Vacuum Compatible Motorized Stage Guide

Transcription

1 Motion Control Products Compatible Motorized Stage VSGSP For use in vacuum environments, the vacuum compatible stage series offers replacement with a stainless steel or machined aluminum body as well as replacement with vacuum grease, and uses a vacuum rated motor and a contact type or mechanical driven type switch, and Teflon coated cables for signal wires. The series is suited for positioning in environments where the degree of vacuum is between 0 4 and 0 Pa. For the vacuum characteristics, see the measurement data of outgas volume, degree of vacuum, and mass component ratio. In addition to the standard lineup, motor replacement, sensor replacement, special specifications such as vacuum compatible large mirror holders, and replacement of grease to vacuum grease for the guides or feed screws of standard specification stages to deal with low vacuum specifications are available. Contact our International Sales Division for more information. Compatible Phase The 4mm minimum size and lightest type motor saves space. Compact Body Machined Aluminum and use of a crossed roller for the linear guide achieved the thin body. Teflon Coated Grease (Fomblin Grease) Rotation Table The body is made of aluminum machining. Grease (Fomblin Grease) Limit The copper plate contact type limit sensor enables limit detection inside a vacuum chamber. Limit The high-vacuum compatible limit switch enables origin detection with high repeatability inside a vacuum chamber. * Only for VSGSP-0YAW Compatible Phase The motor size for VSGSP-YAW is 4mm and VSGSP-0YAW is 4mm. [Attention] To use a vacuum compatible stage in a vacuum chamber, the connection cables between the vacuum side and the atmosphere side need to be relayed using a vacuum current feedthrough or the like. Prepare the feedthrough according to the vacuum chamber specifications. side (ex.: chamber) Air side mm mm Motor current feedthrough DDA-CA etc Because heat dissipation generally deteriorates in vacuum, specification temperature conditions are stricter than those for atmosphere. Check the usage conditions such as stage operation to make sure that the motor case temperature does not exceed 80 C. [Example of Special Order] Compatible Large Mirror Holder G090

2 Emitted amount of gas Emitted Amount of Gas Q Part Number (after minutes of emission) (Torr l/s/unit) (Pa l/s/unit) VSGSP VSGSP VSGSP-0YAW Emitted amount of gas is found by the following equation: Evaluation and Device Exhaust system: Turbo-Molecular Pump STP-0 Seiyu Instruments Inc. (Now Edwards Japan Limited) Pumping speed: 00l/sec Mass spectroscope: Quad Mass Spectrometer QME00 Pfeiffer Mass range: 00amu Q = (P P ) V t N P : immediately after seal off P : after seal-off time has elapsed N : Number of stage units (unit) V : chamber volume (l) t : Seal-off time (0s) From the measurement results of gas volume discharged from a vacuum compatible motorized stage The main components of outgas are water and nitrogen. This is because the gas was caused by residual air on the stage surface, and grease used for drive components is considered to have little impact on the amount of gas. of Chamber [pa] Empty chamber VSGSP- VSGSP-0YAW VSGSP Time [min] Mass Component Ratio Mass Number Component Ratio [%] VSGSP- VSGSP6-00 VSGSP-0YAW Ion H + H + C + CH + N +, CO +, CH + CH +, NH + O +, CH4 +, NH + OH +, NH + HO + HF +, Ar + CH + CH + CO +, N +, CH4 + CH + CH6 +, NO + CHOH + O +, S + CH + CH + CH6 + CH + CH8 +, CO +, NO +, CH4OH + CHO + C4H + Gas Molecule H, water vapor, hydrocarbon H, water vapor, hydrocarbon CO, CO, hydrocarbon N, NH, CO, hydrocarbon, NH O, CH4, NH HO, NH HO HF, Ar CO, CO, N, hydrocarbon CH6, NO CHOH O, HS, SO CH8, CO, NO, CH4OH CHOH Data Interpretation of Mass Peak The following list shows major gases that appear for each mass number when mass peaks (mass spectra) of residual gas are measured, and their interpretations. List of Residual Gas Spectra Mass Ion Number Remarks Mass Number Ion Remarks H + H, HO, hydrocarbons, etc 0 NO + Appears immediately after emission of dirty vacuum system. H + H, HO, hydrocarbons, etc CHO + Alcohol HD + Abundance ratio of D is about 0.0%. O + Becomes N : O = 4 : when air leak occurs. 4 He + Cl + C + CO, CO, hydrocarbons 7 Cl + Cl : Cl7 = : 4 N +, CH +, CO + N, CO, hydrocarbons 9 K +, CH + K + dissociates from filament. CH + Molecule that has CH4, CH Ar +, CH4 + Ar makes up % of the atmosphere. 6 C +, CH4 + O, CH4, oxygen compounds 4 CH + 7 OH + HO 4 CH6 + 8 HO + HO, OH + : HO+ : 4 CH7 + 9 F + Sometimes adsorbed to filaments and electrode surface. 44 CO + 0 Ar +, HO +, Ne + HO(0) is present about 0.% of abundance ratio of O. C4H + CO +, Ne + Abundance ratio of NE is 8.8%. C4H + Na + Sometimes adsorbed to filaments and electrode surface. C4H7 + 7 CH + 6 C4H8 + 8 N +, CO + Remain till the last. 7 C4H9 + 9 CH +, N +, CO + Abundance ratio of N is 0.7%, and that of C is.%. mm mm WEB international@sigma-koki.com TEL FAX G09

3 Motion Control Products s Miniature Motorized VSGSP- Compact motorized stages used for experiments and inside a chamber of measuring instrument. Compact slim body is effective for space-saving. Fitted with m teflon coated cable to directly connect the vacuum motor or vacuum limit switch to the connector of chamber. Part Number VSGSP-(X) VSGSP-(XY) VSGSP-(Z) Mechanical Accuracy Travel [mm] Table Size [mm] Feed Screw Precision ground screw φ4mm, 0.mm lead Precision ground screw φ4mm, 0.mm lead Precision ground screw φ4mm, 0.mm lead Positioning Slide Crossed roller guide Crossed roller guide Crossed roller guide Stage Material Aluminum Aluminum Aluminum Finish None None None Weight [kg] (Full) [μm] Resolution (Half) [μm] MAX Speed [mm/sec] Positional Repeatability [μm] Load Capacity [N] 9.4 (.0kgf) 9.6 (.0kgf) 4.7 (.kgf) Lost Motion [μm] Type limit switch limit switch limit switch Limit Contact type Contact type Contact type Origin None None None Proximity Origin None None None mm mm Motor / Type compatible -phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.) Motor Motor Part Number TS664N ( 4mm) Step Angle 0.7 Control Output Contact type Contact type Contact type Output Logic NORMAL OPEN NORMAL OPEN NORMAL OPEN Compatible Driver / Controller Compatible Driver SG-M, SG-M, SG-4MSC, MC-74PCL Control System Compatible Controller GSC-0, GSC-0, SHOT-, GIP-0, SHOT-0GS, SHOT-04GS, HIT-M HIT-S, PGC-04 G09

4 Catalog Code W908 Outline Drawing VSGSP-(X) (.) Hexagonal socket head cap screw M4 0 4 screws 7.8 VSGSP-(XY) (7.6) Hexagonal socket head cap screw M4 0 4 screws Travel 0 (97.8) Teflon cable m 0 0 (46.) Teflon cable m M4 depth 8 4-M4 depth 8 Travel 0 Travel 0 Travel M4 depth 8 -M4 depth 8 Travel 0 Travel mounting hole 7. counterbore mounting hole 7. counterbore 4 6 VSGSP-(Z) Hexagonal socket head cap screw M4 screws Teflon cable m -M4 depth 8 4-M4 depth 8 (8) (97.4) - 4. mounting hole Limit Switch GND (0V) black lead Motor side (+) limit switch LS (+) white lead Opposite side () limit switch LS () red lead * Use the motor side and opposite side limit switches as normal open. Wiring of The vacuum compatible stepping motor TS664N used for vacuum stages has five bare lead wires. For wiring, they correspond to the motor lead colors shown in the wiring diagrams of driver or cable as follows. (The motor leads shown in the connection diagrams of driver or cable indicate wiring of stepping motors used for normal stages.) Corresponding connection stage motor lead color White 4 Yellow compatible stage motor connection diagram E phase color shown in driver or cable connection diagram Orange Green -phase stepping motor connection diagram E phase Compatible Controllers / Drivers and Controller GSC-0 [ axis] GSC-0 [ axes] SHOT- [ axes] GIP-0 [ axis] SHOT-0GS [ axes] SHOT-04GS [4 axes] HIT-M/HIT-S [8 axes] PGC-04 [4 axes] G098 G0 Driver Drivers DRP-CA * Stage VSGSP-(X) VSGSP-(XY) VSGSP-(Z) mm mm Yellow White Green Orange MINI-CA-SG G00 G0 * Make the cable into bare wire specification after purchase. WEB international@sigma-koki.com TEL FAX G09

5 Motion Control Products Compatible Motorized VSGSP-(X) Motorized stages fitted with a limit sensor compatible with vacuum environments. Linear system has a long travel between 00mm, and is as compact as the conventional SGSP series. Motor cables and sensor cables are m bare wires. Limit (high vacuum compatible switch) Linear stage series normal close specification Rotation stage series normal open specification Note Note Set the controller of vacuum compatible motorized rotation stages to normal open. mm mm Part Number VSGSP0-(X) VSGSP0-8(X) VSGSP6-00(X) Travel [mm] 8 00 Table Size [mm] Mechanical Accuracy Feed Screw Ball screw diameter φ6mm, mm lead Ball screw diameter φ6mm, mm lead Ball screw diameter φ8mm, mm lead Positioning Slide Outer rail structure Outer rail structure Outer rail structure Stage Material Aluminum / Stainless steel Aluminum / Stainless steel Aluminum / Stainless steel Finish None None None Weight [kg].0.. (Full) [μm] 4 Resolution (Half) [μm] MAX Speed [mm/sec] Positional Repeatability [μm] 0 Load Capacity [N] 9.(4.0kgf) 9.(4.0kgf) 8.8(6.0kgf) Lost Motion [μm] 0 Part Number GN-PTMB- (Metrol Co., Ltd.) GN-PTMB- (Metrol Co., Ltd.) GN-PTMB- (Metrol Co., Ltd.) Limit touch sensor (NORMAL CLOSE) touch sensor (NORMAL CLOSE) touch sensor (NORMAL CLOSE) Origin None None None Proximity Origin None None None Motor / Motor Type compatible -phase stepping motor 0.7A/phase (Oriental Motor Co., Ltd.) Motor Part Number A798-90KV ( 8mm) A798-90KV ( 8mm) A798-90KV ( 8mm) Step Angle 0.7 Power Voltage DC4V Current Consumption 0mA(Max 0mA) Control Output Mechanical Output Logic NORMAL CLOSE NORMAL CLOSE NORMAL CLOSE Compatible Driver / Controller Compatible Driver SG-M, SG-M, SG-4MSC, MC-74PCL Control System Compatible Controller GSC-0, GSC-0, SHOT-, GIP-0, SHOT-0GS, SHOT-04GS, HIT-M HIT-S, PGC-04 G094

6 Catalog Code W908 Outline Drawing VSGSP0-(X) 0 8 Hexagonal socket head cap screw M4 4 screws M4 0.7 depth 6 8-M 0. depth 6 VSGSP0-8(X) 0 8 Hexagonal socket head cap screw M4 4 screws 9 6-M4 0.7 depth 6 8-M 0. depth 6 Motor cable m PTFE lead wire AWG6 bare leads cable m PTFE lead wire equivalent to AWG7 Travel 7. Travel 7. -M4 0.7 depth Motor cable m PTFE lead wire AWG6 bare leads cable m PTFE lead wire equivalent to AWG7 Travel 4. Travel 4. -M4 0.7 depth mounting hole mounting hole VSGSP6-00(X) 8 Hexagonal socket head cap screw M4 8 screws M 0. depth 6 8-M4 0.7 depth 6 4-M4 0.7 depth m motor cable PTFE lead wire AWG6 bare leads cable m PTFE lead wire equivalent to AWG7 Travel Travel mounting hole 8 Connection Diagram GND (0V) 7 7 Origin sensor (not used) 8 8 +VS (not used) 9 9 N.C. (not used) 0 0 N.C. (not used) LS (+) LS () GND (not used) 4 4 Origin proximity sensor (not used) +VS (not used) -Phase Stepping Motor E phase Motor side (+) limit sensor ReverseMotor side () limit sensor Compatible Controllers / Drivers and Controller GSC-0 [ axis] GSC-0 [ axes] SHOT- [ axes] GIP-0 [ axis] SHOT-0GS [ axes] SHOT-04GS [4 axes] HIT-M/HIT-S [8 axes] PGC-04 [4 axes] G098 G0 Driver Drivers DRP-CA * Stage VSGSP0-(X) VSGSP0-8(X) VSGSP6-00(X) mm mm * Motor cables and sensor cables are bare wires. MINI-CA-SG G00 G0 * Make the cable into bare wire specification after purchase. WEB international@sigma-koki.com TEL FAX G09

7 Motion Control Products Compatible Rotation Motorized Stage VSGSP-YAW Rotation motorized stages for vacuum environment. The φmm compact type is space saving, and best suited for experiments and use in chambers of inspection equipment. The φ0mm type is equipped with a limit sensor compatible with vacuum environments. It is thin but has high load capacity because of its 4mm large motor. Motor cables and sensor cables are m bare wires. Rotation Range Minus limit sensor:. Scale: 0 Clockwise CW direction Stops at near 0 (. ) Counterclockwise CCW direction to mm mm Part Number VSGSP-YAW VSGSP-0YAW Rotation Range In the CW or CCW direction to Counterclockwise CCW direction to, Clockwise CW direction stops at near 0 degree (. ) Table Size [mm] φ φ0 Mechanical Feed Screw Worm and worm wheel Worm and worm wheel Positioning Slide Bearing Crossed roller Stage Material Aluminum Aluminum / Stainless steel Finish None None Weight [kg] Resolution (Full) [ ] (Half) [ ] Accuracy MAX Speed [ /sec] 0 0 Positional Repeatability [ ] Load Capacity [N] 9.4 (.0kgf) 98.0 (0.0kgf) Lost Motion [ ] Type None GN-STMA- (Metrol Co., Ltd.) Limit None touch sensor (NORMAL OPEN) Origin None None Proximity Origin None None Motor / Motor Type compatible -phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.) Homing of rotation motorized stages is performed using the CW limit sensor as the origin sensor. Origin detection is adjusted so that the stage stops at 0 degrees when homing is performed in the MINI system at half step. compatible -phase stepping motor 0.7A/phase (Oriental Motor Co., Ltd.) Motor Part Number TS664N ( 4mm) PK4V-NB ( 4mm) Step Angle Control Output ー DC4V Output Logic ー Current Consumption 0mA(Max 0mA) Control Output Contact type Mechanical Output Logic NORMAL OPEN NORMAL OPEN Compatible Driver / Controller Compatible Driver SG-M, SG-M, SG-4MSC, MC-74PCL Control System Compatible Controller GSC-0, GSC-0, SHOT-, GIP-0, SHOT-0GS, SHOT-04GS, HIT-M HIT-S, PGC-04 G096

8 Catalog Code W908 Outline Drawing VSGSP-YAW Hexagonal socket head cap screw M4 0 screws VSGSP-0YAW Hexagon socket head cap screw M6 0 screws 74. (7) 0.0 ( ) Teflon cable m M depth. 4-M4 depth. P.C.D. -M6 depth 8 Motor cable m PTFE lead wire AWG6 bare leads cable m PTFE lead wire equivalent to AWG M4 0.7 depth 8 P.C.D.00 4-M4 0.7 depth mounting hole 8 counterbore mounting hole counterbore Wiring of The vacuum compatible stepping motor TS664N used for vacuum stages has five bare lead wires. For wiring, they correspond to the motor lead colors shown in the wiring diagrams of driver or cable as follows. (The motor leads shown in the connection diagrams of driver or cable indicate wiring of stepping motors used for normal stages.) Corresponding connection stage motor lead color White 4 Yellow compatible stage motor connection diagram E phase Yellow White color shown in driver or cable connection diagram Orange Green -phase stepping motor connection diagram (SGSP series) E phase Limit (high vacuum compatible switch) Green Orange Linear stage series normal close specification Compatible Controllers / Drivers and Controller GSC-0 [ axis] GSC-0 [ axes] SHOT- [ axes] GIP-0 [ axis] SHOT-0GS [ axes] SHOT-04GS [4 axes] HIT-M/HIT-S [8 axes] PGC-04 [4 axes] G098 G0 Driver Drivers DRP-CA * Stage VSGSP-YAW VSGSP-0YAW mm mm Rotation stage series normal open specification Note Note Set the controller of vacuum compatible motorized rotation stages to normal open. MINI-CA-SG G00 G0 * Make the cable into bare wire specification after purchase. WEB international@sigma-koki.com TEL FAX G097