599). 2

206 (f) Check, shuttle and exhaust valve (g) Solenoid valve JIS Name without spring Combination symbol Symbol Operation asic Operation (Details and simple symbol) mechanism type mechanism 3 3 Simple symbol No. a Name asic type and operation method Direct acting normally closed single acting solenoid spring and return No. of port No. of position Combination symbol Operation mechanism asic type Operation mechanism Symbol with spring 3 3 Simple symbol a Direct acting normally open single acting solenoid spring and return Direct acting normally closed single acting solenoid C Pilot operation check valve 3 3 Direct acting normally open single acting solenoid D Valve is closed by external pilot Simple symbol b Direct acting both sides solenoid Direct acting both sides solenoid C 3 High pressure priority type shuttle valve 3 C 3 Simple symbol c Direct acting double acting solenoid * Use this when the relationship to the electric signal need not be indicated. Direct acting single acting solenoid C 2 3 E * * Position and functions of valving element is specified. 2 ow pressure priority type shuttle valve Quick exhaust valve The low pressure inlet is connected to the lowpressure priority output, and the high-pressure inlet is closed. Simple symbol Simple symbol d e Direct acting single acting solenoid Indirect acting single acting solenoid spring and return * Pressure and return Indirect acting single acting solenoid spring and return * Pressure and return Direct acting both sides solenoid F 2 3 E F 2 3 E * For the pressure and return operation symbol, indicate the function element triangle at the edge JIS symbol Note: Numerals indicate JIS375 (ISO5599). 27

207 JIS Name Combination symbol Name Combination symbol asic type and operation method No. of port No. of position Operation mechanism asic type Operation mechanism Symbol asic type and operation method No. of port No. of position Operation mechanism asic type Operation mechanism Symbol Direct acting double acting solenoid Direct acting both sides solenoid 2 32 E F * s stated above, JIS stipulates that this is not required if the relationship to the electrical signal need not be indicated. If it is specified, 32 may be used as mnemonic symbol of Direct acting P both sides solenoid spring center pressure center used together Direct acting P// connection both sides solenoid with manual override * 5 3 * If the diagram is difficult to read when all symbols are indicated on both ends, separate symbols. 2 Direct acting double acting solenoid Indirect operation both sides solenoid Indirect operation double acting solenoid F 3 E 3 37 E Indirect operation all ports closed both sides solenoid spring center Indirect operation all ports closed both sides solenoid spring center G H Indirect operation both sides solenoid F Indirect operation double acting solenoid Direct acting all ports closed both sides solenoid spring center Direct acting all ports closed both sides solenoid spring center F 3 3 G H Indirect operation //R connection both sides solenoid spring center pressure center used together Indirect operation //R connection both sides solenoid spring center pressure center used together I J Direct acting //R connection both sides solenoid spring center Direct acting //R connection both sides solenoid spring center Direct acting P// connection both sides solenoid spring center I J K Indirect operation P// connection both sides solenoid spring center pilot manual with override Indirect acting P// connection both sides solenoid spring center with manual override 3 3 K Note: Numerals are indication of JIS375 (ISO5599). 2

208 JIS Name asic type and operation method (Proportional ) Direct acting electromagnetic proportional flow No. of port No. of position Combination symbol Operation mechanism asic type Operation mechanism 2 33 Symbol 5 Flow Name Metering valve Variable metering valve Stop valve Details symbol Symbol Mnemonic symbol Remarks In mnemonic symbols, operation method and valve's state are not indicated The fully closed state is not usually used. Direct acting electromagnetic proportional flow (Servo valve) Direct acting electromagnetic servo control spring center 3 33 C 3 G 3 2 control valve Metering valve With variable needle valve One direction is free flow, while the other direction is controlled flow Direct acting electromagnetic servo control spring center 5 3 H Metering valve with silencer Pressure Relief valve Name Note: Numerals are indication of JIS375 (ISO5599). Symbol Remarks Direct acting or general symbol Cylinder and motor Name Symbol Remarks Single acting cylinder Details symbol Simple symbol Extend type Single rod type Exhaust to atmosphere Pilot operated relief valve Regulator Non-relief type Single acting cylinder (with spring) () (2) Single rod type () Rod extended by spring force (2) Rod retracted by spring force Regulator with relief Double acting cylinder () () Single rod type (2) Double rod type (2) Pilot operated Regulator with Double acting telescope type cylinder Regulator with check valve Sequence valve Proportional electromagnetic pressure control valve Cylinder with adjustable stroke (Head end) Cylinder with adjustable stroke (Rod end) Cylinder with speed control valve Reference: Followed JIS3 names In JIS02, the head is on the cap side and the rod side is on the head side. Example of meter-out JIS symbol 29

209 JIS Name Symbol Remarks Name Symbol Remarks Cylinder with brake Describe the braking method if required. Driving motor (Excluding electric motor) ir tank Cylinder with end lock () * Symbol showing how to release Symbol () Head end air unit (2) (2) Rod end Note: Nominal values follow JIS399. Filter Name () Symbol Remarks () General symbols (2) (2) With magnet Cylinder with switch Specify a and b contact (3) (3) With clogging indicator Non-rotating cylinder Filter with drain discharger () () Manual discharge (2) (2) utomatic discharge Rodless cylinder Oil mist separator () () Manual discharge Cylinder with valve Example of push type during energizing Micro mist separator (2) () (2) utomatic discharge () Manual discharge ir motor direction flow direction rotation type (2) (2) utomatic discharge 2 direction flow 2 direction rotation type (3) (3) Deodorization Drainage () () Manual discharge Oscillator Pneumatics Constant angle 2 direction oscillation type Drawings of arrows to indicate relationship of the shaft rotation direction and flow direction are optional. ir dryer (2) (2) utomatic discharge 7 Power source and tank Name Symbol Remarks fter cooler () () Water cooling type (When not showing the coolant pipe path) Hydraulics (power) source General symbols Pneumatics (power) source General symbols (2) (2) Water cooling type (When showing the coolant pipe path) Electric motor (3) (3) ir cooling type 30

210 JIS Name Symbol Remarks Name Symbol Remarks ubricator ll volume type Selection type imit switch Can be indicated as follows if drawing could not be misread: ir ejector Since JIS Z 7 Pneumatics adjustment unit Mnemonic symbol The vertical arrow indicates a discharger. Pneumatics counter Details symbol Details symbol Filter with manual discharge valve Nonrelief type n example of direct type lubricator is indicated. Pressure indicator Simple indicator without measurement Oil mist separator for exhaust air Pressure gauge Noise reduction device Differential pressure gauge Oil injector Thermometer 9. uxiliary components and other components Galvanoscope Name Symbol Remarks Pneumatic - hydraulic transducer () () Single acting Flow meter (2) (2) Continuous type ooster () When pressure ratio :2 For two fluid types () Single acting Integrated flow meter (2) (2) Continuous type Tachometer ooster valve Pressure ratio : 2 Torque gauge Delay valve larm (example) Indicate with a compound symbol based on the mechanism (Refer to JIS05-: 0 and JPS0.) Note: mark is an original JPS0 symbol. Use is limited to those indicated. JIS symbol Pressure switch Can be indicated as follows if drawing could not be misread: 3

cquisition of ISO900 and ISO00 Certification Providing a safe quality, friendly to users, machines and environment CKD has acquired International Standard ISO900 and ISO00 certification and

211 cquisition of ISO900 and ISO00 Certification Providing a safe quality, friendly to users, machines and environment CKD has acquired International Standard ISO900 and ISO00 certification and structured a quality and environment management. With safety, environment, an energy conservation as our most important priorities, we are working company-wide to promote safe product and quality creation friendly to users, machines, society, and the global environment. User-friendly Environment-friendly Earth-friendly Environment Quality 32

cquisition of ISO900 and ISO00 Certification International Standard ISO 900 Certification International Standard for quality management s CKD acquired certification for our division and control

212 cquisition of ISO900 and ISO00 Certification International Standard ISO 900 Certification International Standard for quality management s CKD acquired certification for our division and control division in 9. Currently, our automated machine division headquarters and production headquarters have acquired ISO900:00. pproach to quality To respond to diverse product needs, CKD develops products individualized for each industry and which are easy to use. We are conducting quality management activities to increase customer satisfaction. International Standard ISO00 Certification International Standard for environment management s. CKD's production division acquired certification in 00, and all CKD divisions, including the Sales Division, acquired certification in 03. pproach to environment and energy conservation CKD is aware that preserving the global environment is a global priority. We conduct environment management activities based on CKD Environment Policy. 33

213 The latest catalog introduction Realize visible flow adjustment and control. Needle valve with adjusting dial DV Series inear flow characteristics Visible control of flow rates Use as a speed Oil-prohibited specifications available Unrestricted installation Catalog No. CC-0 3

214 MEMO 35

215 MEMO 3

216 MEMO 37

217 MEMO 3

218 MEMO 39

219 Selection guide (index in alphabetic order) Model Catalog Page 52 (S) 5 port valve PV 0000 H cross roller parallel hand CY II 0000 isted catalog CY I CY II PV UX GPV : Pneumatic Cylinders I : Pneumatic Cylinders II : Pneumatic Valves : Pneumatic, and uxiliary Components : General Purpose Valves Page Page of specifications/ model no. * Refer to an index of catalog for general purpose valves. Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold ( I ) : Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Model Catalog Page -*-* Y submicron air (for tar removing) UX 5 -*-E ir UX *-*Y Submicron air (for tar removing) UX 5 37-*-E ir UX *-*Y Submicron air (for tar removing) UX 5 3-*-E ir UX 53 -*-*-(J)Y Submicron air (for tar removing) UX 5 -*-E ir UX 53 Micro alescer / micro naught type (oil removing) UX 5 2(J) Micro alescer / micro naught type (oil removing) UX 5 2(J)-*-X Micro alescer / odor naught type (odor removing) UX *-(J)X Micro alescer / odor naught type (odor removing) UX *-*(J) Micro alescer / micro naught type (oil removing) UX 5 3 Micro alescer / micro naught type (oil removing) UX 5 3-*-X Micro alescer / odor naught type (odor removing) UX 59 Micro alescer / micro naught type (oil removing) UX 5 32 Heavy duty air UX *-*Y Submicron air 2 (for tar removing) UX 5 0 Regulator UX 552 Precision UX 5 22 Regulator UX Regulator UX Regulator UX to 0-*C Dial air UX to 0-*C-R Remote control dial air UX 53 0 to 2 Reverse (check valve integrated) UX 55 2-P Reverse (check valve integrated) / copper and PTTF free UX 57 2F Proportional valve / proportional solenoid method UX 00 2QV Quick exhaust valve with push-in joint UX 2QV 2 port quick valve exhaust valve PV E to 3005E ubricator / econo-mist type UX ,3003E-*C-V ubricator / auto-fill type UX 572 3F Proportional valve / proportional solenoid method UX 00 3P Proportional valve / proportional solenoid method UX 00 3G/2/3 (S) 3 port pilot operated valve / body porting PV 3G/2/3 (S) 3 port pilot operated valve (master valve) / body porting PV 50 3G/2 (S) 3 port pilot operated valve two integrated type / sub-base porting PV 3K (S) 3 port pilot operated valve / body porting PV 93 3K (S) 3 port pilot operated valve (master valve) / body porting PV 22 3M0 (S) 3 port direct acting valve / body porting PV 0 3M0 (S) 3 port direct acting valve / sub- porting PV 0 0

220 Variation System Index Selection guide 2 3 Selection guide Products variation Selection guide Selection guide C D E F G H I J K M N O P Q R S T U V W Y Z 3P/2 (S) 3 port direct acting valve / body porting PV 22 3P/2 (S) 3 port direct acting valve / sub- porting PV 22 3QV Quick exhaust valve with push-in joint UX 3QV 3 port quick exhaust valve PV 3 3S (S) 3 port pilot operated valve / body porting PV 00, 002 type air dryer / manual air dryer UX 0 urethane tube UX F0//2/3 (S) 5 port pilot operated valve / body porting PV F0//2/3 (S) 5 port pilot operated valve (master valve) / body porting PV F3**0E (S) Explosion proof 5 port pilot operated valve / body porting PV 3 F/5//7 (S) 5 port pilot operated valve / sub- porting PV 5 F/5//7 (S) 5 port pilot operated valve (master valve) / sub- porting PV F/5//7**0E (S) Explosion proof 5 port pilot operated valve / sub- porting PV 3 G/2/3 (S) 5 port pilot operated valve / body porting PV G/2/3 (S) 5 port pilot operated valve (master valve) / body porting PV 50 G (S) 5 port pilot operated valve / body porting PV 2 G/2/3 (S) 5 port pilot operated valve / sub-base porting PV G/2/3 (S) 5 port pilot operated valve (master valve) / sub-base porting PV 5 G (S) 5 port pilot operated valve / sub-base porting PV 300 K/2/3/ (S) 5 port pilot operated valve body porting PV 93 K/2/3/ (S) 5 port pilot operated valve (master valve) / body porting PV 22 K/2/3/ (S) 5 port pilot operated valve / sub- porting PV 95 K/2/3/ (S), 5 port pilot operated valve (master valve) / sub- porting PV 2 2- (S) 5 port valve PV 0 S0 (S) 5 port pilot operated valve / body porting PV 2 S (S) 5 port pilot operated valve / body porting PV S0 (S) 5 port pilot operated valve / sub- porting PV 2 S (S) 5 port pilot operated valve / sub- porting PV 9 T3/ (S) 5 port pilot operated valve PV C Tank drain UX 50-C Heavy duty drain UX 02 Relief valve UX 5 9 Moisture indicator UX Filter / UX Precision unit UX 53 Marine cable gland GPV - 0 to 00-W Piping adapter / standard white series UX 2 to 0-W type piping adapter / standard white series UX 29 ir UX 53 -P ir / copper and PTFE free UX Heavy duty air UX *Y Submicron air (for tar removing) UX 5 00 Regulator UX port direct acting solenoid valve (for frequent actuation) GPV port pilot operated solenoid valve (for frequent actuation) GPV - 30 ubricator econo-mist type UX 5 30-P ubricator econo-mist type / copper and PTFE free UX unit UX port direct acting solenoid valve GPV - 3 Discrete 2 port direct acting solenoid valve GPV - Index

221 Selection guide " (index in alphabetic order) Model Catalog Page 3-Z 2 port direct acting solenoid valve for dry air GPV - Discrete 2 port direct acting solenoid valve GPV - E2 E E-Z Explosion proof 2 port direct acting solenoid valve / d2g2 GPV - Explosion proof 2 port direct acting solenoid valve / d2g GPV - Explosion proof 2 port direct acting solenoid valve for dry air / d2g GPV - -Z 2 port direct acting solenoid valve for dry air GPV - 2 Discrete 2 port direct acting solenoid valve GPV - 2E 7 Explosion proof 2 port direct acting solenoid valve / d2g GPV - 2 port direct acting solenoid valve / large bore size GPV - P ir UX D DE D DE D DE D22 D22E DK DKE 2 port pilot operated solenoid valve / diaphragm structure GPV - Explosion proof 2 port pilot operated solenoid valve / diaphragm structure / d2g GPV - 2 port pilot operated solenoid valve / diaphragm structure GPV - Explosion proof 2 port pilot operated solenoid valve / diaphragm structure / d2g GPV - 2 port pilot operated solenoid valve / diaphragm structure GPV - Explosion proof 2 port pilot operated solenoid valve / diaphragm structure / d2g GPV - 2 port pilot operated solenoid valve / diaphragm structure GPV - Explosion proof 2 port pilot operated solenoid valve / diaphragm structure / d2g GPV - Pilot kick type 2 port solenoid valve / diaphragm structure GPV - Explosion proof 2 port pilot kick type solenoid valve / diaphragm structure / d2g GPV - DK-Z 2 port pilot kick type solenoid valve for dry air GPV - DK Pilot kick type 2 port solenoid valve / diaphragm structure GPV - DKE Explosion proof 2 port pilot kick type solenoid valve / diaphragm structure / d2g GPV - DK Pilot kick type 2 port solenoid valve / diaphragm structure GPV - F0M to F2M Medium main line / high performance oil removing UX F0P to F2P Medium main line / pre- UX F0X to F2X Medium main line / deodorization UX F30M to 325M arge main line (popular type) / high performance oil removing UX 2 F30P to 325P arge main line (popular type) / pre- UX F30S to 325S arge main line (popular type) / oil removing UX 0 F30X to 325X arge main line (popular type) / activated charcoal UX F00M to F0M Medium main line (oil free) / high performance oil removing UX F00P to F0P Medium main line (oil free) / pre- UX F00S to F0S Medium main line (oil free) / solid removing UX F00X to F0X Medium main line (oil free) / deodorization UX F50M to 525M arge main line (oil free) / high performance oil removing UX 2 F50P to 525P arge main line (oil free) / pre- UX F50S to 525S arge main line (oil free) / oil removing UX F50X to 525X arge main line (oil free) / activated charcoal UX G3*-Z 3 port direct acting solenoid valve for dry air GPV - G3 Discrete 3 port direct acting solenoid valve GPV - G33 Discrete 3 port direct acting solenoid valve GPV - G3 Discrete 3 port direct acting solenoid valve GPV - G*E-Z Explosion proof 3 port direct acting solenoid valve for dry air / d2g GPV - G*-Z 3 port direct acting solenoid valve for dry air GPV - G Discrete 3 port direct acting solenoid valve GPV - GE Explosion proof 3 port direct acting solenoid valve / d2g GPV - G3 Discrete 3 port direct acting solenoid valve GPV - G3E Explosion proof 3 port direct acting solenoid valve / d2g GPV - 2

222 Products variation Selection guide! " Variation System Index Selection guide Selection guide! Selection guide " C D E F G H I J K M N O P Q R S T U V W Y Z G Discrete 3 port direct acting solenoid valve GPV - GE Explosion proof 3 port direct acting solenoid valve / d2g GPV - GD0*V ir operated valve for process gas GPV - GD/2*V ir operated valve for process gas GPV - H ir hydraulic CY I, II 9 ir light / logic valve UX 27 MF0 ( I ) 5 port pilot operated valve / body porting PV 72 MD ir operated valve for chemical liquid (2 port) GPV - MD**2 ir operated valve for chemical liquid (2 port) GPV - MDS ir operated valve for chemical liquid, drip prevention integrated type GPV - MG ir operated valve for chemical liquid (3 port) GPV - MS Drip prevention valve for chemical liquid GPV - P 2 port pilot operated solenoid valve / piston structure GPV - PE2 Explosion proof 2 port pilot operated solenoid valve / piston structure / d2g2 GPV - PE Explosion proof 2 port pilot operated solenoid valve / piston structure / d2g GPV - P 2 port pilot operated solenoid valve / piston structure GPV - PE2 Explosion proof 2 port pilot operated solenoid valve / piston structure / d2g2 GPV - PE Explosion proof 2 port pilot operated solenoid valve / piston structure / d2g GPV - P 2 port pilot operated solenoid valve / piston structure GPV - PE2 Explosion proof 2 port pilot operated solenoid valve / piston structure / d2g2 GPV - PE Explosion proof 2 port pilot operated solenoid valve / piston structure / d2g GPV - P22 2 port pilot operated solenoid valve / piston structure GPV - P22E2 Explosion proof 2 port pilot operated solenoid valve / piston structure / d2g2 GPV - P22E Explosion proof 2 port pilot operated solenoid valve / piston structure / d2g GPV - P Pel / switching element UX 2 isted catalog CY I : Pneumatic Cylinders I CY II : Pneumatic Cylinders II PV : Pneumatic Valves UX GPV : Pneumatic, and uxiliary Components : General Purpose Valves * Refer to an index of catalog for general purpose valves. P3 Pel / Switching element, manifold UX 2 P Pel / detection nozzle UX 29 P Piping instrument / air sensor UX 3 PC Controller UX 0 PE pressure switch UX 2 PK Pilot kick type 2 port solenoid valve / piston structure GPV - PK Pilot kick type 2 port solenoid valve / piston structure GPV - PS reed type small pressure switch UX PV utomatic air pinch valve GPV - T ir tank UX V**2 ir operated valve for high vacuum GPV - V**3 ir operated valve for high vacuum (stainless steel body) GPV - V*V ir operated valve for high vacuum (aluminum body) GPV - VP**2 ir operated valve for high vacuum GPV - Z Tube knife UX 0 ooster CY I, II 9 *P5* ( I ) 2, 3, 5, port pilot operated valve / metal base PV to -W racket / for / standard white series UX 25 Regulator UX 552 -P Reverse / copper and PTFE free UX utomatic drain with manual cock UX 22 5* (S) 2 port pilot operated valve / sub-base type PV 50 53* (S) 3 port pilot operated valve / sub-base type PV (S) 5 port pilot operated valve / sub-base type PV 50 0 Relief valve UX 5 70 unit UX 530 Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold (I): Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Index 3

223 Selection guide (index in alphabetic order) Model Catalog Page 70-P unit / copper and PTFE free UX 57 H cross roller parallel hand CY II 22 H-N Hand with length measuring sensor / cross roller parallel hand with sensor CY II 5 HE Centering hand CY II 02 HE-N Hand with length measuring sensor / centering hand with sensor CY II 5 HG cross roller parallel hand with rubber cover CY II 2 HG-N Hand with length measuring sensor / Rubber covered cross roller parallel hand with sensor CY II 5 S2 Miniature cross roller parallel hand CY II 27 C C00 to 000-P combination / copper and PTFE free series UX 500 C00 to 000-W combination / standard white series UX 2 C to 0-W W.. combination / standard white series UX 29 C to 0-W combination / standard white series UX 300 C30 to 030-W F.M.R. combination / standard white series UX 30 C0 to 00-W W.M. combination / standard white series UX 3 C50 to 050-W R.M. combination / standard white series UX 3 C0 to 00-W F.M. combination / standard white series UX 32 C25N- Governor for medium pressure gas GPV - C3070 to 070-W F.F.M. combination / standard white series UX 330 CC Clamp cylinder / double acting single rod type CY I 22 CC-G Clamp cylinder / double acting spatter adherence prevention type CY I 225 CT Cartridge cylinder / single acting, extend type CY I 95 CV2 Cylinder with valve / with valve double acting lubrication type CY I 9 CV2-N Cylinder with valve / with valve double acting oil-free type CY I 9 CG Fiber tube push-in joint (clean type) UX 990 CH 2 port air operated ball valve (compact rotary valve) / double acting GPV - CHF 2 port air operated ball valve (compact rotary valve) / double acting, full bore GPV - CHF-R* 2 port air operated ball valve (compact rotary valve) / single acting, full bore GPV - CHF-V* 2 port air operated ball valve (compact rotary valve) / double acting, full bore with solenoid valve GPV - CHF-X* 2 port air operated ball valve (compact rotary valve) / single acting, full bore with solenoid valve GPV - CH-R* 2 port air operated ball valve (compact rotary valve) / single acting GPV - CH-V* 2 port air operated ball valve (compact rotary valve) / double acting with solenoid valve GPV - CH-X* 2 port air operated ball valve (compact rotary valve) / single acting with solenoid valve GPV - CHG 3 port air operated ball valve (compact rotary valve) / double acting GPV - CHG-R* 3 port air operated ball valve (compact rotary valve) / single acting GPV - CHG-V* 3 port air operated ball valve (compact rotary valve) / double acting with solenoid valve GPV - CHG-X* 3 port air operated ball valve (compact rotary valve) / single acting with solenoid valve GPV - CH with push-in joint UX 90 CHV2 UX 90 CK 3-way jaw long stroke chuck CY II 2 CK 3-way jaw thin chuck CY II 32 CKF Hollow chuck CY II 50 CKG 3-way jaw bearing chuck CY II CKH2 High gripping force powerful chuck CY II 0 CKJ Ultra long stroke chuck CY II 5 CK2 Powerful chuck CY II CK2-*-HC Position locking powerful chuck CY II 7 CK2 2-way powerful chuck CY II CKS Thin chuck CY II 0 CKV2 cylinder with valve / double acting single rod type CY I CKV2-M cylinder with valve / double acting non-rotating type CY I 7 CM2 Medium bore size cylinder / double acting single rod type CY I CM2-E Medium bore size cylinder / double acting direct type CY I

224 Variation System Index Selection guide 2 3 Selection guide Products variation Selection guide Selection guide C D E F G H I J K M N O P Q R S T U V W Y Z CMF CMF CMF2 CMF2 CMFZ CMFZ ( I ) 5 port pilot operated valve ISO conformed valve / DIN terminal box type / ISO size () PV ( I ) 5 port pilot operated valve ISO conformed valve / I/O connector type / ISO size () PV ( I ) 5 port pilot operated valve ISO conformed valve / DIN terminal box type / ISO size (2) PV 5 ( I ) 5 port pilot operated valve ISO conformed valve / I/O connector type / ISO size (2) PV (X) 5 port pilot operated valve ISO conformed valve / DIN terminal box type / ISO size ()/(2) PV 0 (X) 5 port pilot operated valve ISO conformed valve / I/O connector type / ISO size ()/(2) PV 92 CMK2 Medium bore size cylinder / double acting single rod type CY I 90 CMK2-*C Medium bore size cylinder / double acting rubber-air cushioned CY I 30 CMK2- Medium bore size cylinder / double acting back to back type CY I 0 CMK2-C Medium bore size cylinder / double acting air cushioned CY I 3 CMK2-D Medium bore size cylinder / double acting double rod type CY I CMK2-F Medium bore size cylinder / double acting fine speed type CY I 0 CMK2-G2/G3 Medium bore size cylinder / double acting coolant proof type CY I CMK2-H Medium bore size cylinder / double acting low hydraulic type CY I CMK2-M Medium bore size cylinder / double acting non-rotating type CY I CMK2-P Medium bore size cylinder / double acting stroke adjustable extend type CY I CMK2-Q Medium bore size cylinder / double acting position locking type CY I CMK2-R Medium bore size cylinder / double acting stroke adjustable pull type CY I 0 CMK2-S Medium bore size cylinder / single acting, extend type CY I 2 CMK2-SR Medium bore size cylinder / single acting, pull type CY I CMK2-T Medium bore size cylinder / double acting heat resistance type CY I CMK2-Z Medium bore size cylinder / double acting integrated flow type CY I 2 COV*2 Cylinder with valve / with valve double acting lubrication type CY I 9 COV*2-N Cylinder with valve / with valve double acting oil-free type CY I 9 CPD nic pressure switch UX 5 CPD nic pressure switch (with digital display) GPV - CPE pressure switch UX 52 CPE Pressure switch for mechanical coolant (for low pressure) GPV - isted catalog CY I : Pneumatic Cylinders I CY II : Pneumatic Cylinders II PV : Pneumatic Valves UX GPV : Pneumatic, and uxiliary Components : General Purpose Valves * Refer to an index of catalog for general purpose valves. CV3E ir operated 3 port valve for low pressure (coolant valve) GPV - CVE2-05/ 2 port air operated valve for low pressure (coolant valve) GPV - CVE2-/30 2 port air operated valve for medium pressure (coolant valve) GPV - CVE22-05/ 2 port air operated valve for low pressure (coolant valve) GPV - CVE22-/30 2 port air operated valve for medium pressure (coolant valve) GPV - CVE port air operated valve for high pressure (coolant valve) GPV - CVE port air operated valve for high pressure (coolant valve) GPV - CVE3-35/70 3 port air operated valve for medium and high pressure (coolant valve) GPV - CVS2-X507 2 port air operated valve with solenoid valve (coolant control) high pressure coolant valve GPV - CVS2-X50 2 port air operated valve with solenoid valve (coolant control) high pressure coolant valve GPV - CVS2-25X509 2 port air operated valve with solenoid valve (coolant control) high pressure coolant valve GPV - CVS3E ir operated 3 port valve for low pressure (coolant valve) / with solenoid valve GPV - CVSE2-05/ 2 port air operated valve for low pressure (coolant valve) / with solenoid valve GPV - CVSE2-/30 2 port air operated valve for medium pressure (coolant valve) / with solenoid valve GPV - CVSE22-05/ 2 port air operated valve for low pressure (coolant valve) / with solenoid valve GPV - CVSE22-/30 2 port air operated valve for medium pressure (coolant valve) / with solenoid valve GPV - CVSE port air operated valve for high pressure (coolant valve) / with solenoid valve GPV - CVSE port air operated valve for high pressure (coolant valve) / with solenoid valve GPV - CVSE3-35/70 3 port air operated valve for medium and high pressure (coolant valve) D / with solenoid valve GPV - D to 0-W Distributor / / standard white series UX 2 D00 utomatic drain UX D3000 utomatic drain UX DS0 Drain sensor UX 9 Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold (I): Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Index 5

225 Selection guide (index in alphabetic order) Model Catalog Page D DG Pressure switch for gas combustion GPV - D Pressure switch for gas combustion GPV - DP00 nic differential pressure switch UX 5 DPS Switch UX 0 DSG Solenoid valve for gas combustion GPV - DSG-W Solenoid valve for gas combustion GPV - DT3000, 30 utomatic drain UX 22 DT000, 0 utomatic drain UX 22 E E0, ET0 Cylinder switch / heat resistance, 2 reed wire CY I, II 27 EH Fiber tube clean type (push-in joint) UX 9 EM Metal free 2 port solenoid valve for chemical liquid GPV - EM Metal free 2 port solenoid valve for chemical liquid GPV - EM5 Metal free 2 port solenoid valve for chemical liquid GPV - EV00, / solenoid valve type small flow UX 75 EVV, 29V - / solenoid valve type vacuum UX 77 EV2500, / solenoid valve type medium flow UX 70 EVD Digital electro- UX 73 EVS0, 500 electro- / solenoid valve type UX 7 F F* Soft nylon tube UX F0V/H Cylinder switch / color indicator, 2 reed wire CY I, II 2 F00 to 000-P ir / copper and PTFE free series UX 503 F00 to 000-W ir / standard white series UX 350 F2, 3V/H Cylinder switch / color indicator, 2/3 proximity wire CY I, II 2 F2, 3Y V/H Cylinder switch / 2 color indicator, 2/3 proximity wire CY I, II 2 F3000 to 000-G ir / flame resistant series UX F* Miniature joint / adjustable socket UX 922 F33 to 3 Exhaust cleaner UX 2 F 2 port direct acting discrete solenoid valve for compressed air GPV - FC exhaust UX 92 FD 2 port pilot operated solenoid valve for compressed air GPV - FG 3 port direct acting discrete solenoid valve for compressed air GPV - FP 2 port direct acting solenoid valve for compressed air GPV - FS Miniature joint / bush UX 922 FU2 UX FC* Miniature joint / clamp joint UX 922 FCD Flat compact cylinder / double acting single rod type CY I FCD-D Flat compact cylinder / double acting double rod type CY I FCD-K Flat compact cylinder / double acting cushioned CY I FCH Flat compact cylinder / single acting, retract type CY I FCK Shock absorber adjustable type CY II 527 FCM size UX 37 FCS Flat compact cylinder / single acting, extend type CY I FCS00 Inline clean UX FCS500 Inline clean UX 2 FD (S) 3, 5 port direct acting valve PV 37 FG 2 port direct acting discrete solenoid valve for dry air GPV - FG3 Noise reduced special purpose valve (2 port direct acting solenoid valve for compressed air / dry air) GPV - FG Noise reduced special purpose valve (2 port direct acting solenoid valve for compressed air / dry air) GPV - FGG 3 port direct acting discrete solenoid valve for dry air GPV - FG/ eak valve GPV - FGS Miniature joint / gasket UX 922 FH0 Feather hand (mini-parallel hand) CY II 2 FH500 Feather hand (mini-fulcrum hand) CY II 37 FH Discrete 2 port direct acting solenoid valve for hot water GPV - FJ Floating joint CY II 552 FK Simplified floating joint CY II 50 F Discrete 2 port direct acting solenoid valve for oil GPV - FS Miniature joint / extension UX 922 FM* Miniature joint / manifold UX 922 FM3000 to 000 ir / medium pressure series UX FMS Metering valve with silencer UX 7 FNS Miniature joint / double screw nipple UX 922 FP Miniature joint / plug UX 922 FPV lock valve UX 90 FR 2 port air operated ball valve (fan rotary valve) GPV - FR2 2 port air operated ball valve (fan rotary valve) GPV - FR2-F 2 port air operated ball valve (fan rotary valve) / stainless steel body GPV - FR2V 2 port air operated ball valve (fan rotary valve) / with solenoid valve GPV - FR2V-F 2 port air operated ball valve (fan rotary valve) / stainless steel body with solenoid valve GPV - FR-F 2 port air operated ball valve (fan rotary valve) / stainless steel body GPV - FRV 2 port air operated ball valve (fan rotary valve) / with solenoid valve GPV - FRV-F 2 port air operated ball valve (fan rotary valve) / stainless steel body with solenoid valve GPV -

226 Variation System Index Selection guide 2 3 Selection guide Products variation Selection guide Selection guide C D E F G H I J K M N O P Q R S T U V W Y Z FRG 3 port air operated ball valve (fan rotary valve) GPV - FRG2 3 port air operated ball valve (fan rotary valve) GPV - FRG2V FRGV 3 port air operated ball valve (fan rotary valve) with solenoid valve GPV - 3 port air operated ball valve (fan rotary valve) with solenoid valve GPV - FS (S) 3, 5 port direct acting valve PV 37 FS* Miniature joint / socket UX 922 FS0 Inline UX FS0 Inline UX FS500 Inline UX FSM2 size / indicator type UX 7 FSM-H Extremely small flow type small size / indicator type UX 330 FSM-V size / Miniature analog output type / switch output type UX 30 FSM-VFM size / inline UX 32 FT* Miniature joint / barbed joint UX 922 FV Discrete 2 port direct acting solenoid valve for medium vacuum (special purpose valve) GPV - FW Discrete 2 port direct acting solenoid valve GPV - FW3 Noise reduced special purpose valve GPV - FW Noise reduced special purpose valve GPV - FWG Discrete 3 port direct acting solenoid valve GPV - FWS Miniature joint / bulk head UX 922 G G29D Miniature pressure gauge UX 9 G39D Round pressure gauge UX 70 G0 Pressure gauge assembly UX 0 G0D, 50D Pressure gauge with safety mark UX GD Pressure gauge with limit mark UX 3 G5D Pressure gauge with limit mark UX 2 G9D, 59D General purpose pressure gauge UX G9D, 59D-P Pressure gauge / copper and PTFE free series UX 50 G52D Pressure gauge with switch UX 7 G53D Pressure gauge for panel mount UX 5 G00 Differential pressure gauge UX 73 G3 2 port direct acting solenoid valve, manifold and actuator GPV - isted catalog CY I : Pneumatic Cylinders I CY II : Pneumatic Cylinders II PV : Pneumatic Valves UX GPV : Pneumatic, and uxiliary Components : General Purpose Valves * Refer to an index of catalog for general purpose valves. G3-Z 2 port direct acting solenoid valve for dry air, manifold and actuator GPV - G352 2 port direct acting solenoid valve, manifold and actuator GPV - G352-Z 2 port direct acting solenoid valve for dry air, manifold and actuator GPV - G 2 port direct acting solenoid valve, manifold and actuator GPV - G-Z 2 port direct acting solenoid valve for dry air, manifold and actuator GPV - G22 2 port direct acting solenoid valve, manifold and actuator GPV - G52 2 port direct acting solenoid valve, manifold and actuator GPV - G52-Z 2 port direct acting solenoid valve for dry air, manifold and actuator GPV - GG3* 3 port direct acting solenoid valve, manifold and actuator GPV - GG3*-Z 3 port direct acting solenoid valve for dry air, manifold and actuator GPV - GG33* 3 port direct acting solenoid valve, manifold and actuator GPV - GG33*-Z 3 port direct acting solenoid valve for dry air, manifold and actuator GPV - GG3* 3 port direct acting solenoid valve actuator GPV - GG3*-Z 3 port direct acting solenoid valve actuator for dry air GPV - GG35* 3 port direct acting solenoid valve, manifold and actuator GPV - GG35*-Z 3 port direct acting solenoid valve for dry air, manifold and actuator GPV - GG* 3 port direct acting solenoid valve, manifold and actuator GPV - GG*-Z 3 port direct acting solenoid valve for dry air, manifold and actuator GPV - GG3* 3 port direct acting solenoid valve, manifold and actuator GPV - GG3*-Z 3 port direct acting solenoid valve for dry air, manifold and actuator GPV - Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold (I): Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Index 7

227 Selection guide " (index in alphabetic order) Model Catalog Page GGG* 3 port direct acting solenoid valve actuator GPV - GG*-Z 3 port direct acting solenoid valve actuator for dry air GPV - GG5* 3 port direct acting solenoid valve, GG5*-Z manifold and actuator GPV - 3 port direct acting solenoid valve for dry air, manifold and actuator GPV - GS all valve for automatic emergency shutdown GPV - GV ow pressure gas combination valve GPV - GDJ Governor for gas combustion GPV - GF 2 port direct acting solenoid valve for compressed air, GFG GFG GFGG manifold GPV - 3 port direct acting solenoid valve for compressed air, manifold GPV - 2 port direct acting solenoid valve for dry air, manifold GPV - 3 port direct acting solenoid valve for dry air, manifold GPV - GFK Filter for gas combustion GPV - GF 2 port solenoid direct acting valve for oil, GFV GFW GFWG manifold GPV - 2 port solenoid direct acting valve for medium vacuum, manifold GPV - 2 port solenoid direct acting valve, manifold GPV - 3 port solenoid direct acting valve, manifold GPV - GK30D Refrigerating air dryer / GK50 compact for installation / inlet air (35 C) UX 32 Refrigerating air dryer / high temp. inlet (55 C) / compact compressor directly connected UX 3 GC High rigid guideless cylinder / double acting CY I 7 GN* 2 port air operated valve, manifold GN*V (compact cylinder valve) GPV - 2 port air operated valve for low vacuum, manifold (compact cylinder valve) GPV - GPS2 Contact confirmation switch / discrete UX 2 GRC Table type rotary actuator / basic type CY II 2 GRC-F Table type rotary actuator / fine speed type CY II 0 GRC-K Table type rotary actuator / high accuracy type CY II 2 GRC-KF Table type rotary actuator / precise / fine speed type CY II 0 GS Electric ball valve for gas combustion GPV - GSV Solenoid valve for automatic watering control GPV - GT5055, 5075 Refrigerating type air dryer / air cooling type High temperature inlet air (55 C) type UX GT7055 to 7075 Refrigerating type air dryer / air cooling type Standard inlet air (0 C) type UX 72 GT7055W to 7075W Refrigerating type air dryer / water cooling type Standard inlet air (0 C) type UX 7 GT9000 Refrigerating type air dryer / air cooling type large standard inlet air (0 C) type UX 90 GT9000W Refrigerating type air dryer / water cooling type large standard inlet air (0 C) type UX 9 GT9000WV Refrigerating type air dryer / Inverter control watercooled type / large standard inlet air (0 C) type UX 9 GWC* / cap UX 930 GWCR* / cross shaped type UX 930 GWFY* / FY type UX 930 GWJ* size joint / elbow type UX 9 GWJP* size joint / plug UX 9 GWJS* size joint / axial UX 9 GWJT* size joint / tee union type UX 9 GWJY* size joint / Y type tee union type UX 9 GW* / elbow type UX 930 GWM* / joint for tightening UX 930 GWMF* / manifold UX 930 GWP*- / blanking plug UX 930 GWP*- / type plug UX 930 GWP*-O / plug UX 930 GWS* / straight UX 930 GWT* / tee union type UX 930 GWTR* / tetrapod shaped type UX 930 GWWY* / double Y type types UX 930 GWY* / Y type tee union type UX 930 GX3 to 37 Refrigerating type air dryer / for installation / inlet air (35 C) UX GX53 to 57 Refrigerating type air dryer / high temp. inlet (55 C) / compact compressor directly connected UX 52 HH0 Cylinder switch / color indicator, reed CY I, II 2 H0Y Cylinder switch / 2 color indicator, reed CY I, II 2 HP-C Parallel hand CY II 270 HP-2 to CS Parallel hand CY II 272 H High corrosion direct acting 2 port solenoid valve GPV - H Fulcrum hand CY II 32

228 Products variation Selection guide! " Variation System Index Selection guide Selection guide! Selection guide " C D E F G H I J K M N O P Q R S T U V W Y Z HC High speed cylinder / double acting single rod type CY I 7 HCM High energy absorption cylinder / double acting single rod type CY I 0 HCP ateral parallel hand CY II 33 HD-0.5 to 9 type air dryer / compact heatless dryer UX HD Wide angle hand CY II 3 HEP earing parallel hand CY II 332 HFP Wide parallel hand CY II 30 HGP ong stroke parallel hand CY II 372 HJ Toggle hand CY II 39 HK Motorized valve for gas combustion GPV - HKP Cross roller parallel hand CY II 3 H Thin parallel hand CY II 3 HG Thin parallel hand with rubber cover CY II 32 H Thin parallel hand CY II 3 HG Thin parallel hand with rubber cover CY II 32 HC Thin long stroke parallel hand CY II 3 HMD Thin type wide angle hand CY II 392 HMF wide parallel hand CY II 3 HMF M guided large wide parallel hand CY II 35 HMT 2 port solenoid valve metal free compact lever / medical equipment GPV - HMTG 3 port solenoid valve metal free compact lever / medical equipment GPV - HMV (S) Manual switching valve / miniature PV 33 HN 2 port solenoid valve direct acting GPV - HNG 3 port solenoid valve direct acting GPV - HPS Close contact confirmation switch / discrete UX HPV Manual pinch valve GPV - HR- Hybrid robot / robot element, single axis unit CY II 0 HR-2G Hybrid robot / 2-action robot CY II 7 HR-2S Hybrid robot / 2-action robot CY II HS Motorized valve for gas combustion GPV - HSV (S) Manual switching valve / standard PV 33 HV Solenoid valve for high vacuum GPV - HV2 Solenoid valve for high vacuum GPV - HV3 Solenoid valve for high vacuum GPV - HV Solenoid valve for high vacuum GPV - HV Solenoid valve for high vacuum GPV - HV5 Solenoid valve for high vacuum GPV - HV5 Solenoid valve for high vacuum GPV - HV Solenoid valve for high vacuum GPV - isted catalog CY I : Pneumatic Cylinders I CY II : Pneumatic Cylinders II PV : Pneumatic Valves UX GPV : Pneumatic, and uxiliary Components : General Purpose Valves * Refer to an index of catalog for general purpose valves. HV7 Solenoid valve for high vacuum GPV - HV Solenoid valve for high vacuum GPV - HV Delay solenoid valve for vacuum GPV - HV2 Delay solenoid valve for vacuum GPV - HYN 2, 3 port acting valve (pinch valve for high purity fluids) GPV - I IGD3 Integrated gas supply GPV - IGD Integrated gas supply GPV - J J0 to 00-W Joiner / for / standard white series UX 25 J (elbow joint) UX 99 JS3 rake unit CY I 2 JSC3(-N) rake cylinder / double acting single rod type CY I 9 JSC3-H rake cylinder / double acting low hydraulic type CY I 33 JSC3-P rake cylinder (oil-prohibition type) CY I, II JSC3-T rake cylinder / double acting heat resistance type CY I 3 JSC3-V rake cylinder (medium bore size) / with valve for brake, double acting CY I 32 JSG Tie rod cylinder with brake / double acting single rod type CY I JSG-V Tie rod cylinder with brake / with valve for double acting / brake release CY I JSK2 rake cylinder (small bore ø to 0, caulking) / double acting CY I 30 JSK2-V rake cylinder (small bore ø to 0, caulking) / with valve, double acting CY I 30 JSM2 rake cylinder (small bore ø to 0, disassembled) / double acting CY I JSM2-V rake cylinder (small bore ø to 0, disassembled) / K with valve, double acting CY I K-005 / air sensor UX 2 K0V/H Cylinder switch / color indicator, 2 reed wire CY I, II K2, 3 V/H Cylinder switch / color indicator, 2/3 proximity wire CY I, II K2, 3Y V/H Cylinder switch / 2 color indicator, 2/3 proximity wire CY I, II Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold (I): Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Index 9

229 Selection guide (index in alphabetic order) Model Catalog Page K K2, 3YF V/H Cylinder switch / preventive maintenance output and proximity 3, wire CY I, II K2, 3YM V/H Cylinder switch / preventive maintenance output and proximity 3, wire CY I, II K3P V/H Cylinder switch / PNP output type / proximity 3 wire CY I, II K5V/H Cylinder switch / without display and reed 2 wire CY I, II K0570 kit UX 52 K0570-P kit / copper and PTFE free UX 57 K00E kit UX 52 K0E kit UX 52 K Electric linear actuator CY 5 KM50 Fine level switch GPV - KM0 Fine level switch GPV - KM70 Fine level switch GPV - KS table slider CY I, II 5 KX Coiling tube UX 00 to 000-P ubricator / copper and PTFE free series UX to 000-W ubricator / standard white series UX 39 C ir bearing actuator CY I, II CE Explosion proof 3 port direct acting solenoid valve / d2g GPV - CG inear slide cylinder / double acting single rod type CY I 0 CG-P7* inear slide cylinder / double acting clean room specification CY I 3 CG-Q inear slide cylinder / double acting position locking type CY I 2 CM inear slide cylinder / double acting single rod type CY I 70 CM- inear slide cylinder / double acting side installation type CY I 9 CM-P inear slide cylinder / double acting stroke adjustable extend type CY I 0 CM-P73 inear slide cylinder / double acting clean room specification CY I CM-R inear slide cylinder / double acting stroke adjustable extend/retract type CY I CS inear slide cylinder / double acting single rod type CY I 2 CS-F inear slide cylinder / double acting fine speed type CY I CS-Q inear slide cylinder / double acting position locking type CY I 2 CT inear slide cylinder / double acting single rod type CY I CY inear slide cylinder / double acting single rod type CY I 0 CY- inear slide cylinder / double acting reduced piping type CY I 0 CY-R inear slide cylinder / double acting stroke adjustable pull type CY I 0 H inear guide hand CY II 29 HG Rubber covered linear guide hand CY II 302 O Direct acting 2 port solenoid valve for heavy oil GPV - M inear guide lock CY I 3 MF0 (R) 5 port valve saving PV 0 N Cylinder with length measuring sensor CY II 2 V Direct acting 3 port solenoid valve GPV - M M Metal free 2 port solenoid valve for chemical liquid GPV - M0V/H Cylinder switch / color indicator, reed 2 wire CY I, II M00 to 000-P Oil mist / copper and PTFE free series UX 50 M00 to 000-W Oil mist / standard white series UX 30 M2, 3V/H Cylinder switch / color indicator, proximity 2/3 wire CY I, II M2, 3WV Cylinder switch / 2 color indicator, proximity 2/3 wire CY I, II M3G/2/3 ( I ) 3 port pilot operated valve / body porting PV M3G/2/3 (M) 3 port pilot operated valve (Master valve) / body porting PV 50 M3G/2/3-T(D) (R) 3 port pilot operated valve body porting PV M3G/2/3-T(D) (R) 3 port pilot operated valve / (serial transmission) / body porting PV 0 50

230 Variation System Index Selection guide 2 3 Selection guide Products variation Selection guide Selection guide C D E F G H I J K M N O P Q R S T U V W Y Z M3G/2 (I) Two 3 port pilot operated valve integrated type / sub-base porting PV M3G/2-T*(D) (R) Two 3 port pilot operated valve integrated type / sub-base porting PV M3G/2-T(D) (R) Two 3 port pilot operated valve integrated type /(serial transmission) / sub-base porting PV 252 M3K (I) 3 port pilot operated valve body porting PV 970 M3K (M) 3 port pilot operated valve (master valve) / body porting PV 22 M3M0 (I) 3 port direct acting valve / body porting PV 0 M3M0 (I) 3 port direct acting valve / sub- porting PV 0 M3P V/H Cylinder switch / color indicator / PNP output type / proximity 3 wire CY I, II M3P/2 (I) 3 port direct acting valve / body porting PV 30 M3P/2 (I) 3 port direct acting valve / sub- porting PV 30 M3S (I) 3 port pilot operated valve / body porting PV 900 M3S (R) 3 port pilot operated valve / body porting PV 90 MF0//2/3 (I) 5 port pilot operated valve / body porting PV 72 MF0//2/3 (M) 5 port pilot operated valve (master valve) / body porting PV MF3*0E (I) 5 port pilot operated explosion proof valve / body porting PV 32 MF/5//7 (I) 5 port pilot operated valve sub- porting PV 0 MF/5//7 (M) 5 port pilot operated valve (master valve) / sub- porting PV MF/5//7*0E (I) 5 port pilot operated explosion proof valve / sub- porting PV 32 MG/2/3 (I) 5 port pilot operated valve / body porting PV MG/2/3 (M) 5 port pilot operated valve (master valve) / body porting PV 50 MG/2/3-T*(D) (R) 5 port pilot operated valve / body porting PV MG/2/3-T(D) (R) 5 port pilot operated valve / (serial transmission) / body porting PV 0 isted catalog CY I : Pneumatic Cylinders I CY II : Pneumatic Cylinders II PV : Pneumatic Valves UX GPV : Pneumatic, and uxiliary Components : General Purpose Valves * Refer to an index of catalog for general purpose valves. MG ( I ) 5 port pilot operated valve / body porting PV 3 MG-T* (R) 5 port pilot operated valve / body porting PV 3 MG-T(D) (R) 5 port pilot operated valve (serial transmission) / body porting PV 35 MG/2/3 ( I ) 5 port pilot operated valve / sub-base porting PV MG/2/3 (M) 5 port pilot operated valve (master valve) / sub-base porting PV 5 MG/2/3-T*(D) (R) 5 port pilot operated valve sub-base porting PV MG/2/3-T(D) (R) 5 port pilot operated valve / (serial transmission) / sub-base porting PV 252 MG (I) 5 port pilot operated valve / sub-base porting PV 32 MG-T* (R) 5 port pilot operated valve sub-base porting PV 32 MG-T(D) (R) 5 port pilot operated valve (serial transmission) / sub-base porting PV 37 MK/2/3/ (I) 5 port pilot operated valve body porting PV 970 MK/2/3/ (M) 5 port pilot operated valve (master valve) / body porting PV 22 MK/2/3/ (I), 5 port pilot operated valve / sub- porting PV 92 MK/2/3/ (M), 5 port pilot operated valve (master valve) / sub- porting PV 2 MS0 (I) 5 port pilot operated valve / body porting PV 70 MS (I) 5 port pilot operated valve / body porting PV 900 MS (R) 5 port pilot operated valve / body porting PV 90 MS0 (I) 5 port pilot operated valve / sub- porting PV 70 MS0 (R) 5 port pilot operated valve / sub- porting PV 7 MS (I) 5 port pilot operated valve / sub- porting PV 90 MS (R) 5 port pilot operated valve / sub- porting PV 9 MT3/ (R) 5 port pilot operated valve / (reduced wiring valve) PV 75 Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold (I): Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Index 5

231 Selection guide (index in alphabetic order) Model Catalog Page M M5* (S) 2 port pilot operated valve / direct mounting PV 50 M53* (S) 3 port pilot operated valve / direct mounting PV 50 M5V/H Cylinder switch / without display and reed 2 wire CY I, II M Metal free 2 port solenoid valve for chemical liquid GPV - MG Metal free 3 port solenoid valve for chemical liquid GPV - MV arge mechanical valve / detector UX MD3S (I) 3 port pilot operated valve / body porting PV 900 MD3S (R) 3 port pilot operated valve / body porting PV 90 MDS (I) 5 port pilot operated valve / body porting PV 900 MDS (R) 5 port pilot operated valve / body porting PV 90 MDS (I) 5 port pilot operated valve / sub- porting PV 90 MDS (R) 5 port pilot operated valve / sub- porting PV 9 MDC2 direct mounting cylinder / double acting single rod type CY I 9 MDC2-F direct mounting cylinder / double acting fine speed type CY I 92 MDC2-X direct mounting cylinder / single acting, extend type CY I 972 MDC2-Y direct mounting cylinder / single acting, pull type CY I 972 ME2 Metal free 2 port solenoid valve for chemical liquid GPV - MEG2 Metal free 3 port solenoid valve for chemical liquid GPV - MEVT Thin electro / reduced wiring manifold type UX 30 MFC Robot cylinder / double acting single rod type CY I 02 MFC- Robot cylinder / double acting with brake CY I MFC-K Robot cylinder / MFC-S Robot cylinder / MFC-SK Robot cylinder / double acting with brake, high load type CY I double acting with brake sensor CY I double acting with brake sensor, high load type CY I MFC-K Robot cylinder / double acting, high load type CY I 02 MGD/V Manual valve for process gas GPV - MGPS2 Contact confirmation switch / manifold UX 7 MH3 Electric driven 2 port miniature ball valve (motor valve) GPV - MH Electric driven 2 port miniature ball valve (motor valve) GPV - MHP Electric driven ball valve type temperature control GPV - MHR Electric driven self reset type 2 port ball valve (motor valve) GPV - MHG3 Electric driven 3 port miniature ball valve (motor valve) GPV - MHG Electric driven 3 port miniature ball valve (motor valve) GPV - MHG-X93 Electric driven 3 port ball valve for ionized water motor valve GPV - MHPS Close contact confirmation switch / manifold UX 90 MJ3 Metal free direct acting 2 port solenoid valve for chemical liquid GPV - MJ* / elbow type UX 99 MJN* / sleeve UX 99 MJS* / straight type UX 99 MJT* / tees type UX 99 MJU* / insert ring UX 99 MM Medium mechanical valve / detector UX 0 MM3000 to 000 Oil mist / medium pressure series UX 90 MMD Manual chemical liquid valve (2 port) GPV - MMD**2 Manual chemical liquid valve GPV - MN Solenoid valve for gas combustion GPV - MN3E00 (R) 3, port pilot operated valve PV MN3E0 (R) 3, port pilot operated valve PV 3 MN3G/2 (I/) 3 port pilot operated valve / body porting PV 0 MN3G/2-T* (R/) 3 port pilot operated valve / body porting PV MN3GX (R/X) 3 port pilot operated valve / MN3G/2 body porting PV 5 (I/) Two 3 port pilot operated valve integrated type / sub-base porting PV MN3G/2-T* (R/) Two 3 port pilot operated valve integrated type MN3S0 /sub-base porting PV 3 (R) 3 port pilot operated valve (reduced wiring valve) PV 2 MN3S0 (R) 3 port pilot operated valve / (reduced wiring valve), two 3 port valve integrated type PV 2 MNE00 (R) 3, port pilot operated valve PV MNE0 (R) 3, port pilot operated valve PV 3 MNG/2 (I/) 5 port pilot operated valve / body porting PV 0 MNG/2-T* (R/) 5 port pilot operated valve / body porting PV MNGX (R/X) 5 port pilot operated valve / body porting PV 5 52

232 Variation System Index Selection guide 2 3 Selection guide Products variation Selection guide Selection guide C D E F G H I J K M N O P Q R S T U V W Y Z MNG/2 (I/) 5 port pilot operated valve / sub-base porting PV MNG/2-T* (R/) 5 port pilot operated valve / sub-base porting PV 3 MNGX (R/X) 5 port pilot operated valve / sub-base porting PV 5 MNK/2 () 5 port pilot operated valve / MNS0 MNT/2 sub- porting PV 02 (R) port pilot operated valve (reduced wiring valve) PV 2 (R/) port pilot operated valve (reduced wiring valve) PV 7 MNR500 lock manifold UX 59 MNRJ500 block manifold direct acting precision UX 2 MR metal free 2, 3 port solenoid valve for chemical liquid GPV - MRG2 Magnet type rodless cylinder / double acting CY I 22 MR2 Magnet type rodless cylinder / guided type CY I 2 MR2-F Magnet type rodless cylinder / guided / fine speed type CY I 2 MR2-G Magnet type rodless cylinder / simplified guide piston type CY I 2 MR2-GF Magnet type rodless cylinder / simplified guide piston, fine speed type CY I 2 MR2-W Magnet type rodless cylinder / simplified guide 2 piston type CY I 2 MR2-WF Magnet type rodless cylinder / simplified guide 2 piston, fine speed type CY I 2 MS mechanical valve / detector UX MS Electric driven 2 port ball valve (motor valve) for steam GPV - MSD Electric driven 2 port ball valve with relay for steam (motor valve) GPV - MSDF Electric driven 2 port ball valve with relay for steam (motor valve) / full bore GPV - MSF Electric driven 2 port ball valve (motor valve) / full bore GPV - MSD compact cylinder / double acting single rod type CY I isted catalog CY I : Pneumatic Cylinders I CY II : Pneumatic Cylinders II PV : Pneumatic Valves UX GPV : Pneumatic, and uxiliary Components : General Purpose Valves * Refer to an index of catalog for general purpose valves. MSD-F compact cylinder / double acting single rod fine speed type CY I 7 MSDG- compact cylinder / double acting guided type with switch CY I 7 MSDG-F compact cylinder / double acting guided fine speed type with switch CY I MSD-K compact cylinder / double acting high load type CY I MSD-KF compact cylinder / double acting high load fine speed type CY I 7 MSD-X compact cylinder / single acting extend type CY I 5 MSD-Y compact cylinder / single acting pull type CY I 5 MT3S0 (R) 3 port pilot operated valve (reduced wiring valve) PV 2 MT3S0 (R) 3 port pilot operated valve (reduced wiring valve), two 3 port valve integrated type PV 2 MTS0 (R) port pilot operated valve / (reduced wiring valve) PV 2 MTPS Cutter broken detecting switch / manifold UX 0 MV*0 Manual valve for high vacuum GPV - MVC cylinder with vacuum pad / double acting single rod type CY I 990 MVP*0 Manual valve for high vacuum GPV - MW3G2 (R) 3 port pilot operated valve / body porting PV 5 MWG2 (R) 5 port pilot operated valve / body porting PV 5 MWG2-R (I) 5 port pilot operated valve / body porting PV 55 MWG2 (R) 5 port pilot operated valve / base side porting PV 5 MWG2-R (I) 5 port pilot operated valve / base side porting PV 55 MWG-R (I) 5 port pilot operated valve / base side porting PV MWG-T/ (R) 5 port pilot operated valve / base side porting PV 90 Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold (I): Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Index 53

233 Selection guide (index in alphabetic order) Model Catalog Page M MWGZ2 (R) 5 port pilot operated valve / base back porting PV 5 MWGZ2-R (I) 5 port pilot operated valve / base back porting PV 55 MWGZ-R (I) 5 port pilot operated valve / base back porting PV MWGZ-T/ (R) 5 port pilot operated valve / base back porting PV 90 MX00 to 000-W High performance oil mist / standard white series UX 370 MX Electric driven 2 port ball valve (motor valve) GPV - MX-C High corrosion proof electric driven 2 port ball valve (motor valve) GPV - MXD Electric driven 2 port ball valve with relay (motor valve) GPV - MXD-C MXDF High corrosion proof electric driven 2 port ball valve with relay (motor valve) GPV - Electric driven 2 port ball valve with relay (motor valve) / full bore GPV - MXD-N Electric driven oil prohibited 2 port ball valve (motor valve) GPV - MXF Electric driven 2 port ball valve (motor valve) / full bore GPV - MX-N Electric driven oil prohibited 2 port ball valve (motor valve) GPV - MXC Electric driven proportional control 2 port ball valve (motor valve) GPV - MXG Electric driven 3 port ball valve (motor valve) GPV - MXGD Electric driven 3 port ball valve with relay (motor valve) GPV - MXGD-N Electric driven oil prohibited 3 port ball valve (motor valve) GPV - MXG-N Electric driven oil prohibited 3 port ball valve (motor valve) GPV - MXGC Electric driven proportional control 3 port ball valve (motor valve) GPV - MY Metal free 2 port solenoid valve for chemical liquid GPV - MY2 Metal free 2 port solenoid valve for chemical liquid GPV - MY3 Metal free 2 port solenoid valve for chemical liquid GPV - MYG Metal free 3 port solenoid valve for chemical liquid GPV - MYG2 Metal free 3 port solenoid valve for chemical liquid GPV - MYG3 Metal free 3 port solenoid valve for chemical liquid GPV - N N*P5* () 2, 3, 5, port pilot operated valve / lock manifold PV 72 N* Discrete 2 port air operated valve (compact cylinder valve) GPV - N*V Discrete 2 port air operated valve with solenoid valve for low vacuum (compact cylinder valve) GPV - N-SX0 2 port air operated valve for high pressure air cylinder valve GPV - N-SX 2 port air operated valve for high pressure air cylinder valve GPV - NP (S) 3 port external pilot operated valve PV 9 NP 3 port air operated valve GPV - NCK Shock absorber fixed type CY II 507 NHS-C New handling / Z-axis module CS CY II 2 NHS-H New handling / Z-axis module HR CY II 2 NHS- New handling / Z-axis module CY CY II NHS-S New handling / Z-axis module ST- CY II NP3 Internal 3 port pilot operated valve with solenoid valve GPV - NP3/ (S) Internal 3 port pilot operated solenoid valve PV 90 NP Internal 3 port pilot operated valve with solenoid valve GPV - NPV2 Discrete pressure automatic pinch valve GPV - NSR New handling / X-axis module CY II NU Urethane tube UX NVP (S) External 3 port pilot operated solenoid valve PV 300 NVP 3 port air operated valve / O with solenoid valve GPV - OGD/V Manual valve for process gas GPV - OMC2 Dust collector valve controller GPV - P P0-W reed type small pressure switch UX 0 P000-W pressure switch / standard white series UX 02 P0-W reed type small pressure switch UX 0 P5* (S) 2 port pilot operated valve / pilot type PV 50 P53* (S) 3 port pilot operated valve / pilot type PV 50 P52 (S) 5 port pilot operated valve / pilot type PV 50 P0-W reed type small pressure switch UX 0 PC* ir counter UX 39 PCD (S) 3,, 5 port pilot operated poppet valve PV 373 5

234 Variation System Index Selection guide 2 3 Selection guide Products variation Selection guide Selection guide C D E F G H I J K M N O P Q R S T U V W Y Z PCP Pre-set counter UX 39 PD2 Dust collector valve / 2 port air operated valve GPV - PD3 Dust collector valve / 2 port air operated valve GPV - PDV2 Dust collector valve / 2 port solenoid valve GPV - PDV3 Dust collector valve / 2 port solenoid valve GPV - PDVE Dust collector valve / explosion proof 2 port solenoid valve (Explosion proof type dust collector valve) GPV - PE Pressure switch / logic valve UX 27 PF500 to 000F for compressed air / medium flow UX PF000 to 000F for compressed air / large flow rate UX PFD for compressed air / display separate type UX 0 PFK for compressed air / tester kit UX PFU500 to 00F for compressed air / modular design type UX 22 PG Fiber tube push-in joint (standard type) UX 9 PGM Regulator for process gas GPV - PG-P2- lanking plug UX 9 PI Interface UX 0 PJ High frequency 2 port valve for compressed air GPV - PJV Control box type manifold solenoid valve (2 port solenoid valve for dust collector control) GPV - PK 2 port pilot kick type solenoid valve GPV - PKS 2 port pilot kick type solenoid valve for steam GPV - PKW 2 port pilot kick type solenoid valve GPV - P P switch UX 32 PE- Side block / integrated type UX 3 PJ-C YES element / relay type UX 33 PK- OR element / line type UX 37 PK- OR element / integrated type UX 3 PK-C OR element / relay type UX 33 P- ND element / line type UX 37 P- ND element / integrated type UX 3 P-C ND element / relay type UX 33 PM Memory element / relay type UX 33 PN- NOT element / integrated type UX 3 PN-C NOT element / relay type UX 33 PN-D Threshold element / relay type UX 33 PMM Fine GPV - isted catalog CY I : Pneumatic Cylinders I CY II : Pneumatic Cylinders II PV : Pneumatic Valves UX GPV : Pneumatic, and uxiliary Components : General Purpose Valves * Refer to an index of catalog for general purpose valves. PPD nic pressure switch / sensor, amplifier integrated type with display UX 0 PPD3 nic pressure switch / sensor, amplifier integrated type with display UX PPD3-S Electric pressure switch, stainless steel diaphragm sensor / sensor, amplifier integrated type with display UX PPD- Electric pressure switch with protection box / sensor, amplifier integrated type with display UX PPD-S Electric pressure switch, stainless steel diaphragm sensor / sensor, amplifier integrated type with display UX PPE electronic pressure switch / sensor, amplifier integrated type without display UX 90 PPE-* electronic pressure switch / sensor, amplifier integrated type without display, analog output type UX 93 PPS2 nic pressure switch / sensor, amplifier integrated type / separated type with display UX 5 PPS2 Pressure controller UX 5 PPX Digital pressure sensor UX 0 PRD mplifier / element and sensor UX PRE- Pressure switch / relay type UX 33 PRF-2 ooster / element and sensor UX PRS- Solenoid valve / relay type UX 33 PRT Timer / relay type UX 33 PSD PC branch block UX 32 PSE PC I/O block UX 32 PS PC ND element UX 32 PSM PC element UX 32 PSV PC sub-base V type UX 32 P nic pressure switch / sensor, amplifier integrated type without display UX 9 PTN2 Fiber tube dedicate joint UX 0 PV5-R (S) 5 port pilot operated valve ISO conformed valve / I/O connector type / ISO size () PV 0 PV5-R (S) 5 port pilot operated valve ISO conformed valve / I/O connector type / ISO size (2) PV PV5G- (S) 5 port pilot operated valve ISO conformed valve / DIN terminal box type / ISO size () PV 3 PV5G- (S) 5 port pilot operated valve ISO conformed valve / DIN terminal box type / ISO size (2) PV 2 Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold (I): Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Index 55

235 Selection guide (index in alphabetic order) Model Catalog Page P PVP suction UX 3 PVS 2 port pilot operated solenoid valve GPV - PVSE2 Explosion proof 2 port pilot operated solenoid valve / d2g2 GPV - PVSE Explosion proof 2 port pilot operated solenoid valve / d2g GPV - PWS Threshold sensor UX 9 PX-3 Pushbutton switch and switch body / separate type UX PX-M Pushbutton switch and switch body / set screw type UX 2 PXC-K imit switch UX PXC-M Miniature limit switch UX PXC-M limit switch UX 7 PXD Proximity / element and sensor UX PXF imit sensor /element and sensor UX PXP Foot switch /element and sensor UX PXV ir light UX 3 PYM Fine GPV - PZM Installation bracket / line type UX 37 PZU Sub-base and input block / Q Relay type sub-base UX 3 QE Quick exhaust valve UX 9 QEV2 Quick exhaust valve UX 9 R R0, 3,, Cylinder switch / color indicator, reed 2 wire CY I, II R, 2 Cylinder switch / color indicator, proximity 2 wire CY I, II R00 to 000-P Regulator / copper and PTFE free series UX 505 R00 to 000-W Regulator / standard white series UX 37 R0 to 0-P Reverse / copper and PTFE free series UX 50 R0 to R0-W Reverse / standard white series UX 3 R2, 3Y Cylinder switch / 2 color indicator, proximity 2/3 wire CY I, II R3000 to 000-G Regulator / flame resistant series UX 5 R30 to 0-G Reverse / flame resistant series UX 0 R5 Cylinder switch / without display and reed 2 wire CY I, II R-050, 00 Miniature UX 5 R00 / piston type UX 5 R500 UX 590 RC00 UX 70 RCC2 Rotary clamp cylinder double acting single rod type CY I 22 RG Push-in joints for fiber tube (flame resistant type) UX 999 RJ500 direct acting precision UX 2 RJF Rotary UX 97 RM3000, 000 Regulator / medium pressure series UX 9 RN3000 to 000 Oil-prohibition UX 7 RP00 Precision UX RP00 Precision UX 50 RRC Rotary actuator / rack & pinion type CY II RS- Rain sensor for automatic watering control GPV - RSC-WP Dry cell type watering control GPV - RSC-G Plant watering control GPV - RSCH-G Plant watering control GPV - RSCH-N Green house control GPV - RSC-S5 Solar control GPV - RSV Solenoid valve for automatic watering control GPV - RSV-W Solenoid valve for automatic watering control GPV - RTD-3 ir timer / logic valve UX 2 RV3D rotary actuator / ngle variable type, double vane mechanism CY II 7 RV3DV/W rotary actuator / with valve, double vane mechanism CY II 7 RV3DV/W arge rotary actuator / with valve, double vane mechanism CY II 9 RV3S/D rotary actuator / vane mechanism CY II RV3S/D arge rotary actuator / vane mechanism CY II RV3S/DH arge rotary actuator / low hydraulic type, vane mechanism CY II 0 RV3S rotary actuator / ngle variable type, single vane mechanism CY II 7 RV3SV/W rotary actuator / with valve, single vane mechanism CY II 7 RV3SV/W arge rotary actuator / with valve, single vane mechanism CY II 9 RVC Shock absorber CY II 5

236 Variation System Index Selection guide 2 3 Selection guide Products variation Selection guide Selection guide C D E F G H I J K M N O P Q R S T U V W Y Z S S* S*S S*V S*W 2 port air operated valve /gas (cylinder valve) GPV - 2 port air operated valve for steam, water and air (cylinder valve) GPV - 2 port air operated valve for low vacuum (cylinder valve) GPV - 2 port air operated valve and liquid (cylinder valve) GPV - S air light / logic valve UX 2 SC / medium bore size type UX 5 SC- to 50 / large bore size type UX 5 SC3P / Stainless steel corrosion proof type UX 52 SC3R / direct piping, elbow type UX 0 SC3W / elbow type, push-in joint UX 2 SC3U / universal type, push-in joint UX SC2 Medium bore size cylinder (ø0 to 0) / double acting single rod type CY I 2 SC2- Medium bore size cylinder (ø0 to 0) / double acting back to back type CY I 530 SC2-D Medium bore size cylinder (ø0 to 0) / double acting double rod type CY I 522 SC2-G Medium bore size cylinder (ø0 to 0) / double acting rubber scraper type CY I 55 SC2-G Medium bore size cylinder (ø0 to 0) / double acting with scraper CY I 572 SC2-G2/3 Medium bore size cylinder (ø0 to 0) / double acting coolant proof type CY I 5 SC2-G Medium bore size cylinder (ø0 to 0) / double acting spatter adherence prevention type CY I 572 SC2-H Medium bore size cylinder (ø0 to 0) / double acting low hydraulic type CY I 550 SC2-K Medium bore size cylinder (ø0 to 0) / double acting steel tube type CY I 5 SC2-O Medium bore size cylinder (ø0 to 0) / double acting low speed type CY I 50 isted catalog CY I : Pneumatic Cylinders I CY II : Pneumatic Cylinders II PV : Pneumatic Valves UX GPV : Pneumatic, and uxiliary Components : General Purpose Valves * Refer to an index of catalog for general purpose valves. SC2-P Medium bore size cylinder (ø0 to 0) / double acting stroke adjustable/extend type CY I 5 SC2-P Medium bore size cylinder (oil-prohibition type) CY I, II SC2-Q2 Medium bore size cylinder (ø0 to 0) / double acting position locking type CY I 7 SC2-R Medium bore size cylinder (ø0 to 0) / double acting stroke adjustable pull type CY I SC2-T Medium bore size cylinder (ø0 to 0) / double acting heat resistance type CY I 72 SC2-U Medium bore size cylinder (ø0 to 0) / double acting low friction type CY I 5 SC2-V Medium bore size cylinder (ø0 to 0) / double acting with valve CY I 57 SC2-W Medium bore size cylinder (ø0 to 0) / double acting two stage type CY I 53 SCD / Miniature in-out type UX 3 SCD2 / In-out line type with push-in joint UX 0 SCG Tie rod cylinder / double acting single rod type CY I 350 SCG-D Tie rod cylinder / double acting double rod type CY I 39 SCG-G Tie rod cylinder / double acting rubber scraper type CY I 0 SCG-G2/3 Tie rod cylinder / double acting coolant proof type CY I SCG-G Tie rod cylinder / double acting spatter adherence prevention type CY I SCG-M Tie rod cylinder / double acting non-rotating type CY I 02 SCG-O Tie rod cylinder / double acting low speed type CY I 3 SCG-Q Tie rod cylinder / double acting position locking type CY I 3 SCG-U Tie rod cylinder / double acting low friction type CY I 392 SCK Shock absorber adjustable type CY II 5 SC2 / ine type with push-in joint UX 0 SC2-N Needle valve / line type with push-in joint UX SCM Round shaped cylinder / double acting single rod type CY I 22 SC-M3/M5(-F) / miniature UX 3 Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold (I): Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Index 57

237 Selection guide (index in alphabetic order) Model Catalog Page S SCM- Round shaped cylinder / double acting back to back type CY I 30 SCM-D Round shaped cylinder / double acting double rod type CY I 29 SCM-F Round shaped cylinder / double acting fine speed type CY I 22 SCM-D Round shaped cylinder / double acting direct mounting foot CY I 32 SCM-M Round shaped cylinder / double acting non-rotating type CY I 322 SCM-O Round shaped cylinder / double acting low speed type CY I 2 SCM-P Round shaped cylinder / double acting stroke adjustable extend type CY I 25 SCM-Q Round shaped cylinder / double acting position locking type CY I 272 SCM-R Round shaped cylinder / double acting stroke adjustable pull type CY I 22 SCM-T Round shaped cylinder / double acting heat resistance type CY I 2 SCM-U Round shaped cylinder / double acting low friction type CY I 290 SCM-W Round shaped cylinder / double acting two stage type CY I 3 SCM-W Round shaped cylinder / double acting tandem type CY I 3 SCM-X Round shaped cylinder / single acting extend type CY I 2 SCM-Y Round shaped cylinder / single acting pull type CY I 250 SCPD2 Pencil shaped cylinder / double acting single rod type CY I SCPD2-*C Pencil shaped cylinder / double acting rubber-air cushioned CY I 30 SCPD2-D Pencil shaped cylinder / double acting double rod type CY I SCPD2-DT Pencil shaped cylinder / double acting double rod heat resistance type CY I SCPD2-F Pencil shaped cylinder / double acting fine speed type CY I 3 SCPD2-K Pencil shaped cylinder / double acting high load type CY I SCPD2-M Pencil shaped cylinder / double acting non-rotating type CY I 5 SCPD2-O Pencil shaped cylinder / double acting low speed type CY I 0 SCPD2-T Pencil shaped cylinder / double acting heat resistance type CY I 2 SCPD2-V Pencil shaped cylinder / with valve, double acting CY I 70 SCPD2-Z Pencil shaped cylinder / double acting flow CY I 50 SCPH2 Pencil shaped cylinder / single acting pull type CY I SCPS Pencil shaped cylinder / single acting extend type CY I SCPS2 Pencil shaped cylinder / single acting extend type CY I SCPS2-M Pencil shaped cylinder / single acting extend non-rotating type CY I 5 SCPS2-V Pencil shaped cylinder / single acting with valve CY I 70 SCS arge bore size cylinder (bore size ø5 to 250) / double acting single rod lubrication type CY I 0 SCS-(N) arge bore size cylinder (bore size ø5 to 250) / double acting single rod oil-free type CY I 0 SCS-(N)D arge bore size cylinder (bore size ø5 to 250) / double acting double rod oil-free type CY I 2 SCS- arge bore size cylinder (bore size ø5 to 250) / double acting back to back type CY I 3 SCS-D arge bore size cylinder (bore size ø5 to 250) / double acting double rod type CY I 2 SCS-G arge bore size cylinder (bore size ø5 to 250) / double acting rubber scraper type CY I SCS-H arge bore size cylinder (bore size ø5 to 250) / double acting low hydraulic type CY I 2 SCS-P arge bore size cylinder (bore size ø5 to 250) / double acting stroke adjustable type CY I SCS-T arge bore size cylinder (bore size ø5 to 250) / double acting heat resistance type CY I 2 SCS-W arge bore size cylinder (bore size ø5 to 250) / double acting two stage type CY I 3 SD30, 302D Discrete high polymer dryer UX 3 5

238 Variation System Index Selection guide 2 3 Selection guide Products variation Selection guide Selection guide C D E F G H I J K M N O P Q R S T U V W Y Z SD30, 302E Discrete high polymer dryer UX 3 SD30 to 3075 Discrete high polymer dryer UX 2 SD0, 02D Discrete high polymer dryer UX 3 SD0, 02E Discrete high polymer dryer UX 3 SD050 to 0 Discrete high polymer dryer UX 2 SDM050 to 0 dryer / Dryer module unit series (large) UX SHC cylinder / double acting 2 time force type CY I 3 SHC-K cylinder / double acting time force type CY I SHD type air dryer / Medium / large heatless dryer UX SHS Super handling CY I, II SHV2 Shuttle valve UX 900 SKC Contact protection circuit box (C circuit) CY I, II 29 SKDC Contact protection circuit box (DC circuit) CY I, II 29 SKH Shock absorbing valve PV 35 S / metal body type UX SM / miniature type UX 5 S-M5 / small bore size type UX 7 SW / SW-*-H / SW-* / SW-S / SW-S, S / small bore size resin body type UX 7 high noise reduction small bore size resin body type UX 0 large flow rate small bore size resin body type UX high noise reduction compact type UX 3 high noise reduction compact type UX 2 SW-H* / push-in type UX SM-25 Shuttle mover standard type, high load type CY I 22 SMD2 cylinder / double acting single rod type CY I 0 SMD2-F cylinder / double acting fine speed type CY I 2 SMD2-M cylinder / single acting non-rotating type CY I 30 isted catalog CY I : Pneumatic Cylinders I CY II : Pneumatic Cylinders II PV : Pneumatic Valves UX GPV : Pneumatic, and uxiliary Components : General Purpose Valves * Refer to an index of catalog for general purpose valves. SMD2-X cylinder / single acting extend type CY I SMD2-Y cylinder / single acting pull type CY I SMW Metering valve with silencer UX 7 SMW2 Metering valve with silencer UX 7 SPV Manual pinch valve GPV - SR Flame resistant tube UX SRG3 High precision guided rodless cylinder (single guide) / double acting CY I 90 SR3 Rodless cylinder / double acting CY I 0 SR3-G Rodless cylinder / double acting with resin guide CY I SR3-GQ Rodless cylinder / double acting with resin guide position locking function CY I 2 SR3-J Rodless cylinder / double acting full cowling type CY I 57 SR3-Q Rodless cylinder / double acting with position locking function CY I 32 SRM3 High precision guided rodless cylinder (double guides) / double acting CY I 2 SRM3-Q High precision guided rodless cylinder (double guides) / double acting position locking type CY I 2 SRT3 Rodless cylinder with brake / double acting CY I SSD cylinder / double acting single rod type CY I 73 SSD- cylinder / double acting back to back type CY I 30 SSD-D cylinder / double acting double rod type CY I SSD-DG cylinder / double acting double rod coil scraper type CY I 9 SSD-DG cylinder / double acting double rod spatter adherence prevention type CY I 9 SSD-F cylinder / double acting fine speed type CY I 02 SSD-G cylinder / double acting coil scraper type CY I 7 Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold (I): Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Index 59

239 Selection guide (index in alphabetic order) Model Catalog Page S SSD-G cylinder / double acting strong magnetic field proof switch with coil scraper CY I 90 SSD-G2/G3 cylinder / double acting coolant proof type CY I 0 SSD-G cylinder / double acting spatter adherence prevention type CY I 7 SSD-K cylinder / double acting single rod type rod high load type CY I 7 SSD-K-*C cylinder / double acting high load type rubber-air cushioned CY I 70 SSD-KF cylinder / double acting high load fine speed type CY I 02 SSD-KG cylinder / double acting high load coil scraper type CY I SSD-KG cylinder / double acting high load strong magnetic field proof switch with coil scraper CY I 9 SSD-KG2/KG3 cylinder / double acting high load coolant proof type CY I SSD-KG cylinder / double acting high load spatter adherence prevention type CY I SSD-K cylinder / double acting high load strong magnetic field proof switch CY I 9 SSD-K-P cylinder / Oil-prohibition type CY I, II SSD-KU cylinder / double acting low friction type CY I SSD- cylinder / double acting strong magnetic field proof switch CY I 902 SSD-M cylinder / double acting non-rotating type CY I 50 SSD-O cylinder / double acting low speed type CY I 0 SSD-Q cylinder / double acting position locking type CY I 790 SSD-T cylinder / double acting heat resistance type CY I 770 SSD-T cylinder / double acting with heat resistance cylinder switch CY I 77 SSD-W cylinder / double acting two stage type CY I 0 SSD-X cylinder / single acting extend type CY I 75 SSD-Y cylinder / single acting pull type CY I 75 ST Shock absorber integrated high rigid cylinder CY I, II 9 STG Guided cylinder / double acting single rod type CY I 0 STG-*-*C Guided cylinder / double acting rubber-air cushion type CY I STG-*C Guided cylinder / double acting air cushion type CY I 2 STG-*G Guided cylinder / double acting rubber scraper type CY I 0 STG-*G Guided cylinder / double acting coil scraper type CY I 0 STG-*G2/G3 Guided cylinder / double acting coolant proof type CY I STG-*G Guided cylinder / double acting spatter adherence prevention type CY I 02 STG-*Q Guided cylinder / double acting position locking type CY I 2 STG--P7* Guided cylinder / double acting clean room specification CY I 0 STK High rigid cylinder / double acting chamfered round rod end CY I 3 STK-JY High rigid cylinder / single acting retract roller rod end CY I 2 STK-JY High rigid cylinder / double acting spring integrated roller rod end CY I STK-M High rigid cylinder / double acting chamfered rod end CY I 5 STK-MY High rigid cylinder / single acting retract chamfered rod end CY I 0 STK-MY High rigid cylinder / double acting spring integrated chamfered rod end CY I STK-Y High rigid cylinder / single acting retract chamfered round rod end CY I 2 STK-Y High rigid cylinder / double acting spring integrated chamfered round rod end CY I ST-* Guided cylinder (long stroke) / double acting single rod type CY I 3 ST-*-*C Guided cylinder (long stroke) / double acting rubber-air cushioned CY I 72 0

240 Variation System Index Selection guide 2 3 Selection guide Products variation Selection guide Selection guide C D E F G H I J K M N O P Q R S T U V W Y Z ST-*C Guided cylinder (long stroke) / double acting air cushioned CY I 7 ST-*F Guided cylinder (long stroke) / double acting fine speed type CY I 9 ST-*G/G Guided cylinder (long stroke) / double acting scraper type CY I 0 ST-*G2 /G3 Guided cylinder (long stroke) / double acting coolant proof type CY I ST-*G Guided cylinder (long stroke) / double acting spatter adherence prevention type CY I ST-*O Guided cylinder (long stroke) / double acting low speed type CY I 00 ST-*P Guided cylinder (long stroke) / double acting stroke adjustable/extend type CY I 5 ST-*Q Guided cylinder (long stroke) / double acting position locking type CY I ST-*T Guided cylinder (long stroke) / double acting heat resistance type CY I 2 ST-*T2 Guided cylinder (long stroke) / double acting packing seal material fluoro rubber CY I ST-*V Guided cylinder (long stroke) / double acting with valve CY I 2 STR2-* Twin rod cylinder / double acting single rod type CY I 2 STR2-*D Twin rod cylinder / double acting double rod type CY I 0 STR2-*F Twin rod cylinder / double acting fine speed type CY I 02 STR2-*O Twin rod cylinder / double acting low speed type CY I STR2-*Q Twin rod cylinder / double acting position locking type CY I STS-* Guided cylinder (short stroke) / double acting single rod type CY I 3 STS-*-*C Guided cylinder (short stroke) / double acting rubber-air cushioned CY I 72 STS-*C Guided cylinder (short stroke) / double acting air cushioned CY I 7 isted catalog CY I : Pneumatic Cylinders I CY II : Pneumatic Cylinders II PV : Pneumatic Valves UX GPV : Pneumatic, and uxiliary Components : General Purpose Valves * Refer to an index of catalog for general purpose valves. STS-*F Guided cylinder (short stroke) / double acting fine speed type CY I 9 STS-*G/G Guided cylinder (short stroke) / double acting scraper type CY I 0 STS-*G2/G3 Guided cylinder (short stroke) / double acting coolant proof type CY I STS-*G Guided cylinder (short stroke) / double acting spatter adherence prevention type CY I STS-*O Guided cylinder (short stroke) / double acting low speed type CY I 00 STS-*P Guided cylinder (short stroke) / double acting stroke adjustable / extend type CY I 5 STS-*Q Guided cylinder (short stroke) / double acting position locking type CY I STS-*T Guided cylinder (short stroke) / double acting heat resistance type CY I 2 STS-*T2 Guided cylinder (short stroke) / double acting packing seal material fluoro rubber CY I STS-*V Guided cylinder (short stroke) / double acting with valve CY I 2 SU30, 302D dryer / unit UX 3 SU30, 302E dryer / unit UX 3 SU30 to 3075 dryer / unit UX 2 SU0, 02D dryer / unit UX 3 SU0, 02E dryer / unit UX 3 SU050, 0 dryer / unit UX 2 SUH Transfer module CY I, II SV* 2 port air operated valve /gas with solenoid valve (cylinder valve) GPV - SV*S 2 port air operated valve for steam, water and air with solenoid valve (cylinder valve) GPV - SV*V 2 port air operated valve for low vacuum with solenoid valve (cylinder valve) GPV - SV*W 2 port air operated valve and liquid T with solenoid valve (cylinder valve) GPV - T0V/H/C Cylinder switch / color indicator, reed 2 wire CY I, II Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold (I): Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Index

241 Selection guide (index in alphabetic order) Model Catalog Page T T V/H Cylinder switch / color indicator, proximity 2 wire CY I, II T2 V/H R Cylinder switch / bend resistance lead wire type proximity 2 wire CY I, II T2, 3 V/H/C Cylinder switch / color indicator, 2/3 proximity wire CY I, II T2, 3Y(W) V/H Cylinder switch / 2 color indicator, 2/3 proximity wire CY I, II T2, 3YF V/H Cylinder switch / preventive maintenance output, proximity 3/ wire CY I, II T2, 3Y V/H Cylinder switch / coolant proof proximity 2/3 wire CY I, II T2, 3YM V/H Cylinder switch / preventive maintenance output, proximity 3/ wire CY I, II T2J V/H Cylinder switch / off-delay type proximity 2 wire CY I, II T2YD(T) Cylinder switch / strong magnetic field proof proximity 2 wire CY I, II T3P V/H Cylinder switch / PNP output type, proximity 3 wire CY I, II T5V/H/C Cylinder switch / without display, reed 2 wire CY I, II T V/H Cylinder switch / color indicator, 2 reed wire CY I, II TC-25 Medium pressure gas safety shutdown control GPV - TPS Discrete cutting tool broken detecting switch UX 00 TMD Toggle valve for chemicals GPV - TQS utomatic drip prevention unit for chemical liquid GPV - U U Urethane tube UX UC2 Unit cylinder / double acting single rod slide bearing type CY I 2 UC2- Unit cylinder / double acting single rod ball bearing type CY I 3 UCC2 Position locking clamp cylinder / double acting single rod type CY I 2270 UGPS2 Contact confirmation switch / unit UX UHPS Close contact confirmation switch / unit UX 9 UK rake cylinder / double acting single rod type CY I 0 UKP rake cylinder / double acting single rod type (ø) CY I 9 UK-V rake cylinder / with valve, double acting CY I 0 UM Medical equipment High corrosion proof miniature direct acting 2 port solenoid valve GPV - UMG Medical equipment High corrosion proof miniature direct acting 3 port solenoid valve GPV - UP The fiber tube antistatic type (push-in joint) UX 9 UP-**-F/F2 ntistatic tube UX 09 UP-92--*-F Fiber tube antistatic type UX 0 UP-92-SR Flame resistance fiber tube (push-in joint) UX 99 US 2, 3 port direct acting solenoid valve (resin body type) GPV - US2 2 port solenoid valve direct acting GPV - US3 2 port solenoid valve direct acting GPV - USC Free locking positioning medium bore size cylinder / double acting single rod type CY I 0 USC-G Free locking positioning medium bore size cylinder / double acting with coil scraper CY I 0 USG2 3 port solenoid valve direct acting GPV - USG3 3 port solenoid valve direct acting GPV - USSD Position locking compact cylinder / double acting single rod type CY I 3 USSD-K Position locking compact cylinder / double acting single rod high load type CY I 3 UTPS Cutter broken detecting switch / unit UX 0 V V0,7 Cylinder switch / small strong magnetic field proof reed 2 wire CY 2 V00, 3000-W Shut-off valve / standard white series UX 0 V30, 0-W OS conformed with lockout valve key hole UX V330, 33 Slow start valve UX 22 VF00 to 000 UX 22 VGD pressure gauge with limit mark UX 7 V Solenoid valve for gas combustion GPV - VM Shut off valve medium pressure gas safety shutdown control GPV - VN Solenoid valve for gas combustion GPV - VN-R/RH Solenoid valve for gas combustion GPV - VNM Shut off valve medium pressure gas safety shutdown control GPV - 2

242 Variation System Index Selection guide 2 3 Selection guide Products variation Selection guide Selection guide C D E F G H I J K M N O P Q R S T U V W Y Z VNM-25-K Valve for safety shutdown GPV - VNR Solenoid valve for gas combustion (normally open) GPV - VR00 UX 2 W W00 to 000-P Filter and / copper and PTFE free series UX 50 W00 to 000-W Filter and / standard white series UX 33 W0 to 0-P Reverse and / copper and PTFE free series UX 502 W0 to 0-W Reverse and / standard white series UX 32 W2P53* (S) 5 port pilot operated valve / double type PV 50 W3000 to 000-G Filter and / flame resistant series UX 32 W30 to 0-G Reverse and / flame resistant Series UX 3 WG2 (S) 3, 5 port pilot operated valve / sub-base porting PV 550 WG (S) 5 port pilot operated valve / base side porting PV 0 WGZ (S) 5 port pilot operated valve / base back porting PV 0 W500, UX 592 WFK300, 30 Karman's vortex type small component integrated type UX 0 WFK500, 5027 Karman's vortex type standard type UX WFK00, 027 Karman's vortex type modular design type UX WFK7050 to 70 Karman's vortex type large flow rate type UX 2 WH Solenoid valve for automatic watering control GPV - Y YS Y type strainer GPV - Z Z2-M Switch head UX 3 Z- Switch head UX 3 ZCK Rotary type head lever actuator UX 9 ZJ-* Tightening joint stainless steel type / elbow type UX 93 ZJ-N* Tightening joint stainless steel type / sleeve integrated nut UX 93 ZJ-S* Tightening joint stainless steel type / straight type UX 93 ZJ-T* Tightening joint stainless steel type / tee union type UX 93 ZSP stainless steel type UX 950 ZW-* stainless steel type / elbow type UX 959 ZW-S* stainless steel type / straight type UX 959 ZW-T* stainless steel type / tee union type UX 959 isted catalog CY I : Pneumatic Cylinders I CY II : Pneumatic Cylinders II PV : Pneumatic Valves UX GPV : Pneumatic, and uxiliary Components : General Purpose Valves * Refer to an index of catalog for general purpose valves. Symbol ( valves and general purpose valves) (S) : Discrete valve (R) : Reduced wiring manifold (I): Individual wiring manifold (X) : Mix manifold () : lock manifold (M) : Manifold Index 3

to [cylinder bore size/operation speed] or [load value/operation time].

243 I N D E X Use's guide Selection guide Intro 3 Products variation Intro 5 Select products according to appearance and features. Guide in model change Intro 30 Icons CKD nic Catalog Guide (CD DT) CE Marking CKD RoHS compliance Selection guide Selection guide System Intro 32 Variation Intro 39 Intro 5 Select products according to [cylinder bore size/operation speed] or [load value/operation time]. Selection guide Index in alphabetic 0 Safety precautions order Intro 7 * lways read the precautions on the section of each product in the catalog. Flow characteristics Protective structure Systems Ozone proof International unit (SI unit) JIS symbol list Certification buyoff of ISO900, ISO00 The latest catalog introduction Index (index in alphabetic order) CTOG EXPRESS CD Intro Intro ir preparation components p. Pressure adjustment components p.27 Pneumatic auxiliary components p.25 components p. Sensors p.57 s Products variation Product name Page Components preparation ( air components) Pneumatic auxiliary components components Sensors s Main line unit unit ir Pneumatic pressure sensor Pressure switch / controller ( ) Refrigerating air dryer type air dryer air dryer ir utomatic drain / exhaust cleaner Modular design () Separate type, / Precision Related products (pressure gauge) / ir uxiliary valve (check valve ) suction pressure switch nic pressure switch nic differential pressure switch contact confirmation / cutting tool broken detecting switch ir sensor (PE s) / electronic pressure switch (FSM2/FSM-H/FSM-V) (FCM) display integrated type (PF-F,PFU) display separate type (PFD) tester kit Karman's vortex type (WFK) Detector / circuit device / Selection guide Icons Flow characteristics Caution Components preparation (clean air components) s Sensors components Pneumatic auxiliary components Refrigerating dryer ir utomatic drain (Module) R. R. ir F. R. nic ir sensor Pressure Systems Ozone proof JIS symbol Index CKD home page provides down load services of catalog and CD data (2D, 3D-CD) p. (gamma ) PC / signal controllers 29 Intro Intro 2

244 User's guide (Reading and Using the Catalog) Product selection methods () to () have been prepared to facilitate product selection and search. Selection guide ccording to products variation Intro 5 to 29 If the product series name is already decided, search for the required series' page. Series variation (arge class) Selection guide ccording to products variation Select products according to appearance and features. NEW indicates models added with Version 7. Components preparation (clean air components) P. Main line unit Series variation (Medium class) Products variation Variation System Selection guide Selection guide Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s Index / P. Index / P. Index / P. Series variation / P. Main line unit Series variation / P. Main line unit Series variation / P. Main line unit Index Selection guide Index / P. Series variation / P. Main line unit Main line unit Main line unit Main line unit Page P. to Page P.3 to Page P.7 to Page P.3 to Refrigerating air dryer type air dryer air dryer ir Dryer NEW Refrigerating Heatless dryer Medium main line NEW Series Treating air flow rate Features Page Series Treating air flow rate Features Page Refrigerating GK Series Index / P. 25 NEW heatless dryer Dryer Popular type Series Treating air flow rate Features F00P Page Oil removing Series pplicable air compressor Features Page SD300E-W Filter like standard air 75 to 50 R/min. (NR) 3 Stably supplying ultra dry air of SD00E-W dryer, Ultra dry air is F00M 3.7 to 25.m 3 /min. High performance oil removing For installation / standard inlet GK30D 2.2kW to kw HD-** 75 to 35 R/min.(NR) (NR) air (35 C) type 32 atmospheric dew point -72 C. SD300D-W easily and stably F00X Deodorization (activated charcoal) 5 to 750 R/min. (NR) 3 SD00D-W supplied. Oil free Direct connection to compressor/ GK50 2.2kW to 5.5kW 3 Heatless dryer SD3000-W Filter - unit Pre- high temperature inlet air (55 C) type F000P Series Treating air flow rate Features Page 35 to 90 R/min. (NR) 2 stainless steel vessel provided SD000-W is available. Refrigerating GX Series Index / P. 39 NEW Solid removing The purge flow is reduced with the SHD 2.5 to 2 m 3 /min Dryer unit F000S stainless steel vessel provided Series pplicable air compressor Features Page energy-saving dew point monitor 3.7 to.m SU300E-W 3 /min. Filter like standard air 75 to 50 R/min. (NR) 3 (NR) High performance oil removing, F000M For installation / standard inlet GX30 kw to 37kW. SU00E-W dryer, Ultra dry air is stainless steel vessel provided air (35 C) type SU300D-W easily and stably Deodorization (activated charcoal) F000X 5 to 750 R/min. (NR) Direct connection to compressor/ 3, stainless steel vessel provided Manual air dryer SU00D-W supplied. GX50 7.5kW to 37kW high temperature inlet air (55 C) type 52 SU3000-W Filter - unit arge main line 35 to 90 R/min. (NR) Manual air dryer 2 SU000-W is available. Refrigerating GT5000/7000 Series Index / P. 57 Series Treating air flow rate Features Page Series Treating air flow rate Features Page Series arge flow rate realized Main line unit pplicable air compressor Features Page SDM000.3 to. m 3 /min. (NR) by high polymer Popular type 00 Disposable desiccant type, High temperature inlet air R/min. (NR) or less F3000P Pre- GT5000 (D) 55kW / 75kW 002 low pressure use possible (55 C) type, air cooling type F3000S to 25m 3 /min. Oil removing 0 Standard inlet air (0 C) type, F3000M (NR) High performance oil removing 2 GT7000 (D) 55kW / 75kW 72 Refrigerating air dryer Page P. to air cooling type F3000X Deodorization (activated charcoal) Standard inlet air (0 C) type, Oil free GT7000W (D) 55kW / 75kW 7 water cooling type Pre-, F5000P stainless steel vessel provided Refrigerating GT9000 Series Index / P. NEW Oil removing, stainless F5000S Refrigerating Series pplicable air compressor Features Page to 25m 3 /min. stainless steel vessel provided Standard inlet air (0 C) type, 90 (NR) GT kW to 50kW High performance oil removing, air cooling type F5000M 2 stainless steel vessel provided Standard inlet air (0 C) type, GT9000W 90kW to 50kW 9 Deodorization (activated charcoal) water cooling type F5000X Refrigerating GK Series Index / P. 25 NEW, stainless steel vessel provided Standard inlet air (0 C) type, GT9000WV 7kW / 90kW 9 Inverter control water-cooled type Series pplicable air compressor Features Page For installation / standard inlet GK30D 2.2kW to kw air (35 C) type 32 Specifications page Intro 5 Intro Selection guide ccording to variation Intro 39 to If the variation model is already decided, search for the required product. Selection guide ccording to variation Products variation Variation System Index Selection guide Selection guide Selection guide Selection guide Copper and PTFE free Ozone proof room specifications Variation name Elector components (proportional pressure controls) components Sensors Pneumatic auxiliary components Filter / () Copper and PTFE free Pneumatic components for raun tube manufacturing lines. Series / model Port size Remarks Page C**00-W -TP combination Rc/ to Rc 500 C**-W -TP W.. combination Rc/ to Rc 500 C**-W -TP combination Rc/ to Rc 500 C**30-W -TP F.M.R. combination Rc/ to Rc 500 C**0-W -TP W.M. combination Rc/ to Rc 500 C**50-W -TP R.M. combination Rc/ to Rc 500 C*00-W F.M. combination Rc/ to Rc Copper and PTFE free as standard 32 C*070-W F.F.M. combination Rc/ to Rc Copper and PTFE free as standard 330 W*000-W -TP Filter / Rc/ to Rc 50 W*0-W -TP Reverse / Rc/ to Rc 502 Copper and PTFE free as standard F*000-W ir Rc/ to Rc 503 (Refer to model no.) Copper and PTFE free as standard M*000-W Oil mist Rc/ to Rc 50 (Refer to model no.) R*000-W -TP Regulator Rc/ to Rc 505 R*0-W -TP Reverse Rc/ to Rc 50 *000-W ubricator Rc/ to Rc Copper and PTFE free as standard 507 V*000-W Shut-off valve Rc/ to Rc/2 Copper and PTFE free as standard 0 G9D -P General purpose pressure gauge R/ 50 G59D -P General purpose pressure gauge R/ 50 F*3 Exhaust cleaner Rc3/ to Rc2 Copper and PTFE free as standard 2 SC-* Miniature speed M3, M5 Copper and PTFE free as standard 3 SC3W-P, elbow type M3 to R/2 2 SC3U-P, universal type M3 to R/2 SC-P Rc/ to Rc/2 5 SW R/ to R/2 Copper and PTFE free as standard 7 S R/ to R Copper and PTFE free as standard 7 F Miniature joint M3 to Rc(R)/ Copper and PTFE free as standard 922 GW -P M3 to R/2 930 F.U.NU.KX.SR Tube ø3.2 to ø Copper and PTFE free as standard pressure switch P*0-W -P Rc/ to Rc 0 (Reed type small pressure switch) nic pressure switch PPD Rc/ Copper and PTFE free as standard 0 (Pressure switch) Pneumatic auxiliary components Filter / () Sensors Ozone proof W*000-W -P W*0-W -P F*000-W R*000-W -P R*0-W -P R500 -P MNR500 V*000-W 37 -P 00-P -P 70 -P 0 -P 2-P P-P SC3W-P SC-X SC3R-P SM SW F -P GW -P ZW -P ZJ F.U.KX VF P*0-W P000-W Series / model Port size Remarks Page Filter / Reverse / ir Regulator Reverse lock manifold Shut-off valve ir ir Regulator Regulator Precision Precision unit Reverse Reverse ir, elbow type medium bore size type, direct piping / elbow type Miniature silencer Miniature joint stainless steel Series Female joint stainless steel Series Tube pressure switch (Reed type small pressure switch) Pressure switch Note: Refer to " Ozone proof " on 5 for details. Rc/ to Rc/2 Rc/ to Rc/2 Rc/ to Rc s standard 503 Rc/ to Rc/2 Rc/ to Rc 3 Push-in joint ø, ø Push-in joint ø, ø, ø Rc/ to Rc/2 s standard 0 Rc/, Rc3/ s standard 53 Rc/, Rc3/ s standard 53 Rc/, Rc/ Rc/, Rc3/ Page Rc/2 Rc/, Rc3/ Rc/, Rc3/ Rc/, Rc3/ Rc3/,, /2 M3 to R/2 Rc/ to Rc/2 M5 to Rc/2 M3, M5 Rc/ to Rc/2 M3 to Rc/ M3 to R/2 M5 to R/2 Rc/ to Rc/2 ø3.2 to ø Rc/ to Rc/2 Rc/ to Rc/2 Rc/ to Rc/2 s standard s standard s standard s standard s standard s standard s standard Custom order Specifications 2 page Vertical axis: Variation name Intro 39 Intro 0 Intro 3

245 Selection guide ccording to Intro 5 to 3 Even beginners can select a model easily. Optimum model is selected from predetermined conditions. Conditions When bore size and cylinder operation speed are determined. When load value and operation time are determined. System selection System selection Selection guide ccording to model no. Index in alphabetic order 0 to 3 The general catalog name and corresponding page can be searched for with the product model. Product models listed in the general catalog are covered. Selection guide (index in alphabetic order) Model Catalog Page 3-Z 2 port direct acting solenoid valve for dry air GPV - Discrete 2 port direct acting solenoid valve GPV - E2 Explosion proof 2 port direct acting solenoid valve / d2g2 GPV - E Explosion proof 2 port direct acting solenoid valve / d2g GPV - E-Z Explosion proof 2 port direct acting solenoid valve for dry air / d2g GPV - -Z 2 port direct acting solenoid valve for dry air GPV - 2 Discrete 2 port direct acting solenoid valve GPV - 2E Explosion proof 2 port direct acting solenoid valve / d2g GPV port direct acting solenoid valve / large bore size GPV - P ir UX D 2 port pilot operated solenoid valve / diaphragm structure GPV - DE Explosion proof 2 port pilot operated solenoid valve / diaphragm structure / d2g GPV - D 2 port pilot operated solenoid valve / diaphragm structure GPV - DE Explosion proof 2 port pilot operated solenoid valve / diaphragm structure / d2g GPV - D 2 port pilot operated solenoid valve DE / diaphragm structure Explosion Page proof 2 port pilot operated solenoid valve GPV - / diaphragm structure / d2g GPV - D22 2 port pilot operated solenoid valve / diaphragm structure GPV - D22E Explosion proof 2 port pilot operated solenoid valve / diaphragm structure / d2g GPV - DK Pilot kick type 2 port solenoid valve / diaphragm structure GPV - DKE Explosion proof Pilot kick type 2 port solenoid valve / diaphragm structure / d2g GPV - DK-Z Pilot kick type 2 port solenoid valve for dry air GPV - F0M to F2M Medium main line / High performance oil removing UX F0P to F2P Medium main line / General catalog listing (abbreviations) / / / DK Pilot kick type 2 port solenoid valve / diaphragm structure GPV - DKE Explosion proof Pilot kick type 2 port solenoid valve / diaphragm structure / d2g GPV - DK Pilot kick type 2 port solenoid valve / diaphragm structure GPV - F0M to F2M Medium main line / High performance oil removing UX F0P to F2P Medium main line / Pre- UX F0X to F2X Medium main line / Deodorization (activated charcoal), UX F30M to 325M arge main line (popular type) / High performance oil removing UX 2 F30P to 325P arge main line (popular type) / Pre- UX F30S to 325S arge main line (popular type) / Oil removing UX 0 F30X to 325X arge main line (popular type) / activated charcoal UX F00M to F0M Medium main line (oil free) high performance oil removing UX F00P to F0P Medium main line (oil free) / pre- UX F00S to F0S Medium main line (oil free) solid removing UX F00X to F0X Medium main line (oil free) Deodorization UX F50M to 525M arge main line (oil free) / High performance oil removing UX 2 F50P to 525P arge main line (oil free) / Pre- UX F50S to 525S arge main line (oil free) / Oil removing UX F50X to 525X arge main line (oil free) / activated charcoal UX G3*-Z 3 port direct acting solenoid valve for dry air GPV - G3 Discrete 3 port direct acting solenoid valve GPV - G33 Discrete 3 port direct acting solenoid valve GPV - G3 Discrete 3 port direct acting solenoid valve GPV - G*E-Z Explosion proof 3 port direct acting solenoid valve / d2g GPV - G*-Z 3 port direct acting solenoid valve for dry air GPV - G Discrete 3 port direct acting solenoid valve GPV - GE Explosion proof 3 port direct acting solenoid valve / d2g GPV - G3 Discrete 3 port direct acting solenoid valve GPV - G3E Explosion proof 3 port direct acting solenoid valve / d2g GPV - Margins of both pages The listed position and range are indicated by the model and shading. Refrigerating ir uto. drain Main line unit pplication P " shows the grade that 0.μm, w point -0 C, ensity 0.0mg/m 3. g refrigerating type air dryer, since or less. System selection civil engineering machine cessary product which dry does not be indicated.) driver and air grinder ice and components and air ver and precision part cleaning air blow gic control dustry ndustry /dry/packing/brewing air room as erator insulation gas dry aker injection air dry strumentation Refrigerating ir uto. drain ir nic ir sensor Pressure Intro

Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Components preparation (clean air components) P.

25 NEW Series pplicable air compressor Features Page GK30D 2.2kW to kw For installation / standard inlet air (35 C) type 32 GK50 2.2kW to 5.

39 NEW Series pplicable air compressor Features Page GX30 kw to 37kW For installation / standard inlet air (35 C) type GX50 7.

246 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Components preparation (clean air components) P. Main line unit Index / P. Series variation / P. Main line unit Index / P. Series variation / P. Main line unit Refrigerating air dryer Refrigerating Refrigerating GK Series Index / P. 25 NEW Series pplicable air compressor Features Page GK30D 2.2kW to kw For installation / standard inlet air (35 C) type 32 GK50 2.2kW to 5.5kW Direct connection to compressor/ high temperature inlet air (55 C) type 3 Refrigerating GX Series Index / P. 39 NEW Series pplicable air compressor Features Page GX30 kw to 37kW For installation / standard inlet air (35 C) type GX50 7.5kW to 37kW Direct connection to compressor/ high temperature inlet air (55 C) type 52 Refrigerating GT5000/7000 Series Index / P. 57 Series pplicable air compressor Features Page GT5000 (D) 55kW / 75kW High temperature inlet air (55 C) type, air cooling type GT7000 (D) 55kW / 75kW Standard inlet air (0 C) type, air cooling type 72 GT7000W (D) 55kW / 75kW Standard inlet air (0 C) type, water cooling type 7 Refrigerating GT9000 Series Index / P. NEW Series pplicable air compressor Features Page GT kW to 50kW Standard inlet air (0 C) type, air cooling type 90 GT9000W 90kW to 50kW Standard inlet air (0 C) type, water cooling type 9 GT9000WV 7kW / 90kW Standard inlet air (0 C) type, Inverter control water-cooled type 9 Main line unit type air dryer Page P. - Page P.3 - Heatless dryer heatless dryer Series Treating air flow rate Features Page HD-** 75 to 35 R/min.(NR) Stably supplying ultra dry air of atmospheric dew point -72 C. Heatless dryer Series Treating air flow rate Features Page SHD 2.5 to 2 m 3 /min The purge flow is reduced with the energy-saving dew point monitor Manual air dryer Manual air dryer Series Treating air flow rate Features Page R/min. (NR) or less Disposable desiccant type, low pressure use possible Intro 5

Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors

Main line unit Index / P. Series variation / P.

247 Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s Main line unit Index / P. Series variation / P. Main line unit Index / P. Series variation / P. Main line unit air dryer NEW Series Treating air flow rate Features Page Dryer Dryer SD300E-W SD00E-W SD300D-W SD00D-W SD3000-W SD000-W Dryer unit SU300E-W SU00E-W SU300D-W SU00D-W SU3000-W SU000-W SDM to 50 R/min. (NR) 5 to 750 R/min. (NR) 35 to 90 R/min. (NR) 75 to 50 R/min. (NR) 5 to 750 R/min. (NR) 35 to 90 R/min. (NR).3 to. m 3 /min. (NR) Filter like standard air dryer, Ultra dry air is easily and stably supplied. Filter - unit is available. Filter like standard air dryer, Ultra dry air is easily and stably supplied. Filter - unit is available. arge flow rate realized by high polymer Main line unit ir Page P.7 - Page P.3 - Medium main line NEW Series Treating air flow rate Features Page Popular type F00P Oil removing F00M 3.7 to 25.m 3 /min. High performance oil removing (NR) F00X Deodorization (activated charcoal) Oil free F000P Pre- stainless steel vessel provided Solid removing F000S stainless steel vessel provided 3.7 to.m 3 /min. F000M (NR) High performance oil removing, stainless steel vessel provided F000X Deodorization (activated charcoal), stainless steel vessel provided arge main line Popular type F3000P F3000S F3000M F3000X Oil free F5000P F5000S F5000M F5000X Series Treating air flow rate Features Page to 25m 3 /min. (NR) to 25m 3 /min. (NR) Pre- Oil removing High performance oil removing Deodorization (activated charcoal) Pre-, stainless steel vessel provided Oil removing, stainless steel vessel provided High performance oil removing, stainless steel vessel provided Deodorization (activated charcoal), stainless steel vessel provided Intro

2- utomatic drain Series pplicable compressor Features Page DT3000-W DT000-W DT30-W DT0-W 0.75 to kw 0.

248 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Components preparation (clean air components) P. Main line unit Index / P. Series variation / P. Main line unit Index / P. Series variation / P. Main line unit Drainage Page P.2- Main line unit Exhaust cleaner Page P.2- utomatic drain Series pplicable compressor Features Page DT3000-W DT000-W DT30-W DT0-W 0.75 to kw 0.75 to 75kW kw or less 75kW or less Heavy duty drain utomatic drain with manual cock ight weight / compact automatic drain 22 Series Port size Features Page ppropriate for circuits 50 Rc/2 generating large drain Series Port size Features Page 52 Rc3/, /2 Quick connection for drain discharge in circuit 22 Exhaust cleaner F*3 Series Port size Features Page Rc3/ to 2 Exhaust noise and oil mist are removed by 99.9%. 2 utomatic drain Series Port size Features Page D00 D3000 G/2" Compressor discharge flow rate.5 to 00 m 3 /min. (NR) High reliability level sensor is used. DS0 Tank drain G/2" Detecting drain entrained into circuit by high reliable level sensor 9 Series Port size Features Page utomatic discharge type 5002 Rc/ by external pilot signal Intro 7

250 unit Modular design (rotary actuator ) Combination combination Series Port size (Rc, G, NPT) Features Page C00-W C00-W C2500-W C3000-W C000-W C500-W C000-W /, / /, 3/ /, 3/ /, 3/ /, 3/, /2 3/,

249 Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s unit Standard Series Index / P. 27 Series variation / P. 250 unit Modular design (rotary actuator ) Combination combination Series Port size (Rc, G, NPT) Features Page C00-W C00-W C2500-W C3000-W C000-W C500-W C000-W /, / /, 3/ /, 3/ /, 3/ /, 3/, /2 3/, 3/, Filter,, and lubricator integrated NEW Page P.29-2 R.M. combination F.M. combination Series Port size (Rc, G, NPT) Features Page C0-W C0-W C300-W C00-W C00-W C00-W /, / /, 3/ /, 3/ /, 3/, /2 3/, 3/, Filter and oil mist integrated 32 C3070-W C070-W C070-W C070-W Series Port size (Rc, G, NPT) Features Page C50-W C50-W C2550-W C3050-W C050-W C050-W C050-W /, / /, 3/ /, 3/ /, 3/ /, 3/, /2 3/, 3/, F.F.M. combination Series Port size (Rc, G, NPT) Features Page /, 3/ /, 3/, /2 3/, 3/, Regulator and oil mist integrated 3 Filter (5μm), (0.3μm), and oil mist integrated 330 W.. combination Series Port size (Rc, G, NPT) Features Page C-W C-W C30-W C0-W C0-W C-W C-W C25-W C30-W C0-W C0-W C0-W /, / /, 3/ /, 3/ /, 3/, /2 3/, combination /, / /, 3/ /, 3/ /, 3/ /, 3/, /2 3/, 3/, F.M.R. combination Series Port size (Rc, G, NPT) Features Page C30-W C30-W /, / /, 3/ C2530-W /, 3/ Filter, oil mist, and C3030-W /, 3/ integrated C030-W /, 3/, /2 30 C030-W C030-W 3/, 3/, W.M. combination Filter,, and lubricator integrated Series Port size (Rc, G, NPT) Features Page Filter and integrated Series Port size (Rc, G, NPT) Features Page C0-W /, / C0-W /, 3/ Filter, and oil C300-W /, 3/ mist integrated C00-W /, 3/, /2 3 C00-W 3/, Intro

250 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Components preparation (clean air components) P. unit Standard white series Index / P. 27 Series variation / P. 250 Filter / Filter / Series Port size (Rc, G, NPT) Features Page W00-W W00-W W3000-W W000-W W000-W /, / /, 3/ /, 3/ /, 3/, /2 3/, Reverse / Dust removing 5μm and tar removing 0.3μm of elements are available. NEW 33 Series Port size (Rc, G, NPT) Features Page W0-W /, / W-W /, 3/ Reverse flow function W30-W /, 3/ integrated W0-W /, 3/, /2 32 W0-W 3/, NEW unit Modular design (rotary actuator ) Page P.29 - ir ir F00-W F00-W F3000-W F000-W F000-W F000-W Series Port size (Rc, G, NPT) Features Page /, / /, 3/ /, 3/ /, 3/, /2 3/, 3/, High performance oil mist Dust removing 5μm and tar removing 0.3μm of elements are available. 350 Oil mist Series Treating flow rate R/min. (NR) Features Page M type S type X type M00-W M00-W ppropriate for M3000-W measurement / 30 instrumentation, etc. M000-W in oil inhibited circuits. M000-W M000-W Series Treating flow rate Features Page MX00-W 75 R/min. (NR) Secondary side oil content density 0.00mg/m MX3000-W R/min. (NR) 3 Perfect for optical MX000-W 370 R/min. (NR) s such as optical type 370 MX000-W 70 R/min. (NR) positioning device and laser processing machines MX000-W 0 R/min. (NR) 0.00mg/m 3 Intro 9

251 Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s unit Standard white series Index / P. 27 Series variation / P. 250 NEW unit Modular design (rotary actuator ) Page P.29 - Regulator Regulator Series Port size (Rc, G, NPT) Features Page R00-W R00-W /, / /, 3/ R3000-W /, 3/ pressure gauge R000-W /, 3/, /2 embedded type 37 R000-W R000-W 3/, 3/, Reverse Series Port size (Rc, G, NPT) Features Page R0-W R-W R30-W R0-W R0-W R0-W /, / /, 3/ /, 3/ /, 3/, /2 3/, 3/, Reverse flow function integrated 3 NEW ubricator ubricator Series Port size (Rc, G, NPT) Features Page 00-W /, / 3000-W /, 3/ 000-W /, 3/, /2 Supplying fine oil mist W 3/, Intro

252 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Components preparation (clean air components) P. unit Standard white series Index / P. 27 Series variation / P. 250 unit Related products pressure switch Pressure switch Series Port size Features Page P000-W Rc/, 3/, /2 NEW Page P.29 - Pressure setting of 0. to 0.MPa wide range possible 02 Slow start valve Slow start valve V330-W V33-W Series Port size Features Page Rc/, 3/, /2 To maintain safety at starting / stopping NEW 22 Reed type small pressure switch P0-W P0-W P0-W Series Port size Features Page Shut-off valve Rc/, / Rc/, 3/, /2 Rc3/, Shut-off valve Space saving and wide pressure range 0 Series Port size (Rc, G, NPT) Features Page V00-W /, / ppropriate for preventing accidents V3000-W /, 3/, /2 caused by residual pressure 0 ock out (OSH conformed) Series Port size (Rc, G, NPT) Features Page V30-W /, 3/, /2 OSH conformed V0-W 3/, Push-in joint (quick exhaust valve) 2QV 3QV Series pplicable tube outer diameter Features Page R/, / ø,,,, 2 way valve 3 way valve Intro

253 Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s unit Standard white series Index / P. 27 Series variation / P. 250 NEW unit uxiliary components Page P.29 - racket / joiner racket Series pplications Features Page ***-w Modular design bracket T, C, types 25 Joiner Series pplications Page J***-w Modular design connection bracket 25 NEW Distributor Distributor Series pplications Features Page D*0-00-w Modular design pipe branch bracket Piping port branch 2 Piping adapter Piping adapter Series pplications Features Page ***-w Modular design piping adapter Piping adaptor set 2 Intro

254 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Components preparation (clean air components) P. unit Flame resistant Series Index / P. 27 Series variation / P. 250 unit Flame resistant Series Index / P. 27 Series variation / P. 250 unit Modular design (rotary actuator ) Filter / Filter / Series Port size (Rc, G, NPT) Features Page W3000-G W000-G W000-G W30-G W0-G W0-G /, 3/ /, 3/, /2 3/, Reverse / /, 3/ /, 3/, /2 3/, Dust removing 5μm and tar removing 0.3μm of elements are available. Series Port size (Rc, G, NPT) Features Page Reverse flow function integrated NEW Page P NEW unit uxiliary components Page P.3 - racket / joiner racket Series pplications Features Page ***-W Modular design bracket T, C, types 7 Joiner Series pplications Page J***-W Modular design connection bracket 7 Distributor Distributor Series pplications Features Page D*0-00-W Modular design pipe branch bracket Piping port branch Piping adaptor Piping adapter Series pplications Features Page ***-W Modular design piping adaptor Piping adaptor set 70 ir F3000-G F000-G F000-G Regulator Series Port size (Rc, G, NPT) Features Page R3000-G /, 3/ pressure gauge R000-G /, 3/, /2 embedded type 5 R000-G 3/, Reverse R30-G R0-G R0-G Intro 3 ir Series Port size (Rc, G, NPT) Features Page Regulator /, 3/ /, 3/, /2 3/, Series Port size (Rc, G, NPT) Features Page /, 3/ /, 3/, /2 3/, Dust removing 5μm and tar removing 0.3μm of elements are available. NEW Reverse flow function integrated 0

255 Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s unit Oil-prohibition Series Index / P. 27 Series variation / P. 250 unit Medium pressure Series Index / P. 27 Series variation / P. 250 unit Modular design (rotary actuator ) Regulator Regulator RN3000 RN000 RN000 Series Port size Features Page Rc/, Rc3/ Rc/, Rc3/, Rc/2 Rc3/, Rc Modular type with oil-prohibited fluid passage section NEW Page P.73-7 unit Modular design (rotary actuator ) ir ir Series Port size (Rc, G, NPT) Features Page FM3000-W FM000-W FM000-W FM000-W /, 3/ /, 3/, /2 3/, 3/, Page P.3 - ir F3000 to F000 Series medium pressure specifications NEW Oil mist Oil mist Treating flow rate R/min. (NR) Series Features Page M type S type X type MM3000-W 90 MM000-W Oil mist M3000 to M000 Series medium pressure 90 MM000-W 0 specifications MM000-W Regulator Regulator Series Port size (Rc, G, NPT) Features Page RM3000-W RM000-W /, 3/ /, 3/, /2 Regulator R3000, R000 Series medium pressure specifications 9 Intro

256 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Components preparation (clean air components) P. unit Copper and PTFE free series Index / P. 27 Series variation / P. 250 unit Copper and PTFE free series Index / P. 27 Series variation / P. 250 NEW unit Modular design (rotary actuator ) Page unit Modular design (rotary actuator ) Page NEW P.99 - P.99 - Combination combination Series Port size (Rc, G, NPT) Features Page C00 to 000-W-P / to Filter,, and lubricator integrated 500 Filter / Filter / Series Port size (Rc, G, NPT) Features Page W00 to 000-W-P / to Reverse / Dust removing 5μm and tar removing 0.3μm of elements are available. 50 Series Port size (Rc, G, NPT) Features Page W0 to 0-W-P / to Reverse flow function integrated 502 ir ir Series Port size (Rc, G, NPT) Features Page Dust removing 5μm and F00 to 000-W / to tar removing 0.3μm of elements are available. 503 Oil mist Series Port size (Rc, G, NPT) Features Page M00 to 000-W / to ppropriate for measurement / instrumentation, etc. in oil inhibited circuits 50 Regulator Regulator Series Port size (Rc, G, NPT) Features Page R00 to 000-W-P / to pressure gauge embedded type 505 Reverse Series Port size (Rc, G, NPT) Features Page R0 to 0-W-P / to Reverse flow function integrated 50 ubricator ubricator Series Port size (Rc, G, NPT) Features Page 00 to 000-W / to Supplying fine oil mist 507 Pressure gauge General purpose Series Port size Features Page G9D-P G59D-P R/, / Glass lens used 50 Intro

257 Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s unit Index / P. 27 Series variation / P. 250 unit Index / P. 27 Series variation / P. 250 unit Separate type Combination kit K0570 K*0E Filter ir Series Port size Features Page Rc/, / Rc/, 3/ 37 Rc/, 3/, /2, 3/ Filtration rating 5μm 53 3 Rc3/, Rc /, /2, 2 Heavy duty air Series Port size Features Page 33 Rc3/, Float type special drain is used, and large 32 Rc /, /2, 2 volume of drain removed powerfully. 52 Submicron air (tar removal) Series Port size Features Page 37 3, 33, 32, J Rc/, 3/ Rc/, 3/, /2, 3/ Rc3/, Rc /, /2, 2 Rc/ Rc/, 3/, /2 Rc3/ Rc Rc /2, 2 Solid substance such as tar / carbon, etc. up to 0.3μ size removed 99% Micro alescer micro naught type (oil removing) J Series Port size Features Page Rc/, / Rc/, 3/, /2, 3/ unit 7000 Series Rc/, / Rc/, 3/ Rc3/, /2, 3/ Series Port size Features Page Rc/, 3/, /2 Rc3/ Rc Rc /2, 2 Set type of, and lubricator Series Port size Features Page Precision unit Page ir and integrated Reducing oil content by 0.PPMw/w or less Micro alescer odor naught type (odor removing) Series Port size Features Page bsorbs the particles of odor to deodorize the compressed air Series Port size Features Page High precision pressure control is 70 Rc/, 3/ enabled within 0.0 to 0.25MPa range. 53 unit P.5 - Page P Separate type Regulator Regulator Series Port size Features Page 2 0, 2 Rc/, / Rc/, 3/ Rc/, 3/, /2, 3/ Rc3/,, / Rc/2, 2 Rc/, / Rc/ to 3/ Rc3/,, / Relief mechanism integrated Reverse (check valve integrated) Series Port size Features Page Dial air mechanism integrated Series Port size Features Page 02-*C Rc/, 3/, /2, 3/ With dial enabling easy 03-*C Rc3/,, / pressure adjustment 50 0-*C Rc /2, 2 Remote control dial air 02-*C 03-*C 0-*C 0 02 Series Port size Features Page Relief valve Rc/, 3/, /2, 3/ Rc3/,, / Rc /2, 2 Rc/, / Rc/, 3/ With pilot port for pressure setting. Remote control is enable. Series Port size Features Page ubricator ubricator econo-mist type If pressure increases, compressed air released to atmosphere to maintain set pressure Series Port size Features Page 30 Rc/, / Supply fine oil mist (oil fog) E to 3005E Rc/ to 2 ubricator auto-fill type 3002E 3003E Series Port size Features Page Rc/, 3/, /2, 3/ Rc3/, Only installing an oil tank enables automatic lubrication to multiple lubricators. 572 Intro

250 250 unit, / Page Regulator Miniature Regulator Precision (modular design) Series Port size Features Page Series Port size Features Page R-050 Rc/ ppropriate for semiconductor manufacturing

003MPa arge exhaust flow, piston type RP00 Rc/, 3/ appropriate for balancer 50 Series Port size Features Page Simple with small size / Precision (separate type) R00 Rc/, / 5 light weight / improved

5 Series Port size Features Page R500 Push-in joint ø, / space saving design 590 Filter / / Series Port size Features Page W500 Push-in joint ø, / space saving design 592 unit P.53 - Page P.

258 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Components preparation (clean air components) P. unit Index / P. 27 Series variation / P. 250 unit Index / P. 27 Series variation / P. 250 unit, / Page Regulator Miniature Regulator Precision (modular design) Series Port size Features Page Series Port size Features Page R-050 Rc/ ppropriate for semiconductor manufacturing Superior in extremely low pressure / RP00 R-00 Rc/ lines in precise processing fields. 5 Rc/ low pressure zone from 0.003MPa arge exhaust flow, piston type RP00 Rc/, 3/ appropriate for balancer 50 Series Port size Features Page Simple with small size / Precision (separate type) R00 Rc/, / 5 light weight / improved operationability Series Port size Features Page High precision pressure control is Rc/, 3/ enabled within 0.0 to 0.25MPa range. 5 Series Port size Features Page R500 Push-in joint ø, / space saving design 590 Filter / / Series Port size Features Page W500 Push-in joint ø, / space saving design 592 unit P.53 - Page P. - Precision lock manifold lock manifold Series Port size Features Page MNR500 MNR500 Push-in joint ø, Push-in joint ø, lock manifold enables flexible increase and decrease of station no. 59 Inline Inline NEW Series Port size Features Page FS0 Push-in joint ø,, lightweight, space saving inline type FS0 Push-in joint ø, Compatible with both positive FS500 Push-in joint ø,, and negative pressures direct acting precision Series Port size Features Page RJ500 Push-in joint ø, lock manifold lock manifold size of face to face 25mm Min. setting pressure 0.0MPa. Series Port size Features Page 2 MNRJ500 MNRJ500 Push-in joint ø, Push-in joint ø, lock manifold enables flexible increase and decrease of station no. 2 Intro

250 unit Index / P. 27 Series variation / P.

259 Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s unit Index / P. 27 Series variation / P. 250 unit Index / P. 27 Series variation / P. 250 unit Related products Pressure gauge Pressure gauge assembly Series Connection method Features Page G0 O ring sealant ppropriate thin type for components integrated in devices 0 With safety mark / limit mark G0D G50D G5D GD Series Port size Features Page R/, / Easy visual inspection due to green and red zone color indicator NEW R/, / General purpose With green arrow 2 3 Series Port size Features Page G9D, G59D R/, / Glass lens used Pressure gauge for panel mount / pressure gauge with switch Series Connection method Features Page G53D NEW R/, / Panel mount plus 5 G52D NEW R/ Pressure switch plus 7 Miniature / round Series Port size Features Page G29D R/, / Pressure display section ø *custom order 9 G39D R/ Facing practical, *custom order 70 pressure gauge Series Differential pressure measuring range Features Page VGD NEW R/ Green color arrow 7 Differential pressure gauge Page P.59 - Series Differential pressure measuring range Features Page G00--P02 0 to 0.2MPa Service life control of air 73 Index / P. 27 unit Series variation / P. 250 unit and Page Filter Inline clean Series Port size Features Page FCS500 ø, ø, ø R/, R/ High filtration rating precision 0.0μm and 2 removal ratio 99.99% FCS00 FC FC0 ø, ø, ø R/, R3/, Rc/, Rc3/ ø, ø, ø, ø NEW Series Port size Features Page exhaust R/, R/ FC0 R3/, R/2 FC3000 NEW Rc3/, Rc/2 High filtration rating precision 0.0μm and removal ratio 99.99% Provide direct exhaust within a clean room P unit Indicator Moisture indicator Page P.7 - Series Port size Features Page 9 Rc/ Dew point monitor for desiccant type air dryer 7 Regulator RC00 Series Port size Features Page Regulator Rc/, Rc3/, Rc/2 Oil-prohibited specifications / stainless steel body provided Series Port size Features Page 2 Rc/, Rc/ Oil-prohibited specifications Intro

(NR) EVD-00 00R/min. (NR) EVD-00 EVD-30 700R/min. (NR) EVD-3500 00R/min. (NR) EVD-3900 / high-function digital control NEW 73 70 Series Max.

(NR) EV2509 EV0500 EVS500 EV29V 00R/min. (NR) R/min. (NR) R/min. (NR) 0R/min.

260 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Components preparation (clean air components) P. unit Index / P. 27 Series variation / P. 250 ir unit Page P.73 - Digital electro- Series Max. flow rate Features Page EVD-0 0R/min. (NR) EVD-00 00R/min. (NR) EVD-00 EVD R/min. (NR) EVD R/min. (NR) EVD-3900 / high-function digital control NEW Series Max. flow rate Features Page EV2500 EV00 EVS0 EVV 00R/min. (NR) 2R/min. (NR) 2R/min. (NR) 0R/min. (NR) EV2509 EV0500 EVS500 EV29V 00R/min. (NR) R/min. (NR) R/min. (NR) 0R/min. (NR) Medium flow rate type flow rate type Thin type electro Series Port size Features Page MEVT 2 to R/min. (NR) Thin type 77 ir Page P. - Series pplicable Page P ir Proportional Series Control range Features Page 3P 50k to 590kPa Pressure control 2F/3F Max. effective sectional area 3 to mm 2 Flow rate control 00 Controller Series Input potential Features Page PC 0 to V Proportional valve control 0 Interface Series Input signal Features Page PI-EV PI Intro Voltage, current, digital EV ER 0

saving 3 Miniature fine speed type Series Port size Features Page SC-M5-*-F M5 fine adjustment of fine speed cylinder and air operated valve 3

type SC3R Series Port size Features M5, Rc/, /, 3/, /2 Elbow type with push-in joint Medium bore size type Direct piping and type rotation type M5

Series Port size Features Page SC Rc/, /, 3/, /2 For general purpose medium bore size 5 Series Port size Features Page SC Rc3/,, /, /2, 2 For

/2 Push-in joint ø3.2 to ø 2 Universal type with push-in joint Series Port size Features Page SC3U M3, M5, R/, /, 3/, /2 Push-in joint ø3.

Port size Features Page ø., ø, ø, ø, ø, ø In-out line type with push-in joint SC2-N NEW M5, R/, R/, R3/, R/2 Series Port size Features Page ø.

Features Flow control needle valve of no splash grease use vailable for clean room / oil-prohibited specifications 0 0 Page Metering valve with

Features Page Resin body type SW R/, /, 3/, /2 luminum body type Series Port size Features Page S R/ to 2 Damping effect 30d () and over SW-*-H R/,

9-52 S M5 Thread size M5, small type 7 Series Port size Features Page Series Port size Features Page High noise reduction compact type Series Port

261 Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s Page Miniature Series Port size Features Page SC M3, M5, light weight and space saving 3 Miniature fine speed type Series Port size Features Page SC-M5-*-F M5 fine adjustment of fine speed cylinder and air operated valve 3 Miniature in-out type Series Port size Features Page SCD M3, M5 Flow rate control for both intake and exhaust is enabled 3 Direct piping / elbow type SC3R Series Port size Features M5, Rc/, /, 3/, /2 Elbow type with push-in joint Medium bore size type Direct piping and type rotation type M5 to Rc/2 with anti-corrosive stainless steel body. Series Port size Features Page SC Rc/, /, 3/, /2 For general purpose medium bore size 5 Series Port size Features Page SC Rc3/,, /, /2, 2 For general purpose large bore size 5 pplicable for remote central control of actuators Page 0 Series Port size Features Page SC3W M3, M5, R/, /, 3/, /2 Push-in joint ø3.2 to ø 2 Universal type with push-in joint Series Port size Features Page SC3U M3, M5, R/, /, 3/, /2 Push-in joint ø3.2 to ø Stainless steel corrosion-resistant type SC3P Series Port size Features Page arge bore size type ine type with push-in joint SC2 SCD2 Series Port size Features Page ø., ø, ø, ø, ø, ø In-out line type with push-in joint SC2-N NEW M5, R/, R/, R3/, R/2 Series Port size Features Page ø., ø, ø, ø, ø, ø ø, ø, ø Control the flow rate in the air supply and exhaust directions Needle valve, line type with push-in joint Series Port size Features Flow control needle valve of no splash grease use vailable for clean room / oil-prohibited specifications 0 0 Page Metering valve with silencer Series Port size Features Page SMW2 R/, / Equipped with speed 7 FMS M5 and silencer SMW R3/, /2 function 7 bore size type Series Port size Features Page Resin body type SW R/, /, 3/, /2 luminum body type Series Port size Features Page S R/ to 2 Damping effect 30d () and over SW-*-H R/, 3/, /2 High noise reduction / small bore size 0 arge flow rate small bore size / resin body type SW-*S SM P.27 - Page P.9-52 S M5 Thread size M5, small type 7 Series Port size Features Page Series Port size Features Page High noise reduction compact type Series Port size Features Page Push-in type Miniature type R/,/ R3/ SW-H R/, 3/, /2 Series Port size Features Page M3, M5 Damping effect 25 to 30d () and over Damping effect 0d () and over Damping effect d () and over Damping effect d () and over 7 SW-* R/, 3/ Damping effect 30d () and over 2 3 Series Port size Features Page 5 Intro

9 NEW Shuttle valve Series Port size Features Page SHV2 Rc/ to check valve with push-in joint CH Series Port size Features Page M5, ø, ø 900 90 Series Port size Features Page CHV2 Rc/ to /2 Perfectly

FPV uxiliary valve lock valve Series Port size Features Page M5, R/, /, 3/, /2 Threshold sensor PWS M5, R(Rc)/, /, 3/, /2 Multiple signals can be selected. / space saving inline type Page P.

size Features Page M3 to R(Rc)/ For tube ø3.2,, 922 Series Port size Features Page GW M3 to R(Rc)/2 For push-in joint ø3.

262 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Pneumatic auxiliary components P.9 Quick exhaust valve Series Port size Features Page QE ø, ø / space saving inline type 9 QEV2 Rc/ to Increased exhaust speed of cylinder, etc. 9 NEW Shuttle valve Series Port size Features Page SHV2 Rc/ to check valve with push-in joint CH Series Port size Features Page M5, ø, ø Series Port size Features Page CHV2 Rc/ to /2 Perfectly preventing compressed 90 air from flowing backward. FPV uxiliary valve lock valve Series Port size Features Page M5, R/, /, 3/, /2 Threshold sensor PWS M5, R(Rc)/, /, 3/, /2 Multiple signals can be selected. / space saving inline type Page P.9 - Cylinder can be stopped at a random position and freely mounted Series Port size Features Page Detect exhaust pressure near stroke ends with a high accuracy NEW 90 9 Miniature joint F Series Port size Features Page M3 to R(Rc)/ For tube ø3.2,, 922 Series Port size Features Page GW M3 to R(Rc)/2 For push-in joint ø3.2 to 930 / stainless steel type Series Port size Features Page Flame resistant resin and ZW M5 to R/2 stainless steel push-in joint 959 / mini-type Series Port size Features Page GWJ M3 to R(Rc)/ For compact push-in joint ø3.2 to 9 NEW / stainless steel type Series Port size Features Page Push-in joint with stainless ZSP M5 to R/2 steel metal body. SUS303 or equivalent material used. 93 Female joint / stainless steel type Series Port size Features Page Tightening method using ZJ R/ to R/2 stainless steel materials 93 Tightening type joint Female joint / joint MJ J RJF Series Port size Features Page R(Rc)/ to /2 Rc/, /, 3/, /2 Female joint 99 NEW Series Port size Features Page M5, Rc/ High rigidity and low sliding resistance achieved with built-in bearings Number of circuits:,,,, 97 Rotary joint Page P.9 - Intro

ø.2 M3, M5, / Extra-fine air tube with increased flow rate Dedicated push-in joint 9 9 type (push-in joint) NEW Series ore size Features Page EH-502- ø.ø.2 specifications incorporate high corrosion

263 Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s Pneumatic auxiliary components P.25 Fiber tube ntistatic type (push-in joint) Series ore size Features Page UP-902--F PG ø.ø.2 M3, M5, / Extra-fine air tube with increased flow rate Dedicated push-in joint 9 9 type (push-in joint) NEW Series ore size Features Page EH-502- ø.ø.2 specifications incorporate high corrosion resistant materials 9 CG M3, M5, / type dedicated push-in joint 990 Flame resistant type (push-in joint) NEW Series ore size Features Page UP-92--*-SR RG ntistatic type Series ore size Features Page UP-92--F PTN2 ø.ø.0 M5, / ø.ø.0 M3, M5, /, ø3.2, ø, ø Flame resistant resin is provided Flame resistant type dedicated push-in joint dedicated for extra-fine air tube Dedicated joint NEW ntistatic tube Series ore size Features Page UP-9***-F/F2 3.2,,,,, Tube (F. U. KX. SR) dhesion prevention tube of static electricity and dirt 09 Series ore size Features Page F,U,NU,KX,SR Page P.0 - ø3.2 to ø Soft nylon, urethane tube Intro 22

3 - PVP-R (donut shaped) PVP-C (round) PVP-S (square shape) Series Features Page Precision suction incorporates multi-porous sintered fluorine resin with 0% porosity 3 NEW Page P.

264 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. components P. VF00 VF3000 VF000 Rc/, / Rc/, 3/ Rc3/, /2 Page P. - Series Port size Features Page ong service life, and moisture can be removed. 22 suction Page P.3 - PVP-R (donut shaped) PVP-C (round) PVP-S (square shape) Series Features Page Precision suction incorporates multi-porous sintered fluorine resin with 0% porosity 3 NEW Page P.25 - Series Port size Features Page and large flow rate VR00 /, 3/ 2 (0R/min.(NR)) Series Features Page FU2-7D (socket and spigot type) FU2-M (full thread type) FU2-D (socket and spigot type) FU2-M (full thread type) Page P.3 - Stable pressing force, low particle generation and long life are realized with original cushioning mechanism and magnetic spring Intro

Products variation Variation System Index Selection guide Selection guide Selection guide

component Sensors s CC-79 components SEVCS Use for transfer of various products and parts,

ejector unit pad Related vacuum products NEW New models and variations added to lineup!

road series of models and variations enable use in different fields and applications.

265 Products variation Variation System Index Selection guide Selection guide Selection guide Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s CC-79 components SEVCS Use for transfer of various products and parts, transfer, movement, insertion, positioning and packaging, etc. ejector unit pad Related vacuum products NEW New models and variations added to lineup! Wide variation meeting different applications! road series of models and variations enable use in different fields and applications. design components save space. Unit and module The core vacuum ejector and vacuum unit is designed with unitization and modularization to save space and facilitate use. Intro 2

59 - Pressure switch Series Port size Features Page PE Rc/ Setting accuracy: within 0.02MPa Setting range: to 0.MPa Pressure can be set over a wide range CPE Rc/ from 0.05 to 0.

P.9 - Pressure switch Series Pressure range Features Page PPE -0kPa to 90kPa Sensor-amplifier integrated type without display miniature easy installation 90 P -0kPa to 90kPa

90kPa -0kPa to 500kPa 0 to 7MPa Standard type, high-function type available Twin display shows pressure's "Current value" and "Setting value".

266 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Sensors P.57 Pressure sensor / coolant Pressure sensor / coolant Pressure sensor / coolant pressure switch Page P.59 - Pressure switch Series Port size Features Page PE Rc/ Setting accuracy: within 0.02MPa Setting range: to 0.MPa Pressure can be set over a wide range CPE Rc/ from 0.05 to 0.MPa to air 2 52 Reed type small pressure switch Series Port size Features Page PS-W Rc/ flange Space saving and wide pressure range Pressure sensor / coolant nic pressure switch Page P.9 - Pressure switch Series Pressure range Features Page PPE -0kPa to 90kPa Sensor-amplifier integrated type without display miniature easy installation 90 P -0kPa to 90kPa Sensor-amplifier integrated type without display 9 PPX NEW PPD3 PPD3-S PPD PPD-S PPD- PPS2 CPD -0kPa to 00kPa -0kPa to 90kPa -0kPa to 90kPa -0kPa to 90kPa -0kPa to 90kPa -0kPa to 90kPa -0kPa to 500kPa 0 to 7MPa Standard type, high-function type available Twin display shows pressure's "Current value" and "Setting value". 3 color digital display Sensor-amplifier integrated with display 30* Stainless steel diaphragm sensor type Sensor-amplifier integrated with display 2* Stainless steel diaphragm sensor type With protective OX Sensor-amplifier integrated type / separated type with display For coolant / other liquid sensor-amplifier integrated with display Intro 25

7 ø0.5, 0.7 Discrete Manifold type (2 stations to 5 stations) 2 7 TPS MTPS UTPS Series Measuring range Features Page 0 to 0.2MPa ±3%F.S. Pressure sensor ø0.5, 0.7 ø0.5, 0.7,.0 ø0.3 ø0.

5 - Contact confirmation switch (gap switch) Close contact confirmation switch Solenoid valve with needle, integrated general purpose unit type Discrete Manifold type (2 stations to 5 stations)

267 Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s Pressure sensor Pressure sensor Pressure sensor nic differential pressure switch Page P.5 nic differential pressure switch DP00 GPS2 MGPS2 UGPS2 HPS MHPS UHPS Series Orifice Features Page ø0.5, 0.7 ø0.5, 0.7 Discrete Manifold type (2 stations to 5 stations) 2 7 TPS MTPS UTPS Series Measuring range Features Page 0 to 0.2MPa ±3%F.S. Pressure sensor ø0.5, 0.7 ø0.5, 0.7,.0 ø0.3 ø0.3 ø0.3 ppropriate for preventive maintenance of s Pressure sensor / cutting tool broken detecting switch Page P.5 - Contact confirmation switch (gap switch) Close contact confirmation switch Solenoid valve with needle, integrated general purpose unit type Discrete Manifold type (2 stations to 5 stations) Solenoid valve with needle, integrated general purpose unit type Series Orifice Features Page ø0.5, 0.7,.0 ø0.5, 0.7,.0 Discrete Manifold type (2 stations to 5 stations) 90 Cutting tool broken detecting switch Solenoid valve with needle, integrated general purpose unit type 5 9 Series Orifice Features Page Switching element Series Fixed orifice diameter Features Page P Without to.mm Stable detection by ultra low pressure 2 Switching element, manifold Series Element set Features Page Depending on manifold P3 2, 3,, 5 2 is compact. Detection nozzle Series Nozzle port size Features Page P- P-D P-VS P-G P switch P Pressure sensor ir sensor (PE s) DPS 0.3 to 2.0mm, 2mm mm, 2, 3.2mm Gauge ack pressure type Reflection type Facing type 29 Series Features Page PE switching element and electric wiring connection terminal, piping terminal or power circuit are stored in box. 32 SEPE switch Series Differential pressure Features Page Series K-005 Series P 5kPa Related products () Fine differential pressure switch combines bridge circuit and electric comparison circuit Features Related products when using air sensor Related products (piping instrument) Features Related products when using air sensor Page P. - 0 Page 2 Page 3 Intro 2

FSM2-*0 FSM2-*050 FSM2-*0 FSM2-*0 FSM2-*500 FSM2-* FSM2-* FSM2-*50 FSM2-*2 /high speed, extremely small flow indicator type/analog output type FSM-H NEW Series Flow rate range Features Page

0 to 500/-500 to 500R/min. 0 to 00/-00 to 00R/min. 0.25 to 5mR/min. 0.5 to mr/min. 2.5 to 50mR/min. 5 to 0mR/min. Page P.7 - outstanding Quick response Needle valve integrated type.

268 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. Sensors P.57 Flow controller size FSM2, FSM Miniature, high speed response display integrated/display separated type FSM2 NEW Series Flow range Uni-direction / i-direction Features Page FSM2-*005 FSM2-*0 FSM2-*0 FSM2-*050 FSM2-*0 FSM2-*0 FSM2-*500 FSM2-* FSM2-* FSM2-*50 FSM2-*2 /high speed, extremely small flow indicator type/analog output type FSM-H NEW Series Flow rate range Features Page FSM-H-*-005M FSM-H-*-0M FSM-H-*-050M FSM-H-*-0M 0 to 500/-500 to 500mR/min. 0 to 00/-00 to 00mR/min. 0 to 2.00/-2.00 to 2.00R/min. 0 to 5.00/-5.00 to 5.00R/min. 0 to.00/-.00 to.00r/min. 0 to.0/-.0 to.0r/min. 0 to 50.0/-50.0 to 50.0R/min. 0 to 0.0/-0.0 to 0.0R/min. 0 to 0/-0 to 0R/min. 0 to 500/-500 to 500R/min. 0 to 00/-00 to 00R/min to 5mR/min. 0.5 to mr/min. 2.5 to 50mR/min. 5 to 0mR/min. Page P.7 - outstanding Quick response Needle valve integrated type. Display separator available. Twin display/bi-color display function Panel mounting possible. ny installation attitude. Detect fine flow rates of mr/min. or less at a high speed. Perfect for leakage inspections and pinhole inspection Flow controller size FCM Standard model Series Flow rate range Features Page FCM-9500 FCM-000 FCM-0002 FCM-0005 FCM-00 FCM-00 FCM-0050 FCM-00 FCM-9500 FCM-000 FCM-0002 FCM-0005 FCM-00 0 to 0.5R/min. 0 to R/min. 0 to 2R/min. 0 to 5R/min. 0 to R/min. 0 to R/min. 0 to 50R/min. 0 to 0R/min. ow pressure differential model, high-speed, high-function flow controller. pplicable flow: ir, nitrogen, argon, oxygen, city gas, methane, propane, hydrogen, helium 37 Series Flow rate range Features Page 0 to 0.5R/min. 0 to R/min. 0 to 2R/min. 0 to 5R/min. 0 to R/min. Page NEW P.35 - Control the flow of combustion gases having a low supply pressure, such as for burner flame control. 37 Miniature analog output type/switch output type FSM-V Series Flow rate range Features Page FSM-V-*-R0005 FSM-V-*-R00 FSM-V-*-R0050 FSM-V-*-R00 FSM-V-*-R0500 FSM-V-*-R to +0.05R/min. -0. to 0.R/min to 0.5R/min. - to R/min. -5 to 5R/min. - to R/min. Miniature inline FSM-VFM Easily measure forward and reverse flows. ppropriate for detection control of vacuum suction and vacuum break 30 Series Flow rate range Features Page Inline dedicated for FSM-VFM ø., ø, M5 miniature and space 32 saving FSM series Intro 27

(normal) 0 to 00R/min.(normal) 0 to 000R/min.(normal) 00 to 000R/min.(normal) 00 to 000R/min.(normal) Integrated display can be turned to match mounting posture. Safe design can withstand water drops.

05 - Dock and to this unit type with module connections. 22 Page P.5 Karman's vortex type Series Flow measuring range Features Page WFK3000 0.5 to 0, / component.5 to R/min. integrated type 0.0 to.

Standard type Modular design type arge flow rate type 2 for compressed air (FUEREX) Display separate type PFD PFD-50 PFD-2 PFD-2 PFD-02 PFD-02 PFD-3 PFK-50 PFK-2 PFK-2 PFK-02 PFK-02 Series Flow rate

269 Products variation Selection guide Variation Selection guide System Selection guide Index Selection guide Components preparation/ clean air components Pneumatic auxiliary components component Sensors s for compressed air (FUEREX) Display integrated type PF-F PF500F PF00F PF00F PF000F PF000F PF000F PFU500F PFU00F PFU00F Series Flow rate range Features Page 25 to 500R/min.(normal) 50 to 00R/min.(normal) 0 to 00R/min.(normal) 0 to 000R/min.(normal) 00 to 000R/min.(normal) 00 to 000R/min.(normal) Integrated display can be turned to match mounting posture. Safe design can withstand water drops. Display integrated type modular design type PFU-F Series Flow rate range Features Page 25 to 500R/min.(normal) 50 to 00R/min.(normal) 0 to 00R/min.(normal) Page P.05 - Dock and to this unit type with module connections. 22 Page P.5 Karman's vortex type Series Flow measuring range Features Page WFK to 0, / component.5 to R/min. integrated type 0.0 to.0, WFK to 27R/min..0 to.0, WFK to 27R/min. to 50, to 0, WFK to 0R/min. Standard type Modular design type arge flow rate type 2 for compressed air (FUEREX) Display separate type PFD PFD-50 PFD-2 PFD-2 PFD-02 PFD-02 PFD-3 PFK-50 PFK-2 PFK-2 PFK-02 PFK-02 Series Flow rate range Features Page 25 to 500R/min.(normal) 50 to 00R/min.(normal) 0 to 00R/min.(normal) 0 to 000R/min.(normal) 00 to 000R/min.(normal) 00 to 000R/min.(normal) Display separate type tester kit PFK Easily detect the flow of compressed air with total accuracy ±%F.S. and easily measure forward and reverse flows. 0 Series Flow rate range Features Page 25 to 500R/min.(normal) 50 to 00R/min.(normal) 0 to 00R/min.(normal) 0 to 000R/min.(normal) 00 to 000R/min.(normal) Page Measuring component with air flow rate immediate flow measuring possible in kit field NEW P.3 - Intro 2

270 Selection guide ccording to products variation NEW Select products according to appearance and features. indicates models added with Version 7. s P. (gamma ) Detector mechanical valve Series Port size Features Page MS ø, Rc/, large flow Medium mechanical valve Series Port size Features Page MM ø, Rc/ No intermediate bleeding 0 arge mechanical valve MV Series Port size Features Page ir timer Series Working pressure range Features Page RTD to 0.MPa Delay time MX. 30 seconds 2 Pressure switch Series Working pressure range Features Page PE- 0.2 to 0.7MPa ø nylon tube used for piping 27 ir light Series Working pressure range Features Page -* 0.05 to 0.MPa ø nylon tube used for piping 27 air light Rc/ Circuit device Page P.0 - Pressurized from 3 directions, and used as NO, NC,or distributor Page P. - Series Working pressure range Features Page (gamma ) PC Series Type Page PS* PR*,P* PZU P* P*,PZM PC Relay type Relay type sub-base Integrated type (logic element) ine type (logic element) (gamma ) Signal controllers PXV PC* PXP PR*,PX* PX-M Z2,Z PX- PXC PXC PXC ZCK Page P.29 - Page P.3 - Series Type Page ir light ir counter Foot switch Element and sensor Pushbutton switch, switch body (set screw type) Switch head Pushbutton switch, switch body (separate type) Miniature limit switch limit switch imit switch Rotary head lever actuator S-* 0.25 to 0.MPa Insert into ø push-in joint 2 Intro 29

271 Guide in model change The series listed in this catalog have undergone a model changeover with this new series. Consider using the new series when making a selection. Refrigerating GX30, GX50, GX0 Old Series Refrigerating GX30D, GX30, GX50, GT5000 New Series Medium main line F00 Old Series Medium main line F00 New Series Quick exhaust valve QEV Old Series Quick exhaust valve QEV2 New Series Shuttle valve SHV Old Series Shuttle valve SHV2 New Series for compressed air PF-D Old Series for compressed air PFD New Series size FSM Old Series size FSM2 New Series Intro 30

Guide in recommended substitute part Production of the following series listed in this catalog has been discontinued. Please consider using the recommended substitute part when making a selection.

272 Guide in recommended substitute part Production of the following series listed in this catalog has been discontinued. Please consider using the recommended substitute part when making a selection. Discontinued components devices System Components (CatalogNo.CC-79) Recommended substitute part components SEVCS ejector unit pad Related vacuum products Production of the following series listed in this catalog has been discontinued. Please consider using the recommended substitute part when making a selection. Discontinued nic / nozzle flapper type ER0,0,3,350,30 Discontinued Refrigerating air dryer RD (M) 0 to Refrigerating air dryer RD (M) 03 to Refrigerating air dryer RD (M) Refrigerating air dryer GX3 (E) to (E) Refrigerating air dryer GX (E) to 37 (E) Refrigerating air dryer GX003 to 0 Refrigerating air dryer GX50 Series Refrigerating air dryer GX3 to 3 Refrigerating air dryer GX35 to 337 Refrigerating air dryer GK30 series type air dryer to 32-*C utomatic drain D3002E Precision control dryer RD-*PRT Series Refrigerating air dryer RD7000 Series Wilco-matic air 0 Interface valve / detector R-IF Circulation type water cooling refrigerator HYW Series Oil indicator 509,5 Recommended substitute part (Catalog) - EV/EVD Series Recommended substitute part Refrigerating air dryer GX50 Series Refrigerating air dryer GK30D Series Refrigerating air dryer GK30 Series Refrigerating air dryer GK50 Series (No substitution products for E type) Refrigerating air dryer GX50Series (No substitution products for E type) Refrigerating air dryer GX50Series (according to conditions) Refrigerating air dryer GX50 Series Refrigerating air dryer GK30D Series Refrigerating air dryer GX30 Series Refrigerating air dryer GK30D series type air dryer SHD series utomatic drain D3003 No substitution products Intro 3

273 Icons To simplify use of this catalog, we have prepared icons for each item, indicated in corresponding sections. Mark Meaning Details CD mark in dimension drawings indicates that CD data is available. Intro 33 EU standard-compliant product Intro 35 RoHS-compliant product Intro 37 Intro 32

CKD nic Catalog Guide (CD DT) Using and ordering the nic Catalog The CKD nic Catalog is a collection of CD drawings including dimensions drawings (CD data) related to components and control

274 CKD nic Catalog Guide (CD DT) Using and ordering the nic Catalog The CKD nic Catalog is a collection of CD drawings including dimensions drawings (CD data) related to components and control components. This data is provided on CD-ROM to aid in CD design. Please contact your CKD Sales person or our nearest sales office to order this CD. Indicate the following information when placing your order: CD software name and version 2 OS name There are three types of CD-ROM depending on the recorded CD software and OS type. e sure to indicate the name of the CD software and OS you are using. Compatible CD types DXF 2 MICRO CDM Ver.9 3 DMNDOS (MICRO CDM DOS ver.) Downloading from the internet DXF data an be used from CKD website Component Products > Catalog/CD data CKD nic Catalog Contents The following data and software are recorded on CD-ROM "CD DT 0". Pneumatic component and control component figure data (DXF / MICRO CDM / DMNDOS) REDME. TXT (Use and precautions) ist.xls (DXF CD data list) Kensaku.exe (CD drawing search program) ist_mc.xls (MC CD data list) Intro 33

275 CKD nic Catalog Guide (CD DT) How to use nic Catalog Operating the CD Confirmation before use nic Catalog file list Contact the CD maker for details on operating CD - Reading files Creating graphics Usable data formats Read the REDME.TXT file on the CD-ROM before starting use. Information on How to use the CKD nic Catalog Precaution For version information, confirm "REDME.txt" contained in CD-ROM. Refer to ist.xls ist_mc.xls on the CD-ROM for the latest files of nic Catalog files. Searching the nic Catalog Filename Searching from this catalog CD data is available for items with a CD mark in dimensions. Searching from CD-ROM When the CD-ROM is set in the drive, the CD Data Search Software will start up, and the search screen shown on the left will open. (*) The required CD data can be searched and saved onto the hard disk. *: If the automatic play function is not set, start up with Kensaku.exe on the CD- ROM. This software does not need to be installed. Intro 3

CE Marking CKD supports our customer's machine products CE Marking with a wide range of EU Standard-compatible components. : Indicated on EU Standard-compatible products.

276 CE Marking CKD supports our customer's machine products CE Marking with a wide range of EU Standard-compatible components. : Indicated on EU Standard-compatible products. CE Marking The CE Marking attests that the product satisfies all EC Directive requirements to which it is subject. CE Marking is a passport for products to the EU Products with the CE Marking can be freely distributed within the EU. Machines exported to the EU must comply with Machinery Directives, EMS Directives, and ow-voltage Directives, etc. In principle, CE marking must be indicated on the final product marketed and, basically, built-in components do not require CE Markings. If compliance of built-in parts (CKD with EU Standards can be verified, CE Marking of the final product (customer's machine product) can be easily obtained. Intro 35

277 / / P P CE Marking Details on EC Directives CKD's main components, such as the solenoid valve, sensors, and direct drive actuator, must comply with the Directives below. Many models already comply with EU Standards. Directive Requirements pplication Machinery Directives (9/392/EEC) EMC Directive (9/33/EEC) Requirements for Machine Safety Measures against electromagnetic interference emission (EMI emission) and electromagnetic interference elimination performance (EMS immunity). Machine having a drive section Components such as solenoid valves are not subject to this compliance, but the user obtains CE Marking certification easier by complying with Standards. Devices that generate electromagnetic interference or that are affected by electromagnetic interference Solenoid valves composed of a simple solenoid are not affected by electromagnetic interference, but the user can obtain CE Marking certification easier by complying with Standards /5R ow-voltage Directive (73//EEC) Safety regarding electricity, such as electrical shock Machine operating at 50 to 00 VC and 75 to 00 VDC /5R Simple Pressure Vessel Directive (7/0/EEC) Safety regarding vessel leakage and explosions Welded vessel having sum (PV/S) of maximum working pressure and volume exceeding 50 bar/liter The CKD air tank (T type) does not comply with this directive, and cannot be exported to the EU. total of 2 countries require CE Marking compliance, including 25 European Union (EU) countries and three European Free Trade ssociation (EFT) countries. EU members EFT members U.K., Ireland, France, elgium, Denmark, Netherlands, Italy, Germany uxembourg, Portugal, Spain, Greece, Sweden, Finland, ustria, Poland, Hungary, Czech, Slovakia, ithuania, atvia, Estonia, Slovenia, Malta, Cyprus (Only Southern Republic of Cyprus) Norway, Iceland, iechtenstein (Excluding Switzerland) CKD EU standard-compliant Parts Depending on specifications and detailed model combinations, certified parts may not be available. Contact your CKD Sales Representative for details. Certified part model: Indicated with-st at the end of the model. Refer to the CKD web site for the latest information. Home Page ddress Intro 3

278 CKD RoHS Compliance CKD's theme is to develop environmentally friendly products. RoHS is the abbreviation for Restriction Of the use of certain Hazardous Substances in electrical and electronic equipment. This is the directive prohibiting use of certain hazardous substances issued by the EU. CKD started compliance with RoHS Directives on July, 0. RoHS-compliant products reduce the load on the environment and ensure distribution throughout the EU. CKD's Environment Policy ased on the CKD Environment Policy enacted in 0, CKD has been promoting company-wide environment management activities to protect the global environment. CKD's Environment Policy Development of sales of environment load reducing products 2 Reduction of environment-polluting substances 3 Promotion of energy conservation and resource reduction Waste reduction Intro 37

279 CKD RoHS Compliance CKD's compliance with RoHS Products subject to RoHS Directions fall within the pplicable scope in, below. While CKD's components are not included in this applicable range, we have positioned the reduction of environment-polluting chemical s as high-priority. From July 0, we have sequentially enforced RoHS Compliance of our key products. These products are indicated with the "RoHS-compliant" mark in this manual. Note: Stock in distribution is being sequentially changed to RoHS Compliance. Technical Data Enactments of WEEE Directive and RoHS Directive EU Directives related to Waste Electrical and nic Equipment (WEEE) and Restriction on Hazardous Substances Directive (RoHS) have been enacted by the EU. WEEE Directive (Directive 02/9/EC of 27 January 03 on waste electrical and electronic equipment) This directive eliminates waste electrical and electronic equipment and reduces waste through reuse and recycling, etc. RoHS Directive (Directive 02/95/EC of 27 January 03 on the restriction of the use of certain hazardous substances in electrical and electronic equipment) This directive assimilates laws related to limiting the use of hazardous substances in electrical and electronic devices set forth by each EU member state, contributes to the protection of human health, and provides sufficient means for processing and recycling waste electrical and electric products. pplicable scope arge household appliances 2 household appliances 3 IT and telecommunications equipment Consumer equipment Details of Directive 5 ighting equipment Electric tools, excluding large fixed industrial tools 7 Toys, leisure and sporting goods Vending machines Restricted substances ead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (P) Polybrominated diphenyl ether (PDE) Import of electrical and electronic equipment containing the above substances into the EU was prohibited as a rule from July, 0. Intro 3

280 Selection guide ccording to variation Copper and PTFE free Pneumatic components for raun tube manufacturing lines. C**00-W -TP C**-W -TP C**-W -TP C**30-W -TP C**0-W -TP C**50-W -TP Series / model Port size Remarks Page combination W.. combination combination F.M.R. combination W.M. combination R.M. combination Rc/ to Rc Rc/ to Rc Rc/ to Rc Rc/ to Rc Rc/ to Rc Rc/ to Rc Filter / () C*00-W C*070-W W*000-W -TP W*0-W -TP F*000-W F.M. combination F.F.M. combination Filter / Reverse / ir Rc/ to Rc Rc/ to Rc Rc/ to Rc Rc/ to Rc Rc/ to Rc Copper and PTFE free as standard Copper and PTFE free as standard Copper and PTFE free as standard (Refer to model no.) M*000-W Oil mist Rc/ to Rc Copper and PTFE free as standard (Refer to model no.) 50 R*000-W -TP R*0-W -TP Regulator Reverse Rc/ to Rc Rc/ to Rc *000-W ubricator Rc/ to Rc Copper and PTFE free as standard 507 Pneumatic auxiliary components V*000-W G9D -P G59D -P F*3 SC-* SC3W-P SC3U-P SC-P SW S F GW -P F.U.NU.KX.SR Shut-off valve General purpose pressure gauge General purpose pressure gauge Exhaust cleaner Miniature speed, elbow type, universal type Miniature joint Tube Rc/ to Rc/2 R/ R/ Rc3/ to Rc2 M3, M5 M3 to R/2 M3 to R/2 Rc/ to Rc/2 R/ to R/2 R/ to R M3 to Rc(R)/ M3 to R/2 ø3.2 to ø Copper and PTFE free as standard Copper and PTFE free as standard Copper and PTFE free as standard Copper and PTFE free as standard Copper and PTFE free as standard Copper and PTFE free as standard Copper and PTFE free as standard Sensors P*0-W -P PPD pressure switch (Reed type small pressure switch) nic pressure switch (Pressure switch) Rc/ to Rc Rc/ Copper and PTFE free as standard 0 0 Intro 39

281 Products variation Variation System Index Selection guide Selection guide Selection guide Selection guide Copper and PTFE free Ozone proof room specifications Elector components (proportional pressure controls) components Selection guide Filter / () Pneumatic auxiliary components Sensors Ozone proof W*000-W -P W*0-W -P F*000-W R*000-W -P R*0-W -P R500 -P MNR500 V*000-W 37 -P 00-P -P 70 -P 0 -P 2-P P-P SC3W-P SC-X SC3R-P SM SW F -P GW -P ZW -P ZJ F.U.KX VF P*0-W Series / model Port size Remarks Page Filter / Reverse / ir Regulator Reverse lock manifold Shut-off valve ir ir Regulator Regulator Precision Precision unit Reverse Reverse ir, elbow type medium bore size type, direct piping / elbow type Miniature silencer Miniature joint stainless steel Series Female joint stainless steel Series Tube pressure switch (Reed type small pressure switch) Pressure switch P000-W Note: Refer to " Ozone proof " on 5 for details. Rc/ to Rc/2 Rc/ to Rc/2 Rc/ to Rc Rc/ to Rc/2 Rc/ to Rc Push-in joint ø, ø Push-in joint ø, ø, ø Rc/ to Rc/2 Rc/, Rc3/ Rc/, Rc3/ Rc/, Rc/ Rc/, Rc3/ Rc/, Rc3/ Rc/, Rc3/ Rc/, Rc3/ Rc3/,, /2 Rc/2 M3 to R/2 Rc/ to Rc/2 M5 to Rc/2 M3, M5 Rc/ to Rc/2 M3 to Rc/ M3 to R/2 M5 to R/2 Rc/ to Rc/2 ø3.2 to ø Rc/ to Rc/2 Rc/ to Rc/2 Rc/ to Rc/2 s standard s standard s standard s standard Custom order s standard s standard s standard s standard s standard s standard s standard Intro 0

282 Selection guide ccording to variation room specifications Particle occurrence prevented components for clean room Filter / () Pneumatic auxiliary components W*000-W -P7* W*0-W -P7* F *000-W -P7* M*000-W -P7* R *000-W -P7* R *0-W -P7* FCS500 -P9* FCS00-P9* FC RC00 -P90 / -P0/P90 / -P0/P90 2-P0/P9* RP*000 -P70 G9D- -P70/P9* G59D- -P70/P9* G00- -P90 F -P0 GW -P7*/P0 GWJ-P7*/P0 ZW -P0 ZW -P90 SC3R-P7* SC3W-P7* SC-P7* SC2-P7* SCD2-P7* SC2-N-P7*/P0 CH -P7* CHV2 -P7*/P0 2QV -P70 UP -92 -P0 UP -**** -P0 -F NU Series / model Port size Remarks Catalog No./page Filter Rc/ to Rc/2 Reverse / Rc/ to Rc/2 ir Rc/ to Rc Oil mist Rc/ to Rc Regulator Rc/ to Rc Reverse / Rc/ to Rc Inline clean ø to ø, Rc/, Rc/ Inline clean ø to ø, Rc/, Rc3/, Rc/, Rc3/ * exhaust ø to ø, R/ to R/2, Rc3/, Rc/2 C-033S Rc/ to Rc/2 ir (5μm) Rc/ to Rc3/ Micro alescer (0.μm) Rc/ to Rc3/ Regulator Rc/, Rc/ Precision Rc/, Rc3/ General purpose pressure gauge R/ General purpose pressure gauge R/ Differential pressure gauge Rc/ Miniature joint M3 to Rc/ M3 to R/2 size joint M3 to Rc (R)/ stainless steel type M3 to R/2 Tightening joint stainless steel series R/ to R/2, direct piping / elbow type M5 to Rc/2, elbow type M3 to R/2 medium bore size type Rc/ to Rc/2 line type ø. to ø * (push-in joint) C-033S In/out speed, inline type ø. to ø (push-in joint) Needle valve (push-in joint) ø to ø check valve with push-in joint M5, ø, ø (check valve) Rc/ to Rc /2 Quick exhaust valve ø to ø, R/ to R/2 Fiber tube ø. ntistatic tube ø3.2 to ø Urethane tube ø3.2 to ø * Refer to catalog No. C-033S Pneumatic components for clean room specifications. Intro

283 Products variation Variation System Index Selection guide Selection guide Selection guide Selection guide Copper and PTFE free Ozone proof room specifications Elector components (proportional pressure controls) components Selection guide room specifications Particle occurrence prevented components for clean room Sensors - Series / model Port size Remarks Catalog No./page PPD3 -P7*/P* PPD3 -S -P7*/P*/P9* nic pressure switch Rc/, ø push-in joint PPE -P70/P0 electronic pressure switch R/, ø push-in joint PPS2 -P70/P0 nic pressure switch Rc/ PPS2 -P70/P0 nic pressure controller Rc/ * FSM2 -P70/P0 size ø., ø, ø, Rc/, Rc/, M5 C-033S EV00 -P7*/P* Rc/ EV0000 -P7*/P* M5 EVS -P7*/P* M5 EVV-P70 Rc/ MEVT -P7*/P* Thin electro ø, ø push-in joint * Refer to catalog No. C-033S Pneumatic components for clean room specifications. Elector components (proportional pressure controls) Proportional pressure control is the generic name for the electronic pressure application components. Pressure control Series / model Features Remarks Page EVD-*00 EVD-3*00 EV00 EVV EV0000 EVS MEVT 3P 2F 3F PC PI PPS2 controller Digital electro- Digital electro- Thin electro Proportional Proportional Proportional Controller Interface Pressure controller Max. flow rate 00 (R/min.) Max. flow rate 00 (R/min.) Max. flow rate 00 (R/min.) Max. flow rate 0, 0 (R/min.) Max. flow rate 2, (R/min.) Max. flow rate 2, (R/min.) Max. flow rate 2, (R/min.) Max. effective sectional area 5 to mm 2 Max. effective sectional area 3 to mm 2 Pressure control Pressure control Pressure control Pressure control (vacuum) Pressure control Pressure control Pressure control Pressure control Flow rate control Flow rate control Dedicating control component for proportional valve Interface for proportional valve Controller for electro s Pressure detection PPS2 switch P PPE PPD PPD3 nic pressure switch (Pressure switch) Pneumatics / vacuum Pneumatics / vacuum Pneumatics / vacuum Pneumatics / vacuum Pneumatics / vacuum Sensor-amplifier integrated type / separated type with display Sensor-amplifier integrated type without display Sensor-amplifier integrated type without display Sensor-amplifier integrated type with display Sensor-amplifier integrated type / separated type with display Intro 2

284 Selection guide ccording to variation components Pneumatic components for vacuum equipment. Sensors Filter / Series / model VF00,3000,000 K-005 VR00 EVV P DPS PPS2 P PPE PPD PPD3 Port size / characteristics Rc/ to Rc/2 Rc/, 3/ Max. flow rate 0 / 0 (mm 2 ) Refer to the " System Components SEVCS" (No. CC-79) catalog for details on the vacuum ejector/vacuum unit, vacuum pads and vacuum related components. ir sensor SEPE switch nic pressure switch (Pressure switch) Pneumatics / vacuum Pneumatics / vacuum Pneumatics / vacuum Pneumatics / vacuum Pneumatics / vacuum Remarks Catalog No. / Page Pressure control (vacuum) Sensor-amplifier integrated type / separated type with display Sensor-amplifier integrated type without display Sensor-amplifier integrated type without display Sensor-amplifier integrated type with display Sensor-amplifier integrated type / separated type with display CC Intro 3

285 Products variation Variation System Index Selection guide Selection guide Selection guide Selection guide Copper and PTFE free Ozone proof room specifications Elector components (proportional pressure controls) components Selection guide Intro

286 Selection guide ccording to Conditions are set easily even by beginners. Selecting the selection method In this section "Selection 3", the optimum model is selected from predetermined conditions. Conditions When bore size and cylinder operation speed are determined. When load value and operation time are determined. System selection Selecting from cylinder bore size and operation speed Intro System selection 2 Selecting from load value and operation time Intro 57 Intro 5

287 Products variation Selection guide Variation System Index Selection guide Selection guide Selection guide Selecting from cylinder bore size and operation speed Selecting from load value and operation time Selection guide System selection Selecting from cylinder bore size and operation speed Making a selection <System selection > is used to select the optimum model at a glance. <Checking conditions> Check cylinder tube bore size and cylinder operation speed. Refer to Table- Select the theoretical reference speed. s a condition, it is predetermined whether cylinder tube bore size and cylinder are to be operated at a relatively high speed or at a relatively low speed. Using Tabel- as a reference, select the theoretical reference speed of the cylinder. () Tube bore size ø (2) Operation speed ow, medium, high, ultra high Refer to Table-2 Select appropriate fluid control components from bore size and theoretical reference speed, and select [required flow]. Refer to Table-2, and select appropriate fluid control components (valve, flow, silencer, piping) and [required flow] for corresponding cylinder tube bore size and theoretical reference speed. Refer to Table-3 Select the clean air components. Refer to Table-3, and select a component having a [maximum flow rate] higher than the [required flow] value. When controlling multiple cylinders with a set of clean air component having a [maximum flow rate] higher than the [total of required flow rates]. *The relationship of the cylinder tube's inner diameter and speed for the valve (G Series, K Series) is shown with a graph. Standard combination for valve and cylinder (Example): (Intro 55 to 5) Intro

288 Selection guide ccording to Products variation Selection guide Variation System Index Selection guide Selection guide Selection guide Selecting from cylinder bore size and operation speed Selecting from load value and operation time Selection guide System selection STEP Checking conditions and selecting the theoretical reference value s a condition, it is predetermined whether cylinder bore size and cylinder are to be operated at a relatively high speed or at a relatively low speed. Table- Degree of cylinder speed Theoretical reference speed (mm/s) ow 250 Medium 500 High 750 Ultra high,000 <Checking conditions> Check cylinder tube bore size and cylinder operation speed. Refer to Table- Select the theoretical reference speed. Refer to Table-2 Select appropriate fluid control components from bore size and theoretical reference speed, and select [required flow]. Refer to Table-3 Select the clean air components. () The cylinder average speed is obtained from the combination of the valve and piping. This speed is expressed as the cylinder piston speed obtained by installing the cylinder rod facing upward, and dividing the time from when the piston starts moving the stroke by the time the rod moved. When the load ratio is 50%, the average speed should be the cylinder piston speed x 0.5. (Refer to Intro 59 for the relation of load ratio and theoretical reference speed.) (2) The cylinder theoretical reference speed is the value for when one cylinder moves independently. (3) The valve's effective sectional area used in the calculations for Table-2 is the 2- position value. () This selection guide is for reference. Check the selection with actual conditions using the CKD sizing program. STEP2 Selecting fluid control components Select appropriate fluid control components (valve, flow, silencer, piping) and [required flow] for bore size and theoretical reference speed selected from Table-. Table-2 ore size (mm) ø ø ø ø ø25 ø32 ø0 ø50 Theoretical reference speed (mm/s) , , , , ,000 Required flow (R/min.) (NR) Required composite effective sectional area (mm 2 ) Note : Refer to Intro 3 for piping specifications. pplicable fluid control Valve Pneumatic auxiliary components Piping *Note Single solenoid Double solenoid Piping (between valve and cylinder) MNE0 MNE0 MNE0 MNE0 MNE0 MNE0 S0 / S0 S0 / S0 S0 / S0 S0 / S0 S0 / S0 S0 / S0 SC3W-M5- SC3W-M5- SC3W-M5- SM-M5, SM-M3 SM-M5, SM-M3 SM-M5, SM-M3 øø2.5 nylon tube øø2.5 nylon tube øø2.5 nylon tube K / K K0 / K0 SC3W-- G / G G0 / G0 SC2-0-H SM-M5, SW- øø nylon tube K / K G / G K / K G / G K / G K2 / G2 K / K G / G K2 / K2 G2 / G2 K2 / K2 G2 / G2 K2 / K2 G2 / G2 G3 / G3 G3 / G3 F3 / F K0 / K0 G0 / G0 K0 / K0 G0 / G0 K0 / G0 K2 / G2 K0 / K0 G0 / G0 K2 / K2 G2 / G2 K2 / K2 G2 / G2 K2 / K2 G2 / G2 G3 / G3 G3 / G3 F3 / F Note: The above table shows the theoretical reference speed for cylinder inner diameters. Intro 7 Refer to individual specifications for each model for details on the working piston speed range of each product. Intro SC3W-- SC2-0-H SC3W-- SC2-0-H SC- SC2-0-H SC3W-- SC2-0-H SC- SC2-0-H SC3W-- SC2-0-H SC- SC2-0-H SC- SC- SC- SC2-0-H SC- SC--H SC- SM-M5, SW- SM-M5, SW- SW-, S-M5 SW-S, SW- SM-M5, SW- SW-S, SW- SM-M5, SW- SW-S, SW- SW-, SW- SW-, SW-S SW-, SW-S SW-, SW- SW-, SW-S SW- øø nylon tube øø nylon tube øø5.7 nylon tube øø5.7 nylon tube øø nylon tube øø5.7 nylon tube øø nylon tube øø5.7 nylon tube øø7.2 nylon tube øø7.2 nylon tube øø5.7 nylon tube øø7.2 nylon tube øø7.2 nylon tube øø.5 nylon tube or Rc3/ steel pipe

289 Selection guide ccording to Products variation Selection guide Variation System Index Selection guide Selection guide Selection guide Selecting from cylinder bore size and operation speed Selecting from load value and operation time Selection guide System selection ore size (mm) Theoretical reference speed (mm/s) 250 Required flow (R/min.) (NR) Required composite effective sectional area (mm 2 ). pplicable fluid control Valve Pneumatic auxiliary components Piping *Note Single solenoid Double solenoid Piping (between valve and cylinder) K2 / K2 K2 / K2 SC- SW-S, SW- øø5.7 nylon tube G3 / G3 G3 / G3 SC2-0-H <Checking conditions> Check cylinder tube bore size and cylinder operation speed. Refer to Table- Select the theoretical reference speed. ø , , G3 / G3 K3 / K3 F3 / F F5 K2 / F2-0 G3 / G3 K3 / K3 F3 / F F5 K2 / F2-0 SC- SC--H SC- SC- SC- SC--H SW-, SW-S SW- SW- SW-, SW-S øø7.2 nylon tube øø.5 nylon tube or Rc3/ steel pipe Rc/2 steel pipe øø7.2 nylon tube ø F- / F3- K3- F- / F3- K3- SC- SW- øø.5 nylon tube or Rc3/ steel pipe 750,000,00, K- / F5- K- / F5- SC- SC- SW- SW- Rc/2 steel pipe Rc/2 steel pipe Refer to Table-2 Select appropriate fluid control components from bore size and theoretical reference speed, and select [required flow]. ø ,00 2, F- / F3- K3- K- / F5- F- / F3- K3- K- / F5- SC- SC- SC- SW- SW- SW- øø.5 nylon tube or Rc3/ steel pipe Rc/2 steel pipe Rc/2 steel pipe,000 2,00.2 F- F- SC- S-, SW-S Rc3/ steel pipe Refer to Table-3 Select the clean air components. ø5 ø , ,0 2,0 3,300,00,00 2,00, K- / F5- F- K- / F5- F- K- / F5- F- K- / F5- F- SC- SC- SC- SC- SC- SC- SW- SW- S-, SW-S S- SW- S-, SW-S S- Rc/2 steel pipe Rc/2 steel pipe Rc3/ steel pipe Rc3/ steel pipe Rc/2 steel pipe Rc3/ steel pipe Rc3/ steel pipe,000 5, F7-25 F7-25 SC- S-25 Rc steel pipe () The cylinder average speed is obtained from the combination of the valve and piping. This speed is expressed as the cylinder piston speed obtained by installing the cylinder rod facing upward, and dividing the time from when the piston starts moving the stroke by the time the rod moved. When the load ratio is 50%, the average speed should be the cylinder piston speed x 0.5. (Refer to Intro 59 for the relation of load ratio and theoretical reference speed.) (2) The cylinder theoretical reference speed is the value for when one cylinder moves independently. (3) The valve's effective sectional area used in the calculations for Table-2 is the 2- position value. () This selection guide is for reference. Check the selection with actual conditions using the CKD sizing program. ø ,000,00 3,00 5,00 7, K- / F5- F- F7- - K- / F5- F- F7- - SC- SC- SC- - SW- Rc/2 steel pipe S- Rc3/ steel pipe S- Rc3/ steel pipe - - Note : Refer to Intro 3 for piping specifications. Intro 9 Intro 50

290 Selection guide ccording to Products variation Selection guide Variation System Index Selection guide Selection guide Selection guide Selecting from cylinder bore size and operation speed Selecting from load value and operation time Selection guide System selection ore size (mm) Theoretical reference speed (mm/s) Required flow (R/min.) (NR) Required composite effective sectional area (mm 2 ) pplicable fluid control Valve Pneumatic auxiliary components Piping *Note Single solenoid Double solenoid Piping (between valve and cylinder) 250 2, K- / F5- K- / F5- SC- SW- Rc/2 steel pipe ø ,00, F7- F7-25 F7- F7-25 SC- SC-25 S- S-25 Rc3/ steel pipe Rc steel pipe <Checking conditions> Check cylinder tube bore size and cylinder operation speed. Refer to Table- Select the theoretical reference speed. ø0, , ,0 2,00 5,00,00,0, F- F F7- - F- F F7- - SC- SC SC- - S-,SW-S S S- - Rc3/ steel pipe Rc steel pipe - - Rc3/ steel pipe ø ,000 3, F F SC-25 - S-25 - Rc steel pipe -,000, Note : Refer to Intro 3 for piping specifications. Refer to Table-2 Select appropriate fluid control components from bore size and theoretical reference speed, and select [required flow]. Refer to Table-3 Select the clean air components. () The cylinder average speed is obtained from the combination of the valve and piping. This speed is expressed as the cylinder piston speed obtained by installing the cylinder rod facing upward, and dividing the time from when the piston starts moving the stroke by the time the rod moved. When the load ratio is 50%, the average speed should be the cylinder piston speed x 0.5. (Refer to Intro 59 for the relation of load ratio and theoretical reference speed.) (2) The cylinder theoretical reference speed is the value for when one cylinder moves independently. (3) The valve's effective sectional area used in the calculations for Table-2 is the 2- position value. () This selection guide is for reference. Check the selection with actual conditions using the CKD sizing program. Intro 5 Intro 52

291 Selection guide ccording to Products variation Selection guide Variation System Index Selection guide Selection guide Selection guide Selecting from cylinder bore size and operation speed Selecting from load value and operation time Selection guide System selection <Checking conditions> Check cylinder tube bore size and cylinder operation speed. Refer to Table- Selecting theoretical reference speed Refer to Table-2 Select appropriate fluid control components from bore size and theoretical reference speed, and select [required flow]. Refer to Table-3 Select the clean air components. () The cylinder average speed is obtained from the combination of the valve and piping. This speed is expressed as the cylinder piston speed obtained by installing the cylinder rod facing upward, and dividing the time from when the piston starts moving the stroke by the time the rod moved. When the load ratio is 50%, the average speed should be the cylinder piston speed x 0.5. (Refer to Intro 59 for the relation of load ratio and theoretical reference speed.) (2) The cylinder theoretical reference speed is the value for when one cylinder moves independently. (3) The valve's effective sectional area used in the calculations for Table-2 is the 2- position value. () This selection guide is for reference. Check the selection with actual conditions using the CKD sizing program. STEP 3 Selecting clean air components Select the components whose maximum flow rate is more than [required flow] on Table-2. When operating cylinders with one set of clean air components, select the components whose max. flow rate is more than total of required flow. Table-3 kit C00--W C00--W C2500--W C2500--W C3000--W C3000--W C000--W C000--W C000--W C500--W C W C000--W C W K0570-C-G K0570-2C-G K0E-2C-EG K0E-3C-EG K00E-2C-EG K00E-3C-EG K00E-C-EG K00E-C-EG Port size Rc/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/ Rc3/ Rc/2 Rc3/ Rc Rc3/ Rc Rc/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/2 Rc3/ Max. flow rate ( R/min. ) * 50 30,0,700,,750,30 2,00 3,000,500 5,000 7,000 7, ,300,500,000 2,0 3,700 3,700 Explanation of technical terms unit W00--W W00--W W3000--W W3000--W W000--W W000--W W000--W W000--W W W 70-C 70-2C C C 700-3C 700-C 700-C Port size Rc/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/2 Rc3/ Rc Rc/ Rc/ Rc/ Rc3/ Rc3/ Rc/2 Rc3/ 00,0 2,0 2,30 2,500,350,750,000, ,500 2,0,500 5,000 5,000 [Theoretical reference speed]: means degree of cylinder speed, and expressed as the following formula. (This value coincides with speed of no load. pplied load quite decreases speed.) V0= S =25 () S D 2 V0: Theoretical reference speed (mm/s) : Cylinder cross-section areas (cm 2 ) S: Composite effective sectional area of circuit (exhaust air side) (mm 2 ) D: Cylinder bore size (cm) Graph shows the theoretical reference speed within the range of constant velocity, V0= S t3 (mm/s) t : Time until beginning of movement t2 : Primary delay time t3 : Operating time with constant velocity Time R: Stroke length Stroke Max. flow rate ( R/min. ) [Required flow]: For operating a cylinder with Velocity vo, this indicates instantaneous flow rate expressed with the following formula. Table shows the value when P=0.5MPa. Required flow is the necessary value to select clean air components. vo (P+0.)0 Q (2) 0. Q: Required flow (R/min.) (NR) P: Supply pressure (MPa) [The required effective sectional area]: For operating a cylinder with Velocity vo, this indicates the necessary composite effective sectional area of exhaust air side circuit. (Composite effective sectional area of valve, flow, silencer and piping) *: tmospheric pressure conversion [Proper standard ]: For operating a cylinder with Velocity vo, this means the best combination of valve, flow, silencer *Note: t and t2 differ depending on load. When no load, neglect the value. and pipe diameter. Table shows the value when pipe length is m. Intro 53 Intro 5 ir (F) F00--W F00--W F3000--W F3000--W F000--W F000--W F000--W F000--W F W F000--W F W -C -2C -2C-E -3C-E 37-2C-E 37-3C-E 37-C-E 37-C-E 3-C-E 3-C-E Rc/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/2 Rc3/ Rc Rc3/ Rc Rc/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/2 Rc3/ Rc3/ Rc kit, unit, Primary pressure / 0.7 MPa Set pressure / 0.5 MPa Pressure drop / 0. MPa 0,0,500,3 2,0 3,000 5,00,0,00, ,250,300,00 2,300 2,300 5,500 7,000 Regulator (R) R00--W R00--W R00--W R00--W R3000--W R3000--W R000--W R000--W R000--W R000--W R W R000--W R W -C -2C 00-2C 00-3C 0-2C 0-3C 0-C 0-C 22-C 22-C 22-C Rc/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/ Rc3/ Rc/2 Rc3/ Rc Rc3/ Rc Rc/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/2 Rc3/ Rc3/ Rc Rc / ir Primary pressure / 0.7 MPa Pressure drop / 0.02 MPa 770,350,750 2,500 2,000 2,00 2,500,00 5,000 7,000 7,700,000, ,00 2,0 5,000 5,000,000,000,000,000,000 ubricator () Max. flow rate Max. flow rate Port size Port size ( R/min. ) ( R/min. ) Port size ( ) * * * 00--W 00--W W W 000--W 000--W 000--W 000--W W 30-C 30-2C 3000E-2C 3000E-3C 3002E-2C 3002E-3C 3002E-C 3002E-C 3003E-C 3003E-C ubricator Primary pressure / 0.5 MPa Pressure drop / 0.03 MPa Rc/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/2 Rc3/ Rc Rc/ Rc/ Rc/ Rc3/ Rc/ Rc3/ Rc/2 Rc3/ Rc3/ Rc Max. flow rate R/min. * ,0 2,250 00,700 2,700,300, ,700,700 3,500,000

292 Selection guide ccording to Standard combination for valve and cylinder (example) () The cylinder s average speed is calculated by the combined valve and piping. To calculate, the cylinder s piston rod is mounted facing upward, and the time that the piston rod starts to move the stroke is divided by the time that it moved. t a 50% load factor, multiply the cylinder piston speed by 0.5. (Refer to page Intro 59 for the relationship of the load factor and theoretical reference speed.) (2) The cylinder's average speed is the value when one cylinder is operated discretely. (3) The effective sectional area of the solenoid valve used for the calculation below is the 2-position value. () This selection guide is for reference. Check the selection with actual conditions using a sizing program. (5) The graph for the G and K series valve (2 position single, base piping) is shown as an example. G Series ( integrated) (Example) The connection component No.2 is for the G with C port size. Series G G2 G3 MG MG MG2 MG2 MG3 MG3 Solenoid valve Port size C C C C C C Sub-base porting type control valve SC3W-- SC- SC- SC- SC- SC- Piping ( m) SW-S SW-S SW-S SW-S SW- SW- øø2.5 øø øø øø5.7 øø7.2 øø.9 Composite effective sectional area (mm 2 ) Pipe length ( m) System No (mm/s) 00 * The No. is indicated in the graph below. Cylinder average speed (Example) When using 2 with a ø0 cylinder diameter, the cylinder s average speed is 50 mm/s. (Note that this differs with working conditions.) pplicable cylinder bore size (ø) (mm) Intro 55

293 Products variation Selection guide Variation System Index Selection guide Selection guide Selection guide Selecting from cylinder bore size and operation speed Selecting from load value and operation time Selection guide MNG Series ( integrated) Series Solenoid valve Port size control valve Piping ( m) Common exhaust piping Composite effective sectional area (mm 2 ) System No. C SC3W-M5- øø2.5 øø3m 0.9 MNG C SC3W-- øø2.5 øø3m. 2 C SC- øø øø5.73m 2. 3 MNG2 C C SC- SC- øø øø5.7 øø5.73m øø7.m (mm/s) 00 * The No. is indicated in the graph below. * This graph applies to the common exhaust type. Cylinder average speed pplicable cylinder bore size (ø) (mm) K Series Series Solenoid valve Port size control valve Piping ( m) Composite effective sectional area (mm 2 ) System No. K C SC- SW-S øø 3.2 K2 C SC- SW-S øø K3 C SC- SW- øø K C SC- SW- øø.9. (mm/s) * The No. is indicated in the graph below Cylinder average speed (mm) pplicable cylinder bore size (ø) Intro 5

294 Selection guide ccording to System selection 2 Selecting from load value and operation time Making a selection When oad (N) and cylinder operation time (S) are already decided, use <<System selection 2 >> to select appropriate model. Follow the following procedures. STEP Checking <Checking conditions> oad (N), Required operation time (S) Refer to Graph- Selecting cylinder bore size () oad F = * (N) (2) Objective values of operation time t = * (s) (3) Stroke length = * (mm) () Pressure P = * (MPa) M: Weight of body (kg) μ : Friction coefficient (normally μ 0.3) F : oad (N) g : 9.m/s 2 Vertical Refer to Graph-2 Selecting theoretical reference speed F=Mg Refer to Graph-3 Selecting proper Horizontal F= μ Mg Refer to Table- Selecting proper component Intro 57

Products variation Selection guide Variation System Index Selection guide Selection guide Selection guide Selecting from cylinder bore size and operation speed Selecting from load value and operation

295 Products variation Selection guide Variation System Index Selection guide Selection guide Selection guide Selecting from cylinder bore size and operation speed Selecting from load value and operation time Selection guide STEP 2 Selecting cylinder bore size ccording to monogram, select the cylinder bore size and read the load factor at the same time. (Normally, for Value F of "STEP Confirming conditions", read the cylinder bore size whose load factor is close to 50%.) Cylinder bore size D = ø (E.g.) When F=00N, P=0.5MPa and load factor 50%, 3 mm of cylinder bore size is read. Graph- Nomogram to find cylinder bore size oad factor (%) oad factor (%) oad factor (%) Intro 5

Stroke Stroke Selection guide ccording to STEP 3 Selecting theoretical reference speed ccording to t-vo graph, read Value vo to obtain the required operation time t (sec). Vo = (E.g.) When load factor 50% and 0 mm stroke cylinder with operating.

296 Stroke Stroke Selection guide ccording to STEP 3 Selecting theoretical reference speed ccording to t-vo graph, read Value vo to obtain the required operation time t (sec). Vo = (E.g.) When load factor 50% and 0 mm stroke cylinder with operating.0 sec, theoretical reference speed is 50 mm/s. Graph-2 t-vo graph oad factor = 0% Pipe length m push oad factor = 25% Pipe length m push Operation time t(s) Operation time t(s) Cylinder theoretical reference speed Cylinder theoretical reference speed System selection 2 <Checking conditions> oad (N), Required operation time (S) Refer to Graph- Selecting cylinder bore size Refer to Graph-2 Selecting theoretical reference speed Intro 59

Stroke Products variation Selection guide Variation System Index Selection guide Selection guide Selection guide Selecting from cylinder bore size and operation speed Selecting from load value and

297 Stroke Products variation Selection guide Variation System Index Selection guide Selection guide Selection guide Selecting from cylinder bore size and operation speed Selecting from load value and operation time Selection guide oad factor = 50% Pipe length m push oad factor = 70% Pipe length m push Operation time t(s) Operation time t(s) Stroke Cylinder theoretical reference speed Cylinder theoretical reference speed Refer to Graph-3 Selecting proper Refer to Table- Selecting proper component Intro 0

Selection guide ccording to STEP Selecting proper ccording to the selection table, read symbol with tracing the cross point between vo found by [STEP 3 Selecting theoretical reference speed] and ød

298 Selection guide ccording to STEP Selecting proper ccording to the selection table, read symbol with tracing the cross point between vo found by [STEP 3 Selecting theoretical reference speed] and ød found by [STEP 2 Selecting cylinder bore size] upward. System symbol (E.g.) In order to operate 3 mm bore cylinder with theoretical reference speed 50 mm/s, C is the optimum. Graph-3 System selection table C D Cylinder theoretical reference speed Vo (mm/s) Circuit composite effective sectional area S (mm 2 ) System selection 2 <Checking conditions> oad (N), Required operation time (S) Refer to Graph- Selecting cylinder bore size Refer to Graph-2 Selecting theoretical reference speed Intro

299 Products variation Selection guide Variation System Index Selection guide Selection guide Selection guide Selecting from cylinder bore size and operation speed Selecting from load value and operation time Selection guide STEP 5 Selecting proper component ccording to the standard table, confirm the model No, of proper components found by [STEP Selecting proper ]. Valve Piping (Example) CI Valve: Single K2-0 or G3-0 Double K2-0 or G3-0 : SCI- : SW- Piping: øø7.2 nylon tube m Table- Standard table Standard No. Valve Single solenoid Double solenoid Piping Composite effective sectional area (mm 2 ) Pipe length m S0-M5 K-GS S0-M5 K0-GS SC3W-M5- (SC-M5) SM-M5 øø2.5 nylon tube 0.9 K-GS K-0 K0-GS K0-0 SC3W-- SC2-0-H SM-M5 SW- øø nylon tube K-0 G-0 K0-0 G2-0 SC- SC2-0-H S-M5 SW- øø5.7 nylon tube G2-0 K2-0 G2-0 K2-0 SC- SC2-0-H SW- SW-S øø5.7 nylon tube 5.2 G2-0 K2-0 G2-0 K2-0 SC- SC2--H SW- SW- øø7.2 nylon tube. C G2-0 K2-0 F2-0 G2-0 K2-0 F2-0 SC- SC2--H SW- SW-S øø7.2 nylon tube 7. C2 G3- F3- K3- G3- F3- K3- SC- SW- øø7.2 nylon tube or Rc3/ steel pipe C3 F5- K- F5- K- SC- SW- Rc/2 steel pipe 27 C F5- K- F5- K- SC- SW- Rc/2 steel pipe 3 D D2 D3 F- F7- F7-25 F- F7- F7-25 SC- SC- SC-25 S- S- S-25 Rc3/ steel pipe Rc3/ steel pipe Rc steel pipe 0 Refer to Graph-3 Selecting proper Refer to Table- Selecting proper component Intro 2

300 Selection guide ccording to Effective sectional area of steel pipe/nylon tube and recommended maximum flow rate for gas pipes Effective sectional area of steel pipe Effective sectional area (mm 2 ) Effective sectional area of nylon tube Effective sectional area (mm 2 ) ore size (mm) ø ø9 ø ø7.5 ø7 ø.5 ø ø5.5 ø5 ø.5 ø ø3 ø2.5 ø2 ø Pipe length (m) Tube length (m) Recommended maximum flow rate for gas pipes Nominal size Pressure drop MPa (Note ) Inlet pressure MPa / / 3 / /2 3 / / / Note : Inlet pressure = 0.5 MPa Gas tube length: m Recommended maximum flow (R/min.) ,030,,,,325,395,5,25,0 3 95,07,,30,5,0,00,9 2,035 2,0 2,250 2,50 2,2 2,7,5,90,5 2,00 2,375 2,0 2,9 3,0 3,350 3,50 3,75 3,930,,590,70 2,0 2,2 3,0 3,50 3,900,50,75 5,250 5, 5,970,290,00 7,0 7,700 7,930 3,70,0,90 5,30,300 7,000 7,700,300,70 9,30 9,900,00,250,0,550 5,0 5,950,30 7,,00 9,30,250,050,00,570 3,2 3,0,00,0,70 (Remarks) In the main line where the piping distance tends to increase, it is necessary to consider pressure drop occurring at the end of the main line when air passes. The recommended maximum flow rate refers to the maximum flow rate that can be recommended in the range that the pressure drop is allowable for the piping length, and is determined based on actual use. This does not mean that a higher flow is not possible, but rather that the pressure drop will increase if the flow exceeds this value. Intro 3

301 Flow characteristics. Indicating flow properties The flow rate in catalog specifications is indicated as follows: Components Pneumatic components Indication New JIS compliant indication Conventional indication Unit C/b S Cv Standards ISO 35: 9 Pneumatic fluid power - Components using compressible fluids - Determination of flow rate properties JIS 390: 00 (ISO 35 translation) JIS 373: 93 " 2 port solenoid valve" JIS 37: 93 " 3 port solenoid valve" JIS 375: 93 ", 5 port solenoid valve" JIS 379: 95 "s noise reduction device" NSI (NFP) T3..3: 90 Flow characteristics 2. Explanation The flow characteristics of the components were conventionally indicated with the effective sectional area S. However, JIS was revised (JIS 390: 00), and these are now indicated with the sonic conductance C and critical pressure ratio b. The sonic conductance C: Critical pressure ratio b: Value obtained by dividing the passage mass flow of the component in the choke flow by the sum of upstream absolute pressure and standard state density. (sonic conductance) S 5.0C (C is sized conventionally. ) Pressure at which choke flow results if smaller than this value (downstream pressure/upstream pressure) (critical pressure ratio). Mass flow Effective sectional area S (mm 2 ): Value calculated from changes in tank pressure indicating the ideal restriction effective section at which friction or restricted flow does not occur when flowing in the choke flow from the component on the tank. * Choke flow: Flow at which upstream pressure is higher than downstream pressure, and speed at certain sections of components reach sonic levels. The gas mass flow is proportional to upstream pressure, and does not rely on downstream pressure. (Choked flow) Subsonic flow Critical pressure ratio b Choke flow Fig. Mass flow characteristics in respect to upstream pressure Flow rate calculation formula The flow rate is expressed as follows with practical units. P b : Choke flow P + 0. Q = 00 x C (P + 0.) 293 : () t P > b : Subsonic flow P + 0. Q : Flow rate [dm 3 /min. (NR)], SI unit dm 3 (digital cubic meter) expressed as R(liters). dm 3 = R C : Sonic conductance [dm 3 /(s bar)] b : Critical pressure ratio (-) P : Upstream pressure (MPa) P2 : Downstream pressure (MPa) t : Temperature ( C) P Q = 00 x C (P + 0.) - P b t : (2) -b To calculate effective sectional area S, substitute the value C obtained with C=S/5 above in the above formula. For the subsonic flow, substitute b = 0.5 in formula (2). Intro

302 IP - * * Protective structure Protective structure IEC (International technical Commission) Standards (IEC0529) JIS C 09 : 03 Protection property symbols (International Protection) st characteristic number (protection grade for foreign solid) st characteristic number Degree of protection No protection Without protection 0 2nd characteristic number (protection grade for trespass of water) 2nd characteristic number Degree of protection No protection 0 ø50mm Protection against inflow of solids 50 mm or more in diameter Protection against water dripping Dripping water falling vertically shall not harm ø.5mm 2.5mm mm Dust-proof type Protection against inflow of solids.5 mm or more in diameter Protection against inflow of solids 2.5 mm or more in diameter Protection against inflow of solids.0 mm or more in diameter No inflow of dust at levels adversely affecting normal device operation or safety 2 3 Protection against dripping water titled at an angle of up to Protection ing Protection against splashing water Vertically dripping water shall have no adverse effect when the product is tilted at an angle of up to from its normal position. Water falling as a spray at any angle up to 0 from the vertical shall have no adverse effect. Water splashing against the product from any direction shall have no adverse effect. Dust proof type No inflow of dust 5 Protection against water jets Protection against powerful jets Water projected by a nozzle against the product from any direction shall have no adverse effects. Water projected in powerful jets shall not enter products in adverse amounts. 7 Protection against immersion in water Inflow of water shall not be possible when the product is immersed in water under defined conditions. Protection against submersion The product is suitable for continuous submersion in water. Intro 5

303 Intro

304 Safety precautions lways read this section before starting use. When designing and manufacturing a device using CKD products, the manufacturer is obligated to check that device safety mechanism, control circuit, or water control circuit and the operated by electrical control that controls the devices is secured. It is important to select, use, handle, and maintain the product appropriately to ensure that the CKD product is used safely. Observe warnings and precautions to ensure device safety. Check that device safety is ensured, and manufacture a safe device. WRNING 2 3 This product is designed and manufactured as a general industrial machine part. It must be handled by an operator having sufficient knowledge and experience in handling. Use this product in accordance of specifications. This product must be used within its stated specifications. It must not be modified or machined. This product is intended for use as a general-purpose industrial device or part. It is not intended for use outdoors or for use under the following conditions or environment. (Note that this product can be used when CKD is consulted prior to use and the customer consents to CKD product specifications. The customer must provide safety measures to avoid risks in the event of problems.) Use for special applications including nuclear energy, railway, aircraft, marine vessel, vehicle, medicinal devices, devices or applications coming into contact with beverages or foodstuffs, amusement devices, emergency cutoff circuits, press machines, brake circuits, or safety devices or applications. 2 Use for applications where life or assets could be adversely affected, and special safety measures are required. Observe corporate standards and regulations, etc., related to the safety of device design and control, etc. ISO, JIS 370 ( rules) JFPS0 (principles for cylinder selection and use) Including High Pressure Gas Maintenance aw, Occupational Safety and Sanitation aws, other safety rules, body standards and regulations, etc. Do not handle, pipe, or remove devices before confirming safety. Inspect and service the machine and devices after confirming safety of the entire related to this product. 2 Note that there may be hot or charged sections even after operation is stopped. 3 When inspecting or servicing the device, turn off the energy source (air supply or water supply), and turn off power to the facility. Discharge any compressed air from the, and pay enough attention to possible water leakage and leakage of electricity. When starting or restarting a machine or device that incorporates components, make sure that the safety, such as pop-out prevention measures, is secured. 5 Observe warnings and cautions on the pages below to prevent accidents. The precautions are ranked as "DNGER", "WRNING" and "CUTION" in this section. DNGER: WRNING: CUTION: When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries, or when there is a high degree of emergency to a warning. When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries. When a dangerous situation may occur if handling is mistaken leading to minor injuries or physical damage. Note that some items described as "CUTION" may lead to serious results depending on the situation. In any case, important information that must be observed is explained. Intro 7

305 imited Warranty and Disclaimer Term of Warranty "Warranty Period" is one () year from the first delivery to the customer. 2 Scope of Warranty In case any defect attributable to CKD is found during Warranty Period, CKD shall, at its own discretion, repair the defect or replace the relevant product in whole or in part, according to its own judgment. Caution This imited Warranty will not apply to: () Product abuse/misuse contrary to conditions/environment recommended in its catalogs/specifications. (2) Failure due to other causes. (3) Use other than original design purposes. () Third-party repair/modification. (5) Failure due to causes not foreseeable with technology at the time of delivery. () Failure attributable to force majeure. In no event CKD shall never be liable for the costs in relation to and the damages resulting from the (de) installation of the product. 3 Confirmation of compatibility IN NO EVENT SH CKD E IE FOR MERCHNTIITY OR FITNESS FOR PRTICUR PURPOSE, not withstanding any disclosure to CKD of the use to which the product is to be put. Export Security Trade Control Products in this catalog and their related technology may require approval before export or provision. To contribute to world peace and safety, there may be cases in which approval under the Foreign Exchange and Foreign Trade Control aw is required depending on the country to where the product or related technology is being exported or provided. The scope of products and related technologies requiring approval are listed in Export Trade Control Ordinance ppendix Table or Foreign Exchange and Foreign Trade Control aw ppendix Table. Export Trade Control Ordinance ppendix Table and Foreign Exchange and Foreign Trade Control ow ppendix Table contain the following two types of information: ist Provisions indicating items to for each section Catchall Provisions that do not specify specifications by item, but restrict by application (Item ) Scope of products or related technologies requiring approval ist Provisions indicating items to (When product could be used for weapons of mass destruction or for development of regular arms, etc.) isted in Export Trade Control Ordinance ppendix Table or Foreign Exchange and Foreign Trade Control aw ppendix Table Catchall Provisions restricted by application (item ) isted in Export Trade Control Ordinance ppendix Table or Foreign Exchange and Foreign Trade Control aw ppendix Table pplication for pproval is received by the Ministry of Economy, Trade, and Industry, Security Trade Control Review Section or local bureaus of the Ministry of Economy, Trade, and Industry. 2 Products and related technologies in this catalog Products and related technologies in this catalog are exposed to Catchall Provisions of the Foreign Exchange and Foreign Trade Control aw. When exporting or providing products or related technologies in this catalog, ensure that they are not used for arms or weapons. 3 Contact Contact your local CKD Sales Office for information on the Security Trade Control of products and related technologies in this technology. Intro

306 Design & Selection. Specifications confirmation WRNING Use within the product's specific specification range. The product in this catalog is designed for use only in a compressed air. Use with pressures or temperatures exceeding the specification range may result in damage or operation faults. (Refer to specifications) Consult with CKD when using fluids other than compressed air. 2. Design for safety WRNING lways take necessary measures to prevent harm to operators or objects if this product fails. CUTION Understand compressed air features before designing a circuit. The same functions as mechanical, hydraulic, and electrical methods cannot be anticipated if instantaneous service interruption and holding are required during an emergency stop. Pop-out, air discharge, or leakage due to air compression and expansion could occur. Design the circuit so that compressed air in the can be discharged. Decide the method of lubricating components, and provide correct maintenance. Decide whether to use lubrication or oilless, and provide proper lubricant control. Check leakage current to prevent malfunction caused by leakage current. Note that when using a PC, etc., leakage current could result in malfunctions. 3. Design per application CUTION leaks that do not affect performance are tolerated because this product is used with compressed air. Contact CKD when no leaks are tolerable.. Working condition WRNING void installing this product in rain, water or direct sunlight. Do not use this product in a corrosive environment. Use in such an environment could lead to damage or operation faults. Consult with CKD if ozone is generated in supply air. (Ozone proof series are available.) If the ambient temperature is less than 5 C, moisture in the circuit could freeze and lead to operation faults, etc. Remove moisture to prevent freezing. void using this product in environments where ozone is generated. CUTION Confirm that the product will withstand the working environment. This product cannot be used in environments where functional obstacles could occur. Example: Special environment where there are high temperatures, a chemical atmosphere, chemicals, vibration, humidity, moisture, coolant, or gas, etc., or in an ozone generating environment. 5. Securing of space CUTION Ensure space around the component for installation, removal, wiring, and piping work.. Stipulation in instruction manual CUTION Indicate the maintenance conditions in the device's instruction manual. The product's function can drop markedly with working status, working environment, and maintenance, and can prevent safety from being attained. With correct maintenance, the product functions can be used to the fullest. Intro 9

307 CUTION. Installation Do not remove the component package or the piping port seat cap until just before piping the product. If the piping port cap is removed from the piping port before piping work is started, foreign matter could enter and result in faults or faulty operation. Do not install components with a method that supports with pipes. Do not remove the dust-proof seal on the piping port until just before piping the product. If the seal is removed from the piping port before piping work is started, foreign matter could enter and result in faults or faulty operation. 2. Check before operation fter connecting piping, check pipe connections for air leaks before supplying compressed air. pply a leakage detection agent on pipe connections with a brush, and check leaks. Check that the leak detection agent does not get on the plastic bowl because the plastic bowl could break and cause a hazard. 3. Piping When connecting pipes, wrap sealing tape in the opposite direction from threads starting 2 mm margin from the end of piping threads. If sealing tape protrudes from pipe threads, it could be cut when screwed in. This could cause the tape to enter the solenoid valve and lead to faults. Installation & djustment Use a flame resistance tube or steel pipe when using in an environment where spatter could scatter. Use a hydraulic hose when piping is to be used for both hydraulics and s. When using the standard push in joint on the spiral tube, fix the base of the tube with a hose band. The tube could rotate and reduce holding performance. Use a spigot joint for high-temperature fluid. Push-in joint is not required. Pipe so that piping connection does not deviate by the device's movement, vibration, tension, etc. lways flush just before piping component. Foreign matter entered inside during piping must not enter components. Tighten pipes with the appropriate torque. Pipes must be connected with the appropriate torque to prevent air leakages and screw damage. First tighten the screw by hand to prevent damage to screw threads, then use a tool. (Recommended value) Port thread Tightening torque N m M3 0.3 to 0. M5 to.5 Rc/ 3 to 5 Rc/ to Rc3/ 3 to Rc/2 to Rc3/ to 0 Rc to 70 Note: If tightening torque is designated for the model, use that value.. Pneumatics pressure source Caution Install an air just before the component in the circuit. When using a liquid sealant, check that it does not adhere to the plastic bowl, because it could damage the plastic bowl and cause a hazard. Check that the pipe connected to the component is not dislocated due to vibration, loosening, or pulling. Piping dislocation generates a hazardous state. Observe the following precautions when using nylon tubes or urethane tubes for piping material. When supplying compressed air for the first time after connecting pipes, do not apply high pressure suddenly. Piping connection could be dislocated or the piping tube fly off, leading to accidents. Caution: If compressed air is supplied too slowly, sealing pressure may not be generated by the sealing mechanism in the solenoid valve. This can lead to air leaks. ir quality Use a CKD clean air as designated for the application. Use compressed air that does not contain oxidized oil, tar, carbon, etc., from the air compressor. Use compressed air that does not contain solid foreign matter. Intro 70

308 During Use & Maintenance CUTION. ssembling & Disassembling The component must be disassembled and assembled by a qualified worker. Personnel involved in this step must have passed the Pneumatic Pressure Skill Test Class 2 or higher. 2. Maintenance and inspection efore servicing the product, turn power OFF, stop the compressed air supply, and check that there is no residual pressure. This is a requirement for ensuring safety. Read the relevant product instruction manual thoroughly and fully familiarize yourself with work before disassembling or assembling the component. Personnel must be fully familiar with component structure and operational principles and safety requirements. Intro 7

suction PVP component Refrigerating ir uto. drain Overview This precision suction uses CKD's original sintered multiporous fluorine resin with 0% porosity for the suction surface.

309 suction PVP component Refrigerating ir uto. drain Overview This precision suction uses CKD's original sintered multiporous fluorine resin with 0% porosity for the suction surface. Even extremely thin or soft workpieces are handled without suction damage, distortion, or deformation. wide variety of workpiece types is processed highly accurately. ir Feature Highly accurate workpiece processing arge suction Workpieces are not damaged. Three types of shapes available. CONTENTS Product introduction 32 Safety precautions 3 PVP 3 nic ir sensor Pressure suction component 3

Refrigerating ir High cleanness and highly accurate suction easy on workpieces PVP Series CKD's original sintered multipurpose fluorine resin with 0% porosity.

Even extremely thin or soft workpieces are handled without suction damage, distortion, or deformation. wide variety of workpiece types is processed highly accurately.

arge suction 0% porosity lets the entire surface be picked up with strong suction. Extra thin workpieces are not deformed even under large suction.

drain ir port luminum base Easy on workpieces nic ir sensor Silicone wafer Film circuit board Glass circuit board Film liquid crystal IC circuit board Smart phone, etc.

310 Refrigerating ir High cleanness and highly accurate suction easy on workpieces PVP Series CKD's original sintered multipurpose fluorine resin with 0% porosity. Performance is highly accurate for difficult processes within fine processes. Refrigerating ir uto. drain ir Performance is highly accurate for difficult processes within fine processes. Even extremely thin or soft workpieces are handled without suction damage, distortion, or deformation. wide variety of workpiece types is processed highly accurately. Highly accurate workpiece processing surface flatness: 2 μm, parallelism: 5 μm. (Specified value for R-3-, C-50, S50-50) Workpiece fixing is highly accurate, enabling highly accurate processing. arge suction 0% porosity lets the entire surface be picked up with strong suction. Extra thin workpieces are not deformed even under large suction. Fluorine porous resin Fluorine porous resin Multiporous impregnated epoxy sealing uto. drain ir port luminum base Easy on workpieces nic ir sensor Silicone wafer Film circuit board Glass circuit board Film liquid crystal IC circuit board Smart phone, etc. SI oard surface hardness is Shore D0. Soft handling leaves workpieces damage-free. ight The is made of multiporous fluorine resin (visible weight.3) and an aluminum base (weight 2.7). This light weight requires only a small drive. nic ir sensor Pressure iquid crystal glass disk ntistatic (Optional) Multiporous fluorine resin is coated with antistatic agent. static discharge is suppressed, protecting workpieces. Pressure Parallelism: 5 μm Free design Flatness: 2 μm Specific gravity: 2.7 or less Porosity: 0% Hardness: Shore D0 suction pplications This series can be used to transfer and laminate optical and magnetic disks, to laminate and transfer CD glass and film substrates, and to spin, polish, and transfer wafers. In addition to suction applications, suspension s are available as custom orders. iquid crystal display The comes in three standard shapes. Original shapes are available as custom orders. Standard type PVP-R () Donut shaped Disk, etc. PVP-C (2) Round Semiconductor, silicone wafer, etc. PVP-S (3) Square Plastic circuit board, etc. Example of specially shaped order Wafer shape Robot hand applications Multi point suction type Consult with CKD for custom order of special shape. suction component 32 33

Series variation. Auxiliary valve. Quick exhaust, and circuit switchover valves, etc. are available. Port size (Rc) Page. Model Product appearance

Series variation. Auxiliary valve. Quick exhaust, and circuit switchover valves, etc. are available. Port size (Rc) Page. Model Product appearance Series variation Quick exhaust, and circuit switchover valves, etc. are available Model Product appearance Model no. Port size (Rc) Page 4 dia. dia. M /8 /4 /8 / /4 /4 / QEV-A Quick exhaust valve QEV-8A